Method and microscope with correction device for correcting aberration-induced imaging errors - Patents.com

Abstract

To correct aberration-induced imaging errors in an optical system having an objective lens (14) and adaptive optics (18), the light (5) and sample (20) are selected such that, when acting on the sample (20), the light (5) reduces a measurement signal (28) from the sample (20), the relative change in the measurement signal (28) being dependent on the intensity of the light (5). The measurement signal (28) is detected from a focal region of the optical system within the sample (20) over first and subsequent second time periods (38, 37) to determine first and second measurement values. The light (5) is focused by the optical system onto the focal region over a third time period (39) overlapping the first and / or second time periods. From the first and second measurements, a degree index for the relative change in the measurement signal (28) is determined and used as a metric to be optimized when controlling the adaptive optics (18).

Description

[Technical field]

[0001] The present invention relates to a method for correcting aberration-induced imaging errors in an optical system having an objective lens and an adaptive optics in a beam path through the objective lens. The present invention further relates to a laser scanning microscope having a first light source for excitation light, a second light beam for stimulation light, an objective lens and a correction device for correcting aberration-induced imaging errors, the correction device including an adaptive optics in the beam path through the objective lens. [Background technology]

[0002] Aberration-induced imaging errors can, on the one hand, originate from the optical system itself, if the optical system is, for example, not sufficiently achromatic, and, on the other hand, regions of the sample in front of the focal region of the optical system can also cause fundamental aberrations.

[0003] The aberration-induced imaging errors of the optical system to be corrected have an effect both when the light intensity distribution is projected by the objective onto the respective sample and when the sample is imaged by the objective.

[0004] From non-patent document 1, the correction of aberration-induced imaging errors is known, which are due to inhomogeneity of the optical properties of samples, especially thick samples. A method called COAT (Coherent Optical Adaptive Technique) is applied here, in which the phase distortion due to the respective sample is measured and compensated. For both the measurement and compensation of the phase distortion, an SLM (Spatial Light Modulator) is used, which in the STED microscope furthermore modulates the phase wavefront of the stimulation light focused on the sample in such a way that the stimulation light has a doughnut-shaped intensity distribution. The phase distortion due to the sample is measured in that the SLM imprints a phase pattern on the beam of stimulation light, in which different regions have a modulated phase shift with different frequencies. Here, the intensity of the spot on which the beam of stimulation light is subsequently focused is recorded in a time-resolved manner and analyzed by means of a Fourier transform. In practice, in the individual regions of the phase pattern imprinted by the SLM, a phase shift is determined which compensates for the aberration-induced imaging errors. Specifically, the intensity of the spots is detected by scanning a gold nanoparticle through the spot and recording the stimulating light scattered from the gold nanoparticle. Correspondingly, each STED microscope should be driven in the scattered light mode and the gold nanoparticles should be placed at the locations where the aberration-induced imaging errors of each sample should be compensated. In practice, gold nanoparticles were placed only on the upper and lower sides of the sample to demonstrate the function of the method.

[0005] From US Pat. No. 5,399,513 a method for correcting aberrations in a STED microscope using adaptive optics is known, in which a metric combining image sharpness and image brightness is used. By controlling a light modulator, which is an SLM or a deformable mirror, this metric is maximized or minimized. Image sharpness can only be determined after imaging the sample into an image. Image brightness depends on the concentration and density of the fluorescent markers that mark the structures of interest in the sample. Thus, the respective maxima and minima of the metric combining image brightness and image sharpness only have a local expressive power and cannot be compared with another maximum or minimum in another area of ​​the sample.

[0006] From Non-Patent Document 2 a method is known for mutual alignment of a doughnut-shaped stimulation light focus with a spot-shaped excitation light focus, in which the offset between the STED image and the lifetime image of the fluorescent nanobeads is determined and removed, in particular by determining and adjusting the offset between the center of gravity of the normalized spatial intensity distribution of the fluorescent light from the nanobeads and the center of gravity of the normalized spatial lifetime intensity distribution of the fluorescent light from the nanobeads.

[0007] From US Pat. No. 5,399,633 it is known to set up a precise adjustment of a STED microscope, in which the maximum intensity of the excitation light coincides with the maximum intensity of the STED light at the focus of the objective lens, structures in a sample marked by fluorescent dyes are scanned with the maximum intensity of the excitation light, and an image of the sample is formed by imaging the structures with fluorescence blocking light of different intensity, whereby the deviation between the positions of the imaging of the structures in the formed image is calculated and adjusted. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] International Publication No. 2014 / 029978(A1) [Patent Document 2] International Publication No. 2018 / 042056(A1) [Non-patent literature]

[0009] [Non-Patent Document 1] Wei Yan et al.: Coherent optical adaptive technique improves the spatial resolution of STED microscopy in thick samples, Photonics Research, Vol. 5, No. 3, June 2017 [Non-Patent Document 2] Yifan Wang et al.: A 3D Aligning Method for Stimulated Emission Depletion Microscopy Using Fluorescence Lifetime Distribution, Microscopy Research and Technique 77:935-940, August 2014 Summary of the Invention [Problem to be solved by the invention]

[0010] The object of the present invention is to provide a method for correcting aberration-induced imaging errors of an optical system, which makes it possible to correct imaging errors for different regions of a sample during the continuous use of the imaging system or laser scanning microscope for measuring or imaging the respective sample, as well as a laser scanning microscope having an objective lens and a correction device for correcting aberration-induced imaging errors. [Means for solving the problem]

[0011] This problem is solved by a method with the features of claims 1, 3 and 7 and by a laser scanning microscope with the features of claim 21, where the method with the features of claim 7 is equivalent in frequency space to the method with the features of claim 1. The dependent claims 2, 4 to 6 and 8 to 20 relate to preferred embodiments of the inventive method, and claim 22 is directed to a preferred embodiment of the inventive laser scanning microscope.

[0012] The invention utilizes a metric that is a measure for the quality of the focus when illuminating a sample with light. This metric can be used to correct aberrations, such as may occur in a microscope. This is possible by adapting the distribution of light for illuminating the sample by means of adaptive optics in such a way that this metric is optimized. For this purpose, the sample is first illuminated with light with a given setting of the adaptive optics, which influences the measurement light from the sample, for example by guiding the light to emit a fluorescent light beam. The measurement signal is then resolved in time, detected and divided into at least one leading and trailing period for further calculation. From the ratio of the measured values ​​of the measurement signal for the two periods, for example the ratio of leading and trailing photons of the fluorescent light, a degree index (Masszahl) is calculated, which is a measure for the quality of the focus. This degree index is optimized by iterative adaptation of the adaptive optics, for example an adaptive mirror, so that the aberrations are corrected. An equivalent degree index can be determined in frequency space.

[0013] In a method of the invention for correcting an aberration-induced imaging error of an optical system having an objective lens and an adaptive optics arranged in a light path through the objective lens, the light and the sample are selected such that the light acting on the sample reduces a measurement signal from the sample or brings the measurement signal closer to a saturation value from below, where the relative change in the measurement signal depends on the intensity of the light. A measurement signal originating from a focal region of the optical system located within the sample is detected over a first period of time to determine a first measurement value and over a second period of time to determine a second measurement value. The selected light is focused by the optical system on the focal region of the sample over a third period of time, where the first period of time at least partially precedes the second period of time and / or the second period of time at least partially follows the first period of time and the third period of time at least partially overlaps in time with the first period of time and / or with the second period of time and / or with intermediate periods therebetween. From the first and second measured values, a fairly monotonically rising or falling function of the relative change in the measurement signal is determined and used in controlling the adaptive optical system as a metric to be optimized by control changes.

[0014] When carrying out the method of the invention, the aberration-induced imaging errors to be corrected influence the focusing of the selected light by the optical system onto a focal region of the specimen, and if the imaging errors occurring during this focusing are corrected, then these imaging errors are also corrected when the focal region is imaged by the imaging system.

[0015] The aberration-induced imaging error to be corrected has the effect that, when the selected light is focused by the optical system in a third time period into the focal region of the sample, the intensity of the selected light is reduced from its maximum value without the aberration-induced imaging error to be corrected, i.e. without the so-called Strehl ratio. Correspondingly, the relative change in the measurement signal of the sample caused by the selected light is also reduced.

[0016] From the above relative definitions of the first, second and third periods, it follows that the first measurement is less strongly affected by the selected light focused onto the focal region in the third period than the second measurement.

[0017] Due to the above-mentioned selection of light and sample and the above-mentioned relative definition of the first, second and third time periods with respect to each other, the first and second measured values ​​are similarly dependent on the local properties of the sample in the respective focal regions. Thus, for example, the degree index determined by calculating the quotient of the second measured value determined as the integral of the measurement signal over the second time period and the first measured value determined as the integral of the measurement signal over the first time period is normalized to the initial value of the measurement signal, i.e. it is no longer dependent on the absolute height, i.e. on the level of the measurement signal. However, this degree index remains dependent on the intensity of the selected light in the focal region.

[0018] The degree index is therefore comparable over varying levels of the measurement signal. This means that the degree index can be optimized over adjacent regions of the sample even if the level of the measurement signal varies over adjacent regions of the sample. This allows the degree index to be continuously optimized, in particular when the sample is scanned by the focal region. The optimization of the degree index is not only possible if the position of the focal region in the sample remains the same when the control of the adaptive optics is changed. However, this does not mean that the metric to be optimized according to the invention, i.e. the degree index, has the same value for all positions of the focal region in the sample. On the contrary, this is certainly not the case, since the sample itself is a source of aberrations that vary at least axially along the optical axis of the objective, i.e. in the depth direction of the sample. However, between positions of focal regions in the sample that are laterally adjacent to one another, the optimized degree index varies slightly. The optimization for directly adjacent focal regions in the sample can therefore be initiated by the control of the adaptive optics that led to the optimization of the metric of the invention at the previous position of the focal region.

[0019] That the dependence of the intensity of the selected light in the focal region is not lost by the determination of the degree index is ensured by the fact that in the cases where the selected light reduces the measurement signal and in the cases where the selected light causes the measurement signal to approach a saturation value from below, both the first and the second measurement value do not depend directly on the intensity of the selected light either linearly or by another equal non-zero power.

[0020] This leads to the degree index increasing or decreasing with the intensity of the selected light in the focal region in the method of the invention. Correspondingly, the degree index is maximized or minimized as a metric to be optimized by the control of the adaptive optics in order to maximize the intensity of the light in the focal region. This maximum intensity is reached exactly when the aberration-induced imaging errors are eliminated. The degree index is therefore suitable as a metric to be optimized in the method of the invention in order to achieve the goal of correcting the aberration-induced imaging errors by changing the control of the adaptive optics.

[0021] The already mentioned by way of example calculation of the quotient between the second measured value determined as the integral of the measurement signal over a second period of time and the first measured value determined as the integral of the measurement signal over a first period of time, normalized to the initial value of the measurement signal, is suitable for determining an extent index, for example, if the selected light reduces the measurement signal from the sample, but the inverse of this quotient is also suitable as an extent index, if the selected light acts on the measurement signal, but in this case this extent index is maximized rather than minimized.

[0022] If the selected light causes the measurement signal from the sample to approximate a saturation value from below, it is advantageous to normalize the absolute value of the change in the measurement signal to the saturation value in order to determine the degree index, which can be approximately performed in such a way that the degree index is determined by forming a quotient of the first and second measured values.

[0023] In the method of the invention, the degree index determined from the first and second measured values ​​and used as a metric to be optimized by changing the control of the adaptive optics does not have to be the quotient of these two measured values, in particular a direct quotient. It therefore does not fundamentally matter if the denominator or numerator of the quotient has another factor that is multiplied with the measured value or an offset that is added to the measured value. Furthermore, the denominator of the quotient may have the difference of the measured values ​​and / or the numerator the sum, or vice versa. Any degree index that is a fairly monotonically rising or falling function of the relative change in the measurement signals is quite generally suitable. It is self-evident that this function only needs to have this property in the relevant region of the occurring measured values.

[0024] Any such degree index reaches an extreme value as a direct quotient of a second measurement value determined as an integral of the measurement signal over a second period of time and a first measurement value determined as an integral of the measurement signal over a first period of time, under the same control of the adaptive optical system.

[0025] It is essentially advantageous if the degree index is an ascending and injective function of the relative change in the measurement signal, although this is not necessarily required.

[0026] When changing the control of the adaptive optics to optimize the metric of the invention, the metric can be specifically processed according to the invention as follows: an old degree index is determined from the first and second measured values; the control of the adaptive optics is changed in one change direction; a measurement signal is detected again for the same first and second time periods, and light is focused on a focal region in the sample for the same third time period, thereby determining a new first and a new second measured value; a new degree index is determined from the new first and new second measured values, and a difference between the new degree index and the old degree index is determined; depending on the direction of the difference, the control of the adaptive optics is changed again in the previous change direction or in another change direction, i.e. opposite to the previous change direction. If the metric of the invention is to be maximized based on the fundamental dependence of the change in the measurement signal on the intensity of the selected light, if the new degree index is greater than the old degree index, the change direction is reversed during the new control of the adaptive optics. If our metric is to be minimized, the opposite is done.

[0027] The steps of newly detecting the measurement signal over the same first and second time periods, focusing light on a focal region in the sample over the same third time period to determine a new first measurement value and a new second measurement value, determining a new degree index from the new first measurement value and the new second measurement value, determining the difference between the new degree index and the old degree index, and newly changing the control of the adaptive optics in the previous or opposite direction of change depending on the direction of the difference can be performed at least once more, with each new degree index formed during the previous execution of the steps being used as the old degree index during the current execution of the steps. The steps can be repeated until the degree index reaches an extreme value, i.e. a minimum or maximum value, by the control of the adaptive optics in each direction of change. As a criterion for reaching an extreme value, for example, it can be used that the difference of the new degree index with respect to the old degree index falls below a limit value based on the previous change of the control of the adaptive optics, or that the difference of the new degree index with respect to the old degree index repeatedly reverses its direction over the previous iteration of the steps.

[0028] Furthermore, the magnitude of the change in the adaptive optics control may depend on the magnitude of the difference between the new degree index and the old degree index in at least one previous step during each iteration of the steps, thereby avoiding overshooting the sought extreme values ​​of the respective metrics with too large a change in the adaptive optics control.

[0029] The measurement signal that is influenced by the selected light in the method of the invention and integrated to obtain the first and second measured values ​​can in particular be the measurement light emitted by the sample. Here, this measurement light can be imaged by an optical system onto a detector that detects the measurement light and optionally directly integrates it. When imaging the measurement light onto the detector, the aberration-induced imaging errors of the optical system that must be corrected have an effect. However, depending on the type of detection of the measurement light, this additional effect can be neglected. This applies, for example, to all cases in which the detector records the measurement light from the focal region without spatial resolution.

[0030] The direction of change in which the control of the adaptive optics is changed during the implementation of the method of the invention can be selected from various directions of change. This includes, in particular, directions of change in which the spherical aberration, defocus, astigmatism or coma of the optical system can be compensated. Which change in the control of the adaptive optics contributes particularly significantly to approaching the respective extreme value of the metric of the invention depends on the respective optical system and in particular on the respective sample. In many cases, it is sufficient to compensate only one of the aberrations mentioned above in order to keep the imaging error of the optical system very small. This can in particular be the spherical aberration.

[0031] The light whose intensity in the focal region affects the temporal evolution of the measurement signal can be selected from light that exponentially decreases the measurement signal with time towards zero, or light that exponentially approximates the measurement signal from below to a saturation value with time. For example, if the measurement signal is fluorescent light emitted from a fluorescent dye in the sample, the selected light can be an excitation light that excites the fluorescent dye in the focal region to a fluorescent state until the intensity of the resulting fluorescent light approximates a saturation value.

[0032] If the fluorescent dye is excited in the focal region by additional excitation light in addition to the light into a fluorescent state in which the fluorescent dye starts to emit fluorescent light as measuring light, the selected light can be a stimulation light which stimulates the fluorescent dye into stimulated emission before the fluorescent dye emits fluorescent light. In this case, the fluorescent light remaining after the action of the stimulation light depends nonlinearly on the intensity of the stimulation light. In particular, the additional excitation light can be focused by an optical system together with the stimulation light into the focal region in the sample. If the intensity distribution of the selected light now has a central minimum intensity in the focal region which coincides with the central maximum intensity of the excitation light, then there exists an intensity distribution of the excitation light and the stimulation light as is also used in STED microscopy. The method according to the invention thus corrects aberration-induced imaging errors of the imaging system, which negatively affect the spatially narrowly limited point spread function when exciting the respective sample for fluorescence emission.

[0033] And specifically, if the third period starts before the first period and the light intensity at the maximum intensity of the intensity distribution of the stimulation light adjacent to the central minimum intensity is so large that more than 50%, preferably more than 66%, even more preferably more than 90% of the measurement signal originates from a surrounding area of ​​the minimum intensity, the dimensions of which are smaller in at least one spatial direction than the diffraction limit at the wavelength of both light and fluorescent light, then the method of the invention corrects the aberration-induced imaging errors for the surrounding area of ​​the minimum intensity. Even if this surrounding area surrounds, but does not include, the minimum intensity corresponding to the respective measured point of the sample in the STED microscope, this still means a correction of the aberration-induced imaging errors for the respective measured point of the sample. On the contrary, this correction is highly specific for the respective measured point of the sample, since the dimensions of the surrounding area are already smaller than the diffraction limit at the wavelength of light and fluorescent light.

[0034] Since the requirements for the excitation and stimulation light in the last-mentioned embodiment of the method according to the invention correspond completely to those in a STED microscope, the method according to the invention can be carried out during the continuous running of STED microscopy measurements or STED microscopy images. In particular, the photons of fluorescence light recorded for the respective measurement or image can be used to carry out the method according to the invention, if they are recorded with a time resolution and can thus be assigned to a first and a second time period. Of course, the method according to the invention can also be carried out already before the optical system is used to image the actual sample.

[0035] In the same embodiment of the method of the invention as in the STED microscope, a metric determined as a quotient, the denominator of which is the first measurement and the numerator of which is the second measurement, is used as the metric to be minimized. This means that if the new degree index determined as the respective quotient is smaller than the old degree index determined as the respective quotient, the control of the adaptive optics should be changed again in the previous direction, since a smaller metric indicates a smaller aberration-induced imaging error.

[0036] This clearly distinguishes it from the method that uses the brightness of the recorded image to adjust the STED microscope, i.e. the fluorescence light remaining after the action of the stimulating light, as a metric to be maximized. Instead, the inventive method, in the same embodiment as the STED microscope, aims at blocking as much of the fluorescence light emission as possible in the entire focal region with the stimulating light. This requires a maximum intensity of the stimulating light in the focal region, which can only be achieved in the absence of aberration-induced imaging errors. Here, the residual emission of the fluorescence light from the minimum intensity of the intensity distribution of the stimulating light, which may even be larger as the aberration-induced imaging errors become smaller, does not impair the functioning of the inventive method.

[0037] In the method of the invention, each first period, each second period and also each third period can be a closed period independent of each other or can be integrated from sub-periods that are temporally distant from each other. The third period being integrated from sub-periods can mean, for example, that light is directed to the focal region in multiple pulses that are rapidly successive and not resolved during the recording of the measurement light. The first period and / or the second period being integrated from sub-periods can mean that the measurement light from the sample is recorded in multiple sub-periods that are temporally successive, between which there are dead times for the recording of the measurement signal.

[0038] In a particular embodiment of the method of the invention, the first, second and third periods are integrated from the sub-periods, which means that the focal area is shifted in the sample between each sub-period of the first, second and third periods, respectively, before the second period and possibly the subsequent further periods of the first, second and third periods follow. In this way, the detection and possibly integration of the measurement signal is averaged over a spatial region of the sample. This has been shown to be particularly advantageous in an embodiment of the method of the invention similar to STED microscopy, in order to average out the effect of the concentration of the fluorescent dye in the sample on the degree index used as a metric, which varies with high spatial frequency.

[0039] In other words, in the method of the present invention, detection and optionally integration of the measurement signal over the same first and same second time periods can be performed for multiple pixels to obtain first and second measurement values, respectively, where light is focused onto a focal region within the sample over the same third time period.

[0040] In a laser scanning microscope of the invention, comprising a first light source for excitation light, a second light source for stimulation light, an objective lens, and a correction device for correcting aberration-induced imaging errors, the correction device including adaptive optics in a light path through the objective lens, the correction device is configured to carry out the following steps of the method of the invention: detecting a measurement signal over a first time period and a second time period to determine a first measurement value and a second measurement value, the stimulation light being focused at a focal region within the sample over a third time period as light that reduces the measurement signal when acting on the sample, determining a degree index from the first measurement value and the second measurement value, and using the degree index during control of the adaptive optics as a metric to be optimized by changing the control of the adaptive optics.

[0041] The adaptive optics of the inventive laser scanning microscope can for example comprise an adaptive mirror and / or a controllable micromirror array and / or an SLM (Spatial Light Modulator). In particular an SLM can be used in embodiments of the inventive method similar to STED microscopy for simultaneous wavefront shaping of the stimulating light such that the latter forms an intensity distribution with a central intensity minimum in the focal region.

[0042] In a further method of the invention for correcting aberration-induced imaging errors in an optical system having an objective lens and adaptive optics in a beam path through the objective lens, the first light, the second light, and the sample are selected such that when acting on the sample, the first light excites a first measurement signal from a component of the sample with a first transition probability that depends on the intensity of the first light with a first power, and when acting on the sample, the second light excites a first or second measurement signal from the same component of the sample with a second transition probability that depends on the intensity of the second light with a second power, where the first and second powers differ by at least 1. The first light is then focused by the optical system into the sample at a focal region of the optical system, and a first measurement signal excited by the first light is detected from the focal region over a first time period to determine a first measurement value. Further, a second light is focused by the optical system onto a focal region within the sample, and a first or second measurement signal excited by the second light is detected from the focal region of the sample over a second time period to determine a second measurement value, and from the first and second measurements, a fairly monotonically rising or falling function of the relative change in the first measurement signal or the relative difference between the first and second measurement signals is determined and used in controlling the adaptive optics as a metric to be optimized by changing the control.

[0043] In the method according to the invention, the different dependence of the first and second transition probabilities on the intensities of the first and second light upon excitation of the respective measurement signals is utilized to determine an extent index, which is used as a metric to be optimized during control of the adaptive optical system. Most simply, in this method too, the extent index, which is a very monotonically rising or falling function of the relative change of the first measurement signal or the relative difference between the first and second measurement signals, is determined by calculating a quotient between the first and second measured values. Since the first and second transition probabilities depend on the light intensity with first and second powers differing by at least one, while the first and second light intensities both depend on the aberration-induced imaging error in the same way, this quotient depends on the imaging error. On the other hand, all other influences on both measured values ​​enter into a constant factor of the quotient, which factor does not change due to the aberration-induced imaging error when determining the first and second measured values ​​for the same focal region, respectively. On the contrary, this also applies in principle if the first light excites another component of the sample as the second light, either in the same focal region or in another focal region, to emit the first measurement signal. In this method according to the invention, by exciting the respective measurement signal with the first or second light, but in the same focal region of the same component of the sample, the degree index is substantially independent of the observation location of the sample. The measurement signal excited by the second light can be the same measurement signal as the measurement signal excited by the first light. This can simplify the implementation of the method according to the invention, but it can also be a second measurement signal, for example a measurement signal of another wavelength.

[0044] Specifically, the first light excites a first measurement signal from a component of the sample by a single-photon process, while the second light excites a first or second measurement signal from the same component of the sample by a multi-photon process.

[0045] This further preferred embodiment of the inventive method corresponds to the first previously described embodiment of the inventive method.

[0046] In a further method according to the invention for correcting an aberration-induced imaging error of an optical system having an objective lens and an adaptive optics in the light path through the objective lens, the light and the sample are selected as in the first described method according to the invention above, i.e. the light, acting on the sample, reduces the measurement signal from the sample or approaches a saturation value from below, the relative change of the measurement signal being dependent on the intensity of the light. In contrast to the two previously described methods according to the invention, in this method the light is focused by the optical system into the focal region of the sample with its intensity optically modulated in time. Here, the measurement signal from the focal region of the optical system at the sample is detected in a time-resolved manner. The phase shift between the optical modulation and the signal modulation of the measurement signal is then determined as a more or less exponential in a very monotonically rising or falling function of the relative change of the measurement signal and is used in the control of the adaptive optics as a metric to be optimized, i.e. to be minimized or maximized, by changing the control.

[0047] This inventive method is equivalent to the inventive method in frequency space described above: the phase shift between the light modulation and the signal modulation depends on the aberration-induced imaging error in the same way as the quotient of the second measurement value and the first measurement value in the inventive method first described above.

[0048] Therefore, many of the above-described preferred embodiments of the first-described inventive method are also preferred embodiments of this inventive method.

[0049] Advantageous developments of the invention are obtained from the claims, the description and the drawings. The features and advantages of combinations of features mentioned in the description are merely examples and can act alternatively or cumulatively, and these advantages do not necessarily have to be achieved by the embodiments of the invention. The following applies with respect to the disclosure of the original application and the patent, without the subject matter of the appended claims being changed hereby. Further features can be seen from the drawings, in particular the illustrated geometric shapes and the relative dimensions of the components to one another as well as their relative arrangement and operative connection. Combinations of features of the various embodiments of the invention or of features of the various claims are likewise possible and are proposed here, even if they differ from the selected reference relationships of the claims. This also applies to features shown in separate drawings or mentioned in the description of the drawings. These features can also be combined with features of different claims. Features mentioned in the claims likewise apply to further embodiments of the invention.

[0050] Features recited in the claims and the specification should be understood to be present exactly in that number or in a number greater than the recited number, without the need to explicitly use the adverb "at least" with respect to their number. Thus, for example, when referring to an adaptive optical system, this should be understood to mean that there is exactly one adaptive optical system, two adaptive optical systems, or more adaptive optical systems. Features recited in the claims can be replaced with other features or can be only one feature with the respective method or the respective laser scanning microscope.

[0051] Any reference signs included in the claims shall not limit the scope of the subject matter protected by the claims, and are used solely for the purpose of facilitating the understanding of the claims.

[0052] The invention will be further explained and described below on the basis of preferred embodiments shown in the drawings. [Brief description of the drawings]

[0053] [Figure 1] FIG. 1 is a diagram showing a laser scanning microscope of the present invention. [Diagram 2] 2 is a diagram showing the intensity distribution of excitation light and stimulation light in the focal region of the objective lens of the laser scanning microscope of FIG. 1. FIG. [Diagram 3] 1 is a histogram of fluorescent light photons over time, which are recorded as a measurement signal in a laser scanning microscope. [Figure 4] FIG. 13 plots our metric for different intentionally induced spherical aberrations (black squares) and our automatic optimization of the metric (white circles). [Diagram 5] FIG. 2 is a plot of the metric of the present invention versus spherical aberration for the optical system of the laser scanning microscope of FIG. 1 when imaging dye-filled beads. [Figure 6] FIG. 6 shows the half-width of the imaging of dye-filled beads for the same spherical aberration in comparison with FIG. 5. [Figure 7] FIG. 6 shows the fluorescence intensity of beads filled with dye for the same spherical aberration in comparison with FIG. 5. [Figure 8] FIG. 2 shows the course of a metric according to the invention with respect to defocus of the optical system of the laser scanning microscope of FIG. 1. [Figure 9] FIG. 2 shows the progression of a metric according to the invention for the spherical aberration of the optical system of the laser scanning microscope of FIG. 1. [Figure 10] FIG. 2 shows the progression of a metric according to the invention for the astigmatism of the optical system of the laser scanning microscope of FIG. 1. [Figure 11] FIG. 2 shows the progression of a metric according to the invention for the coma aberration of the optical system of the laser scanning microscope of FIG. 1. [Figure 12] FIG. 1 shows a bright image of a structure marked by a fluorescent dye and the progression of the assignment of the inventive metric for spherical aberration. [Figure 13]FIG. 13 shows a twilight image of the same structure as in FIG. 12 and the progression of the assignment of the inventive metric for the same spherical aberration. [Figure 14] FIG. 14 shows the same structure of dark images as in FIGS. 12 and 13, and the progression of the metric of the invention for the same spherical aberration. [Figure 15] 2 is a diagram showing the intensity distribution of excitation light and stimulation light in the focal region of the objective lens of the laser scanning microscope of FIG. 1 in another embodiment of the present invention. [Figure 16] A diagram showing various temporal sequences of a first period during which a measurement signal is integrated into a first measurement value, a second period during which the measurement signal is integrated into a second measurement value, and a third period during which selected light is focused into a focal region of the respective optical system. [Figure 17] 1 is a flow chart of the main steps of the method of the present invention. [Figure 18] 4 is a flow chart of the main steps of a further method of the present invention. [Figure 19] 4 is a flow chart of the main steps of yet another method of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0054] The inventive laser scanning microscope 1 shown in Fig. 1 is based on a STED microscope and accordingly has, besides a first light source 2 for the excitation light 3, a second light source 4 for light 5 in the form of a stimulation light 6 for removing the excitation by the excitation light 3 again. Each of the two light sources 2 and 4 comprises a laser 7-8, a polarization-maintaining optical fiber 9-10 and a collimation optical system 11-12 for the excitation light 3-stimulation light 6 emerging from the optical fiber 9-10. In the beam path of the stimulation light 6, furthermore, an SLM 13 for wavefront shaping is arranged, so that the stimulation light 6 forms an intensity distribution with a central intensity minimum in the focal region of the objective lens 14. The stimulation light 6 is guided behind the SLM 13 and after further optics 15 together with the excitation light 3 by a dichroic beam splitter 16. Via the deformable mirror 17 as adaptive optics 18 and a further optical system 19, the excitation light 3 and the stimulation light 6 are coupled into the objective 14, which focuses both the excitation light 3 and the stimulation light 6 into a focal region in the sample 20. The optical systems 15 and 19 are configured such that the deformable mirror 17 and the SLM 13 are in a conjugate plane with respect to the entrance pupil of the objective 14. The position of the focal region where the excitation light 3 and the stimulation light 6 are focused can be moved within the sample 20 by means of a scanner 21. In FIG. 1, the scanner 21 is implied as a mobile sample stage. However, the scanner 21 can also be configured differently, in particular so that the excitation light 3 and the stimulation light 6 are moved relative to the objective 14, in particular for tilting the center of the entrance pupil of the objective 14. Fluorescence light 22 emitted from the focal region of the sample 20 on the basis of excitation of the fluorescent dyes present there by the excitation light is coupled out of the beam path of the excitation light 3 by a second dichroic beam splitter 23 and focused by an optical system 24 into a multimode optical fiber 25 and conducted therethrough to a time-resolved detector 26. In the laser scanning microscope 1 of the invention, the deformable mirror 17 is controlled by a control unit 27 as an adaptive optical system 18 arranged in the beam path through the objective 14, to which a measurement signal 28 representative of the fluorescence light is supplied by the detector 26. Instead of the deformable mirror 17, the adaptive optical system 18 can be constructed by an SLM, a micromirror array or in any other manner known to a person skilled in the art.

[0055] Figure 2 shows the intensity distributions 29 and 30 of the excitation light 3 and the stimulation light 6 along a cross section in the x-direction through the centre of the focal region. The excitation light intensity distribution 29 is that of a diffraction-limited spot. The spatially doughnut-shaped stimulation light intensity distribution 30 has an intensity minimum in the form of a zero point 32 at its centre 31, which is defined in the part of Figure 2 by a maximum intensity 33. At the maximum intensity 33 the intensity of the stimulation light reaches a saturation intensity I S , whereby the excitation of the fluorochrome by the excitation light 3 is completely reversed. Correspondingly, the fluorescence light 22 recorded by the detector 26 of Fig. 1 can be assigned to a surrounding area 34 of the zero point 32, the dimensions of which are far below the diffraction limit. However, this only applies to the fluorescence light 22 that is recorded only when the stimulation light 6 removes the excitation by the excitation light 3 outside the surrounding area 34 of the zero point 32.

[0056] FIG. 3 shows the time points at which individual photons of the fluorescent light 22 strike the detector 26 of FIG. 1 after a pulse 35 of excitation light and a pulse 36 of stimulation light. First, the number of photons recorded per unit time rises sharply during pulse 35 due to excitation by the excitation light 3. Then, this number falls rapidly during pulse 36 due to the action of the stimulation light. The photons of the fluorescent light 22 recorded in period 37 after pulse 36 are photons from the area 34 around the zero point 32. In the method of the invention, the number of photons of the fluorescent light 22 recorded in period 37 is related to the number of photons of the fluorescent light 22 recorded during the preceding period 38. This preceding period 38 is also referred to here as the first period, while period 37 is referred to as the second period. According to FIG. 3, pulses 35 and 36 are in the first period 38. Correlating the photons recorded in the second period 37 with the photons of the fluorescent light 22 recorded in the first period 38 is carried out according to the invention in particular by determining an extent index by calculating the quotient of the photons recorded in the second period 37 and the photons recorded in the first period 38. Here, the invention is based on the knowledge that this extent index will have an extreme value if the control unit 27 controls the adaptive optics 18 in such a way that the aberration-induced imaging errors of the optical system of the laser scanning microscope 1, including the objective lens 14, are accurately compensated by the adaptive optics 18. The aberration-induced imaging errors of the optical system of the laser scanning microscope 1 according to FIG. 1 act on the intensity of the excitation light 3 and the stimulation light 6 in the focal region of the sample 20 in such a way that this intensity decreases with increasing imaging errors. Due to the increasing imaging errors, therefore, the intensity of the excitation light as well as the excitation of the fluorescent dyes in the sample 20 decreases, and thus also the fluorescent light 22. However, this attenuation is not distinguished from other attenuations of the fluorescent light 22, such as, for example, attenuation due to spatial variations in the concentration of the fluorochrome or attenuation due to bleaching of the fluorochrome. However, if we take into account the relative effect of the stimulation light 6 on the fluorochromes previously excited by the excitation light 3, represented by an extent index determined from the photons recorded in the two periods 37 and 38, this effect depends only on the intensity of the stimulation light 6. The fewer photons recorded in the second period 37 than in the first period 38, the more fluorochromes there are that the stimulation light 6 excites before the second period 37.This means that the greater the intensity of the stimulation light, the smaller the aberration-induced imaging error. Referring to Figure 2, the effect of the aberration-induced imaging error can also be explained as follows: In the intensity distribution 30 of the stimulation light 6, which is entirely reduced by the aberration-induced imaging error, the saturation intensity I. S This can be explained by the fact that the fluorescence intensity is increased only at a relatively large interval from the zero point 32, and accordingly, more fluorescence light remains from the region 34 surrounding the zero point 32.

[0057] The metric plotted in FIG. 4 is the quotient of the photons of the fluorescent light 22 recorded in the first period 38 divided by the photons of the fluorescent light 22 recorded in the second period 37. In this case, the metric rises if relatively fewer photons are recorded in the second period 37 than in the first period 38, because the stimulation light 3 has a relatively higher intensity and therefore a stronger reducing effect on the fluorescent light 22. Shown is the effect of six spherical aberrations (black squares) artificially introduced in the laser scanning microscope 1 of FIG. 4 equipped with the adaptive optics 18. The larger the spherical aberration, the greater the reduction in the metric compared to the maximum, regardless of its sign. This maximum is significantly raised above the initial state (white circles) by the automatic optimization of the metric of the present invention by modifying the control of the adaptive optics 18 by the control unit 27 of FIG. 1, at the artificially introduced aberration that is zero. In the case of Figure 4, the metric was generated during 2D STED imaging of a layer of 40 nm sized dye-filled beads with a laser scanning microscope 1 in Figure 1, where the photons of the fluorescent light 22 were recorded time resolved according to Figure 3.

[0058] FIG. 5 plots the same inventive metric as FIG. 4, where STED images of individual beads filled with 40 nm-sized dyes were taken for various spherical aberrations captured as intended by the adaptive optics 18. FIG. 6 plots the corresponding half-widths of the images of the individual beads, and FIG. 7 plots the fluorescence light intensity from the individual beads, for the same captured aberrations. Comparing FIGS. 5 to 7, it can be seen that the maximum of the inventive metric in FIG. 5 is achieved within the much wider minimum of the half-width in FIG. 6 and within the equally wider maximum of the fluorescence light intensity in FIG. 7. This is the context behind why, in optimizing the metric for eliminating aberration-induced imaging errors of the optical system of the laser scanning microscope 1 of FIG. 1 according to the invention, the adaptive optics 18 can be experimentally modified for the purpose of optimizing the metric, without thereby degrading the imaging quality of the laser scanning microscope 1. Of the criteria plotted for spherical aberrations in FIGS. 5 to 7, the inventive metric responds most quickly to aberration-induced imaging errors. Thus, it is seen that this metric has already left its extreme value before the other criteria have left it and thereby identified a degradation in image quality.

[0059] Figures 8 to 11 show the effect of various aberrations on the inventive metric of Figures 4 and 5. Here, the metric is globally maximum when the respective aberrations are zero, be it defocus in Figure 8, spherical aberration in Figure 9, astigmatism in Figure 10 or coma in Figure 11. Optimization of the metric is therefore suitable for eliminating imaging errors due to each of these four different aberrations.

[0060] In figures 12 to 14 images of the same structure are shown at different brightnesses, respectively, with the plot of the metric belonging corresponding to figure 4, i.e. with a given aberration (black squares) and with automatic optimization (white circles). The different brightnesses of the images of the structures are due to the different progressive bleaching of the fluorescent dyes that mark them. Regardless of the image brightness, the metric always shows a maximum at the same artificially introduced near-zero spherical aberration, which requires the inventive optimization of the metric. The inventive elimination of the aberration-induced imaging errors is therefore ensured regardless of the image brightness.

[0061] FIG. 15 shows an alternative intensity distribution 30 of the stimulation light 6 relative to the intensity distribution 29 of the excitation light 3. Specifically, the stimulation light 6 similarly forms a diffraction-limited spot. In this case, too, the aberration-induced imaging error can be eliminated by optimizing the quotient of the leading and trailing photons of the fluorescent light by changing the control of the adaptive optical system 18 in FIG. 1. This is because, as in the case of the intensity distribution 30 of the stimulation light 6, the stimulation light 6 has a saturation intensity I S This also applies if the

[0062] FIG. 16 shows various sequences of a first period 38 during which the measurement signal 28 from the sample 20 is integrated, a subsequent second period 37 during which the measurement signal 28 is again integrated, and a third period 39 during which the light 5 acting on the measurement signal 28 is focused in the focal region of the sample 20. The third period 39 corresponds to the pulse 36 in FIG. 3, in which the stimulating light 6 is directed to the sample. According to FIG. 3, the period 37 follows directly on the period 38, and the period 39 or the pulse 36 overlaps with the second half of the period 38. According to FIG. 16a), the sequence of the periods 37 and 38 is the same. The third period 39 overlaps completely with the first period 38. According to FIG. 16b), the sequence of the periods 37 and 38 is also the same. But now the third period 39 overlaps with a part of the first period 38 and with a part of the second period 37. According to FIG. 16c), the sequence of the periods 37 and 38 is again the same. Here, however, the third period 39 overlaps only with the second period 37. According to FIG. 16d), the third period 39 is arranged between the periods 37 and 38 without overlapping. In both cases, the light 5 focused on the sample 20 in the third period 39 acts more strongly on the measurement signal integrated over the latter period 37 than on the measurement signal integrated over the period 38, since the light 5 always further reduces the measurement signal 28, which is, for example, in the form of the fluorescent light 22 according to FIG. 1. The measured value obtained by integration of the measurement signal 28 in the first period 38 is therefore less influenced by the light 5 than the second measured value obtained by integration in the second period 37, if the third period 39 is completely before the first period 38.

[0063] The flow chart 40 of the method according to the invention shown in Fig. 17 starts with the selection 41 of the light 5 and the sample 20, so that the light 5 reduces the measurement signal 28 from the sample 20 when acting on the sample 20 or approaches a saturation value from below, the change in the measurement signal 28 depending on the intensity of the light 5. Then during detection 42, the measurement signal of the sample 20 from the focal region of the optical system in which the aberration-induced imaging errors are to be corrected is detected over a first period 38, for example integrated, a first measurement value is determined, and a second measurement value is determined over a second period 37. The light 5 is then focused by the optical system on the focal region in the sample 20 over a third period 39. From the first and second measurement values, during determination 43, a new degree index, for example in the form of a new quotient, is determined, and during determination 44, the difference of the new degree index with respect to the previous degree index is determined. Depending on the direction of the difference in degree index, during the change 45 of the control of the adaptive optics 18, the direction of the previous change of the control of the adaptive optics 18 is maintained or reversed. Steps 42 to 45 are repeated in a loop 46. During this repetition, the focal field of the optical system in the sample 20 can be moved, so that for different positions of the focal field in the sample 20, the aberration-induced imaging errors of the optical system are continuously optimally compensated by the adaptive optics 18. During the detection 42 of the measurement signal 28 for determining the first and second measured values, the focal field in the sample 20 can also be moved and a spatial averaging can be performed. For this purpose, the periods 37 to 39 are divided into corresponding sub-periods, each one of which is assigned to a respective position of the focal field in the sample 20.

[0064] Fig. 18 shows a flow chart 40 of the method, which is modified with respect to the method described with reference to Fig. 17. During the selection 47, the first and second light and the sample are selected in such a way that the first light, acting on the sample 20, excites from a component of the sample a first measurement signal with a first transition probability that depends on the intensity of the first light with a first power, and the second light, acting on the sample, excites from the same component of the sample, i.e. in particular from the same fluorescent dye, a second measurement signal with a second transition probability that depends on the intensity of the second light with a second power, where the first and second powers differ by at least 1. Then, during focusing 48, the first light is first focused by the optical system into a focal region of the optical system in the sample, and a first measurement signal excited by the first light is detected from the focal region over a first time period 38 in order to determine a first measurement value. Then, during further focusing 49, a second light is focused by the optical system at the same focal area in the sample 20, and a second measurement signal excited by the second light is detected from the focal area of ​​the sample over a second period 37 in order to determine a second measured value. Subsequently, during a determination 43, a first degree index is determined, for example in the form of a new quotient, in the same way as in the method of the invention described with reference to FIG. 7, then during a determination 44, the difference of the new degree index with respect to the previous degree index is determined, and during a change 45, the control of the adaptive optical system 18 is changed in the same or another direction as before. The steps repeated in the loop 46 here include steps 48, 49 and 43 to 45.

[0065] In the further method according to the invention shown in Fig. 19 on the basis of a flow chart 40, the selection 41 corresponds to the selection 41 of Fig. 17. However, the subsequent focusing 50 of the selected light is performed with a time-dependent optical modulation of its intensity and the simultaneous detection of the measurement signal 28 is performed in a time-resolved manner. The phase shift between the optical modulation and the signal modulation of the measurement signal 28 is then determined in a determination 51 as a new degree index. Then, in a determination 44, the difference of this new degree index with respect to the old degree index is determined and a change 45 in the control of the adaptive optical system 18 is performed on the basis of this difference. Here, a loop 46 comprises the steps 50, 51, 44 and 45. [Explanation of symbols]

[0066] 1. Laser scanning microscope 2. First Light Source 3. Excitation Light 4 Second Light Source 5 light 6 Stimulating light 7 Laser 8 Laser 9. Optical Fiber 10 Optical Fiber 11 Collimation optical system 12 Collimation optical system 13 SLM 14 Objective Lens 15 Optical system 16 Dichroic Beam Splitter 17 Deformable Mirror 18 Adaptive Optics 19 Optical system 20 Samples 21 Scanner 22 Fluorescent Light 23 Dichroic Beam Splitter 24 Optical system 25 Multimode Optical Fiber 26 Detector 27 Control Unit 28 Measurement Signal 29 Light intensity distribution 30 Light intensity distribution 31 center 32 Zero Point 33 Maximum strength 34 Surrounding Area 35 Pulse 36 Pulse 37 Second Period 38 First Period 39 Third Period 40 Flowchart 41 Selection 42 Detection 43 Decision 44 Decision 45 Changes 46 Loop 47 Selection 48 Focus 49 Clustering 50 Clustering 51 Decision I S Saturation Intensity

Claims

1. 1. A method for correcting aberration-induced imaging errors in an optical system having an objective lens (14) and adaptive optics (18) in a light path through the objective lens (14), comprising the steps of: - the stimulation light (6) and the sample (20) containing a fluorescent dye that emits fluorescent light (22) when excited into a fluorescent state are selected so as to reduce a measurement signal (28) representative of the fluorescent light (22) emitted from the sample (20) when the stimulation light (6) acts on the sample (20); The reduction is achieved by the stimulation light (6) exciting the fluorescent dye to a fluorescent state in which it emits fluorescent light (22) by the stimulation light (6) plus the excitation light (3), and stimulating the fluorescent dye to stimulated emission before the fluorescent dye emits the fluorescent light (22) from the fluorescent state; a relative change in the measurement signal (28) representative of the fluorescent light (22) is caused by the selected stimulation light (6) and depends on the intensity of the stimulation light (6); a measurement signal (28) indicative of fluorescent light is detected from a focal region within the sample (20) of the optical system over a first time period (38) to determine a first measurement value by integrating a measurement signal (28) indicative of fluorescent light (22) emitted from the sample (20) during said first time period (38); a measurement signal (28) representative of the fluorescent light is detected from a focal region within the sample (20) of the optical system over a second time period (37) to determine a second measurement value by a new integration of the measurement signal (28) representative of the fluorescent light (22) emitted from the sample (20) during said second time period (37); - the stimulation light (6) is focused by the optical system onto a focal region of the sample (20) for a third period (39); - said first period (38) precedes said second period (37) and / or said second period (37) follows said first period (38); - said third period (39) at least partially overlaps in time with said first period (38) and / or said second period (37) or is an intermediate period between said first and second periods; - from the first and second measurements, an exponent is determined to some extent as a strictly monotonically rising or falling function of the relative change in the measurement signal (28) and is used as a metric to be optimized, i.e. maximized or minimized, when controlling the adaptive optical system (18) by changing the control (45) so as to maximize the intensity of the stimulation light (6) in the focal region.

2. When the stimulation light (6) reduces a measurement signal (28) representative of the fluorescent light (22) emitted from the sample (20), the absolute value of the change in the measurement signal (28) is normalized to an initial value of the measurement signal in order to determine an extent index.

2. The method of claim 1 .

3. 3. The method according to claim 1, wherein the first measurement value is determined such that it indicates a first integral over the first period (38) of the measurement signal (28) and the second measurement value is determined such that it indicates a second integral over the second period (37) of the measurement signal (28).

4. The method according to claim 1 , wherein the degree index is determined as a quotient of the second measurement value and the first measurement value.

5. - determining the staleness index, - changing the control of the adaptive optical system (18) in one direction, - detecting a new measurement signal (28), whereby the stimulation light (6) is focused again onto a focal region within the sample (20), - determining the degree index of novelty; - determining the difference between said new degree index and said old degree index, 5. The method according to claim 1, further comprising: - depending on the direction of the difference, a new modification of the control of the adaptive optical system (18) is performed in the previous direction of modification or in a different direction of modification.

6. - a new detection of a measurement signal (28), the stimulation light (6) being newly focused onto a focal region within said sample (20); - determining a novel degree index; - determining (44) the difference between said new degree index and said old degree index; a step (45) of modifying the control of said adaptive optical system (18) in a new direction of modification, either in the previous direction or in a different direction, depending on the direction of said difference, A control of the adaptive optical system (18) is performed at least once more or in the direction of change several times until the degree index reaches an extreme value in the control, and one of the new degree indexes determined during one of the previous executions of the step is used as the old degree index during the current execution of the step. The method according to claim 5, characterized in that

7. 7. The method according to claim 1, wherein the fluorescent light (22) detected as the measurement signal (28) is measurement light emitted from the sample (20), which is imaged onto a detector (26) by the optical system.

8. The direction in which the control of the adaptive optical system (18) is changed is - spherical aberration, - Defocus, - astigmatism, -Coma aberration 8. The method according to claim 1, wherein the direction of change is selected from the directions of change for which compensation is possible.

9. A method according to any one of claims 1 to 8, characterized in that the excitation light (3) is focused by the optical system to a focal region within the sample (20).

10. The method according to claim 9, characterized in that the intensity distribution of the stimulation light (6) has a central minimum intensity in the focal region that coincides with the central maximum intensity of the excitation light (3).

11. A method according to claim 9 or 10 when directly citing claim 4 and claim 5 or 6, characterized in that if the new degree index determined as a quotient is smaller than the old degree index determined as a quotient, and if the quotient has the first measurement value in the denominator and the second measurement value in the numerator, the control of the adaptive optical system (18) is changed again in the previous direction of change.

12. 2. The method according to claim 1, characterized in that the first period (38), the second period (37) and, if present, the third period (39) are each a closed period independent of one another or are integrated from partial periods separated in time from one another.

13. 13. The method according to claim 1, wherein detection of the measurement signal (28) is performed for a number of pixels and a stimulation light (6) is focused on a focal region within the sample (20) to determine the degree index.

14. A laser scanning microscope (1), comprising: a first light source (2) for excitation light (3), a second light source (4) for the stimulation light (6), an objective lens (14), a correction device including an adaptive optical system (18) in the light path through said objective lens (14) for correcting aberration-induced imaging errors; In a laser scanning microscope having 14. A laser scanning microscope, characterized in that the correction device is configured to carry out the method according to any one of claims 1 to 13.

15. The adaptive optical system (18) comprises: - an adaptive mirror (17), and / or - a controllable micromirror array, and / or - has a spatial light modulator (SLM), 15. The laser scanning microscope (1) according to claim 14, characterized in that it has 16. A method for correcting an aberration-induced imaging error in an optical system having an objective lens (14) and an adaptive optical system (18) in a beam path through the objective lens (14), comprising: the excitation light (3) and the sample (20) containing a fluorescent dye which emits fluorescent light (22) when excited into a fluorescent state are selected in such a way that, when the excitation light (3) acts on the sample (20), it excites the fluorescent dye into a fluorescent state until it approaches a saturation value, and in that fluorescent state the fluorescent dye emits fluorescent light (22), thereby causing a measurement signal (28) representative of the fluorescent light (22) emitted from the sample (20) to approach a saturation value from below, the relative change in the measurement signal (28) representative of the fluorescent light (22) is caused by the selected excitation light (3) and depends on the intensity of the excitation light (3); a measurement signal (28) indicative of fluorescent light is detected from a focal region within the sample (20) of the optical system over a first time period (38) to determine a first measurement value by integrating a measurement signal (28) indicative of fluorescent light (22) emitted from the sample (20) during said first time period (38); a measurement signal (28) representative of the fluorescent light is detected from a focal region within the sample (20) of the optical system over a second time period (37) to determine a second measurement value by a new integration of the measurement signal (28) representative of the fluorescent light (22) emitted from the sample (20) during said second time period (37); - excitation light (3) is focused by said optical system onto a focal region of said sample (20) for a third period (39); - said first period (38) precedes said second period (37) and / or said second period (37) follows said first period (38); said third period (39) overlaps at least in part in time with said first period (38) and with said second period (37); - from the first and second measurements, an exponent is determined to some extent as a strictly monotonically rising or falling function of the relative change in the measurement signal (28) and is used as a metric to be optimized, i.e. maximized or minimized, when controlling the adaptive optical system (18) by modifying the control (45) so as to maximize the intensity of the excitation light (3) in the focal region.

17. The method described in claim 16, characterized in that when the excitation light (3) causes a measurement signal (28) indicating the fluorescent light (22) emitted from the sample (20) to approximate a saturation value from below, the absolute value of the change in the measurement signal (28) is normalized to the saturation value to determine an extent index.

18. A method as described in claim 16 or 17, characterized in that the first measurement value is determined such that it indicates a first integral over the first period (38) of the measurement signal (28), and the second measurement value is determined such that it indicates a second integral over the second period (37) of the measurement signal (28).

19. A method according to any one of claims 16 to 18, wherein the degree index is determined as a quotient of the second measurement value and the first measurement value.

20. - determining an age index, - changing the control of the adaptive optical system (18) in one direction, - detecting a new measurement signal (28), whereby the excitation light (3) is again focused onto a focal region within the sample (20), - determining the degree index of novelty; - determining the difference between said new degree index and said old degree index, 20. The method according to any one of claims 16 to 19, characterized in that depending on the direction of the difference, a new modification of the control of the adaptive optical system (18) is performed in a previous or another direction of modification. a step of newly detecting a measurement signal (28), in which the excitation light (3) is newly focused in a focal region within the sample (20); - determining a novel degree index; - determining (44) the difference between said new degree index and said old degree index; a step (45) of modifying the control of said adaptive optical system (18) in a new direction of modification, either in the previous direction or in a different direction, depending on the direction of said difference, A control of the adaptive optical system (18) is performed at least once more or in the direction of change several times until the degree index reaches an extreme value in the control, and one of the new degree indexes determined during one of the previous executions of the step is used as the old degree index during the current execution of the step.

21. The method of claim 20, wherein:

22. A method according to any one of claims 16 to 21, wherein the fluorescent light (22) detected as the measurement signal (28) is measurement light emitted from the sample (20), and the measurement light is imaged onto a detector (26) by the optical system.

23. The direction in which the control of the adaptive optical system (18) is changed is - spherical aberration, - Defocus, - astigmatism, -Coma aberration 23. The method according to claim 16, wherein the direction of change is selected from the directions of change for which compensation is possible.

24. The method described in claim 16, characterized in that the first period (38), the second period (37), and, if present, the third period (39), are each a closed period independent of each other or are integrated from subperiods separated in time from each other.

25. A method described in any one of claims 16 to 24, wherein detection of the measurement signal (28) is performed for multiple pixels and excitation light (3) is focused to a focal region within the sample (20) to determine the degree index.

26. A laser scanning microscope (1), comprising: a first light source (2) for excitation light (3), a second light source (4) for the stimulation light (6), an objective lens (14), a correction device including an adaptive optical system (18) in the light path through said objective lens (14) for correcting aberration-induced imaging errors; In a laser scanning microscope having 26. A laser scanning microscope, characterized in that the correction device is configured to carry out the method according to any one of claims 16 to 25.

27. ​​The adaptive optical system (18) comprises: - an adaptive mirror (17), and / or - a controllable micromirror array, and / or - has a spatial light modulator (SLM), 27. The laser scanning microscope (1) according to claim 26, characterized in that it has

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