CONTROL DEVICE, POSITIONING DEVICE, LITHOGRAPHY DEVICE, AND ARTICLE MANUFACTURING METHOD
JP7645658B2Active Publication Date: 2025-03-14CANON KK
Patent Information
- Application Number
- JP2021027746
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2021-02-24
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2041-02-24
AI Technical Summary
Benefits of technology
【0007】 本発明によれば、制御特性の向上に有利な技術が提供される。
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Abstract
To provide a technique advantageous for improving control characteristics.SOLUTION: A control device for controlling a control object includes a measuring instrument for measuring a state of the control object, and a controller for generating an operation amount according to output of the measuring instrument and a target value, where the controller includes a compensator for outputting an index according to the output and the target value, and a converter for converting the index into the operation amount according to a conversion rule, and the conversion rule is set so that probability distribution of the operation amount follows target probability distribution.SELECTED DRAWING: Figure 8
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Citation Information
Patent Citations
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