Plasma processing method and plasma processing apparatus

Abstract

To suppress the reduction in the attraction force of an electrostatic chuck due to migration.SOLUTION: A plasma processing method comprises the steps of: (a) placing a substrate in an electrostatic chuck at the first temperature arranged in a plasma processing chamber; (b) making the electrostatic chuck electrostatically-attract the substrate; (c) starting supply of the heat transfer gas to a gap between the substrate and the electrostatic chuck; (d) detecting the flow amount of the heat transfer gas or the pressure between the substrate and the electrostatic chuck; (e) determining whether the flow amount or the pressure exceeds a prescribed threshold; (f) raising the temperature of the electrostatic chuck to the second temperature higher than the first temperature on the basis of the determination result; and (g) generating plasma in the plasma processing chamber.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present disclosure relates to a plasma processing method and a plasma processing apparatus. [Background technology]

[0002] In a high-temperature electrostatic chuck environment, if the plasma processing period is extended, migration of electric charge into the dielectric of the dielectric film that constitutes the electrostatic chuck occurs, resulting in a decrease in the adhesive force of the electrostatic chuck (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-206935 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique capable of suppressing a decrease in the adsorptive force of an electrostatic chuck due to migration. [Means for solving the problem]

[0005] According to one aspect of the present disclosure, there is provided a plasma processing method comprising: (a) placing a substrate on an electrostatic chuck at a first temperature disposed in a plasma processing chamber; (b) electrostatically attracting the substrate to the electrostatic chuck; (c) starting a supply of a heat transfer gas between the substrate and the electrostatic chuck; (d) detecting a flow rate of the heat transfer gas or a pressure between the substrate and the electrostatic chuck; (e) determining whether the flow rate or the pressure exceeds a predetermined threshold; (f) raising the temperature of the electrostatic chuck to a second temperature higher than the first temperature based on a result of the determination; and (g) generating a plasma in the plasma processing chamber. Effect of the Invention

[0006] According to one aspect, it is possible to suppress a decrease in the adsorptive force of an electrostatic chuck due to migration. [Brief description of the drawings]

[0007] [Figure 1] 1 is a diagram showing an example of a plasma processing system according to an embodiment; [Diagram 2] 1 is a schematic cross-sectional view showing an example of a plasma processing apparatus according to an embodiment; [Diagram 3] FIG. 2 is a diagram showing an example of a flow monitor according to an embodiment. [Figure 4] 5A and 5B are diagrams for explaining a decrease in the adsorption force of an electrostatic chuck due to migration. [Diagram 5] FIG. 1 is a diagram for explaining the movement of charge due to migration. [Figure 6] 3 is a flowchart showing an example of a plasma processing method according to the first embodiment. [Figure 7] 3 is a time chart showing an example of a plasma processing method according to the first embodiment. [Figure 8] 11A and 11B are diagrams showing an example of the results of a leak check of He gas in the plasma processing method. [Figure 9] 10 is a flowchart showing an example of a plasma processing method according to a second embodiment. [Figure 10] 10 is a time chart showing an example of a plasma processing method according to a second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and duplicated descriptions may be omitted.

[0009] [Plasma processing system] In one embodiment, the plasma processing system shown in FIG. 1 includes a plasma processing apparatus 1 and a control unit 2. The plasma processing apparatus 1 includes a plasma processing chamber 10, a substrate support unit 11, and a plasma generation unit 12. The plasma processing chamber 10 has a plasma processing space. The plasma processing chamber 10 also has at least one gas supply port for supplying at least one processing gas to the plasma processing space, and at least one gas exhaust port for exhausting gas from the plasma processing space. The gas supply port is connected to a gas supply unit 20, which will be described later, and the gas exhaust port is connected to an exhaust system 40, which will be described later. The substrate support unit 11 is disposed in the plasma processing space, and has a substrate support surface for supporting a substrate.

[0010] The plasma generating unit 12 is configured to generate plasma from at least one processing gas supplied into the plasma processing space. The plasma formed in the plasma processing space may be a capacitively coupled plasma (CCP), an inductively coupled plasma (ICP), an electron-cyclotron-resonance plasma (ECR plasma), a helicon wave plasma (HWP), a surface wave plasma (SWP), or the like. Also, various types of plasma generating units may be used, including an alternating current (AC) plasma generating unit and a direct current (DC) plasma generating unit. In one embodiment, the AC signal (AC power) used in the AC plasma generating unit has a frequency in the range of 100 kHz to 10 GHz. Thus, the AC signal includes a radio frequency (RF) signal and a microwave signal. In one embodiment, the RF signal has a frequency in the range of 200 kHz to 150 MHz.

[0011] The control unit 2 processes computer-executable instructions that cause the plasma processing apparatus 1 to perform various steps described in this disclosure. The control unit 2 may be configured to control each element of the plasma processing apparatus 1 to perform various steps described herein. In one embodiment, a part or all of the control unit 2 may be included in the plasma processing apparatus 1. The control unit 2 may include, for example, a computer 2a. The computer 2a may include, for example, a processing unit (CPU: Central Processing Unit) 2a1, a storage unit 2a2, and a communication interface 2a3. The processing unit 2a1 may be configured to perform various control operations based on programs and recipes stored in the storage unit 2a2. The storage unit 2a2 may include a random access memory (RAM), a read only memory (ROM), a hard disk drive (HDD), a solid state drive (SSD), or a combination thereof. The communication interface 2a3 may communicate with the plasma processing apparatus 1 via a communication line such as a local area network (LAN).

[0012] Next, a configuration example of a capacitively coupled plasma processing apparatus 1 will be described as an example of the plasma processing apparatus 1 with reference to FIG. 2. The plasma processing apparatus 1 includes a plasma processing chamber 10, a gas supply unit 20, a power supply 30, and an exhaust system 40. The plasma processing apparatus 1 also includes a substrate support 11 and a gas introduction unit. The gas introduction unit is configured to introduce at least one processing gas into the plasma processing chamber 10. The gas introduction unit includes a shower head 13. The substrate support 11 is disposed in the plasma processing chamber 10. The shower head 13 is disposed above the substrate support 11. In one embodiment, the shower head 13 constitutes at least a part of the ceiling of the plasma processing chamber 10. The plasma processing chamber 10 has a plasma processing space 10s defined by the shower head 13, a sidewall 10a of the plasma processing chamber 10, and the substrate support 11. The sidewall 10a is grounded. The shower head 13 and the substrate support 11 are electrically insulated from the plasma processing chamber 10 housing.

[0013] The substrate support 11 includes a main body 111 and a ring assembly 112. The main body 111 has a central region (substrate support surface) 111a for supporting a substrate (wafer) W, and an annular region (ring support surface) 111b for supporting the ring assembly 112. The annular region 111b of the main body 111 surrounds the central region 111a of the main body 111 in a plan view. The substrate W is disposed on the central region 111a of the main body 111, and the ring assembly 112 is disposed on the annular region 111b of the main body 111 so as to surround the substrate W on the central region 111a of the main body 111. In one embodiment, the main body 111 includes a base and an electrostatic chuck. The base includes a conductive member. The conductive member of the base functions as a lower electrode. The electrostatic chuck is disposed on the base. The upper surface of the electrostatic chuck has a substrate support surface 111a. The ring assembly 112 includes one or more annular members. At least one of the one or more annular members is an edge ring. Although not shown, the substrate support 11 may include a temperature adjustment module configured to adjust at least one of the electrostatic chuck, the ring assembly 112, and the substrate to a target temperature. The temperature adjustment module may include a heater, a heat transfer medium, a flow path, or a combination thereof. A heat transfer fluid such as brine or gas flows through the flow path. The substrate support 11 may also include a heat transfer gas supply unit configured to supply a heat transfer gas between the back surface of the substrate W and the substrate support surface 111a.

[0014] The shower head 13 is configured to introduce at least one processing gas from the gas supply unit 20 into the plasma processing space 10s. The shower head 13 has at least one gas supply port 13a, at least one gas diffusion chamber 13b, and multiple gas inlets 13c. The processing gas supplied to the gas supply port 13a passes through the gas diffusion chamber 13b and is introduced into the plasma processing space 10s from the multiple gas inlets 13c. The shower head 13 also includes a conductive member. The conductive member of the shower head 13 functions as an upper electrode. In addition to the shower head 13, the gas introduction unit may include one or more side gas injectors (SGIs) attached to one or more openings formed in the side wall 10a.

[0015] The gas supply 20 may include at least one gas source 21 and at least one flow controller 22. In one embodiment, the gas supply 20 is configured to supply at least one process gas from a respective gas source 21 through a respective flow controller 22 to the showerhead 13. Each flow controller 22 may include, for example, a mass flow controller or a pressure-controlled flow controller. Additionally, the gas supply 20 may include at least one flow modulation device to modulate or pulse a flow rate of the at least one process gas.

[0016] The power source 30 includes an RF power source 31 coupled to the plasma processing chamber 10 via at least one impedance matching circuit. The RF power source 31 is configured to supply at least one RF signal (RF power), such as a source RF signal and a bias RF signal, to a conductive member of the substrate support 11 and / or a conductive member of the showerhead 13. This causes a plasma to be formed from at least one processing gas supplied to the plasma processing space 10s. Thus, the RF power source 31 can function as at least a part of the plasma generating unit 12. In addition, by supplying a bias RF signal to the conductive member of the substrate support 11, a bias potential is generated on the substrate W, and ion components in the formed plasma can be attracted to the substrate W.

[0017] In one embodiment, the RF power supply 31 includes a first RF generating unit 31a and a second RF generating unit 31b. The first RF generating unit 31a is coupled to the conductive member of the substrate support 11 and / or the conductive member of the shower head 13 via at least one impedance matching circuit, and is configured to generate a source RF signal (source RF power) for plasma generation. In one embodiment, the source RF signal has a frequency in the range of 13 MHz to 150 MHz. In one embodiment, the first RF generating unit 31a may be configured to generate a plurality of source RF signals having different frequencies. The generated one or more source RF signals are supplied to the conductive member of the substrate support 11 and / or the conductive member of the shower head 13. The second RF generating unit 31b is coupled to the conductive member of the substrate support 11 via at least one impedance matching circuit, and is configured to generate a bias RF signal (bias RF power). In one embodiment, the bias RF signal has a lower frequency than the source RF signal. In one embodiment, the bias RF signal has a frequency in the range of 400 kHz to 13.56 MHz. In one embodiment, the second RF generator 31b may be configured to generate multiple bias RF signals having different frequencies. The generated bias RF signal or signals are provided to the conductive members of the substrate support 11. Also, in various embodiments, at least one of the source RF signal and the bias RF signal may be pulsed.

[0018] The power supply 30 may also include a DC power supply 32 coupled to the plasma processing chamber 10. The DC power supply 32 includes a first DC generator 32a and a second DC generator 32b. In one embodiment, the first DC generator 32a is connected to a conductive member of the substrate support 11 and configured to generate a first DC signal. The generated first DC signal is applied to the conductive member of the substrate support 11. In this embodiment, the first DC signal is applied to the chucking electrode 113a in the electrostatic chuck 113. In one embodiment, the second DC generator 32b is connected to a conductive member of the showerhead 13 and configured to generate a second DC signal. The generated second DC signal is applied to the conductive member of the showerhead 13. In various embodiments, the first and second DC signals may be pulsed. The first and second DC generating units 32a, 32b may be provided in addition to the RF power supply 31, or the first DC generating unit 32a may be provided in place of the second RF generating unit 31b.

[0019] The exhaust system 40 may be connected to, for example, a gas exhaust port 10e provided at the bottom of the plasma processing chamber 10. The exhaust system 40 may include a pressure regulating valve and a vacuum pump. The pressure in the plasma processing space 10s is adjusted by the pressure regulating valve. The vacuum pump may include a turbomolecular pump, a dry pump, or a combination thereof.

[0020] [Heat transfer gas flow path] An adsorption electrode 113a is provided on the electrostatic chuck 113. The adsorption electrode 113a is connected to a first DC generating unit 32a, and a first DC signal (direct current voltage) is applied to the adsorption electrode 113a from the first DC generating unit 32a. As a result, the substrate W is adsorbed and held on the electrostatic chuck 113.

[0021] The substrate support 11 is an example of a member having an electrode to which a desired high frequency power is applied. However, the substrate support 11 does not necessarily have to have the electrostatic chuck 113 and the chucking electrode 113a. As the electrode of the substrate support 11, a conductive member of the base 116 to which at least one RF signal (RF power, high frequency power) is coupled from the first RF generating unit 31a and / or the second RF generating unit 31b may be used as an electrode (lower electrode).

[0022] In the present disclosure, helium (He) gas is supplied between the substrate support surface 111a of the electrostatic chuck 113 and the back surface of the substrate W as an example of a heat transfer gas. However, the heat transfer gas is not limited to helium gas, and may be other inert gases. The substrate support part 11 has a through hole 120 penetrating in the thickness direction. The through hole 120 serves as a flow path for the helium gas.

[0023] The main body 111 includes a conductive plate 110 below the base 116 and supporting the base 116. There is a gap between the lower surface of the base 116 and the upper surface of the plate 110, which serves as a gas flow path P. The through-holes 120 communicate with the gas flow path P. The gas flow path P is connected to a He gas source 119 via a He gas supply line 119a. Helium gas supplied from the He gas source 119 flows through the gas flow path P via the He gas supply line 119a, and is supplied between the substrate supporting surface 111a and the back surface of the substrate W through the through-holes 120.

[0024] [Flow monitor] Next, a He gas flow monitor according to an embodiment will be described with reference to Fig. 3. Fig. 3 is a diagram showing an example of a flow monitor device 123 according to an embodiment. The flow monitor device 123 is attached to a pressure controller 121.

[0025] A pressure valve 122, a pressure controller 121, and a flow monitor 123 are attached to the He gas supply line 119a in this order from the substrate support part 11 side. The flow rate of the He gas supplied from the He gas source 119 is controlled by the valve opening of the pressure valve 122 controlled by the pressure controller 121. The He gas, with its flow rate controlled, flows through a gas flow path P and is supplied between the substrate support surface 111a and the back surface of the substrate W. The pressure controller 121 detects the pressure between the substrate and the electrostatic chuck.

[0026] The flow rate monitor 123 detects the flow rate of the He gas flowing through the He gas supply line 119a, and thereby monitors the flow rate of the He gas supplied between the substrate support surface 111a and the rear surface of the substrate W.

[0027] The flow rate monitor device 123 performs a leak check of the He gas supplied between the substrate support surface 111a and the rear surface of the substrate W. The leak check is a process of checking whether the flow rate of the He gas supplied between the substrate support surface 111a and the rear surface of the substrate W is within an appropriate range. When the substrate W is attracted to the substrate support surface 111a with an appropriate chucking force, the He gas flows at a predetermined flow rate. However, when the chucking force of the substrate becomes weak, the He gas flows between the substrate W and the substrate support surface 111a at a rate greater than the predetermined flow rate, and the cooling performance of the substrate W by the He gas becomes unstable. Therefore, the leak check can be used to check whether the chucking force of the substrate W is appropriate. Instead of performing a leak check by detecting the flow rate of the He gas as described below, a leak check may be performed by detecting the pressure between the substrate support surface 111a and the rear surface of the substrate W.

[0028] The leak check for detecting the flow rate of He gas starts (ON) the supply of He gas from the He gas source 119, and stops (OFF) the supply of He gas after a predetermined time has elapsed. If He gas is leaking, the pressure between the substrate support surface 111a and the rear surface of the substrate W drops when the He gas is turned off, and so an even greater flow rate of He gas is supplied from the He gas source 119, which is turned on again, in an attempt to adjust the pressure. For this reason, if He gas is leaking, the flow rate of He gas detected by the flow rate monitor device 123 will be higher than when there is no He gas leak. Therefore, if the detected flow rate of He gas exceeds a preset threshold value, it can be determined that He gas is leaking.

[0029] [migration] For example, when the electrostatic chuck 113 is used at about 250° C., a defective chucking may occur. The defective chucking refers to a phenomenon in which the chucking force of the substrate W on the electrostatic chuck 113 decreases. When the electrostatic chuck 113 is used at a high temperature of 100° C. or higher, the defective chucking occurs because the volume resistivity of the ceramic plate material constituting the electrostatic chuck 113 decreases due to the increase in temperature of the electrostatic chuck 113. When the volume resistivity of the ceramic plate material decreases, electrons are more likely to move from the substrate W to the chucking electrode 113a, and the amount of charge that ensures the chucking force due to the movement of electrons decreases. Therefore, in order to suppress the decrease in the chucking force of the electrostatic chuck 113, it is important to reduce the effect of migration.

[0030] 4 and 5, migration will be described in (a) the case where a positive charge is supplied to the attraction electrode 113a and in (b) the case where a negative charge is supplied to the attraction electrode 113a. Fig. 4 is a diagram for explaining a decrease in the attraction force of the electrostatic chuck 113 due to migration. Fig. 5 is a diagram for explaining the movement of charge due to migration.

[0031] 4(a), when a positive charge is supplied to the chucking electrode 113a (HV positive chucking), the first DC signal generated by the first DC generating unit 32a applies a positive DC voltage (HV voltage) to the chucking electrode 113a. As a result, as an example, an HV voltage of 2.7 kV is supplied to the chucking electrode 113a. FIG. 5(a) shows a schematic diagram of the positive charge on the chucking electrode 113a and the negative charge on the substrate W attract each other, generating a normal chucking force.

[0032] When the time shown on the horizontal axis in Fig. 4(a) has elapsed, the surface potential of the electrostatic chuck 113 decreases, as shown by the voltage (electric potential) on the vertical axis. The reason for this is that when the electrostatic chuck 113 is at a high temperature of 100°C or higher, the volume resistivity of the ceramic plate material constituting the electrostatic chuck 113 decreases. As a result, as shown in Fig. 5(b) to Fig. 5(c) over time, electrons charged on the substrate W become more likely to move from the substrate W to the attraction electrode 113a. The attraction force of the substrate W at this time is calculated from the following formula (1).

[0033] Voltage according to the chucking force = Surface potential of the electrostatic chuck 113 - V dc (1) The adsorption force of the substrate W is determined by the potential difference between the surface potential of the electrostatic chuck 113 and the self-bias Vdc. When an RF signal (RF power) is supplied to the substrate support part 11 and plasma is generated, the substrate W is heated by heat input from the plasma, which makes migration more likely to occur. When migration occurs, electrons move from the substrate W to the adsorption electrode 113a, and the surface potential of the electrostatic chuck 113 decreases. When the surface potential of the electrostatic chuck 113 decreases, the voltage corresponding to the adsorption force decreases according to formula (1), and the adsorption force of the substrate W decreases.

[0034] (b) When a negative charge is supplied to the chuck electrode 113a (HV negative chucking), the first DC signal generated by the first DC generating unit 32a applies a negative DC voltage (HV voltage) to the chucking electrode 113a. As a result, as an example, an HV voltage of -2.0 kV is supplied to the chucking electrode 113a. When a negative DC voltage is applied to the chucking electrode 113a, electrons that the substrate W attempts to obtain from the plasma are repelled, so that migration can be suppressed. Therefore, even if time passes as shown on the horizontal axis of FIG. 4(b), as shown by the voltage (potential) on the vertical axis, the increase in the surface potential of the electrostatic chuck 113 can be slightly suppressed, and the decrease in the chucking force of the substrate W can be suppressed according to formula (1).

[0035] When a positive charge is supplied to the attraction electrode 113a in Fig. 4(a), migration is likely to occur when the electrostatic chuck 113 is at a high temperature. As a result, the attraction force of the electrostatic chuck 113 decreases and the amount of He gas leak increases. When a negative charge is supplied to the attraction electrode 113a in Fig. 4(b), migration is unlikely to occur even when the electrostatic chuck 113 is at a high temperature. As a result, the attraction force of the electrostatic chuck 113 can be maintained, and the amount of He gas leak decreases.

[0036] In the plasma processing methods according to the first and second embodiments described below, dielectric polarization occurs between the substrate W and the attraction electrode 113a without being affected by a decrease in volume resistivity due to a rise in temperature of the electrostatic chuck 113, and the effects of migration can be reduced.

[0037] First Embodiment [Plasma treatment method] First, a plasma processing method MT1 according to the first embodiment will be described with reference to Fig. 6 and Fig. 7. Fig. 6 is a flow chart showing an example of the plasma processing method MT1 according to the first embodiment. Fig. 7 is a time chart showing an example of the plasma processing method MT1 according to the first embodiment. The plasma processing method according to the first embodiment is controlled by a control unit 2.

[0038] 6 is started, the control unit 2 loads the substrate W into the plasma processing chamber 10 of the plasma processing apparatus 1 and places the substrate W on the electrostatic chuck 113 at a first temperature. The first temperature is, for example, a temperature lower than 100° C. After loading the substrate W, the control unit 2 supplies (ON) Ar gas to the plasma processing chamber 10 to stabilize the inside of the plasma processing chamber 10 (step S1). Another inert gas may be supplied instead of Ar gas.

[0039] 7, a substrate is loaded into the plasma processing chamber 10 at time t0, and Ar gas is supplied between time t0 and time t1 to stabilize the inside of the plasma processing chamber 10 until time t1. By supplying Ar gas, the force of adsorption of the substrate W by the electrostatic chuck 113 can be ensured when the HV voltage is turned on in Step B.

[0040] 6, next, the control unit 2 starts (turns on) the supply of HV voltage to the attraction electrode 113a (step S3). A positive charge or a negative charge may be supplied to the attraction electrode 113a. As a result, the substrate W is electrostatically attracted to the electrostatic chuck 113.

[0041] In Step B of the time chart of FIG. 7, a first DC signal is supplied between time t1 and time t2 to turn on the HV voltage, and a positive charge is supplied to the attraction electrode 113a.

[0042] Returning to FIG. 6, the control unit 2 then starts (turns on) the supply of He gas from the He gas source 119, thereby supplying He gas between the substrate W and the electrostatic chuck 113. Next, the control unit 2 starts a leak check of He gas based on the detection result by the flow rate monitor device 123 (step S5). In the He gas leak check, the flow rate monitor device 123 detects the amount of He gas leaking from between the substrate support surface 111a and the back surface of the substrate W as the leak amount (flow rate). Instead of the leak amount of He gas, the pressure between the substrate support surface 111a and the back surface of the substrate W may be detected. During the leak check, the He gas is turned on and turned off after a predetermined time has elapsed. If the He gas is leaking, the pressure between the substrate support surface 111a and the back surface of the substrate W drops when the He gas is turned off, so that a larger flow rate of He gas is supplied from the He gas source 119 that has been turned on again in an attempt to adjust the pressure. Therefore, when He gas is leaking, the flow rate of He gas detected by flow monitor device 123 will be higher than when He gas is not leaking. Therefore, when the detected flow rate of He gas exceeds a preset threshold, it can be determined that He gas is leaking. In the leak check, it is determined whether a leak amount equal to or greater than a predetermined flow rate is detected within a predetermined time (for example, 2 seconds).

[0043] As a result of the He gas leak check in step S5, the control unit 2 determines whether the amount of He gas leak is equal to or less than a threshold (step S7). If the amount of He gas leak is greater than the threshold, the control unit 2 stops the process. When it is determined that the amount of He gas leak is equal to or less than the threshold, the control unit 2 controls the temperature of the electrostatic chuck 113 from the first temperature to a second temperature. The first temperature is lower than the second temperature, for example, a temperature lower than 100°C.

[0044] The volume resistivity of the ceramic plate material of the electrostatic chuck 113 decreases when the temperature becomes high. The decrease in the volume resistivity of the ceramic plate material promotes migration of electrons accumulated in the substrate W toward the ceramic plate material. In the present disclosure, migration is made less likely to occur by controlling the electrostatic chuck 113 to a temperature lower than 100° C. during a leak check. This prevents a decrease in the chucking force of the substrate W.

[0045] In Step C of the time chart in FIG. 7, a He gas leak check is performed once at time t3, but the amount of He gas leak is constantly being detected by flow rate monitor 123.

[0046] When the amount of leakage is equal to or less than the threshold, the control unit 2 increases the temperature of the electrostatic chuck 113 (step S9). That is, the control unit 2 increases the temperature of the electrostatic chuck 113 to a second temperature higher than the first temperature.

[0047] In Step D of the time chart of FIG. 7, the temperature of the electrostatic chuck 113 is gradually increased between time t4 and time t5 and controlled to a high temperature. The second temperature (high temperature) is, for example, a temperature of 100° C. or higher. The control unit 2 may continuously increase the temperature to the second temperature higher than the first temperature. The control unit 2 may increase the temperature to the second temperature higher than the first temperature in a stepwise manner. Note that the gradient of the temperature of the electrostatic chuck 113 between time t4 and time t5 in the graph of FIG. 7 is an example, and is set to an appropriate gradient depending on the structure of the electrostatic chuck 113, the heat capacity of the electrostatic chuck 113 and the plasma processing apparatus 1, and the plasma heat input.

[0048] In Step D, the supply of Ar gas is gradually stopped, and then the supply of process gas is started.

[0049] 6, next, the control unit 2 stabilizes the temperature and atmosphere in the plasma processing chamber 10 (step S11). In Step E of the time chart in Fig. 7, the temperature in the plasma processing chamber 10 is stabilized between time t5 and time t6. In Step F, the atmosphere in the plasma processing chamber 10 is stabilized in accordance with the process conditions between time t6 and time t7.

[0050] 6, after a predetermined period of time has elapsed since the electrostatic chuck 113 reached the second temperature, the control unit 2 generates plasma in the plasma processing chamber 10 and performs plasma processing on the substrate W (step S13). Then, this process ends.

[0051] 7, at time t7 of Step G after a predetermined period of time has elapsed since the second temperature was reached, a source RF signal (HF Power) is supplied (ON) based on the process recipe, and a bias RF signal (LF Power) is supplied slightly after time t7. This generates plasma of the process gas, and performs plasma processing on the substrate W. The plasma processing of the substrate W includes etching, film formation, and the like.

[0052] Fig. 8 is a diagram showing an example of the results of a leak check of He gas in the plasma processing method according to the embodiment. The vertical axis of Fig. 8(a) shows the temperature of the electrostatic chuck 113 according to the reference example, and the vertical axis of Fig. 8(b) shows the flow rate of He gas according to the reference example. The horizontal axis of both shows time. The vertical axis of Fig. 8(c) shows the temperature of the electrostatic chuck 113 according to the embodiment, and the vertical axis of Fig. 8(d) shows the flow rate of He gas according to the embodiment. The horizontal axis of both shows time.

[0053] 8(a), the temperature of the electrostatic chuck 113 was controlled to about 250° C. from the beginning (time 0). In the embodiment of FIG. 8(c), the temperature of the electrostatic chuck was controlled to be lower than 100° C. initially (time 0), and then controlled to about 250° C.

[0054] According to this, in the result of the reference example in Fig. 8(b), the leakage amount (flow rate) was large when the He gas was turned on and off, and then turned on again. In contrast, in the result of the embodiment in Fig. 8(d), the leakage amount (flow rate) was small when the He gas was turned on and off, and then turned on again.

[0055] As described above, according to the plasma processing method in accordance with the first embodiment, dielectric polarization occurs between the substrate W and the attraction electrode 113a without being affected by a decrease in volume resistivity due to a rise in temperature of the electrostatic chuck 113, and the effects of migration can be reduced.

[0056] <Second embodiment> [Plasma treatment method] Next, a plasma processing method according to a second embodiment will be described with reference to Fig. 9 and Fig. 10. Fig. 9 is a flow chart showing an example of the plasma processing method according to the second embodiment. Fig. 10 is a time chart showing an example of the plasma processing method according to the second embodiment. Note that when the step numbers of the processes shown in Fig. 9 are the same as the step numbers of the processes shown in Fig. 6, they indicate the same processes.

[0057] 9 is started, the control unit 2 loads the substrate W into the plasma processing chamber 10 and places the substrate W on the electrostatic chuck 113 at a first temperature. The control unit 2 also supplies (ON) Ar gas to the plasma processing chamber 10 (step S1).

[0058] In Step A of the time chart of FIG. 10, a substrate is loaded into plasma processing chamber 10 at time t0, Ar gas is supplied between times t0 and t1, and then the inside of the chamber is stabilized until time t1.

[0059] 9, the control unit 2 supplies (ON) a source RF signal (HF Power) to generate plasma of Ar gas (step S21). This ensures that the electrostatic chuck 113 can attract the substrate W by the plasma of Ar gas. In addition, by generating plasma before supplying the HV voltage, it is possible to prevent particles in the plasma processing chamber 10 from being attracted toward the substrate W when the HV voltage is applied by using the plasma.

[0060] 9, next, the control unit 2 starts (turns on) the supply of the HV voltage to the attraction electrode 113a (step S3). The HV voltage may be a positive charge or a negative charge to the attraction electrode 113a. This causes the substrate W to be electrostatically attracted to the electrostatic chuck 113.

[0061] In Step B of the time chart in FIG. 10, a source RF signal is supplied at time t1 to turn on the HF power, and a first DC signal is supplied between times t1 and t2 to turn on the HV voltage, thereby supplying a positive charge to the attraction electrode 113a.

[0062] Returning to FIG. 9, next, the control unit 2 starts (ON) the supply of He gas, and supplies He gas between the substrate support surface 111a and the rear surface of the substrate W. Next, the control unit 2 starts a leak check of He gas based on the detection result by the flow monitor device 123 (step S5). The leak check of He gas detects the leakage amount (flow rate) of He gas supplied between the substrate support surface 111a and the rear surface of the substrate W in a state where a source RF signal is supplied and an Ar gas plasma is generated by HF power. Instead of the leakage amount of He gas, the pressure between the substrate support surface 111a and the rear surface of the substrate W may be detected. When He gas is leaking, the flow rate of He gas detected by the flow monitor device 123 is higher than when He gas is not leaking. Therefore, when the detected flow rate of He gas exceeds a preset threshold value, it can be determined that He gas is leaking.

[0063] The control unit 2 determines whether the amount of He gas leakage is equal to or less than a threshold value as a result of the He gas leak check (step S7). If the amount of He gas leakage is greater than the threshold value, the control unit 2 stops the process. When it is determined that the amount of He gas leakage is equal to or less than the threshold value, the control unit 2 controls the temperature of the electrostatic chuck 113 from a low first temperature to a high second temperature. The low temperature is, for example, a temperature lower than 100°C.

[0064] If the amount of leakage is equal to or less than the threshold value, the control unit 2 stops the supply of the source RF signal to turn off the HF power (step S23), and increases the temperature of the electrostatic chuck 113 to the second temperature (step S9).

[0065] 10, the supply of the source RF signal (HF Power) is stopped at time t4, and the temperature of the electrostatic chuck 113 is gradually increased between time t4 and time t5 and controlled to a second temperature. The second temperature is, for example, a temperature of 100° C. or higher. In Step D, the supply of Ar gas is stopped, and then the supply of process gas is started.

[0066] Returning to Fig. 9, next, the control unit 2 stabilizes the temperature and atmosphere in the plasma processing chamber 10 (step S11). Next, the control unit 2 generates plasma in the plasma processing chamber 10 after a predetermined period has elapsed since the electrostatic chuck 113 reached the second temperature, and processes the substrate W (step S13). Thereafter, this process ends. In Steps E and F of the time chart in Fig. 10, the temperature and atmosphere in the plasma processing chamber 10 are stabilized between time t5 and time t7.

[0067] In the example of FIG. 10, based on the process recipe, a source RF signal (HF Power) is supplied at time t7, and a bias RF signal (LF Power) is supplied slightly after time t7 to generate plasma of the process gas and process the substrate W.

[0068] As described above, according to the plasma processing method in accordance with the second embodiment, dielectric polarization is performed without being affected by a decrease in volume resistivity caused by a rise in temperature of the electrostatic chuck 113, and the effect of migration can be reduced.

[0069] Furthermore, a source RF signal (HF Power) is applied to the attraction electrode 113a before the step of attracting the substrate W to the electrostatic chuck 113, and the application of the source RF signal is stopped after the step of determining whether the flow rate or pressure exceeds a predetermined threshold value. This makes it possible to generate plasma before the HV voltage is supplied, and to ensure the attraction force of the substrate W by the electrostatic chuck 113 using the plasma. Also, it is possible to prevent particles in the plasma processing chamber 10 from being drawn toward the substrate W when the HV voltage is applied.

[0070] In the second embodiment, the source RF signal is turned on in step S21 in Fig. 9 to prevent particles from being generated on the substrate W. However, this is not limiting, and the bias RF signal may be turned on in step S21, or the source RF signal and the bias RF signal may be turned on. Either of these can prevent particles from being generated on the substrate W. When the source RF signal is supplied, the suction force of the substrate W is lower than when the bias RF signal is used, but damage due to the sputtering effect is less likely to occur. Conversely, when the bias RF signal is supplied, the suction force of the substrate W is higher than when the source RF signal is used, but damage due to the sputtering effect is more likely to occur.

[0071] As described above, according to the plasma processing method and plasma processing apparatus of this embodiment, the substrate W is electrostatically attracted by the electrostatic chuck 113 at a low temperature where it is less susceptible to the effects of migration, and after dielectric polarization, the temperature of the electrostatic chuck 113 is raised to a high temperature according to the process conditions. This suppresses the transfer of charge when the substrate W is attracted to the electrostatic chuck 113, prevents the occurrence of an attraction error of the substrate W, and enables time-dependent attraction in the subsequent process.

[0072] The plasma processing method and plasma processing apparatus according to the presently disclosed embodiments should be considered as illustrative and not restrictive in all respects. The embodiments can be modified and improved in various ways without departing from the scope and spirit of the appended claims. The matters described in the above embodiments can be configured in other ways without any contradiction, and can be combined without any contradiction.

[0073] The plasma processing apparatus of the present disclosure can be applied to any type of apparatus, including Atomic Layer Deposition (ALD) apparatus, Capacitively Coupled Plasma (CCP), Inductively Coupled Plasma (ICP), Radial Line Slot Antenna (RLSA), Electron Cyclotron Resonance Plasma (ECR), and Helicon Wave Plasma (HWP). [Explanation of symbols]

[0074] 1. Plasma processing equipment 2. Control section 2a Computer 2a1 Processing section 2a2 Storage section 2a3 Communication Interface 10 Plasma Processing Chamber 11 Substrate support 13. Shower Head 21 Gas Source 20 Gas supply section 30 power supply 31 RF power supply 31a First RF generation unit 31b Second RF generation unit 32a First DC generation unit 32b Second DC generation section 40 Exhaust system 111 Main body 112 Ring Assembly

Claims

(a) supplying an inert gas into a plasma processing chamber; (b) placing a substrate on an electrostatic chuck at a first temperature disposed within the plasma processing chamber; (c) electrostatically attracting the substrate to the electrostatic chuck; (d) initiating a supply of a heat transfer gas between the substrate and the electrostatic chuck; (e) detecting a flow rate of the heat transfer gas or a pressure between the substrate and the electrostatic chuck; (f) determining whether the flow rate or the pressure exceeds a predetermined threshold; (g) increasing the temperature of the electrostatic chuck to a second temperature higher than the first temperature after stopping the supply of the inert gas based on a result of the determination; (h) generating a plasma with a process gas in the plasma processing chamber; The plasma processing method comprises:

2. The step (g) comprises continuously raising the temperature to a second temperature higher than the first temperature. The plasma processing method according to claim 1 .

3. The step (g) comprises gradually increasing the temperature to a second temperature higher than the first temperature. The plasma processing method according to claim 1 .

4. generating a plasma in the plasma processing chamber a predetermined time after the electrostatic chuck reaches the second temperature; The plasma processing method according to any one of claims 1 to 3.

5. applying radio frequency power to an electrode disposed within the plasma processing chamber prior to the step of attracting the substrate to the electrostatic chuck; Stopping the application of the high frequency power after the step of determining whether the flow rate or the pressure exceeds a predetermined threshold value. The plasma processing method according to any one of claims 1 to 4.

6. The high frequency power is at least one of a source RF signal for plasma generation and a bias RF signal having a frequency lower than that of the source RF signal. The plasma processing method according to claim 5 .

7. (i) comprising, after step (g) and before step (h), a step of stabilizing an atmosphere in the plasma processing chamber. The plasma processing method according to any one of claims 1 to 6.

8. The step (e) includes detecting the flow rate or the pressure when the heat transfer gas is supplied again after the supply of the heat transfer gas between the substrate and the electrostatic chuck is stopped after a predetermined time has elapsed since the supply of the heat transfer gas between the substrate and the electrostatic chuck is started in the step (d). The plasma processing method according to any one of claims 1 to 7.

9. The step (g) includes increasing the temperature of the electrostatic chuck when the flow rate or the pressure is equal to or lower than a predetermined threshold value. The plasma processing method according to any one of claims 1 to 8.

10. The step (g) includes not increasing the temperature of the electrostatic chuck while the flow rate or the pressure exceeds a predetermined threshold. The plasma processing method according to claim 9 .

11. a plasma processing chamber; and an electrostatic chuck disposed within the plasma processing chamber; A plasma processing apparatus having a control unit, The control unit is (a) providing an inert gas into the plasma processing chamber; (b) placing a substrate on an electrostatic chuck at a first temperature disposed within the plasma processing chamber; (c) electrostatically attracting the substrate to the electrostatic chuck; (d) initiating a supply of a heat transfer gas between the substrate and the electrostatic chuck; (e) detecting a flow rate of the heat transfer gas or a pressure between the substrate and the electrostatic chuck; (f) determining whether the flow rate or the pressure exceeds a predetermined threshold; (g) increasing the temperature of the electrostatic chuck to a second temperature higher than the first temperature after stopping the supply of the inert gas based on a result of the determination; (h) generating a plasma with a process gas in the plasma processing chamber; The plasma processing apparatus controls a process including the steps of:

12. The step (g) comprises continuously increasing the temperature to a second temperature higher than the first temperature. The plasma processing apparatus according to claim 11 .

13. The step (g) comprises gradually increasing the temperature to a second temperature higher than the first temperature. The plasma processing apparatus according to claim 11 .

14. The method of claim 13, further comprising: generating a plasma in the plasma processing chamber a predetermined period of time after the electrostatic chuck reaches the second temperature. The plasma processing apparatus according to any one of claims 11 to 13.

15. The method of claim 15, further comprising applying radio frequency power to an electrode disposed within the plasma processing chamber prior to the step of attaching the substrate to the electrostatic chuck; Stopping the application of the high frequency power after the step of determining whether the flow rate or the pressure exceeds a predetermined threshold value. The plasma processing apparatus according to any one of claims 11 to 14.

16. The high frequency power is at least one of a source RF signal for plasma generation and a bias RF signal having a frequency lower than that of the source RF signal. The plasma processing apparatus according to claim 15 .

17. The method of claim 17, further comprising the step of stabilizing an atmosphere in the plasma processing chamber after the step of (g) and before the step of (h). The plasma processing apparatus according to any one of claims 11 to 16.

18. The step (e) comprises detecting the flow rate or pressure when the heat transfer gas is supplied again after the supply of the heat transfer gas between the substrate and the electrostatic chuck is stopped a predetermined time after the supply of the heat transfer gas is started in the step (d) and then the heat transfer gas is supplied again. The plasma processing apparatus according to any one of claims 11 to 17.

19. The step (g) further comprises increasing the temperature of the electrostatic chuck when the flow rate or the pressure is equal to or lower than a predetermined threshold. The plasma processing apparatus according to any one of claims 11 to 18.

20. The method of claim 20, wherein the step (g) does not heat the electrostatic chuck while the flow rate or the pressure exceeds a predetermined threshold. The plasma processing apparatus according to claim 19 .

Images