Optical Sensors

Abstract

In the present invention, the temperature dependency of the intensity of light outputted from two light-emitting elements exhibits the same tendency. A reflector is arranged so that light outputted from the light-emitting elements is diffusely reflected, and a portion of reflected light is incident on a light-receiving element. An elastic support member supports the reflector with respect to the two light-emitting elements and the light-receiving element, and is deformed by an external force and thereby changes the position of the reflector relative to the light-emitting elements and the light-receiving element. A processing unit calculates a physical quantity that depends on the amount of deformation of the elastic support member, on the basis of the ratio of two light reception amounts of light received by the light-receiving element when the two light-emitting elements are separately caused to emit light. The relative positions of the two light-emitting elements and the light-receiving element are fixed, and the distance from one light-emitting element to the light-receiving element and the distance from the other light-emitting element to the light-receiving element are different.

Description

[Technical field]

[0001] The present invention relates to optical sensors. [Background technology]

[0002] An optical sensor for measuring force distribution that optically detects force or deformation is known (Patent Document 1). The optical sensor disclosed in Patent Document 1 includes one or more light emitting sources, a light receiving detector that responds to light emitted from the light emitting sources, and a deformable opto-mechanical layer with an optical cavity. The optical response characteristics of the optical cavity change in response to deformation of the opto-mechanical layer, and this change is detected as a change in the amount of light received by the light receiving detector. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2010-539474 Summary of the Invention [Problem to be solved by the invention]

[0004] When the luminous intensity of the light source (light-emitting element) changes due to a change in the ambient temperature, the accuracy of the calculation value of the deformation of the optical-mechanical layer and the force acting on the optical-mechanical layer from the amount of light received by the light-receiving detector (light-receiving element) decreases. An object of the present invention is to provide an optical sensor that is not easily affected by changes in the ambient temperature. [Means for solving the problem]

[0005] According to one aspect of the present invention, Two light-emitting elements that exhibit the same tendency in temperature dependence of the luminosity of output light; A light receiving element; a reflector that diffusely reflects the light output from the light-emitting element and is arranged so that a portion of the reflected light is incident on the light-receiving element; an elastic support member that supports the reflector with respect to the two light emitting elements and the light receiving element, and changes a relative position of the reflector with respect to the light emitting elements and the light receiving element by being deformed by an external force; a processing unit that calculates a physical quantity that depends on an amount of deformation of the elastic support member based on a ratio between two amounts of light received by the light receiving element when the two light emitting elements are caused to emit light separately; Equipped with An optical sensor is provided in which the relative positions of the two light-emitting elements and the light-receiving element are fixed, and the distance from one of the light-emitting elements to the light-receiving element is different from the distance from the other light-emitting element to the light-receiving element.

[0006] According to another aspect of the invention, A light-emitting element; Two light receiving elements that show the same tendency in temperature dependence of sensitivity, A reflector that reflects light output from the light-emitting element and is arranged so that a portion of the reflected light is incident on the two light-receiving elements; an elastic support member that supports the reflector with respect to the light emitting element and the light receiving element and changes a relative position of the reflector with respect to the light emitting element and the light receiving element by being deformed by an external force; a processing unit that calculates a physical quantity that depends on an amount of deformation of the elastic support member based on a ratio of an amount of received light when the light output from the light emitting element and reflected by the reflector is received by the two light receiving elements; Equipped with An optical sensor is provided in which the relative positions of the light-emitting element and the two light-receiving elements are fixed, and the distance from one of the light-receiving elements to the light-emitting element is different from the distance from the other light-receiving element to the light-emitting element. Effect of the Invention

[0007] By determining the ratio of the amount of light received when each of the two light-emitting elements is made to emit light, the influence of the temperature dependency of the luminous intensity of the light-emitting element can be reduced. Also, by receiving the light output from the light-emitting element with two light-receiving elements and determining the ratio of the amount of light received, the influence of the temperature dependency of the luminous intensity of the light-emitting element can be reduced. This makes it possible to improve the measurement accuracy of the physical quantity that depends on the amount of deformation of the elastic support member. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1A is an oblique view of an optical sensor according to a first embodiment, FIG. 1B is a cross-sectional view of the optical sensor according to the first embodiment, and FIG. 1C is a diagram showing the positional relationship between a light-emitting element and a light-receiving element when viewed in plan view of a first plane. [Diagram 2] FIG. 2 is a block diagram of a processing unit of the optical sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic diagram showing the positional relationship between the light emitting element, the light receiving element, and the reflector. [Figure 4] FIG. 4A is a graph showing a simulation result of the relationship between the amount of change in distance x and the amounts of received light L1 and L2, and FIG. 4B is a graph showing the relationship between the amount of change in distance x and the ratio L2 / L1 of the amounts of received light. [Diagram 5] FIG. 5 is a cross-sectional view of an optical sensor according to the second embodiment. [Figure 6] FIG. 6 is a cross-sectional view of an optical sensor according to the third embodiment. [Figure 7] FIG. 7A is a cross-sectional view of an optical sensor according to a fourth embodiment, and FIG. 7B is a diagram showing a planar positional relationship between a light emitting element and a sub-light emitting element of the optical sensor according to the fourth embodiment. [Figure 8] FIG. 8 is a schematic diagram showing the positional relationship between a light emitting element, a sub-light emitting element, a light receiving element, and a reflector of an optical sensor according to the fourth embodiment. [Figure 9]Figure 9A is a diagram showing the planar positional relationship between multiple light-emitting elements, multiple sub-light-emitting elements, and light-receiving elements of an optical sensor according to a modified example of the fourth embodiment, and Figure 9B is a diagram showing the planar positional relationship between multiple light-emitting elements, multiple sub-light-emitting elements, and light-receiving elements of an optical sensor according to another modified example of the fourth embodiment. [Figure 10] FIG. 10 is a cross-sectional view of an optical sensor according to the fifth embodiment. [Figure 11] FIG. 11 is a schematic diagram showing the positional relationship between a light emitting element, a light receiving element, and a reflector of an optical sensor according to the fifth embodiment. [Figure 12] FIG. 12 is a cross-sectional view of an optical sensor according to the sixth embodiment. [Figure 13] FIG. 13 is a block diagram of a processing unit of an optical sensor according to the sixth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] [First Example] An optical sensor according to a first embodiment will be described with reference to FIGS. 1A to 4B.

[0010] 1A is a perspective view of an optical sensor according to a first embodiment. The optical sensor according to the first embodiment includes a substrate 50 and an elastic support member 10. The elastic support member 10 is attached to one surface of the substrate 50. The outer shape of the elastic support member 10 is, for example, cylindrical, and a cavity is formed by the elastic support member 10 and the substrate 50. The elastic support member 10 is made of an elastic material, for example, black silicone rubber. When an external force is applied to the elastic support member 10 in a direction perpendicular to the surface of the substrate 50, the elastic support member 10 is elastically deformed and its height changes.

[0011] 1B is a cross-sectional view of the optical sensor according to the first embodiment. An elastic support member 10 is attached to one surface of a substrate 50. The elastic support member 10 includes a side wall portion 10A and a top plate portion 10B. The side wall portion 10A has, for example, a cylindrical shape, one end of which is fixed to the substrate 50, and the other end of the side wall portion 10A is blocked by the top plate portion 10B. That is, the elastic support member 10 has a bottomed cylindrical shape that opens toward the substrate 50, and the opening of the bottomed cylindrical shape is blocked by the substrate 50. A hollow space 15 is formed by the substrate 50 and the elastic support member 10.

[0012] Two light emitting elements 21, 22 and one light receiving element 30 are arranged on the surface of the substrate 50 exposed to the space 15. The surface on which the two light emitting elements 21, 22 and the light receiving element 30 are arranged is referred to as a first plane 51. The light emitting elements 21, 22 are, for example, light emitting diodes (LEDs). Note that instead of LEDs, other solid-state light emitting elements, for example, vertical cavity surface emitting lasers (VCSELs), etc. may be used.

[0013] A reflector 40 is attached to the top plate portion 10B at a position facing the light receiving element 30. When a force is applied to the elastic support member 10 and the elastic support member 10 is deformed, the relative position of the reflector 40 with respect to the light emitting elements 21, 22 and the light receiving element 30 changes. For example, the height from the first plane 51 to the reflector 40 changes.

[0014] The reflector 40 diffusely reflects most of the light output from the light emitting elements 21, 22. That is, the intensity of the light output from the light emitting elements 21, 22 and diffusely reflected by the reflector 40 does not depend on the observation direction, and is observed with approximately uniform intensity in all directions. The inner surface of the elastic support member 10 is black, and hardly reflects the light output from the light emitting elements 21, 22.

[0015] The luminous intensity of the light emitted from the light-emitting elements 21, 22 is approximately equal over a wide range including the direction of the reflector 40. For example, the luminous intensity of the light output from the light-emitting elements 21, 22 toward the reflector 40 is approximately uniform within the reflecting surface. In addition, even if the elastic support member 10 deforms and the position of the reflector 40 changes within a certain range, the condition that the luminous intensity is approximately uniform within the reflecting surface is satisfied.

[0016] The light-emitting elements 21 and 22 have approximately the same temperature dependency of luminous intensity. For example, the light-emitting elements 21 and 22 have approximately the same slope of change in luminous intensity with respect to temperature change. For example, it is preferable to use products of the same model number for the light-emitting elements 21 and 22. Furthermore, it is preferable to use elements from the same lot, and it is more preferable to use elements formed on the same wafer.

[0017] A processing unit 60 controls the emission of light from the light emitting elements 21 and 22. An output signal from the light receiving element 30 is input to the processing unit 60. The configuration and functions of the processing unit 60 will be described later with reference to FIG.

[0018] 1C is a diagram showing the positional relationship between the light-emitting elements 21, 22, and the light-receiving element 30 when the first plane 51 is viewed in plan. The cross-sectional view taken along dashed line 1B-1B in FIG. 1C corresponds to FIG. 1B. The reflector 40 is disposed on a straight line that passes through the light-receiving element 30 and is perpendicular to the first plane 51. "Passing through the light-receiving element 30" means passing through the geometric center of the light-receiving surface of the light-receiving element 30.

[0019] The distance from one light-emitting element 21 to the light-receiving element 30 is denoted as a, and the distance from the other light-emitting element 22 to the light-receiving element 30 is denoted as b. Here, the starting point of the distance is the geometric center of the light-emitting area in a planar view for the light-emitting elements 21 and 22, and the geometric center of the light-receiving surface for the light-receiving element 30. In this specification, the geometric centers of the light-emitting areas of the light-emitting elements 21 and 22 are referred to as the representative points of the light-emitting elements 21 and 22, and the geometric center of the light-receiving surface is referred to as the representative point of the light-receiving element 30.

[0020] The representative points of the light-emitting elements 21 and 22 and the representative point of the light-receiving element 30 are arranged on a straight line, and the light-receiving element 30 is arranged between the light-emitting element 21 and the light-emitting element 22. In addition, the distance a is different from the distance b. In other words, the representative points of the light-emitting elements 21 and 22 are arranged at positions shifted from the point-symmetric position with respect to the representative point of the light-receiving element 30.

[0021] 2 is a block diagram of a processing unit 60 of the optical sensor according to the first embodiment. The anodes of the two light-emitting elements 21 and 22 are each connected to a power supply 61, and the cathodes are connected to a light-emitting element driver 63 via a switch matrix 62. A calculation unit 68 controls the light-emitting element driver 63 and the switch matrix 62 via an interface unit 64. When one of the light-emitting elements 21 and 22 is selected by the switch matrix 62, the selected light-emitting element emits light.

[0022] The light receiving element 30 outputs a current according to the amount of light received. This current is input to a transimpedance amplifier 66 via a switch matrix 65. The current output from the light receiving element 30 is converted to a voltage signal by the transimpedance amplifier 66 and input to an AD converter 67. The voltage signal is converted to a digital signal by the AD converter 67 and input to a calculation unit 68 via an interface unit 64.

[0023] The calculation unit 68 causes the two light-emitting elements 21, 22 to emit light at different timings, and obtains the amount of light received by the light-receiving element 30 when one of the light-emitting elements 21 is caused to emit light, and the amount of light received by the light-receiving element 30 when the other light-emitting element 22 is caused to emit light. The calculation unit 68 calculates the ratio between the two amounts of light received, and determines the amount of deformation of the elastic support member 10 based on the ratio of the amounts of light received.

[0024] Next, a method for determining the amount of deformation of the elastic support member 10 will be specifically described with reference to FIG.

[0025] FIG. 3 is a schematic diagram showing the positional relationship between the light-emitting elements 21 and 22, the light-receiving element 30, and the reflector 40. In FIG. 3, the light-emitting elements 21 and 22, and the light-receiving element 30 are shown by their respective representative points. The representative point of the reflector 40 is defined as the intersection point of a straight line that passes through the representative point of the light-receiving element 30 and is perpendicular to the first plane 51 and the reflecting surface of the reflector 40. In FIG. 3, the reflector 40 is shown by its representative point. In the following description with reference to FIG. 3, the representative points of the light-emitting elements 21 and 22, the light-receiving element 30, and the reflector 40 may be simply referred to as the light-emitting elements 21 and 22, the light-receiving element 30, and the reflector 40, respectively.

[0026] 1C, the distance from one light-emitting element 21 to the light-receiving element 30 is marked as a, and the distance from the other light-emitting element 22 to the light-receiving element 30 is marked as b. The distance from the light-receiving element 30 to the reflector 40 is marked as x. When a force is applied to the top plate portion 10B (FIG. 1B) of the elastic support member 10, the elastic support member 10 elastically deforms, and the distance x becomes shorter.

[0027] The distance from one of the light emitting elements 21 to the reflector 40 is P a and the distance from the other light-emitting element 22 to the reflector 40 is P b The luminous intensities of the light-emitting elements 21 and 22 are denoted as G1 and G2, respectively. The reflectance of the reflector 40 is denoted as α. The angle between the line segment connecting the light-emitting element 21 and the reflector 40 on one side and the line segment connecting the reflector 40 and the light-receiving element 30 is denoted as θ1, and the angle between the line segment connecting the light-emitting element 22 and the reflector 40 on the other side and the line segment connecting the reflector 40 and the light-receiving element 30 is denoted as θ2.

[0028] distance P a , P b is expressed by the following formula:

number

[0029] The amounts of light L1 and L2 received by the light receiving element 30 when the light emitting elements 21 and 22 are caused to emit light are expressed by the following equations.

number

[0030] The ratio of the amount of received light L2 to the amount of received light L1 is expressed by the following formula.

number

[0031] Even if the luminous intensities G1 and G2 of the light-emitting elements 21 and 22 have temperature dependency, if the gradient of the change in luminous intensity with respect to temperature change is the same, G2 / G1 on the right side of equation (3) does not depend on temperature and remains constant even if the temperature changes. In addition, the distances a and b on the right side of equation (3) are also constant. Therefore, the ratio of the amount of received light L2 / L1 depends only on the distance x.

[0032] The calculation unit 68 (FIG. 2) calculates the ratio L2 / L1 of the amounts of received light, and determines the distance x from the calculated value of the ratio L2 / L1 of the amounts of received light. Furthermore, the calculation unit 68 determines the amount of deformation in the x direction (direction perpendicular to the first plane 51) of the elastic support member 10 (FIG. 1B) from the distance x. For example, the distance x when no load is applied to the elastic support member 10 is set as a reference value, and the amount of displacement of the distance x from the reference value can be defined as the amount of deformation of the elastic support member 10.

[0033] FIG. 4A is a graph showing the results of a simulation of the relationship between the displacement of the reflector 40 in the x direction and the amounts of received light L1 and L2. Here, the x direction is the normal direction of the first plane 51. The horizontal axis represents the displacement in the x direction in units of [mm], and the vertical axis represents the amount of received light in arbitrary units. The amount of displacement in the x direction when no force is applied to the elastic support member 10 is set to 0. A simulation was performed for the case where the top plate portion 10B (FIG. 1B) of the elastic support member 10 is displaced in a direction approaching the substrate 50 (i.e., when the displacement in the x direction is negative). The simulation conditions were as follows: the luminous intensities G1 and G2 of the light emitting elements 21 and 22 were the same, a=1.2 mm, b=1.8 mm, and α=0.98. The reference value of the distance x was set to 1.8 mm. The reflectance of the elastic support member 10 other than the reflector 40 was set to 0.05, and conditions were set such that 80% of the reflected light has a Lambertian distribution and the remaining 20% ​​is regular reflection. The surface of the substrate 50 was subjected to light absorbing conditions.

[0034] 4A represent the amounts of light received L1 and L2 when the light-emitting elements 21 and 22 are caused to emit light, respectively. As the top plate portion 10B approaches the substrate 50 (as the absolute value of the x-direction displacement amount increases), the amounts of light received L1 and L2 increase. In addition, because the distance a from the light-emitting element 21 to the light-receiving element 30 is shorter than the distance b from the light-emitting element 22 to the light-receiving element 30, the amount of light received L1 is greater than the amount of light received L2.

[0035] FIG. 4B is a graph showing the relationship between the displacement amount of the reflector 40 in the x direction and the ratio L2 / L1 of the amount of received light. The horizontal axis represents the displacement amount of the distance x in units of [mm], and the vertical axis represents the ratio L2 / L1 of the amount of received light. As the top plate portion 10B approaches the substrate 50 (as the absolute value of the amount of displacement in the x direction increases), the ratio L2 / L1 of the amount of received light decreases. The relationship between the amount of displacement in the x direction and the ratio L2 / L1 of the amount of received light shown in FIG. 4B can be obtained by performing an evaluation experiment in advance in which the amount of displacement in the x direction is changed and the ratio L2 / L1 of the amount of received light is calculated. This relationship information is stored in the calculation unit 68 (FIG. 2). The calculation unit 68 can obtain the amount of displacement in the x direction based on the information on the relationship between the amount of displacement in the x direction and the ratio L2 / L1 of the amount of received light that is stored in advance and the calculated value of the ratio L2 / L1 of the amount of received light.

[0036] In the simulation, the luminous intensities G1 and G2 of the two light-emitting elements 21 and 22 are set to be equal, but they do not necessarily have to be equal. For example, if the relationship between the drive current and luminous intensity of the light-emitting elements 21 and 22 is known in advance, it is not necessary to drive the light-emitting elements 21 and 22 with the same drive current. Using the relationship between the drive current and luminous intensity, the luminous intensity at the actual drive current can be converted to the luminous intensity at a predetermined drive current.

[0037] Next, the excellent effects of the first embodiment will be described. If the temperature characteristics (slope of luminous intensity change with respect to temperature change) of the luminous intensities G1, G2 of the light-emitting elements 21, 22 are the same, the luminous intensity ratio G1 / G2 of the light-emitting elements 21, 22 will be constant and independent of temperature. Therefore, the ratio L2 / L1 of the received light amounts shown in formula (3) will not depend on temperature, but will depend only on the distance x. In the first embodiment, the deformation amount of the elastic support member 10 is calculated based on the ratio L2 / L1 of the received light amounts, so that the deformation amount of the elastic support member 10 can be measured with high accuracy without being affected by temperature changes of the light-emitting elements 21, 22.

[0038] The change in the light receiving characteristics of the light receiving element 30 caused by the temperature change is sufficiently small compared to the change in the luminous intensity of the light emitting elements 21 and 22. Therefore, the change in the light receiving characteristics of the light receiving element 30 caused by the temperature change does not significantly affect the measurement of the deformation amount of the elastic support member 10.

[0039] If the area of ​​the reflective surface of the reflector 40 is too small, the intensity of the light that is diffusely reflected by the reflector 40 and enters the light receiving element 30 decreases, making it difficult to perform stable measurement. In order to ensure a sufficient amount of light received by the light receiving element 30, it is preferable that the area of ​​the reflective surface of the reflector 40 is 0.5 times or more the area of ​​the light receiving surface of the light receiving element 30.

[0040] If the area of ​​the reflector 40 is too large, the amount of received light will be significantly affected by the inclination when the reflecting surface of the reflector 40 is inclined with respect to the normal direction of the first plane 51. In order to reduce the influence of the inclination of the reflecting surface, it is preferable to set the area of ​​the reflecting surface of the reflector 40 to three times or less the area of ​​the light receiving surface of the light receiving element 30.

[0041] Next, a modification of the first embodiment will be described. In the optical sensor according to the first embodiment, the two light-emitting elements 21, 22 have the same temperature characteristic of luminosity, that is, the slope of the luminosity change with respect to temperature change is the same, but the temperature characteristic of luminosity of the two light-emitting elements 21, 22 does not necessarily have to be the same. For example, the two light-emitting elements 21, 22 may be configured to have the same tendency of temperature characteristic of luminosity. For example, the two light-emitting elements 21, 22 may have different slopes of the luminosity change with respect to temperature change, but both are positive or both are negative. In this case, compared to the case where one light-emitting element is used, an excellent effect is obtained that the measurement result of the deformation amount of the elastic support member 10 is less susceptible to the influence of temperature change.

[0042] In the first embodiment, the deformation amount of the elastic support member 10, i.e., the displacement amount of the reflector 40 (FIG. 3) in the x direction is calculated from the ratio L2 / L1 of the received light amounts. In addition, the force applied to the top plate portion 10B (FIG. 1B) of the elastic support member 10 may be calculated from the displacement amount of the reflector 40 in the x direction. For example, the calculation unit 68 (FIG. 2) stores relationship information that represents the relationship between the deformation amount of the elastic support member 10 and the magnitude of the external force applied to the elastic support member 10. After calculating the deformation amount of the elastic support member 10, the calculation unit 68 calculates the magnitude of the external force applied to the elastic support member based on the calculated deformation amount and the relationship information. The calculation unit 68 may store relationship information between the ratio L2 / L1 of the received light amounts and the magnitude of the external force applied to the elastic support member 10, and may directly calculate the magnitude of the external force from the calculated value of the ratio L2 / L1 of the received light amounts. In this way, the calculation unit 68 may calculate a physical quantity that depends on the deformation amount of the elastic support member 10.

[0043] Moreover, the top plate portion 10B of the elastic support member 10 may be configured to vibrate in response to sound waves. With this configuration, the reflector 40 is displaced in the x direction by sound waves. This allows the optical sensor according to the first embodiment to function as a microphone.

[0044] In the first embodiment, the two light-emitting elements 21, 22 and one light-receiving element 30 are arranged on the first plane 51 of the substrate 50, but it is not necessary to use the substrate 50 having the first plane 51 as one surface in order to support the light-emitting elements 21, 22 and one light-receiving element 30. For example, a fixing member that fixes the light-emitting elements 21, 22 and one light-receiving element 30 arranged on the virtual first plane 51 may be used.

[0045] In the first embodiment, the space 15 (FIG. 1B) surrounded by the substrate 50 and the elastic support member 10 is hollow, but the space 15 may be filled with a soft elastic material that is almost transparent in the wavelength range of the light output from the light-emitting elements 21 and 22 and that deforms in response to an external force, such as transparent silicone rubber.

[0046] In the first embodiment, as shown in Fig. 1C, the representative points of the two light-emitting elements 21 and 22 and the representative point of the light-receiving element 30 are arranged on a single straight line, but they do not necessarily have to be arranged on a single straight line. It is sufficient that the distance a from one light-emitting element 21 to the light-receiving element 30 and the distance b from the other light-emitting element 22 to the light-receiving element 30 are different.

[0047] [Second Example] Next, an optical sensor according to a second embodiment will be described with reference to Fig. 5. Below, a description of the configuration common to the optical sensor according to the first embodiment described with reference to Figs. 1A to 4B will be omitted.

[0048] FIG. 5 is a cross-sectional view of an optical sensor according to a second embodiment. In the first embodiment, the elastic support member 10 is composed of a side wall portion 10A and a top plate portion 10B made of an elastic material. In contrast, in the second embodiment, the side wall portion 10A and the top plate portion 10B are made of a hard material, for example, black resin or a metal with a black painted surface. The side wall portion 10A has a double structure of a cylindrical outer wall and an inner wall. When the first plane 51 is viewed in plan, the space between the outer wall and the inner wall has a shape that follows the circumference. An elastic member 10C such as a coil spring is loaded between the outer wall and the inner wall.

[0049] The top plate portion 10B is provided with a protrusion 10D that is inserted into a space between the outer wall and the inner wall of the side wall portion 10A. When the first plane 51 is viewed in plan, the protrusion 10D has a shape that follows a circumference. For example, the top plate portion 10B is supported on the substrate 50 via the protrusion 10D and the elastic member 10C so as to be displaceable in the normal direction of the first plane 51.

[0050] When a force is applied to the top panel portion 10B, the elastic member 10C is elastically deformed, and the top panel portion 10B and the reflector 40 attached to the top panel portion 10B are displaced in the normal direction of the first plane 51.

[0051] Next, the advantageous effects of the second embodiment will be described. In the second embodiment, as in the first embodiment, two light-emitting elements 21, 22 are arranged, so that the influence of temperature changes in the light-emitting elements 21, 22 can be eliminated and the deformation amount of the elastic support member 10 can be measured with high accuracy.

[0052] [Third Example] Next, an optical sensor according to a third embodiment will be described with reference to Fig. 6. Below, a description of the configuration common to the optical sensor according to the first embodiment described with reference to Figs. 1A to 4B will be omitted.

[0053] 6 is a cross-sectional view of an optical sensor according to a third embodiment. In the optical sensor according to the third embodiment, in addition to the multiple components of the optical sensor according to the first embodiment (FIG. 1B), an incident limiting structure 27 is further arranged. The incident limiting structure 27 includes a condensing lens 27B that condenses light incident on the light receiving element 30, and a support member 27A that supports the condensing lens 27B. The condensing lens 27B condenses light that is diffusely reflected from a partial region of the reflecting surface of the reflector 40 onto the light receiving surface of the light receiving element 30. The light that is diffusely reflected from other regions of the reflecting surface of the reflector 40 is restricted by the incident limiting structure 27 so as not to be incident on the light receiving surface of the light receiving element 30.

[0054] Next, the excellent effect of the third embodiment will be described. In the third embodiment, the region of the reflecting surface of the reflector 40 that generates the diffuse reflected light incident on the light receiving surface of the light receiving element 30 is limited to a part, so that the influence of the inclination of the reflecting surface of the reflector 40 can be reduced. Even if the reflector 40 is displaced in a direction parallel to the first plane 51, if the region that generates the diffuse reflected light that is incident on the light receiving surface of the light receiving element 30 is within the reflecting surface after displacement, the amount of light received by the light receiving element 30 hardly changes. Therefore, the displacement of the reflector 40 in a direction parallel to the first plane 51 can be absorbed, and the deformation amount of the elastic support member 10 can be measured with high accuracy.

[0055] Next, a modification of the third embodiment will be described. In the third embodiment, the condenser lens 27B limits the light incident on the light receiving surface of the light receiving element 30, but other structures may be used as the incident limiting structure 27. For example, an optical filter (also called a louver) or package that limits the viewing angle may be used.

[0056] [Fourth Example] Next, an optical sensor according to a fourth embodiment will be described with reference to Figures 7A and 7B. Below, a description of the configuration common to the optical sensor according to the first embodiment described with reference to Figures 1A to 4B will be omitted.

[0057] Fig. 7A is a cross-sectional view of an optical sensor according to the fourth embodiment. The optical sensor according to the first embodiment (Fig. 1B) includes two light-emitting elements 21 and 22. In contrast, the optical sensor according to the fourth embodiment includes two sub-light-emitting elements 21S and 22S in addition to the two light-emitting elements 21 and 22. One light-emitting element 21 and one sub-light-emitting element 21S form a pair, and the other light-emitting element 22 and the other sub-light-emitting element 22S form a pair. The two sub-light-emitting elements 21S and 22S are also arranged on the first plane 51, similar to the light-emitting elements 21 and 22.

[0058] 7B is a diagram showing the planar positional relationship of the light-emitting elements 21 and 22, the sub-light-emitting elements 21S and 22S, and the light-receiving element 30 of the optical sensor according to the fourth embodiment. The representative points of the light-emitting element 21 and the sub-light-emitting element 21S, which form a pair with each other, and the representative points of the light-emitting element 22 and the sub-light-emitting element 22S, are arranged at positions point-symmetrical with respect to the representative point of the light-receiving element 30. In other words, the distance from the sub-light-emitting element 21S to the light-receiving element 30 is equal to the distance a from the light-emitting element 21 to the light-receiving element 30. Similarly, the distance from the sub-light-emitting element 22S to the light-receiving element 30 is equal to the distance b from the light-emitting element 22 to the light-receiving element 30.

[0059] The representative points of the two light-emitting elements 21 and 22 and the light-receiving element 30 are arranged side by side on a single straight line. The two sub-light-emitting elements 21S and 22S are also arranged on this straight line.

[0060] When measuring the deformation amount of the elastic support member 10, the paired light-emitting element 21 and sub-light-emitting element 21S are caused to emit light simultaneously, and the amount of light received by the light-receiving element 30 is measured. Thereafter, the paired light-emitting element 22 and sub-light-emitting element 22S are caused to emit light simultaneously, and the amount of light received by the light-receiving element 30 is measured.

[0061] Next, a method for determining the amount of deformation of the elastic support member 10 will be specifically described with reference to FIG.

[0062] Fig. 8 is a schematic diagram showing the positional relationship of the light-emitting elements 21 and 22, the sub-light-emitting elements 21S and 22S, the light-receiving element 30, and the reflector 40 of the optical sensor according to the fourth embodiment. In Fig. 8, the light-emitting elements 21 and 22, the sub-light-emitting elements 21S and 22S, the light-receiving element 30, and the reflector 40 are shown by their respective representative points.

[0063] In the first embodiment (FIG. 3), it is assumed that the reflecting surface of the reflector 40 is parallel to the first plane 51, but in the following description, a case will be described in which the reflecting surface of the reflector 40 is inclined with respect to the first plane 51. The inclination angle of the reflecting surface of the reflector 40 is denoted as δ. For example, in the manufacturing process of the optical sensor, application of a local load to the elastic support member 10, etc., can cause the reflecting surface of the reflector 40 to become inclined.

[0064] It is assumed that the reflecting surface of the reflector 40 is inclined in the direction of a straight line passing through the representative points of the light-emitting elements 21 and 22 and the light-receiving element 30. In the following description with reference to Fig. 8, the representative points of the light-emitting elements 21 and 22, the sub-light-emitting elements 21S and 22S, the light-receiving element 30, and the reflector 40 may be simply referred to as the light-emitting elements 21 and 22, the light-receiving element 30, and the reflector 40, respectively.

[0065] Distance a, b, x, P a , P b The angles θ1 and θ2 have the same meanings as those variables shown in Fig. 3. The luminous intensity of the sub-light-emitting element 21S is equal to the luminous intensity G1 of the light-emitting element 21, and the luminous intensity of the sub-light-emitting element 22S is equal to the luminous intensity G2 of the light-emitting element 22.

[0066] The amount of light received L1 when the light-emitting element 21 and the sub-light-emitting element 21S are caused to emit light is expressed by the following formula.

number

[0067] The amount of light received L2 when the light-emitting element 22 and the sub-light-emitting element 22S are caused to emit light is expressed by the following formula.

number

[0068] From equations (4) and (5), the ratio of the amount of received light L2 to the amount of received light L1 is expressed by the following equation.

number

[0069] Next, the excellent effects of the fourth embodiment will be described. As in the first embodiment, the fourth embodiment has the excellent effect that the measurement of the deformation amount of the elastic support member 10 is hardly affected by temperature changes of the light emitting elements 21, 22. Furthermore, as shown in formula (6), the ratio L2 / L1 of the light receiving amounts does not depend on the inclination angle δ of the reflecting surface of the reflector 40. Therefore, even if the reflector 40 is inclined with respect to the first plane 51, the deformation amount of the elastic support member 10 can be measured with high accuracy.

[0070] Next, an optical sensor according to a modification of the fourth embodiment will be described with reference to FIG. 9A. FIG. 9A is a diagram showing the planar positional relationship of the multiple light-emitting elements 21 and 22, the multiple sub-light-emitting elements 21S and 22S, and the light-receiving element 30 of the optical sensor according to a modification of the fourth embodiment. In the fourth embodiment (FIG. 7B), the representative points of the two light-emitting elements 21 and 22, the two sub-light-emitting elements 21S and 22S, and the light-receiving element 30 are arranged side by side on one straight line. In contrast, in the modification shown in FIG. 9A, a straight line passing through the representative points of one light-emitting element 21, the sub-light-emitting element 21S paired with it, and the light-receiving element 30 intersects with a straight line passing through the representative points of the other light-emitting element 22, the sub-light-emitting element 22S paired with it, and the light-receiving element 30 at a certain angle.

[0071] As in the modified example shown in FIG. 9A, the representative points of the light emitting elements 21 and 22 and the light receiving element 30 do not have to be arranged on a single straight line.

[0072] Next, an optical sensor according to another modified example of the fourth embodiment will be described with reference to Fig. 9B. Fig. 9B is a diagram showing the planar positional relationship between the multiple light-emitting elements 21, 22, 23, 24, the multiple sub-light-emitting elements 21S, 22S, 23S, 24S, and the light-receiving element 30 of the optical sensor according to another modified example of the fourth embodiment.

[0073] 9B, four light-emitting elements 21, 22, 23, and 24 are arranged, and sub-light-emitting elements 21S, 22S, 23S, and 24S are arranged to be paired with the respective light-emitting elements 21, 22, 23, and 24. A straight line passing through a representative point between the light-emitting element 21 and the sub-light-emitting element 21S that are paired with each other, a straight line passing through a representative point between the light-emitting element 22 and the sub-light-emitting element 22S, a straight line passing through a representative point between the light-emitting element 23 and the sub-light-emitting element 23S, and a straight line passing through a representative point between the light-emitting element 24 and the sub-light-emitting element 24S intersect at an angle with each other at the representative point of the light-receiving element 30.

[0074] As in the modified example shown in Fig. 9B, the number of light-emitting elements may be four. The number of light-emitting elements may be three, five or more. In this case, the light-emitting elements and the sub-light-emitting elements may be arranged so that a plurality of straight lines passing through the representative points of the pair of light-emitting elements and sub-light-emitting elements intersect with each other at the representative point of the light-receiving element 30. By arranging them in this way, the effect of the inclination can be reduced even if the reflecting surface of the reflector 40 (Fig. 7A) is inclined in various directions.

[0075] [Fifth Example] Next, an optical sensor according to a fifth embodiment will be described with reference to Fig. 10. Below, a description of the configuration common to the optical sensor according to the first embodiment described with reference to Figs. 1A to 4B will be omitted.

[0076] 10 is a cross-sectional view of an optical sensor according to the fifth embodiment. In the first embodiment (FIG. 1B), the area of ​​the reflecting surface of the reflector 40 is about 0.5 to 3 times the area of ​​the light receiving surface of the light receiving element 30. In contrast, in the fifth embodiment, the top plate portion 10B of the elastic support member 10 is composed of the reflector 40, and almost the entire surface of the top plate portion 10B facing the substrate 50 is made into a reflecting surface. That is, when the first plane 51 is viewed in plan, the two light emitting elements 21 and 22 and the light receiving element 30 are disposed at positions that are included in the reflector 40. The side wall portion 10A is formed of a black elastic member, for example, black silicone rubber or the like.

[0077] The light output from one light-emitting element 21 is diffusely reflected at an arbitrary point Q1 on the reflecting surface of the reflector 40, and a part of the light is incident on the light-receiving element 30. The light output from the other light-emitting element 22 is diffusely reflected at an arbitrary point Q2 on the reflecting surface of the reflector 40, and a part of the light is incident on the light-receiving element 30.

[0078] When a load is applied to the top plate portion 10B, the side wall portion 10A elastically deforms, and the reflector 40 approaches the first plane 51 while maintaining the parallel relationship between the reflecting surface of the reflector 40 and the first plane 51. When the distance x from the reflector 40 to the first plane 51 changes, the amount of light received by the light receiving element 30 changes. The calculation unit 68 (FIG. 2) calculates the amount of deformation of the elastic support member 10 (the amount of displacement of the top plate portion 10B) from this change in the amount of light received.

[0079] Next, a method for determining the deformation amount of the elastic support member 10 will be specifically described with reference to Fig. 11. Fig. 11 is a schematic diagram showing the positional relationship between the light-emitting elements 21 and 22, the light-receiving element 30, and the reflector 40. In Fig. 11, the light-emitting elements 21 and 22, and the light-receiving element 30 are shown by their respective representative points.

[0080] The light is output from the light-emitting element 21 and diffusely reflected at an arbitrary point Q1 on the reflecting surface of the reflector 40, and a part of the light is incident on the light-receiving element 30. The distance from the light-emitting element 21 to the point Q1 is P La and the distance from point Q1 to the light receiving element 30 is P Da The incident angle of the light from the light emitting element 21 to the point Q1 is denoted as θ L1 The reflection angle of the light reflected at point Q1 and incident on the light receiving element 30 is denoted as θ D1 It is marked as such.

[0081] Similarly, light is output from the light-emitting element 22 and diffusely reflected at an arbitrary point Q2 on the reflecting surface of the reflector 40, and a part of the light is incident on the light-receiving element 30. Let P Lb and the distance from point Q2 to the light receiving element 30 is P Db The incident angle of the light from the light emitting element 22 to the point Q2 is denoted as θ L2 The reflection angle of the light reflected at point Q2 and incident on the light receiving element 30 is denoted as θ D2 It is marked as such.

[0082] The amount of light L reaching point Q1 from light-emitting element 21 LQ1 is expressed by the following formula:

number

[0083] The amount of light L reaching the light receiving element 30 from point Q1 Q1 is expressed by the following formula, where cos Mは , which shows the angle characteristic of the amount of light received by the light receiving element 30. Note that cos M is just one example, and does not necessarily have to be a cosine distribution, and the angular characteristics may be expressed by any function.

number

[0084] Similarly, the amount of light L of light output from the light-emitting element 22, reflected at point Q2, and incident on the light-receiving element 30 is Q2 is expressed by the following formula:

number

[0085] The amount of light L1 that is output from the light-emitting element 21, diffusely reflected by the reflector 40, and received by the light-receiving element 30, and the amount of light L2 that is output from the light-emitting element 22, diffusely reflected by the reflector 40, and received by the light-receiving element 30, are expressed by the following equations.

number

[0086] The ratio of the received light amounts L2 / L1 is expressed by the following formula.

number

[0087] When the luminous intensities G1 and G2 change at a rate of change K due to a change in the temperature of the light-emitting elements 21 and 22, the amount of light L Q1 , L Q2 are also multiplied by K. In this case, the ratio of the light reception amounts L2 / L1 expressed by equation (11) does not change. Therefore, the changes in the light intensities G1 and G2 due to temperature changes are offset, and the measurement results of the deformation amount of the elastic support member 10 are hardly affected by temperature changes.

[0088] Next, the excellent effects of the fifth embodiment will be described. As in the first embodiment, the fifth embodiment also has two light-emitting elements 21 and 22 arranged therein, thereby eliminating the effects of temperature changes in the light-emitting elements 21 and 22 and enabling the deformation amount of the elastic support member 10 to be measured with high accuracy.

[0089] [Sixth Example] Next, an optical sensor according to a sixth embodiment will be described with reference to Fig. 12 and Fig. 13. Below, description of the configuration common to the optical sensor according to the first embodiment described with reference to Figs. 1A to 4B will be omitted.

[0090] Fig. 12 is a cross-sectional view of an optical sensor according to Example 6. In Example 1 (Fig. 1B), two light-emitting elements 21 and 22 and one light-receiving element 30 are arranged on a first plane 51. In contrast, in Example 6, a light-emitting element 20 is arranged at the location where the light-receiving element 30 is arranged in Example 1, and light-receiving elements 31 and 32 are arranged at the locations where the two light-emitting elements 21 and 22 are arranged, respectively.

[0091] The two light receiving elements 31, 32 have the same temperature dependency of sensitivity. For example, the two light receiving elements 31, 32 have the same gradient of sensitivity change with respect to temperature change. The two light receiving elements 31, 32 may have the same tendency of sensitivity change with respect to temperature change. For example, the gradient of sensitivity change with respect to temperature change of the two light receiving elements 31, 32 may both be positive or negative. It is preferable to use products of the same model number for the two light receiving elements 31, 32. It is also preferable to use light receiving elements from the same lot as the two light receiving elements 31, 32, and it is more preferable to use light receiving elements manufactured on the same wafer.

[0092] 13 is a block diagram of a processing unit 60 of an optical sensor according to the sixth embodiment. In the first embodiment (FIG. 2), two light emitting elements 21 and 22 are connected to one switch matrix 62, and one light receiving element 30 is connected to the other switch matrix 65. In contrast, in the sixth embodiment, one light emitting element 20 is connected to one switch matrix 62, and two light receiving elements 31 and 32 are connected to the other switch matrix 65.

[0093] The calculation unit 68 calculates the ratio L2 / L1 of the amount of light received by one light receiving element 31 to the amount of light received by the other light receiving element 32 when the light emitting element 21 is made to emit light, and calculates the amount of deformation of the elastic support member 10 based on the calculation result.

[0094] Next, the excellent effects of the sixth embodiment will be described. In the sixth embodiment, even if the luminous intensity of the light-emitting element 20 varies due to temperature changes, there is almost no change in the ratio L2 / L1 of the amounts of light received by the two light-receiving elements 31 and 32. Therefore, the influence of temperature changes in the light-emitting element 20 can be eliminated, and the deformation amount of the elastic support member 10 can be measured with high accuracy.

[0095] Next, a modification of the sixth embodiment will be described. In the sixth embodiment, the elastic support member 10 may include an elastic member such as a coil spring, as in the second embodiment shown in FIG. 5. A configuration similar to that of the third embodiment shown in FIGS. 7A and 7B may also be adopted. That is, a sub-light receiving element paired with one light receiving element 31, and a sub-light receiving element paired with the other light receiving element 32 may be disposed. Furthermore, the number of light receiving elements may be three or more. As in the fifth embodiment shown in FIG. 10, the entire top plate portion 10B may be formed of a reflector 40.

[0096] The above-mentioned embodiments are merely examples, and it goes without saying that partial replacement or combination of the configurations shown in different embodiments is possible. Similar effects due to similar configurations of multiple embodiments are not mentioned in each embodiment. Furthermore, the present invention is not limited to the above-mentioned embodiments. For example, it will be obvious to those skilled in the art that various modifications, improvements, combinations, etc. are possible. [Explanation of symbols]

[0097] 10 Elastic support member 10A side wall 10B Top plate 10C Elastic members 10D convex part 15 Space 20, 21, 22, 23, 24 Light-emitting element 21S, 22S, 23S, 24S Sub-light emitting element 27 Incident limiting structure 27A Support member 27B Condenser lens 30, 31, 32 Light receiving element 40 Reflector 50 Substrates 51 1st plane 60 Processing section 61 Power supply 62 Switch Matrix 63 Light Emitting Device Driver 64 Interface section 65 Switch Matrix 66 Transimpedance Amplifier 67 A / D converter 68 Calculation Department

Claims

1. Two light-emitting elements whose output light intensity temperature dependences show the same tendency; A light receiving element; a reflector that diffusely reflects the light output from the light-emitting element and is arranged so that a portion of the reflected light is incident on the light-receiving element; an elastic support member that supports the reflector with respect to the two light emitting elements and the light receiving element, and changes a relative position of the reflector with respect to the light emitting elements and the light receiving element by being deformed by an external force; a processing unit that calculates a physical quantity that depends on an amount of deformation of the elastic support member based on a ratio between two amounts of light received by the light receiving element when the two light emitting elements are caused to emit light separately; Equipped with An optical sensor in which the relative positions of the two light-emitting elements and the light-receiving elements are fixed, and the distance from one of the light-emitting elements to the light-receiving element is different from the distance from the other light-emitting element to the light-receiving element.

2. The optical sensor according to claim 1 , wherein the two light emitting elements and the two light receiving elements are disposed on a virtual common first plane.

3. The light emitting element further includes two sub-light emitting elements that are paired with the two light emitting elements, respectively, and that are disposed on the first plane. The optical sensor according to claim 2 , wherein the light emitting element and the sub-light emitting element which form a pair with each other are arranged in point symmetry with respect to the light receiving element.

4. an area of ​​the reflecting surface of the reflector is 0.5 to 3 times an area of ​​the light receiving surface of the light receiving element; 4. The optical sensor according to claim 2, wherein the reflector is disposed on a straight line that passes through the light receiving element and is perpendicular to the first plane.

5. 4. The optical sensor according to claim 1, further comprising an incidence limiting structure that allows light reflected from a portion of the reflector to be incident on the light receiving element and prevents light reflected from other portions from being incident on the light receiving element.

6. The optical sensor according to claim 2 , wherein, when the first plane is viewed from above, the two light-emitting elements and the light-receiving element are disposed at positions that are encompassed by the reflector.

7. 4. The optical sensor according to claim 1, wherein the processing unit stores relationship information between the ratio of the amount of received light and the magnitude of the external force applied to the elastic support member, and calculates the force applied to the elastic support member as a physical quantity that depends on the amount of deformation.

8. A light-emitting element; Two light receiving elements whose sensitivity temperature dependence shows the same tendency, a reflector that reflects light output from the light-emitting element and is arranged so that a portion of the reflected light is incident on the two light-receiving elements; an elastic support member that supports the reflector with respect to the light emitting element and the light receiving element and changes a relative position of the reflector with respect to the light emitting element and the light receiving element by being deformed by an external force; a processing unit that calculates a physical quantity that depends on an amount of deformation of the elastic support member based on a ratio of an amount of received light when the light output from the light emitting element and reflected by the reflector is received by the two light receiving elements; Equipped with An optical sensor in which the relative positions of the light-emitting element and the two light-receiving elements are fixed, and the distance from one light-receiving element to the light-emitting element is different from the distance from the other light-receiving element to the light-emitting element.

Images