Seal retainer for component assembly and method for attaching components to flow control device

Abstract

Fluid flow control devices are critical components for delivering process fluids to semiconductor manufacturing. Such fluid flow control devices require various fluid flow components tightly packaged within the flow control device. Delivering such devices requires specialized equipment and methods capable of installing seals in tight spaces into field-installed devices. Seal retainers may be used to maintain seals during installation of the fluid flow components into the flow control device.

Description

[Technical field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims the benefit of U.S. Provisional Patent Application No. 63 / 023,742, filed May 12, 2020, the entirety of which is incorporated herein by reference. [Background technology]

[0002] Flow control has been one of the primary technologies in semiconductor chip manufacturing. Fluid flow control devices are important for delivering process fluids at known flow rates in semiconductor manufacturing and other industrial processes. Such devices are used to measure and precisely control fluid flow rates in a variety of applications. This control relies on devices having parts that are assembled quickly and reliably with minimal seal leakage.

[0003] As chip manufacturing technology advances, component sizes become smaller and packaging requirements become more stringent for flow control devices. Maintenance and repair of flow control devices increasingly involves installing seals and components in tight spaces. Improved methods and equipment are desired to increase the speed and ease of maintenance. Summary of the Invention

[0004] The present technology is directed to a seal retainer used in sealing or assembling component attachment points in flow control devices. One or more of the seal retainers may be used in a single component, and the resulting flow control device may be used in a wide range of processes, such as semiconductor chip manufacturing, solar panel manufacturing, etc.

[0005] In one implementation, the invention is a method of mounting a fluid flow component in a flow control device. In a first step, a seal is placed in a first seal retainer to form a seal assembly. Second, the seal assembly is mounted to the fluid flow component such that the first seal is aligned with a first seal cavity of the fluid flow component, thereby forming a component assembly. Third, the component assembly is placed on top of a first substrate block of the flow control device such that the first seal is aligned with the first seal cavity of the first substrate block and a portion of the first seal retainer is disposed between the first substrate block and the fluid flow component. Fourth, the component assembly is partially secured to the flow control device such that the first seal is at least partially located in each of the first seal cavity of the first substrate block and the first seal cavity of the fluid flow component. 5 Fifth, the first seal retainer is retracted such that the first seal retainer is released from the fluid flow component and a portion of the first seal retainer is removed from between the first substrate block and the fluid flow component. Sixth, the component assembly is fully secured to the flow control device.

[0006] In yet another implementation, the invention is a method of manufacturing a semiconductor or integrated circuit. First, a fluid flow component of a flow control device is installed according to the methods described above to complete a fluid supply line extending from a fluid source to a processing chamber. Second, a fluid is flowed from the fluid source to the processing chamber and contacts one or more semiconductor or integrated circuit wafers in the processing chamber.

[0007] In another implementation, the invention is a seal retainer for retaining a seal, the seal retainer having a seat body having a first axis, a second axis orthogonal to the first axis, a first portion, and a second portion, the first axis being coplanar with the first portion and the first portion extending in the direction of the first axis and extending from the second axis along the first axis, the second portion extending from the second axis, and having a seal retention feature.

[0008] In yet another implementation, the invention is a fluid flow component assembly having a fluid flow component, an alignment feature, a first seal, and a first seal retainer. The fluid flow component has a first seal cavity. The alignment feature contacts the fluid flow component. The first seal is adapted to engage with the first seal cavity. The first seal retainer is adapted to engage the first seal and the alignment feature of the fluid flow component. The first seal is attached to the first seal retainer such that the first seal contacts the first seal cavity.

[0009] In an alternative implementation, the invention is a method of mounting a fluid flow component to a flow control device. First, a component assembly is placed on top of a first substrate block, the component assembly including a fluid flow component, a first seal retainer, and a first seal retained in the first seal retainer in alignment with a first seal cavity in the fluid flow component. The component assembly is placed on top of the first substrate block such that the first seal is aligned with the first seal cavity in the first substrate block. Second, the first seal retainer is retracted such that the first seal and fluid flow component are disengaged from the fluid flow component while retaining their position. Third, the fluid flow component is secured to the flow control device such that the first seal hermetically seals a flow passage in the first substrate block to a flow passage in the fluid flow component.

[0010] Further areas of applicability of the present technology will become apparent from the detailed description provided hereinafter. It should be understood that the detailed description and specific examples, while indicating preferred implementations, are for purposes of illustration only and are not intended to limit the scope of the present technology. [Brief description of the drawings]

[0011] The invention of the present disclosure will become more fully understood from the detailed description and the accompanying drawings.

[0012] [Figure 1] FIG. 1 is a schematic diagram of a system for manufacturing semiconductor devices using one or more flow control devices.

[0013] [Diagram 2]FIG. 2 is a perspective view of a fluid delivery module including multiple flow control devices that may be used in the process of FIG.

[0014] [Diagram 3] FIG. 3 is a perspective view of the fluid supply module of FIG. 2 with one fluid flow component removed.

[0015] [Figure 4A] FIG. 4A is a perspective view of components mounted on a pair of substrate blocks.

[0016] [Figure 4B] FIG. 4B is a cross-sectional view of one of the component and substrate blocks of FIG. 4A taken along line 4B-4B.

[0017] [Figure 4C] FIG. 4C is a bottom view of the components of FIG. 4A.

[0018] [Figure 4D] FIG. 4D is a top view of the substrate block of FIG. 4A.

[0019] [Diagram 5] FIG. 5 is a perspective view of a seal retainer that provides a seal between a fluid flow component of a fluid flow control device and a base block.

[0020] [Figure 6] FIG. 6 is a perspective view of a seal assembly including the seal retainer of FIG. 5 and a seal attached to the seal retainer.

[0021] [Figure 7] FIG. 7 is a plan view of the seal retainer of FIG.

[0022] [Figure 8A] FIG. 8A is an underside perspective view of a portion of a component assembly including two seal retainers, two seals, and a flow control component.

[0023] [Figure 8B] FIG. 8B is a perspective view of the component assembly of FIG. 8A.

[0024] [Figure 9A] 9A is a plan view of a portion of the seal retainer of FIG.

[0025] [Figure 9B] FIG. 9B is a detailed view of a portion of the seal retainer of FIG. 9A showing the weakened area.

[0026] [Figure 9C] FIG. 9C is a perspective view of a portion of the seal retainer of FIG. 5 after removal of the seal retainer from the fluid flow component.

[0027] [Figure 10] FIG. 10 is a flow chart illustrating a method for installing a fluid flow component on a flow control device.

[0028] [Figure 11A] FIG. 11A is a perspective view of a fluid supply module showing a flow control device with a missing fluid flow component.

[0029] [Figure 11B] FIG. 11B is a perspective view of the fluid supply module of FIG. 11A showing an assembly of parts ready for assembly.

[0030] [Figure 11C] FIG. 11C is a perspective view of the fluid delivery module of FIG. 11A showing the component assembly partially secured to the flow control device.

[0031] [Figure 11D] FIG. 11D is a detailed view of a portion of the flow control device of FIG. 11A showing the fluid flow components of the component assembly with the seal retainer removed.

[0032] [Figure 11E]FIG. 11E is a perspective view of the fluid supply module of FIG. 11A showing the fluid flow components fully secured to the flow controller.

[0033] [Figure 12] FIG. 12 is a perspective view illustrating an alternative embodiment of a seal retainer.

[0034] All drawings are schematic and not necessarily to scale. Features that are numbered in one drawing and not numbered in another drawing are the same features unless otherwise noted herein. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0035] The description of the embodiments to aid in understanding according to the principles of the invention is intended to be read in connection with the accompanying drawings, which should be considered as part of the entire written description. In the description of the embodiments of the invention disclosed herein, references to orientations and directions are intended merely for convenience of description and are in no way intended to limit the invention. Relative terms such as "lower", "upper", "horizontal", "vertical", "above", "under", "up", "down", "left", "right", "top" and "bottom", along with derivatives thereof (e.g., "horizontally", "downwards", "upwardly", etc.), should be understood to refer to the orientation as described or shown in the drawings discussed. These relative terms are for convenience of description only and do not require that the device be made or operated in a particular orientation unless expressly indicated as such. The terms "mounted", "fixed", "connected", "coupled", "interconnected" and similar terms refer to a relationship in which structures are fixed or attached to one another, whether directly or indirectly through an intervening structure, including movable or rigid attachments or relationships, unless expressly indicated otherwise. Furthermore, features and advantages of the present invention are described with reference to preferred embodiments. It is therefore evident that the present invention should not be limited to such preferred embodiments which describe possible non-limiting combinations of features present alone or in combination with other features, the scope of the present invention being defined in the claims appended hereto.

[0036] The present invention is directed to a seal retainer used to mount fluid flow components to form a flow control device. Semiconductor manufacturing is one where high performance is required for controlling fluid flow. As semiconductor manufacturing technology has advanced, customers have realized the need for flow control devices with tighter space requirements. Thus, repair and maintenance of flow control equipment has become more difficult as packaging of flow control devices has become ever more dense. The present invention facilitates efficient assembly of flow control components within a flow control device.

[0037] FIG. 1 shows a schematic diagram of an exemplary processing system 1000. The processing system 1000 may utilize multiple flow controllers 100 fluidly coupled to a processing chamber 1300. The multiple flow controllers 100 are used to supply one or more different process fluids to the processing chamber 1300. The fluids are supplied by multiple fluid supplies or sources. Collectively, the multiple flow controllers 100 belong to a fluid supply module 1400. Optionally, more than one fluid supply module 1400 may be used in the processing system 1000. The multiple flow controllers 100 are connected to the processing chamber 1300 by an outlet manifold 400. Items such as semiconductors and integrated circuits are processed in the processing chamber 1300.

[0038] Valves 1100 isolate each of the flow controllers 100 from the process chamber 1300 and allow each of the flow controllers 100 to be selectively connected and isolated from the process chamber 1300 to facilitate a wide variety of process steps. The process chamber 1300 may include an applicator to apply process fluids provided by the multiple flow controllers 100, facilitating selective or global distribution of the fluids provided by the multiple flow controllers 100. Optionally, the process chamber 1300 may be a vacuum chamber or a tank or bath in which items are immersed in the fluids provided by the multiple flow controllers 100. Fluid supply lines are formed by flow paths from the respective fluid sources to the process chamber 1300.

[0039] Additionally, the processing system 1000 may further include a drain 1200, which is isolated from the processing chamber 1300 by a valve 1100 to allow for draining of process fluids or to facilitate purging of one or more of the flow controllers 100 to allow for switching of process fluids with the same flow controller 100. Optionally, the drain 1200 may be a vacuum source or a liquid drain adapted to remove liquid from the processing chamber 1300. Optionally, the flow controller 100 may be a mass flow controller, a flow splitter, or other device for controlling the flow rate of a process fluid in the processing system. Additionally, the valve 1100 may be incorporated into the flow controller 100, if desired.

[0040] Processes performed in the processing system 1000 may include wet cleaning, photolithography, ion implantation, dry etching, atomic layer etching, wet etching, plasma ashing, rapid thermal annealing, furnace annealing, thermal oxidation, chemical vapor deposition, atomic layer deposition, physical vapor deposition, molecular beam epitaxy, laser lift-off, electrochemical deposition, chemical mechanical polishing, wafer testing, electroplating, or any other process utilizing fluids.

[0041] 2 and 3 show schematic diagrams of an example fluid supply module 1400. In this embodiment, the fluid supply module 1400 includes multiple flow control devices 100 having multiple inlets 101 and multiple outlets 102. In some embodiments, the multiple inlets 101 do not correspond one-to-one to the multiple outlets 102. Instead, multiple inlets 101 may be connected to a single outlet 102, and a single inlet 101 may be split into multiple outlets 102. In this way, different fluids may be mixed or combined before being delivered to the processing chamber 1300.

[0042] As can be seen, each of the flow control devices 100 is typically arranged in a row, with multiple flow control devices 100 arranged in parallel. This need not be the case, and any packaging configuration may be used. The fluid supply module 1400 has a substrate panel 1402. The substrate panel 1402 acts as a structural support for the fluid supply module 1400, but may simply be used for ease of assembly. Other structural support configurations are contemplated. A plurality of substrate blocks 104 are placed on the substrate panel 1402 and have fluid ports thereon to direct the flow of fluid to one or more fluid flow components 200, the fluid flow components 200 having corresponding fluid ports as described in more detail below. The substrate blocks 104 are passive components, while the fluid flow components 200 are considered to be active components. The fluid flow components 200 may be one or more valves, flow controllers, pressure transducers, flow measurement sensors, pressure regulators, flow restrictors, or actuators, or other known flow control components.

[0043] As can be seen by comparing Figures 2 and 3, the fluid flow components 200 have been removed from the fluid delivery module 1400 of Figure 3. Removal of the fluid flow components 200 exposes portions of the two substrate blocks 104. The component attachment sites 106 are formed by portions of the two substrate blocks 104. The component attachment sites 106 are of various sizes depending on the size of the components 200 to be mounted to the component attachment sites 106. Thus, different component attachment sites 106 may comprise different portions of the same substrate block 104. Each and every component 200 has a component attachment site 106 in the fluid delivery module 1400.

[0044] 4A-D, a portion of a fluid delivery module 1400 is shown. Specifically, a fluid flow component 200 is shown mounted to a pair of substrate blocks 104, which form a component attachment site 106. The fluid flow component 200 is mounted to the substrate blocks 104 via an alignment feature 250. The alignment feature 250 is also referred to as a fastener and may be used as both an alignment feature and a fastener. The alignment feature 250 may be a fastener such as a bolt, screw, pin, or other known fastening device. However, in other embodiments, the alignment feature 250 may be separate from the fastener. For example, a dowel pin or other pin may be used to align the fluid flow component 200 to the substrate blocks 104, and a separate fastener may be used to fasten the fluid flow component 200 to the substrate blocks 104. As can be seen in FIG. 4A-D, the alignment feature 250 extends through the substrate blocks 104.

[0045] Although not shown in FIGS. 4A-D , the substrate panel 1402 is threaded or has a threaded insert to receive the alignment feature 250, which then extends through the fastener passages 208 of the fluid flow component 200 and the fastener passages 108 of the substrate block 104 and is attached to a threaded hole or other feature in the substrate panel 1402. The alignment feature 250 is intended for general alignment, and precise alignment is provided by other arrangements. Thus, the fastener passages 108, 208 do not need to be precisely matched with the alignment feature 250. In alternative embodiments, the alignment feature 250 may be attached directly to the substrate block 104 via a threaded hole or threaded insert in the fastener passages 108. In these embodiments, the substrate block 104 may be separately attached to the substrate panel 1402 via additional fasteners. In other embodiments, the alignment feature 250 may be attached to a support or other component below the substrate panel 1402.

[0046] As best seen in FIG. 4B, the seal 300 is located between the fluid flow component 200 and the substrate block 104. The seal 300 is an annular seal having a cylindrical outer surface 304. The seal 300 also has a flow passage 302 in its center that allows fluid to flow through it. The seal 300 provides an airtight seal between the fluid ports 210 of the fluid flow component 200 and the fluid ports 110 of the substrate block 104. Each of the fluid ports 110 of the substrate block 104 includes a seal cavity 116. Each of the fluid ports 210 of the fluid flow component 200 includes a seal cavity 216. Each of the fluid ports 110 of the substrate block 104 includes a seal cavity 116.

[0047] As best seen in FIG. 4C, the fluid flow component 200 includes a mounting surface 214 with two fluid ports 210, one fluid port 210 being an inlet and the other being an outlet. A fluid flow passage 212 extends from one fluid port 210 to the other fluid port 210. Similarly, in FIG. 4D, it can be seen that each of the substrate blocks 104 includes a mounting surface 114 with two fluid ports 110. The fluid flow passage 112 extends from one fluid port 110 to the other fluid port 110. Returning to FIG. 4B, it can be seen that when the seal 300 is mounted between the fluid flow component 200 and the substrate block 104, there is a distance d between the mounting surface 214 and the mounting surface 114. Thus, the seal 300 is compressed between the fluid flow component 200 and the substrate block 104. The seal 300 fits into the seal cavity 216 of the fluid flow component 200 and the seal cavity 116 of the substrate block 104. During assembly, the mounting surfaces 114, 214 are drawn closer together by the alignment mechanism 250, narrowing the spacing between the mounting surfaces 114, 214.

[0048] 5-7, a seal retainer 500 is shown. The seal retainer is formed from a sheet body 510. The sheet body 510 may be formed from any sheet material, such as sheet metal, metal foil, plastic film, and the like. In particular, the sheet body 510 may be formed from one or more of polyethylene terephthalate, Mylar, perfluoroalkoxyalkane, polytetrafluoroethylene, polyetheretherketone, polyvinylidene fluoride, polyimide, polypropylene, or fluorinated ethylene propylene. The sheet body 510 may have a thickness of 0.013 mm, 0.010 mm, 0.016 mm, or other thickness. As will be described in more detail below, the material properties and other attributes of the sheet body 510 will affect the optimal thickness. In all implementations, the sheet body 510 is flexible so that the seal retainer 500 will flex during use. The sheet body 510 is bent to accommodate the seal 300 and bent to flex around the part 200.

[0049] The seal retainer 500 has a longitudinal axis AA and a transverse axis BB. In some embodiments, the longitudinal axis AA and the transverse axis BB are orthogonal, while in other embodiments, the longitudinal axis AA and the transverse axis BB form an angle other than 90 degrees. When the seal retainer 500 is in a flat state, the seal retainer 500 extends along the longitudinal axis AA, and the seal retainer 500 is elongated in the direction of the longitudinal axis. The seal retainer 500 has a length along the longitudinal axis AA and a width along the transverse axis BB, the width being less than the length. The seal retainer 500 further includes a peripheral edge 512 that extends circumferentially around the outside of the seat body 510.

[0050] The seal retainer 500 also includes a first portion 520 and a second portion 530. The first portion 520 is formed with a first edge 525, a second edge 526 opposite the first edge 525, a third edge 527, and a fourth edge 528 opposite the third edge 527, the fourth edge 528 being collinear with the transverse axis BB. The sheet body 510 also includes a fold line 514 that is collinear with the transverse axis BB. Thus, the fold line 514 is collinear with the fourth edge 528. The second portion 530 is defined by the fold line 514 and the remainder of the outer peripheral edge 512 of the sheet body 510. Thus, the second portion 530 is the portion of the sheet body 510 on the opposite side of the transverse axis BB from the first portion 520. The fold line 514 may be perforated, perforated, grooved, or otherwise modified to allow the sheet body 510 to fold cleanly about the transverse axis BB. However, in alternative embodiments, the folds 514 may be formed without the aid of additional bends formed in the sheet body 510 .

[0051] First portion 520 also includes a number of circular openings 522 that form a gripping mechanism. Circular openings 522 are linearly aligned such that a tool may be inserted into circular openings 522 and used as a handle to pull first portion 520 of seal retainer 500 together. Optionally, circular openings 522 are symmetric about longitudinal axis AA. There may be fewer or more than three circular openings.

[0052] The second gripping mechanism is formed with a pair of elongated apertures 524 that are symmetrical along and about the longitudinal axis AA. The second gripping mechanism includes a fingering portion 529 having a distal edge 521. The sheet body 510 includes an inner edge 516 joined to the distal edge 521 of the fingering portion 529 by a weakened area 523. The weakened area 523 can be an area of ​​the distal edge 521 that remains connected to the fingering portion 529 in some manner. For example, it may be perforated, grooved, cut, or perforated. In other words, the distal edge 521 is connected to the inner edge 516, but the connection is weak to allow for failure of the weakened area 523. The weakened area 523 is also known as a pre-weakened zone or area. The finger grip 529 can then be folded upwards, away from the first portion 520, allowing a user to insert their fingers into the first portion 520 between the elongated openings 524. This can be used to pull the first portion 520 together. The reasons for the importance of the gripping mechanism are explained in more detail below.

[0053] The second portion 530 can transition from the flat state described above to a folded state. In the flat state, the first portion 520 forms a first plane and the second portion 530 forms a second plane. The first and second planes are coplanar. In other words, the first and second planes are both in the same plane and form one plane. In the flat state, the first portion 520 coincides with the longitudinal axis AA. In the flat state, the second portion 530 also coincides with the longitudinal axis. In the folded state, the second portion 530 is folded along the fold line 514 about the transverse axis BB. Thus, the second portion 530 (and the corresponding second plane) is no longer coplanar with the first plane of the first portion 520. The second portion 530 can be at any angle, but is most preferably at an angle of approximately 90 degrees with respect to the first portion 520. Thus, the second portion 530 is at an angle with respect to the longitudinal axis AA. The second portion 530 rotates about the transverse axis BB at the fold line 514 .

[0054] The second portion 530 includes a seal aperture 532 that receives the seal 300. As shown in FIG. 6, the seal 300 fits within the seal aperture 532, such that the seal 300 is retained by the seal aperture 532. A seal assembly 540 is formed by assembly of the seal 300 with the seal retainer 500, such that the seal 300 is assembled within the seal aperture 532. As shown, the seal aperture 532 is circular and engages the cylindrical outer surface 304 of the seal 300. The seal aperture 532 is preferably sized to provide an interference fit with the cylindrical outer surface 304 to prevent movement of the seal 300 within the seal aperture 532. However, other shapes for the seal aperture 532 are contemplated.

[0055] Adjacent the seal opening 532, an area of ​​weakness 534 is located between the opening 532 and the peripheral edge 512 of the sheet body 510. As described above with respect to the area of ​​weakness 523, the area of ​​weakness 534 may be scored, punched, grooved, perforated, or otherwise weakened to promote fracture of the sheet body 510 at the area of ​​weakness 534. The area of ​​weakness 534 is also known as a pre-weakened zone or area. The area of ​​weakness 534 is described in more detail below.

[0056] The second portion 530 further comprises a pair of fastener engagement features 536. The fastener engagement features 536 are semicircular in shape with an entry slot 538 having a width less than the diameter of the semicircular fastener engagement features 536. In alternative constructions, the entry slot 538 may be replaced with a weakened area or other feature. The fastener engagement features 536 need not be semicircular and may be another shape, as desired. The fastener engagement features 536 are aligned with the alignment features 250. and may be the same diameter or overall dimensions as alignment feature 250. Alternatively, they may be an interference fit, or they may have a gap between fastener engagement feature 536 and alignment feature 250.

[0057] 8A and 8B, a component assembly 550 is shown. The component assembly 550 includes a fluid flow component 200, a plurality of alignment features 250, and two seal assemblies 540. In FIG. 8A, the seal assembly 540 is not yet fully attached to the fluid flow component 200. As shown, the seal cavity 216 of the fluid flow component 200 is still exposed with the seal 300 removed from the seal cavity 216. The fastener engagement feature 536 engages with the alignment feature 250 such that the first portion 520 of the seal retainer is located on the opposite side of the fluid flow component 200. In FIG. 8B, the seal assembly 540 is fully attached to the fluid flow component 200 and the seal 300 is at least partially inserted into the seal cavity 216. The fastener engagement feature 536 remains engaged with the alignment feature 250 to facilitate holding the seal 300 in contact with the seal cavity 216.

[0058] 9A and 9B show detailed views of a portion of the seal retainer 500. Specifically, the second portion 530 is shown in detail in FIG. 9A. As shown, the weakened area 534 is adjacent to the seal opening 532. The weakened area 534 is shown in more detail in FIG. 9B. As can be seen, the seal opening 532 is located on one side of the weakened area 534. The outer peripheral edge 512 of the sheet body 510 is located on the opposite side of the weakened area 534. The weakened area 534 comprises a pair of slots 535 and a non-breakable portion 537. A first one of the slots 535 extends from an edge of the seal opening 532 and a second one of the slots 535 extends from the outer peripheral edge 512 of the sheet body 510. The non-breakable portion 537 is located between the slots 535.

[0059] Thus, the weakened area 534 is adapted to break the unbreakable portion 537 by increasing the stress concentration adjacent the slot 535 and ensuring a clean and easy break when the user pulls on the first portion 520 of the seal retainer 500. A diagram of a broken seal retainer is shown in FIG. 9C. As mentioned above, grooves, slots, perforations, holes, or other known means may be used to selectively weaken the weakened area 534. A combination of techniques may be used to cause the break to proceed in the desired area of ​​the weakened area. The design of the mechanism of the weakened area 534 may be used to control the breaking force. In combination with parameters such as the material and thickness of the sheet body 510, this allows for precise control of the required force.

[0060] 10 shows a flow chart illustrating steps for installing the fluid flow component 200 to the flow control device 100. First, the user places the seal 300 into the seal retainer 500. Specifically, the seal 300 is inserted into the seal aperture 532 such that the seal aperture 532 is located at approximately the midpoint of the cylindrical outer surface 304. This assembly step forms the seal assembly 540. The seal retainer 500 may be folded along the crease 514 before or after the insertion of the seal 300 into the seal aperture 532, but is preferably folded prior to the insertion of the seal 300.

[0061] Second, the seal assembly 540 is positioned on the fluid flow component 200. The seal assembly 540 is positioned such that the seal 300 engages the seal cavity 216 of the fluid flow component 200. The seal retainer 500 is positioned such that the alignment feature 250 of the fluid flow component 200 engages the fastener engagement feature 536 of the second portion 530 of the seal retainer 500. The alignment feature 250 is inserted into the fastener passage 208 of the fluid flow component 200 before the seal assembly is assembled to the fluid flow component 200. The first portion 520 of the seal retainer 500 extends along a side of the fluid flow component 200 while the second portion 530 is positioned substantially parallel to the mounting surface 216 of the fluid flow component 200. A component assembly 550 is formed by the combination of the seal assembly 540, the fluid flow component 200, and the alignment feature 250. Optionally, the alignment feature 250 may be considered part of the fluid flow component 200 or may be considered a separate component that forms part of the component assembly 550. Nevertheless, the completed component assembly 550 will include at least one alignment feature 250.

[0062] Third, the fluid flow component 200 is placed on top of the component attachment location 106, such that the fluid flow component 200 covers at least one substrate block 104. The seal 300 is placed to contact the seal cavity 116 of the substrate block 104, such that the seal 300 aligns with the seal cavity 116 of the substrate block 104 and the seal cavity 216 of the fluid flow component 200. When placing the fluid flow component 200 on top of the component attachment location 106, the alignment feature 250 is inserted into the fastener passage 108. In this embodiment, the alignment feature 250 is a bolt, which facilitates alignment of the fluid flow component 200 and the substrate block 104 while retaining the seal retainer 500. This ensures that the seal 300 contacts the seal cavity 216 during placement of the fluid flow component 200. However, the seal 300 does not need to be fully inserted into the seal cavity 216 or seal cavity 116 in this or the previous step. Additional tightening may be required to properly seat the seal 300 and ensure an air-tight seal of the fluid flow passages 112, 212, 302.

[0063] Fourth, the alignment feature 250, which in this embodiment is a bolt, is partially installed, so that the alignment feature also functions as a fastener to compress the seal 300. The alignment feature 250 is installed hand tight, or otherwise torqued to less than the specified maximum torque. Partial clamping is necessary to avoid pinching the seal retainer 500 between the fluid flow component 200 and the base block 104 .

[0064] Fifth, the seal retainer 500 is retracted. The user utilizes a gripping mechanism such as the circular opening 522, the elongated opening 524 and the tab 529, or even the first portion 520 itself. The user applies a retraction force to the first portion 520 to break the weakened area 534 adjacent the seal opening 532. The seal retainer 500 is then removed such that no portion of the seal retainer 500 remains between the fluid flow component 200 and the substrate block 100 after the seal retainer 500 is retracted.

[0065] Sixth, in the case of bolts, the alignment mechanism 250 is torqued to a torque specification. If an alternative (non-threaded) fastening means is used, the fasteners of the alternative fastening means will be attached to provide the intended clamping force between the base block 104 and the fluid flow component 200. Thus, the seals 300 are fully seated in their respective seal cavities 116, 216 and airtight seals are formed between the fluid flow channels 112, 212, 302. Optionally, this process may be performed in parallel such that two or more seal assemblies 540 are formed and attached to the fluid flow component 200. For example, if the fluid flow component 200 has two fluid ports 210, the process will be performed two times in parallel. If the fluid flow component 200 has three fluid ports 210, the process will be performed three or more times in parallel. To complete a flow path from the fluid supply to the processing chamber 1300, each and every fluid port 210 must be hermetically sealed either to a fluid port 110 in the substrate block 104 or to a conduit connected to a component or external equipment.

[0066] 11A-E, the assembly method is shown in detail. Another embodiment of a supply module 1400 is shown with two flow control devices 100 arranged in parallel. In FIG. 11A, one of the flow control devices 100 is unfinished and the component attachment site 106 does not have any fluid flow components. As shown, the two substrate blocks 104 of the component attachment site 106 have exposed fluid ports 110 and the seal cavities 116 are devoid of seals 300. Thus, the component attachment site 106 is prepared for attachment of a fluid flow component 200.

[0067] In FIG. 11B, the component assembly 550 is shown positioned above the component attachment point 106. As described above, the component assembly 550 includes two seal assemblies 540, a plurality of alignment features 250, and the fluid flow component 200. In FIG. 11C, the component assembly 550 is placed on top of the component attachment point 106 such that the seal cavities 116, 216 are aligned with the seal 300. The alignment feature 250 is partially tightened. Referring to FIG. 11D, a detailed view of the component assembly 550 is shown with the seal retainer 500 retracted. As shown, the fluid flow component 200 is slightly higher than the fluid flow components 200 on either side because the fluid flow component 200 is not yet fully secured. Finally, in FIG. 11E, the fluid flow component 200 is fully secured via the alignment feature 250. The seal 300 is fully compressed to provide an airtight seal that ensures a leak-free operation of the flow control device 100.

[0068] 12, an alternative seal retainer 600 is shown. The seal retainer 600 has a sheet body 610 having a peripheral edge 612. A longitudinal axis AA extends along the length of the seal retainer 600, and a transverse axis BB extends along a fold 614. The first portion 620 is long enough for a user to grasp the first portion and retract the seal retainer 600 after assembly of the component assembly 550. The second portion 630 has a seal aperture 632. However, there is no weakened area between the peripheral edge 612 and the seal aperture 632. Instead, a fastener engagement feature 636 has a weakened area 634 formed therebetween. The weakened area 634 is selectively weakened by providing an entrance slot 638 having a sharp edge. However, there is no weakening feature extending from the fastener engagement feature 636. The function of seal retainer 600 is essentially the same as seal retainer 500 , except for the stronger retention of alignment feature 250 provided by the different configuration of catch engagement feature 636 .

[0069] While the present invention has been described in terms of specific examples including modes presently preferred for carrying out the invention, those skilled in the art will recognize that there are many modifications and permutations to the above-described systems and techniques. It is to be understood that other embodiments may be utilized and structural and functional modifications may be made without departing from the scope of the present invention. Thus, the spirit and scope of the present invention should be construed broadly as set forth in the appended claims.

Claims

1. 1. A method for installing a fluid flow component in a flow control device, comprising: a) placing a first seal in a first seal retainer to form a seal assembly; b) attaching the seal assembly to the fluid flow component such that the first seal is aligned with a first seal cavity of the fluid flow component, thereby forming a component assembly; c) placing the component assembly on top of a first substrate block of the flow control device such that the first seal is aligned with the first seal cavity of a first substrate block and a portion of the first seal retainer is disposed between the first substrate block and the fluid flow component; d) partially securing the component assembly to the flow control device such that the first seal is at least partially located in each of the first seal cavity of the first substrate block and the first seal cavity of the fluid flow component; e) retracting the first seal retainer such that the first seal retainer is disengaged from the fluid flow component and the portion of the first seal retainer is removed from between the first substrate block and the fluid flow component; f) completely fastening the component assembly to the flow control device; method.

2. The flow control device further comprises a base substrate, the component assembly further comprises a first fastener, and in step c), the first substrate block contacts the base substrate; The method of claim 1.

3. the flow control device comprises a first component attachment location, the first component attachment location comprises the first substrate block and a second substrate block, the second substrate block comprises a first seal cavity, and the fluid flow component comprises a second seal cavity and a second fastener; the method further comprising steps a-1) and b-1), wherein step a-1) comprises attaching a second seal to a second seal retainer to form a second seal assembly, and step b-1) comprises attaching the second seal assembly to the fluid flow component such that the second seal is aligned with the second seal cavity of the fluid flow component; Step c) further comprises positioning the component assembly at the first component attachment location such that the second seal is aligned with the first seal cavity of the second substrate block; Step e) further comprises retracting the second seal retainer such that the second seal retainer is disengaged from the fluid flow component; The method according to claim 1 or claim 2.

4. the first seal retainer defining a seal opening for receiving the first seal; The method according to claim 1 or claim 2.

5. the first seal is interference fitted in the seal opening; the seal aperture engages an outer periphery of the first seal; The method according to claim 4.

6. the first seal retainer includes a weakened area; the weakened area comprises a slot extending from the seal opening; The method according to claim 4.

7. step e) comprises breaking the first seal retainer to release the first seal retainer; The method according to claim 1 or claim 2.

8. the first seal retainer includes a gripping mechanism; The method according to claim 1 or claim 2.

9. the gripping mechanism being one of a plurality of circular openings or a pair of spaced apart elongated openings; The method according to claim 8.

10. In step d), a mounting surface of the first substrate block and a mounting surface of the fluid flow component are spaced a first distance apart; In step f), a mounting surface of the first substrate block and a mounting surface of the fluid flow component are spaced a second distance apart, where the first distance is greater than the second distance; The method according to any one of claims 1 to 9.

11. A seat body, A first axis; A second axis perpendicular to the first axis; a first portion, the first axis being coplanar with the first portion, the first portion being elongated in the direction of the first axis and extending from the second axis along the first axis; a second portion extending from the second axis and having a seal retention mechanism; the seal retention feature of the second portion is a seal retention aperture; the second portion includes a weakened area adjacent the seal retaining opening; the weakened area is located between the seal retention feature and a peripheral edge of the sheet body; A seal retainer that holds the seal.

12. the first portion includes a first outer perimeter edge, a second outer perimeter edge opposite the first outer perimeter edge, a third outer perimeter edge, and a fourth edge opposite the third outer perimeter edge, the fourth edge being collinear with the second axis; The seal retainer of claim 11.

13. The first portion includes a plurality of circular openings forming a tab; The seal retainer according to claim 11 or 12.

14. the first portion includes a plurality of elongated apertures separated by tabs, the tabs having a distal edge connecting to an inner edge of the first portion; the distal edge of the tab is connected to the inner edge of the first portion by a weakened region; The seal retainer according to claim 11 or 12.

15. the second portion comprises a weakened area, the weakened area comprising a slot; The seal retainer according to claim 11 or 12.

16. the slot extends from the seal retention feature; The seal retainer of claim 15.

17. a fluid flow component having a first seal cavity; an alignment mechanism in contact with the fluid flow component; a first seal adapted to engage the fluid flow component; a first seal retainer adapted to engage the first seal and the alignment feature of the fluid flow component; the first seal is mounted to the first seal retainer, the first seal contacting the first seal cavity; the first seal retainer having a weakened area between adjacent the first seal and an outer periphery; Fluid flow component assembly.

18. the first seal retainer having a catch engagement feature; 20. The fluid flow component assembly of claim 17.

19. a) placing a component assembly on top of a first substrate block, the component assembly comprising a fluid flow component, a first seal retainer, and a first seal held by the first seal retainer in alignment with a first seal cavity of the fluid flow component, the component assembly being placed on top of the first substrate block such that the first seal is aligned with the first seal cavity of the first substrate block; b) retracting the first seal retainer such that the first seal and the fluid flow component remain in position while the first seal retainer is disengaged from the fluid flow component; and c) clamping the fluid flow component such that the first seal hermetically seals the flow passages of the first substrate block to the flow passages of the fluid flow component; A method for attaching a fluid flow component to a flow control device.

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