Processing equipment

Abstract

To support a confirmation of a heating region of a heating unit against a sheet supporting a workpiece.SOLUTION: A processing device 10 comprises: a holding table that has a holding surface holding a workpiece supported via a sheet to an open of an annular frame; a frame holding unit that includes a mounting surface onto which the frame is mounted, and that holds the frame; a lifting mechanism that relatively lifts the holding surface to the mounting surface; a heating unit that heats the sheet exposed between an inner diameter of the frame and an outer diameter of the workpiece; a movement mechanism that relatively movably supports the heating unit to the holding unit; and a control unit 70. The control unit 70 includes: a setting part 71 that sets a heating condition that the heating unit heats the sheet; and a simulation part 73 that displays the heating region of the heating unit based on the heating condition set by the setting part 71 so as to be identifiable to the image of the workpiece supported via the sheet by the frame.SELECTED DRAWING: Figure 7

Description

[Technical field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] When dividing a workpiece along a planned dividing line to separate it into a plurality of chips, a processing method is known in which a groove or modified layer that becomes a dividing starting point is formed along the planned dividing line of the workpiece, and then a sheet supporting the workpiece is expanded to widen the chip interval from the dividing starting point. The workpiece is supported by the opening of an annular frame via a sheet, and after the sheet expansion, the sheet in the excess area between the outer edge of the workpiece and the inner edge of the frame is contracted to maintain the chip interval. For example, Patent Document 1 discloses a dividing device that suitably heats the slackened portion of the expanded sheet even when either the slackening or stretching of the expanded sheet is different. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-117891 A Summary of the Invention [Problem to be solved by the invention]

[0004] In conventional devices, the heating area is set by setting the movement path of a heating unit such as a heater, but depending on the setting, there is a risk of an unheated untreated area being generated. In addition, in conventional devices, if the movement path of the heating unit is set differently from the intended conditions, the operator may not notice that the heating area is different.

[0005] The present invention has been made in consideration of the above, and an object of the present invention is to provide a processing device that can assist in confirmation of a heating area of ​​a heating unit with respect to a sheet supporting a workpiece. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the processing apparatus of the present invention comprises a holding table having a holding surface that holds a workpiece supported via a sheet in an opening of a ring-shaped frame, a frame holding unit having a mounting surface on which the frame is placed and holding the frame, a lifting mechanism that raises and lowers the holding surface relative to the mounting surface, a heating unit that heats the sheet exposed between the inner diameter of the frame and the outer diameter of the workpiece, a moving mechanism that supports the heating unit so that it can move relatively to the holding surface, and a control unit, wherein the control unit is characterized by having a setting section that sets the heating conditions under which the heating unit heats the sheet, and a simulation section that identifiably displays the heating area of ​​the heating unit based on the heating conditions set by the setting section on an image of the workpiece supported on the frame via the sheet.

[0007] In the processing apparatus, the simulation unit may display the heating order of the heating regions in a distinguishable manner.

[0008] In the processing apparatus, the simulation unit may display the heating region corresponding to any one of the heating conditions included in a heating sequence in which a plurality of the heating conditions are performed in order.

[0009] In the processing apparatus, the simulation unit may distinguishably display an area where the heating intensity is relatively high and an area where the heating intensity is relatively low in the heating area.

[0010] In the processing apparatus, the processing apparatus may have a display section, and the control unit may display the image generated by the simulation section on the display section.

[0011] In the processing device, the processing device may be configured to be connectable to a communication device having a display screen, and the control unit may output to the display screen of the communication device based on the image generated by the simulation section.

[0012] In the processing apparatus, the setting unit may receive the heating conditions via a touch panel or a communication device. Effect of the Invention

[0013] The processing apparatus of the present invention has an effect of assisting in confirmation of the heating area of ​​the heating unit with respect to the sheet supporting the workpiece. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a plan view showing an example of a workpiece unit to be divided by a processing device according to an embodiment. [Diagram 2] FIG. 2 is a perspective view showing a configuration example of the processing device according to the embodiment. [Diagram 3] 3 is a cross-sectional view of the seat extension unit taken along line III-III of FIG. 2. FIG. [Figure 4] FIG. 4 is a top view of the heating unit of FIG. [Diagram 5] FIG. 5 is a functional block diagram of the heating unit of FIG. [Figure 6] 6 is a cross-sectional view of the heating unit taken along line VII-VII of FIG. [Figure 7] FIG. 7 is a diagram illustrating an example of a functional configuration of the control unit in FIG. [Figure 8] FIG. 8 is a diagram showing an example of a screen for setting heating condition data. [Figure 9] FIG. 9 is a diagram for explaining an example of an image of a workpiece unit used by a processing device. [Figure 10] FIG. 10 is a diagram for explaining an example of the relationship between heating condition data and an image including a heating region. [Figure 11] FIG. 11 is a diagram for explaining an example of the relationship between heating condition data and an image including a heating region. [Figure 12]FIG. 12 is a diagram for explaining an example of the relationship between heating condition data and an image including a heating region. [Figure 13] FIG. 13 is a flowchart showing an example of display control of an image including a heating region executed by the processing device. [Figure 14] FIG. 14 is a schematic cross-sectional view showing another configuration example of the processing device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] Hereinafter, the embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configuration can be made without departing from the gist of the present invention. In each of the following embodiments, the same parts are given the same reference numerals to avoid redundant explanations.

[0016] In the embodiment described below, an XYZ Cartesian coordinate system is set, and the positional relationship of each part is described with reference to this XYZ Cartesian coordinate system. One direction in a horizontal plane is the X-axis direction, a direction perpendicular to the X-axis direction in the horizontal plane is the Y-axis direction, and a direction perpendicular to both the X-axis direction and the Y-axis direction is the Z-axis direction. The XY plane including the X-axis and Y-axis is parallel to the horizontal plane. The Z-axis direction perpendicular to the XY plane is the vertical direction.

[0017] [Embodiment] 1 is a plan view showing an example of a workpiece unit to be divided by a processing device according to an embodiment of the present invention. First, a workpiece unit 100 to be processed (divided) by the processing device according to an embodiment of the present invention will be described with reference to the drawings.

[0018] 1, a workpiece unit 100 to be divided by the processing apparatus according to the embodiment includes a workpiece 101, a sheet 106 to which the back surface of the back side of a front surface 102 of the workpiece 101 is attached, and an annular frame 107 to which the outer periphery of the sheet 106 is attached. The workpiece 101 is attached to the center of the sheet 106, which may be an expandable sheet or the like. An annular region 108 is formed between the inner edge, which is the inner periphery of the frame 107 of the sheet 106, and the outer edge, which is the outer periphery of the workpiece 101.

[0019] The workpiece 101 is a disk-shaped semiconductor wafer or optical device wafer using silicon, sapphire, gallium arsenide, SiC (silicon carbide), or the like as a substrate. As shown in Fig. 1, the workpiece 101 has square device chips 105 formed in each region defined by dividing lines 103 extending in mutually intersecting directions on a surface 102. The workpiece 101 has modified layers 109 formed along the dividing lines 103.

[0020] The workpiece 101 is irradiated with a laser beam of a transparent wavelength from the back side along the planned division lines 103 to form a modified layer 109. The modified layer 109 refers to a region in which the density, refractive index, mechanical strength, and other physical properties are different from those of the surroundings, and examples of the modified layer 109 include a melting treatment region, a crack region, an insulation breakdown region, a refractive index change region, and a region in which these regions are mixed. The modified layer 109 is the starting point for dividing the workpiece into individual device chips 105.

[0021] The sheet 106 is made of an elastic resin and has heat shrinkability, that is, it shrinks when heated. The sheet 106 is formed, for example, from an expandable sheet, an adhesive tape, or the like. The sheet 106 may have a direction in which it is easy to expand and a direction in which it is difficult to expand. The sheet 106 has a structure in which a glue layer is laminated on a base material layer, or may be formed only from a base material layer without a glue layer, and attached to the workpiece 101 by pressure bonding or thermocompression bonding.

[0022] (Example of processing equipment configuration) Fig. 2 is a perspective view showing an example of the configuration of a processing apparatus 10 according to an embodiment. The processing apparatus 10 shown in Fig. 2 is an apparatus that expands a sheet 106 and divides a workpiece 101 having a modified layer 109 formed thereon into individual device chips 105 along a planned division line 103. As shown in Fig. 2, the processing apparatus 10 includes a chamber 20, a holding table 30, a frame fixing portion 40, a sheet expansion unit 50, a heating unit 60, and a control unit 70.

[0023] The chamber 20 is formed in a box shape with an open top, and houses the holding table 30, the frame mounting plate 41 of the frame fixing portion 40, and the seat extension unit 50.

[0024] The holding table 30 has a holding surface 31 that suction-holds the workpiece 101 of the workpiece unit 100 via a sheet 106. The holding table 30 is disk-shaped and includes a disk-shaped frame 32 made of a metal such as stainless steel, and a disk-shaped suction section 33 made of a porous material such as porous ceramic and surrounded by the frame 32. The upper surfaces of the frame 32 and the suction section 33 are arranged on the same plane to form the holding surface 31 that suction-holds the workpiece 101. The suction section 33 has approximately the same diameter as the workpiece 101. The back side of the workpiece 101 of the workpiece unit 100 transported by the transport unit 80 is placed on the holding surface 31 of the holding table 30 via the sheet 106. The holding table 30 has an adsorption portion 33 connected to a vacuum suction source 34, and the adsorption portion 33 is sucked by the vacuum suction source 34, thereby enabling the back side of the workpiece 101 to be suction-held on the holding surface 31.

[0025] The frame fixing part 40 fixes the frame 107 of the workpiece unit 100. The frame fixing part 40 includes a frame mounting plate 41 and a frame pressing plate 42. The frame mounting plate 41 is formed in a plate shape with a circular opening 43 in a plan view and a flat upper surface 44 formed parallel to the horizontal direction. The inner diameter of the opening 43 of the frame mounting plate 41 is formed slightly larger than the inner diameter of the frame 107. The frame mounting plate 41 has the holding table 30 disposed in the opening 43, and the opening 43 is disposed coaxially with the holding table 30. The frame mounting plate 41 is also disposed so that piston rods 45-1 of air cylinders 45 are attached to the four corners and can be raised and lowered by the extension and contraction of the piston rods 45-1. In this embodiment, the air cylinders 45 and the piston rods 45-1 function as a moving mechanism. The frame mounting plate 41 is mounted on the four corners of the upper surface 44 so as to be freely movable horizontally, and is provided with centering guides 46 that adjust the position of the frame 107 by moving horizontally, thereby positioning the workpiece 101 coaxially with the suction portion 33 of the holding table 30.

[0026] The frame pressing plate 42 is formed in a plate shape of approximately the same dimensions as the frame mounting plate 41, and is provided in the center with a circular opening 47 of the same dimensions as the opening 43. The frame pressing plate 42 is attached to the tip of a piston rod 48-1 of an air cylinder 48, and is movable between a position above the frame mounting plate 41 and a position retracted from above the frame mounting plate 41 by the extension and contraction of the piston rod 48-1. The frame pressing plate 42 is provided with elongated holes 49 at its four corners, into which the centering guides 46 can be inserted.

[0027] The frame fixing part 40 is positioned at a position where the frame pressing plate 42 is retracted from above the frame mounting plate 41, and with the centering guides 46 spaced apart from each other, the frame 107 of the workpiece unit 100, which has been transported by the transport unit 80, is mounted on the upper surface 44 of the frame mounting plate 41. The frame fixing part 40 brings the centering guides 46 closer to each other to position the workpiece 101 of the workpiece unit 100. The frame fixing part 40 positions the frame pressing plate 42 above the frame mounting plate 41, and extends the piston rod 45-1 of the air cylinder 45 to raise the frame mounting plate 41, thereby sandwiching and fixing the frame 107 of the workpiece unit 100 between the frame mounting plate 41 and the frame pressing plate 42.

[0028] Fig. 3 is a cross-sectional view of the sheet expansion unit 50 in Fig. 2 taken along the line III-III. The sheet expansion unit 50 shown in Fig. 3 relatively moves the holding table 30 and the frame fixing part 40 along an axis along the vertical direction to positions away from each other, thereby pressing the annular region 108 in a direction perpendicular to the surface 102 of the workpiece 101 to expand the sheet 106 and breaking the workpiece 101 from the modified layer 109, which is the starting point of division. The sheet expansion unit 50 includes a push-up member 51 and a lifting unit 52.

[0029] The push-up member 51 is formed in a cylindrical shape, with an outer diameter smaller than the inner diameter of the annular frame 107 placed on the upper surface 44 of the frame mounting plate 41, and an inner diameter larger than the outer diameter of the workpiece 101 attached to the sheet 106 and the holding table 30. The push-up member 51 has the holding table 30 placed inside and is arranged coaxially with the holding table 30. A roller member 53, which is arranged on the same plane as the holding surface 31 of the holding table 30, is rotatably attached to the upper end of the push-up member 51. The roller member 53 reduces friction with the sheet 106 when the push-up member 51 pushes up the sheet 106.

[0030] The lifting unit 52 includes air cylinders 54 and 55. The holding table 30 is attached to a piston rod 54-1 of the air cylinder 54, and is arranged so as to be liftable and lowerable by the extension and contraction of the piston rod 54-1. The push-up member 51 is attached to a piston rod 55-1 of the air cylinder 55, and is arranged so as to be liftable and lowerable by the extension and contraction of the piston rod 55-1. The lifting unit 52 lifts and lowers the holding table 30 and the push-up member 51 together by the air cylinders 54 and 55.

[0031] The sheet extension unit 50 expands the sheet 106 in the planar direction by the lifting unit 52 raising the push-up member 51 and the holding table 30 together from a state in which the roller member 53 attached to the upper end of the push-up member 51 and the holding surface 31 are located below the upper surface 44 of the frame mounting plate 41 to a state in which the roller member 53 and the holding surface 31 are located above the upper surface 44 of the frame mounting plate 41. The sheet extension unit 50 is lowered from a state in which the sheet 106 is expanded in the planar direction to a state in which the roller member 53 and the holding surface 31 are on the same plane as the upper surface 44 of the frame fixing part 40. When the sheet extension unit 50 is lowered to a state in which the roller member 53 and the holding surface 31 are on the same plane as the upper surface 44 of the frame fixing part 40, a slack portion 108-2 formed by the sheet 106 being slackened is formed in the annular region 108 of the sheet 106.

[0032] Figure 4 is a top view of the heating unit 60 of Figure 2. The heating unit 60 shown in Figures 2 and 4 heats the annular region 108 of the expanded sheet 106 to cause the slack portion of the sheet 106 to contract.

[0033] 2 and 4, the heating unit 60 includes a disk-shaped unit body 61 and a plurality of heating parts 63-1, 63-2, 63-3, and 63-4 attached to grip parts 62-1, 62-2, 62-3, and 62-4 of the unit body 61. In the following, when the grip parts 62-1, 62-2, 62-3, and 62-4 are not distinguished from each other, they are appropriately referred to as grip parts 62, and when the heating parts 63-1, 63-2, 63-3, and 63-4 are not distinguished from each other, they are appropriately referred to as heating parts 63.

[0034] 2, the unit body 61 is disposed above the holding table 30 and coaxially with the holding table 30. The unit body 61 is provided so as to be rotatable about an axis parallel to the vertical direction. The unit body 61 is also provided so as to be movable up and down by a moving unit (not shown).

[0035] As shown in Figs. 2 and 4, the gripping parts 62 are arranged at equal intervals in the circumferential direction on the outer edge of the unit body 61. The gripping parts 62 are arranged at positions vertically facing the annular region 108 of the sheet 106 of the workpiece unit 100 held by the holding table 30 and the frame fixing part 40. The gripping parts 62 grip the heating parts 63 so as to be movable in the radial and vertical directions of the unit body 61 within the range of the size of the gripping parts 62, that is, so as to be movable in the radial direction of the workpiece 101 or in the direction away from the sheet 106. The gripping parts 62 are openings through which the heating parts 63 are inserted. The gripping parts 62 grip the heating parts 63 so as to be movable in the radial direction, with the radial length of the opening being greater than the radial length of the heating parts 63. In the embodiment, it is preferable that four gripping parts 62 are provided, but the present invention is not limited to four.

[0036] The heating parts 63 are arranged at equal intervals in the circumferential direction on the outer edge of the unit body 61 according to the arrangement of the gripping part 62. That is, the heating parts 63 are arranged at positions vertically facing the annular region 108 of the sheet 106 of the workpiece unit 100 held by the holding table 30 and the frame fixing part 40 by being gripped by the gripping part 62, and are installed in the circumferential direction along the annular region 108. In the embodiment, it is preferable that four heating parts 63 are provided, but the present invention is not limited to four. The heating part 63 is of a type that irradiates infrared rays downward to heat the annular region 108 of the sheet 106, for example, an infrared ceramic heater that is heated when a voltage is applied and radiates infrared rays. Note that the heating part 63 is not limited to a form that irradiates infrared rays, and may be a Peltier element that has a joint between two types of metals and controls heat absorption and heat generation in the two types of metals by a direct current, or may further include such a Peltier element.

[0037] Fig. 5 is a functional block diagram of the heating unit 60 in Fig. 2. Fig. 6 is a cross-sectional view of the heating unit 60 in Fig. 4 taken along line VII-VII. As shown in Fig. 5, the heating unit 60 includes a plurality of first heating position adjustment units 64-1, 64-2, 64-3, 64-4 and a rotation unit 65.

[0038] The first heating position adjusting units 64-1, 64-2, 64-3, and 64-4 are connected to the heating units 63-1, 63-2, 63-3, and 63-4, respectively, and move the positions of the heating units 63-1, 63-2, 63-3, and 63-4 in the radial direction of the workpiece 101. In the following, when the first heating position adjusting units 64-1, 64-2, 64-3, and 64-4 are not distinguished from each other, they are appropriately described as the first heating position adjusting unit 64. The first heating position adjusting unit 64 is provided with a configuration capable of individually moving the positions of the heating units 63 in the radial direction of the workpiece 101, for example, a belt roller provided for the heating unit 63 and a motor for driving the belt roller. The first heating position adjusting unit 64 is not limited to this configuration, and may have an air cylinder or a ball screw. The rotating unit 65 is connected to the unit body 61. The rotating portion 65 includes a motor (not shown) that rotates an output shaft to rotate the unit body 61 in a direction around an axis parallel to the vertical direction.

[0039] With the above-mentioned configuration, the first heating position adjustment unit 64 adjusts the heating position of the workpiece 101 in the radial direction by the heating unit 63, by moving the positions of the heating units 63 individually in the radial direction of the workpiece 101, as shown in Fig. 6. The heating units 63-1 and 63-3 facing each other may be simultaneously moved inward or outward in the radial direction, and the heating units 63-2 and 63-4 facing each other may be simultaneously moved inward or outward in the radial direction. The rotating unit 65 can simultaneously move all the heating units 63 in the circumferential direction along the annular region 108 of the sheet 106.

[0040] 2, the control unit 70 controls the above-mentioned components of the processing apparatus 10, i.e., the sheet extension unit 50 and the heating unit 60, and causes the processing apparatus 10 to perform a processing operation on the workpiece 101. The control unit 70 includes, for example, an arithmetic processing device such as a CPU (Central Processing Unit), a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The control unit 70 is a computer capable of executing programs for controlling the above-mentioned components in accordance with the processing steps performed by the processing apparatus 10. The control unit 70 is electrically connected to a touch panel 91.

[0041] The touch panel 91, under the control of the control unit 70, displays an image of the workpiece unit 100 and various information required for processing, and receives input operations and the like required for processing from the operator. The touch panel 91 is disposed in an easy-to-see and easy-to-operate location on the housing of the processing apparatus 10. The touch panel 91 is configured with a display device and an input device. The touch panel 91 may be configured with a touch screen display including a display device such as a liquid crystal display or an organic EL display, and a touch screen for specifying an input position or coordinates on the display surface of the display device. The touch panel 91 is an example of a display unit.

[0042] The control unit 70 controls communication with the information device 500 via wireless communication, a network, or the like. The information device 500 includes, for example, a smartphone, a tablet terminal, or the like. The information device 500 has a display unit 510 and a communication unit 520. The display unit 510 is a display screen. The information device 500 is configured to be able to display various information received from the processing device 10 via the communication unit 520 on the display unit 510. The control unit 70 can transmit various information to the information device 500 and display it on the display unit 510. The processing device 10 may be provided with a touch panel 91 and may be connected to the information device 500, or may be configured to have either one of them.

[0043] The processing (division) method of the processing device 10 includes a processing method in which, when dividing the workpiece 101 along the planned division line 103 to separate it into a plurality of chips, a groove or modified layer serving as a division starting point is formed along the planned division line 103 of the workpiece 101, and then a sheet 106 supporting the workpiece 101 is expanded to widen the chip interval from the division starting point. The workpiece 101 is supported by an opening of an annular frame 107 via the sheet 106, but after the sheet expansion, the sheet 106 in the surplus area between the outer edge of the workpiece 101 and the inner edge of the frame 107 is contracted in order to maintain the chip interval. As shown in FIG. 3, the processing device 10 heats the sheet 106 while moving the heating unit 63 and the holding surface 31 relatively to each other in order to contract the sheet 106. In this case, the processing device 10 sets the heating area by setting the movement path of the heating part 63, but there is a risk that an unheated untreated area will be generated due to an incorrect setting, or that a movement path different from the intended conditions will be set and the heating area will not be noticed even if it is different. For this reason, the processing device 10 provides a technology that can support the setting of the heating area of ​​the heating unit 60.

[0044] Fig. 7 is a diagram showing an example of the functional configuration of the control unit 70 in Fig. 2. As shown in Fig. 7, the control unit 70 has a setting unit 71, a generating unit 72, and a simulation unit 73. The control unit 70 realizes the functional units of the setting unit 71, the generating unit 72, and the simulation unit 73 by executing a program.

[0045] The setting unit 71 sets heating conditions including a heating area where the heating unit 60 heats the sheet 106. The setting unit 71 sets the heating area by setting heating conditions including a moving path of the heating unit 60, a heating temperature, etc. The heating conditions include, for example, conditions that can identify the area where the heating unit 60 heats the workpiece unit 100 (sheet 106), the heating path, and the distance between the heating section 63 and the workpiece unit 100 during heating. The setting unit 71 sets heating conditions such as the heating area (moving path) of the heating unit 60, the heating temperature, the heating time, the distance between the heating section 63 and the holding surface 31, and, when multiple different heating conditions are performed consecutively, a heating sequence including multiple heating conditions and the order of performing them. The setting unit 71 allows an operator to set the heating conditions, or acquires and sets the heating conditions from a server, a database, etc. The setting unit 71 stores heating condition data that can identify the set heating conditions in a storage device.

[0046] The generating unit 72 generates an image of the workpiece 101 supported on the frame 107 via the sheet 106. The generating unit 72 generates image data showing an image of the top surface (surface) that enables identification of the relative positions of the workpiece 101, the sheet 106, and the frame 107. The top surface of the workpiece unit 100 is the surface to be processed. The generating unit 72 can generate image data used to display the heating area of ​​the heating unit 60 based on an image captured of the workpiece unit 100 to be heated, an image acquired from a database, etc. The generating unit 72 stores the generated image data in a storage device.

[0047] The simulation unit 73 displays, on the image of the workpiece unit 100, the heating area of ​​the heating unit 60 based on the heating conditions set by the setting unit 71 in an identifiable manner. The simulation unit 73 estimates the heating area of ​​the workpiece unit 100 to be heated by the heating unit 60 based on the heating conditions set by the setting unit 71 and the specifications of the heating unit 60. The specifications of the heating unit 60 include, for example, the origin arrangement, size, and moving path indicating the movable range of the heating part 63 in the heating unit 60. The simulation unit 73 calculates the moving path and heating operation of the heating unit 60 according to the heating conditions using a program for executing a simulation, a machine learning program, etc., based on data including at least the specifications and heating conditions of the heating unit 60, and calculates the heating area on the upper surface of the workpiece unit 100 based on the calculation result. The simulation unit 73 calculates heating information such as the heating area of ​​the workpiece unit 100, the temperature of the heating area or the relative temperature distribution in the heating area, and the heating time based on the specifications and heating conditions of the heating unit 60. The control unit 70 controls the touch panel 91 to display an image that allows identification of the heating area estimated by the simulation unit 73. The control unit 70 causes the image to display heating information corresponding to the heating conditions.

[0048] When a heating sequence in which a plurality of different heating conditions are successively performed is set, the simulation unit 73 displays the heating areas in a stepwise or chronological order on the image so that the order of the heating areas heated by the heating unit 60 can be identified. When a heating sequence is set, the simulation unit 73 displays a heating area including an area corresponding to any of the heating conditions included in the heating sequence. The heating sequence includes a plurality of heating conditions, their order, the number of times each heating condition is repeated, and the implementation time. For example, when the heating conditions include four heating conditions, from the first heating condition to the fourth heating condition, the simulation unit 73 can display a heating area corresponding to one of the plurality of heating conditions, or display heating areas of the plurality of heating conditions. The simulation unit 73 can display a first area in which the heating intensity is relatively high in the heating area and a second area in which the heating intensity is lower than the first area in a distinguishable manner. For example, the simulation unit 73 displays the heating intensity in a different display mode, or displays information indicating the heating intensity.

[0049] The control unit 70 is electrically connected to a communication unit 92. The communication unit 92 may be built in the processing apparatus 10, or may be provided as an external device of the processing apparatus 10. The communication unit 92 communicates with, for example, an information device 500 outside the processing apparatus 2. The communication unit 92 can store, for example, various pieces of information received from the information device 500 in a storage device. The communication unit 92 can transmit various pieces of information to the information device 500 under the control of the control unit 70.

[0050] An example of the configuration of the processing device 10 according to the present embodiment has been described above. Note that the above configuration described with reference to Figs. 1 to 7 is merely an example, and the configuration of the processing device 10 according to the present embodiment is not limited to the above example. The functional configuration of the processing device 10 according to the present embodiment can be flexibly modified according to the specifications and operation. For example, the processing device 10 may be configured so that the function of the generation unit 72 is realized by the simulation unit 73.

[0051] (Example of heating condition settings) 8 is a diagram showing an example of a screen for setting heating condition data. As shown in FIG. 8, heating condition data 300 has data indicating heating conditions based on data set on a screen 310.

[0052] The screen 310 has a plurality of input fields corresponding to a plurality of setting items for which heating conditions can be set, and allows an operator to set the heating conditions. In the example shown in FIG. 8, the screen 310 has a plurality of setting items 311, a plurality of input fields 312-1, 312-2, 312-3 corresponding to the setting items 311, and a simulation button 313.

[0053] The multiple setting items 311 have items of start position, end position, heating section selection, heating temperature, distance, offset value (X), and offset value (Y). The setting item 311 of the start position is, for example, an item for setting the position (angle) at which the heating section 63 of the heating unit 60 starts heating. The setting item 311 of the end position is, for example, an item for setting the position (angle) at which the heating section 63 ends heating. The setting item 311 of the heating section selection is, for example, an item for selecting the heating section 63 to be heated among the multiple heating sections 63. The setting item 311 of the heating section selection allows, for example, selection of all or some of the heating sections 63 among the multiple heating sections 63. The setting item 311 of the heating temperature is, for example, an item for setting the temperature at which the heating section 63 is heated. The setting item 311 of the distance is, for example, an item for setting the distance between the heating section 63 and the sheet 106.

[0054] The offset value (X) and offset (B) items are items for setting offset values ​​for changing the movement path of the multiple heating parts 63 from a circle to an ellipse. For example, the offset value (X) and offset (B) items can set the movement path of the multiple heating parts 63 to an ellipse by offsetting either the X-axis direction or the Y-axis direction. The sheet 106 has a property of easily stretching in one of the vertical and horizontal directions. For this reason, the processing device 10 can set the movement path of the multiple heating parts 63 to an ellipse, and can realize contraction based on the amount of stretch of the sheet 106 by changing the amount by which the sheet 106 is heated in the vertical and horizontal directions, and can maintain the chip spacing.

[0055] The input field 312-1 is a plurality of input fields corresponding to a plurality of setting items 311 of the first heating condition, and a set value when the first heating condition is executed is set. The first heating condition is the first operation in the heating sequence. The input field 312-2 is a plurality of input fields corresponding to a plurality of setting items 311 of the second heating condition, and a set value when the second heating condition is executed is set. The second heating condition is the second operation in the heating sequence. The input field 312-3 is a plurality of input fields corresponding to a plurality of setting items 311 of the first heating condition, and a set value when the third heating condition is executed is set. The third heating condition is the third operation in the heating sequence. In the example shown in FIG. 8, the screen 310 is configured to be able to set three heating conditions, but the number of heating conditions set may be other than three. The heating condition data 300 is capable of setting the heating conditions of the processing device 10 based on the presence or absence of settings of the input fields 312-1, 312-2, and 312-3. In the following description, when there is no need to distinguish between the input fields 312-1, 312-2, and 312-3, they will be simply referred to as input fields 312.

[0056] The simulation button 313 is a button for displaying, on the touch panel 91, a mobile terminal, or the like, an image showing a simulation result regarding heating by the heating unit 60 based on the heating conditions set on the screen 310. When the simulation button 313 is operated, the setting unit 71 of the processing device 10 determines the heating conditions based on the setting values ​​set on the screen 310, and generates an image showing a heating area based on the heating conditions. The processing device 10 displays the generated image on the display means, allowing the operator to confirm the heating area corresponding to the heating conditions.

[0057] The screen 310 has an ENTER button 314 and an EXIT button 315. The ENTER button 314 is a button for registering the heating condition data 300 indicating the heating conditions set on the screen 310. The EXIT button 315 is a button for switching the screen 310 without registering the heating conditions on the screen 310.

[0058] (An example of heating conditions and images of the workpiece unit) Fig. 9 is a diagram for explaining an example of an image of the workpiece unit 100 used by the processing device 10. The image 400 shown in the upper diagram of Fig. 9 is an image in which the workpiece 101 supported by the frame 107 via the sheet 106 can be identified. The image 400 includes, for example, images and schematic diagrams of the workpiece 101, the sheet 106, and the frame 107 captured from above. The image 400 includes still images, videos, and the like. The image 400 is an image in which the reference angle 0° and the reference angle 180° that are the reference for the rotation of the heating unit 60 can be identified.

[0059] When the processing device 10 receives an instruction for a simulation, the processing device 10 generates heating information indicating a heating area when the four heating parts 63 of the heating unit 60 are heated based on the heating conditions. The processing device 10 displays the generated heating information in an identifiable manner on the image 400. For example, the heating conditions include a condition in which each of the four heating parts 63 of the heating unit 60 is heated while moving in a range from 0 degrees to 90 degrees. In this case, as shown in the lower diagram of FIG. 9, the processing device 10 estimates the heating area 410 heated by the four heating parts 63 as the exposed area of ​​the sheet 106 between the workpiece 101 and the frame 107 based on the positional relationship with the workpiece 101. The processing device 10 displays the estimated heating area 410 superimposed on the image 400 so as to cover the exposed part of the sheet 106. The processing device 10 displays the heated area 410 in a superimposed manner in a display color such as orange, yellow, or red, thereby making it possible to distinguish the relationship between the exposed area of ​​the sheet 106 and the heated area 410. In this way, the processing device 10 displays the heated area 410 when heated under the set heating conditions, allowing the operator to easily check whether there is an untreated area of ​​the heating unit 60 or not, and whether heating is being performed under the desired conditions.

[0060] 10 to 12 are diagrams for explaining an example of the relationship between the heating condition data 300 and an image 400 including a heating region.

[0061] In the example shown in the upper diagram of Fig. 10, the heating condition data 300-1 includes a heating condition in which all four heating sections 63 heat in the range of 0 degrees to 90 degrees under a first heating condition. The heating condition data 300-1 includes a heating condition in which all four heating sections 63 heat in the range of 0 degrees to 90 degrees while rotating with an offset (X) of -30 and an offset (Y) of -60 under a second heating condition. The heating condition data 300-1 includes a heating condition in which an end position is not set and thus no heating is performed under a third heating condition.

[0062] The processing device 10 receives an instruction to simulate heating of the workpiece unit 100 having a first size of workpiece 101. The first size is, for example, a size smaller than the inner diameter of the frame 107 and having a large exposed portion of the sheet 106. The processing device 10 estimates a heating area 410-1 under the first heating condition and a heating area 410-2 under the second heating condition based on a prediction result when the four heating parts 63 of the heating unit 60 are heated under the heating conditions indicated by the heating condition data 300-1. As shown in the lower diagram of FIG. 10, the processing device 10 estimates an annular area including a part of the exposed portion of the sheet 106 and the entire surface of the frame 107 as the heating area 410-1 under the first heating condition. The processing device 10 estimates an elliptical area including a part of the exposed portion of the sheet 106 that overlaps with a part of the heating area 410-1 as the heating area 410-2 under the second heating condition.

[0063] The processing device 10 superimposes the estimated heating area 410-1 and heating area 410-2 on the image 400 so as to cover the surface of the workpiece unit 100. The processing device 10 displays the image 400 so that the area not heated by the multiple heating parts 63 can be identified as an untreated area 420. For example, the processing device 10 displays the image 400 including the heating area 410-1 under the first heating condition, and then displays the image 400 including the heating area 410-2 under the second heating condition, thereby allowing the operator to recognize the order and areas to be heated.

[0064] The processing device 10, for example, displays an image 400 including a heating area 410-1 under a first heating condition and a heating area 410-2 under a second heating condition, thereby allowing an area where the heating area 410-1 and the heating area 410-2 do not overlap to be recognized as an unprocessed area 420 in the image 400. As described above, the processing device 10 displays the heating area 410-1 and the heating area 410-2 of the heating unit 60 relative to the sheet 106 supporting the workpiece 101, and therefore can assist in confirmation of the area to be heated under the heating conditions.

[0065] In the example shown in the upper diagram of FIG. 11, the heating condition data 300-2 includes a heating condition in which all four heating parts 63 heat in the range of 0 degrees to 90 degrees under the first heating condition. The heating condition data 300-3 includes a heating condition in which all four heating parts 63 heat in the range of 0 degrees to 90 degrees from a first distance while rotating with an offset (X) of -80 and an offset (Y) of -80 under the second heating condition. The heating condition data 300-2 includes a heating condition indicating no heating under the third heating condition. That is, the heating condition data 300-2 includes a heating condition in which the movement paths of the four heating parts 63 do not overlap under the first heating condition and the second heating condition.

[0066] The processing device 10 receives an instruction to simulate heating of the workpiece unit 100 in which the size of the workpiece 101 is the first size described above. The processing device 10 estimates a heating area 410-1 under the first heating condition and a heating area 410-2 under the second heating condition based on a prediction result when the four heating parts 63 of the heating unit 60 are heated under the heating conditions indicated by the heating condition data 300-2. As shown in the lower diagram of FIG. 11, the processing device 10 estimates an annular area near the frame 107 in the exposed part of the sheet 106 as the heating area 410-1 under the first heating condition. The processing device 10 estimates an annular area that does not overlap with the heating area 410-1 and includes a part of the exposed part of the sheet 106 as the heating area 410-2 under the second heating condition.

[0067] The processing device 10 displays the estimated heated region 410-1 and heated region 410-2 superimposed on the image 400 so as to cover the surface of the workpiece unit 100. The processing device 10 displays the image 400 so that the region not heated by the multiple heating parts 63 can be identified as an unprocessed region 420. In the example shown in the lower diagram of FIG. 11, the image 400 indicates that the region between the heated region 410-1 and the heated region 410-2 is the unprocessed region 420.

[0068] For example, the processing device 10 displays an image 400 including a heating region 410-1 under a first heating condition, and then displays an image 400 including a heating region 410-2 under a second heating condition, thereby allowing the user to recognize the order and regions to be heated. In this way, the processing device 10 allows the user to recognize the multiple heating regions 410 in the order in which the heating region 410-1 under the first heating condition and the heating region 410-2 under the second heating condition are heated.

[0069] In the example shown in the upper diagram of FIG. 12, the heating condition data 300-3 includes a heating condition in which all four heating parts 63 heat in the range of 0 degrees to 90 degrees under the first heating condition. The heating condition data 300-3 includes a heating condition in which all four heating parts 63 heat from a first distance while rotating in the range of 0 degrees to 20 degrees under the second heating condition. The heating condition data 300-3 includes a heating condition indicating no heating under the third heating condition. That is, the heating condition data 300-3 includes a heating condition in which the movement paths of the four heating parts 63 partially overlap under the first heating condition and the second heating condition.

[0070] The processing device 10 receives an instruction to simulate heating of the workpiece unit 100 having a second size of the workpiece 101. The second size is larger than the first size described above. The processing device 10 estimates a heating area 410-1 under the first heating condition and a heating area 410-2 under the second heating condition based on a prediction result when the four heating parts 63 of the heating unit 60 are heated under the heating conditions indicated by the heating condition data 300-3. As shown in the lower diagram of FIG. 12, the processing device 10 estimates an annular area including the exposed part of the sheet 106 and the frame 107 as the heating area 410-1 under the first heating condition. The processing device 10 estimates four areas overlapping a part of the heating area 410-1 as the heating area 410-2 under the second heating condition.

[0071] The processing device 10 displays the estimated heating region 410-1 and heating region 410-2 superimposed on the image 400 so as to cover the surface of the workpiece unit 100. The processing device 10 displays the heating region 410-2 superimposed on the heating region 410-1, so that the overlapping heating region 410-2 can be recognized as a first region with a high heating intensity, and the non-overlapping region can be recognized as a second region with a lower heating intensity than the first region. In this way, the processing device 10 can support confirmation of the heating region 410 that is heated multiple times or with a high intensity depending on the heating conditions by displaying the image 400. In addition, the processing device 10 can support confirmation of the heating sequence of the heating conditions by, for example, displaying the heating region 410-1 and heating region 410-2 of the first heating condition in a stepwise manner in the order in which they are heated. A high heating intensity occurs when an area falls on the moving path of the heating section 63 multiple times compared to other areas and thus takes a long time to heat, or when the relative moving speed between the holding table 30 and the underside of the heating section 63 is slow, resulting in a long time for heating, or when the distance between the heating section 63 and the upper surface of the workpiece unit 100 during heating is short, or when the temperature of the heating section 63 during heating is high.

[0072] (Example of processing equipment control) Fig. 13 is a flowchart showing an example of display control of an image including a heating region executed by the processing device 10. The processing procedure shown in Fig. 13 is realized by the control unit 70 of the processing device 10 executing a program. The processing procedure shown in Fig. 13 is executed by the control unit 70 in response to an instruction from an operator.

[0073] 13, the control unit 70 of the processing device 10 causes the touch panel 91 to display the heating condition screen 310 (step 1001). For example, the control unit 70 controls the touch panel 91 to display the screen 310 on which the heating condition data 300 can be set. As a result, the touch panel 91 displays the screen 310 and is ready to accept an operation on the screen 310. When the process of step 1001 ends, the control unit 70 advances the process to step 1002.

[0074] The control unit 70 generates heating information based on the heating conditions set on the screen 310 (step 1002). For example, the control unit 70 generates image data showing an image of the top surface that allows identification of the positional relationship of the workpiece 101, the sheet 106, and the frame 107 to be heated in response to an operation on the simulation button 313 on the screen 310. The control unit 70 generates heating information including the heating area 410 of the heating unit 6, the heating intensity, the heating sequence, etc., by executing a simulation based on the heating conditions of the first heating condition of the heating condition data 300, the specifications of the heating unit 60, the size of the workpiece 101, the size of the frame 107, the configuration of the workpiece unit 100 including the positional relationship between the workpiece 101 and the frame 107, etc. After the process of step 1002 is completed, the control unit 70 advances the process to step 1003.

[0075] The control unit 70 causes the touch panel 91 to display an image 400 including the heating information (step 1003). For example, the control unit 70 controls the touch panel 91 to display an image 400 in which the heated area 410, the untreated area 420, etc. indicated by the heating information are identifiable. As a result, the touch panel 91 displays the image 400 in which at least the heated area 410 is identifiable. When the process of step 1003 ends, the control unit 70 advances the process to step 1004.

[0076] The control unit 70 determines whether all heating conditions have been completed (step 1004). For example, the control unit 70 determines that all heating conditions have been completed when the next heating condition of the heating condition data 300 is not set. When the control unit 70 determines that all heating conditions have not been completed (No in step 1004), the control unit 70 advances the process to step 1005.

[0077] The control unit 70 generates heating information based on the next heating condition (step 1005). For example, the control unit 70 generates heating information including the heating area 410 of the heating unit 6, the heating intensity, the heating sequence, etc., by executing a simulation based on the next heating condition of the heating condition data 300, the specifications of the heating unit 60, the configuration of the workpiece unit 100, etc. When the process of step 1005 is completed, the control unit 70 advances the process to step 1006.

[0078] The control unit 70 causes the touch panel 91 to display an image 400 including heating information for the next heating condition (step 1006). For example, the control unit 70 controls the touch panel 91 to display an image 400 in which the heated area 410, the untreated area 420, etc. indicated by the heating information can be identified. As a result, the touch panel 91 displays the image 400 in which the heated area 410 corresponding to a plurality of heating conditions can be identified. When the process of step 1006 ends, the control unit 70 advances the process to step 1004.

[0079] Furthermore, when the control unit 70 determines that all heating conditions have been completed (Yes in step 1004), the control unit 70 advances the process to step 1007. The control unit 70 ends the display of the image 400 including the heating information (step 1007). For example, the control unit 70 controls the touch panel 91 to end the display of the image 400. When the process of step 1007 ends, the control unit 70 ends the process procedure shown in FIG.

[0080] In the processing procedure shown in FIG. 13, the control unit 70 has been described as displaying the image 400 on the touch panel 91, but the present invention is not limited thereto. For example, the control unit 70 may display the image 400 on the display unit 510 of the information device 500 by instructing the information device 500 to display the image 400 via the communication unit 92. In this case, the control unit 70 may change the scale, size, etc. of the image 400 so that it fits within the screen size of the display unit 510 of the information device 500, and display the changed image on the display unit 510 of the information device 500. The control unit 70 may display the image 400 on at least one of the touch panel 91 and the display unit 510 of the information device 500. The control unit 70 may also display the screen 310 on which the heating conditions can be set on at least one of the touch panel 91 and the display unit 510 of the information device 500.

[0081] The processing apparatus 10 according to the embodiment has been described in the case where the holding surface 31 is heated by the heating unit 60 from above in the vertical direction, but is not limited thereto. FIG. 14 is a schematic cross-sectional view showing another configuration example of the processing apparatus 10. As shown in FIG. 14, the processing apparatus 10 may be configured to heat the sheet 106 by arranging the holding surface 31 facing vertically downward and bringing the holding table 30 and the frame fixing part 40 close to a plurality of heating parts 63 provided at the bottom of the apparatus. In such a configuration, the processing apparatus 10 can display an image 400 including the above-mentioned heated area 410 to assist in checking whether there is an unheated untreated area 420 and whether heating is being performed under the desired heating conditions.

[0082] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0083] 10 Processing equipment 20 Chamber 30 Holding Table 31 Holding surface 32 Frame 33 Adsorption part 34 Vacuum suction source 40 Frame fixing part 50 Seat Expansion Unit 60 Heating Unit 61 Unit body 62 Gripping part 63 Heating section 65 Rotating part 70 Control Unit 71 Setting section 72 Generation part 73 Simulation Department 80 Transport unit 91 Touch Panel 92 Communications Department 100 workpiece units 101 Workpiece 102 Surface 103 Division line 105 Device Chip 106 seats 107 Frames 300,300-1,300-2,300-3 Heating condition data 310 screens 400 images 410,410-1,410-2 Heating area 420 Unprocessed Area

Claims

1. a holding table having a holding surface for holding a workpiece supported via a sheet in an opening of an annular frame; a frame holding unit having a mounting surface on which the frame is placed and holding the frame; a lifting mechanism for lifting and lowering the holding surface relative to the placement surface; a heating unit for heating the sheet exposed between the inner diameter of the frame and the outer diameter of the workpiece; a moving mechanism that supports the heating unit so as to be movable relative to the holding surface; A control unit, The control unit a setting unit that sets heating conditions under which the heating unit heats the sheet; a simulation unit that displays, in an image of the workpiece supported on the frame via the sheet, a heating area of ​​the heating unit based on the heating conditions set by the setting unit in an identifiable manner; A processing apparatus comprising:

2. 2. The processing apparatus according to claim 1, wherein the simulation unit displays the order in which the heating regions are heated in a distinguishable manner.

3. The processing apparatus according to claim 1 , wherein the simulation unit displays the heating region corresponding to any one of the heating conditions included in a heating sequence in which a plurality of the heating conditions are performed in sequence.

4. 2. The processing apparatus according to claim 1, wherein the simulation unit distinguishably displays an area where the heating intensity is relatively high and an area where the heating intensity is relatively low in the heating area.

5. The processing device has a display unit, 2. The processing apparatus according to claim 1, wherein the control unit displays the image generated by the simulation unit on the display unit.

6. The processing device is configured to be connectable to a communication device having a display screen, The control unit 2. The processing apparatus according to claim 1, wherein an image generated by the simulation unit is outputted to the display screen of the communication device.

7. 4. The processing apparatus according to claim 1, wherein the setting unit receives the heating conditions via a touch panel or a communication device.

Images