Sensors

Abstract

To provide a sensor which can improve characteristics.SOLUTION: According to an embodiment, a sensor comprises a base body, a first fixed portion, a movable portion, a connecting portion, and a first fixed electrode. The first fixed portion is fixed to the base body. The movable portion is provided around the first fixed portion. The movable portion includes first to third annular partial regions which are centered on the first fixed portion. The second partial region is provided between the first partial region and the first fixed portion. The third partial region is provided between the first partial region and the second partial region. The third partial region includes a first movable portion electrode, and the connecting portion connects the second partial region to the first fixed portion. A first gap is provided between the base body and the movable portion, and between the base body and the connecting portion. The first fixed electrode is fixed to the base body and faces the first movable portion electrode. A second area of the second partial region is equal to or larger than a first area of the first partial region.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE The present invention relates to a sensor. [Background technology]

[0002] There are sensors such as gyro sensors, and it is desirable to improve the characteristics of sensors. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-144065 A Summary of the Invention [Problem to be solved by the invention]

[0004] Embodiments of the present invention provide sensors that can have improved performance. [Means for solving the problem]

[0005] According to an embodiment of the present invention, the sensor includes a base, a first fixed portion, a movable portion, a connection portion, and a first fixed electrode. The first fixed portion is fixed to the base. The movable portion is provided around the first fixed portion in a first plane intersecting a first direction from the base to the first fixed portion. The movable portion includes a first partial region, a second partial region, and a third partial region. The first partial region is annular about the first fixed portion. The second partial region is provided between the first partial region and the first fixed portion and is annular about the first fixed portion. The third partial region is provided between the first partial region and the second partial region and is annular about the first fixed portion. The third partial region includes a first movable portion electrode, and the connection portion is provided between the first fixed portion and the second partial region and connects the second partial region to the first fixed portion. A first gap is provided between the base and the movable portion and between the base and the connection portion. The first fixed electrode is fixed to the base and faces the first movable electrode, and a second area of ​​the second partial region on the first plane is equal to or greater than a first area of ​​the first partial region on the first plane. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] 4(a) to 4(d) are graphs illustrating the characteristics of the sensor. [Diagram 5] 5(a) to 5(d) are graphs illustrating the characteristics of the sensor. [Figure 6] 6(a) to 6(d) are graphs illustrating the characteristics of the sensor. [Figure 7] 7(a) to 7(d) are graphs illustrating the characteristics of the sensor. [Figure 8]8A and 8B are schematic plan views illustrating a part of the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 10] FIG. 10 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 11] FIG. 11 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 12] FIG. 12 is a schematic plan view illustrating the sensor according to the second embodiment. [Figure 13] FIG. 13 is a schematic plan view illustrating a part of the sensor according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios of each part may be different depending on the drawing. In this specification and each drawing, elements similar to those described above with reference to the previous drawings are given the same reference numerals and detailed descriptions thereof will be omitted as appropriate.

[0008] (First embodiment) 1 and 2 are schematic plan views illustrating the sensor according to the first embodiment. FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. FIG. 3 is a cross-sectional view taken along line A1-A2 in FIG. As shown in FIGS. 1 to 3, a sensor 110 according to the embodiment includes a base 20, a first fixed portion 21, a movable portion 10, a connection portion 31, and a first fixed electrode 41.

[0009] The base 20 may include, for example, a silicon substrate. The first fixed portion 21 is fixed to the base 20. At least a portion of the first fixed portion 21 is conductive.

[0010] The direction from base 20 to first fixed portion 21 is defined as first direction D1. First direction D1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

[0011] The movable part 10 is provided around the first fixed part 21 in a first plane intersecting with the first direction D1. The first plane is, for example, an XY plane. The movable part 10 is annular with the first fixed part 21 as the center. The movable part 10 includes an outer edge part 10o and an inner edge part 10i. The inner edge part 10i is between the first fixed part 21 and the outer edge part 10o. For example, the outer edge part 10o is circular with the first fixed part 21 as the center. For example, the inner edge part 10i is circular with the first fixed part 21 as the center. The movable part 10 is conductive. At least one of the outer edge part 10o and the inner edge part 10i may be polygonal.

[0012] The movable portion 10 includes a first partial region 11, a second partial region 12, and a third partial region 13. FIG. 2 illustrates the first partial region 11, the second partial region 12, and the third partial region 13. The first partial region 11 is annular about the first fixed portion 21. The first partial region 11 includes an outer edge portion 10o. The second partial region 12 is provided between the first partial region 11 and the first fixed portion 21. The second partial region 12 is annular about the first fixed portion 21. The second partial region 12 includes an inner edge portion 10i.

[0013] The third partial region 13 is provided between the first partial region 11 and the second partial region 12. The third partial region 13 is annular with the first fixed portion 21 as its center. The third partial region 13 includes a first movable part electrode 13E. The third partial region 13 is a region in which electrodes are provided. The first partial region 11 is an outer region. The second partial region 12 is an inner region.

[0014] The connection portion 31 is provided between the first fixed portion 21 and the second partial region 12. The connection portion 31 connects the second partial region 12 to the first fixed portion 21. The connection portion 31 is electrically conductive.

[0015] 3, a first gap g1 is provided between the base 20 and the movable part 10, and between the base 20 and the connection part 31. The connection part 31 is, for example, a spring part. The connection part 31 may have a meandering structure.

[0016] The first fixed electrode 41 is fixed to the base 20. The first fixed electrode 41 faces the first movable part electrode 13E. For example, the first fixed electrode 41 faces the first movable part electrode 13E in a first plane (for example, in the XY plane).

[0017] For example, the first movable part electrode 13E contacts the inner end of the first partial region 11. For example, the first movable part electrode 13E contacts the outer end of the third partial region 13. As described later, a second fixed electrode 42 may be further provided. As shown in FIG. 1, the second fixed electrode 42 faces the second movable part electrode 13F. For example, the second movable part electrode 13F contacts the outer end of the second partial region 12. For example, the second movable part electrode 13F contacts the inner end of the third partial region 13.

[0018] As described below, the third partial region 13 includes a first fixed electrode hole 13EH (see FIG. 8(a)). The first fixed electrode 41 passes through the first fixed electrode hole 13EH. For example, the first fixed electrode hole 13EH contacts the inner end of the first partial region 11. As described below, the third partial region 13 includes a second fixed electrode hole 13FH (see FIG. 9). The second fixed electrode 42 passes through the second fixed electrode hole 13FH. For example, the second fixed electrode hole 13FH contacts the outer end of the second partial region 12.

[0019] In the embodiment, a circle can be defined that is centered on the first fixed portion 21 and passes through the outer end of the first fixed electrode 41. For convenience, this circle may be considered to correspond to the inner end of the first partial region 11. A circle can be defined that is centered on the first fixed portion 21 and passes through the inner end of the second fixed electrode 42. For convenience, this circle may be considered to correspond to the outer end of the second partial region 12.

[0020] For example, the sensor 110 may include a control unit 70. The control unit 70 may be provided separately from the sensor 110. The control unit 70 can apply a voltage between the movable part 10 and the first fixed electrode 41. For example, an electrode 21E is provided on the first fixed part 21. The control unit 70 is electrically connected to the movable part 10 via the electrode 21E, the first fixed part 21, and the connection part 31. The control unit 70 can apply an AC voltage between the movable part 10 and the first fixed electrode 41 to vibrate the movable part 10. This allows the movable part 10 to vibrate along, for example, the XY plane. The vibration is, for example, an in-plane translational vibration. In one example, a translational vibration along the X-axis direction occurs.

[0021] In an embodiment, for example, when a force (angular velocity) is applied to a movable part that vibrates in the X-axis direction in an initial state, the vibration state of the movable part 10 changes. For example, vibrations including a component in the Y-axis direction are generated in the movable part 10. For example, the movable part 10 vibrates in a direction different from the initial state in response to the applied angular velocity. The change in the vibration state is based on, for example, Coriolis force. The force (angular velocity) can be detected by detecting the change in the vibration state.

[0022] The movable part 10 has a resonance mode different from the in-plane translation. For example, in the movable part 10, there are in-plane rotational resonance, out-of-plane torsional resonance, and out-of-plane translational resonance. The in-plane rotational resonance is, for example, a rotational resonance in the XY plane centered on the first fixed part 21. The out-of-plane torsional resonance is, for example, a resonance including a rotation component outside the XY plane centered on the X-axis direction. The out-of-plane translational resonance is, for example, a resonance along the Z-axis direction. These resonances are lower-order resonances than the in-plane translation.

[0023] The detection result detected by the sensor 110 is affected by these low-order resonances. For example, the effect of the low-order resonance can be suppressed by maintaining the frequency of the low-order resonance high while maintaining the desired resonance frequency of the in-plane translation. This allows the desired force (acceleration) to be detected with high accuracy.

[0024] In the embodiment, for example, the area of ​​the inner second partial region 12 is equal to or larger than the area of ​​the outer first partial region 11. For example, the volume of the second partial region 12 is equal to or larger than the volume of the first partial region 11. For example, the mass of the second partial region 12 is equal to or larger than the mass of the first partial region 11. This makes it possible to maintain a high frequency of low-order resonance. The influence of low-order resonance can be suppressed. According to the embodiment, it is possible to provide a sensor with improved characteristics. Examples of resonance characteristics will be described later.

[0025] As shown in FIG. 2, one direction passing through the first fixed portion 21 and along the first plane (XY plane) is defined as the radial direction Dr. The length of the first partial region 11 along the radial direction Dr is defined as the first length L1. The length of the second partial region 12 along the radial direction Dr is defined as the second length L2. The second length L2 is equal to or greater than the first length L1. With this configuration, the frequency of low-order resonance can be maintained high. The effects of low-order resonance can be suppressed.

[0026] In the embodiment, the mass of the movable part 10 is concentrated on the inner part of the movable part 10. This makes it possible to maintain the frequency of low-order resonance high, and to suppress the influence of low-order resonance.

[0027] An example of a simulation result regarding the change in the resonance frequency when the masses of the first partial region 11 and the second partial region 12 are changed will be described below.

[0028] 4(a) to 4(d) are graphs illustrating the characteristics of the sensor. The horizontal axis of these figures is the mass ratio R1. The mass of the first partial region 11 is the first mass M1. The mass of the second partial region 12 is the second mass M2. The mass ratio R1 is the ratio (M2 / M1) of the second mass M2 to the first mass M1. The vertical axis of FIG. 4(a) is the resonance frequency f1 of the in-plane rotation. The vertical axis of FIG. 4(b) is the resonance frequency f2 of the out-of-plane twist. In the resonance of the out-of-plane twist, there are two different types of resonance. The resonance frequencies of these two types of resonance are close to each other. The resonance frequency f2 is the resonance frequency for one of these two types of resonance (relatively low frequency resonance). The characteristics of the resonance frequency for the other one of the two types of resonance for the out-of-plane twist (relatively high frequency resonance) are substantially the same as the characteristics of the resonance frequency f2, so it is omitted from the illustration. The vertical axis of FIG. 4(c) is the resonance frequency f3 of the out-of-plane translation. The vertical axis of FIG. 4(d) is the resonance frequency f4 of the in-plane translation. In the resonance of the in-plane translation, there are two different types of resonance. The frequencies of these two types of resonance are close to each other. The resonance frequency f4 is the resonance frequency for one of these two types of resonance (relatively low frequency resonance). The characteristics of the resonance frequency for the other one of the two types of resonance for the in-plane translation (relatively high frequency resonance) are substantially the same as the characteristics of the resonance frequency f4, so it is omitted from the illustration. In this simulation, the mass ratio R1 is changed while keeping the frequency f4 of the in-plane translation constant. In FIG. 4(a) to FIG. 4(d), the mass of the movable part 10 is about 2 mg. In this example, the width (e.g., diameter) of the movable part 10 along the X-axis direction is 2500 μm.

[0029] As shown in Figures 4(a) to 4(c), as the mass ratio R1 decreases, the in-plane rotational resonant frequency f1, the out-of-plane twisting resonant frequency f2, and the out-of-plane translational resonant frequency f3 decrease. When the mass ratio R1 is 1 or more, these resonant frequencies are maintained high. The mass ratio R1 may be 1.2 or more. The resonant frequencies are maintained high more stably.

[0030] 5(a) to 5(d) are graphs illustrating the characteristics of the sensor. The horizontal axis of these figures is the mass ratio R1. The vertical axis of FIG. 5(a) is the resonance frequency f1 of the in-plane rotation. The vertical axis of FIG. 5(b) is the resonance frequency f2 of the out-of-plane twist. The vertical axis of FIG. 5(c) is the resonance frequency f3 of the out-of-plane translation. The vertical axis of FIG. 5(d) is the resonance frequency f4 of the in-plane translation. In this simulation, the mass ratio R1 is changed while the frequency of the in-plane translation is kept constant. In the examples of FIG. 5(a) to FIG. 5(d), the mass of the movable part 10 is about 1 mg. In this example, the width (e.g., diameter) of the movable part 10 along the X-axis direction is 2000 μm. In FIG. 5(b), the characteristics of the resonance frequency related to another one of the types of resonance related to the out-of-plane twist are omitted. In FIG. 5(d), the characteristics of the resonance frequency related to another one of the two types of resonance related to the in-plane translation are omitted.

[0031] As shown in Figures 5(a) to 5(c), as the mass ratio R1 decreases, the in-plane rotational resonant frequency f1, the out-of-plane twisting resonant frequency f2, and the out-of-plane translational resonant frequency f3 decrease. When the mass ratio R1 is 1 or more, these resonant frequencies are maintained high. When the mass ratio R1 is 1.2 or more, these resonant frequencies are maintained high more stably.

[0032] In the embodiment, the mass ratio R1 is 1 or more. This maintains the in-plane rotational resonant frequency f1, the out-of-plane twisting resonant frequency f2, and the out-of-plane translational resonant frequency f3 high. The mass ratio R1 may be, for example, 1.2 or more. The mass ratio R1 may be, for example, 2 or more. The mass ratio R1 may be, for example, 3 or more.

[0033] For example, the specific gravity of the first partial region 11 may be substantially the same as the specific gravity of the second partial region 12. In this case, the mass ratio R1 corresponds to a volume ratio. The volume ratio is the ratio of the volume of the second partial region 12 to the volume of the first partial region 11. In the embodiment, the volume ratio is 1 or more. The volume ratio may be, for example, 1.2 or more. The volume ratio may be, for example, 2 or more. The volume ratio may be, for example, 3 or more.

[0034] For example, the thickness of the first partial region 11 may be substantially the same as the thickness of the second partial region 12. The thickness is the length along the Z-axis direction. In this case, the mass ratio R1 corresponds to the area ratio. The area ratio is the ratio of the area of ​​the second partial region 12 to the area of ​​the first partial region 11. In the embodiment, the area ratio is 1 or more. The area ratio may be, for example, 1.2 or more. The area ratio may be, for example, 2 or more. The area ratio may be, for example, 3 or more.

[0035] 6(a) to 6(d) are graphs illustrating the characteristics of the sensor. The horizontal axis of these figures is the length ratio R2. The length ratio R2 is the ratio (L2 / L1) of the second length L2 to the first length L1. The vertical axis of FIG. 6(a) is the resonant frequency f1 of the in-plane rotation. The vertical axis of FIG. 6(b) is the resonant frequency f2 of the out-of-plane twist. The vertical axis of FIG. 6(c) is the resonant frequency f3 of the out-of-plane translation. The vertical axis of FIG. 4(d) is the resonant frequency f4 of the in-plane translation. In Fig. 6(b), the resonance frequency characteristics of another one of the types of resonance related to out-of-plane twisting are also omitted. In Fig. 6(d), the resonance frequency characteristics of another one of the two types of resonance related to in-plane translation are also omitted. In the example of Figs. 6(a) to 6(d), the mass of the movable part 10 is about 2 mg. In this example, the width (e.g., diameter) of the movable part 10 along the X-axis direction is 2500 µm.

[0036] As shown in Figures 6(a) to 6(c), as the length ratio R2 decreases, the in-plane rotation resonance frequency f1, the out-of-plane twist resonance frequency f2, and the out-of-plane translation resonance frequency f3 decrease. When the length ratio R2 is 2 or more, these resonance frequencies are maintained high. When the length ratio R2 is 2.5 or more, these resonance frequencies are more stably maintained high.

[0037] 7(a) to 7(d) are graphs illustrating the characteristics of the sensor. The horizontal axis of these figures is the length ratio R2. The vertical axis of FIG. 7(a) is the resonant frequency f1 of the in-plane rotation. The vertical axis of FIG. 7(b) is the resonant frequency f2 of the out-of-plane twist. The vertical axis of FIG. 7(c) is the resonant frequency f3 of the out-of-plane translation. The vertical axis of FIG. 7(d) is the resonant frequency f4 of the in-plane translation. In this simulation, the frequency of the in-plane translation is kept constant, length The ratio R1 is changed. In the examples of Figs. 7(a) to 7(d), the mass of the movable part 10 is about 1 mg. In this example, the width (e.g., diameter) of the movable part 10 along the X-axis direction is 2000 µm. Also in Fig. 7(b), the resonance frequency characteristics of another one of the types of resonance related to out-of-plane twisting are omitted from the illustration. Also in Fig. 7(d), the resonance frequency characteristics of another one of the two types of resonance related to in-plane translation are omitted from the illustration.

[0038] As shown in Figures 7(a) to 7(c), as the length ratio R2 decreases, the in-plane rotation resonance frequency f1, the out-of-plane twist resonance frequency f2, and the out-of-plane translation resonance frequency f3 decrease. When the length R2 is 2.5 or more, these resonance frequencies are maintained high. When the length R2 is 3.5 or more, these resonance frequencies are more stably maintained high.

[0039] In the embodiment, the length ratio R2 is equal to or greater than 2. The length ratio R2 may be equal to or greater than 2.5. The length ratio R2 may be equal to or greater than 3.5. This allows the in-plane rotational resonance frequency f1, the out-of-plane twisting resonance frequency f2, and the out-of-plane translational resonance frequency f3 to be maintained high.

[0040] In the embodiment, the second length L2 is equal to or greater than the first length L1. In the embodiment, the second length L2 is preferably equal to or greater than twice the first length L1. The second length L2 may be equal to or greater than 2.5 times the first length L1. The frequency of low-order resonance can be effectively maintained high. The influence of low-order resonance can be effectively suppressed.

[0041] 8A and 8B are schematic plan views illustrating a part of the sensor according to the first embodiment. These figures show an enlarged view of the first fixed electrode 41 and the first movable part electrode 13E. As shown in FIG. 8(a), the third partial region 13 includes a first fixed electrode hole 13EH. The first fixed electrode hole 13EH extends along the first direction D1. The first movable part electrode 13E is provided in the first fixed electrode hole 13EH. The first fixed electrode 41 passes through the first fixed electrode hole 13EH.

[0042] In this example, the first movable part electrode 13E and the first fixed electrode 41 are comb-tooth shaped. As shown in FIG. 8(b), the first movable part electrode 13E is one of the first comb tooth electrode pair 20T. The first fixed electrode 41 is the other of the first comb tooth electrode pair 20T. The first movable part electrode 13E includes a base 10b and a plurality of protrusions 10p. The plurality of protrusions 10p are connected to the base 10b. The first fixed electrode 41 includes a base 41b and a plurality of protrusions 41p. The plurality of protrusions 41p are connected to the base 41b. At least a portion of one of the plurality of protrusions 41p is between one of the plurality of protrusions 10p and another one of the plurality of protrusions 10p. At least a portion of one of the plurality of protrusions 10p is between one of the plurality of protrusions 41p and another one of the plurality of protrusions 41p.

[0043] 1, in this example, the sensor 110 further includes a second fixed electrode 42. The second fixed electrode 42 is fixed to the base 20. The third partial region 13 includes a second movable part electrode 13F. In this example, the second fixed electrode 42 is between the second partial region 12 and the first fixed electrode 41.

[0044] FIG. 9 is a schematic plan view illustrating a part of the sensor according to the first embodiment. FIG. 9 illustrates the second fixed electrode 42 and the second movable part electrode 13F. The second fixed electrode 42 faces the second movable part electrode 13F. The third partial region 13 includes a second fixed electrode hole 13FH. The second fixed electrode hole 13FH is provided with the second movable part electrode 13F. The second fixed electrode hole 13FH extends in the first direction D1. The second fixed electrode 42 passes through the second fixed electrode hole 13FH. The second fixed electrode 42 faces the second movable part electrode 13F in the first plane (XY plane). A voltage may be applied between the second fixed electrode 42 and the second movable part electrode 13F. As described later, the second fixed electrode 42 and the second movable part electrode 13F may be a comb-tooth electrode pair.

[0045] 1, a plurality of first movable part electrodes 13E and a plurality of first fixed electrodes 41 may be provided. The plurality of first movable part electrodes 13E are arranged in a circle with the first fixed part 21 as the center. The plurality of first fixed electrodes 41 are arranged in a circle with the first fixed part 21 as the center.

[0046] 1, the sensor 110 may further include a third fixed electrode 43. In this example, a plurality of third fixed electrodes 43 are provided. 4 3 is fixed to the base 20. The third partial region 13 includes a plurality of third movable portion electrodes 13G. For example, the plurality of third fixed electrodes 43 and the plurality of first fixed electrodes 41 are alternately arranged along a circle centered on the first fixed portion 21.

[0047] FIG. 10 is a schematic plan view illustrating a part of the sensor according to the first embodiment. FIG. 10 illustrates one of the multiple third fixed electrodes 43 and one of the multiple third movable part electrodes 13G. One of the multiple third fixed electrodes 43 faces one of the multiple third movable part electrodes 13G. The third partial region 13 includes a third fixed electrode hole 13GH. The third fixed electrode hole 13GH is provided with the third movable part electrode 13G. The third fixed electrode hole 13GH extends in the first direction D1. The third fixed electrode 43 passes through the third fixed electrode hole 13GH. The third fixed electrode 43 faces the third movable part electrode 13G in the first plane (XY plane). A voltage may be applied between the third fixed electrode 43 and the third movable part electrode 13G.

[0048] 1, the sensor 110 may further include a second fixed portion 22. The second fixed portion 22 is fixed to the base 20.

[0049] FIG. 11 is a schematic plan view illustrating a part of the sensor according to the first embodiment. 11 illustrates the second fixing portion 22. The third partial region 13 includes a second fixing portion hole 13H. The second fixing portion 22 passes through the second fixing portion hole 13H. The second fixing portion 22 functions as, for example, a stopper.

[0050] In this example, the second fixed portion 22 includes a protruding portion 22p. By providing the protruding portion 22p, the area of ​​contact between the second fixed portion 22 and the movable portion 10 is reduced when the movable portion 10 is significantly displaced. Damage to the movable portion 10 is suppressed. Such a protruding portion may be provided on the movable portion 10.

[0051] Second embodiment FIG. 12 is a schematic plan view illustrating the sensor according to the second embodiment. 12 , in a sensor 111 according to the embodiment, the movable part 10 includes a plurality of holes. Except for this, the configuration of the sensor 111 may be similar to that of the sensor 110. That is, the sensor 111 also includes a base 20, a first fixed part 21, a movable part 10, a connection part 31, and a first fixed electrode 41. The movable part 10 includes a first partial region 11, a second partial region 12, and a third partial region 13.

[0052] The first partial region 11 includes a plurality of first holes 11H. The plurality of first holes 11H have a first width W1 and a first density. The first width W1 is the length of one of the plurality of first holes 11H along a first radial direction. The first radial direction passes through the first fixed portion 21 and is along a first plane (XY plane). For example, the first radial direction may be the X-axis direction. The first density is the density of the plurality of first holes 11H in the first plane (XY plane).

[0053] The second partial region 12 includes a plurality of second holes 12H. The plurality of second holes 12H have at least one of a second width W2 smaller than the first width W1 and a second density lower than the first density. The second width W2 is the length of one of the plurality of second holes 12H along the second radial direction. The second radial direction passes through the first fixed portion 21 and is along the first plane (XY plane). For example, the second radial direction may be the X-axis direction. The second density is the density of the plurality of second holes 12H in the first plane (XY plane).

[0054] By providing such a plurality of first holes 11H, the mass of the first partial region 11 is likely to be smaller than the mass of the second partial region 12. The frequency of low-order resonance can be effectively maintained high. The influence of low-order resonance can be effectively suppressed.

[0055] For example, an etchant passes through the first holes 11H and the second holes 12H when forming the movable portion 10 and the connection portion 31. This allows the first gaps g1 (see FIG. 3) to be formed.

[0056] The multiple first holes 11H and multiple second holes 12H may be provided in the movable part 10 of the sensor 110. When these holes are provided in the movable part 10 of the sensor 110, the width or density of these holes may be the same.

[0057] FIG. 13 is a schematic plan view illustrating a part of the sensor according to the embodiment. Fig. 13 illustrates an enlarged view of the movable part 10. As illustrated in Fig. 13, the multiple first holes 11H may be arc-shaped. For example, the multiple first holes 11H are arc-shaped with the first fixed part 21 as the center. The multiple second holes 12H may be arc-shaped. For example, the multiple second holes 12H are arc-shaped with the first fixed part 21 as the center.

[0058] The plurality of holes may be provided in the third partial region 13. In the example shown in Fig. 13, the second fixed electrode 42 and the second movable part electrode 13F are a comb-tooth electrode pair.

[0059] In the embodiment, another fixed electrode may be provided around the movable part 10 in the XY plane. The another fixed electrode faces the movable part 10 (e.g., the first partial region 11). The another fixed electrode and the first partial region 11 form a parallel plate electrode pair. A plurality of another fixed electrodes may be arranged around the movable part 10 in the circumferential direction.

[0060] The embodiment may include the following configurations (e.g., technical solutions). (Configuration 1) A substrate; A first fixing portion fixed to the base body; A movable part provided around the first fixed part within a first plane intersecting a first direction from the base to the first fixed part, the movable part comprising: A first partial region having an annular shape centered on the first fixing portion; a second partial region that is annular and is provided between the first partial region and the first fixed portion and has the first fixed portion as a center; a third partial region that is annular and is provided between the first partial region and the second partial region and has a center at the first fixed portion, the third partial region including a first movable portion electrode; A movable part including: a connection portion provided between the first fixed portion and the second partial region, the connection portion connecting the second partial region to the first fixed portion, wherein a first gap is provided between the base and the movable portion and between the base and the connection portion; a first fixed electrode fixed to the base and facing the first movable electrode; Equipped with A sensor, wherein a second area of ​​the second partial region in the first plane is greater than or equal to a first area of ​​the first partial region in the first plane.

[0061] (Configuration 2) 2. The sensor of claim 1, wherein the second area is greater than or equal to 1.2 times the first area.

[0062] (Configuration 3) A substrate; A first fixing portion fixed to the base body; A movable part provided around the first fixed part within a first plane intersecting a first direction from the base to the first fixed part, the movable part comprising: A first partial region having an annular shape centered on the first fixing portion; a second partial region that is annular and is provided between the first partial region and the first fixed portion and has the first fixed portion as a center; a third partial region that is annular and is provided between the first partial region and the second partial region and has a center at the first fixed portion, the third partial region including a first movable portion electrode; A movable part including: a connection portion provided between the first fixed portion and the second partial region, the connection portion connecting the second partial region to the first fixed portion, wherein a first gap is provided between the base and the movable portion and between the base and the connection portion; a first fixed electrode fixed to the base and facing the first movable electrode; Equipped with A sensor, wherein a second length of the second partial region along a radial direction passing through the first fixed portion and along the first plane is at least twice the first length of the first partial region along the radial direction.

[0063] (Configuration 4) 4. The sensor of claim 3, wherein the second length is greater than or equal to 2.5 times the first length.

[0064] (Configuration 5) A substrate; A first fixing portion fixed to the base body; A movable part provided around the first fixed part within a first plane intersecting a first direction from the base to the first fixed part, the movable part comprising: A first partial region having an annular shape centered on the first fixing portion; a second partial region that is annular and is provided between the first partial region and the first fixed portion and has the first fixed portion as a center; a third partial region that is annular and is provided between the first partial region and the second partial region and has a center at the first fixed portion, the third partial region including a first movable portion electrode; A movable part including: a connection portion provided between the first fixed portion and the second partial region, the connection portion connecting the second partial region to the first fixed portion, wherein a first gap is provided between the base and the movable portion and between the base and the connection portion; a first fixed electrode fixed to the base and facing the first movable electrode; Equipped with The second mass of the second sub-region is greater than or equal to the first mass of the first sub-region.

[0065] (Configuration 6) 6. The sensor of claim 5, wherein the second mass is greater than or equal to 1.2 times the first mass.

[0066] (Configuration 7) A substrate; A first fixing portion fixed to the base body; A movable part provided around the first fixed part within a first plane intersecting a first direction from the base to the first fixed part, the movable part comprising: A first partial region having an annular shape centered on the first fixing portion; a second partial region that is annular and is provided between the first partial region and the first fixed portion and has the first fixed portion as a center; a third partial region that is annular and is provided between the first partial region and the second partial region and has a center at the first fixed portion, the third partial region including a first movable portion electrode; A movable part including: a connection portion provided between the first fixed portion and the second partial region, the connection portion connecting the second partial region to the first fixed portion, wherein a first gap is provided between the base and the movable portion and between the base and the connection portion; a first fixed electrode fixed to the base and facing the first movable electrode; Equipped with the first partial region includes a plurality of first holes, the plurality of first holes having a first width along a first radial direction passing through the first fixing portion and along the first plane, and a first density in the first plane; A sensor, wherein the second partial region includes a plurality of second holes, the plurality of second holes having at least one of a second width smaller than the first width and a second density lower than the first density, the second width being a width of the plurality of second holes along a second radial direction passing through the first fixed portion and along the first plane, and the second density being a density of the plurality of second holes in the first plane.

[0067] (Configuration 8) The plurality of first holes are arc-shaped with the first fixing portion as a center, The sensor of configuration 7, wherein the plurality of second holes are arc-shaped centered on the first fixed portion.

[0068] (Configuration 9) the third partial region includes the first fixed electrode hole in which the first movable part electrode is provided, The sensor according to any one of configurations 1 to 8, wherein the first fixed electrode passes through the first fixed electrode hole.

[0069] (Configuration 10) The sensor according to any one of configurations 1 to 9, wherein the first fixed electrode faces the first movable part electrode in the first plane.

[0070] (Configuration 11) the first movable portion electrode is one of a first comb-teeth electrode pair, 11. The sensor according to any one of configurations 1 to 10, wherein the first fixed electrode is the other of the first comb-teeth electrode pair.

[0071] (Configuration 12) Further comprising a second fixed electrode fixed to the base, the third region includes a second movable portion electrode, the second fixed electrode faces the second movable electrode, 12. The sensor according to any one of configurations 1 to 11, wherein the second fixed electrode is between the second partial region and the first fixed electrode.

[0072] (Configuration 13) the third partial region includes the second fixed electrode hole in which the second movable part electrode is provided, The sensor of claim 12, wherein the second fixed electrode passes through the second fixed electrode hole.

[0073] (Configuration 14) The sensor of configuration 12 or 13, wherein the second fixed electrode faces the second movable part electrode in the first plane.

[0074] (Configuration 15) Further comprising a second fixing portion fixed to the base, The third region includes a second fixing portion hole, 15. The sensor according to any one of configurations 1 to 14, wherein the second fixing portion passes through the second fixing portion hole.

[0075] (Configuration 16) A plurality of the first movable electrodes and a plurality of the first fixed electrodes are provided, the first movable portion electrodes are arranged in a circle around the first fixed portion, 16. The sensor according to any one of configurations 1 to 15, wherein the plurality of first fixed electrodes are arranged in a circle with the first fixed portion as a center.

[0076] (Configuration 17) Further comprising a plurality of third fixed electrodes fixed to the base, the third region includes a plurality of third movable portion electrodes, 17. The sensor of claim 16, wherein one of the plurality of third fixed electrodes faces one of the plurality of third movable part electrodes.

[0077] (Configuration 18) The sensor of configuration 17, wherein the plurality of third fixed electrodes and the plurality of first fixed electrodes are alternately arranged along a circle centered on the first fixed portion.

[0078] (Configuration 19) A control unit is further provided. 19. The sensor according to any one of configurations 1 to 18, wherein the control unit is capable of applying a voltage between the movable part and the first fixed electrode.

[0079] (Configuration 20) 20. The sensor of claim 19, wherein the control unit is capable of applying an AC voltage between the movable part and the first fixed electrode to vibrate the movable part.

[0080] According to the embodiment, a sensor with improved characteristics can be provided.

[0081] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include, for example, variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0082] The above describes the embodiment of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the base, fixed part, movable part, connecting part, and control part, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from the known range.

[0083] Furthermore, any combination of two or more elements of each of the specific examples, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0084] In addition, all sensors that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensor described above as an embodiment of the present invention also belong to the scope of the present invention as long as they include the gist of the present invention.

[0085] In addition, within the scope of the concept of the present invention, a person skilled in the art may think of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0086] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0087] 10...movable portion, 10b...base portion, 10i...inner edge portion, 10o...outer edge portion, 10p...projection portion, 11-13...first to third partial regions, 11H, 12H...first and second holes, 13E...first movable portion electrode, 13EH...first fixed electrode hole, 13F...second movable portion electrode, 13FH...second fixed electrode hole, 13G...third movable portion electrode, 13GH...third fixed electrode hole, 13H...second fixed portion hole, 20...base, 20T...first comb-tooth electrode pair, 21, 22...first and second fixed portions, 21E...electrode, 22p...projection portion, 31...connection portion, 41-43...first to third fixed electrodes, 41b...base portion, 41p...projection portion, 70...Control unit; 110, 111...Sensor; D1...First direction; Dr...Radiation direction; L1, L2...First and second lengths; R1...Mass ratio; R2...Length ratio; W1, W2...First and second widths; f1 to f4...Resonant frequencies; g1...First gap

Claims

1. A substrate; A first fixing portion fixed to the base body; A movable portion provided around the first fixed portion within a first plane intersecting a first direction from the base to the first fixed portion, the movable portion comprising: a first partial region having an annular shape centered on the first fixing portion; a second partial region that is annular and is provided between the first partial region and the first fixed portion and has a center at the first fixed portion; a third partial region that is annular and is provided between the first partial region and the second partial region and has a center at the first fixed portion, the third partial region including a first movable portion electrode; a movable portion including the first partial region and the second partial region not including the first movable portion electrode; a connection portion provided between the first fixed portion and the second partial region, the connection portion connecting the second partial region to the first fixed portion, wherein a first gap is provided between the base and the movable portion and between the base and the connection portion; a first fixed electrode fixed to the base and facing the first movable electrode; Equipped with A sensor, wherein a second area of ​​the second partial region in the first plane is greater than or equal to a first area of ​​the first partial region in the first plane.

2. The sensor of claim 1 , wherein the second area is greater than or equal to 1.2 times the first area.

3. A substrate; A first fixing portion fixed to the base body; A movable portion provided around the first fixed portion within a first plane intersecting a first direction from the base to the first fixed portion, the movable portion comprising: a first partial region having an annular shape centered on the first fixing portion; a second partial region that is annular and is provided between the first partial region and the first fixed portion and has a center at the first fixed portion; a third partial region that is annular and is provided between the first partial region and the second partial region and has a center at the first fixed portion, the third partial region including a first movable portion electrode; a movable portion including the first partial region and the second partial region not including the first movable portion electrode; a connection portion provided between the first fixed portion and the second partial region, the connection portion connecting the second partial region to the first fixed portion, wherein a first gap is provided between the base and the movable portion and between the base and the connection portion; a first fixed electrode fixed to the base and facing the first movable electrode; Equipped with A sensor, wherein a second length of the second partial region along a radial direction passing through the first fixed portion and along the first plane is at least twice the first length of the first partial region along the radial direction.

4. The sensor of claim 3 , wherein the second length is greater than or equal to 2.5 times the first length.

5. A substrate; A first fixing portion fixed to the base body; A movable portion provided around the first fixed portion within a first plane intersecting a first direction from the base to the first fixed portion, the movable portion comprising: a first partial region having an annular shape centered on the first fixing portion; a second partial region that is annular and is provided between the first partial region and the first fixed portion and has a center at the first fixed portion; a third partial region that is annular and is provided between the first partial region and the second partial region and has a center at the first fixed portion, the third partial region including a first movable portion electrode; a movable portion including the first partial region and the second partial region not including the first movable portion electrode; a connection portion provided between the first fixed portion and the second partial region, the connection portion connecting the second partial region to the first fixed portion, wherein a first gap is provided between the base and the movable portion and between the base and the connection portion; a first fixed electrode fixed to the base and facing the first movable electrode; Equipped with The second mass of the second sub-region is greater than or equal to the first mass of the first sub-region.

6. The sensor of claim 5 , wherein the second mass is greater than or equal to 1.2 times the first mass.

7. A substrate; A first fixing portion fixed to the base body; A movable portion provided around the first fixed portion within a first plane intersecting a first direction from the base to the first fixed portion, the movable portion comprising: a first partial region having an annular shape centered on the first fixing portion; a second partial region that is annular and is provided between the first partial region and the first fixed portion and has a center at the first fixed portion; a third partial region that is annular and is provided between the first partial region and the second partial region and has a center at the first fixed portion, the third partial region including a first movable portion electrode; a movable portion including the first partial region and the second partial region not including the first movable portion electrode; a connection portion provided between the first fixed portion and the second partial region, the connection portion connecting the second partial region to the first fixed portion, wherein a first gap is provided between the base and the movable portion and between the base and the connection portion; a first fixed electrode fixed to the base and facing the first movable electrode; Equipped with the first partial region includes a plurality of first holes, the plurality of first holes having a first width along a first radial direction passing through the first fixing portion and along the first plane, and a first density in the first plane; A sensor, wherein the second partial region includes a plurality of second holes, the plurality of second holes having at least one of a second width smaller than the first width and a second density lower than the first density, the second width being a width of the plurality of second holes along a second radial direction passing through the first fixed portion and along the first plane, and the second density being a density of the plurality of second holes in the first plane.

8. The plurality of first holes are arc-shaped with the first fixing portion as a center, The sensor according to claim 7 , wherein the plurality of second holes are arc-shaped with the first fixing portion as a center.

9. A control unit is further provided. The sensor according to claim 1 , wherein the control unit is capable of applying a voltage between the movable portion and the first fixed electrode.

10. The sensor according to claim 9 , wherein the control unit is capable of applying an AC voltage between the movable part and the first fixed electrode to vibrate the movable part.

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