Semiconductor Device

Abstract

To solve such a problem that, in a transistor portion provided with a lifetime control region, a threshold voltage may decrease due to generation of an interface state at a portion where a channel is formed.SOLUTION: There is provided a semiconductor device in which a lifetime control region including a lifetime killer is provided, below a base region, from at least a part of a transistor portion to a diode portion. The transistor portion includes: a main region spaced apart from the diode portion in a top view of a semiconductor substrate; a boundary region located between the main region and the diode portion and overlapping the lifetime control region, in a top view of a semiconductor substrate; and a plurality of gate trench portions provided from the top surface of the semiconductor substrate to a drift region through the base region. The plurality of gate trench portions includes a first gate trench portion provided in the main region, and a second gate trench portion provided in the boundary region, signal transmission timing of the first gate trench portion being different from signal transmission timing of the second gate trench portion.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a semiconductor device. [Background technology]

[0002] Conventionally, in a semiconductor device in which a transistor section such as an insulated gate bipolar transistor (IGBT) and a diode section are formed on the same substrate, a technique is known in which a particle beam such as helium ions is irradiated to a predetermined depth position of the semiconductor substrate to provide a lifetime control region including a lifetime killer (for example, Patent Document 1). Patent Document 1: JP 2015-185742 A Summary of the Invention [Problem to be solved by the invention]

[0003] In a transistor portion provided with a lifetime control region, the threshold voltage may decrease due to the occurrence of an interface state in a portion where a channel is formed. [Means for solving the problem]

[0004] In a first aspect of the present invention, there is provided a semiconductor device, comprising a semiconductor substrate having a transistor section and a diode section, both of which have a first conductive type drift region provided in the semiconductor substrate and a second conductive type base region provided in the semiconductor substrate above the drift region, a lifetime control region including a lifetime killer is provided in the semiconductor substrate below the base region from at least a part of the transistor section to the diode section, the transistor section has a main region separated from the diode section in a top view of the semiconductor substrate, a boundary region located between the main region and the diode section in a top view of the semiconductor substrate and overlapping with the lifetime control region, and a plurality of gate trench sections provided from the top surface of the semiconductor substrate through the base region to the drift region, the plurality of gate trench sections including a first gate trench section provided in the main region and a second gate trench section provided in the boundary region, and a signal transmission timing of the first gate trench section is different from a signal transmission timing of the second gate trench section.

[0005] The semiconductor device may include a first gate pad electrically connected to the first gate trench portion, and a second gate pad electrically connected to the second gate trench portion.

[0006] The gate capacitance component of the first gate trench portion may be different from the gate capacitance component of the second gate trench portion.

[0007] The thickness of the gate insulating film in the first gate trench portion may be different from the thickness of the gate insulating film in the second gate trench portion.

[0008] The gate insulating film in the second gate trench portion may be thicker than the gate insulating film in the first gate trench portion.

[0009] The gate insulating film in the first gate trench portion may be thicker than the gate insulating film in the second gate trench portion.

[0010] The gate insulating film in the first gate trench portion may be made of a different material from the gate insulating film in the second gate trench portion.

[0011] The gate insulating film in the second gate trench portion may be made of a material having a lower relative dielectric constant than the gate insulating film in the first gate trench portion.

[0012] The gate insulating film in the first gate trench portion may be made of a material having a lower relative dielectric constant than the gate insulating film in the second gate trench portion.

[0013] The above summary of the invention does not list all of the necessary features of the present invention. Also, subcombinations of these features may also be inventions. [Brief description of the drawings]

[0014] [Figure 1] 1 is a diagram illustrating an example of a top surface of a semiconductor device 100 according to an embodiment of the present invention. [Diagram 2] FIG. 2 is an enlarged view of an area A in FIG. [Diagram 3] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. [Figure 4A] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. [Figure 4B] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. [Figure 4C] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. [Figure 4D] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. [Figure 5A] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. [Figure 5B] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. [Figure 6A] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. [Figure 6B] 3 is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention according to the claims. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0016] In this specification, one side in a direction parallel to the depth direction of a semiconductor substrate is referred to as "upper" and the other side as "lower." Of the two main surfaces of a substrate, layer, or other member, one surface is referred to as the upper surface and the other surface is referred to as the lower surface. The directions of "upper" and "lower" are not limited to the direction of gravity or the directions when the semiconductor device is mounted.

[0017] In this specification, technical matters may be explained using orthogonal coordinate axes of X-axis, Y-axis, and Z-axis. The orthogonal coordinate axes merely identify the relative positions of components and do not limit a specific direction. For example, the Z-axis does not limit the height direction relative to the ground. Note that the +Z-axis direction and the -Z-axis direction are opposite directions. When the Z-axis direction is described without indicating positive or negative, it means the +Z-axis and the direction parallel to the Z-axis.

[0018] In this specification, the orthogonal axes parallel to the upper and lower surfaces of the semiconductor substrate are the X-axis and the Y-axis. The axis perpendicular to the upper and lower surfaces of the semiconductor substrate is the Z-axis. In this specification, the direction of the Z-axis may be referred to as the depth direction. In this specification, the direction parallel to the upper and lower surfaces of the semiconductor substrate, including the X-axis and the Y-axis, may be referred to as the horizontal direction.

[0019] In this specification, the terms "same" or "equal" may include cases where there is an error due to manufacturing variations, etc. The error is, for example, within 10%.

[0020] In this specification, the conductivity type of a doped region doped with an impurity is described as P type or N type. In this specification, the impurity may particularly mean either an N type donor or a P type acceptor, and may be described as a dopant. In this specification, doping means introducing a donor or an acceptor into a semiconductor substrate to make it a semiconductor exhibiting an N type conductivity type or a semiconductor exhibiting a P type conductivity type.

[0021] In this specification, the doping concentration means the concentration of donors or acceptors in a thermal equilibrium state. In this specification, the net doping concentration means the net concentration obtained by adding up the donor concentration as the concentration of positive ions and the acceptor concentration as the concentration of negative ions, including the polarity of the charge. As an example, the donor concentration is N D , acceptor concentration N A Then, the net doping concentration at any position is N D -N A It becomes.

[0022] A donor has the function of supplying electrons to a semiconductor. An acceptor has the function of receiving electrons from a semiconductor. Donors and acceptors are not limited to impurities themselves. For example, a VOH defect, which is a combination of a vacancy (V), oxygen (O), and hydrogen (H) present in a semiconductor, functions as a donor that supplies electrons.

[0023] In this specification, when it is described as P+ type or N+ type, it means that the doping concentration is higher than that of P type or N type, and when it is described as P- type or N- type, it means that the doping concentration is lower than that of P type or N type. Also, when it is described as P++ type or N++ type in this specification, it means that the doping concentration is higher than that of P+ type or N+ type.

[0024] In this specification, the chemical concentration refers to the concentration of an impurity measured regardless of the state of electrical activation. The chemical concentration can be measured, for example, by secondary ion mass spectrometry (SIMS). The above-mentioned net doping concentration can be measured by voltage-capacitance measurement (CV). The carrier concentration measured by spreading resistance measurement (SR) may be the net doping concentration. The carrier concentration measured by CV or SR may be a value in a thermal equilibrium state. In the N-type region, the donor concentration is sufficiently larger than the acceptor concentration, so the carrier concentration in the region may be the donor concentration. Similarly, in the P-type region, the carrier concentration in the region may be the acceptor concentration.

[0025] In addition, when the concentration distribution of the donor, acceptor or net doping has a peak, the peak value may be taken as the concentration of the donor, acceptor or net doping in the region. In cases where the concentration of the donor, acceptor or net doping is almost uniform, the average value of the concentration of the donor, acceptor or net doping in the region may be taken as the concentration of the donor, acceptor or net doping.

[0026] The carrier concentration measured by the SR method may be lower than the concentration of the donor or acceptor. In the range where the current flows when measuring the spreading resistance, the carrier mobility of the semiconductor substrate may be lower than the value in the crystalline state. The reduction in carrier mobility occurs when the carriers are scattered due to a disorder in the crystal structure caused by lattice defects, etc.

[0027] The donor or acceptor concentration calculated from the carrier concentration measured by the CV method or the SR method may be lower than the chemical concentration of the element representing the donor or acceptor. As an example, the donor concentration of phosphorus or arsenic, which acts as a donor in a silicon semiconductor, or the acceptor concentration of boron, which acts as an acceptor, is about 99% of the chemical concentration. On the other hand, the donor concentration of hydrogen, which acts as a donor in a silicon semiconductor, is about 0.1% to 10% of the chemical concentration of hydrogen.

[0028] Fig. 1 is a diagram showing an example of the top surface of a semiconductor device 100 according to an embodiment of the present invention. Fig. 1 shows the positions of each component projected onto the top surface of a semiconductor substrate 10. Fig. 1 shows only some of the components of the semiconductor device 100, and some components are omitted.

[0029] The semiconductor device 100 includes a semiconductor substrate 10. The semiconductor substrate 10 has end sides 102 in a top view. In this specification, the term "top view" simply refers to a view from the top surface side of the semiconductor substrate 10. The semiconductor substrate 10 of this example has two pairs of end sides 102 that face each other in a top view. In FIG. 1, the X-axis and the Y-axis are parallel to one of the end sides 102. The Z-axis is perpendicular to the top surface of the semiconductor substrate 10.

[0030] An active region 160 is provided in the semiconductor substrate 10. The active region 160 is a region through which a main current flows in the depth direction between the upper and lower surfaces of the semiconductor substrate 10 when the semiconductor device 100 is in operation. An emitter electrode is provided above the active region 160, but is omitted in FIG.

[0031] At least one of a transistor section 70 including a transistor element such as an IGBT and a diode section 80 including a diode element such as a free wheel diode (FWD) is provided in the active region 160. In the example of Fig. 1, the transistor section 70 and the diode section 80 are alternately arranged along a predetermined arrangement direction (X-axis direction in this example) on the upper surface of the semiconductor substrate 10. In another example, only one of the transistor section 70 and the diode section 80 may be provided in the active region 160.

[0032] In FIG. 1, the region in which the transistor section 70 is arranged is marked with the symbol "I", and the region in which the diode section 80 is arranged is marked with the symbol "F". In this specification, the direction perpendicular to the arrangement direction in a top view may be referred to as the extension direction (Y-axis direction in FIG. 1). The transistor section 70 and the diode section 80 may each have a longitudinal direction in the extension direction. That is, the length of the transistor section 70 in the Y-axis direction is greater than its width in the X-axis direction. Similarly, the length of the diode section 80 in the Y-axis direction is greater than its width in the X-axis direction. The extension direction of the transistor section 70 and the diode section 80 may be the same as the longitudinal direction of each trench section described later.

[0033] The diode section 80 has an N+ type cathode region in a region in contact with the lower surface of the semiconductor substrate 10. In this specification, the region in which the cathode region is provided is referred to as the diode section 80. In other words, the diode section 80 is a region that overlaps with the cathode region in a top view. A P+ type collector region may be provided in a region other than the cathode region on the lower surface of the semiconductor substrate 10. In this specification, an extension region 81 in which the diode section 80 is extended in the Y-axis direction to a gate runner, which will be described later, may also be included in the diode section 80. A collector region is provided on the lower surface of the extension region 81.

[0034] The transistor section 70 has a P+ type collector region in a region in contact with the lower surface of the semiconductor substrate 10. In addition, the transistor section 70 has a gate structure, which has an N type emitter region, a P type base region, a gate conductive portion, and a gate insulating film, periodically arranged on the upper surface side of the semiconductor substrate 10.

[0035] The semiconductor device 100 may have one or more pads above the semiconductor substrate 10 in addition to the emitter electrode pad (emitter electrode 52). As an example, the semiconductor device 100 shown in FIG. 1 has two gate pads G1 and G2, but this is merely an example. The semiconductor device 100 may have one or three or more gate pads. The semiconductor device 100 may also have pads such as an anode pad and a cathode pad of a temperature detection diode, a current detection pad, etc. Each pad other than the emitter electrode pad is disposed near the edge 102. The vicinity of the edge 102 refers to the region between the edge 102 and the emitter electrode pad in a top view. When the semiconductor device 100 is mounted, each pad may be connected to an external circuit via wiring such as a wire.

[0036] A gate potential is applied to the gate pads. The gate pads G1 and G2 are electrically connected to conductive parts of the gate trench parts of the active region 160. The semiconductor device 100 includes a gate runner that connects the gate pads G1 and G2 to the gate trench parts.

[0037] The first gate runner 131 and the second gate runner 132 are disposed between the active region 160 and the edge 102 of the semiconductor substrate 10 in a top view. The first gate runner 131 and the second gate runner 132 of this example surround the active region 160 in a top view. The region surrounded by the inner gate runner (the second gate runner 132 in FIG. 1 ) in a top view may be the active region 160.

[0038] 1, when the semiconductor device 100 has two gate pads (gate pads G1 and G2) and two gate runners (a first gate runner 131 and a second gate runner 132), the first gate runner 131 is connected to the gate pad G1, and the second gate runner 132 is connected to the gate pad G2. The first gate runner 131 and the second gate runner 132 are disposed above the semiconductor substrate 10. The first gate runner 131 and the second gate runner 132 in this example may be formed from a metal containing aluminum as a main component, such as polysilicon or an aluminum-silicon alloy.

[0039] The semiconductor device 100 of this example includes an edge termination structure 90 between the active region 160 and the edge 102. The edge termination structure 90 of this example is disposed between the first gate runner 131 and the edge 102. The edge termination structure 90 relieves electric field concentration on the upper surface side of the semiconductor substrate 10. The edge termination structure 90 may include multiple guard rings. The guard ring is a P-type region in contact with the upper surface of the semiconductor substrate 10. By providing multiple guard rings, the depletion layer on the upper surface side of the active region 160 can be extended outward, improving the breakdown voltage of the semiconductor device 100. The edge termination structure 90 may further include at least one of a field plate and a resurf provided in a ring shape surrounding the active region 160.

[0040] Furthermore, the semiconductor device 100 may include a temperature sensor (not shown) that is a PN junction diode made of polysilicon or the like, and a current detector (not shown) that operates in a similar manner to a transistor portion provided in the active region 160.

[0041] Fig. 2 is an enlarged view of a region A in Fig. 1. Region A includes a transistor portion 70 and a diode portion 80.

[0042] The semiconductor device 100 of this example includes a gate trench portion 40, a dummy trench portion 30, a well region 11, an emitter region 12, a base region 14, and a contact region 15 provided on the upper surface side of a semiconductor substrate 10. The gate trench portion 40 and the dummy trench portion 30 are each an example of a trench portion. The semiconductor device 100 of this example also includes an emitter electrode 52 provided above the upper surface of the semiconductor substrate 10. The emitter electrode 52, the first gate runner 131, and the second gate runner 132 are provided separately from each other.

[0043] An interlayer insulating film is provided between the emitter electrode 52, the first gate runner 131, and the second gate runner 132 and the upper surface of the semiconductor substrate 10, but is omitted in Fig. 2. In the interlayer insulating film of this example, contact holes 49, 54, and 56 are provided so as to penetrate the interlayer insulating film. In Fig. 2, each contact hole is hatched with oblique lines.

[0044] The emitter electrode 52 is provided above the gate trench portion 40, the dummy trench portion 30, the well region 11, the emitter region 12, the base region 14, and the contact region 15. The emitter electrode 52 contacts the emitter region 12, the contact region 15, and the base region 14 on the upper surface of the semiconductor substrate 10 through a contact hole 54. The emitter electrode 52 is also connected to a dummy conductive portion in the dummy trench portion 30 through a contact hole 56. The emitter electrode 52 may be connected to the dummy conductive portion of the dummy trench portion 30 at the tip of the dummy trench portion 30 in the Y-axis direction.

[0045] The first gate runner 131 and the second gate runner 132 contact the first gate lead-out conductive portion 47 and the second gate lead-out conductive portion 48 through the contact hole 49. The first gate lead-out conductive portion 47 and the second gate lead-out conductive portion 48 are formed of polysilicon doped with impurities or the like. The first gate lead-out conductive portion 47 and the second gate lead-out conductive portion 48 are connected to the gate conductive portion in the gate trench portion 40 on the upper surface of the semiconductor substrate.

[0046] The first gate runner 131 and the second gate runner 132 are not connected to the dummy conductive portion in the dummy trench portion 30. The first gate lead conductive portion 47 and the second gate lead conductive portion 48 of this example are provided from below the contact hole 49 to the tip portion of the gate trench portion 40. An insulating film such as an oxide film is provided between the first gate lead conductive portion 47 and the second gate lead conductive portion 48 and the upper surface of the semiconductor substrate 10. At the tip portion of the gate trench portion 40, the gate conductive portion is exposed to the upper surface of the semiconductor substrate. The gate trench portion 40 contacts the first gate lead conductive portion 47 and the second gate lead conductive portion 48 at the exposed portion of the gate conductive portion. The first gate lead conductive portion 47 and the second gate lead conductive portion 48 may be formed simultaneously when the gate conductive portion is deposited.

[0047] The emitter electrodes 52 are formed of a material containing metal. For example, at least a portion of each electrode is formed of aluminum or an aluminum-silicon alloy. Each electrode may have a barrier metal made of titanium, a titanium compound, or the like under the region made of aluminum or the like. Each electrode may also have a plug made of tungsten or the like in a contact hole.

[0048] The well region 11 is provided so as to overlap the first gate runner 131 and the second gate runner 132. The well region 11 is also provided so as to extend by a predetermined width in a range where it does not overlap the first gate runner 131 and the second gate runner 132. The well region 11 in this example is provided away from the end of the contact hole 54 in the Y-axis direction toward the first gate runner 131 and the second gate runner 132 side. The well region 11 is a region of a second conductivity type having a doping concentration higher than that of the base region 14. The base region 14 in this example is of P- type, and the well region 11 is of P+ type. The well region 11 is also formed from the upper surface of the semiconductor substrate 10 to a position deeper than the lower end of the base region 14.

[0049] Each of the transistor section 70 and the diode section 80 has a plurality of trench sections arranged in the arrangement direction. In the transistor section 70 of this example, one or more gate trench sections 40 and one or more dummy trench sections 30 are alternately provided along the arrangement direction. In the diode section 80 of this example, a plurality of dummy trench sections 30 are provided along the arrangement direction. In the diode section 80 of this example, no gate trench section 40 is provided.

[0050] The gate trench portion 40 in this example may have two straight line portions 39 (portions of the trench that are straight along the extension direction) extending along an extension direction perpendicular to the arrangement direction, and a tip portion 41 connecting the two straight line portions 39. The extension direction in FIG. 2 is the Y-axis direction.

[0051] At least a part of the tip portion 41 is preferably curved in a top view. By connecting the ends of the two straight portions 39 in the Y-axis direction with each other by the tip portion 41, electric field concentration at the ends of the straight portions 39 can be alleviated.

[0052] In the transistor section 70, the dummy trench section 30 is provided between the respective straight line portions 39 of the gate trench section 40. One dummy trench section 30 may be provided between the respective straight line portions 39, or a plurality of dummy trench sections 30 may be provided. The dummy trench section 30 may have a straight line shape extending in the extension direction, and may have a straight line portion 29 and a tip section 31, similar to the gate trench section 40. The semiconductor device 100 shown in FIG. 2 includes both a straight line dummy trench section 30 without a tip section 31 and a dummy trench section 30 with a tip section 31.

[0053] The diffusion depth of the well region 11 may be deeper than the depth of the gate trench portion 40 and the dummy trench portion 30. The ends in the Y-axis direction of the gate trench portion 40 and the dummy trench portion 30 are provided in the well region 11 when viewed from above. That is, at the ends in the Y-axis direction of each trench portion, the bottoms in the depth direction of each trench portion are covered by the well region 11. This makes it possible to alleviate electric field concentration at the bottoms of each trench portion.

[0054] A mesa portion is provided between each trench portion in the arrangement direction. The mesa portion refers to a region in the semiconductor substrate 10 that is sandwiched between the trench portions. As an example, the upper end of the mesa portion is the upper surface of the semiconductor substrate 10. The depth position of the lower end of the mesa portion is the same as the depth position of the lower end of the trench portion. The mesa portion in this example is sandwiched between adjacent trench portions in the X-axis direction, and is provided on the upper surface of the semiconductor substrate 10 so as to extend in the extension direction (Y-axis direction) along the trench. In this example, the transistor portion 70 is provided with a mesa portion 60, and the diode portion 80 is provided with a mesa portion 61. In this specification, when the term "mesa portion" is used, it refers to each of the mesa portion 60 and the mesa portion 61.

[0055] Each mesa portion is provided with a base region 14. In each mesa portion, at least one of a first conductive type emitter region 12 and a second conductive type contact region 15 may be provided in a region sandwiched between the base regions 14 in a top view. In this example, the emitter region 12 is N+ type, and the contact region 15 is P+ type. The emitter region 12 and the contact region 15 may be provided between the base region 14 and the upper surface of the semiconductor substrate 10 in the depth direction.

[0056] The mesa portion 60 of the transistor portion 70 has an emitter region 12 exposed on the upper surface of the semiconductor substrate 10. The emitter region 12 is provided in contact with the gate trench portion 40. The mesa portion 60 in contact with the gate trench portion 40 may be provided with a contact region 15 exposed on the upper surface of the semiconductor substrate 10.

[0057] Each of the contact region 15 and the emitter region 12 in the mesa portion 60 is provided from one trench portion to the other trench portion in the X-axis direction. As an example, the contact region 15 and the emitter region 12 in the mesa portion 60 are alternately arranged along the extension direction of the trench portion (the Y-axis direction).

[0058] In another example, the contact region 15 and the emitter region 12 of the mesa portion 60 may be provided in a stripe shape along the extension direction (Y-axis direction) of the trench portion. For example, the emitter region 12 is provided in a region in contact with the trench portion, and the contact region 15 is provided in a region sandwiched between the emitter regions 12.

[0059] No emitter region 12 is provided in the mesa portion 61 of the diode portion 80. A base region 14 and a contact region 15 may be provided on the upper surface of the mesa portion 61. In a region sandwiched between the base regions 14 on the upper surface of the mesa portion 61, a contact region 15 may be provided in contact with each base region 14. In a region sandwiched between the contact regions 15 on the upper surface of the mesa portion 61, a base region 14 may be provided. The base region 14 may be disposed in the entire region sandwiched between the contact regions 15.

[0060] A contact hole 54 is provided above each mesa portion. The contact hole 54 is disposed in a region sandwiched between the base regions 14. In this example, the contact hole 54 is provided above each of the contact region 15, the base region 14, and the emitter region 12. The contact hole 54 may be disposed in the center of the arrangement direction of the mesa portions 60 (X-axis direction).

[0061] In the diode section 80, an N+ type cathode region 82 is provided in a region adjacent to the lower surface of the semiconductor substrate 10. In the lower surface of the semiconductor substrate 10, a P+ type collector region 22 may be provided in a region where the cathode region 82 is not provided. In FIG. 2, the boundary between the cathode region 82 and the collector region 22 is indicated by a dotted line.

[0062] The cathode region 82 is disposed away from the well region 11 in the Y-axis direction. This ensures a distance between the cathode region 82 and a P-type region (well region 11) that has a relatively high doping concentration and is formed to a deep position, thereby improving the breakdown voltage. In this example, the end of the cathode region 82 in the Y-axis direction is disposed farther from the well region 11 than the end of the contact hole 54 in the Y-axis direction. In another example, the end of the cathode region 82 in the Y-axis direction may be disposed between the well region 11 and the contact hole 54.

[0063] 1 and 2 have two gate runners, i.e., a first gate runner 131 and a second gate runner 132, but this is merely an example. In FIGS. 1 and 2, the second gate runner 132 is provided inside the first gate runner 131, but the first gate runner 131 may be provided inside the second gate runner 132. Also, the two gate runners are arranged parallel to the end side 102, but this is merely an example. The two gate runners may be arranged above and below in the depth direction (Z-axis direction).

[0064] 2, the two gate runners are connected to the gate trench portion on both inner sides of the end sides 102 facing each other in the extension direction (Y-axis direction), but this is merely an example. The two gate runners may be arranged so that the connections between the two gate runners and the gate trench portion are made only on the inner side of one of the facing end sides 102, so that the two gate runners do not run parallel to each other.

[0065] 1, the connection wiring between the gate pad G2 and the second gate runner 132 is depicted as intersecting with the first gate runner 131, but this is not limited thereto. One gate runner (e.g., the first gate runner 131) may be arranged so as to extend outside the other gate pad (e.g., the gate pad G2) and not to intersect with the other gate runner (e.g., the second gate runner 132).

[0066] Fig. 3 is a diagram showing an example of the a-a' cross section and its electrical connections in Fig. 2. The a-a' cross section is an XZ plane passing through the emitter region 12, the base region 14, the gate trench portion 40, and the dummy trench portion 30. The semiconductor device 100 of this example has a semiconductor substrate 10, an interlayer insulating film 38, an emitter electrode 52, and a collector electrode 24 in the a-a' cross section.

[0067] The interlayer insulating film 38 is provided on the upper surface 21 of the semiconductor substrate 10. The interlayer insulating film 38 is an insulating film such as silicate glass doped with impurities such as boron or phosphorus. The interlayer insulating film 38 may be in contact with the upper surface 21, or another film such as an oxide film may be provided between the interlayer insulating film 38 and the upper surface 21. The interlayer insulating film 38 is provided with the contact hole 54 described in FIG. 2 .

[0068] The emitter electrode 52 is provided on the upper surface 21 of the semiconductor substrate 10 and the upper surface of the interlayer insulating film 38. The emitter electrode 52 is in electrical contact with the upper surface 21 through a contact hole 54 provided in the interlayer insulating film 38. A contact plug of tungsten (W) or the like may be provided inside the contact hole 54 via a barrier metal. The collector electrode 24 is provided on the lower surface 23 of the semiconductor substrate 10. The emitter electrode 52 and the collector electrode 24 are formed of a material containing metal.

[0069] The semiconductor substrate 10 may be a silicon substrate, a silicon carbide substrate, a nitride semiconductor substrate such as gallium nitride, etc. The semiconductor substrate 10 in this example is a silicon substrate.

[0070] The semiconductor substrate 10 includes a drift region 18 of a first conductivity type. In this example, the drift region 18 is an N-type. The drift region 18 may be a remaining region of the semiconductor substrate 10 in which no other doped regions are provided.

[0071] One or more accumulation regions 16 may be provided in the Z-axis direction above the drift region 18. The accumulation region 16 is a region in which the same dopant as the drift region 18 is accumulated at a higher concentration than the drift region 18. The doping concentration of the accumulation region 16 is higher than the doping concentration of the drift region 18. By providing the accumulation region 16, the carrier injection enhancement effect (IE effect) can be enhanced, and the on-voltage can be reduced.

[0072] In the transistor section 70, an emitter region 12 is provided above the base region 14 in contact with the upper surface 21. The emitter region 12 is provided in contact with the gate trench section 40. The doping concentration of the emitter region 12 is higher than the doping concentration of the drift region 18. Examples of dopants for the emitter region 12 include arsenic (As), phosphorus (P), and antimony (Sb).

[0073] In the mesa portion 61 of the diode section 80, a contact region 15 is provided above the base region 14 in contact with the upper surface 21. The contact region 15 may be provided in contact with the dummy trench portion 30.

[0074] A first conductive type buffer region 20 may be provided below the drift region 18. In this example, the buffer region 20 is N-type. The doping concentration of the buffer region 20 is higher than the doping concentration of the drift region 18. The buffer region 20 may function as a field stop layer that prevents a depletion layer extending from the lower surface side of the base region 14 from reaching the collector region 22 and the cathode region 82.

[0075] In the diode section 80, a cathode region 82 is provided below the buffer region 20. The cathode region 82 may be provided at the same depth as the collector region 22 of the transistor section 70. The diode section 80 may function as a freewheeling diode (FWD) that flows a freewheeling current that conducts in the reverse direction when the transistor section 70 is turned off.

[0076] In the transistor section 70, the collector region 22 is provided below the buffer region 20. The collector region 22 may be provided in contact with the cathode region 82 at the lower surface 23.

[0077] A gate trench portion 40 and a dummy trench portion 30 are provided in the semiconductor substrate 10. The gate trench portion 40 and the dummy trench portion 30 are provided so as to penetrate from the upper surface 21 through the base region 14 and the accumulation region 16 to reach the drift region 18. The trench portion penetrating the doping region is not limited to being manufactured in the order of forming the doping region and then the trench portion. The trench portion penetrating the doping region also includes a case where the doping region is formed between the trench portions after the trench portions are formed.

[0078] The gate trench portion 40 has a gate trench, a gate insulating film 42, and a gate conductive portion 44 provided on the upper surface 21. The gate insulating film 42 is provided to cover the inner wall of the gate trench. The gate insulating film 42 may be formed by oxidizing or nitriding the semiconductor on the inner wall of the gate trench. The gate conductive portion 44 is provided inside the gate trench, further inward than the gate insulating film 42. The upper surface of the gate conductive portion 44 may be in the same XY plane as the upper surface 21. The gate insulating film 42 insulates the gate conductive portion 44 from the semiconductor substrate 10. The gate conductive portion 44 is formed of a semiconductor such as polysilicon doped with impurities.

[0079] The gate conductive portion 44 may be provided longer in the depth direction than the base region 14. The gate trench portion 40 is covered at the upper surface 21 with the interlayer insulating film 38. When a predetermined voltage is applied to the gate conductive portion 44, a channel is formed by an electron inversion layer in the surface layer of the interface of the base region 14 that contacts the gate trench.

[0080] The dummy trench portion 30 may have the same structure as the gate trench portion 40 in the XZ cross section. The dummy trench portion 30 has a dummy trench provided on the upper surface 21, a dummy insulating film 32, and a dummy conductive portion 34. The dummy insulating film 32 is provided to cover the inner wall of the dummy trench. The dummy insulating film 32 may be formed by oxidizing or nitriding the semiconductor on the inner wall of the dummy trench. The dummy conductive portion 34 is provided inside the dummy insulating film 32 inside the dummy trench. The upper surface of the dummy conductive portion 34 may be in the same XY plane as the upper surface 21. The dummy insulating film 32 insulates the dummy conductive portion 34 from the semiconductor substrate 10. The dummy conductive portion 34 may be formed of the same material as the gate conductive portion 44.

[0081] In this example, the gate trench portion 40 and the dummy trench portion 30 are covered on the upper surface 21 with an interlayer insulating film 38. The bottoms of the dummy trench portion 30 and the gate trench portion 40 may be curved (curved in cross section) convex downward.

[0082] In the semiconductor substrate 10, a lifetime control region 85 including a lifetime killer is locally provided in the drift region 18. The lifetime control region 85 is formed to suppress hole current generated from the base region 14 to the cathode region 82 when the diode section 80 is conductive, and to reduce reverse recovery loss. In addition, when the diode section 80 is conductive, hole current also flows from the base region 14 to the adjacent cathode region 82 in the transistor section 70, so it is preferable to form the lifetime control region 85.

[0083] The lifetime control region 85 may be formed by irradiating a particle beam from the upper surface 21 or the lower surface 23. As an example, a region of the transistor section 70 that is not to be irradiated with the particle beam is shielded with a mask, and the particle beam is irradiated to the transistor section 70 and the diode section 80. The particle beam is not irradiated to the region shielded by the mask.

[0084] 3, the peak position in the Z-axis direction of the lifetime killer concentration distribution is indicated by the symbol "x." The peak position in the Z-axis direction of lifetime control region 85 in this example may be equal to the position in the Z-axis direction of the lower surface of well region 11, or may be located lower than the position in the Z-axis direction of the lower surface of well region 11. Furthermore, lifetime control region 85 may be formed so as to have multiple peaks in the lifetime killer concentration distribution in the Z-axis direction.

[0085] An example of the lifetime killer is helium injected at a predetermined depth. By injecting helium, crystal defects can be formed in the semiconductor substrate 10. The lifetime killer may be protons or an electron beam injected at a predetermined depth. By injecting an electron beam or protons, crystal defects can also be formed in the semiconductor substrate 10.

[0086] 3, the lifetime control region 85 of this example is provided continuously from below the gate trench portion 40 closest to the diode portion 80 in the X-axis direction to the diode portion 80. The lifetime control region 85 is provided continuously from the diode portion 80 to at least a part of the transistor portion 70 in the X-axis direction. An end K on the negative side of the X-axis of the lifetime control region 85 may be disposed below the gate trench portion 40 closest to the diode portion 80.

[0087] In the present example, the transistor section 70 has, in a top view, a main region 71 spaced apart from the diode section 80, and a boundary region 72 located between the main region 71 and the diode section 80. The main region 71 is a region of the transistor section 70 that is not irradiated with a particle beam, and the boundary region 72 is a region of the transistor section 70 that is irradiated with a particle beam and overlaps with a lifetime control region 85.

[0088] For example, when the particle beam is irradiated from the upper surface 21, the irradiated particle beam passes through the base region 14 and the gate trench portion 40 in the boundary region 72. This may change the interface state of the region where the channel is formed in the base region 14. This may cause the threshold voltage in the boundary region 72 to decrease.

[0089] Furthermore, when a particle beam is irradiated from the lower surface 23, the irradiated particle beam may reach the base region 14 and the gate trench portion 40 in the boundary region 72 due to variations in irradiation. This may cause a change in the interface state of the region where the channel is formed in the base region 14, and a decrease in the threshold voltage in the boundary region 72.

[0090] For this reason, in the boundary region 72, the timing at which the gate trench portion 40 turns on is earlier than in the main region 71, while the timing at which it turns off is later, which may result in a difference in the timing of conduction.

[0091] The gate trench portion 40 of this example includes a first gate trench portion 45 provided in the main region 71 and a second gate trench portion 46 provided in the boundary region 72. The first gate trench portion 45 is electrically connected to the first gate runner 131, and is electrically connected to the gate pad G1 via the first gate runner 131. The gate pad G1 is electrically connected to the drive circuit 510-1. The drive circuit 510-1 transmits a drive signal to the first gate trench portion 45 via the gate pad G1 and the first gate runner 131. In this specification, the connection to the gate conductive portion in the gate trench portion may be simply referred to as the electrical connection to the gate trench portion.

[0092] The second gate trench portion 46 is electrically connected to the second gate runner 132, and is electrically connected to the gate pad G2 via the second gate runner 132. The second gate trench portion 46 is provided in the boundary region 72 and indicates the gate trench portion 40 irradiated with a particle beam. The gate pad G2 is electrically connected to a drive circuit 510-2. The drive circuit 510-2 transmits a drive signal to the second gate trench portion 46 via the gate pad G2 and the second gate runner 132.

[0093] As described above, by forming the lifetime control region 85, the threshold voltage of the second gate trench portion 46 in the boundary region 72 irradiated with the particle beam decreases, and a shift in the timing of conduction between the first gate trench portion 45 and the second gate trench portion 46 may occur.

[0094] In this example, the first gate runner 131 and the second gate runner 132 are connected to different gate pads G1 and G2, respectively. The gate pad G1 is connected to a drive circuit 510-1, and the gate pad G2 is connected to a drive circuit 510-2. By connecting the gate pads G1 and G2 to the separate drive circuits 510-1 and 510-2, the signal transmission timings of the first gate trench portion 45 and the second gate trench portion 46 can be made different, and the conduction timings of the first gate trench portion 45 and the second gate trench portion 46 can be synchronized.

[0095] Alternatively, as described later, the gate pad G1 and the gate pad G2 may be connected in parallel to one drive circuit 510 via resistors. The resistors may be connected to an external terminal in which the semiconductor device 100 is packaged. Also, the gate pads G1 and G2 may be connected to two external terminals in the package, respectively, and when mounted on the power conversion device, each external terminal may be connected to the drive circuit 510 via a different resistor.

[0096] 4A is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. As shown in FIG. 4A, the gate pad G1 is electrically connected to the gate pad G2 via a resistor 601. The gate pad G2 is connected to a drive circuit 510. In this case, the transmission of a signal from the gate pad G2 to the second gate trench portion 46 becomes faster than the transmission of a signal to the first gate trench portion 45 via the gate pad G1, and the off timing can be synchronized.

[0097] 4B is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. As shown in FIG. 4B, the gate pad G2 is electrically connected to the gate pad G1 via a resistor 602. The gate pad G1 is connected to a drive circuit 510. In this case, the transmission of a signal from the gate pad G2 to the second gate trench portion 46 is slower than the transmission of a signal to the first gate trench portion 45 via the gate pad G1, so that the on-timing can be synchronized.

[0098] 4C is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. As shown in FIG. 4C, the gate pad G1 is connected to a resistor 601, and the gate pad G2 is connected to a resistor 602. The gate pad G1 and the gate pad G2 are connected to the drive circuit 510 via the resistors 601 and 602. Here, the resistance value of the resistor 601 is R 601 , the resistance value of resistor 602 is R 602 Let us assume that.

[0099] The resistance is R 601 >R 602 In this case, the transmission of the signal from the gate pad G2 to the second gate trench portion 46 is faster than the transmission of the signal to the first gate trench portion 45 via the gate pad G1, and the off timing can be synchronized.

[0100] Also, the resistance value is R 602 >R 601In this case, the transmission of the signal from the gate pad G2 to the second gate trench portion 46 is slower than the transmission of the signal to the first gate trench portion 45 via the gate pad G1, so that the on-timing can be synchronized.

[0101] 4D is a diagram showing an example of a-a' cross section in FIG. 2 and its electrical connection. As shown in FIG. 4D, the gate pads G1 and G2 are connected to the drive circuit 510 via rectifier elements and resistors 611, 612, 621, and 622. The resistors 611, 612, 621, and 622 are connected to the anode sides of the rectifier elements, respectively, and the resistors and rectifier elements form a pair. The rectifier elements are connected in inverse parallel to the gate pads G1 and G2. The gate pads G1 and G2 are connected to the drive circuit 510 via the rectifier elements and resistors.

[0102] Here, the resistance value of resistor 611 is R 611 , the resistance value of resistor 612 is R 612 In addition, the resistance value of resistor 621 is R 621 , the resistance value of resistor 622 is R 622 The resistance of each resistor is R 611 <R 612 , R 621 >R 622 It is.

[0103] When the resistance values ​​of resistors 611 and 612 are greater than the resistance values ​​of resistors 612 and 621, the transmission of a signal from gate pad G2 to the second gate trench portion 46 becomes faster than the transmission of a signal to the first gate trench portion 45 via gate pad G1, and the off timing can be synchronized.

[0104] Furthermore, when the resistance values ​​of resistors 611 and 612 are smaller than the resistance values ​​of resistors 612 and 621, the transmission of a signal from gate pad G2 to the second gate trench portion 46 is slower than the transmission of a signal to the first gate trench portion 45 via gate pad G1, and the on-timing can be synchronized. In this example, the on- and off-timings can be synchronized by the resistance values. Note that resistors 611 and 622 do not have to be provided.

[0105] Fig. 5A is a diagram showing an example of the aa' cross section and its electrical connection in Fig. 2. Fig. 5A shows a case where the gate capacitance component of the first gate trench portion 45 is larger than the gate capacitance component of the second gate trench portion 46.

[0106] Fig. 5B is a diagram showing an example of the aa' cross section and its electrical connection in Fig. 2. Fig. 5B shows a case where the gate capacitance component of the first gate trench portion 45 is smaller than the gate capacitance component of the second gate trench portion 46.

[0107] 5A and 5B show a configuration example in which the semiconductor device 100 includes one gate pad, and the on / off timing of the first gate trench portion 45 and the second gate trench portion 46 are synchronized.

[0108] 5A and 5B of the present embodiment includes one gate pad G. The first gate trench portion 45 and the second gate trench portion 46 may be electrically connected to the gate pad G by the same gate runner, or may be electrically connected to the gate pad G by different gate runners.

[0109] In this example, the gate capacitance component of the first gate trench portion 45 is different from the gate capacitance component of the second gate trench portion 46. Here, in this specification, the gate capacitance component refers to the sum of all capacitance components in the transmission path of the gate signal up to the gate trench portion. For example, the gate capacitance component of the gate trench portion is not only the capacitance component of the gate conductive portion, but also the capacitance components of the gate pad, the gate runner, and all members electrically connected to these.

[0110] When the gate capacitance component of the first gate trench portion 45 shown in FIG. 5A is larger than the gate capacitance component of the second gate trench portion 46, the signal transmission from the gate pad G to the second gate trench portion 46 becomes faster than the signal transmission to the first gate trench portion 45, and the off timing can be synchronized.

[0111] On the other hand, when the gate capacitance component of the first gate trench portion 45 shown in FIG. 5B is smaller than the gate capacitance component of the second gate trench portion 46, the transmission of the signal from the gate pad G to the second gate trench portion 46 is slower than the transmission of the signal to the first gate trench portion 45, and the on timing can be synchronized.

[0112] 5A, the gate insulating film 42b of the second gate trench portion 46 may be formed of a material having a lower relative dielectric constant than the gate insulating film 42a of the first gate trench portion 45. For example, the gate insulating film 42b of the second gate trench portion 46 may be formed of SiO2, and the gate insulating film 42a of the first gate trench portion 45 may be formed of a material having a higher relative dielectric constant than SiO2, such as HfO2, HfSiO, HfSiON, HfAlO, TiO2, Ta2O5, HfSiO4, ZrO2, ZrSiO4, La2O3, or Si3N4.

[0113] Alternatively, for example, the gate insulating film 42b of the second gate trench portion 46 may be formed of a material having a lower dielectric constant than SiO2, such as SiOF, SiOC, an organic polymer, or a form including a cavity, and the gate insulating film 42a of the first gate trench portion 45 may be formed of SiO2.

[0114] As a result, the gate capacitance component of the second gate trench portion 46 becomes smaller than the gate capacitance component of the first gate trench portion 45, and the response of the second gate trench portion 46 becomes faster. In other words, the turn-off timing of the second gate trench portion 46 becomes earlier, and the delay due to the decrease in the threshold voltage is offset, so that the turn-off timing of the first gate trench portion 45 and the second gate trench portion 46 can be synchronized.

[0115] 5B, the gate insulating film 42b in the second gate trench portion 46 may be made of a material having a higher dielectric constant than the gate insulating film 42a in the first gate trench portion 45. For example, the gate insulating film 42b in the second gate trench portion 46 may be made of a material having a higher dielectric constant than SiO2, such as HfO2, HfSiO, HfSiON, HfAlO, TiO2, Ta2O5, HfSiO4, ZrO2, ZrSiO4, La2O3, or Si3N4, and the gate insulating film 42a in the first gate trench portion 45 may be made of SiO2.

[0116] Alternatively, for example, the gate insulating film 42b of the second gate trench portion 46 may be formed of SiO2, and the gate insulating film 42a of the first gate trench portion 45 may be formed of a material having a lower dielectric constant than SiO2, such as SiOF, SiOC, an organic polymer, or a form including a cavity.

[0117] As a result, the gate capacitance component of the second gate trench portion 46 becomes larger than the gate capacitance component of the first gate trench portion 45, slowing down the response of the second gate trench portion 46. In other words, the turn-on timing of the second gate trench portion 46 becomes later, and the time advanced by the decrease in the threshold voltage is offset, so that the turn-on timings of the first gate trench portion 45 and the second gate trench portion 46 can be synchronized.

[0118] In order to form the gate insulating film 42 made of a different material, after forming a plurality of gate trenches in the semiconductor substrate 10, for example, with the boundary region 72 covered with a mask, a film of a desired material is formed on the inner wall of the gate trench in the region other than the boundary region 72, and the film thickness is adjusted by etching. After removing the mask, a film is also formed in the boundary region 72 using the same process using the desired material. After forming the gate insulating film 42 in this manner, the gate conductive portion 44 is deposited inside the gate insulating film 42.

[0119] Figures 6A and 6B are diagrams showing an example of a cross section taken along line aa' in Figure 2 and its electrical connection. Here, description of contents common to Figures 5A and 5B will be omitted.

[0120] In this example, the thickness of the gate insulating film 42 in the first gate trench portion 45 is different from the thickness of the gate insulating film 42 in the second gate trench portion 46. Here, the thickness of the gate insulating film 42 may be the thickness in the X-axis direction of the gate insulating film 42, i.e., the distance between the sidewall of the gate conductive portion 44 and the inner wall of the gate trench, or may be the thickness in the Z-axis direction of the gate insulating film 42, i.e., the distance between the bottom of the gate conductive portion 44 and the bottom of the trench, or may be both.

[0121] 6A, the gate insulating film 42 in the second gate trench portion 46 is thicker than the gate insulating film 42 in the first gate trench portion 45. In Fig. 6A, the X-axis thickness W2 and Z-axis thickness D2 of the gate insulating film 42 in the second gate trench portion 46 are greater than the X-axis thickness W1 and Z-axis thickness D1 of the gate insulating film 42 in the first gate trench portion 45, respectively (W2>W1 and D2>D1).

[0122] However, the thickness of the gate insulating film 42 in the second gate trench portion 46 may be larger than the thickness of the gate insulating film 42 in the first gate trench portion 45 only in the X-axis direction (W2>W1), or may be larger than the thickness of the gate insulating film 42 in the Z-axis direction (D2>D1).

[0123] When the film thickness of the gate insulating film increases, the capacitance decreases, and when the film thickness decreases, the capacitance increases. Therefore, the gate capacitance component of the second gate trench portion 46 becomes smaller than that of the first gate trench portion 45, and the response of the second gate trench portion 46 becomes faster. That is, the turn-off timing of the second gate trench portion 46 becomes earlier, and the time delayed due to the decrease in the threshold voltage is canceled out, so that the turn-off timings of the first gate trench portion 45 and the second gate trench portion 46 can be matched.

[0124] On the other hand, in the example of FIG. 6B, the gate insulating film 42 of the second gate trench portion 46 is thinner than the gate insulating film 42 of the first gate trench portion 45. In FIG. 6B, the thickness W2 in the X-axis direction and the thickness D2 in the Z-axis direction of the gate insulating film 42 of the second gate trench portion 46 are smaller than the thickness W1 in the X-axis direction and the thickness D1 in the Z-axis direction of the gate insulating film 42 of the first gate trench portion 45, respectively (W2 < W1 and D2 < D1).

[0125] However, the thickness of the gate insulating film 42 of the second gate trench portion 46 may be smaller only in the X-axis direction (W2 < W1) or only in the Z-axis direction (D2 < D1) compared with the gate insulating film 42 of the first gate trench portion 45.

[0126] As described above, when the film thickness of the gate insulating film increases, the capacitance decreases, and when the film thickness decreases, the capacitance increases. Therefore, the gate capacitance component of the second gate trench portion 46 becomes larger than that of the first gate trench portion 45, and the response of the second gate trench portion 46 becomes slower. That is, the turn-on timing of the second gate trench portion 46 becomes later, and the time advanced due to the decrease in the threshold voltage is canceled out, so that the turn-on timings of the first gate trench portion 45 and the second gate trench portion 46 can be matched.

[0127] In order to form gate insulating films 42 with different thicknesses, the dimensions of the gate trenches may be common and the dimensions of the gate conductive portion 44 may be changed. In this case, a plurality of gate trenches with the same dimensions are formed in the semiconductor substrate 10, and the semiconductor on the inner wall of the gate trench is oxidized or nitrided to form a film with a constant thickness, and then the film is adjusted to the desired thickness by etching. After the gate insulating film 42 is formed in this manner, the gate conductive portion 44 is deposited inside the gate insulating film 42.

[0128] Alternatively, in order to form gate insulating films 42 with different thicknesses, the dimensions of the gate trenches may be changed while keeping the dimensions of the gate conductive portions 44 common. For example, when the X-axis direction thickness W2 of the gate insulating film 42 in the second gate trench portion 46 is made larger than the X-axis direction thickness W1 of the gate insulating film 42 in the first gate trench portion 45, a gate trench is formed in the second gate trench portion 46 that is larger in the X-axis direction than the first gate trench portion 45 by (W2-W1)×2. The subsequent film formation process is the same as the process described above.

[0129] Furthermore, the thickness of the dummy insulating film 32 in the dummy trench portion 30 may be the same as the thickness of the gate insulating film 42 in the first gate trench portion 45. Alternatively, the thickness of the dummy insulating film 32 in the dummy trench portion 30 provided in the boundary region 72 may be the same as the thickness of the gate insulating film 42 in the second gate trench portion 46.

[0130] Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It is clear to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the description of the claims that such modifications and improvements can also be included in the technical scope of the present invention.

[0131] It should be noted that the order of execution of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before," "prior to," etc., and may be realized in any order unless the output of a previous process is used in a later process. Even if the operational flow in the claims, specifications, and drawings is explained using "first," "next," etc. for convenience, it does not mean that it is essential to perform the process in this order. [Explanation of symbols]

[0132] REFERENCE SIGNS LIST 10 semiconductor substrate, 11 well region, 12 emitter region, 14 base region, 15 contact region, 16 accumulation region, 18 drift region, 20 buffer region, 21 upper surface, 22 collector region, 23 lower surface, 24 collector electrode, 29 straight portion, 30 dummy trench portion, 31 tip portion, 32 dummy insulating film, 34 dummy conductive portion, 38 interlayer insulating film, 39 straight portion, 40 gate trench portion, 41 tip portion, 42, 42a, 42b gate insulating film, 44 gate conductive portion, 45 first gate trench portion, 46 second gate trench portion, 47 first gate lead-out conductive portion, 48 second gate lead-out conductive portion, 49 contact hole, 52 emitter electrode, 54 contact hole, 56 contact hole, 60 mesa portion, 61 mesa portion, 70 transistor portion, 71 main region, 72 boundary region, 80 diode portion, 81 extension region, 82 cathode region, 85 lifetime control region, 90 Edge termination structure, 100, semiconductor device, 102, edge, 131, first gate runner, 132, second gate runner, 160, active area, 510, drive circuit, 510-1, drive circuit, 510-2, drive circuit, 601, resistor, 602, resistor, 611, resistor, 612, resistor, 621, resistor, 622, resistor

Claims

1. A semiconductor substrate having a transistor portion and a diode portion, Both the transistor portion and the diode portion are a drift region of a first conductivity type provided in the semiconductor substrate; a second conductivity type base region provided above the drift region in the semiconductor substrate; having a lifetime control region including a lifetime killer is provided below the base region in the semiconductor substrate, the lifetime control region extending from at least a portion of the transistor portion to the diode portion; The transistor portion is a main region spaced apart from the diode portion in a top view of the semiconductor substrate; a boundary region located between the main region and the diode portion and overlapping with the lifetime control region when viewed from above the semiconductor substrate; a plurality of gate trench portions provided from an upper surface of the semiconductor substrate through the base region to the drift region; having The plurality of gate trench portions include a first gate trench portion provided in the main region; a second gate trench portion provided in the boundary region; Including, A signal transmission timing of the first gate trench portion is different from a signal transmission timing of the second gate trench portion. A semiconductor device comprising: a first gate pad electrically connected to the first gate trench portion provided in the main region; a second gate pad electrically connected to the second gate trench portion provided in the boundary region; Equipped Semiconductor device.

2. A gate capacitance component of the first gate trench portion is different from a gate capacitance component of the second gate trench portion. The semiconductor device according to claim 1 .

3. The gate insulating film of the second gate trench portion is thicker than the gate insulating film of the first gate trench portion. The semiconductor device according to claim 2 .

4. The gate insulating film of the second gate trench portion is formed of a material having a lower dielectric constant than the gate insulating film of the first gate trench portion. The semiconductor device according to claim 2 .

5. A semiconductor substrate having a transistor portion and a diode portion, Both the transistor portion and the diode portion are a drift region of a first conductivity type provided in the semiconductor substrate; a second conductivity type base region provided above the drift region in the semiconductor substrate; having a lifetime control region including a lifetime killer is provided below the base region in the semiconductor substrate, the lifetime control region extending from at least a portion of the transistor portion to the diode portion; The transistor portion is a main region spaced apart from the diode portion in a top view of the semiconductor substrate; a boundary region located between the main region and the diode portion and overlapping with the lifetime control region when viewed from above the semiconductor substrate; a plurality of gate trench portions provided from an upper surface of the semiconductor substrate through the base region to the drift region; having The plurality of gate trench portions include a first gate trench portion provided in the main region; a second gate trench portion provided in the boundary region; Including, A gate capacitance component of the second gate trench portion is larger than a gate capacitance component of the first gate trench portion. Semiconductor device.

6. A thickness of the gate insulating film of the first gate trench portion is different from a thickness of the gate insulating film of the second gate trench portion. The semiconductor device according to claim 5 .

7. The gate insulating film of the first gate trench portion is thicker than the gate insulating film of the second gate trench portion. The semiconductor device according to claim 6.

8. The gate insulating film of the first gate trench portion is formed of a material different from that of the gate insulating film of the second gate trench portion. The semiconductor device according to claim 5 .

9. The gate insulating film of the first gate trench portion is formed of a material having a lower relative dielectric constant than the gate insulating film of the second gate trench portion. The semiconductor device according to claim 8.

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