Light source device

Abstract

To suppress fluctuation of a radiation flux.SOLUTION: A light source device includes: a light-emitting body including a light-emitting part and a proximal part; an integrating sphere covering the light-emitting part of the light-emitting body; and a guard material covering the proximal part of the light-emitting body. The guard material is installed so as to cause air to flow over an outside surface that is a surface on an opposite side to a surface facing the proximal part of the light-emitting body.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a light source device. [Background technology]

[0002] 2. Description of the Related Art A light source device equipped with an integrating sphere that uniformizes the intensity distribution of light from a light source is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-14590 A Summary of the Invention [Problem to be solved by the invention]

[0004] For example, when using a broadband light source that covers the mid-infrared wavelength range, such as a ceramic light source, the light emitter generates a large amount of heat. To prevent this, a heat sink may be used. In addition, the radiant flux of the light output by the light source device varies depending on the temperature fluctuation of the light emitter. However, when a heat sink is used externally, the temperature fluctuation occurs due to the influence of the temperature around the heat sink, wind, etc., so the fluctuation in the radiant flux may not be sufficiently suppressed.

[0005] One aspect of the invention allows for suppression of fluctuations in radiant flux. [Means for solving the problem]

[0006] A light source device according to one aspect includes a light emitter having a light emitting portion and a base, an integrating sphere covering the light emitting portion of the light emitter, and a guard material covering the base of the light emitter, the guard material being arranged so that air flows over its outer surface, which is the surface opposite to the surface facing the base of the light emitter. Effect of the Invention

[0007] According to the present invention, it is possible to suppress fluctuations in radiant flux. [Brief description of the drawings]

[0008] [Figure 1] 1 is a diagram showing an example of a schematic configuration of a light source section 100 included in a light source device 1 according to an embodiment. [Diagram 2] 1 is a diagram showing an example of a schematic configuration of a light source section 100 included in a light source device 1 according to an embodiment. [Diagram 3] 1 is a block diagram showing an example of a schematic configuration of a light source device 1. FIG. [Figure 4] FIG. 13 is a diagram showing an example of an experimental result. [Diagram 5] FIG. 11 is a block diagram showing an example of a schematic configuration of a light source device 1 according to a modified example. [Figure 6] FIG. 11 is a block diagram showing an example of a schematic configuration of a light source device 1 according to another modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment will be described with reference to the drawings. The same elements are given the same reference numerals, and duplicated descriptions will be omitted as appropriate.

[0010] 1 and 2 are diagrams showing an example of a schematic configuration of a light source unit 100 included in a light source device 1 according to an embodiment. The light source device 1 is, for example, a light source device for optical measurement, a light source device for illumination, etc., and is used for film thickness measurement, powder measurement, microscopic observation, etc.

[0011] XYZ coordinate axes are shown. Fig. 1 shows a schematic cross section of the light source unit 100 as viewed in the positive direction of the Y axis. Fig. 2 shows a schematic cross section of the light source unit 100 as viewed along line II-II in Fig. 1 (as viewed in the negative direction of the Z axis).

[0012] <Configuration of light source unit 100> The light source unit 100 includes a light emitter 101, an integrating sphere 102, a reflector 103, a window 104, a window fixing device 105, a gap 106, a heat insulating material 107, a heat insulating material 108, a light emitter mounting device 109, an O-ring 110, a guard material 111, a gap 112, a heat insulating material 113, a heat insulating material 114, and an upper region 115. Each element will be described. Unless otherwise specified, the material of each element may be appropriately selected within the scope of common technical knowledge.

[0013] The light emitter 101 is a light source in the light source unit 100, and is, for example, a broadband light source that covers the mid-infrared wavelength range. An example of such a light source is a ceramic light source, etc. The light emitter 101 has a light emitting portion 101a and a base portion 101b.

[0014] The light emitting unit 101a is a portion that emits light in the light emitting body 101. The base portion 101b is a portion that supports the light emitting unit 101a and is connected to a power source. In the example shown in Figures 1 and 2, the light emitting body 101 has a cylindrical shape that extends in the longitudinal direction (negative direction of the Z axis) from the light emitting unit 101a to the base portion 101b.

[0015] The integrating sphere 102 is a hollow structure that integrates light from a light source inside to make the light intensity distribution uniform. The integrating sphere 102 has a light emitter insertion port 102a, an inner wall 102b, and an exit port 102c.

[0016] The light emitter insertion port 102a is a port for inserting the light emitter 101. In the example shown in FIG. 1, the light emitter 101 is loosely inserted into the light emitter insertion port 102a so that the integrating sphere 102 covers the light emitting portion 101a of the light emitter 101 (so that the light emitting portion 101a is located inside the integrating sphere 102). The inner wall 102b is, for example, coated or formed as a rough surface (a surface having geometric roughness) so as to have an optically reflective and scattering surface. The light is reflected and scattered by the inner wall 102b, and thus the light is integrated. The exit port 102c outputs the light integrated in the integrating sphere 102.

[0017] The reflector 103 is a baffle plate that prevents the light from the light emitting unit 101a of the light emitter 101 from directly reaching the exit port 102c of the integrating sphere 102. The reflector 103 can suppress spatial unevenness of the light emitted from the exit port 102c. The reflector 103 is disposed in the integrating sphere 102 so as to be located between the light emitting unit 101a of the light emitter 101 and the exit port 102c of the integrating sphere 102. For example, the reflector 103 is supported by a support member (not shown) extending from the inner wall 102b of the integrating sphere 102. In the example shown in FIG. 1, the reflector 103 extends parallel to the bottom surface of the light emitting unit 101a. Specifically, the reflector 103 extends in the XY plane so as to be parallel to the cylindrical bottom surface of the light emitter 101. Similarly, exit port 102 c of integrating sphere 102 extends parallel to the lower surface of light-emitting part 101 a and reflector 103 .

[0018] In one embodiment, light emitter 101 is provided so that the central axis of the cylindrical shape of the light emitter 101 penetrates the wall of integrating sphere 102 with the central axis perpendicular to the tangent plane of integrating sphere 102. It can also be said that the center of integrating sphere 102 is located on an extension line of the central axis of the cylindrical shape of light emitter 101.

[0019] Window 104 passes light emitted from exit port 102c of integrating sphere 102. In the example shown in Fig. 1, window 104 is provided outside exit port 102c (Z-axis negative direction side) so as to cover exit port 102c. Window 104 is made of, for example, a material that transmits light. Window fixture 105 abuts against the edge of window 104 from the outside (Z-axis negative direction side) of window 104 to fix window 104.

[0020] Gap 106 provides a gap between the outer surface (outer wall surface) of integrating sphere 102 and insulating material 107 and insulating material 108. Gap 106 may be an air gap, in which case gap 106 may be an air layer.

[0021] Insulating material 107 and insulating material 108 are provided so as to cover integrating sphere 102. Insulating material 107 is provided so as to face the side portion of integrating sphere 102 and the lower portion of integrating sphere 102 (the portion on the negative Z-axis direction side). However, insulating material 107 is not provided in the lower portion of integrating sphere 102 at a position facing exit port 102c and its periphery. Insulating material 108 is provided on insulating material 107 so as to face the upper portion of integrating sphere 102 (the portion on the positive Z-axis direction side). However, insulating material 108 is not provided in the upper portion of integrating sphere 102 at a position facing light emitter insertion port 102a and its periphery.

[0022] 1, the light emitting body attachment fixture 109 is located between a portion between the light emitting section 101a and the base 101b of the light emitting body 101 (which may be a part of the base 101b) and the thermal insulation material 108 in the XY plane direction, and fixes the light emitting body 101 to the thermal insulation material 108. The light emitting body attachment fixture 109 is fixed to a guard material 111, and as described later, the guard material 111 is fixed to the thermal insulation material 108.

[0023] The O-ring 110 is provided between the heat insulating material 108 and a flange portion (described later) of the guard material 111. In the example shown in Fig. 1, the O-ring 110 is placed in a groove formed in the upper surface (the surface on the positive side of the Z axis) of the heat insulating material 108 so as to have a ring shape when viewed in the Z axis direction.

[0024] 1, the guard material 111 is provided so as to cover the base 101b of the light emitter 101. In the example shown in FIG. 1, the guard material 111 is provided so as to cover the end face (the end face on the Z-axis positive direction side) of the base 101b in the longitudinal direction of the light emitter 101 and the side face of the base 101b. The guard material 111 has a cylindrical shape (hollow columnar shape) that is open downward, i.e., in the Z-axis negative direction, and has a flange portion extending laterally, i.e., in the XY plane direction, from the periphery of the opening. The flange portion is fixed (fastened, etc.) to the heat insulating material 108. The guard material 111 is fixed to the heat insulating material 108 with the flange portion in contact with the O-ring 110.

[0025] In one embodiment, the guard material 111 may be arranged coaxially with the light emitter 101 such that the central axis of the cylindrical shape is aligned with the central axis of the columnar shape of the light emitter 101. A constant distance is maintained between the guard material 111 and the base 101b of the light emitter 101 in the circumferential direction (the direction of rotation about the Z-axis). Note that the guard material 111 may be provided with a hole for passing wiring or the like that connects the base 101b to a power source.

[0026] The guard material 111 is provided so that air can flow over the outer surface of the light emitter 101, more specifically, the surface opposite to the surface facing the base 101b of the light emitter 101. Heat is removed from the outer surface of the guard material 111 by air convection heat transfer, and is transported and discharged by the air. A material with high thermal conductivity may be used for the guard material 111. An example of such a material is metal, etc. An example of a metal is aluminum, etc. The guard material 111 may be made of a homogeneous material so that the thermal conductivity of each part is uniform.

[0027] The guard material 111 has a plurality of guide grooves 111a. The plurality of guide grooves 111a are provided on the outer surface of the guard material 111 so as to extend along the longitudinal direction (Z-axis direction) of the guard material 111. In the example shown in Fig. 2, the plurality of guide grooves 111a are arranged at equal intervals in the circumferential direction. As described below, the plurality of guide grooves 111a rectify the air flowing on the outer surface of the guard material 111.

[0028] The gap 112 provides a gap between the base 101b of the light emitting body 101 and the guard material 111. The gap 112 may be an air gap, in which case the gap 112 may be an air layer.

[0029] The heat insulating material 113 and the heat insulating material 114 are provided so as to cover the guard material 111. The heat insulating material 113 is provided on the heat insulating material 108 so as to face a part of the side of the guard material 111. The heat insulating material 114 is provided on the heat insulating material 113 so as to face the remaining part of the side of the guard material 111 and the upper part of the guard material 111.

[0030] The heat insulating material 113 has a plurality of holes 113a. The plurality of holes 113a are formed (drilled, etc.) so as to penetrate the heat insulating material 113 in the up-down direction (Z-axis direction). In the example shown in Fig. 2, the plurality of holes 113a are disposed at equal intervals in the circumferential direction.

[0031] The heat insulating material 114 has a ring-shaped groove 114a and a plurality of holes 114b. The ring-shaped groove 114a has a ring shape when viewed in the Z-axis direction, and opens downward (in the negative Z-axis direction) so as to connect with the plurality of holes 113a along the circumferential direction. The plurality of holes 114b are formed so as to penetrate the heat insulating material 114 in the up-down direction (Z-axis direction). The holes 114b extend from the bottom surface of the ring-shaped groove 114a of the heat insulating material 114 to the top surface of the heat insulating material 114 (the surface on the positive Z-axis direction side).

[0032] Tube 115a is an intake tube that supplies air toward guard material 111. In the example shown in Fig. 1, tube 115a passes through heat insulating material 114 and communicates with upper region 115 above guard material 111. Air is supplied from tube 115a to upper region 115. An air outlet in tube 115a is illustrated and referred to as air intake port 115a1.

[0033] Tube 115b is an exhaust tube that exhausts air. In the example shown in Fig. 1, tube 115b is a plurality of tubes each provided to be connected to hole 114b of heat insulating material 114. Air that flows over the outer side surface of guard material 111 is exhausted through hole 113a of heat insulating material 113, ring-shaped groove 114a and hole 114b of heat insulating material 114, and tube 115b. An air intake port in tube 115b is illustrated as air exhaust port 115b1.

[0034] The following describes the basic operation of light source unit 100. When the power is turned on, light emitter 101a of light emitter 101 emits light. The light from light emitter 101a is repeatedly reflected and scattered by inner wall 102b of integrating sphere 102, and is emitted from emission port 102c with a uniform intensity distribution.

[0035] It is required to suppress the fluctuation in the radiant flux of the light output from the light source unit 100 (light emitted from the emission port 102c). To achieve this, it is necessary to suppress the temperature fluctuation of the light emitter 101 (to keep the temperature constant). With the light source unit 100 having the above-mentioned structure, it is possible to suppress the temperature fluctuation of the light emitter 101. A specific description will be given below.

[0036] In the light source unit 100, heat from the base 101b of the light emitter 101 covered with the guard material 111 is taken away by convection heat transfer of air flowing over the outer surface of the guard material 111 via the guard material 111, thereby cooling the base 101b. If the base 101b of the light emitter 101 were in direct contact with the air, the temperature of the light emitter 101 would be likely to fluctuate due to changes in the temperature and flow rate of the air. By providing the guard material 111 to avoid direct contact between the base 101b of the light emitter 101 and the air, the effects of changes in the temperature and flow rate of the air can be mitigated, and the temperature fluctuation of the light emitter 101 can be suppressed.

[0037] A gap 112 is provided between the base 101b of the light emitter 101 and the guard material 111. The gap 112 has the function of making the time constant of heat conduction between the light emitter 101 and the guard material 111 larger than when there is no gap 112 therebetween. This is because the provision of the gap 112 increases the thermal resistance. As a result, even if the temperature of the guard material 111 changes abruptly due to pulsating air flowing over the outer side surface of the guard material 111, the temperature change of the light emitter 101 can be suppressed.

[0038] Air is supplied to upper region 115 above guard material 111 via tube 115a. A plurality of guide grooves 111a are provided at equal intervals in the circumferential direction on the outer side surface of guard material 111, thereby rectifying the air flowing on the outer surface of guard material 111. By convection heat transfer of the rectified air, base 101b of light emitter 101 covered by guard material 111 is cooled uniformly in the circumferential direction. This can enhance the effect of suppressing temperature fluctuations in light emitter 101.

[0039] The cylindrical guard material 111 is disposed coaxially with the columnar light emitter 101. The distance between the guard material 111 and the base 101b of the light emitter 101 is kept constant in the circumferential direction, and the base 101b is cooled uniformly in the circumferential direction. This allows the temperature of the light emitter 101 to be kept uniformly constant.

[0040] By providing the heat insulating materials 113 and 114 that cover the guard material 111, it is possible to suppress temperature fluctuations in the air flowing over the outer surface of the guard material 111. This makes it possible to enhance the effect of suppressing temperature fluctuations in the light emitting body 101.

[0041] The heat insulating material 113 has a plurality of holes 113a formed at equal intervals in the circumferential direction. Air flowing over the outer surface of the guard material 111 passes through the plurality of holes 113a in the heat insulating material 113 and is exhausted uniformly in the circumferential direction. This makes it easier for the base 101b of the light emitting body 101 to be cooled uniformly in the circumferential direction. This allows the temperature of the light emitting body 101 to be kept uniformly constant.

[0042] A ring-shaped groove 114a is provided in the heat insulating material 114 provided on the heat insulating material 113. The ring-shaped groove 114a is connected to a plurality of holes 113a in the heat insulating material 113. The air flowing out from each hole 113a is guided by the ring-shaped groove 114a, uniformized in the circumferential direction, and exhausted. This makes it easier for the base 101b of the light emitting body 101 to be uniformly cooled in the circumferential direction. This allows the temperature of the light emitting body 101 to be uniformly kept constant.

[0043] Air from the ring-shaped groove 114a of the heat insulating material 114 is exhausted through a plurality of tubes 115b (a plurality of air exhaust ports 115b1) arranged at equal intervals in the circumferential direction. This makes it easier to distribute the amount of exhausted air evenly in the circumferential direction. This makes it easier to cool the base 101b of the light emitter 101 uniformly in the circumferential direction. This makes it possible to keep the temperature of the light emitter 101 uniformly constant.

[0044] The temperature of integrating sphere 102 also rises due to radiation from light emitting body 101, and it can secondarily become a radiator. According to light source unit 100, integrating sphere 102 is covered with insulating materials 107 and 108, so that loss of thermal energy caused by heat conduction or heat transfer from integrating sphere 102 to the outside is suppressed. This makes it possible to suppress temperature fluctuations in integrating sphere 102 caused by temperature fluctuations in the external environment, fluctuations in the heat transfer rate due to wind, etc.

[0045] Since the thermal energy is trapped inside by the thermal insulators 107 and 108, the thermal influence on the surroundings is also reduced. For example, the thermal influence on electronic components and the like disposed near the light source unit 100 is reduced.

[0046] A gap 106 is provided between the outer surface of integrating sphere 102 and heat insulating material 107 and heat insulating material 108. Thermal conduction between integrating sphere 102 and heat insulating material 107 and heat insulating material 108 is alleviated, and loss of thermal energy and the like is further suppressed.

[0047] Guard material 111 is fixed to heat insulating material 108 with O-ring 110 sandwiched therebetween. This makes it possible to more reliably prevent air flowing over the outer surface of guard material 111 from hitting light emitting body 101 and integrating sphere 102. This makes it possible to enhance the effect of suppressing temperature fluctuations in light emitting body 101 and integrating sphere 102.

[0048] <Air supply control> The air supplied through the tube 115a may be manually or automatically controlled. An example of a configuration that enables this control will be described with reference to FIG.

[0049] 3 is a block diagram showing an example of a schematic configuration of light source device 1. In addition to the light source unit 100 described above, light source device 1 includes an air flow rate adjustment unit 200, an air temperature control unit 300, a temperature measurement unit 300a, and an air supply device 400. For convenience, the air supply device 400 will be described first.

[0050] The air supply device 400 supplies air. The air supply device 400 includes, for example, a tank for storing air, a pump for sending out air, etc. The air supplied from the air supply device 400 is called intake air 500a and is diagrammatically illustrated by an arrow.

[0051] The air temperature control unit 300 controls the temperature of the intake air 500a from the air supply device 400. Various known techniques (equipment, devices, etc.) capable of controlling the air temperature may be used. The intake air 500a after being temperature-controlled by the air temperature control unit 300 is called intake air 500b and is diagrammatically illustrated by an arrow.

[0052] The air flow rate adjustment unit 200 adjusts the flow rate of the intake air 500b from the air temperature control unit 300. Various methods may be used to adjust the air flow rate, including, for example, setting by manually operating a knob. The intake air 500b after the flow rate adjustment by the air flow rate adjustment unit 200 is called intake air 500c and is diagrammatically illustrated by an arrow.

[0053] Intake air 500c from the air flow rate regulator 200 is supplied to the light source unit 100. As described above, this intake air 500c is supplied to the upper region 115 above the guard material 111 via the tube 115a of the light source unit 100, and the light emitter 101 is kept at a constant temperature. The intake air 500c is exhausted via the tube 115b. The exhausted intake air 500c is called exhaust air 500d and is diagrammatically illustrated by an arrow.

[0054] The temperature measuring unit 300a measures the temperature of the intake air 500c. Various known techniques capable of measuring air temperature may be used. The temperature measurement result by the temperature measuring unit 300a is fed back to the air temperature control unit 300. The air temperature control unit 300 controls the temperature of the intake air 500b based on the temperature measurement result. Specifically, the temperature of the intake air 500b is controlled so as to suppress temperature fluctuations of the intake air 500c. This keeps the light emitter 101 at a constant temperature.

[0055] For example, by providing the light source device 1 with the above-mentioned configuration, it becomes possible to control the supply of air flowing over the outer surface of the guard material 111. For example, the light source device 1 can be provided with a function (automatic control function) for automatically suppressing temperature fluctuations of the light emitter 101, and therefore fluctuations in the radiant flux.

[0056] <Experimental Results> FIG. 4 is a diagram showing an example of an experimental result. The horizontal axis of the graph indicates time. The vertical axis of the graph indicates normalized radiant flux and environmental temperature. The normalized radiant flux is a normalized value of the radiant flux at a position 60 mm away from the window 104 of the light source unit 100 measured by a thermal power meter. Hereinafter, this normalized radiant flux is also simply called radiant flux. The environmental temperature is the temperature around the light source unit 100. The change in the radiant flux for 6 hours after the power is turned on is shown in the graph together with the environmental temperature. The comparative example is an experimental result in a configuration in which the tubes 115a and 115b do not supply and exhaust air, but instead a finned heat sink exposed to the outside of the light source unit 100 is attached. Note that each graph line is illustrated with the symbols A to D attached to make it easy to distinguish.

[0057] The radiant flux of the embodiment and the comparative example are compared during a time period of 4 to 6 hours (4:00:00 to 6:00:00) after power is turned on. Although the environmental temperature fluctuates to the same extent in both cases, the fluctuations in the radiant flux are suppressed more in the embodiment than in the comparative example. As an example, the suppression of fluctuations is evaluated using the stability defined by the following formula (1). The maximum value in the formula indicates the maximum value of the radiant flux during the time period. The minimum value indicates the minimum value of the radiant flux during the time period. The average value indicates the average value of the radiant flux over the time period.

number

[0058] 4, in the time period from 4 hours to 6 hours, the stability of the radiant flux according to the comparative example is about 1.4%, whereas the stability of the radiant flux according to the embodiment is about 1 / 5 of that, or about 0.3%. It was confirmed that the configuration of the embodiment can suppress fluctuations in the radiant flux.

[0059] 4, the embodiment can stabilize the radiant flux in a shorter time than the comparative example. That is, the warm-up time required from turning on the power until starting use can be shortened.

[0060] <Modification> FIG. 5 is a block diagram showing an example of a schematic configuration of a light source device 1 according to a modified example. The light source device 1 shown in FIG. 5 differs from the configuration described above (FIG. 3) in that a temperature measurement unit 300a measures the temperature of the guard material 111 of the light source unit 100. The temperature of the guard material 111 is measured, for example, by incorporating a temperature sensor in the guard material 111. The air temperature control unit 300 controls the temperature of the intake air 500b based on the measurement result of the temperature of the guard material 111. That is, the temperature of the intake air 500b is controlled so as to suppress temperature fluctuations of the guard material 111.

[0061] FIG. 6 is a block diagram showing an example of a schematic configuration of a light source device 1 according to another modified example. The light source device 1 shown in FIG. 6 includes an air flow control unit 200A instead of the air flow rate adjustment unit 200 (FIGS. 3 and 5), and further includes a temperature measurement unit 200a. The air flow rate control unit 200A controls the flow rate of the intake air 500b from the air temperature control unit 300. Various known techniques capable of controlling the air flow rate may be used. The temperature measurement unit 200a measures the temperature of the guard material 111. The temperature measurement result by the temperature measurement unit 200a is fed back to the air flow rate control unit 200A. The air flow rate control unit 200A controls the flow rate of the intake air 500c based on the temperature measurement result. In the example shown in FIG. 6, the temperature measurement unit 300a measures the temperature of the intake air 500b, and the air temperature control unit 300 controls the temperature of the intake air 500b based on the temperature measurement result. It is not essential that the light source device 1 includes both the air flow rate control unit 200A and the air temperature control unit 300. The light source device 1 may include only one of the air flow rate control unit 200A and the air temperature control unit 300, and control only one of the air temperature and flow rate.

[0062] The light source device 1 described above is specified, for example, as follows. As described with reference to Fig. 1 and Fig. 2 etc., the light source device 1 includes a light emitter 101 having a light emitter 101a and a base 101b, an integrating sphere 102 covering the light emitter 101a of the light emitter 101, and a guard material 111 covering the base 101b of the light emitter 101. The guard material 111 is provided so that air flows on the outer surface, which is the surface opposite to the surface of the light emitter 101 facing the base 101b.

[0063] According to the light source device 1 described above, heat from the base 101b of the light emitter 101 covered with the guard material 111 is discharged through the guard material 111 by convection heat transfer of air flowing over the outer surface of the guard material 111, thereby cooling the base 101b. By providing the guard material 111 and avoiding direct contact between the base 101b of the light emitter 101 and the air, it is possible to mitigate the effects of changes in temperature and flow rate of the air and suppress temperature fluctuations of the light emitter 101. Therefore, it is possible to suppress fluctuations in radiant flux.

[0064] 1 and the like, the light emitter 101 extends in the longitudinal direction (Z-axis direction) from the base 101b to the light emitter 101a, and the guard material 111 may cover an end face (an end face on the Z-axis positive side) of the base 101b of the light emitter 101 in the longitudinal direction and a side face of the base 101b. For example, with such a structure, the base 101b of the light emitter 101 can be covered with the guard material 111.

[0065] 1 and the like, the light source device 1 may include a tube 115a that supplies air toward the guard material 111. In this manner, for example, air can be made to flow over the outer surface of the guard material 111.

[0066] 1 and 2, the guard material 111 may have a plurality of guide grooves 111a provided on the outer surface to straighten the air. This makes it easier for the air to flow appropriately over the outer side surface of the guard material 111.

[0067] 1 and the like, the light source device 1 may include a heat insulating material 113 and a heat insulating material 114 that cover the guard material 111. This makes it possible to suppress the effects of temperature changes and airflow changes in the external environment, and to suppress temperature fluctuations in the guard material 111, and temperature fluctuations and changes in heat transfer coefficient of the air flowing on the outer surface of the guard material 111.

[0068] 1 and the like, light source device 1 may include heat insulating materials 107 and 108 that cover integrating sphere 102. This makes it possible to suppress temperature fluctuations in integrating sphere 102, which may secondarily become a radiator, and suppress fluctuations in radiant flux.

[0069] As described with reference to Fig. 5 etc., the light source device 1 may include an air temperature control unit 300 that controls the temperature of the air (the temperature of the intake air 500b) based on the measurement results of the temperature of the guard material 111. Also, as described with reference to Fig. 6 etc., the light source device 1 may include an air flow rate control unit 200A that controls the flow rate of the air based on the measurement results of the temperature of the guard material 111. By providing such a control unit, it is possible to automatically suppress, for example, temperature fluctuations of the guard material 111 and the light emitter 101, and therefore fluctuations in the radiant flux.

[0070] 1 and the like, integrating sphere 102 has output port 102c for outputting light, and light source device 1 may include reflector 103 arranged in integrating sphere 102 so as to be located between light-emitting unit 101a of light-emitting body 101 and output port 102c of integrating sphere 102. This makes it possible to prevent light from light-emitting unit 101a from directly reaching output port 102c, and to suppress spatial unevenness in the light output from output port 102c. [Explanation of symbols]

[0071] 1 Light source device 100 Light source section 101 Light Source 101a Light emitting part 101b base 102 Integrating Sphere 102a Light source insertion port 102b Interior wall 102c Exit port 103 Reflector 104 Windows 105 Window Fixtures 106 Gap 107 Insulation 108 Insulation 109 Light source mounting fixture 110 O-ring 111 Guard material 111a Guide groove 112 Gap 113 Insulation 113a hole 114 Insulation 114a Ring-shaped groove 114b hole 115 Upper area 115a tube 115a1 Air Intake 115b tube 115b1 Air exhaust port 200 Air flow rate adjustment unit 200A Air flow control unit 200a Temperature measurement section 300 Air temperature control unit 300a Temperature measurement section 400 Air supply unit 500a Intake Air 500b intake air 500c intake air 500d Exhaust Air

Claims

1. a light emitter having a light emitting portion and a base; an integrating sphere covering a light emitting portion of the light emitter; A guard material for covering a base of the light emitter; Equipped with the guard material is provided so that air can flow on an outer surface of the light emitter that is a surface opposite to a surface facing the base portion, A gap is provided between the base and the guard material. Light source device.

2. The light emitter extends longitudinally from the base to the light emitter, The guard material covers an end surface of the base of the light emitter in the longitudinal direction and a side surface of the base. The light source device according to claim 1 .

3. A tube is provided for supplying the air toward the guard material.

3. A light source device according to claim 1 or 2.

4. The guard material has a plurality of guide grooves provided on the outer surface to rectify the air. The light source device according to any one of claims 1 to 3.

5. A heat insulating material is provided to cover the guard material. The light source device according to any one of claims 1 to 4.

6. A thermal insulator covering the integrating sphere is provided. The light source device according to any one of claims 1 to 5.

7. An air temperature control unit is provided to control the temperature of the air based on the measurement result of the temperature of the guard material. The light source device according to any one of claims 1 to 6.

8. An air flow rate control unit is provided to control the flow rate of the air based on the measurement result of the temperature of the guard material. The light source device according to any one of claims 1 to 7.

9. the integrating sphere has an exit port for exiting light; the light source device includes a reflector disposed within the integrating sphere so as to be located between a light emitting portion of the light emitter and an exit port of the integrating sphere; The light source device according to any one of claims 1 to 8.

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