Reticle pod with backside static electricity removal function

Abstract

To provide a reticle pod with a function for removing a rear face static electricity.SOLUTION: The present invention provides a reticle pod with backside static dissipation which has an inner pod defining an accommodation space for a reticle. Multiple flexible guiding components are correspondingly disposed on multiple outer mounting portions of the inner pod in order to guide an inner cover and an inner base of the inner pod to position without relative displacement. Multiple conductive retainers are correspondingly arranged in the accommodation space to push against a backside of the reticle and form a full-time electrical conduction with the back side of the reticle, so as to establish a static dissipation path by the conductive retainers and the inner pod. Meanwhile, with the conductive retainers pushing against the reticle as well as the flexible guiding components providing the inner cover and the inner base with automatic position guiding, the reticle is automatically pushed and positioned to a center position of the inner base.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to reticle carriers or reticle pods, and more particularly to reticle pods that are in constant contact and electrically conductive to provide a static discharge path. [Background technology]

[0002] With the development of science and technology, semiconductor devices are miniaturized to nanometer size and electronic products have more sophisticated functions, so the harm or potential damage to semiconductor workpieces caused by electrostatic discharge (ESD) is a problem that industry players are struggling to solve. In particular, contamination caused by electrostatic adhesion force is caused by the adhesion of particles due to static electricity under the action of electrostatic force, which causes contamination of semiconductor workpieces (e.g. reticles), leading to an increase in the defect rate.

[0003] Take the dual reticle pod as an example. In the current extreme ultraviolet (EUV) lithography process, the reticle needs to be protected by a dual pod (extreme ultraviolet reticle SMIF pod, EUV POD). The conventional dual pod has an outer pod and an inner pod, where the reticle is housed in the inner pod and the inner pod is housed in the outer pod. Due to the low humidity vacuum environment inside the exposure machine, static electricity remains on the metal coating on the front and back of the reticle after the reticle is exposed in the vacuum chamber of the exposure machine. The current inner pod already has the effect of dissipating static electricity on the reticle front side (FS), but the back side of the reticle can only dissipate static electricity by establishing a conductive path after the reticle is taken out of the vacuum chamber and the outer pod is covered by the inner pod. Therefore, before the outer pod covers the inner pod, a large amount of static electricity continues to accumulate on the reticle, which causes particles to be attracted to the back side of the reticle and contaminate the reticle. In addition, the outer pod of the current double reticle pod is configured with a pressing mechanism that can press the reticle holder of the inner pod, and once the outer pod is opened, the reticle holder of the inner pod cannot be pressed, and the function of limiting the displacement of the reticle is lost, and the surface of the reticle may rub against the reticle support member of the inner pod, generating particles that may contaminate the reticle.

[0004] Therefore, the current challenge that the industry must overcome is how to solve the problem that when the outer pod is opened, the reticle holder in the inner pod loses contact with the reticle, cutting off the electrostatic discharge path, and the problem that when the outer pod is opened, the reticle holder in the inner pod loses contact with the reticle, making it impossible to limit the displacement of the reticle. Summary of the Invention [Problem to be solved by the invention]

[0005] The present invention provides a reticle pod with a backside static electricity removal function to solve many of the problems described above, such as the continued accumulation of a large amount of static electricity on the backside of the reticle and the inability to limit the displacement of the reticle. [Means for solving the problem]

[0006] An object of the present invention is to provide a reticle pod with a backside static electricity removal function suitable for a dual pod consisting of an outer pod and an inner pod accommodated in the outer pod, the inner pod including an inner base, an inner cover, a plurality of elastic guide members, and a plurality of conductive holders. The inner cover is configured to cover the inner base and to be coupled to the inner base to define an accommodation space and a plurality of outer mounting parts outside the accommodation space for accommodating a reticle. The plurality of elastic guide members are disposed corresponding to the outer mounting parts, respectively, and guide the inner cover and the inner base so as not to displace relative to each other. The plurality of conductive holders are provided in the accommodation space and are used to abut against the backside of the reticle so as to be constantly electrically connected to the backside of the reticle, thereby forming a static electricity escape path for the plurality of conductive holders, the inner cover, and the inner base. The plurality of conductive holders abut against the reticle and the plurality of elastic guide members automatically guide the inner cover and the inner base, so that the reticle is automatically pushed into the center position of the inner base.

[0007] In one specific embodiment, at least one of the multiple conductive holders includes a holding base portion provided on the inside of the inner cover and at least one inclined surface holding portion having one end connected to the holding base portion and the other end holding the back surface of the reticle.

[0008] In one specific embodiment, at least one of the multiple conductive holders includes a holding base portion provided inside the inner base, and at least one elastic holding portion having one end connected to the holding base portion and the other end holding the back surface of the reticle.

[0009] In one specific embodiment, the device further includes at least one conductive auxiliary member provided on the inside of the inner lid and in contact with the back surface of the reticle, and the conductive auxiliary member and the multiple conductive holders are constantly electrically connected to the back surface of the reticle at the same time as the conductive auxiliary member, thereby forming a static electricity escape path established by the conductive auxiliary member, the multiple conductive holders, the inner lid, and the inner base.

[0010] In one specific embodiment, the inner cover is provided with outer attachment portions on two adjacent sides coupled to the inner base, and the outer attachment portions and the elastic guide members are structurally compatible.

[0011] In one specific embodiment, each outer mounting portion comprises an inner cover mounting portion and an inner base mounting portion, and each elastic guide member is simultaneously disposed on the inner cover mounting portion and the inner base mounting portion and comprises a guide base portion fixed to the inner cover mounting portion and at least one extension member having one end connected to the guide base portion and the other end abutting the inner base mounting portion.

[0012] In one specific embodiment, the extension member is further provided with at least one protrusion for abutting the inner base attachment portion.

[0013] In one specific embodiment, the inner base attachment portion includes at least one recess, the recess does not connect to the outer top edge of the inner base, and a portion of the extension member is located in the recess.

[0014] Another object of the present invention is to provide a reticle pod with a backside static electricity removal function suitable for a dual pod consisting of an outer pod and an inner pod accommodated in the outer pod, the inner pod including an inner base, an inner cover, a plurality of elastic guide members, and a plurality of conductive holders. The inner cover is configured to cover the inner base and to be coupled to the inner base to define an accommodation space and a plurality of outer mounting parts outside the accommodation space for accommodating a reticle. The plurality of elastic guide members are arranged corresponding to the outer mounting parts, respectively, and guide the inner cover and the inner base so as not to displace relative to each other. The plurality of conductive holders are provided in the accommodation space and are used to abut against the backside of the reticle to form a static electricity escape path for the plurality of conductive holders, the inner cover, and the inner base so as to always be electrically connected to the backside of the reticle. The plurality of conductive holders abut against the reticle and the plurality of elastic guide members automatically guide the inner cover and the inner base, so that the reticle is automatically pushed into the center position of the inner base. The inner pod and all assemblies disposed within the inner pod are made of static dissipative material, and the static electricity on the backside is electrically conducted through a plurality of conductive retainers, thereby forming a static electricity escape path established by the plurality of conductive retainers, the inner pod, and all assemblies.

[0015] According to the above embodiment, the inner pod does not need the assistance of the outer pod or other external forces, and the inner pod itself can establish a static electricity escape path by simply covering the inner cover with the inner base. That is, even if the outer cover of the outer pod is not closed, the conductive holder or elastic guide member on the inner cover can establish a static electricity escape path by itself to remove the static electricity present on the back side of the reticle, which has a pattern on its front side and a back side opposite to the front side.

[0016] According to the above embodiment, the inner pod does not require the assistance of the outer pod or other external forces, and the conductive holder can restrict the movement of the reticle simply by placing the inner cover over the inner base, and the elastic guide member restricts the relative displacement between the inner cover and the inner base, and the structural configuration of the conductive holder and the elastic guide member can automatically guide the reticle accommodated in the accommodation space to the center position of the inner base. The present invention can reliably solve the problem that the outer pod loses its holding function for the reticle when it is opened, and the reticle rubs against the inside of the inner pod, generating particles that contaminate the reticle.

[0017] Another object of the present invention is to provide a reticle pod with a backside static electricity removal function, which includes an inner cover, an inner base, a plurality of conductive holders, and a plurality of elastic guide members. The inner cover and the inner base are coupled to each other to define a storage space for accommodating a reticle. The plurality of conductive holders establish a static electricity escape path with the inner cover and the inner base, and are configured to constantly abut against the backside of the reticle in the storage space when the inner cover and the inner base are coupled to each other, so that the charge on the backside of the reticle can escape from the static electricity escape path. The plurality of elastic guide members are fixed to the outer periphery of the inner cover, and the plurality of conductive holders are configured to abut against a plurality of outer surfaces of the inner base when the inner cover and the inner base are coupled to each other, thereby automatically guiding the inner cover and the inner base so as not to displace them relative to each other.

[0018] According to the above embodiment, the plurality of conductive holders are disposed inside the inner cover and are not exposed to the outside of the inner cover.

[0019] According to the above embodiment, each of the elastic guide members includes a guide base portion and a pair of extension members extending downward from the guide base portion, and when the inner cover is coupled to the inner base, the pair of extension members extend downward from the outer side of the inner cover and simultaneously abut against two adjacent sides of the inner base, automatically guiding the inner cover and the inner base to prevent them from being displaced relative to each other.

[0020] According to the above embodiment, the guide base portion is fixed to the corner portion of the inner cover.

[0021] For a better understanding of the present invention, reference may be made to the following drawings and description. Non-limiting and non-exhaustive embodiments are described with reference to the following drawings. It should be noted that the components in the drawings are not necessarily drawn to actual size, but are instead drawn with a focus on explaining the structure and principles. [Brief description of the drawings]

[0022] [Figure 1] FIG. 2 is an exploded side view of the dual pod of the present invention. [Diagram 2] FIG. 2 is a three-dimensional view of the inner pod of the present invention. [Diagram 3] FIG. 2 is an exploded view of the inner pod of the present invention. [Figure 4] FIG. 2 is a bottom view of the inner cover of the inner pod of the present invention. [Diagram 5] 1 is a schematic diagram of an inner pod containing a semiconductor workpiece (eg, a reticle) of the present invention. [Figure 6] FIG. 3 is a cross-sectional view taken along line AA' in FIG. [Figure 7] 1 is a three-dimensional view of the conductive holder of the present invention (with the inner cover of the inner pod omitted). [Figure 8] 8 is a schematic diagram showing the conductive holder of FIG. 7 abutting a semiconductor workpiece. FIG. [Figure 9] 9 is a schematic diagram showing the conductive holder of FIG. 8 abutting a semiconductor workpiece from another angle. [Figure 10] FIG. 13 is a three-dimensional view of another modified example of the conductive holder. [Figure 11] FIG. 2 is a three-dimensional view of an elastic guide member according to the present invention. [Figure 12] FIG. 2 is a schematic diagram of an additional conductive auxiliary member of the present invention. [Figure 13] 2 is a schematic diagram showing the conductive holder of the present invention before it comes into contact with a semiconductor workpiece. FIG. [Figure 14] 14 is a schematic diagram showing the conductive holder of FIG. 13 after it has come into contact with the semiconductor workpiece. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] The following will more fully describe the present invention with reference to the drawings, and illustrate specific embodiments. However, the claimed subject matter may be specifically embodied in a variety of different forms, and therefore the configuration of the claimed subject matter of the cover or application is not limited to the specific embodiments disclosed herein. The specific embodiments are merely exemplary. Similarly, the present invention is intended to provide a reasonably broad scope for the subject matter of the application or claims covered. It should be noted that the drawings and illustrations in the present invention are generally not drawn to scale and are not intended to correspond to actual relative sizes.

[0024] For purposes of consistency and clarity, the exemplary drawings denote identical features by numerals (although in some instances they are not so designated). However, features in different embodiments may differ in other ways and should not be narrowly limited to those depicted in the drawings. The terms "first" and "second" in the present specification and above drawings are used to distinguish elements and are not necessarily used to describe a particular order.

[0025] Referring to FIG. 1, FIG. 1 shows an exploded side view of a dual pod of the present invention. The reticle pod 1 is a dual pod consisting of an outer pod 10 and an inner pod 20 accommodated in the outer pod 10. In this embodiment, the dual pod may be a dual reticle pod of an extreme ultraviolet reticle SMIF pod (EUV POD), but the dual pod is not limited to the form of a SMIF pod on which a semiconductor workpiece can be placed. The inner pod 20 may be an EUV inner pod (EUV Inner Pod, EIP), and the outer pod 10 may be an EUV outer pod (EUV Outer Pod, EOP). The inner pod 20 includes an inner cover 21 and an inner base 22, and the inner base 22 can be used to receive a semiconductor workpiece R (e.g., a reticle). The outer pod 10 includes an outer cover 11 and an outer base 12, and when the outer cover 11 is coupled to the outer base 12, the outer cover 11 defines a storage space that can accommodate the inner pod 20. To thoroughly protect the sensitive and easily damaged semiconductor workpiece R, the inner cover 21 and the inner base 22 may have electrostatic dissipative (ESD) properties. 4 ~10 11 Electrostatic dissipative materials such as materials with a surface resistance of 10 11 The electrostatic dissipative properties of the materials may include conductive materials such as materials with a resistance of less than Ω, or other combinations of materials with static dissipative properties.

[0026] To explain further, the inner pod 20 does not require the assistance of the outer pod 10 or other external forces, and the inner pod 20 itself can establish a path for discharging static electricity simply by covering the inner cover 21 over the inner base 22. First, the structure of the assembly disposed in the inner pod 20 will be explained. With reference to Figs. 2 to 6, Fig. 2 is a three-dimensional view of the inner pod of the present invention, Fig. 3 is an exploded view of the inner pod of the present invention, Fig. 4 is a bottom view of the inner cover of the inner pod of the present invention, Fig. 5 is a schematic view of the inner pod containing the semiconductor workpiece of the present invention, and Fig. 6 is a cross-sectional view taken along line A-A' in Fig. 2.

[0027] The inner cover 21 of the inner pod 20 is configured to cover the inner base 22 and to be coupled to the inner base 22 to define an accommodating space 23, and a plurality of outer mounting parts 24 are provided on an outer edge of the inner pod 20 outside the accommodating space 23. The accommodating space 23 is used to accommodate the semiconductor workpiece R. The inner pod 20 further includes a plurality of flexible guiding members 30 and a plurality of conductive holders 40. The plurality of flexible guiding members 30 are disposed corresponding to the outer mounting parts 24, respectively, and the plurality of flexible guiding members 30 guide the inner cover 21 and the inner base 22 so as not to be displaced relative to each other. The multiple conductive holders 40 are provided in the accommodation space 23 and are used to form an escape path for static electricity established by the multiple conductive holders 40, the inner cover 21, and the inner base 22 by contacting the back surface BS of the semiconductor workpiece R and constantly electrically conducting the multiple conductive holders 40 with the back surface BS of the semiconductor workpiece R while the inner cover 21 and the inner base 22 are joined. The constituent material of the conductive holder 40 can be selected from the above-mentioned static electricity dissipative materials, or a part of the conductive holder 40 can be selected from the above-mentioned static electricity dissipative materials, so that at least a part of the conductive holder 40 can be conductive with the inner cover 21.

[0028] In this embodiment, the multiple conductive holders 40 are provided on the inside 211 of the inner cover 21, and as shown in Fig. 4, the multiple conductive holders 40 are located on the chamfered portion of the inside 211, i.e., at the four corners of the inside 211 of the inner cover 21. Furthermore, in the static electricity escape path shown in Fig. 6, after the inner cover 21 covers the inner base 22, the inclined surfaces of the multiple conductive holders 40 are pressed against the chamfered portion of the semiconductor workpiece R, and the ends of the conductive holders 40 come into contact with the back surface BS of the semiconductor workpiece R, so that the electric charge accumulated on the back surface BS of the semiconductor workpiece R can be escaped to GND via the static electricity escape path consisting of the multiple conductive holders 40, the inner cover 21, and the inner base 22.

[0029] Since the conductive holder 40 does not need to be provided with a holding force by the pressing mechanism of the outer cover, it can continue to press against the semiconductor workpiece R by utilizing its own structural design and elastic properties when the inner cover 21 and the inner base 22 are combined. Although the conductive holder 40 can hold the semiconductor workpiece R, the inner cover 21 and the inner base 22 are not restricted to each other, and the pressing of the four conductive holders 40 may cause the inner cover 21 and the inner base 22 to shift horizontally, or the inner cover 21 may be displaced relative to the inner base 22 during transportation. Therefore, in order to make an inner pod with backside static electricity dissipation ability, the present invention also uses the elastic guide member 30 to restrict the relative relationship between the inner cover 21 and the inner base 22.

[0030] In this embodiment, the outer mounting parts 24 are provided on two adjacent sides coupled to the inner base 22 of the inner cover 21, i.e., on the outer positions of the inner pod adjacent to the outer pod. The outer mounting parts 24 have mounting surfaces lower than the top surface of the inner cover 21. The outer mounting parts 24 and the elastic guide members 30 are structurally compatible, so that the elastic guide members 30 correspond to adjacent chamfered portions of the outer pod. Each outer mounting part 24 includes an inner cover mounting part 241 and an inner base mounting part 242, and each elastic guide member 30 is simultaneously disposed on the inner cover mounting part 241 and the inner base mounting part 242. Referring to FIG. 11, the elastic guide member 30 includes a guide base part 31 and at least one extension member 32, the guide base part 31 is provided on the inner cover mounting part 241, one end of the extension member 32 is connected to the guide base part 31, and the other end extends downward from the guide base part 31 and abuts against the inner base mounting part 242. Due to the arrangement relationship of this structural design, when the inner cover 21 is connected to the inner base 22, there is no relative displacement between the inner cover 21 and the inner base 22 of the inner pod 20 through the guiding action of the multiple elastic guide members 30, and at the same time, by pressing the semiconductor workpiece R against the multiple conductive holders 40, the semiconductor workpiece R is automatically guided to the center position of the inner base 22.

[0031] In this embodiment, as shown in FIG. 6, the inner base mounting part 242 includes a recess 2421 that is not connected to the outer top edge 221 of the inner base 22, and when the inner cover 21 and the inner base 22 are combined, a part of the extension member 32 is located in the recess 2421. This recess 2421 only needs to be sufficient to provide an elastic buffer stroke and space for the extension member 32. Therefore, the height of the vertical cross section of the recess 2421 is not connected to the outer top edge 221 of the inner base 22, and does not affect the covering and sealing degree between the inner cover 21 and the inner base 22. Of course, the mounting part 242 of the inner base 22 of the present invention can also be designed as a structure without the recess 2421, and as long as the elastic guide member 30 can prevent the relative displacement between the inner cover 21 and the inner base 22, it is within the scope of this patent protection.

[0032] After understanding the important functions of the elastic guide members 30 and the conductive holders 40 in the inner pod 20 from the above, the detailed structural design of the conductive holders 40 will be further described. Still referring to FIG. 7 and FIG. 8, in this embodiment, the conductive holder 40 is structurally designed to be disposed on the inner side 211 of the inner cover 21. When the semiconductor workpiece R is a rectangular reticle, the conductive holder 40 abuts the back surface BS and adjacent sides, i.e., the chamfered portions, and it is preferable to provide the conductive holder 40 at the four chamfered portions to effectively restrict the displacement of the semiconductor workpiece R. Of course, when the semiconductor workpiece R is a non-rectangular reticle, the structural design of the conductive holder 40 of the present invention is also suitable, and the same purpose and effect of constant electrical conduction and static electricity escape path is achieved.

[0033] Specifically, at least one of the plurality of conductive holders 40 includes a holding base portion 41 and at least one inclined surface holding portion 42. The holding base portion 41 is connected to the inside 211 of the inner cover 21, one end of the inclined surface holding portion 42 is connected to the holding base portion 41, and the other end of the inclined surface holding portion 42 extends toward the back surface BS of the semiconductor workpiece R, and contacts the adjacent side (chamfered portion) of the semiconductor workpiece R via a pair of inclined surfaces to provide a contact force for restricting the displacement of the semiconductor workpiece R. Next, a pressing portion 43 is provided at the end of the inclined surface holding portion 42, which is separated from the holding base portion 41, and the pressing portion 43 has elasticity and slightly contacts the back surface BS of the semiconductor workpiece R, so that the conductive holder 40 and the semiconductor workpiece R are constantly electrically connected to each other. The pair of inclined surface holding portions 42 may be two members that are not connected to each other, and the pressing portion 43 is provided on each of the inclined surface holding portions 42. The two inclined surface holding portions 42 are connected to the holding base portion 41, and the ends of the two inclined surface holding portions 42 each contact the adjacent side of the semiconductor workpiece R with an inclined surface, and each slightly contacts the back surface BS of the semiconductor workpiece R using a pressing portion 43.

[0034] Of course, the present invention can also adjust the pressing part 43 with different structural designs as required, as shown in Fig. 10. One end of the two inclined surface holding parts 42 is connected to the holding base 41, and the other end is connected to the pressing part 43. Similarly, the two inclined surface holding parts 42 in Fig. 10 can contact the adjacent sides of the semiconductor workpiece R with their inclined surfaces, the pressing part 43 slightly contacts the back surface BS of the semiconductor workpiece R, and the pressing part 43 covers the corners of the semiconductor workpiece R. Regardless of whether the inner pod 20 is stored in the outer pod 10 or not, and regardless of whether the outer cover 11 is opened or closed, the inner pod 20 itself can establish an independent escape path for static electricity. When the inner cover 21 and the inner base 22 are joined, the conductive holder 40 is constantly electrically connected to the back surface BS of the semiconductor workpiece R, thereby dissipating the large amount of static electricity accumulated on the back surface BS of the semiconductor workpiece R to ground (GND) via the static electricity dissipation path of the conductive holder 40, the inner cover 21, and the inner base 22.

[0035] The detailed structural design of the multiple elastic guide members 30 will be further described. Continuing to refer to FIG. 2, FIG. 6 and FIG. 11, in this embodiment, the elastic guide members 30 are structurally designed to be disposed on adjacent outer edges of the inner pod 20. When the inner pod 20 is a rectangular body, the elastic guide members 30 abut on the corners of the inner pod 20, and preferably the elastic guide members 30 are provided at the four corners so that the inner cover 21 and the inner base 22 can be guided without being displaced relative to each other. The guide base portion 31 of the elastic guide member 30 is provided on the inner cover mounting portion 241, and one end of the extension member 32 is connected to the guide base portion 31, and the other end of the extension member 32 extends toward the inner base mounting portion 242 of the inner base 22. The extension member 32 has an elastic force and continues to abut on the outside of the inner base 22, i.e., the position of the inner base mounting portion 242, and can elastically adjust the displacement amount of the inner base 22. The guide base portion 31 and the extension member 32 simultaneously apply a guide action force that restricts the inner cover 21 and the inner base 22, thereby restricting the inner cover 21 and the inner base 22 from being displaced relative to each other. At least one protrusion 33 is provided on the extension member 32, and the protrusion 33 elastically and continuously abuts against the inner base mounting portion 242.

[0036] The extension members 32 may be two separate members, one end of each of the two extension members 32 is connected to the guide base portion 31, and the other end of each of the extension members 32 abuts on the adjacent side of the inner base 22. Of course, the present invention can also adjust the extension members 32 with different structural designs as required, for example, one end of the extension member 32 is connected to the guide base portion 31, and the other end is a continuous wall, which extends toward the inner base mounting portion 242 of the inner base 22 so that the extension members 32 cover the corners of the inner base 22. The present invention is not limited to any form of structural design of the elastic guide member 30, as long as the elastic guide member 30 keeps abutting on the outside of the inner pod 20 to restrict the inner cover 21 and the inner base 22 from being displaced relative to each other, and at the same time, the conductive holder 40 is used to abut against the semiconductor workpiece R to realize the automatic guiding of the inner cover 21 and the inner base 22, and the semiconductor workpiece R can be pushed into the center position of the inner base 22, it is within the scope of this patent protection.

[0037] 12, the semiconductor workpiece holding device further includes at least one conductive auxiliary member 50 provided on the inner side 211 of the inner cover 21, and when the inner cover 21 and the inner base 22 are combined, the conductive auxiliary member 50 is used to abut or contact the back surface BS of the semiconductor workpiece R. The conductive auxiliary member 50 is a flexible conductive member 50 or a conductive member 50 having elasticity of any geometric shape, and the present invention is not limited to any structural design, and the conductive auxiliary member 50 is made of a static electricity dissipative material, for example, a conductive material having a surface resistance of 10 4 ~10 11 As long as the conductive auxiliary member 50 has a material of Ω and the conductive holder 40 can constantly electrically conduct with the back surface BS of the semiconductor workpiece R when the inner cover 21 and the inner base 22 are combined, and can establish an electrostatic discharge path in the inner pod 20 itself, it falls within the scope of this patent protection. By adding the conductive auxiliary member 50 as a constantly electrically conducting contact with the back surface BS of the semiconductor workpiece R, an electrostatic discharge path can be formed from the conductive auxiliary member 50, the conductive holder 40, the inner cover 21, and the inner base 22, and the electrostatic dissipation efficiency on the back surface BS of the semiconductor workpiece R can be accelerated.

[0038] As shown in FIG. 13 and FIG. 14, in this embodiment, another structural design of the conductive holder 40 is disposed inside the inner base 22. At least one of the conductive holders 40 includes a holding base portion 41 and at least one elastic holding portion 42. The holding base portion 41 is disposed inside the inner base 22. One end of the elastic holding portion 42 is connected to the holding base portion 41, and the elastic holding portion 42 further has a pressing portion 43, which is elastic and slightly contacts the back surface BS of the semiconductor workpiece R. The elastic holding portion 42 provides a contact force to limit the displacement of the semiconductor workpiece R. The present invention intends that the conductive holder 40 abuts against the back surface BS of the semiconductor workpiece R regardless of whether it is disposed inside the inner cover 211 or the inner base 22, in order to achieve the same purpose and effect of constant electrical conduction and static electricity escape path.

[0039] The inner pod 20 and all assemblies disposed within the inner pod 20 are made of static dissipative material and have a surface resistance of 10 4 ~10 11 The assembly includes a support assembly for supporting the semiconductor workpiece R, a gas flow assembly, or an assembly of a required structural design disposed in the inner pod 20. As long as it is possible to establish electrical continuity at all times with the back surface BS of the semiconductor workpiece R and to establish an electrostatic discharge path in the inner pod 20 itself (e.g., the conductive holder 40, the inner cover 21, the inner base 22, forming an electrostatic discharge path for the assembly), it is within the scope of this patent protection.

[0040] In short, since the inner pod is equipped with the elastic guide member, the conductive holder, and the assembly with electrostatic dissipation properties, the inner pod does not need the assistance of the outer pod or other external forces, and the conductive holder can restrict the movement of the semiconductor workpiece by simply placing the inner cover over the inner base, and the elastic guide member can restrict the relative displacement between the inner cover and the inner base, and the structural configuration of the conductive holder and the elastic guide member can also automatically guide the semiconductor workpiece accommodated in the accommodation space to the center position of the inner base. The present invention can reliably solve the problem that the semiconductor workpiece is lost when the outer pod is opened, and the semiconductor workpiece rubs against the inside of the inner pod, generating particles to contaminate the reticle.

[0041] However, it should be understood that each specific embodiment of the present invention is for illustrative purposes only, and that various modifications can be made without departing from the scope of the present invention, which is to be included in the scope of the claims. Accordingly, each specific embodiment described herein is not intended to limit the present invention, and the true scope and spirit of the present invention is set forth in the following claims. [Explanation of symbols]

[0042] 10 Outer Pod 1 Reticle Pod 11 Outer cover 12 Outer Base 20 Inner Pod 21 Inner cover 211 Inside 22 Inner Base 221 Apical margin 23 Containment Space 24 Outer mounting section 241 Inner cover attachment part 242 Inner base mounting part 2421 Recess 30 Elastic guide member 31 Guide base part 32 Extension member 33 Convex 40 Conductive holder 41 Holding base part 42 Inclined surface holding part 43 Pressing part 50 Conductive auxiliary material BS back GND Ground R Semiconductor workpiece

Claims

1. A reticle pod with a back surface static electricity removal function suitable for a dual pod including an outer pod and an inner pod housed in the outer pod, the inner pod comprising: The inner base and an inner cover configured to be coupled to the inner base to define an accommodation space for accommodating a reticle, the inner cover being configured to be provided with a plurality of outer mounting portions located outside the accommodation space; a plurality of elastic guide members arranged corresponding to the outer mounting portions and guiding the inner cover and the inner base so as not to displace relative to each other; a plurality of conductive holders provided within the accommodation space for contacting the rear surface of the reticle so as to constantly establish electrical continuity with the rear surface of the reticle; forming an escape path for static electricity established by the plurality of conductive retainers, the inner cover, and the inner base; the plurality of conductive holders contact the reticle and the plurality of elastic guide members automatically guide the inner cover and the inner base, so that the reticle is automatically pushed into a center position of the inner base. Reticle pod with back-side static electricity removal function.

2. At least one of the plurality of conductive holders is a holding base portion provided on the inside of the inner cover; One end of the reticle is connected to the holding base portion, and the other end of the reticle is connected to at least one inclined surface holding portion for holding the back surface of the reticle.

2. The reticle pod with back surface static electricity removal function according to claim 1 .

3. At least one of the plurality of conductive holders has a holding base portion provided inside the inner base; One end of the reticle is connected to the holding base portion, and the other end of the reticle is connected to at least one elastic holding portion that holds the back surface of the reticle.

2. The reticle pod with back surface static electricity removal function according to claim 1 .

4. and at least one conductive auxiliary member provided on the inner cover and adapted to contact the back surface of the reticle. A reticle pod with back surface static electricity removal function as described in claim 1, wherein the multiple conductive holders and the conductive auxiliary member are constantly electrically connected to the back surface of the reticle at the same time, thereby forming an escape path for the static electricity established by the conductive auxiliary member, the multiple conductive holders, the inner cover, and the inner base.

5. 2. A reticle pod with back surface static electricity removal function as described in claim 1, wherein the outer mounting portion is provided on two adjacent sides where the inner cover and the inner base are joined, and the outer mounting portion and the elastic guide member are structurally compatible.

6. Each of the outer mounting parts includes an inner cover mounting part and an inner base mounting part, and each of the elastic guide members is disposed on the inner cover mounting part and the inner base mounting part simultaneously, and the elastic guide members are A guide base portion fixed to the inner cover attachment portion; at least one extension member, one end of which is connected to the guide base portion and the other end of which abuts against the inner base mounting portion; 6. The reticle pod with back surface static electricity removal function according to claim 5,

7. 7. The reticle pod with back surface static electricity removal function according to claim 6, wherein the extension member is further provided with at least one protrusion for contacting the inner base mounting portion.

8. 7. A reticle pod with back surface static electricity removal function as described in claim 6, wherein the inner base mounting portion includes at least one recess, the recess does not connect to the outer top edge of the inner base, and a portion of the extension member is located in the recess.

9. A reticle pod with a back surface static electricity removal function suitable for a dual pod including an outer pod and an inner pod housed in the outer pod, the inner pod comprising: The inner base and an inner cover configured to be coupled to the inner base to define an accommodation space for accommodating a reticle, the inner cover being configured to be provided with a plurality of outer mounting portions located outside the accommodation space; a plurality of elastic guide members arranged corresponding to the outer mounting portions and guiding the inner cover and the inner base so as not to displace relative to each other; a plurality of conductive holders provided within the accommodation space for contacting the rear surface of the reticle so as to constantly establish electrical continuity with the rear surface of the reticle; forming an escape path for static electricity established by the plurality of conductive retainers, the inner cover, and the inner base; the reticle is automatically pushed into a center position of the inner base by the plurality of conductive holders contacting the reticle and the plurality of elastic guide members automatically guiding the inner cover and the inner base; the inner pod and all assemblies disposed in the inner pod are made of a static electricity dissipative material, and the static electricity on the back surface is electrically conducted through the conductive holders, thereby forming an escape path for the static electricity established by the conductive holders, the inner pod, and the assemblies; Reticle pod with back-side static electricity removal function.

10. At least one of the plurality of conductive holders is a holding base portion provided on the inside of the inner cover; One end of the reticle is connected to the holding base portion, and the other end of the reticle is connected to at least one inclined surface holding portion for holding the back surface of the reticle.

10. The reticle pod with back surface static electricity removal function according to claim 9,

11. At least one of the plurality of conductive holders has a holding base portion provided inside the inner base; One end of the reticle is connected to the holding base portion, and the other end of the reticle is connected to at least one elastic holding portion that holds the back surface of the reticle.

10. The reticle pod with back surface static electricity removal function according to claim 9,

12. and at least one conductive auxiliary member provided on the inner cover and adapted to contact the back surface of the reticle. The reticle pod with back surface static electricity removal function described in claim 9 further comprises at least one conductive auxiliary member for forming an electrostatic discharge path established by the conductive auxiliary member, the multiple conductive holders, the inner cover, and the inner base by constantly electrically conducting the conductive auxiliary member and the multiple conductive holders simultaneously with the back surface of the reticle.

13. A reticle pod with back surface static electricity removal function as described in claim 9, wherein the outer mounting portion is provided on two adjacent sides where the inner cover and the inner base are joined, and the outer mounting portion and the elastic guide member are structurally compatible.

14. Each of the outer mounting parts includes an inner cover mounting part and an inner base mounting part, and each of the elastic guide members is disposed on the inner cover mounting part and the inner base mounting part simultaneously, and the elastic guide members are A guide base portion fixed to the inner cover attachment portion; at least one extension member, one end of which is connected to the guide base portion and the other end of which abuts against the inner base mounting portion; The reticle pod with backside static electricity removal function according to claim 13 .

15. 15. The reticle pod with backside static electricity removal function according to claim 14, wherein the extension member is further provided with at least one protrusion for contacting the inner base mounting portion.

16. 15. A reticle pod with back surface static electricity removal function as described in claim 14, wherein the inner base mounting portion includes at least one recess, the recess does not connect to the outer top edge of the inner base, and a portion of the extension member is located in the recess.

17. an inner cover and an inner base that are coupled together to define a storage space for storing a reticle; a plurality of conductive holders that establish an electrostatic discharge path with the inner cover and the inner base, and that are configured to constantly abut against the back surface of the reticle in the accommodation space when the inner cover and the inner base are coupled together, thereby allowing the charge on the back surface of the reticle to be discharged through the electrostatic discharge path; a plurality of elastic guide members fixed to the outer periphery of the inner cover and configured to come into contact with a plurality of outer surfaces of the inner base when the inner cover and the inner base are coupled together, thereby automatically guiding the inner cover and the inner base so as not to displace the inner cover and the inner base relative to each other; Includes a reticle pod with backside anti-static function.

18. 18. The reticle pod with backside static electricity removal function according to claim 17, wherein the plurality of conductive holders are disposed inside the inner cover and are not exposed to the outside of the inner cover.

19. A reticle pod with back surface electrostatic removal function as described in claim 17, wherein each of the elastic guide members includes a guide base portion and a pair of extension members extending downward from the guide base portion, and when the inner cover is coupled to the inner base, the pair of extension members extend downward from the outer side of the inner cover and simultaneously abut against two adjacent sides of the inner base, automatically guiding the inner cover and the inner base so as not to displace relative to each other.

20. 20. The reticle pod with backside static electricity removal function according to claim 19, wherein the guide base portion is fixed to a corner portion of the inner cover.

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