Fluorine-containing polymer having nitrogen-containing aromatic ring, its production method and composition
By introducing nitrogen-containing aromatic ring into the fluoropolymer and adopting anhydrous production method, the problems of low adhesion to the fluoropolymer and hydrogen fluoride generation are solved, and higher adhesion and lower contamination are achieved.
Patent Information
- Application Number
- JP2024110310
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2023-07-11
- Filing Date
- 2024-07-09
- Publication Date
- 2025-04-09
- Estimated Expiration
- 2044-07-09
AI Technical Summary
The existing fluoropolymers have low adhesion to metals and have limited service life. At the same time, hydrogen fluoride is produced as a by-product during the treatment of terminal fluoropolymers, resulting in metal corrosion and contamination.
A fluoropolymer containing nitrogen-containing aromatic ring is developed to increase the adhesion of the fluoropolymer to metals through specific polymerization reactions and solvent systems, and anhydrous methods are used in the production process to reduce the formation of hydrogen fluoride.
It improves the adhesion of fluoropolymers to metals, extends service life, and reduces the formation of hydrogen fluoride, avoids metal corrosion and pollution.
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Abstract
Description
[Technical field]
[0001] The present disclosure relates to a fluoropolymer having a nitrogen-containing aromatic ring, a method for producing the same, and a composition thereof. [Background technology]
[0002] Fluorine-containing polymers are used in various fields due to their properties such as transparency, durability, chemical resistance, stability, etc. For example, their use as resins for sealing light-emitting elements, insulating films for electrowetting devices, pellicle films constituting pellicles used to prevent foreign matter from adhering to photomasks and reticles in the manufacturing process of semiconductor devices and liquid crystal display panels, and adhesives for bonding the frame and pellicle film constituting the pellicle are being considered (Patent Documents 1 to 8). [Prior art documents] [Patent documents]
[0003] [Patent Document 1] JP 2002-188047 A [Patent Document 2] JP 2004-085639 A [Patent Document 3] JP 2003-156835 A [Patent Document 4] JP 2004-039317 A [Patent Document 5] JP 2007-320072 A [Patent Document 6] International Publication No. 2011 / 027782 [Patent Document 7] International Publication No. 2013 / 129501 [Patent Document 8] International Publication No. 2021 / 020565 Summary of the Invention [Problem to be solved by the invention]
[0004] However, since the adhesion of fluorine-containing polymers to metals is low, their applications and duration of use are sometimes limited. The main object of the present disclosure is to provide a fluorine-containing polymer having a nitrogen-containing aromatic ring, a method for producing the same, a composition thereof, etc. In addition, when introducing a functional group into a fluoropolymer terminal, conventionally, the terminal is converted to -COF, and then the COF is hydrolyzed. However, hydrogen fluoride is by-produced during the -COF conversion and subsequent hydrolysis, and this hydrogen fluoride dissolves in the water used for hydrolysis to produce aqueous hydrofluoric acid. The by-production of hydrogen fluoride and aqueous hydrofluoric acid during the reaction is undesirable because they cause corrosion of the kettle and metal contamination, and also make the handling of the resulting fluoropolymer difficult. The main object of the present disclosure is to provide a method for producing a fluoropolymer having a functional terminal, in which the by-production of aqueous hydrofluoric acid is suppressed. [Means for solving the problem]
[0005] The present disclosure encompasses the following aspects. Section 1. A fluoropolymer soluble in a solvent, wherein a polymerization site of a monomer constituting said fluoropolymer is a carbon atom and the fluoropolymer has a nitrogen-containing aromatic ring in its structure. Section 2. The nitrogen-containing aromatic ring is The following formula (1): [ka] [A is an oxygen atom, a sulfur atom, or a substituent R 10 represents a nitrogen atom which may be substituted by R 10 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, X 1 ~X 4 any one of X represents a carbon atom, and the other X independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring represented by the formula (1), The following formula (2): [ka] [Y 1 ~Y 6 any one of Y represents a carbon atom, and the other Y independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring represented by the formula (2), The following formula (3): [ka] [B is an oxygen atom, a sulfur atom, or a substituent R 20 represents a nitrogen atom which may be substituted by R 20 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, Z1 ~Z 8 represents a carbon atom, and the other Zs independently represent a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. Item 2. The fluorine-containing polymer according to item 1, wherein the nitrogen-containing aromatic ring (3) is at least one selected from the group consisting of: Section 3. Item 3. The fluorine-containing polymer according to item 1 or 2, wherein the basic skeleton of the nitrogen-containing aromatic ring is at least one selected from the group consisting of pyrrole, pyrazole, imidazole, triazole, pyridine, pyridazine, pyrimidine, pyrazine, triazine, indole, isoindole, indolizine, benzimidazole, benzotriazole, oxazole, isoxazole, benzoxazole, benzisoxazole, thiazole, isothiazole, benzothiazole, benzisothiazole, and purine. Section 4. Item 3. The fluorine-containing polymer according to item 1 or 2, wherein the basic skeleton of the nitrogen-containing aromatic ring is at least one selected from the group consisting of imidazole, triazole, triazine, benzimidazole, benzotriazole, oxazole, isoxazole, and purine. Section 5. Item 5. The fluoropolymer according to any one of Items 1 to 4, wherein the fluoropolymer comprises, as a main component, a monomer unit having a fluorinated aliphatic ring, and the fluorinated aliphatic ring of the fluoropolymer has 1, 2 or 3 etheric oxygen atoms as ring-constituting atoms, and when the fluorinated aliphatic ring contains a plurality of the etheric oxygen atoms, the etheric oxygen atoms are not adjacent to each other and have a nitrogen-containing aromatic ring in its structure. Section 6. The monomer unit contained as a main component in the fluoropolymer is The following formula (A1): [ka] [In the formula, R 1 represents a fluorine atom or a C1-C5 perfluoroalkyl group. A monomer unit (A1) represented by The following formula (A2): [ka] [In the formula, R 2 ~R 5 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.] or a monomer unit (A2) represented by The following formula (A3): [ka] [In the formula, R 6 ~R 9 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.] Monomer unit (A3) represented by Item 6. The fluoropolymer according to item 5, wherein Section 7. Item 7. The fluoropolymer according to Item 6, wherein the monomer unit contained as a main component in the fluoropolymer is the monomer unit (A3). Section 8. The monomer unit contained as a main component in the fluoropolymer is The following formula (A1-1): [ka] A monomer unit (A1-1) represented by the formula: The following formula (A2-1): [ka] A monomer unit (A2-1) represented by the formula: The following formula (A2-2): [ka] A monomer unit (A2-2) represented by the following formula: The following formula (A3-1): [ka] Monomer unit (A3-1) represented by Item 7. The fluoropolymer according to item 6, wherein Section 9. Item 9. The fluoropolymer according to Item 8, wherein the monomer unit contained as a main component in the fluoropolymer is the monomer unit (A3-1). Section 10. The monomer unit contained as a main component in the fluoropolymer is -(CF 2 CF 2 )-, -(CHFCF 2 )-, -(CH 2 CF 2 )-, -(CH 2 CHF)-, -(CHFCHF)-, or -(CF 2 Item 6. The fluorine-containing polymer according to any one of Items 1 to 5, wherein the fluorine-containing polymer is CClF)-. Section 11. 11. The fluoropolymer according to any one of items 1 to 10, wherein the fluoropolymer has a mass average molecular weight in the range of 5,000 to 2,000,000. Section 12. 11. The fluoropolymer according to any one of items 1 to 10, wherein the fluoropolymer has a mass average molecular weight in the range of 10,000 to 1,500,000. Section 13. The linker has the following formula (L): [ka] [In the formula, v represents 0 or 1; A represents an oxygen atom, a sulfur atom, or -O-CH 2 -, or a nitrogen atom bonded to a hydrogen atom, a methyl group, an ethyl group, a propyl group, or an isopropyl group, and * indicates the side bonded to the nitrogen-containing aromatic ring. Item 3. The fluoropolymer according to item 2, which has a structure represented by the following formula: Section 14. Item 13. The fluoropolymer according to any one of items 1 to 12, wherein the nitrogen-containing aromatic ring is bonded to one or two of the monomer units at the ends of the main chain of the fluoropolymer. Section 15. one of the carbon atoms constituting the nitrogen-containing aromatic ring is bonded via a linker to one or two of the monomer units at the terminals of the main chain of the fluorine-containing polymer, The structure of the linker and the nitrogen-containing aromatic ring bonded to one or two of the terminal monomer units of the main chain of the fluoropolymer is represented by the following formula: [ka] and The monomer unit contained as a main component in the fluoropolymer is The following formula (A3-1): [ka] Monomer unit (A3-1) represented by -(CF 2 CF 2 )-, -(CHFCF 2 )-, -(CH 2 CF 2 )-, -(CH 2 CHF)-, -(CHFCHF)-, or -(CF 2 CClF)-, Item 3. The fluorine-containing polymer according to item 2.
[0006] Section 16. A method for producing a fluorine-containing polymer containing a monomer unit having a fluorine-containing aliphatic ring as a main component and having a nitrogen-containing aromatic ring, comprising the steps of: a step of reacting a fluorine-containing polymer (A) containing as a main component a monomer unit having a fluorine-containing aliphatic ring with a reactive reagent (B) having a nitrogen-containing aromatic ring in a solvent (C), wherein the fluorine-containing aliphatic ring has 1, 2 or 3 ethereal oxygen atoms as ring-constituting atoms, and when the fluorine-containing aliphatic ring contains a plurality of the ethereal oxygen atoms, the ethereal oxygen atoms are not adjacent to each other; A method for producing a fluorine-containing polymer. Section 17. The nitrogen-containing aromatic ring is The following formula (1): [ka] [A is an oxygen atom, a sulfur atom, or a substituent R 10 represents a nitrogen atom which may be substituted by R 10 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, X 1 ~X 4 any one of X represents a carbon atom, and the other X independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring represented by the formula (1), The following formula (2): [ka] [Y 1 ~Y 5 any one of Y represents a carbon atom, and the other Y independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring represented by the formula (2), The following formula (3): [ka] [B is an oxygen atom, a sulfur atom, or a substituent R 20 represents a nitrogen atom which may be substituted by R 20 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, Z 1 ~Z 8 represents a carbon atom, and the other Zs independently represent a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. Item 17. The method for producing a fluorine-containing polymer according to Item 16, wherein the nitrogen-containing aromatic ring (3) is at least one selected from the group consisting of Section 18. Item 18. The method for producing a fluorine-containing polymer according to Item 16 or 17, wherein the basic skeleton of the nitrogen-containing aromatic ring is at least one selected from the group consisting of pyrrole, pyrazole, imidazole, triazole, pyridine, pyridazine, pyrimidine, pyrazine, triazine, indole, isoindole, indolizine, benzimidazole, benzotriazole, oxazole, isoxazole, benzoxazole, benzisoxazole, thiazole, isothiazole, benzothiazole, benzisothiazole, and purine. Section 19. Item 18. The method for producing a fluorine-containing polymer according to Item 16 or 17, wherein the basic skeleton of the nitrogen-containing aromatic ring is at least one selected from the group consisting of imidazole, triazole, triazine, benzimidazole, benzotriazole, oxazole, isoxazole, and purine. Section 20. The reactive reagent (B) is 1-(3-aminopropyl)imidazole, 4-(1H-benzimidazol-2-yl)aniline, 2-aminobenzimidazole, 5-aminobenzimidazole, 5-amino-2-mercaptobenzimidazole, 3-amino-1H-1,2,4-triazole, 4-amino-1,2,4-triazole, 4-amino-4H-1,2,4-triazole, 3,5-diamino-1,2, 4-Triazole, 1-aminobenzotriazole, 2-aminobenzotriazole, 1H-1,2,3-benzotriazol-5-amine, 5-aminobenzotriazole, melamine monomer, 2-methoxy-4-methyl-6-(methylamino)-1,3,5-triazine, 2,4-diamino-6-butylamino-1,3,5-triazine, 2-amino-4-methoxy-6-methyl-1,3,5-triazine, 2,4 -Diamino-6-methyl-1,3,5-triazine, ammelide, ammeline, 2,4-diamino-1,3,5-triazine, 2,4-diamino-6-isopropoxy-1,3,5-triazine, 2,4-diamino-6-methoxy-1,3,5-triazine, 2-aminopurine, 8-azaadenine, 6-O-methylguanine, 2,6-diaminopurine, N-methoxy-7H-purin-6-amine, 1H-1,2,4- Triazole-3-thiol, 4-methyl-4H-1,2,4-triazole-3-thiol, 2-mercaptobenzimidazole, 2-mercapto-1-methylbenzimidazole, 5-ethoxy-2-mercaptobenzimidazole, 2-mercapto-5-methylbenzimidazole, 2-mercapto-5-methoxybenzimidazole, thiocyanuric acid, 6-(dibutylamino)-1,3,5-triazine-2,20. The method for producing a fluorine-containing polymer according to any one of Items 16 to 19, wherein the fluorine-containing polymer is at least one member selected from the group consisting of 4-dithiol, 6-mercaptopurine, 2-hydroxybenzimidazole, 2-(hydroxymethyl)benzimidazole, 2-(3-hydroxypropyl)benzimidazole, 1H-benzotriazole-1-methanol, 2-aminooxazole, 5-amino-3-methylisoxazole, 3-hydroxy-5-methylisoxazole, muscimol, 3-amino-5-tert-butylisoxazole, 2-aminobenzoxazole, and 2-mercaptobenzoxazole. Section 21. The monomer unit contained as a main component in the fluoropolymer (A) is The following formula (A1): [ka] [In the formula, R 1 represents a fluorine atom or a C1-C5 perfluoroalkyl group. A monomer unit (A1) represented by The following formula (A2): [ka] [In the formula, R 2 ~R 5 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.] or a monomer unit (A2) represented by The following formula (A3): [ka] [In the formula, R 6 ~R 9 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.] Monomer unit (A3) represented by 21. The method for producing a fluorinated polymer according to any one of items 16 to 20, Section 22. Item 22. The process for producing a fluoropolymer according to Item 21, wherein the monomer unit contained as a main component in the fluoropolymer (A) is the monomer unit (A3). Section 23. The monomer unit contained as a main component in the fluoropolymer (A) is The following formula (A1-1): [ka] A monomer unit (A1-1) represented by the formula: The following formula (A2-1): [ka] A monomer unit (A2-1) represented by the formula: The following formula (A2-2): [ka] A monomer unit (A2-2) represented by the following formula: The following formula (A3-1): [ka] Monomer unit (A3-1) represented by Item 22. The method for producing a fluorinated polymer according to item 21, Section 24. Item 24. The process for producing a fluoropolymer according to Item 23, wherein the monomer unit contained as a main component in the fluoropolymer (A) is the monomer unit (A3-1). Section 25. 25. The process for producing a fluoropolymer according to any one of items 16 to 24, wherein the solvent (C) is an aprotic solvent. Section 26. Item 26. The method for producing a fluorinated polymer according to Item 25, wherein the aprotic solvent is at least one solvent selected from the group consisting of perfluoroaromatic compounds, perfluorotrialkylamines, perfluoroalkanes, hydrofluorocarbons, perfluorocyclic ethers, hydrofluoroethers, and olefin compounds containing at least one chlorine atom. Section 27. Item 26. The process for producing a fluorinated polymer according to Item 25, wherein the aprotic solvent is a hydrofluoroether. Section 28. Item 26. The method for producing a fluoropolymer according to Item 25, wherein the aprotic solvent has a global warming potential (GWP) of 400 or less. Section 29. The aprotic solvent is Formula (C-1): F(CF 2 ) p O(CH 2 ) q H (C-1) [In the formula, p is an integer of 1 to 6, and q is an integer of 1 to 4.] A compound represented by Formula (C-2): H(CF 2 ) p O(CF 2 ) q F (C-2) [In the formula, p and q are as defined above.] A compound represented by Formula (C-3): H(CF 2 ) p O(CH 2 ) q H (C-3) [In the formula, p and q are as defined above.] A compound represented by Formula (C-4): X(CF 2 ) p CH 2 O(CF 2 ) q H (C-4) [In the formula, X represents a fluorine atom or a hydrogen atom, and p and q are as defined above.] A compound represented by (CF 3 ) 2 CHOCH 3 , (CF 3 ) 2 CFOCH 3 , C.F. 3 CHFCF 2 OCH3 , and C.F. 3 CHFCF 2 OCF 3 Item 26. The method for producing a fluorinated polymer according to Item 25, wherein the hydrofluoroether is at least one hydrofluoroether selected from the group consisting of: Section 30. The aprotic solvent is represented by formula (C-5): R 21 -OR 22 (C-5) [In the formula, R 21 is a straight-chain or branched-chain propyl or butyl group in which one or more hydrogen atoms have been replaced by fluorine atoms; R 22 is methyl or ethyl. A compound represented by Item 26. The method for producing a fluorinated polymer according to Item 25, wherein Section 31. 31. The method for producing a fluoropolymer according to any one of Items 16 to 30, wherein the fluoropolymer has a mass average molecular weight in the range of 5,000 to 2,000,000. Section 32. 31. The method for producing a fluoropolymer according to any one of Items 16 to 30, wherein the fluoropolymer has a mass average molecular weight in the range of 10,000 to 1,500,000. Section 33. The fluoropolymer (A) comprises a COF group and a fluoropolymer having the following formula (K): [ka] [In the formula, v represents 0 or 1; R 40 represents an alkyl group or an alkoxy group. 33. The method for producing a fluorine-containing polymer according to any one of items 16 to 32, wherein the fluorine-containing polymer (K) has at least one group selected from the group consisting of groups represented by the following formula (1): Section 34. Item 34. The method for producing a fluoropolymer according to Item 33, wherein one or two of the monomer units at the terminals of the main chain of the fluoropolymer (A) have at least one group selected from the group consisting of the COF group and the group (K). Section 35. In a fluoropolymer containing the monomer unit having a fluorinated aliphatic ring as a main component and having a nitrogen-containing aromatic ring, one of the carbon atoms constituting the nitrogen-containing aromatic ring is bonded via a linker to one or two of the monomer units at the terminals of the main chain of the fluoropolymer, The structure of the linker and the nitrogen-containing aromatic ring bonded to one or two of the terminal monomer units of the main chain of the fluoropolymer is represented by the following formula: [ka] and The reactive reagent (B) is represented by the following formula: [ka] Any compound represented by the formula: The monomer unit contained as a main component in the fluoropolymer (A) is The following formula (A3-1): [ka] A monomer unit (A3-1) represented by the formula: The terminal structure of the fluoropolymer (A) is -COF or -CF 2 -O-CO-O-normal propyl; The solvent (C) is perfluorobenzene, (CF 3 ) 2 CFCF 2 OCH 3 , C.F. 3 CF 2 CF 2 CF 2 OCH 3 , (CF 3 ) 2 CFCF 2 O.C. 2 H 5 , and C.F. 3 CF 2 CF 2 CF 2 O.C. 2 H 5 At least one selected from the group consisting of Item 18. A method for producing a fluorine-containing polymer according to item 17.
[0007] Section 36. Item 16. An encapsulating resin comprising the fluorine-containing polymer according to any one of items 1 to 15. Section 37. Item 16. A fluororesin adhesive comprising the fluorine-containing polymer according to any one of items 1 to 15. Section 38. Item 38. The fluororesin adhesive according to item 37, for bonding a pellicle membrane to a frame. Section 39. Item 37. An optical device comprising the sealing resin according to item 36, the fluororesin adhesive according to item 37, or the fluororesin adhesive according to item 38. Section 40. Item 16. A pellicle comprising a pellicle membrane and a frame, the pellicle comprising the fluoropolymer according to any one of items 1 to 15. Section 41. Item 41. The pellicle according to item 40, wherein the pellicle membrane and the frame are bonded with the fluororesin adhesive according to item 37. Section 42. Item 41. An exposure method in photolithography using a light source having an emission wavelength of 200 nm or less, comprising the pellicle according to item 40. Section 43. Item 43. The exposure method according to item 42, wherein the light source having a wavelength of 200 nm or less is a fluorine gas excimer laser or a fluorine gas excimer laser. Section 44. A composition comprising the fluorine-containing polymer according to any one of items 1 to 15 and hydrogen fluoride, A composition in which the content of said hydrogen fluoride is 0.005 ppm to 50 ppm relative to the content of said fluoropolymer. Section 45. Item 45. The composition according to item 44, wherein the content of the hydrogen fluoride is 0.005 ppm to 10 ppm based on the content of the fluoropolymer. Effect of the Invention
[0008] According to the present disclosure, it is possible to provide a fluoropolymer having improved adhesion to metal. According to the present disclosure, it is possible to provide a method for producing a fluoropolymer in which the by-production of hydrogen fluoride is suppressed. According to the present disclosure, it is possible to provide a fluoropolymer-containing composition having a low hydrogen fluoride content and useful as a supply source of a fluoropolymer. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0009] The above summary of the present disclosure is not intended to describe each disclosed embodiment or every implementation of the present disclosure. The remainder of the disclosure more particularly exemplifies example embodiments. In several places in this disclosure, guidance is provided through examples, which examples can be used in various combinations. In each instance, the exemplary group can serve as a non-exclusive and representative group. All publications, patents, and patent applications cited herein are hereby incorporated by reference in their entirety.
[0010] term Unless otherwise specified, the symbols and abbreviations in this specification should be understood to have the meanings commonly used in the technical field to which this disclosure pertains, in accordance with the context of this specification. As used herein, the phrase "comprising" is intended to encompass the phrases "consisting essentially of" and "consisting of." The steps, treatments, or operations described herein may be carried out at room temperature unless otherwise specified. In this specification, room temperature may mean a temperature in the range of 10 to 40°C. In this specification, the notation "Cn-Cm" (wherein n and m are each a number) indicates that the number of carbon atoms is n or more and m or less, as is commonly understood by those skilled in the art. In this specification, the description of a compound can include all stereoisomers (enantiomers, diastereomers, geometric isomers, etc.) unless otherwise specified by a person skilled in the art.
[0011] In this specification, unless otherwise specified, a "fluorine-containing alicyclic ring" has, as ring-constituting atoms, a plurality of carbon atoms and 1, 2 or 3 etheric oxygen atoms. When a "fluorine-containing alicyclic ring" contains, as ring-constituting atoms, a plurality of oxygen atoms, the oxygen atoms are not adjacent to each other. The term "fluorine-containing aliphatic ring" includes a saturated aliphatic monocyclic ring containing a fluorine atom. The "fluorinated aliphatic ring" includes rings having 4 or more members (eg, 4-membered ring, 5-membered ring, 6-membered ring, 7-membered ring). The "fluorine-containing aliphatic ring" may have at least one substituent selected from the group consisting of perfluoroalkyl groups (e.g., C1-C5 linear or branched perfluoroalkyl groups) and perfluoroalkoxy groups (e.g., C1-C5 linear or branched perfluoroalkoxy groups). The number of substituents can be 1 or more, and can be, for example, 1 to 4, 1 to 3, 1 to 2, 1, 2, 3, or 4. In the "fluorine-containing aliphatic ring", the ring-constituting carbon atoms may have either or both of a fluorine atom and a substituent. Examples of the "fluorine-containing aliphatic ring" include perfluorooxetane which may have one or more substituents, perfluorotetrahydrofuran which may have one or more substituents, perfluorodioxolane which may have one or more substituents, perfluorotetrahydropyran which may have one or more substituents, perfluoro-1,3-dioxane which may have one or more substituents, perfluorooxepane which may have one or more substituents, perfluoro-1,3-dioxepane which may have one or more substituents, perfluoro-1,4-dioxepane which may have one or more substituents, and perfluoro-1,3,5-trioxepane which may have one or more substituents.
[0012] In this specification, unless otherwise specified, examples of "alkyl group" can include linear or branched C1-C10 alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, tert-butyl, pentyl, isopentyl, neopentyl, hexyl, heptyl, octyl, nonyl, and decyl. The alkyl group can be a C1-C6 alkyl group, a C1-C5 alkyl group, a C1-C4 alkyl group, or a C1-C3 alkyl group.
[0013] In the present specification, the alkyl group may or may not contain a C1-C5 ether bond. The alkyl group containing a C1-C5 ether bond may be an alkyl group containing a C1-C4 ether bond, an alkyl group containing a C1-C3 ether bond, an alkyl group containing a C2-C5 ether bond, or an alkyl group containing a C3-C5 ether bond. An example of an alkyl group containing a C1-C5 ether bond is CH 3 OCH 2 -, CH 3 CH 2 OCH 2 -, CH 3 OCH 2 CH 2 -, CH 3 CH 2 CH 2 OCH 2 -, CH 3 CH 2 OCH 2 CH 2 -, CH 3 OCH 2 CH 2 CH 2 -, CH 3 CH 2 CH 2 CH 2 OCH 2 -, CH 3 CH 2 CH 2 OCH 2 CH 2 -, CH 3 CH 2 OCH 2 CH 2 CH 2 -, CH 3 OCH2 CH 2 CH 2 CH 2 -, CH 3 OCH(CH 3 )-, CH 3 CH(CH 3 )OCH 2 -, CH 3 CH 2 OCH(CH 3 )-, CH 3 OC(CH 3 ) 2 - and CH 3 OCH 2 CH 2 OCH 2 - can be included.
[0014] In this specification, unless otherwise specified, a "fluoroalkyl group" is an alkyl group in which at least one hydrogen atom is substituted with a fluorine atom. The "fluoroalkyl group" may be a straight-chain or branched fluoroalkyl group. The "fluoroalkyl group" can have 1 to 12, 1 to 6, 1 to 5, 1 to 4, 1 to 3, 6, 5, 4, 3, 2, or 1 carbon atom(s). The number of fluorine atoms in the "fluoroalkyl group" can be 1 or more (for example, 1 to 3, 1 to 5, 1 to 9, 1 to 11, or from 1 to the maximum number that can be substituted). The term "fluoroalkyl group" encompasses perfluoroalkyl groups. A "perfluoroalkyl group" is an alkyl group in which all of the hydrogen atoms have been replaced with fluorine atoms. An example of a perfluoroalkyl group is the trifluoromethyl group (CF 3 -), pentafluoroethyl group (C 2 F 5 -), heptafluoropropyl group (CF 3 CF 2 CF 2 -), and heptafluoroisopropyl group ((CF 3 ) 2 CF-). Specific examples of the "fluoroalkyl group" include a monofluoromethyl group, a difluoromethyl group, and a trifluoromethyl group (CF 3 -), 2,2,2-trifluoroethyl group (CF 3 CH 2 -), perfluoroethyl group (C 2 F 5 -), tetrafluoropropyl group (e.g. HCF 2 CF 2 CH 2 -), hexafluoropropyl group (e.g., (CF 3 ) 2 CH-), perfluorobutyl group (e.g., CF 3 CF 2 CF 2 CF 2 -), octafluoropentyl group (e.g., HCF 2 CF 2 CF 2 CF 2 CH 2 -), perfluoropentyl group (e.g., CF 3 CF 2 CF 2 CF 2 CF 2 -) and perfluorohexyl groups (e.g., CF 3 CF 2 CF 2 CF 2 CF 2 CF 2 -) etc.
[0015] In this specification, unless otherwise specified, an "alkoxy group" can be a group represented by RO-[wherein R is an alkyl group (e.g., a C1-C10 alkyl group)]. Examples of "alkoxy groups" include linear or branched C1-C10 alkoxy groups such as methoxy, ethoxy, propoxy, isopropoxy, butoxy, isobutoxy, sec-butoxy, tert-butoxy, pentyloxy, isopentyloxy, neopentyloxy, hexyloxy, heptyloxy, octyloxy, nonyloxy, and decyloxy.
[0016] In this specification, unless otherwise specified, a "fluoroalkoxy group" is an alkoxy group in which at least one hydrogen atom is replaced with a fluorine atom. The "fluoroalkoxy group" may be a linear or branched fluoroalkoxy group. The "fluoroalkoxy group" can have 1 to 12, 1 to 6, 1 to 5, 1 to 4, 1 to 3, 6, 5, 4, 3, 2, or 1 carbon atom. The number of fluorine atoms in the "fluoroalkoxy group" can be 1 or more (for example: 1 to 3, 1 to 5, 1 to 9, 1 to 11, or 1 to the maximum number that can be substituted). The term "fluoroalkoxy group" encompasses a perfluoroalkoxy group. A "perfluoroalkoxy group" is an alkoxy group in which all of the hydrogen atoms have been replaced with fluorine atoms. An example of a perfluoroalkoxy group is a trifluoromethoxy group (CF 3 O-), pentafluoroethoxy group (C 2 F 5 O-), heptafluoropropyloxy group (CF 3 CF 2 CF 2 O-), and the heptafluoroisopropyloxy group ((CF 3 ) 2 CFO-). Specific examples of the "fluoroalkoxy group" include a monofluoromethoxy group, a difluoromethoxy group, a trifluoromethoxy group, and a 2,2,2-trifluoroethoxy group (CF 3 CH 2 O-), perfluoroethoxy group (C 2 F 5 O-), tetrafluoropropyloxy group (e.g. HCF 2 CF 2 CH 2 O-), hexafluoropropyloxy group (e.g., (CF 3 ) 2 CHO-), perfluorobutyloxy group (e.g., CF 3 CF 2 CF 2 CF 2O-), octafluoropentyloxy group (e.g., HCF 2 CF 2 CF 2 CF 2 CH 2 O-), perfluoropentyloxy group (e.g., CF 3 CF 2 CF 2 CF 2 CF 2 O-) and perfluorohexyloxy groups (e.g., CF 3 CF 2 CF 2 CF 2 CF 2 CF 2 O-) and the like.
[0017] In this specification, unless otherwise specified, a "nitrogen-containing aromatic ring" has at least one nitrogen atom and at least one carbon atom as ring-constituting atoms. The number of nitrogen atoms constituting the ring can be, for example, 1, 2, 3, 4, 5, 6, etc., but does not exceed the number of ring-constituting atoms minus 1. The ring-constituting atoms other than the ring-constituting nitrogen atom may all be carbon atoms, or may be at least one carbon atom and another atom. The number of ring-constituting carbon atoms can be, for example, 1, 2, 3, 4, 5, 6, 7, 8, etc., but does not exceed the number of ring-constituting atoms minus 1. At least one (preferably 1 or 2, more preferably 1) ring-constituting carbon atom, when there are multiple ring-constituting carbon atoms, is preferably independently bonded to the main chain of the fluorine-containing polymer via a linker or directly. The other ring-constituting atom may be an oxygen atom, a sulfur atom, etc., and is preferably an oxygen atom or a sulfur atom. The number of other ring-constituting atoms may be, for example, 1 or 2, etc., and is preferably 1. The ring-constituting atoms may have a substituent. The substituent may be a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, an alkyl group, etc. The number of the substituents may be, for example, 1, 2, 3, 4, etc. When there are a plurality of the substituents, they may be the same or different. Examples of the substituents include a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, an alkyl group, etc. The "nitrogen-containing aromatic ring" may have an oxygen atom or a sulfur atom as another ring-constituting atom. The number of other ring-constituting atoms may be 1 or 2, etc., and is preferably 1. The "nitrogen-containing aromatic ring" includes an aromatic monocyclic ring containing at least one nitrogen atom. The "nitrogen-containing aromatic ring" includes a ring having 4 or more members (e.g., a 4-membered ring, a 5-membered ring, a 6-membered ring, a 7-membered ring). Examples of the ring structure that is the basis of the "nitrogen-containing aromatic ring" include pyrrole, pyrazole, imidazole, triazole, pyridine, pyridazine, pyrimidine, pyrazine, triazine, indole, isoindole, indolizine, benzimidazole, benzotriazole, oxazole, isoxazole, benzoxazole, benzisoxazole, thiazole, isothiazole, benzothiazole, benzisothiazole, and purine, and imidazole, triazole, triazine, benzimidazole, benzotriazole, oxazole, isoxazole, and purine are preferred. As described above, it is preferred that these rings are bonded to the main chain of the fluorine-containing polymer at the ring-constituting carbon atom. As described above, the ring-constituting atoms of these rings may have a substituent.
[0018] Fluorine-containing polymer having nitrogen-containing aromatic ring One embodiment of the present disclosure is a fluoropolymer having a nitrogen-containing aromatic ring. The fluoropolymer is soluble in a solvent (preferably an aprotic solvent). The polymerization site of the monomer constituting the fluoropolymer is a carbon atom. The polymerization site of the monomer constituting the fluoropolymer is a site formed by bonding the monomer with another monomer during polymerization. Typically, it is a site where a monomer unit is bonded to another monomer unit. The fluoropolymer has a nitrogen-containing aromatic ring in its structure. When the fluoropolymer has a plurality of nitrogen-containing aromatic rings, the nitrogen-containing aromatic rings may be the same or different. The nitrogen-containing aromatic ring may be included in the main chain or in the side chain of the fluoropolymer. The fluoropolymer of the present disclosure has a nitrogen-containing aromatic ring in its structure, and thus has high adhesion to metals. The ring-constituting carbon atom of the nitrogen-containing aromatic ring is preferably bonded to the main chain of the fluoropolymer via a linker or directly, more preferably bonded to the main chain of the fluoropolymer via a linker. The nitrogen-containing aromatic ring may be bonded to a monomer unit at the end of the main chain of the fluoropolymer, or may be bonded to a monomer unit that is not at the end of the main chain. The nitrogen-containing aromatic ring may be bonded to one or two of the monomer units at the end of the main chain of the fluoropolymer.
[0019] The linker may be, for example, a linker represented by the following formula (L): [ka] [In the formula, v represents 0 or 1; A represents an oxygen atom, a sulfur atom, or -O-CH 2 -, or a nitrogen atom bonded to a hydrogen atom, a methyl group, an ethyl group, a propyl group, or an isopropyl group, and * indicates the side bonded to the nitrogen-containing aromatic ring. The structure may be represented by the following formula: A is an oxygen atom, a sulfur atom, -O-CH 2 - or a nitrogen atom bonded to a hydrogen atom, a sulfur atom, -O-CH 2 - or a nitrogen atom bonded to a hydrogen atom. The linker is -CO-NH-*, -CF 2 It may be -O-CO-NH-*, or -CO-S-* [in these chemical structures, * indicates the side that is bonded to the nitrogen-containing aromatic ring].
[0020] Examples of ring structures that serve as the basis of the nitrogen-containing aromatic ring include pyrrole, pyrazole, imidazole, triazole, pyridine, pyridazine, pyrimidine, pyrazine, triazine, indole, isoindole, indolizine, benzimidazole, benzotriazole, oxazole, isoxazole, benzoxazole, benzisoxazole, thiazole, isothiazole, benzothiazole, benzisothiazole, and purine. Of these, pyrazole, imidazole, triazole, oxazole, isoxazole, pyridazine, pyrimidine, triazine, benzimidazole, benzotriazole, benzothiazole, and purine are preferred, and imidazole, triazole, triazine, benzimidazole, benzotriazole, oxazole, isoxazole, and purine are more preferred.
[0021] The nitrogen-containing aromatic ring is, for example, represented by the following formula (1): [ka] [A is an oxygen atom, a sulfur atom, or a substituent R 10 represents a nitrogen atom which may be substituted by R 10 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; X 1 ~X 4 represents a carbon atom, and the other Xs independently represent a nitrogen atom or a carbon atom, at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of them, is independently bonded to the main chain of the fluorine-containing polymer via a linker or directly, and the other carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of them, may independently have a substituent, and the substituent, when there are a plurality of them, is independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, and the alkyl group, when there are a plurality of them, may independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring represented by the formula (1), The following formula (2): [ka] [Y 1 ~Y 6 wherein any one of the Y's represents a carbon atom, and the other Y's independently represent a nitrogen atom or a carbon atom, and at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer via a linker or directly, and the other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may independently have a substituent, and the substituent, when there are multiple carbon atoms, is independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, and the alkyl group, when there are multiple carbon atoms, may independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. The following formula (3): [ka] [B is an oxygen atom, a sulfur atom, or a substituent R 20 represents a nitrogen atom which may be substituted by R 20 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; Z 1 ~Z 8 represents a carbon atom, and the other Zs independently represent a nitrogen atom or a carbon atom, at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of them, is independently bonded to the main chain of the fluorine-containing polymer via a linker or directly, and the other carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of them, may independently have a substituent, and the substituent, when there are a plurality of them, is independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, and the alkyl group, when there are a plurality of them, may independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. The nitrogen-containing aromatic ring (3) may be at least one selected from the group consisting of:
[0022] In the nitrogen-containing aromatic ring (1), A and X 1 ~X 4 At least one of A and X is a nitrogen atom. 1 ~X 4 The number of nitrogen atoms in A and X can be 1, 2, or 3. 1 ~X 4 The number of carbon atoms in A and X can be 2, 3, or 4. 1 ~X 4 is preferably composed of nitrogen atoms and carbon atoms.
[0023] Examples of the ring structure serving as the basis of the nitrogen-containing aromatic ring (1) include pyrrole, pyrazole, imidazole, triazole, oxazole, isoxazole, thiazole, and isothiazole. The ring structure may be pyrazole, imidazole, triazole, oxazole, or isoxazole. The ring structure may be imidazole, triazole, oxazole, or isoxazole.
[0024] In the nitrogen-containing aromatic ring (2), Y 1 ~Y 6 At least one of Y is a nitrogen atom. 1 ~Y 6 The number of nitrogen atoms in Y can be 1, 2, or 3. 1 ~Y 6 The number of carbon atoms in Y can be 3, 4, or 5. 1 ~Y 6 is preferably composed of nitrogen atoms and carbon atoms.
[0025] Examples of the ring structure that serves as the basis of the nitrogen-containing aromatic ring (2) include pyridine, pyridazine, pyrimidine, pyrazine, and triazine. The ring structure may be pyridazine, pyrimidine, triazine, or triazine.
[0026] In the nitrogen-containing aromatic ring (3), B and Z 1 ~Z8 At least one of B, Z is a nitrogen atom. 1 , and Z 2 At least one of Z is a nitrogen atom; 3 ~Z 8 are preferably carbon atoms. 1 ~Z 8 The number of nitrogen atoms in Z can be 1, 2, or 3. 1 ~Z 8 The number of carbon atoms in B and Z can be 5, 6, or 7. 1 ~Z 8 is preferably composed of nitrogen atoms and carbon atoms.
[0027] Examples of the ring structure serving as the basis of the nitrogen-containing aromatic ring (3) include indole, isoindole, indolizine, benzimidazole, benzotriazole, benzoxazole, benzisoxazole, benzothiazole, benzisothiazole, and purine, and may be benzimidazole, benzotriazole, benzothiazole, or purine, or may be benzimidazole, benzotriazole, or purine.
[0028] In the nitrogen-containing aromatic ring (1), R 10 may be a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, or may be a hydroxyl group, a mercapto group, or an alkyl group. 10 When is an alkyl group, it may contain a C1-C5 ether bond, for example CH 3 OCH 2 -, CH 3 CH 2 OCH 2 -, CH 3 OCH 2 CH 2 -, CH 3 CH 2 CH 2 OCH 2 -, CH 3 CH 2 OCH 2 CH 2 -, CH 3 OCH2 CH 2 CH 2 -, CH 3 CH 2 CH 2 CH 2 OCH 2 -, CH 3 CH 2 CH 2 OCH 2 CH 2 -, CH 3 CH 2 OCH 2 CH 2 CH 2 -, CH 3 OCH 2 CH 2 CH 2 CH 2 -, CH 3 OCH(CH 3 )-, CH 3 CH(CH 3 )OCH 2 -, CH 3 CH 2 OCH(CH 3 )-, CH 3 OC(CH 3 ) 2 - and CH 3 OCH 2 CH 2 OCH 2 - may be.
[0029] In the nitrogen-containing aromatic ring (3), R 20 may be a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, or may be a hydroxyl group, a mercapto group, or an alkyl group. 20 When is an alkyl group, it may contain a C1-C5 ether bond, for example CH 3 OCH 2 -, CH 3 CH 2 OCH 2 -, CH 3 OCH 2 CH 2 -, CH 3 CH 2 CH 2 OCH 2-, CH 3 CH 2 OCH 2 CH 2 -, CH 3 OCH 2 CH 2 CH 2 -, CH 3 CH 2 CH 2 CH 2 OCH 2 -, CH 3 CH 2 CH 2 OCH 2 CH 2 -, CH 3 CH 2 OCH 2 CH 2 CH 2 -, CH 3 OCH 2 CH 2 CH 2 CH 2 -, CH 3 OCH(CH 3 )-, CH 3 CH(CH 3 )OCH 2 -, CH 3 CH 2 OCH(CH 3 )-, CH 3 OC(CH 3 ) 2 - and CH 3 OCH 2 CH 2 OCH 2 - may be.
[0030] In the nitrogen-containing aromatic rings (1) to (3), the ring-constituting carbon atoms may have a substituent. The substituent may be a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, an alkyl group, etc., or may be a hydroxyl group, a mercapto group, a cyano group, an alkyl group, etc., or may be a hydroxyl group, a mercapto group, an alkyl group, etc. When the substituent is an alkyl group, it may contain a C1-C5 ether bond, for example, CH 3 OCH 2 -, CH 3 CH 2 OCH2 -, CH 3 OCH 2 CH 2 -, CH 3 CH 2 CH 2 OCH 2 -, CH 3 CH 2 OCH 2 CH 2 -, CH 3 OCH 2 CH 2 CH 2 -, CH 3 CH 2 CH 2 CH 2 OCH 2 -, CH 3 CH 2 CH 2 OCH 2 CH 2 -, CH 3 CH 2 OCH 2 CH 2 CH 2 -, CH 3 OCH 2 CH 2 CH 2 CH 2 -, CH 3 OCH(CH 3 )-, CH 3 CH(CH 3 )OCH 2 -, CH 3 CH 2 OCH(CH 3 )-, CH 3 OC(CH 3 ) 2 - and CH 3 OCH 2 CH 2 OCH 2 When there are a plurality of substituents, they may be the same or different.
[0031] In the nitrogen-containing aromatic ring (1), the number of substituents possessed by the ring-constituting carbon atoms can be 0 to 3, 0 to 2, 0 or 1, or 0. In the nitrogen-containing aromatic ring (2), the number of substituents possessed by the ring-constituting carbon atoms can be 0 to 4, 0 to 3, 0 to 2, 0 or 1, or 0. In the nitrogen-containing aromatic ring (3), the number of substituents on the ring-constituting carbon atoms can be 0 to 5, 0 to 4, 0 to 3, 0 to 2, 0 or 1, or 0.
[0032] In a fluoropolymer having a nitrogen-containing aromatic ring, one of the carbon atoms constituting the nitrogen-containing aromatic ring is bonded to one or two of the monomer units at the ends of the main chain of the fluoropolymer via a linker, and the structure of the linker and the nitrogen-containing aromatic ring bonded to one or two of the monomer units at the ends of the main chain of the fluoropolymer is represented by the following formula: [ka] It is preferable that the compound has any of the structures represented by the following formula: The fluoropolymer having a nitrogen-containing aromatic ring preferably has any one of these structures. That is, the fluoropolymer having a nitrogen-containing aromatic ring preferably has a carbon atom in the main chain of the fluoropolymer bonded to any one of these structures. The fluoropolymer having a nitrogen-containing aromatic ring preferably has any one of these structures at its terminal, i.e., the carbon atom of the monomer unit at the terminal of the main chain of the fluoropolymer having a nitrogen-containing aromatic ring is preferably bonded to any one of these structures.
[0033] The fluoropolymer may contain, as a main component, a monomer unit having a fluorinated aliphatic ring. "Containing a monomer unit as a main component" means that the proportion of the monomer unit in question in all monomer units in the fluoropolymer is 50 mol % or more. The proportion of monomer units having a fluorinated aliphatic ring in the fluorinated polymer is preferably at least 80 mol %, more preferably at least 90 mol %, particularly preferably 100 mol %.
[0034] The type of monomer unit having a fluorinated aliphatic ring in the fluorinated polymer may be one or more kinds, preferably one to three kinds, more preferably one or two kinds, particularly preferably one kind.
[0035] A monomer unit having a fluorinated aliphatic ring has 1, 2 or 3 etheric oxygen atoms as ring-constituting atoms, and when the fluorinated aliphatic ring contains a plurality of the etheric oxygen atoms, the etheric oxygen atoms are not adjacent to each other. The fluorine-containing aliphatic ring contains two or more (e.g., 2, 3, or 4) carbon atoms as ring-constituting atoms, and can contain one or more (e.g., 1, 2, 3, 4, 5, or 6) carbon-carbon bonds formed between adjacent carbon atoms. The fluorine-containing aliphatic ring preferably contains, as ring-constituting atoms, two or more carbon atoms and one, two or three oxygen atoms, and contains no other atoms. The fluorine-containing aliphatic ring preferably does not contain a hydrogen atom. The fluorine-containing aliphatic ring is preferably an aliphatic ring in which all hydrogen atoms are substituted with fluorine atoms.
[0036] The fluorinated alicyclic ring may be a 4-membered ring, a 5-membered ring, a 6-membered ring, or a 7-membered ring. From the viewpoint of various physical properties of the fluorinated polymer, the fluorinated alicyclic ring is preferably a 4-membered ring, a 5-membered ring, or a 6-membered ring, and more preferably a 5-membered ring. The fluorine-containing aliphatic 4-membered ring may contain 3 carbon atoms and 1 oxygen atom as ring-constituting atoms. An example of the fluorine-containing aliphatic 4-membered ring includes a perfluorooxetane ring. The fluorine-containing aliphatic 5-membered ring may contain 4 carbon atoms and 1 oxygen atom as ring-constituting atoms, or may contain 3 carbon atoms and 2 oxygen atoms as ring-constituting atoms. An example of the fluorine-containing aliphatic 5-membered ring includes a perfluorotetrahydrofuran ring and a perfluorodioxolane ring. The fluorine-containing aliphatic 6-membered ring may contain, as ring-constituting atoms, 5 carbon atoms and 1 oxygen atom, or 4 carbon atoms and 2 oxygen atoms. Examples of the fluorine-containing aliphatic 6-membered ring include a perfluorotetrahydropyran ring and a perfluoro-1,3-dioxane ring. The fluorine-containing aliphatic 7-membered ring may contain, as ring-constituting atoms, 6 carbon atoms and 1 oxygen atom, 5 carbon atoms and 2 oxygen atoms, or 4 carbon atoms and 3 oxygen atoms. Examples of the fluorine-containing aliphatic 7-membered ring include a perfluorooxepane ring, a perfluoro-1,3-dioxepane ring, a perfluoro-1,4-dioxepane ring, and a perfluoro-1,3,5-trioxepane ring.
[0037] The fluorine-containing aliphatic ring may have one or more substituents. When there are multiple substituents, they may be the same or different. The substituent may be at least one selected from the group consisting of a perfluoroalkyl group (e.g., a linear or branched C1-C5 perfluoroalkyl group) and a perfluoroalkoxy group (e.g., a linear or branched C1-C5 perfluoroalkoxy group). The number of the substituents may be one or more, and may be, for example, 1 to 4, 1 to 3, 1 to 2, 1, 2, 3, or 4. The substituent is preferably at least one group selected from the group consisting of trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, trifluoromethoxy, and perfluoroethoxy, more preferably at least one group selected from the group consisting of trifluoromethyl, perfluoroethyl, perfluoropropyl, and perfluoroisopropyl, and particularly preferably at least one group selected from the group consisting of trifluoromethyl, perfluoroethyl, and trifluoromethoxy.
[0038] The monomer unit having a fluorinated aliphatic ring may have one or two perfluoroalkylene groups in addition to the fluorinated aliphatic ring. The perfluoroalkylene groups can bond to the ring-constituting carbon atoms of the fluorinated aliphatic ring to form the main chain of the fluorinated polymer. An example of such a perfluoroalkylene group is the following formula (A1-1): [ka] In the monomer unit represented by the formula: 2 The number of perfluoroalkylene groups in the monomer unit may be one. When the monomer unit contains two perfluoroalkylene groups, they may be the same or different. An example of a perfluoroalkylene group is -(CF 2 )n-[wherein n is an integer of 1 to 4]. The perfluoroalkylene group contained in the monomer unit having a fluorine-containing aliphatic ring may have one or more perfluoroalkyl groups as a substituent. When there are a plurality of such substituents, they may be the same or different. The number of the substituents may be one or more, for example, 1 to 4, 1 to 3, 1 to 2, 1, 2, 3, or 4. The substituent is preferably at least one group selected from the group consisting of trifluoromethyl, pentafluoroethyl, heptafluoropropyl, and heptafluoroisopropyl, and more preferably at least one group selected from the group consisting of trifluoromethyl and pentafluoroethyl.
[0039] The monomer unit having a fluorinated aliphatic ring may be a monomer unit represented by any one of the following formulae (A1) to (A3) (hereinafter, these may be referred to as "monomer unit (A1)", "monomer unit (A2)" and "monomer unit (A3)", respectively). The monomer units (A1), (A2) and (A3) may be one type alone or two or more types in combination.
[0040] [ka] [In the formula, R 1 represents a fluorine atom or a C1-C5 perfluoroalkyl group.
[0041] [ka] [In the formula, R 2 ~R 5 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.]
[0042] [ka] [In the formula, R 6 ~R 9 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.]
[0043] In the monomer unit (A1), R 1 R can be a fluorine atom or a C1-C4 linear or branched perfluoroalkyl group. 1 is preferably a fluorine atom, trifluoromethyl, or perfluoroethyl, more preferably a fluorine atom or trifluoromethyl, particularly preferably a fluorine atom.
[0044] Preferred examples of the monomer unit (A1) include a monomer unit represented by the following formula (A1-1) (sometimes referred to as "monomer unit (A1-1)" in this specification). [ka]
[0045] In the monomer unit (A2), R 2 ~R 5 R can each independently be a fluorine atom, a C1-C3 linear or branched perfluoroalkyl group, or a C1-C3 linear or branched perfluoroalkoxy group. 2 ~R5 are each independently preferably a fluorine atom, trifluoromethyl, pentafluoroethyl, or trifluoromethoxy, and more preferably a fluorine atom, trifluoromethyl, or trifluoromethoxy.
[0046] Preferred monomer units (A2) are those represented by the formula (A2) 2 and R 3 each independently represents a fluorine atom, trifluoromethyl, or trifluoromethoxy; R 4 and R 5 are monomer units each independently representing a fluorine atom or trifluoromethyl.
[0047] More preferred monomer units (A2) are those represented by the formula (A2): 2 represents a fluorine atom, and R 3 represents a fluorine atom, trifluoromethyl, or trifluoromethoxy; R 4 and R 5 are monomer units each independently representing a fluorine atom or trifluoromethyl.
[0048] Particularly preferred monomer units (A2) are those represented by the formula (A2): 2 represents a fluorine atom, and R 3 represents a fluorine atom or trifluoromethoxy; R 4 and R 5 are monomer units in which each independently represents a fluorine atom or trifluoromethyl.
[0049] Preferred examples of the monomer unit (A2) include monomer units represented by the following formulas (sometimes referred to as "monomer unit (A2-1)" and "monomer unit (A2-2)" in this specification, respectively). [ka]
[0050] In the monomer unit (A3), R 6 ~R 9R can each independently be a fluorine atom, a C1-C3 linear or branched perfluoroalkyl group, or a C1-C3 linear or branched perfluoroalkoxy group. 6 ~R 9 are each independently preferably a fluorine atom, trifluoromethyl, perfluoroethyl, or trifluoromethoxy, and more preferably a fluorine atom, trifluoromethyl, or trifluoromethoxy.
[0051] Preferred monomer units (A3) are those of formula (A3) 6 ~R 9 are each independently a fluorine atom or trifluoromethyl, and are monomer units.
[0052] More preferred monomer units (A3) are those represented by the formula (A3): R 6 ~R 9 represents a fluorine atom, R 6 ~R 8 represents a fluorine atom, and R 9 represents trifluoromethyl; R 6 represents trifluoromethyl, and R 7 ~R 9 represents a fluorine atom, or R 6 and 9 represents trifluoromethyl, and R 7 and R 8 represents a fluorine atom, It is a monomer unit.
[0053] Preferred examples of the monomer unit (A3) include a monomer unit represented by the following formula (sometimes referred to as "monomer unit (A3-1)" in this specification). [ka]
[0054] The fluoropolymer may contain other monomer units in addition to the monomer units having a fluorinated aliphatic ring contained as the main component. The proportion of the other monomer units in all the monomer units in the fluoropolymer may be 50 mol % or less, preferably 20 mol % or less, more preferably 10 mol % or less, particularly preferably 0 mol %.
[0055] Other monomer units include those represented by the following formula (A11): [ka] [In the formula, R 111 represents a fluorine atom, a C1-C6 perfluoroalkyl group, or a C1-C6 perfluoroalkoxy group. Examples of monomer units include, but are not limited to, monomer units represented by the following formula (sometimes referred to as "monomer unit (A11)" in this specification). For example, the fluorine-containing polymer may be a monomer unit (A2-1) and a monomer unit of the following formula (A11-1): [ka] (sometimes referred to as "monomer unit (A11-1)" in this specification).
[0056] R 111 can be a fluorine atom, a linear or branched C1-C6 perfluoroalkyl group, or a linear or branched C1-C6 perfluoroalkoxy group. Preferred R 111 is a fluorine atom, a linear or branched C1-C4 perfluoroalkyl group, or a linear or branched C1-C4 perfluoroalkoxy group. More preferred R 111 is a fluorine atom, a linear or branched C1-C3 perfluoroalkyl group, or a linear or branched C1-C3 perfluoroalkoxy group. Particularly preferred R 111 is a fluorine atom or trifluoroalkyl.
[0057] The main monomer unit contained in fluoropolymers is -(CF 2 CF 2 )-, -(CHFCF 2 )-, -(CH 2 CF 2 )-, -(CH 2 CHF)-, -(CHFCHF)-, -(CF 2 CClF)-, -(CF 2 CFCF2-O-Rf)- (Rf is a perfluoroalkyl group having 1 to 5 carbon atoms), etc., 2 CF 2 )-, -(CF 2 The proportion of these monomer units in the fluoropolymer is preferably at least 80 mol %, more preferably at least 90 mol %, particularly preferably 100 mol %.
[0058] The monomer unit contained as a main component in the fluoropolymer is preferably the monomer unit represented by the above formula (A3-1), -(CF 2 CF 2 )-, -(CHFCF 2 )-, -(CH 2 CF 2 )-, -(CH 2 CHF)-, -(CHFCHF)-, or -(CF 2 CClF)-.
[0059] The solvent for the solvent-soluble fluoropolymer is the above-mentioned solvent (C). Therefore, unless otherwise specified, the description of solvent (C) described below can be applied to this solvent. Examples of fluorine-containing polymers soluble in solvents include polyvinyl fluoride [PVF], polyvinylidene fluoride [PVdF], vinylidene fluoride [VdF] / tetrafluoroethylene [TFE] copolymer, VdF / hexafluoropropylene [HFP] copolymer, VdF / TFE / HFP copolymer, VdF / HFP / (meth)acrylic acid copolymer, VdF / chlorotrifluoroethylene [CTFE] copolymer, VdF / pentafluoropropylene copolymer, VdF / perfluoro(alkyl vinyl ether) [PAVE] / TFE copolymer, polyfluorine-containing alkyl allyl ether, TFE / fluorine-containing alkyl allyl ether copolymer, amorphous perfluoropolymer, etc. Fluorine-containing alkyl allyl ether is CF 2 =CFCF 2 It is a monomer represented by -O-Rf (Rf is a perfluoroalkyl group having 1 to 5 carbon atoms). Amorphous perfluoropolymers contain monomer units having a fluorinated aliphatic ring as a main component, and are perfluoropolymers that do not substantially have a crystalline structure. The fluoropolymer of the present disclosure may be a fluoropolymer that is soluble in the solvents listed above, in which the polymerization site of the monomer constituting the fluoropolymer is a carbon atom and which has a nitrogen-containing aromatic ring in its structure.
[0060] The mass average molecular weight of the fluoropolymer can be, for example, in the range of 5,000 to 2,000,000, 10,000 to 1,800,000, 10,000 to 1,500,000, 30,000 to 1,500,000, or 50,000 to 1,350,000, preferably in the range of 10,000 to 1,800,000, more preferably in the range of 30,000 to 1,500,000, and particularly preferably in the range of 50,000 to 1,350,000. The lower limit of the mass average molecular weight of the fluoropolymer can be, for example, 5000 or more, preferably 10000 or more, more preferably 30000 or more, and particularly preferably 50000 or more. The upper limit of the mass average molecular weight of the fluoropolymer can be, for example, 2000000 or less, preferably 1800000 or less, more preferably 1500000 or less, and particularly preferably 1350000 or less. The lower limit and upper limit may be appropriately combined. The mass average molecular weight of the fluoropolymer is a value determined by GPC (gel permeation chromatography) method (particularly the GPC method described in the Examples).
[0061] The fluoropolymer can be synthesized by a known method. For example, it can be synthesized by polymerizing a monomer corresponding to a structural unit of the fluoropolymer. As the polymerization method, radical polymerization, bulk polymerization, solution polymerization, suspension polymerization, emulsion polymerization, etc. can be used. As the method for producing the fluoropolymer, the method for producing the fluoropolymer of the present disclosure is preferable.
[0062] The fluorine-containing polymer having a nitrogen-containing aromatic ring can be used in the applications in which the fluorine-containing polymer (A) was used. The fluorine-containing polymer having a nitrogen-containing aromatic ring has high adhesion to metals, and can therefore be used in applications such as sealing resins (e.g., sealing resins for optical elements, sealing resins for semiconductor substrates), adhesives, particularly adhesives for bonding a pellicle film to a frame, and adhesives for bonding a fluororesin lining to a metal substrate.
[0063] One embodiment of the present disclosure is an encapsulating resin that contains a fluorine-containing polymer having a nitrogen-containing aromatic ring.
[0064] One embodiment of the present disclosure is a fluororesin adhesive containing a fluoropolymer having a nitrogen-containing aromatic ring. The fluororesin adhesive may be used for bonding a pellicle membrane to a frame, or may be used for bonding a fluororesin lining to a metal substrate.
[0065] One embodiment of the present disclosure is an optical device including the sealing resin or the fluororesin adhesive.
[0066] One embodiment of the present disclosure is a pellicle including a pellicle membrane and a frame, the pellicle including a fluoropolymer having a nitrogen-containing aromatic ring. The pellicle membrane and the frame may be bonded together with the fluororesin adhesive.
[0067] One embodiment of the present disclosure is an exposure processing method in photolithography using a light source having an emission wavelength of 200 nm or less, the pellicle being used. In the exposure processing method, the light source having a wavelength of 200 nm or less may be a fluorine gas excimer laser or a fluorine gas excimer laser.
[0068] Method for producing fluoropolymer having nitrogen-containing aromatic ring The fluoropolymer having a nitrogen-containing aromatic ring can be produced by reacting a fluoropolymer (A) containing, as a main component, a monomer unit having a fluorinated aliphatic ring with a reactive reagent (B) having a nitrogen-containing aromatic ring in a solvent (C) (preferably an aprotic solvent).
[0069] Fluorine-containing polymer (A) The fluoropolymer (A) contains a monomer unit having a fluorinated aliphatic ring as a main component. The fluoropolymer (A) may be the same polymer as the fluoropolymer containing a monomer unit having a fluorinated aliphatic ring as described above as a main component, except that it does not have a nitrogen-containing aromatic ring and a linker. Therefore, various explanations regarding the fluoropolymer containing a monomer unit having a fluorinated aliphatic ring as a main component can be applied to the fluoropolymer (A). The fluoropolymer (A) can be produced by a known method, for example, the method described in WO 2021 / 085349.
[0070] The terminal group of the fluoropolymer (A) may be a group corresponding to the polymerization initiator used in the production of the fluoropolymer (A). The terminal group may be, for example, a group represented by the following formula (K): [ka] [In the formula, v represents 0 or 1; R 40 represents an alkyl group or an alkoxy group. The group (K) is represented by, but is not limited to, these. In the production method of the present disclosure, the terminal group of the fluoropolymer (A) may be -COF. The terminal groups may be the same or different. R 40The alkyl group in may be a C1-C6 alkyl group, a C1-C5 alkyl group, etc., preferably a C1-C4 alkyl group, more preferably a C1-C3 alkyl group. The alkyl group may be linear or branched. R 40 The alkoxy group in may be a C1-C6 alkoxy group, a C1-C5 alkoxy group, etc., preferably a C1-C4 alkoxy group, more preferably a C1-C3 alkoxy group. The alkoxy group may be linear or branched. R 40 may be, for example, a linear or branched C1-C6 alkyl group or a linear or branched C1-C6 alkoxy group, a linear or branched C1-C5 alkyl group or a linear or branched C1-C5 alkoxy group, preferably a linear or branched C1-C4 alkyl group or a linear or branched C1-C4 alkoxy group, and more preferably a linear or branched C1-C3 alkyl group or a linear or branched C1-C3 alkoxy group. R 40 R is preferably an alkoxy group rather than an alkyl group. 40 The alkyl group and alkoxy group in the formula (I) do not contain an ether bond.
[0071] The terminal group is a COF group or a -CF 2 It may be -O-CO-O-normal propyl.
[0072] In the present disclosure, a nitrogen-containing aromatic ring can be introduced into a fluoropolymer (A) having such an end group, preferably a fluoropolymer (A) having an end group of group (K) or -COF, by reacting it with a reactive reagent (B) in a solvent (C). When a fluoropolymer (A) having an end group of group (K) is used, the step of returning to -COF can be omitted. An example of the reaction step is outlined below. In the reaction step, the solvent (C) is omitted. [ka] In the conventional method, the fluoropolymer (A) is heated to convert the terminals to -COF and then hydrolyzed, which results in the by-production of hydrofluoric acid. In the production method of the present disclosure, the use of water is not essential, and therefore the by-production of hydrofluoric acid is prevented or reduced.
[0073] Reactive reagents having nitrogen-containing aromatic rings (B) The reactive reagent (B) having a nitrogen-containing aromatic ring may be a nucleophile. Examples of the reactive reagent (B) having a nitrogen-containing aromatic ring include 1-(3-aminopropyl)imidazole, 4-(1H-benzimidazol-2-yl)aniline, 2-aminobenzimidazole, 5-aminobenzimidazole, 5-amino-2-mercaptobenzimidazole, 3-amino-1H-1,2,4-triazole, 4-amino-1,2,4-triazole, 4-amino-4H-1,2,4-triazole, 3,5-diamino-1,2,4-triazole, 1-aminobenzotriazole, 2-aminobenzotriazole, 1H-1,2,3- Benzotriazole-5-amine, 5-aminobenzotriazole, melamine monomer, 2-methoxy-4-methyl-6-(methylamino)-1,3,5-triazine, 2,4-diamino-6-butylamino-1,3,5-triazine, 2-amino-4-methoxy-6-methyl-1,3,5-triazine, 2,4-diamino-6-methyl-1,3,5-triazine, ammelide, ammeline, 2,4-diamino-1,3,5-triazine, 2,4-diamino-6-isopropoxy-1,3,5-triazine, 2,4-diamino-6-methoxy-1,3, 5-Triazine, 2-aminopurine, 8-azaadenine, 6-O-methylguanine, 2,6-diaminopurine, N-methoxy-7H-purin-6-amine, 1H-1,2,4-triazole-3-thiol, 4-methyl-4H-1,2,4-triazole-3-thiol, 2-mercaptobenzimidazole, 2-mercapto-1-methylbenzimidazole, 5-ethoxy-2-mercaptobenzimidazole, 2-mercapto-5-methylbenzimidazole, 2-mercapto-5-methoxybenzimidazole, thiocyanuric acid, 6-(dibutyl
[0043] The compound may be 1H-benzotriazole-1-methanol, 2-aminooxazole, 5-amino-3-methylisoxazole, 3-hydroxy-5-methylisoxazole, muscimol, 3-amino-5-tert-butylisoxazole, 2-aminobenzoxazole, or 2-mercaptobenzoxazole.
[0074] Examples of the reactive reagent (B) having a nitrogen-containing aromatic ring include 1-(3-aminopropyl)imidazole, 4-(1H-benzimidazol-2-yl)aniline, 2-aminobenzimidazole, 5-aminobenzimidazole, 3-amino-1H-1,2,4-triazole, 4-amino-1,2,4-triazole, 4-amino-4H-1,2,4-triazole, 1-aminobenzotriazole, 2-aminobenzotriazole, 1H-1,2,3-benzotriazole-5-amine, 5-aminobenzotriazole, 2-amino-4-methoxy-6-methyl-1,3,5-triazine, 2-aminopurine, 8-azaadenine, N-methoxy-7H-purine-6-amine, 1H-1 ,2,4-triazole-3-thiol, 4-methyl-4H-1,2,4-triazole-3-thiol, 2-mercaptobenzimidazole, 2-mercapto-1-methylbenzimidazole, 2-mercapto-5-methylbenzimidazole, thiocyanuric acid, 6-mercaptopurine, 2-hydroxybenzimidazole, 2-(hydroxymethyl)benzimidazole, 2-(3-hydroxypropyl)benzimidazole, 1H-benzotriazole-1-methanol, 2-aminooxazole, 5-amino-3-methylisoxazole, 3-hydroxy-5-methylisoxazole, 2-aminobenzoxazole, 2-mercaptobenzoxazole.
[0075] The reactive reagent (B) having a nitrogen-containing aromatic ring is represented by the following formula: [ka] The compound may be at least one selected from the compounds represented by the following formula:
[0076] Solvent (C) The composition of the present disclosure contains a solvent (C). The solvent (C) is preferably an aprotic solvent. The aprotic solvent may be at least one selected from the group consisting of perfluorosolvents and non-perfluorosolvents. Perfluorosolvents are aprotic solvents that contain fluorine and carbon atoms but do not contain hydrogen atoms. Examples of perfluorosolvents include perfluoroaromatic compounds, perfluorotrialkylamines, perfluoroalkanes, and perfluorocyclic ethers. Perfluorosolvents can be used alone or in combination of two or more. The non-perfluoro solvent is an aprotic solvent that contains a fluorine atom, a carbon atom, and a hydrogen atom. Examples of the non-perfluoro solvent include hydrofluorocarbons, hydrofluoroethers, and olefin compounds containing at least one chlorine atom. The non-perfluoro solvent can be used alone or in combination of two or more. The non-perfluoro solvent is a preferred solvent because it can dissolve a polymer containing the structural unit (A3) as a main component, which has been considered to have low solubility, at a high concentration.
[0077] The perfluoro aromatic compound may have, for example, one or more perfluoroalkyl groups. The aromatic ring of the perfluoro aromatic compound may be at least one ring selected from the group consisting of a benzene ring, a naphthalene ring, and an anthracene ring. The perfluoro aromatic compound may have one or more aromatic rings (e.g., 1, 2, or 3). The perfluoroalkyl group as a substituent is, for example, a linear or branched C1-C6, C1-C5, or C1-C4 perfluoroalkyl group, preferably a linear or branched C1-C3 perfluoroalkyl group, more preferably trifluoromethyl or pentafluoroethyl. The number of the substituents is, for example, 1 to 4, preferably 1 to 3, and more preferably 1 or 2. When there are a plurality of substituents, they may be the same or different. Examples of perfluoroaromatic compounds include perfluorobenzene, perfluorotoluene, perfluoroxylene, and perfluoronaphthalene. Preferred examples of the perfluoroaromatic compound include perfluorobenzene and perfluorotoluene.
[0078] Perfluorotrialkylamine is, for example, an amine substituted with three linear or branched perfluoroalkyl groups. The number of carbon atoms in the perfluoroalkyl groups is, for example, 1 to 10, preferably 1 to 5, and more preferably 1 to 4. The perfluoroalkyl groups may be the same or different, and are preferably the same. Examples of perfluorotrialkylamines include perfluorotrimethylamine, perfluorotriethylamine, perfluorotripropylamine, perfluorotriisopropylamine, perfluorotributylamine, perfluorotrisec-butylamine, perfluorotritert-butylamine, perfluorotripentylamine, perfluorotriisopentylamine, and perfluorotrineopentylamine. Preferred examples of the perfluorotrialkylamine include perfluorotripropylamine and perfluorotributylamine.
[0079] The perfluoroalkane is, for example, a linear, branched, or cyclic C3-C12 (preferably C3-C10, more preferably C3-C6) perfluoroalkane. Examples of perfluoroalkanes include perfluoropentane, perfluoro-2-methylpentane, perfluorohexane, perfluoro-2-methylhexane, perfluoroheptane, perfluorooctane, perfluorononane, perfluorodecane, perfluorocyclohexane, perfluoro(methylcyclohexane), perfluoro(dimethylcyclohexane) (e.g., perfluoro(1,3-dimethylcyclohexane)), and perfluorodecalin. Preferred examples of perfluoroalkanes include perfluoropentane, perfluorohexane, perfluoroheptane, and perfluorooctane.
[0080] The hydrofluorocarbon is, for example, a C3-C8 hydrofluorocarbon. Examples of hydrofluorocarbons are CF 3 CH 2 CF 2 H, C.F. 3CH 2 CF 2 CH 3 , C.F. 3 CHFCHFC 2 F 5 , 1,1,2,2,3,3,4-heptafluorocyclopentane, CF 3 CF 2 CF 2 CF 2 CH 2 CH 3 , C.F. 3 CF 2 CF 2 CF 2 CF 2 CHF 2 , and C.F. 3 CF 2 CF 2 CF 2 CF 2 CF 2 CH 2 CH 3 Includes: A preferred example of a hydrofluorocarbon is CF 3 CH 2 CF 2 H, C.F. 3 CH 2 CF 2 CH 3 Includes:
[0081] The perfluorocyclic ether is, for example, a perfluorocyclic ether which may have one or more perfluoroalkyl groups. The ring of the perfluorocyclic ether may be a 3- to 6-membered ring. The ring of the perfluorocyclic ether may have one or more oxygen atoms as ring-constituting atoms. The ring preferably has one or two oxygen atoms, more preferably one oxygen atom. The perfluoroalkyl group as a substituent is, for example, a linear or branched C1-C6, C1-C5, or C1-C4 perfluoroalkyl group. A preferred perfluoroalkyl group is a linear or branched C1-C3 perfluoroalkyl group. The number of the substituents is, for example, 1 to 4, preferably 1 to 3, and more preferably 1 or 2. When there are a plurality of substituents, they may be the same or different. Examples of perfluoro cyclic ethers include perfluorotetrahydrofuran, perfluoro-5-methyltetrahydrofuran, perfluoro-5-ethyltetrahydrofuran, perfluoro-5-propyltetrahydrofuran, perfluoro-5-butyltetrahydrofuran, and perfluorotetrahydropyran. Preferred examples of the perfluoro cyclic ether include perfluoro-5-ethyltetrahydrofuran and perfluoro-5-butyltetrahydrofuran.
[0082] Hydrofluoroethers are, for example, fluorine-containing ethers. The global warming potential (GWP) of the hydrofluoroether is preferably not more than 600, more preferably not more than 400, and particularly preferably not more than 300. The lower limit of the global warming potential (GWP) of the hydrofluoroether may be 1 or more, or 5 or more. An example of a hydrofluoroether is CF 3 CF 2 CF 2 CF 2 OCH 3、 CF 3 CF 2 CF(CF 3 )OCH 3、 CF 3 CF(CF 3 )CF 2 OCH 3、 (CF 3 ) 2 CFCF 2 OCH 3、 CF 3 CF 2 CF 2 CF 2 O.C. 2 H 5 , (CF 3 ) 2 CFCF 2 O.C. 2 H 5、 CF 3 CH 2 OCF 2 CHF 2 , C 2 F 5 CF(OCH 3 ) C3 F 7 , (CF 3 ) 2 CHOCH 3 , (CF 3 ) 2 CFOCH 3 , CHF 2 CF 2 OCH 2 CF 3 , CHF 2 CF 2 CH 2 OCF 2 CHF 2 , C.F. 3 CHFCF 2 OCH 3 , C.F. 3 CHFCF 2 OCF 3 , trifluoromethyl 1,2,2,2-tetrafluoroethyl ether (HFE-227me), difluoromethyl 1,1,2,2,2-pentafluoroethyl ether (HFE-227mc), trifluoromethyl 1,1,2,2-tetrafluoroethyl ether (HFE-227pc), difluoromethyl 2,2,2-trifluoroethyl ether (HFE-245mf), 2,2-difluoroethyl trifluoromethyl ether (HFE-245pf), 1,1,2,3,3-hexafluoropropyl methyl ether (CF 3 CHFCF 2 OCH 3 ), 1,1,1,2,2-tetrafluoroethyl 2,2,2-trifluoroethyl ether (CHF 2 CF 2 OCH 2 CF 3 ), and 1,1,1,3,3,3-hexafluoro-2-methoxypropane ((CF 3 ) 2 CHOCH 3 ). A preferred example of a hydrofluoroether is CF 3 CF 2 CF 2 CF 2 OCH 3、 (CF 3 ) 2 CFCF 2 OCH3、 CF 3 CF 2 CF 2 CF 2 O.C. 2 H 5 , (CF 3 ) 2 CFCF 2 O.C. 2 H 5、 CF 3 CH 2 OCF 2 CHF 2 , C 2 F 5 CF(OCH 3 ) C 3 F 7 , 1,1,2,3,3-hexafluoropropyl methyl ether (CF 3 CHFCF 2 OCH 3 ), 1,1,1,2,2-tetrafluoroethyl 2,2,2-trifluoroethyl ether (CHF 2 CF 2 OCH 2 CF 3 ), and 1,1,1,3,3,3-hexafluoro-2-methoxypropane ((CF 3 ) 2 CHOCH 3 ).
[0083] The hydrofluoroethers include a compound represented by the following formula (C-1), a compound represented by the following formula (C-2), a compound represented by the following formula (C-3), a compound represented by the following formula (C-4), a compound represented by the following formula (CF 3 ) 2 CHOCH 3 , (CF 3 ) 2 CFOCH 3 , C.F. 3 CHFCF 2 OCH 3 , and C.F. 3 CHFCF 2 OCF 3 It may be at least one selected from the group consisting of: Formula (C-1): F(CF 2 ) pO(CH 2 ) q H (C-1) [In the formula, p is an integer of 1 to 6, and q is an integer of 1 to 4.] Formula (C-2): H(CF 2 ) p O(CF 2 ) q F (C-2) [In the formula, p and q are as defined above.] Formula (C-3): H(CF 2 ) p O(CH 2 ) q H (C-3) [In the formula, p and q are as defined above.] Formula (C-4): X(CF 2 ) p CH 2 O(CF 2 ) q H (C-4) [In the formula, X represents a fluorine atom or a hydrogen atom, and p and q are as defined above.]
[0084] The hydrofluoroether is represented by the following formula (C-5): R 21 -OR 22 (C-5) [In the formula, R 21 is a straight-chain or branched-chain propyl or butyl group in which one or more hydrogen atoms have been replaced by fluorine atoms; R 22 is methyl or ethyl. The compound represented by formula (C-5) is preferably a compound represented by R 21 is perfluorobutyl, and R 22 is methyl or ethyl.
[0085] The olefin compound containing at least one chlorine atom is a C2-C4 (preferably C2-C3) olefin compound containing at least one chlorine atom in its structure. The olefin compound containing at least one chlorine atom is a hydrocarbon having 2 to 4 carbon atoms and having 1 or 2 (preferably 1) double bonds, in which at least one hydrogen atom bonded to a carbon atom is substituted with a chlorine atom. The number of chlorine atoms is from 1 to the maximum number that can be substituted. The number of chlorine atoms can be, for example, 1, 2, 3, 4, 5, etc. The olefinic compound that contains at least one chlorine atom may also contain at least one (eg, 1, 2, 3, 4, 5, etc.) fluorine atom. Examples of olefinic compounds containing at least one chlorine atom are CH 2 =CHCl, CHCl=CHCl, CCl 2 =CHCl, CCl 2 =CCl 2 , C.F. 3 CH=CHCl, CHF 2 CF=CHCl, CFH 2 CF = CHCl, CF 3 CCl=CFCl, CF 2 HCl=CFCl, CFH 2 Includes Cl=CFCl. Preferred examples of olefin compounds containing at least one chlorine atom are CHCl=CHCl, CHF 2 CF = CHCl, CF 3 CH=CHCl, CF 3 CCl=CFCl.
[0086] As the aprotic solvent, hydrofluoroether is preferred because it has a small environmental impact when used and can be easily distilled off from the polymer.
[0087] Solvent (C) is perfluorobenzene, (CF 3 ) 2 CFCF 2 OCH 3 , C.F. 3 CF 2 CF 2 CF2 OCH 3 , (CF 3 ) 2 CFCF 2 O.C. 2 H 5 , and C.F. 3 CF 2 CF 2 CF 2 O.C. 2 H 5 It is preferable that the material is at least one selected from the group consisting of:
[0088] The global warming potential (GWP) of the aprotic solvent can be 600 or less, 400 or less, etc., preferably 375 or less, more preferably 350 or less, and particularly preferably 0. The lower limit of the global warming potential (GWP) of the aprotic solvent may be 1 or more, or 5 or more.
[0089] A step of reacting the fluorine-containing polymer (A) with a reactive reagent (B) having a nitrogen-containing aromatic ring in a solvent (C). The amount of the reactive reagent (B) used in this reaction can be, for example, 0.01 mass% or more, 0.05 mass% or more, 0.1 mass% or more, 0.1 to 100 mass%, 0.1 to 50 mass%, or 0.1 to 20 mass% relative to the mass of the fluoropolymer (A). The amount of the solvent (C) used in this reaction may be an amount that can function as a solvent based on common technical knowledge, etc. For example, it may be 50% by mass or more, 100% by mass or more, 200% by mass or more, 200 to 5000% by mass, 200 to 3000% by mass, or 200 to 1000% by mass relative to the mass of the fluoropolymer (A).
[0090] The reaction temperature can be, for example, −20 to 120° C., 0 to 100° C., or 5 to 80° C. The reaction time can be, for example, 0.01 to 48 hours, 0.1 to 48 hours, or 0.1 to 24 hours.
[0091] This reaction may be carried out in the presence or absence of an inert gas (e.g., nitrogen gas). This reaction may be carried out under reduced pressure, atmospheric pressure, or under pressure.
[0092] The fluoropolymer having a nitrogen-containing aromatic ring produced in this reaction can be isolated or purified, if desired, by a conventional method such as extraction, dissolution, concentration, filtration, precipitation, dehydration, adsorption, chromatography, etc., or a combination of these.
[0093] Composition containing fluorine-containing polymer having nitrogen-containing aromatic ring and hydrogen fluoride One embodiment of the present disclosure is a composition containing a fluorine-containing polymer having a nitrogen-containing aromatic ring and hydrogen fluoride. The content of hydrogen fluoride in the composition may be 0.005 ppm to 50 ppm relative to the content of the fluorine-containing polymer having a nitrogen-containing aromatic ring. The composition of the present disclosure is useful as a supply source of a fluorine-containing polymer having a nitrogen-containing aromatic ring, since the content of hydrogen fluoride is small and the production cost is reduced by the production method of the present disclosure. The composition of the present disclosure can be produced, for example, by the production method of the present disclosure. The above-mentioned explanation of the fluorine-containing polymer having a nitrogen-containing aromatic ring of the present disclosure can be applied to the fluorine-containing polymer having a nitrogen-containing aromatic ring in the composition of the present disclosure.
[0094] The content of hydrogen fluoride in the composition may be from 0.005 ppm to 50 ppm, or may be from 0.005 ppm to 10 ppm, relative to the content of the fluoropolymer having a nitrogen-containing aromatic ring.
[0095] The composition may further contain other components in addition to the fluoropolymer having a nitrogen-containing aromatic ring and hydrogen fluoride. The amount of each component contained in the composition can be adjusted by setting the reaction conditions (e.g., temperature, time, type and amount of raw material, type and amount of solvent, type and amount of catalyst). In addition, the amount of each component can be adjusted by purification after production of the fluoropolymer having a nitrogen-containing aromatic ring.
[0096] The other components are, for example, the reactive reagent (B), an alcohol by-produced when a terminal group reacts with the reactive reagent (B), a salt obtained by reacting the reactive reagent (B) with hydrogen fluoride, and the like.
[0097] Examples of alcohols produced as a by-product when an end group reacts with the reactive reagent (B) include MeOH, EtOH, n-PrOH, i-PrOH, n-BuOH, s-BuOHt-BuOH, 1-undecanol, 2-ethylhexanol, 3,5,5-trimethylhexanol, and 4-tert-butylcyclohexyl alcohol.
[0098] Examples of salts obtained by reacting the reactive reagent (B) with hydrogen fluoride include 1-(3-aminopropyl)imidazole hydrofluoride, 4-(1H-benzimidazol-2-yl)aniline hydrofluoride, 2-aminobenzimidazole hydrofluoride, 5-aminobenzimidazole hydrofluoride, 3-amino-1H-1,2,4-triazole hydrofluoride, 4-amino-1,2,4-triazole hydrofluoride, 4-amino-4H-1,2,4-triazole hydrofluoride, 1-aminobenzotriazole hydrofluoride, 2-aminobenzotriazole hydrofluoride, 1H-1,2,3-benzotriazole-5-amine hydrofluoride, 5-aminobenzotriazole hydrofluoride, 2-amino-4-methoxy-6-methyl-1,3,5-triazine hydrofluoride, 2-aminopurine hydrofluoride, 8-azaa Examples of such hydrofluoric acid salts include denine hydrofluoric acid salt, N-methoxy-7H-purine-6-amine hydrofluoric acid salt, 2-mercaptobenzimidazole hydrofluoric acid salt, 2-mercapto-1-methylbenzimidazole hydrofluoric acid salt, 2-mercapto-5-methylbenzimidazole hydrofluoric acid salt, 6-mercaptopurine hydrofluoric acid salt, 2-hydroxybenzimidazole hydrofluoric acid salt, 2-(hydroxymethyl)benzimidazole hydrofluoric acid salt, 2-(3-hydroxypropyl)benzimidazole hydrofluoric acid salt, 1H-benzotriazole-1-methanol hydrofluoric acid salt, 2-aminooxazole hydrofluoric acid salt, 5-amino-3-methylisoxazole hydrofluoric acid salt, 3-hydroxy-5-methylisoxazole hydrofluoric acid salt, 2-aminobenzoxazole hydrofluoric acid salt, and 2-mercaptobenzoxazole hydrofluoric acid salt.
[0099] When the composition contains other components, the content thereof may be from 0.1 ppm to 100 ppm, or may be from 0.1 ppm to 10 ppm, based on the content of the fluoropolymer having a nitrogen-containing aromatic ring.
[0100] Although the embodiments have been described above, it will be understood that various changes in form and details are possible without departing from the spirit and scope of the claims. EXAMPLES
[0101] Hereinafter, one embodiment of the present disclosure will be described in more detail with reference to examples, but the present disclosure is not limited thereto. The materials, terms, measurement methods, etc. used in the examples are as follows.
[0102] (Monomer unit of fluoropolymer) The molar ratio of tetrafluoroethylene units to perfluoro-n-propoxyethylene units in Polymer 1 is 98:2. [ka]
[0103] (End structure of fluoropolymer) n-Pr represents normal propyl. [ka]
[0104] (Reactive Reagents) [ka]
[0105] (solvent) PFB: Perfluorobenzene HFE7100: Hydrofluoroether (Novec7100 manufactured by 3M) HFE7200: Hydrofluoroether (Novec7200 manufactured by 3M) NMP: N-methyl-2-pyrrolidone water
[0106] (Method of measuring hydrogen fluoride content) 0.1 g to 5.0 g of the fluoropolymer was placed in a 1 / 4 inch straight union manufactured by Swagelok Corporation, and both ends were closed with caps. The mixture was heated at 270°C for 30 minutes and allowed to cool, after which one of the caps was opened and the hydrogen fluoride content was measured using a 17L hydrogen fluoride gas detector tube manufactured by Gastec Corporation. The weight of hydrogen fluoride was calculated from the measurement result and the gas state equation, and the hydrogen fluoride content in the polymer was calculated from the ratio of this to the weight of the polymer used in the measurement.
[0107] Comparative Example 1 1g of polymer 1 having terminal structure 1 was added to a glass vial, and 5g of PFB was added thereto and stirred for one day. When the state of dissolution of the polymer was checked after one day, a white solid remained and it was not dissolved. 0.1g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and IR was measured, and it was confirmed that there was no change in the terminal structure before and after the addition of the reactive reagent.
[0108] Comparative Example 2 1 g of polymer 1 having terminal structure 2 was added to a glass vial, and 5 g of PFB was added thereto and stirred for one day. When the state of dissolution of the polymer was checked after one day, a white solid remained and it had not dissolved. 0.1 g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and IR was measured, and it was confirmed that there was no change in the terminal structure before and after the addition of the reactive reagent.
[0109] Comparative Example 3 1 g of polymer 2 having terminal structure 2 was added to a glass vial, and 5 g of PFB was added thereto and stirred for one day. When the state of dissolution of the polymer was checked after one day, a white solid remained and it had not dissolved. 0.1 g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and IR was measured, and it was confirmed that there was no change in the terminal structure before and after the addition of the reactive reagent.
[0110] Comparative Example 4 1 g of polymer 3 having terminal structure 1 was placed in a glass vial, and 5 g of water was added thereto and stirred at 50°C for one day. After one day, the state of dissolution of the polymer was checked and it was found that a white solid remained and the polymer had not dissolved. Furthermore, the pH was measured using pH test paper and found to be 1 to 2, indicating the presence of hydrofluoric acid water. The solvent was distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, revealing that a peak (1880 cm) due to terminal structure 1 was observed. -1 ) disappeared, and a new peak (1809 cm ) which is thought to be the COOH terminal was observed. -1 , 1772cm -1 ) was confirmed.
[0111] Example 1 1 g of polymer 2 having terminal structure 1 was added to a glass vial, and 5 g of NMP was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and as a result, a peak (1880 cm) derived from terminal structure 1 was detected. -1 ) disappeared, and a peak (1613 cm ) thought to be due to the group newly introduced by the reactive reagent 1 appeared. -1 , 3341cm -1) was confirmed. The HF content was 0.04 ppm. The terminal structure of this polymer is as follows: [ka]
[0112] Example 2 1 g of polymer 2 having terminal structure 2 was added to a glass vial, and 5 g of NMP was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and as a result, a peak (1830 cm) due to terminal structure 2 was observed. -1 ) disappeared, and a peak (1613 cm ) thought to be due to the group newly introduced by the reactive reagent 1 appeared. -1 , 3341cm -1 ) was confirmed. The HF content was 0.08 ppm. The terminal structure of this polymer is as follows: [ka]
[0113] Example 3 1 g of polymer 3 having terminal structure 1 was added to a glass vial, and 5 g of PFB was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and a peak (1882 cm) due to terminal structure 1 was detected. -1 ) disappeared, and a peak (1681 cm ) thought to be due to the group newly introduced by the reactive reagent 1 appeared. -1 , 3129cm -1) was confirmed. The HF content was 0.01 ppm. The terminal structure of this polymer is as follows: [ka]
[0114] Example 4 1 g of polymer 3 having terminal structure 2 was added to a glass vial, and 5 g of PFB was added thereto and stirred for one day. After one day, the solubility was checked and the polymer was found to be completely dissolved in a homogeneous solution. 0.1 g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and a peak (1810 cm) due to terminal structure 2 was detected. -1 ) disappeared, and a peak (1681 cm ) thought to be due to the group introduced by reactive reagent 1 appeared. -1 , 3129cm -1 ) was confirmed. The HF content was 1.64 ppm. The terminal structure of this polymer is as follows: [ka]
[0115] Example 5 1 g of polymer 3 having terminal structure 1 was added to a glass vial, and 5 g of PFB was added thereto and stirred for one day. After one day had passed, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 2 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and as a result, a peak (1882 cm) due to terminal structure 1 was detected. -1 ) disappeared, and a peak (1627 cm ) thought to be due to the group newly introduced by reactive reagent 2 appeared. -1 , 3099cm -1) was confirmed. The HF content was 0.33 ppm. The terminal structure of this polymer is as follows: [ka]
[0116] Example 6 1 g of polymer 3 having terminal structure 2 was added to a glass vial, and 5 g of PFB was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 2 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and a peak (1810 cm) due to terminal structure 2 was detected. -1 ) disappeared, and a peak (1627 cm ) thought to be due to the group newly introduced by reactive reagent 2 appeared. -1 , 3099cm -1 ) was confirmed. The HF content was 0.65 ppm. The terminal structure of this polymer is as follows: [ka]
[0117] Example 7 1 g of polymer 3 having terminal structure 1 was added to a glass vial, and 5 g of PFB was added thereto and stirred for one day. After one day had passed, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 3 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and as a result, a peak (1882 cm) due to terminal structure 1 was detected. -1 ) disappeared, and a peak (1643 cm) thought to be due to the group newly introduced by the reactive reagent 3 appeared. -1 , 3104cm -1) was confirmed. The HF content was 0.33 ppm. The terminal structure of this polymer is as follows: [ka]
[0118] Example 8 1 g of polymer 3 having terminal structure 1 was added to a glass vial, and 5 g of PFB was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 4 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and a peak (1882 cm) due to terminal structure 1 was detected. -1 ) disappeared, and a peak (1528 cm ) thought to be due to the group newly introduced by the reactive reagent 4 appeared. -1 ) was confirmed. The HF content was 2.46 ppm. The terminal structure of this polymer is as follows: [ka]
[0119] Example 9 1 g of polymer 3 having terminal structure 1 was added to a glass vial, and 5 g of HFE7100 was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and as a result, a peak (1882 cm) due to terminal structure 1 was detected. -1 ) disappeared, and a peak (1681 cm ) thought to be due to the group newly introduced by the reactive reagent 1 appeared. -1 , 3129cm -1) was confirmed. The HF content was 0.16 ppm. The terminal structure of this polymer is as follows: [ka]
[0120] Example 10 1 g of polymer 3 having terminal structure 1 was added to a glass vial, and 5 g of HFE7100 was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 4 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and as a result, a peak (1882 cm) due to terminal structure 1 was detected. -1 ) disappeared, and a peak (1528 cm ) thought to be due to the group newly introduced by the reactive reagent 4 appeared. -1 ) was confirmed. The HF content was 0.49 ppm. The terminal structure of this polymer is as follows: [ka]
[0121] Example 11 1 g of polymer 3 having terminal structure 1 was added to a glass vial, and 5 g of HFE7200 was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 1 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and as a result, a peak (1882 cm) due to terminal structure 1 was detected. -1 ) disappeared, and a peak (1681 cm ) thought to be due to the group newly introduced by the reactive reagent 1 appeared. -1 , 3129cm -1) was confirmed. The HF content was 3.27 ppm. The terminal structure of this polymer is as follows: [ka]
[0122] Example 12 1 g of polymer 3 having terminal structure 1 was added to a glass vial, and 5 g of HFE7200 was added thereto and stirred for one day. After one day, the state of dissolution of the polymer was confirmed, and the polymer was completely dissolved to form a homogeneous solution. 0.1 g of reactive reagent 4 was added thereto and stirred for one day at 50°C. After stirring, the solvent and reactive reagent were distilled off, and the polymer was thoroughly washed with acetone and then dried at 80°C under reduced pressure for one day. The obtained polymer was made into a film and its IR was measured, and as a result, a peak (1882 cm) due to terminal structure 1 was detected. -1 ) disappeared, and a peak (1528 cm ) thought to be due to the group newly introduced by the reactive reagent 4 appeared. -1 ) was confirmed. The HF content was 0.04 ppm. The terminal structure of this polymer is as follows: [ka]
Claims
1. A fluoropolymer soluble in a solvent, the polymerization site of a monomer constituting the fluoropolymer is a carbon atom, and the fluoropolymer has a nitrogen-containing aromatic ring in its structure, A fluoropolymer, wherein the nitrogen-containing aromatic ring is bonded to one or two of the monomer units at the ends of the main chain of the fluoropolymer.
2. The nitrogen-containing aromatic ring is The following formula (1): 【Chemistry 1】 [A is an oxygen atom, a sulfur atom, or a substituent R 10 represents a nitrogen atom which may be substituted by R 10 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, X 1 ~X 4 any one of X represents a carbon atom, and the other X independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring represented by the formula (1), The following formula (2): 【Chemistry 2】 [Y 1 ~Y 6 represents a carbon atom, and the other Y independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring (2) represented by the formula: The following formula (3): 【Chemistry 3】 [B is an oxygen atom, a sulfur atom, or a substituent R 20 represents a nitrogen atom which may be substituted by R 20 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, Z 1 ~Z 8 any one of Z represents a carbon atom, and the other Z independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. The fluoropolymer according to claim 1, wherein the nitrogen-containing aromatic ring (3) is at least one selected from the group consisting of:
3. 2. The fluorine-containing polymer according to claim 1, wherein the basic skeleton of the nitrogen-containing aromatic ring is at least one selected from the group consisting of pyrrole, pyrazole, imidazole, triazole, pyridine, pyridazine, pyrimidine, pyrazine, triazine, indole, isoindole, indolizine, benzimidazole, benzotriazole, oxazole, isoxazole, benzoxazole, benzisoxazole, thiazole, isothiazole, benzothiazole, benzisothiazole, and purine.
4. 2. The fluorine-containing polymer according to claim 1, wherein the basic skeleton of the nitrogen-containing aromatic ring is at least one selected from the group consisting of imidazole, triazole, triazine, benzimidazole, benzotriazole, oxazole, isoxazole and purine.
5. 2. The fluoropolymer according to claim 1, wherein the fluoropolymer comprises, as a main component, a monomer unit having a fluorinated aliphatic ring, and the fluorinated aliphatic ring of the fluoropolymer has 1, 2 or 3 etheric oxygen atoms as ring-constituting atoms, and when the fluorinated aliphatic ring contains a plurality of the etheric oxygen atoms, the etheric oxygen atoms are not adjacent to each other and have a nitrogen-containing aromatic ring in its structure.
6. The monomer unit contained as a main component in the fluoropolymer is The following formula (A1): 【Chemistry 4】 [In the formula, R 1 represents a fluorine atom or a C1-C5 perfluoroalkyl group. Monomer unit (A1) represented by the formula: The following formula (A2): 【Chemistry 5】 [In the formula, R 2 ~R 5 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.] Monomer unit (A2) represented by the formula: The following formula (A3): 【Chemistry 6】 [In the formula, R 6 ~R 9 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.] Monomer unit (A3) represented by the following formula: The fluoropolymer according to claim 5, which is
7. 7. The fluoropolymer according to claim 6, wherein the monomer unit contained as a main component in said fluoropolymer is said monomer unit (A3).
8. The monomer unit contained as a main component in the fluoropolymer is The following formula (A1-1): 【Chemistry 7】 Monomer unit (A1-1) represented by the following formula: The following formula (A2-1): 【Chemistry 8】 Monomer unit (A2-1) represented by the following formula: The following formula (A2-2): 【Chemistry 9】 Monomer unit (A2-2) represented by the following formula: The following formula (A3-1): 【Chemistry 10】 Monomer unit (A3-1) represented by the following formula: The fluoropolymer according to claim 6, which is
9. 9. The fluoropolymer according to claim 8, wherein the monomer unit contained as a main component in said fluoropolymer is said monomer unit (A3-1).
10. The monomer unit contained as a main component in the fluoropolymer is -(CF 2 CF 2 )-,-(CHFCF 2 ) -, -(CH 2 CF 2 ) -, -(CH 2 CHF)-, -(CHFCHF)-, or -(CF 2 2. The fluorine-containing polymer according to claim 1, wherein the fluorine-containing polymer is a fluorine-containing polymer having a structure of 1 to 3, and a structure of 2 to 3.
11. The fluoropolymer according to claim 1, wherein the mass average molecular weight of the fluoropolymer is within the range of 5,000 to 2,000,000.
12. The fluoropolymer according to claim 1, wherein the mass average molecular weight of the fluoropolymer is within the range of 10,000 to 1,500,000.
13. The linker has the following formula (L): 【Chemistry 11】 [In the formula, v represents 0 or 1, and A represents an oxygen atom, a sulfur atom, or —O—CH 2 -, or a nitrogen atom bonded to a hydrogen atom, a methyl group, an ethyl group, a propyl group, or an isopropyl group, and * indicates the side bonded to the nitrogen-containing aromatic ring. The fluoropolymer according to claim 2, which has a structure represented by the following formula:
14. one of the carbon atoms constituting the nitrogen-containing aromatic ring is bonded via a linker to one or two of the monomer units at the terminals of the main chain of the fluorine-containing polymer, The structure of the linker and the nitrogen-containing aromatic ring bonded to one or two of the terminal monomer units of the main chain of the fluoropolymer is represented by the following formula: 【Chemistry 12】 and The monomer unit contained as a main component in the fluoropolymer is The following formula (A3): 【Chemistry 13】 Monomer units (A3) represented by -(CF 2 CF 2 )-,-(CHFCF 2 ) -, -(CH 2 CF 2 ) -, -(CH 2 CHF)-, -(CHFCHF)-, or -(CF 2 CClF)-, The fluoropolymer according to claim 2.
15. The monomer unit represented by the formula (A3) is represented by the following formula (A3-1): 【Chemistry 14】 The fluoropolymer according to claim 14, wherein the monomer unit (A3-1) is represented by the following formula:
16. 2. A method for producing a fluoropolymer according to claim 1, which comprises, as a main component, a monomer unit having a fluorinated aliphatic ring and has a nitrogen-containing aromatic ring, comprising the steps of: The method comprises a step of reacting a fluoropolymer (A) containing, as a main component, a monomer unit having a fluorinated aliphatic ring with a reactive reagent (B) having a nitrogen-containing aromatic ring in a solvent (C), the fluorine-containing aliphatic ring has 1, 2 or 3 ethereal oxygen atoms as ring-constituting atoms, and when the fluorine-containing aliphatic ring contains a plurality of the ethereal oxygen atoms, the ethereal oxygen atoms are not adjacent to each other, the nitrogen-containing aromatic ring is bonded to one or two of the monomer units at the terminals of the main chain of the fluoropolymer; A method for producing a fluorine-containing polymer.
17. The nitrogen-containing aromatic ring is The following formula (1): 【Chemistry 15】 [A is an oxygen atom, a sulfur atom, or a substituent R 10 represents a nitrogen atom which may be substituted by R 10 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, X 1 ~X 4 any one of X represents a carbon atom, and the other X independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring represented by the formula (1), The following formula (2): 【Chemistry 16】 [Y 1 ~Y 5 represents a carbon atom, and the other Y independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. A nitrogen-containing aromatic ring (2) represented by the formula: The following formula (3): 【Chemistry 17】 [B is an oxygen atom, a sulfur atom, or a substituent R 20 represents a nitrogen atom which may be substituted by R 20 represents a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group, Z 1 ~Z 8 any one of Z represents a carbon atom, and the other Z independently represents a nitrogen atom or a carbon atom; at least one of the carbon atoms constituting the nitrogen-containing aromatic ring, when there are a plurality of carbon atoms, is independently bonded to the main chain of the fluorine-containing polymer directly or via a linker; Other carbon atoms constituting the nitrogen-containing aromatic ring, when there are multiple carbon atoms, may each independently have a substituent, the substituents, when present in plurality, are each independently a fluorine atom, a hydroxyl group, a mercapto group, an amino group, a cyano group, an isocyanate group, or an alkyl group; The alkyl groups, when present in plurality, may each independently contain a C1-C5 ether bond and may be substituted with one or more fluorine atoms, hydroxyl groups, mercapto groups, amino groups, cyano groups, or isocyanate groups. The process for producing a fluoropolymer according to claim 16, wherein the nitrogen-containing aromatic ring (3) is at least one selected from the group consisting of the nitrogen-containing aromatic rings represented by the formula (3):
18. The process for producing a fluorine-containing polymer according to claim 16, wherein the basic skeleton of the nitrogen-containing aromatic ring is at least one selected from the group consisting of pyrrole, pyrazole, imidazole, triazole, pyridine, pyridazine, pyrimidine, pyrazine, triazine, indole, isoindole, indolizine, benzimidazole, benzotriazole, oxazole, isoxazole, benzoxazole, benzisoxazole, thiazole, isothiazole, benzothiazole, benzisothiazole and purine.
19. The process for producing a fluorine-containing polymer according to claim 16, wherein the basic skeleton of the nitrogen-containing aromatic ring is at least one selected from the group consisting of imidazole, triazole, triazine, benzimidazole, benzotriazole, oxazole, isoxazole and purine.
20. The reactive reagent (B) is 1-(3-aminopropyl)imidazole, 4-(1H-benzimidazol-2-yl)aniline, 2-aminobenzimidazole, 5-aminobenzimidazole, 5-amino-2-mercaptobenzimidazole, 3-amino-1H-1,2,4-triazole, 4-amino-1,2,4-triazole, 4-amino-4H-1,2,4-triazole, 3,5-diamino-1,2, 4-triazole, 1-aminobenzotriazole, 2-aminobenzotriazole, 1H-1,2,3-benzotriazol-5-amine, 5-aminobenzotriazole, melamine monomer, 2-methoxy-4-methyl-6-(methylamino)-1,3,5-triazine, 2,4-diamino-6-butylamino-1,3,5-triazine, 2-amino-4-methoxy-6-methyl-1,3,5-triazine, 2,4 -diamino-6-methyl-1,3,5-triazine, ammelide, ammeline, 2,4-diamino-1,3,5-triazine, 2,4-diamino-6-isopropoxy-1,3,5-triazine, 2,4-diamino-6-methoxy-1,3,5-triazine, 2-aminopurine, 8-azaadenine, 6-O-methylguanine, 2,6-diaminopurine, N-methoxy-7H-purin-6-amine, 1H-1,2,4- Triazole-3-thiol, 4-methyl-4H-1,2,4-triazole-3-thiol, 2-mercaptobenzimidazole, 2-mercapto-1-methylbenzimidazole, 5-ethoxy-2-mercaptobenzimidazole, 2-mercapto-5-methylbenzimidazole, 2-mercapto-5-methoxybenzimidazole, thiocyanuric acid, 6-(dibutylamino)-1,3,5-triazine-2,The method for producing a fluorine-containing polymer according to claim 16, which is at least one selected from the group consisting of 4-dithiol, 6-mercaptopurine, 2-hydroxybenzimidazole, 2-(hydroxymethyl)benzimidazole, 2-(3-hydroxypropyl)benzimidazole, 1H-benzotriazole-1-methanol, 2-aminooxazole, 5-amino-3-methylisoxazole, 3-hydroxy-5-methylisoxazole, muscimol, 3-amino-5-tert-butylisoxazole, 2-aminobenzoxazole, and 2-mercaptobenzoxazole.
21. The monomer unit contained as a main component in the fluoropolymer (A) is The following formula (A1): 【Chemistry 18】 [In the formula, R 1 represents a fluorine atom or a C1-C5 perfluoroalkyl group. Monomer unit (A1) represented by: The following formula (A2): 【Chemistry 19】 [In the formula, R 2 ~R 5 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.] Monomer unit (A2) represented by the formula: The following formula (A3): 【Chemistry 20】 [In the formula, R 6 ~R 9 each independently represents a fluorine atom, a C1-C5 perfluoroalkyl group, or a C1-C5 perfluoroalkoxy group.] Monomer unit (A3) represented by the following formula: The process for producing a fluoropolymer according to claim 16,
22. The process for producing a fluoropolymer according to claim 21, wherein the monomer unit contained as a main component in said fluoropolymer (A) is said monomer unit (A3).
23. The monomer unit contained as a main component in the fluoropolymer (A) is The following formula (A1-1): 【Chemistry 21】 Monomer unit (A1-1) represented by the following formula: The following formula (A2-1): 【Chemical 22】 Monomer unit (A2-1) represented by the following formula: The following formula (A2-2): 【Chemistry 23】 Monomer unit (A2-2) represented by the following formula: The following formula (A3-1): 【Chemistry 24】 Monomer unit (A3-1) represented by the following formula: The process for producing a fluoropolymer according to claim 21,
24. The process for producing a fluoropolymer according to claim 23, wherein the monomer unit contained as a main component in said fluoropolymer (A) is said monomer unit (A3-1).
25. The process for producing a fluoropolymer according to claim 16, wherein the solvent (C) is an aprotic solvent.
26. The method for producing a fluoropolymer according to claim 25, wherein the aprotic solvent is at least one solvent selected from the group consisting of perfluoroaromatic compounds, perfluorotrialkylamines, perfluoroalkanes, hydrofluorocarbons, perfluorocyclic ethers, hydrofluoroethers, and olefin compounds containing at least one chlorine atom.
27. The process for producing a fluoropolymer according to claim 25, wherein the aprotic solvent is a hydrofluoroether.
28. 26. The process for producing a fluoropolymer according to claim 25, wherein the aprotic solvent has a global warming potential (GWP) of 400 or less.
29. The aprotic solvent is Formula (C-1): F(CF 2 ) p O(CH 2 ) q H (C-1) [In the formula, p is an integer from 1 to 6, and q is an integer from 1 to 4.] A compound represented by Formula (C-2): H(CF 2 ) p O(CF 2 ) q F (C-2) [In the formula, p and q are as defined above.] A compound represented by Formula (C-3): H(CF 2 ) p O(CH 2 ) q H (C-3) [In the formula, p and q are as defined above.] A compound represented by Formula (C-4): X(CF 2 ) p CH 2 O(CF 2 ) q H (C-4) [In the formula, X represents a fluorine atom or a hydrogen atom, and p and q are as defined above.] A compound represented by (CF 3 ) 2 CHOCH 3 , (CF 3 ) 2 CFO 3 , C.F. 3 CHFCF 2 OCH 3 , and C.F. 3 CHFCF 2 O.C.F. 3 The process for producing a fluoropolymer according to claim 25, wherein the hydrofluoroether is at least one hydrofluoroether selected from the group consisting of:
30. The aprotic solvent is represented by formula (C-5): R 21 -O-R 22 (C-5) [In the formula, R 21 is a linear or branched propyl or butyl group in which one or more hydrogen atoms are replaced by fluorine atoms; R 22 is methyl or ethyl. A compound represented by The process for producing a fluoropolymer according to claim 25, wherein
31. The process for producing a fluoropolymer according to claim 16, wherein the mass average molecular weight of the fluoropolymer is within the range of 5,000 to 2,000,000.
32. The process for producing a fluoropolymer according to claim 16, wherein the mass average molecular weight of the fluoropolymer is within the range of 10,000 to 1,500,000.
33. The fluoropolymer (A) comprises a COF group and a fluoropolymer having the following formula (K): 【Chemistry 25】 [In the formula, v represents 0 or 1; R 40 represents an alkyl group or an alkoxy group. The process for producing a fluoropolymer according to claim 16, wherein the fluoropolymer (K) has at least one group selected from the group consisting of groups represented by the following formula (1):
34. The process for producing a fluoropolymer according to claim 33, wherein one or two of the monomer units at the terminals of the main chain of the fluoropolymer (A) have at least one group selected from the group consisting of the COF group and the group (K).
35. In a fluoropolymer containing the monomer unit having a fluorinated aliphatic ring as a main component and having a nitrogen-containing aromatic ring, one of the carbon atoms constituting the nitrogen-containing aromatic ring is bonded via a linker to one or two of the monomer units at the terminals of the main chain of the fluoropolymer, The structure of the linker and the nitrogen-containing aromatic ring bonded to one or two of the terminal monomer units of the main chain of the fluoropolymer is represented by the following formula: 【Chemistry 26】 and The reactive reagent (B) is represented by the following formula: 【Chemistry 27】 Any compound represented by the formula: The monomer unit contained as a main component in the fluoropolymer (A) is The following formula (A3): 【Chemistry 28】 The monomer unit (A3) is represented by the following formula: The terminal structure of the fluoropolymer (A) is -COF or -CF 2 -O-CO-O-normal propyl, The solvent (C) is at least one selected from the group consisting of perfluorobenzene and hydrofluoroether. A method for producing the fluoropolymer according to claim 17.
36. The monomer unit represented by formula (A3) is represented by the following formula (A3-1): 【Chemical Formula 29】 The method for producing a fluoropolymer according to claim 35, wherein the monomer unit (A3-1) is represented by the following formula:
37. An encapsulating resin comprising the fluorine-containing polymer according to claim 1.
38. A fluororesin adhesive comprising the fluorine-containing polymer according to claim 1.
39. The fluororesin adhesive according to claim 38, which is for bonding a pellicle membrane to a frame.
40. An optical device comprising the sealing resin according to claim 37, the fluororesin adhesive according to claim 38, or the fluororesin adhesive according to claim 39.
41. A pellicle comprising a pellicle membrane and a frame, the pellicle comprising the fluoropolymer of claim 1.
42. The pellicle of claim 41, wherein the pellicle membrane and the frame are bonded with the fluororesin adhesive of claim 38.
43. 42. An exposure method in photolithography using a light source having an emission wavelength of 200 nm or less, comprising the pellicle according to claim 41.
44. 44. The exposure processing method according to claim 43, wherein the light source having a wavelength of 200 nm or less is a fluorine gas excimer laser.
45. A composition comprising the fluorine-containing polymer according to claim 1 and hydrogen fluoride, The composition, wherein the content of said hydrogen fluoride is 0.005 ppm to 50 ppm relative to the content of said fluoropolymer.
46. The composition according to claim 45, wherein the content of said hydrogen fluoride is 0.005 ppm to 10 ppm relative to the content of said fluoropolymer.
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