Conveyor

Abstract

This conveyance device (100) is provided with a magnetic scale (4) that includes a linear movement magnetic scale (4), which is formed linearly along a straight direction, and a curved movement magnetic scale (5), which is formed curved along a curved direction. The linear movement magnetic scale (4) and the curved movement magnetic scale (5) are provided in a state separated from each other.

Description

[Technical field]

[0001] The present invention relates to a transport device, and in particular to a transport device comprising a slider and a drive module. [Background technology]

[0002] A conveying device including a slider and a drive module is known in the art. Such a conveying device is disclosed in, for example, International Publication No. WO 2019 / 007199.

[0003] The above-mentioned International Publication No. 2019 / 007199 discloses a linear transport device including a moving body (slider) and a stator module (drive module). The moving body is configured to move linearly or curvedly by a magnetic field generated in the stator module.

[0004] The moving body of International Publication No. 2019 / 007199 includes a base, a first magnetic field generating unit, and a second magnetic field generating unit. The first magnetic field generating unit and the second magnetic field generating unit are attached to the base in a state of being adjacent to each other in contact with each other. The first magnetic field generating unit generates a magnetic field for detecting the position of the moving body during linear movement. The second magnetic field generating unit generates a magnetic field for detecting the position of the moving body during curved movement.

[0005] The stator module of International Publication No. 2019 / 007199 includes a magnetic reader that reads the magnetism of each of the first magnetic generation unit and the second magnetic generation unit. In the linear conveyance device, the position of the moving body is detected based on the magnetism of each of the first magnetic generation unit and the second magnetic generation unit read by the magnetic reader. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] International Publication No. 2019 / 007199 Summary of the Invention [Problem to be solved by the invention]

[0007] However, in the linear conveying device of WO 2019 / 007199, the first magnetic generating unit and the second magnetic generating unit are attached to the base in a state of being adjacent to each other in contact with each other. For this reason, it is considered that magnetic interference is likely to occur between the first magnetic generating unit and the second magnetic generating unit in the linear conveying device of WO 2019 / 007199. For this reason, it is desired to more reliably suppress magnetic interference between the first magnetic generating unit (magnetic scale for linear movement) and the second magnetic generating unit (magnetic scale for curved movement) in the linear conveying device of WO 2019 / 007199.

[0008] The present invention has been made to solve the above-mentioned problems, and one object of the present invention is to provide a conveying device that can more reliably suppress magnetic interference between the magnetic scale for linear movement and the magnetic scale for curvilinear movement. [Means for solving the problem]

[0009] A conveying device according to one aspect of the present invention includes a slider movable along a straight line and a curved direction, a drive module for moving the slider along the straight line or the curved direction, a magnetic scale for linear movement formed linearly along the straight line direction, and a magnetic scale for curvilinear movement formed curvedly along the curved direction, and is provided with a magnetic scale on one of the slider or the drive module, and a magnetic sensor on the other of the slider or the drive module for detecting the magnetism of each of the magnetic scale for linear movement and the magnetic scale for curvilinear movement, and the magnetic scale for linear movement and the magnetic scale for curvilinear movement are provided spaced apart from each other.

[0010] In the conveying device according to one aspect of the present invention, as described above, the magnetic scale for linear movement and the magnetic scale for curvilinear movement are provided spaced apart from each other, thereby ensuring a distance between the magnetic scale for linear movement and the magnetic scale for curvilinear movement, and more reliably suppressing magnetic interference between the magnetic scale for linear movement and the magnetic scale for curvilinear movement.

[0011] In the conveying device according to the above aspect, the magnetic scale for linear movement and the magnetic scale for curvilinear movement are preferably provided on the same surface or different surfaces in a state spaced apart from each other. In this configuration, the magnetic scale for linear movement and the magnetic scale for curvilinear movement can be provided on the same surface or different surfaces of the same member, so that an increase in the number of parts of the conveying device can be suppressed compared to a case in which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are provided on the surfaces of different members.

[0012] In the conveying device according to the above aspect, preferably, the magnetic scale is provided on the slider, and the magnetic sensor is provided on the drive module. With this configuration, the drive module is fixed at a predetermined location, and therefore, unlike a case where the magnetic sensor is provided on a moving structure such as a slider, it is easy to connect the magnetic sensor to a power supply facility for supplying power to the magnetic sensor.

[0013] In this case, the slider preferably includes a slider frame on which the magnetic scale is disposed inside, with the linear movement magnetic scale and the curvilinear movement magnetic scale facing each other in the vertical direction relative to the magnetic sensor, or in the width direction perpendicular to the vertical direction and the slider movement direction. With this configuration, the magnetic scale can be accommodated inside the slider frame, so that the slider can be prevented from becoming large in size, compared to a case in which the slider frame is the same size and the magnetic scale is disposed outside the slider frame.

[0014] In the conveying device according to the above aspect, the magnetic scale preferably further includes a base portion on which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are integrally provided. With this configuration, the magnetic scale for linear movement and the magnetic scale for curvilinear movement are integrally provided on the same base portion, so that even if the base portion expands or contracts due to temperature changes, an error in the position measurement of the slider can be generated for the magnetic scale for linear movement and the magnetic scale for curvilinear movement according to the expansion or contraction of the base portion. Therefore, the position measurement errors of the magnetic scale for linear movement and the magnetic scale for curvilinear movement can be made approximately equal. As a result, the same correction value can be used to correct the position measurement error during linear movement of the slider and the position measurement error during curvilinear movement of the slider, making it easier to control the position acquisition.

[0015] In this case, the base portion preferably includes a first surface on which the magnetic scale for linear movement is provided, and a second surface on which the magnetic scale for curvilinear movement is provided, the second surface being different from the first surface. With this configuration, compared to a case in which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are arranged side by side on the same surface, it is possible to suppress an increase in the dimension of the base portion in the direction in which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are arranged, and therefore it is possible to suppress an increase in the size of the conveying device in the direction in which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are arranged.

[0016] In the transport device having a second surface different from the first surface, the second surface is preferably disposed on the back side of the first surface of the base portion. With this configuration, the first surface constitutes the front surface of the base portion, and the second surface constitutes the back surface of the base portion, so that the magnetic scale for linear movement and the magnetic scale for curvilinear movement can be disposed to overlap in a plan view, thereby making it possible to suppress an increase in the dimension of the base portion in the movement direction of the slider.

[0017] In the conveying device in which the second surface is disposed on the rear side of the first surface of the base portion, the magnetic scale preferably has a magnetic shield plate disposed between the magnetic scale for linear movement and the magnetic scale for curvilinear movement, and shields magnetism emitted from each of the magnetic scale for linear movement and the magnetic scale for curvilinear movement. With this configuration, the magnetic shield plate can suppress magnetic interference between the magnetic scale for linear movement and the magnetic scale for curvilinear movement, so that the distance separating the magnetic scale for linear movement and the magnetic scale for curvilinear movement can be reduced. This allows the thickness required for the base portion disposed between the magnetic scale for linear movement and the magnetic scale for curvilinear movement to be reduced, so that the magnetic scale including the magnetic scale for linear movement, the magnetic scale for curvilinear movement, and the base portion can be prevented from becoming large.

[0018] In the above-mentioned conveying device having the first surface and the second surface, preferably, the second surface and the first surface are substantially orthogonal to each other. With this configuration, the magnetic scale for linear movement is provided on the first surface, and the magnetic scale for curvilinear movement is provided on the second surface substantially orthogonal to the first surface, so that the magnetic sensor for detecting the magnetism of the magnetic scale for linear movement can be disposed near the magnetic sensor for detecting the magnetism of the magnetic scale for curvilinear movement. As a result, the space required for disposing the magnetic sensor for detecting the magnetism of the magnetic scale for linear movement and the magnetic sensor for detecting the magnetism of the magnetic scale for curvilinear movement can be made compact.

[0019] In the above-mentioned conveying device in which the second surface is perpendicular to the first surface, the second surface and the first surface are preferably substantially perpendicular to each other, and the second surface is a curved surface corresponding to the curvature of the magnetic scale for curvilinear movement. With this configuration, the curved surface of the second surface is formed along the curved direction of the slider, so that the position of the slider during its curvilinear movement can be appropriately detected by the magnetic scale for curvilinear movement provided on the second surface.

[0020] In the conveying device having the base part, the magnetic scale for linear movement and the magnetic scale for curvilinear movement are preferably provided on the same surface of the base part in a state spaced apart from each other in the direction in which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are arranged. With this configuration, it is possible to suppress an increase in the space required for installing the magnetic scale for linear movement and the magnetic scale for curvilinear movement in the direction perpendicular to the same surface, compared to a case in which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are arranged side by side in the direction perpendicular to the same surface.

[0021] In the conveying device according to the above aspect, the magnetic scale preferably further includes a base portion on which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are provided, the magnetic scale for curvilinear movement includes a first curved scale portion formed according to a first curved direction as a curved direction and a second curved scale portion formed according to a second curved direction different from the first curved direction, and the base portion forms the upper surface or the lower surface of the base portion and includes a linear position detection surface on which the magnetic scale for linear movement is provided, a first curved position detection surface protruding from the linear position detection surface and provided with the first curved scale portion, and a second curved position detection surface facing the first curved position detection surface and provided with the second curved scale portion. With this configuration, the first curved scale portion and the second curved scale portion can measure the position of the slider during multiple curved movements in the first curved direction and the second curved direction, so that position measurement can be performed even when the slider moves in curved directions opposite to each other. This can improve the degree of freedom of the path along which the slider moves.

[0022] In the conveying device according to the above aspect, the magnetic scale is preferably provided on the slider, and in the moving direction of the slider, one end of the magnetic scale for linear movement and one end of the magnetic scale for curvilinear movement are arranged at substantially the same position, and the other end of the magnetic scale for linear movement and the other end of the magnetic scale for curvilinear movement are arranged at substantially the same position. With this configuration, the lengths of the magnetic scale for linear movement and the magnetic scale for curvilinear movement in the moving direction of the slider can be made substantially the same, so that when one of the magnetic scale for linear movement and the magnetic scale for curvilinear movement is set to a maximum length according to the installation space, the other of the magnetic scale for linear movement and the magnetic scale for curvilinear movement can also be set to the same maximum length. As a result, by arranging the magnetic sensors so that the interval between them is set to the maximum length, the magnetic sensors can be arranged with the interval between them maximized, so that the number of magnetic sensors required to measure the position of the slider can be minimized. Effect of the Invention

[0023] According to the present invention, as described above, it is possible to more reliably suppress magnetic interference between the linear movement magnetic scale and the curvilinear movement magnetic scale. [Brief description of the drawings]

[0024] [Figure 1] FIG. 1 is a plan view showing a transport device according to a first embodiment. [Diagram 2] FIG. 2 is a cross-sectional view taken along line 111-111 in FIG. [Diagram 3] 2 is a cross-sectional view taken along line 112-112 in FIG. 1. [Figure 4] FIG. 2 is a top view of the magnetic scale of the transport device according to the first embodiment. [Diagram 5] FIG. 2 is a bottom view of the magnetic scale of the transport device according to the first embodiment. [Figure 6] FIG. 4 is an enlarged view of a portion D in FIG. 3. [Figure 7] 4 is a schematic diagram showing a state in which a slider of the conveying device according to the first embodiment moves on a straight portion. FIG. [Figure 8] 4 is a schematic diagram showing a state in which a slider of the conveyance device according to the first embodiment moves along a curved portion. FIG. [Figure 9] 4 is an enlarged view of a portion of a conveying device according to a second embodiment, which corresponds to portion D in FIG. 3. [Figure 10] FIG. 11 is a top view of a magnetic scale of a transport device according to the third embodiment. [Figure 11] FIG. 11 is a perspective view showing a magnetic scale of a transport device according to a fourth embodiment. [Figure 12] FIG. 13 is a perspective view showing a magnetic scale of a transport device according to a fifth embodiment. [Figure 13] FIG. 11 is a perspective view showing a back yoke and a magnetic scale of a transport device according to a first modified example of the first embodiment. [Figure 14] FIG. 11 is a cross-sectional view showing a magnetic scale and a magnetic shield plate of a conveying device according to a second modified example of the second embodiment. [Figure 15] FIG. 11 is a cross-sectional view showing a magnetic scale and a magnetic shield plate of a conveying device according to a third modified example of the second embodiment. [Figure 16] FIG. 13 is a perspective view showing a magnetic scale and a magnetic shield plate of a conveying device according to a third modified example of the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

[0026] [First embodiment] The configuration of a conveying device 100 according to a first embodiment of the present invention will be described with reference to FIGS.

[0027] (Configuration of the transport device) 1 and 2, the transport device 100 is installed on an upper surface 101a of a stand 101. Although not shown, various robots are installed on the stand 101 for performing tasks such as transferring workpieces such as circuit boards and mounting electronic components on the boards. The various robots are arranged along a circular path 102 of the slider 3, which will be described later. The transport device 100 is a linear conveyor that moves the slider 3 along the circular path 102 by a linear motor.

[0028] The conveying device 100 is configured to move the slider 3 toward the working positions of various robots. Specifically, the conveying device 100 includes a plurality of linear movement drive modules 1, a plurality of curved movement drive modules 2, a plurality of sliders 3, a magnetic scale 4, a magnetic sensor 5, and a magnetic sensor 6. The linear movement drive modules 1 and the curved movement drive modules 2 form a circulating path 102 for the slider 3. Each of the linear movement drive modules 1 and the curved movement drive modules 2 is an example of a "drive module" in the claims.

[0029] Here, the horizontal direction in which the linear movement drive module 1 extends is the X direction, one of the X directions is the X1 direction, and the other of the X directions is the X2 direction. The horizontal direction perpendicular to the X direction is the Y direction, one of the Y directions is the Y1 direction, and the other of the Y directions is the Y2 direction. The direction perpendicular to the X direction and the Y direction is the Z direction (upward direction), one of the Z directions is the Z1 direction (upward direction), and the other of the Z directions is the Z2 direction (downward direction). The movement direction of the slider 3 is the M direction, one direction of the M direction is the M1 direction, and the other direction of the M direction is the M2 direction. The width direction perpendicular to the M direction and the Z direction is the W direction, one direction of the W direction is the W1 direction, and the other direction of the W direction is the W2 direction.

[0030] Each of the multiple linear movement drive modules 1 is a linear conveyor module. The multiple linear movement drive modules 1 are arranged on a stand 101. The multiple linear movement drive modules 1 are linearly connected in the X direction. The multiple linear movement drive modules 1 are arranged on each of the Y1 direction side and the Y2 direction side. Since each of the multiple linear movement drive modules 1 has the same structure, one linear movement drive module 1 arranged on the Y2 direction side and the X1 direction side will be described.

[0031] The linear movement drive module 1 is a device that moves the slider 3 linearly in the X1 or X2 direction. The linear movement drive module 1 is configured to stop the slider 3 at the robot's work position and move the slider 3 toward the work position of the next robot after the work is completed. The linear movement drive module 1 can also move the slider 3 while controlling the position and speed during work, and move the slider 3 toward the work position of the next robot after the work is completed.

[0032] Specifically, as shown in FIG. 2, the linear movement drive module 1 includes a support member 11, a guide rail 12, and a linear motor stator 13.

[0033] The support member 11 supports the guide rail 12 and the linear motor stator 13. The support member 11 is made of a metal such as aluminum. In this manner, the support member 11 is a metal frame. Although the support member 11 in this embodiment is made of a metal, the support member 11 may be made of resin.

[0034] The guide rail 12 has a function of guiding the slider 3. The guide rail 12 is disposed in the central portion of the upper surface of the support member 11 in the Y direction. The guide rail 12 extends in the X direction. The linear motor stator 13 is composed of a plurality of electromagnets. Note that, although an example in which the guide rail 12 in this embodiment is disposed in the central portion of the upper surface of the support member 11 in the Y direction has been shown, the guide rail 12 may be disposed at a position offset from the central portion of the upper surface of the support member 11 in the Y direction. Furthermore, the guide rail 12 may be provided on the side surface of the support member 11 instead of on the upper surface of the support member 11.

[0035] As shown in FIG. 1, each of the multiple curved movement drive modules 2 is a linear conveyor module. The multiple curved movement drive modules 2 are arranged on a base 101. The multiple curved movement drive modules 2 are connected along the curved direction. The multiple curved movement drive modules 2 are arranged on each of the X1 direction side and the X2 direction side on the base 101. Since each of the multiple curved movement drive modules 2 has the same structure, one curved movement drive module 2 arranged on the X1 direction side will be described. Note that the curved direction is a direction along the R direction (circumferential direction) around the central axis C1 (or C2) extending in the Z direction.

[0036] The curved movement drive module 2 is a device that moves the slider 3 along the R1 direction or the R2 direction (curved direction). The curved movement drive module 2 is configured to stop the slider 3 at the robot's work position and move the slider 3 toward the work position of the next robot after the work is completed. The curved movement drive module 2 can also move the slider 3 while controlling the position and speed during work, and move the slider 3 toward the work position of the next robot after the work is completed.

[0037] Specifically, as shown in FIG. 3, the curvilinear movement drive module 2 includes a support member 21, a guide rail 22, and a linear motor stator .

[0038] The support member 21 supports the guide rail 22 and the linear motor stator 23. The support member 21 is formed of a metal such as aluminum. In this manner, the support member 21 is a metal frame. Note that, although an example in which the support member 21 in this embodiment is made of metal has been shown, the support member 21 may be made of resin.

[0039] The guide rail 22 has a function of guiding the slider 3. The guide rail 22 is disposed in the central portion of the upper surface of the support member 21 in a direction perpendicular to the central axis C1. The guide rail 22 extends along the R direction. The linear motor stator 23 is composed of a plurality of electromagnets. Note that, although an example in which the guide rail 22 of the present embodiment is disposed in the central portion of the upper surface of the support member 21 in a direction perpendicular to the central axis C1 has been shown, the guide rail 22 may be disposed at a position offset from the central portion of the upper surface of the support member 21 in a direction perpendicular to the central axis C1. Moreover, the guide rail 22 may be provided on the side surface of the support member 21 instead of on the upper surface of the support member 21.

[0040] 1, a plurality of sliders 3 are arranged on a circular path 102. Since the plurality of sliders 3 all have the same configuration, one of the plurality of sliders 3 will be described.

[0041] The slider 3 is configured to be movable along a straight line and a curved line. Here, the slider 3 moves in a straight line by being guided by a guide rail 12. The slider 3 moves in a curved line by being guided by a guide rail 22. Here, the straight line direction is the movement direction along the X direction. Also, the curved line direction is the movement direction along the R direction.

[0042] In this manner, the slider 3 is configured to slide linearly and curvedly on the circular path 102. Specifically, as shown in Fig. 2 and Fig. 3, the slider 3 includes a slider frame 31, a linear motor mover 32, and a bracket 33.

[0043] The slider frame 31 is made of a metal material such as aluminum. The linear motor mover 32 is provided on the W1 direction side of an inner upper surface 36 provided between a pair of inner surfaces 34 and 35 facing each other in the W direction of the slider frame 31. The linear motor mover 32 has a back yoke (not shown) and a permanent magnet (not shown). The back yoke is a member that holds the permanent magnet and forms a magnetic path, and is made of a magnetic iron-based material such as iron or steel. The permanent magnets are arranged so that the N poles and S poles alternately face the Z2 direction in the M direction. The permanent magnets are arranged to face the linear motor stator 13 in the Z direction. The bracket 33 is a member for fixing the magnetic scale 4 to the slider frame 31. The bracket 33 is provided on the inner surface 34 on the W2 direction side of the pair of inner surfaces 34 and 35. The bracket 33 is fixed to the slider frame 31 by a fastening member.

[0044] In the slider 3, a propulsive force is generated by magnetic interaction between magnetic flux generated in the coil by supplying currents of different phases to the linear motor stator 13 (23) and magnetic flux of the permanent magnet of the linear motor mover 32. In other words, the propulsive force enables the slider 3 to move in the X direction or the R direction.

[0045] (Magnetic scale) 2 and 3, the magnetic scale 4 is a scale for measuring the position of the slider 3 which slides linearly and curvedly. The magnetic scale 4 is provided on the slider 3. Here, the magnetic scale 4 is provided on the slider frame 31 via a bracket 33. The magnetic scale 4 is disposed inside the slider frame 31 with the magnetic scale 41 for linear movement facing the magnetic sensor 5 in the Z direction and the magnetic scale 42 for curvilinear movement facing the magnetic sensor 6 in the Z direction.

[0046] The magnetic scale 4 includes a base portion 40, a magnetic scale 41 for linear movement, and a magnetic scale 42 for curvilinear movement.

[0047] <Base section> The base portion 40 is a plate-like member formed of a magnetic material such as ferrite. That is, the base portion 40 has a rectangular shape with the X direction as the longitudinal direction when viewed from the Z1 direction side. The base portion 40 has a rectangular parallelepiped shape. The thickness of the base portion 40 in the Z direction is smaller than the width of the base portion 40 in the Y direction. The linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42 are recorded on the base portion 40 by being magnetized.

[0048] <Magnetic scale for linear movement and magnetic scale for curvilinear movement> 2 and 4, the magnetic scale for linear movement 41 is recorded on the base part 40 in order to measure the position of the slider 3 while the slider 3 is moving on the linear movement drive module 1. The magnetic scale for linear movement 41 is provided integrally with the base part 40. Note that in Figs. 2 and 4, the magnetic scale for linear movement 41 is shown by a dashed line in the figures, but this is merely an image for visualizing the magnetic scale for linear movement 41 in the figures.

[0049] The magnetic scale 41 for linear movement is formed linearly along the linear direction (X direction). The magnetic scale 41 for linear movement has a length L1 in the X direction (the moving direction (M direction) of the slider 3). A plurality (three) of the magnetic scales 41 for linear movement are provided on the base part 40. Each of the plurality of magnetic scales 41 for linear movement has a different magnetization pattern. That is, the period and phase of the magnetization pattern are different for each of the plurality of magnetic scales 41 for linear movement. Note that the number of magnetic scales 41 for linear movement provided on the base part 40 may not be three, but may be two, four or more.

[0050] The plurality of linear movement magnetic scales 41 are used to identify and detect the position of each of the plurality of sliders 3. Here, the position of the slider 3 is set corresponding to the difference in the magnetic detection values ​​of each of the plurality of linear movement magnetic scales 41 having different periods and phases of the magnetization patterns.

[0051] 3 and 5, the magnetic scale 42 for curvilinear movement is recorded on the base unit 40 in order to measure the position of the slider 3 while the slider 3 is moving on the drive module 2 for curvilinear movement. The magnetic scale 42 for curvilinear movement is provided integrally with the base unit 40. Note that in Figs. 3 and 5, the magnetic scale 42 for curvilinear movement is shown by a dashed line in the figures, but this is merely an image for visualizing the magnetic scale 42 for curvilinear movement in the figures.

[0052] The magnetic scale 42 for curvilinear movement is formed in a curved shape along the curve direction (R direction). The magnetic scale 42 for curvilinear movement has a length L2 in the M direction. A plurality (three) of the magnetic scales 42 for curvilinear movement are provided on the base part 40. Each of the plurality of the magnetic scales 42 for curvilinear movement has a different magnetization pattern. That is, the period and phase of the magnetization pattern are different for each of the plurality of the magnetic scales 42 for curvilinear movement. Note that instead of three, two, four or more magnetic scales 42 for curvilinear movement may be provided on the base part 40.

[0053] The multiple curvilinear movement magnetic scales 42 are used to identify and detect the position of each of the multiple sliders 3. Here, the position of the slider 3 is set corresponding to the difference in the magnetic detection values ​​of each of the multiple curvilinear movement magnetic scales 42 having different periods and phases of the magnetization patterns.

[0054] (Positional relationship between the linear and curvilinear magnetic scales) In this embodiment, as shown in Fig. 6, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are provided integrally with the base part 40 in a state spaced apart from each other. The magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are provided integrally with each other in a state spaced apart from each other on different surfaces of the base part 40. In Fig. 6, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are shown by dashed lines in the figure, but this is merely an image for visualizing the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement in the figure.

[0055] Specifically, the magnetic scale 41 for linear movement is provided integrally with a first surface 40a of the base portion 40. The first surface 40a is the upper surface of the base portion 40 on the Z1 direction side. The magnetic scale 41 for linear movement faces the magnetic sensor 5 in the Z direction (see FIG. 2). The magnetic scale 42 for curvilinear movement is provided integrally with a second surface 40b of the base portion 40. The second surface 40b is the lower surface of the base portion 40 on the Z2 direction side. In this manner, the second surface 40b is disposed on the rear side of the first surface 40a in the base portion 40. The magnetic scale 42 for curvilinear movement faces the magnetic sensor 6 in the Z direction (see FIG. 3).

[0056] 7 and 8, one end 41a of the magnetic scale for linear movement 41 and one end 42a of the magnetic scale for curvilinear movement 42 are disposed at substantially the same position in the movement direction (M direction) of the slider 3. Here, one end 41a of the magnetic scale for linear movement 41 is the end on the M1 direction side of the magnetic scale for linear movement 41. One end 42a of the magnetic scale for curvilinear movement 42 is the end on the M1 direction side of the magnetic scale for curvilinear movement 42.

[0057] The other end 41b of the magnetic scale for linear movement 41 and the other end 42b of the magnetic scale for curvilinear movement 42 are disposed at substantially the same position. Here, the other end 41b of the magnetic scale for linear movement 41 is the end on the M2 direction side of the magnetic scale for linear movement 41. The other end 42b of the magnetic scale for curvilinear movement 42 is the end on the M2 direction side of the magnetic scale for curvilinear movement 42.

[0058] (Magnetic sensor) As shown in FIG. 7, the magnetic sensor 5 is provided in the linear movement drive module 1. The magnetic sensor 5 is configured to detect the magnetism of the linear movement magnetic scale 41. A plurality of magnetic sensors 5 are arranged at a predetermined pitch in the M direction in accordance with the length L1 (see FIG. 4) of the linear movement magnetic scale 41 in the X direction. The predetermined pitch is an interval smaller than the length L1. A plurality of (three) magnetic sensors 5 are arranged at a predetermined pitch in the W direction so as to face the plurality of linear movement magnetic scales 41.

[0059] As shown in FIG. 8, the magnetic sensor 6 is provided in the curvilinear movement drive module 2. The magnetic sensor 6 is configured to detect magnetism of the curvilinear movement magnetic scale 42. A plurality of magnetic sensors 6 are arranged at a predetermined pitch in the R direction in accordance with the length L2 (see FIG. 5) of the curvilinear movement magnetic scale 42 in the M direction. The predetermined pitch is an interval smaller than the length L2. A plurality (three) of the magnetic sensors 6 are arranged at a predetermined pitch in a direction perpendicular to the central axis C1 (C2) so as to face the plurality of curvilinear movement magnetic scales 42.

[0060] (Effects of the first embodiment) In the first embodiment, the following effects can be obtained.

[0061] In the first embodiment, as described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are provided in a state separated from each other. This ensures a distance between the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement, so that magnetic interference between the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement can be more reliably suppressed.

[0062] In the first embodiment, as described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are provided on different surfaces spaced apart from each other. This allows the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement to be provided on different surfaces of the same member, making it possible to suppress an increase in the number of parts of the conveying device 100 compared to a case in which the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are provided on the surfaces of different members.

[0063] In the first embodiment, as described above, the magnetic scale 4 is provided on the slider 3. The magnetic sensors 5 and 6 are provided on the linear movement drive module 1 and the curved movement drive module 2, respectively. As a result, the linear movement drive module 1 and the curved movement drive module 2 are fixed in predetermined locations, and therefore, unlike the case where the magnetic sensor 5(8) is provided on a moving configuration such as the slider 3, it is possible to easily connect the magnetic sensor 5(8) to a power supply facility for supplying power to the magnetic sensor 5(8).

[0064] Furthermore, in the first embodiment, as described above, the slider 3 includes the slider frame 31 on the inside of which the magnetic scale 4 is arranged, with the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42 facing the magnetic sensors 5 and 8 in the up-down direction, respectively. This allows the magnetic scale 4 to be stored inside the slider frame 31, so that the slider 3 can be prevented from becoming larger in size, compared to a case in which the slider frame 31 has the same size and the magnetic scale 4 is arranged outside the slider frame 31.

[0065] In the first embodiment, as described above, the magnetic scale 4 includes the base portion 40 on which the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are integrally provided. As a result, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are integrally provided on the same base portion 40. Even if the base portion 40 expands or contracts due to a temperature change, an error in the position measurement of the slider 3 can be generated for the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement according to the expansion or contraction of the base portion 40. Therefore, the position measurement errors of the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement can be made substantially equal. As a result, the same correction value can be used to correct the position measurement error during linear movement of the slider 3 and the position measurement error during curvilinear movement of the slider 3, making it easier to control the position acquisition.

[0066] In the first embodiment, as described above, the base portion 40 includes a first surface 40a on which the magnetic scale for linear movement 41 is provided, and a second surface 40b on which the magnetic scale for curvilinear movement 42 is provided and which is a surface different from the first surface 40a. This makes it possible to suppress an increase in the dimensions of the base portion 40 in the direction in which the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are aligned, compared to a case in which the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are arranged side by side on the same surface, and therefore makes it possible to suppress an increase in the size of the conveying device 100 in the above-mentioned direction in which they are aligned.

[0067] In the first embodiment, as described above, the second surface 40b is disposed on the rear side of the first surface 40a in the base portion 40. With this, the first surface 40a constitutes the front surface of the base portion 40, and the second surface 40b constitutes the rear surface of the base portion 40, so that the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42 can be disposed to overlap in a plan view, thereby suppressing an increase in the dimension of the base portion 40 in the M direction.

[0068] In the first embodiment, as described above, one end 41a of the magnetic scale for linear movement 41 and one end 42a of the magnetic scale for curvilinear movement 42 are arranged at substantially the same position in the movement direction of the slider 3, and the other end 41b of the magnetic scale for linear movement 41 and the other end 42b of the magnetic scale for curvilinear movement 42 are arranged at substantially the same position. This allows the lengths L1 and L2 of the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 in the M direction (movement direction of the slider 3) to be substantially the same, so that when either one of the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 is set to the maximum length suited to the installation space, the other of the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 can also be set to the same maximum length. As a result, by arranging the magnetic sensors 5(8) so that the distance between them is maximized, the magnetic sensors 5(8) can be arranged with the distance between them maximized, and therefore the number of magnetic sensors 5 and magnetic sensors 6 required to measure the position of the slider 3 can be minimized.

[0069] [Second embodiment] The configuration of the magnetic scale 204 of the conveying device 200 according to the second embodiment will be described with reference to Fig. 9. Unlike the first embodiment, the magnetic scale 204 in the second embodiment includes a magnetic shielding plate 243 that shields the magnetic fields of the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42. Note that in the second embodiment, detailed descriptions of the same configuration as in the first embodiment will be omitted.

[0070] (Base part) As shown in Fig. 9, the magnetic scale 204 of the second embodiment includes a magnetic shielding plate 243 that is disposed between the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement and shields the magnetic fields emitted from the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement. The magnetic shielding plate 243 is made of a ferromagnetic metal such as iron. In Fig. 9, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are shown by dashed lines in the figure, but this is merely an image for visualizing the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement in the figure.

[0071] The magnetic shield plate 243 has a rectangular shape with the M direction as a longitudinal direction when viewed from the Z1 direction side. The magnetic shield plate 243 has a rectangular parallelepiped shape. The thickness of the magnetic shield plate 243 in the Z direction is smaller than the width of the magnetic shield plate 243 in the W direction. A base portion 240 on which multiple (three) magnetic scales 41 for linear movement are recorded is attached to a first surface 243a of the magnetic shield plate 243. The first surface 243a is the upper surface of the magnetic shield plate 243 on the Z1 direction side. A base portion 240 on which multiple (three) magnetic scales 42 for curvilinear movement are recorded is attached to a second surface 243b of the magnetic shield plate 243. The second surface 243b is the lower surface of the magnetic shield plate 243 on the Z2 direction side. Two or four or more magnetic scales 41 for linear movement may be recorded on the base portion 240. Furthermore, two, four or more curvilinear movement magnetic scales 42 may be recorded on the base portion 240. Other configurations of the second embodiment are the same as those of the first embodiment, and therefore description thereof will be omitted.

[0072] (Effects of the second embodiment) In the second embodiment, similarly to the first embodiment, the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42 are provided apart from each other. This makes it possible to more reliably suppress magnetic interference between the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42.

[0073] In the second embodiment, as described above, the magnetic scale 204 has a magnetic shield plate 243 that is disposed between the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement and shields the magnetic fields emitted from the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement. This allows the magnetic shield plate 243 to suppress magnetic interference between the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement, so that the distance separating the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement can be reduced. As a result, the thickness required for the base portion 240 disposed between the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement can be reduced, so that the magnetic scale 204 including the magnetic scale 41 for linear movement, the magnetic scale 42 for curvilinear movement, and the base portion 240 can be prevented from becoming large. Other effects of the second embodiment are similar to those of the first embodiment.

[0074] [Third embodiment] The configuration of the magnetic scale 304 of the conveying device 300 according to the third embodiment will be described with reference to Fig. 10. In the third embodiment, unlike the first embodiment, both the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42 are provided on the same surface of the base portion 340. Note that in the third embodiment, the description of the same configuration as in the first embodiment will be omitted.

[0075] (Base part) As shown in Fig. 10, the base part 340 is a plate-like member formed of a magnetic material such as ferrite. When viewed from the Z1 direction side, the base part 340 has a rectangular shape with the M direction as the longitudinal direction. The base part 340 has a rectangular parallelepiped shape. The thickness of the base part 340 in the Z direction is smaller than the width of the base part 340 in the W direction. Here, in Fig. 10, the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are shown by dashed lines in the figure, but this is merely an image for visualizing the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 in the figure.

[0076] Here, both the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are provided side by side on the same surface 340a of the base part 340. The same surface 340a is the upper surface of the base part 340. The magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are provided on the same surface 340a of the base part 340 in a state spaced apart from each other in the direction in which the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are arranged. Specifically, a separation space S is provided between a group of multiple magnetic scales for linear movement 41 and a group of multiple magnetic scales for curvilinear movement 42.

[0077] (Effects of the third embodiment) In the third embodiment, the following effects can be obtained.

[0078] In the third embodiment, similarly to the first embodiment, the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42 are provided apart from each other. This makes it possible to more reliably suppress magnetic interference between the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42.

[0079] In the third embodiment, as described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are provided spaced apart from each other on the same surface 340a. This allows the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement to be provided on the same surface 340a of the same member, making it possible to suppress an increase in the number of parts of the conveying device 300 compared to a case in which the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are provided on the surfaces of different members.

[0080] In the third embodiment, as described above, in the conveying device 100, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are provided on the same surface 340a of the base part 340 in a state spaced apart from each other in the direction in which the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are arranged. As a result, by providing the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement on the same surface 340a of the base part 340, it is possible to suppress an increase in the space required to install the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement in the direction perpendicular to the same surface 340a, compared to a case in which the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are arranged side by side in the direction perpendicular to the same surface 340a. Other effects of the third embodiment are similar to those of the first embodiment.

[0081] [Fourth embodiment] The configuration of the magnetic scale 404 of the transport device 400 according to the fourth embodiment will be described with reference to Fig. 11. Unlike the first embodiment, the fourth embodiment has a first surface 440a and a second surface 440b that are substantially perpendicular to each other in the base portion 440. Note that in the fourth embodiment, the description of the same configuration as the first embodiment will be omitted.

[0082] (Base part) As shown in Fig. 11, the base part 440 is formed of a magnetic material using a ferrite material or the like. The base part 440 is an angle material having a substantially L-shaped cross section along the Z direction. In Fig. 11, the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are shown by dashed lines in the figure, but this is merely an image for visualizing the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 in the figure.

[0083] Here, the magnetic scale 41 for linear movement is recorded on a first surface 440a of the base portion 440. The first surface 440a is the inner surface of the base portion 440. The magnetic scale 42 for curvilinear movement is recorded on a second surface 440b of the base portion 440. The second surface 440b is the inner bottom surface of the base portion 440. The second surface 440b and the first surface 440a are approximately perpendicular to each other.

[0084] (Effects of the fourth embodiment) In the fourth embodiment, the following effects can be obtained.

[0085] In the fourth embodiment, similarly to the first embodiment, the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42 are provided apart from each other. This makes it possible to more reliably suppress magnetic interference between the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42.

[0086] In the fourth embodiment, as described above, the second surface 440b and the first surface 440a are substantially perpendicular to each other. As a result, the linear movement magnetic scale 41 is provided on the first surface 440a, and the curvilinear movement magnetic scale 42 is provided on the second surface 440b that is substantially perpendicular to the first surface 440a. This allows the magnetic sensor 5 that detects the magnetism of the linear movement magnetic scale 41 to be disposed near the magnetic sensor 6 that detects the magnetism of the curvilinear movement magnetic scale 42. As a result, the space required to dispose the magnetic sensor 5 and the magnetic sensor 6 can be made compact. Other effects of the fourth embodiment are similar to those of the first embodiment.

[0087] [Fifth embodiment] The configuration of the magnetic scale 504 of the transport device 500 according to the fifth embodiment will be described with reference to Fig. 12. In the fifth embodiment, unlike the first embodiment, the second surface 540b and the first surface 540a are substantially perpendicular to each other. Note that in the fifth embodiment, the description of the same configuration as the first embodiment will be omitted.

[0088] (Base part) As shown in Fig. 12, the base portion 540 is formed of a magnetic material using a ferrite material, etc. In Fig. 12, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are shown by dashed lines, but this is merely an image for visualizing the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement in the figure.

[0089] Here, the magnetic scale 41 for linear movement is recorded on a first surface 540a of the base portion 540. The first surface 540a is the upper surface of the base portion 540. The magnetic scale 42 for curvilinear movement is recorded on a second surface 540b of the base portion 540. The second surface 540b is the outer surface of the base portion 540. The second surface 540b and the first surface 540a are approximately perpendicular to each other. The second surface 540b is a curved surface corresponding to the curvature of the magnetic scale 42 for curvilinear movement.

[0090] (Effects of the fifth embodiment) In the fifth embodiment, the following effects can be obtained.

[0091] In the fifth embodiment, similarly to the first embodiment, the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42 are provided apart from each other. This makes it possible to more reliably suppress magnetic interference between the linear movement magnetic scale 41 and the curvilinear movement magnetic scale 42.

[0092] In the fifth embodiment, as described above, the second surface 540b and the first surface 540a are substantially perpendicular to each other. The second surface 540b is a curved surface corresponding to the curvature of the magnetic scale 42 for curvilinear movement. As a result, the curved surface of the second surface 540b is formed along the curved direction of the slider 3, so that the position of the slider 3 during its curvilinear movement can be appropriately detected by the magnetic scale 42 for curvilinear movement provided on the second surface 540b. Other effects of the fifth embodiment are similar to those of the first embodiment.

[0093] [Variations] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims, not by the description of the embodiments above, and further includes all modifications (variations) within the meaning and scope of the claims.

[0094] For example, in the above first to fifth embodiments, the magnetic scale 4 (204, 304, 404, and 504) has the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 integrally provided on the base portion 40 (240, 340, 440, and 540), but the present invention is not limited thereto. In the present invention, as in a first modified example shown in FIG. 13, one set of magnetic scale for linear movement 41 and two sets of magnetic scale for curvilinear movement 42 may be integrally provided on a substrate portion 640, not on the base portion 40. Specifically, the transport device 600 includes a magnetic scale 604 and a back yoke 607. The magnetic scale 604 includes a substrate portion 640 on which the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are provided. The magnetic scale 42 for curvilinear movement includes a first curved scale portion 642a formed according to a first curved direction as a curved direction, and a second curved scale portion 642b formed according to a second curved direction different from the first curved direction. The base portion 640 constitutes the lower surface of the base portion 640 and includes a straight line position detection surface 640a on which the magnetic scale 41 for linear movement is provided. The base portion 640 includes a first curved line position detection surface 640b that protrudes from the straight line position detection surface 640a and on which the first curved scale portion 642a is provided. The base portion 640 includes a second curved line position detection surface 640c that faces the first curved line position detection surface 640b and on which the second curved scale portion 642b is provided. As a result, the first curved scale portion 642a and the second curved scale portion 642b can perform position measurement during multiple curved movements of the slider 3 in the first curved direction and the second curved direction, so that position measurement can be performed even when the slider 3 moves in curved directions opposite to each other. This improves the degree of freedom of the path along which the slider 3 moves. Here, the magnetic scale 604 may be formed by magnetizing each of the magnetic scale for linear movement 41, the first curved scale portion 642a, and the second curved scale portion 642b on a magnetic material and then bonding the magnetic material to the base material portion 640. The magnetic scale 604 may also be formed by magnetizing each of the magnetic scale for linear movement 41, the first curved scale portion 642a, and the second curved scale portion 642b on a magnetic material bonded to the base material portion 640.In addition, the magnetic scale 604 may be formed by insert molding into the base material portion 640 a plurality of magnetic bodies each having a magnetized magnetic scale 41 for linear movement, a first curvilinear scale portion 642a, and a second curvilinear scale portion 642b.

[0095] In the above first to fifth embodiments, the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are provided integrally with the base portion 40 (240, 340, 440 and 540), but the present invention is not limited to this. In the present invention, a magnetic body magnetized with the magnetic scale for linear movement and the magnetic scale for curvilinear movement may be adhered to the base portion.

[0096] In addition, in the above first to fifth embodiments, the magnetic scale 4 (204, 304, 404, and 504) is provided on the slider 3, but the present invention is not limited to this. In the present invention, the magnetic scale may be provided on the drive module. In this case, the magnetic sensor is provided on the slider, not on the drive module.

[0097] In the above first embodiment, the magnetic scale 4 (204, 304, 404, and 504) is disposed inside the slider frame 31, but the present invention is not limited to this. In the present invention, the magnetic scale may be disposed outside the slider frame.

[0098] In the above first to third embodiments, the base portion 40 (240, 340, 440, and 540) is a thin plate whose thickness in the Z direction is smaller than its width in the Y direction, but the present invention is not limited to this. In the present invention, the base portion may be a thin plate whose thickness in the Y direction is smaller than its width in the Z direction.

[0099] In the third embodiment, the flush surface 340a is the upper surface of the base portion 40 (240, 340, 440, and 540), but the present invention is not limited to this. In the present invention, the flush surface may be a lower surface, a side surface, or the like other than the upper surface.

[0100] In the above first to fifth embodiments, the transport device 100 (200, 300, 400, 500) is a linear conveyor that moves the slider 3 along the circular path 102 using a linear motor, but the present invention is not limited to this. In the present invention, the transport device may drive the slider using a belt conveyor. Also, the transport device may be a device combined with a transport mechanism that transports the slider together in a direction perpendicular to the linear movement direction of the slider.

[0101] In the above first to fifth embodiments, the path along which the slider 3 moves is the circular path 102 provided in a horizontal plane, but the present invention is not limited to this. In the present invention, the path along which the slider moves may be a path having a slope inclined with respect to the horizontal plane.

[0102] In the above first to fifth embodiments, the path along which the slider 3 moves is the circular path 102 that is annular in plan view, but the present invention is not limited to this. In the present invention, the path along which the slider moves may be a path that is J-shaped in plan view instead of a circular path.

[0103] In the above first to fifth embodiments, three magnetic scales 41 for linear movement and three magnetic scales 42 for curvilinear movement are provided, but the present invention is not limited to this. In the present invention, two or four or more magnetic scales for linear movement and curvilinear movement may be provided.

[0104] In the above four embodiments, the base portion 440 is an angle bar having a substantially L-shape in cross section along the Z direction (vertical direction), but the present invention is not limited to this. In the present invention, the base portion may be a substantially C-shaped member having a first surface and a second surface opposed to each other in the vertical direction, and a connecting surface connecting the first surface and the second surface.

[0105] In the fourth and fifth embodiments, the second surface 440b (562) and the first surface 440a (561) are generally perpendicular to each other, but the present invention is not limited to this. In the present invention, the second surface and the first surface may intersect at an acute angle or an obtuse angle.

[0106] In the above first embodiment, an example has been shown in which the magnetic scale 4 is arranged inside the slider frame 31 with the magnetic scale 41 for linear movement facing the magnetic sensor 5 in the Z direction and the magnetic scale 42 for curvilinear movement facing the magnetic sensor 6 in the Z direction, but the present invention is not limited to this. The magnetic scale may be arranged inside the slider frame with the magnetic scale for linear movement facing the magnetic sensor in the width direction and the magnetic scale for curvilinear movement facing the magnetic sensor in the width direction.

[0107] In the second embodiment, the base portion 240 on which the multiple (three) linear movement magnetic scales 41 are recorded is attached to the first surface 243a of the magnetic shield plate 243, and the base portion 240 on which the multiple (three) curvilinear movement magnetic scales 42 are recorded is attached to the second surface 243b of the magnetic shield plate 243. However, the present invention is not limited to this. In the present invention, as in the second modified example shown in FIG. 14, the base portion 740 on which the linear movement magnetic scales 41 are recorded may be attached to the first surface 243a of the multiple (three) magnetic shield plates 243. Also, the base portion 740 on which the curvilinear movement magnetic scales 42 are recorded may be attached to the second surface 243b of the multiple (three) magnetic shield plates 243. Note that two or four or more base portions 740 on which the linear movement magnetic scales 41 are recorded may be attached to the first surface 243a of the magnetic shield plate 243. Also, two or four or more base portions 740 on which the magnetic scale 42 for curvilinear movement is recorded may be attached to the second surface 243b of the magnetic shielding plate 243. Also, in Fig. 14, the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement are shown by dashed lines in the drawing, but this is merely an image for visualizing the magnetic scale 41 for linear movement and the magnetic scale 42 for curvilinear movement in the drawing.

[0108] In the second embodiment, the base portion 240 on which the multiple (three) magnetic scales for linear movement 41 are recorded is attached to the first surface 243a of the magnetic shield plate 243, and the base portion 240 on which the multiple (three) magnetic scales for curvilinear movement 42 are recorded is attached to the second surface 243b of the magnetic shield plate 243. However, the present invention is not limited to this. In the present invention, as in the third modified example shown in FIG. 15 and FIG. 16, the base portion 840 on which the multiple (three) magnetic scales for linear movement 41 and the multiple (three) magnetic scales for curvilinear movement 42 are recorded may be insert molded into the magnetic shield plate 243. Two or four or more magnetic scales for linear movement 41 may be recorded on the base portion 840. Two or four or more magnetic scales for curvilinear movement 42 may be recorded on the base portion 840. In addition, in Figures 15 and 16, the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 are shown by dashed lines in the figures, but this is merely an image for visualizing the magnetic scale for linear movement 41 and the magnetic scale for curvilinear movement 42 in the figures. [Explanation of symbols]

[0109] 1. Linear movement drive module (drive module) 2. Drive module for curved movement (drive module) 3 Slider 4, 204, 304, 404, 504 Magnetic Scale 5. Magnetic Sensor 6 Magnetic Sensors 31 Slider Frame 40, 240, 340, 440, 540, 740, 840 Base 40a, 440a, 540a 1st side 40b, 440b, 540b 2nd side 41 Magnetic scale for linear motion 41a One side end 41b Other side end 42 Magnetic scale for curvilinear movement 42a One side end 42b Other side end 100, 200, 300, 400, 500, 600 Conveyor 243 Magnetic shield 340a Same side 640 Base material part 640a Linear position detection surface 640b Position detection surface for first curve 640c Position detection surface for second curve 642a First curved scale section 642b Second curved scale section

Claims

1. a slider movable along a linear direction and a curved direction; a drive module for moving the slider along the linear direction or the curved direction; a magnetic scale provided on one of the slider or the drive module, the magnetic scale including a magnetic scale for linear movement formed linearly along the linear direction and a magnetic scale for curvilinear movement formed curvedly along the curvilinear direction; a magnetic sensor provided on the other of the slider or the drive module, the magnetic sensor detecting magnetism of each of the linear movement magnetic scale and the curvilinear movement magnetic scale; A conveying device, wherein the linear movement magnetic scale and the curvilinear movement magnetic scale are provided spaced apart from each other.

2. 2. The transport device according to claim 1, wherein the linear movement magnetic scale and the curvilinear movement magnetic scale are provided on the same surface or different surfaces and spaced apart from each other.

3. the magnetic scale is provided on the slider, The transport device according to claim 1 , wherein the magnetic sensor is provided in the drive module.

4. 4. The conveying device according to claim 3, wherein the slider includes a slider frame on the inside of which the magnetic scale is arranged, with the magnetic scale for linear movement and the magnetic scale for curvilinear movement facing each other in a vertical direction relative to the magnetic sensor or in a width direction perpendicular to the vertical direction and the movement direction of the slider.

5. 5. The conveying device according to claim 1, wherein the magnetic scale further includes a base portion on which the linear movement magnetic scale and the curvilinear movement magnetic scale are integrally provided.

6. The base portion is a first surface on which the linear motion magnetic scale is provided; 6. The transport apparatus of claim 5, wherein the curvilinear magnetic scale is provided and includes a second surface different from the first surface.

7. The transport device according to claim 6 , wherein the second surface is disposed on a rear side of the first surface of the base portion.

8. 8. The conveying device according to claim 7, wherein the base portion has a magnetic shielding plate disposed between the magnetic scale for linear movement and the magnetic scale for curvilinear movement, for blocking magnetism emitted from each of the magnetic scale for linear movement and the magnetic scale for curvilinear movement.

9. The conveying device according to claim 6 , wherein the second surface and the first surface are substantially perpendicular to each other.

10. The second surface and the first surface are substantially perpendicular to each other, 10. The transport device according to claim 9, wherein the second surface is a curved surface that corresponds to a curvature of the magnetic scale for curvilinear movement.

11. 6. The conveying device according to claim 5, wherein the magnetic scale for linear movement and the magnetic scale for curvilinear movement are provided on the same surface of the base portion while being spaced apart from each other in a direction in which the magnetic scale for linear movement and the magnetic scale for curvilinear movement are arranged.

12. the magnetic scale further includes a base portion on which the linear movement magnetic scale and the curvilinear movement magnetic scale are provided, The curvilinear movement magnetic scale is a first curved scale portion formed in accordance with a first curved direction as the curved direction; a second curved scale portion formed in accordance with a second curved direction different from the first curved direction, The substrate portion is a linear position detection surface that constitutes an upper surface or a lower surface of the base portion and on which the linear movement magnetic scale is provided; a first curved line position detection surface protruding from the straight line position detection surface and having the first curved line scale portion provided thereon; 4. The conveying device according to claim 1, further comprising a second curved position detection surface, opposed to the first curved position detection surface, and having the second curved scale portion provided thereon.

13. the magnetic scale is provided on the slider, A conveying device as described in any one of claims 1 to 12, wherein, in the movement direction of the slider, one end of the magnetic scale for linear movement and one end of the magnetic scale for curvilinear movement are arranged at approximately the same position, and the other end of the magnetic scale for linear movement and the other end of the magnetic scale for curvilinear movement are arranged at approximately the same position.

Images