Image Probe

Abstract

To provide an observation device, such as an image probe, that can be easily attached to and detached from a processing device.SOLUTION: An image probe 100 is provided, comprising: an image capturing device 140 for capturing an image of a workpiece; a focusing lens 132 for forming an image of the workpiece in the image capturing device 140; an object lens 131 for guiding light to the focusing lens 132; a cover 150 designed to accommodate the image capturing device 140 and the focusing lens 132; and a handle 160 attached to the cover 150, the handle 160 having a grip 162 provided at a distance from the cover 150.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to an image probe which can be attached to a machining device such as an electric discharge machine. [Background technology]

[0002] When a workpiece is machined using a machining device such as an electric discharge machine, an observation device may be attached to the machining device to observe the shape of the workpiece after machining and measure its dimensions. Furthermore, if the results of the observation and measurement show that machining is not complete, the observation device may be removed from the machining device in order to machine the workpiece again. When machining and observation and measurement are repeated, this attachment and detachment process may be repeated. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Utility Model Application Publication No. 57-081032 Summary of the Invention [Problem to be solved by the invention]

[0004] During the above-mentioned attachment and detachment work, there is a risk that the observation device may be dropped.

[0005] The present invention has been made in consideration of the above problems, and has an object to provide an observation device such as an image probe that can be easily attached to and detached from a processing device. [Means for solving the problem]

[0006] An image probe according to an embodiment of the present invention includes an imaging device for imaging a workpiece, a focusing lens for forming an image of the workpiece on the imaging device, an objective lens for directing light to the focusing lens, a cover for housing the imaging device and the focusing lens, an attachment mechanism connected to the cover and configured to be attachable to a processing device, and a handle attached to the cover. The handle also includes a gripping portion provided at a position separated from the cover.

[0007] According to this configuration, the image probe can be attached to and detached from the processing device by gripping the gripping portion instead of the outer circumferential surface of the cover, which makes it possible to provide an image probe that can be easily attached to and detached from the processing device while preventing the image probe from being dropped.

[0008] The image probe may be configured to be attachable to a processing device, and the gripper may be spaced from the cover in a first direction intersecting a direction in which the image probe is attached to the processing device.

[0009] In this case, the gripping portion may extend in a second direction different from the first direction when viewed from the first direction, and the angle between the second direction and the mounting direction may be 30° or less.

[0010] In this case, the gripping portion may extend in a fourth direction different from the first direction when viewed from a third direction perpendicular to the mounting direction and the first direction, and the angle between the fourth direction and the mounting direction may be 30° or less.

[0011] With this configuration, it becomes easy to keep the posture of the image probe stable when the gripping portion is gripped, and it becomes easy to move the image probe in the attachment direction in this state.

[0012] Furthermore, when the position of the center of gravity of the imaging probe in the mounting direction is defined as a first position, the grip portion may be provided across an area including the first position in the mounting direction.

[0013] According to this configuration, it is possible to provide the grip portion at a position close to the center of gravity of the imaging probe, which makes it easy to keep the imaging probe in a stable position when the grip portion is gripped.

[0014] Furthermore, at least a part of the surface of the grip portion opposite the cover may be a convex curved surface that comes into contact with the palm when the grip portion is gripped.

[0015] Furthermore, at least a part of the surface of the grip portion on the cover side may be a concave curved surface that comes into contact with one of the fingers when the grip portion is gripped.

[0016] The imaging probe may include a first power line and a signal line connected to the imaging device, an illumination device housed in the cover or attached to the cover, and a second power line connected to the illumination device. The grip portion includes an insertion portion through which the first power line, the second power line, and a part of the signal line can be inserted.

[0017] According to this configuration, it is possible to pull out the power lines and the like from one place, which makes it easier to handle the image probe. As a result, it is possible to provide an image probe that can be more easily attached to and detached from a processing device.

[0018] The imaging probe may also be a cableless imaging probe comprising an illumination device housed in the cover or attached to the cover, and a power supply means housed in the cover for supplying power to at least one of the illumination device and the imaging device. Effect of the Invention

[0019] According to this configuration, it is possible to provide an image probe that can be easily attached to and detached from a processing device. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is a schematic front view showing the configuration of an electric discharge machine 10. [Diagram 2]FIG. 1 is a schematic front view showing the configuration of an electric discharge machine 10. [Diagram 3] FIG. 1 is a schematic diagram showing the configuration of an image probe 100. [Figure 4] FIG. 2 is a schematic side view showing the configuration of the image probe 100. [Diagram 5] FIG. 1 is a schematic front view showing the configuration of an image probe 100. [Figure 6] FIG. 2 is a schematic top view showing the configuration of the image probe 100. [Figure 7] 2 is a schematic side view showing the configuration of the image probe 100 and the attachment mechanism 16. FIG. [Figure 8] FIG. 11 is a schematic side view showing the configuration of an image probe 220 according to a second embodiment. [Figure 9] FIG. 11 is a schematic side view showing the configuration of an image probe 230 according to a third embodiment. [Figure 10] FIG. 11 is a schematic front view showing the configuration of an image probe 240 according to a fourth embodiment. [Figure 11] FIG. 13 is a schematic side view showing the configuration of an image probe 250 according to a fifth embodiment. [Figure 12] FIG. 13 is a schematic top view showing the configuration of an image probe 260 according to a sixth embodiment. [Figure 13] FIG. 13 is a schematic side view showing the configuration of an image probe 270 according to a seventh embodiment. [Figure 14] FIG. 13 is a schematic diagram showing the configuration of an image probe 300 according to an eighth embodiment. [Figure 15] FIG. 2 is a schematic side view showing the configuration of an image probe 300. [Figure 16] FIG. 2 is a schematic front view showing the configuration of an image probe 300. [Figure 17] FIG. 2 is a schematic top view showing the configuration of an image probe 300. [Figure 18] FIG. 2 is a schematic side view showing the configuration of an image probe 300 and an attachment mechanism 16'. [Figure 19] FIG. 13 is a schematic side view showing the configuration of an image probe 400 according to a ninth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Imaging probes according to some embodiments of the present invention will now be described.

[0022] In the following description, the same parts are denoted by the same reference numerals and the description thereof will be omitted.

[0023] In the following description, an example will be described in which the optical axis direction of the objective lens of the image probe and the mounting direction of the image probe with respect to the processing device coincide with the Z direction. However, this configuration is merely an example for the purpose of explanation, and the specific configuration etc. can be appropriately adjusted.

[0024] In the following description, an electric discharge machine is exemplified as a machining device to which an image probe is attached, however, the machining device to which an image probe is attached does not have to be an electric discharge machine.

[0025] [First embodiment] 1 and 2 are schematic front views showing the configuration of an electric discharge machine 10. Fig. 1 shows the state during machining of a workpiece 14. Fig. 2 shows the state during observation and measurement of the workpiece 14.

[0026] 1, the electric discharge machine 10 includes a base 11 and a machining tank 12 provided on the base 11. Machining fluid 13 and a workpiece 14 are provided in the machining tank 12. The electric discharge machine 10 also includes an attachment mechanism 16 configured to be able to attach a machining electrode 15, a Z-axis drive mechanism 17 capable of adjusting the positional relationship between the attachment mechanism 16 and the machining tank 12 in the Z direction, an X-axis drive mechanism 18 capable of adjusting the positional relationship between the attachment mechanism 16 and the machining tank 12 in the X direction, and a Y-axis drive mechanism 19 capable of adjusting the positional relationship between the attachment mechanism 16 and the machining tank 12 in the Y direction.

[0027] 1, when machining a workpiece 14, a machining electrode 15 is attached to a mounting mechanism 16. The entire workpiece 14 and at least a part of the machining electrode 15 are immersed in the machining liquid 13.

[0028] 2, when observing and measuring the workpiece 14, an image probe 100 is attached to the attachment mechanism 16. Furthermore, at least the upper surface of the workpiece 14 and the image probe 100 are not immersed in the machining liquid 13.

[0029] 3 is a schematic diagram showing the configuration of the image probe 100. The image probe 100 includes an epi-illumination device 110, a dark-field illumination device 120, an optical system 130, an imaging device 140, a cover 150 that houses at least a part of these devices, and a handle portion 160 attached to the cover 150.

[0030] The epi-illumination device 110 is, for example, an illumination device such as an LED. The epi-illumination device 110 may be housed in a cover 150, for example.

[0031] The dark field illumination device 120 is, for example, an illumination device such as an LED. The dark field illumination device 120 may be, for example, a ring illumination configured in an annular shape. The dark field illumination device 120 may be, for example, configured to be detachable from the cover 150.

[0032] The optical system 130 includes, for example, an objective lens 131 facing the work 14, and a focusing lens 132 that forms an image of the work 14 on the imaging surface of the imaging device 140 based on light incident through the objective lens 131. The optical system 130 also includes a mirror 133 that reflects light irradiated from the epi-illumination device 110, and a half mirror 134 that reflects the light reflected by the mirror 133 and guides it to the work 14 via the objective lens 131, while transmitting the light reflected by the work 14 and incident through the objective lens 131. The objective lens 131 may be configured to be detachable from the cover 150, for example. The focusing lens 132, the mirror 133, and the half mirror 134 may be housed in the cover 150, for example.

[0033] The imaging device 140 is, for example, an imaging device such as a CMOS image sensor, a CCD image sensor, etc. The imaging device 140 may be housed in a cover 150, for example.

[0034] Fig. 4 is a schematic side view showing the configuration of the image probe 100. Fig. 5 is a schematic front view showing the configuration of the image probe 100. Fig. 6 is a schematic top view showing the configuration of the image probe 100. Fig. 7 is a schematic side view showing the configuration of the image probe 100 and the attachment mechanism 16.

[0035] The cover 150 includes a main body portion 151 and a clamp shaft 152 provided at the upper end of the main body portion 151, as shown in FIG.

[0036] The main body 151 accommodates the epi-illumination device 110 , the focusing lens 132 , the mirror 133 , the half mirror 134 , and the imaging device 140 .

[0037] The clamp shaft 152 constitutes an attachment mechanism that can be automatically attached to and detached from the electric discharge machine 10. The clamp shaft 152 has a generally cylindrical shape extending in the Z direction. The clamp shaft 152 includes a recess 153 with a relatively small radius, and a protrusion 154 that is provided above the recess 153 and has a larger radius than the recess 153.

[0038] 7 includes a base 21 capable of accommodating a clamp shaft 152, a plurality of balls 22 that abut against recesses 153 of the clamp shaft 152, a plurality of restraining members 23 that restrain the radial movement of the balls 22, and a coil spring 24 that imparts elastic force to the restraining members 23. The base 21 includes a hole 31 capable of accommodating the clamp shaft 152. The hole 31 extends in the Z direction. The base 21 also includes a hole 32 that accommodates the balls 22 so as to be movable in the radial direction. The hole 32 is connected to the hole 31 and extends in the radial direction. The base 21 also includes a housing 33 that accommodates the restraining members 23 so as to be movable in the Z direction. The housing 33 is connected to the hole 32. The base 21 also includes a hole 34 that is connected to the housing 33.

[0039] When the imaging probe 100 is attached to the attachment mechanism 16, the position of the restraining member 23 in the Z direction is fixed by the coil spring 24. In this state, the position of the ball 22 in the radial direction is restrained by the restraining member 23, and the ball 22 abuts against the recess 153 of the clamp shaft 152.

[0040] When the image probe 100 is to be removed from the attachment mechanism 16, air is injected through the hole 34. This presses the restraining member 23 downward, allowing the ball 22 to move in the radial direction. In this state, the image probe 100 is removed from the attachment mechanism 16 by pulling the image probe 100 downward.

[0041] When attaching the imaging probe 100 to the attachment mechanism 16, air is also injected through the hole 34. This presses the restraining member 23 downward, and the ball 22 becomes movable in the radial direction. In this state, the imaging probe 100 is moved from the bottom to the top to accommodate the clamp shaft 152 in the hole 31, and the injection of air into the hole 34 is stopped in this state, whereby the imaging probe 100 is attached to the attachment mechanism 16.

[0042] As shown in FIG. 4, for example, the handle portion 160 includes a support portion 161 connected to the cover 150 and extending in the Y direction, and a grip portion 162 connected to the support portion 161 and extending in the Z direction.

[0043] In the illustrated example, the support portion 161 has a substantially rectangular tubular shape extending in the Y direction. However, the support portion 161 may have any shape as long as it fixes the positional relationship between the cover 150 and the grip portion 162. Furthermore, the support portion 161 may have a portion connected to the upper end of the grip portion 162, as illustrated in FIG.

[0044] The grip portion 162 is provided at a position away from the cover 150 in the Y direction.

[0045] Moreover, grip portion 162 has a shape and size that allows it to be gripped more easily than cover 150. For example, grip portion 162 has a substantially rectangular tubular shape extending in the Z direction. Moreover, the width of grip portion 162 in the X direction is smaller than the width of cover 150 in the X direction. Moreover, the width of grip portion 162 in the Y direction is smaller than the width of cover 150 in the Y direction.

[0046] The gripping portion 162 is provided in the vicinity of the center of gravity P of the image probe 100. For example, the position of the center of gravity P of the image probe 100 in the Z direction is Z P Then, the gripping portion 162 is Z P It extends in the Z direction in a range including the above.

[0047] The gripping portion 162 has a shape and size that allows the imaging probe 100 or the like to be easily placed on a table or the like. For example, as shown in Fig. 4, the position of the lower end of the gripping portion 162 in the Z direction is provided above the position of the lower surface of the imaging probe 100 in the Z direction. In the illustrated example, the lower surface of the imaging probe 100 and the lower surface of the dark-field illumination device 120 coincide with each other. The lower surface of the dark-field illumination device 120 has an annular shape. For example, as shown in Fig. 6, when viewed from the Z direction, the center of gravity P of the imaging probe 100 is located within the range of a circumscribed circle of the lower surface of the dark-field illumination device 120.

[0048] As described above, the support portion 161 and the grip portion 162 have a substantially rectangular tubular shape. The spaces inside the support portion 161 and the grip portion 162 function as insertion portions. That is, FIG. 4 illustrates the power line 111 of the epi-illumination device 110, the power line 121 of the dark-field illumination device 120, the power line 141 of the imaging device 140, and the signal line 142 of the imaging device 140. These power lines 111, 121, 141, and the signal line 142 pass through the space inside the cover 150, the space inside the support portion 161, and the space inside the grip portion 162, and are drawn out to the lower end of the grip portion 162.

[0049] Here, as described above, when the workpiece 14 is machined by the electric discharge machine 10, the machining electrode 15 may be removed from the attachment mechanism 16 of the electric discharge machine 10 and an observation device may be attached in order to observe and measure the shape and the like of the machined workpiece 14. Furthermore, if the observation and measurement show that machining is not complete, the observation device may be removed from the attachment mechanism 16 and the machining electrode 15 may be attached. When machining and observation and measurement are repeated, this attachment and detachment operation may be repeated.

[0050] Here, there is a risk that the observation device may be dropped during the above-mentioned attachment and detachment work. For example, if the width of the observation device in the X-direction and Y-direction is too large or if the observation device is too heavy, the observation device may slip out of the operator's hand during the above-mentioned attachment and detachment work. In addition, if a large number of power lines, etc. are drawn out from the observation device, these power lines, etc. may become entangled with the electric discharge machine 10 or other components, and the tension of these power lines, etc. may apply a force in an unintended direction to the observation device, causing the observation device to slip out of the operator's hand. If the observation device is dropped, it may be damaged. In particular, when the electric discharge machine 10 is used, there is a risk that the observation device may be dropped into the machining liquid 13.

[0051] Here, the imaging probe 100 according to the first embodiment includes a cover 150 that houses an imaging device 140 and the like, and a handle portion 160 attached to the cover 150. The handle portion 160 also includes a grip portion 162 provided at a position separated from the cover 150.

[0052] According to this configuration, it is possible to perform the operation of attaching and detaching the image probe 100 to and from the electric discharge machine 10 while holding the gripping portion 162 instead of the outer circumferential surface of the cover 150. This makes it possible to provide an image probe 100 that can be easily attached and detached to and from the electric discharge machine 10 while preventing the image probe 100 from being dropped.

[0053] In this embodiment, the attachment direction (Z direction) of the image probe 100 to the electric discharge machine 10 and the extension direction (Z direction) of the gripping portion 162 coincide with each other.

[0054] With this configuration, it becomes easy to keep the posture of the image probe 100 stable when the gripping portion 162 is gripped, and it becomes easy to move the image probe 100 in the mounting direction (Z direction) in this state.

[0055] As described with reference to FIG. 4, the gripping portion 162 is P It extends in the Z direction in a range including (the position in the Z direction of the center of gravity P of the image probe 100).

[0056] According to such a configuration, it is possible to provide the grip portion 162 at a position close to the center of gravity of the imaging probe 100. Therefore, it becomes easy to keep the posture of the imaging probe 100 stable in a state where the grip portion 162 is gripped.

[0057] The image probe 100 also includes insertion portions through which a power line 111 of the epi-illumination device 110, a power line 121 of the dark-field illumination device 120, a power line 141 of the imaging device 140, and a portion of a signal line 142 of the imaging device 140 can be inserted.

[0058] According to such a configuration, the power line 111 of the epi-illumination device 110, the power line 121 of the dark field illumination device 120, the power line 141 of the imaging device 140, and the signal line 142 of the imaging device 140 can be pulled out together from one location, facilitating the handling of the image probe 100. This makes it possible to provide an image probe that can be more easily attached to and detached from the electric discharge machine 10.

[0059] [Other embodiments] The imaging probe 100 according to the first embodiment of the present invention has been described above. However, the above configuration is merely an example, and the specific configuration can be appropriately adjusted.

[0060] 4 and 5, in the first embodiment, the extension direction (Z direction) of the gripping portion 162 coincides with the attachment direction (Z direction) of the imaging probe 100. As described above, such a configuration makes it easy to keep the posture of the imaging probe 100 stable when the gripping portion 162 is gripped, and also makes it easy to move the imaging probe 100 in the attachment direction (Z direction) in this state.

[0061] However, even if the extension direction of the gripping portion and the mounting direction of the image probe do not strictly match, it is possible to keep the posture of the image probe stable while gripping the gripping portion, and to move the image probe in the mounting direction in this state. For example, the angle difference between the extension direction of the gripping portion and the mounting direction of the image probe may be inclined within a range of +-30°. In addition, the extension direction of the gripping portion may be inclined in the YZ plane, the XZ plane, or another plane including the Z-axis direction. In such a case, it is possible to fully achieve such an effect.

[0062] For example, FIG. 8 illustrates an image probe 220 according to the second embodiment. The image probe 220 is basically configured in the same manner as the image probe 100 according to the first embodiment. However, the image probe 220 includes a handle portion 221 instead of the handle portion 160. The handle portion 221 is basically configured in the same manner as the handle portion 160. However, the handle portion 221 includes a handle portion 222 instead of the grip portion 162. The grip portion 222 is basically configured in the same manner as the grip portion 162. However, in a YZ plane as illustrated in FIG. 8, when a clockwise rotation direction of the grip portion 222 is defined as a positive direction and a counterclockwise rotation direction is defined as a negative direction about a connection portion between the support portion 161 and the grip portion 222, the extension direction of the grip portion 222 is inclined by −30° in the YZ plane with respect to the mounting direction (Z direction) of the image probe 220.

[0063] Also, for example, Fig. 9 illustrates an image probe 230 according to the third embodiment. The image probe 230 is basically configured in the same manner as the image probe 100 according to the first embodiment. However, the image probe 230 includes a handle portion 231 instead of the handle portion 160. The handle portion 231 is basically configured in the same manner as the handle portion 160. However, the handle portion 231 includes a grip portion 232 instead of the grip portion 162. The grip portion 232 is basically configured in the same manner as the grip portion 162. However, when the rotation direction is defined by the above-mentioned method, the extension direction of the grip portion 232 is inclined by +30° with respect to the mounting direction (Z direction) of the image probe 230 in the YZ plane.

[0064] Also, for example, FIG. 10 illustrates an image probe 240 according to the fourth embodiment. The image probe 240 is basically configured in the same manner as the image probe 100 according to the first embodiment. However, the image probe 240 includes a handle portion 241 instead of the handle portion 160. The handle portion 241 is basically configured in the same manner as the handle portion 160. However, the handle portion 241 includes a handle portion 242 instead of the grip portion 162. The grip portion 242 is basically configured in the same manner as the grip portion 162. However, in an XZ plane as illustrated in FIG. 10, when a clockwise rotation direction of the grip portion 242 is defined as a positive direction and a counterclockwise rotation direction is defined as a negative direction about a connection portion between the support portion 161 and the grip portion 242, the extension direction of the grip portion 242 is inclined by −30° in the XZ plane with respect to the mounting direction (Z direction) of the image probe 240.

[0065] 10, the support part 161 and the grip part 242 are configured as separate members, and a pair of elongated holes 243 extending along one circle are provided in the support part 161. The elongated holes 243 are configured so that the extension direction of the grip part 242 can be adjusted within a range of ±30° with respect to the attachment direction (Z direction) of the image probe 240 on the XZ plane.

[0066] 4 and 6, in the first embodiment, the grip portion 162 is formed in a substantially rectangular tube shape. Therefore, the front surface (the portion that contacts the palm when the grip portion 162 is gripped from the -Y direction) and the back surface (the portion that contacts the fingers when the grip portion 162 is gripped from the -Y direction) of the grip portion 162 are formed flat. However, this configuration is merely an example, and the specific configuration can be appropriately adjusted.

[0067] For example, Fig. 11 illustrates an image probe 250 according to the fifth embodiment. The image probe 250 is basically configured in the same manner as the image probe 100 according to the first embodiment. However, the image probe 250 includes a handle portion 251 instead of the handle portion 160. The handle portion 251 is basically configured in the same manner as the handle portion 160. However, the handle portion 251 includes a handle portion 252 instead of the grip portion 162. The grip portion 252 is basically configured in the same manner as the grip portion 162. However, the front surface of the grip portion 252 is a convex curved surface and the rear surface is a concave curved surface in the YZ plane.

[0068] Also, for example, FIG. 12 illustrates an image probe 260 according to the sixth embodiment. The image probe 260 is basically configured in the same manner as the image probe 100 according to the first embodiment. However, the image probe 260 includes a handle portion 261 instead of the handle portion 160. The handle portion 261 is basically configured in the same manner as the handle portion 160. However, the handle portion 261 includes a grip portion 262 instead of the grip portion 162. The grip portion 262 is basically configured in the same manner as the grip portion 162. However, the front surface of the grip portion 262 is a convex curved surface in the XY plane. Note that the back surface of the grip portion 262 may be flat, may be a convex curved surface, or may be a concave curved surface in the XY plane.

[0069] Also, for example, FIG. 13 illustrates an image probe 270 according to the seventh embodiment. The image probe 270 is basically configured in the same manner as the image probe 100 according to the first embodiment. However, the image probe 270 includes a handle 271 instead of the handle 160. The handle 271 is basically configured in the same manner as the handle 160. However, the handle 271 includes a grip 272 instead of the grip 162. The grip 272 is basically configured in the same manner as the grip 162. However, on the back surface of the grip 272, four curved surfaces 273 aligned in the Z direction are formed. These four curved surfaces 273 are formed in a concave shape in the YZ plane. These four curved surfaces 273 come into contact with the index finger, middle finger, ring finger, and little finger, respectively, when the grip 272 is gripped from the -Y direction.

[0070] 4, in the first embodiment, the space inside the handle portion 160 functions as an insertion portion for passing the power lines 111, 121, 141 and the signal line 142. However, this configuration is merely an example, and the specific configuration can be appropriately adjusted.

[0071] For example, Fig. 14 to Fig. 17 show an image probe 300 according to an eighth embodiment. The image probe 300 is basically configured similarly to the image probe 100 according to the first embodiment. However, the image probe 300 includes a power supply device 350 housed in a cover 150, a data signal input / output terminal 371, and power supply terminals 372, 373.

[0072] In this embodiment, the imaging device 140 inputs and outputs data signals to and from the electric discharge machine 10 via the data signal input / output terminal 371 .

[0073] The power supply device 350 receives power from the electric discharge machine 10 via, for example, power supply terminals 372 and 373, and steps down this voltage to generate a voltage suitable for driving the epi-illumination device 110, a voltage suitable for driving the dark-field illumination device 120, and a voltage suitable for driving the image capture device 140. The power supply device 350 also supplies these voltages to the epi-illumination device 110, the dark-field illumination device 120, and the image capture device 140, respectively. The power supply device 350 includes, for example, a transformer.

[0074] 17, a data signal input / output terminal 371 and power supply terminals 372, 373 are arranged in an annular region centered on the clamp shaft 152. The data signal input / output terminal 371 and the power supply terminals 372, 373 are connected to electrodes 41, 42 provided on the attachment mechanism 16' when the image probe 300 is attached to the attachment mechanism 16', as illustrated in Fig. 18. The electrode 42 may be, for example, an electrode that supplies power for machining to the machining electrode 15 (Fig. 1).

[0075] In such a configuration, input and output of data signals between the imaging device 140 and the outside, as well as supply of power to the epi-illumination device 110, the dark-field illumination device 120, and the imaging device 140 are performed via the attachment mechanism 16'. Therefore, it is possible to configure the image probe 300 cable-less. Therefore, for example, as shown in Figures 15 and 16, it is not necessary to provide an insertion portion in the handle part 160.

[0076] 19 illustrates an image probe 400 according to a ninth embodiment. The image probe 400 is basically configured similarly to the image probe 100 according to the first embodiment. However, the image probe 400 includes a power supply device 350, similar to the image probe 300 according to the eighth embodiment. The image probe 400 also includes a data signal transmitting / receiving device 401, a wireless power receiving device 402, a battery 403, and a switch circuit 404. These components are housed in a cover 150.

[0077] The data signal transmitting / receiving device 401 is connected to the imaging device 140. The imaging device 140, for example, inputs and outputs data signals to and from an external device (not shown) via the data signal transmitting / receiving device 401. The input and output of data signals is performed by wireless communication.

[0078] A wireless power receiving device 402 is connected to a battery 403 via a switch circuit 404. The wireless power receiving device 402 is supplied with power by wireless power feeding from an external device (not shown), for example, and charges the battery 403 with this power.

[0079] The battery 403 is connected to the power supply device 350 and the wireless power receiving device 402 via a switch circuit 404. The power supply device 350, for example, receives power from the battery 403 and adjusts the voltage of the battery 403 to generate a voltage suitable for driving the epi-illumination device 110, a voltage suitable for driving the dark-field illumination device 120, and a voltage suitable for driving the imaging device 140.

[0080] In this configuration, input and output of data signals between the imaging device 140 and the outside, as well as supply of power to the epi-illumination device 110, the dark-field illumination device 120, and the imaging device 140 are performed by wireless communication and wireless power feeding. Therefore, it is possible to configure the image probe 400 without cables. Therefore, it is not necessary to provide an insertion section in the handle part 160. [Explanation of symbols]

[0081] 100...image probe, 110...epi-illumination device, 111...power line, 120...dark-field illumination device, 121...power line, 130...optical system, 140...imaging device, 141...power line, 142...signal line, 150...cover, 160...handle portion, 161...support portion, 162...grip portion, P...center of gravity, Z P ...center of gravity position.

Claims

1. An imaging probe configured to be attachable from below to a first attachment mechanism of a processing device, an imaging device that images a workpiece placed below the first attachment mechanism from above; A focusing lens that forms an image of the workpiece on the imaging device; an objective lens that guides light to the focusing lens; a cover that houses the imaging device and the focusing lens; a second attachment mechanism connected to the cover and configured to be attachable to the first attachment mechanism; A handle portion attached to the cover; Equipped with The handle portion is A support portion connected to the cover and extending in a first direction intersecting a vertical direction; a gripping portion provided at a position away from the cover in the first direction, connected to the support portion, and extending in a second direction intersecting the first direction within a range including a center of gravity of the image probe; The angular difference between the second direction and the vertical direction is 30° or less. Image probe.

2. The second direction coincides with the vertical direction.

2. The imaging probe of claim 1.

3. At least a part of the surface of the grip portion opposite to the cover is a convex curved surface that comes into contact with the palm of the hand when the grip portion is gripped.

3. An imaging probe according to claim 1 or 2.

4. At least a part of the surface of the gripping portion on the cover side is a concave curved surface that comes into contact with any of the fingers when the gripping portion is gripped. An imaging probe according to any one of claims 1 to 3.

5. a first power line and a signal line connected to the imaging device; a lighting device housed in or attached to the cover; A second power line connected to the lighting device; Equipped with The gripping portion includes an insertion portion through which the first power supply line, the second power supply line, and a part of the signal line can be inserted. An imaging probe according to any one of claims 1 to 4.

6. a lighting device housed in or attached to the cover; a power supply unit that is accommodated in the cover and that supplies power to at least one of the illumination device and the imaging device; The cableless imaging probe according to any one of claims 1 to 5, comprising:

7. The lower end of the gripping portion is provided above the lower end of the imaging probe. An imaging probe according to any one of claims 1 to 6.

8. When viewed from the vertical direction, the center of gravity of the image probe is located within a range of a circumscribing circle of the lower surface of the image probe. An imaging probe according to any one of claims 1 to 7.

Images