Heat treatment apparatus and heat treatment method

Abstract

To provide a technique for improving temperature controllability at low temperatures.SOLUTION: A heat treatment device according to an embodiment of the present disclosure includes a vertically long processing container, a heating unit that heats the processing container, and a cooling unit that cools the processing container, and the cooling unit includes a plurality of discharge holes provided at intervals in a longitudinal direction of the processing container and discharging a cooling fluid toward the processing container, and a plurality of shutters provided corresponding to the plurality of discharge holes, and at least one of the plurality of shutters is configured to be movable to an open position independently of the others.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a heat treatment apparatus and a heat treatment method. [Background technology]

[0002] 2. Description of the Related Art There is known a heat treatment apparatus including a shutter mechanism that simultaneously opens and closes a plurality of outlets that are provided along the longitudinal direction of a treatment vessel and that blow out a cooling fluid toward the treatment vessel (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-088207 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides techniques that improve temperature controllability at low temperatures. [Means for solving the problem]

[0005] A heat treatment apparatus according to an aspect of the present disclosure includes a vertically elongated treatment container, a heating unit that heats the treatment container, and a cooling unit that cools the treatment container. a temperature detector for detecting a temperature inside the processing vessel; and a controller. the cooling unit includes a plurality of outlet holes provided at intervals in a longitudinal direction of the processing vessel, the outlet holes discharging a cooling fluid toward the processing vessel, and a plurality of shutters provided corresponding to the plurality of outlet holes, The plurality of shutters include a plurality of first shutters provided corresponding to each of the plurality of discharge holes except the uppermost discharge hole, and a second shutter provided corresponding to the uppermost discharge hole and opened and closed independently of the plurality of first shutters, and the control unit executes an upper-part large flow mode in which the plurality of first shutters are moved to a closed position and the second shutter is moved to an open position to control the heating unit based on the detected temperature of the temperature detection unit. . Effect of the Invention

[0006] According to the present disclosure, temperature controllability at low temperatures is improved. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic diagram showing a configuration example of a heat treatment apparatus according to a first embodiment; [Diagram 2] FIG. 2 is a schematic diagram showing a configuration example of a heat treatment apparatus according to the first embodiment; [Diagram 3] FIG. 3 is a schematic diagram showing a configuration example of a heat treatment apparatus according to the first embodiment; [Figure 4] Diagram to explain the entrance of the tributary [Diagram 5] FIG. 1 is a diagram for explaining a shutter mechanism. [Figure 6] A diagram to explain the state when the entrance to the branch is covered with a shutter. [Figure 7] FIG. 1 is a diagram showing an example of an operation of the heat treatment apparatus according to the first embodiment; [Figure 8] FIG. 1 is a schematic diagram showing a configuration example of a heat treatment apparatus according to a second embodiment; [Figure 9] FIG. 2 is a schematic diagram showing a configuration example of a heat treatment apparatus according to a second embodiment; [Figure 10] FIG. 1 shows temperature characteristics and heater output characteristics of the first embodiment. [Figure 11] FIG. 1 shows temperature characteristics and heater output characteristics of Comparative Example 1. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all of the accompanying drawings, the same or corresponding members or parts are designated by the same or corresponding reference numerals, and duplicated descriptions will be omitted.

[0009] [First embodiment] (Heat treatment equipment) An example of the configuration of a heat treatment apparatus according to a first embodiment will be described with reference to FIGS.

[0010] The heat treatment apparatus 1 of the first embodiment includes a processing vessel 10, a heating unit 20, a discharge unit 30, a fluid flow path 40, a shutter mechanism 50, a heat exhaust unit 60, a temperature detection unit 70, and a control unit 80. The discharge unit 30, the fluid flow path 40, the shutter mechanism 50, and the heat exhaust unit 60 configure a cooling unit that cools the processing vessel 10.

[0011] The processing vessel 10 is, for example, a vertically long vessel, and contains a boat. The boat holds a plurality of substrates spaced apart in the height direction. The substrates are, for example, semiconductor wafers. The processing vessel 10 may have a single-tube structure or a double-tube structure. The processing vessel 10 is formed of a heat-resistant material such as quartz. The inside of the processing vessel 10 is depressurized by an exhaust means. The exhaust means includes a pressure control valve, a vacuum pump, and the like. Various gases are introduced into the processing vessel 10 by a gas supply unit. The gas supply unit includes a gas introduction pipe, an opening / closing valve, a flow rate controller, and the like. The various gases include, for example, processing gases such as a film forming gas and an etching gas, and a purge gas such as an inert gas.

[0012] The heating unit 20 is provided around the processing vessel 10 and heats the substrate in the processing vessel 10. The heating unit 20 includes a heat insulating material 21, a heating element 22, and the like.

[0013] The heat insulating material 21 has a cylindrical shape and is made of silica and alumina as main components, however, the shape and material of the heat insulating material 21 are not limited.

[0014] The heating element 22 has a linear shape and is provided in a spiral or serpentine shape on the inner wall of the heat insulating material 21. The heating element 22 generates heat according to the magnitude of power (hereinafter also referred to as "heater output") supplied from a power source (not shown). The heating element 22 is preferably divided into a plurality of zones in the height direction of the processing vessel 10, each of which corresponds to, for example, a plurality of discharge holes 32 described below. This allows the temperature to be controlled independently for each zone.

[0015] Moreover, the heating unit 20 preferably has a metal outer skin such as stainless steel that covers the outer periphery of the heat insulating material 21. This reinforces the heat insulating material 21 and allows the shape of the heat insulating material 21 to be maintained. Moreover, the heating unit 20 preferably further has a water-cooled jacket that covers the outer periphery of the outer skin. This allows the thermal influence of the heat insulating material 21 on the outside to be suppressed.

[0016] The discharge unit 30 discharges a cooling fluid into the space A between the processing vessel 10 and the heating unit 20. The cooling fluid is, for example, air. A plurality of discharge units 30, for example, six discharge units 30, are provided at intervals in the longitudinal direction of the processing vessel 10. It is preferable that the plurality of discharge units 30 are provided corresponding to each of the heating elements 22 which are divided into, for example, a plurality of zones. Each discharge unit 30 has a branch unit 31, a discharge hole 32, an aperture adjustment valve 33, etc.

[0017] The branch portion 31 is a duct that communicates with a fluid flow path 40 described later. A seal member 31b made of rubber or the like is provided around an inlet 31a of the branch portion 31, as shown in Fig. 4. Fig. 4 is a view of the branch portion 31 as seen from the side where the shutter mechanism 50 is provided.

[0018] Discharge hole 32 penetrates insulation 21, one end of which is connected to branch portion 31, and the other end of which is connected to space A. Discharge hole 32 discharges the cooling fluid in a substantially horizontal direction toward processing vessel 10. One discharge hole 32 is formed for one branch portion 31. However, two or more discharge holes 32 may be formed for one branch portion 31.

[0019] The opening adjustment valve 33 is provided in the branch portion 31. The opening adjustment valve 33 is, for example, a butterfly valve, and controls the flow rate of the cooling fluid flowing in the branch portion 31 by changing the angle of a valve body relative to the flow direction of the cooling fluid in the branch portion 31. The opening adjustment valve 33 may be, for example, a manual type having a lever or handle for rotating the valve body. However, the opening adjustment valve 33 may also be an automatic type in which the valve body rotates based on a command from the control unit 80.

[0020] The fluid flow path 40 supplies cooling fluid to the multiple discharge parts 30. The upstream side of the fluid flow path 40 communicates with the heat exhaust part 60, and the downstream side of the fluid flow path 40 communicates with the multiple discharge parts 30. In the fluid flow path 40, an on-off valve 41, a heat exchanger 42, a blower 43, and a buffer space 44 are provided in this order from the upstream side.

[0021] The on-off valve 41 opens and closes the fluid flow path 40. The heat exchanger 42 cools the cooling fluid discharged through the heat exhaust section 60. The blower 43 sends the cooling fluid cooled by the heat exchanger 42 to a buffer space 44. The buffer space 44 communicates with the multiple discharge sections 30, and distributes the cooling fluid sent by the blower 43 to the multiple discharge sections 30.

[0022] The shutter mechanism 50 includes a main shutter 51, a connecting portion 52, a main driving portion 53, an upper shutter 54, a support portion 55, an upper driving portion 56, and the like.

[0023] A plurality of main shutters 51, for example five, are provided at intervals in the height direction of the buffer space 44. Each main shutter 51 is provided corresponding to each of the plurality of branch portions 31 except for the uppermost branch portion 31. Each main shutter 51 is formed of a plate-like member having a size capable of covering the inlet 31a of the branch portion 31. As shown in FIG. 5, each main shutter 51 has a rectangular slit 51a formed therein. However, the shape of the slit 51a is not limited to this and may be a circle, an ellipse, or the like. FIG. 5 is a view of the shutter mechanism 50 as viewed from the discharge portion 30 side.

[0024] The connecting portion 52 connects the multiple main shutters 51 to the main driving portion 53 and transmits the power of the main driving portion 53 to the main shutters 51 .

[0025] The main drive unit 53 is connected to the main shutters 51 via the connecting unit 52. The main drive unit 53 is an actuator such as an air cylinder, and moves the connecting unit 52 to move the main shutter 51 between a closed position covering the inlets 31a of the branch units 31 and an open position separated from the inlets 31a of the branch units 31. FIGS. 1 and 3 show a state in which the main shutter 51 has been moved to the closed position, and FIG. 2 shows a state in which the main shutter 51 has been moved to the open position. In the closed position, as shown in FIG. 6, the outer periphery of each main shutter 51 is in close contact with each seal member 31b, and the slits 51a overlap the inlets 31a of the branch units 31. As a result, the cooling fluid flows into the branch units 31 through the slits 51a. FIG. 6 is a view of the main shutter 51 as viewed from the side of the main drive unit 53 and the upper drive unit 56.

[0026] The upper shutter 54 is provided in the buffer space 44 in correspondence with the uppermost branch portion 31. The upper shutter 54 opens and closes independently of the main shutter 51. The upper shutter 54 is formed of a plate-like member large enough to cover the inlet 31a of the uppermost branch portion 31. As shown in Fig. 5, the upper shutter 54 has a rectangular slit 54a formed therein. However, the shape of the slit 54a is not limited to this and may be circular, elliptical, or the like.

[0027] The support portion 55 connects the upper shutter 54 and the upper drive portion 56 and transmits the power of the upper drive portion 56 to the upper shutter 54 .

[0028] The upper drive unit 56 is connected to the upper shutter 54 via the support unit 55. The upper drive unit 56 is an actuator such as an air cylinder, and moves the support unit 55 to move the upper shutter 54 between a closed position covering the inlet 31a of the uppermost branch unit 31 and an open position separated from the inlet 31a of the uppermost branch unit 31. FIG. 1 shows a state in which the upper shutter 54 has been moved to the closed position, and FIGS. 2 and 3 show a state in which the upper shutter 54 has been moved to the open position. In the closed position, as shown in FIG. 6, the outer periphery of the upper shutter 54 is in close contact with the seal member 31b, and the slit 54a overlaps with the inlet 31a of the branch unit 31. As a result, the cooling fluid flows into the branch unit 31 through the slit 54a.

[0029] The heat exhaust section 60 is a heat exhaust port having one end communicating with the space A above the uppermost discharge hole 32 and the other end communicating with the fluid flow path 40. The heat exhaust section 60 discharges the cooling fluid that has recovered heat in the space A to the outside of the heat treatment device 1. The cooling fluid discharged to the outside of the heat treatment device 1 is cooled by a heat exchanger 42 interposed in the fluid flow path 40 and is supplied again to the space A from the discharge section 30. However, the cooling fluid discharged to the outside of the heat treatment device 1 may be discharged without being reused.

[0030] The temperature detection unit 70 detects the temperature inside the processing vessel 10. The temperature detection unit 70 is, for example, a thermocouple, and a plurality of temperature measuring units 71 of the thermocouple are provided corresponding to each of the heating elements 22 divided into a plurality of zones. However, the temperature detection unit 70 may be provided in the space A outside the processing vessel 10 and detect the temperature of the space A.

[0031] The control unit 80 may be, for example, a computer. The control unit 80 controls the operation of each part of the heat treatment device 1. A computer program for performing the operation of each part of the heat treatment device 1 is stored in a storage medium. The storage medium may be, for example, a flexible disk, a compact disk, a hard disk, a flash memory, a DVD, or the like.

[0032] For example, the control unit 80 switches the control mode to any one of a low flow rate mode, a high flow rate mode, and an upper high flow rate mode, depending on the conditions of the heat treatment performed in the heat treatment device 1.

[0033] 1, the low flow rate mode is a mode in which the heating unit 20 is controlled based on the temperature detected by the temperature detection unit 70 with the main shutter 51 and the upper shutter 54 moved to the closed position. In the low flow rate mode, the main shutter 51 and the upper shutter 54 cover the inlet 31a, so that a low flow rate of cooling fluid passes through the slits 51a and 54a and flows into the branch unit 31. Therefore, a low flow rate of cooling fluid is supplied to the space A.

[0034] 2, the high flow rate mode is a mode in which the heating unit 20 is controlled based on the temperature detected by the temperature detection unit 70 with the main shutter 51 and the upper shutter 54 moved to the open position. In the high flow rate mode, the main shutter 51 and the upper shutter 54 are separated from the inlet 31a, so that a large flow rate of cooling fluid passing through the inlet 31a flows into the branch portion 31. Therefore, a large flow rate of cooling fluid is supplied to the space A.

[0035] 3, the upper high flow rate mode is a mode in which the heating unit 20 is controlled based on the temperature detected by the temperature detection unit 70 with the main shutter 51 moved to the closed position and the upper shutter 54 moved to the open position. In the upper high flow rate mode, the main shutter 51 covers the inlet 31a, so that a small flow rate of cooling fluid passing through the slits 51a flows into the branch units 31 except for the uppermost one, and the upper shutter 54 is separated from the inlet 31a, so that a large flow rate of cooling fluid flows into the uppermost branch unit 31. Therefore, the upper part of the space A is more easily cooled than the central and lower parts of the space A.

[0036] (Heat treatment method) An example of the heat treatment method of the first embodiment will be described with reference to Fig. 7. The heat treatment method of the first embodiment is executed by, for example, a control unit 80 controlling the operation of each unit of the heat treatment apparatus 1.

[0037] As shown in FIG. 7, the heat treatment method includes performing a low-temperature treatment, a warming recovery treatment, and a controlled cooling treatment in this order.

[0038] The low-temperature process includes performing a process on a substrate accommodated in the process vessel 10 while maintaining the inside of the process vessel 10 at a low temperature. In the low-temperature process, the control unit 80 sets the control mode to an upper large flow rate mode. In other words, the control unit 80 controls the heating unit 20 so that the detected temperature of the temperature detection unit 70 becomes the first temperature T1 with the main shutter 51 set to the closed position and the upper shutter 54 set to the open position. As a result, a small flow rate of the cooling fluid passing through the slit 51a flows into the branch portions 31 except the uppermost portion, and a large flow rate of the cooling fluid flows into the uppermost branch portion 31. Therefore, the upper portion of the space A is more easily cooled than the central portion and the lower portion of the space A. In addition, the control unit 80 sets the rotation speed of the blower 43 to 100%, for example. The first temperature T1 may be a low temperature, for example, 30°C to 100°C.

[0039] The temperature rise recovery process includes changing the temperature inside the processing vessel 10 from a low temperature to a high temperature and stabilizing the temperature inside the processing vessel 10 at a high temperature. In the temperature rise recovery process, the control unit 80 switches the control mode from the upper large flow rate mode to the small flow rate mode. In other words, the control unit 80 performs ramping control of the heating unit 20 so that the temperature detected by the temperature detection unit 70 rises from the first temperature T1 to the second temperature T2 while the main shutter 51 and the upper shutter 54 are moved to the closed position. In addition, the control unit 80 sets the rotation speed of the blower 43 to 0%, for example. In addition, the control unit 80 preferably sets the blower 43 to a low speed, for example, in the range of several % to several tens of %, for a predetermined time after the temperature detected by the temperature detection unit 70 reaches the second temperature T2. Thereby, a small flow rate of cooling fluid is supplied toward the processing vessel 10, and overshooting can be suppressed. The second temperature T2 is a temperature higher than the first temperature T1, and may be a high temperature of, for example, 600°C to 1000°C.

[0040] The controlled cooling process includes changing the temperature inside the processing vessel 10 from a high temperature to a predetermined temperature lower than the high temperature, and stabilizing the temperature inside the processing vessel 10 at the predetermined temperature. In the controlled cooling process, the control unit 80 switches the control mode from a low flow rate mode to a high flow rate mode. In other words, the control unit 80 performs ramping control of the heating unit 20 so that the temperature detected by the temperature detection unit 70 drops from the second temperature T2 to the third temperature T3 while the main shutter 51 and the upper shutter 54 are moved to the open position. In addition, the control unit 80 sets the rotation speed of the blower 43 to 100%, for example. In addition, it is preferable that the control unit 80 gradually reduces the rotation speed of the blower 43 from 100% to 0% after the temperature detected by the temperature detection unit 70 approaches the third temperature T3. Thereby, the flow rate of the cooling fluid supplied toward the processing vessel 10 gradually decreases, so that overshooting can be suppressed. The third temperature T3 is a temperature higher than the first temperature T1 and lower than the second temperature T2, and may be, for example, 100°C to 600°C.

[0041] Incidentally, in the case of a shutter mechanism in which all the shutters are opened and closed simultaneously, in low-temperature processing, the control mode is set to the high flow rate mode, and temperature control is performed while recovering heat with the cooling fluid supplied to the space A. In this case, since the heat exhaust unit 60 is provided above the uppermost discharge hole 32, the direction of heat recovery is from the lower part of the space A to the upper part, and the temperature of the upper part of the space A tends to be higher than the temperature of the central part and the lower part of the space A. Therefore, the control unit 80 controls the heater output for the uppermost heating element 22 to be smaller than the heater output for the other heating elements 22. However, in low-temperature control, the heater output for the uppermost heating element 22 becomes 0%, and there are cases in which the temperature of the upper part of the space A cannot be controlled to the set temperature.

[0042] In contrast, the heat treatment apparatus 1 of the first embodiment is provided with a shutter mechanism 50 having an upper shutter 54 that opens and closes independently of the main shutter 51. As a result, in low-temperature treatment, by opening the upper shutter 54 with the main shutter 51 closed, it is possible to reduce the amount of cooling fluid supplied to the center and lower part of the space A and increase the amount of cooling fluid supplied to the upper part of the space A. Therefore, the upper part of the space A can be cooled more efficiently than the center and lower part of the space A, and it is possible to prevent the heater output to the uppermost heating element 22 from becoming 0%. As a result, temperature controllability at low temperatures is improved.

[0043] Second Embodiment (Heat treatment equipment) An example of the configuration of a heat treatment apparatus according to a second embodiment will be described with reference to FIGS.

[0044] The heat treatment apparatus 1A of the second embodiment differs from the heat treatment apparatus 1 of the first embodiment in that it includes a shutter mechanism 150 having a plurality of shutters 151 that open and close independently of the others. The rest of the configuration may be the same as that of the heat treatment apparatus 1 of the first embodiment. The following description will focus on the differences from the heat treatment apparatus 1 of the first embodiment.

[0045] The shutter mechanism 150 includes a shutter 151, a support portion 152, a drive portion 153, and the like.

[0046] A plurality of, for example, six, shutters 151 are provided at intervals in the height direction of the buffer space 44. Each shutter 151 is provided corresponding to each of the plurality of tributaries 31. Each shutter 151 is formed of a plate-like member large enough to cover the inlet 31a of the tributary 31. Each shutter 151 has a rectangular slit 151a formed therein.

[0047] The support portion 152 connects the shutter 151 and the drive portion 153 , and transmits the power of the drive portion 153 to the shutter 151 .

[0048] The driving unit 153 is connected to the shutter 151 via the support unit 152. The driving unit 153 is an actuator such as an air cylinder, and moves the support unit 152 to move the shutter 151 between a closed position covering the inlet 31a of the branch unit 31 and an open position separated from the inlet 31a of the branch unit 31. FIG. 8 shows a state in which all the shutters 151 have been moved to the closed position. FIG. 9 shows a state in which the first and fourth shutters 151 from the top have been moved to the open position, and the second, third, fifth and sixth shutters 151 from the top have been moved to the closed position. In the closed position, the outer periphery of the shutter 151 is in close contact with the seal member 31b, and the slit 151a overlaps with the inlet 31a of the branch unit 31. As a result, the cooling fluid flows into the branch unit 31 through the slit 151a.

[0049] (Heat treatment method) An example of the heat treatment method according to the second embodiment will be described below. The heat treatment method according to the second embodiment is executed by, for example, the control unit 80 controlling the operation of each unit of the heat treatment apparatus 1A.

[0050] The heat treatment method of the second embodiment includes performing a low-temperature treatment, a warming recovery treatment, and a controlled cooling treatment in this order, similarly to the heat treatment method of the first embodiment.

[0051] In the low temperature process, the control unit 80 sets the control mode to the upper large flow rate mode. In the heating recovery process, the control unit 80 sets the control mode to the small flow rate mode. In the controlled cooling process, the control unit 80 sets the control mode to the large flow rate mode.

[0052] The upper high flow rate mode is a mode in which all shutters 151 except the top one are moved to the closed position, and the heating unit 20 is controlled based on the temperature detected by the temperature detection unit 70 with the topmost shutter 151 moved to the open position.

[0053] The small flow rate mode is a mode in which the heating unit 20 is controlled based on the temperature detected by the temperature detection unit 70 with all the shutters 151 moved to the closed position.

[0054] The high flow rate mode is a mode in which the heating unit 20 is controlled based on the temperature detected by the temperature detection unit 70 with all the shutters 151 moved to the open position.

[0055] The heat treatment apparatus 1A of the second embodiment includes a shutter mechanism 50 in which each shutter 151 opens and closes independently of the others. As a result, in low-temperature treatment, by opening the uppermost shutter 151 while keeping all shutters 151 except the uppermost one closed, it is possible to reduce the amount of cooling fluid supplied to the center and lower part of the space A and increase the amount of cooling fluid supplied to the upper part of the space A. Therefore, the upper part of the space A can be cooled more efficiently than the center and lower part of the space A, and it is possible to prevent the heater output to the uppermost heating element 22 from becoming 0%. As a result, temperature controllability at low temperatures is improved.

[0056] [Example] An example will be described in which the temperature controllability when low-temperature treatment is performed in the above-mentioned heat treatment apparatus 1 is evaluated. Hereinafter, in the heat treatment apparatus 1, height regions corresponding to the first, second, third, fourth, fifth and sixth discharge holes 32 from the bottom are referred to as the bottom region, the first center region, the second center region, the third center region, the fourth center region and the top region, respectively.

[0057] In Example 1, the rotation speed of the blower 43 was set to 100%, the main shutter 51 was closed, and the upper shutter 54 was open, and the temperature and heater output changes over time were evaluated when the heating unit 20 was controlled based on the temperature detected by the temperature detection unit 70. In Example 1, the control temperatures of all regions were initially set to 55°C, and after 4 minutes, the control temperature of only the top region was changed from 55°C to 54°C, and after 19 minutes, the control temperature of only the top region was changed from 54°C to 53.5°C.

[0058] In Comparative Example 1, the rotation speed of the blower 43 was set to 100%, and the temperature and heater output were evaluated over time when the heating unit 20 was controlled based on the temperature detected by the temperature detection unit 70 while the main shutter 51 and the upper shutter 54 were open. In Comparative Example 1, the control temperatures of all the regions were initially set to 55°C, and the control temperature of the top region was changed from 55°C to 54°C after 5 minutes.

[0059] Fig. 10 is a diagram showing temperature characteristics and heater output characteristics of Example 1. Fig. 10(a) shows the time changes of the control temperature and the detection temperature, and Fig. 10(b) shows the time changes of the heater output. In Fig. 10(a), the horizontal axis shows time [min], the vertical axis shows temperature [°C], the control temperature is shown by a thin line, and the detection temperature is shown by a thick line. In Fig. 10(b), the horizontal axis shows time [min], and the vertical axis shows heater output [%].

[0060] Fig. 11 is a diagram showing the temperature characteristics and heater output characteristics of Comparative Example 1. Fig. 11(a) shows the time changes of the control temperature and the detection temperature, and Fig. 11(b) shows the time changes of the heater output. In Fig. 11(a), the horizontal axis shows time [min], the vertical axis shows temperature [°C], the control temperature is shown by a thin line, and the detection temperature is shown by a thick line. In Fig. 11(b), the horizontal axis shows time [min], and the vertical axis shows heater output [%].

[0061] As shown in FIG. 10(a), in Example 1, it can be seen that the detected temperature in the region (BTM, CTR-1 to 4) where the control temperature is fixed at 55°C is approximately the same as the control temperature. Also, in Example 1, it can be seen that the detected temperature in the region (TOP) where the control temperature is changed from 55°C to 54°C and 53.5°C in the middle is approximately the same as the control temperature after about 10 minutes have passed since the control temperature was changed. From these results of Example 1, it was shown that high temperature controllability can be obtained by setting the rotation speed of the blower 43 to 100%, closing the main shutter 51, and controlling the heating unit 20 based on the detected temperature of the temperature detection unit 70 with the upper shutter 54 open. This is considered to be because, as shown in FIG. 10(b), in Example 1, the heater output is not 0% in both the region where the control temperature is fixed at 55°C and the region where the control temperature is changed in the middle, and the control by the heating unit 20 is functioning.

[0062] On the other hand, as shown in FIG. 11(a), in Comparative Example 1, it is understood that the detected temperature in the region (BTM, CTR-1 to 4) where the control temperature is fixed at 55°C is approximately the same as the control temperature. However, in Comparative Example 1, it is understood that the detected temperature in the region (TOP) where the control temperature is changed from 55°C to 54°C midway does not reach the control temperature even after 25 minutes have passed since the control temperature was changed from 55°C to 54°C. These results of Comparative Example 1 show that high temperature controllability cannot be obtained when the rotation speed of the blower 43 is set to 100% and the heating unit 20 is controlled based on the detected temperature of the temperature detection unit 70 with the main shutter 51 and the upper shutter 54 open. This is considered to be because, as shown in FIG. 11(b), in Comparative Example 1, when the control temperature of the top region is changed from 55°C to 54°C midway, the heater output of the top region is 0%, and the control by the heating unit 20 does not function.

[0063] From the above results, it can be said that temperature controllability at low temperatures can be improved by setting the rotation speed of the blower 43 to 100%, closing the main shutter 51, and opening the upper shutter 54 while controlling the heating unit 20 based on the temperature detected by the temperature detection unit 70.

[0064] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0065] 1 Heat treatment equipment 10 Processing vessel 20 Heating section 30 Discharge part 32 Discharge hole 40 Fluid flow path 50 Shutter mechanism 51 Main Shutter 54 Upper shutter 150 Shutter mechanism 151 Shutter

Claims

1. A vertically long processing vessel; A heating unit that heats the processing vessel; A cooling unit that cools the processing vessel; a temperature detection unit that detects a temperature inside the processing vessel; A control unit; Equipped with The cooling unit includes: a plurality of outlet holes provided at intervals in a longitudinal direction of the processing vessel and configured to discharge a cooling fluid toward the processing vessel; A plurality of shutters provided corresponding to the plurality of discharge holes; having The plurality of shutters include a plurality of first shutters provided corresponding to the plurality of discharge holes except for the uppermost discharge hole; a second shutter provided in correspondence with the uppermost discharge hole and adapted to open and close independently of the first shutters; having the control unit executes an upper large flow mode in which the control unit moves the first shutters to a closed position and the second shutters to an open position, and controls the heating unit based on the detected temperature of the temperature detection unit. Heat treatment equipment.

2. The heating unit includes a plurality of heating elements provided at intervals in the longitudinal direction of the processing vessel. The heat treatment apparatus according to claim 1 .

3. The plurality of shutters are provided corresponding to the plurality of heat generating elements, The heat treatment apparatus according to claim 2 .

4. Each of the shutters has a slit through which the cooling fluid passes. The heat treatment apparatus according to claim 1 .

5. The first shutters are connected to each other and configured to be movable as a unit to an open position. The heat treatment apparatus according to claim 1 .

6. The plurality of first shutters are configured so that each can be moved to an open position independently of the others. The heat treatment apparatus according to claim 1 .

7. The cooling unit has a plurality of opening adjustment valves provided corresponding to the plurality of discharge holes, The heat treatment apparatus according to claim 1 .

8. The cooling unit has a blower that sends the cooling fluid to each of the plurality of discharge holes. The heat treatment apparatus according to claim 1 .

9. The cooling unit has a heat exhaust port that exhausts the cooling fluid discharged from the plurality of discharge holes from above the uppermost discharge hole. The heat treatment apparatus according to claim 1 .

10. The processing vessel accommodates a plurality of substrates spaced apart in a longitudinal direction. The heat treatment apparatus according to claim 1 .

11. A heat treatment method in a heat treatment apparatus including a heating unit that heats a vertically elongated treatment vessel, a cooling unit that cools the treatment vessel, and a temperature detection unit that detects a temperature inside the treatment vessel, comprising: The cooling unit includes: a plurality of outlet holes provided at intervals in a longitudinal direction of the processing vessel and configured to discharge a cooling fluid toward the processing vessel; A plurality of shutters provided corresponding to the plurality of discharge holes; having The plurality of shutters include a plurality of first shutters provided corresponding to the plurality of discharge holes except for the uppermost discharge hole; a second shutter provided in correspondence with the uppermost discharge hole and adapted to open and close independently of the first shutters; having an upper part high flow rate mode is executed in which the heating unit is controlled based on the detected temperature of the temperature detection unit while the first shutters are moved to a closed position and the second shutters are moved to an open position; Heat treatment method.

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