Three-axis acceleration sensor with compact structure

Abstract

The invention discloses a three-axis acceleration sensor with a compact structure, which comprises an X-axis direction sensitive element, a Y-axis direction sensitive element and a Z-axis direction sensitive element, and is characterized in that the X-axis direction sensitive element, the Y-axis direction sensitive element and the Z-axis direction sensitive element are jointly connected with a common mass block; the displacement of the common mass block acts on the X-axis direction sensitive element, the Y-axis direction sensitive element and the Z-axis direction sensitive element at the same time. According to the three-axis acceleration sensor, the common mass block is arranged to jointly act on the sensitive elements in the three directions, the acceleration in the three directions can be measured at the same time when the sensor is subjected to external force, acceleration measurement in the three-dimensional space direction is achieved, only one common mass block is needed, and therefore the three-axis acceleration sensor is compact in structure, small in size and light in weight; and the installation space can be saved.

Description

Technical Field

[0001] The present invention relates to the technical field of acceleration sensors, and more particularly to a three-axis acceleration sensor with a compact structure. Background Art

[0002] At present, most of the earthquake measurement acceleration vibration sensors on the market are single-axis and can only measure vibration in one direction. In order to achieve three-dimensional space measurement, it is usually necessary to install three single-axis sensors to measure vibration in the X, Y, and Z directions respectively, which increases the size and space occupied by the sensor, and has high installation and maintenance costs.

[0003] In addition, if three single-axis sensors are integrated into a product of the same size, although space can be saved, the background noise will increase significantly due to electromagnetic interference between the sensors, thereby reducing the resolution of the sensor, making it impossible to effectively monitor weaker seismic signals and only able to respond to stronger signals, limiting the effectiveness of acceleration vibration sensors in earthquake monitoring.

[0004] The above shortcomings need to be improved. Summary of the invention

[0005] In order to solve or alleviate the problems of limited monitoring functions and large size of the acceleration sensor in the above-mentioned prior art, the present invention provides a three-axis acceleration sensor with a compact structure.

[0006] The technical solution of the present invention is as follows:

[0007] A compact three-axis acceleration sensor comprises an X-axis direction sensitive element, a Y-axis direction sensitive element and a Z-axis direction sensitive element, wherein the X-axis direction sensitive element, the Y-axis direction sensitive element and the Z-axis direction sensitive element are connected to a common mass block, and the displacement of the common mass block acts on the X-axis direction sensitive element, the Y-axis direction sensitive element and the Z-axis direction sensitive element at the same time.

[0008] Furthermore, it also includes a support base, on which a connecting column is detachably connected, and the connecting column is used to ground the signal negative electrodes of the X-axis direction sensitive element, the Y-axis direction sensitive element and the Z-axis direction sensitive element.

[0009] Furthermore, the X-axis direction sensitive element, the Y-axis direction sensitive element, the Z-axis direction sensitive element and the common mass block are all annular, and the X-axis direction sensitive element, the Y-axis direction sensitive element, the Z-axis direction sensitive element and the common mass block are coaxially mounted on the connecting column, and the inner diameters of the X-axis direction sensitive element, the Y-axis direction sensitive element, the Z-axis direction sensitive element and the common mass block are all larger than the diameter of the connecting column.

[0010] Furthermore, an insulating member is provided between the X-axis direction sensitive element and the Y-axis direction sensitive element, and a Z-axis support member is provided between the Y-axis direction sensitive element and the Z-axis direction sensitive element; the insulating member and the Z-axis support member are both annular, and the inner diameters of the insulating member and the Z-axis support member are both larger than the diameter of the connecting column.

[0011] Furthermore, the X-axis direction sensitive element, the insulating member, the Y-axis direction sensitive element, and the Z-axis support member are sequentially sleeved on the outside of the connecting column from bottom to top; a limiting portion is provided on the top of the connecting column, and the limiting portion is used to press the X-axis direction sensitive element, the insulating member, the Y-axis direction sensitive element, and the Z-axis support member onto the support seat; the Z-axis direction sensitive element is sleeved on the outside of the Z-axis support member, and the Z-axis direction sensitive element and the Z-axis support member are interference fit; the common mass block is sleeved on the outside of the Z-axis direction sensitive element, and the common mass block and the Z-axis direction sensitive element are bonded.

[0012] Furthermore, the outer side of the Z-axis support member is a stepped shaft, the outer diameter of which decreases from top to bottom, the Z-axis direction sensitive element is sleeved on the upper-level stepped shaft, and a gap is arranged between the lower end face of the Z-axis direction sensitive element and the upper end face of the next-level stepped shaft; the inner side of the common mass block is a stepped hole, the aperture of which increases from top to bottom, one of the middle-level stepped holes is interference fit with the outer side of the Z-axis direction sensitive element, and the lower end face of the upper-level stepped hole abuts against the upper end face of the Z-axis direction sensitive element, and gaps are arranged between the common mass block and the support seat, the connecting column, the X-axis direction sensitive element, the insulating member, the Y-axis direction sensitive element, and the Z-axis support member.

[0013] Furthermore, a circuit board is provided on the common mass block, and the circuit board is electrically connected to the X-axis direction sensitive element, the Y-axis direction sensitive element, and the Z-axis direction sensitive element respectively.

[0014] Furthermore, a shell is provided on the outer side cover of the common mass block, a gap is provided between the shell and the common mass block, and the shell is connected to the support seat; a limiting groove is provided on the edge of the support seat, and the width of the limiting groove is equivalent to the thickness of the shell; and a connecting terminal is provided on the shell, and the connecting terminal is electrically connected to the circuit board.

[0015] Furthermore, a mounting seat is provided at the bottom of the support seat, the mounting seat is insulated and connected to the support seat, and mounting holes are provided at four corners of the mounting seat.

[0016] Furthermore, a mounting groove for placing the support seat is provided on the mounting seat, a first positioning portion is provided in the mounting groove, and a second positioning portion engaged with the first positioning portion is provided at the bottom of the support seat.

[0017] The beneficial effect of the present invention according to the above scheme is that the present invention sets a common mass block to act on the three-direction sensitive elements together, and the sensor can simultaneously measure the acceleration in three directions when subjected to external force, thereby realizing the acceleration measurement in the three-dimensional space direction, and only one common mass block is required, so that the three-axis acceleration sensor has a compact structure, small size, and light weight, which can save installation space and has broad application prospects. In addition, there is no need to set up multiple sensors to measure the acceleration in the spatial direction, which can shorten the length of the signal line, thereby reducing the background noise, improving the resolution and sensitivity of the sensor, and enabling the sensor to effectively monitor weaker seismic signals and improve the accuracy and reliability of seismic monitoring. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0020] Figure 2 It is a schematic diagram of the front structure explosion of the present invention;

[0021] Figure 3 Schematic diagram of the explosion of the bottom structure of the present invention

[0022] Figure 4 It is a schematic diagram of the internal structure of the present invention.

[0023] Among them, the figure marks in the figure are: 1. X-axis direction sensitive element; 2. Y-axis direction sensitive element; 3. Z-axis direction sensitive element; 4. Common mass block; 5. Support seat; 501. Limiting groove; 502. Second positioning part; 6. Connecting column; 601. Limiting part; 7. Insulating member; 8. Z-axis support member; 9. Circuit board; 10. Housing; 1001. Connecting terminal; 11. Mounting seat; 1101. Mounting hole; 1102. Mounting groove; 1103. First positioning part. DETAILED DESCRIPTION

[0024] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0025] It should be noted that when a component is referred to as being "fixed" or "set" or "connected" to another component, it may be located directly or indirectly on the other component. The directions or positions indicated by the terms "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the directions or positions shown in the accompanying drawings and are only for the convenience of description and should not be construed as limitations on the present technical solution. The terms "first", "second", etc. are only used for the convenience of description and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features. "Multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0026] like Figures 1 to 4 As shown, a compact three-axis acceleration sensor described in one embodiment of the present invention includes an X-axis direction sensitive element 1, a Y-axis direction sensitive element 2 and a Z-axis direction sensitive element 3. The X-axis direction sensitive element 1, the Y-axis direction sensitive element 2 and the Z-axis direction sensitive element 3 are commonly connected to a common mass block 4, and the displacement of the common mass block 4 acts on the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2 and the Z-axis direction sensitive element 3 at the same time.

[0027] It should be noted that the connection between the X-axis direction sensitive element 1 , the Y-axis direction sensitive element 2 , and the Z-axis direction sensitive element 3 and the common mass block 4 may be direct contact or indirect contact.

[0028] When the sensor is acted upon by an external force, acceleration will be generated, causing the common mass block 4 to be displaced. Since the common mass block 4 is connected to the sensitive elements in three directions, the displacement will act on the sensitive elements in three directions at the same time. The sensitive elements are shear crystals, specifically piezoelectric ceramics or quartz crystals. By utilizing the piezoelectric effect, when the acceleration sensor is vibrated, the force exerted by the common mass block 4 on the sensitive elements will also change accordingly. The sensitive elements will be deformed by force in the corresponding directions, and polarization will occur inside them, and charges of opposite signs will be generated on their two surfaces. When the external force is removed, they will return to a non-charged state, and by monitoring the changes in electrical signals, the acceleration in the three directions of the X-axis, Y-axis, and Z-axis can be measured.

[0029] In this embodiment, by setting a common mass block 4 to act on three-directional sensitive elements, the sensor can simultaneously measure the acceleration in three directions when subjected to external force, and realize the acceleration measurement in the three-dimensional space direction, and only one common mass block 4 is required, so that the three-axis acceleration sensor has a compact structure, small size, light weight, saves installation space, and has broad application prospects. In addition, it is not necessary to set up multiple sensors to measure the acceleration in the spatial direction, and the length of the signal line connected to each sensitive element can be shortened, thereby reducing the background noise, improving the resolution and sensitivity of the sensor, so that the sensor can effectively monitor weaker seismic signals and improve the accuracy and reliability of seismic monitoring.

[0030] like Figures 2 to 4 As shown, in a preferred embodiment, the above-mentioned compact three-axis acceleration sensor also includes a support base 5, on which a connecting column 6 is arranged, and the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2, the Z-axis direction sensitive element 3 and the common mass block 4 are all annular, and the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2, the Z-axis direction sensitive element 3 and the common mass block 4 are coaxially mounted on the connecting column 6.

[0031] In this embodiment, by arranging a connecting column 6 on the support seat 5, the sensitive elements in the three directions of X-axis, Y-axis and Z-axis and the common mass block 4 are coaxially installed together, which can further save space. The coaxial installation can improve the structural stability of the sensor, prevent large measurement errors caused by relative movement or misalignment of components due to loose connection, and further improve the measurement accuracy and sensitivity of the sensor.

[0032] like Figures 2 to 4 As shown, in a preferred embodiment, the connecting column 6 is detachably connected to the support seat 5. Specifically, the connecting column 6 is a bolt, and a boss is provided on the support seat 5, and the connecting column 6 is threadedly connected to the boss.

[0033] In this embodiment, the connecting column 6 is detachably connected, which is convenient for installation and disassembly, thereby facilitating production and maintenance. In addition, the threaded connection allows the common mass block 4 to shake within a certain range, and a slight vibration can act on the common mass block 4, so that it can respond more sensitively to external acceleration changes, thereby significantly improving the sensitivity of the sensor. In addition, the connecting column 6 connects the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2, and the Z-axis direction sensitive element 3 to the support seat 5, wherein the X-axis direction sensitive element 1 is directly electrically in contact with the support seat 5, and the Y-axis direction sensitive element 2 and the Z-axis direction sensitive element 3 are electrically in contact with the support seat 5 through the connecting column 6, so that the signal negative poles of the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2, and the Z-axis direction sensitive element 3 are connected to the signal ground, further reducing the volume, reducing space occupancy, shortening the length of the signal line, and reducing the background noise.

[0034] In a preferred embodiment, the inner diameters of the X-axis direction sensitive element 1 , the Y-axis direction sensitive element 2 , the Z-axis direction sensitive element 3 and the common mass block 4 are all larger than the diameter of the connecting column 6 .

[0035] In this embodiment, since the inner diameters of the sensitive elements 3 in the X-axis, Y-axis, and Z-axis directions and the common mass block 4 are all larger than the diameter of the connecting column 6, unnecessary contact between the non-working surfaces of the sensitive elements and other structures is effectively avoided, interference and error sources are reduced, and sufficient deformation space is provided for the sensitive elements, so that they can freely respond to external stimuli without hindrance, thereby ensuring measurement accuracy.

[0036] like Figures 2 to 4 As shown, in a preferred embodiment, an insulating member 7 is provided between the X-axis direction sensitive element 1 and the Y-axis direction sensitive element 2, and a Z-axis support member 8 is provided between the Y-axis direction sensitive element 2 and the Z-axis direction sensitive element 3. Both the insulating member 7 and the Z-axis support member 8 are annular, and the inner diameters of the insulating member 7 and the Z-axis support member 8 are greater than the diameter of the connecting column 6.

[0037] In this embodiment, by setting an insulating member 7 between the X-axis direction sensitive element 1 and the Y-axis direction sensitive element 2, electrical isolation between the X-axis direction sensitive element 1 and the Y-axis direction sensitive element 2 is achieved, and mutual interference between the X-axis direction sensitive element 1 and the Y-axis direction sensitive element 2 is prevented, and measurement errors caused by electrical crosstalk are avoided, thereby improving the measurement accuracy and stability of the sensor. In addition, the Y-axis direction sensitive element 2 and the Z-axis direction sensitive element 3 are in contact with the Z-axis support member 8, and the Z-axis support member 8 is in contact with the connecting column 6, so that the Y-axis direction sensitive element 2 and the Z-axis direction sensitive element 3 can be connected to the signal ground. In addition, the insulating member 7 and the Z-axis support member 8 are both annular, and their inner diameters are larger than the diameter of the connecting column 6, so that there is enough space for the sensitive elements to deform freely.

[0038] like Figure 4 As shown, in a preferred embodiment, the X-axis direction sensitive element 1, the insulating member 7, the Y-axis direction sensitive element 2, and the Z-axis support member 8 are sequentially sleeved on the outside of the connecting column 6 from bottom to top, and a limiting portion 601 is provided on the top of the connecting column 6. The limiting portion 601 is used to press the X-axis direction sensitive element 1, the insulating member 7, the Y-axis direction sensitive element 2, and the Z-axis support member 8 onto the support seat 5. The Z-axis direction sensitive element 3 is sleeved outside the Z-axis support member 8, and the Z-axis direction sensitive element 3 and the Z-axis support member 8 are interference fit. The common mass block 4 is sleeved outside the Z-axis direction sensitive element 3, and the common mass block 4 and the Z-axis direction sensitive element 3 are bonded.

[0039] In this embodiment, the limiting portion 601 (the head of the bolt) at the top of the connecting column 6 is used to press each component onto the boss of the supporting seat 5 to ensure the stability of the structure. At the same time, the Z-axis support 8 and the Z-axis direction sensitive element 3 are connected by interference fit, and the Z-axis direction sensitive element 3 is bonded to the common mass block 4. The tight assembly improves the connection strength between the components, prevents errors caused by loose connections, and improves the stability and measurement accuracy of the sensor.

[0040] like Figure 4 As shown, in a preferred embodiment, the outer side of the Z-axis support member 8 is a stepped shaft, and the outer diameter decreases from top to bottom. The Z-axis direction sensitive element 3 is sleeved on the upper step shaft, and a gap is arranged between the lower end face of the Z-axis direction sensitive element 3 and the upper end face of the next step shaft. The inner side of the common mass block 4 is a stepped hole, and the aperture increases from top to bottom. One of the middle step holes is interference fit with the outer side of the Z-axis direction sensitive element 3, and the lower end face of the upper step hole abuts against the upper end face of the Z-axis direction sensitive element 3. Gaps are arranged between the common mass block 4 and the support seat 5, the connecting column 6, the X-axis direction sensitive element 1, the insulating member 7, the Y-axis direction sensitive element 2, and the Z-axis support member 8.

[0041] In this embodiment, by setting the outer side of the Z-axis support 8 as a stepped shaft, the portion with a smaller outer diameter of the Z-axis support 8 is used to connect the Z-axis direction sensitive element 3, and the portion with a larger outer diameter can prevent the Z-axis direction sensitive element 3 from being separated from the Z-axis support 8. The gap between the Z-axis direction sensitive element 3 and the Z-axis support 8 effectively avoids direct contact between the non-working surface of the Z-axis direction sensitive element 3 and other components, reduces interference, and ensures the sensitivity of the sensor.

[0042] By setting the inner wall of the common mass block 4 into a stepped hole, the steps between the stepped holes can be used for limiting, preventing the common mass block 4 from falling and separating from the Z-axis direction sensitive element 3; in addition, the common mass block 4 does not contact other components except the Z-axis direction sensitive element 3, reducing the constraints on the common mass block 4, on the one hand, the common mass block 4 has enough activity space in all directions, so that it can act on sensitive elements in all directions to ensure the sensitivity of the sensor; on the other hand, the gap between the common mass block 4 and other components can be used for wiring, further making full use of the space and making the structure more compact. In addition, the middle part of the common mass block 4 is connected to the Z-axis direction sensitive element 3, so that part of it is above the connection and part of it is below the connection, making full use of the space, setting a larger common mass block 4 in a limited space, so that the mass of the common mass block 4 is larger, the inertia is larger, and the sensor is more sensitive.

[0043] like Figure 4As shown, in a preferred embodiment, a circuit board 9 is provided on the common mass block 4, the circuit board 9 is bonded and connected to the common mass block 4, and the circuit board 9 is electrically connected to the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2, and the Z-axis direction sensitive element 3, respectively. The support seat 5 is connected to the circuit board 9 through a line, so that the negative poles of the signals of the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2, and the Z-axis direction sensitive element 3 are connected to the circuit board 9, and the positive poles of the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2, and the Z-axis direction sensitive element 3 are respectively provided with electrode sheets, and each electrode sheet is connected to the circuit board 9 through a line, so that the positive poles of the X-axis direction sensitive element 1, the Y-axis direction sensitive element 2, and the Z-axis direction sensitive element 3 are connected to the circuit board 9. It should be noted that an insulating layer is provided on the outside of the connected line.

[0044] A shell 10 is provided on the outer side cover of the common mass block 4, a gap is provided between the shell 10 and the common mass block 4, the shell 10 is connected to the support seat 5, a limiting groove 501 is provided on the edge of the support seat 5, the width of the limiting groove 501 is equivalent to the thickness of the shell 10, and a connecting terminal 1001 is provided on the shell 10, and the connecting terminal 1001 is electrically connected to the circuit board 9.

[0045] In this embodiment, by setting the shell 10, the common mass block 4, sensitive elements and other components inside the shell 10 are protected to avoid external interference, and the gap between the shell 10 and the common mass block 4 avoids motion interference to the common mass block 4, thereby ensuring the sensitivity of the sensor. In addition, by setting the limit groove 501, the shell 10 is tightly connected to the support seat 5, and can be sealed by adhesive to ensure that the shell 10 is firmly installed and the compactness of the structure is achieved. In addition, the connection terminal 1001 provided on the shell 10 is electrically connected to the sensitive elements in the three-axis directions of X, Y, and Z through the circuit board 9, providing a reliable channel for the transmission of sensor signals, thereby ensuring the accurate collection and transmission of sensor data.

[0046] like Figures 1 to 4 As shown, in a preferred embodiment, a mounting seat 11 is provided at the bottom of the support seat 5, and the mounting seat 11 is insulated and connected to the support seat 5, and mounting holes 1101 are provided at the four corners of the mounting seat 11. Specifically, the support seat 5 is connected to the mounting seat 11 through insulating tape, and insulating sand can be doped at the connection.

[0047] The mounting seat 11 is provided with a mounting groove 1102 for placing the supporting seat 5 . A first positioning portion 1103 is provided in the mounting groove 1102 . A second positioning portion 502 engaged with the first positioning portion 1103 is provided at the bottom of the supporting seat 5 .

[0048] In this embodiment, by insulating the support seat 5 and the mounting seat 11, electrical isolation can be achieved to protect the internal circuit of the sensor from the external environment, and the mounting holes 1101 set at the four corners facilitate the fixing and installation of the entire sensor module. In addition, the first positioning portion 1103 set in the mounting groove 1102 is engaged with the second positioning portion 502 at the bottom of the support seat 5, so that the support seat 5 is accurately positioned in the mounting groove 1102, preventing the sensor from being offset or misaligned during assembly, facilitating assembly, and improving the stability and reliability of the structure. In addition, the first positioning portion 1103 and the second positioning portion 502 can orient the X-axis direction sensitive element 1 and the Y-axis direction sensitive element 2 to ensure that the polarity direction of the X-axis direction sensitive element 1 and the Y-axis direction sensitive element 2 is in a preset position, thereby ensuring the accuracy of sensor detection.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A compact three-axis acceleration sensor, characterized in that: The invention comprises an X-axis direction sensitive element, a Y-axis direction sensitive element and a Z-axis direction sensitive element, wherein the X-axis direction sensitive element, the Y-axis direction sensitive element and the Z-axis direction sensitive element are connected to a common mass block, and the displacement of the common mass block acts on the X-axis direction sensitive element, the Y-axis direction sensitive element and the Z-axis direction sensitive element at the same time.

2. A compact three-axis acceleration sensor according to claim 1, characterized in that: It also includes a support base, on which a connecting column is detachably connected, and the connecting column is used to ground the signal negative electrodes of the X-axis direction sensitive element, the Y-axis direction sensitive element, and the Z-axis direction sensitive element.

3. A compact three-axis acceleration sensor according to claim 2, characterized in that: The X-axis direction sensitive element, the Y-axis direction sensitive element, the Z-axis direction sensitive element and the common mass block are all annular, and the X-axis direction sensitive element, the Y-axis direction sensitive element, the Z-axis direction sensitive element and the common mass block are coaxially sleeved and installed on the connecting column, and the inner diameters of the X-axis direction sensitive element, the Y-axis direction sensitive element, the Z-axis direction sensitive element and the common mass block are all larger than the diameter of the connecting column.

4. A compact three-axis acceleration sensor according to claim 2, characterized in that: An insulating member is provided between the X-axis direction sensitive element and the Y-axis direction sensitive element, and a Z-axis support member is provided between the Y-axis direction sensitive element and the Z-axis direction sensitive element; The insulating member and the Z-axis support member are both annular, and the inner diameters of the insulating member and the Z-axis support member are both larger than the diameter of the connecting column.

5. A compact three-axis acceleration sensor according to claim 4, characterized in that: The X-axis direction sensitive element, the insulating element, the Y-axis direction sensitive element, and the Z-axis supporting element are sequentially sleeved on the outer side of the connecting column from bottom to top; A limiting portion is provided on the top of the connecting column, and the limiting portion is used to press the X-axis direction sensitive element, the insulating element, the Y-axis direction sensitive element, and the Z-axis support element onto the support seat; The Z-axis direction sensitive element is sleeved outside the Z-axis support member, and the Z-axis direction sensitive element and the Z-axis support member are interference-fitted; The common mass block is sleeved outside the Z-axis direction sensitive element, and the common mass block and the Z-axis direction sensitive element are bonded.

6. A compact three-axis acceleration sensor according to claim 5, characterized in that: The outer side of the Z-axis support is a stepped shaft, the outer diameter of which decreases from top to bottom, the Z-axis direction sensitive element is sleeved on the upper step shaft, and a gap is provided between the lower end surface of the Z-axis direction sensitive element and the upper end surface of the next step shaft; The inner side of the common mass block is a stepped hole, the aperture of which increases from top to bottom. One of the middle stepped holes is interference fit with the outer side of the Z-axis direction sensitive element, and the lower end face of the upper stepped hole abuts against the upper end face of the Z-axis direction sensitive element. Gaps are arranged between the common mass block and the support seat, the connecting column, the X-axis direction sensitive element, the insulating member, the Y-axis direction sensitive element, and the Z-axis support member.

7. A compact three-axis acceleration sensor according to any one of claims 2 to 6, characterized in that: A circuit board is disposed on the common mass block, and the circuit board is electrically connected to the X-axis direction sensitive element, the Y-axis direction sensitive element, and the Z-axis direction sensitive element respectively.

8. A compact three-axis acceleration sensor according to claim 7, characterized in that: The outer side cover of the common mass block is provided with a shell, a gap is provided between the shell and the common mass block, and the shell is connected to the support seat; A limiting groove is provided on the edge of the support seat, and the width of the limiting groove is equivalent to the thickness of the shell; The housing is provided with connection terminals, and the connection terminals are electrically connected to the circuit board.

9. A compact three-axis acceleration sensor according to any one of claims 2 to 6, characterized in that: A mounting seat is arranged at the bottom of the support seat, the mounting seat is insulated and connected to the support seat, and mounting holes are arranged at four corners of the mounting seat.

10. A compact three-axis acceleration sensor according to claim 9, characterized in that: The mounting seat is provided with a mounting groove for placing the support seat, the mounting groove is provided with a first positioning portion, and the bottom of the support seat is provided with a second positioning portion engaged with the first positioning portion.

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