Dust collector

Abstract

To provide a technology which inhibits a filter from getting wet with a liquid and washes powder dust with the liquid.SOLUTION: A dust collector includes an intake port, an exhaust port, a filter, a drain part, and a nozzle. The intake port suctions powder dust with a gas. The exhaust port exhausts the gas separated from the powder dust. The filter is provided between the intake port and the exhaust port. The drain part includes an inclined surface disposed below the filter and a drain port provided at a lower end of the inclined surface. The nozzle is provided below the filter and discharges a liquid to the inclined surface.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a dust collector, a processing system including the dust collector, and a dust collection method. [Background technology]

[0002] The wet dust collector described in Patent Document 1 includes a casing, a filter, and a nozzle. The casing includes a sealed air passage. The filter includes a vertically oriented cylindrical body provided in the air passage of the casing. The nozzle sprays mist water onto the filter. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2008-119583 A Summary of the Invention [Problem to be solved by the invention]

[0004] One aspect of the present disclosure provides a technology that prevents a filter from becoming wet with liquid and washes away dust with the liquid. [Means for solving the problem]

[0005] A dust collector according to one aspect of the present disclosure includes an intake port, an exhaust port, a filter, a drainage portion, a nozzle, A liquid level sensor, a fan, and a fan control unit. The air intake port draws in dust together with gas. The exhaust port discharges the gas separated from the dust. The filter is provided between the air intake port and the exhaust port. The liquid drainage section includes an inclined surface disposed below the filter, and a liquid drainage port provided at a lower end of the inclined surface. The nozzle is provided below the filter, and ejects liquid toward the inclined surface. The liquid level sensor is provided above the inclined surface and detects the height of the liquid level. The fan is provided between the filter and the exhaust port. The fan control unit controls the fan. When the liquid level sensor detects that the height of the liquid level has reached a set value, the fan control unit controls to stop the fan. Effect of the Invention

[0006] According to one aspect of the present disclosure, it is possible to prevent the filter from becoming wet with liquid and to wash away dust with the liquid. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a front view of a processing system including a dust collector according to one embodiment. [Diagram 2] FIG. 2 is a top view showing an example of the processing apparatus. [Diagram 3] 3A is a cross-sectional view taken along line AA in FIG. 2, and FIG. 3B is a cross-sectional view taken along line BB in FIG. [Figure 4] FIG. 4 is a front view showing a part of the dust collector according to one embodiment. [Diagram 5] FIG. 5 is a perspective view showing an example of the nozzle, the rotation mechanism, the liquid level sensor, the rotation sensor, and the support member. [Figure 6] FIG. 6 is a top view illustrating an example of a rotation mechanism. [Figure 7] FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. [Figure 8] FIG. 8 is a top view showing another example of a nozzle. [Figure 9] FIG. 9 is a side view showing an example of a support member cover. [Figure 10] FIG. 10 is a functional block diagram illustrating an example of components of the control unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. In each drawing, the same or corresponding configurations are given the same reference numerals, and the description may be omitted. In this specification, the X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other. The X-axis direction and the Y-axis direction are horizontal directions, and the Z-axis direction is vertical.

[0009] A processing system 1 will be described with reference to Fig. 1. The processing system 1 includes a dust collector 2, a processing device 3, and a pipe 4. The dust collector 2 sucks in dust together with gas, and discharges the gas separated from the dust. The processing device 3 is a source of dust. The pipe 4 connects an exhaust port 31 of the processing device 3 to an intake port 21 of the dust collector 2. The number of intake ports 21 may be one or more. The dust collector 2 may suck in dust together with gas from multiple processing devices 3.

[0010] The processing device 3 is a processing device that processes an object. Processing of the object generates dust. The object is not particularly limited, but is, for example, a substrate W. The substrate W has, for example, a first substrate W1, a device layer L1, a first oxide layer L2, a second oxide layer L3, and a second substrate W2 in this order, as shown in FIG. 3(A).

[0011] The first substrate W1 is, for example, a semiconductor substrate or a glass substrate. The semiconductor substrate is, for example, a silicon wafer or a compound semiconductor wafer. The device layer L1 includes, for example, an electronic circuit. The device layer L1 is formed on the surface of the first substrate W1. The first oxide layer L2 is, for example, a silicon oxide layer. The silicon oxide layer is, for example, made of tetraethyl orthosilicate (TEOS). The first oxide layer L2 is formed on the surface of the device layer L1.

[0012] The second substrate W2 is, for example, a semiconductor substrate or a glass substrate. The second oxide layer L3 is, for example, a silicon oxide layer. The second oxide layer L3 is formed on the surface of the second substrate W2. The substrate W may have a device layer (not shown) between the second substrate W2 and the second oxide layer L3. The first substrate W1 and the second substrate W2 are bonded by bringing the second oxide layer L3 and the first oxide layer L2 into contact with each other so as to face each other.

[0013] After the first substrate W1 and the second substrate W2 are bonded together, a modified layer M may be formed inside the first substrate W1 by irradiating the first substrate W1 with a laser beam from the side opposite to the device layer L1. A plurality of modified layers M may be formed at intervals in the thickness direction, circumferential direction, and radial direction of the first substrate W1. Cracks connecting adjacent modified layers M may occur during the formation of the modified layers M.

[0014] The modified layer M is formed, for example, on the first planned dividing line D1 and the second planned dividing line D2 shown in FIG. 2. The first planned dividing line D1 is set concentrically with the periphery of the first substrate W1. The second planned dividing line D2 is set radially outward from the first planned dividing line D1. The first substrate W1 is divided starting from the modified layer M formed on the first planned dividing line D1 and the second planned dividing line D2. This allows the periphery of the first substrate W1 to be divided and removed into a plurality of arc-shaped segments. The number of the second planned dividing lines D2 may be more than one.

[0015] The processing device 3 shown in Fig. 1 is a device that removes the peripheral portion of the first substrate W1. The peripheral portion includes a bevel. The processing device 3 may be any of a device that removes the peripheral portion of the first substrate W1, a device that forms a modified layer M inside the first substrate W1, a device that removes residues remaining after removing the peripheral portion of the first substrate W1, and a device that removes the peripheral portion of the first oxide layer L2 before removing the peripheral portion of the first substrate W1. Dust is generated when processing the first substrate W1.

[0016] The processing device 3 includes, for example, a chuck 32, a processing tool 33, a cup 34, a discharge pipe 35, and a tank 36. The chuck 32 holds the substrate W horizontally. The processing tool 33 is pressed against the peripheral edge of the substrate W. The cup 34 collects processing waste that falls from the substrate W. The cup 34 includes a discharge port 34a at its lower end. The discharge pipe 35 connects the discharge port 34a of the cup 34 to the inlet of the tank 36.

[0017] The processing tool 33 includes a blade or a roller. As shown in FIG. 3B, the processing tool 33 is inserted between the first substrate W1 and the second substrate W2. The insertion of the processing tool 33 advances a crack starting from the modified layer M, and divides the first substrate W1 at the first division line D1 and the second division line D2. As a result, the peripheral portion of the first substrate W1 is divided into a plurality of arc-shaped pieces and removed. The pieces pass through the inside of the discharge pipe 35 and fall into the tank 36.

[0018] As shown in Fig. 1, the discharge pipe 35 has an exhaust port 31 in the middle thereof. The exhaust port 31 is connected to the intake port 21 of the dust collector 2 via the piping 4. The treatment device 3 may include a primary filter 37 and a secondary filter 38 inside the discharge pipe 35. The primary filter 37 includes, for example, a vertical cylindrical body inside the discharge pipe 35. The secondary filter 38 is disposed between the primary filter 37 and the exhaust port 31, and captures dust particles having a smaller particle size than the primary filter 37. The secondary filter 38 includes, for example, a plate-shaped body that blocks the exhaust port 31.

[0019] The processing device 3 may include only one of the primary filter 37 and the secondary filter 38. By including a filter in the processing device 3, it is possible to prevent debris with a large particle size from flowing out from the processing device 3 to the dust collector 2. The primary filter 37 and the secondary filter 38 are, for example, metal meshes (metal filters).

[0020] The timing for cleaning the primary filter 37 and the secondary filter 38 may be set based on the differential pressure occurring upstream of the primary filter 37 and downstream of the secondary filter 38. When the differential pressure exceeds a set value, clogging occurs, and cleaning is performed. The primary filter 37 and the secondary filter 38 may be cleaned periodically.

[0021] The dust collector 2 may include a manifold 22 including a plurality of intake ports 21. The manifold 22 combines a plurality of gas flows sucked by the plurality of intake ports 21 into one. The manifold 22 is disposed beside a first housing 23 described below, and sends gas from the side surface of the first housing 23 to the inside of the first housing 23. Dust is also sent to the inside of the first housing 23 together with the gas.

[0022] The dust collector 2 includes a filter 24 and a first housing 23 that houses the filter 24. The filter 24 is provided between the intake port 21 and the exhaust port 25, and separates gas from dust. The filter 24 is, for example, suspended from the ceiling of the first housing 23. The filter 24 may have a vertically standing cylindrical body and a lower end that closes the lower end of the cylindrical body. A plurality of filters 24 (for example, four filters) may be provided inside the first housing 23. The first housing 23 may have a transparent window 23a on the side opposite to the manifold 22. The state inside the first housing 23, for example, the state of the filter 24, can be visually observed through the transparent window 23a.

[0023] The dust collector 2 includes a fan 26 between the filter 24 and the exhaust port 25. For example, the fan 26 is provided above the first housing 23, and the exhaust port 25 is provided above the fan 26. The dust collector 2 may include a rotation mechanism (not shown) that rotates the fan 26. The rotation mechanism includes a motor and the like. By rotating the fan 26, the dust collector 2 sucks dust together with gas from the processing device 3 through the piping 4.

[0024] A damper 41 for adjusting the flow rate of gas flowing through the pipe 4 may be provided midway through the pipe 4. By controlling the dampers 41 in accordance with the operating conditions of the multiple treatment devices 3, the balance of the flow rates of gas flowing through the multiple pipes 4 can be controlled.

[0025] The gas and dust flow into the inside of first housing 23. A filter 24 is provided inside first housing 23, and filter 24 separates the gas and dust. Fan 26 sends the gas that has passed through filter 24 to exhaust port 25. Exhaust port 25 exhausts the gas separated from the dust. The rotation speed of fan 26 may be controlled so that the flow rate (exhaust amount) of the gas exhausted by exhaust port 25 becomes a set value.

[0026] The dust collector 2 may include a reverse injection mechanism 27 that reverse-injects gas from the filter 24. The reverse injection mechanism 27 has a tank 27a that stores gas (e.g., compressed air) at a pressure higher than atmospheric pressure. The number of tanks 27a may be multiple. The reverse injection mechanism 27 periodically reverse-injects gas from the filter 24, thereby preventing the filter 24 from becoming clogged. The filter 24 may be replaced periodically. The timing of replacing the filter 24 may be determined by the differential pressure between both sides of the filter 24.

[0027] The dust collector 2 includes a drainage section 28. The drainage section 28 includes an inclined surface 28a disposed below the filter 24, and a drainage port 28b provided at the lower end of the inclined surface 28a. The drainage section 28 includes, for example, a hopper. The inclined surface 28a is, for example, a conical surface that is inclined downward toward the center. The inclined surface 28a may be a pyramidal surface. The inclined surface 28a may be a single flat surface, and an inclined groove may be provided along the lower edge of the inclined surface 28a, and the drainage port 28b may be provided at the lower end of the inclined groove.

[0028] The dust collector 2 includes a nozzle 29. The nozzle 29 is provided below the filter 24 and discharges liquid toward the inclined surface 28a. The discharged liquid is, for example, water. The discharged liquid washes away dust accumulated on the inclined surface 28a without wetting the filter 24. Therefore, dust can be collected using a dry filter that is smaller and less expensive than a wet filter. In addition, since a dry filter is used, the structure of the dust collector 2 is simplified and maintenance is easier than when a wet filter is used. Furthermore, since the dust accumulated on the inclined surface 28a is washed away, the frequency of cleaning the inclined surface 28a can be reduced.

[0029] The dust collector 2 includes a tank 51 that stores the liquid sent from the drainage unit 28, and a pipe 52 that connects the drainage unit 28 and the tank 51. The dust collector 2 may also include a second housing 53 that houses the tank 51 and the pipe 52. The second housing 53 is provided below the first housing 23. The first housing 23 is placed on the second housing 53. The second housing 53 may have a transparent window 53a on a side surface facing the tank 51. The inside of the tank 51 can be viewed from the outside through the transparent window 53a, and the state of the inside of the tank 51 can be viewed. The tank 51 may also have a transparent window (not shown) on a side surface facing the transparent window 53a.

[0030] The tank 51 includes an inlet 51a connected to the drain port 28b via a pipe 52, and an outlet 51b disposed above the inlet 51a. A pipe 54 is connected to the outlet 51b of the tank 51. The pipe 54 discharges the liquid accumulated in the tank 51 to the outside of the dust collector 2. The liquid is usually sent from the drain port 28 to the tank 51 via the pipe 52, and is discharged from the tank 51 to the outside of the dust collector 2 via the pipe 54.

[0031] Incidentally, when fan 26 sucks in the gas inside first housing 23, the pressure inside first housing 23 may become lower than atmospheric pressure. As a result, the liquid inside tank 51 may flow back from inlet 51a of tank 51 to drain outlet 28b of drain section 28 due to the pressure difference.

[0032] 4, the outlet 51b of the tank 51 is disposed above the inlet 51a of the tank 51. This allows the liquid L to be stored in the tank 51. When the liquid L flows back, it is possible to prevent air bubbles from mixing with the liquid L until the liquid level in the tank 51 reaches the inlet 51a. This makes it possible to prevent bubbling of the backflowing liquid L and to prevent the backflowing liquid L from scattering inside the first housing 23. This makes it possible to prevent the filter 24 from getting wet.

[0033] Furthermore, when outlet 51b of tank 51 is disposed higher than inlet 51a of tank 51, dust can be allowed to settle in tank 51, and the supernatant above the settle can be discharged from pipe 54 to the outside of dust collector 2. This can prevent large particles from flowing out of dust collector 2. Sediment accumulated in tank 51 may be periodically removed. The time to remove the sediment may be determined based on the detection result of liquid level sensor 83, which will be described later.

[0034] As shown in Figs. 5 to 7, the dust collector 2 may include a rotation mechanism 55 that rotates the nozzle 29. The nozzle 29 discharges liquid while rotating about a rotation center line R1. This allows the liquid to be supplied to the entire circumferential direction of the rotation center line R1. In addition, the amount of water used can be reduced. The rotation center line R1 of the nozzle 29 may be disposed vertically, for example, or may be disposed so as to pass through the liquid drainage port 28b.

[0035] When the intake port 21 sucks in the dust, the nozzle 29 ejects the liquid, and the rotation mechanism 55 rotates the nozzle 29, so that the liquid is supplied to the entire inclined surface 28a. The dust can be efficiently discharged to the outside of the first housing 23. It is preferable that the nozzle 29 supplies the liquid to the upper end of the inclined surface 28a so as to supply the liquid to the entire inclined surface 28a. The nozzle 29 ejects the liquid toward the inclined surface 28a below the filter 24, so that the filter 24 is not wetted. The nozzle 29 is preferably a rotating nozzle, but may be a fixed nozzle capable of supplying the liquid to the entire inclined surface.

[0036] 6, when viewed from a direction parallel to the rotation center line R1 of the nozzle 29 (for example, the vertical direction), the ray R2 of the nozzle 29 is arranged parallel to and offset from a line R3 perpendicular to the rotation center line R1. The ray R2 of the nozzle 29 is an extension line of the discharge port 29a of the nozzle 29. The flow path of the nozzle 29 extends linearly from one end to the other end, but may be bent midway as shown in FIG.

[0037] As described above, the ray R2 of the nozzle 29 is arranged parallel to and offset from the perpendicular line R3 of the rotation center line R1. When the nozzle 29 ejects liquid, a reaction force is generated in the opposite direction to the ejection direction. The reaction force generates a torque, which rotates the nozzle 29. Since a motor for rotating the nozzle 29 is not required, the rotation mechanism 55 can be made compact.

[0038] Nozzle 29 includes outlet 29a for discharging liquid so as to form a bundle-like flow from nozzle 29 to inclined surface 28a. By discharging the bundle-like liquid, nozzle 29 can prevent the liquid from scattering compared to discharging the liquid in a mist. This can prevent filter 24 from getting wet, and can prevent the performance of the filter from deteriorating.

[0039] As shown in Fig. 4, the nozzle 29 ejects the liquid toward the upper end of the inclined surface 28a. In order to make the nozzle 29 small so as not to wet the filter 24, the nozzle 29 may be disposed below the upper end of the inclined surface 28a, or the liquid may be ejected obliquely upward. The liquid flows down from the upper end to the lower end of the inclined surface 28a due to gravity. Therefore, dust accumulated on the inclined surface 28a can be washed away from the upper end to the lower end of the inclined surface 28a.

[0040] 7, the rotation mechanism 55 has a rotating unit 60 including the nozzle 29, and a fixed unit 70 that rotatably supports the rotating unit 60. The fixed unit 70 includes, for example, a fixed block 71 and a fixed shaft 72 that is disposed on a rotation center line R1 of the rotating unit 60. The fixed shaft 72 protrudes vertically downward from the center of the lower surface of the fixed block 71. The fixed unit 70 may include a stopper 73 at the lower end of the fixed shaft 72 that prevents the rotating unit 60 from being detached.

[0041] The rotating unit 60 includes a rotating block 61 that holds the nozzle 29. The nozzle 29 is replaceably attached to the rotating block 61. If nozzles 29 with different shapes or dimensions of the discharge port 29a are prepared in advance, the discharge angle or discharge amount of the liquid can be changed. The rotating block 61 includes a container 63 that stores the liquid. The container 63 has a reservoir 63a that stores the liquid therein and a flow path 63b that supplies the liquid from the reservoir 63a to the nozzle 29.

[0042] 6, the rotating part 60 may have a counterweight 65 on the opposite side of the nozzle 29 with respect to the rotation center line R1 of the nozzle 29. Compared to a case where there is no counterweight 65, the center of gravity of the rotating part 60 can be brought closer to the rotation center line R1. As a result, friction between the rotating block 61 and the fixed shaft 72 can be reduced, and the rotating part 60 can rotate smoothly.

[0043] The counterweight 65 has the same weight as the nozzle 29. For example, the weight of the counterweight 65 is 90% to 110% of the weight of the nozzle 29. The counterweight 65 may be formed of a material having a higher density than the nozzle 29. For example, the nozzle 29 is made of a resin, and the counterweight 65 is made of a metal. The counterweight 65 can be made smaller in size.

[0044] 7, the rotation mechanism 55 has a first flow path 57 that supplies liquid from the fixed part 70 to the nozzle 29 of the rotation part 60. The fixed part 70 includes a connection port 75 on an upper surface of a fixed block 71. The connection port 75 is connected to a liquid supply source via a pipe. The first flow path 57 is formed through the connection port 75, the fixed block 71, the fixed shaft 72, the rotation block 61, and the nozzle 29.

[0045] The rotation mechanism 55 may have a second flow path 58 branching off from the first flow path 57 to allow the liquid to leak out from between the fixed shaft 72 and the rotation block 61. The liquid flows inside the fixed shaft 72 in the axial direction of the fixed shaft 72, then flows radially outward from the fixed shaft 72, and leaks out between the fixed shaft 72 and the rotation block 61.

[0046] The second flow passage 58 includes, for example, a cylindrical portion 58a centered on the rotation center line R1. The cylindrical portion 58a is formed around the fixed shaft 72, and forms a cylindrical liquid film around the fixed shaft 72. This liquid film can suppress contact between the fixed shaft 72 and the rotating block 61, and can reduce friction loss therebetween.

[0047] 5, the dust collector 2 may include a rotation sensor 81 that detects the rotation of the nozzle 29. If the rotation of the nozzle 29 stops when the nozzle 29 is discharging liquid, the discharging direction of the liquid becomes fixed. If the rotation sensor 81 detects that the nozzle 29 has stopped rotating, it is possible to prompt the user to perform maintenance on the rotation mechanism 55. The rotation sensor 81 may not only detect the presence or absence of rotation, but also detect the number of rotations.

[0048] The rotation sensor 81 may detect the rotation of the counterweight 65. The counterweight 65 rotates together with the nozzle 29. Therefore, by detecting the rotation of the counterweight 65, the rotation of the nozzle 29 can be detected. The rotation sensor 81 includes, for example, a proximity sensor. The proximity sensor detects the presence or absence of the counterweight 65, for example, at one point on the rotation orbit of the counterweight 65.

[0049] The rotation sensor 81 may be attached to a bracket 82. The bracket 82 has, for example, an inverted L-shaped cross section and includes a horizontal plate 82a and a vertical plate 82b. The horizontal plate 82a is fixed to the upper surface of the fixed block 71 with bolts or the like. The vertical plate 82b holds the rotation sensor 81 radially outward of the fixed block 71. The rotation sensor 81 is disposed, for example, directly above a point on the rotation trajectory of the counterweight 65.

[0050] As shown in Fig. 4, the dust collector 2 may include a liquid level sensor 83 above the inclined surface 28a. The liquid level sensor 83 detects the height of the liquid level of the liquid L. When the liquid L flows back due to a difference in air pressure or when the drain port 28b is clogged with machining debris, the height of the liquid level rises. By detecting that the height of the liquid level has reached a set value, the backflow of the liquid L or the clogging of the drain port 28b can be detected.

[0051] The liquid level sensor 83 has, for example, a float 83a, a guide 83b, and a displacement meter 83c. The float 83a rises and falls along the guide 83b according to the height of the liquid level. The displacement meter 83c measures the displacement of the float 83a. The liquid level sensor 83 may be disposed above the nozzle 29 so as not to interfere with the discharge of water from the nozzle 29. Note that the liquid level sensor 83 is not limited to the float type. The liquid level sensor 83 may be fixed at a specific height and detect the presence or absence of the liquid L.

[0052] As shown in Fig. 5, the dust collector 2 includes a support member 84 that supports the nozzle 29. The support member 84 has a space S for accommodating wiring or piping above the inclined surface 28a and below the filter 24. The wiring or piping can be protected. The wiring transmits power or signals. The piping transmits liquid. The support member 84 has, for example, an inverted U-shaped cross section, and includes a horizontal plate 84a and a pair of vertical plates 84b.

[0053] For example, a pair of pillars 85 are provided on the lower surface of the horizontal plate 84a. The fixed block 71 of the rotation mechanism 55 is fixed to the lower ends of the pair of pillars 85. The fixed block 71 is suspended from the horizontal plate 84a via the pair of pillars 85. The number of pillars 85 may be one, or three or more.

[0054] A pair of legs 86 are provided on the upper surface of the horizontal plate 84a. A horizontal mounting plate 87 is provided on the upper ends of the pair of legs 86. A displacement meter 83c of the liquid level sensor 83 is attached to the upper surface of the mounting plate 87. The guide 83b extends vertically downward from the displacement meter 83c and passes through a through-hole 84c that vertically penetrates the horizontal plate 84a.

[0055] A cylindrical cover 88 is provided in the through hole 84c of the horizontal plate 84a. The cylindrical cover 88 extends downward from the horizontal plate 84a and surrounds the float 83a. The float 83a rises and falls along a guide 83b inside the cylindrical cover 88. The cylindrical cover 88 prevents dust from getting caught between the float 83a and the guide 83b.

[0056] The dust collector 2 includes a support member cover 89 below the filter 24, which covers the support member 84 from above, as shown in FIG. 9. The support member cover 89 prevents dust falling from above from adhering to the support member 84, the rotation sensor 81, the liquid level sensor 83, and the nozzle 29. The support member cover 89 has an inclined surface 89a that slides the dust falling from above diagonally downward. A pair of inclined surfaces 89a is provided, and each pair of inclined surfaces 89a is tapered upward. After sliding down the inclined surface 89a, the dust falls onto the inclined surface 28a of the drainage section 28. The support member cover 89 has a vertical surface 89b that extends downward from the lower end of each inclined surface 89a.

[0057] 1, the dust collector 2 includes a control unit 90. The control unit 90 is, for example, a computer, and includes a CPU (Central Processing Unit) 91 and a storage medium 92 such as a memory. The control unit 90 performs various controls by causing the CPU 91 to execute a program stored in the storage medium 92.

[0058] 10, the control unit 90 has, for example, a fan control unit 93, a liquid discharge control unit 94, a display control unit 95, a reverse injection control unit 96, and a damper control unit 97. Note that each functional block shown in FIG. 10 is conceptual, and does not necessarily have to be physically configured as shown in the figure.

[0059] It is possible to configure all or part of each functional block shown in Fig. 10 by distributing or integrating it functionally or physically in any unit. All or any part of each processing function performed by each functional block can be realized by a program executed by a CPU, or can be realized as hardware using wired logic.

[0060] The fan control unit 93 controls the rotation speed of the fan 26. The exhaust volume sensor 101 detects the flow rate (exhaust volume) of gas exhausted through the exhaust port 25, and transmits a signal indicating the detected value to the control unit 90. The fan control unit 93 controls the rotation speed of the fan 26 so that the detected value of the exhaust volume sensor 101 becomes a set value.

[0061] When the liquid level sensor 83 detects that the liquid level has reached a set value, the fan control unit 93 may perform control to stop the rotation of the fan 26. By stopping the rotation of the fan 26, the fan 26 will no longer suck in the gas inside the first housing 23. As a result, the air pressure difference between the inside of the first housing 23 and the inside of the tank 51 can be reduced, and the backflow of the liquid due to the air pressure difference can be suppressed.

[0062] The fan control unit 93 may perform control to stop the rotation of the fan 26 when the door open / close sensor 103 detects that the door 102 is open. The door 102 opens and closes an opening of the first housing 23. The opening is provided on a side surface of the first housing 23.

[0063] The liquid discharge control unit 94 controls the liquid supply mechanism 105 to control the discharge of liquid from the nozzle 29. The liquid supply mechanism 105 supplies liquid to the nozzle 29. Although not shown, the liquid supply mechanism 105 includes, for example, a flow meter, a flow controller, and an on-off valve. When the on-off valve opens the liquid flow path, the nozzle 29 discharges liquid. The discharge amount is detected by the flow meter, and the flow controller controls the flow rate of the liquid so that the detected value becomes a set value. When the on-off valve closes the liquid flow path, the nozzle 29 stops discharging the liquid.

[0064] When the liquid level sensor 83 detects that the height of the liquid level has reached a set value, the liquid discharge control unit 94 may perform control to stop the discharge of liquid from the nozzle 29. By stopping the discharge of liquid from the nozzle 29, it is possible to prevent the liquid from overflowing from the drainage unit 28.

[0065] When the door open / close sensor 103 detects that the door 102 is open, the liquid discharge control unit 94 may perform control to stop the discharge of liquid from the nozzle 29. If the nozzle 29 discharges liquid while the opening of the door 102 is open, there is a risk that the liquid will splash from the inside of the first housing 23 to the outside.

[0066] However, when the user operates the liquid discharge button 104, the nozzle 29 may discharge liquid even when the opening of the door 102 is open. The liquid discharge button 104 may be a switch that opens and closes two contacts, or may be a switch displayed on a screen. For example, the nozzle 29 discharges liquid while the liquid discharge button 104 is being operated. Alternatively, the nozzle 29 discharges liquid for a certain period of time after the liquid discharge button 104 is operated.

[0067] When the door open / close sensor 103 detects that the door 102 is open, the liquid discharge control unit 94 performs control to stop the discharge of liquid from the nozzle 29 until the liquid discharge button 104 is operated, and performs control to discharge liquid from the nozzle 29 when the liquid discharge button 104 is operated. This makes it possible to adjust the direction of the nozzle 29 while discharging liquid from the nozzle 29 with the opening of the door 102 open.

[0068] The display control unit 95 controls the display device 106. For example, the display control unit 95 performs control to display the number of rotations of the nozzle 29 detected by the rotation sensor 81 on the display device 106. The display device 106 may display whether or not the nozzle 29 is rotating, instead of the number of rotations of the nozzle 29. In either case, it is possible to notify the user of whether or not the nozzle 29 is rotating.

[0069] The reverse jetting control unit 96 controls the reverse jetting mechanism 27. The reverse jetting mechanism 27 periodically reverse jets gas from the filters 24, thereby preventing clogging of the filters 24. The reverse jetting control unit 96 may perform control such that while reverse jetting gas from some of the filters 24, reverse jetting gas from the remaining filters 24 is prohibited.

[0070] The damper control unit 97 controls the damper 41. The damper control unit 97 controls the dampers 41 in accordance with the operating conditions of the processing devices 3, thereby controlling the balance of the flow rates of the gas flowing through the pipes 4.

[0071] The dust collector, the processing system including the dust collector, and the dust collection method according to the present disclosure have been described above, but the present disclosure is not limited to the above embodiments. For example, the technology of the present disclosure may be applied to a dry polishing device. Various changes, modifications, substitutions, additions, deletions, and combinations are possible within the scope of the claims. Naturally, these also fall within the technical scope of the present disclosure. [Explanation of symbols]

[0072] 2 Dust collector 21 Air Intake 24 Filters 25 Exhaust port 28 Drain 28a Slope 28b Drainage port 29 Nozzle

Claims

1. An intake port that sucks in dust along with the gas; an exhaust port for discharging the gas separated from the dust; a filter provided between the intake port and the exhaust port; A drainage section including an inclined surface disposed below the filter and a drainage port provided at a lower end of the inclined surface; a nozzle provided below the filter and configured to eject a liquid toward the inclined surface; a liquid level sensor provided above the inclined surface and configured to detect the height of the liquid level; a fan provided between the filter and the exhaust port; A fan control unit that controls the fan; Equipped with The fan control unit performs control to stop the fan when the liquid level sensor detects that the liquid level has reached a set value.

2. An intake port that sucks in dust along with the gas; an exhaust port for discharging the gas separated from the dust; a filter provided between the intake port and the exhaust port; A drainage section including an inclined surface disposed below the filter and a drainage port provided at a lower end of the inclined surface; a nozzle provided below the filter and configured to eject a liquid toward the inclined surface; A support member for supporting the nozzle; Equipped with The support member has a space above the inclined surface and below the filter for accommodating wiring or piping.

3. An intake port that sucks in dust along with the gas; an exhaust port for discharging the gas separated from the dust; a filter provided between the intake port and the exhaust port; A drainage section including an inclined surface disposed below the filter and a drainage port provided at a lower end of the inclined surface; a nozzle provided below the filter and configured to eject a liquid toward the inclined surface; a tank for storing the liquid sent from the drainage section; A pipe connecting the drainage portion and the tank; Equipped with The tank includes an inlet connected to the drainage port via the piping, and an outlet disposed above the inlet.

4. An intake port that sucks in dust along with the gas; an exhaust port for discharging the gas separated from the dust; a filter disposed between the intake port and the exhaust port; A drainage section including an inclined surface disposed below the filter and a drainage port provided at a lower end of the inclined surface; a nozzle provided below the filter and configured to eject a liquid toward the inclined surface; A housing that houses the filter; a door for opening and closing the opening of the housing; a door opening / closing sensor that detects whether the door is opened or closed; a liquid discharge control unit for controlling the discharge of the liquid from the nozzle; Equipped with The liquid discharge control unit performs control to stop the discharge of the liquid from the nozzle when the door open / close sensor detects that the door is open.

5. a liquid discharge button for discharging the liquid from the nozzle; 5. The dust collector according to claim 4, wherein when the door opening / closing sensor detects that the door is open, the liquid discharge control unit performs control to stop the discharge of the liquid from the nozzle until the liquid discharge button is operated, and performs control to discharge the liquid from the nozzle when the liquid discharge button is operated.

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