Hand, transport device, and substrate processing device

Abstract

To improve accuracy in detecting that a substrate is seated.SOLUTION: A hand for holding a substrate includes a hand main body 620 and a plurality of seating members 630 which is mounted to the hand main body 620, and on which the substrate is seated. Each of the plurality of seating members 630 comprises: a shaft member 632 supported by the hand main body 620; and a lever member 634 which is supported by the shaft member 632 and includes a first end portion 634-1 having a seating portion 634-1a on which the substrate is seated and a second end portion 634-2 provided at the opposite side of the first end portion 634-1 with the shaft member 632 interposed between the seating portion 634-1 and the second end portion 634-2. At least a part of the plurality of seating members 630 further comprises: an energizing member 636 which applies to the lever member 634 force for rotating the lever member 634 so that the second end portion 634-2 moves downward; and a seating sensor 638 detecting that the second end portion 634-2 has moved upward.SELECTED DRAWING: Figure 6A

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