Method for manufacturing a high frequency compatible electronic module

Abstract

To provide a process for producing a high-frequency-compatible electronic module.SOLUTION: The field of the invention is that of producing 3D electronic modules, compatible with components operating beyond 1 GHz. The invention relates to a 3D electronic module where an interconnection between a horizontal conductor (31, 32; 33, 34) and a vertical conductor (30) to which the horizontal conductor is connected exhibits, in a vertical plane, a non-zero curvature. The invention also relates to an associated production process.SELECTED DRAWING: Figure 7

Description

[Technical field]

[0001] The field of the invention is that of manufacturing three-dimensional electronic modules that are compatible with components operating above 1 GHz. The invention relates to a three-dimensional electronic module. Furthermore, the invention relates to a method of manufacturing a three-dimensional electronic module. [Background technology]

[0002] In a three-dimensional electronic module, there are multiple levels of components stacked on top of each other. A three-dimensional module or printed circuit board (PCB) contains multiple horizontal levels containing electrical conductors and components.

[0003] Three-dimensional interconnects may be classified according to three groups: a. Stacking of bare chips or packages with metal bus interconnects b. A stack of bare chips interconnected by holes through the silicon, also known as TSVs (Through Silicon Vias) c. A stack of bare chips interconnected by connecting wires one after the other

[0004] In the first group, to interconnect chips stacked on top of each other, the vertical planes of the metallized stack are used to form the electrical connections between the chips. As a result, the current technology is based on "T" shaped interconnects. Each stack level contains conductors etched into the PCB that are connected vertically by metal buses. In other words, the interconnects between two-dimensional (one level plane) and three-dimensional (multiple levels stacked) levels are formed at right angles, i.e. 90 degrees.

[0005] In the second group, these electronic modules are generally provided with holes that are vertically through, i.e. in the thickness direction of the module. Metallization holes, often called vias, penetrate these levels and thus allow these conductors to be connected vertically to each other via contacts between the metallization holes and the parts of these conductor levels that have holes. In the following, "holes" means blind holes (holes that do not penetrate all the way through) or through holes. Naturally, electronic modules may also include blind and through holes. In this case too, the conductors placed on the various stacking planes cross the holes at right angles.

[0006] For the third group, the overlapping layers of connecting wires cause large variations in impedance and inductive interference. Above 1 GHz, these overlapping layers cannot be used.

[0007] In the first and second groups, the size of the TSVs is much smaller than the size of the interconnects using metal buses, but the three-dimensional interconnects are orthogonal as described above.

[0008] For components operating above 1 GHz, orthogonal connections or "T" shaped interconnects cause reflections that adversely affect signal integrity. In the case of three-dimensional electronic modules in the radio frequency domain, the connections are perpendicular to the plane of the stack, so "T" shaped interconnects between the electrical conductors (e.g., the conductors from the chip and the vertical conductors) are placed at right angles. Electrons are reflected at the site of the connection, interfering with and weakening the electrical connection.

[0009] Therefore, there is a further need for a method of interconnecting stacked chips that can ensure signal integrity at radio frequencies. Summary of the Invention [Problem to be solved by the invention]

[0010] The object of the present invention is to overcome all or part of the above problems by providing an interconnect in which a signal arriving through a conductor in a PCB, a deposited redistribution layer called a RDL, or a via follows a curved trajectory to reach a metal bus. [Means for solving the problem]

[0011] To that end, the subject of the present invention is a three-dimensional electronic module comprising a stack, in what is called the vertical direction, of at least two electronic packages, this module being capable of being linked to an interconnection circuit, each of the at least two electronic packages being: a. components provided with interconnection pads oriented toward a top surface of the components, the components being at least partially surrounded by epoxy resin, the interconnection pads of each component being connected by a redistribution layer to vertical conductors that are then intended to be electrically connected to the interconnection circuitry of the module; b. A horizontal conductor, the horizontal conductor and the vertical conductor to which the horizontal conductor is connected, forming an electrical conductor between the interconnect pad of the component and the interconnect circuit. Including, A three-dimensional electronic module is characterized in that the interconnections between the horizontal conductors and the vertical conductors to which they are connected exhibit a non-zero curvature in the vertical plane.

[0012] In one embodiment of a three-dimensional electronic module according to the present invention, the vertical conductors are buses.

[0013] In another embodiment of the three-dimensional electronic module according to the present invention, the vertical conductors are vias.

[0014] Advantageously, the curvature of the interconnection between the horizontal conductor and the vertical conductor to which it is connected forms a tangent to the vertical conductor.

[0015] The present invention further provides a method of manufacturing a three-dimensional electronic module capable of being coupled to an interconnect circuit, comprising the steps of: a. applying a component having interconnect pads to a first surface of the bonding film, the bottom surface of the component being in contact with the bonding film and orienting the interconnect pads toward a top surface of the component; b. depositing a first epoxy resin in the spaces between the components and polymerizing the resin to obtain the panel; c. forming a groove having a first depth in the space to be filled with the first epoxy resin, the groove widening toward the upper surface of the panel and exhibiting a curvature in the lateral direction; d. metallizing the grooved panel; e. laser etching the metallized grooved panel to separate the horizontal conductors; f. depositing a second epoxy resin into the space formed by the groove; g. fabricating one or more photo-etched redistribution layers on the top surface of the panel; h. removing the bond coat to obtain a plate; i. applying a third epoxy resin to the top surface of the plate; j. stacking a second plate on top of the third epoxy resin covered plate; k. forming a through groove in the space to be filled with the second epoxy resin; l. metallizing the through-slots to obtain vertical conductors; The present invention relates to a method comprising the steps of:

[0016] In one embodiment of the method according to the invention, the first depth is less than a thickness of the space to be filled with the first epoxy resin.

[0017] In another embodiment of the method according to the invention, the first depth is the same as the thickness of the space filled with the first epoxy resin.

[0018] The invention will be better understood and further advantages will become apparent on reading the detailed description of an embodiment thereof, given by way of example and illustrated by the accompanying drawings, in which: FIG. [Brief description of the drawings]

[0019] [Figure 1] 2 illustrates diagrammatically the steps of a method for manufacturing a three-dimensional electronic module according to the invention; [Diagram 2] 1 illustrates diagrammatically the successive steps of a method for manufacturing a three-dimensional electronic module according to the invention; [Diagram 3] 1 illustrates diagrammatically the successive steps of a method for manufacturing a three-dimensional electronic module according to the invention; [Figure 4] 1 illustrates diagrammatically the successive steps of a method for manufacturing a three-dimensional electronic module according to the invention; [Diagram 5] 1 illustrates diagrammatically the successive steps of a method for manufacturing a three-dimensional electronic module according to the invention; [Figure 6] 1 illustrates diagrammatically the successive steps of a method for manufacturing a three-dimensional electronic module according to the invention; [Figure 7] 1A-1D show schematic diagrams of successive steps of a method for manufacturing a three-dimensional electronic module according to the invention and cross-sectional views of the three-dimensional electronic module; [Figure 8] 1 illustrates one embodiment of applying the principles of the present invention to vias. [Figure 9] 2 shows diagrammatically one variant of a method for manufacturing a three-dimensional electronic module according to the invention; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] From drawing to drawing, like elements have like reference numbers.

[0021] In the remaining description, the terms "high" and "low" are used with respect to the orientation of the drawings described. To the extent that the three-dimensional electronic module may be positioned according to other orientations, the directional terms are provided by way of example and are not limiting.

[0022] 1 illustrates diagrammatically the steps of a method for manufacturing a three-dimensional electronic module according to the invention, which comprises steps 100 to 112 carried out in succession, as will be described in detail below.

[0023] 2 to 7 show diagrammatically the successive steps of a method for manufacturing a three-dimensional electronic module according to the invention.

[0024] 2, the method for manufacturing a three-dimensional electronic module includes a step 100 of applying the components 15, 16, on which the interconnect pads 19, 20 are provided, to a first surface 50 of a bonding film 51. During this application step, the lower surfaces 52 of the components 15, 16 are in contact with the bonding film 51, orienting the interconnect pads 19, 20 towards the upper surfaces 23, 24 of the components 15, 16.

[0025] The manufacturing method according to the invention then comprises a step 101 of depositing a first epoxy resin 25 in the spaces 53 between the components 15 , 16 and a step 102 of polymerizing the resin 25 to obtain the panel 200 .

[0026] The manufacturing method according to the invention comprises a step 103 of forming a groove 54 having a first depth 55 in the space 53 to be filled with the first epoxy resin 25. More precisely, the groove 54 widens towards the top surface of the panel 200 and presents a curvature laterally. This groove 54 may be formed by a saw, the shape of which is complementary to the groove 54 shown in FIG. 3. Furthermore, the groove 54 may be formed by any other tool capable of removing a portion of the resin 25 so that the resulting groove has side walls that present a curvature. Advantageously, the curvature is located in an area close to the top surface 23, 24. Once the manufacturing method has been carried out, this area is the interconnection area between the horizontal conductors and the vertical conductors to which it is connected. As a result, the interconnection between the horizontal conductors and the vertical conductors presents a non-zero curvature in the vertical plane. The advantage of this non-orthogonal connection for three-dimensional electronic modules with vertical connections on the surface of the stack in the radio frequency range is therefore to prevent reflections of electrons at the site of the connection, which would interfere with and weaken the electrical connection. In accordance with the present invention, a signal arriving through a horizontal conductor follows a curved trajectory arriving at a vertical conductor, as described below. A non-zero curvature in accordance with the present invention is a portion of a circular arc that represents a regular curvature and is not caused by surface overlap.

[0027] Figure 4 shows a step 104 of metallizing the grooved panel 200 obtained in step 103. The method then comprises a step 105 of laser etching the metallized grooved panel 200 so as to separate the horizontal conductors 33, 34. This also applies to the horizontal conductors 31, 32 (not shown in Figure 4 but visible in Figure 7). This step 105 is illustrated in Figure 5 by a view from above of the horizontal conductors separated from each other after the etching step 105.

[0028] FIG. 4 further illustrates a step 106 of depositing a second epoxy resin 45 into the space formed by the groove 54 .

[0029] 6 illustrates step 107 of fabricating one or more photo-etched redistribution layers 28, 29 on the top surface of the panel, which allows the fabrication of one or more horizontal interconnect levels.

[0030] Figure 7 shows the last step of the manufacturing method that is the subject of the present invention. The method comprises a step 108 of removing the bonding film 51 to obtain the plate 210, and a step 109 of applying a third epoxy resin 35 to the upper surface of the plate 210. Then there is a step 110 of stacking a second plate 211 on top of the plate 210, which is covered with the third epoxy resin 35 in order to be able to bond the plate 211 to the plate 210.

[0031] Finally, the method for manufacturing the three-dimensional electronic module 10 includes a step 111 of forming through-slots 56 in the spaces filled with the second epoxy resin 45, and a step 112 of metallizing the through-slots 56 to obtain vertical conductors 30.

[0032] In some variants of the manufacturing method according to the invention, in the step of forming the grooves 54, the first depth 55 may be less than the thickness of the space 53 to be filled with the first epoxy resin 25. In this case, a "blind" hole is obtained. Alternatively, the first depth 55 may be the same as the thickness of the space 53 to be filled with the first epoxy resin 25. As a result, a through hole is obtained. By forming such a hole, whether a blind hole or a through hole, it is possible to obtain an interlevel interconnection when stacking the components. By applying the principles of the invention, the interconnection is then curved again. At each level before stacking, a forming tool is used to perform the appropriate drilling or piercing to obtain the desired curved shape.

[0033] Thus, Figure 7 shows a cross-sectional view of a three-dimensional electronic module 10 according to the invention. The three-dimensional electronic module 10 comprises a stack of at least two electronic packages 11, 12 in a direction called the vertical direction Z. The module can be coupled to an interconnect circuit (not shown). Each of the at least two electronic packages 11, 12 has a. components 13, 14, 15, 16 provided with interconnection pads 17, 18, 19, 20 oriented towards upper surfaces 21, 22, 23, 24 of the components 13, 14, 15, 16, the components 13, 14, 15, 16 being at least partially surrounded by an epoxy resin 25, 35, 45, the interconnection pads 17, 18, 19, 20 of each component 13, 14, 15, 16 being connected by a redistribution layer 26, 27, 28, 29 to vertical conductors 30 which are then intended to be electrically connected to the interconnection circuitry of the module; b. Horizontal conductors 31, 32, 33, 34, and the vertical conductor 30 to which the horizontal conductors 31, 32, 33, 34 are connected, and the horizontal conductors 31, 32, 33, 34 form electrical conductors between the interconnect pads 17, 18, 19, 20 of the components 13, 14, 15, 16 and the interconnect circuitry. Includes.

[0034] According to the present invention, the interconnects between the horizontal conductors 31, 32, 33, 34 and the vertical conductors 30 to which they are connected exhibit a non-zero curvature in the vertical plane. The curved interconnects between the horizontal conductors and the metal bus 30 allow signals arriving through the horizontal conductors to follow a curved trajectory to reach the vertical conductors. As shown in FIG. 7, the curvature of the interconnects between the horizontal conductors 31, 32, 33, 34 and the vertical conductors 30 to which they are connected forms a tangent to the vertical conductor 30. As a result, the present invention ensures the interconnection of stacked chips while ensuring signal integrity at radio frequencies.

[0035] Generally referred to as a vertical conductor, the vertical conductor 30 may be a bus or a via. Thus, the present invention accommodates interconnections between vertical and horizontal conductors having curvature.

[0036] 8 illustrates one embodiment of applying the principles of the present invention to vias 36, 46. The vias are through vias, and the present invention applies equally to vertical conductors or vias.

[0037] In the top part of Fig. 8, the via 36 has a diameter smaller than 200 micrometers. The reference numeral 31 of the via 36 corresponds to copper as the horizontal conductor and copper filling the small diameter via. A photoetch layer 29 contacts the via in a conventional manner.

[0038] In the lower part of Fig. 8, the via 46 has a diameter greater than 200 micrometers. The reference number 31 of the via 36 corresponds to the copper that forms both the horizontal conductor and the vertical conductive portion. The hole itself is filled with resin 45. The photoetch layer 29 is contacted with the via in a conventional manner.

[0039] The printed circuit board is made up of layers stacked on top of each other. To obtain the vias according to the invention, the circuit is drilled from one side with a forming knife as described above and then from the other side with the same forming knife to form the through holes 36, 46. In Fig. 8 the vias 36, 46 have undergone a step of metallization and, if necessary, a step of depositing epoxy resin 45. The vias therefore show a curvature at the connection with the horizontal conductor.

[0040] 9 shows a schematic representation of one variant of the method of manufacturing a three-dimensional electronic module according to the invention using printed circuit boards 151, 161 (PCBs). In this variant, each PCB 151, 161 is considered to be a component and the same method as described above applies.

[0041] Finally, it should be noted that the principle of the invention, in which the interconnections between horizontal and vertical conductors show a particular curvature, also applies to TSVs (Through Silicon Vias). The method of obtaining such TSVs with non-orthogonal connections is carried out in a similar manner to that for vias such as those described above with vias 36, 46. [Explanation of symbols]

[0042] 10. Three-dimensional electronic module 11, 12 Electronic Package 13, 14, 15, 16 Components 17, 18, 19, 20 Interconnect Pads 21, 22, 23, 24 Top 25, 35, 45 Epoxy Resin 26, 27, 28, 29 Redistribution layer 30 Vertical Conductor 31, 32, 33, 34 Horizontal conductors 36, 46 Via 50 First Side 51 Bonding film 52 Bottom surface 53 Space 54 Groove 55 First Depth 56 Through groove 151 Printed Circuit Board 161 Printed Circuit Board 200 Panels 210 board 211 Second Board

Claims

1. A three-dimensional electronic module (10) comprising a stack of at least two electronic packages (11, 12) in a direction called the vertical direction (Z), said module being capable of being coupled to an interconnect circuit, each of said at least two electronic packages (11, 12) being: a. components (13, 14; 15, 16) provided with interconnection pads (17, 18; 19, 20) oriented towards their upper surfaces (21, 22; 23, 24), said components (13, 14; 15, 16) being at least partially surrounded by an epoxy resin (25, 35, 45), said interconnection pads (17, 18; 19, 20) of each component (13, 14; 15, 16) being connected by a redistribution layer (26, 27; 28, 29) to vertical conductors (30) which are then intended to be electrically connected to the interconnection circuitry of the module; b. horizontal conductors (31, 32; 33, 34), where the horizontal conductors (31, 32, 33, 34) and the vertical conductors (30) to which they are connected form electrical conductors between the interconnect pads (17, 18; 19, 20) of the components (13, 14; 15, 16) and the interconnect circuit; Including, 1. A three-dimensional electronic module (10) comprising: interconnections between horizontal conductors (31, 32; 33, 34) and the vertical conductors (30) to which they are connected, the interconnections exhibiting a non-zero curvature in the vertical plane, the curvature of the interconnections being covered with epoxy resin.

2. The three-dimensional electronic module (10) of claim 1, wherein the vertical conductors (30) are buses.

3. The three-dimensional electronic module (10) of claim 1, wherein the vertical conductors (30) are vias (36, 46).

4. 2. The three-dimensional electronic module (10) of claim 1, wherein the curvature of the interconnection between the horizontal conductors (31, 32; 33, 34) and the vertical conductors (30) to which they are connected forms a tangent to the vertical conductors (30).

5. A method of manufacturing a three-dimensional electronic module (10) capable of being coupled to an interconnect circuit, comprising the steps of: a. applying (100) components (15, 16) provided with interconnection pads (17, 18; 19, 20) to a first surface (50) of a bonding film (51), the lower surface (52) of said components (15, 16) being in contact with said bonding film (51) and orienting (100) said interconnection pads (19, 20) towards the upper surface (23, 24) of said components (15, 16); b. depositing (101) a first epoxy resin (25) in the spaces (53) between said components (15, 16) and polymerizing (102) said resin (25) to obtain a panel (200); c. forming (103) a groove (54) having a first depth (55) in said space (53) filled with said first epoxy resin (25), said groove (54) widening towards the upper surface of said panel (200) and exhibiting a curvature in the lateral direction; d. Metallizing (104) the grooved panel (200); e. Laser etching (105) the metallized grooved panel (200) to separate the horizontal conductors (31, 32; 33, 34); f. depositing (106) a second epoxy resin (45) into the space formed by the groove (54); g. fabricating (107) one or more photo-etched redistribution layers (28, 29) on the top surface of the panel; h. removing (108) said bond coat (51) to obtain a plate (210); i. applying (109) a third epoxy resin (35) to an upper surface of the plate (210); j. stacking (110) a second plate (211) on top of the plate (210) covered with the third epoxy resin (35); k. forming a through groove (56) in the space filled with the second epoxy resin (45) (111); l. metallizing (112) said through-channels (56) to obtain vertical conductors (30); A method comprising:

6. 6. The method of claim 5, wherein the first depth (55) is less than a thickness of the space (53) filled with the first epoxy resin (25).

7. 6. The method for manufacturing an electronic module according to claim 5, wherein the first depth (55) is the same as a thickness of the space (53) filled with the first epoxy resin (25).

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