Warm ultrapure water production equipment

Abstract

To provide a warm ultrapure water manufacturing device for heating ultrapure water with heated water that is heated by a heat pump that efficiently saves energy.SOLUTION: A warm ultrapure water manufacturing device transfers secondary pure water to a use point 50 from a subsystem 4 via a heat exchanger 6, a heat exchanger 10, a warm ultrapure water tank 31, a heat exchanger 33 and a UF membrane device 40. A heat pump 20 is installed to heat heat-source-medium water of the heat exchanger 6. Warm ultrapure water returned from the use point 50 flows into the warm ultrapure water tank 31 via a heat exchanger 52.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a hot ultrapure water production apparatus, and more particularly to a hot ultrapure water production apparatus configured to heat ultrapure water from a subsystem in a heat exchanger and supply it to a point of use as hot ultrapure water. [Background technology]

[0002] Ultrapure water used for washing semiconductors is produced in an ultrapure water production system that consists of a primary pure water production system and a subsystem (secondary pure water production system).

[0003] In the subsystem, the ultraviolet light emitted from a low-pressure ultraviolet lamp breaks down TOC into organic acids and even CO2. The organic matter and CO2 produced by the decomposition are removed by an ion exchange device, and fine particles are removed by an ultrafiltration membrane separation device, resulting in ultrapure water.

[0004] This ultrapure water may be heated in a heat exchanger to become hot ultrapure water and sent to a point of use. Heated water heated by a heat pump may be used as a heat source fluid for this heat exchanger (Patent Document 1).

[0005] FIG. 4 is a system diagram showing an example of a hot ultrapure water production apparatus having a conventional heat pump type heating device.

[0006] The primary pure water passes from the sub-tank 1 through the cooler 2, where it is cooled to about 23°C, and then introduced into the subsystem 4 via the pipe 3, where ultrapure water is produced. The produced ultrapure water at about 25°C flows in this order through the pipe 5, the first heat exchanger 6, the pipe 9, and the second heat exchanger 10, where it is heated to about 45 to 70°C by the first heat exchanger 6, and to about 75°C by the second heat exchanger 10, and is sent as hot ultrapure water to the point of use via the pipe 11. A UF ​​membrane device 12 is installed in the pipe 11.

[0007] Return-temperature ultrapure water of about 70°C from the point of use is introduced into the heat source fluid flow path of the first heat exchanger 6 via piping 7. This return-temperature ultrapure water is cooled by heat exchange with ultrapure water from the subsystem 4 in the heat exchanger 6, and then sent to the subtank 1 via piping 8.

[0008] A first water medium (water as a heat transfer medium) heated by the heat pump 20 and the steam heater 15 circulates through the heat source fluid flow path of the second heat exchanger 10. That is, the first water medium that has passed through the heat source fluid flow path of the heat exchanger 10 is passed through a pipe 13 to a condenser 23 of the heat pump 20 to be heated, and then passed through a pipe 14 to the steam heater 15 to be further heated. The first water medium is then caused to flow into the second heat exchanger 10 through a pipe 16.

[0009] Steam (water vapor) from a boiler or the like flows through the heat source fluid flow path of the steam heater 15.

[0010] The heat pump 20 is configured to compress a heat transfer medium such as an alternative refrigerant gas from an evaporator 21 using a pump 22 and introduce it into a condenser 23, and to introduce the heat transfer medium from the condenser 23 into the evaporator 21 via an expansion valve 24.

[0011] A circulation pump (not shown) is provided in the pipe 13. In order to pass a second water medium (heat pump heat source water) through the evaporator 21, pipes 25 and 26 are provided. [Prior art documents] [Patent documents]

[0012] [Patent Document 1] JP 2019-152411 A Summary of the Invention [Problem to be solved by the invention]

[0013] As shown in Fig. 4, the first water medium circulating through the pipes 13, 14, and 16 is heated using a heat pump 20, thereby reducing the amount of steam used for heating in the steam heater 15. However, the power consumption of a heat pump generally varies significantly depending on its operating conditions, and in some cases the power consumption of the heat pump offsets the benefit of reducing the amount of steam, making it impossible to obtain the benefit of using the heat pump.

[0014] To address this issue, in order to obtain an energy saving effect that exceeds this offset, the heat pump's heat source water (second medium water) is sometimes used as cooling tower circulating water, thereby reducing the amount of steam and the power consumption of the cooling tower at the same time.

[0015] Cooling towers are designed to use the heat of vaporization to lower the temperature of water, and because the power consumption is mainly from the cooling tower circulation pump and the cooling fan, they are very efficient in heat exchange and have excellent energy conservation (energy saving) compared to heat pumps. However, because the power consumption of cooling towers is smaller than that of heat pumps, even if cooling tower circulating water is used as the heat source water for the heat pump, the effect of reducing power consumption is small, and the reality is that there is no substantial cost benefit to adopting a heat pump as an energy saving measure.

[0016] By using return water (water that returns to the chiller after being heated at the point of use) of the chiller circulating water (hereinafter sometimes referred to as cold water) as the heat source water (second medium water) of the heat pump, it is possible to reduce the load on the chiller, which consumes more electricity than a cooling tower.

[0017] Generally, the first water medium that flows into the second heat exchanger 10, which heats up warm ultrapure water (about 75°C), is at about 80°C. Therefore, when the heat pump's heat source water is the return water (about 12°C) of the chiller circulating water, there is a large temperature difference between this and the first water medium.

[0018] Therefore, although energy savings are achieved by reducing the power consumed by the refrigerator, the increased temperature difference causes the heat pump's COP (coefficient of performance) to deteriorate compared to conventional methods, resulting in increased power consumption. Considering the number of years it will take to recoup the initial investment in adopting a heat pump through energy savings, it is not efficient from the perspective of cost benefits.

[0019] Furthermore, in a hot ultrapure water system, there is a problem on the manufacturing process side in that there is a large difference between the amount of hot ultrapure water used at the point of use during normal times and the amount of hot ultrapure water used during maximum peak times.

[0020] If the system is configured so that hot ultrapure water is produced in accordance with the maximum peak time of the use point and sent to the use point, the amount of hot ultrapure water used under normal circumstances is small, so that the amount of hot ultrapure water returned to the subtank under normal circumstances is large.

[0021] In FIG. 4, heat is exchanged in the first heat exchanger 6 between the warm ultrapure water (return) returned from the point of use and the ultrapure water from the subsystem. However, because the warm ultrapure water (return) does not cool to the room temperature ultrapure water temperature, there is a corresponding heat loss within the warm ultrapure water system.

[0022] Also, on the subsystem side, this will result in an increase in the amount of cold water used (refrigeration power consumption) to reduce the increased heat.

[0023] In light of the above, we decided to reconsider the hot ultrapure water system itself and adopt a heat pump. It was necessary to establish efficient energy conservation methods.

[0024] An object of the present invention is to provide a warm ultrapure water production apparatus that can efficiently save energy in a warm ultrapure water production apparatus that heats ultrapure water in a heat exchanger using a medium water heated by a heat pump. [Means for solving the problem]

[0025] The warm ultrapure water manufacturing apparatus of the first invention comprises a heat exchanger (A) for heating ultrapure water from an ultrapure water manufacturing apparatus, a warm ultrapure water storage tank for storing the ultrapure water heated by the heat exchanger (A) and unused return warm ultrapure water from a point of use, a final heat exchanger for heating the ultrapure water from the warm ultrapure water storage tank to a temperature required at the point of use, a warm ultrapure water supply path for supplying the warm ultrapure water heated by the final heat exchanger to the point of use, a circulation path for circulating a water medium as a heat source medium through a heat source fluid path of the heat exchanger (A), and a heat pump for heating the water medium flowing through the circulation path.

[0026] In one aspect of the first aspect of the present invention, the heat source water of the heat pump is return water of circulating water in a chiller.

[0027] In one aspect of the first invention, a UF membrane device is provided in a hot ultrapure water supply passage that supplies the hot ultrapure water heated in the final heat exchanger to a use point.

[0028] In one aspect of the first invention, a heat exchanger (C) is provided for exchanging heat between return hot ultrapure water flowing from the point of use to the hot ultrapure water storage tank and concentrated water from the UF membrane device.

[0029] In one embodiment of the first invention, a heat exchanger (D) is provided between the ultrapure water production apparatus and the heat exchanger (A), and the concentrated water that has passed through the heat exchanger (C) is returned to the upstream side of the ultrapure water production apparatus through the heat exchanger (D).

[0030] In one aspect of the first invention, the final heat exchanger includes a circulation flow path for the final heat exchanger, which circulates a water medium as a heat source medium through a heat source fluid flow path of the final heat exchanger, and a heat pump for the final heat exchanger, which heats the water medium flowing through the circulation flow path for the final heat exchanger, and the heat source water for the heat pump for the final heat exchanger is return water of the chiller circulating water.

[0031] The hot ultrapure water manufacturing apparatus of the second invention comprises a heat exchanger (A) for heating ultrapure water from an ultrapure water manufacturing apparatus, a heat exchanger (B) for heating the ultrapure water heated by the heat exchanger (A), a final heat exchanger for heating the ultrapure water heated by the heat exchanger (B) to a temperature required at a point of use, a hot ultrapure water supply path for supplying the hot ultrapure water heated by the final heat exchanger to the point of use, a circulation path for circulating medium water as a heat source medium through a heat source fluid path of the heat exchanger (A), a heat pump for heating the medium water flowing through the circulation path, and a return path for circulating unused return hot ultrapure water not used at the point of use as a heat source medium for the heat exchanger (B) and then returning it to a subtank of the ultrapure water manufacturing equipment or upstream thereof.

[0032] In one embodiment of the second invention, a UF membrane device is provided in a hot ultrapure water supply passage that supplies the hot ultrapure water heated in the final heat exchanger to a use point.

[0033] In one embodiment of the second invention, a mixture of the return temperature ultrapure water and concentrated water from the UF membrane device is circulated as a heat source medium for the heat exchanger (B).

[0034] In one embodiment of the second invention, a heat exchanger (D) is provided between the ultrapure water production apparatus and the heat exchanger (A), and the mixed water that has passed through the heat exchanger (B) is returned to the upstream side of the ultrapure water production apparatus through the heat exchanger (D). Effect of the Invention

[0035] In the hot ultrapure water manufacturing apparatus of the first invention, unused hot ultrapure water (return hot ultrapure water of about 70°C) is returned to the hot ultrapure water storage tank, so the temperature of the ultrapure water supplied to the heat exchanger (A) using a heat pump (a heat pump that heats the medium water flowing through the heat source fluid flow path of the heat exchanger (A)) is lower than in the conventional example (Figure 4) in which hot ultrapure water is returned to a sub-tank. This reduces the temperature difference between the heat source water of the heat pump (such as the return water of a refrigerator) and the medium water of the heat exchanger (A) (the heat source fluid of the heat exchanger (A)). This makes it possible to improve the COP (coefficient of performance) of the heat pump that heats the medium water flowing through the heat source fluid flow path of the heat exchanger (A).

[0036] In the hot ultrapure water production apparatus of the second invention, a heat exchanger (B) is installed downstream of the heat exchanger (A) in which a heat pump is installed. In this heat exchanger (B), the ultrapure water from the heat exchanger (A) is further heated by the return hot ultrapure water from the point of use (or a mixture of the return hot ultrapure water and concentrated water from the UF membrane device).

[0037] In this way, since the heat of the return hot ultrapure water is recovered and utilized in the rear stage of the heat exchanger (A), the temperature of the ultrapure water supplied to the heat exchanger (A) can be lowered, as in the first invention. This reduces the temperature difference between the heat pump's heat source water (such as the return water of a refrigerator) and the medium water (the heat source fluid of the heat exchanger (A)). This makes it possible to improve the COP (coefficient of performance) of the heat pump.

[0038] In the first invention, unused ultrapure water circulates between the hot ultrapure water tank and the use point, so there is a risk of contamination accumulating due to piping, etc. In contrast, in the second invention, the return hot ultrapure water is returned to the ultrapure water production equipment after heat exchange, so contamination is removed and no accumulation occurs. Therefore, the second invention is suitable when the required quality of the hot ultrapure water is high. [Brief description of the drawings]

[0039] [Figure 1] 1 is a system diagram showing a warm ultrapure water manufacturing apparatus according to an embodiment of the first invention. [Diagram 2] FIG. 4 is a system diagram showing a warm ultrapure water manufacturing apparatus according to another embodiment of the first invention. [Diagram 3] FIG. 11 is a system diagram showing a warm ultrapure water manufacturing apparatus according to an embodiment of the second invention. [Figure 4] FIG. 1 is a system diagram showing a conventional hot ultrapure water manufacturing apparatus. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0040] Hereinafter, an embodiment will be described with reference to the drawings.

[0041] FIG. 1 is a system diagram showing a hot ultrapure water manufacturing apparatus according to an embodiment of the first invention.

[0042] The primary pure water passes from sub-tank 1 through cooler 2, where it is cooled to about 23°C, and is then introduced into subsystem 4 via piping 3, where ultrapure water is produced in sub-tank 4. The produced ultrapure water flows in the order of piping 5, first heat exchanger 6 serving as heat exchanger (D), piping 9, and second heat exchanger 10 serving as heat exchanger (A), and is heated to about 25 to 40°C by first heat exchanger 6, and is then heated to about 45 to 60°C by second heat exchanger 10.

[0043] The ultrapure water heated in the second heat exchanger 10 is introduced into a hot ultrapure water tank 31, which serves as a hot ultrapure water storage tank, via piping 30. Return hot ultrapure water from a point of use 50 is also introduced into the hot ultrapure water tank 31 via piping 51, a fourth heat exchanger 52, and piping 53. Note that in order to keep the water level in the hot ultrapure water tank 31 constant, it is preferable to provide a flow rate adjustment valve (not shown) in the piping 30.

[0044] The hot ultrapure water in the hot ultrapure water tank 31 is introduced via piping 32 into the third heat exchanger 33 serving as the final heat exchanger, where it is heated to approximately 75° C. and then supplied to the UF membrane device 40 via piping 34. The hot ultrapure water that is the permeate from the UF membrane device is sent to the point of use 50 via piping 41. The return hot ultrapure water from the point of use 50 is sent to the hot ultrapure water tank 31 via piping 51, the fourth heat exchanger 52 serving as the heat exchanger (C), and piping 53, as described above.

[0045] The concentrated water from the UF membrane device 40 has a temperature of about 72 to 78°C and is sent to the fourth heat exchanger 52 via the pipe 42, where it is heat exchanged with the return ultrapure water from the pipe 51 to lower its temperature to about 68 to 74°C, and then sent to the first heat exchanger 6 via the pipe 43. The return ultrapure water, which has been heat exchanged with the ultrapure water from the subsystem 4 in the first heat exchanger 6 to lower its temperature to about 23 to 30°C, is sent to the sub-tank 1 via the pipe 8. The return ultrapure water from the pipe 8 may be sent to a tank upstream of the sub-tank 1 (for example, the tank of a primary pure water device).

[0046] A first water medium (water as a heat transfer medium) heated by the heat pump 20 circulates through the heat source fluid flow path of the first heat exchanger 10. That is, the first water medium that has passed through the heat source fluid flow path of the heat exchanger 10 is passed through the piping 13, the tank 13a, and a circulation pump (not shown) to the condenser 23 of the heat pump 20 to be heated, and then is made to flow into the heat source fluid flow path of the first heat exchanger 10 through the piping 14.

[0047] The heat pump 20 is configured to compress a heat transfer medium such as an alternative refrigerant gas from an evaporator 21 using a pump 22 and introduce it into a condenser 23, and to introduce the heat transfer medium from the condenser 23 into the evaporator 21 via an expansion valve 24.

[0048] In order to pass a second water medium (heat pump heat source water) through a heat source fluid flow path (low temperature side flow path) of the evaporator 21, a flow path consisting of a sending pipe 25 and a returning pipe 26 is provided.

[0049] In this embodiment, return water of chiller circulating water at about 8 to 20° C. from a chiller (not shown) is passed through the evaporator 21 as heat pump heat source water. The return water, which has been heated by passing through the evaporator 21, is returned to the chiller via the pipe 26.

[0050] The water medium is passed through the heat source fluid flow path of the third heat exchanger 33 via circulation pipes 35, 37, and 39, a circulating water tank 36, and a pump (not shown). A steam heater 38 is provided between these pipes 37 and 39. The water medium heated by the steam heater 38 is passed through the heat exchanger 33, and the warm ultrapure water from the pipe 32 is further heated by the water medium and sent through the pipe 34 to the UF membrane device 40.

[0051] 1 configured as above, ultrapure water from the subsystem 4 is heated in the first heat exchanger 6 by heat exchange with concentrated water from the UF membrane device 40, then further heated in the second heat exchanger 10 using medium water heated by the heat pump 20, and then flows into the hot ultrapure water tank 31. The return hot ultrapure water and a mixture of this hot ultrapure water are further heated in the third heat exchanger 33, and then sent to the point of use 50 via the UF membrane device 40. The return hot ultrapure water from the point of use 50 is heat exchanged with concentrated water from the UF membrane device 40 in the fourth heat exchanger 52, where it is slightly heated, and then flows into the hot ultrapure water tank 31.

[0052] In this embodiment, the temperature of the ultrapure water supplied to the second heat exchanger 10 can be lowered compared to the conventional example (FIG. 4) in which unused warm ultrapure water (about 70°C) is returned to the subsystem 4, so the temperature difference between the heat source water (such as return water from a refrigerator) of the heat pump 20 used to heat the second heat exchanger 10 and the second medium water (heat source fluid for the second heat exchanger 10) is reduced. This makes it possible to improve the COP (coefficient of performance) of the heat pump.

[0053] In this embodiment, the heat absorption source of the heat pump is the return water of the chiller circulating water, so that the power consumption of the chiller is reduced by that amount compared to the power reduction in the conventional system using a cooling tower.

[0054] In this embodiment, since the return hot ultrapure water from the point of use 50 is returned to the hot ultrapure water tank 31, the amount of power consumed by the refrigerator for cooling by the cooler 2 is reduced compared to the case where hot ultrapure water is returned to the sub-tank 31. This makes it possible to enjoy substantial cost benefits of introducing a heat pump into a hot ultrapure water system.

[0055] In this embodiment, hot ultrapure water from the point of use 50 is returned to the hot ultrapure water tank 31, and only concentrated water (UF brine) from the UF membrane device 40 releases heat to the subsystem 4. In this embodiment, heat is recovered from the UF brine by the fourth heat exchanger 52 and the first heat exchanger 6, so heat loss (amount of cooling heat in the subsystem) in the hot ultrapure water system is small. For this reason, while in the conventional example, the smaller the amount of hot ultrapure water used, the greater the heat loss in the system, heat loss is reduced regardless of the amount used, and the amount of heat required to heat the hot ultrapure water device can be reduced accordingly.

[0056] Furthermore, the amount of heat absorbed by the return warm ultrapure water from the UF brine by the fourth heat exchanger 52 is small compared to the amount of return warm ultrapure water passing through the fourth heat exchanger 52, so there is little increase in the temperature of the return warm ultrapure water. For this reason, the heat pump 20 does not need to raise the hot water temperature to about 80°C as in the past. This reduces the temperature difference between the heat absorption source side outlet and the hot water side outlet in the heat pump 20, improving the COP and reducing power consumption.

[0057] When two or more heat pumps are installed in the medium water line of the second heat exchanger 10, it is desirable to pass the return water of the chiller circulating water in series to reduce the temperature difference with the heat absorption side and reduce power consumption.

[0058] In Fig. 1, only one heat pump 20 for heating the water medium of the heat exchanger 10 is provided, but two or more may be provided. In this case, it is preferable that the return water as the heat source water is passed in series through the evaporators of each heat pump. Furthermore, if the amount of water is large, multiple heat pumps can be installed in parallel. For example, two series of six heat pumps connected in series can be installed.

[0059] FIG. 2 is a system diagram showing another embodiment of the first invention.

[0060] In the embodiment of FIG. 1, the heat source medium water of the third heat exchanger 33 is heated only by the steam heater 38, whereas in the embodiment of FIG. 2, this heat source medium water is heated by the heat pumps 20A, 20B and the steam heater 38.

[0061] The heat pumps 20A and 20B have the same configuration as the heat pump 20, and each includes an evaporator 21, a pump 22, a condenser 23, and an expansion valve 24.

[0062] After the ultrapure water is heated in the third heat exchanger 33, the medium water is passed through piping 35 and a circulating water tank 36 to the condenser 23 of the first heat pump 22A and heated, then passed through piping 35A to the condenser 23 of the second heat pump 22B and heated, and then sent via piping 37 to a steam heater 38 to be further heated, and then sent via piping 39 to the third heat exchanger 33.

[0063] Return water of the chiller circulating water is passed as heat source water to the evaporator 21 of the first heat pump 20A through a pipe 25A branched off from a heat source water pipe 25 for the heat pump.

[0064] The return water, which has been cooled after passing through the evaporator 21 of the first heat pump 20A, passes through a pipe 26A to the evaporator 21 of the second heat pump 20B, where it is further cooled, and is returned to the refrigerator through a pipe 26B.

[0065] Other configurations of the hot ultrapure water production apparatus in FIG. 2 are the same as those in FIG. 1, and the same reference numerals denote the same parts.

[0066] In the hot ultrapure water manufacturing apparatus of Fig. 2, heat pumps 20A, 20B are installed in the hot water circulation line of heat exchanger 33. This makes it possible to reduce (or eliminate) the amount of steam used in steam heater 38. Note that, although two heat pumps 20A, 20B are installed in Fig. 2, only one may be used. When multiple heat pumps are installed, it is preferable to pass return water through two stages in series as shown in Fig. 2.

[0067] By using series water flow, the power consumption of the heat pump is reduced accordingly. In this embodiment, the heat absorption source (heat source water) of the heat pump is the return water, so the power consumption of the chiller is reduced accordingly compared to the conventional case.

[0068] FIG. 3 is a system diagram showing a warm ultrapure water manufacturing apparatus according to an embodiment of the second invention.

[0069] 3, a fifth heat exchanger 62 serving as a heat exchanger (B) is installed between a second heat exchanger 10 serving as a heat exchanger (A) and a third heat exchanger 30 serving as a final heat exchanger. A pipe 51 for return warm ultrapure water from a use point 50 and a pipe 42 for concentrated water (brine) from a UF membrane device 40 are connected to the junction pipe 62.

[0070] The return warm ultrapure water from the point of use 50 and the concentrated water from the UF membrane device 40 are passed through pipes 51, 42 and pipe 61 to the heat source fluid flow path of the fifth heat exchanger 62, where they exchange heat with the ultrapure water from pipe 30, and then passed through pipe 63 to the heat source fluid flow path of the first heat exchanger 6, and then sent to the sub-tank 1 via pipe 8.

[0071] Other configurations of the hot ultrapure water production apparatus in FIG. 3 are the same as those in FIG. 1, and the same reference numerals denote the same parts.

[0072] According to the hot ultrapure water manufacturing apparatus of FIG. 3, the return hot ultrapure water is passed through the heat source fluid flow path of the fifth heat exchanger 62 as the heat exchanger (B), and after recovering heat from the return hot ultrapure water (i.e., after lowering the temperature of the return hot ultrapure water), the return hot ultrapure water is passed through the heat source fluid flow path of the first heat exchanger 6, and then returned to the sub-tank 1. Therefore, the amount of heat given to the ultrapure water in the first heat exchanger 6 is less than in the conventional case (FIG. 4), and the temperature of the ultrapure water supplied from the first heat exchanger 6 to the second heat exchanger 10 is lower than in the conventional case (FIG. 4). As a result, the temperature difference between the heat source water (in this embodiment, the return water of the refrigeration machine circulation water) of the heat pump 20 used to heat the medium water of the second heat exchanger 10 and the medium water is smaller than in the conventional case (FIG. 4), and therefore it is possible to improve the COP (coefficient of performance) of the heat pump.

[0073] 1 and 2, unused ultrapure water circulates between the hot ultrapure water tank 31 and the point of use 50, which may lead to the accumulation of contamination due to piping, etc., but in Fig. 3, the return hot ultrapure water from the point of use passes through the sub-tank 1 and is treated in the subsystem 4, so contamination is removed without accumulating. Therefore, the hot ultrapure water manufacturing apparatus in Fig. 3 is suitable when the required quality of the hot ultrapure water is high.

[0074] However, in FIG. 3, the fifth heat exchanger 62 cannot sufficiently recover the heat of the return warm ultrapure water, so the power reduction effect is reduced. EXAMPLES

[0075] [Comparative Example 1] The warm ultrapure water production equipment shown in FIG. 4 was operated under the following conditions. Primary pure water temperature: 23℃ Water temperature from subtank 1: 23.3℃ Ultrapure water temperature and flow rate from subsystem 4: 23°C, 90m 3 / h Temperature and flow rate of ultrapure water from the first heat exchanger 6: 59.8°C, 90m 3 / h Temperature and flow rate of ultrapure water from the second heat exchanger 10: 75°C, 90m 3 / h Temperature and flow rate of hot ultrapure water from the UF membrane device 40 to the use point: 75°C, 85.5m 3 / h Temperature and flow rate of ultrapure water returned from the use point: 70℃, 69m 3 / h Temperature and flow rate of concentrated water from UF membrane device 40: 75°C, 4.5m 3 / h Temperature and flow rate of the return ultrapure water and concentrated water mixture from the use point from the first heat exchanger 6 to the subtank 1: 25°C, 73.5m 3 / h Temperature and flow rate of return water sent from the refrigerator to the evaporator 21 of the heat pump 20 through the pipe 25: 12°C, 108m 3 / h Temperature and flow rate of return water from evaporator 21 to the refrigerator: 7℃, 108m 3 / h Temperature and flow rate of hot water from the condenser 23 of the heat pump 20 to the steam heater 15 (through the pipe 14): 72.3°C, 108 m 3 / h Temperature and flow rate of hot water from steam heater 15 (through pipe 14) to heat exchanger 10: 80°C, 108 m 3 / h Temperature and flow rate of hot water from heat exchanger 10 (through pipe 13) to condenser 23 of heat pump 20: 67.3°C, 108 m 3 / h

[0076] The thermal calculation results were as follows: Heat exchanger 6 calorific value: 3308Mcal / h 3846kw Heat exchanger 10 calorific value: 1373Mcal / h 1596kw Steam heater 15 Heat capacity: 832Mcal / h 967kw Heat pump 20 heat exchange amount (heating): 541Mcal / h 629kw Steam heater 15 + heat pump 20 Heating capacity: 1,373Mcal / h 1,596kw Heat Pump 20 COP: 3.0 Power consumption of Heat Pump 20: 210kw

[0077] [Example 1] The warm ultrapure water production equipment shown in Figure 1 was operated under the following conditions. Primary pure water temperature: 23℃ Water temperature from subtank 1: 23℃ Ultrapure water temperature and flow rate from subsystem 4: 23°C, 21m 3 / h Temperature and flow rate of ultrapure water from the first heat exchanger 6: 32.9°C, 21m 3 / h Temperature and flow rate of ultrapure water from the second heat exchanger 10: 50°C, 21m 3 / h Temperature and flow rate of ultrapure water from hot ultrapure water tank 31: 65.5℃, 90m 3 / h Temperature and flow rate of hot ultrapure water from the third heat exchanger 33: 75°C, 90m 3 / h Temperature and flow rate of hot ultrapure water from the UF membrane device 40 to the use point: 75°C, 85.5m 3 / h Temperature and flow rate of ultrapure water returned from the use point: 70℃, 69m 3 / h Temperature and flow rate of the return hot ultrapure water from the fourth heat exchanger 52 to the hot ultrapure water tank 31: 70.3°C, 69m 3 / h Temperature and flow rate of concentrated water from UF membrane device 40: 75°C, 4.5m 3 / h Temperature and flow rate of concentrated water from the fourth heat exchanger 52 to the first heat exchanger 6: 71°C, 4.5m 3 / h Temperature and flow rate of concentrated water from the first heat exchanger 6 to the subtank 1: 25°C, 4.5m 3 / h Temperature and flow rate of return water sent from the refrigerator to the evaporator 21 of the heat pump 20 through the pipe 25: 12°C, 72m 3 / h Temperature and flow rate of return water from evaporator 21 to the refrigerator: 7℃, 72m 3 / h Temperature and flow rate of hot water from the condenser 23 of the heat pump 20 to the heat exchanger 10 (through the pipe 14): 55°C, 108 m 3 / h Temperature and flow rate of hot water from heat exchanger 10 (through pipe 13) to condenser 23 of heat pump 20: 51.7°C, 108 m 3 / h Temperature and flow rate of hot water from steam heater 38 (through pipe 39) to heat exchanger 33: 80°C, 108 m 3 / h Temperature and flow rate of hot water from heat exchanger 33 (through piping 35 and circulating water tank 36) to steam heater 38: 72.1°C, 108 m 3 / h

[0078] The thermal calculation results were as follows: Heat exchanger 52 calorific value: 18Mcal / h 21kw Heat exchanger 6 calorific value: 207Mcal / h 241kw Heat exchanger 10 calorific value: 360Mcal / h 419kw Heat exchanger 33 calorific value: 852Mcal / h 991kw Steam heater 38 Heat capacity: 852Mcal / h 991kw Heat pump 20 heat exchange amount (heating): 360Mcal / h 419kw Steam heater 38 + heat pump 20 Heating capacity: 1,212 Mcal / h 1,409kw Heat Pump 20 COP: 4.1 Heat pump 20 power: 102kw Power consumption reduction rate of heat pump 20: 51% (vs. Comparative Example 1)

[0079] [Example 2] The warm ultrapure water production equipment shown in Figure 3 was operated under the following conditions. Primary pure water temperature: 23℃ Water temperature from subtank 1: 23.3℃ Ultrapure water temperature and flow rate from subsystem 4: 23°C, 90m 3 / h Temperature and flow rate of ultrapure water from the first heat exchanger 6: 45.1°C, 90m 3 / h Temperature and flow rate of ultrapure water from the second heat exchanger 10: 50°C, 90m 3 / h Temperature and flow rate of ultrapure water from the fifth heat exchanger 62: 64.7°C, 90m 3 / h Temperature and flow rate of hot ultrapure water from the third heat exchanger 33: 75°C, 90m 3 / h Temperature and flow rate of hot ultrapure water from the UF membrane device 40 to the use point: 75°C, 85.5m 3 / h Temperature and flow rate of ultrapure water returned from the use point: 70℃, 69m 3 / h Temperature and flow rate of concentrated water from UF membrane device 40: 75°C, 4.5m 3 / h Temperature and flow rate of return water from the fifth heat exchanger 62 to the first heat exchanger 6: 52°C, 73.5m 3 / h Temperature and flow rate of return water from the first heat exchanger 6 to the sub-tank 1: 25°C, 73.5m 3 / h Temperature and flow rate of return water sent to the evaporator 21 of the heat pump 20: 12°C, 89m 3 / h Temperature and flow rate of return water from the evaporator 21 of the heat pump 20: 7°C, 89m 3 / h Temperature and flow rate of hot water from the condenser 23 of the heat pump 20 to the heat exchanger 10 (through the pipe 14): 55°C, 108 m 3 / h Temperature and flow rate of hot water from heat exchanger 10 (through pipe 13) to condenser 23 of heat pump 20: 50.9°C, 108 m 3 / h Temperature and flow rate of hot water from steam heater 38 (through pipe 39) to heat exchanger 33: 80°C, 108 m 3 / h Temperature and flow rate of hot water from heat exchanger 33 (through pipe 35) to steam heater 38: 71.4°C, 108m 3 / h

[0080] The thermal calculation results were as follows: Heat exchanger 52 calorific value: 1,323 Mcal / h 1,538kw Heat exchanger 6 calorific value: 1,985 Mcal / h 2,308kw Heat exchanger 10 calorific value: 446 Mcal / h 518kw Heat exchanger 33 calorific value: 927Mcal / h 1,078kw Steam heater 38 Heat capacity: 927Mcal / h 1,078kw Heat pump 20 heat exchange amount (heating): 446Mcal / h 518kw Steam heater 38 + heat pump 20 Heating capacity: 1,373Mcal / h 1,596kw Heat Pump 20 COP: 4.1 Power consumption of Heat Pump 20: 126kw Reduction rate of power consumption of heat pump 20: 40% (vs. Comparative Example 1) [Explanation of symbols]

[0081] 1 Subtank 2 cooling tower 4 Subsystem (Ultrapure water production equipment) 6 1st heat exchanger (heat exchanger (D)) 10 Second heat exchanger (heat exchanger (A)) 12,40 UF membrane equipment 15,38 Steam heater 20, 20A, 20B Heat Pump 31 Hot ultrapure water tank (hot ultrapure water storage tank) 33 Third heat exchanger (final heat exchanger) 50 Use Points 52 4th heat exchanger (heat exchanger (C)) 62 No. 5 heat exchanger (heat exchanger (B))

Claims

1. A heat exchanger (A) for heating ultrapure water from an ultrapure water production apparatus; a warm ultrapure water storage tank for storing the ultrapure water heated by the heat exchanger (A) and unused warm ultrapure water returned from a use point; a final heat exchanger for heating the ultrapure water from the hot ultrapure water storage tank to a required temperature at a point of use; a hot ultrapure water supply line for supplying the hot ultrapure water heated by the final heat exchanger to a use point; a circulation flow path for circulating a medium water as a heat source medium through a heat source fluid flow path of the heat exchanger (A); a heat pump that heats the medium water flowing through the circulation flow path; A warm ultrapure water production apparatus equipped with:

2. 2. The apparatus for producing warm ultrapure water according to claim 1, wherein the heat source water for said heat pump is return water of circulating water from a refrigerator.

3. 3. The apparatus for producing warm ultrapure water according to claim 1, further comprising a UF membrane device provided in a warm ultrapure water supply line for supplying the warm ultrapure water heated in said final heat exchanger to a use point.

4. 4. The apparatus for producing warm ultrapure water according to claim 3, further comprising a heat exchanger (C) for exchanging heat between the return warm ultrapure water flowing from the use point to the warm ultrapure water storage tank and the concentrated water from the UF membrane device.

5. a heat exchanger (D) is provided between the ultrapure water production apparatus and the heat exchanger (A); 5. The apparatus for producing warm ultrapure water according to claim 4, wherein the concentrated water having passed through said heat exchanger (C) is returned to the upstream side of said ultrapure water producing apparatus through said heat exchanger (D).

6. a final heat exchanger circulation flow path for circulating a medium water as a heat source medium in a heat source fluid flow path of the final heat exchanger; a final heat exchanger heat pump that heats the medium water flowing through the final heat exchanger circulation flow path; Equipped with 2. The apparatus for producing warm ultrapure water according to claim 1, wherein the heat source water for said heat pump for the final heat exchanger is return water of circulating water from a refrigerator.

7. A heat exchanger (A) for heating ultrapure water from an ultrapure water production apparatus; a heat exchanger (B) for heating the ultrapure water heated by the heat exchanger (A); a final heat exchanger for heating the ultrapure water heated by the heat exchanger (B) to a required temperature at a point of use; a hot ultrapure water supply line for supplying the hot ultrapure water heated by the final heat exchanger to a use point; a circulation flow path for circulating a water medium as a heat source medium through a heat source fluid flow path of the heat exchanger (A); and a heat pump for heating the water medium flowing through the circulation flow path. a return path for circulating unused return warm ultrapure water that has not been used at the use point as a heat source medium for the heat exchanger (B) and then returning it to a subtank of the ultrapure water production apparatus or to an upstream thereof; having The hot ultrapure water production apparatus uses return water from the circulating chiller as the heat source water for the heat pump.

8. 8. The apparatus for producing warm ultrapure water according to claim 7, wherein a UF membrane device is provided in a warm ultrapure water supply line for supplying the warm ultrapure water heated in said final heat exchanger to a use point.

9. 9. The apparatus for producing warm ultrapure water according to claim 8, wherein a mixture of the return warm ultrapure water and concentrated water from the UF membrane device is circulated as a heat source medium for the heat exchanger (B).

10. a heat exchanger (D) is provided between the ultrapure water production apparatus and the heat exchanger (A); 10. The apparatus for producing warm ultrapure water according to claim 9, wherein the mixed water having passed through the heat exchanger (B) is returned to the upstream side of the ultrapure water producing apparatus through the heat exchanger (D).

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