Method and apparatus for fabricating micro- and / or nanostructures - Patents.com

Abstract

Methods and apparatus for fabricating microstructures and / or nanostructures.

Description

[Technical field]

[0001] The present invention relates to a method and apparatus for fabricating micro- and / or nanostructures.

[0002] In the prior art, micro- and / or nanostructures are produced by photolithographic techniques and / or using imprint lithography. In recent years, imprint lithography in particular has been demonstrated. With imprint lithography, it is possible to emboss micrometer- and / or nanometer-sized structures into a material by means of a stamp. The material is an embossing mass that is deposited on a substrate.

[0003] This type of imprinting has become increasingly important in recent years because it can be performed faster, more efficiently and at lower cost than many photolithographic techniques.

[0004] After deposition of the embossing mass, an alignment of the structure stamp relative to the substrate is performed. The structure stamp and the substrate are then brought close to each other. The structure of the structure stamp is imprinted in the embossing mass. Before releasing the structure stamp from the embossing mass, the embossing mass is solidified. The solidification is performed by heat and / or by electromagnetic radiation.

[0005] Besides modified or extended mask aligners, there are also specific imprint equipments built to suit and for special embodiments. These equipments are usually highly sophisticated alignment equipments, which can align the stamp to the substrate with even greater precision. Furthermore, these equipments have the possibility to create a vacuum, have special dispensing systems, etc.

[0006] The embossing technique works with hard or soft stamps. Under the embossing lithography technique, the use of so-called soft stamps is more and more preferred. The reasons for this are the easy manufacture of the stamps, the efficient embossing process, the very good surface properties of the respective stamp material, the low production costs, the reproducibility of the embossed products and, above all, the possibility of elastic deformation of the stamp during embossing and demolding. In soft lithography, stamps made of polymers, in particular elastomers, with micro- or nanostructured surfaces are used, which allow the production of structures ranging from a few nm to less than 1000 μm.

[0007] The elastomeric stamp is produced as a negative of the master. The master stamp is a hard stamp made of metal, plastic and / or ceramic, which is produced once only by a correspondingly laborious or costly process. From this master any number of elastomeric stamps can then be produced. The elastic modulus of quartz is about 100 GPa. In comparison, the elastic modulus of polymers (hard and soft polymers) is up to several orders of magnitude smaller, and therefore polymers are called "soft" compared to quartz (soft lithography). The elastomeric stamp allows conformal and uniform contact over a large surface. The elastomeric stamp can be separated from its master stamp and from the embossed product relatively easily. To ensure good separation of the stamp and the substrate, the stamp surface has a surface energy as low as possible. For example, an anti-adhesive coating is often necessary or advantageous.

[0008] To carry out soft lithography processes, the elastomeric stamp can be supported by a carrier. Currently, for example, glass carrier substrates with various thicknesses are used. The use of thick glass substrates causes the elastomeric stamp to at least partially lose its flexibility. On the other hand, the flexibility of the stamp can be controlled by the choice of carrier. The use of a stiff carrier generally makes it difficult to separate the stamp from the substrate after the embossing process.

[0009] Similarly, thin substrates according to the prior art require a carrier substrate for better handling.Known soft lithography methods include, for example, microcontact printing and / or nanocontact printing (μ / nCP) and nanoimprint lithography (NIL).

[0010] In the case of nanoimprint lithography, the hardening of the embossing mass can be carried out by heat or by UV radiation. In both cases, a structure stamp is pressed into the embossing mass. The structure stamp and the substrate are then compressed under pressure so that a high-resolution surface structuring can be carried out. In the case of UV-NIL, a lower pressing pressure is used compared to thermal NIL, and the process can be carried out at room temperature. The most important parameters in the NIL method are the temperature (especially in the case of thermal NIL), the pressing pressure and the interfacial adhesion between the embossing mass and the structure stamp.

[0011] Soft stamps, and also less soft stamps, especially elastomeric stamps, can be deformed by the applied pressure during the nanoimprinting process. This deformation is pressure dependent. It can be expected that this will have a stronger effect for smaller structures and will be more pronounced for softer stamp materials. The deformation or distortion of the micro- and nanostructures caused by compression will be replicated in the hardened embossing mass of the embossed substrate, thus reducing the quality and reproducibility of the embossing process.

[0012] If the structure stamp and / or the substrate are too hard, external pressure, in particular compression, is necessary to achieve conformal or gap-free contact between the structure stamp with the stamp structure and the substrate with the embossed mass. In the prior art, actuator devices are used, which have a number of actuators, which can be controlled to move separately or in a closed loop, and which are used to transfer the stamp structure to the structure stamp and / or the substrate and which apply a resultant force perpendicular to the substrate receiving surface.

[0013] Precisely in the case of larger surfaces, it is difficult to distribute the pressure evenly over the entire contact surface and compensate for irregularities, which can result in non-uniform structuring during embossing.

[0014] Possible unevenness of the stamp surface also affects the quality of the embossing process. Furthermore, gas entrapment during pressure embossing and associated embossing defects are known in the prior art.

[0015] Possible embossing defects during NIL are eg cracks, non-uniformly filled stamp structures (hence eg air inclusions) and non-uniform varnish layer thickness.

[0016] The less widespread Capillary Force Lithography (CFL) also belongs to the soft lithography method and is based on the use of capillary forces to fill stamp structures without external pressure. CFL is described in detail by its creator HH Lee in Adv. Funct. Mater. (2002) 12: 405-413. In this case, an elastomeric stamp is brought into conformal contact with the substrate. For the filling of the cavities, however, the embossing mass must have a very low viscosity. CFL is therefore carried out at a relatively high temperature and / or often requires a solvent atmosphere with a high proportion of solvent in the embossing mass. Almost exclusively pure PDMS is used as stamp material during CFL, since PDMS is permeable for solvents and gases. During embossing with the PDMS stamp, the cavities are filled under the action of capillary forces and the solvent from the embossing mass can diffuse and dissipate through the PDMS stamp. The established embossing mass for CFLs is the epoxy material SU-8. Issues such as swelling of PDMS during solvent-based processes and strong expansion during thermal-based processes have led to CFLs being performed only on a lab scale and industrial conversion in imprinting equipment is unknown. Furthermore, in CFLs, the embossing mass is often crosslinked by heat.

[0017] US Patent No. 7,442,336 describes, for example, an apparatus and a method for embossing a substrate with an embossing mass, in which the substrate and the stamp are slowly brought closer together until a defined distance is reached, so that the intermediate chamber is filled with the embossing mass by capillary forces, with the external forces being kept as low as possible depending on the properties of the embossing mass, the thickness of the layer to be embossed and the dimensions of the substrate surface.

[0018] In US Pat. No. 8,871,048 a soft elastomeric stamp is used, so that the external pressing forces can be kept as low as possible.

[0019] Capillary Microforming (MIMIC) also uses capillary forces to produce structures with a PDMS stamp. In MIMIC, however, a PDMS stamp with a relief structure is pressed against a substrate. This results in three-dimensional structured cavities between the stamp and the substrate. A monomer solution is deposited in front of the stamp, which then fills the capillaries naturally. After curing, the stamp can be removed from the substrate. A three-dimensional structure of the polymer is left on the substrate.

[0020] A particular problem in the prior art is that the elastic properties of the soft stamps lead to deformations or distortions of the micro- and nanostructures, which deformations and distortions of the micro- and nanostructures caused by compression are replicated in the hardened embossing mass of the embossed substrate, thus reducing the quality and reproducibility of the embossing process.

[0021] Soft stamps can deform due to the applied pressure during the nanoimprint process, and this deformation is particularly pressure dependent. Furthermore, gas entrapment during embossing under pressure and associated embossing defects are known in the prior art.

[0022] If the structure stamp and / or the substrate are too hard, external pressure, i.e., compression, is required to achieve conformal, gap-free contact between the structure stamp and the substrate with the embossing mass, which can result in pressure-dependent deformations that reduce the quality of the embossing process.

[0023] It is therefore the object of the present invention to provide an apparatus and a method as well as a substrate, which at least partially obviates, in particular completely obviates, the disadvantages cited in the prior art.

[0024] The above problem is solved by the features of the independent claims. Advantageous developments of the invention are described in the dependent claims. Any combination of at least two features described in the description, the claims and / or the drawings is also included within the scope of the invention. With regard to the stated numerical ranges, any values ​​included within the stated limit ranges should also be considered as disclosed as limit values ​​and any combinations can be claimed. Features disclosed for the device should also be considered as applying to the method, insofar as they can also be understood as method features, and vice versa.

[0025] In the following, structuring and embossing are understood to mean the production of micro- and / or nanostructures, preferably in particular no pressing is carried out during embossing.

[0026] The present invention shows a method and a device for producing micrometer- and / or nanometer-sized structures. The idea behind the present invention is to solve the mentioned technical problems of production, inter alia, by using extremely thin, particularly flexible, substrates and by utilizing capillary forces, whereby after contact of the embossing mass with the structure stamp, the substrate is at least partially de-fixed, preferably by at least one controllable fixing element, whereby the embossing process is preferably introduced.

[0027] The present invention therefore deals in particular with a method and an apparatus for bringing a conformal contact between a structure stamp and an embossing mass during the embossing process without the use of external pressure or without the pressing of the two together.

[0028] The present invention therefore relates to a method for producing micro- and / or nanostructures, comprising at least: a) fixing a substrate having an embossed mass on a substrate receiving device; b) bringing the structural stamp into contact with the embossing mass; c) at least partially unclamping the substrate; d) hardening the embossed mass; f) releasing the embossed mass from the structure stamp; The present invention relates to a method having the steps as described above.

[0029] The present invention further relates to an apparatus for producing microstructures and / or nanostructures by the aforementioned method, wherein a substrate having an embossed mass can be fixed on a substrate receiving device, a structure stamp can be contacted with the embossed mass, the substrate can be at least partially released from its fixation, the embossed mass can be hardened, and the embossed mass can be released from the structure stamp.

[0030] The invention further relates to an article comprising microstructures and / or nanostructures, which microstructures and / or nanostructures have been produced by the method according to the invention and / or by the device according to the invention.

[0031] In a preferred embodiment of the invention, the substrate is flexible so that it can at least partially conformally adapt to the structure stamp, in particular after release or during structuring of the embossing mass. The substrate in particular has a small thickness and / or consists of a partially bendable material, so that during production it can advantageously partially accept the structure of the structure stamp. In this case, the substrate can either not adapt to the structure stamp or can adapt completely. After hardening of the embossing mass, the substrate forms in particular a unit together with the hardened embossing mass. In this way, the substrate can advantageously assist the embossing process and avoid embossing errors. Furthermore, the thin and flexible substrate can be deformed during the production process. In particular, the substrate is preferably drawn conformally to the structure stamp by the action of capillary forces and is deformed in the process. In addition, the flexibility allows a favorable uniform contact during production. In this case, the flexibility of the substrate advantageously allows gentle and uniform embossing without embossing errors. When the clamping is released, an additional degree of freedom is advantageously obtained, so that the thin and flexible substrate can assist the production process as desired, in particular by the action of capillary forces. After the clamping is released, the substrate is then free on the substrate receiving device. Due to the attraction of the embossing mass and the substrate to the structure stamp, it is also possible for the substrate to be partially or completely lifted off the substrate receiving device, in particular by capillary forces. Due in particular to the flexibility of the substrate, no external pressure forces are required to transfer the structure to the embossing mass. In this way, the substrate can in particular compensate for irregularities, so that the quality of the embossing process is additionally improved.

[0032] In another advantageous embodiment of the invention, after the at least partial release of the clamping of the substrate, an at least partial release of the substrate from the substrate receiving device is performed, in particular by a relative movement between the substrate receiving device and the substrate and / or by a relative movement between the substrate receiving device and the stamp receiving device and / or by capillary forces. The release can in particular result in an increase in the distance between the substrate and the substrate receiving device. However, it is also possible that the release of the clamping does not result in a release of the substrate or an increase in the distance. It is also possible, in particular by means of an actuator, for the distance between the substrate and the substrate receiving device to be formed after the at least partial release of the clamping. The distance that is increased by the actuator is in this case advantageously adapted to the process, in particular to the material properties. In this case, the substrate remains attached to the embossing mass or is attracted to the structure stamp, in particular by surface tension and capillary forces, which also advantageously provides a degree of freedom for the substrate. Depending on the arrangement of the substrate receiving device relative to the stamp receiving device, further forces, in particular gravitational forces, can act during the embossing process. In particular, the gap can be partially opened even during contact, in particular by the attraction of the substrate by capillary forces acting on the embossing mass. Preferably, however, the gap is opened only after at least partial release of the fixation. The gap can advantageously improve the reproducibility and efficiency of the embossing process, in particular of several embossing steps carried out simultaneously and / or in parallel. In addition, the thus obtained degree of freedom allows the substrate to deform and adapt to the structure stamp. This in particular allows embossing errors to be avoided.

[0033] In another advantageous embodiment of the invention, the structure stamp is adapted to be a hard or soft stamp. In particular, the structure stamp can have a soft or hard embossed structure. By hard stamp is meant in particular a master stamp. This production method allows soft stamps and micro- and / or nanostructures to be produced efficiently and cost-effectively, in particular by suitable process parameters and technically sensible selection of production materials. Furthermore, by suitable selection of the structure stamp, deformation of the structure stamp, in particular of the embossed structure of the structure stamp, can be prevented and uniform and reproducible embossing can be performed.

[0034] In another advantageous embodiment of the invention, the embossing mass is structured without pressure and / or without compression, in particular by capillary forces. This can advantageously reduce, in particular prevent, deformation of the structure stamp. Furthermore, this can increase the reproducibility of the embossing process and avoid embossing errors. In addition, the method is more efficient and less costly. The advantageous production of the structure without external compression forces can advantageously improve the material properties of the embossing mass after hardening, for example the strength values ​​or the surface properties. In addition, the substrate can be advantageously retained after peeling. When producing micro- and / or nanostructures, the advantage of the method is additionally utilized, which is that the smaller the structure size, the stronger the capillary forces act. Correspondingly, the embossing can be carried out without mechanical pressure, and the embossing mass is advantageously received by the structure and can thus be adapted to the structure particularly well. Advantageously, contact or wetting of the structure stamp, in particular the surface of the embossing structure, is required during the contact of the embossing mass with the structure stamp.

[0035] In another advantageous embodiment of the invention, the substrate with the embossed mass is fixed on the substrate receiving device by at least one controllable fixing element arranged in the substrate receiving device, in particular by vacuum and / or negative pressure, and / or is released by at least one controllable fixing element, in particular by interrupting the negative pressure and / or by creating a positive pressure. The at least one fixing element can fix the substrate on the substrate receiving device, in particular at a predefined point. The fixing element can in particular be a vacuum track, which is optionally arranged or laid out on the substrate receiving device surface, in particular in a circular or spiral shape. Preferably, the fixing element can create a positive and / or negative pressure. Their resultant force can in particular be applied optionally to the substrate, in particular on the side of the substrate facing the substrate receiving device. In particular, a curvature of the substrate can also be created, for example. In this case, the substrate is fixed, for example, on the edge of the substrate receiving device by negative pressure and a positive pressure is created via another fixing element, in which case the substrate is preferably raised, in particular in the center. In this way, in particular during contacting, a contact point can be set. In addition, by technically significant, controlled, localized clamping or release of the at least one clamping element, embossing errors, in particular gas inclusions, can be advantageously avoided. Furthermore, when released, the clamping elements can release the substrate individually and / or in groups in a defined sequence. In this way, the creation of structures can advantageously be started, in particular in defined areas. Preferably, the clamping elements are formed in such a way that the release of the substrate with the hardened embossing mass from the structure stamp can be assisted by the clamping elements. The embossing process can advantageously be started by the clamping elements. When the substrate is released or released, in particular capillary forces can advantageously act on the embossing mass and / or the substrate. The clamping elements allow a particularly gentle and uniform creation of structures. In addition, the release of the substrate can also be carried out particularly gently and advantageously. Preferably, the substrate receiving device and the substrate are in the form of a wafer.

[0036] In another advantageous embodiment of the invention, the clamping of the substrate and the at least partial release of the clamping of the substrate are controlled, in particular by controlling at least one controllable clamping element, so that the structuring of the embossing mass and / or the release or peeling off of the substrate are carried out at a predefined time point after the contact of the structuring stamp with the embossing mass. The at least one clamping element is preferably operatively controlled by a control unit and thus advantageously influences the time point of release of the clamping of the substrate and thus the peeling off or the release of the substrate. In particular, the release of the clamping can be effected at different points by a number of controllable clamping elements. In particular, the time and place of the release of the clamping can thus be advantageously controlled. The control unit preferably controls the operation of the at least one clamping element depending on a value, in particular a value provided by a sensor.

[0037] In another advantageous embodiment of the invention, the structure stamp is designed in such a way that after at least partial release of the fixation, the embossing mass and / or the substrate are conformally adapted or attracted to the structure stamp without external pressure, in particular by capillary forces. The structure stamp, in particular the embossed structure of the structure stamp, is designed in such a way that the structure is preferably transferred to the embossing mass, in particular by capillary forces. In particular, the contact surface of the structure stamp, which contacts the embossing mass during contact, is designed in such a way that a uniform and in particular full-surface contact is possible. Advantageously, the structures or the depressions and / or protrusions of the embossed structure of the structure stamp are arranged in such a way that the structuring can be carried out without pressure. In particular, the embossed structure to be transferred is designed in such a way that after release of the fixation, the substrate can conformally adapt to the structure. Advantageously, the structure stamp is also designed in such a way that the demolding is advantageously facilitated. In particular, the structure stamp or the embossed structure can be used multiple times. The production process can thus be carried out efficiently and multiple times in succession using the same structure stamp.

[0038] In another advantageous embodiment of the invention, the substrate is held by the embossing mass, in particular by capillary forces and / or surface tension, after contact and / or at least partial release of the clamping. The substrate is thereby at least partially attached to the structure stamp by the embossing mass after release of the clamping. In particular by capillary forces acting on the embossing mass, a detachment of the substrate from the substrate receiving device may occur. By releasing the substrate or by releasing the clamping, the substrate is held still and can preferably adapt to the structure stamp. In particular, the substrate can preferably adapt freely and uniformly to the embossed structure. In addition, irregularities can be compensated for in this way. Possibly present gas inclusions can in particular dissipate. Advantageously, the quality of the embossing process is thus improved.

[0039] In another advantageous embodiment of the invention, the micro- and / or nanostructures are produced in multiple layers one on top of the other and / or next to each other in a step-and-repeat process. The stacking of the multiple layers is carried out in particular so frequently that the minimum required flexibility of the substrate is no longer provided. In this way, the method can be carried out more efficiently and more cost-effectively. Furthermore, different layers can be produced one on top of the other. In addition, structures of multiple functions can be produced on a large area or next to each other in a continuous embossing process. In this way, a wide variety of products, in particular structured films, can be produced efficiently by the method. In particular, it is advantageous in this case that the structure stamp can be used multiple times, since there is no pressing pressure, the durability of the structure stamp is increased or the structure stamp can be used for multiple embossing steps.

[0040] In another advantageous embodiment of the invention, the thickness of the substrate is between 1 μm and 2000 μm, preferably between 10 μm and 750 μm, more preferably between 100 μm and 500 μm. Due to the use of a relatively thin substrate, the flexibility of the substrate can be increased, so that the substrate can better adapt to the embossed structure and compensate for irregularities. Furthermore, a larger number of layers can be formed one on top of the other, since the necessary flexibility is provided over a larger number of embossing steps.

[0041] In another advantageous embodiment of the invention, the viscosity of the embossing mass is less than 100000 cP, preferably less than 10000 cP, more preferably less than 1000 cP, most preferably less than 500 cP. By using an embossing mass with a relatively low cP value, in particular the retention of the substrate, the action of capillary forces and the conformal adaptation of the substrate and / or the embossing mass to the embossed structure can be improved. Furthermore, low cP values ​​are advantageous for the compensation of irregularities. In addition, the flexibility of the substrate is optimally utilized, whereby an improved embossing quality is achieved. By a suitable viscosity of the embossing mass, in particular the embossing behavior of the embossing mass and the retention of the substrate can be advantageously adjusted.

[0042] In another advantageous embodiment of the invention, the structure stamp has an embossed structure and / or is coated with an embossed structure. The embossing stamp can thus itself have an embossed structure or can be coated with an embossed structure, in particular an embossed structure that is individually adapted to the embossing process. This advantageously allows the embossing behavior to be adjusted. In particular, the creation of structures can be adjusted individually to the process by different embossing coatings. Different embossed structures can be transferred, for example, by the embossing stamp, in particular in a step-and-repeat process.

[0043] In another advantageous embodiment of the invention, an apparatus for producing micro- and / or nanostructures is in particular capable of carrying out the method described above, in that a substrate with an embossing mass can be fixed on a substrate receiving device, a structure stamp can be brought into contact with the embossing mass, the substrate can be at least partially detached, the embossing mass can be hardened and the embossing mass can be released from the structure stamp. In this case, the apparatus can advantageously produce micro- and / or nanostructures, in particular without additional pressing forces, which improves the quality of the embossing process.

[0044] In another advantageous embodiment of the invention, the device further comprises: one or more sensors for measuring pressure, distance and / or temperature, and / or one or more actuators for adjusting the position of the stamp receiving device and / or the substrate receiving device, and a control unit, which controls at least one fastening element and / or at least one actuator, in particular as a function of the values ​​measured by the at least one sensor, so that the relative movement of the structure stamp with respect to the substrate with the embossing mass, in particular the disappearance or reduction of the distance between the structure stamp and the substrate, can be performed in such a way that the contact can be performed in particular without pressing. In this case, in particular the control unit is arranged to bring about the contact of the structure stamp surface, in particular the embossed structure surface, based on the sensor values ​​by controlling the movement of the actuator. Thus, advantageously the contact can be performed without additional pressing. In this case, the actuator for increasing the distance can be arranged or act on any element, preferably on the substrate receiving device and / or the stamp receiving device. In this way, it can be advantageously ensured that the production of the micro- and / or nanostructures is performed optimally. In addition, the control unit is configured in such a way that the clamping of the substrate by the clamping element during the peeling and demolding is preferably carried out in particular as a function of the sensor values, which has the advantage that the process quality is improved and embossing errors can be avoided.

[0045] In a less preferred embodiment of the invention, the control unit of the device is adapted to bring about contact with additional pressure by controlling the movement of separately controllable actuators. The resultant force for the transfer of the stamp structure perpendicular to the substrate receiving surface is less than 500 N. The structure stamp can be fully formed, for example in a wafer format, or alternatively, in particular in a step-and-repeat process, it can have a defined surface which is smaller than the substrate to be embossed. The pressure as resultant force for the transfer of the stamp structure perpendicular to the substrate receiving surface is in particular less than 50 N / mm 2 Less than 25N / mm 2 Less than 10N / mm 2 Less than 1N / mm 2 Less than 0.1N / mm 2 is less than.

[0046] In the present invention, the substrate is extremely thin compared to the substrates described in the prior art. Either no carrier substrate is used to stabilize the substrate (or the product substrate), or the carrier substrate or the carrier plate or the carrier film is itself thin and flexible. This allows the substrate to be embossed to be extremely flexible and in particular supported flexibly.

[0047] The microimprinting and / or nanoimprinting process is carried out by means of a structured stamp, preferably made of elastomer, preferably in wafer format, whereby the structured stamp is brought into contact with a substrate, preferably pre-coated all over, in particular with an embossing mass provided on the substrate.

[0048] The structure stamp and the substrate are each fixed in a receiving device of the imprinting installation. Fixing of the substrate in the substrate receiving device is preferably performed by means of a vacuum or negative pressure. After alignment, the contact surfaces of the substrate and the structure stamp are brought into contact over the entire surface. As soon as the structure stamp comes into contact with the substrate, the fixation of the substrate coated with the embossing mass is released, in particular by interrupting the vacuum. Due to the action of capillary forces, the thin and flexible substrate is conformally attracted to the structure stamp. Due to the flexibility of the substrate and the degree of freedom acquired by the detachment of the substrate, the substrate can deform and adapt to the structure stamp. This allows a uniform contact during the embossing process.

[0049] The substrate and the structuring stamp are held together by capillary forces by the embossing mass located between them. For this, at least the substrate, but preferably the substrate and the structuring stamp, must have a high degree of flexibility. Due to the viscosity of the embossing mass, the intermediate spaces of the structuring stamp are particularly completely filled with the embossing mass by capillary action.

[0050] Due to the use of capillary forces, no additional external pressure or pressing of the structure stamp with the substrate is necessary during embossing or during the production of micro- and / or nanostructures, whereby deformations of the structures of the structure stamp caused by pressing are avoided, in particular prevented.

[0051] Capillary forces are especially meant to refer to forces that arise due to surface tension and / or interfacial tension. In particular, capillary rise and capillary fall can be utilized during production. Other forces, such as interfacial adhesion forces or weight forces, can also occur during production. Small micro- and / or nanostructures can then be advantageously utilized, since the smaller the structure size, the greater the effect of capillary forces or capillary pressure.

[0052] The flexibility of the substrate makes it possible to compensate for irregularities in the structure stamp and / or the substrate, as well as to prevent other embossing defects, such as those caused by air inclusions, so that the quality of the embossing process is extremely high.

[0053] Due to the use of capillary forces, in particular no additional external pressure or pressing of the substrate and stamp is required during embossing, which advantageously simplifies the device and the embossing process since no actuator device for force transmission is required.

[0054] The flexibility of the substrate and the freedom gained by its detachment after contact without external pressure allows the substrate to deform and in particular to conform to the structure stamp.

[0055] Uniform and conformal contact during embossing is possible, which results in very good imprint and no embossing gaps that may result from non-contacting or poorly contacted zones during embossing and subsequent curing.

[0056] The proposed invention prevents compression-induced deformation of the micro- and / or nanostructures of the structure stamp.

[0057] The viscosity of the embossing mass is preferably 1 to 100,000 cP, which allows a wide selection of embossing materials or embossing varnishes and process optimization by optimum combination of substrate, stamp material and embossing material.

[0058] The embossing mass does not need to have a particularly low viscosity, and a solvent atmosphere is not particularly required.

[0059] The contacting and embossing can in particular be carried out at ambient pressure, for example under an air or inert gas atmosphere. Other, in particular controllable, process pressures are also possible.

[0060] The contacting and embossing can in particular be carried out at room temperature and at elevated temperature.

[0061] The described methods advantageously allow for high throughput, and in particular can reduce the cost per unit produced.

[0062] Embossing of periodic and non-periodic micro- and nanostructures is possible.

[0063] Advantageously, precise alignment is not always necessary: ​​the degree of alignment of the substrate and the structure stamp before contact, for example only roughly aligned or finely aligned with highly precise alignment equipment, can be varied on a case-by-case basis.

[0064] A variety of different flexible substrates can be used in the described methods.

[0065] The embossing or fabrication can be performed with smooth and / or rough surfaces. The roughness can be varied on a case by case basis.

[0066] The embossing or fabrication can be carried out in particular with a flat stamp surface and / or with a curved stamp surface, where the flexibility of the substrate and the mobility of the substrate upon contact and detachment without external pressure allows the substrate to deform and conform to the stamp.

[0067] UV curable conductive and non-conductive embossing masses are available.

[0068] Heat curable conductive and non-conductive embossing masses are also available.

[0069] According to the proposed invention, a multi-layer embossing process can be carried out. An already embossed and hardened first layer on a flexible substrate can be coated again in another step with a second embossing mass, which is then embossed again and hardened. The production of further layers is possible, especially as long as sufficient substrate flexibility is still provided. Furthermore, several embossing steps can be carried out in parallel and / or next to each other, each being bonded to a previously produced substrate.

[0070] In the methods described, the thickness of the embossing mass on the substrate can be varied as required, so that thin or thicker layers of the embossing mass can be embossed or otherwise produced.

[0071] The proposed invention can in particular be used to produce working stamps for imprint lithography and in general to emboss different embossing masses which are curable by heat or electromagnetic radiation, in particular UV radiation, for structuring the substrate. Preferably, UV-curable embossing masses are used.

[0072] The proposed invention can in particular be used to manufacture the following products: - 1D, 2D and / or 3D diffractive optical elements (DOEs), - microfluidic components, - lenses and lens systems, -Fresnel lens, -biomedical elements, - polarizer, - nanostructured electrodes, -IR waveguide, -Angle optics for virtual reality applications, -glass fiber optic connection, - working stamps for imprint lithography, -others.

[0073] The capillary effect is caused in particular by the surface tension of the liquid itself and by the interfacial tension between the liquid and the solid surface. Capillary forces appear during interaction between a solid surface and a liquid or between solids, especially where there is a small amount of liquid. The cohesive forces between the liquid molecules and the interface adhesion forces between the liquid molecules and the surface of the substrate and the structure stamp due to the coating with the embossing mass located between them contribute to the two surfaces remaining in contact after contact, in particular without the influence of external forces. Advantageously, a thin and flexible substrate is used, so that the capillary forces act accordingly strongly and the substrate is drawn conformally to the structure stamp.

[0074] Another aspect is that the coated thin substrate is released as soon as the structure stamp comes into contact with the substrate. The fixation of the coated substrate by the embossing mass is in particular relieved by removal of the fixation, for example by interruption of the vacuum.

[0075] Due to the action of capillary forces, the thin and flexible substrate remains conformally bonded to the structure stamp.

[0076] The flexibility of the substrate and the freedom gained by detaching the substrate from the substrate receiving device allows the substrate to deform and conform to the structure stamp, allowing for uniform contact during embossing.

[0077] Due to the conformal contact, the intermediate chambers of the structure stamp are particularly completely filled due to the viscosity of the embossing mass, also by capillary action, the capillary pressure being dependent, inter alia, on the size of the structure.

[0078] The smaller the structures, the greater the capillary pressure. High-resolution structuring in the lower nm range (below 50 nm) is possible, since in this range the capillary pressure is at its maximum.

[0079] Furthermore, advantageously, embossing defects that may result from the use of external crimping pressure during the embossing process are prevented.

[0080] method The substrate is extremely thin compared to substrates in the prior art, whereby either no carrier substrate is used to stabilize the substrate (or the product substrate) or the carrier substrate or carrier plate or carrier film is itself thin and flexible, whereby the substrate to be embossed is extremely flexible.

[0081] The micro- and / or nano-imprinting process is carried out by means of a structured stamp, preferably an elastomeric stamp, in particular a stamp in wafer format, whereby the structured stamp is brought into contact with a substrate which is preferably pre-coated all over.

[0082] The structure stamp and the substrate are in particular fixed in a receiving device of the imprinting installation. The fixing of the substrate in the substrate receiving device is preferably performed by means of a vacuum or negative pressure. After the alignment adjustment, the contact surfaces of the substrate and the structure stamp are brought into contact over the entire surface. As soon as the structure stamp has come into contact with the substrate, the fixing of the substrate coated with the embossing mass is released, in particular by interrupting the vacuum. The detachment process can act over the entire surface or along a predetermined section. The fixing elements are controlled accordingly.

[0083] When the substrate is completely detached from the receiving device after contacting, it remains attached to the structure stamp due to the capillary effect (capillary force) exerted by the embossing mass present between the substrate and the structure stamp. No additional external pressing force is necessary for successful embossing or fabrication according to the present invention.

[0084] Due to the action of capillary forces, the thin and flexible substrate is conformally attracted to the stamp. The flexibility of the substrate and the freedom gained by the detachment of the substrate allows the substrate to deform and conform to the stamp, allowing for uniform contact during embossing.

[0085] The substrate and the structuring stamp are held together by capillary forces by the embossing mass located between them. For this, at least the substrate must have a high degree of flexibility. Due to the viscosity of the embossing mass, the intermediate spaces of the structuring stamp are filled, in particular completely, by capillary action with the embossing mass.

[0086] The proposed invention thereby prevents deformation of the structure of the structure stamp caused by pressing, and the flexibility of the substrate furthermore makes it possible to compensate for irregularities of the stamp and / or substrate and also to prevent other embossing defects, such as those caused by air inclusions, so that the quality of the embossing process is extremely high.

[0087] During this adaptation and deformation of the thin substrate on the structure stamp, gas, in particular air or an inert gas, present between the substrate and the structure stamp can be pushed out, so that the embossing can be carried out without gas inclusion, in particular by controlled release by the fixing elements which hold or fix the substrate, whereby advantageous release of the substrate can be achieved, in particular by individual release of the fixing elements, in particular by concentric release along the wafer surface.

[0088] After hardening of the embossing mass, the substrate can, if necessary, be fixed again by vacuum to the receiving device so that demolding can take place.

[0089] The method according to the invention for embossing a thin and flexible substrate with a structured stamp for micro- and / or nanostructuring comprises in particular: a) fixing the substrate and the structure stamp in a corresponding receiving device; b) depositing an embossed mass onto a substrate; c) coarsely and / or finely adjusting the substrate and the structure stamp; d) starting the embossing process by contacting the substrate with the embossing mass and the structure stamp, in particular by a relative movement of the substrate receiving device and / or the stamp receiving device, so that the substrate is drawn to the structure stamp by the capillary effect and a conformal contact is created; e) once the contact has been made, the flexible substrate is detached from the substrate receiving device, the freedom thus gained allowing the flexible substrate to deform and conform to the structure stamp; f) hardening the embossed mass; g) re-fixing the embossed substrate to the substrate receiving device and releasing the structure stamp from the substrate; The method includes the steps in the above order.

[0090] Preferably, the embossing is initiated after contact of the contact surfaces of the substrate and the structure stamp with the embossing mass and thus after the development of capillary forces, in particular by detachment of the substrate.

[0091] The thin substrate, after detachment, is in particular no longer fixed to the receiving device and can thereby conform to the structure stamp.

[0092] Preferably, contact refers to a full-surface contact. Alternatively, the contact can be made from the edge or from the center. For point-like contact, in a further embodiment according to the invention, the structure stamp and / or the substrate are bent by bending means. Advantageously, the contact can be assisted by a fixing element, in particular with closed-loop control.

[0093] In another embodiment, a step-and-repeat process is carried out, where a structure stamp is used in a step-and-repeat manner, such that a repeating structure is applied, for example, to the circumferential surface of an embossing roll, where the device is provided with hardening means for hardening the embossed substrate, in particular section by section, preferably in sections corresponding to the step-and-repeat method, in particular to one stamping surface of the structure stamp.

[0094] Substrate, structural stamp and embossed mass Particularly preferably, the substrate and / or the structure stamp are flexible to allow conformal contact over the entire substrate surface or structure stamp surface. In a preferred embodiment, the substrate is extremely thin, which provides an advantageous flexibility. Either no carrier substrate for stabilizing the substrate is used, or the carrier substrate or the carrier plate or the carrier film is itself thin and flexible. This allows the substrate to be embossed to be extremely flexible. The thin substrate is fixed in a receiving device, which allows easy handling.

[0095] The substrate may be of any shape, preferably circular, rectangular or square, more preferably in wafer format. The diameter of the substrate is greater than 2 inches, preferably greater than 4 inches, more preferably greater than 6 inches, even more preferably greater than 8 inches, and most preferably greater than 12 inches. By substrate is especially understood a wafer.

[0096] The thickness of the substrate is particularly from 1 μm to 2000 μm, preferably from 10 μm to 750 μm, and more preferably from 100 μm to 500 μm.

[0097] The structure stamp may take any shape, preferably circular, rectangular or square, more preferably in wafer format. The diameter of the structure stamp preferably corresponds approximately to the diameter of the substrate.

[0098] To realize the soft lithography process, typically an elastomeric structure stamp, preferably a UV-transparent polymer stamp, is used.

[0099] Transparent elastomeric structural stamps for UV-NIL are produced, for example, from the following polymers: silicones, such as polydimethylsiloxane (PDMS), polyorganosilsesquioxanes (POSS), perfluoropolyethers (PFPE), polytetrafluoroethylene (PTFE), polyvinyl alcohol (PVA), polyvinyl chloride (PVC), ethylenetetrafluoroethylene, etc. Combinations of several materials and several layer systems are possible.

[0100] The structure stamp is preferably fixed on a carrier (English: backplane), in particular a plate, most preferably a glass carrier. Further possible materials for the carrier are polymers and / or metals. The carrier is in particular also the stamp carrier substrate.

[0101] The structure stamp has on its embossing side, in particular a plurality of, preferably distributed, in particular regularly arranged, embossing structures over the entire embossing surface of the embossing side. The dimensions of the individual structures of the embossing stamp are preferably in the micrometer and / or nanometer range. The dimensions of the individual structures are in particular less than 20 μm. The dimensions of the individual structures are in particular between 0.1 nm and 20 μm, preferably between 1 nm and 10 μm, more preferably between 1 nm and 5 μm, even more preferably between 1 nm and 2 μm.

[0102] The structure stamp can have a positive and / or negative pattern present on the side facing the substrate surface to be treated. The structure stamp can have a number of embossed structures, each with different dimensions.

[0103] In an alternative embodiment, the structure stamp is made of a hard UV-transparent material, such as glass, quartz or silicon dioxide. In this embodiment, the substrate in particular must have the necessary thin layer thickness and flexibility. In another embodiment, the structure stamp is made of a hard material, such as silicon, a semiconductor material or a metal, such as Ni or Ti.

[0104] The embossed mass is hardened in particular by chemical and / or physical processes, in particular the embossed mass is hardened by electromagnetic radiation and / or by temperature.

[0105] Preferably, the curing is carried out by means of electromagnetic radiation, particularly preferably by means of UV radiation, in which case the structure stamp is preferably transparent to the required electromagnetic radiation when it is desired that the embossing mass is cured from the structure stamp side.

[0106] A corresponding radiation source is preferably arranged on the side of the structure stamp facing away from the embossed structures. The structure stamp is therefore transparent in particular in the wavelength range from 5000 nm to 10 nm, preferably from 1000 nm to 100 nm, more preferably from 700 nm to 200 nm, most preferably from 500 nm to 250 nm.

[0107] The optical transparency of the structure stamp is in this case greater than 0.01%, preferably greater than 20%, more preferably greater than 50%, most preferably greater than 80% and most preferably greater than 95%.

[0108] The viscosity of the embossing mass is preferably between 1 and 100,000 cP, which allows a wide selection of embossing materials / embossing varnishes and process optimization by optimal combination of substrate, stamp material and embossing material. The viscosity is in particular less than 100,000 cP, preferably less than 10,000 cP, more preferably less than 1,000 cP and most preferably less than 500 cP.

[0109] The embossing mass is applied, in particular as a coating over the entire surface or as drops, at defined intervals onto the substrate or onto the structure stamp. Preferably, the embossing mass is applied onto the substrate. The application of the embossing mass can be carried out before or after the substrate is fixed. According to the invention, it is also possible to define areas with more embossing mass or more drops depending on the topography of the structure stamp or depending on the size of the structure. The application of the embossing mass can be carried out, for example, by a metering device having a nozzle that can be arranged between the structure stamp and the substrate.

[0110] In another embodiment, the present invention can be applied in combination with established industrial coating methods, such as spin-coating. The coating can be carried out in a dedicated module, separate from the embossing process, so that the coating of the substrate is fast, defect-free, full-surface, particle-free and standardized. Among other things, this results in throughput advantages and cost reduction.

[0111] Device The invention particularly relates to a method and an apparatus described for transferring structures, in particular microstructures or nanostructures, from a preferably UV-transparent structure stamp onto the flat side of a substrate, in particular a fully coated substrate, the method and apparatus comprising a substrate holder for receiving the substrate on a substrate receiving surface and a structure surface of the structure stamp which can be aligned parallel to the substrate receiving surface and can be positioned opposite the substrate receiving surface.

[0112] The device can preferably be installed in a process chamber, which can be closed gas-tightly against the environment. This allows evacuation of the process chamber with any gas or gas mixture and / or ventilation of the process chamber. The process chamber can in this case be evacuated to a pressure of less than 1 bar, preferably less than 10 mbar, more preferably less than 5 mbar.

[0113] In a preferred configuration, the process according to the invention is carried out at ambient pressure, for example under an air or inert gas atmosphere.

[0114] The process chamber can be purged with any gas or gas mixture, which is particularly advantageous when the embossing process should not be performed under vacuum. One possible reason for not applying a vacuum, but not the only one, could be the high volatility of the embossing mass at low ambient pressure. The high volatility, characterized by a high vapor pressure, can contribute significantly to the contamination of the process chamber.

[0115] The gas used should in this case have as little interaction as possible with the embossed mass. Particular preference would be given to purging with an inert gas which does not interact with the embossed mass.

[0116] The contacting and embossing can be carried out both at room temperature and at elevated temperature, the installation according to the invention being equipped with appropriate means for temperature regulation and heating.

[0117] In another embodiment, the contact of the substrate with the structure stamp is particularly critical, since errors can occur here and therefore reproducible adjustment accuracy cannot be respected. The device can be applied in combination with alignment, especially for high-precision, controlled embossing of different overlapping layers, for example using the SVA (SmartView® Alignment) method. During the critical step of contact of the aligned contact surfaces of the substrate with the (nano)structure stamp, increasingly precise adjustment accuracy or offsets of less than 100 μm, in particular less than 10 μm, preferably less than 1 μm, most preferably less than 100 nm, most preferably less than 10 nm are desired.

[0118] In the described apparatus, the substrate and the structure stamp are aligned and merged so that approach and adjustment are performed in a controlled manner for the microimprint embossing and / or nanoimprint embossing process. The apparatus preferably comprises a system for non-contact wedge error compensation between the parallel aligned stamps and the substrate as described in EP 2 612 109 B1, and an approaching means is used for approaching the first surface relative to the second surface in a translation direction (T) transversely to the receiving surface of the receiving device to an end position.

[0119] In another embodiment, a rough alignment is sufficient and precise alignment is not particularly required since the thin substrate can conform to the structure stamp due to its flexibility and the mobility provided by the detachment from the substrate receiver.

[0120] The substrate and the structure stamp are fixed in a receiving device (English: chuck). Important for the receiving device is, inter alia, a flat receiving or holding surface for holding and fixing. The receiving device for the substrate and the structure stamp is preferably a vacuum sample holder. It would also be possible to use electrostatic sample holders, sample holders with magnetic or electrical fixing, sample holders with variable interface adhesion properties or with corresponding mechanical clamps.

[0121] In a preferred embodiment, the substrate and the structure stamp are clamped by underpressure or vacuum on a flat hardened surface on which vacuum tracks have been milled. The substrate receiving device has vacuum tracks over the entire surface or in the outer zone of the surface. Advantageously, the underpressure passages run concentrically, in particular circularly, in particular around the entire circumference, relative to the center Z of the receiving device. This advantageously achieves a particularly uniform clamping.

[0122] Preferably, the receiving device, in particular the substrate receiving device, has a vacuum track only in the outer zone of the surface, so that the substrate is only partially fixed, in particular at the edge. In particular in this case, the possibility arises of completely detaching the substrate and / or the structure stamp from the receiving device. For this purpose, the fixing of the receiving device, in particular the holding vacuum, is stopped. Fixing elements to which negative pressure can be applied for fixing can also be applied with positive pressure for the detachment of the substrate. According to an advantageous embodiment, the receiving device can also have a second vacuum zone in order to ensure a full-surface fixation of the substrate after the embossing and hardening steps.

[0123] If the fastening elements are provided as vacuum elements, they can generate a pressure of less than 1 bar, preferably less than 0.1 mbar, more preferably less than 0.01 mbar, most preferably less than 0.001 mbar, most preferably less than 0.0001 mbar. The fastening elements can in particular be operated individually or in groups.

[0124] The receiving device according to the invention may alternatively or additionally have sensors, by means of which physical and / or chemical properties can be measured between the fixed substrate and the receiving device. These sensors are for example temperature, pressure or distance sensors. It is also possible to incorporate several different types of sensors. Furthermore, the sensors may be arranged in other parts of the device. For example, distance or pressure sensors may be arranged between the receiving devices. In particular, the distance and / or the acting force between the substrate with the embossing mass and the stamp or stamp structure may be measured.

[0125] Furthermore, if necessary, the contour of the receiving surface can be set back relative to the receiving plane of the receiving surface, so that a recess is formed which reduces or modifies the resting surface, thereby also allowing the use of substrates which are structured or processed on both sides (product substrates).

[0126] In another embodiment, the receiving device is formed in such a way that the substrate and / or the structure stamp can be temperature-regulated globally or in sections. The receiving device can be temperature-regulated in the temperature range of -100°C to 500°C, preferably -50°C to 450°C, more preferably -25°C to 400°C, most preferably 0°C to 350°C.

[0127] An embodiment of the substrate receiving device according to the invention further allows the handling of substrates having a liquid layer thereon, in particular a liquid embossing varnish or embossing mass which is present at the interface during contact.

[0128] The embossing mass is applied, in particular as a full-surface coating or as drops, at defined intervals onto the substrate or onto the structure stamp. Preferably, the embossing mass is applied onto the substrate. Depending on the topography of the substrate and / or the structure stamp, areas with more embossing mass or more drops can also be defined. The application of the embossing mass can in particular be carried out by means of a metering device having a nozzle that can be arranged between the structure stamp and the substrate.

[0129] In another embodiment, the method can be applied in combination with established industrial coating methods, such as spin-coating. The coating can be carried out in a dedicated module, separate from the embossing process, so that the coating of the substrate can be carried out quickly, defect-free, all-round, particle-free and standardized, which entails advantages, especially in terms of throughput.

[0130] In another embodiment, the receiving device has a device for bending the structure stamp and / or the substrate, preferably in the center, in particular only partially fixed thereto. This bending device is called a bending element. The bending element is in particular a nozzle through which a fluid, preferably a gas, can be discharged, whereby a positive pressure can be formed, for example, between the structure stamp and the receiving device, which positive pressure causes the structure stamp to bend. The bending of the structure stamp occurs by the receiving device preferably at the periphery, being fixed via vacuum by the structure stamp.

[0131] According to the invention, embossing is initiated after contact, preferably full-surface contact, of the contact surfaces of the substrate and the structure stamp with the embossing mass and thus after the development of capillary forces, in particular by detachment of the substrate.

[0132] Further advantages, features and details of the invention can be seen from the following description of preferred embodiments and on the basis of the drawings, which are schematic diagrams. [Brief description of the drawings]

[0133] [Figure 1a] FIG. 2 is a cross-sectional view of an apparatus in a first embodiment of the method. [Figure 1b] FIG. 13 is a cross-sectional view of an apparatus in a first embodiment of the method after the structure stamp holder and the substrate holder have approached each other to an end point without any external pressing force. [Figure 1c] FIG. 2 shows a cross-sectional view of an apparatus in a first embodiment of the method, in which the substrate is released from the substrate receiving device by interruption of the vacuum in the vacuum track and conformally adheres to the structure stamp by capillary forces. [Figure 1d] FIG. 2 is a cross-sectional view of a structure stamp receiving device in a first embodiment of the method, in which after embossing or preparation, the hardenable embossing mass is cross-linked or hardened in the stack by UV light, in particular through the transparent structure stamp. [Figure 1e]FIG. 13 is a cross-sectional view of the apparatus after embossing, in which the embossed substrate has been refixed to the substrate receiving device, and then release of the structure stamp from the substrate has been performed. [Diagram 2] FIG. 2 is a cross-sectional view of an apparatus in a first embodiment of the method, together with an enlarged view of the cross-sectional view. [Figure 3a] FIG. 2 shows a second cross-sectional view of the apparatus in the first embodiment of the method, in which the substrate is peeled off from the substrate receiving device by interruption of the vacuum in the vacuum track and conformally adheres to the structure stamp by capillary forces. [Figure 3b] FIG. 13 is a cross-sectional view of the apparatus after embossing, in which the embossed substrate has been refixed to the substrate receiving device, and then release of the structure stamp from the substrate has been performed. [Figure 4a] FIG. 2 is a cross-sectional view of an apparatus for a second embodiment of the method according to the invention. [Figure 4b] FIG. 11 is a cross-sectional view of an apparatus in a second embodiment of the method after embossing and curing. [Figure 4c] FIG. 11 is a cross-sectional view of an apparatus in a second embodiment of the method after demolding. [Figure 4d] 4 is a cross-sectional view of an apparatus in a second embodiment of the method, at a second iterative step of a step-and-repeat embossing process. FIG.

[0134] In the figures, identical elements or elements having the same function have been provided with the same reference numerals and the figures are not drawn to scale in order to improve the illustration.

[0135] Figure 1a shows a cross-sectional view of the device in a first embodiment. Figure 1a shows in particular receiving devices 5 and 6 of the device for receiving the structure stamp 2 and the substrate 1. The receiving surfaces of the receiving devices 5 and 6 are in particular adapted to the dimensions and the peripheral contour of the structure stamp 2 and the substrate 1.

[0136] The structure stamp 2 shown in Figures 1a to 1e is in a preferred embodiment an elastomeric soft stamp 2. The elastomeric structure stamp 2 allows conformal and uniform contact over a large surface. To ensure good separation of the structure stamp 2 from the substrate 1, the stamp surface has a surface energy as low as possible.

[0137] If necessary, the elastomeric structure stamp 2 is supported by a carrier or stamp carrier substrate 4. In another embodiment, a glass carrier substrate with variable thickness is used. Due to the use of a stamp carrier substrate 4, the elastomeric structure stamp 2 at least partially loses its flexibility. On the other hand, the flexibility of the structure stamp 2 can be controlled by the selection of the carrier 4. The carrier 4 can be a plate in an alternative embodiment. In a third embodiment, the carrier 4 is not required. The structure of the structure stamp 2 is not limited to the embodiment shown in Figs. 1a to 1e.

[0138] The structures 3, 3' of the structure stamp 2 have dimensions in the micrometer and / or nanometer range. Fixing of the structure stamp 2 is in a preferred embodiment performed by vacuum or negative pressure via vacuum tracks 8 of a vacuum device (not shown). In the embodiment shown in Figs. 1a to 1e, negative pressure is applied to fix the structure stamp on a number of vacuum tracks 8 extending concentrically with one another and covering the receiving surface of the stamp receiving device 5 for receiving the structure stamp. In an alternative embodiment, the vacuum tracks 8 are present only in the region of the side edges of the receiving surface of the stamp receiving device 5. In this alternative embodiment, only an outer annular section of the receiving surface of the stamp receiving device 5 is provided for fixing the structure stamp 2 by the vacuum tracks 8.

[0139] In a preferred embodiment shown in Figures 1a to 1e, the substrate 1 is extremely thin compared to substrates in the prior art, which provides flexibility. In the first embodiment, no carrier substrate is used to stabilize the substrate 1 or the product substrate. The thin substrate 1 is fixed to a receiving device 6, which allows easy handling. In an alternative embodiment, a carrier (not shown) is used to stabilize the thin substrate 1. The carrier may be, for example, a carrier substrate, a carrier plate or a carrier film. The carrier supports the substrate and prevents it from bending, but is itself thin and thus also sufficiently flexible. The substrate to be embossed is thus flexible.

[0140] 1a to 1e is, in a preferred embodiment, a very thin substrate. The thickness of the substrate 1 is in particular between 1 μm and 2000 μm, preferably between 10 μm and 750 μm, more preferably between 100 μm and 500 μm.

[0141] The thicknesses of the structure stamp 2, the substrate 1 and the embossing mass 7 are not shown to scale in the figures for improved illustration.

[0142] The receiving surface of the substrate receiving device 6 shown in Figure 1a is preferably at least approximately adapted to the dimensions of the substrate 1. Fixing of the substrate 1 is in a preferred embodiment performed by vacuum or negative pressure via a vacuum track 9 of a vacuum device (not shown).

[0143] In the embodiment shown in Figures 1a to 1e, negative pressure is applied to a plurality of vacuum tracks 9 extending concentrically with one another and covering the receiving surface of the substrate receiving device 6 for receiving the substrate 1, in order to fasten the substrate 1. The fastening means are also formed as a plurality of fastening elements, in particular independently controllable, which are in particular uniformly distributed over the receiving surface and divided into zones. In Figures 1a and 1b, firstly only the vacuum tracks 9 arranged in the zones of the side edges of the receiving surface of the substrate receiving device 6 are independently controlled and actuated (control or actuation is indicated by arrows). The edge areas extend in particular up to half the radius of the receiving surface, preferably up to a quarter of the radius.

[0144] The substrate shown in Figure 1a is already coated all over with an embossing mass 7. In a preferred embodiment, the method is applied in combination with established industrial coating methods, such as, for example, spin-coating. The application of the layer is carried out in particular by spin-, spray- or ink-jet methods as well as dip- or roller-coating methods. The coating can be carried out in a separate module from the embossing process.

[0145] The application of the embossing mass 7' can be carried out by a metering device 13 with a nozzle 12, which in an alternative embodiment shown in FIG. 2 can be arranged between the structure stamp 2 and the substrate 1. In this embodiment, the embossing mass 7' is applied as drops onto the substrate 1 at defined intervals. The volume of the drops is precisely measured and controlled, so that the interlayer thickness of the possible interlayer left between the structure recess of the embossed structure and the substrate surface is set. Preference is given to an interlayer thickness that is as small as possible. Preferably, the interlayer thickness is between 50 μm and 0.01 nm, more preferably between 10 μm and 0.01 nm, most preferably between 1 μm and 0.01 nm.

[0146] In one embodiment, the substrate receiving device 6 further enables handling of a substrate 1 having a liquid layer thereon, in particular a liquid embossing varnish or embossing mass 7, 7' which is present at the interface during contact.

[0147] Figure 1b shows the apparatus during a further process step: After alignment, the contact surfaces of the substrate 1 and the structure stamp 2 are brought together and brought into full contact.

[0148] In an embodiment according to the invention, a relative approaching movement is performed between the structure stamp 2 and the substrate 1, 1'. Preferably, only one of the receiving devices 5, 6 is moved. Preferably, only the structure stamp 2 is approached relative to the stationary substrate receiving device 6.

[0149] During the contact step of the structure stamp 2 with the substrate 1 shown in FIG. 1b, only the fastening means provided in the edge region of the substrate receiving device 6 are used. As soon as the structure stamp 2 comes into contact with the substrate 1, the fastening of the coated substrate 1 by the embossing mass 7, 7' is relieved by interrupting the vacuum. Due to the reduction of the negative pressure at the receiving surface, a controlled detachment of the substrate 1 can be carried out. The fastening elements are controlled accordingly. The structure stamp 2 remains fixed in the stamp receiving device 5 unchanged.

[0150] After the detachment, the substrate 1 remains attached to the structure stamp 2 due to the capillary effect or capillary forces acting by the embossing masses 7, 7' existing between the substrate 1 and the structure stamp 2, as shown in Fig. 1c, and the embossing process is fully started. No additional external pressing force is necessary for the successful embossing or production according to the invention. The receiving devices 5, 6 are arranged such that the spacing H (see Fig. 2) is precisely defined to the final spacing H E The final distance H is then only decreased to 0.5 so that the imprint process can be started without applying any additional external compression force. Eis in particular less than 100 μm, preferably less than 10 μm, most preferably less than 500 nm, most preferably less than 100 nm. Due to the action of capillary forces, the thin and flexible substrate 1 is conformally attracted to the structure stamp 2. Due to the flexibility of the substrate 1 and the degree of freedom acquired by the detachment of the substrate 1, the substrate 1 can deform and adapt to the structure stamp 2. This allows a uniform contact during the embossing process.

[0151] 1c shows an arrangement with a particularly UV-transparent structure stamp 2 mounted in a stamp receiving device 5, the substrate 1 being held together by capillary forces by the embossing mass 7 located between them. For this, at least the substrate 1 must have a high degree of flexibility. Due to the viscosity of the embossing mass 7, the intermediate chambers of the structure stamp 2 are completely filled with the embossing mass 7 also by capillary action.

[0152] In the embodiment shown in Fig. 1c, the substrate 1 is no longer resting on the receiving surface of the substrate receiving device 6 after interruption of the fixation to the substrate receiving device 6 and after the action of capillary forces. In a second embodiment (not shown), the substrate 1 is still resting on the receiving surface of the substrate receiving device 6 without (active) fixation by a fixation means and without the influence of external forces. Whether or not contact between the substrate 1 and the receiving surface of the substrate receiving device 6 is still present after detachment of the substrate fixation by the fixation means 9 depends on several process parameters, such as the amount and viscosity of the embossing mass 7,7', the size of the structures 3,3' of the structure stamp 2, the final spacing H E It depends on the settings etc.

[0153] In an alternative embodiment (not shown), the structure stamp 2 is present in a lower receiving device and the substrate 1 is present in an upper receiving device. After detachment, the substrate 1 remains attached to the structure stamp 2 due to the capillary forces acting by the embossing mass present between the substrate 1 and the structure stamp 2 and rests, for example as drops, on the embossing mass 7 applied at defined intervals on the structure stamp 2 due to the additional force of gravity.

[0154] In all the embodiments shown, no external pressure, in particular no compression, is necessary to achieve a conformal or gap-free contact between the structure stamp 2 and the substrate 1 carrying the embossed mass 7. The device has the advantage that no actuator device needs to be used to apply a resultant force, which is used for the transfer of the stamp structure 3 to the stamp 2 and / or to the substrate 1 and is perpendicular to the substrate receiving surface.

[0155] The method prevents deformation of the structures 3 of the structure stamp 2 caused by pressing, and the flexibility of the substrate 1 makes it possible to compensate for irregularities of the structure stamp 2 and / or the substrate 1 and also to prevent other embossing defects, such as those caused by air inclusions, so that the quality of the embossing process is very high.

[0156] In the next process step shown in Fig. 1d, direct crosslinking of the curable embossing mass 7, in particular a photoresist or varnish, takes place by means of UV light 10. More generally, curing may be carried out by means of electromagnetic radiation, by means of heat, by means of electric current, by means of a magnetic field or in another way. Preferably, curing is carried out through the transparent stamp-receiving device 5 and the transparent structure stamp 2. It is also possible to harden the embossing mass 7 via a radiation source arranged in or adjacent to the stamp-receiving device 5.

[0157] In the last process step shown in Fig. 1e, the release of the substrate 1 from the structure stamp 2 takes place. Before the release, the substrate 1 is clamped again in the substrate receiving device 6. The clamping of the substrate 1 is performed by vacuum or negative pressure via a vacuum track 9' of a vacuum device (not shown). For the release, all clamping elements of the substrate receiving device 6 are used and activated (activation is indicated by the arrows), in particular the clamping elements 9' which are independently controllable and uniformly distributed over the receiving surface.

[0158] Figure 1e shows the embossed and hardened embossing mass 11 on the substrate 1i after embossing. The method allows high-resolution structuring in the sub-μm range, preferably below 20 μm, more preferably below 2 μm, even more preferably below 200 nm, most preferably below 10 nm.

[0159] Preferably, the apparatus comprises a group of modules with one common, if necessary closable working chamber against the surrounding atmosphere, in which case the modules, for example the paint module, the imprint module and the unload module, can be arranged in a cluster or star shape around a central module of the mobile apparatus (robot system).

[0160] FIG. 3a shows an embodiment with significant substrate deformation due to the action of capillary forces after contact of the substrate 1' with the structure stamp 2 with an embossing mass 7 located between them. The relationship of the individual parts to the substrate 1' shown in FIG. 3a is partly out of scale, which is due in particular to the significantly enlarged structure 3 of the structure stamp 2. Due to the action of capillary forces, the thin and flexible substrate 1' is conformally attracted to the structure stamp 2. Due to the flexibility of the substrate 1' and the degree of freedom acquired by the detachment of the substrate 1' from the substrate receiving device 6, the substrate 1' can deform and adapt to the structure stamp 2. This allows a uniform contact during embossing. For this, at least the substrate 1,1', and preferably the substrate 1,1' and the structure stamp 2, must have a high flexibility. Due to the high flexibility of the substrate 1,1' and the conformal contact, embossing defects are reduced or preferably eliminated.

[0161] Possible embossing defects in the prior art of nanoimprint lithography are, inter alia, cracks, non-uniformly filled stamp structures (hence air inclusions) and non-uniform varnish layer thicknesses. The interfacial adhesion between the embossing mass, e.g. varnish, and the structure stamp is critical here, since, for example, distortions or cracks can occur when the hardened embossing mass 11' adheres relatively strongly in the recesses of the structure stamp 2, as a result of which the embossed structure can tear on demolding. Non-uniformly filled stamp structures 3 lead to the loss of the individual embossed structures in the hardened embossing mass 11'. The filling of the stamp structures depends on several factors, inter alia, on the viscosity of the embossing mass 7, the thickness of the coating or the size and arrangement of the applied embossing mass drops, and on the time.

[0162] Further embossing defects may result in particular from defects of the structure stamp 2 itself, for example structures 3 that are not deep enough in some places or from an uneven surface. Defects, for example an uneven surface of the structure stamp 2, are compensated for by the flexibility of the substrate 1.

[0163] The soft construction stamp 2 cannot be deformed during the process according to the invention, since no external pressure is applied. The substrate 1, 1' is also thin, so stamp defects or defects that would otherwise occur in the prior art can be compensated for or do not occur at all. Figure 3b shows the embossed and hardened embossed mass 11' on the substrate 1i after demolding.

[0164] The proposed invention can in particular be used to manufacture the following products: - 1D, 2D and / or 3D diffractive optical elements (DOEs), - microfluidic components, - lenses and lens systems, -Fresnel lens, -biomedical elements, - polarizer, - nanostructured electrodes, -IR waveguide, -Angle optics for virtual reality applications, -glass fiber optic connection, - working stamps for imprint lithography, -others.

[0165] Figures 4a to 4d show another embodiment of the step-and-repeat method. In this case, a structure stamp 2' is used which is smaller than the substrate 1'' on which the structure is to be embossed. The process is optionally repeated as often or accordingly in order to emboss the entire substrate 1'' with an embossing mass 7'', as shown in Figures 4a to 4d. The equipment according to the invention can preferably be installed in a process chamber, which can be closed gas-tight against the environment. This allows evacuation of the process chamber with any gas or gas mixture and / or ventilation of the process chamber.

[0166] FIG. 4a shows a substrate 1'' with a full-surface layer of embossing mass 7''. In an alternative embodiment, drops of embossing mass can be applied at defined intervals on the substrate 1''. The step-and-repeat structure stamp 2' is in this case smaller than the substrate 1''. FIG. 4a also shows a cross-sectional view of in particular a receiving device 5' of the device for receiving the structure stamp 2'. The structures 3' of the structure stamp 2' have dimensions in the micrometer and / or nanometer range. Fixing of the structure stamp 2' to the stamp receiving device 5' is in a preferred embodiment performed by vacuum or negative pressure via a vacuum track of a vacuum device (not shown).

[0167] In an advantageous embodiment of the invention, the device is adapted to comprise hardening means for hardening the embossed substrate 1'', in particular section by section, preferably corresponding to a step-and-repeat method, in particular in sections corresponding to one stamping surface of the structure stamp.

[0168] The step-and-repeat apparatus should be considered as a development of the apparatus described in EP 2 287 666 A1, which describes a step-and-repeat apparatus for embossing a substrate in a plurality of embossing steps in an embossing process and further devices contained within this apparatus, in particular adjustment devices.

[0169] In the process step shown in FIG. 4b, the embossing mass 7″ is structured by the structure stamp 2′ in a step-and-repeat manner. The structure stamp 2′ is then run to a first position so that it can be embossed in this first position. Preferably, only the structure stamp 2′ is approached relatively to the stationary carrier substrate. After contact, direct crosslinking of the curable embossing mass 7″, in particular a photoresist or varnish, is carried out by UV light 10. More generally, the curing may be carried out by electromagnetic radiation, by heat, by electric current, by magnetic field or in another way. Preferably, the curing is carried out through the transparent stamp-receiving device 5′ and the transparent structure stamp 2′. According to the invention, it is also possible to harden the embossing mass 7″ via a radiation source arranged in or in contact with the stamp-receiving device 5′.

[0170] After demolding, shown in FIG. 4c, defined areas of the substrate 1'' are embossed and have a hardened embossed mass 11'.

[0171] In a further process step of the step-and-repeat method shown in FIG. 4d, the step-and-repeat structure stamp 2′ runs from the first position to a second, predefined position different from the first position and embosses again. After contact, a direct crosslinking of the embossed, hardenable embossing mass 7″ takes place again by means of UV light 10. According to the invention, multiple curing is also possible, in which a first curing is carried out locally for each individual embossing step and, after completion of the step-and-repeat method, a further curing of the entire substrate 1″ takes place, for example in a dedicated module.

[0172] The process shown in Figures 4a to 4d can be continued again and again until the desired surface of the substrate 1'' is embossed. The structure stamp 2' in this embodiment allows embossing without external force influences after contact with the embossing mass 7'' provided on the substrate 1''. The structure stamp has means for moving, in particular parallel to the substrate surface, and a lifting system (not shown) for access along the Z direction and for demolding. The high precision of the travel table of the step-and-repeat device allows seamless embossing with the structure stamp 2' over the entire area of ​​the substrate 1''. Alignment adjustments with respect to previously embossed structures, in particular overlapping structures, for example at the edges of previously embossed structure sections, are possible according to the invention. The use of endless substrates in the step-and-repeat method is also possible. In this case, the endless substrate is in particular a substrate stored in a first roll, the length of which is many times greater than its width. In particular the endless substrate is a film.

[0173] By repeated, side-by-side embossing with the structure stamp 2', for example lens arrays, in particular microlens arrays and / or nanolens arrays, are produced.

[0174] No additional external pressure is necessary for successful embossing according to the invention. The stamp receiving device 5' according to the invention ensures that the spacing H is precisely aligned to the precisely defined final spacing H' at a predetermined position. E to the substrate 1'', so that the imprint process can be started without applying any additional external compression force. E is in particular less than 100 μm, preferably less than 10 μm, most preferably less than 500 nm, most preferably less than 100 nm. Due to the action of capillary forces, the thin and flexible substrate 1″ is conformally attracted to the structure stamp 2′. The flexibility of the substrate 1″ allows it to deform and adapt to the structure stamp 2′. This allows a uniform contact during embossing. [Explanation of symbols]

[0175] 1,1',1'' board, product board 1i Board after embossing 2,2' Structural stamp 3,3' embossed structure 4 Stamp carrier substrate or backplate for stabilization 5,5' Stamp receiving device 6. Board receiving device 7,7',7'' embossed mass 8,8' Vacuum track installed in stamp receiving device 9,9' Vacuum track provided in substrate receiving device 10 Radiation source 11,11' Embossed and hardened embossed mass 12 Nozzles 13 Metering device H interval H E ,H' E Last Interval

Claims

1. A method for producing microstructures and / or nanostructures, comprising at least: a) fixing a substrate (1, 1', 1'') having an embossed mass (7, 7', 7'') on a substrate receiving device (6); b) bringing a structure stamp (2, 2') into contact with said embossing mass (7, 7', 7''); c) at least partially releasing said clamping of said substrates (1, 1', 1''); d) hardening the embossed mass (7, 7', 7''); f) releasing the embossed mass (7, 7', 7'') from the structure stamp (2, 2'); The steps are as described above, After said at least partial release of said fixation of said substrate, an at least partial detachment of said substrate (1, 1', 1'') from said substrate receiving device (6) is performed by a relative movement between said substrate receiving device (6) and said substrate (1, 1', 1'') and / or by a relative movement between said substrate receiving device (6) and a stamp receiving device (5, 5') and / or by capillary forces, structuring said embossed mass (7, 7', 7'') without pressure and / or without crimping, Fixing the substrate (1, 1', 1'') with the embossed mass (7, 7', 7'') on the substrate receiving device (6) by at least one controllable fixing element (9, 9') arranged in the substrate receiving device (6) and releasing said fixing by at least one controllable fixing element (9, 9'), A method, comprising: controlling the fixing of the substrate (1,1',1'') and the at least partial releasing of the fixing of the substrate (1,1',1'') by controlling at least one controllable fixing element (9,9'), and wherein the structuring of the embossed mass (7,7',7'') and / or the releasing or peeling off of the substrate (1,1',1'') is performed at a predefined time after the contact of the structure stamp (2,2') with the embossed mass (7,7',7'').

2. The method according to claim 1 , wherein said substrate (1, 1', 1'') is flexible and thereby at least partially conformally adapts to said structure stamp (2, 2') after said at least partial releasing of said fixation.

3. 3. The method according to claim 1 or 2, wherein the structure stamp (2, 2') is shaped in such a way that after the at least partial release of the fixation, the embossing mass (7, 7', 7'') and / or the substrate (1, 1', 1'') conformally adapts to the structure stamp (2, 2') without external pressure.

4. 4. The method according to claim 1, further comprising holding the substrate (1, 1', 1'') by the embossing mass (7, 7', 7'') after the contacting and / or after the at least partial releasing of the fixation.

5. 5. The method according to claim 1 , wherein the microstructures and / or the nanostructures are produced in multiple layers, one on top of the other, and / or next to each other in a step-and-repeat process.

6. Method according to at least one of the claims 1 to 5, wherein the thickness of the substrate (1, 1', 1'') is between 1 μm and 2000 μm.

7. 7. The method according to claim 1, wherein the structure stamp (2, 2') has an embossed structure (3, 3') and / or is coated with an embossed structure (3, 3').

8. An apparatus for producing microstructures and / or nanostructures by the method of claim 1, comprising a control unit configured to carry out the method of claim 1, - the substrate (1, 1', 1'') with the embossed mass (7, 7', 7'') can be fixed on a substrate receiving device (6), - the structure stamp (2, 2') is capable of contacting said embossing mass (7, 7', 7''); said fixing of said substrate (1, 1', 1'') is at least partially releasable, said embossing mass (7, 7', 7'') is curable, - said embossing mass (7, 7', 7'') is releasable from said structure stamp (2, 2'); Device.

9. One or more sensors that measure pressure, distance and / or temperature; and / or one or more actuators for adjusting the position of the stamp receiving device (5, 5') and / or the substrate receiving device (6), and Control unit, Equipped with said control unit controls at least one of said fixing elements (9, 9') and / or at least one of said actuators so that a relative movement of said structure stamp (2, 2') with respect to said substrate (1, 1', 1'') with said embossing mass (7, 7', 7'') is possible such that contact is possible, 9. The apparatus of claim 8.

Images