Conveyor passage unit

Abstract

To prevent dust to adhere to articles moving in a transport passage.SOLUTION: A transport aisle unit that allows the transport of an article between a first carry-in / out port formed in a first device isolated from the outside air and a second carry-in / out port formed at a position facing the first carry-in / out port in a second device isolated from the outside air includes a first aisle portion including a first base connected to the first device around the first carry-in port and a first tubular portion having one end connected to the first base, and a second aisle portion including a second base connected to the second device around the second carry-in port and a second tubular portion having one end connected to the second base, and the other end of the first tubular portion is formed larger than the other end of the second tubular portion, and can be accommodated with a gap so as to cover the second tubular portion from the outside.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a transport passage unit that connects the entrances of two devices, each of which has an entrance for transporting articles, and allows articles to be transported between the entrances. [Background technology]

[0002] In the manufacturing process of device chips used in electronic devices such as mobile phones and personal computers, first, a plurality of planned dividing lines that intersect with each other are set on the surface of a wafer made of a material such as a semiconductor. Then, devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in each area defined by the planned dividing lines. The wafer is then thinned to a predetermined thickness, and then divided along the planned dividing lines to form device chips.

[0003] Wafer thinning is performed by grinding the wafer from the backside using a grinding device. Grinding marks remain on the backside of the ground wafer, which can reduce the wafer's flexural strength, so the ground wafer is sometimes plasma-treated in a plasma etching device (see Patent Document 1). Plasma treatment on the backside of the wafer can solve the problem of reduced flexural strength. In addition, the gettering effect on the backside, which prevents impurity ions from entering the wafer from the outside, is also enhanced. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-73592 Summary of the Invention [Problem to be solved by the invention]

[0005] Grinding machines and plasma etching machines have internal processing spaces that are isolated from the outside air. When a wafer is transported from the grinding machine to the plasma etching machine, it is exposed to the outside air. This can cause dust and dirt floating in the outside air to adhere to the wafer, preventing the plasma etching machine from performing the planned plasma processing on the backside of the wafer. This type of problem can occur between machines other than grinding machines and plasma etching machines.

[0006] Therefore, it is conceivable to provide loading / unloading entrances at corresponding positions on the outer peripheries of the two devices, align the loading / unloading entrances facing each other, and install the two devices in a factory etc. so that the distance between them is as small as possible. However, it is not possible to reduce the distance between the two devices to zero, and a gap is inevitably formed between the two devices, which allows dust and the like contained in the outside air to enter, making it impossible to reduce the amount of dust and the like adhering to transported articles such as wafers to zero.

[0007] The present invention has been made in consideration of such problems, and its purpose is to provide a conveying passage unit that connects the entrances and exits of two devices, each of which has an entrance and exit for items, and that can prevent dust and the like contained in the outside air from adhering to the items being conveyed. [Means for solving the problem]

[0008] According to one aspect of the present invention, there is provided a transport passage unit that allows the transport of articles between a first loading / unloading opening formed in a first device, the interior of which is isolated from outside air, and a second loading / unloading opening formed in a second device, the interior of which is isolated from outside air, at a position that allows the transport of articles to be opposed to the first loading / unloading opening, the transport passage unit comprising: a first passage portion including a first base portion connected to the first device around the first loading / unloading opening and a first tubular portion having one end connected to the first base; and a second passage portion including a second base portion connected to the second device around the second loading / unloading opening and a second tubular portion having one end connected to the second base, the other end of the first tubular portion being formed larger than the other end of the second tubular portion and configured to cover the second tubular portion from the outside. Airflow to the outside is formedA conveying passage unit is provided that can be accommodated with a gap.

[0009] Preferably, the first device and the second device are used with their internal air pressures set to positive pressures. More preferably, the first passage portion and the second passage portion are not physically connected, and even more preferably, the average distance between the outer peripheral surface of the second cylindrical portion and the inner peripheral surface of the first cylindrical portion is 5 mm to 15 mm. [Effects of the Invention]

[0010] A transport passage unit according to one aspect of the present invention includes a first passage portion connected to a first loading / unloading port of a first device and a second passage portion connected to a second loading / unloading port of a second device. Each of the passage portions includes a cylindrical portion, and the other end of one of the cylindrical portions is larger than the other end of the other cylindrical portion. When the transport passage unit is in use, the other cylindrical portion is accommodated inside the first cylindrical portion with a predetermined gap therebetween. At this time, a transport passage surrounded by the cylindrical portions is formed between the two devices.

[0011] Therefore, the articles transported through the transport path formed by the transport path unit are not exposed to the outside air. Furthermore, for example, if the insides of both devices are kept under positive pressure, gas is constantly being ejected from the gap between the two cylindrical portions, so dust and the like do not enter the transport path from the outside. Therefore, when objects such as wafers are transported through the transport path, dust and the like do not adhere to the wafers.

[0012] Therefore, the present invention provides a transport passage unit that connects the entrances and exits of two devices each having an entrance and exit for articles, and can prevent dust and the like contained in the outside air from adhering to the articles being transported. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 2 is a cross-sectional view schematically showing a conveying passage unit disposed between two devices. [Figure 2] FIG. 2 is a perspective view schematically illustrating a conveying passage unit. DETAILED DESCRIPTION OF THE INVENTION

[0014] An embodiment of the present invention will be described with reference to the accompanying drawings. First, an apparatus to which a passage portion of a conveying passage unit according to the present embodiment is fixed and a workpiece to be processed by the apparatus will be described.

[0015] The workpiece is, for example, a substantially circular substrate made of silicon, SiC (silicon carbide), or other semiconductor materials, or sapphire, glass, quartz, or other materials. A plurality of devices, such as ICs and LSIs, are formed on the surface of the workpiece. The workpiece is thinned by grinding from the backside, subjected to plasma processing, and divided into individual device chips.

[0016] In the manufacturing process of device chips, various types of equipment are used, such as a grinding device for grinding workpieces, a polishing device for polishing, a cutting device for cutting and dividing workpieces, a cleaning device for cleaning workpieces, a plasma etching device for plasma processing of workpieces, and a tape mounter for applying protective tape to workpieces.

[0017] The device chip manufacturing process is primarily carried out in clean rooms, where each piece of equipment is installed. Workpieces and other objects are transported between pieces of equipment within the clean room. Air that has been filtered to remove dust and other particles is sent into the clean room, and while the air inside the clean room is relatively clean, there is still a small amount of dust floating around.

[0018] Therefore, dust particles in the air may adhere to the workpiece while it is being transported between devices. If dust particles adhere to the workpiece, it may not be possible to perform the specified processing in the area of ​​the workpiece where the dust particles adhere. For example, when a workpiece whose backside has been ground by a grinding device is subjected to plasma processing in a plasma etching device, if dust particles adhere to the backside of the workpiece, the specified plasma processing cannot be performed in that area.

[0019] Therefore, in order to prevent dust and the like from adhering to transported objects such as workpieces, it is conceivable to shorten the transport distance between the devices as much as possible and thereby minimize the time that the objects are exposed to the air in the clean room. For example, it is conceivable to install a grinding device and a plasma etching device adjacent to each other with their respective entrances facing each other, and have the transport unit of one device transport the workpiece to the other device.

[0020] However, since the distance between the devices cannot be reduced to zero and the articles are exposed to the air outside the devices while moving between the devices, it is not possible to completely prevent the adhesion of dust and the like to the articles during transport. Therefore, the transport passage unit according to this embodiment covers the transport path for the workpieces between the devices so that the transported articles do not come into contact with the air outside the devices.

[0021] 1 is a cross-sectional view schematically showing a first device 2a, a second device 2b, and a conveying passage unit 1. The following describes an example in which an article such as a workpiece is conveyed from the first device 2a to the second device 2b, but an article may also be conveyed from the second device 2b to the first device 2a.

[0022] In the first device 2a, an internal space 6a surrounded by a housing 4a is sealed off from the outside air. In the second device 2b, an internal space 6b surrounded by a housing 4b is sealed off from the outside air. A first loading / unloading opening 8a is formed in a side surface of the housing 4a of the first device 2a, and a second loading / unloading opening 8b is formed in a side surface of the housing 4b of the second device 2b at a position facing the first loading / unloading opening 8a.

[0023] For example, a transport unit 10 is provided in the internal space 6a of the first apparatus 2a to transport an article from the first apparatus 2a to the second apparatus 2b. The transport unit 10 includes a plurality of arms rotatably connected to one another, and the arms are rotated relative to one another to access the internal space 6b of the second apparatus 2b from the internal space 6a of the first apparatus 2a.

[0024] The transport unit 10 comprises a rotatable shaft 12 extending in the height direction, an arm 14 having one end fixed to the upper end of the shaft 12, a connecting shaft 16 having a lower end rotatably connected to the other end of the arm 14, and an arm 18 having one end fixed to the upper end of the connecting shaft 16. The transport unit 10 further comprises a connecting shaft 20 having a lower end rotatably connected to the other end of the arm 18, an arm 22 having one end fixed to the upper end of the connecting shaft 20, and a connecting shaft 24 having a lower end rotatably connected to the other end of the arm 22.

[0025] A support arm fixing portion 26 for fixing a support arm 28 that supports an article such as a workpiece is connected to the upper end of the connecting shaft 24. The transport unit 10 can transport an article by rotating and moving each arm 14, 18, 22 with the article supported on the support arm 28. For example, a mounting portion 30 on which an article is placed is provided in the internal space 6b of the second device 2b, and the transport unit 10 transports the article to the mounting portion 30.

[0026] The conveying passage unit 1 according to this embodiment is used by being disposed so as to cover the conveying path of articles from the first device 2a to the second device 2b. FIG. 1 includes a cross-sectional view that schematically shows the conveying passage unit 1. FIG. 2 is a perspective view that schematically shows the conveying passage unit 1. As shown in FIGS. 1 and 2, the conveying passage unit 1 includes two separate structures: a first passage section 3a that is fixed to the first device 2a when used, and a second passage section 3b that is fixed to the second device 2b when used.

[0027] The first passage 3a includes a first base 5a connected to the first device 2a around the first loading / unloading port 8a, and a first tubular portion 7a having one end connected to the first base 5a. The first base 5a is formed, for example, in the shape of a flat plate that is larger than the first loading / unloading port 8a, and has a through hole shaped to correspond to the first loading / unloading port 8a.

[0028] The first base 5a is formed with a plurality of fixing holes 15a penetrating the first base 5a, and a plurality of fixing holes (not shown) are formed around the first loading / unloading opening 8a of the housing 4a of the first device in an arrangement corresponding to the arrangement of the fixing holes 15a of the first base 5a. When fixing devices 9a such as bolts are passed through the fixing holes 15a and tightened into the respective fixing holes provided in the housing 4a, the first passage 3a is fixed to the first device 2a.

[0029] The internal cross-sectional shape of the first cylindrical portion 7a of the first passage portion 3a is, for example, a shape corresponding to the first loading / unloading port 8a. The length of the first cylindrical portion 7a is shorter than the distance between the first device 2a and the second device 2b.

[0030] The second passage 3b includes a second base 5b connected to the second device 2b around the second loading / unloading port 8b, and a second tubular portion 7b having one end connected to the second base 5b. The second base 5b is formed, for example, in the shape of a flat plate that is larger than the second loading / unloading port 8b, and has a through hole shaped to correspond to the second loading / unloading port 8b.

[0031] The second base 5b is formed with a plurality of fixing holes 15b penetrating the second base 5b, and a plurality of fixing holes (not shown) are formed around the second loading / unloading opening 8b of the housing 4b of the second device in an arrangement corresponding to the arrangement of the fixing holes 15b of the second base 5b. When fixing devices 9b such as bolts are passed through the fixing holes 15b and tightened into the respective fixing holes provided in the housing 4b, the second passage 3b is fixed to the second device 2b.

[0032] The internal cross-sectional shape of the second cylindrical portion 7b of the second passage portion 3b is, for example, a shape corresponding to the second loading / unloading port 8b. The length of the second cylindrical portion 7b is shorter than the distance between the first device 2a and the second device 2b. However, the sum of the length of the first cylindrical portion 7a of the first passage portion 3a and the length of the second cylindrical portion 7b of the second passage portion 3b is longer than the distance between the first device 2a and the second device 2b.

[0033] An O-ring receiving groove 17 may be formed on the contact surface of the second passage portion 3b with the housing 4b of the second base portion 5b so as to surround the through-hole formed in the second base portion 5b. When an annular O-ring made of an elastic member is received in the O-ring receiving groove 17 and the second passage portion 3b is fixed to the housing 4b of the second device 2b, the O-ring seals the gap between the housing 4b and the second base portion 5b, improving airtightness.

[0034] In order to seal the gap between the housing 4b and the second base 5b, it is preferable that the diameter of the cross-sectional shape of the O-ring be larger than the depth of the O-ring receiving groove 17. An O-ring receiving groove (not shown) may also be formed in the first base 5a of the first passage portion 3a on the surface that comes into contact with the housing 4a.

[0035] The other end 11a of the first cylindrical portion 7a of the first passage portion 3a, which is not connected to the first base portion 5a, is formed larger than the other end 11b of the second cylindrical portion 7b of the second passage portion 3b, which is not connected to the second base portion 5b. The first cylindrical portion 7a is shaped so that it can accommodate the second cylindrical portion 7b with a gap 13 so as to cover it from the outside. The size relationship between the first cylindrical portion 7a and the second cylindrical portion 7b may be reversed.

[0036] The first passage portion 3a and the second passage portion 3b may be made of the same material as the housings 4a, 4b of the first device 2a and the second device 2b, or may be made of a different material, such as stainless steel or a resin material.

[0037] Next, a usage mode of the transport passage unit 1 according to this embodiment will be described. Fig. 1 shows a schematic cross-sectional view of the transport passage unit 1 disposed between a first device 2a and a second device 2b. First, a method for disposing the transport passage unit 1 will be described.

[0038] First, before the first apparatus 2a and the second apparatus 2b are installed at a predetermined installation location such as a device chip manufacturing factory, the first base 5a of the first passage 3a is fixed to the first loading / unloading entrance 8a on the outside of the housing 4a of the first apparatus 2a with a fixture 9a. Also, the second base 5b of the second passage 3b is fixed to the second loading / unloading entrance 8b on the outside of the housing 4b of the second apparatus 2b with a fixture 9b.

[0039] Thereafter, the first device 2a and the second device 2b are fixed in place while the second cylindrical portion 7b of the second passage portion 3b is accommodated in the first cylindrical portion 7a of the first passage portion 3a, and the first loading / unloading opening 8a of the first device 2a and the second loading / unloading opening 8b of the second device 2b are then connected by the transport passage unit 1 according to this embodiment.

[0040] The method of arranging the transfer passage unit 1 according to this embodiment is not limited to this. For example, the transfer passage unit 1 is inserted into a gap between a first apparatus 2a and a second apparatus 2b, which are fixed at predetermined positions in a device chip manufacturing factory or the like. At this time, the second cylindrical portion 7b of the second passage portion 3b is accommodated in the first cylindrical portion 7a of the first passage portion 3a, and the first base portion 5a of the first passage portion 3a is made to face the housing 4a, and the second base portion 5b of the second passage portion 3b is made to face the housing 4b.

[0041] Next, the transport passage unit 1 is moved between the first transport entrance 8a and the second transport entrance 8b, and the first base 5a is fixed to the housing 4a with the fixing device 9a, and the second base 5b is fixed to the housing 4b with the fixing device 9b. As described above, there is no particular limitation on the method of arranging the transport passage unit 1 according to this embodiment.

[0042] When the conveying passage unit 1 is disposed at a predetermined position between the first device 2a and the second device 2b, a gap 13 of a predetermined size is formed between the outer peripheral surface of the second cylindrical portion 7b of the second passage portion 3b and the inner peripheral surface of the first cylindrical portion 7a of the first passage portion 3a. As will be described later, the gap 13 is preferably large enough to allow an airflow to be formed from the inside to the outside of the conveying passage unit 1. For example, the average distance between the outer peripheral surface of the second cylindrical portion 7b and the inner peripheral surface of the first cylindrical portion 7a may be about 5 mm to 15 mm.

[0043] Next, we will explain the procedure for transporting articles in the conveying passage unit 1 as a usage mode of the conveying passage unit 1. Here, we will explain the example of transporting articles from the first device 2a to the second device 2b, but in the conveying passage unit 1, articles may also be transported from the second device 2b to the first device 2a.

[0044] First, an article is placed on the support arm 28 of the transport unit 10, and the arms 14, 18, and 22 are rotated to move the support arm 28 into the internal space 6b of the second device 2b. Then, the article is transferred from the support arm 28 to the placement section 30, and the arms 14, 18, and 22 are rotated to return the support arm 28 to the internal space 6a of the first device 2a.

[0045] In this case, it is preferable to set the internal space 6a of the first device 2a and the internal space 6b of the second device 2b to a positive pressure. That is, it is preferable to set the air pressure in the internal space 6a higher than the external air pressure, and to set the air pressure in the internal space 6b higher than the external air pressure. For example, the housing 4a of the first device 2a and the housing 4b of the second device 2b each have an external air inlet (not shown) filled with a filter and a fan disposed at the external air inlet. Then, it is preferable to introduce external air into the internal space 6a and the internal space 6b using the fan to increase the pressure.

[0046] For example, the internal air pressure of the first device 2a and the second device 2b may be set to a positive pressure that is higher than the external air pressure by about 1 Pa to 10 Pa. When the internal air pressure of the first device 2a and the second device 2b is set to a positive pressure, an airflow is generated from the internal spaces 6a, 6b of the first device 2a and the second device 2a to the conveying passage unit 1, and an airflow is generated in the gap 13 between the first cylindrical portion 7a and the second cylindrical portion 7b to flow to the outside.

[0047] When an airflow is generated from the gap 13 to the outside, it is possible to prevent dust and dirt floating in the outside air from entering the inside of the conveying passage unit 1 through the gap 13. Therefore, dust and the like do not adhere to articles moving through the conveying passage formed by the conveying passage unit 1. As described above, by using the conveying passage unit 1 according to this embodiment, it is possible to prevent dust and the like from adhering to articles being conveyed between devices.

[0048] Since the first passage portion 3a and the second passage portion 3b are not physically connected, vibrations generated in the first device 2a and the second device 2b do not affect the other. Furthermore, the tilts of the first device 2a and the second device 2b are independently adjusted so that appropriate processing can be performed. Since the first passage portion 3a and the second passage portion 3b are not physically connected, adjustment of the tilts of both devices 2a and 2b connected by the conveying passage unit 1 according to this embodiment is permitted.

[0049] The present invention is not limited to the above-described embodiment and can be implemented with various modifications. In the above-described embodiment, the first passage portion 3a and the second passage portion 3b are physically separated from each other, but one aspect of the present invention is not limited to this. In other words, the first passage portion 3a and the second passage portion 3b may be in physical contact with each other.

[0050] The structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0051] 1 Conveyor passage unit 3a,3b Passage section 5a,5b base 7a,7b Cylindrical part 9a,9b Fixtures 11a,11b end 13 Gap 15a,15b fixing hole 17 O-ring receiving groove 2a,2b equipment 4a, 4b housing 6a,6b Internal space 8a,8b Loading / unloading entrance 10 Transport unit 12 Shaft 14,18,22 Arm 16,20,24 Connecting shaft 26 Support arm fixing part 28 Support Arm 30 Placement section

Claims

1. A conveying passage unit that allows conveying of an article between a first carry-in / out opening formed in a first device, the inside of which is isolated from outside air, and a second carry-in / out opening formed in a position that allows it to face the first carry-in / out opening of a second device, the inside of which is isolated from outside air, a first passage portion including a first base portion connected to the first device around the first loading / unloading opening and a first tubular portion having one end connected to the first base; a second passage portion including a second base portion connected to the second device around the second loading / unloading opening and a second tubular portion having one end connected to the second base portion; The other end of the first cylindrical portion is formed larger than the other end of the second cylindrical portion, and the second cylindrical portion can be accommodated with a gap that allows an airflow to be formed to the outside so as to cover the second cylindrical portion from the outside.

2. 2. The conveying passage unit according to claim 1, wherein the first device and the second device are used in a state in which their internal air pressures are set to positive pressures.

3. 3. The conveying passage unit according to claim 1, wherein the first passage portion and the second passage portion are not physically connected to each other.

4. 4. The conveying passage unit according to claim 1, wherein an average distance between an outer circumferential surface of the second cylindrical portion and an inner circumferential surface of the first cylindrical portion is 5 mm to 15 mm.

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