Photoelectric conversion device, photodetection system, and moving object

Abstract

To provide a photoelectric conversion device and a light detection system that are capable of suppressing the circuit scale.SOLUTION: A light detection device includes: an avalanche photodiode; a signal generating unit that generates a detection pulse based on an output generated by incidence of photons on the avalanche photodiode; a counter that counts the detection pulses and outputs a plurality of bit count values; and a determination circuit that outputs a determination signal indicating that the count value has exceeded a predetermined threshold value, on the basis of transition of any one bit on the counter.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a photoelectric conversion device, a photodetection system, and a moving object. [Background technology]

[0002] Photon-counting type photoelectric conversion devices using avalanche photodiodes (APDs) are known. In photon-counting type photoelectric conversion devices, the number of photons that can be counted is limited to the upper count limit of a counter installed therein. The photoelectric conversion device described in Patent Document 1 executes a predetermined operation, such as stopping the avalanche current, when the count value of the counter exceeds a threshold value. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-9768 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, the photoelectric conversion device described in Patent Document 1 must detect the values ​​of all the bits of the counter in order to compare with the threshold value, which can cause a problem of large circuit size.

[0005] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a photoelectric conversion device capable of suppressing the circuit scale. [Means for solving the problem]

[0006] According to one disclosure of this specification, an avalanche photodiode, a signal generating unit that generates a detection pulse based on an output generated by incidence of a photon on the avalanche photodiode, a counter that counts the detection pulse and outputs a multi-bit count value, and a determination circuit that outputs a determination signal indicating that the count value has exceeded a predetermined threshold based on a transition of any one bit of the counter, a signal processing circuit that corrects the count value in response to the determination signal; The determination circuit determines that the count value has exceeded the threshold value when the value of any one bit of the counter has transitioned, and the counter starts counting with the least significant bit of the counter being "1" as an initial value. The signal processing circuit determines that the count value has exceeded the threshold value when all bits of the counter are "0". The present invention provides a photoelectric conversion device comprising: Effect of the Invention

[0007] According to the present invention, it is possible to provide a photoelectric conversion device capable of suppressing the circuit scale. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic diagram of a photoelectric conversion device according to a first embodiment. [Diagram 2] 3A to 3C are diagrams illustrating an example of an arrangement of a sensor substrate in the first embodiment. [Diagram 3] FIG. 2 is a diagram showing an example of an arrangement of a circuit board in the first embodiment. [Figure 4] FIG. 2 is a block diagram of a pixel circuit according to the first embodiment. [Diagram 5] 5 is a diagram illustrating the relationship between the operation of an APD and an output signal in the first embodiment. [Figure 6] 4 is a timing chart illustrating the operation of the photoelectric conversion device according to the first embodiment. [Figure 7] 4 is a timing chart illustrating the operation of the photoelectric conversion device according to the first embodiment. [Figure 8] FIG. 11 is a block diagram of a pixel circuit according to a second embodiment. [Figure 9]10 is a timing chart illustrating the operation of a photoelectric conversion device according to the second embodiment. [Figure 10] 10 is a timing chart illustrating the operation of a photoelectric conversion device according to the second embodiment. [Figure 11] FIG. 11 is a block diagram of a pixel circuit according to a third embodiment. [Figure 12] 10 is a timing chart illustrating the operation of a photoelectric conversion device according to a third embodiment. [Figure 13] 10 is a timing chart illustrating the operation of a photoelectric conversion device according to a third embodiment. [Figure 14] 10 is a timing chart illustrating the operation of a photoelectric conversion device according to a third embodiment. [Figure 15] 10 is a timing chart illustrating the operation of a photoelectric conversion device according to a third embodiment. [Figure 16] 13 is an example of the layout of a circuit board in the fourth embodiment. [Figure 17] FIG. 13 is a block diagram of a light detection system according to a fifth embodiment. [Figure 18] FIG. 13 is a block diagram of a light detection system according to a sixth embodiment. [Figure 19] FIG. 13 is a schematic diagram of an endoscopic surgery system according to a seventh embodiment. [Figure 20A] FIG. 13 is a schematic diagram of a light detection system according to an eighth embodiment. [Figure 20B] FIG. 13 is a schematic diagram of a moving body in an eighth embodiment. [Figure 21] 20 is a flowchart showing the operation of the light detection system in the eighth embodiment. [Figure 22] FIG. 13 is a diagram showing a specific example of an electronic device according to the ninth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The following describes an embodiment of the present invention with reference to the drawings. The embodiment described below is intended to embody the technical concept of the present invention, and does not limit the present invention. The size and positional relationship of the components shown in each drawing may be exaggerated to clarify the description. In the following description, the same components may be assigned the same numbers and descriptions thereof may be omitted.

[0010] [First embodiment] The configuration of the photoelectric conversion device in this embodiment will be described with reference to Figs. 1 to 4. The photoelectric conversion device has SPAD pixels including avalanche photodiodes (hereinafter, APDs). The conductivity type of the charge used as the signal charge among the charge pairs generated in the APD is called the first conductivity type. The first conductivity type refers to a conductivity type in which charges of the same polarity as the signal charge are the majority carriers. The conductivity type opposite to the first conductivity type is called the second conductivity type. In the following, an example will be described in which the signal charge is an electron, the first conductivity type is an N type, and the second conductivity type is a P type, but the signal charge may be a hole, the first conductivity type is a P type, and the second conductivity type is an N type.

[0011] In this specification, "planar view" refers to a view from a direction perpendicular to the light incident surface of a semiconductor substrate described later. "Cross section" refers to a surface in a direction perpendicular to the light incident surface of sensor substrate 1. When the light incident surface of the semiconductor layer is rough when viewed microscopically, the planar view is defined based on the light incident surface of the semiconductor layer when viewed macroscopically. "Depth direction" refers to the direction from the light incident surface (first surface) of sensor substrate 1 toward the surface (second surface) on which circuit substrate 2 is disposed.

[0012] FIG. 1 is a schematic diagram of a photoelectric conversion device in this embodiment, showing the configuration of a stacked photoelectric conversion device 3. The photoelectric conversion device 3 includes a sensor substrate (first substrate) 1 and a circuit substrate (second substrate) 2 stacked on each other, and the sensor substrate 1 and the circuit substrate 2 are electrically connected to each other. The photoelectric conversion device in this embodiment is a back-illuminated photoelectric conversion device in which light is incident from a first surface of the sensor substrate 1 and the circuit substrate 2 is disposed on a second surface of the sensor substrate 1. The sensor substrate 1 has a first semiconductor layer having a photoelectric conversion element described later and a first wiring structure. The circuit substrate 2 has a second semiconductor layer having a circuit such as a signal processing unit described later and a second wiring structure. The second semiconductor layer, the second wiring structure, the first wiring structure, and the first semiconductor layer are stacked in this order to form the photoelectric conversion device 3.

[0013] In the following, the sensor substrate 1 and the circuit substrate 2 may be diced chips, but are not limited to chips. For example, each substrate may be a wafer. Also, each substrate may be stacked in a wafer state and then diced, or may be chipped and then stacked and bonded. The sensor substrate 1 is provided with a pixel region 1a, and the circuit substrate 2 is provided with a circuit region 2a that processes signals detected by the pixel region 1a.

[0014] 2 is a diagram showing an example of the arrangement of the sensor substrate 1. A plurality of pixels 10 each include an APD 11, and are arranged in a two-dimensional array in a plan view to form a pixel region 1a.

[0015] The pixel 10 is typically a pixel for forming an image, but when used for TOF (Time of Flight), it does not necessarily have to form an image. That is, the pixel 10 may be a pixel for measuring the time and amount of light that arrives.

[0016] 3 is a diagram showing an example of the arrangement of the circuit board 2. On the circuit board 2, a signal processing unit 20, a vertical scanning circuit 201, a readout circuit 202, a horizontal scanning circuit 203, an output circuit 204, a control pulse generating circuit 205, a scanning line 206, a signal line 207, a control line 208, and a scanning line 209 are formed. A plurality of signal processing units 20 are arranged in an area overlapping the pixel area 1a in FIG. 2 in a plan view. Furthermore, the vertical scanning circuit 201, the readout circuit 202, the horizontal scanning circuit 203, the output circuit 204, and the control pulse generating circuit 205 are arranged so as to overlap an area between an end of the sensor substrate 1 and an end of the pixel area 1a in FIG. 2 in a plan view. That is, the sensor substrate 1 has a pixel region 1a and a non-pixel region arranged around the pixel region 1a, and a vertical scanning circuit 201, a readout circuit 202, a horizontal scanning circuit 203, an output circuit 204, and a control pulse generating circuit 205 are arranged in an area overlapping the non-pixel region in a planar view.

[0017] The signal processing units 20 are electrically connected via connection wiring provided for each pixel 10, and are arranged in a two-dimensional array in a planar view, similar to the pixels 10. The signal processing units 20 include a binary counter that counts photons incident on the pixels 10.

[0018] The vertical scanning circuit 201 receives a control pulse supplied from a control pulse generating circuit 205, and supplies the control pulse to a signal processing unit 20 corresponding to the pixels 10 in each row via a scanning line 206. The vertical scanning circuit 201 can be composed of logic circuits such as a shift register and an address decoder.

[0019] The readout circuit 202 reads out the count value of the digital signal from the signal processing unit 20 of each row via a signal line 207, and outputs the output signal to a signal processing circuit (signal processing device) external to the photoelectric conversion device 3 via an output circuit 204. The readout circuit 202 may also have a function of a signal processing circuit that corrects the count value, etc. The horizontal scanning circuit 203 receives a control pulse from the control pulse generating circuit 205 via a control line 208, and sequentially scans the scanning lines 209. As a result, the signal processing unit 20 of each column is selected sequentially, and the count value is read out from the memory (binary counter) of the signal processing unit 20 to the readout circuit 202.

[0020] In FIG. 2, the photoelectric conversion elements in the pixel region may be arranged one-dimensionally. The effect of the present invention can be achieved even in a configuration with one pixel, and the configuration with one pixel may also be included in the present invention. In a photoelectric conversion device having a plurality of pixels, the effect of suppressing the circuit size according to this embodiment becomes even more remarkable. It is not necessary to provide one signal processing unit 20 for each pixel 10. For example, one signal processing unit 20 may be shared by a plurality of pixels 10, and signal processing may be performed sequentially.

[0021] Fig. 4 is a block diagram of a pixel circuit 100 in this embodiment. In Fig. 4, the pixel 10 and the signal processing unit 20 are collectively represented as the pixel circuit 100. The pixel circuit 100 includes a photon detection circuit 21, a binary counter 22, a decision circuit 23, and a buffer circuit 24. The APD 11 in the photon detection circuit 21 is provided on the sensor substrate 1, and the other components are provided on the circuit substrate 2. In the following description, the values ​​of digital signals such as the count value C_OUT are represented in binary notation.

[0022] The photon detection circuit 21 includes an APD 11, a quench element 211, and a waveform shaping unit 212. The APD 11 generates charge pairs according to incident light by photoelectric conversion. A voltage VL (first voltage) is supplied to the anode of the APD 11. A voltage VH (second voltage) higher than the voltage VL supplied to the anode is supplied to the cathode of the APD 11. A reverse bias voltage is applied to the anode and cathode, and the APD 11 is in a state where avalanche multiplication is possible. When a photon is incident on the APD 11 while the reverse bias voltage is being supplied, the charge generated by the photon undergoes avalanche multiplication, generating an avalanche current.

[0023] Depending on the reverse bias voltage, the APD 11 may operate in Geiger mode or linear mode. The Geiger mode is an operation in a state where the potential difference between the anode and the cathode is greater than the breakdown voltage, and the Geiger mode is an operation in a state where the potential difference between the anode and the cathode is close to or less than the breakdown voltage. An APD operating in Geiger mode is particularly called a SPAD. As an example, the voltage VL (first voltage) may be −30 V, and the voltage VH (second voltage) may be 1 V. The APD 11 may operate in either linear mode or Geiger mode. When the APD 11 operates as a SPAD, the potential difference becomes larger than that of the APD 11 in linear mode, and the effect of withstanding voltage becomes more pronounced, so it is preferable that the APD 11 is a SPAD.

[0024] The quench element 211 is provided between a power supply line that supplies the voltage VH and the cathode of the APD 11. The quench element 211 functions as a load circuit (quench circuit) during signal multiplication by avalanche multiplication, and has a function of suppressing avalanche multiplication by suppressing the voltage supplied to the APD 11 (quench operation). The quench element 211 also has a function of returning the voltage supplied to the APD 11 to the voltage VH by flowing a current equivalent to the voltage drop caused by the quench operation (recharge operation).

[0025] The waveform shaping unit 212 functions as a signal generating unit that generates a detection pulse based on an output generated by the incidence of a photon. That is, the waveform shaping unit 212 shapes the potential change of the cathode of the APD 11 obtained at the time of photon detection, and outputs a square wave pulse signal (detection pulse) P_OUT. For example, an inverter circuit is used as the waveform shaping unit 212. Although FIG. 4 shows an example in which one inverter is used as the waveform shaping unit 212, a circuit in which multiple inverters are connected in series may be used. Also, other circuits having a waveform shaping effect may be used.

[0026] The binary counter 22 includes n T-type flip-flops 22_1 to 22_n, and is capable of holding and outputting n-bit count values ​​C_OUT[1] to [n]. Here, n is a natural number equal to or greater than 2, and the count values ​​C_OUT[1] to [n] are multiple bits. A pulse signal P_OUT is input to an input node T of the first-stage T-type flip-flop 22_1 from the waveform shaping unit 212, and a least significant bit (LSB) count value C_OUT[1] is output from an output node Q. The count value C_OUT[1] is input to an input node T of the second-stage T-type flip-flop 22_2, and a count value C_OUT[2] is output from an output node Q. Similarly, a count value C_OUT[n-1] is input to an input node T of the n-th stage T-type flip-flop 22_n, and a most significant bit (MSB) count value C_OUT[n] is output from an output node Q. A reset signal RST is input to reset nodes RST of the T-type flip-flops 22_1 to 22_n from the scanning line 206b.

[0027] The decision circuit 23 includes an RS latch circuit 231, an inverter circuit 232, and a logic gate circuit 233, and can decide whether or not the count value C_OUT exceeds a threshold value. The count value C_OUT[n] of the MSB is input to an input node S of the RS latch circuit 231, and a reset signal RST is input to a reset node R from the scanning line 206b. A signal from an output node Q of the RS latch circuit 231 is input to a first input node of the logic gate circuit 233, and an inverted value of the count value C_OUT[n] of the MSB is input to a second input node from the inverter circuit 232. An output node of the logic gate circuit 233 outputs a decision flag (decision signal) OC_OUT indicating whether or not the count value C_OUT exceeds a threshold value. In this embodiment, the decision circuit 23 transitions the decision flag OC_OUT from "0" to "1" at the timing when the count value C_OUT[n] of the MSB of the binary counter 22 transitions from "1" to "0". The MSB count value C_OUT[n] transitions from "1" to "0" when the pulse signal P_OUT is input to the binary counter 22 while the count values ​​C_OUT[1] to [n] are at the maximum value "1...1". Therefore, by monitoring the MSB count value C_OUT[n], it is possible to determine that the count value C_OUT has overflowed. Since the RS latch circuit 231 of the determination circuit 23 in this embodiment can be configured with a small number of transistors, it is possible to more effectively suppress the circuit size. If a circuit is configured to detect all bits of the count values ​​C_OUT[1] to [n], at least (n x 2) transistors are required. The effect of this embodiment becomes more pronounced as the number of bits n of the binary counter 22 increases.

[0028] The buffer circuit 24 is a tri-state buffer, and each of the buffer circuit 24 has an (N+1)-bit input node and an output node. A 1-bit decision flag OC_OUT is added to an N-bit count value C_OUT, and the result is input to an input node of the buffer circuit 24. An (N+1)-bit output signal S_OUT is output from an output node of the buffer circuit 24. The output signal S_OUT is output to the read circuit 202 via a signal line 207. When a control signal OUT_SEL is at a high level, the buffer circuit 24 outputs an output signal S_OUT from an output node. When a control signal OUT_SEL is at a low level, the buffer circuit 24 sets the output node to a high impedance state.

[0029] 5A and 5B are diagrams showing the relationship between the operation of the APD 11 and the output signal in this embodiment. When the input side of the waveform shaping unit 212 is nodeA and the output side is nodeB, Fig. 5(a) shows the waveform change of nodeA, and Fig. 5(b) shows the waveform change of nodeB.

[0030] Between time t0 and time t1, a reverse bias voltage of VH-VL is applied to the APD 11. When a photon is incident on the APD 11 at time t1, avalanche multiplication occurs in the APD 11, an avalanche multiplication current flows through the quench element 211, and the voltage of nodeA drops. When the voltage drop becomes larger and the potential difference applied to the APD 11 becomes smaller, the avalanche multiplication of the APD 11 stops at time t2, and the voltage level of nodeA does not drop more than a certain value. After that, between time t2 and time t4, a current that compensates for the voltage drop flows from the voltage VL to nodeA, and at time t4, nodeA is stabilized to the original voltage level. At this time, when the voltage level of nodeA exceeds the threshold of the waveform shaping unit 212 from time t2 to time t3, nodeB becomes high level. That is, the voltage waveform of nodeA is shaped by the waveform shaping section 212, and a square wave pulse signal P_OUT is output from nodeB.

[0031] Fig. 6 is a timing chart showing the operation of the photoelectric conversion device in this embodiment, and shows the operation when the count value C_OUT exceeds the threshold value "111". Fig. 6 shows the time changes of the photon incidence, the pulse signal P_OUT, the reset signal RST, the count values ​​C_OUT[1] to [n], the determination flag OC_OUT, the control signal OUT_SEL, and the output signal S_OUT. Here, for the sake of simplicity, n=3, and T-type flip-flops 22_1 to 22_3 and the count values ​​C_OUT[1] to [3] are shown as examples.

[0032] At time t101, when the reset signal RST transitions from a low level to a high level, all the T-type flip-flops 22_1 to 22_3 of the binary counter 22 are reset, and the count value C_OUT becomes "000." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT becomes a low level.

[0033] At time t102, when a photon is incident on the APD 11, avalanche multiplication occurs in the APD 11, and the pulse signal P_OUT transitions from low level to high level. At time t103, when the pulse signal P_OUT transitions from high level to low level, the output node Q of the T-type flip-flop 22_1 transitions from low level to high level. That is, the LSB count value C_OUT[1] transitions from "0" to "1", and the 3-bit count value C_OUT becomes "001".

[0034] Thereafter, the count value C_OUT repeatedly counts up each time a photon is incident on the APD 11, and at time t104, the count value C_OUT becomes "111." Since the MSB count value C_OUT[3] becomes "1," the input node S of the RS latch circuit 231 of the decision circuit 23 becomes high level, and the output node Q of the RS latch circuit 231 and the first input node of the logic gate circuit 233 become high level. Meanwhile, the inverted value "0" of the MSB count value C_OUT[3] is input to the second input node of the logic gate circuit 233. Therefore, the decision flag OC_OUT at the output node of the logic gate circuit 233 maintains a low level indicating that the count value C_OUT is equal to or less than the threshold, i.e., does not exceed the threshold.

[0035] At time t105, when the pulse signal P_OUT transitions from high to low in response to the incidence of a photon, the 3-bit count value C_OUT transitions from "111" to "000". Since the MSB count value C_OUT[3] transitions from "1" to "0", the input node S of the RS latch circuit 231 of the decision circuit 23 becomes low, but the output node Q and the first input node of the logic gate circuit 233 maintain high levels. The inverted value "1" of the MSB count value C_OUT[3] is input to the second input node of the logic gate circuit 233. Therefore, the decision flag OC_OUT at the output node of the logic gate circuit 233 transitions to high, indicating that the count value C_OUT has exceeded the threshold value.

[0036] After time t106, in response to the incidence of photons, the count value C_OUT repeatedly counts up from "000." The determination flag OC_OUT remains at a high level.

[0037] At times t107 to t108, the control signal OUT_SEL goes high, and the buffer circuit 24 latches the current count value C_OUT "010". The buffer circuit 24 adds the judgment flag OC_OUT to the LSB of the count value C_OUT, and outputs "0101" as the 4-bit output signal S_OUT. A signal processing circuit provided outside or inside the photoelectric conversion device 3 can determine that the 3-bit count value C_OUT has overflowed because the LSB of the output signal S_OUT, i.e., the judgment flag OC_OUT, is "1". In this case, the signal processing circuit may invalidate the count value C_OUT "010" and correct the count value C_OUT to the maximum value "111". This makes it possible to avoid undesired operations at the time of overflow. The signal processing circuit may also add the judgment flag OC_OUT to the MSB of the count value C_OUT, and use the 4-bit output signal S_OUT "1010" as the count value C_OUT. In this case, it is possible to substantially expand the number of bits of the count value C_OUT from 3 bits to 4 bits.

[0038] At time t109, the reset signal RST transitions from low level to high level, all the T-type flip-flops 22_1 to 22_3 of the binary counter 22 are reset, and the count value C_OUT becomes "000." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT becomes low level.

[0039] FIG. 7 is a timing chart showing the operation of the photoelectric conversion device in this embodiment, and shows the operation when the count value C_OUT does not exceed the threshold value "111."

[0040] At time t201, the reset signal RST transitions from low level to high level, the count value C_OUT is reset to "000", and the determination flag OC_OUT goes to low level.

[0041] At time t202, when a photon is incident on the APD 11, the pulse signal P_OUT transitions from low level to high level. At time t203, when the pulse signal P_OUT transitions from high level to low level, the LSB count value C_OUT[1] transitions from "0" to "1". As a result, the 3-bit count value C_OUT becomes "001". After that, every time a photon is incident on the APD 11, the count value C_OUT repeatedly counts up, and at time t204, the count value C_OUT becomes "101".

[0042] At time t205 to t206, the control signal OUT_SEL goes to high level, and the buffer circuit 24 latches the current count value C_OUT of "101". At this time, the MSB count value C_OUT[3] remains at "1". Therefore, the judgment flag OC_OUT maintains a low level indicating that the count value C_OUT does not exceed the threshold value. The buffer circuit 24 adds the judgment flag OC_OUT to the LSB of the count value C_OUT, and outputs "1010" as the output signal S_OUT. A signal processing circuit provided outside or inside the photoelectric conversion device 3 can determine that the 3-bit count value C_OUT has not overflowed because the LSB of the output signal S_OUT is "0", and can validate the count value C_OUT of "101".

[0043] At time t207, the reset signal RST transitions from low level to high level, all the T-type flip-flops 22_1 to 22_3 of the binary counter 22 are reset, and the count value C_OUT becomes "000." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT maintains the low level.

[0044] As described above, the photoelectric conversion device in this embodiment determines whether the count value C_OUT has exceeded the threshold value based on the transition of any one bit of the binary counter 22. Since there is no need to detect all bits of the binary counter 22, it is possible to reduce the circuit scale. In particular, by detecting the transition of the MSB of the count value C_OUT from "1" to "0", it is possible to determine that the count value C_OUT has overflowed while keeping the circuit scale small.

[0045] In addition, the signal processing circuit that receives the count value C_OUT can determine whether or not the count value C_OUT is valid based on the determination flag OC_OUT, making it possible to perform the necessary correction processing on the count value C_OUT when it overflows.

[0046] As will be described later, the threshold value is not necessarily limited to the maximum value of the count value C_OUT. That is, the output node Q of any one of the T-type flip-flops 22_1 to 22_n may be connected to the determination circuit .

[0047] [Second embodiment] Next, a photoelectric conversion device in this embodiment will be described. The photoelectric conversion device in this embodiment differs from the first embodiment in that when the count value C_OUT exceeds a threshold value, the count of the pulse signal P_OUT stops and the count values ​​C_OUT[1] to [n] are all maintained at "0". Hereinafter, the present embodiment will be described focusing on the configuration different from the first embodiment.

[0048] FIG. 8 is a block diagram of a pixel circuit 100 in this embodiment. The pixel circuit 100 includes a photon detection circuit 21, a binary counter 22, a decision circuit 23, and a buffer circuit 24. The photon detection circuit 21 includes an APD 11, a quench element 211, and a waveform shaping unit 213. The APD 11 and the quench element 211 are configured in the same manner as in the first embodiment. The waveform shaping unit 213 includes a first input node and a second input node, unlike the first embodiment. A signal from the cathode of the APD 11 is input to the first input node, and a decision flag OC_OUT is input to the second input node. In this embodiment, when the decision flag OC_OUT of the decision circuit 23 is at a high level, the pulse signal P_OUT is not output from the waveform shaping unit 213. That is, when the count value C_OUT exceeds the threshold value, the binary counter 22 stops counting the pulse signal P_OUT. This makes it possible to reduce current consumption and noise.

[0049] The binary counter 22 includes n T-type flip-flops 22_1 to 22_n, and can hold and output n-bit count values ​​C_OUT[1] to [n]. The first-stage T-type flip-flop 22_1 is configured to be able to output "1" at the time of reset, unlike the second-stage and subsequent T-type flip-flops 22_2 to 22_n. For example, the inverted output node Q bar of the first-stage T-type flip-flop 22_1 can be connected to the input node T of the second-stage T-type flip-flop 22_2. With this configuration, it is possible to distinguish between the value "0···00" at the time of overflow of the count value C_OUT and the reset value (initial value) "0···01". The second-stage and subsequent T-type flip-flops 22_2 to 22_n are configured in the same manner as in the first embodiment. A reset signal RST is input from the scanning line 206b to the reset node RST of the T-type flip-flops 22_1 to 22_n.

[0050] FIG. 9 is a timing chart showing the operation of the photoelectric conversion device in this embodiment, and shows the operation when the count value C_OUT exceeds the threshold value "111."

[0051] At time t301, the reset signal RST transitions from low level to high level, the count value C_OUT is reset to "001", and the determination flag OC_OUT becomes low level.

[0052] At time t302, when a photon is incident on the APD 11, the pulse signal P_OUT transitions from low level to high level. At time t303, when the pulse signal P_OUT transitions from high level to low level, the output node Q of the T-type flip-flop 22_1 transitions from high level to low level. The count value C_OUT[1] of the LSB transitions from "1" to "0", and the count value C_OUT[2] transitions from "0" to "1". As a result, the 3-bit count value C_OUT becomes "010". After that, every time a photon is incident on the APD 11, the count value C_OUT repeatedly counts up, and at time t304, the count value C_OUT becomes "111".

[0053] At time t305, when the pulse signal P_OUT transitions from high to low in response to the incidence of a photon, the 3-bit count value C_OUT transitions from "111" to "000". The MSB count value C_OUT[3] transitions from "1" to "0", and the decision circuit 23 transitions the decision flag OC_OUT from low to high. Since the high-level decision flag OC_OUT is input to the waveform shaping unit 213 of the photon detection circuit 21, the waveform shaping unit 213 stops outputting the pulse signal P_OUT.

[0054] After time t305, photons are incident on the APD 11, but because the determination flag OC_OUT remains at a high level, no pulse signal P_OUT is output from the waveform shaping unit 213. For this reason, the count value C_OUT maintains the value of "000" at the time of overflow.

[0055] From time t306 to t307, the control signal OUT_SEL is at high level. The buffer circuit 24 latches the current count value C_OUT of "000" and outputs it as a 3-bit output signal S_OUT. A signal processing circuit provided outside or inside the photoelectric conversion device 3 can determine that the count value C_OUT has overflowed because the count value C_OUT is "000". In this case, the signal processing circuit may correct the count value C_OUT to the maximum value "111".

[0056] At time t308, the reset signal RST transitions from low level to high level, all the T-type flip-flops 22_1 to 22_3 of the binary counter 22 are reset, and the count value C_OUT becomes "001." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT becomes low level.

[0057] FIG. 10 is a timing chart showing the operation of the photoelectric conversion device in this embodiment, and shows the operation when the count value C_OUT does not exceed the threshold value "111".

[0058] At time t401, the reset signal RST transitions from low to high, the count value C_OUT is reset to "001", and the determination flag OC_OUT becomes low.

[0059] At time t402, when a photon is incident on the APD 11, the pulse signal P_OUT transitions from low level to high level. At time t403, when the pulse signal P_OUT transitions from high level to low level, the LSB count value C_OUT[1] transitions from "1" to "0", and the count value C_OUT[2] transitions from "0" to "1". As a result, the 3-bit count value C_OUT becomes "010". After that, every time a photon is incident on the APD 11, the count value C_OUT repeatedly counts up, and at time t404, the count value C_OUT becomes "101".

[0060] At time t405 to t406, the control signal OUT_SEL goes to high level, and the buffer circuit 24 latches the current count value C_OUT "101" and outputs it as a 3-bit output signal S_OUT. Because the count value C_OUT is not "000", a signal processing circuit provided outside or inside the photoelectric conversion device 3 can determine that the count value C_OUT has not overflowed and can validate the count value C_OUT "101". The signal processing circuit can also subtract "1" from the count value C_OUT to obtain "100" as the corrected count value C_OUT. This makes it possible to correct the offset of the count value C_OUT corresponding to the reset value "001".

[0061] At time t407, the reset signal RST transitions from low level to high level, all the T-type flip-flops 22_1 to 22_3 of the binary counter 22 are reset, and the count value C_OUT becomes "001." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT maintains the low level.

[0062] As described above, the photoelectric conversion device in this embodiment can determine that the count value C_OUT has exceeded a threshold value based on the transition of any one bit of the binary counter 22. Since there is no need to detect all bits of the binary counter 22, it is possible to reduce the circuit scale. In particular, by detecting the transition of the MSB of the binary counter 22 from "1" to "0", it is possible to determine that the count value C_OUT has overflowed while keeping the circuit scale small.

[0063] Furthermore, when the count value C_OUT exceeds the threshold value, the photoelectric conversion device in the embodiment stops counting the pulse signal P_OUT and maintains the count value C_OUT at "00...0". Therefore, the signal processing circuit can grasp that the count value C_OUT has exceeded the threshold value by determining whether the count value C_OUT is "00...00". Furthermore, since the determination result is assigned to a specific value of the count value C_OUT, it is possible to output the determination result without increasing the number of signal lines. This makes it possible to further reduce the circuit scale.

[0064] Furthermore, according to this embodiment, when the count value C_OUT exceeds the threshold value, the binary counter 22 stops the counting operation, so that it is also possible to reduce current consumption and noise.

[0065] [Third embodiment] Next, a photoelectric conversion device in this embodiment will be described. Fig. 11 is a block diagram of a pixel circuit 100 in this embodiment. The pixel circuit 100 includes a photon detection circuit 21, a binary counter 22, a decision circuit 23, a buffer circuit 24, and a switching circuit 25. Hereinafter, this embodiment will be described, focusing on the configuration different from the second embodiment.

[0066] The photon detection circuit 21 in this embodiment includes an APD 11, a waveform shaping unit 213, and a PMOS transistor 211a as a quenching element. The PMOS transistor 211a is connected to a power supply line that supplies a voltage VH and the cathode of the APD 11. That is, the first main node of the PMOS transistor 211a is connected to the power supply line that supplies the voltage VH, and the second main node is connected to the cathode of the APD 11. Also, a determination flag OC_OUT is input from the determination circuit 23 to the gate node of the PMOS transistor 211a. When the determination flag OC_OUT is at a low level, the PMOS transistor 211a is turned on, and current is supplied to the APD 11. When the determination flag OC_OUT is at a high level, the PMOS transistor 211a is turned off, and avalanche multiplication in the APD 11 does not occur. As a result, compared with the second embodiment, it is possible to further reduce the power consumption and noise.

[0067] The switching circuit 25 is provided in the signal path between the binary counter 22 and the determination circuit 23, and includes a switch that switches one bit determined in the binary counter 22. The switching circuit 25 can selectively output either the output node Q of the MSB T flip-flop 22_n or the output node Q of the m-th stage T flip-flop 22_m to the determination circuit 23. Here, "m" can be any natural number that satisfies 1 < m < n. The control signal DIN_SEL is supplied from the scanning line 206c. When the control signal DIN_SEL is at a low level, the output node Q of the MSB T flip-flop 22_n is selected. When the control signal DIN_SEL is at a high level, the output node Q of the m-th stage T flip-flop 22_m is selected. Note that the switching circuit 25 may be configured to be able to select the output nodes Q of three or more of the T flip-flops 22_1 to n.

[0068] Next, the operation of the photoelectric conversion device in this embodiment will be described with reference to Fig. 12 to Fig. 15. Fig. 12 to Fig. 15 show the time changes of the photon incidence, the pulse signal P_OUT, the reset signal RST, the lower count values ​​C_OUT[1] to [m], the upper count values ​​C_OUT[m+1] to [n], the determination flag OC_OUT, the control signal OUT_SEL, and the output signal S_OUT. Here, m=3, n=5, and the lower count values ​​C_OUT[1] to [3] and the upper count values ​​C_OUT[4] to [5] will be described as examples.

[0069] 12 is a timing chart showing the operation of the photoelectric conversion device in this embodiment, and shows the operation when the count value C_OUT exceeds the threshold value "11111." It is assumed that the control signal DIN_SEL is at a low level, and the switching circuit 25 selects the output node Q of the MSB T-type flip-flop 22_n.

[0070] At time t501, the reset signal RST transitions from low to high, the lower count values ​​C_OUT[1] to [3] are reset to “001”, and the higher count values ​​C_OUT[4] to [5] are reset to “00”. In addition, the determination flag OC_OUT goes low.

[0071] At time t502, when a photon is incident on the APD 11, the pulse signal P_OUT transitions from low level to high level. At time t503, when the pulse signal P_OUT transitions from high level to low level, the output node Q of the T-type flip-flop 22_1 transitions from high level to low level. The count value C_OUT[1] of the LSB transitions from "1" to "0", and the count value C_OUT[2] transitions from "0" to "1". As a result, the count values ​​C_OUT[1] to [3] become "010".

[0072] At time t504, when the pulse signal P_OUT transitions from high to low in response to the incidence of a photon, the count values ​​C_OUT[1]-[3] transition from "111" to "000", and the count values ​​C_OUT[4]-[5] transition from "00" to "01". After that, the count value C_OUT repeats counting up every time a photon is incident on the APD 11. At time t505, when the pulse signal P_OUT transitions from high to low in response to the incidence of a photon, the count values ​​C_OUT[1]-[3] transition from "111" to "000", and the count values ​​C_OUT[4]-[5] transition from "11" to "00". The decision circuit 23 detects that the count value C_OUT[5] of the MSB has transitioned from "1" to "0", and transitions the decision flag OC_OUT from low to high. Since the high-level determination flag OC_OUT is input to the waveform shaping unit 213 of the photon detection circuit 21, the waveform shaping unit 213 stops outputting the pulse signal P_OUT. Also, the PMOS transistor 211a is turned off, and avalanche multiplication in the APD 11 is no longer performed.

[0073] After time t505, photons are incident on the APD 11, but because the determination flag OC_OUT remains at a high level, no pulse signal P_OUT is output from the photon detection circuit 21. As a result, the binary counter 22 stops counting, and the count values ​​C_OUT[1] to [5] maintain the value of "00000" at the time of overflow.

[0074] From time t506 to t507, the control signal OUT_SEL goes to high level. The buffer circuit 24 latches the current count values ​​C_OUT[1] to [5], and outputs "00000" as the output signal S_OUT. A signal processing circuit provided outside or inside the photoelectric conversion device 3 can determine that the 5-bit count values ​​C_OUT[1] to [5] have overflowed because the output signal S_OUT is "00000", and invalidate the output signal S_OUT. In this case, the signal processing circuit may correct the count value C_OUT to the maximum value "11111".

[0075] At time t508, the reset signal RST transitions from low level to high level, all the T-type flip-flops 22_1 to 22_5 of the binary counter 22 are reset, and the count values ​​C_OUT[1] to [5] become "00001." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT becomes low level.

[0076] 13 is a timing chart showing the operation of the photoelectric conversion device in this embodiment, and shows the operation when the count value C_OUT does not exceed the threshold value "11111." It is assumed that the control signal DIN_SEL is at a low level, and the switching circuit 25 selects the output node Q of the MSB T-type flip-flop 22_n.

[0077] At time t601, the reset signal RST transitions from low to high, the lower count values ​​C_OUT[1] to [3] are reset to “001”, and the higher count values ​​C_OUT[4] to [5] are reset to “00”. In addition, the determination flag OC_OUT goes to low.

[0078] At time t602, when a photon is incident on the APD 11, the pulse signal P_OUT transitions from low level to high level. At time t603, when the pulse signal P_OUT transitions from high level to low level, the output node Q of the T-type flip-flop 22_1 transitions from high level to low level. The count value C_OUT[1] of the LSB transitions from "1" to "0", and the count value C_OUT[2] transitions from "0" to "1". As a result, the count values ​​C_OUT[1] to [3] become "010". After that, the count value C_OUT repeats counting up every time a photon is incident on the APD 11. At time t604, the count values ​​C_OUT[1] to [3] transition from "111" to "000", and the count values ​​C_OUT[4] to [5] transition from "00" to "01". At time t605, when the pulse signal P_OUT transitions from high level to low level in response to the incidence of a photon, the count values ​​C_OUT[1] to [3] transition from "100" to "101," and the count values ​​C_OUT[4] to [5] maintain "10."

[0079] At times t606 to t607, the control signal OUT_SEL goes high. The buffer circuit 24 latches the current count values ​​C_OUT[1] to [5] and outputs "10101" as the output signal S_OUT. A signal processing circuit provided outside or inside the photoelectric conversion device 3 determines that the count values ​​C_OUT[1] to [5] have not overflowed because the output signal S_OUT is not "00000", and can enable the output signal S_OUT. The signal processing circuit may also subtract "1" from the count value C_OUT to obtain "10100" as the corrected count value C_OUT. This allows the offset of the reset value "00001" to be corrected.

[0080] At time t608, the reset signal RST transitions from low level to high level, all the T-type flip-flops 22_1 to 22_5 of the binary counter 22 are reset, and the count values ​​C_OUT[1] to [5] become "00001." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT maintains the low level.

[0081] 14 is a timing chart showing the operation of the photoelectric conversion device in this embodiment, and shows the operation when the count value C_OUT exceeds the threshold value "00111." It is assumed that the control signal DIN_SEL is at a high level and the switching circuit 25 selects the output node Q of the third-stage T-type flip-flop 22_3.

[0082] At time t701, the reset signal RST transitions from low to high, the lower count values ​​C_OUT[1] to [3] are reset to “001”, and the higher count values ​​C_OUT[4] to [5] are reset to “00”. In addition, the determination flag OC_OUT goes low.

[0083] At time t702, when a photon is incident on the APD 11, the pulse signal P_OUT transitions from low level to high level. At time t703, when the pulse signal P_OUT transitions from high level to low level, the output node Q of the T-type flip-flop 22_1 transitions from high level to low level. The count value C_OUT[1] of the LSB transitions from "1" to "0", and the count value C_OUT[2] transitions from "0" to "1". As a result, the count values ​​C_OUT[1] to [3] become "010". Thereafter, every time a photon is incident on the APD 11, the count value C_OUT repeats counting up.

[0084] At time t704, when the pulse signal P_OUT transitions from high to low in response to the incidence of a photon, the count values ​​C_OUT[1]-[3] transition from "111" to "000", and the count values ​​C_OUT[4]-[5] transition from "00" to "01". The decision circuit 23 detects that the count value C_OUT[3] transitions from "1" to "0", and transitions the decision flag OC_OUT from low to high. Since the high-level decision flag OC_OUT is input to the waveform shaping unit 213 of the photon detection circuit 21, the waveform shaping unit 213 stops outputting the pulse signal P_OUT. In addition, the PMOS transistor 211a is turned off, and avalanche multiplication in the APD 11 is no longer performed.

[0085] After time t704, photons are incident on the APD 11, but because the determination flag OC_OUT remains at a high level, no pulse signal P_OUT is output from the waveform shaping unit 213. For this reason, the count values ​​C_OUT[1] to [5] remain at “01000”.

[0086] From time t706 to t707, the control signal OUT_SEL is at high level. The buffer circuit 24 latches the current count values ​​C_OUT[1] to [5], and outputs "01000" as the output signal S_OUT. A signal processing circuit provided outside or inside the photoelectric conversion device 3 can determine that the count values ​​C_OUT[1] to [5] have exceeded the threshold value "00111" based on the output signal S_OUT "01000", and execute predetermined signal processing.

[0087] At time t708, the reset signal RST transitions from low level to high level, all the T-type flip-flops 22_1 to 22_5 of the binary counter 22 are reset, and the count values ​​C_OUT[1] to [5] become "00001." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT becomes low level.

[0088] 15 is a timing chart showing the operation of the photoelectric conversion device in this embodiment, and shows the operation when the count value C_OUT does not exceed the threshold value "00111." It is assumed that the control signal DIN_SEL is at a high level and the switching circuit 25 selects the output node Q of the third-stage T-type flip-flop 22_3.

[0089] At time t801, the reset signal RST transitions from low to high, the lower count values ​​C_OUT[1] to [3] are reset to “001”, and the higher count values ​​C_OUT[4] to [5] are reset to “00”. In addition, the determination flag OC_OUT goes to low.

[0090] At time t802, when a photon is incident on the APD 11, the pulse signal P_OUT transitions from low level to high level. At time t803, when the pulse signal P_OUT transitions from high level to low level, the output node Q of the T-type flip-flop 22_1 transitions from high level to low level. The count value C_OUT[1] of the LSB transitions from "1" to "0", and the count value C_OUT[2] transitions from "0" to "1". As a result, the count values ​​C_OUT[1] to [3] become "010". After that, every time a photon is incident on the APD 11, the count value C_OUT repeatedly counts up, and at time t804, the count values ​​C_OUT[1] to [3] transition from "011" to "100". At time t805, when the pulse signal P_OUT transitions from high to low in response to the incidence of a photon, the count values ​​C_OUT[1] to [3] transition from "101" to "110," and the count values ​​C_OUT[4] to [5] remain at "00."

[0091] From time t807 to t808, the control signal OUT_SEL is at high level. The buffer circuit 24 latches the current count values ​​C_OUT[1] to [5], and outputs "00110" as the output signal S_OUT. A signal processing circuit provided outside or inside the photoelectric conversion device 3 can determine that the count values ​​C_OUT[1] to [5] do not exceed the threshold value because the output signal S_OUT is not "01000".

[0092] At time t809, the reset signal RST transitions from low to high, all the T-type flip-flops 22_1 to 22_5 of the binary counter 22 are reset, and the count values ​​C_OUT[1] to [5] become "00001." In addition, the RS latch circuit 231 of the determination circuit 23 is also reset, and the determination flag OC_OUT maintains the low level.

[0093] As described above, the photoelectric conversion device in this embodiment determines whether the count value C_OUT has exceeded the threshold value based on any one bit of the binary counter 22. This eliminates the need to detect all bits of the binary counter 22, making it possible to reduce the circuit scale. In addition, the photoelectric conversion device in this embodiment further includes a switching circuit that switches the one bit determined by the determination circuit. This makes it possible to change the threshold value as appropriate depending on the signal processing.

[0094] Moreover, according to this embodiment, when the count value C_OUT exceeds the threshold value, not only is the pulse signal P_OUT not output, but also no current is supplied to the APD 11. This makes it possible to further reduce current consumption and noise compared to the second embodiment.

[0095] The operations of the photon detection circuit 21 and the binary counter 22 may be appropriately changed depending on the threshold. For example, when the threshold is set to a value smaller than the MSB of the binary counter 22 (FIGS. 14 and 15), even after the count value C_OUT exceeds the threshold, the photon detection circuit 21 may continue to output the pulse signal P_OUT and the binary counter 22 may continue counting. In this case, the determination result by the determination circuit 23 may be added to the count value C_OUT as an additional bit, as in the first embodiment.

[0096] [Fourth embodiment] Fig. 16 shows an example of the arrangement of the circuit board 2 in this embodiment, which is a modified example of the arrangement of the circuit board 2 in Fig. 3. In the circuit board 2 in Fig. 3, the readout circuit 202 reads out signals from the signal lines 207 connected to the pixels 10 in each row, but in the circuit board 2 in Fig. 16, the readout circuit 202 reads out signals from the signal lines 207 connected to the pixels 10 in each column. In this way, the circuit board 2 can be configured in various arrangement examples. In this embodiment, it is possible to achieve the same effects as in the above-mentioned embodiment.

[0097] [Fifth embodiment] An imaging system according to the fifth embodiment of the present invention will be described with reference to Fig. 17. Fig. 17 is a block diagram of the imaging system according to this embodiment.

[0098] The photoelectric conversion device in the above-described embodiment can be applied to various imaging systems. Examples of imaging systems include digital still cameras, digital camcorders, camera heads, copiers, fax machines, mobile phones, vehicle-mounted cameras, observation satellites, and surveillance cameras. Fig. 17 shows a block diagram of a digital still camera as an example of an imaging system.

[0099] The imaging system 7 includes a barrier 706, a lens 702, an aperture 704, an imaging device 70, a signal processing unit 708, a timing generating unit 720, an overall control and calculation unit 718, a memory unit 710, a recording medium control I / F unit 716, a recording medium 714, and an external I / F unit 712. The barrier 706 protects the lens, and the lens 702 forms an optical image of a subject on the imaging device 70. The aperture 704 varies the amount of light that passes through the lens 702. The imaging device 70 is configured like the photoelectric conversion device of the above-mentioned embodiment, and converts the optical image formed by the lens 702 into image data. The signal processing unit 708 performs various corrections and compresses the data on the imaging data output from the imaging device 70.

[0100] The timing generating unit 720 outputs various timing signals to the imaging device 70 and the signal processing unit 708. The overall control / calculation unit 718 controls the entire digital still camera, and the memory unit 710 temporarily stores image data. The recording medium control I / F unit 716 is an interface for recording or reading image data to the recording medium 714, and the recording medium 714 is a removable recording medium such as a semiconductor memory for recording or reading imaging data. The external I / F unit 712 is an interface for communicating with an external computer or the like. Timing signals and the like may be input from outside the imaging system, and the imaging system only needs to have at least the imaging device 70 and the signal processing unit 708 for processing image signals output from the imaging device 70.

[0101] In this embodiment, the imaging device 70 and the signal processing unit 708 are provided on separate semiconductor substrates, but the imaging device 70 and the signal processing unit 708 may be formed on the same semiconductor substrate.

[0102] Each pixel includes a first photoelectric conversion unit and a second photoelectric conversion unit. The signal processing unit 708 processes a pixel signal based on the charge generated in the first photoelectric conversion unit and a pixel signal based on the charge generated in the second photoelectric conversion unit, and can obtain distance information from the imaging device 70 to the subject.

[0103] [Sixth embodiment] FIG. 18 is a diagram of a light detection system in this embodiment, and is a block diagram of a range image sensor using the photoelectric conversion device described in the above embodiment.

[0104] 18, the range image sensor 401 includes an optical system 402, a photoelectric conversion device 403, an image processing circuit 404, a monitor 405, and a memory 406. The range image sensor 401 receives light (modulated light, pulsed light) emitted from a light source device 411 toward a subject and reflected from the surface of the subject. The range image sensor 401 can obtain a range image according to the distance to the subject, based on the time from emission to reception of light.

[0105] The optical system 402 includes one or more lenses, guides image light (incident light) from a subject to the photoelectric conversion device 403 , and forms an image on the light receiving surface (sensor portion) of the photoelectric conversion device 403 .

[0106] The photoelectric conversion device according to each of the above-mentioned embodiments can be applied as the photoelectric conversion device 403. The photoelectric conversion device 403 supplies the image processing circuit 404 with a distance signal indicating a distance determined from a received light signal.

[0107] The image processing circuit 404 performs image processing to construct a distance image based on the distance signal supplied from the photoelectric conversion device 403. The distance image (image data) obtained by the image processing can be displayed on a monitor 405 and stored (recorded) in a memory 406.

[0108] The range image sensor 401 configured in this way can obtain a more accurate range image as the pixel characteristics are improved by applying the above-mentioned photoelectric conversion device.

[0109] [Seventh embodiment] The technology according to the present disclosure may be applied to various products. For example, the technology according to the present disclosure may be applied to an endoscopic surgery system.

[0110] Fig. 19 is a schematic diagram of the endoscopic surgery system in this embodiment. Fig. 19 shows a state in which an operator (doctor) 1131 performs surgery on a patient 1132 on a patient bed 1133 using an endoscopic surgery system 1103. As shown in the figure, the endoscopic surgery system 1103 includes an endoscope 1100, a surgical tool 1110, and a cart 1134 on which various devices for endoscopic surgery are mounted.

[0111] The endoscope 1100 includes a lens barrel 1101, a region of a predetermined length from the tip of which is inserted into a body cavity of a patient 1132, a camera head 1102 connected to a base end of the lens barrel 1101, and an arm 1121. Although Fig. 19 shows the endoscope 1100 configured as a so-called rigid scope having a rigid lens barrel 1101, the endoscope 1100 may also be configured as a so-called flexible scope having a flexible lens barrel.

[0112] An opening into which an objective lens is fitted is provided at the tip of the lens barrel 1101. A light source device 1203 is connected to the endoscope 1100, and light generated by the light source device 1203 is guided to the tip of the lens barrel by a light guide extending inside the lens barrel 1101, and is irradiated via the objective lens toward an observation target in the body cavity of the patient 1132. The endoscope 1100 may be a direct-viewing endoscope, an oblique-viewing endoscope, or a side-viewing endoscope.

[0113] An optical system and a photoelectric conversion device are provided inside the camera head 1102, and reflected light (observation light) from an observation target is focused on the photoelectric conversion device by the optical system. The observation light is photoelectrically converted by the photoelectric conversion device to generate an electrical signal corresponding to the observation light, i.e., an image signal corresponding to an observation image. As the photoelectric conversion device, the photoelectric conversion device described in each of the above-mentioned embodiments may be used. The image signal is transmitted to a camera control unit (CCU) 1135 as RAW data.

[0114] The CCU 1135 is configured with a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc., and performs overall control of the operations of the endoscope 1100 and the display device 1136. Furthermore, the CCU 1135 receives an image signal from the camera head 1102, and performs various types of image processing on the image signal, such as development processing (demosaic processing), for displaying an image based on the image signal.

[0115] Under the control of the CCU 1135 , the display device 1136 displays an image based on an image signal that has been subjected to image processing by the CCU 1135 .

[0116] The light source device 1203 includes a light source such as an LED (Light Emitting Diode), and supplies the endoscope 1100 with irradiation light when imaging an operation site or the like.

[0117] The input device 1137 is an input interface for the endoscopic surgery system 1003. A user can input various information and instructions to the endoscopic surgery system 1003 via the input device 1137.

[0118] The treatment tool control device 1138 controls the driving of the energy treatment tool 1112 for cauterizing tissue, incising, sealing blood vessels, or the like.

[0119] The light source device 1203 can supply irradiation light to the endoscope 1100 when imaging the surgical site, and can be, for example, a white light source made of an LED, a laser light source, or a combination of these. When a white light source is configured by a combination of RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high precision. Therefore, the light source device 1203 can adjust the white balance of the captured image. In this case, the laser light from each of the RGB laser light sources can be irradiated to the observation target in a time-division manner, and the drive of the image sensor of the camera head 1102 can be controlled in synchronization with the irradiation timing. This makes it possible to capture images corresponding to each of the RGB colors in a time-division manner. According to this method, a color image can be obtained without providing a color filter to the image sensor.

[0120] Furthermore, the driving of the light source device 1203 may be controlled so that the intensity of the light output from the light source device 1203 is changed at predetermined time intervals. By controlling the driving of the image sensor of the camera head 1102 in synchronization with the timing of the change in the light intensity to acquire images in a time-division manner and synthesizing the images, it is possible to generate an image with a high dynamic range that is free of so-called blocked-up shadows and blown-out highlights.

[0121] Furthermore, the light source device 1203 may be configured to be capable of supplying light in a predetermined wavelength band corresponding to the special light observation. In the special light observation, for example, the wavelength dependency of light absorption in body tissue can be utilized. Specifically, a predetermined tissue such as blood vessels on the mucous membrane surface can be photographed with high contrast by irradiating light in a narrower band than the irradiation light (i.e., white light) during normal observation. Alternatively, in the special light observation, a fluorescent observation may be performed in which an image is obtained by fluorescence generated by irradiating excitation light. In the fluorescent observation, it is possible to irradiate excitation light to the body tissue and observe the fluorescence from the body tissue, or to locally inject a reagent such as indocyanine green (ICG) into the body tissue and irradiate the body tissue with excitation light corresponding to the fluorescent wavelength of the reagent to obtain a fluorescent image. The light source device 1203 may be configured to be capable of supplying narrow band light and / or excitation light corresponding to such special light observation.

[0122] [Eighth embodiment] The light detection system and the moving body of this embodiment will be described with reference to Figures 20A, 20B, and 21. In this embodiment, an example of an in-vehicle camera will be shown as the light detection system.

[0123] FIG. 20A is a schematic diagram of a light detection system in this embodiment, showing an example of a vehicle system and a light detection system mounted on the vehicle system. The light detection system 1301 includes a photoelectric conversion device 1302, an image preprocessing unit 1315, an integrated circuit 1303, and an optical system 1314. The optical system 1314 forms an optical image of a subject on the photoelectric conversion device 1302. The photoelectric conversion device 1302 converts the optical image of the subject formed by the optical system 1314 into an electrical signal. The photoelectric conversion device 1302 is any of the photoelectric conversion devices in each of the above-mentioned embodiments. The image preprocessing unit 1315 performs a predetermined signal processing on the signal output from the photoelectric conversion device 1302. The function of the image preprocessing unit 1315 may be incorporated in the photoelectric conversion device 1302. The light detection system 1301 is provided with at least two sets of an optical system 1314 , a photoelectric conversion device 1302 , and an image pre-processing unit 1315 , and the output from each set of image pre-processing units 1315 is input to the integrated circuit 1303 .

[0124] The integrated circuit 1303 is an integrated circuit for use in an imaging system, and includes an image processing unit 1304 including a storage medium 1305, an optical distance measuring unit 1306, a parallax calculation unit 1307, an object recognition unit 1308, and an abnormality detection unit 1309. The image processing unit 1304 performs image processing such as development processing and defect correction on the output signal of the image pre-processing unit 1315. The storage medium 1305 stores the primary storage of the captured image and the defective positions of the captured pixels. The optical distance measuring unit 1306 performs focusing and distance measurement of the subject. The parallax calculation unit 1307 calculates distance measurement information from multiple image data acquired by multiple photoelectric conversion devices 1302. The object recognition unit 1308 recognizes subjects such as cars, roads, signs, and people. When the abnormality detection unit 1309 detects an abnormality in the photoelectric conversion device 1302, it notifies the main control unit 1313 of the abnormality.

[0125] The integrated circuit 1303 may be realized by dedicated hardware, a software module, or a combination of these. It may also be realized by a field programmable gate array (FPGA), an application specific integrated circuit (ASIC), or the like, or a combination of these.

[0126] The main control unit 1313 supervises and controls the operations of the light detection system 1301, the vehicle sensor 1310, the control unit 1320, etc. The main control unit 1313 may not be provided, and the light detection system 1301, the vehicle sensor 1310, and the control unit 1320 may each have a communication interface and transmit and receive control signals via a communication network, for example, according to the CAN standard.

[0127] The integrated circuit 1303 has a function of receiving a control signal from the main control unit 1313 or transmitting a control signal or a set value to the photoelectric conversion device 1302 by its own control unit.

[0128] The optical detection system 1301 is connected to a vehicle sensor 1310, and can detect the vehicle's driving state, such as vehicle speed, yaw rate, and steering angle, as well as the state of the environment outside the vehicle, other vehicles, and obstacles. The vehicle sensor 1310 is also a distance information acquisition unit that acquires distance information to an object. The optical detection system 1301 is also connected to a driving assistance control unit 1311 that performs various driving assistance functions, such as automatic steering, automatic cruising, and collision prevention functions. In particular, the collision determination function determines whether or not a collision with another vehicle or obstacle has occurred based on the detection results of the optical detection system 1301 and the vehicle sensor 1310. This allows for avoidance control when a collision is estimated, and activation of a safety device in the event of a collision.

[0129] The light detection system 1301 is also connected to an alarm device 1312 that issues an alarm to the driver based on the result of the determination by the collision determination unit. For example, if the collision determination unit determines that there is a high possibility of a collision, the main control unit 1313 performs vehicle control such as applying the brakes, releasing the accelerator, and suppressing engine output to avoid a collision and reduce damage. The alarm device 1312 issues an alarm to the user using means such as issuing an alarm such as a sound, displaying alarm information on the display screen of the car navigation system and the meter panel, and applying vibration to the seat belt and steering wheel.

[0130] The light detection system 1301 in this embodiment can capture an image of the surroundings of the vehicle, for example, the front or rear of the vehicle. Fig. 20B is a schematic diagram of a moving body in this embodiment, and shows a configuration in which the light detection system 1301 captures an image of the area in front of the vehicle.

[0131] The two photoelectric conversion devices 1302 are disposed in front of the vehicle 1300. Specifically, it is preferable to regard the center line of the vehicle 1300 relative to the forward / backward direction or the outer shape (for example, the vehicle width) as an axis of symmetry, and to dispose the two photoelectric conversion devices 1302 in line symmetry with respect to the axis of symmetry. This makes it possible to effectively obtain distance information between the vehicle 1300 and an object to be photographed and to determine the possibility of a collision. In addition, it is preferable that the photoelectric conversion device 1302 is disposed in a position that does not obstruct the driver's field of vision when the driver visually checks the situation outside the vehicle 1300 from the driver's seat. It is preferable that the alarm device 1312 is disposed in a position that is easily within the driver's field of vision.

[0132] Next, a fault detection operation of the photoelectric conversion device 1302 in the photodetection system 1301 will be described with reference to Fig. 21. Fig. 21 is a flowchart showing the operation of the photodetection system in this embodiment. The fault detection operation of the photoelectric conversion device 1302 can be executed in accordance with steps S1410 to S1480.

[0133] In step S1410, startup settings are made for the photoelectric conversion device 1302. That is, setting information for the operation of the photoelectric conversion device 1302 is transmitted from outside the photodetection system 1301 (e.g., the main control unit 1313) or from inside the photodetection system 1301, and the photoelectric conversion device 1302 starts imaging and fault detection operations.

[0134] Next, in step S1420, the photoelectric conversion device 1302 acquires pixel signals from the valid pixels. In addition, in step S1430, the photoelectric conversion device 1302 acquires output values ​​from failure detection pixels provided for failure detection. The failure detection pixels include photoelectric conversion elements, like the valid pixels. A predetermined voltage is written to the photoelectric conversion elements. The failure detection pixels output signals corresponding to the voltage written to the photoelectric conversion elements. Note that steps S1420 and S1430 may be executed in the reverse order.

[0135] Next, in step S1440, the photodetection system 1301 performs a correspondence determination between the output expected value of the fault detection pixel and the actual output value from the fault detection pixel. If the correspondence determination result in step S1440 indicates that the output expected value and the actual output value match, the photodetection system 1301 proceeds to processing in step S1450, determines that the imaging operation is performed normally, and proceeds to processing in step S1460. In step S1460, the photodetection system 1301 transmits the pixel signal of the scanning row to the storage medium 1305 and temporarily stores it. Thereafter, the photodetection system 1301 returns to the processing in step S1420 and continues the fault detection operation. On the other hand, if the correspondence determination result in step S1440 indicates that the output expected value and the actual output value do not match, the photodetection system 1301 proceeds to processing in step S1470. In step S1470, the light detection system 1301 determines that there is an abnormality in the imaging operation, and issues an alarm to the main control unit 1313 or the alarm device 1312. The alarm device 1312 displays on the display unit that an abnormality has been detected. Then, in step S1480, the light detection system 1301 stops the photoelectric conversion device 1302, and ends the operation of the light detection system 1301.

[0136] In this embodiment, the flowchart is looped for each line, but the flowchart may be looped for each set of lines, or the fault detection operation may be performed for each frame. The issuance of the alarm in step S1470 may be notified to the outside of the vehicle via a wireless network.

[0137] In addition, in this embodiment, the control to prevent collision with other vehicles has been described, but the control can also be applied to automatic driving control to follow other vehicles, automatic driving control not to go out of the lane, etc. Furthermore, the light detection system 1301 is not limited to vehicles such as the vehicle itself, but can be applied to moving bodies (moving devices) such as ships, aircraft, and industrial robots. In addition, the light detection system 1301 is not limited to moving bodies, but can be applied to a wide range of devices that use object recognition, such as intelligent transport systems (ITS).

[0138] The photoelectric conversion device of the present invention may further be configured to be capable of acquiring various types of information such as distance information.

[0139] [Ninth embodiment] FIG. 22(a) is a diagram showing a specific example of an electronic device in this embodiment, showing glasses 1600 (smart glasses). The glasses 1600 are provided with a photoelectric conversion device 1602 described in each of the above-mentioned embodiments. A display device including a light-emitting device such as an OLED or LED may be provided on the back side of the lens 1601. The photoelectric conversion device 1602 may be one or more. Also, multiple types of photoelectric conversion devices may be combined. The arrangement position of the photoelectric conversion device 1602 is not limited to that shown in FIG. 22(a).

[0140] The glasses 1600 further include a control device 1603. The control device 1603 functions as a power source that supplies power to the photoelectric conversion device 1602 and the above-mentioned display device. The control device 1603 also controls the operations of the photoelectric conversion device 1602 and the display device. The lens 1601 is formed with an optical system for collecting light on the photoelectric conversion device 1602.

[0141] FIG. 22(b) shows glasses 1610 (smart glasses) according to one application example. The glasses 1610 have a control device 1612, and the control device 1612 is equipped with a photoelectric conversion device corresponding to the photoelectric conversion device 1602 and a display device. The lens 1611 is formed with a photoelectric conversion device in the control device 1612 and an optical system for projecting light emitted from the display device, and an image is projected onto the lens 1611. The control device 1612 functions as a power source that supplies power to the photoelectric conversion device and the display device, and controls the operation of the photoelectric conversion device and the display device. The control device 1612 may have a line of sight detection unit that detects the line of sight of the wearer. Infrared light may be used to detect the line of sight. The infrared light emission unit emits infrared light toward the eyeball of a user gazing at a display image. An image of the eyeball is obtained by detecting the reflected light of the emitted infrared light from the eyeball with an imaging unit having a light receiving element. By providing a reduction unit that reduces the amount of light from the infrared light emitting unit to the display unit in a plan view, degradation of image quality is reduced.

[0142] The gaze of the user with respect to the displayed image is detected from an image of the eyeball obtained by capturing infrared light. Any known method can be applied to gaze detection using the image of the eyeball. As an example, a gaze detection method based on a Purkinje image formed by reflection of irradiated light on the cornea can be used.

[0143] More specifically, a gaze detection process based on the pupil-corneal reflex method is performed. Using the pupil-corneal reflex method, a gaze vector that indicates the direction (rotation angle) of the eyeball is calculated based on the pupil image and the Purkinje image included in the captured image of the eyeball, thereby detecting the user's gaze.

[0144] The display device of this embodiment may have a photoelectric conversion device having a light receiving element, and may control the display image of the display device based on information on the line of sight of a user from the photoelectric conversion device.

[0145] Specifically, the display device determines a first field of view area to which the user gazes and a second field of view area other than the first field of view area based on the line-of-sight information. The first field of view area and the second field of view area may be determined by a control device of the display device or an external control device. In the display area of ​​the display device, the display resolution of the first field of view area may be controlled to be higher than the display resolution of the second field of view area. In other words, the resolution of the second field of view area may be lower than that of the first field of view area.

[0146] The display area may include a first display area and a second display area different from the first display area. A high priority area may be determined from the first display area and the second display area based on line-of-sight information. The first field of view area and the second field of view area may be determined by a control device of the display device or an external control device. The resolution of the high priority area may be controlled to be higher than the resolution of areas other than the high priority area. In other words, the resolution of an area with a relatively low priority may be lowered.

[0147] In addition, AI (Artificial Intelligence) may be used in determining the first field of view area and the area with high priority. The AI ​​may be a model configured to estimate the angle of the line of sight and the distance to an object at the end of the line of sight from the image of the eyeball, using the image of the eyeball and the direction in which the eyeball in the image was actually looking as teacher data. The AI ​​program may be provided in either the display device or the photoelectric conversion device, or may be provided in an external device. When the external device has the AI ​​program, it may be transmitted from a server or the like to the display device via communication.

[0148] In the case where display control is performed based on visual recognition detection, the present embodiment can be preferably applied to smart glasses further including a photoelectric conversion device that captures an image of the outside world. The smart glasses can display captured outside information in real time.

[0149] [Other embodiments] The present invention is not limited to the above-described embodiments and can be modified in various ways. For example, an example in which a part of the configuration of any of the embodiments is added to another embodiment, or an example in which a part of the configuration of any of the embodiments is replaced with another embodiment, is also an embodiment of the present invention.

[0150] The present invention can also be realized by a process in which a program for implementing one or more of the functions of the above-described embodiments is supplied to a system or device via a network or a storage medium, and one or more processors in a computer of the system or device read and execute the program. The present invention can also be realized by a circuit (e.g., ASIC) for implementing one or more of the functions.

[0151] It should be noted that the above-mentioned embodiments are merely examples of the implementation of the present invention, and the technical scope of the present invention should not be interpreted as being limited by these embodiments. In other words, the present invention can be implemented in various forms without departing from its technical concept or main features. [Explanation of symbols]

[0152] 1 Sensor board 1a Pixel area 2 Circuit Board 3 Photoelectric conversion device 10 pixels 11 APD 20 Signal Processing Section 21 Photon detection circuit 211 Quench element 212 Waveform shaping section 22 Binary Counter 22_n T-type flip-flop 23 Judgment circuit 231 RS latch circuit 232 Inverter circuit 233 Logic Gate Circuits 24 Buffer circuit 25 Switching circuit

Claims

1. an avalanche photodiode; a signal generating unit that generates a detection pulse based on an output generated by a photon being incident on the avalanche photodiode; a counter that counts the detection pulses and outputs a multi-bit count value; a determination circuit that outputs a determination signal indicating that the count value has exceeded a predetermined threshold value based on a transition of any one bit of the counter; a signal processing circuit that corrects the count value in response to the determination signal; the determination circuit determines that the count value has exceeded the threshold value when a value of any one bit of the counter has transitioned; the counter starts counting with the bits other than the one bit of the counter being "1" as an initial value; The photoelectric conversion device, wherein the signal processing circuit determines that the count value has exceeded the threshold value when all bits of the counter are "0".

2. 2. The photoelectric conversion device according to claim 1, further comprising a switching circuit for switching the position in the counter of the 1 bit determined by the determination circuit.

3. an avalanche photodiode; a signal generating unit that generates a detection pulse based on an output generated by a photon being incident on the avalanche photodiode; a counter that counts the detection pulses and outputs a multi-bit count value; a determination circuit that outputs a determination signal indicating that the count value has exceeded a predetermined threshold value based on a transition of any one bit of the counter; a switching circuit for switching one bit determined by the determination circuit in the counter.

4. 4. The photoelectric conversion device according to claim 1, wherein the determination circuit determines that the count value has exceeded the threshold value based on a transition of a most significant bit of the counter.

5. 5. The photoelectric conversion device according to claim 1, wherein the determination signal is added to the count value as a 1-bit value.

6. 5. The photoelectric conversion device according to claim 1, wherein the counter starts counting with a least significant bit of the counter being "1" as an initial value.

7. a signal processing circuit for correcting the count value in response to the determination signal; 4. The photoelectric conversion device according to claim 3, wherein the signal processing circuit determines that the count value has exceeded the threshold value when all bits of the counter are "0".

8. 7. The photoelectric conversion device according to claim 1, wherein the counter stops counting when the count value exceeds the threshold value.

9. 9. The photoelectric conversion device according to claim 8, wherein the signal generating section includes a gate circuit that stops outputting the detection pulse to the counter when the count value exceeds the threshold value.

10. 10. The photoelectric conversion device according to claim 8, wherein the signal generating section includes a quenching element that limits a current to the avalanche photodiode when the count value exceeds the threshold value.

11. 4. The photoelectric conversion device according to claim 3, further comprising a signal processing circuit that corrects the count value in response to the determination signal.

12. 12. The photoelectric conversion device according to claim 1, wherein when the count value exceeds the threshold value, the signal processing circuit invalidates the count value.

13. 12. The photoelectric conversion device according to claim 11, wherein when the count value exceeds the threshold value, the signal processing circuit corrects a plurality of bits of the count value that are equal to or smaller than the threshold value to "1".

14. The photoelectric conversion device according to claim 11 or 13, characterized in that when the determination signal is assigned to the least significant bit "0" of the counter and the counter starts counting with the least significant bit being "1" as its initial value, the signal processing circuit subtracts a value of "1" from the count value.

15. 15. The photoelectric conversion device according to claim 1, wherein the counter is capable of holding the count value having a plurality of bits.

16. the avalanche photodiode, the signal generating unit, the counter, and the determination circuit constitute a pixel circuit, 16. The photoelectric conversion device according to claim 1, wherein a plurality of the pixel circuits are arranged in a two-dimensional array.

17. 17. The photoelectric conversion device according to claim 1, wherein a first substrate on which the avalanche photodiode is provided and a second substrate on which the signal generating unit, the counter, and the judgment circuit are provided are stacked.

18. The photoelectric conversion device according to any one of claims 1 to 17, and a signal processing device that processes a signal output from the photoelectric conversion device.

19. The signal processing device generates a distance image representing distance information to an object based on the signal.

20. The optical detection system of claim 18.

20. A mobile object, The photoelectric conversion device according to any one of claims 1 to 17, a distance information acquisition unit that acquires distance information to an object from a signal output from the photoelectric conversion device; a control unit that controls the moving object based on the distance information; A moving object comprising:

Images