Evaporation source evaporation apparatus and method for producing the evaporation source evaporation apparatus

Abstract

To provide a vapor deposition source evaporator, and its manufacturing method.SOLUTION: A vapor deposition source evaporator includes a crucible unit storing a vapor deposition source, and having an injection part on one side, a heater for heating the crucible unit, and evaporating the vapor deposition source through the injection part, and a radiation heat prevention plate for suppressing heat radiation through the injection part side, in which either of the crucible unit and the radiation heat prevention plate is made of a carbon fiber composite material.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an apparatus for evaporating a deposition source in a deposition operation, and a method for manufacturing the same. [Background technology]

[0002] For example, a deposition process is often used in thin film manufacturing processes such as forming a thin film for an organic light-emitting display device, in which a deposition source is evaporated and attached to a substrate surface. That is, a mask is placed on the substrate, and the vapor of the deposition source is passed through the openings of the mask to form a thin film of a desired pattern on the substrate.

[0003] However, during the evaporation of the deposition source, the temperature usually rises to 1,100~1,300℃, so there is a high possibility that the evaporation equipment will be deformed or damaged by the high heat, which will result in a decrease in deposition quality, a shortened equipment lifespan, and frequent replacement of parts, which will also reduce work efficiency. Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE PRESENT EMBODIMENT An object of the present invention is to provide an improved deposition source evaporation apparatus capable of safely withstanding high temperature deposition operations for a long period of time, and a method for manufacturing the same. [Means for solving the problem]

[0005] An embodiment of the present invention provides an evaporation source evaporation device including a crucible unit that accommodates an evaporation source and has a spray unit on one side thereof, a heater that heats the crucible unit and evaporates the evaporation source through the spray unit, and a radiant heat prevention plate that suppresses heat radiation through the spray unit, wherein one of the crucible unit and the radiant heat prevention plate is made of a carbon fiber composite material.

[0006] The carbon fiber composite may include carbon fiber particles and a first carbon-based resin.

[0007] The carbon fiber particles may include any one of carbon fiber fragments and powder.

[0008] An internal void of the carbon fiber composite may be filled with a second carbon-based resin.

[0009] The radiant heat prevention plate may be a unitary body.

[0010] The crucible unit includes an inner crucible that accommodates the evaporation source, an outer crucible that accommodates the inner crucible and is heated by the heater, a housing that accommodates the outer crucible and the heater, and a cooling jacket that accommodates the housing and has a refrigerant circulation section, and the material of the inner crucible, the outer crucible, and the housing may include the carbon fiber composite material.

[0011] The inner crucible may be a unitary body having a single containing space.

[0012] The inner wall of the housing may be provided with a heat sink made of the carbon fiber composite material.

[0013] The housing, the heat sink and the outer crucible may be integral.

[0014] The crucible unit includes a pair of the crucible units, the injection portions of which are arranged symmetrically to each other, The heater and the radiant heat prevention plate may be provided corresponding to each of the pair of crucible units.

[0015] In addition, an embodiment of the present invention provides a method for manufacturing an evaporation source apparatus, the method including: preparing a crucible unit that accommodates an evaporation source and has an injection part on one side; providing a heater in the crucible unit; and providing a radiation heat prevention plate on the injection part side of the crucible unit to suppress heat radiation, wherein one of the crucible unit and the radiation heat prevention plate is made of a carbon fiber composite material.

[0016] The carbon fiber composite may be prepared by mixing carbon fiber particles with a first carbon-based resin and then compressing and curing.

[0017] The carbon fiber particles may be made by either chopping carbon fiber into pieces or grinding it into a powder.

[0018] The method may further include a step of vacuum treating the carbon fiber composite to remove foreign matter from voids inside the carbon fiber composite, and a step of impregnating and filling the voids from which the foreign matter has been removed with a second carbon-based resin, and then curing the second carbon-based resin.

[0019] The radiant heat protection plate may be fabricated as a single piece.

[0020] The crucible unit may include an inner crucible that accommodates the evaporation source, an outer crucible that accommodates the inner crucible and is heated by the heater, a housing that accommodates the outer crucible and the heater, and a cooling jacket that accommodates the housing and has a refrigerant circulation section, and the inner crucible, the outer crucible and the housing may be made of the carbon fiber composite material.

[0021] The inner crucible may be fabricated as a single body having a single containing space.

[0022] The housing may further include a heat sink made of the carbon fiber composite material on an inner wall thereof.

[0023] The housing, the heat sink and the outer crucible may be fabricated as one piece.

[0024] The method may further include preparing a pair of the crucible units in which the injection portions are arranged symmetrically with each other, and providing the heater and the radiant heat prevention plate corresponding to each of the pair of crucible units. Effect of the Invention

[0025] The deposition source evaporator of the present invention can be used for long-term deposition work without problems, thereby extending the life of parts and improving both workability and deposition quality. In addition, the components of the deposition device can be integrated into one large one instead of being divided into several small parts, which makes it easier to manufacture and manage the device. [Brief description of the drawings]

[0026] [Figure 1] 1 is a diagram illustrating a deposition process using an evaporation source apparatus according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a perspective view of the deposition source evaporation apparatus illustrated in FIG. [Diagram 3] FIG. 3 is an exploded perspective view of the deposition source evaporator illustrated in FIG. 2. [Figure 4] 4 is a flowchart showing a manufacturing process of the deposition source evaporator shown in FIG. 3. [Figure 5A] 5 is a diagram illustrating a vacuum evacuation process in the manufacturing process shown in FIG. 4. [Figure 5B] 5 is a diagram illustrating an impregnation process in the manufacturing process shown in FIG. 4. [Figure 6] FIG. 2 is an exploded perspective view illustrating an evaporation device for deposition sources according to another embodiment of the present invention. [Figure 7] FIG. 11 is a perspective view illustrating an evaporation apparatus for deposition sources according to still another embodiment of the present invention. [Figure 8] 2 is a cross-sectional view showing a detailed structure of the target substrate shown in FIG. 1; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0027] The present invention can be modified in various ways and can have various embodiments, but a specific embodiment is illustrated in the drawings and will be described in detail by the detailed description. The advantages, features, and methods of achieving the present invention will become clear by referring to the embodiments described in detail below in conjunction with the drawings. However, the present invention is not limited to the embodiments disclosed below, but can be embodied in various forms.

[0028] Hereinafter, an embodiment of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, the same or corresponding components will be given the same reference numerals, and duplicate descriptions thereof will be omitted.

[0029] In the following embodiment, a singular expression includes a plural expression unless otherwise clearly indicated in the context.

[0030] In the following embodiments, the terms "comprise" or "have" mean the presence of features or components described in the specification, and do not preclude the possibility that one or more other features or components may be added.

[0031] In the drawings, the size of components may be exaggerated or reduced for the convenience of explanation. For example, the size and thickness of each component shown in the drawings are arbitrarily shown for the convenience of explanation, and the present invention is not necessarily limited to what is shown in the drawings.

[0032] Certain steps may be performed out of the order described when certain embodiments may be implemented differently, for example, two steps described as successive may be performed substantially simultaneously or may be performed in the opposite order to that described.

[0033] FIG. 1 is a schematic diagram illustrating a structure of a thin film deposition apparatus using an evaporation source apparatus 100 according to an embodiment of the present invention.

[0034] As shown in the figure, the thin film deposition apparatus includes a mask 200 for limiting a deposition area on a target substrate 300 , and a deposition source evaporator 100 for ejecting deposition gas toward the target substrate 300 in a chamber 400 .

[0035] Therefore, when the deposition source evaporator 100 ejects deposition gas through the ejection part 121a in the chamber 400, the deposition gas passes through the openings of the mask 120 and adheres to the substrate 300 to form a thin film in a predetermined pattern.

[0036] 1 and 2, the deposition source evaporator 100 reciprocates in a chamber 400 along a rail 410 and injects deposition gas onto the entire deposition area of ​​a target substrate 300. This is only one example of the deposition method, and it can also be configured to perform deposition while the deposition source evaporator 100 is fixed and the target substrate 300 reciprocates or rotates. That is, various modifications are possible regarding which one is fixed and which is moved for the relative movement.

[0037] Now, the detailed structure of the deposition source evaporator 100 will be described with reference to FIGS.

[0038] 2, the deposition source evaporation apparatus 100 includes a crucible unit 120 that accommodates a deposition source and injects a deposition gas toward a target substrate 300 through an injection part 121a, a heater 130 that heats the crucible unit 120 so that the deposition source is evaporated, and a radiation heat prevention plate 110 that prevents heat generated from the crucible unit 120 from being emitted toward the substrate 300. Therefore, when the heater 130 heats the crucible unit 120, the deposition source accommodated therein is evaporated and ejected through the injection part 121a. The heater 130 is divided into three sections (130a, 130b, 130c), and each section can be subjected to differential heating control.

[0039] Reference numeral 111 denotes a through hole corresponding to the injection portion 121a and formed in the radiant heat prevention plate 110. Reference numeral 125 denotes a cooling jacket having a refrigerant circulating portion 125a in the crucible unit 120, which serves to appropriately cool the surroundings so that the heater 130 does not heat them too much.

[0040] To explain the crucible unit 120 more specifically, as shown in FIG. 3, it includes an inner crucible 121, an outer crucible 122, a heat sink 123, a housing 124, and a cooling jacket 125.

[0041] The inner crucible 121 directly accommodates the deposition source in the internal space. When the accommodated deposition source is completely used up, the inner crucible 121 is removed from the crucible unit 120, and the internal accommodation space is further filled with the deposition source, and then the inner crucible 121 is reinstalled for use.

[0042] The outer crucible 122 houses the inner crucible 121, and the heater 130 is provided on the outer wall of the outer crucible 122 to generate heat.

[0043] The housing 124 houses the external crucible 122 and the heater 130, and has a heat sink 123 disposed on the bottom surface. The heat sink 123 serves to protect the housing 124 from deformation due to heat from the heater 130, and although it is illustrated in this embodiment as being provided only on the bottom surface of the housing 124, it may also be provided on the side surfaces. A frame (not shown) for supporting the heat sink 123 may also be provided on the bottom surface of the housing 124. Reference numeral 131 denotes an insulator that maintains a distance between the heater 130 and the inner wall of the housing 124 so that the heater 130 does not directly contact the wall.

[0044] The cooling jacket 125 accommodates the housing 124, and appropriately cools the heat generated by the heater 130 while circulating the coolant in the coolant circulating section 125a provided on the outer wall of the main body as described above.

[0045] Meanwhile, in this embodiment, the radiant heat prevention plate 110, the inner crucible 121, the outer crucible 122, and the housing 124 are all manufactured as a single body (integral structure) rather than as separate bodies (divided structures). That is, when looking at the radiant heat prevention plate 110, the main body is not divided into many parts but is manufactured as a whole as a single body, the inner crucible 121 is also manufactured as a single body having a single accommodation space, and the outer crucible 122, the heat dissipation plate 123, and the housing 124 are also similarly manufactured as a single body.

[0046] Previously, it was not possible to make it into a single unit, and it was made into many parts and then attached to each other for use. The reason for this is that if it is made into a large single unit, the possibility of thermal deformation increases. That is, from the radiant heat prevention plate 110 to the housing 124, they are directly subjected to heat from the heater 130 during deposition and are used for a long period of time in an atmosphere exceeding about 1,000°C, so there is always a concern of thermal deformation, and in particular, the larger and longer the members are, the higher the possibility of deformation such as twisting occurs. Therefore, in the past, in order to reduce the risk of such deformation, the members were made small and short and then attached to each other for use. In such a case, for example, gaps are likely to occur at the parts where many members of the radiant heat prevention plate 110 come into contact, and high-temperature heat is released to the outside from the gaps, increasing the risk of deterioration of the target board 300 and peripheral devices. Also, from the perspective of workability, it is necessary to add an assembly process of dividing the members into parts and then attaching them to each other, which has many disadvantages, such as a complicated manufacturing process.

[0047] However, in this embodiment, the radiant heat prevention plate 110, the inner crucible 121, the outer crucible 122 and the housing 124 are all fabricated as a single unit, thereby eliminating the problems of radiant heat leakage and complicated fabrication processes.

[0048] As mentioned above, each component can be manufactured as a single unit because the material has been improved to carbon fiber composite, which has excellent heat resistance and can withstand temperatures of over 1,300°C for a long period of time without deformation.

[0049] Therefore, basically, the radiant heat prevention plate 110 is made of a single piece of carbon fiber composite material, eliminating any gaps in the middle of the body that could cause heat leakage, and realizing a simple manufacturing process that does not require the attachment of various components.

[0050] Moreover, the inner crucible 121, the outer crucible 122, the heat sink 123, the housing 124, and even the frame (not shown) supporting the heat sink 123 inside the housing 124 can all be used as a single unit using this carbon fiber composite material. As a result, even if high-temperature deposition work is continued for a long period of time, a very stable work environment can be realized with almost no risk of thermal deformation of the members themselves or heat leakage to the outside, thereby improving both workability and product quality.

[0051] The manufacturing process of each of the above-mentioned components using carbon fiber composites is carried out according to the flowchart shown in FIG. 4. The detailed manufacturing process will be described later. Before that, an example of a target substrate 300 that can be deposited on the deposition source evaporation apparatus 100 will be briefly introduced with reference to FIG. 8.

[0052] The deposition source evaporator 100 is used for depositing various thin films, for example, for forming metal electrode layers and organic films of an organic light emitting display device.

[0053] FIG. 8 illustrates an example of a target substrate 300 on which a thin film can be deposited using the deposition source evaporator 100 of the present invention, and illustrates the structure of an organic light emitting display device.

[0054] Referring to FIG. 8, a buffer layer 330 is formed on a base plate 320, and a thin film transistor TFT is provided on the buffer layer 330.

[0055] The thin film transistor TFT has an active layer 331 , a gate insulating film 332 formed so as to cover the active layer 331 , and a gate electrode 333 on the gate insulating film 332 .

[0056] An interlayer insulating film 334 is formed so as to cover the gate electrode 333, and a source electrode 335a and a drain electrode 335b are formed on the interlayer insulating film 334.

[0057] The source electrode 335 a and the drain electrode 335 b are in contact with the source region and the drain region of the active layer 331 , respectively, through contact holes formed in the gate insulating film 332 and the interlayer insulating film 334 .

[0058] A pixel electrode 321 of the organic light emitting element OLED is connected to the drain electrode 335b. The pixel electrode 321 is formed on a planarization layer 337, and a pixel defining layer 338 for dividing a sub-pixel region is formed on the pixel electrode 321. An emitting layer 326 of the organic light emitting element OLED is formed in an opening of the pixel defining layer 338, and a counter electrode 327 is deposited on the opening. That is, an opening surrounded by the pixel defining layer 338 becomes a sub-pixel region such as a red pixel (R), a green pixel (G), or a blue pixel (B), and an emitting layer 326 of a corresponding color is formed therein. A thin film encapsulation layer 339 in which an organic film 339a and an inorganic film 339b are alternately stacked is formed on the counter electrode 327.

[0059] Therefore, for example, the counter electrode 327 which is a metal layer, and the organic film 339a and inorganic film 339b of the thin film sealing layer 339 can be formed by the deposition source evaporation apparatus 100 using the above-mentioned carbon fiber composite material.

[0060] The process of manufacturing the deposition source evaporator 100 using such a carbon fiber composite material is carried out according to the flow chart shown in FIG.

[0061] First, carbon fiber particles are mixed with a first carbon-based resin to prepare a carbon fiber composite material (S1). Here, the carbon fiber particles are pieces of chopped carbon fiber or powder made by crushing the pieces, which are mixed with the first carbon-based resin to prepare a paste-like material. The paste-like material is then compressed with a press (S2) and heated to harden (S3). This produces a solid-state material, but in this state, there are many voids inside the material, and the voids contain many foreign objects, so if it is used as is as a molding material for a component, its strength will be weak.

[0062] Therefore, the process goes through a step of removing the foreign matter by evacuation (S4) and filling the voids with a second carbon-based resin (S5). In this evacuation process, as shown in FIG. 5A, the raw material 10 is placed in a working tank 30 and evacuated, so that the foreign matter in the internal voids is removed by the vacuum pressure. Next, as shown in FIG. 5B, a second carbon-based resin 20 is supplied to the working tank 30 and the raw material 10 is impregnated. As a result, the second carbon-based resin 20 seeps into the voids from which the foreign matter has been removed, filling the portion. The second carbon-based resin 20 may be the same type of resin as the first carbon-based resin described above, or a different resin may be used.

[0063] In this state, when the material 10 is further heated and cured, the second carbon-based resin 20 filling the voids hardens and becomes integrated with the main body of the material 10.

[0064] As described above, the material prepared in this manner has very high heat resistance and appropriate strength. Therefore, by molding it to produce the radiant heat prevention plate 110, inner crucible 121, outer crucible 122, heat sink 123, and housing 124 (S7), a very stable working environment can be realized in which there is almost no risk of thermal deformation of the components themselves or heat leakage to the outside, even if high-temperature deposition work is continued for a long period of time.

[0065] On the other hand, the cooling jacket 125 can also be made of a carbon fiber composite material, but basically, it has a coolant circulation section 125a and also serves as the outermost protective wall of the crucible unit 120, so impact resistance is prioritized over heat resistance. Therefore, it is desirable that the cooling jacket 125 is made of a stainless steel material. The heater 130 is made of a material such as Ta or W, and the insulator 131 is made of a material in which AlN and BN are mixed. The radiant heat prevention plate 110, the inner crucible 121, the outer crucible 122, the heat sink 123, and the housing 124 are made of the above-mentioned carbon fiber composite material to ensure strong heat resistance.

[0066] 6 shows a possible modified configuration of the present invention, in which the external crucible 122-1, the housing 124-1, and the heat sink 123-1 are manufactured as a single unit. That is, in the above-mentioned embodiment, they are manufactured as separate members, but as in this embodiment, they may be manufactured as a single unit joined together to reduce the number of members. Here, it goes without saying that this single unit can be manufactured from a carbon fiber composite material to ensure strong heat resistance and to withstand thermal deformation.

[0067] Although the heat sink 123-1 is illustrated as being a single layer in both the above-described embodiment and this embodiment, it may be configured as multiple layers in which several sheets are stacked together to further enhance the heat dissipation effect.

[0068] Next, FIG. 7 illustrates a method for a case where the target substrate 300 is very large. When deposition is performed on a large substrate 300 that exceeds the range that one deposition source evaporator 100 of the above embodiment can withstand, a pair of deposition source evaporators 100 each having a crucible unit 120, a radiant heat prevention plate 110, and a heater 130 may be attached and used as shown in FIG. In this case, the injection parts 121a of each deposition source evaporator 100 may be symmetrical with respect to a geometric plane A between the pair of deposition source evaporators 100. The injection part 121a of one deposition source evaporator 100 may be a substantial mirror image of the injection part 121a of the other deposition source evaporator 100. That is, the injection parts 121a are arranged more densely at both ends than in the center, and the injection parts 121a are formed and used so that they are symmetrical in such an arrangement as a whole when the pair of deposition source evaporators 100 are attached.

[0069] Therefore, by using the deposition source evaporation apparatus 100 having such a structure, deposition work can be performed for a long time without any problems, the life of the parts is extended, and both the workability and deposition quality are improved. In addition, the components of the deposition apparatus can be integrated into one large one instead of being divided into several small parts, which makes it easier to manufacture and manage the apparatus.

[0070] As such, the present invention has been described with reference to the embodiments shown in the drawings, but these are merely illustrative, and those skilled in the art will understand that various modifications and variations of the embodiments are possible therefrom. Therefore, the true technical scope of the present invention is determined by the technical spirit of the claims. [Industrial Applicability]

[0071] The deposition source evaporation apparatus and the manufacturing method thereof according to the present invention can be effectively applied to, for example, technical fields related to thin film formation. [Explanation of symbols]

[0072] 100 Evaporation source evaporation device 110 Radiation heat prevention plate 111 Through hole 120 Crucible Unit 121 Inner crucible 122 External crucible 123 Heat sink 124 Housing 125 Cooling Jacket 125a Refrigerant circulation section 130 Heater

Claims

1. a crucible unit that accommodates an evaporation source and has an injection unit on one side; a heater that heats the crucible unit and evaporates the deposition source through the injection unit; A radiation heat prevention plate that suppresses heat radiation through the ejection portion side, the crucible unit includes an inner crucible that accommodates the deposition source, an outer crucible that accommodates the inner crucible and is heated by the heater, a housing that accommodates the outer crucible and the heater, and a heat sink provided on an inner wall of the housing, The deposition source evaporation apparatus, wherein each of the radiant heat prevention plate, the inner crucible, the outer crucible, the housing and the heat sink is a unitary body made of a carbon fiber composite material.

2. 2. The deposition source evaporation apparatus of claim 1, wherein the carbon fiber composite material comprises carbon fiber particles and a first carbon-based resin.

3. 3. The deposition source evaporation apparatus of claim 2, wherein the carbon fiber particles include one of carbon fiber fragments and powder.

4. 3. The deposition source evaporation apparatus according to claim 2, wherein the voids inside the carbon fiber composite material are filled with a second carbon-based resin.

5. 2. The deposition source evaporation apparatus according to claim 1, wherein the crucible unit includes a cooling jacket that accommodates the housing and has a coolant circulation section.

6. 6. The deposition source evaporation apparatus according to claim 5, wherein the inner crucible is a single body having a single containing space.

7. 2. The deposition source evaporation apparatus according to claim 1, wherein the housing, the heat sink and the external crucible are integral with each other.

8. The crucible unit includes a pair of the crucible units, the injection portions of which are arranged symmetrically to each other, 2. The deposition source evaporator according to claim 1, wherein the heater and the radiant heat prevention plate are provided corresponding to each of the pair of crucible units.

9. preparing a crucible unit that accommodates an evaporation source and has an injection unit on one side; A heater is provided in the crucible unit, providing a radiation heat prevention plate on the injection portion side of the crucible unit to suppress heat radiation; the crucible unit includes an inner crucible that accommodates the deposition source, an outer crucible that accommodates the inner crucible and is heated by the heater, a housing that accommodates the outer crucible and the heater, and a heat sink provided on an inner wall of the housing, The method for manufacturing an evaporation source apparatus includes fabricating each of the radiation heat prevention plate, the inner crucible, the outer crucible, the housing, and the heat sink from a single body of carbon fiber composite material.

10. 10. The method of claim 9, wherein the carbon fiber composite material is prepared by mixing carbon fiber particles with a first carbon-based resin, and then compressing and curing the mixture.

11. 11. The method of claim 10, wherein the carbon fiber particles are prepared by either chopping carbon fiber into pieces or pulverizing carbon fiber into powder.

12. 11. The method of claim 10, further comprising the steps of: subjecting the carbon fiber composite to a vacuum treatment to remove foreign matter from an internal void; and impregnating and filling the void from which the foreign matter has been removed with a second carbon-based resin, and curing the second carbon-based resin.

13. 10. The method for manufacturing an evaporation apparatus according to claim 9, wherein the crucible unit includes a cooling jacket that accommodates the housing and has a coolant circulation section.

14. The method for manufacturing an evaporation source apparatus according to claim 13, wherein the inner crucible is manufactured as a single body having a single containing space.

15. 10. The method for manufacturing an evaporation apparatus as claimed in claim 9, wherein the housing, the heat sink and the external crucible are manufactured as a single unit.

16. preparing a pair of the crucible units in which the injection portions are arranged symmetrically to each other; 10. The method of claim 9, further comprising providing the heater and the radiant heat prevention plate for each of the pair of crucible units.

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