Antenna Device

Abstract

To provide an antenna device having high radiation characteristics.SOLUTION: An antenna device comprises a substrate, first antenna wiring that is arranged above the substrate and has a first wiring pattern extending from a first feeding point to a first open end, and second antenna wiring that is arranged above the first antenna wiring and has a second wiring pattern extending from a second feeding point to a second open end. When viewed from a direction perpendicular to a top face of the substrate, a position of the first feeding point of the first antenna matches a position of the second feeding point of the second antenna wiring. The first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring run in parallel with each other.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The technology disclosed in this specification relates to an antenna device. [Background technology]

[0002] On-chip antenna devices are being developed. This type of antenna device has an antenna wiring arranged in a specific pattern above a substrate. Non-Patent Document 1 discloses an antenna device with a dipole-type antenna wiring, and Non-Patent Document 2 discloses an antenna device with a monopole-type antenna wiring. [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] H. Kikkawa, et al., “Gaussian Monocycle Pulse Transmitter Using 0.18um CMOS Technology With On-Chip Integrated Antennas for Inter-Chip UWB Communication”, JSSC, 2008. [Non-Patent Document 2] K. Kang, et al., “An on-chip antenna integrated with a transceiver in 0.18-um CMOS technology”, IEICE Electron Express, 2017. Summary of the Invention [Problem to be solved by the invention]

[0004] In such an antenna device, there is a concern that the radiation characteristics may deteriorate due to the influence of parasitic capacitance between the substrate and the antenna wiring. An object of the present specification is to provide an antenna device having high radiation characteristics. [Means for solving the problem]

[0005] An embodiment of the antenna device disclosed in this specification may include a substrate, a first antenna wiring, and a second antenna wiring. The first antenna wiring is disposed above the substrate, and has a first wiring pattern extending from a first feeding point to a first open end. The second antenna wiring is disposed above the first antenna wiring, and has a second wiring pattern extending from a second feeding point to a second open end. When viewed from a direction perpendicular to the upper surface of the substrate, the position of the first feeding point of the first antenna wiring and the position of the second feeding point of the second antenna wiring are coincident. Furthermore, the first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring run parallel to each other. Here, the term "parallel to each other" used in this specification broadly means a case where two wiring patterns are arranged side by side, and is not limited to a case where the shapes of the two wiring patterns are coincident. In this antenna device, the first antenna wiring is provided between the substrate and the second antenna wiring, and thus the parasitic capacitance between the substrate and the second antenna wiring is reduced. As a result, the antenna device can have high radiation characteristics.

[0006] In the antenna device, the line width of the first antenna wiring may be greater than the line width of the second antenna wiring. Furthermore, in the antenna device, when viewed from a direction perpendicular to the upper surface of the substrate, the second wiring pattern of the second antenna wiring may be present within the first wiring pattern of the first antenna wiring. In this antenna device, the parasitic capacitance between the substrate and the second antenna wiring is significantly reduced, and deterioration of radiation characteristics can be significantly suppressed.

[0007] In the antenna device, the first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring may include a meander pattern. By bending the first antenna wiring and the second antenna wiring in a meander shape, the first antenna wiring and the second antenna wiring can be arranged in a narrow area. This makes it possible to miniaturize the antenna device.

[0008] In the above antenna device, the resonant frequency tends to increase due to the double structure of the first antenna wiring and the second antenna wiring. Therefore, in the above antenna device, the first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring may include a planar coil pattern. In this antenna device, the resonant frequency can be reduced by the planar coil pattern.

[0009] The antenna device may further include a third antenna wiring. The third antenna wiring is disposed above the second antenna wiring and has a third wiring pattern extending from a third feed point to a third open end. Furthermore, in the antenna device, when viewed from a direction perpendicular to the upper surface of the substrate, the position of the second feed point of the second antenna wiring coincides with the position of the third feed point of the third antenna wiring. Furthermore, the second wiring pattern of the second antenna wiring and the third wiring pattern of the third antenna wiring run parallel to each other. In this antenna device, the third antenna wiring is disposed between an arbitrary member disposed above the antenna device and the second antenna wiring, so that the parasitic capacitance between the arbitrary member and the second antenna wiring is reduced. As a result, the antenna device can have high radiation characteristics.

[0010] In the antenna device, the third antenna wiring may have a line width larger than that of the second antenna wiring. Furthermore, in the antenna device, when viewed from a direction perpendicular to the upper surface of the substrate, the second wiring pattern of the second antenna wiring may be present within the third wiring pattern of the third antenna wiring. In this antenna device, the parasitic capacitance between the arbitrary member and the second antenna wiring is significantly reduced, and deterioration of radiation characteristics can be significantly suppressed.

[0011] The antenna device may further include a fourth antenna wiring. The fourth antenna wiring is disposed on at least one side of the second antenna wiring, and has a fourth wiring pattern extending from a fourth feeding point to a fourth open end. Furthermore, in the antenna device, when viewed from a direction perpendicular to the upper surface of the substrate, the position of the second feeding point of the second antenna wiring coincides with the position of the fourth feeding point of the fourth antenna wiring. Furthermore, the second wiring pattern of the second antenna wiring and the third wiring pattern of the third antenna wiring run parallel to each other. In this antenna device, the fourth antenna wiring is disposed between an arbitrary member disposed on the side of the antenna device and the second antenna wiring, so that the parasitic capacitance between the arbitrary member and the fourth antenna wiring is reduced. As a result, the antenna device can have high radiation characteristics. [Brief description of the drawings]

[0012] [Figure 1] FIG. 2 is a plan view illustrating the antenna device. [Diagram 2] FIG. 2 is a perspective view of a main portion of an antenna element provided in the antenna device, with an interlayer insulating film removed; [Diagram 3] 3 is a cross-sectional view of a main portion that diagrammatically illustrates an antenna element provided in the antenna device, the cross-sectional view corresponding to line III-III in FIG. 2. [Figure 4]FIG. 2 is a plan view illustrating a wiring pattern of an antenna element provided in an antenna device, the wiring pattern including a meander pattern. [Diagram 5] FIG. 2 is a plan view illustrating a wiring pattern of an antenna element provided in an antenna device, the wiring pattern including a planar coil pattern. [Figure 6] 11A and 11B are diagrams illustrating the results of a simulation of the transmission coefficient of the antenna device. [Figure 7] 13 is a cross-sectional view of a main portion that illustrates a modified antenna element provided in an antenna device. FIG. [Figure 8] FIG. 13 is a plan view illustrating a wiring pattern of an antenna element of a modified example provided in an antenna device, the wiring pattern including a meander pattern. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] 1, the antenna device 1 includes a substrate 10, an antenna element 20 provided on the substrate 10, a conductive ground plate 30, and a power supply unit 40. In this manner, the antenna device 1 is configured as a monopole antenna.

[0014] The substrate 10 is not particularly limited, but may be, for example, an SOI substrate. As will be described later, the antenna element 20 is formed on the substrate 10 by using a multi-layer wiring technique.

[0015] 2 and 3, the antenna element 20 has a first antenna wiring 21 and a second antenna wiring 22. Although not shown, an interlayer insulating film of, for example, silicon oxide is formed on the substrate 10, and the first antenna wiring 21 and the second antenna wiring 22 are disposed so as to be embedded in the interlayer insulating film. The first antenna wiring 21 and the second antenna wiring 22 are disposed in different layers in the interlayer insulating film, and are spaced a predetermined distance apart in the vertical direction (z direction).

[0016] The first antenna wiring 21 is disposed between the substrate 10 and the second antenna wiring 22, and is formed by forming a metal film using a printing technique or an etching technique. The first antenna wiring 21 is not particularly limited, and may be formed by forming an aluminum film, for example. The first antenna wiring 21 extends from a first power supply point 21a to which the power supply unit 40 is connected to a first open end 21b, and has a meandering pattern. Specifically, the first antenna wiring 21 extends in the xy plane toward the y direction while folding back and forth along the x direction.

[0017] The second antenna wiring 22 is disposed above the first antenna wiring 21 and separated from the first antenna wiring 21 via an interlayer insulating film, and is formed by forming a metal film using a printing technique or an etching technique. The second antenna wiring 22 is not particularly limited, and may be formed by forming an aluminum film, for example. The second antenna wiring 22 extends from a second power supply point 22a to which the power supply unit 40 is connected to a second open end 22b, and has a meandering pattern. Specifically, the second antenna wiring 22 extends in the xy plane toward the y direction while folding back and forth along the x direction.

[0018] The position of the first feeding point 21a of the first antenna wiring 21 and the position of the second feeding point 22a of the second antenna wiring 22 coincide when viewed from a direction perpendicular to the upper surface of the substrate 10, i.e., when the substrate 10 is viewed in plan. The first feeding point 21a of the first antenna wiring 21 and the second feeding point 22a of the second antenna wiring 22 are not particularly limited, but may be connected via a via hole penetrating an interlayer insulating film interposed between the first and second antenna wirings, and the feeding section 40 may be connected to one end of the first antenna wiring 21 or the second antenna wiring 22. In this way, the first feeding point 21a of the first antenna wiring 21 and the second feeding point 22a of the second antenna wiring 22 can also be regarded as a point where the first antenna wiring 21 and the second antenna wiring 22 branch off.

[0019] The line width 21W of the first antenna wiring 21 (see FIG. 2) is larger than the line width 22W of the second antenna wiring 22 (see FIG. 2). The line width 21W of the first antenna wiring 21 is not particularly limited, but may be, for example, 30 to 60 μm. The interval between the first antenna wirings 21 adjacent to each other in the y direction is not particularly limited, but may be, for example, 30 to 60 μm. The line width 22W of the second antenna wiring 22 is not particularly limited, but may be, for example, 10 to 20 μm. The interval between the second antenna wirings 22 adjacent to each other in the y direction is not particularly limited, but may be, for example, 50 to 100 μm. The distance between the first antenna wiring 21 and the second antenna wiring 22 in the z direction is not particularly limited, but may be, for example, 1 to 10 μm.

[0020] FIG. 4 shows the positional relationship of the wiring patterns of the first antenna wiring 21 and the second antenna wiring 22 constituting the antenna element 20 when the substrate 10 is viewed in a plane. As shown in FIG. 4, the wiring pattern of the first antenna wiring 21 and the wiring pattern of the second antenna wiring 22 run parallel to each other with a predetermined interval in the vertical direction. More specifically, when viewed in a plane, the wiring pattern of the second antenna wiring 22 exists within the wiring pattern of the first antenna wiring 21. In this example, the first antenna wiring 21 and the second antenna wiring 22 are substantially identical in shape except for the line width, and both extend so that the center of the width of the first antenna wiring 21 and the center of the width of the second antenna wiring 22 coincide with each other when the substrate 10 is viewed in a plane. Therefore, when viewed in a plane, the wiring pattern of the second antenna wiring 22 is located inside the wiring pattern of the first antenna wiring 21, in other words, both are arranged so that the wiring pattern of the first antenna wiring 21 protrudes from the wiring pattern of the second antenna wiring 22 when viewed in a plane. Note that such a wiring pattern is an example, and for example, the line width of the second antenna wiring 22 may be larger than the line width of the first antenna wiring 21. Furthermore, the wiring pattern of the first antenna wiring 21 may have a branch wiring that branches off from the main wiring between the position of the first feeding point 21a and the position of the open end, and such a branch wiring may deviate from the wiring pattern of the second antenna wiring 22. Similarly, the wiring pattern of the second antenna wiring 22 may have a branch wiring that branches off from the main wiring between the position of the second feeding point 22a and the position of the open end, and such a branch wiring may deviate from the wiring pattern of the first antenna wiring 21. All of these wiring patterns are examples in which the main wirings of the two wiring patterns are arranged side by side from the position of the feeding point to the position of the open end while being spaced apart by a predetermined distance in a specific direction, and the two wiring patterns run parallel to each other.

[0021] In the antenna device 1, the wiring pattern of the first antenna wiring 21 and the wiring pattern of the second antenna wiring 22 run parallel to each other, the positions of the power feed points 21a, 22a are aligned in the vertical direction, and the wiring lengths from the respective power feed points 21a, 22a to the open ends 21b, 22b are substantially equal, so that during operation the potential in the first antenna wiring 21 and the potential in the second antenna wiring 22 change in phase. Therefore, the first antenna wiring 21 and the second antenna wiring 22 can be considered equivalent to one antenna wiring.

[0022] As described above, during operation, the potential in the first antenna wiring 21 and the potential in the second antenna wiring 22 change in phase, so the potential difference between the first antenna wiring 21 and the second antenna wiring 22 is zero. Therefore, no capacitance exists between the first antenna wiring 21 and the second antenna wiring 22 during operation.

[0023] For example, if the first antenna wiring 21 is not provided, a parasitic capacitance exists between the second antenna wiring 22 and the substrate 10, which affects the radiation characteristics of the second antenna wiring 22. On the other hand, in the antenna device 1 of this embodiment, the first antenna wiring 21 is interposed between the substrate 10 and the second antenna wiring 22, which significantly reduces the effect of the parasitic capacitance on the second antenna wiring 22. This allows the second antenna wiring 22 to have high radiation characteristics.

[0024] It should be noted that the first antenna wiring 21 has a parasitic capacitance with the substrate 10. However, when the first antenna wiring 21 and the second antenna wiring 22 are regarded as an equivalent antenna wiring, the combination of the first antenna wiring 21 and the second antenna wiring 22 can have high radiation characteristics due to the high radiation characteristics of the second antenna wiring 22. As a result, the antenna device 1 can have high radiation characteristics.

[0025] Furthermore, in the antenna device 1, the line width of the first antenna wiring 21 is larger than the line width of the second antenna wiring 22, and in a plan view, the wiring pattern of the second antenna wiring 22 exists within the wiring pattern of the first antenna wiring 21. As a result, for example, the parasitic capacitance between the substrate 10 and the side surface of the second antenna wiring 22 is also reduced, and therefore the parasitic capacitance between the substrate 10 and the second antenna wiring 22 is significantly reduced. As a result, the antenna device 1 can have high radiation characteristics.

[0026] FIG. 5 shows a modified antenna element 20. In this example, each of the first antenna wiring 21 and the second antenna wiring 22 includes a planar coil pattern. In this example, each of the first antenna wiring 21 and the second antenna wiring 22 includes a plurality of counterclockwise planar coil patterns when viewed from the power supply points 21a and 22a along the open ends 21b and 22b. The planar coil pattern may be clockwise. Each of the first antenna wiring 21 and the second antenna wiring 22 may include both a clockwise planar coil pattern and a counterclockwise planar coil pattern. In the planar coil pattern, there is a portion where the antenna wirings intersect. At such an intersection, the antenna wirings can be crossed via a conductor pattern arranged in another layer.

[0027] Each of the first antenna wiring 21 and the second antenna wiring 22, which include a planar coil pattern, has a large inductance component, and therefore a lower resonant frequency. In this way, by incorporating a planar coil pattern into each of the first antenna wiring 21 and the second antenna wiring 22, the resonant frequency of the antenna element 20 can be adjusted.

[0028] 6 shows the results of calculating the transmission coefficient S21 of the antenna device 1 of this embodiment and the antenna device of the comparative example. Note that the transmission coefficient S21 is a value calculated by S21=20 log(S1 / S2), where S1 is the voltage amplitude of the input signal to the transmitting antenna and S2 is the voltage amplitude of the output signal from the receiving antenna.

[0029] The comparative examples are antenna devices having an antenna element with a single wiring pattern (i.e., a wiring pattern in which the first antenna wiring 21 of this embodiment is removed and only the second antenna wiring 22 is included). Comparative Example 1 shown by the dashed line is an example in which an antenna device having an antenna element including a single meander pattern is used for both the receiving antenna and the transmitting antenna. Comparative Example 2 shown by the dashed line is an example in which an antenna device having an antenna element including a single planar coil pattern is used for both the receiving antenna and the transmitting antenna.

[0030] Example 1 shown by a solid line is an example in which an antenna device having an antenna element including a double meander pattern is adopted, and corresponds to the antenna device 1 of the present embodiment shown in FIG. 4. Example 2 shown by a solid line is an example in which an antenna device having an antenna element including a double planar coil pattern is adopted, and corresponds to the antenna device 1 of the present embodiment shown in FIG. 5. In this way, both Comparative Example 1 and Example 1 are meander pattern antenna elements, Comparative Example 1 is a single-single wiring pattern, and Example 1 is a double wiring pattern. Both Comparative Example 2 and Example 2 are planar coil pattern antenna elements, Comparative Example 2 is a single-single wiring pattern, and Example 2 is a double wiring pattern.

[0031] It is clear from the comparison between Comparative Example 1 and Example 1, and also from the comparison between Comparative Example 2 and Example 2 that the transmission coefficient S21 is improved by doubling the wiring pattern. This suggests that the effect of the parasitic capacitance on the second antenna wiring 22 is reduced, and the second antenna wiring 22 has high radiation characteristics.

[0032] It is clear from the comparison between Comparative Example 1 and Example 1, and from the comparison between Comparative Example 2 and Example 2 that the resonant frequency tends to increase when the wiring pattern is doubled. On the other hand, it is clear from the comparison between Comparative Example 1 and Comparative Example 2, and from the comparison between Example 1 and Example 2 that the resonant frequency decreases in an antenna device having an antenna element including a planar coil pattern. In this way, it is suggested that the resonant frequency can be adjusted by including a planar coil pattern in the antenna element.

[0033] As described above, the technology disclosed in this specification is useful in reducing the influence of the parasitic capacitance between the substrate 10 and the antenna element 20. However, the technology disclosed in this specification can also reduce the influence of the parasitic capacitance between the antenna element 20 and other members. For example, in a case where a metal member (e.g., a housing) is present around the environment in which the substrate 10 is mounted, the technology disclosed in this specification can also reduce the influence of the parasitic capacitance between such a member and the antenna element 20. An example of a measure taken in such a case will be described below.

[0034] 7 and 8 show a modified antenna element 20. In contrast to the above example, this antenna element 20 is characterized in that it further includes a third antenna wiring 23 and a pair of fourth antenna wirings 24. Similar to the first antenna wiring 21 and the second antenna wiring 22, the third antenna wiring 23 and the pair of fourth antenna wirings 24 are also arranged in a layer in an interlayer insulating film (not shown) using multilayer wiring technology. Note that at least one of the pair of fourth antenna wirings 24 may be arranged as necessary.

[0035] The third antenna wiring 23 is disposed above the second antenna wiring 22 and separated from the second antenna wiring 22 via an interlayer insulating film. The line width of the third antenna wiring 23 may be the same as that of the first antenna wiring 21. The third antenna wiring 23 extends from a third feed point 23a to which the power supply unit 40 is connected to a third open end 23b, and has a meander pattern similar to the first antenna wiring 21 and the second antenna wiring 22. The position of the third feed point 23a of the third antenna wiring 23 and the position of the second feed point 22a of the second antenna wiring 22 coincide when viewed from a direction perpendicular to the upper surface of the substrate 10, that is, when the substrate 10 is viewed in a plan view. As shown in FIG. 8, the wiring pattern of the third antenna wiring 23 and the wiring pattern of the second antenna wiring 22 run parallel to each other with a predetermined interval therebetween in the vertical direction. More specifically, when viewed in a plan view, the wiring pattern of the second antenna wiring 22 exists within the wiring pattern of the third antenna wiring 23. In particular, in this example, the second antenna wiring 22 and the third antenna wiring 23 have substantially the same shape except for the line width, and both extend so that the widthwise center of the second antenna wiring 22 and the widthwise center of the third antenna wiring 23 coincide when the substrate 10 is viewed in a plane. Therefore, when viewed in a plane, the wiring pattern of the second antenna wiring 22 is located inside the wiring pattern of the third antenna wiring 23; in other words, when viewed in a plane, the wiring pattern of the third antenna wiring 23 extends beyond the wiring pattern of the second antenna wiring 22.

[0036] Each of the pair of fourth antenna wirings 24 is disposed in the same plane as the second antenna wiring 22, and is disposed on one of the sides of the second antenna wiring 22, separated from the second antenna wiring 22 via an interlayer insulating film. Each of the pair of fourth antenna wirings 24 extends from a fourth feed point 24a to which the power supply unit 40 is connected to a fourth open end 24b, and has a meander pattern similar to the first antenna wiring 21 and the second antenna wiring 22. The positions of the fourth feed point 24a of the pair of fourth antenna wirings 24 and the position of the second feed point 22a of the second antenna wiring 22 coincide with each other when viewed from a direction perpendicular to the upper surface of the substrate 10, i.e., when the substrate 10 is viewed in plan. As shown in FIG. 8, the wiring patterns of the pair of fourth antenna wirings 24 and the wiring pattern of the second antenna wiring 22 run parallel to each other with a predetermined interval in the left-right direction.

[0037] In this modification, the wiring pattern of the second antenna wiring 22 and the wiring pattern of the third antenna wiring 23 run parallel to each other, the positions of the power feed points 22a and 23a are aligned in the vertical direction, and the wiring lengths from the respective power feed points 22a and 23a to the open ends 22b and 23b are substantially equal, so that the potential in the second antenna wiring 22 and the potential in the third antenna wiring 23 change in the same phase during operation. For this reason, no capacitance exists between the second antenna wiring 22 and the third antenna wiring 23 during operation. Similarly, the wiring pattern of the second antenna wiring 22 and the respective wiring patterns of the pair of fourth antenna wirings 24 run parallel to each other, the positions of the power feed points 22a and 24a are aligned in the vertical direction, and the wiring lengths from the respective power feed points 22a and 24a to the open ends 22b and 24b are substantially equal, so that the potential in the second antenna wiring 22 and the respective potentials in the pair of fourth antenna wirings 24 change in the same phase during operation. Therefore, no capacitance exists between the second antenna wiring 22 and each of the pair of fourth antenna wirings 24 during operation.

[0038] For example, even if a member such as a metal (e.g., a housing) is present above the antenna element 20, the third antenna wiring 23 is interposed between the member and the second antenna wiring 22, thereby suppressing the influence of the parasitic capacitance between the member and the second antenna wiring 22. Similarly, even if a member such as a metal (e.g., a housing) is present to the sides of the antenna element 20, the pair of fourth antenna wirings 24 is interposed between the member and the second antenna wiring 22, thereby suppressing the influence of the parasitic capacitance between the member and the second antenna wiring 22. As a result, the antenna device 1 having the modified antenna element 20 can have high radiation characteristics.

[0039] In the above, the technology disclosed in this specification has been described using the antenna device 1 having a monopole-type antenna element 20. The technology disclosed in this specification is not limited to this example, and can also be applied to antenna devices having other types of antenna elements. For example, the technology disclosed in this specification can also be applied to an antenna device having a dipole-type antenna element.

[0040] In the above, an example has been described in which the wiring pattern of the antenna element includes a meander pattern or a planar coil pattern. The technology disclosed in this specification is also useful for other types of wiring patterns. The wiring pattern of the antenna element may include both a meander pattern and a planar coil pattern.

[0041] Although specific examples of the present invention have been described above in detail, these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and variations of the specific examples exemplified above. The technical elements described in this specification or drawings exhibit technical utility alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology exemplified in this specification or drawings can achieve multiple objectives simultaneously, and achieving one of these objectives is itself technically useful. [Explanation of symbols]

[0042] 1: Antenna device 10: Substrate 20: Antenna element 21: First antenna wiring 21a: First power supply point 21b: 1st open end 22: Second antenna wiring 22a: Second power supply point 22b: 2nd open end 30: Ground plate 40: Power supply unit

Claims

1. 1. An antenna device, comprising: A substrate; a first antenna wiring disposed above the substrate and having a first wiring pattern extending from a first feeding point to a first open end; a second antenna wiring arranged above the first antenna wiring and having a second wiring pattern extending from a second feeding point to a second open end, When viewed from a direction perpendicular to an upper surface of the substrate, a position of the first feeding point of the first antenna wiring and a position of the second feeding point of the second antenna wiring are aligned with each other, the first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring run parallel to each other, The line width of the first antenna wiring is larger than the line width of the second antenna wiring, An antenna device, wherein when viewed from a direction perpendicular to the top surface of the substrate, the second wiring pattern of the second antenna wiring is present within the first wiring pattern of the first antenna wiring.

2. The antenna device according to claim 1 , wherein the first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring each include a meander pattern.

3. 3. The antenna device according to claim 1, wherein the first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring each include a planar coil pattern.

4. a third antenna wiring arranged above the second antenna wiring and having a third wiring pattern extending from a third feeding point to a third open end, When viewed from a direction perpendicular to an upper surface of the substrate, a position of the second feed point of the second antenna wiring coincides with a position of the third feed point of the third antenna wiring, 4. The antenna device according to claim 1, wherein the second wiring pattern of the second antenna wiring and the third wiring pattern of the third antenna wiring run parallel to each other.

5. The line width of the third antenna wiring is larger than the line width of the second antenna wiring, 5. The antenna device according to claim 4, wherein, when viewed from a direction perpendicular to an upper surface of the substrate, the second wiring pattern of the second antenna wiring is present within the third wiring pattern of the third antenna wiring.

6. a fourth antenna wiring arranged on at least one side of the second antenna wiring and having a fourth wiring pattern extending from a fourth feeding point to a fourth open end, When viewed from a direction perpendicular to an upper surface of the substrate, a position of the second feed point of the second antenna wiring coincides with a position of the fourth feed point of the fourth antenna wiring, 6. The antenna device according to claim 1, wherein the second wiring pattern of the second antenna wiring and the fourth wiring pattern of the fourth antenna wiring run in parallel.

7. 1. An antenna device, comprising: A substrate; a first antenna wiring disposed above the substrate and having a first wiring pattern extending from a first feeding point to a first open end; a second antenna wiring arranged above the first antenna wiring and having a second wiring pattern extending from a second feeding point to a second open end; a third antenna wiring disposed above the second antenna wiring and having a third wiring pattern extending from a third feeding point to a third open end, when viewed from a direction perpendicular to an upper surface of the substrate, a position of the first feed point of the first antenna wiring, a position of the second feed point of the second antenna wiring, and a position of the third feed point of the third antenna wiring are aligned with each other, the first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring run parallel to each other, the second wiring pattern of the second antenna wiring and the third wiring pattern of the third antenna wiring run parallel to each other, The line width of the third antenna wiring is larger than the line width of the second antenna wiring, An antenna device, wherein when viewed from a direction perpendicular to the top surface of the substrate, the second wiring pattern of the second antenna wiring is present within the third wiring pattern of the third antenna wiring.

8. 1. An antenna device, comprising: A substrate; a first antenna wiring disposed above the substrate and having a first wiring pattern extending from a first feeding point to a first open end; a second antenna wiring arranged above the first antenna wiring and having a second wiring pattern extending from a second feeding point to a second open end; a fourth antenna wiring arranged on at least one side of the second antenna wiring and having a fourth wiring pattern extending from a fourth feeding point to a fourth open end, when viewed from a direction perpendicular to an upper surface of the substrate, a position of the first feed point of the first antenna wiring, a position of the second feed point of the second antenna wiring, and a position of the fourth feed point of the fourth antenna wiring are aligned with each other, the first wiring pattern of the first antenna wiring and the second wiring pattern of the second antenna wiring run parallel to each other, An antenna device, wherein the second wiring pattern of the second antenna wiring and the fourth wiring pattern of the fourth antenna wiring run parallel to each other.

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