Solar Cells and Photovoltaic Modules

Abstract

In the field of photovoltaics, solar cells and photovoltaic modules are provided. [Solution] The solar cell includes a substrate 200 having a front and a back surface arranged opposite to each other, a first polysilicon doped layer 212 having N-type dopant ions, and a second polysilicon doped layer 222 doped with P-type dopant ions, wherein the first polysilicon doped layer is located on the front or back surface, the first polysilicon doped layer has a first protrusion structure on a surface thereof, the second polysilicon doped layer is located on the back surface thereof, and the first polysilicon doped layer and the second polysilicon doped layer are insulated from each other, the second polysilicon doped layer has a second protrusion structure on a surface thereof, the thickness of the first protrusion structure is greater than the thickness of the second protrusion structure, and the thickness of the first polysilicon doped layer including the first protrusion structure is less than or equal to the thickness of the second polysilicon doped layer including the second protrusion structure.

Description

[Technical field]

[0001] FIELD OF THE DISCLOSURE Embodiments of the present application relate to the field of photovoltaics, and in particular to solar cells and photovoltaic modules. [Background technology]

[0002] A solar cell is a device that converts the light energy of the sun into electrical energy. Solar cells use the principle of photovoltaic power to generate carriers, which are then extracted by electrodes, contributing to the efficient use of electrical energy.

[0003] At present, solar cells mainly include IBC (Interdigitated Back Contact) cells, TOPCON (Tunnel Oxide Passivated Contact) cells, PERC cells (Passivated Emitter and Real Cells), and heterojunction cells, etc. By installing different film layers and limiting their functionality, the optical loss can be reduced, and the recombination of photogenerated carriers on and inside the silicon substrate can be reduced, thereby improving the photoelectric conversion efficiency of solar cells.

[0004] However, currently, the photoelectric conversion efficiency of solar cells is still poor. Summary of the Invention [Problem to be solved by the invention]

[0005] In the embodiments of the present application, a solar cell and a photovoltaic module are provided that are advantageous in improving at least the photoelectric conversion efficiency of the solar cell. [Means for solving the problem]

[0006] According to some embodiments of the present application, in one aspect of the embodiment of the present application, a solar cell is provided, the solar cell including: a substrate having a front surface and a back surface disposed opposite to each other; a first polysilicon doped layer having N-type dopant ions; a second polysilicon doped layer doped with P-type dopant ions; and a first electrode and a second electrode, wherein the first polysilicon doped layer is located on the front surface or the back surface, a first protrusion structure is formed on a surface of the first polysilicon doped layer, the second polysilicon doped layer is located on the back surface, and the first polysilicon doped layer and the second polysilicon doped layer are insulated from each other, the second polysilicon doped layer has a second protrusion structure on a surface of the second polysilicon doped layer, a thickness of the first protrusion structure is greater than a thickness of the second protrusion structure, a thickness of the first polysilicon doped layer including the first protrusion structure is less than a thickness of the second polysilicon doped layer including the second protrusion structure, the first electrode is in electrical contact with the first polysilicon doped layer, and the second electrode is in electrical contact with the second polysilicon doped layer.

[0007] In some embodiments, a surface roughness of the first polysilicon doped layer including the first protruding structure is greater than a surface roughness of the second polysilicon doped layer including the second protruding structure.

[0008] In some embodiments, the surface roughness of the first polysilicon doped layer including the first protruding structures is in the range of 10 nm to 30 nm.

[0009] In some embodiments, the surface roughness of the second polysilicon doped layer including the second protruding structures is in the range of 0 nm to 20 nm.

[0010] In some embodiments, the thickness range of the first protruding structure is less than or equal to 30 nm.

[0011] In some embodiments, the thickness range of the second protruding structure is less than or equal to 20 nm.

[0012] In some embodiments, the first protrusion structure has a one-dimensional dimension in the range of 0 μm to 500 μm.

[0013] In some embodiments, the range of one dimension of the second protrusion structure is 0 um to 300 um.

[0014] In some embodiments, the thickness of the second polysilicon doped layer including the second protruding structure ranges from 100 nm to 400 nm.

[0015] In some embodiments, the thickness of the first polysilicon doped layer including the first protruding structure ranges from 50 nm to 300 nm.

[0016] In some embodiments, the back surface includes an N region and a P region, the first polysilicon doped layer being located in the N region and the second polysilicon doped layer being located in the P region.

[0017] In some embodiments, a cross-sectional shape of at least one of the first protruding structure or the second protruding structure comprises a parabola, a sector, a trapezoid, or an approximate trapezoid.

[0018] According to some embodiments of the present application, in another aspect of the embodiments of the present application, a photovoltaic module is provided, the photovoltaic module including a cell string formed by connecting a plurality of solar cells described in any one of the above embodiments, a sealing adhesive film for covering a surface of the cell string, and a cover plate for covering a surface of the sealing adhesive film remote from the cell string. Effect of the Invention

[0019] The technical solutions provided in the embodiments of the present application have at least the following advantages:

[0020] In the solar cell provided in this embodiment, the first polysilicon doped layer is located on the back or front side, and the second polysilicon doped layer is located on the back side, so that the solar cell is of two types: IBC cell and TOPCon cell. In this embodiment, the thickness of the first polysilicon doped layer including the first protrusion structure is limited to be thinner than the thickness of the second polysilicon doped layer including the second protrusion structure, and the N-type polysilicon doped layer is donor type, so the crystalline silicon particles of the first polysilicon doped layer formed are small, the airtightness between the crystalline silicon particles is large, and the thickness of the formed film layer is small. Conversely, when the P-type polysilicon doped layer is acceptor type and the compatibility between the P-type polysilicon doped layer and the substrate is good, the crystalline silicon particles of the P-type polysilicon doped layer are large, and the thickness of the second polysilicon doped layer formed by stacking is large, where the second polysilicon doped layer includes the second protrusion structure.

[0021] In addition, the first polysilicon doped layer is located on the front or back surface, and the thickness of the first protrusion structure is greater than the thickness of the second protrusion structure. When the first polysilicon doped layer is located on the front surface, the internal reflection of the first polysilicon doped layer and the contact performance between the first polysilicon doped layer and the first electrode can be improved. When the thickness of the second protrusion structure of the second polysilicon doped layer is small, the second polysilicon doped layer can improve the passivation performance of the film layer located thereon. [Brief description of the drawings]

[0022] One or more embodiments are illustratively described in the figures in the corresponding accompanying drawings, but these illustrative descriptions are not intended to limit the embodiments, and unless otherwise specified, the figures in the accompanying drawings are not limited to scale. In order to more clearly explain the embodiments of the present application or the technical solutions in the prior art, the drawings that need to be used in the embodiments are briefly introduced below, but obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative labor. [Figure 1] FIG. 1 is a diagram showing the structure of a solar cell provided in one embodiment of the present application. [Diagram 2] FIG. 2 is a diagram showing a first type of cross-sectional structure along the A1-A2 cross section of FIG. [Diagram 3] FIG. 3 is a diagram showing the structure of the first polysilicon doped layer in the solar cell provided in one embodiment of the present application. [Figure 4] FIG. 4 is an electron microscope photograph of a cross section of the second polysilicon doped layer in a solar cell provided in one embodiment of the present application. [Diagram 5] FIG. 5 is a locally enlarged view of the first protrusion structure in the portion F1 in FIG. [Figure 6] FIG. 6 is a diagram showing the structure of the second polysilicon doped layer in the solar cell provided in one embodiment of the present application. [Figure 7] FIG. 7 is an electron microscope photograph of a cross section of the second polysilicon doped layer in a solar cell provided in one embodiment of the present application. [Figure 8] FIG. 8 is a locally enlarged view of the second protrusion structure in the portion F2 in FIG. [Figure 9] FIG. 9 is a diagram showing a second type of cross-sectional structure along the A1-A2 cross section of FIG. [Figure 10] FIG. 10 is a diagram showing the structure of a solar cell provided in one embodiment of the present application. [Figure 11] FIG. 11 is a diagram showing a first type of cross-sectional structure along the B1-B2 cross section of FIG. [Figure 12] FIG. 12 is a diagram showing the structure of a photovoltaic module provided in another embodiment of the present application. [Figure 13] FIG. 13 is a diagram showing a cross-sectional structure along the M1-M2 cross section of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] As can be seen from the background art, the photoelectric conversion efficiency of conventional solar cells is poor.

[0024] In the solar cell provided in this embodiment, the first polysilicon doped layer is located on the back or front side, and the second polysilicon doped layer is located on the back side, so that the solar cell is of two types: IBC cell and TOPCon cell. In this embodiment, the thickness of the first polysilicon doped layer including the first protrusion structure is limited to be thinner than the thickness of the second polysilicon doped layer including the second protrusion structure, and the N-type polysilicon doped layer is donor type, so the crystalline silicon particles of the first polysilicon doped layer formed are small, the airtightness between the crystalline silicon particles is large, and the thickness of the formed film layer is small. Conversely, when the P-type polysilicon doped layer is acceptor type and the compatibility between the P-type polysilicon doped layer and the substrate is good, the crystalline silicon particles of the P-type polysilicon doped layer are large, and the thickness of the second polysilicon doped layer formed by stacking is large, where the second polysilicon doped layer includes the second protrusion structure.

[0025] In addition, the first polysilicon doped layer is located on the front or back surface, and the thickness of the first protrusion structure is greater than the thickness of the second protrusion structure. When the first polysilicon doped layer is located on the front surface, the internal reflection of the first polysilicon doped layer and the contact performance between the first polysilicon doped layer and the first electrode can be improved. When the thickness of the second protrusion structure of the second polysilicon doped layer is small, the second polysilicon doped layer can improve the passivation performance of the film layer located thereon.

[0026] Hereinafter, each embodiment of the present application will be described in detail in conjunction with the drawings. However, as will be understood by those skilled in the art, although many technical details are proposed in the embodiments of the present application in order to allow the reader to better understand the present application, the technical solution claimed for protection in the embodiments of the present application can be realized without these technical details and various changes and modifications based on the following embodiments.

[0027] FIG. 1 is a diagram showing the structure of a solar cell provided in an embodiment of the present application. FIG. 2 is a diagram showing a first type of cross-sectional structure along the A1-A2 cross section of FIG. 1. FIG. 3 is a diagram showing the structure of a first polysilicon doped layer in a solar cell provided in an embodiment of the present application. FIG. 4 is an electron microscope photograph of a cross section of a second polysilicon doped layer in a solar cell provided in an embodiment of the present application. FIG. 5 is a local enlarged view of a first protrusion structure of a portion F1 in FIG. 4. FIG. 6 is a diagram showing the structure of a second polysilicon doped layer in a solar cell provided in an embodiment of the present application. FIG. 7 is an electron microscope photograph of a cross section of a second polysilicon doped layer in a solar cell provided in an embodiment of the present application. FIG. 8 is a local enlarged view of a second protrusion structure of a portion F2 in FIG. 7.

[0028] As shown in FIG. 1 and FIG. 2, according to some embodiments of the present application, in one aspect of the present embodiment, a solar cell is provided, the solar cell includes a substrate 100 having a front surface 11 and a back surface 12 opposite to each other, a first polysilicon doped layer 112 doped with N-type dopant ions, a second polysilicon doped layer 122 doped with P-type dopant ions, a first electrode 114 and a second electrode 124, in which the first polysilicon doped layer 112 is located on the front surface 11, the surface of the first polysilicon doped layer 112 has a first protrusion structure 1120 (see FIG. 3), and the second polysilicon doped layer 122 is located on the back surface 12. 12, the first polysilicon doped layer 112 and the second polysilicon doped layer 122 are insulated from each other, the second polysilicon doped layer 122 has a second protrusion structure 1220 (see FIG. 6 ) on a surface thereof, the thickness of the first protrusion structure 1120 is greater than the thickness of the second protrusion structure 1220, the thickness of the first polysilicon doped layer 112 including the first protrusion structure 1120 is less than or equal to the thickness of the second polysilicon doped layer 122 including the second protrusion structure 1220, the first electrode 114 is in electrical contact with the first polysilicon doped layer 112, and the second electrode 124 is in electrical contact with the second polysilicon doped layer 122.

[0029] In some embodiments, the material of the substrate 100 may be an elemental semiconductor material. Specifically, the elemental semiconductor material is composed of a single element, and may be, for example, silicon or germanium. Here, the elemental semiconductor material may be in a monocrystalline state, a polycrystalline state, an amorphous state, or a microcrystalline state (a state having both a monocrystalline state and an amorphous state is called a microcrystalline state), and for example, silicon may be at least one of monocrystalline silicon, polycrystalline silicon, amorphous silicon, or microcrystalline silicon.

[0030] In some embodiments, the material of the substrate 100 may be a compound semiconductor material. Common compound semiconductor materials include, but are not limited to, materials such as silicon germanium, silicon carbide, gallium arsenide, indium gallide, perovskites, cadmium telluride, copper indium selenide, etc. The substrate 100 may be a sapphire substrate, a silicon-on-insulator substrate, or a germanium-on-insulator substrate.

[0031] In some embodiments, the substrate 100 may be an N-type semiconductor substrate or a P-type semiconductor substrate. In the N-type semiconductor substrate, an N-type doping element is doped, which may be any of the group V elements, such as phosphorus (P), bismuth (Bi), antimony (Sb), or arsenic (As). In the P-type semiconductor substrate, an P-type doping element is doped, which may be any of the group III elements, such as boron (B), aluminum (Al), gallium (Ga), or indium (In).

[0032] In some embodiments, the substrate 100 has a front surface 11 and a back surface 12 disposed opposite each other. The solar cell is a single-sided cell, and the front surface is used as a light-receiving surface to receive incident light, and the back surface is a backlight surface. Here, the backlight surface can also receive incident light, but the efficiency of receiving incident light is weaker than the efficiency of receiving incident light of the light-receiving surface.

[0033] In some embodiments, the solar cell further includes a first dielectric layer 111 located between the substrate 100 and the first polysilicon doped layer 112. A passivation contact structure is formed between the first dielectric layer 111 and the first polysilicon doped layer 112, and the first polysilicon doped layer 112 can form a band bending at the surface of the substrate 100, and the first dielectric layer 111 generates an asymmetric offset in the band at the surface of the substrate 100, so that the potential barrier for the majority carriers among the carriers is lower than the potential barrier for the minority carriers among the carriers. In this way, the majority carriers can easily pass through the first dielectric layer 111 to perform quantum tunneling, but the minority carriers cannot easily pass through the first dielectric layer 111, so that selective transport of carriers can be realized.

[0034] In addition, the first dielectric layer 111 exerts a chemical passivation effect. Specifically, since there are interface state defects at the interface between the substrate 100 and the first dielectric layer 111, the interface state density at the front surface of the substrate 100 increases, and the increase in the interface state density promotes the recombination of photogenerated carriers. By arranging the first dielectric layer 111 to be located at the front surface of the substrate 100, the first dielectric layer 111 can exert a chemical passivation effect on the surface of the substrate 100. Specifically, by saturating the dangling bonds of the substrate 100, the defect state density of the substrate 100 can be reduced, the recombination center of the substrate 100 can be reduced, the carrier recombination speed can be reduced, the backing factor, short circuit current and open circuit voltage of the solar cell can be increased, and the photoelectric conversion efficiency of the solar cell can be improved.

[0035] In some embodiments, the thickness of the first dielectric layer 111 is 0.5 nm to 5 nm. The thickness of the first dielectric layer 111 is in the range of 0.5 nm to 1.3 nm, 1.3 nm to 2.6 nm, 2.6 nm to 4.1 nm, or 4.1 nm to 5 nm. When the thickness of the first dielectric layer 111 is within any of the above ranges, majority carriers can easily perform quantum tunneling through the first dielectric layer 111 due to the thin thickness of the first dielectric layer 111, but minority carriers have difficulty passing through the first dielectric layer 111, and selective transport of carriers can be realized.

[0036] In some embodiments, the first polysilicon doped layer 112 exhibits a field passivation effect, which is to form an electrostatic field on the surface of the substrate 100 toward the inside of the substrate 100, which allows minority carriers to escape from the interface, reduce the concentration of minority carriers, and reduce the carrier recombination rate at the interface of the substrate 100, thereby increasing the open circuit voltage, short circuit current and backing factor of the solar cell, and improving the photoelectric conversion efficiency of the solar cell.

[0037] The first polysilicon doped layer 112 may be doped with the same type of doping element as the substrate 100, for example, if the doping element of the substrate 100 is N-type, the first polysilicon doped layer 112 is doped with N-type doping element.

[0038] In some embodiments, the first polysilicon doped layer 112 is doped with an N-type doping element, which unifies the grains of the first polysilicon doped layer 112 to have a single crystal structure, and the grain size of the first polysilicon doped layer 112 with the N-type doping element is small and the grain boundaries are numerous and uniform.

[0039] As shown in FIG. 3, the first polysilicon doped layer 112 has a plurality of first protrusion structures 1120, which may be a pyramid structure or a protrusion structure of any shape. The first protrusion structures 1120 are also part of the first polysilicon doped layer 112. The first protrusion structures 1120 mean that there is an uneven structure on the surface of the first polysilicon doped layer 112. The uneven shape can be used as a light trapping structure to increase the incident light of the solar cell and improve the photoelectric conversion efficiency of the solar cell.

[0040] The first protrusion structure 1120 may be formed by gathering a plurality of crystal grains constituting the first polysilicon doped layer 112. The first protrusion structure 1120 may have the form of the first polysilicon doped layer 112 in a certain form. Here, the first polysilicon doped layer 112 includes a plurality of first silicon crystal grains, one or more of the first silicon crystal grains gather to form the first protrusion structure 1120, and the surfaces of the plurality of first silicon crystal grains constitute the surface of the first polysilicon doped layer 112 having a first roughness.

[0041] In the process of forming the first polysilicon doping layer, silicon atoms are arranged in the form of a diamond crystal lattice to form many crystal nuclei, which grow into crystal grains with different crystal plane orientations, which are then bonded together to crystallize and form polycrystalline silicon. Here, the first silicon crystal grains refer to the crystal grains with different crystal plane orientations that constitute the polycrystalline silicon.

[0042] In some embodiments, the cross-sectional shape of the first protruding structure 1120 comprises a parabola, a sector, a trapezoid, or an approximate trapezoid.

[0043] The cross-sectional morphology of the first polysilicon doped layer can be intuitively seen from the cross-sectional electron microscope photograph of Figure 4. The first polysilicon doped layer is composed of a plurality of first silicon crystal grains, and the uneven surface of the first polysilicon doped layer 112 is constructed by stacking a plurality of first silicon crystal grains, so that the surface of the first polysilicon doped layer 112 has a first roughness, and the surface of the first polysilicon doped layer 112 has a first protrusion structure 1120.

[0044] In some embodiments, the grain size of the first silicon crystal grains is in the range of 10 nm to 300 nm. For example, the grain size of the first silicon crystal grains may be 10 nm to 53 nm, 53 nm to 95.3 nm, 95.3 nm to 138.2 nm, 138.2 nm to 200.6 nm, 200.6 nm to 248 nm, or 248 nm to 300 nm. The grain size of the first silicon crystal grains should be set within any of the above ranges so that the roughness of the surface composed of the first silicon crystal grains is large. If the grain size of the first silicon crystal grains is within any of the above ranges, the stability between the first silicon crystal grains is good, and the crystalline deformation of the first polysilicon doped layer 112 is unlikely to occur. In addition, if the grain size of the first silicon crystal grains is within the above range, the stress of the first polysilicon doped layer 112 on the first dielectric layer 111 and the first passivation layer 113 is small, and the film layer performance between the first polysilicon doped layer 112 and the first dielectric layer 111 and between the first polysilicon doped layer 112 and the first passivation layer can be improved.

[0045] 4, in some embodiments, the first roughness range of the surface of the first polysilicon doped layer 112 with the first protrusion structures 1120 is 10 nm to 30 nm. The first roughness may be 10 nm to 13.2 nm, 13.2 nm to 16 nm, 16 nm to 22 nm, 22 nm to 25 nm, or 25 nm to 30 nm.

[0046] Here, the "roughness" in the "first roughness and the following second roughness" refers to the arithmetic average of the absolute values ​​of the vertical deviations of the peaks and valleys in one sampled length (1 μm) from the average horizontal line. Roughness can be measured by the comparison method, the light section method, the interference method, and the probe scanning method.

[0047] In some embodiments, the thickness h1 of the first protrusion structure 1120 is in the range of 30 nm or less, as shown in Fig. 5. Here, the thickness of the first protrusion structure 1120 refers to the average value of the height of the pyramid structure or any protrusion structure constituting the first protrusion structure.

[0048] In some embodiments, the range of the one-dimensional dimension d1 of the first protrusion structure is 0 μm to 500 μm, as shown in Fig. 5. For example, the one-dimensional dimension d1 of the first protrusion structure may be 0 μm to 80 μm, 80 μm to 200 μm, 200 μm to 372 μm, 372 μm to 430 μm, or 430 μm to 500 μm. Here, the one-dimensional dimension of the first protrusion structure 1120 refers to the average value of the one-dimensional dimensions of the pyramid structure or any protrusion structure constituting the first protrusion structure.

[0049] In some embodiments, the thickness range of the first polysilicon doped layer 112 with the first protruding structures 1120 is 50 nm to 300 nm, the thickness range of the first polysilicon doped layer 112 with the first protruding structures 1120 is 150 nm to 80 nm, 80 nm to 120 nm, 120 nm to 200 nm, 200 nm to 230 nm, 230 nm to 260 nm, or 260 nm to 300 nm.

[0050] In some embodiments, the density range of the first protrusion structures is 50% to 98%. The density of the first protrusion structures 1120 may refer to the ratio of the area including the first protrusion structures per unit length (1 μm) to the area of ​​the first polysilicon doped layer not including the first protrusion structures.

[0051] 2, the solar cell further includes a second dielectric layer 121 located between the substrate 100 and the second polysilicon doped layer 122. A passivation contact structure is formed between the second dielectric layer 121 and the second polysilicon doped layer 122, and the configuration of the second dielectric layer 121 can refer to the configuration of the first dielectric layer 111, which will not be described again here.

[0052] In some embodiments, the thickness of the second polysilicon doped layer 122 and the mechanism of forming a passivation contact structure between the second polysilicon doped layer 122 and the substrate 100 may refer to the thickness of the first polysilicon doped layer 112 and the mechanism of forming a passivation contact structure between the first polysilicon doped layer 112 and the substrate 100, which will not be repeated here.

[0053] In some embodiments, the second polysilicon doped layer 122 is doped with a P-type doping element, and the P-type doping element has good compatibility with the second dielectric layer 121. For example, the P-type doping element is B, which can form a B-O bond and a B-Si bond between silicon and oxygen, so that the contact performance between the second polysilicon doped layer 122 and the second dielectric layer 121 and between the second polysilicon doped layer 122 and the second passivation layer 123 is good, and the surface of the formed second polysilicon doped layer 122 is flat.

[0054] As shown in FIG. 6, the second polysilicon doped layer 122 has a plurality of second protrusion structures 1220, where the second protrusion structures 1220 can refer to pyramid structures or protrusion structures of any shape, and the second protrusion structures 1220 are also part of the second polysilicon doped layer 122. The second protrusion structures 1220 mean that there is an uneven structure on the surface of the second polysilicon doped layer 122. The uneven shape can be used as a light trapping structure to increase the incident light of the solar cell and improve the photoelectric conversion efficiency of the solar cell.

[0055] The second protrusion structure 1220 may be formed by gathering a plurality of crystal grains constituting the second polysilicon doped layer 122. The second protrusion structure 1220 may have the form of the second polysilicon doped layer 122 in a certain form. Here, the second polysilicon doped layer 122 includes a plurality of second silicon crystal grains, one or more of the second silicon crystal grains gather to form the second protrusion structure 1220, and the surfaces of the plurality of second silicon crystal grains constitute the surface of the second polysilicon doped layer 122 having the second roughness.

[0056] In the process of forming the second polysilicon doped layer 122, silicon atoms are arranged in the form of a diamond crystal lattice to form many crystal nuclei, which grow into crystal grains with different crystal plane orientations, which are then bonded and crystallized to form polycrystalline silicon. Here, the second silicon crystal grains refer to the crystal grains with different crystal plane orientations that constitute the polycrystalline silicon.

[0057] 7, the cross-sectional shape of the second polysilicon doped layer 122 can be intuitively seen. The second polysilicon doped layer 122 is composed of a plurality of second silicon crystal grains, and the uneven surface of the second polysilicon doped layer 122 is constructed by stacking a plurality of second silicon crystal grains, so that the surface of the second polysilicon doped layer 122 has a second roughness, and the surface of the second polysilicon doped layer 122 has a second protrusion structure 1220.

[0058] In some embodiments, the second polysilicon doped layer 122 includes a plurality of second silicon grains, surfaces of the plurality of second silicon grains forming a surface of the second polysilicon doped layer 122 having a second roughness, and a grain size of the first silicon grains being smaller than a grain size of the second silicon grains.

[0059] In some embodiments, the grain size of the second silicon crystal grains is in the range of 100 nm to 900 nm. For example, the grain size of the second silicon crystal grains may be 100 nm to 250 nm, 250 nm to 360 nm, 360 nm to 490 nm, 490 nm to 584 nm, 584 nm to 610 nm, 610 nm to 790 nm, or 790 nm to 900 nm. If the grain size of the second silicon crystal grains is within any of the above ranges, the grain boundaries between the second silicon crystal grains are small, and carriers can easily pass through the second polysilicon doped layer 122, which contributes to increasing the carrier migration speed and improving the battery efficiency.

[0060] Here, the index representing the size of the crystal grains is called the crystal grain size. Common methods of expression include the number of crystal grains per unit volume (ZV), the number of crystal grains per unit area (ZS), and the average line length (or diameter) of the crystal grains. The average line length of the crystal grains refers to the line length of the extension surface in the extension direction of the crystal grains. The crystal grain size in this embodiment may be the average line length of the crystal grains.

[0061] In some embodiments, the first roughness of the surface of the first polysilicon doped layer 112 including the first protruding structure 1120 is greater than the second roughness of the surface of the second polysilicon doped layer 122 including the second protruding structure 1220. Thus, based on the difference in morphology between the first polysilicon doped layer 112 and the second polysilicon doped layer 122, when the first polysilicon doped layer 112 has a higher roughness, the surface of the first polysilicon doped layer 112 can enhance the internal reflection of incident light and reduce the optical loss of the solar cell. In addition, the first polysilicon doped layer 112 can increase the contact area between the first electrode and the first polysilicon doped layer 112, thus improving the contact performance and soldering tensile strength of the first polysilicon doped layer 112. In the case of the second polysilicon doped layer 122 with low roughness, the surface of the second polysilicon doped layer 122 is smooth, the uniformity of the second passivation layer grown thereon is good, and the passivation performance of the second passivation layer is good, so that the recombination defects of the solar cell can be improved.

[0062] In some embodiments, the second roughness range of the surface of the second polysilicon doped layer 122 including the second protrusion structures 1220 is 0 nm to 20 nm. The second roughness range is 0 nm to 5 nm, 5 nm to 7.5 nm, 7.5 nm to 11 nm, 11 nm to 15 nm, or 15 nm to 20 nm.

[0063] In some embodiments, the thickness h2 of the second protruding structure 1220 ranges from 20 nm to less than 20 nm.

[0064] In some embodiments, the range of the first dimension d2 of the second protrusion structure 1220 is 0 um to 300 um. The range of the first dimension d2 of the second protrusion structure 1220 is 0 um to 80 um, 80 um to 120 um, 120 um to 180 um, 180 um to 250 um, or 250 um to 300 um.

[0065] In some embodiments, the thickness range of the second polysilicon doped layer 122 including the second protruding structures 1220 is 100 nm to 400 nm. The thickness range of the second polysilicon doped layer 122 including the second protruding structures 1220 is 100 nm to 150 nm, 150 nm to 230 nm, 230 nm to 280 nm, 280 nm to 330 nm, or 330 nm to 400 nm.

[0066] In some embodiments, the cross-sectional shape of the second protruding structure 1220 comprises a parabola, a sector, a trapezoid, or an approximate trapezoid.

[0067] In some embodiments, the thickness of the first polysilicon doped layer 112 including the first protruding structure 1120 is equal to or less than the thickness of the second polysilicon doped layer 122 including the second protruding structure 1220. In this way, since the thickness of the first polysilicon doped layer 112 is small, the doping elements in the substrate are easily diffused into the first polysilicon doped layer 112 and further collected by the first electrode. Since the thickness of the second polysilicon doped layer 122 located on the back side is large, the risk of the second electrode burning through the second polysilicon doped layer 122 due to the second polysilicon doped layer 122 being too thin and the P-type doping elements diffusing into the substrate is reduced, and the problem of the P-type doping elements of the second polysilicon doped layer 122 accumulating at the substrate interface to form a "dead layer" is avoided, which can improve the carrier transport efficiency and reduce the generation of carrier recombination centers.

[0068] In addition, since the first polysilicon doped layer 112 is located on the front side and has a small thickness, the first polysilicon doped layer 112 can reduce the parasitic absorption of incident light and reduce the optical loss of the solar cell.

[0069] In some embodiments, the doping type of the first polysilicon doped layer 112 is the same as that of the substrate, and the doping type of the second polysilicon doped layer 122 is different from that of the substrate. That is, when the substrate is doped with an N-type doping element, the solar cell is a back-junction solar cell, and the "junction" refers to a "PN junction". Here, the first polysilicon doped layer 112 is located on the front side of the substrate, and the first polysilicon doped layer 112 and the first dielectric layer form good passivation for the substrate, reducing the recombination of the photo-generated carriers at the front side, and the photo-generated carriers migrate to the back side and are separated into majority carriers and minority carriers, and are then collected by the first electrode and the second electrode. In addition, since the thickness of the first polysilicon doped layer 112 is thin, the optical loss due to the absorption of the first polysilicon doped layer 112 itself can be further reduced.

[0070] In addition, since the first protrusion structure 1120 located on the front first polysilicon doped layer 112 has a large thickness, the light trapping structure formed by the first protrusion structure 1120 can increase the internal reflection of incident light and improve the internal reflectance of the solar cell.

[0071] In some embodiments, the substrate is doped with an N-type doping element, and N-type cells have advantages over P-type cells, such as higher conversion efficiency, lower temperature coefficient, higher bifaciality, and longer carrier lifetime.

[0072] In some embodiments, the doping type of the first polysilicon doped layer 112 and the doping type of the substrate are reversed, and the doping type of the second polysilicon doped layer 122 and the doping type of the substrate are the same. That is, the substrate is doped with a P-type doping element, and the solar cell is a front junction solar cell. In the case of a front junction solar cell, a lot of sunlight is collected by the substrate, and the sunlight can be separated into majority carriers and minority carriers at the front surface of the substrate, so that the loss occurring when transitioning through the thickness of a substrate can be avoided. In the case of the first polysilicon doped layer 112 located on the front surface, the first polysilicon doped layer 112 ensures passivation performance for the substrate, and the first polysilicon doped layer 112 has a first protrusion structure 1120, which can enhance the internal reflection of the incident light. In the case of the second polysilicon doped layer 122 located on the back surface, a built-in electric field of a high-low junction is formed between the second polysilicon doped layer 122 and the substrate, urging carriers to migrate from the substrate to the second polysilicon doped layer 122 and be collected at the second electrode.

[0073] In some embodiments, the solar cell further includes a first passivation layer 113 covering a surface of the first polysilicon doped layer 112 .

[0074] In some embodiments, the first passivation layer 113 may be a single layer structure or a laminate structure, and the material of the first passivation layer 113 may be one or more of materials such as silicon oxide, silicon nitride, silicon oxynitride, silicon oxycarbonitride, titanium oxide, hafnium oxide, or aluminum oxide.

[0075] In some embodiments, the solar cell further includes a second passivation layer 123 covering a surface of the second polysilicon doped layer 122. The second passivation layer 123 may be a single layer structure or a multilayer structure, and the material of the second passivation layer 123 may be one or more of the following materials: silicon oxide, silicon nitride, silicon oxynitride, silicon oxycarbonitride, titanium oxide, hafnium oxide, or aluminum oxide.

[0076] In some embodiments, the pitch range in the first direction X between two adjacent first electrodes 114 or two adjacent second electrodes 124 is 0.5 mm to 2 mm. For example, the pitch in the first direction X between the first electrodes 114 and the second electrodes 124 may be 0.5 mm to 0.8 mm, 0.8 mm to 1.15 mm, 1.15 mm to 1.28 mm, 1.28 mm to 1.46 mm, 1.46 mm to 1.68 mm, 1.68 mm to 1.84 mm, or 1.84 mm to 2 mm.

[0077] In some embodiments, the range of the width of the first electrode 114 in the first direction X or the width of the second electrode 124 in the first direction X is 5 μm to 50 μm. For example, the range of the width of the first electrode 114 in the first direction X or the width of the second electrode 124 in the first direction X may be 5 μm to 9 μm, 9 μm to 14 μm, 14 μm to 23 μm, 23 μm to 34 μm, 34 μm to 42 μm, 42 μm to 45 μm, 45 μm to 48 μm, or 48 μm to 50 μm.

[0078] In some embodiments, the first electrode 114 may be formed by sintering a burn-through paste. The method of forming the first electrode 114 includes printing a metal paste on a portion of the surface of the first passivation layer 113 using a screen printing process. The metal paste may include at least one of silver, aluminum, copper, tin, gold, lead, or nickel. Then, a sintering process is performed on the metal paste. The metal paste includes a highly corrosive component such as glass powder. In this way, during the sintering process, the corrosive component corrodes the first passivation layer 113, and the metal paste penetrates into the first passivation layer 113 and electrically contacts the first polysilicon doped layer 112.

[0079] In some embodiments, the second electrode 124 may be formed by sintering a burn-through paste. The method of forming the second electrode 124 includes printing a metal paste on a portion of the surface of the second passivation layer 123 using a screen printing process. The metal paste may include at least one of silver, aluminum, copper, tin, gold, lead, or nickel. Then, a sintering process is performed on the metal paste. The metal paste includes a highly corrosive component such as glass powder. In this way, during the sintering process, the corrosive component corrodes the second passivation layer 123, and the metal paste penetrates into the second passivation layer 123 and electrically contacts the second polysilicon doped layer 122.

[0080] In some embodiments, as shown in FIG. 2 , the front surface of the substrate includes a textured structure 13, the textured structure 13 including a plurality of pyramid structures 101, the textured structure 13 being a light trapping structure, the slope of the textured structure can increase the internal reflection of incident light, improve the absorption utilization rate of the substrate for the incident light, and thus enhance the cell efficiency of the solar cell.

[0081] FIG. 9 is a diagram showing a second type of cross-sectional structure along the A1-A2 cross section of FIG. 1. In some embodiments, as shown in FIG. 9, the front side of the substrate includes a metal region 1 and a non-metal region 2, and the first polysilicon doped layer 112 and the first dielectric layer 111 are located in the metal region 1.

[0082] In some embodiments, the metal region 1 refers to the region where the orthogonal projection of the first electrode 114 on the substrate 100 is located, and the non-metal region 2 refers to the region other than the orthogonal projection of the first electrode 114 on the substrate 100. Here, the area of ​​the metal region 1 is generally set to be larger than the area of ​​the first electrode 114 to ensure that the film layer that the first electrode 114 contacts has a large doping concentration or that the region that the first electrode 114 contacts is the first polysilicon doped layer 112.

[0083] By locating the first polysilicon doped layer 112 in the metal region 1 of the substrate 100, the parasitic absorption of the first polysilicon doped layer in the non-metal region 2 can be reduced, and the photoelectric conversion efficiency of the solar cell can be improved.

[0084] In the solar cell provided in the above embodiment, the surface of the first polysilicon doped layer 112 is provided with a first protrusion structure 1120, and the thickness of the first polysilicon doped layer 112 including the first protrusion structure 1120 is set to be smaller than the thickness of the second polysilicon doped layer 122 including the second protrusion structure 1220. Since the N-type polysilicon doped layer is a donor type, the crystalline silicon grains of the formed first polysilicon doped layer 112 are small, the airtightness between the crystalline silicon grains is large, and the thickness of the formed film layer is small. Conversely, the P-type polysilicon doped layer is an acceptor type, the compatibility between the P-type polysilicon doped layer and the substrate is good, the crystalline silicon grains of the P-type polysilicon doped layer are large, and the thickness of the second polysilicon doped layer 122 formed by stacking is large, where the second polysilicon doped layer 122 includes the second protrusion structure 1220.

[0085] In addition, since the thickness of the first protrusion structures 1120 is greater than the thickness of the second protrusion structures 1220, it is possible to improve the internal reflection of the first polysilicon doped layer 112 and the contact performance between the first polysilicon doped layer 112 and the first electrode 114. Since the height of the second protrusion structures 1220 of the second polysilicon doped layer 122 is low, the second polysilicon doped layer 122 can improve the passivation performance of the film layer located thereon.

[0086] Accordingly, this embodiment further provides a solar cell. The difference between this embodiment and the previous embodiment is that in the previous embodiment, the first polysilicon doped layer is located on the front side, and the first passivation layer covers the surface of the first polysilicon doped layer, while in the solar cell provided in this embodiment, the first polysilicon doped layer is located on the back side, and the first polysilicon doped layer and the second polysilicon doped layer are alternately arranged, and the second passivation layer covers the surface of the first polysilicon doped layer and the second polysilicon doped layer. The same or corresponding technical features as those in the above embodiment will not be described again here.

[0087] FIG. 10 is a diagram showing the structure of a solar cell provided in another embodiment of the present application, and FIG. 11 is a diagram showing a first type of cross-sectional structure along the B1-B2 cross section of FIG.

[0088] As shown in FIG. 10 and FIG. 11, the solar cell includes a substrate 200 having a front surface 21 and a back surface 22 opposite to each other, a first polysilicon doped layer 212 located on the back surface 22, a second polysilicon doped layer 222 located on the back surface 22, a first electrode 214 and a second electrode 224, in which the first polysilicon doped layer 212 is doped with N-type dopant ions, the first polysilicon doped layer 212 has a first protrusion structure on a surface thereof, the second polysilicon doped layer 222 is doped with P-type dopant ions, and the first electrode 214 and the second electrode 224 are formed on the first polysilicon doped layer 212. The polysilicon doped layer 212 and the second polysilicon doped layer 222 are insulated from each other, the second polysilicon doped layer 222 has a second protrusion structure on a surface thereof, the thickness of the first protrusion structure is greater than the thickness of the second protrusion structure, the thickness of the first polysilicon doped layer 212 including the first protrusion structure is less than or equal to the thickness of the second polysilicon doped layer 222 including the second protrusion structure, the first electrode 214 is in electrical contact with the first polysilicon doped layer 212, and the second electrode 224 is in electrical contact with the second polysilicon doped layer 222.

[0089] In some embodiments, backside surface 22 includes an N region and a P region, with first polysilicon doped layer 212 located in the N region and second polysilicon doped layer 222 located in the P region.

[0090] In some embodiments, the front surface 21 of the substrate 200 comprises a textured structure 23, the textured structure 23 including a plurality of pyramidal structures 201, and the textured structure 23 can include regularly shaped pyramidal textured structures and irregularly shaped black silicon.

[0091] In some embodiments, the front surface 21 of the substrate comprises a front surface field (FSF) in which the conductivity type of the dopant ions is the same as that of the substrate, and a field passivation effect is utilized to reduce the surface minority carrier concentration, thereby reducing the surface recombination velocity, lowering the series resistance, and increasing the electron transport capacity.

[0092] In some embodiments, the back surface 22 of the substrate is a polished surface, which refers to a flat surface formed by removing the textured structure of the surface with a polishing solution or laser etching. After polishing, the flatness of the back surface is increased, the reflection of long wavelength light is increased, and secondary absorption of the projected light is promoted, which increases the short circuit current and reduces the specific surface area of ​​the back surface, which reduces the recombination of the back surface, and improves the passivation effect of the back surface.

[0093] In some embodiments, there is a gap between the P region and the N region, and the second passivation layer is located in the gap.

[0094] In some embodiments, a trench is formed between the P and N regions to provide automatic isolation between regions of different conductivity types, eliminating the possibility that the heavily doped P and N regions on the backside of the IBC cell would form a tunnel junction that would cause leakage current and affect cell efficiency.

[0095] As shown in FIG. 11, the solar cell further includes a first dielectric layer 211 located between the substrate 200 and the first polysilicon doped layer 212, and a second dielectric layer 221 located between the substrate 200 and the second polysilicon doped layer 222.

[0096] In some embodiments, the first roughness of the surface of the first polysilicon doped layer 212 including the first protrusion structures is in the range of 10 nm to 30 nm.

[0097] In some embodiments, the thickness of the first protrusion structure is in the range of 30 nm or less.The first protrusion structure has a one-dimensional dimension in the range of 0 μm to 500 μm.

[0098] In some embodiments, the thickness of the first polysilicon doped layer 212 including the first protruding structures ranges from 50 nm to 300 nm.

[0099] In some embodiments, the density range of the primary protrusion structures is 50% to 98%.

[0100] In some embodiments, the second roughness range of the surface of the second polysilicon doped layer 222 including the second protruding structures is between 0 nm and 20 nm.

[0101] In some embodiments, the thickness range of the secondary protrusion structures is less than or equal to 20 nm.

[0102] In some embodiments, the range of one dimension of the secondary protruding structures is 0 μm to 300 μm.

[0103] In some embodiments, the thickness of the second polysilicon doped layer 222 including the second protruding structures ranges from 100 nm to 400 nm.

[0104] In some embodiments, the solar cell further comprises a first passivation layer 213 covering the front surface 21 and a second passivation layer 223 covering the first polysilicon doped layer 212, the second polysilicon doped layer 222 and the gap region gap.

[0105] In some embodiments, the first electrode 214 is located in an N region and the second electrode 224 is located in a P region.

[0106] FIG. 12 is a diagram showing the structure of a photovoltaic module provided in another embodiment of the present application, and FIG. 13 is a diagram showing a cross-sectional structure along the M1-M2 cross section of FIG.

[0107] Accordingly, in accordance with some embodiments of the present application, in some other embodiments of the present application, a photovoltaic module is provided, which may include a solar cell as described in the above embodiments, and the same parts as the above embodiments will not be described again here.

[0108] As shown in Figure 12, the photovoltaic module includes a cell string in which a plurality of solar cells 30 described in any one of the above embodiments are connected by connecting members 309, a sealing adhesive film 37 for covering the surface of the cell string, and a cover plate 38 for covering the surface of the sealing adhesive film 37 remote from the cell string.

[0109] Specifically, in some embodiments, the battery cells are electrically connected to each other by the connection member 309, and the connection member 309 and the main grids of the battery cells may be welded to each other. The main grids include a first main grid 231 electrically connected to the first electrode 214 and a second main grid 232 electrically connected to the second electrode 224.

[0110] In some embodiments, there is no space between the battery cells, i.e., the battery cells overlap each other.

[0111] In some embodiments, welding is performed between the connection member and a sub-grid in the battery cell, and the sub-grid includes a first electrode 2141 and a second electrode 2142.

[0112] In some embodiments, the encapsulating adhesive film 37 includes a first encapsulating layer and a second encapsulating layer, the first encapsulating layer covering one of the front or back surface of the solar cell, and the second encapsulating layer covering the other of the front or back surface of the solar cell. Specifically, at least one of the first encapsulating layer or the second encapsulating layer may be an organic encapsulating adhesive film, such as a polyvinyl butyral (PVB) adhesive film, an ethylene vinyl acetate copolymer (EVA) adhesive film, a polyethylene-octene copolymer (POE) adhesive film, or a polyethylene terephthalate (PET) adhesive film.

[0113] Before lamination processing, there is a boundary between the first sealing layer and the second sealing layer, and after lamination processing, when the photovoltaic module is formed, the concept of the first sealing layer and the second sealing layer no longer exists; that is, the first sealing layer and the second sealing layer are integrated to form a sealing adhesive film 37.

[0114] In some embodiments, the cover plate 38 may be a cover plate with a light-transmitting function, such as a glass cover plate, a plastic cover plate, etc. Specifically, the surface of the cover plate 38 facing the sealing adhesive film 37 may be an uneven surface, which can improve the utilization rate of the incident light. The cover plate 38 includes a first cover plate and a second cover plate, the first cover plate facing the first sealing layer and the second cover plate facing the second sealing layer, or the first cover plate facing one side of the solar cell and the second cover plate facing the other side of the solar cell.

[0115] Those skilled in the art will understand that the above embodiments are specific examples for implementing the present application, but various changes in form and details are possible in practice without departing from the scope of the present application. Since any person skilled in the art can make changes and modifications without departing from the spirit and scope of the present application, the scope of protection of the present application should be based on the scope limited by the claims.

Claims

1. The semiconductor device includes a substrate having a front surface and a back surface disposed opposite to each other, a first polysilicon doped layer doped with N-type dopant ions, a second polysilicon doped layer doped with P-type dopant ions, a first electrode, and a second electrode, the first polysilicon doped layer is located on the front surface or the back surface, and a surface of the first polysilicon doped layer facing away from the substrate has a plurality of first protrusion structures; the second polysilicon doped layer is located on the rear surface, and the first polysilicon doped layer and the second polysilicon doped layer are insulated from each other; the second polysilicon doped layer has a surface away from the substrate with a plurality of second protrusion structures, an average thickness of the plurality of first protrusion structures is greater than an average thickness of the plurality of second protrusion structures, and a thickness of the first polysilicon doped layer including the first protrusion structures is equal to or less than a thickness of the second polysilicon doped layer including the second protrusion structures; the first electrode is in electrical contact with the first polysilicon doped layer, the second electrode is in electrical contact with the second polysilicon doped layer, the first polysilicon doped layer including the first protrusion structures has a thickness ranging from 50 nm to 300 nm; the first polysilicon doped layer is located on the back surface, the back surface includes an N region and a P region, the first polysilicon doped layer is located in the N region, and the second polysilicon doped layer is located in the P region; A solar cell characterized by:

2. a surface roughness of the first polysilicon doped layer including the plurality of first protrusion structures is greater than a surface roughness of the second polysilicon doped layer including the plurality of second protrusion structures; The solar cell according to claim 1 .

3. The surface roughness of the first polysilicon doped layer including the first protrusion structures is in the range of 10 nm to 30 nm. The solar cell according to claim 2 .

4. The surface roughness of the second polysilicon doped layer including the second protrusion structures ranges from 0 nm to 20 nm. The solar cell according to claim 2 .

5. The average thickness range of the plurality of first protrusion structures is 30 nm or less. The solar cell according to claim 1 .

6. The average thickness range of the plurality of second projection structures is 20 nm or less. The solar cell according to claim 1 .

7. The range of one-dimensional dimensions of the plurality of first protrusion structures is 0 μm to 500 μm; The solar cell according to claim 1 .

8. The range of one-dimensional dimensions of the plurality of second protrusion structures is 0 um to 300 um; The solar cell according to claim 1 .

9. The thickness of the second polysilicon doped layer including the second protrusion structures is in the range of 100 nm to 400 nm. The solar cell according to claim 1 .

10. At least one cell string comprising a plurality of solar cells according to any one of claims 1 to 9 connected together; at least one sealing adhesive film for covering a surface of the at least one cell string; and at least one cover plate for covering a surface of the at least one sealing adhesive film remote from the at least one cell string. A photovoltaic module comprising:

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