Vibration rectification error correction device, sensor module, and vibration rectification error correction method

Abstract

To provide a vibration rectification error correction device that can improve resolution for correcting a vibration rectification error.SOLUTION: A vibration rectification error correction device comprises: a first filter that operates in synchronization with a measured signal; and a second filter that operates in synchronization with a reference signal. The first filter generates a third signal based on a first signal having a first group delay amount and a second signal having a second group delay amount, and the second filter receives input of a signal based on the third signal and outputs a fourth signal. A first vibration rectification error included in a fifth signal output from the second filter if the first signal is input to the second filter, and a second vibration rectification error included in a sixth signal output from the second filter if the second signal is input to the second filter have different polarities.SELECTED DRAWING: Figure 20

Description

[Technical field]

[0001] The present invention relates to a vibration rectification error correction device, a sensor module and a vibration rectification error correction method. [Background technology]

[0002] Patent Document 1 describes a sensor module configured to operate a first low-pass filter in synchronization with an output signal from a physical quantity sensor, and perform resampling in synchronization with a reference clock in a subsequent second low-pass filter. With this sensor module, nonlinearity occurs in the input and output of the entire low-pass filter, and by adjusting the vibration rectification error caused by this nonlinearity to be in antiphase with the vibration rectification error caused by the cantilever resonance of the physical quantity sensor, the vibration rectification errors cancel each other out, and the vibration rectification error appearing in the final output can be reduced. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-190897 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the sensor module described in Patent Document 1, the vibration rectification error caused by the nonlinearity of the input and output of the entire low-pass filter is corrected by adjusting the group delay of the first low-pass filter. However, since the adjustment resolution of the group delay of the first low-pass filter is determined by the period of the output signal of the physical quantity sensor, there is also a limit to the correction resolution of the vibration rectification error. [Means for solving the problem]

[0005] One aspect of the vibration rectification error correction device according to the present invention is to a reference signal generating circuit that outputs a reference signal; a frequency delta-sigma modulation circuit that uses a signal under test to frequency delta-sigma modulate the reference signal to generate a frequency delta-sigma modulated signal; a first filter that operates in synchronization with the signal under test; a second filter that operates in synchronization with the reference signal; The first filter comprises: generating a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal; the second filter receives a signal based on the third signal and outputs a fourth signal; A first vibration rectification error contained in a fifth signal output from the second filter when the first signal is input to the second filter has a different polarity from a second vibration rectification error contained in a sixth signal output from the second filter when the second signal is input to the second filter.

[0006] One aspect of the sensor module according to the present invention is An embodiment of the vibration rectification error correction device; A physical quantity sensor, The measured signal is a signal based on an output signal of the physical quantity sensor.

[0007] One aspect of the vibration rectification error correction method according to the present invention includes: frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; performing a first filtering process on a signal based on the frequency delta-sigma modulated signal in synchronization with the signal under test to generate a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal; and performing a second filtering process on a signal based on the third signal in synchronization with the reference signal to generate a fourth signal; A first vibration rectification error contained in a fifth signal generated when the first signal is subjected to the second filter processing has a different polarity from a second vibration rectification error contained in a sixth signal generated when the second signal is subjected to the second filter processing. [Brief description of the drawings]

[0008] [Figure 1] FIG. [Diagram 2] FIG. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] 5 is a cross-sectional view taken along line P1-P1 in FIG. 4 . [Figure 6] FIG. 4 is an explanatory diagram of the operation of a physical quantity sensor. [Figure 7] FIG. 4 is an explanatory diagram of the operation of a physical quantity sensor. [Figure 8] Functional block diagram of the sensor module. [Figure 9] 4A and 4B are diagrams for explaining the principle of how vibration rectification error occurs due to output waveform distortion. [Figure 10] FIG. 13 is a graph showing the nonlinearity between the applied acceleration and the reciprocal count value. [Figure 11] 5 is a diagram showing nonlinearity between an applied acceleration and an oscillation frequency of a physical quantity sensor. [Figure 12] 5 is a diagram showing nonlinearity between the oscillation frequency and the reciprocal count value of a physical quantity sensor. [Figure 13] FIG. 4 is a diagram showing a configuration example of a frequency ratio measuring circuit. [Figure 14] FIG. 4 is a diagram showing an example of the configuration of a first low-pass filter. [Figure 15] FIG. 4 is a diagram showing an example of the configuration of a second low-pass filter. [Figure 16]13 is a diagram for explaining that it is possible to adjust vibration rectification errors caused by nonlinearity of the input / output of a frequency ratio measurement circuit. FIG. [Figure 17] FIG. 13 is a graph showing the dependence of vibration rectification error contained in a measured value on the number of taps. [Figure 18] An enlarged view of a portion of Figure 17. [Figure 19] 11A and 11B are diagrams for explaining an improvement in the correction resolution of a vibration rectification error. [Figure 20] FIG. 4 is a diagram showing an example of the configuration of a first low-pass filter that improves the correction resolution of vibration rectification errors. [Figure 21] 13 is a diagram showing another example of the configuration of the first low-pass filter having improved correction resolution for vibration rectification errors. [Figure 22] FIG. 11 is a graph showing measurement results of vibration rectification error. [Diagram 23] FIG. 11 is a flowchart showing an example of a procedure of a vibration rectification error correction method. [Figure 24] FIG. 11 is a diagram showing an example of the configuration of a first low-pass filter in the second embodiment. [Diagram 25] FIG. 11 is a diagram showing another example of the configuration of the first low-pass filter in the second embodiment. [Figure 26] 13A to 13C are diagrams for explaining a method of correcting a vibration rectification error in the second embodiment. [Figure 27] FIG. 11 is a flowchart showing an example of a procedure of a vibration rectification error correction method according to the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. Furthermore, not all of the configurations described below are necessarily essential components of the present invention.

[0010] 1. First embodiment 1-1.Sensor module structure First, an example of the structure of the sensor module of this embodiment will be described.

[0011] 1 is a perspective view of the sensor module 1 as viewed from the mounting surface side to which the sensor module 1 is fixed. In the following explanation, the direction along the long side of the rectangular sensor module 1 in a plan view is defined as the X-axis direction, the direction perpendicular to the X-axis direction in a plan view is defined as the Y-axis direction, and the thickness direction of the sensor module 1 is defined as the Z-axis direction.

[0012] The sensor module 1 has a rectangular parallelepiped shape in plan view, with long sides along the X-axis direction and short sides along the Y-axis direction perpendicular to the X-axis direction. Screw holes 103 are formed in two locations near the ends of one long side and in one location in the center of the other long side. Fixing screws are passed through each of the three screw holes 103, and the sensor module is used in a fixed state to the mounting surface of a mounting object, such as a building, a bulletin board, or various types of equipment.

[0013] 1, an opening 121 is provided on the surface of the sensor module 1 as viewed from the side of the surface on which the sensor module 1 is to be attached. A plug-type connector 116 is disposed inside the opening 121. The connector 116 has a plurality of pins arranged in two rows, and in each row, the plurality of pins are aligned in the Y-axis direction. A socket-type connector (not shown) is connected to the body to which the sensor module 1 is to be attached, and electrical signals such as a drive voltage for the sensor module 1 and detection data are transmitted and received.

[0014] Fig. 2 is an exploded perspective view of the sensor module 1. As shown in Fig. 2, the sensor module 1 is composed of a container 101, a lid 102, a sealing member 141, a circuit board 115, etc. In detail, the sensor module 1 is configured such that the circuit board 115 is attached inside the container 101 with a fixing member 130 interposed therebetween, and the opening of the container 101 is covered with the lid 102 via the sealing member 141 having cushioning properties.

[0015] The container 101 is made of, for example, aluminum and is a container for housing the circuit board 115, which is formed into a box shape having an internal space. The outer shape of the container 101 is a rectangular parallelepiped with a substantially rectangular planar shape, similar to the overall shape of the sensor module 1 described above, and fixing protrusions 104 are provided at two locations near both ends of one long side and at one location in the center of the other long side. Each of the fixing protrusions 104 has a screw hole 103 formed therein.

[0016] The container 101 has a box-like shape with a rectangular parallelepiped outer shape and an opening on one side. The inside of the container 101 is an internal space surrounded by a bottom wall 112 and a side wall 111. In other words, the container 101 is box-like with one side facing the bottom wall 112 as an opening surface 123, and the outer edge of the circuit board 115 is arranged along the inner surface 122 of the side wall 111, and the lid 102 is fixed to cover the opening. Fixing protrusions 104 are erected on the opening surface 123 at two locations near both ends of one long side of the container 101 and at one location in the center of the other long side. The upper surface of the fixing protrusion 104, i.e., the surface exposed in the -Z direction, protrudes from the upper surface of the container 101.

[0017] Furthermore, in the internal space of the container 101, a protrusion 129 is provided at the center of one long side opposite the fixed protrusion 104 provided at the center of the other long side, protruding from the side wall 111 to the internal space from the bottom wall 112 to the opening surface 123. A female screw 174 is provided on the upper surface of the protrusion 129. The lid 102 is fixed to the container 101 via the seal member 141 by a screw 172 inserted into the through hole 176 and the female screw 174. The protrusion 129 Fixing projection 104 is provided at a position facing narrowed portions 133 and 134 of circuit board 115, which will be described later.

[0018] In the internal space of container 101, first pedestal 127 and second pedestal 125 are provided, which protrude from bottom wall 112 toward opening surface 123 in a stepped manner. First pedestal 127 is provided at a position facing an arrangement area of ​​plug-type connector 116 attached to circuit board 115. First pedestal 127 is provided with opening 121 shown in FIG. 1, into which plug-type connector 116 is inserted. First pedestal 127 functions as a pedestal for fixing circuit board 115 to container 101.

[0019] Second base 125 is located on the opposite side of first base 127 with respect to fixing protrusion 104 and protrusion 129 located in the center of the long side, and is provided in the vicinity of fixing protrusion 104 and protrusion 129. Second base 125 functions as a base for fixing circuit board 115 to container 101 on the opposite side of first base 127 with respect to fixing protrusion 104 and protrusion 129.

[0020] In the above description, the outer shape of the container 101 is a box shape with a substantially rectangular parallelepiped planar shape and no lid, but the planar shape of the outer shape of the container 101 is not limited to this, and the planar shape of the outer shape of the container 101 may be a square, a hexagon, an octagon, or the like. In addition, in the planar shape of the outer shape of the container 101, the corners of the vertices of a polygon may be chamfered, and further, any of the sides may be a planar shape formed by a curve. In addition, the planar shape of the inside of the container 101 is not limited to the above-mentioned shape, and may be another shape. Furthermore, the planar shapes of the outer shape and the inside of the container 101 may or may not be similar to each other.

[0021] The circuit board 115 is a multi-layer board in which a plurality of through holes and the like are formed, and for example, a glass epoxy board, a composite board, a ceramic board, or the like is used.

[0022] The circuit board 115 has a second surface 115r on the bottom wall 112 side, and a first surface 115f which is the opposite surface to the second surface 115r. The vibration rectification error correction device 2, the three physical quantity sensors 200, and other electronic components (not shown) are mounted on the first surface 115f of the circuit board 115. In addition, a connector 116 is mounted on the second surface 115r of the circuit board 115. Although not shown and their description are omitted, the circuit board 115 may be provided with other wiring, terminal electrodes, and the like.

[0023] Circuit board 115 includes constricted portions 133, 134 where the outer edge of circuit board 115 is constricted, in a central portion in the X-axis direction along the long side of container 101 in a plan view. Constricted portions 133, 134 are provided on both sides of circuit board 115 in the Y-axis direction in a plan view, and are constricted from the outer edge of circuit board 115 toward the center. In addition, constricted portions 133, 134 are provided opposite protrusion 129 and fixed protrusion 104 of container 101.

[0024] The circuit board 115 is inserted into the internal space of the container 101 with the second surface 115r facing the first pedestal 127 and the second pedestal 125. The circuit board 115 is supported in the container 101 by the first pedestal 127 and the second pedestal 125.

[0025] Each of the three physical quantity sensors 200 is a frequency change type sensor in which the frequency of the output signal changes depending on the applied physical quantity. Of the three physical quantity sensors 200, the physical quantity sensor 200X detects the physical quantity in the X-axis direction, the physical quantity sensor 200Y detects the physical quantity in the Y-axis direction, and the physical quantity sensor 200Z detects the physical quantity in the Z-axis direction. Specifically, the physical quantity sensor 200X is erected so that the front and back surfaces of the package face the X-axis direction and with its side surface facing the first surface 115f of the circuit board 115. Then, the physical quantity sensor 200 X outputs a signal corresponding to the detected physical quantity in the X-axis direction. The physical quantity sensor 200Y is erected so that the front and back surfaces of the package face the Y-axis direction and the side surface faces the first surface 115f of the circuit board 115. The physical quantity sensor 200Y outputs a signal corresponding to the detected physical quantity in the Y-axis direction. The physical quantity sensor 200Z is installed so that the front and back surfaces of the package face the Z-axis direction, that is, so that the front and back surfaces of the package face the first surface 115f of the circuit board 115. The physical quantity sensor 200Z outputs a signal corresponding to the detected physical quantity in the Z-axis direction.

[0026] The vibration rectification error correction device 2 is electrically connected to the physical quantity sensors 200X, 200Y, and 200Z via wiring and electronic components (not shown). In addition, the vibration rectification error correction device 2 generates physical quantity data in which the vibration rectification error has been reduced, based on the output signals of the physical quantity sensors 200X, 200Y, and 200Z.

[0027] 1-2. Structure of physical quantity sensor Next, an example of the structure of the physical quantity sensor 200 will be described, taking as an example a case where the physical quantity sensor 200 is an acceleration sensor. The three physical quantity sensors 200 shown in Fig. 2, that is, the physical quantity sensors 200X, 200Y, and 200Z, may have the same structure.

[0028] FIG. 3 is a perspective view of the physical quantity sensor 200, FIG. 4 is a plan view of the physical quantity sensor 200, and FIG. 5 is a cross-sectional view taken along line P1-P1 in FIG. 4. Note that FIGS. 3 to 5 only show the inside of the package of the physical quantity sensor 200. For convenience of explanation, each of the following figures shows an x-axis, a y-axis, and a z-axis as three mutually orthogonal axes. In the following explanation, for convenience of explanation, a plan view as seen from the z-axis direction, which is the thickness direction of the extensions 38a and 38b, is also simply referred to as a "plan view."

[0029] The physical quantity sensor 200 has a substrate portion 5 and four weights 50, 52, 54, and 56, as shown in FIGS.

[0030] The substrate portion 5 comprises a plate-shaped base 10 having main surfaces 10a, 10b extending in the x-axis direction and facing opposite each other, a joint portion 12 extending from the base 10 in the y-axis direction, a movable portion 13 extending in a rectangular shape from the joint portion 12 in the opposite direction to the base 10, two support portions 30a, 30b extending along the outer edge of the movable portion 13 from both ends of the base 10 in the x-axis direction, and a physical quantity detection element 40 spanning from the base 10 to the movable portion 13 and joined to the base 10 and the movable portion 13.

[0031] In the two support parts 30a, 30b, the support part 30a extends along the y-axis across a gap 32a from the movable part 13 and is provided with a joint part 36a that fixes the support part 30a and an extension part 38a that extends along the x-axis across a gap 32c from the movable part 13. In other words, the support part 30a extends along the y-axis across a gap 32a from the movable part 13 and is provided with the extension part 38a that extends along the x-axis across a gap 32c from the movable part 13, and the joint part 36a is provided at the part of the support part 30a where the extension part 38a extends. Furthermore, the support portion 30b extends along the y-axis across a gap 32b from the movable portion 13, and is provided with a joint portion 36b that fixes the support portion 30b, and an extension portion 38b that extends along the x-axis across a gap 32c from the movable portion 13. In other words, the support portion 30b extends along the y-axis across a gap 32b from the movable portion 13, and is provided with an extension portion 38b that extends along the x-axis across a gap 32c from the movable portion 13, and the joint portion 36b is provided at the portion of the support portion 30b where the extension portion 38b extends.

[0032] The joints 36a and 36b provided on the support parts 30a and 30b are for mounting the substrate part 5 of the physical quantity sensor 200 on an external member such as a package. 10, joint portion 12, movable portion 13, support portions 30a, 30b and extension portions 38a, 38b may be integrally formed.

[0033] Movable part 13 is surrounded by support parts 30a, 30b and base part 10, and is connected to base part 10 via joint part 12 and supported in a cantilevered state. Movable part 13 has main surfaces 13a, 13b facing opposite each other, a side surface 13c along support part 30a, and a side surface 13d along support part 30b. Main surface 13a faces the same side as main surface 10a of base part 10, and main surface 13b faces the same side as main surface 10b of base part 10.

[0034] The joint part 12 is provided between the base part 10 and the movable part 13, and connects the base part 10 and the movable part 13. The thickness of the joint part 12 is formed to be thinner than the thicknesses of the base part 10 and the movable part 13. The joint part 12 has grooves 12a and 12b. These grooves 12a and 12b are formed along the X-axis, and when the movable part 13 is displaced relative to the base part 10, the grooves 12a and 12b of the joint part 12 function as fulcrums, i.e., intermediate hinges. Such joint part 12 and movable part 13 function as a cantilever.

[0035] Further, a physical amount detection element 40 is fixed to a surface extending from the principal surface 10a of the base 10 to the principal surface 13a of the movable part 13 by a bonding agent 60. The physical amount detection element 40 is fixed at two positions, namely, the central positions in the x-axis direction of each of the principal surfaces 10a and 13a.

[0036] The physical quantity detection element 40 has a base part 42a fixed to the main surface 10a of the base 10 with a bonding agent 60, a base part 42b fixed to the main surface 13a of the movable part 13 with a bonding agent 60, and vibrating beams 41a, 41b located between the base parts 42a and 42b for detecting a physical quantity. In this case, the vibrating beams 41a, 41b are shaped like rectangular columns, and when an AC voltage drive signal is applied to excitation electrodes (not shown) provided on the vibrating beams 41a, 41b, they vibrate in a bending manner along the x-axis so as to move away from or close to each other. In other words, the physical quantity detection element 40 is a tuning fork-type vibrator element.

[0037] Lead electrodes 44a and 44b are provided on the base portion 42a of the physical quantity detection element 40. These lead electrodes 44a and 44b are electrically connected to unillustrated excitation electrodes provided on the vibrating beams 41a and 41b. The lead electrodes 44a and 44b are electrically connected to connection terminals 46a and 46b provided on the main surface 10a of the base 10 by metal wires 48. The connection terminals 46a and 46b are electrically connected to external connection terminals 49a and 49b by wiring not shown. The external connection terminals 49a and 49b are provided on the main surface 10b side of the base 10, which is the surface on which the physical quantity sensor 200 is mounted in a package or the like, so as to overlap the package joint 34 in a plan view. The package joint 34 is for mounting the substrate 5 of the physical quantity sensor 200 on an external member such as a package, and is provided at two locations at both ends of the base 10 in the x-axis direction.

[0038] The physical quantity detection element 40 is formed by patterning a quartz substrate cut at a predetermined angle from a raw quartz stone or the like, using photolithography and etching techniques. In this case, it is desirable that the physical quantity detection element 40 is made of the same material as the base 10 and the movable part 13, in order to reduce the difference in linear expansion coefficient between the physical quantity detection element 40 and the base 10 and the movable part 13.

[0039] Weights 50, 52, 54, and 56 are rectangular in plan view and are provided on movable part 13. Weights 50 and 52 are fixed to main surface 13a of movable part 13 with bonding members 62, and weights 54 and 56 are fixed to main surface 13b of movable part 13 with bonding members 62. Here, weight 50 fixed to main surface 13a has one side, which is an edge of the rectangle, aligned with side surface 13c of movable part 13 in plan view, and another side aligned with side surface 31d of extension part 38a. The weight 50 is arranged on the side of the side 13c of the movable part 13 by aligning the direction with the extension part 38a in a plan view, so that the weight 50 and the extension part 38a overlap in a plan view. Similarly, the weight 52 fixed to the main surface 13a is arranged such that one side of the rectangle matches the direction of the side 13d of the movable part 13 in a plan view, and the other side matches the direction of the side 31e of the extension part 38b, so that the weight 52 is arranged on the side of the side 13d of the movable part 13 and the extension part 38b overlap in a plan view. The weight 54 fixed to the main surface 13b is arranged such that one side of the rectangle matches the direction of the side 13c of the movable part 13 in a plan view, and the other side matches the direction of the side 31d of the extension part 38a, so that the weight 54 is arranged on the side of the side 13c of the movable part 13 and the extension part 38a overlap in a plan view. Similarly, weight 56 ​​fixed to main surface 13b is arranged so that, in a planar view, one side of the rectangle is oriented in the same direction as side surface 13d of movable part 13, and the other side is oriented in the same direction as side surface 31e of extension part 38b, such that weight 56 ​​is positioned on the side of side surface 13d of movable part 13 and weight 56 ​​and extension part 38b overlap in a planar view.

[0040] The weights 50, 52, 54, and 56 thus arranged are arranged symmetrically with respect to the physical quantity detection element 40, and the weights 54, 56 are arranged so as to overlap the weights 50, 52, respectively, in a plan view. These weights 50, 52, 54, and 56 are fixed to the movable part 13 by joint members 62 provided at the center of gravity positions of the weights 50, 52, 54, and 56, respectively. Furthermore, since the weights 50, 54 and the extension part 38a and the weights 52, 56 and the extension part 38b overlap each other in a plan view, when an excessive physical quantity is applied, the weights 50, 52, 54, and 56 come into contact with the extension parts 38a and 38b, and the amount of displacement of the weights 50, 52, 54, and 56 can be suppressed.

[0041] The joining member 62 is made of a silicone resin-based thermosetting adhesive or the like. It is applied to two locations on each of the main surface 13a and the main surface 13b of the movable part 13, and after the weights 50, 52, 54, and 56 are placed thereon, it is cured by heating to fix the weights 50, 52, 54, and 56 to the movable part 13. The joining surfaces of the weights 50, 52, 54, and 56 facing the main surface 13a and the main surface 13b of the movable part 13 are rough surfaces. As a result, when the weights 50, 52, 54, and 56 are fixed to the movable part 13, the joining area of ​​the joining surfaces is increased, and the joining strength can be improved.

[0042] 6, when acceleration in the +Z direction indicated by the arrow α1 is applied to the physical quantity sensor 200 configured as above, a force acts on the movable part 13 in the -Z direction, and the movable part 13 is displaced in the -Z direction with the joint part 12 as a fulcrum. As a result, a force is applied to the physical quantity detection element 40 in a direction in which the base part 42a and the base part 42b move away from each other along the Y axis, and tensile stress is generated in the vibrating beams 41a and 41b. Therefore, the frequency at which the vibrating beams 41a and 41b vibrate becomes higher.

[0043] 7, when acceleration in the -Z direction indicated by the arrow α2 is applied to the physical quantity sensor 200, a force acts on the movable part 13 in the +Z direction, and the movable part 13 is displaced in the +Z direction with the joint part 12 as a fulcrum. As a result, a force is applied to the physical quantity detection element 40 in a direction in which the base part 42a and the base part 42b approach each other along the Y axis, and compressive stress is generated in the vibrating beams 41a and 41b. Therefore, the frequency at which the vibrating beams 41a and 41b vibrate decreases.

[0044] When the frequency at which the vibrating beams 41a, 41b vibrate changes in response to the acceleration, the frequency of the signal output from the external connection terminals 49a, 49b of the physical quantity sensor 200 changes. The sensor module 1 can calculate the value of the acceleration applied to the physical quantity sensor 200 based on the change in frequency of the output signal from the physical quantity sensor 200.

[0045] In order to improve the accuracy of detecting acceleration, which is a physical quantity, it is desirable that joint 12 connecting base 10, which is the fixed part, and movable part 13 be made of quartz, which is a material with a high Q value. For example, base 10, supports 30a and 30b, and movable part 13 may be formed from a quartz plate, and grooves 12a and 12b of joint 12 may be formed by half-etching from both sides of the quartz plate.

[0046] 1-3. Functional configuration of the sensor module 8 is a functional block diagram of the sensor module 1. As described above, the sensor module 1 includes the physical quantity sensors 200X, 200Y, and 200Z, and the vibration rectification error correction device 2.

[0047] The vibration rectification error correction device 2 includes oscillation circuits 201X, 201Y, and 201Z, frequency ratio measuring circuits 202X, 202Y, and 202Z, a microcontrol unit 210, a storage unit 220, and an interface circuit 230.

[0048] The oscillator circuit 201X amplifies the output signal of the physical quantity sensor 200X to generate a drive signal, and applies the drive signal to the physical quantity sensor 200X. The drive signal causes the vibrating beams 41a and 41b of the physical quantity sensor 200X to vibrate at a frequency corresponding to the acceleration in the X-axis direction, and a signal of the frequency is output from the physical quantity sensor 200X. The oscillator circuit 201X also outputs a measured signal SIN_X, which is a square wave signal obtained by amplifying the output signal of the physical quantity sensor 200X, to the frequency ratio measurement circuit 202X. The measured signal SIN_X is a signal based on the output signal of the physical quantity sensor 200X.

[0049] Similarly, the oscillator circuit 201Y amplifies the output signal of the physical quantity sensor 200Y to generate a drive signal, and applies the drive signal to the physical quantity sensor 200Y. The drive signal causes the vibrating beams 41a and 41b of the physical quantity sensor 200Y to vibrate at a frequency corresponding to the acceleration in the Y-axis direction, and a signal of the frequency is output from the physical quantity sensor 200Y. In addition, the oscillator circuit 201Y outputs a measured signal SIN_Y, which is a square wave signal obtained by amplifying the output signal of the physical quantity sensor 200Y, to the frequency ratio measurement circuit 202Y. The measured signal SIN_Y is a signal based on the output signal of the physical quantity sensor 200Y.

[0050] Similarly, the oscillator circuit 201Z amplifies the output signal of the physical quantity sensor 200Z to generate a drive signal, and applies the drive signal to the physical quantity sensor 200Z. The drive signal causes the vibrating beams 41a and 41b of the physical quantity sensor 200Z to vibrate at a frequency corresponding to the acceleration in the Z-axis direction, and a signal of the frequency is output from the physical quantity sensor 200Z. In addition, the oscillator circuit 201Z outputs a measured signal SIN_Z, which is a square wave signal obtained by amplifying the output signal of the physical quantity sensor 200Z, to the frequency ratio measurement circuit 202Z. The measured signal SIN_Z is a signal based on the output signal of the physical quantity sensor 200Z.

[0051] The reference signal generating circuit 203 generates and outputs a reference signal CLK having a constant frequency. In this embodiment, the frequency of the reference signal CLK is higher than the frequencies of the signals under measurement SIN_X, SIN_Y, and SIN_Z. It is preferable that the reference signal CLK has high frequency accuracy, and the reference signal generating circuit 203 may be, for example, a temperature compensated crystal oscillator.

[0052] The frequency ratio measurement circuit 202X counts the number of pulses of the reference signal CLK included in a predetermined period of the signal under measurement SIN_X, which is a signal based on the signal output from the oscillation circuit 201X, and outputs a count value CNT_X. The count value CNT_X is a reciprocal count value corresponding to the frequency ratio between the signal under measurement SIN_X and the reference signal CLK.

[0053] The frequency ratio measuring circuit 202Y measures the signal under test SIN_Y output from the oscillator circuit 201Y. The counter counts the number of pulses of the reference signal CLK included in a predetermined period of the measured signal SIN_Y and outputs a count value CNT_Y. The count value CNT_Y is a reciprocal count value that corresponds to the frequency ratio between the measured signal SIN_Y and the reference signal CLK.

[0054] The frequency ratio measuring circuit 202Z counts the number of pulses of the reference signal CLK included in a predetermined period of the signal under measurement SIN_Z output from the oscillation circuit 201Z, and outputs a count value CNT_Z. The count value CNT_Z is a reciprocal count value corresponding to the frequency ratio between the signal under measurement SIN_Z and the reference signal CLK.

[0055] The storage unit 220 stores programs and data, and may include volatile memory such as SRAM, DRAM, etc. SRAM is an abbreviation for Static Random Access Memory, and DRAM is an abbreviation for Dynamic Random Access Memory.

[0056] The storage unit 220 may also include non-volatile memory such as semiconductor memory such as EEPROM or flash memory, magnetic storage device such as hard disk device, optical storage device such as optical disk device, etc. EEPROM is an abbreviation for Electrically Erasable Programmable Read Only Memory.

[0057] The micro control unit 210 operates in synchronization with the reference signal CLK, and performs a predetermined calculation process and control process by executing a program (not shown) stored in the storage unit 220. For example, the micro control unit 210 measures the physical quantities detected by the physical quantity sensors 200X, 200Y, and 200Z based on the count value CNT_X output from the frequency ratio measurement circuit 202X, the count value CNT_Y output from the frequency ratio measurement circuit 202Y, and the count value CNT_Z output from the frequency ratio measurement circuit 202Z. Specifically, the micro control unit 210 converts the count value CNT_X, the count value CNT_Y, and the count value CNT_Z into a measurement value of the physical quantity in the X-axis direction, a measurement value of the physical quantity in the Y-axis direction, and a measurement value of the physical quantity in the Z-axis direction, respectively. For example, the storage unit 220 may store table information that specifies the correspondence between the count value and the measurement value of the physical quantity, or information on a relational expression between the count value and the measurement value of the physical quantity, and the micro control unit 210 may convert each count value into a measurement value of the physical quantity by referring to the information.

[0058] The micro control unit 210 may transmit the measured values ​​of the physical quantity in the X-axis direction, the Y-axis direction, and the Z-axis direction to the processing device 3 via the interface circuit 230. Alternatively, the micro control unit 210 may write the measured values ​​of the physical quantity in the X-axis direction, the Y-axis direction, and the Z-axis direction to the storage unit 220, and the processing device 3 may read out each measured value via the interface circuit 230.

[0059] Since the frequency ratio measurement circuits 202X, 202Y, and 202Z have the same configuration and operation, hereinafter, any one of the frequency ratio measurement circuits 202X, 202Y, and 202Z will be referred to as the frequency ratio measurement circuit 202. Also, any one of the signals under measurement SIN_X, SIN_Y, and SIN_Z input to the frequency ratio measurement circuit 202 will be referred to as the signal under measurement SIN, and any one of the count values ​​CNT_X, CNT_Y, and CNT_Z output from the frequency ratio measurement circuit 202 will be referred to as the count value CNT.

[0060] 1-4. Vibration rectification error The vibration rectification error corresponds to a DC offset that occurs during rectification due to the nonlinearity of the response of the sensor module 1 to vibration, and is observed as an abnormal shift in the output offset of the sensor module 1. In applications where the DC output of the sensor module 1 is the measurement target as it is, such as an inclinometer using the sensor module 1, this can be a cause of serious measurement errors. The main mechanisms that cause vibration rectification errors include: [1] asymmetric rails, [2] nonlinearity of the scale factor, and [3] structural resonance of the physical quantity sensor 200.

[0061] [1] Vibration rectification error caused by asymmetric rails When the sensitivity axis of the physical quantity sensor 200 is in the direction of gravitational acceleration, the measurement value of the sensor module 1 includes a gravitational acceleration of 1g=9.8m / s 2 For example, if the dynamic range of the physical quantity sensor 200 is 2 g, then vibrations of up to 1 g can be measured without clipping. If vibrations exceeding 1 g are applied in this state, clipping occurs asymmetrically, and the measured value will contain a vibration rectification error.

[0062] For example, when the dynamic range is as wide as 15 g, clipping rarely becomes a problem in normal usage environments. On the other hand, the physical quantity sensor 200 has a built-in physical protection mechanism for the purpose of preventing damage to the physical quantity detection element 40, and when the vibration level exceeds a certain threshold, the protection mechanism is activated, causing clipping. To prevent this, it is necessary to devise an attachment for installing the sensor module 1 and take measures such as damping vibrations in the resonant frequency band.

[0063] [2] Vibration rectification error caused by nonlinearity of the scale factor Fig. 9 is a diagram for explaining the principle of vibration rectification error caused by output waveform distortion. In Fig. 9, the solid line shows a sine wave vibration waveform and a waveform obtained by smoothing the vibration waveform, and the dashed line shows a vibration waveform that is asymmetric above and below the vibration center and a waveform obtained by smoothing the vibration waveform. The smoothed waveform shown by the solid line is 0, while the smoothed waveform shown by the dashed line is a negative value, and an offset occurs during smoothing.

[0064] The physical quantity sensor 200 is a frequency change type sensor, and the count value CNT corresponding to the frequency ratio between the measured signal SIN and the reference signal CLK is a reciprocal count value. The relationship between the acceleration applied to the physical quantity sensor 200 and the reciprocal count value is nonlinear. The dashed line in FIG. 10 indicates the nonlinearity between the applied acceleration and the reciprocal count value. The dashed line in FIG. 11 indicates the nonlinearity between the applied acceleration and the oscillation frequency of the physical quantity sensor 200. The dashed line in FIG. 12 indicates the nonlinearity between the oscillation frequency of the physical quantity sensor 200 and the reciprocal count value. The dashed line in FIG. 10 is obtained by combining the dashed line in FIG. 11 and the dashed line in FIG. 12.

[0065] Here, by correcting the relationship between the oscillation frequency and the reciprocal count value as shown by the solid line in Fig. 12, the relationship between the acceleration and the reciprocal count value can be made closer to linear as shown by the solid line in Fig. 10. Specifically, the above-mentioned micro control unit 210 can correct the count value CNT using the correction function expressed by equation (1).

[0066]

number

[0067] In formula (1), c is the count value before correction corresponding to the dashed line in Fig. 10, Y is the count value after correction corresponding to the solid line in Fig. 10, and d is a coefficient that determines the degree of correction shown in Fig. 12. For example, the coefficient d is stored in the storage unit 220 or is set by the processing device 3.

[0068] [3] Vibration rectification error caused by cantilever resonance The physical quantity sensor 200 detects acceleration using a cantilever with a weight attached to it. The deflection of the cantilever is transmitted to the physical quantity detection element 40, which is a double-ended tuning fork vibrator, to change the tension acting on the physical quantity detection element 40, thereby changing the oscillation frequency. Therefore, the physical quantity detection element 40 has a resonance frequency due to the structure of the cantilever, and when the cantilever resonance is excited, an inherent vibration rectification error occurs. The cantilever resonance has a frequency higher than the frequency band corresponding to the range of detectable acceleration, and the vibration component is removed by the low-pass filter inside the vibration rectification error correction device 2, but a vibration rectification error occurs as a bias offset reflecting the asymmetry of the vibration. As the amplitude of the cantilever resonance increases, the asymmetry of the output waveform of the physical quantity sensor 200 increases, and the vibration rectification error also increases. Therefore, it is an important issue to reduce the vibration rectification error caused by the cantilever resonance.

[0069] In this embodiment, the frequency ratio measurement circuit 202 is a reciprocal counting circuit that counts the number of pulses of the reference signal CLK included in a predetermined period of the signal SIN under test, and the timing of acquiring this count value is synchronized with the signal SIN under test. On the other hand, the count value CNT output from the frequency ratio measurement circuit 202 needs to be synchronized with a divided signal of the reference signal CLK, and resampling is required because the timing of acquiring the count value of the number of pulses of the reference signal CLK is not synchronized with the divided signal of the reference signal CLK. In the frequency ratio measurement circuit 202, by devising a configuration required for resampling, it is possible to generate a count value CNT in which the vibration rectification error caused by the cantilever resonance is corrected.

[0070] 1-5. Configuration of frequency ratio measurement circuit The frequency ratio measurement circuit 202 measures the frequency ratio between the signal under test SIN and the reference signal CLK by a reciprocal counting method. Fig. 13 is a diagram showing an example of the configuration of the frequency ratio measurement circuit 202. As shown in Fig. 13, the frequency ratio measurement circuit 202 includes a frequency delta-sigma modulation circuit 300, a first low-pass filter 310, a latch circuit 320, and a second low-pass filter 330.

[0071] The frequency delta-sigma modulation circuit 300 uses the signal under test SIN to frequency-delta-sigma modulate the reference signal CLK and generate a frequency delta-sigma modulated signal. The frequency delta-sigma modulation circuit 300 includes a counter 301, a latch circuit 302, a latch circuit 303, and a subtractor 304. The counter 301 counts the rising edges of the reference signal CLK and outputs a count value CT0. The latch circuit 302 latches and holds the count value CT0 in synchronization with the rising edges of the signal under test SIN. The latch circuit 303 latches and holds the count value held by the latch circuit 302 in synchronization with the rising edges of the signal under test SIN. The subtractor 304 subtracts the count value held by the latch circuit 303 from the count value held by the latch circuit 302 to generate and output a count value CT1. This count value CT1 is the frequency delta-sigma modulated signal generated by the frequency delta-sigma modulation circuit 300.

[0072] This frequency delta sigma modulation circuit 300 is also called a first-order frequency delta sigma modulator, and latches the count value of the number of pulses of the reference signal CLK twice by the signal under test SIN, and sequentially holds the count value of the number of pulses of the reference signal CLK using the rising edge of the signal under test SIN as a trigger. Here, the frequency delta sigma modulation circuit 300 has been described as performing the latch operation at the rising edge of the signal under test SIN, but the latch operation may be performed at the falling edge, or at both the rising edge and the falling edge. In addition, the subtractor 304 calculates the difference between the two count values ​​held in the latch circuits 302 and 303, and outputs the increment of the count value of the number of pulses of the reference signal CLK observed during one period of the signal under test SIN over time without any dead period. When the frequency of the signal under test SIN is fx and the frequency of the reference signal CLK is fc, the frequency ratio is fc / fx. The frequency delta sigma modulation circuit 300 uses a frequency divider that indicates the frequency ratio. It outputs a Ruta-Sigma modulated signal as a digital signal train.

[0073] The first low-pass filter 310 operates in synchronization with the signal under test SIN, and outputs a count value CT2 in which noise components contained in the count value CT1, which is the frequency delta-sigma modulated signal output from the frequency delta-sigma modulation circuit 300, have been removed or reduced. In Fig. 13, the first low-pass filter 310 is provided immediately after the frequency delta-sigma modulation circuit 300, but it is sufficient that the first low-pass filter 310 is provided on the signal path from the output of the frequency delta-sigma modulation circuit 300 to the input of the second low-pass filter 330. The first low-pass filter 310 is an example of a "first filter".

[0074] The latch circuit 320 latches the count value CT2 output from the first low-pass filter 310 in synchronization with the rising edge of the reference signal CLK, and holds it as a count value CT3.

[0075] The second low-pass filter 330 operates in synchronization with the reference signal CLK, and outputs a count value from which noise components contained in the count value CT3 held by the latch circuit 320 have been removed or reduced. The count value output from the second low-pass filter 330 is output as the count value CNT to the micro control unit 210. The second low-pass filter 330 is an example of a "second filter."

[0076] Fig. 14 is a diagram showing an example of the configuration of first low-pass filter 310. In the example of Fig. 14, first low-pass filter 310 has delay element 311, integrator 312, integrator 313, decimator 314, delay element 315, differentiator 316, delay element 317, and differentiator 318. Each section of first low-pass filter 310 operates in synchronization with signal under measurement SIN.

[0077] The delay element 311 outputs a count value obtained by delaying the count value CT1 in synchronization with the signal under test SIN. The number of taps of the delay element 311 is na. For example, the delay element 311 is realized by a shift register in which na registers are connected in series.

[0078] The integrator 312 outputs a count value obtained by integrating the count values ​​output from the delay element 311 in synchronization with the signal under test SIN.

[0079] The integrator 313 outputs a count value obtained by integrating the count value output from the integrator 312 in synchronization with the signal under test SIN.

[0080] Decimator 314 outputs a count value obtained by decimating the count value output from integrator 313 to a rate of 1 / R in synchronization with signal under test SIN.

[0081] The delay element 315 outputs a count value obtained by delaying the count value output from the decimator 314 in synchronization with the signal under test SIN. The number of taps of the delay element 315 is n1. For example, the delay element 315 is realized by a shift register in which n1 registers are connected in series.

[0082] The differentiator 316 outputs a count value obtained by subtracting the count value output from the delay element 315 from the count value output from the decimator 314 .

[0083] The delay element 317 outputs a count value obtained by delaying the count value output from the differentiator 316 in synchronization with the signal under test SIN. The number of taps of the delay element 317 is n2. For example, the delay element 317 is a shift register in which n2 registers are connected in series. This is achieved by:

[0084] The differentiator 318 subtracts the count value output from the delay element 317 from the count value output from the differentiator 316 to output a count value CT2.

[0085] The tap numbers n1 and n2 and the decimation ratio R are fixed, and the tap number na is variable. For example, the tap number na is stored in the storage unit 220 or is set by the processing device 3.

[0086] The first low-pass filter 310 thus configured functions as a CIC filter with a group delay amount that is variable according to the number of taps na. CIC is an abbreviation for Cascaded Integrator Comb.

[0087] Fig. 15 is a diagram showing an example of the configuration of the second low-pass filter 330. In the example of Fig. 15, the second low-pass filter 330 has an integrator 331, a delay element 332, a differentiator 333, and a decimator 334. Each component of the second low-pass filter 330 operates in synchronization with the reference signal CLK.

[0088] The integrator 331 outputs a count value obtained by integrating the count value CT3 in synchronization with the reference signal CLK.

[0089] The delay element 332 outputs a count value obtained by delaying the count value output from the integrator 331 in synchronization with the reference signal CLK. The number of taps of the delay element 332 is n3. For example, the delay element 332 is realized by a shift register in which n3 registers are connected in series.

[0090] The differentiator 333 outputs a count value obtained by subtracting the count value output from the delay element 332 from the count value output from the integrator 331 .

[0091] The decimator 334 outputs a count value CNT obtained by decimating the count value output from the differentiator 333 at a rate of 1 / n3 in synchronization with the reference signal CLK.

[0092] The number of taps and the decimation ratio, n3, are fixed.

[0093] The second low-pass filter 330 thus configured accumulates the count value CT3 while resampling it with the reference signal CLK, and therefore functions as a weighted moving average filter that weights the count value CT3 by its duration.

[0094] In this way, the first low-pass filter 310 operates in synchronization with the signal under test SIN, and the second low-pass filter 330 performs resampling in synchronization with the reference signal CLK, so that nonlinearity occurs in the input and output of the frequency ratio measurement circuit 202. Therefore, the count value CNT output from the frequency ratio measurement circuit 202 contains a vibration rectification error caused by this nonlinearity. Then, by adjusting the number of taps na of the delay element 311 of the first low-pass filter 310, this vibration rectification error can be adjusted.

[0095] Fig. 16 is a diagram for explaining that it is possible to adjust the vibration rectification error caused by the nonlinearity of the input / output of the frequency ratio measurement circuit 202. Fig. 16 shows an example in which the period of the signal under measurement SIN is longer than that of the reference signal CLK, and the update period of the count value CNT is longer than that of the signal under measurement SIN, and the horizontal axis corresponds to the passage of time. In Fig. 16, the timing of the rising edge of the reference signal CLK is indicated by a short vertical line. Also, for the count values ​​CT1 and CT2, the timing at which the values ​​change is indicated by short vertical lines. Note that Fig. 16 uses simplified numerical values ​​for ease of understanding in order to explain the vibration rectification error adjustment mechanism. Also, although the count value CT2 is not determined until the count value CT1 is determined, it is described as if the count value CT2 is determined before the count value CT1 is determined, but the actual calculation of the count value CT2 is performed after the count value CT1 is determined.

[0096] In Fig. 16, (A) is an example in which the period of the signal SIN under test is constant, and (B), (C), and (D) are examples in which the signal SIN under test is frequency modulated. In (B), (C), and (D), the group delay of the first low-pass filter 310 is different from each other. For simplicity, the period of the reference signal CLK and the period of the signal SIN under test are assumed to be a simple integer ratio, and the count value CT1 input to the first low-pass filter 310 is output as it is with a constant group delay. The second low-pass filter 330 integrates the count value CT2 output from the first low-pass filter 310 with the latched count value CT3 in synchronization with the reference signal CLK, and outputs the integrated value for 16 times as the count value CNT.

[0097] In the example of (A), the count value CT2 is always 4, and the count value CNT is 4×16=64. In the example of (B), the measured signal SIN is frequency modulated, and the group delay of the first low-pass filter 310 is set to 0, so the count value CT2 repeats 5, 5, 3, 3. Since weighting is performed by time during the accumulation, the count value CNT becomes 5×10+3×6=68, which is larger than the count value CNT of (A). In the example of (C), the count value CT2 repeats 5, 5, 3, 3, as in the example of (B), but a group delay occurs in the first low-pass filter 310. As a result of weighting by time during the accumulation, the count value CNT becomes 5×8+3×8=64, which is the same value as the count value CNT of (A). In the example of (D), the count value CT2 repeats 5, 5, 3, 3, as in the examples of (B) and (C), but compared to the example of (C), this example shows a case in which the group delay caused by the first low-pass filter 310 is large. In the example of (D), the count value CNT is 5×6+3×10=60, which is smaller than the count value CNT of (A).

[0098] 16, it can be qualitatively understood that the vibration rectification error caused by the nonlinearity of the input / output of the frequency ratio measurement circuit 202 varies depending on the group delay of the first low-pass filter 310. By adjusting the group delay of the first low-pass filter 310 so that the vibration rectification error caused by the nonlinearity of the input / output of the frequency ratio measurement circuit 202 is in antiphase with the vibration rectification error caused by the cantilever resonance, it becomes possible to cancel each other's vibration rectification errors. The group delay of the first low-pass filter 310 can be adjusted by setting the number of taps na of the delay element 311.

[0099] Fig. 17 is a diagram showing the dependency of the vibration rectification error included in the measurement value by the vibration rectification error correction device 2 on the tap number na. In Fig. 17, the horizontal axis is the tap number na, and the vertical axis is the vibration rectification error. Note that VRE on the vertical axis is an abbreviation for Vibration Rectification Error. Fig. 17 shows that if the tap number na is appropriately set, it is possible to correct the vibration rectification error and bring it close to zero.

[0100] However, in the first low-pass filter 310 of the configuration shown in Fig. 14, the operation of the delay element 311 is synchronized with the signal under test SIN, so the adjustment resolution of the group delay of the first low-pass filter 310 by setting the number of taps na becomes lower as the period of the signal under test SIN becomes longer. Therefore, as shown in Fig. 18, there is a certain limit to the correction resolution of the vibration rectification error. Fig. 18 is an enlarged view of a part of Fig. 17, and shows that the vibration rectification error is closest to 0 when the number of taps na is set to 13, but cannot be made any closer to 0.

[0101] Therefore, in this embodiment, the first low-pass filter 310 is improved in order to improve the correction resolution of the vibration rectification error. The improved first low-pass filter 310 generates a count value CT2, which is a third signal based on a first signal having a first group delay amount based on a frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal. Therefore, the second low-pass filter 330 receives a count value CT3, which is a signal based on the count value CT2, which is the third signal generated by the first low-pass filter 310, and outputs a count value CNT, which is a fourth signal.

[0102] Here, the fourth signal output from the second low-pass filter 330 is denoted as Lout(t). In addition, if the first signal is input to the second low-pass filter 330, the fifth signal output from the second low-pass filter 330 is denoted as Lout(t). na (t), and if the second signal is input to the second low-pass filter 330, the sixth signal output from the second low-pass filter 330 is Lout nb Let na and nb be the tap numbers of the two delay elements of the first low-pass filter 310. In this embodiment, na and nb are information that can specify the first group delay amount of the first signal and the second group delay amount of the second signal. In this case, for example, as shown in equation (2), the fourth signal Lout(t) is the tap number of the fifth signal Lout na (t) and the sixth signal Lout nbThe signal is obtained by weighting (t) by positive real numbers a and b and adding them together.

[0103]

number

[0104] That is, the fourth signal Lout(t) is na (t) and a positive real number a, and the sixth signal Lout nb It may be a signal obtained by dividing the sum of the product of (t) and a positive real number b by the sum of real numbers a and b.

[0105] One of the real numbers a and b may be 1 and the other may be a value other than 1. Also, the real numbers a and b may be a value other than 1.

[0106] In this embodiment, the fifth signal Lout na The first vibration rectification error VRE included in (t) na and the sixth signal Lout nb The second vibration rectification error VRE included in (t) nb Therefore, as shown in equation (2), the fifth signal Lout na (t) and the sixth signal Lout nb By weighting (t) with positive real numbers a and b, respectively, and adding them, a fourth signal Lout(t) in which the vibration rectification error has been corrected is obtained.

[0107] Fig. 19 is a diagram plotting seven types of vibration rectification errors contained in the fourth signal Lout(t) when the real numbers a and b are natural numbers that satisfy a+b=8 in equation (2) and na=13 and nb=14. As shown in Fig. 19, equation (2) can improve the correction resolution of the vibration rectification error.

[0108] The ratio of real number a to real number b is the second vibration rectification error VRE nb Absolute value of and the first vibration rectification error VRE na19, the vibration rectification error included in the fourth signal Lout(t) can be set to zero.

[0109] In formula (2), the division by (a+b) has a scaling effect, but it has no effect from the viewpoint of obtaining the vibration rectification error correction effect. Therefore, the division by (a+b) may be omitted as in formula (3).

[0110]

number

[0111] That is, the fourth signal Lout(t) is na (t) and a positive real number a, and the sixth signal Lout nb It may be a signal obtained by adding the product of (t) and a positive real number b.

[0112] Fig. 20 is a diagram showing an example of the configuration of the first low-pass filter 310 for obtaining the fourth signal Lout(t) that satisfies the formula (3). In Fig. 20, the same components as in Fig. 14 are denoted by the same reference numerals.

[0113] 20, the first low-pass filter 310 includes an integrator 312, an integrator 313, a decimator 314, a delay element 315, a differentiator 316, a delay element 317, a differentiator 318, a delay element 341, a delay element 342, and an adder 343. Each section of the first low-pass filter 310 operates in synchronization with the signal under test SIN.

[0114] The delay element 341 outputs a count value obtained by multiplying the count value CT1, which is a delta-sigma modulated signal, by a in synchronization with the signal under test SIN and delaying it. The number of taps of the delay element 341 is na. For example, the delay element 341 is realized by a multiplier and a shift register in which na registers are connected in series.

[0115] The delay element 342 outputs a count value obtained by multiplying the count value CT1, which is a delta-sigma modulated signal, by b in synchronization with the signal under test SIN. The number of taps of the delay element 342 is nb. For example, the delay element 342 is realized by a multiplier and a shift register in which nb registers are connected in series.

[0116] The adder 343 outputs a count value obtained by adding the count value output from the delay element 341 and the count value output from the delay element 342 .

[0117] The integrator 312 outputs a count value obtained by integrating the count value output from the adder 343 in synchronization with the signal under test SIN.

[0118] The operations of the decimator 314, the delay element 315, the differentiator 316, the delay element 317, and the differentiator 318 are the same as those in Fig. 14, and therefore the description thereof will be omitted. The count value CT2 output from the differentiator 318 corresponds to the third signal.

[0119] Fig. 21 is a diagram showing another example of the configuration of the first low-pass filter 310 for obtaining the fourth signal Lout(t) that satisfies the formula (3). In Fig. 21, the same components as those in Fig. 20 are denoted by the same reference numerals.

[0120] 21, first low-pass filter 310 includes integrator 312, integrator 313, decimator 314, delay element 315, differentiator 316, delay element 317, differentiator 318, delay element 341, delay element 342, and adder 343. Each section of first low-pass filter 310 operates in synchronization with signal under test SIN.

[0121] The operations of integrator 312, integrator 313, decimator 314, delay element 315, differentiator 316, delay element 317 and differentiator 318 are the same as those in FIG. 14, and therefore will not be described.

[0122] The delay element 341 is synchronous with the signal under test SIN and outputs the counter output from the differentiator 318. The delay element 341 outputs a count value obtained by multiplying the count value by a and delaying it. The number of taps of the delay element 341 is na. For example, the delay element 341 is realized by a multiplier and a shift register in which na registers are connected in series.

[0123] The delay element 342 outputs a count value obtained by multiplying the count value output from the differentiator 318 by b and delaying it in synchronization with the signal under test SIN. The number of taps of the delay element 342 is nb. For example, the delay element 341 is realized by a multiplier and a shift register in which nb registers are connected in series.

[0124] The adder 343 outputs a count value CT2 obtained by adding the count value output from the delay element 341 and the count value output from the delay element 342. The count value CT2 output from the adder 343 corresponds to a third signal.

[0125] For example, in the manufacturing process of the sensor module 1, the inspection device acquires the vibration rectification error of the measurement value while sequentially changing the tap numbers na and nb while keeping them at the same value through the interface circuit 230, and obtains the relationship between the tap numbers and the vibration rectification error. Then, the inspection device calculates the tap numbers na and nb and the real numbers a and b that reduce the vibration rectification error of the measurement value based on the relationship between the tap numbers and the vibration rectification error, and writes the calculated tap numbers na and nb and the real numbers a and b into the non-volatile memory of the storage unit 220 through the interface circuit 230. In this way, the tap numbers na and nb and the real numbers a and b are stored in the storage unit 220 of the vibration rectification error correction device 2 before the sensor module 1 starts measurement. The tap numbers na and nb and the real numbers a and b stored in the storage unit 220 are read out by the micro control unit 210 and set in the first low-pass filter 310.

[0126] Fig. 22 shows the results of measuring the vibration rectification error that occurs when random vibrations are applied to the physical quantity sensor 200 to excite the cantilever resonance. In Fig. 22, the dotted line indicates the vibration rectification error that occurs when no correction is performed. The dashed-dotted line indicates the vibration rectification error that occurs when the first low-pass filter 310 has the configuration shown in Fig. 14. The solid line indicates the vibration rectification error that occurs when the first low-pass filter 310 has the configuration shown in Fig. 20 or Fig. 21. As shown by the solid line in Fig. 22, it can be seen that the vibration rectification error is significantly reduced by configuring the first low-pass filter 310 with the configuration shown in Fig. 20 or Fig. 21.

[0127] 1-6. Vibration rectification error correction method FIG. 23 is a flowchart showing an example of the procedure of the vibration rectification error correcting method performed by the vibration rectification error correcting device 2.

[0128] As shown in FIG. 23, first, in step S10, the vibration rectification error correction device 2 uses the signal under test SIN to frequency delta-sigma modulate the reference signal CLK to generate a frequency delta-sigma modulated signal.

[0129] Next, in step S20, the vibration rectification error correction device 2 performs a first filter processing on a signal based on the frequency delta-sigma modulated signal generated in step S10 in synchronization with the measured signal SIN, to generate a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal.

[0130] Next, in step S30, the vibration rectification error correction device 2 performs a second filter process on the signal based on the third signal generated in step S20 in synchronization with the reference signal CLK to generate a fourth signal Lout(t). Here, if the second filter process is performed on the first signal, the fifth signal Lout na The first vibration rectification included in (t) Error VRE naand a sixth signal Lout generated when the second filter process is performed on the second signal. nb The second vibration rectification error contained in (t) has a different polarity.

[0131] In step S40, the vibration rectification error correction device 2 repeats steps S10, S20, and S30 until the measurement is completed.

[0132] 1-7.Effects As described above, in the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the first low-pass filter 310 operates in synchronization with the measured signal SIN, and the second low-pass filter 330 operates in synchronization with the reference signal CLK different from the measured signal SIN. na (t) and the sixth signal Lout nb (t), nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the fifth signal Lout (t). na (t) and the nonlinearity of the relationship between the frequency delta-sigma modulated signal and the sixth signal Lout nb (t) is different from the nonlinearity of the relationship with the fifth signal Lout (t). Therefore, according to the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, na The first vibration rectification error VRE included in (t) na and the sixth signal Lout nb The second vibration rectification error VRE included in (t) nb By using the first signal and the second signal in which the first group delay amount and the second group delay amount are set to appropriate values ​​so that the polarities of the first signal and the second signal are different, the correction resolution of the vibration rectification error is improved, and the vibration rectification error contained in the fourth signal Lout(t) can be effectively reduced. As a result, the vibration rectification error of the measured value can be effectively reduced, and the measurement accuracy of the physical quantity is improved.

[0133] In addition, according to the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the fourth signal Lout(t) having a reduced number of bits is obtained by scaling using equation (2), thereby simplifying the processing based on the fourth signal Lout(t).

[0134] In addition, according to the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the scaling process of the fourth signal Lout(t) is omitted as shown in equation (3), so that the effect of reducing the vibration rectification error contained in the fourth signal Lout(t) is not lost, and the correction process of the vibration rectification error is simplified and the circuit area of ​​the first low-pass filter 310 is reduced.

[0135] According to the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, if one of the real numbers a and b in the formula (2) or the formula (3) is 1 and the other is other than 1, the fifth signal Lout na (t) and the real number a or the sixth signal Lout nb Since the product of (t) and the real number b is omitted, the process of correcting the vibration rectification error is simplified and the circuit area of ​​the first low-pass filter 310 is reduced.

[0136] In addition, according to the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the effect of reducing the vibration rectification error contained in the fourth signal Lout(t) can be improved by setting the real number a and the real number b in equation (2) or equation (3) to appropriate values ​​other than 1.

[0137] In addition, according to the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the ratio between the real number a and the real number b in the formula (2) or (3) is calculated as the second vibration rectification error VRE nb Absolute value of and the first vibration rectification error VRE na By setting the ratio to the absolute value of Lout(t), the vibration rectification error contained in the fourth signal Lout(t) can be made substantially zero.

[0138] Furthermore, according to the sensor module 1 of the first embodiment, in the vibration rectification error correction device 2, the tap numbers na, nb and the real numbers a, b are stored in the non-volatile memory of the memory unit 220, so that the vibration rectification error contained in the fourth signal Lout(t) can be reduced without receiving information on the first group delay amount and the second group delay amount from the processing device 3.

[0139] 2. Second embodiment Hereinafter, for the sensor module of the second embodiment, components similar to those of the first embodiment will be given the same symbols, explanations that overlap with the first embodiment will be omitted or simplified, and mainly the differences from the first embodiment will be described.

[0140] The structure and functional configuration of the sensor module 1 of the second embodiment are the same as those of the first embodiment, and therefore illustration and description thereof will be omitted. In the sensor module 1 of the second embodiment, the configuration of the first low-pass filter 310 is different from that of the first embodiment.

[0141] 20 or 21 to obtain the fourth signal Lout(t) that satisfies equation (3), a multiplier is required for the delay element 341 to multiply the count value by the real number a, and a multiplier is required for the delay element 342 to multiply the count value by the real number b. This increases the circuit area of ​​the first low-pass filter 310.

[0142] Therefore, in the second embodiment, for example, as shown in equation (4), the fifth signal Lout na (t) and the sixth signal Lout nb The first low-pass filter 310 is configured to obtain a fourth signal Lout(t) obtained by adding together the first and second signals Lout(t) without weighting them with the real numbers a and b.

[0143]

number

[0144] Equation (4) is an equation obtained by substituting 1 for the real numbers a and b in equation (2). That is, the fourth signal Lout(t) is the fifth signal Lout na (t) and a positive real number a, and the sixth signal Lout nb It may be a signal obtained by dividing the sum of the product of (t) and a positive real number b by the sum of real numbers a and b, where real number a is 1 and real number b is 1.

[0145] In the formula (4), the division by 2 has a scaling effect, but has no effect from the viewpoint of obtaining a correction effect for the vibration rectification error. Therefore, the division by 2 may be omitted as in the formula (5).

[0146]

number

[0147] Equation (5) is an equation obtained by substituting 1 for the real numbers a and b in equation (3). That is, the fourth signal Lout(t) is the fifth signal Lout na (t) and a positive real number a, and the sixth signal Lout nb It may be a signal obtained by adding the product of (t) and a positive real number b, where the real number a is 1 and the real number b is 1.

[0148] Fig. 24 is a diagram showing an example of the configuration of the first low-pass filter 310 for obtaining the fourth signal Lout(t) that satisfies the formula (5). In Fig. 24, the same components as those in Fig. 14, Fig. 20, or Fig. 21 are denoted by the same reference numerals.

[0149] 24, the first low-pass filter 310 includes an integrator 312, an integrator 313, a decimator 314, a delay element 315, a differentiator 316, a delay element 317, a differentiator 318, an adder 343, a delay element 344, and a delay element 345. Each section of the first low-pass filter 310 operates in synchronization with the signal under test SIN.

[0150] The operations of integrator 312, integrator 313, decimator 314, delay element 315, differentiator 316, delay element 317 and differentiator 318 are the same as those in FIG. 14, and therefore will not be described.

[0151] The delay element 344 outputs a count value obtained by delaying the count value output from the differentiator 318 in synchronization with the signal under test SIN. The number of taps of the delay element 344 is na. For example, the delay element 341 is realized by a shift register in which na registers are connected in series.

[0152] The delay element 345 outputs a count value obtained by delaying the count value output from the differentiator 318 in synchronization with the signal under test SIN. The number of taps of the delay element 345 is nb. For example, the delay element 345 is realized by a shift register in which nb registers are connected in series.

[0153] The adder 343 outputs a count value CT2 obtained by adding the count value output from the delay element 344 and the count value output from the delay element 345. The count value CT2 output from the adder 343 corresponds to a third signal.

[0154] Fig. 25 is a diagram showing another example of the configuration of the first low-pass filter 310 for obtaining the fourth signal Lout(t) that satisfies the formula (5). In Fig. 25, the same components as those in Fig. 24 are denoted by the same reference numerals.

[0155] 25, first low-pass filter 310 includes integrator 312, integrator 313, decimator 314, delay element 315, differentiator 316, delay element 317, differentiator 318, delay element 341, adder 343, and delay element 346. Each section of first low-pass filter 310 operates in synchronization with signal under test SIN.

[0156] The operation of the delay element 341 is the same as in FIG. 20, and therefore the description thereof will be omitted.

[0157] The integrator 312 outputs a count value obtained by integrating the count value output from the delay element 341 in synchronization with the signal under test SIN.

[0158] The operations of the integrator 313, the decimator 314, the delay element 315, the differentiator 316, the delay element 317 and the differentiator 318 are the same as those in FIG. 14, and therefore the description thereof will be omitted.

[0159] The delay element 346 outputs a count value obtained by delaying the count value output from the differentiator 318 in synchronization with the signal under test SIN. The number of taps of the delay element 346 is na-nb. For example, the delay element 346 is realized by a shift register in which na-nb registers are connected in series.

[0160] The adder 343 outputs a count value CT2 obtained by adding the count value output from the delay element 344 and the count value output from the delay element 345. The count value CT2 output from the adder 343 corresponds to a third signal.

[0161] For example, in the manufacturing process of the sensor module 1, an inspection device The vibration rectification error of the measured value is acquired through the interface circuit 230 while successively changing the tap numbers na and nb while keeping them at the same value, and the relationship between the tap numbers and the vibration rectification error is obtained. Then, the inspection device selects the tap numbers na and nb that reduce the vibration rectification error of the measured value based on the relationship between the tap numbers and the vibration rectification error, and writes the selected tap numbers na and nb to the non-volatile memory of the storage unit 220 through the interface circuit 230. For example, when the relationship shown in FIG. 18 is obtained, na=13 and nb=14 may be selected so that the polarities of the two vibration rectification errors are different and their absolute values ​​are minimized. In this case, the vibration rectification error included in the fourth signal Lout(t) is indicated by a + symbol in FIG. 26, which is an enlarged view of a part of FIG. 18. In addition, in order to bring the vibration rectification error included in the measured value closer to 0, for example, na=10 and nb=17 may be selected so that the polarities of the two vibration rectification errors are different and their absolute values ​​are approximately equal. In this case, the vibration rectification error contained in the fourth signal Lout(t) is indicated by the x symbol in FIG.

[0162] A flow chart showing an example of the procedure of the vibration rectification error correction method by the vibration rectification error correction device 2 in the second embodiment is similar to that shown in FIG. 23, and therefore illustration and description thereof will be omitted.

[0163] The sensor module 1 of the second embodiment described above provides the same effects as the sensor module 1 of the first embodiment.

[0164] Furthermore, according to the sensor module 1 of the second embodiment, in the vibration rectification error correction device 2, the fifth signal Lout is calculated by the formula (4) or (5) in which the real number a and the real number b in the formula (2) or the formula (3) are set to 1. na (t) and the real number a, and the sixth signal Lout nb Since the product of (t) and the real number b is omitted, the process of correcting the vibration rectification error is simplified and the circuit area of ​​the first low-pass filter 310 is further reduced.

[0165] 3. Third embodiment Hereinafter, for the sensor module of the third embodiment, components similar to those of the first or second embodiment are given the same symbols, explanations that overlap with the first or second embodiment are omitted or simplified, and mainly the differences from the first and second embodiments are described.

[0166] Since the sensitivity of the physical quantity sensor 200 is strongly correlated with the cantilever resonance frequency, it is possible to check for an abnormality in the sensitivity of the physical quantity sensor 200 by measuring the cantilever resonance frequency. For example, if the weight fixed to the cantilever is missing for some reason, the mass of the cantilever decreases, and the cantilever resonance frequency shifts to a higher frequency. At the same time, the sensitivity of the physical quantity sensor 200 decreases, which appears as an abnormality in the sensitivity of the physical quantity sensor 200. In addition, if the cantilever is damaged by a strong impact or the like, this also appears as an abnormality in the sensitivity of the physical quantity sensor 200, and the cantilever resonance frequency also shifts. Therefore, identifying the cantilever resonance frequency is one method for determining whether the sensitivity of the physical quantity sensor 200 is within the specifications. Generally, FFT can be used to identify the resonance frequency, but since the cantilever resonance frequency is a frequency higher than the signal band of the measurement target, and the resonance frequency component is attenuated by the first low-pass filter 310 and the second low-pass filter 330, some kind of ingenuity is required to identify the resonance frequency with high accuracy. 16, the vibration rectification error changes in a constant period with respect to the change in the group delay amount of the first low-pass filter 310. This period is determined by the cantilever resonance frequency and the frequency of the physical quantity detection element 40, and when the cantilever resonance frequency or the frequency of the physical quantity detection element 40 changes, the fluctuation period of the vibration rectification error also changes. Therefore, by measuring the period of change in the vibration rectification error with respect to the change in the group delay amount of the first low-pass filter 310, it is possible to obtain an index for determining whether the sensitivity of the physical quantity sensor 200 is within the specifications.

[0167] The structure and functional configuration of the sensor module 1 of the third embodiment are the same as those of the first or second embodiment. Since it is similar to the embodiment, the illustration and description thereof will be omitted.

[0168] In the sensor module 1 of the third embodiment, the vibration rectification error correction device 2 has a normal operation mode for measuring the frequency ratio between the above-mentioned measured signal SIN and the reference signal CLK, and an inspection mode for checking the sensitivity of the physical quantity sensor 200. The microcontrol unit 210 receives a predetermined command from the processing device 3 via the interface circuit 230, so that the vibration rectification error correction device 2 is set to the normal operation mode or the inspection mode. For example, in the manufacturing process of the sensor module 1, the inspection device may set the vibration rectification error correction device 2 to the inspection mode, and the vibration rectification error correction device 2 may check the sensitivity of the physical quantity sensor 200. The inspection device may select the sensor module 1 as a non-defective product based on the result of the sensitivity check. Alternatively, after the sensor module 1 is installed and before it is operated, the processing device 3 sets the vibration rectification error correction device 2 to the inspection mode, and the vibration rectification error correction device 2 checks the sensitivity of the physical quantity sensor 200. If there is no abnormality in the sensitivity of the physical quantity sensor 200 based on the result of the sensitivity check, the processing device 3 sets the vibration rectification error correction device 2 to a normal operation mode and operates the sensor module 1. In the normal operation mode, as in the first or second embodiment, a measurement value in which the vibration rectification error is corrected is obtained. In addition, the processing device 3 may periodically set the vibration rectification error correction device 2 to an inspection mode, so that the vibration rectification error correction device 2 performs a sensitivity check. Note that the normal operation mode is an example of a "first operation mode", and the inspection mode is an example of a "second operation mode".

[0169] In the inspection mode, the physical quantity sensor 200 is operated in a stable vibration environment, and the micro control unit 210 functions as a control circuit to acquire the group delay amount dependency of the vibration rectification error based on the output signal of the physical quantity sensor 200 while changing the group delay amount of the first low-pass filter 310. To achieve this, the micro control unit 210 first sets the cutoff frequency of the second low-pass filter 330 to a value lower than that in the normal operation mode. Specifically, the micro control unit 210 sets the cutoff frequency of the second low-pass filter 330 to, for example, several Hz so that the vibration rectification error included in the output value of the second low-pass filter 330 is emphasized. For example, the micro control unit 210 may lower the cutoff frequency by increasing the number of taps of the second low-pass filter 330 to a value higher than that in the normal operation mode.

[0170] Furthermore, the micro control unit 210 acquires the vibration rectification error of the measurement value while sequentially changing the tap numbers na, nb for the first low-pass filter 310 having the configuration shown in Figure 20, Figure 21, Figure 24 or Figure 25, and stores the tap numbers and the vibration rectification error in correspondence with each other in the memory section 220.

[0171] The processing device 3 reads out the correspondence information between the number of taps and the vibration rectification error from the storage unit 220 via the interface circuit 230, and calculates the period in which the vibration rectification error changes from a graph plotting the relationship between the number of taps and the vibration rectification error as shown in Fig. 17. Since this period is determined by the cantilever resonance frequency and the frequency of the physical quantity detection element 40, the processing device 3 can back-calculate the cantilever resonance frequency. Based on the calculated cantilever resonance frequency, the processing device 3 can determine whether the sensitivity of the physical quantity sensor 200 is within the specifications.

[0172] Alternatively, the micro control unit 210 may read out correspondence information between the number of taps and the vibration rectification error from the memory unit 220, calculate the cantilever resonance frequency based on a graph plotting the relationship between the number of taps and the vibration rectification error, and determine whether the sensitivity of the physical quantity sensor 200 is within the specifications.

[0173] FIG. 27 shows the procedure of the vibration rectification error correction method by the vibration rectification error correction device 2 of the third embodiment. FIG. 13 is a flowchart showing an example of the process.

[0174] As shown in FIG. 27, first, when the normal operation mode is set in step S110, in step S120, the vibration rectification error correction device 2 uses the measured signal SIN to frequency delta-sigma modulate the reference signal CLK to generate a frequency delta-sigma modulated signal.

[0175] Next, in step S130, the vibration rectification error correction device 2 performs a first filter processing on a signal based on the frequency delta-sigma modulated signal generated in step S120 in synchronization with the measured signal SIN, to generate a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal.

[0176] Next, in step S140, the vibration rectification error correction device 2 performs a second filter process on the signal based on the third signal generated in step S130 in synchronization with the reference signal CLK to generate a fourth signal Lout(t). Here, if the second filter process is performed on the first signal, the fifth signal Lout na The first vibration rectification error VRE included in (t) na and a sixth signal Lout generated when the second filter process is performed on the second signal. nb The second vibration rectification error contained in (t) has a different polarity.

[0177] In step S150, the vibration rectification error correction device 2 repeats steps S120, S130, and S140 until the measurement is completed. Note that steps S120, S130, and S140 are the same as steps S10, S20, and S30 in FIG.

[0178] If the normal operation mode is not set in step S110 and the inspection mode is set in step S160, the vibration rectification error correction device 2 sets the cutoff frequency of the second low-pass filter 330 lower in step S170 than in the normal operation mode.

[0179] Next, in step S180, the vibration rectification error correcting device 2 sets a predetermined value to the group delay amount of the first low-pass filter 310. Specifically, the vibration rectification error correcting device 2 sets the tap numbers na and nb to predetermined values.

[0180] Next, in step S190, the vibration rectification error correction device 2 obtains the output value of the second low-pass filter 330.

[0181] Next, in step S200, the vibration rectification error correction device 2 determines whether or not all output values ​​of the second low-pass filter 330 required for sensitivity determination have been acquired.

[0182] If the acquisition of the necessary output values ​​has not been completed, in step S210, the vibration rectification error correction device 2 changes the group delay amount of the first low-pass filter. Specifically, the vibration rectification error correction device 2 changes the tap number na or the tap numbers na, nb.

[0183] Then, once the acquisition of the necessary output values ​​has been completed, in step S220, the processing device 3 or the vibration rectification error correction device 2 calculates the period of change in the vibration rectification error using the multiple output values ​​of the second low-pass filter 330 acquired in step S190.

[0184] Next, in step S230, the processing device 3 or the vibration rectification error correction device 2 calculates the cantilever resonance frequency from the period of change in the vibration rectification error.

[0185] Next, in step S240, the processing device 3 or the vibration rectification error correction device 2 Based on the resonant frequency, it is determined whether the sensitivity of the physical quantity sensor 200 is within the specifications.

[0186] Then, in step S250, the inspection mode of the vibration rectification error correction device 2 is ended, and steps S110 and after are repeated.

[0187] According to the sensor module 1 of the third embodiment described above, similarly to the sensor module 1 of the first or second embodiment, in the vibration rectification error correction device 2, in the normal operation mode, the effect of reducing the vibration rectification error contained in the fourth signal Lout(t) is obtained.

[0188] On the other hand, in the inspection mode, the cutoff frequency of the second low-pass filter 330 is set lower than that in the normal operation mode, so that the vibration rectification error contained in the signal output from the second low-pass filter 330 is emphasized. Therefore, according to the sensor module 1 of the third embodiment, the vibration rectification error correction device 2 acquires the signal output from the second low-pass filter 330 while changing the first group delay amount and the second group delay amount in the inspection mode, thereby obtaining information indicating the relationship between the first group delay amount and the second group delay amount and the vibration rectification error. By using this information, the vibration rectification error correction device 2, the inspection device, or the processing device 3 can calculate the cantilever resonance frequency of the physical quantity sensor 200, and determine whether the sensitivity of the physical quantity sensor 200 is within the specifications based on the cantilever resonance frequency.

[0189] 4. Variations The present invention is not limited to the present embodiment, and various modifications are possible within the scope of the present invention.

[0190] For example, in each of the above embodiments, the sensor module 1 has three physical quantity sensors 200, but the number of physical quantity sensors 200 included in the sensor module 1 may be one, two, or four or more.

[0191] In addition, in each of the above embodiments, the sensor module 1 including an acceleration sensor as the physical quantity sensor 200 has been exemplified, but the sensor module 1 may include sensors such as an angular velocity sensor, a pressure sensor, an optical sensor, etc. as the physical quantity sensor 200. The sensor module 1 may include two or more types of physical quantity sensors among various physical quantity sensors such as an acceleration sensor, an angular velocity sensor, a pressure sensor, an optical sensor, etc.

[0192] In addition, in each of the above embodiments, an element configured using quartz crystal has been given as an example of the physical quantity detection element 40 of the physical quantity sensor 200, but the physical quantity detection element 40 may be configured using a piezoelectric element other than quartz crystal, or may be a capacitance type MEMS element. MEMS is an abbreviation for Micro Electro Mechanical Systems.

[0193] In addition, in each of the above embodiments, the first low-pass filter 310 is given as an example of the first filter, and the second low-pass filter 330 is given as an example of the second filter, but the first filter and the second filter may be a high-pass filter, a band-pass filter, or a smoothing filter. Similarly, the first filtering process and the second filtering process may be a high-pass filtering process, a band-pass filtering process, or a smoothing filtering process other than a low-pass filtering process.

[0194] The present invention is not limited to the present embodiment, and various modifications are possible within the scope of the present invention.

[0195] The above-described embodiment and modifications are merely examples, and the present invention is not limited to these. For example, the embodiments and modifications can be appropriately combined.

[0196] The present invention includes configurations that are substantially the same as the configurations described in the embodiments, for example, configurations with the same functions, methods, and results, or configurations with the same purpose and effects. The present invention also includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. The present invention also includes configurations that achieve the same effects as the configurations described in the embodiments, or configurations that can achieve the same purpose. The present invention also includes configurations in which publicly known technology is added to the configurations described in the embodiments.

[0197] The following can be derived from the above-described embodiment and modifications.

[0198] One aspect of the vibration rectification error correction device is a reference signal generating circuit that outputs a reference signal; a frequency delta-sigma modulation circuit that uses a signal under test to frequency delta-sigma modulate the reference signal to generate a frequency delta-sigma modulated signal; a first filter that operates in synchronization with the signal under test; a second filter that operates in synchronization with the reference signal; The first filter comprises: generating a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal; the second filter receives a signal based on the third signal and outputs a fourth signal; A first vibration rectification error contained in a fifth signal output from the second filter when the first signal is input to the second filter has a different polarity from a second vibration rectification error contained in a sixth signal output from the second filter when the second signal is input to the second filter.

[0199] In this vibration rectification error correction device, the first filter operates in synchronization with the signal to be measured, and the second filter operates in synchronization with a reference signal different from the signal to be measured, so that nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the fifth and sixth signals. Since the first group delay amount and the second group delay amount are different, the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the fifth signal differs from the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the sixth signal. Therefore, according to this vibration rectification error correction device, by using the first signal and the second signal in which the first group delay amount and the second group delay amount are set to appropriate values ​​so that the polarity of the first vibration rectification error included in the fifth signal and the second vibration rectification error included in the sixth signal are different, the correction resolution of the vibration rectification error is improved, and the vibration rectification error included in the fourth signal can be effectively reduced.

[0200] In one aspect of the vibration rectification error correction device, The fourth signal may be a signal obtained by adding a product of the fifth signal and a positive real number a and a product of the sixth signal and a positive real number b.

[0201] According to this vibration rectification error correction device, the scaling process of the fourth signal is omitted, thereby simplifying the correction process of the vibration rectification error and reducing the circuit area of ​​the first filter without compromising the effect of reducing the vibration rectification error contained in the fourth signal.

[0202] In one aspect of the vibration rectification error correction device, The fourth signal may be a signal obtained by dividing the sum of the product of the fifth signal and a positive real number a and the product of the sixth signal and a positive real number b by the sum of the real number a and the real number b.

[0203] According to this vibration rectification error correction device, the fourth signal having a reduced number of bits is obtained by scaling, so that the processing based on the fourth signal can be simplified.

[0204] In one aspect of the vibration rectification error correction device, The real number a may be 1, and the real number b may be 1.

[0205] According to this vibration rectification error correction device, the product of the fifth signal and the positive real number a and the product of the sixth signal and the positive real number b are omitted, thereby simplifying the vibration rectification error correction process and reducing the circuit area of ​​the first filter.

[0206] In one aspect of the vibration rectification error correction device, One of the real number a and the real number b may be 1, and the other may be a value other than 1.

[0207] According to this vibration rectification error correction device, the product of the fifth signal and the real number a or the product of the sixth signal and the real number b is omitted, thereby simplifying the vibration rectification error correction process and reducing the circuit area of ​​the first filter.

[0208] In one aspect of the vibration rectification error correction device, The real number a and the real number b may be other than 1.

[0209] According to this vibration rectification error correction device, by setting the real number a and the real number b to appropriate values, it is possible to improve the effect of reducing the vibration rectification error contained in the fourth signal.

[0210] In one aspect of the vibration rectification error correction device, The ratio of the real number a to the real number b may be a ratio of an absolute value of the second vibration rectification error to an absolute value of the first vibration rectification error.

[0211] According to this vibration rectification error correction device, the vibration rectification error contained in the fourth signal can be reduced to approximately zero.

[0212] One aspect of the vibration rectification error correction device is as follows: The optical fiber may further include a storage unit configured to store information capable of identifying the first group delay amount and the second group delay amount.

[0213] According to this vibration rectification error correction device, it is possible to reduce the vibration rectification error contained in the fourth signal without receiving information on the first group delay amount and the second group delay amount from an external device.

[0214] One aspect of the vibration rectification error correction device is as follows: The measurement device may have a first operation mode in which a frequency ratio between the signal under test and the reference signal is measured, and a second operation mode in which a cutoff frequency of the second filter is lower than that in the first operation mode.

[0215] In this vibration rectification error correction device, in the first operation mode, the effect of reducing the vibration rectification error contained in the fourth signal is obtained. On the other hand, in the second operation mode, since the cutoff frequency of the second filter is lower than that in the first operation mode, the vibration rectification error contained in the signal output from the second filter is reduced. The vibration rectification error correction device emphasizes the vibration rectification error contained in the signal output from the second filter in the second operation mode. Therefore, in the second operation mode, the vibration rectification error correction device obtains information indicating the relationship between the first group delay amount and the second group delay amount and the vibration rectification error by acquiring the signal output from the second filter while changing the first group delay amount and the second group delay amount. By using this information, the vibration rectification error correction device or the external device can, for example, calculate the frequency of structural resonance of the sensor that outputs the measured signal, and determine whether the sensitivity of the sensor is within the specifications based on the frequency of the structural resonance.

[0216] One aspect of the sensor module is An embodiment of the vibration rectification error correction device; A physical quantity sensor, The measured signal is a signal based on an output signal of the physical quantity sensor.

[0217] According to this sensor module, by including a vibration rectification error correction device, it is possible to effectively reduce vibration rectification errors in measurements based on the output signal of the physical quantity sensor, thereby improving the measurement accuracy of the physical quantity.

[0218] One aspect of a vibration rectification error correction method includes: frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; performing a first filtering process on a signal based on the frequency delta-sigma modulated signal in synchronization with the signal under test to generate a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal; and performing a second filtering process on a signal based on the third signal in synchronization with the reference signal to generate a fourth signal; A first vibration rectification error contained in a fifth signal generated when the first signal is subjected to the second filter processing has a different polarity from a second vibration rectification error contained in a sixth signal generated when the second signal is subjected to the second filter processing.

[0219] In this vibration rectification error correction method, the first filter process is performed in synchronization with the signal under test, and the second filter process is performed in synchronization with a reference signal different from the signal under test, so that nonlinearity occurs in the relationship between the frequency delta-sigma modulated signal and the fifth and sixth signals. Since the first group delay amount and the second group delay amount are different, the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the fifth signal differs from the degree of nonlinearity of the relationship between the frequency delta-sigma modulated signal and the sixth signal. Therefore, according to this vibration rectification error correction method, the first signal and the second signal in which the first group delay amount and the second group delay amount are set to appropriate values ​​are used so that the polarity of the first vibration rectification error included in the fifth signal and the second vibration rectification error included in the sixth signal are different, thereby improving the correction resolution of the vibration rectification error, and effectively reducing the vibration rectification error. [Explanation of symbols]

[0220] 1 ... sensor module, 2 ... vibration rectification error correction device, 3 ... processing device, 5 ... substrate portion, 10 ... base portion, 12 ... joint portion, 13 ... movable portion, 30a, 30b ... support portion, 34 ... package joint portion, 36a, 36b ... joint portion, 38a, 38b ... extension portion, 40 ... physical quantity detection element, 50, 52, 54, 56 ... weight, 62 ... joint member, 101 ... container, 102 ... lid, 103 ... screw hole, 104 ... fixing protrusion, 111 ... side wall, 112 ... bottom wall, 115 ... circuit board, 115f ... first surface, 115r ... second surface, 116 ... connector, 121 ... opening, 122 ... inner surface, 123 ... opening surface, 125 ... second base, 127 ... first base, 129 ... protrusion, 130 ... fixing member, 1 33, 134...constricted portion, 141...sealing member, 172...screw, 174...female screw, 176...through hole, 200, 200X, 200Y, 200Z...physical quantity sensor, 201X, 201Y, 201Z...oscillating circuit, 202, 202X, 202Y, 202Z...frequency ratio measuring circuit, 203...reference signal generating circuit, 210...microcontrol unit, 220...storage unit, 230...interface circuit, 300...frequency delta-sigma modulation circuit, 301...counter, 302...latch circuit, 303 ...latch circuit, 304...subtractor, 310...first low-pass filter, 311...delay element, 312...integrator, 313...integrator, 314...decimator, 315...delay element, 316...differentiator, 317...delay element, 318...differentiator, 320...latch circuit, 330...second low-pass filter, 331...integrator, 332...delay element, 333...differentiator, 334...decimator, 341...delay element, 342...delay element, 343...adder, 344...delay element, 345...delay element, 346...delay element

Claims

1. a reference signal generating circuit that outputs a reference signal; a frequency delta-sigma modulation circuit that uses a signal under test to frequency delta-sigma modulate the reference signal to generate a frequency delta-sigma modulated signal; a first filter that operates in synchronization with the signal under test; a second filter that operates in synchronization with the reference signal; The first filter comprises: generating a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal; the second filter receives a signal based on the third signal and outputs a fourth signal; a vibration rectification error correction device, wherein the first group delay amount and the second group delay amount are set so that the polarity of a first vibration rectification error contained in a fifth signal output from the second filter when the first signal is input to the second filter is different from the polarity of a second vibration rectification error contained in a sixth signal output from the second filter when the second signal is input to the second filter.

2. In claim 1, The fourth signal is a signal obtained by adding a product of the fifth signal and a positive real number a and a product of the sixth signal and a positive real number b.

3. In claim 1, The fourth signal is a signal obtained by dividing the sum of the product of the fifth signal and a positive real number a and the product of the sixth signal and a positive real number b by the sum of the real number a and the real number b.

4. In claim 2 or 3, The vibration rectification error correction device, wherein the real number a is 1 and the real number b is 1.

5. In claim 2 or 3, A vibration rectification error correction device, wherein one of the real number a and the real number b is 1 and the other is other than 1.

6. In claim 2 or 3, The vibration rectification error correction device, wherein the real number a and the real number b are other than 1.

7. In any one of claims 2 to 6, A vibration rectification error correction device, wherein the ratio of the real number a to the real number b is a ratio of an absolute value of the second vibration rectification error to an absolute value of the first vibration rectification error.

8. In any one of claims 1 to 7, A vibration rectification error correction device comprising: a storage unit that stores information capable of identifying the first group delay amount and the second group delay amount.

9. In any one of claims 1 to 8, a first operating mode for measuring a frequency ratio between the measured signal and the reference signal, and a second operating mode in which a cutoff frequency of the second filter is lower than that of the first operating mode.

10. A vibration rectification error correction device according to any one of claims 1 to 9, A physical quantity sensor, The measured signal is a signal based on an output signal of the physical quantity sensor.

11. frequency delta-sigma modulating a reference signal using the signal under test to generate a frequency delta-sigma modulated signal; performing a first filtering process on a signal based on the frequency delta-sigma modulated signal in synchronization with the signal under test to generate a third signal based on a first signal having a first group delay based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal; performing a second filtering process on a signal based on the third signal in synchronization with the reference signal to generate a fourth signal; a vibration rectification error correction method, wherein the first group delay amount and the second group delay amount are set so that a polarity of a first vibration rectification error contained in a fifth signal generated when the second filter processing is performed on the first signal is different from a polarity of a second vibration rectification error contained in a sixth signal generated when the second filter processing is performed on the second signal.

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