Liquid Delivery Systems

Abstract

A sealing assembly is provided that uses a combination of replaceable insert-type seals and flange and groove seals formed within modular components. A modular system for dispensing liquid chemicals includes a substrate block having at least two ports formed in a first major surface of the block and a fluid passage extending between the two ports. The fluid path is preferably a seamless, smooth path whose entire volume is perfectly aligned with the desired fluid flow, so that the fluid flows completely through the entire passage and there are no stagnant volumes or areas within the passage. The substrate block can be formed from a fluoropolymer using a novel composition and manufacturing process.

Description

[Technical field]

[0001] This application claims priority to U.S. Provisional Patent Application No. 62 / 318,202, by Chris Melcer et al., entitled "LIQUID DELIVERY SYSTEM," filed April 4, 2016, which is incorporated by reference in its entirety.

[0002] The present invention relates to a liquid chemical delivery system, and more particularly to a modular, tubeless liquid chemical delivery system having a significantly reduced footprint. [Background technology]

[0003] Liquid delivery and dispensing systems are used in a variety of applications including semiconductor device manufacturing, pharmaceutical manufacturing, etc. For example, semiconductor wafers undergo various liquid treatment processes during their manufacturing process, such as etching, cleaning, polishing, drying, and material deposition. Semiconductor substrate processing generally requires that precise amounts of liquid chemicals be delivered on demand, be bubble-free, have a uniform thickness over the usable portion of the substrate, and minimize chemical waste due to cost and environmental concerns. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] U.S. Provisional Patent Application No. 62 / 318,202 Summary of the Invention [Problem to be solved by the invention]

[0005] Various types of liquid delivery systems are used to deliver liquid chemicals from a source to a process using various types of active components such as flow controllers, pressure transducers, flow measurement sensors, pressure regulators, and valves. In many of these applications, the size of the liquid chemical distribution system can dramatically affect the cost. For example, in the manufacturing of semiconductor devices, the liquid distribution system or some portion of the liquid distribution system is typically housed in an extremely clean environment such as a clean room. Furthermore, because many of the liquids used in semiconductor manufacturing are toxic or highly reactive, or both, such distribution systems often require special containment and exhaust equipment. For such systems, a reduction in the size of the fluid distribution system is advantageous. [Means for solving the problem]

[0006] According to an embodiment of the present invention, there is provided a modular system for dispensing liquid chemicals, the system comprising a substrate block including at least two ports formed in a first major surface of the block and a fluid passageway extending between the two ports, the fluid path is preferably a seamless, smooth path with the entire volume of the fluid path perfectly conforming to the desired fluid flow such that the fluid flow is completely distributed throughout the entire flow path and there are no stagnant volumes or areas within the fluid passageway.

[0007] According to another embodiment of the present invention, a substrate block can be formed from a fluoropolymer using a novel composition and manufacturing process.

[0008] In accordance with another embodiment of the present invention, a sealing assembly is provided that uses a combination of replaceable insert type seals and flange and groove seals formed within modular components.

[0009] The foregoing has outlined rather broadly the features and technical advantages of the present invention in order that the detailed description of the invention that follows may be better understood. Below, additional features and advantages of the present invention are described. It should be appreciated by those skilled in the art that the conception and specific embodiments disclosed may be readily utilized as a basis for modifying or designing other structures for carrying out the same purposes of the present invention. Moreover, it should be appreciated by those skilled in the art that such equivalent constructions do not depart from the spirit and scope of the invention as set forth in the appended claims.

[0010] For a more complete understanding of the present invention, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which: [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 shows a prior art substrate block. [Diagram 2] FIG. 1 is a perspective view of a modular liquid chemical delivery system according to one embodiment of the present invention. [Diagram 3] FIG. 2 is a bottom perspective view of the modular liquid chemical delivery system of FIG. 1. [Figure 4] FIG. 2 illustrates a modular substrate block according to an embodiment of the present invention. [Figure 5A] FIG. 5 is an exploded view of the base block of FIG. [Figure 5B] FIG. 5 is an exploded view of the base block of FIG. [Figure 6A] FIG. 5 is a cross-sectional perspective view of the substrate block of FIG. [Figure 6B] FIG. 5 is a cross-sectional perspective view of the substrate block of FIG. [Figure 7] FIG. 5 is a cross-sectional view of the substrate block of FIG. [Figure 8A] 13A-13C illustrate another embodiment of a modular substrate block according to an embodiment of the present invention. [Figure 8B] 13A-13C illustrate another embodiment of a modular substrate block according to an embodiment of the present invention. [Figure 9A]FIG. 13 is a top (seal side) perspective view of another modular substrate block according to one embodiment. [Figure 9B] FIG. 9B is a bottom perspective view of the modular substrate block of FIG. 9A. [Figure 10A] FIG. 9B is a top view of the modular substrate block of FIG. 9A. [Figure 10B] 9B is a cross-sectional view of the modular substrate block of FIG. 9A taken along line AA. [Figure 10C] 9B is a cross-sectional view of the modular substrate block of FIG. 9A taken along line BB. [Figure 11A] FIG. 1 illustrates fluid flow paths through the substrate block and active components according to one embodiment. [Figure 11B] FIG. 11B is a partially enlarged view of FIG. 11A. [Figure 12A] FIG. 1 illustrates a replaceable insert seal according to one embodiment. [Figure 12B] FIG. 1 illustrates a replaceable insert seal according to one embodiment. [Figure 13A] FIG. 1 illustrates a replaceable insert seal according to one embodiment. [Figure 13B] FIG. 13B is a cutaway view of the seal of FIG. 13A. [Figure 14A] FIG. 2 illustrates a substrate block according to one embodiment. [Figure 14B] FIG. 13 illustrates another embodiment of a replaceable insert seal. [Figure 15A] Figure 14B shows the replaceable insert seal. [Figure 15B] Figure 14B is a cutaway view of the replaceable insert seal. [Figure 16A] FIG. 1 is a perspective view of another replaceable insert seal according to one embodiment. [Figure 16B] FIG. 16B is a cross-sectional view of the seal of FIG. 16A taken along line AA. [Figure 16C] FIG. 16C is an enlarged view of the cross section of FIG. 16B. [Figure 17A]1A-1C show various possible flange and groove like structures that can be used as secondary or primary seal structures according to embodiments of the present invention. [Figure 17B] 1A-1C show various possible flange and groove like structures that can be used as secondary or primary seal structures according to embodiments of the present invention. [Figure 17C] 1A-1C show various possible flange and groove like structures that can be used as secondary or primary seal structures according to embodiments of the present invention. [Figure 17D] 1A-1C show various possible flange and groove like structures that can be used as secondary or primary seal structures according to embodiments of the present invention. [Figure 18] FIG. 2 illustrates another embodiment of a liquid chemical delivery system according to an embodiment of the present invention. [Figure 19] FIG. 2 is a perspective view of a substrate block with embedded active components according to one embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] The accompanying drawings are not intended to be drawn to scale, and in these drawings, identical or nearly identical components shown in various figures are represented by like reference numerals, respectively, and for purposes of clarity, not every component in every drawing is labeled.

[0013] Embodiments of the present invention provide a modular, tubeless liquid chemical delivery system that has a significantly smaller footprint than prior art systems. Although modular fluid delivery systems for use in gas delivery and distribution are well known, there are several factors that make these prior art systems unsuitable for liquid chemical delivery systems. First, prior art modular substrate blocks (which provide the fluid pathways) are typically fabricated from solid metals such as stainless steel. Many of the liquid chemicals used in semiconductor manufacturing are corrosive to metals. Furthermore, metal ions tend to be extracted into liquids in contact with metal surfaces, which can result in highly undesirable deposition of metal ions on wafer surfaces during the manufacturing process.

[0014] Moreover, the fluid passages, inlet and outlet ports in the prior art substrate block are formed by drilling the block of material. Such a prior art substrate block 101 is shown in Figures 1A and 1B. The internal passages in Figure 1B are shown in dashed lines. As shown in Figure 4B, drilling the desired fluid passage 106 results in a certain amount of "overshoot" (areas 107, 108) where the internal fluid passage 106 meets the inlet and outlet ports 102. To drill the internal fluid pathways (running in a direction parallel to the top surface 104 of the substrate block (containing the ports 102)), it is necessary to enter the drill from the side 109 of the substrate block, and when drilling from the side 109 of the substrate block, it is necessary to plug a portion of the drilled pathway with a plug 105 to isolate the desired fluid pathway. All of these factors result in some undesirable stagnant volume in the fluid pathway.

[0015] Embodiments of the present invention utilize modular substrate blocks formed from polymers or fluoropolymers such as polypropylene, PTFE, modified PTFE or PFA, etc. In a preferred embodiment, the modular substrate blocks are formed from materials that meet the requirements set forth in SEMI F57 for surface extractable ions, metals, and total organic carbon contamination in a 7-day static leaching test in ultrapure water at 85±5° C.

[0016] FIG. 4 illustrates a modular substrate block 401 according to an embodiment of the invention. The modular substrate block 401 has a single fluid pathway 406 connecting two ports 402 located on the top surface 404 of the block. In some embodiments, blocks of various sizes may be used, some of which have multiple port pairs and multiple fluid passages within the same block. With further reference to FIGS. 2-3, the modular substrate block 401 may be referred to as a "jumper block" and may be used, for example, to fluidly connect two active components (connecting the outlet of a first active component to the inlet of a second active component) or to connect one active component to another substrate block. As will be described later, in some embodiments, substrate blocks with multiple flow passages and inlet / outlet ports may also be used.

[0017] Figure 2 is a perspective view of a modular liquid chemical delivery system 200 according to one embodiment of the present invention. Figure 3 is a bottom perspective view of the modular liquid chemical delivery system 200 of Figure 2 without the back plane and some substrate blocks shown for clarity. In the embodiment of Figure 2, there are three layers to the system: a top layer of active components (such as flow controllers, pressure transducers, flow measurement sensors, pressure regulators, valves, etc.), a second middle layer of substrate blocks (which serve to form the fluid connections between the active components), and a back plane that acts as a support structure for the entire system.

[0018] 8A and 8B, substrate block 201 is typically attached to backplane 210 by screws or other similar fasteners that extend from the top surface of the substrate (the same surface containing the inlet / outlet ports) through fastener holes 852 and into the backplane to hold the substrate block in place. In some embodiments, adjacent substrate blocks may also be bonded together for added stability.

[0019] Each active component (212, 213, 214, 215, 216, 217) can be held in place on one (or more) substrate blocks 201 by at least two screws or similar fasteners that serve to attach the active component to the substrate block and hold it in the proper position relative to the inlet / outlet ports on the surface of the substrate block. Typically, the active component can be attached to the first substrate block by two screw holes 854 on either side of the inlet / outlet ports, and can be attached to the second substrate block (and ports) in the same manner. In some embodiments, an insert with a metal female thread that mates with the connection threads of the active component can be suitably placed inside the polymer body of the substrate block. In the drawings herein, fastener and screw holes are not shown in most figures for clarity.

[0020] This modular approach using circuit board blocks still allows direct access to each component and requires only manual hand tools such as, but not limited to, Allen wrenches to install and remove active components. Direct access to active components simplifies repairs by removing only the damaged active component, thereby reducing downtime. Because the circuit board blocks are standardized, active components can be placed anywhere in the system.

[0021] In the embodiment of FIG. 2, the liquid connections to and from the liquid chemical delivery system are made by pipe fittings 215. One or more liquid chemicals used in the process typically flow through tubing from a storage tank (not shown). The tubing is connected to the system 200 by pipe fittings 215. Once in the system 200, the liquid chemicals flow through the positioned substrate blocks to various active components and are finally delivered (also via pipe fittings 215) to one or several delivery tubes leading to the desired processing site. In the embodiment of FIG. 2, the active components include regulators 214, pressure transducers 217, valves 216, liquid flow controllers 213 and flow meters 212. As used herein, the total area occupied by all system components (including active components and substrate blocks) of the liquid delivery system and the free space between such components from the inlet pipe fittings to the outlet pipe fittings is referred to as the system "footprint."

[0022] While the methods described herein can be used to form substrate blocks having virtually any desired size and configuration, in the embodiment of FIG. 4, the substrate block is approximately 55 mm wide and approximately 25 mm (1 inch) thick. The inner diameter of the flow path can be any desired size including, for example, ¼ inch, ⅜ inch, or ½ inch. Importantly, in preferred embodiments, the internal fluid path is a smooth passageway with substantially no seams, and the entire volume of the path is perfectly matched to the desired fluid flow. In other words, there is no stagnation volume / area or plugged area as found in the prior art structure of FIG. 1B. Particularly with respect to slurries, stagnation volume can result in particle retention and an undesirable increase in the number of large particles. Substrate blocks according to embodiments of the present invention contribute to achieving <0.1 particles / ml (particle size >0.1 μm) in a 300 liter jet.

[0023] FIG. 4 illustrates a modular substrate block 401 according to an embodiment of the invention. In some embodiments, the substrate block of FIG. 4 can be manufactured by machining two separate fluoropolymer layers and then joining them together by melt bonding at seam 426. FIGS. 5A and 5B illustrate exploded views showing top layer 522 and bottom layer 523, FIGS. 6A and 6B illustrate perspective views of a cross section of the substrate block of FIG. 4 along line AA, and FIG. 7 illustrates a cross section of the substrate block of FIG. 4 along line AA. The top surface of bottom layer 523 can be machined using known techniques to form smooth grooves 528 at the desired flow channel locations. The bottom surface of top layer 522 can be machined to form corresponding grooves (not shown). Additionally, inlet and outlet ports 402 can be drilled through top layer 522 at each end of the flow channel. When these two layers are brought together, the two corresponding grooves form the smooth flow channel 606 shown in FIGS. 6A and 6B.

[0024] After the two layers are machined and properly positioned, the two layers can be bonded together using a fusion bonding technique that uses a combination of heat and pressure. The exact temperature / pressure / time combination required for fusion bonding is known in the art and will vary depending on the specific fluoropolymer used to form the layers. In some embodiments, the two layers can be formed from modified PTFA and can be bonded together by heating to a temperature of about 350°C to 380°C under a pressure of about 450 psi for an hour (or longer). Under these conditions, the modified PTFE polymer chains in the two layers intertwine, thereby permanently bonding the two surfaces at a molecular level and forming a homogenous solid block of modified PTFE.

[0025] While the substrate block of Figure 4 has a very simple single flow passage connecting only two inlet / outlet ports, one skilled in the art will recognize that these same techniques can be used to create much more complex flow passages between any number of inlet / outlet ports desired. For example, Figures 8A and 8B show a substrate block with four different flow paths 825 and eight inlet / outlet ports 820. In some embodiments, two or more fluoropolymer layers can be used to create even more complex 3D flow paths. The substrate block can also be used as a manifold in which two or more inlet flow paths are combined with a single outlet flow path.

[0026] In other embodiments, known fluoropolymer molding techniques such as compression molding or isostatic molding can be used to produce fluoropolymer blocks with the desired flow passages and inlet / outlet ports. Some suitable fluoropolymers (such as PFA) are known to be melt processable, and injection molding techniques can be used to mold them. In other embodiments, PTFE or other fluoropolymer powder can be filled into a mold, which can then be sintered under appropriate conditions to form two layers such as those shown in Figures 5A and 5B without the need for any machining to form the flow passage or passages. A complete substrate block with one or more flow passages can be directly formed by sintering PTFE or other fluoropolymer powder in a similar manner. Those skilled in the art will recognize that the use of some or all of these techniques, or any combination of these techniques, is within the scope of the present invention.

[0027] Figures 9A and 9B show perspective views of another modular substrate block 901 according to an embodiment of the invention from the top (sealed side) and bottom, respectively. In some embodiments, the substrate block of Figures 9A and 9B can be manufactured by injection molding using a material such as PFA, although other suitable manufacturing methods and materials can be used within the scope of the invention. Figure 10A shows a top (sealed) view of modular substrate block 901, Figure 10B shows a cross-sectional view along line AA, and Figure 10C shows a cross-sectional view along line BB.

[0028] In some embodiments, a multi-part mold can be used to form the body of the modular substrate block, and removable curved inserts are used to form the smooth fluid path 906. Regardless of the exact method of manufacture, the modular substrate block embodiments include one or more smooth fluid paths that are substantially seamless, with the entire volume of the fluid path conforming perfectly to the desired fluid flow, such that the fluid flow flows completely throughout the entire flow path, and there are no stagnant volumes or areas within said fluid passages. In the embodiment of FIG. 10B, the fluid flow path forms a smooth arc with no corners or sharp walls. Such an arc helps to largely eliminate stagnant volumes or areas where liquid can stagnate.

[0029] The body of the modular substrate block can be formed as a substantially solid block of material, except for the fluid paths and screw holes, similar to the examples discussed above. In other embodiments, the body of the modular substrate block can be formed with only the necessary support walls 959, as shown in the examples of Figures 9A to 11C. Such an embodiment is particularly advantageous for injection molding, since the thickness of all the different sections of the body is substantially the same, making it easier to fill all sections of the mold evenly to avoid unwanted voids. Such an embodiment, shown in Figure 9B, has a larger surface area compared to the solid structure of Figure 4, which may allow the modular substrate block to withstand higher temperatures.

[0030] In some embodiments, an abrasive material can be flushed through the substrate block after it is formed containing the desired flow paths to remove any significant seams or molding artifacts and ensure smooth flow paths. Alternatively, the internal flow paths can be manually or automatically smoothed using specially designed tools.

[0031] Referring again to Figures 2-3, substrate blocks according to the invention can be combined to form a weld- and tube-free flow path connecting a liquid source to a process through virtually any desired arrangement of active components (e.g., valves, pressure transducers, flow controllers, etc.). Liquid flows through passages in the substrate blocks, rather than through separate tubes. In this manner, the present invention provides a solution that overcomes the problems of the prior art by providing a plurality of individual substrate blocks, each having at least one fluid passage and inlet and outlet ports that access a common surface. That common surface can be used to mount standard active components, such as flow controllers, pressure transducers, flow measurement sensors, pressure regulators, valves, etc. In some embodiments, the common surface of each adjacent manifold block is maintained in a common plane to facilitate sealing requirements. The active components bridge or extend across adjacent substrate blocks, and the substrate blocks are removably aligned and mounted (as described above) to allow the respective fluid passages to be positioned for sealed interconnection.

[0032] The applicants have found that using these types of modular components enabled by the novel systems and processes described herein can provide liquid chemical delivery systems with footprints less than half the size of typical prior art liquid chemical delivery systems. Unlike conventional liquid delivery systems where components are connected via fittings and tubes, embodiments of the system of the present invention allow components to be positioned with very small gaps between components. In preferred embodiments, adjacent components can be positioned with gaps less than 20 mm, e.g., less than 10 mm, less than 5 mm, about 1 mm, or less than 1 mm apart. Furthermore, in some embodiments, the use of standardized widths for active components (e.g., 55 mm) allows the various components to be positioned without wasted space between parallel liquid flow paths. In preferred embodiments, the ratio of wasted space to total system footprint can be as low as 30%, and this ratio can be, for example, 20%, 10%, or 5%. The use of such modular components further helps to significantly reduce design time and expense associated with custom parts and / or tube assemblies.

[0033] As explained above, in some embodiments of the present invention, active components are mounted on the substrate blocks by screws or other fasteners. Threaded holes 854 are located on both sides of each inlet / outlet port. In some embodiments, metal inserts are placed inside the threaded holes 854 to provide metal threads and facilitate a tight connection. Thus, the underside of each active component has a corresponding inlet / outlet port held in place on the inlet / outlet port of the substrate block. In a preferred embodiment, the housing of the active component 962 is also formed from a polymer or fluoropolymer. FIG. 11A shows the fluid flow path (indicated by arrows 1164) of one embodiment. An active component 1162 (a valve in this example) is mounted on top of the outlet port of the first substrate block 401A such that the fluid path inside the active component 1162 is fluidly connected to the fluid path in the substrate block 401A. Similarly, active component 1162 is mounted to substrate block 401B such that the outlet port of active component 1162 is positioned over the inlet port of substrate block 401B and the fluid path from active component 962 is fluidly connected to the fluid passage in substrate block 401B.

[0034] FIG. 11B is a close-up of the portion inside dashed box 1170 of FIG. 11A. As shown in FIG. 11B, the desired fluid path (line 1164) leads from substrate block 401A through inlet / outlet ports on the top surface of substrate block 401A and the bottom surface of active components 1162, into component fluid passages 1163. Even if the connection between the components and substrate block is tight, there is still a possibility of leakage (in the direction indicated by arrow 1166). Also, the surface-to-surface interface has the potential for liquid retention, which can lead to microbial growth or high particle counts. Accordingly, in some embodiments, one or more sealing assemblies are used to prevent leakage at the connections between the active components and substrate blocks.

[0035] Some embodiments of the invention utilize flange and groove structures and / or inserts to provide a seal between active components and substrate blocks. In some embodiments, similar seals can be used to directly form fluid connections between substrate blocks or active components. As shown in Figures 10B and 10C, flange and groove connections (957 and 956, respectively) are directly formed in the bodies of the two components (i.e., a small protruding "flange" on one surface fits into a "groove" formed in the corresponding surface). Separately, inserts can be formed to place replaceable sealing components into grooves formed in one or both connecting surfaces.

[0036] 112 and 12B show an embodiment of the invention in which a replaceable insert seal 970 can be placed into a shaped groove around the fluid connection between the substrate block 401 and the active component 1162. In the cross-sections of FIGS. 12A and 12B, the active component shown is a test fixture used for testing flow and extractable particle requirements, but this seal arrangement would be the same for an actual active component such as a valve or liquid flow meter. FIG. 14A shows the substrate block 401, with line BB indicating the location of the cross-sections of FIGS. 12A and 12B. FIG. 13A shows a perspective view of the seal 970, and FIG. 13B shows a cutaway view of the seal 970 to show the shape of the cross-section. In the embodiment shown, a chamfered horizontal portion 972 of the seal 970 aids in proper installation of the seal by providing a leading edge that can be easily inserted into a groove in one of the mounting surfaces (the lower surface of the active component in this embodiment). Referring again to FIGS. 8A and 8B, a seal groove 860 is machined or otherwise formed around each inlet / outlet port 820 .

[0037] In a preferred embodiment, the seal 970 may also be fabricated from a polymer or fluoropolymer. Applicants have found that due to the need for larger tolerances on structures machined or otherwise formed in a polymer body, the seal ring 970 should be sized so that there is always interference at the leading edge 972 of the seal ring. In other words, during installation, the seal ring is compressed horizontally to ensure that a liquid seal is always formed. In contrast, in some embodiments, the seal is sized so that there is little or no vertical interference or compression on the horizontal portion 971 of the ring.

[0038] Figure 14B shows another embodiment 1280 of a replaceable seal ring as a cross-section of an active component 1162 mounted on a substrate block 401. Again, Figure 14A shows the substrate block 401, and line BB indicates the location of the cross-section of Figure 14A.

[0039] FIG. 15A shows a perspective view of 1280, and FIG. 15B shows a cutaway view of seal 1280 to show the cross-sectional shape. Seal ring 1280 features a conical inner sleeve 1283 that has no horizontal sections (that could potentially allow leakage). Thus, when the seal is in place, liquid flows all over the inside of sleeve 1283. Outer ring 1282, connected to the conical sleeve section via horizontal bridge section 1284, provides an additional seal behind conical seal section 1283 that acts as a backup and adds positioning. The tapered shape of conical center section 1283 also helps install seal ring 1280. As with the seal ring embodiments described above, seal ring 1280 is sized such that when installed, the grooves create a horizontal interference rather than a vertical interference.

[0040] FIG. 16A shows a perspective view of another embodiment of a replaceable seal ring 1680 used to provide liquid seals at the inlet and outlet ports of a modular substrate block in accordance with an embodiment of the present invention. FIG. 16B is a cross-section of the seal of FIG. 16A along line AA. FIG. 16C is an enlarged view of one half of the cross-section of FIG. 16B. The seal ring 1680 features a conical inner sleeve 1683. The conical sleeve 1683 has an outwardly sloping (sloping away from the port opening) portion 1685 and an inwardly sloping (sloping towards the port opening) portion 1686, as well as an outer vertical portion 1687. 16A , the conical sleeve portion of the seal does not have a horizontal surface (that could potentially allow leakage). In some embodiments, the slope of the outwardly sloping portion 1685 is about 25 degrees to about 35 degrees, e.g., about 30 degrees, relative to the vertical axis (or inner wall of the seal). In some embodiments, the slope of the inwardly sloping portion 1686 is at a greater angle relative to the vertical axis than the slope of the outwardly sloping portion, such as 40 degrees to 50 degrees, e.g., about 45 degrees.

[0041] In some embodiments of the seal featuring a conical inner sleeve, the ratio of the cone height (indicated by arrow and reference number 1695) to the cone wall thickness (indicated by arrow and reference number 1976) is in the range of about 0.5 to about 2.5, such as about 1.0 to 2.0, about 1.1 to 1.8, or about 1.1 to 1.6.

[0042] In some embodiments, the seal is sized such that when the seal is installed, the outwardly tapered portion 1685 of the conical sleeve is compressed as shown by arrow 1690. The seal is further sized such that when the seal is installed, the top edge of the port opening (the board mating portion) does not come into contact with the outwardly tapered portion 1685. Instead, the top edge of the port opening slides over the outer vertical portion 1687 and the seal is in the area shown by reference number 1688. The tapered shape of the conical center portion 1683 also helps to install the seal ring 1680. Thus, when the seal is in place, liquid flows all over the inside of the sleeve 1683.

[0043] The outer ring 1682 provides an additional seal behind the conical seal portion 1683 that acts as a backup and provides additional positioning. In some embodiments, the seal ring 1680 is sized so that when installed, the grooves around the port openings in the modular substrate block create a horizontal interference with the outer and inner surfaces of the outer ring 1688 as indicated by arrows 1691 and 1692. In some embodiments, there is no vertical interference on the top or bottom of the ring, on the horizontal bridge or middle portion 1684, and / or on the conical center portion 1683.

[0044] In some embodiments, in addition to the removable inserts described above, a flange and groove insert can be used as a backup or secondary seal and as an additional aid in properly aligning the ports on the active components with the ports on the substrate block. FIG. 17A shows the position of a flange and groove secondary seal 1790 relative to a primary seal insert 1770 according to one embodiment of the present invention. In other embodiments, the flange and groove structure can be the primary seal structure (closest to the desired flow path) and the seal insert can be the secondary seal. FIGS. 17B-17D show various possible flange and groove structures that can be used as the secondary or primary seal structure. FIG. 17B shows a simple corresponding flange and groove ring 1790. FIG. 17C shows the addition of an inverted concentric shoulder 1792 that serves to prevent the convex ring of FIG. 17B from being damaged. Figure 17D shows a dual set of concentric flange and groove rings (1793, 1794).In some embodiments, the leak detector can be embedded in the substrate between the primary and secondary seals.

[0045] FIG. 18 shows another embodiment 1800 of a liquid chemical delivery system in which one or more active components are embedded in the substrate block 1801. FIG. 19 shows a perspective view of the substrate block 1801, showing the internal structure. In the embodiment of FIG. 19, liquid enters the substrate block through the inlet 1920A, proceeds through the path 1925 to the check valve 1992, and reaches the static mixer 1994. In this way, the two fluid flows are combined and exit the substrate block through the outlet port 1920B. As explained above, the substrate block 1401 for use with liquid chemicals can be formed from a polymer or a fluoropolymer. In some embodiments, the substrate block 1401 for use with gas mixtures can be formed from a metal such as stainless steel. The substrate block 1401 can be formed with slots for the active components, or slots / openings can be machined into the substrate block. The flow paths can be formed as explained above, or can be machined using prior art methods. In some embodiments, the embedded active components are replaceable and are removably held in place by screws / fasteners 1991.

[0046] Many different aspects and embodiments are possible. Some of these aspects and embodiments are described in this specification. After reading this specification, a person skilled in the art will understand that these aspects and embodiments are for illustrative purposes and do not limit the scope of the present invention. The embodiments may be based on any one or more of the following items:

[0047] Item 1. A liquid delivery system comprising: a substrate block including a first substrate port and a second substrate port formed in a first surface thereof, and a liquid passage extending in a first direction fluidly connecting the first substrate port to the second substrate port; a first active component fluidly connected to the first substrate port; and a second active component separate from the first active component, the second active component fluidly connected to the second substrate port, wherein the first liquid passage does not have a stagnation volume or area in which liquid may stagnate.

[0048] Item 2. A system for enabling the distribution of a liquid chemical, comprising: a substrate block including a first substrate port and a second substrate port formed in a first surface; and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port, wherein the first substrate port is adapted to be fluidly connected to a first active component, and the second substrate port is adapted to be fluidly connected to a second active component separate from the first active component, and the first liquid passage is a smooth passage having no stagnation volumes or areas in which liquid may stagnate.

[0049] Item 3. A system for enabling the distribution of a liquid chemical, comprising: a substrate block including a first substrate port and a second substrate port formed in a first surface; and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port, wherein the first substrate port is adapted to be fluidly connected to a first active component, and the second substrate port is adapted to be fluidly connected to a second active component separate from the first active component, and wherein an entire volume of the first liquid passage is aligned with the flow of fluid.

[0050] Item 4. Any one of the preceding items, wherein the first liquid passage is formed to allow liquid flow throughout the entire volume of the liquid passage.

[0051] Item 5. Any one of the preceding items, wherein the entire volume of the first liquid passage is coincident with the fluid flow.

[0052] Item 6. Any one of the preceding items, wherein the substrate block comprises a polymer or a fluoropolymer.

[0053] Item 7. Any one of the preceding items, wherein the substrate block comprises polypropylene, PTFE, modified PTFE or PFA.

[0054] Item 8. Any one of the preceding items, wherein the substrate block comprises third and fourth substrate ports formed in the first surface, and a second liquid passage fluidly connecting the third substrate port to the fourth substrate port.

[0055] Item 9. Any one of the preceding items, wherein a substrate block is formed by machining a smooth groove in the top surface of a first substrate layer and a matching smooth groove in the bottom surface of a second substrate layer, positioning the second substrate layer on the first substrate layer such that the matching grooves form liquid passageways, and bonding the two layers together.

[0056] Item 10. Item 9, further comprising drilling a first port and a second port through the second layer at either end of the formed groove.

[0057] Item 11. Any one of the preceding items, wherein bonding the two substrate layers includes melt bonding two polymer or fluoropolymer layers together by applying heat and pressure.

[0058] Item 12. Any one of the preceding items, wherein the substrate block is formed by molding a polymer or a fluoropolymer.

[0059] Item 13. Item 12, wherein molding includes compression molding, isostatic molding, melt processing, or injection molding.

[0060] Item 14. Any one of the preceding items, wherein the substrate block is formed by sintering a fluoropolymer in a mold.

[0061] Item 15. Any one of the preceding items, in which the substrate block is formed by sintering two substrate layers separately in a mold and then fusion bonding the layers together.

[0062] Item 16. Any one of the preceding items, wherein the active component comprises one or more components selected from the group of a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, and a valve.

[0063] Item 17. Any one of the preceding items having a footprint with a ratio of free space to system components of 30% or less, 20% or less, 10% or less, or 5% or less.

[0064] Item 18. Any one of the preceding items having multiple active components mounted such that the spacing between the active components is less than 20 mm, such as less than 10 mm, less than 5 mm, about 1 mm or less than 1 mm.

[0065] Item 19. A liquid delivery system comprising: a substrate block including a first substrate port and a second substrate port formed in a first surface and a first liquid passage extending in a first direction and fluidly connecting the first substrate port to the second substrate port; a first active component having an underside fluidly connected to the first substrate port; and a seal assembly for sealing the fluid connection, the seal assembly including a primary seal having a removable seal insert and a secondary seal having a flange-and-groove like structure formed in the first surface of the substrate block and the underside of the active component.

[0066] Item 20. Item 19, wherein the seal insert comprises a polymer or a fluoropolymer.

[0067] Item 21. Any one of items 19-20, wherein the seal assembly includes a seal ring that is compressed horizontally and not vertically when installed.

[0068] Item 22.2 Any one of items 19-21, wherein the flange-and-groove structure is a circular groove in either the top surface of the substrate block or the bottom surface of the active component, with a corresponding circular flange extending from either the other of the top surface of the substrate block or the bottom surface of the active component.

[0069] Item 23. Any one of items 19 to 22, wherein the flange and groove structure includes a circular structure having a diameter larger than the insert seal.

[0070] Item 24. Any one of items 19 to 23, wherein the flange and groove structure includes at least two concentric circular flange and groove structures.

[0071] Item 25. Any one of items 19-24, in which the seal includes a cone-shaped central portion through which liquid flows when the seal is in place.

[0072] Item 26. Item 25, wherein the ratio of the cone height of the cone-shaped central portion to the seal wall thickness of the cone-shaped central portion is about 0.5 to 2.5, such as about 1.0 to 2.0, 1.1 to 1.8, or 1.1 to 1.6.

[0073] The invention described herein has broad applicability and can provide many advantages as described and illustrated in the examples above. Embodiments of the invention will vary widely depending on the particular application, and not all embodiments will provide all of these advantages or achieve all of the objectives achievable by the invention.

[0074] When the terms "automatic," "automated," or similar terms are used herein, they are understood to include an automated process or step or manual initiation of an automated process or step. In the discussion and claims herein, the terms "including" and "comprising" are used as open-ended terms, and therefore, these terms should be interpreted to mean "including, but not limited to." If a term is not specifically defined herein, it is intended that the term be used in its ordinary and ordinary sense. The accompanying drawings are intended to aid in the understanding of the invention and are not drawn to scale unless otherwise indicated. As used herein, the words "right," "left," "lower," "upper," "bottom," "horizontal," "vertical," and the like, designate directions in the drawings to which reference is made. These terms are used for convenience only and are not intended to be limiting.

[0075] It should further be appreciated that embodiments of the present invention can be implemented by computer hardware or software, or a combination of hardware and software. The methods of the present invention can be implemented as a computer program using standard programming techniques and in accordance with the methods and figures described herein, including a computer-readable storage medium configured to contain the computer program, the storage medium so configured causing the computer to operate in a particular, predefined manner. To communicate with a computer system, each program can be implemented in a high-level procedural or object-oriented programming language. However, if desired, the programs can also be implemented in assembler or machine language. In any case, the language can be a compiled or interpreted language. Furthermore, the programs can be executed on dedicated integrated circuits programmed to execute the programs.

[0076] It is not intended that the scope of the present application be limited to the particular embodiments of the processes, machines, manufacture, compositions, means, methods, and steps described herein. As one skilled in the art will readily appreciate from the present disclosure, any existing or later developed process, machine, manufacture, composition, means, method, or step that performs substantially the same function or achieves substantially the same result as the corresponding embodiments described herein can be utilized in accordance with the present invention. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions, means, methods, or steps. The figures described herein are generally schematic, and the embodiments of the present invention are not necessarily drawn to scale or proportion.

Claims

1. A substrate block, The top surface and a substrate block inlet port at the top surface, the substrate block inlet port being defined by a first substrate block ring; a substrate block exit port at the top surface, the substrate block exit port being defined by a second substrate block ring; a substrate flow path extending along a path between an inlet port of the substrate block and an outlet port of the substrate block; Equipped with the inlet port of the substrate block is provided with a conical portion extending from the first substrate block ring along an inlet port axis; the substrate block has an exit port provided with a conical portion extending from the second substrate block ring along an exit port axis; the path includes an arc extending from an inlet port axis of the substrate block to an outlet port axis of the substrate block and has no corners or angled walls; A substrate block, wherein the inlet port axis and the outlet port axis intersect the arc of the path, and the inlet port axis and the outlet port axis are non-tangent to the path.

2. The substrate block of claim 1 , wherein the substrate block further comprises a plurality of outer walls extending from the top surface to a bottom surface opposite the top surface.

3. The substrate block of claim 2 , wherein the plurality of exterior walls define a cavity formed in a lower surface of the substrate block.

4. The substrate block of claim 3 , further comprising a support wall extending from an inner surface of the cavity to a lower surface of the substrate block.

5. The base block of claim 4 , wherein the outer walls and the support wall are spaced apart from one another.

6. The substrate block of claim 3 , wherein the cavity includes an inner surface, the inner surface having a portion corresponding to a shape of the substrate flow path.

7. The substrate block of claim 1 , wherein the substrate block is formed from a fluoropolymer material.

8. The substrate block of claim 7 , wherein the substrate block is formed from one of PTFE or PFA.

9. The base block of claim 1 further comprising fastener holes extending through said top surface.

10. 10. The base block of claim 9, wherein the base block includes a lower surface opposite the upper surface, and the fastener holes extend less than the entire distance from the lower surface to the upper surface.

11. The base block of claim 9 , wherein the fastener holes extend along a length, and the fastener holes taper along the length.

12. 2. The substrate block of claim 1, wherein the conical portion at the entrance port of the substrate block is concentric with the first substrate block ring.

13. The substrate block of claim 1 , wherein the conical portion is coupled to the substrate flow channel.

14. 1. A fluid delivery system comprising: a backplane; a substrate block attached to a top surface of the back plane, the substrate block comprising: The top surface and a substrate block inlet port at the top surface, the substrate block inlet port being defined by a first substrate block ring; a substrate block exit port at the top surface, the substrate block exit port being defined by a second substrate block ring; a substrate flow path extending in a single arc without corners or angled walls between an inlet port of said substrate block and an outlet port of said substrate block; a cavity formed in a lower surface of the substrate block opposite the upper surface of the substrate block, the substrate flow path forming a portion of a bottom of the cavity; A substrate block comprising: An active component, The underside and an active component inlet port on the lower surface, the active component inlet port being defined by a first active component ring; an active component exit port on the lower surface, the active component exit port being defined by a second active component ring; a component fluid passageway extending from an inlet port of the active component to an outlet port of the active component; an active component comprising: A seal ring, an inner sleeve defining a sleeve flow passage extending along a longitudinal axis; an outer ring connected to and surrounding the inner sleeve such that (1) an annular upper sleeve groove is formed between a top of the outer ring and a top of the inner sleeve, and (2) an annular lower sleeve groove is formed between a bottom of the inner sleeve and a bottom of the outer ring; A seal ring comprising: Equipped with the active components are mounted to the substrate block such that an exit port of the substrate block is aligned with an entry port of the components, the annular upper sleeve groove is configured to receive the first active component ring and the annular lower sleeve groove is configured to receive the second substrate block ring; the active components are spaced apart from the back plane; the inlet port of the substrate block is provided with a conical portion extending from the first substrate block ring along an inlet port axis; the substrate block has an exit port provided with a conical portion extending from the second substrate block ring along an exit port axis; A fluid delivery system, wherein each of the inlet port axis and the outlet port axis intersects the arc of the substrate flow path, and the inlet port axis and the outlet port axis are non-tangent to the arc.

15. The fluid delivery system of claim 14 , wherein a support wall extends from an inner surface of the cavity to a lower surface of the substrate block.

16. The fluid delivery system of claim 14 , wherein the substrate block is formed from a fluoropolymer material.

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