Image display device manufacturing method and image display device

Abstract

According to the embodiments, the production method for an image display device comprises a step for preparing a semiconductor layer, a step for pasting the semiconductor layer onto a first surface of a translucent substrate, a step for etching the semiconductor layer to form a light-emitting element that includes a light emission surface that is on the first surface and an upper surface that is on the reverse side from the light emission surface, a step for forming a first insulating film that covers the first surface and the light-emitting element, a step for forming a circuit element on the first insulating film, a step for forming a second insulating film that covers the first insulating film and the circuit element, a step for forming a first via that passes through the first insulating film and the second insulating film, and a step for forming a first wiring layer on the second insulating film. The first via is provided between the first wiring layer and the upper surface and electrically connects the first wiring layer and the upper surface.

Description

[Technical field]

[0001] An embodiment of the present invention relates to a manufacturing method for an image display device and an image display device. [Background technology]

[0002] There is a demand for a thin image display device that has high brightness, a wide viewing angle, high contrast, and low power consumption. In order to meet such market demands, development of display devices using self-luminous elements is underway.

[0003] The emergence of display devices using micro LEDs, which are minute light-emitting elements, is expected as a self-emitting element. As a manufacturing method for display devices using micro LEDs, a method of sequentially transferring individually formed micro LEDs to a driving circuit has been introduced. However, as the number of micro LED elements increases with the trend toward higher image quality such as full high definition, 4K, 8K, etc., the transfer process requires an enormous amount of time if a large number of micro LEDs are individually formed and sequentially transferred to a substrate on which a driving circuit, etc. is formed. Furthermore, there is a risk of poor connection between the micro LEDs and the driving circuit, etc., resulting in a decrease in yield.

[0004] A technique is known in which a semiconductor layer including a light emitting layer is grown on a Si substrate, electrodes are formed on the semiconductor layer, and then the semiconductor layer is bonded to a circuit board on which a driving circuit is formed (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2002-141492 A Summary of the Invention [Problem to be solved by the invention]

[0006] An embodiment of the present invention provides a manufacturing method for an image display device and the image display device, which shortens the transfer step of light-emitting elements and improves yield. [Means for solving the problem]

[0007] A method for manufacturing an image display device according to an embodiment of the present invention includes the steps of: preparing a semiconductor layer including a light-emitting layer, bonding the semiconductor layer to a first surface of a light-transmitting substrate, etching the semiconductor layer to form a light-emitting element including a light-emitting surface on the first surface and an upper surface provided on the opposite side of the light-emitting surface, forming a first insulating film covering the first surface and the light-emitting element, forming a circuit element on the first insulating film, forming a second insulating film covering the first insulating film and the circuit element, forming a first via penetrating the first insulating film and the second insulating film, and forming a first wiring layer on the second insulating film. The first via is provided between the first wiring layer and the upper surface and electrically connects the first wiring layer to the upper surface.

[0008] An image display device according to one embodiment of the present invention includes a light-transmitting member having a first surface, a light-emitting element including a light-emitting surface on the first surface and an upper surface opposite to the light-emitting surface, a first insulating film covering the first surface and the light-emitting element, a circuit element provided on the first insulating film, a second insulating film covering the first insulating film and the circuit element, a first via provided through the first insulating film and the second insulating film, and a first wiring layer provided on the second insulating film. The first via is provided between the first wiring layer and the upper surface and electrically connects the first wiring layer and the upper surface.

[0009] An image display device according to an embodiment of the present invention includes a light-transmitting member having a first surface, a first semiconductor layer including a light-emitting surface on the first surface that can form a plurality of light-emitting regions, a plurality of light-emitting layers provided on the first semiconductor layer at a distance from each other, a plurality of second semiconductor layers provided on the plurality of light-emitting layers and having a different conductivity type from the first semiconductor layer, a first insulating film covering the first surface, the first semiconductor layer, the plurality of light-emitting layers, and the plurality of second semiconductor layers, a plurality of transistors provided on the first insulating film at a distance from each other, a second insulating film covering the first insulating film and the plurality of transistors, a plurality of first vias provided through the first insulating film and the second insulating film, and a first wiring layer provided on the second insulating film. The plurality of second semiconductor layers and the plurality of light-emitting layers are separated by the first insulating film. The plurality of first vias are provided between the first wiring layer and the plurality of second semiconductor layers, and electrically connect the first wiring layer and the plurality of second semiconductor layers, respectively.

[0010] An image display device according to one embodiment of the present invention includes a light-transmitting member having a first surface, a plurality of light-emitting elements each having a light-emitting surface on the first surface and an upper surface opposite to the light-emitting surface, a first insulating film covering the first surface and the plurality of light-emitting elements, a circuit element provided on the first insulating film, a second insulating film covering the first insulating film and the circuit element, a plurality of first vias provided through the first insulating film and the second insulating film, and a first wiring layer provided on the second insulating film. The plurality of first vias are provided between the first wiring layer and the upper surface and electrically connect the first wiring layer and the upper surface, respectively. Effect of the Invention

[0011] According to one embodiment of the present invention, a method for manufacturing an image display device is realized that shortens the transfer process of light emitting elements and improves yield.

[0012] According to one embodiment of the present invention, an image display device is realized in which the transfer process of the light emitting elements is shortened and the yield is improved. [Brief description of the drawings]

[0013] [Figure 1] 1 is a schematic cross-sectional view illustrating a portion of an image display device according to a first embodiment. [Diagram 2] FIG. 1 is a schematic block diagram illustrating an image display device according to a first embodiment. [Diagram 3] FIG. 2 is a schematic plan view illustrating a portion of the image display device according to the first embodiment. [Figure 4A] 3A to 3C are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 4B] 3A to 3C are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 5A] 3A to 3C are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 5B] 3A to 3C are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 6] 3A to 3C are schematic perspective views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 7A] 3A to 3C are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 7B] 3A to 3C are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 8A] 3A to 3C are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 8B] 3A to 3C are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device according to the first embodiment. [Figure 9] FIG. 1 is a schematic perspective view illustrating an image display device according to a first embodiment. [Figure 10] FIG. 11 is a schematic cross-sectional view illustrating a portion of an image display device according to a second embodiment. [Figure 11] FIG. 11 is a schematic block diagram illustrating an image display device according to a second embodiment. [Figure 12A]5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 12B] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 13] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 14A] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 14B] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 15A] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 15B] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 16A] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 16B] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 17A] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 17B] 5A to 5C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a second embodiment. [Figure 18] FIG. 11 is a schematic cross-sectional view illustrating a portion of an image display device according to a third embodiment. [Figure 19] FIG. 11 is a schematic block diagram illustrating an image display device according to a third embodiment. [Figure 20A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 20B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 21A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 21B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 22A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 22B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 23A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 23B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 24A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 24B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 24C] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Figure 24D] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a third embodiment. [Diagram 25] FIG. 13 is a schematic perspective view illustrating an image display device according to a third embodiment. [Figure 26] FIG. 13 is a schematic cross-sectional view illustrating a portion of an image display device according to a fourth embodiment. [Figure 27A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fourth embodiment. [Figure 27B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fourth embodiment. [Figure 28A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fourth embodiment. [Figure 28B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fourth embodiment. [Figure 29A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fourth embodiment. [Figure 29B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fourth embodiment. [Figure 30A] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fourth embodiment. [Figure 30B] 10A to 10C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fourth embodiment. [Diagram 31] FIG. 13 is a schematic cross-sectional view illustrating a portion of an image display device according to a fifth embodiment. [Diagram 32] FIG. 13 is a schematic block diagram illustrating an image display device according to a fifth embodiment. [Figure 33A] 13A to 13C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fifth embodiment. [Figure 33B] 13A to 13C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fifth embodiment. [Figure 34A] 13A to 13C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fifth embodiment. [Figure 34B] 13A to 13C are schematic cross-sectional views illustrating a part of a method for manufacturing an image display device according to a fifth embodiment. [Diagram 35] 13 is a schematic cross-sectional view illustrating a portion of an image display device according to a sixth embodiment. FIG. [Diagram 36] FIG. 13 is a schematic cross-sectional view illustrating a part of an image display device according to a sixth embodiment. [Figure 37] 13 is a schematic cross-sectional view illustrating a portion of an image display device according to a seventh embodiment. FIG. [Figure 38] FIG. 13 is a schematic cross-sectional view illustrating a part of an image display device according to a seventh embodiment. [Figure 39] FIG. 13 is a block diagram illustrating an image display device according to an eighth embodiment. [Diagram 40] FIG. 23 is a block diagram illustrating an image display device according to a modified example of the eighth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as in reality. Even when the same part is shown, the dimensions and ratios of each part may be different depending on the drawing. In this specification and each drawing, elements similar to those described above with reference to the previous drawings are given the same reference numerals and detailed description thereof will be omitted as appropriate.

[0015] (First embodiment) FIG. 1 is a schematic cross-sectional view illustrating a part of an image display device according to this embodiment. 1 shows a schematic configuration of a subpixel 20 of an image display device according to this embodiment. In this embodiment and other embodiments described later, the second, fourth, sixth and seventh embodiments show examples in which no color filter is attached, and therefore, when these are used as a monochrome image display device, for example, the subpixel becomes one pixel. In this specification, a light-emitting element including one light-emitting element is referred to as a subpixel, whether one pixel is formed by one subpixel or one pixel is formed by multiple subpixels.

[0016] In the following, the three-dimensional coordinate system of XYZ may be used for explanation. The light-emitting elements 150 are arranged in a two-dimensional plane as shown in FIG. 9 described later. The light-emitting elements 150 are provided for each sub-pixel 20. The two-dimensional plane on which the sub-pixels 20 are arranged is defined as the XY plane. The sub-pixels 20 are arranged along the X-axis direction and the Y-axis direction. FIG. 1 shows a cross section taken along line AA' in FIG. 3 described later, and is a cross section in which cross sections in a plurality of planes perpendicular to the XY plane are connected on one plane. In other figures, as in FIG. 1, the X-axis and Y-axis are not shown in the cross sections in a plurality of planes perpendicular to the XY plane, and the Z-axis perpendicular to the XY plane is shown. That is, in these figures, the plane perpendicular to the Z-axis is defined as the XY plane.

[0017] In the following, the positive direction of the Z axis may be referred to as "up" or "upward" and the negative direction of the Z axis as "down" or "downward," but the direction along the Z axis is not necessarily limited to the direction in which gravity is applied. The length along the Z axis may be referred to as height.

[0018] The subpixel 20 has a light-emitting surface 151S that is substantially parallel to the XY plane. The light-emitting surface 151S is a surface that mainly emits light in the negative direction of the Z axis that is perpendicular to the XY plane. In this embodiment and all embodiments described later, the light-emitting surface emits light in the negative direction of the Z axis.

[0019] As shown in FIG. 1, a subpixel 20 of an image display device includes a substrate 102, a light emitting element 150, a first interlayer insulating film 156, a transistor (circuit element) 103, a second interlayer insulating film 108, a via 161a, and a first wiring layer 110.

[0020] In this embodiment, the substrate 102 has two surfaces, and a bonding layer 303 is provided on one surface 102a. The bonding layer 303 has a first surface 103a. The first surface 103a is a flat surface that is approximately parallel to the XY plane. When a color filter is provided in the image display device of this embodiment, the color filter is formed on the other surface 102b of the substrate 102. The other surface 102b is the surface opposite to the one surface 102a. In other embodiments described later, when a color filter is not provided, a color filter may be provided on the surface opposite to the surface on which the light emitting element is formed, as described above.

[0021] The substrate 102 is a light-transmitting substrate, for example a glass substrate. The bonding layer 303 is formed of a light-transmitting material, for example a layer formed of an oxide or nitride of an inorganic material such as SiO2. The bonding layer 303 provides a flat surface for arranging a large number of light-emitting elements 150 on the first surface 103a. The bonding layer 303 is provided to facilitate bonding in the wafer bonding step of the manufacturing method of the image display device of this embodiment.

[0022] The light emitting element 150 is provided on the first surface 103a. The light emitting element 150 is driven by a transistor 103 provided via a first interlayer insulating film 156. The transistor 103 is a thin film transistor (TFT), and is formed on the first interlayer insulating film 156. The process of forming circuit elements including TFTs on a large glass substrate has been established for the manufacture of liquid crystal panels, organic EL panels, and the like, and has the advantage that an existing plant can be used.

[0023] The configuration of the sub-pixel 20 will be described in detail below. The light emitting element 150 includes a light emitting surface 151S provided on the first surface 103a. The light emitting element 150 includes an upper surface 153U provided on the opposite side of the light emitting surface 151S. In this example, the outer peripheral shape of the light emitting surface 151S and the upper surface 153U in the XY plane view is a square or rectangular, and the light emitting element 150 is a prismatic element having the light emitting surface 151S on the first surface 103a. The cross section of the prismatic element may be a polygon having five or more sides. The light emitting element 150 is not limited to a prismatic element, and may be a cylindrical element.

[0024] The light emitting element 150 includes an n-type semiconductor layer 151, a light emitting layer 152, and a p-type semiconductor layer 153. The n-type semiconductor layer 151, the light emitting layer 152, and the p-type semiconductor layer 153 are laminated in this order from a light emitting surface 151S toward an upper surface 153U. The light emitting surface 151S, which is the n-type semiconductor layer 151, is provided in contact with the first surface 103a. Therefore, the light emitting element 150 emits light in the negative direction of the Z axis through the bonding layer 303 and the substrate 102.

[0025] The n-type semiconductor layer 151 includes a connection portion 151a. The connection portion 151a is provided so as to protrude in one direction from the n-type semiconductor layer 151 on the first surface 103a. The height of the connection portion 151a from the first surface 103a is the same as the height of the n-type semiconductor layer 151 from the first surface 103a or is lower than the height of the n-type semiconductor layer 151 from the first surface 103a. The connection portion 151a is a part of the n-type semiconductor layer 151. The connection portion 151a is connected to one end of the via 161k, and the n-type semiconductor layer 151 is electrically connected to the via 161k via the connection portion 151a.

[0026] When the light emitting element 150 has a prismatic shape, the shape of the light emitting element 150 in the XY plane view is, for example, substantially square or rectangular. When the shape of the light emitting element 150 in the XY plane view is a polygon including a square, the corners of the light emitting element 150 may be rounded. When the shape of the light emitting element 150 in the XY plane view is cylindrical, the shape of the light emitting element 150 in the XY plane view is not limited to a circle, and may be, for example, an ellipse. By appropriately selecting the shape and arrangement of the light emitting element in the plan view, the degree of freedom of the wiring layout, etc. is improved.

[0027] The light emitting element 150 may include, for example, In X Al Y Ga 1-X-Y A gallium nitride compound semiconductor including a light emitting layer of, for example, N (0≦X, 0≦Y, X+Y<1) is preferably used. Hereinafter, the above-mentioned gallium nitride compound semiconductor may be simply referred to as gallium nitride (GaN). The light emitting element 150 in one embodiment of the present invention is a so-called light emitting diode. The wavelength of light emitted by the light emitting element 150 may be in the range from the near ultraviolet region to the visible light region, for example, about 467 nm±30 nm. The wavelength of light emitted by the light emitting element 150 may be blue-violet light of about 410 nm±30 nm. The wavelength of light emitted by the light emitting element 150 is not limited to the above-mentioned value and may be any appropriate value.

[0028] The first interlayer insulating film (first insulating film) 156 covers the first surface 103a and the light emitting element 150. The first interlayer insulating film 156 electrically isolates adjacently arranged light emitting elements 150 from each other. The first interlayer insulating film 156 electrically isolates the light emitting element 150 from circuit elements such as the transistor 103. The first interlayer insulating film 156 provides a flat surface for forming the circuit 101 including the circuit elements such as the transistor 103. By covering the light emitting element 150, the first interlayer insulating film 156 protects the light emitting element 150 from thermal stress and the like when forming the transistor 103 and the like.

[0029] The first interlayer insulating film 156 is preferably formed of an organic insulating material. The organic insulating material used for the first interlayer insulating film 156 is preferably a white resin. By making the first interlayer insulating film 156 a white resin, it is possible to reflect the lateral emitted light of the light emitting element 150 and the return light caused by the interface between the bonding layer 303 and the substrate 102. Therefore, the light emitting efficiency of the light emitting element 150 is substantially improved. In addition, since the first interlayer insulating film 156 has light reflectivity, it is possible to reflect the scattered light toward the upper side of the light emitting element 150 and suppress the light from reaching the transistor 103.

[0030] The white resin is formed by dispersing scattering particles having a Mie scattering effect in a transparent resin such as a silicon-based resin such as SOG (Spin On Glass) or a novolac-type phenol-based resin. The scattering particles are colorless or white, and have a diameter of about 1 / 10 to several times the wavelength of the light emitted by the light-emitting element 150. The scattering particles preferably used have a diameter of about 1 / 2 the wavelength of the light. For example, such scattering particles include TiO2, Al2O3, and ZnO.

[0031] Alternatively, the white resin can be formed by utilizing a large number of fine pores dispersed in a transparent resin. When the first interlayer insulating film 156 is to be whitened, a SiO2 film formed by ALD (Atomic-Layer-Deposition) or CVD may be used on top of the SOG or the like.

[0032] The first interlayer insulating film 156 may be a black resin. By making the first interlayer insulating film 156 a black resin, scattering of light in the subpixels 20 is suppressed, and stray light is more effectively suppressed. An image display device in which stray light is suppressed can display sharper images.

[0033] A TFT lower layer film 106 is formed over the first interlayer insulating film 156. The TFT lower layer film 106 is provided for the purposes of ensuring flatness when the transistor 103 is formed and protecting the TFT channel 104 of the transistor 103 from contamination and the like during heat treatment. The TFT lower layer film 106 is an insulating film made of, for example, SiO2 or the like.

[0034] The transistor 103 is formed on a TFT lower layer film 106. In addition to the transistor 103, other circuit elements such as other transistors and capacitors are formed on the TFT lower layer film 106, and a circuit 101 is formed by wiring and the like. For example, in FIG. 2 described later, the transistor 103 corresponds to a drive transistor 26. In FIG. 2, other circuit elements include a selection transistor 24 and a capacitor 28. The circuit 101 includes a TFT channel 104, an insulating layer 105, a second interlayer insulating film 108, vias 111s and 111d, and a first wiring layer 110.

[0035] In this example, the transistor 103 is a p-channel TFT. The transistor 103 includes a TFT channel 104 and a gate 107. The TFT channel 104 is preferably formed by a low temperature polysilicon (LTPS) process. In the LTPS process, the TFT channel 104 is formed by polycrystallizing and activating an amorphous Si region formed on the TFT underlayer film 106. For example, laser annealing using a laser is used to polycrystallize and activate the amorphous Si region. The TFT formed by the LTPS process has a sufficiently high mobility.

[0036] The TFT channel 104 includes regions 104s, 104i, and 104d. The regions 104s, 104i, and 104d are all provided on the TFT underlayer film 106. The region 104i is provided between the region 104s and the region 104d. The regions 104s and 104d are doped with boron ions (B + ) or boron fluoride ion (BF 2+ ) and is doped with p-type impurities and is in ohmic contact with the vias 111s and 111d.

[0037] The gate 107 is provided on the TFT channel 104 via an insulating layer 105. The insulating layer 105 is provided to insulate the TFT channel 104 from the gate 107 and to insulate the gate 107 from other adjacent circuit elements. When a potential lower than that of the region 104s is applied to the gate 107, a channel is formed in the region 104i, thereby controlling the current flowing between the regions 104s and 104d.

[0038] The insulating layer 105 is, for example, SiO2. The insulating layer 105 may also be a multi-layer insulating layer including SiO2, Si3N4, etc. depending on the area covered.

[0039] The gate 107 may be formed of, for example, polycrystalline Si, or may be formed of a high melting point metal such as W or Mo. When the gate 107 is formed of a polycrystalline Si film, it is formed by, for example, CVD or the like.

[0040] The second interlayer insulating film 108 is provided on the gate 107 and the insulating layer 105. The second interlayer insulating film 108 is formed of, for example, the same material as the first interlayer insulating film 156. That is, the second interlayer insulating film 108 is formed of, for example, a white resin or an inorganic film such as SiO2. The second interlayer insulating film 108 also functions as a planarizing film for forming the first wiring layer 110.

[0041] The vias 111s and 111d are provided penetrating the second interlayer insulating film 108 and the insulating layer 105. The first wiring layer 110 is formed on the second interlayer insulating film 108. The first wiring layer 110 includes a plurality of wirings that may have different potentials. In this example, the first wiring layer 110 includes wirings 110s, 110d, and 110k. These wirings 110s, 110d, and 110k are formed separately.

[0042] A portion of the wiring 110s is provided above the region 104s. The other portion of the wiring 110s is connected to a power supply line 3 shown in, for example, FIG. 2 described later. A portion of the wiring (first wiring) 110d is provided above the region 104d. The other portion of the wiring 110d is provided above the upper surface 153U. A portion of the wiring (second wiring) 110k is provided above the connection portion 151a. The other portion of the wiring 110k is connected to a ground line 4 shown in, for example, the circuit in FIG. 2 described later.

[0043] In the cross-sectional views of FIG. 1 and subsequent figures, unless otherwise specified, the reference numerals representing wiring layers are shown next to the wires that constitute the wiring layer.

[0044] The via 111s is provided between the wiring 110s and the region 104s, and electrically connects the wiring 110s and the region 104s. The via 111d is provided between the wiring 110d and the region 104d, and electrically connects the wiring 110d and the region 104d.

[0045] The wiring 110s is connected to the region 104s through the via 111s. The region 104s is the source region of the transistor 103. Therefore, the source region of the transistor 103 is electrically connected to, for example, a power line 3 shown in the circuit of FIG. 2 described later through the via 111s and the wiring 110s.

[0046] The wiring 110d is connected to the region 104d through a via 111d. The region 104d is the drain region of the transistor 103.

[0047] The via (first via) 161a is provided penetrating the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156. The via 161a is provided between the wiring (first wiring) 110d and the upper surface 153U, and electrically connects the wiring 110d and the p-type semiconductor layer 153. Therefore, the p-type semiconductor layer 153 is electrically connected to the drain region of the transistor 103 through the via 161a, the wiring 110d, and the via 111d.

[0048] The via (second via) 161k is provided penetrating the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156. The via 161k is provided between the wiring (second wiring) 110k and the connection portion 151a, and electrically connects the wiring 110k and the connection portion 151a. Therefore, the n-type semiconductor layer 151 is electrically connected to, for example, the ground line 4 shown in the circuit of FIG. 2 through the connection portion 151a, the via 161k, and the wiring 110k.

[0049] The first wiring layer 110 and the vias 111s, 111d, and 161k are formed of, for example, Al, an alloy of Al, a laminated film of Al and Ti, etc. For example, in the laminated film of Al and Ti, Al is laminated on a thin film of Ti, and Ti is further laminated on Al.

[0050] A protective layer may be provided over the second interlayer insulating film 108 and the first wiring layer 110 to protect them from the external environment.

[0051] FIG. 2 is a schematic block diagram illustrating the image display device according to the present embodiment. 2, the image display device 1 of this embodiment includes a display area 2. Sub-pixels 20 are arranged in the display area 2. The sub-pixels 20 are arranged, for example, in a lattice pattern. For example, n sub-pixels 20 are arranged along the X axis, and m sub-pixels 20 are arranged along the Y axis.

[0052] The image display device 1 further includes a power supply line 3 and a ground line 4. The power supply line 3 and the ground line 4 are laid out in a grid pattern along the arrangement of the sub-pixels 20. The power supply line 3 and the ground line 4 are electrically connected to each sub-pixel 20, and supply power to each sub-pixel 20 from a DC power supply connected between a power supply terminal 3a and a GND terminal 4a. The power supply terminal 3a and the GND terminal 4a are provided at the ends of the power supply line 3 and the ground line 4, respectively, and are connected to a DC power supply circuit provided outside the display area 2. A positive voltage is supplied to the power supply terminal 3a with respect to the GND terminal 4a.

[0053] The image display device 1 further includes scanning lines 6 and signal lines 8. The scanning lines 6 are arranged in a direction parallel to the X-axis. That is, the scanning lines 6 are arranged along the row direction arrangement of the sub-pixels 20. The signal lines 8 are arranged in a direction parallel to the Y-axis. That is, the signal lines 8 are arranged along the column direction arrangement of the sub-pixels 20.

[0054] The image display device 1 further includes a row selection circuit 5 and a signal voltage output circuit 7. The row selection circuit 5 and the signal voltage output circuit 7 are provided along the outer edge of the display area 2. The row selection circuit 5 is provided along the Y-axis direction of the outer edge of the display area 2. The row selection circuit 5 is electrically connected to the sub-pixels 20 of each column via scanning lines 6, and supplies a selection signal to each sub-pixel 20.

[0055] The signal voltage output circuit 7 is provided along the X-axis direction on the outer edge of the display area 2. The signal voltage output circuit 7 is electrically connected to the sub-pixels 20 in each row via signal lines 8, and supplies a signal voltage to each sub-pixel 20.

[0056] The subpixel 20 includes a light emitting element 22, a select transistor 24, a drive transistor 26, and a capacitor 28. In Figure 2 and Figure 3 described below, the select transistor 24 may be labeled T1, the drive transistor 26 may be labeled T2, and the capacitor 28 may be labeled Cm.

[0057] The light-emitting element 22 is connected in series with the driving transistor 26. In this embodiment, the driving transistor 26 is a p-channel TFT, and the anode electrode of the light-emitting element 22 is connected to the drain electrode of the driving transistor 26. The main electrodes of the driving transistor 26 and the selection transistor 24 are the drain electrode and the source electrode. The anode electrode of the light-emitting element 22 is connected to the p-type semiconductor layer. The cathode electrode of the light-emitting element 22 is connected to the n-type semiconductor layer. The series circuit of the light-emitting element 22 and the driving transistor 26 is connected between the power supply line 3 and the ground line 4. The driving transistor 26 corresponds to the transistor 103 in FIG. 1, and the light-emitting element 22 corresponds to the light-emitting element 150 in FIG. 1. The current flowing through the light-emitting element 22 is determined by the voltage applied between the gate and source of the driving transistor 26, and the light-emitting element 22 emits light with a luminance according to the current flowing through the light-emitting element 22.

[0058] The selection transistor 24 is connected between the gate electrode of the drive transistor 26 and a signal line 8 via a main electrode. The gate electrode of the selection transistor 24 is connected to a scanning line 6. A capacitor 28 is connected between the gate electrode of the drive transistor 26 and a power line 3.

[0059] The row selection circuit 5 selects one row from an array of m rows of subpixels 20 and supplies a selection signal to a scanning line 6. The signal voltage output circuit 7 supplies a signal voltage having a required analog voltage value to each subpixel 20 in the selected row. The signal voltage is applied between the gate and source of the drive transistor 26 of the subpixel 20 in the selected row. The signal voltage is held by a capacitor 28. The drive transistor 26 passes a current corresponding to the signal voltage to the light-emitting element 22. The light-emitting element 22 emits light with a brightness corresponding to the current that has passed through it.

[0060] The row selection circuit 5 sequentially switches the selected row and supplies a selection signal. That is, the row selection circuit 5 scans the rows in which the sub-pixels 20 are arranged. A current corresponding to a signal voltage flows through the light-emitting elements 22 of the sequentially scanned sub-pixels 20, causing them to emit light. The luminance of the sub-pixels 20 is determined by the current flowing through the light-emitting elements 22. The sub-pixels 20 emit light at a gradation based on the determined luminance, and an image is displayed in the display area 2.

[0061] FIG. 3 is a schematic plan view illustrating a part of the image display device of the present embodiment. In FIG. 3, line AA′ indicates a cutting line in the cross-sectional view of FIG. In this embodiment, the light emitting element 150 and the driving transistor 103 are stacked in the Z-axis direction via a first interlayer insulating film 156. The light emitting element 150 corresponds to the light emitting element 22 in Fig. 2. The driving transistor 103 corresponds to the driving transistor 26 in Fig. 2 and is also denoted as T2.

[0062] 3, the cathode electrode of the light emitting element 150 is provided by the connection portion 151a. The connection portion 151a is provided in a layer lower than the transistor 103 and the first wiring layer 110. The connection portion 151a is electrically connected to the wiring 110k through a via 161k. More specifically, one end of the via 161k is connected to the connection portion 151a. The other end of the via 161k is connected to the wiring 110k through a contact hole 161k1.

[0063] The anode electrode of the light emitting element 150 is provided by the p-type semiconductor layer 153 shown in FIG. 1. An upper surface 153U of the p-type semiconductor layer 153 is connected to the wiring 110d through a via 161a. More specifically, one end of the via 161a is connected to the upper surface 153U. The other end of the via 161a is connected to the wiring 110d through a contact hole 161a1.

[0064] The other end of the wiring 110d is connected to the drain electrode of the transistor 103 through the via 111d shown in FIG. 1. The drain electrode of the transistor 103 is the region 104d shown in FIG. 1. The source electrode of the transistor 103 is connected to the wiring 110s through the via 111s shown in FIG. 1. The source electrode of the transistor 103 is the region 104s shown in FIG. 1. In this example, the first wiring layer 110 includes a power line 3, and the wiring 110s is connected to the power line 3.

[0065] In this example, the ground line 4 is provided in a layer even higher than the first wiring layer 110. Although not shown in FIG. 1, an interlayer insulating film is further provided on the first wiring layer 110. The ground line 4 is provided on the uppermost interlayer insulating film and is insulated from the power line 3.

[0066] In this manner, the light emitting element 150 can be electrically connected to the first wiring layer 110 provided in an upper layer than the light emitting element 150 by using the vias 161k and 161a.

[0067] A method for manufacturing the image display device 1 of this embodiment will be described. 4A to 5B are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device of this embodiment. 4A, in the manufacturing method of the image display device 1 of this embodiment, a semiconductor growth substrate 1194 is prepared. The semiconductor growth substrate 1194 includes a crystal growth substrate 1001 and a semiconductor layer 1150. The crystal growth substrate 1001 is, for example, a Si substrate or a sapphire substrate. Preferably, a Si substrate is used as the crystal growth substrate 1001. In addition, when a low-temperature crystal growth process such as a low-temperature sputtering method is used as described later, a less expensive glass substrate or the like can also be used.

[0068] The semiconductor layer 1150 is formed on the crystal growth substrate 1001. The semiconductor layer 1150 includes an n-type semiconductor layer 1151, a light emitting layer 1152, and a p-type semiconductor layer 1153. The n-type semiconductor layer 1151, the light emitting layer 1152, and the p-type semiconductor layer 1153 are laminated in this order from the crystal growth substrate 1001 side.

[0069] The semiconductor layer 1150 is formed, for example, by chemical vapor deposition (CVD), preferably by metal organic chemical vapor deposition (MOCVD). Alternatively, epitaxial crystal growth of the semiconductor layer 1150 is possible even at a process temperature of 700° C. or less by using a low-temperature sputtering method. The use of such a low-temperature sputtering method makes it possible to use a glass substrate or device with low heat resistance, thereby reducing manufacturing costs.

[0070] The semiconductor layer 1150 may include, for example, GaN, or more particularly, In. X Al Y Ga 1-X-Y Includes N (0≦X, 0≦Y, X+Y<1), etc.

[0071] In the early stage of crystal growth, crystal defects due to mismatch of crystal lattice constants may occur, and crystals with crystal defects exhibit n-type. Therefore, when the semiconductor layer 1150 is formed from the n-type semiconductor layer 1151 on the crystal growth substrate 1001 as in this example, there is an advantage that the margin in the production process can be made large, and the yield can be easily improved.

[0072] When forming the semiconductor layer 1150 on the crystal growth substrate 1001, the semiconductor layer 1150 may be formed via a buffer layer not shown in FIG. 4A. The buffer layer may be made of a nitride such as AlN. By growing the semiconductor layer 1150 on the crystal growth substrate 1001 via a buffer layer, the mismatch at the interface between the GaN crystal and the crystal growth substrate 1001 can be alleviated. Therefore, it is expected that the quality of the crystal of the semiconductor layer 1150 will be improved. On the other hand, in this embodiment, the n-type semiconductor layer 1151 is bonded to the first surface 103a, so a step of removing the buffer layer before bonding is added. In the case of other embodiments described later, the semiconductor layer 1150 may be formed via a buffer layer in the same manner.

[0073] As shown in FIG. 4B, a support substrate 1190 is prepared. The support substrate 1190 is formed of, for example, quartz glass or Si. The semiconductor growth substrate 1194 is disposed such that an exposed surface 1153E of the p-type semiconductor layer 1153 faces one surface 1190E of the support substrate 1190. The semiconductor layer 1150 is bonded to the support substrate 1190. After the semiconductor layer 1150 is bonded to the support substrate 1190, the crystal growth substrate 1001 is removed. The crystal growth substrate 1001 is removed by, for example, wet etching or laser lift-off.

[0074] As shown in Fig. 5A, the semiconductor layer 1150 of the substrate 1195 is bonded to the first surface 103a of the substrate 102. The surface bonded to the first surface 103a is the exposed surface 1151E of the n-type semiconductor layer 1151. Thereafter, as shown in Fig. 5B, the support substrate 1190 is removed. The support substrate 1190 is also removed by wet etching or laser lift-off.

[0075] In the process of bonding the substrates, for example, the substrates are bonded together by heating and thermocompression bonding. In addition to the above, the bonding surfaces of the substrates may be planarized by chemical mechanical polishing (CMP) or the like, and then cleaned by plasma treatment in a vacuum to adhere the substrates to each other.

[0076] When bonding the semiconductor layer 1150 to the substrate 102, one semiconductor layer 1150 may be bonded to one substrate 102, or multiple semiconductor layers 1150 may be bonded to one substrate 102. When bonding one semiconductor layer 1150 to one substrate 102, the size of the substrate 102 may be, for example, a rectangular or square shape of about several tens of mm square to about 150 mm square. In this case, the semiconductor layer 1150 formed on the substrate 1195 may have a size corresponding to the size of the substrate 102.

[0077] When multiple semiconductor layers 1150 are bonded to one substrate 102, a roughly rectangular glass substrate of about 1500 mm×1800 mm can be used as the substrate 102. The semiconductor layer 1150 formed on the substrate 1195 has a rectangular or square shape of about several tens of mm square to about 150 mm square, and can have a size of about 4 inches to 6 inches when converted into wafer dimensions. The size of the substrate 102 is appropriately selected depending on the size of the image display device, etc.

[0078] FIG. 6 is a perspective view illustrating a part of the manufacturing method of the image display device of this embodiment. FIG. 6 is a schematic diagram showing an example in which a plurality of semiconductor layers 1150 are bonded to one substrate 102. In FIG. The diagram above the arrow in Fig. 6 shows that a plurality of substrates 1195 are arranged in a lattice pattern. The diagram below the arrow in Fig. 6 shows that a substrate 102 having a bonding layer 303 formed thereon is arranged. Fig. 6 shows by the arrow that a plurality of substrates 1195 arranged in a lattice pattern are bonded to each other at the positions indicated by the two-dot chain lines.

[0079] Since the crystal quality deteriorates at and near the ends of the semiconductor layer 1150, care must be taken to avoid forming the light emitting element 150 at and near the ends of the semiconductor layer 1150. As shown in Fig. 6, the ends of the semiconductor layer 1150 are formed so as to almost coincide with the ends of the support substrate 1190. Therefore, the multiple substrates 1195 are arranged facing the substrate 102 in a lattice pattern, for example, as shown by the solid line in Fig. 6, so as to minimize gaps between adjacent substrates 1195. The semiconductor layer 1150 is bonded onto the first surface 103a of the substrate 102, as shown by the two-dot chain line in Fig. 6.

[0080] When a plurality of semiconductor layers 1150 are bonded to one substrate 102, the substrate 102 to which the plurality of semiconductor layers 1150 are bonded can be divided in a subsequent process to produce image display devices of a number and size according to the number of divisions. Since an end of the semiconductor layer 1150 with a deteriorated crystal quality preferably becomes an end of the display region, the unit of division is preferably set to match the shape of the substrate 1195.

[0081] The steps up to forming semiconductor growth substrate 1194 and the steps of processing after forming substrate 1195 may be performed in the same plant or in different plants. For example, substrate 1195 may be manufactured in a first plant, and substrate 1195 may be carried into a second plant different from the first plant to perform the bonding step.

[0082] The method of bonding the semiconductor layer 1150 to the substrate 102 is not limited to the above, and the following method can also be used. That is, after the semiconductor layer 1150 is formed on the crystal growth substrate 1001, it is stored in a container, and for example, a support substrate 1190 is attached to it in the container and stored. After storage, the semiconductor layer 1150 is taken out of the container and bonded to the substrate 102. Alternatively, the semiconductor layer 1150 is stored in the container without being attached to the support substrate 1190. After storage, the semiconductor layer 1150 is taken out of the container and bonded to the substrate 102 as it is.

[0083] 7A to 8B are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device of this embodiment. As shown in Fig. 7A, the semiconductor layer 1150 shown in Fig. 5B is processed into a desired shape by etching to form the light emitting element 150. In the light emitting element 150, a connection portion 151a is formed, and then other portions are formed by further etching. This makes it possible to form the light emitting element 150 having the connection portion 151a that protrudes from the n-type semiconductor layer 151 on the first surface 103a in the positive direction of the X-axis. For example, a dry etching process is used to form the light emitting element 150, and preferably anisotropic plasma etching (Reactive Ion Etching, RIE) is used.

[0084] A first interlayer insulating film (first insulating film) 156 is formed so as to cover the first surface 103a and the light emitting element 150.

[0085] 7B, the TFT lower film 106 is formed on the first interlayer insulating film 156 by, for example, CVD. A Si layer 1104 is formed on the formed TFT lower film 106. The Si layer 1104 is an amorphous Si layer when formed, and after formation, the Si layer 1104 is polycrystallized by, for example, scanning an excimer laser pulse multiple times to form the Si layer 1104.

[0086] 8A, the transistor 103 is formed at a desired position on the TFT underlayer film 106. For example, in the LTPS process, the transistor 103 is formed as follows.

[0087] The polycrystallized Si layer 1104 shown in FIG. 7B is processed into an island shape to form the TFT channel 104. An insulating layer 105 is formed so as to cover the TFT underlayer film 106 and the TFT channel 104. The insulating layer 105 functions as a gate insulating film. A gate 107 is formed on the TFT channel 104 via the insulating layer 105. + and the like, and thermally activates the semiconductor device to form the transistor 103. Regions 104s and 104d are p-type active regions and function as the source and drain regions, respectively, of the transistor 103. Region 104i is an n-type active region and functions as a channel.

[0088] 8B, the second interlayer insulating film (second insulating film) 108 is provided so as to cover the insulating layer 105 and the gate 107. The second interlayer insulating film 108 is formed by an appropriate manufacturing method depending on the material of the second interlayer insulating film 108. For example, when the second interlayer insulating film 108 is made of SiO2, a technique such as ALD or CVD is used.

[0089] The flatness of the second interlayer insulating film 108 is sufficient to form the first wiring layer 110, and the flattening process does not necessarily have to be performed. If the flattening process is not performed on the second interlayer insulating film 108, the number of processes can be reduced. For example, when there is a portion around the light emitting element 150 where the thickness of the second interlayer insulating film 108 is thin, the depth of the via holes for the vias 161a and 161k can be made shallow, so that a sufficient opening diameter can be ensured. Therefore, it becomes easy to ensure electrical connection by the vias, and a decrease in yield due to poor electrical characteristics can be suppressed.

[0090] Vias 161a and 161k are formed penetrating the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156. The via 161a is formed so as to reach the upper surface 153U. The via 161k is formed so as to reach the connection portion 151a.

[0091] Vias 111s and 111d are formed penetrating the second interlayer insulating film 108 and the insulating layer 105. The via 111s is formed to reach the region 104s. The via 111d is formed to reach the region 104d. For example, RIE or the like is used to form via holes for forming the vias 161a, 161k, 111s, and 111d.

[0092] The first wiring layer 110 is formed on the second interlayer insulating film 108. Wires 110k, 110d, and 110s are formed. The wire 110k is connected to one end of the via 161k. The wire 110d is connected to one end of the via 161a and one end of the via 111d. The wire 110s is connected to one end of the via 111s. The first wiring layer 110 may be formed simultaneously with the formation of the vias 161k, 161a, 111d, and 111s.

[0093] In this manner, the sub-pixels 20 are formed, and an image display device is formed.

[0094] FIG. 9 is a schematic perspective view illustrating an image display device according to this embodiment. As shown in Fig. 9, the image display device of this embodiment has a light-emitting circuit section 172 having a large number of light-emitting elements 150 on a substrate 102. The light-emitting circuit section 172 is a structure including the light-emitting elements 150 and a first interlayer insulating film 156 covering them. A drive circuit section 100 is provided on the light-emitting circuit section 172. The drive circuit section 100 is a structure including the circuit 101, the second interlayer insulating film, and the TFT lower layer film 106 shown in Fig. 1. As described above, the light-emitting circuit section 172 and the drive circuit section 100 are electrically connected by vias 161a and 161k.

[0095] The configuration shown in FIG. 9 is an example of the image display device of this embodiment in which no color filter is provided, and is applied to other embodiments described later in which no color filter is provided.

[0096] The effects of the image display device 1 of this embodiment will be described. In the manufacturing method of the image display device 1 of this embodiment, after the semiconductor layer 1150 is bonded to the substrate 102, the semiconductor layer 1150 is etched to form the light emitting element 150. Thereafter, the light emitting element 150 is covered with a first interlayer insulating film 156, and the circuit 101 including circuit elements such as the transistor 103 that drives the light emitting element 150 is fabricated on the first interlayer insulating film 156. Therefore, the manufacturing process is significantly shortened compared to the case where the individual light emitting elements are individually transferred to the substrate 102.

[0097] For example, in an image display device with 4K image quality, the number of subpixels exceeds 24 million, and in the case of an image display device with 8K image quality, the number of subpixels exceeds 99 million. It takes a huge amount of time to individually form such a large number of light-emitting elements and mount them on a circuit board. Therefore, it is difficult to realize an image display device using micro LEDs at a realistic cost. Furthermore, if a large number of light-emitting elements are individually mounted, the yield rate decreases due to poor connection during mounting, and further cost increases are unavoidable. However, the manufacturing method for the image display device of this embodiment has the following effects.

[0098] As described above, in the manufacturing method of the image display device 1 of this embodiment, the semiconductor layer 1150 is entirely bonded to the substrate 102, and then the light emitting element is formed by etching, so that the transfer step is completed in one step. Therefore, in the manufacturing method of the image display device 1 of this embodiment, the time for the transfer step can be shortened and the number of steps can be reduced compared to the conventional manufacturing methods.

[0099] Furthermore, the semiconductor layer 1150 is bonded to the substrate 102 at the wafer level without being divided into individual pieces in advance or forming electrodes at positions corresponding to the circuit elements. Therefore, alignment is not required at the bonding stage. Therefore, the bonding process can be easily performed in a short time. Since alignment is not required at the time of bonding, the light emitting element 150 can be easily miniaturized, which is suitable for a high-definition display.

[0100] In this embodiment, for example, the glass substrate formed as described above is covered with the first interlayer insulating film 156, and a driving circuit including TFTs and a scanning circuit can be formed on the planarized surface using an LTPS process or the like. This has the advantage that existing manufacturing processes and plants for flat panel displays can be used.

[0101] In this embodiment, the light emitting element 150 formed below the transistor 103 and the like can be electrically connected to the power supply line, ground line, driving transistor, and the like formed above by forming vias 161a and 161k penetrating the first interlayer insulating film 156, the TFT lower film 106, the insulating layer 105, and the second interlayer insulating film 108. By using such a technically established multilayer wiring technique, a uniform connection structure can be easily realized, and the yield can be improved. Therefore, a decrease in the yield due to poor connection of the light emitting element and the like is suppressed.

[0102] In the image display device 1 of this embodiment, the light emitting element 150 is covered with a first interlayer insulating film 156. When the first interlayer insulating film 156 is made of a material having high light reflectivity such as a white resin, it is possible to reflect scattering of light in directions other than the direction toward the light emitting surface 151S of the light emitting element 150 toward the light emitting surface 151S side. Therefore, the scattered light is prevented from reaching the transistor 103, and the malfunction of the transistor 103 is prevented.

[0103] Second embodiment FIG. 10 is a schematic cross-sectional view illustrating a part of the image display device according to this embodiment. 10, the image display device of this embodiment includes a subpixel 220, which differs from the other embodiments described above in that the p-type semiconductor layer 253 provides a light-emitting surface 253S. In this embodiment, the configuration of the light-emitting element 250 differs from that of the other embodiments described above, and therefore the configuration of the transistor 203 that drives the light-emitting element 250 also differs. The same components as those in the other embodiments are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate.

[0104] The subpixel 220 of the image display device of this embodiment includes the substrate 102, a light emitting element 250, a first interlayer insulating film 156, a transistor 203, a second interlayer insulating film 108, a via 261k, and a first wiring layer 110.

[0105] The light emitting element 250 is provided on the first surface 103a. The light emitting element 250 includes a light emitting surface 253S provided on the first surface 103a. The light emitting surface 253S is in contact with the first surface 103a. The light emitting element 250 includes an upper surface 251U provided on the opposite side of the light emitting surface 253S. The light emitting element 250 is a prismatic or cylindrical element, as in the other embodiments described above.

[0106] The light emitting element 250 includes a p-type semiconductor layer 253, a light emitting layer 252, and an n-type semiconductor layer 251. The p-type semiconductor layer 253, the light emitting layer 252, and the n-type semiconductor layer 251 are laminated in this order from the light emitting surface 253S toward the upper surface 251U. In this embodiment, the light emitting surface 253S is provided by the p-type semiconductor layer 253.

[0107] The light emitting element 250 includes a connection portion 253a. The connection portion 253a is provided so as to protrude in one direction from the p-type semiconductor layer 253 on the first surface 103a. The height of the connection portion 253a from the first surface 103a is the same as or lower than the height of the p-type semiconductor layer 253 from the first surface 103a. The connection portion 253a is a part of the p-type semiconductor layer 253. The connection portion 253a is connected to one end of the via 261a to electrically connect the p-type semiconductor layer 253 to the via 261a.

[0108] The light emitting element 250 has a shape in the XY plane view similar to that of the light emitting element 150 of the other embodiment described above. An appropriate shape is selected depending on the layout of the circuit elements, etc.

[0109] The light emitting element 250 is a light emitting diode similar to the light emitting element 150 of the other embodiments described above. That is, the wavelength of light emitted by the light emitting element 250 is, for example, blue light of about 467 nm±30 nm, or blue-violet light of about 410 nm±30 nm. The wavelength of light emitted by the light emitting element 250 is not limited to the above values ​​and can be any appropriate value.

[0110] The transistor 203 is provided on the TFT lower layer film 106. The transistor 203 is an n-channel TFT. The transistor 203 includes a TFT channel 204 and a gate 107. Preferably, the transistor 203 is formed by an LTPS process or the like, as in the other embodiments described above. In this embodiment, the circuit 101 includes the TFT channel 204, the insulating layer 105, the second interlayer insulating film 108, the vias 111s and 111d, and the first wiring layer 110.

[0111] The TFT channel 204 includes regions 204s, 204i, and 204d. The regions 204s, 204i, and 204d are provided on the TFT lower layer film 106. The regions 204s and 204d contain phosphorus ions (P - The region 204s is doped with an n-type impurity such as ZnO. The region 204s is ohmic-connected to the via 111s. The region 204d is ohmic-connected to the via 111d.

[0112] The gate 107 is provided on the TFT channel 204 via an insulating layer 105. The insulating layer 105 insulates the TFT channel 204 from the gate 107.

[0113] In the transistor 203, when a voltage higher than that of the region 204s is applied to the gate 107, a channel is formed in the region 204i. The current flowing between the regions 204s and 204d is controlled by the voltage applied to the region 204s of the gate 107. The TFT channel 204 and the gate 107 are formed of the same material and by the same manufacturing method as the TFT channel 104 and the gate 107 in the above-mentioned other embodiments.

[0114] The first wiring layer 110 includes wirings 210s, 210d, and 210a. A part of the wiring (second wiring) 210a is provided above the connection portion 253a. The other part of the wiring 210a is connected to, for example, a power supply line 3 shown in FIG. 11, which will be described later.

[0115] The vias 111s and 111d are provided penetrating the second interlayer insulating film 108 and the insulating layer 105. The via 111s is provided between the wiring 210s and the region 204s. The via 111s electrically connects the wiring 210s and the region 204s. The via 111d is provided between the wiring 210d and the region 204d. The via 111d electrically connects the wiring 210d and the region 204d. The vias 111s and 111d are formed using the same material and manufacturing method as in the other embodiments described above.

[0116] The via 261k is provided penetrating the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156. The via 261k is provided between the wiring 210d and the upper surface 251U, and electrically connects the wiring 210d and the upper surface 251U. Therefore, the n-type semiconductor layer 251 is electrically connected to the drain region of the transistor 203 through the via 261k, the wiring 210d, and the via 111d.

[0117] The via 261a is provided penetrating the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156. The via 261a is provided between the wiring 210a and the connection portion 253a, and electrically connects the wiring 210a and the connection portion 253a. Therefore, the p-type semiconductor layer 253 is electrically connected to, for example, the power supply line 3 of the circuit in FIG. 11 through the connection portion 253a, the via 261a, and the wiring 210a.

[0118] FIG. 11 is a schematic block diagram illustrating an image display device according to this embodiment. 11, an image display device 201 of this embodiment includes a display area 2, a row selection circuit 205, and a signal voltage output circuit 207. In the display area 2, as in the other embodiments described above, for example, sub-pixels 220 are arranged in a lattice pattern on the XY plane.

[0119] The subpixel 220 includes a light emitting element 222, a select transistor 224, a drive transistor 226, and a capacitor 228. In Figure 11, the select transistor 224 may be labeled T1, the drive transistor 226 may be labeled T2, and the capacitor 228 may be labeled Cm.

[0120] In this embodiment, the light emitting element 222 is provided on the power supply line 3 side, and the driving transistor 226 connected in series to the light emitting element 222 is provided on the ground line 4 side. In other words, the driving transistor 226 is connected to a lower potential side than the light emitting element 222. The driving transistor 226 is an n-channel transistor.

[0121] The selection transistor 224 is connected between the gate electrode of the driving transistor 226 and the signal line 208. The capacitor 228 is connected between the gate electrode of the driving transistor 226 and the ground line 4.

[0122] The row selection circuit 205 and the signal voltage output circuit 207 supply a signal voltage of a different polarity from that in the other embodiments described above to the signal line 208 in order to drive the drive transistor 226, which is an n-channel transistor.

[0123] In this embodiment, the polarity of the driving transistor 226 is n-channel, and therefore the polarity of the signal voltage and the like differ from those of the other embodiments described above. That is, the row selection circuit 205 supplies a selection signal to the scanning line 206 so as to sequentially select one row from the array of m rows of sub-pixels 220. The signal voltage output circuit 207 supplies a signal voltage having a required analog voltage value to each sub-pixel 220 of the selected row. The driving transistor 226 of the sub-pixel 220 of the selected row passes a current corresponding to the signal voltage to the light-emitting element 222. The light-emitting element 222 emits light with a luminance corresponding to the current passed through the light-emitting element 222.

[0124] A method for manufacturing the image display device of this embodiment will be described.

[0125] 12A to 13 are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device of this embodiment. As shown in Fig. 12A, in the method for manufacturing the image display device of this embodiment, a semiconductor growth substrate 1194 is prepared. The semiconductor growth substrate 1194 has the same configuration as that already described with reference to Fig. 4A.

[0126] 12B, the semiconductor layer 1150 of the semiconductor growth substrate 1194 is bonded to the substrate 102. In this bonding step, the exposed surface 1153E of the p-type semiconductor layer 1153 is bonded to the first surface 103a.

[0127] As shown in FIG. 13, the crystal growth substrate 1001 is removed by wet etching or laser lift-off.

[0128] 14A to 15B are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device of this embodiment. 14A to 15B differs from the processes shown in FIGS. 12A to 13 in that the semiconductor layer 1150 is transferred to a support substrate 1190, which is then bonded to the substrate 102. In the processes shown in FIGS. As shown in Fig. 14A, a semiconductor growth substrate 1294 is prepared. The semiconductor growth substrate 1294 has a different configuration from the semiconductor growth substrate 1194 shown in Fig. 4A and Fig. 12A. In the semiconductor growth substrate 1294, the semiconductor layer 1150 is formed by stacking a p-type semiconductor layer 1153, a light emitting layer 1152, and an n-type semiconductor layer 1151 in this order from the crystal growth substrate 1001 side.

[0129] 14B, a support substrate 1190 is prepared. An exposed surface 1151E of the n-type semiconductor layer 1151 is bonded to one surface 1190E of the support substrate 1190.

[0130] 15A, a substrate 1295 is prepared in which a semiconductor layer 1150 is bonded to a support substrate 1190. The substrate 1295 is bonded to the substrate 102. The surface to be bonded to the first surface 103a of the substrate 102 is an exposed surface 1153E of the p-type semiconductor layer 1153.

[0131] 15B, the support substrate 1190 is removed. As in the other embodiments described above, wet etching or laser lift-off is used to remove the support substrate 1190. In this manner, the semiconductor layer 1150 can be bonded to the substrate 102.

[0132] 16A to 17B are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device of this embodiment. As shown in Fig. 16A, the semiconductor layer 1150 shown in Fig. 13 and Fig. 15B is processed into a desired shape to form the light emitting element 250. In forming the light emitting element 250, the connection portion 253a is formed and other portions are formed in the same manner as in the other embodiments described above. In forming the light emitting element 250, the same etching process as in the other embodiments described above is used.

[0133] The first interlayer insulating film 156 is formed to cover the first surface 103 a and the light emitting element 250 .

[0134] 16B, the TFT lower layer film 106 is formed on the first interlayer insulating film 156. An amorphous Si layer is formed on the TFT lower layer film 106, and is laser annealed by an excimer laser or the like to form a polycrystallized Si layer 1104.

[0135] As shown in Fig. 17A, the polycrystallized Si layer 1104 shown in Fig. 16B is processed into an island shape like the transistor 103 shown in Fig. 3, and a TFT channel 204 is formed. An insulating layer 105 is formed so as to cover the TFT underlayer film 106 and the TFT channel 204. A gate 107 is formed on the TFT channel 204 via the insulating layer 105. A P - and the like, and thermally activates the doped semiconductor layer 203. Regions 204s and 204d are n-type active regions and function as the source and drain regions, respectively, of the transistor 203. Region 204i is a p-type active region and functions as a channel.

[0136] 17B, ​​the second interlayer insulating film 108 is provided so as to cover the insulating layer 105 and the gate 107. Vias 261k and 261a are formed penetrating the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156. The via 261k is formed so as to reach the upper surface 251U. The via 261a is formed so as to reach the connection portion 253a.

[0137] Vias 111s and 111d are formed penetrating the second interlayer insulating film 108 and the insulating layer 105. The via 111s is formed so as to reach the region 204s. The via 111d is formed so as to reach the region 204d.

[0138] The first wiring layer 110 is formed on the second interlayer insulating film 108. Wirings 210a, 210d, and 210s are formed. The wiring 210a is connected to one end of the via 261a. The wiring 210d is connected to one end of the via 261k and one end of the via 111d. The wiring 210s is connected to one end of the via 111s. The first wiring layer 110 may be formed simultaneously with the formation of the vias 261a, 261k, 111d, and 111s.

[0139] In this manner, the sub-pixels 220 are formed, and the image display device 201 shown in FIG. 11 is completed.

[0140] The effects of the image display device of this embodiment will be described. In the image display device of this embodiment, similarly to the other embodiments described above, it is possible to shorten the time of the transfer step for forming the light emitting element 250 and reduce the number of steps. In addition, in the crystal growth step of the semiconductor layer 1150, when crystal growth is performed from the n-type semiconductor layer 1151, it is possible to eliminate the need for transfer to the support substrate 1190, thereby reducing the number of steps.

[0141] In the image display device 201 of this embodiment, the p-type semiconductor layer 253 can be used as the light emitting surface 253S, so that the degree of freedom in circuit configuration increases, and it becomes possible to improve the efficiency of product design.

[0142] (Third embodiment) FIG. 18 is a schematic cross-sectional view illustrating a part of the image display device according to this embodiment. This embodiment differs from the other embodiments described above in that a light emitting element 150 having an n-type semiconductor layer 151 as a light emitting surface 151S1 is driven by an n-type transistor 203. In this embodiment, the subpixel 320 includes a light blocking layer 330. In this embodiment, the subpixel 320 is provided with a color filter 180 on the light emitting surface 151S1 side. The same components as those in the other embodiments described above are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate.

[0143] 18, a subpixel 320 of the image display device of this embodiment includes a color filter 180, a light emitting element 150, a first interlayer insulating film 156, a transistor 203, a second interlayer insulating film 108, a light shielding layer 330, a via 361a, and a first wiring layer 110. The transistor 203 is an n-channel TFT. The light emitting element 150 provides a light emitting surface 151S1 by an n-type semiconductor layer 151. In this embodiment, the light emitting surface 151S1 is roughened.

[0144] The color filter 180 includes a light-shielding portion 181 and a color conversion portion 182. In this manner, the color filter (wavelength conversion member) 180 is a light-transmitting member since it includes the color conversion portion 182 having light transparency. The color conversion portion 182 is provided directly below the light-emitting surface 151S1 of the light-emitting element 150 in accordance with the shape of the light-emitting surface 151S1. In the color filter 180, the portion other than the color conversion portion 182 is made into a light-shielding portion 181. The light-shielding portion 181 is a so-called black matrix, and reduces bleeding due to color mixing of light emitted from adjacent color conversion portions 182, making it possible to display a sharp image.

[0145] The color conversion section 182 may have one layer or two or more layers. FIG. 18 shows a case where the color conversion section 182 has two layers. Whether the color conversion section 182 has one layer or two layers is determined by the color, i.e., the wavelength, of the light emitted by the subpixel 320. When the emission color of the subpixel 320 is red, the color conversion section 182 is preferably made up of two layers, that is, the color conversion layer 183 and the filter layer 184 that transmits red light. When the emission color of the subpixel 320 is green, the color conversion section 182 is preferably made up of two layers, that is, the color conversion layer 183 and the filter layer 184 that transmits green light. When the emission color of the subpixel 320 is blue, the color conversion section 182 is preferably made up of one layer.

[0146] When color conversion section 182 has two layers, the first layer is color conversion layer 183 and the second layer is filter layer 184. First color conversion layer 183 is provided at a position closer to light emitting element 150. Filter layer 184 is laminated on color conversion layer 183.

[0147] Color conversion layer 183 converts the wavelength of light emitted by light emitting element 150 to a desired wavelength. In the case of subpixel 320 emitting red light, color conversion layer 183 converts light of 467 nm±30 nm, which is the wavelength of light emitting element 150, to light of a wavelength of, for example, about 630 nm±20 nm. In the case of subpixel 320 emitting green light, color conversion layer 183 converts light of 467 nm±30 nm, which is the wavelength of light emitting element 150, to light of a wavelength of, for example, about 532 nm±20 nm.

[0148] Filter layer 184 blocks the wavelength component of blue emitted light that remains without being color converted by color conversion layer 183 .

[0149] When the color of light emitted by subpixel 320 is blue, the light may be output via color conversion layer 183, or may be output directly without passing through color conversion layer 183. When the wavelength of light emitted by light-emitting element 150 is about 467 nm±30 nm, the light may be output without passing through color conversion layer 183. When the wavelength of light emitted by light-emitting element 150 is 410 nm±30 nm, it is preferable to provide one color conversion layer 183 in order to convert the wavelength of the output light to about 467 nm±30 nm.

[0150] Even in the case of the blue subpixel 320, the subpixel 320 may have the filter layer 184. By providing the blue subpixel 320 with the filter layer 184 that transmits blue light, minute reflection of external light other than blue light that occurs on the surface of the light-emitting element 150 is suppressed.

[0151] The color filter 180 has a first surface 180a. A transparent thin-film adhesive layer 188 is provided on the first surface 180a. The light-emitting element 150 and the first interlayer insulating film 156 are provided on the first surface 180a with the transparent thin-film adhesive layer 188 interposed therebetween.

[0152] In the light emitting element 150, the light emitting surface 151S1 is roughened. A transparent planarizing film 155 is provided between the light emitting surface 151S1 and the transparent thin-film adhesive layer 188. The transparent planarizing film 155 flattens the roughened light emitting surface 151S1.

[0153] The light emitting element 150 is a prismatic or cylindrical element including a light emitting surface 151S1 and an upper surface 153U. The light emitting surface 151S1 is in contact with the transparent thin film adhesive layer 188 via a transparent planarizing film 155. The upper surface 153U is a surface provided on the opposite side to the light emitting surface 151S1.

[0154] The light emitting element 150 includes an n-type semiconductor layer 151, a light emitting layer 152, and a p-type semiconductor layer 153. The n-type semiconductor layer 151, the light emitting layer 152, and the p-type semiconductor layer 153 are laminated in this order from the light emitting surface 151S1 toward the upper surface 153U.

[0155] The light emitting element 150 includes a connection portion 151a. The connection portion 151a is formed so as to protrude in one direction from the n-type semiconductor layer 151 on the first surface 180a via the transparent thin film adhesive layer 188. The transparent planarizing film 155 is also provided between the connection portion 151a and the transparent thin film adhesive layer 188. The connection portion 151a is a part of the n-type semiconductor layer 151. The connection portion 151a is connected to one end of the via 361k and has a function of connecting the n-type semiconductor layer 151 to the first wiring layer 110 above the light emitting element 150 via the via 361k, which is similar to the case of the other embodiments described above. The configuration of the light emitting element 150 is the same as that of the first embodiment described above, except that the light emitting surface 151S1 is roughened, so further detailed description will be omitted.

[0156] In this embodiment, an n-channel transistor 203 is formed on the TFT lower layer film 106. The transistor 203 is a TFT, and the configuration thereof is the same as that of the second embodiment described above, and detailed description thereof will be omitted.

[0157] In this embodiment, the light-shielding layer 330 is provided between the first interlayer insulating film 156 and the second interlayer insulating film 108. In this example, the light-shielding layer 330 is provided on the entire surface except for a part on the first interlayer insulating film 156. The light-shielding layer 330 may be made of a material having light-shielding properties, whether it is conductive or not, and is made of, for example, a metal material having light reflectivity. The light-shielding layer 330 may be made of a black resin. When the light-shielding layer 330 is made of a black resin, the via can be formed together with the first interlayer insulating film 156 and the like without forming a through hole larger than the diameter of the via in advance.

[0158] The vias 361a and 361k are provided penetrating the first interlayer insulating film 156 and the second interlayer insulating film 108, so that through holes 331a and 331k having diameters larger than the diameters of the vias 361a and 361k are provided in the light-shielding layer 330. The via 361a penetrates the through hole 331a, and the via 361k penetrates the through hole 331k.

[0159] The light-shielding layer 330 includes a first portion 330a, and the TFT channel 204 is provided on the first portion 330a. The first portion 330a has an area including the outer periphery of the TFT channel 204 when the TFT channel 204 is projected onto the first portion 330a in an XY plan view. Even if scattered light or the like is emitted upward from the light-emitting element 150 provided below the TFT channel 204, the first portion 330a blocks the scattered light or the like, and the scattered light or the like hardly reaches the TFT channel, so that malfunction of the transistor 203 can be suppressed.

[0160] From the viewpoint of light blocking, it is desirable that the light blocking layer 330 is provided over the entire surface of the first interlayer insulating film 156 as in this example, but the light blocking layer 330 is not limited to being a single physical member. For example, the light blocking layer 330 may be provided separately in a portion directly below the TFT channel 204 and a portion directly above the light emitting element 150. In this example, the light blocking layer 330 is not connected to any potential, but may be connected to a specific potential such as a ground potential or a power supply potential. When the light blocking layer 330 has a plurality of separated portions, all of them may be connected to a common potential, or each portion may be connected to a different potential.

[0161] The via 111s is provided between the wiring 310s and the region 204s, and electrically connects the wiring 310s and the region 204s. The via 111d is provided between the wiring 310d and the region 204d, and electrically connects the wiring 310d and the region 204d.

[0162] The wiring 310s is connected to the region 204s through the via 111s. The region 204s is the source region of the transistor 203. Therefore, the source region of the transistor 203 is electrically connected to the ground line 4 through the via 111s and the wiring 310s.

[0163] The wiring 310d is connected to the region 204d through the via 111d. The region 204d is the drain region of the transistor 203.

[0164] The via 361k is provided to penetrate the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156. The via 361k is provided between the wiring 310d and the connection portion 151a, and electrically connects the wiring 310d and the connection portion 151a. Therefore, the drain region of the transistor 203 is electrically connected to the n-type semiconductor layer 151 via the via 111d, the wiring 310d, the via 361k, and the connection portion 151a.

[0165] The via 361a is provided penetrating the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156. The via 361a is provided between the wiring 310a and the upper surface 153U, and electrically connects the wiring 310a and the upper surface 153U. Therefore, the p-type semiconductor layer 153 is electrically connected to, for example, a power supply line 3 of the circuit in FIG. 19 described later through the via 361a and the wiring 310a.

[0166] FIG. 19 is a schematic block diagram illustrating an image display device according to this embodiment. 19, in an image display device 301 of this embodiment, sub-pixels 320 are arranged in a display region 2. The sub-pixels 320 are arranged, for example, in a lattice pattern. For example, n sub-pixels 320 are arranged along the X axis, and m sub-pixels 320 are arranged along the Y axis.

[0167] A pixel 10 includes a number of sub-pixels 320 that emit light of different colors. Sub-pixel 320R emits red light. Sub-pixel 320G emits green light. Sub-pixel 320B emits blue light. The emission color and brightness of one pixel 10 are determined by the three types of sub-pixels 320R, 320G, and 320B emitting light at a desired brightness.

[0168] One pixel 10 includes three sub-pixels 320R, 320G, and 320B, which are arranged, for example, linearly on the X-axis. Each pixel 10 may have sub-pixels of the same color arranged in the same column, or, as in this example, sub-pixels of different colors arranged in each column.

[0169] In the image display device 301 of this embodiment, the configurations of the power supply line 3, the ground line 4, the scanning line 206, and the signal line 208 are the same as those in the second embodiment described above. The image display device 301 differs from the second embodiment in that three types of sub-pixels are caused to emit light at a set brightness, respectively, to determine the emission color and brightness of one pixel 10. Apart from the possible differences in the signal configuration for this purpose, the example is the same as that of the second embodiment shown in FIG. 11, and therefore a detailed description of the circuit configuration will be omitted.

[0170] A method for manufacturing the image display device of this embodiment will be described. 20A to 23B are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device of this embodiment. In the manufacturing method of the image display device of this embodiment, the steps of transferring a semiconductor layer to a support substrate and preparing a substrate 1195 shown in Fig. 5A are the same as those in the above-mentioned first embodiment. The following will be described starting from the step following Fig. 4B in which the substrate 1195 is formed. As shown in Fig. 20A, the n-type semiconductor layer 1151 shown in Fig. 4B is roughened to form a roughened exposed surface 1151E1. A transparent planarizing film 1155 is formed over the exposed surface 1151E1, and an exposed surface 1155E of the transparent planarizing film 1155 is planarized. For example, CMP is used to planarize the exposed surface 1155E.

[0171] 20B, the semiconductor layer 1150 is bonded to the substrate 102. The bonding surfaces are the exposed surface 1155E of the transparent planarizing film 1155 for the semiconductor layer 1150 and the first surface 103a of the bonding layer 303 for the substrate 102.

[0172] As shown in Fig. 21A, the semiconductor layer 1150 shown in Fig. 20B is etched into a desired shape to form the light emitting element 150. The process of forming the light emitting element 150 is the same as in the other embodiments described above. The transparent planarizing film 155 is formed by processing the unprocessed transparent planarizing film 1555 shown in Fig. 20B at the same time as the light emitting element 150 is formed.

[0173] The first interlayer insulating film 156 is formed to cover the first surface 103a and the light emitting element 150. When the transparent planarizing film 155 is exposed at the side surface of the light emitting element 150, the first interlayer insulating film 156 is provided to cover the transparent planarizing film 155 as well.

[0174] The light-shielding layer 330 is formed on the first interlayer insulating film 156. In the process of forming the light-shielding layer 330, through-holes 331a, 331k are formed by etching or the like. Portions of the light-shielding layer 330 other than the through-holes 331a, 331k are left on the first interlayer insulating film 156, and the first portions 330a are provided at locations where transistors will be formed in subsequent processes. When the light-shielding layer 330 is made of an insulating material such as black resin, there is no need to insulate the light-shielding layer 330 from the vias, and therefore there is no need to form the through-holes 331a, 331k.

[0175] 21B, the TFT lower layer film 106 is formed on the light-shielding layer 330 by CVD or the like. The portions where the through-holes 331a and 331k are formed are filled with the TFT lower layer film 106, and the surface of the TFT lower layer film 106 is planarized. A polycrystallized Si layer 1104 is formed on the planarized TFT lower layer film 106.

[0176] As shown in Fig. 22A, the Si layer 1104 shown in Fig. 21B is processed to form the TFT channel 204, the insulating layer 105, the gate 107, and the regions 204s, 204d, and 204i of the TFT channel 204. These manufacturing steps are the same as those in the second embodiment described above. Preferably, the LTPS process is used.

[0177] 22B, vias 111s, 111d, 361k, and 361a are formed, forming the first wiring layer 110. These manufacturing steps are the same as those in the second embodiment described above.

[0178] 23A, an adhesive layer 1170 is formed on the second interlayer insulating film 108 and the first wiring layer 110, and a reinforcing substrate 1180 is attached to the adhesive layer 1170. Thereafter, the substrate 102 shown in FIG. 22B is removed together with the bonding layer 303, and the formation surface 1192A of the color filter 180 is exposed. The substrate 102 and the bonding layer 303 are removed by wet etching or laser lift-off.

[0179] As shown in FIG. 23B, the color filter 180 is adhered to the formation surface 1192A via a transparent thin film adhesive layer 188.

[0180] The purpose of removing the substrate 102 and the bonding layer 303 is to reduce the transmission loss of the light emitted from the light emitting surface 151S1. Therefore, the removal of the substrate 102 and the bonding layer 303 is not limited to the case of removing them entirely, and for example, a part of the substrate 102 may be removed to form the color filter 180. Removing a part of the substrate 102 means thinning the substrate 102 by etching or the like. Alternatively, the substrate 102 may be previously formed into a multi-layer structure using a transparent resin or the like, and the substrate 102 may be substantially thinned by peeling off a part of the layer.

[0181] 24A to 24D are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device of this embodiment. 24A to 24D show a method for forming a color filter by an inkjet method. This manufacturing process is applied in place of the process shown in FIG. 23B.

[0182] 24A, the substrate 102 and the bonding layer 303 are removed to prepare a structure 1192 having an exposed formation surface 1192A. The structure 1192 includes the light-emitting element 150, the first interlayer insulating film 156, the light-shielding layer 330, the TFT lower layer film 106, the TFT channel 204, the insulating layer 105, the gate 107, the vias 111s, 111d, 361k, 361a, and the first wiring layer 110, as described in FIG.

[0183] 24B, the light shielding portion 181 is formed on the color filter formation surface 1192A in an area not including the light emitting surface 151S1. The light shielding portion 181 is formed by using, for example, screen printing or photolithography technology.

[0184] As shown in FIG. 24C, phosphors corresponding to the luminescent color are ejected from the inkjet nozzle to form the color conversion layer 183. The phosphors color the areas where the light shielding portion 181 is not formed. For example, fluorescent paint using a general phosphor material, a perovskite phosphor material, or a quantum dot phosphor material is used as the phosphor. When a perovskite phosphor material or a quantum dot phosphor material is used, each luminescent color can be realized, and monochromaticity and color reproducibility are high, which is preferable. After drawing with the inkjet nozzle, a drying process is performed at an appropriate temperature and time. The thickness of the coating film during coloring is set to be thinner than the thickness of the light shielding portion 181.

[0185] As already explained, for blue-emitting subpixels, if no color conversion section is formed, color conversion layer 183 is not formed. Furthermore, when forming a blue color conversion layer for a blue-emitting subpixel, if only one layer of color conversion section is required, the thickness of the coating of the blue phosphor is preferably approximately the same as the thickness of light-shielding section 181.

[0186] 24D, the paint for filter layer 184 is sprayed from an inkjet nozzle. The paint is applied over the phosphor coating. The total thickness of the phosphor and paint coating is the thickness of filter layer 184 laminated on color conversion layer 183, and is approximately the same as the thickness of light blocking portion 181.

[0187] Whether it is a film-type color filter or an inkjet-type color filter, it is desirable that the color conversion layer 183 is as thick as possible in order to improve the color conversion efficiency. On the other hand, if the color conversion layer 183 is too thick, the emitted light of the color-converted light is approximated to Lambertian, whereas the emission angle of the blue light that is not color-converted is limited by the light shielding portion 181. This causes a problem that the display color of the displayed image becomes visual angle dependent. In order to match the light distribution of the subpixel in which the color conversion layer 183 is provided to the light distribution of the blue light that is not color-converted, it is desirable that the thickness of the color conversion layer 183 is about half the opening size of the light shielding portion 181.

[0188] For example, in the case of a high-definition image display device with a resolution of about 250 ppi, the pitch of the subpixels 20 is about 30 μm, so that the thickness of the color conversion layer 183 is preferably about 15 μm. Here, when the color conversion material is made of spherical phosphor particles, it is preferable that the particles are stacked in a close-packed structure to suppress light leakage from the light emitting element 150. For this purpose, at least three particle layers are required. Therefore, the particle size of the phosphor material constituting the color conversion layer 183 is preferably, for example, about 5 μm or less, and more preferably about 3 μm or less. Since perovskite phosphor materials, quantum dot phosphor materials, and the like are easily deteriorated by oxygen and moisture, the color conversion layer 183 is preferably sealed with an inorganic film such as SiO2.

[0189] FIG. 25 is a schematic perspective view illustrating an image display device of this embodiment. As shown in Fig. 25, the image display device of this embodiment has a light-emitting circuit section 172 having a large number of light-emitting elements 150 provided on a color filter 180. A drive circuit section 100 is provided on the light-emitting circuit section 172. The drive circuit section 100 is a structure including the circuit 101 shown in Fig. 18. As described above, the light-emitting circuit section 172 and the drive circuit section 100 are electrically connected by vias 361a and 361k.

[0190] In this embodiment, a full-color image display device 301 can be configured by providing a color filter 180, but an image display device may be configured without providing a color filter, as in the other embodiments described above. In that case, for example, the substrate 102 and the lamination layer 303 may be left as they are without being removed.

[0191] The effects of the image display device 301 of this embodiment will be described. In the manufacturing method of the image display device 301 of this embodiment, as in the other embodiments described above, in addition to the effect of shortening the time of the transfer process for forming the light-emitting element 150 and reducing the number of processes, since the light-emitting surface 151S1 is made of the n-type semiconductor layer 151 which has a lower resistance than the p-type, the n-type semiconductor layer 151 can be formed thick and the light-emitting surface 151S1 can be sufficiently roughened.

[0192] In the image display device 301 of this embodiment, the emitted light is diffused by roughening the light-emitting surface 151S1, so that even a small light-emitting element 150 can be used as a light source with a sufficient light-emitting area.

[0193] In the image display device 301 of this embodiment, the light emitting element 150 having the light emitting surface 151S1 as the n-type semiconductor layer 151 can be driven by the n-channel transistor 203. This increases the degree of freedom in circuit configuration, and improves design efficiency.

[0194] In the image display device 301 of this embodiment, the light-shielding layer 330 is provided between the first interlayer insulating film 156 and the second interlayer insulating film 108. That is, the light-shielding layer 330 is provided between the light-emitting element 150 and the transistor 203. Therefore, even if scattered light or the like is emitted upward from the light-emitting element 150, the emitted light is unlikely to reach the TFT channel 204, and malfunction of the transistor 203 can be prevented.

[0195] The light-shielding layer 330 can be formed of a conductive material such as a metal, and can be connected to any potential. For example, it is possible to use the light-shielding layer 330 to suppress noise by disposing a part of the light-shielding layer 330 directly under a switching element such as the transistor 203 and connecting it to a ground potential or a power supply potential.

[0196] The light-shielding layer 330 can be applied not only to the present embodiment but also to the subpixels of the other embodiments described above and the other embodiments described below. Even when applied to the other embodiments, the same effects as those described above can be obtained.

[0197] In the above example, the configuration and manufacturing method of the light-emitting element having a roughened light-emitting surface were described. In the light-emitting element having a connection portion, as in the case of this embodiment, the roughened light-emitting surface can be applied. Specific applications are the light-emitting element 150 in the first embodiment, the light-emitting element 250 in the second embodiment, and the semiconductor layer 750 in the seventh embodiment described later. By applying roughening of the light-emitting surface to the components of these light-emitting elements, the above-mentioned effects can be obtained. In addition, by changing the light-emitting elements in the fourth, fifth, and sixth embodiments from a vertical type to a horizontal type having a connection portion, a roughened light-emitting surface can be applied.

[0198] (Fourth embodiment) FIG. 26 is a schematic cross-sectional view illustrating a part of the image display device of this embodiment. This embodiment differs from the other embodiments described above in that a second wiring layer 440 is included between the light emitting element 150 and the first surface 103a. This embodiment also differs from the other embodiments described above in that a third wiring layer 470 is included on the light emitting element 150. In other respects, this embodiment is the same as the other embodiments described above, and the same components are denoted by the same reference numerals and detailed descriptions thereof are omitted as appropriate.

[0199] As shown in FIG. 26, the subpixel 420 of the image display device of this embodiment includes a substrate 102, a second wiring layer 440, a light-emitting element 150, a third wiring layer 470, a first interlayer insulating film 156, a transistor 103, a second interlayer insulating film 108, a via 161k, and a first wiring layer 110.

[0200] The second wiring layer 440 is provided on the first surface 103a. The second wiring layer 440 includes wiring 440a. The wiring 440a is provided between the light emitting element 150 and the first surface 103a. The second wiring layer 440 includes a plurality of wirings 440a corresponding to the plurality of light emitting elements 150, and in this example, each of the wirings 440a is separated.

[0201] The second wiring layer 440 is formed of a conductive film having optical transparency. The conductive film is a transparent conductive film made of, for example, ITO, ZnO, etc. The wiring 440a is also formed of the same material.

[0202] The second wiring layer 440 and the wiring 440a are in contact with the first surface 103a. The light emitting element 150 is in contact with the wiring 440a at the light emitting surface 151S and is electrically connected to the wiring 440a. The periphery of the wiring 440a is set to include the periphery of the light emitting element 150 when projected onto the wiring 440a in an XY plane view. The wiring 440a is provided so as to protrude in one direction from directly below the light emitting surface 151S on the first surface 103a. One end of the via 161k is connected to the protruding region of the wiring 440a. Therefore, the n-type semiconductor layer 151 is electrically connected to, for example, the ground line 4 of the circuit of FIG. 2 described above through the wiring 440a, the via 161k, and the wiring 110k.

[0203] A resin layer 457 is provided on the first surface 103a, the light emitting element 150, and the second wiring layer 440. The resin layer 457 is, for example, a transparent resin. The third wiring layer 470 is provided on the resin layer 457. The third wiring layer 470 can include a plurality of wirings. For example, some of the plurality of wirings can be physically separated and can be electrically at different potentials. Another portion of the plurality of wirings is physically connected. In this example, the third wiring layer 470 includes separated wirings 470a, 470b.

[0204] The wiring (first light-shielding electrode) 470a is provided above and to the sides of the light-emitting element 150, and covers the upper surface 153U and side surfaces of the light-emitting element 150. The wiring 470a covers most of the light-emitting element except for the light-emitting surface 151S, thereby blocking scattered light and reflected light to the sides and upwards of the light-emitting element 150. The connection electrode 461a is provided between the upper surface 153U and the wiring 470a, and electrically connects the upper surface 153U and the wiring 470a. The wiring 470a functions as a light-shielding electrode.

[0205] When the resin layer 457 is made of a transparent resin, scattered light and the like emitted from above or sides of the light emitting element 150 is reflected by the wiring 470a toward the light emitting surface 151S side. This improves the substantial light emitting efficiency of the light emitting element 150. When the resin layer 457 is made of a material having high light reflectivity, such as a white resin, the wiring 470a is further provided on the resin layer 457, so that a higher light reflectivity can be realized.

[0206] The via 161a is provided between the wiring 110d and the wiring 470a, and electrically connects the wiring 110d and the wiring 470a. Therefore, the p-type semiconductor layer 153 is electrically connected to the drain region of the transistor 103 through the connection electrode 461a, the wiring 470a, the via 161a, the wiring 110d, and the via 111d.

[0207] The via 161k is provided between the wiring 110k and the wiring 440a, and electrically connects the wiring 110k and the wiring 440a. Therefore, the n-type semiconductor layer 151 is electrically connected to, for example, the ground line 4 of the circuit in FIG. 2 through the wiring 440a, the via 161k, and the wiring 110k.

[0208] The first interlayer insulating film 156 is provided to cover the resin layer 457 and the third wiring layer 470. The configurations of the TFT lower film 106 and the circuit 101 provided on the first interlayer insulating film 156 are the same as those in the other embodiments described above, and detailed description thereof will be omitted.

[0209] A method for manufacturing the image display device of this embodiment will be described. 27A to 30B are schematic cross-sectional views illustrating a method for manufacturing the image display device of this embodiment. In the manufacturing method of the image display device of this embodiment, the steps explained in the first embodiment with reference to FIGS. 4A and 4B are applied, and the following explanation is applied to the steps from FIG. 4B onwards. 27A, a substrate 1195 is prepared, and a conductive film 1440 having optical transparency is formed on a semiconductor layer 1150. The conductive film 1440 is formed on an exposed surface 1151E of an n-type semiconductor layer 1151.

[0210] As shown in FIG. 27B, the semiconductor layer 1150 is bonded to the first surface 103a with a conductive film 1440 interposed therebetween.

[0211] As shown in Fig. 28A, the conductive film 1440 shown in Fig. 27B is processed by etching to form a second wiring layer 440 including wiring 440a. The semiconductor layer 1150 shown in Fig. 27B is processed by etching to form a light emitting element 150.

[0212] The resin layer 457 is formed so as to cover the first surface 103a, the light emitting element 150, and the wiring layer 440. The resin layer 457 has an opening 462a formed therein so as to expose a part of the upper surface 153U of the light emitting element 150.

[0213] 28B, metal layer 1470 is formed so as to cover resin layer 457. When forming metal layer 1470, opening 462a shown in FIG. 28A may be filled at the same time to form connection electrode 461a, or opening 462a may be filled to form connection electrode 461a, and then metal layer 1470 may be formed.

[0214] As shown in Fig. 29A, the metal layer 1470 shown in Fig. 28B is processed by etching to form the third wiring layer 470. When the third wiring layer 470 is formed, wirings 470a and 470b are formed. A first interlayer insulating film 156 is formed to cover the resin layer 457 and the third wiring layer 470.

[0215] As shown in FIG. 29B, the TFT lower layer film 106 is formed on the first interlayer insulating film 156, and a polycrystallized Si layer 1104 is formed on the TFT lower layer film 106.

[0216] As shown in FIG. 30A, the TFT channel 104, the insulating layer 105, the gate 107, and the regions 104s, 104d, and 104i are formed using an LTPS process or the like.

[0217] 30B, vias 111s, 111d, 161a, and 161k are formed, and the first wiring layer 110 is formed on the second interlayer insulating film 108. The via 161k is formed by filling a via hole formed so as to reach the wiring 440a with a conductive material. For the details of each manufacturing step in FIGS. 29A to 30B, the techniques already described in the manufacturing methods of the image display devices according to the other embodiments can be applied.

[0218] In this manner, sub-pixel 420 is formed.

[0219] The effects of the image display device of this embodiment will be described. In the image display device of this embodiment, similarly to the other embodiments described above, it is possible to shorten the time of the transfer process for forming the light emitting element 150 and reduce the number of processes. In addition, it has the following effects.

[0220] Since the second wiring layer 440 and the wiring 440a are formed of a light-transmitting conductive film such as ITO, they are easy to process, and in some cases the series of manufacturing steps for the light emitting element 150 and the second wiring layer 440 can be shortened.

[0221] In this embodiment, the second wiring layer 440 and the wiring 440a are used to lead out the electrodes on the light emitting surface 151S side, so that the light emitting element 150 can be a vertical type. In the vertical type light emitting element 150, the component of the current flowing through the semiconductor layer in the direction along the XY plane can be reduced and the current can be directed substantially along the Z axis, which is advantageous in that the loss in the semiconductor layer can be reduced.

[0222] In the image display device of this embodiment, the subpixel 420 includes a third wiring layer 470. The third wiring layer 470 is electrically isolated from the light emitting element 150 by the resin layer 457. The third wiring layer 470 includes a wiring 470a, and the wiring 470a covers the upper surface 153U and the side surface of the light emitting element 150 via the resin layer 457. Therefore, it is possible to block scattered light and the like above and to the side of the light emitting element 150. Even if the transistor 103 is provided above the light emitting element 150, scattered light and the like above and to the side of the light emitting element 150 is blocked by the wiring 470a, so that the scattered light and the like are prevented from reaching the transistor 103. Therefore, the malfunction of the transistor 103 due to scattered light and the like of the light emitting element 150 is prevented.

[0223] Fifth embodiment FIG. 31 is a schematic cross-sectional view illustrating a part of the image display device of this embodiment. In this embodiment, a light-shielding electrode 560a is provided to cover the upper surface 153U of the light-emitting element 150, and the light-shielding electrode 560a is connected to wiring 510d formed on the wall surface of the through-hole 511a, which is different from the other embodiments described above. In this example, a light-transmitting substrate such as a glass substrate is thinned, and a color filter 180 is provided on the thinned substrate 502. In other respects, this embodiment is the same as the other embodiments, and the same components are denoted by the same reference numerals and detailed description thereof will be omitted as appropriate.

[0224] 31, a subpixel 520 of the image display device of this embodiment includes a substrate 502, a second wiring layer 440, a light-emitting element 150, a light-shielding electrode 560a, a first interlayer insulating film 156, a transistor 103, a second interlayer insulating film 108, a via 161k, a first wiring layer 110, and a color filter 180. In this embodiment, the light-emitting element 150 is provided on a wiring 540a of the second wiring layer 440, and is electrically connected to the wiring 540a at a light-emitting surface 151S.

[0225] The substrate 502 is a substrate having light-transmitting properties, such as a glass substrate. The substrate 502 may be a resin substrate having light-transmitting properties, in addition to a glass substrate. A bonding layer 303 is provided on one surface 502a of the substrate 502. The bonding layer 303 is the same as in the other embodiments described above. When the substrate 502 is a resin substrate, the bonding layer 303 is provided to facilitate bonding with the semiconductor layer, and is made of an inorganic compound such as a Si compound, such as SiO2.

[0226] A color filter 180 is provided on the other surface 502b of the substrate 502. The color filter 180 is the same as in the other embodiments described above.

[0227] A through-hole 511a is provided above the light-emitting element 150. The through-hole 511a is provided so as to penetrate the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156, and reach the upper surface 153U. The inner periphery of the through-hole 511a is provided so as to be the same as the outer periphery of the upper surface 153U or slightly inside the outer periphery of the upper surface 153U.

[0228] A light-shielding electrode (second light-shielding electrode) 560a is provided over the upper surface 153U. Since the light-shielding electrode 560a is provided at the bottom of the through-hole 511a, the outer periphery of the light-shielding electrode 560a almost coincides with the inner periphery of the through-hole 511a. Therefore, the light-shielding electrode 560a is provided so as to cover all or most of the upper surface 153U. The light-shielding electrode 560a blocks scattered light and the like upward from the light-emitting element 150. Therefore, the scattered light and the like upward is prevented from reaching the transistor 103, and thus the transistor 103 is prevented from malfunctioning. The light reflectivity can be improved by forming the light-shielding electrode 560a from a highly reflective material such as Ag or by providing an ITO film between the light-shielding electrode 560a and the upper surface 153U. By improving the light reflectivity, it is possible to reflect light scattered toward the upper surface 153U side toward the light emitting surface 151S side, thereby improving the substantial light emitting efficiency of the light emitting element 150. Note that the light shielding electrode 560a can be formed integrally with the wiring 510d formed on the wall surface of the through hole 511a, and therefore the light shielding electrode 560a and the wiring 510d correspond to the via (first via) 161a etc. in the other embodiments described above.

[0229] The first wiring layer 110 includes a wiring 510d. The wiring 510d is provided on the second interlayer insulating film 108, and is also provided on the wall surface of the through hole 511a and connected to the light-shielding electrode 560a. The wiring 510d is connected to the drain region of the transistor 103 through the via 111d, so that the p-type semiconductor layer 153 is electrically connected to the drain region of the transistor 103 through the light-shielding electrode 560a, the wiring 510d, and the via 111d.

[0230] The other configurations, such as the transistor 103, are the same as those in the other embodiments described above, and detailed description thereof will be omitted.

[0231] FIG. 32 is a schematic block diagram illustrating an image display device according to this embodiment. 32, in an image display device 501 of this embodiment, sub-pixels 520 are arranged in a display region 2. The sub-pixels 520 are arranged, for example, in a lattice pattern. For example, n sub-pixels 520 are arranged along the X axis, and m sub-pixels 520 are arranged along the Y axis.

[0232] The pixel 10 includes a number of sub-pixels 520 that emit light of different colors. Sub-pixel 520R emits red light. Sub-pixel 520G emits green light. Sub-pixel 520B emits blue light. The emission color and brightness of one pixel 10 are determined by the three types of sub-pixels 520R, 520G, and 520B emitting light at a desired brightness. The arrangement of each color is the same as in the third embodiment.

[0233] In the image display device 501 of this embodiment, the configurations of the power supply line 3, the ground line 4, the scanning line 6, and the signal line 8 are the same as those in the first embodiment described above. The image display device 501 differs from the first embodiment in that three types of sub-pixels are caused to emit light at a set brightness, respectively, to determine the emission color and brightness of one pixel 10. Apart from the possible differences in the signal configuration for this purpose, the example is the same as that of the first embodiment shown in FIG. 2, and therefore a detailed description of the circuit configuration will be omitted.

[0234] A method for manufacturing the image display device of this embodiment will be described. 33A to 34B are schematic cross-sectional views illustrating a part of a method for manufacturing the image display device of this embodiment. In the manufacturing method of the image display device of this embodiment, the steps described in the fourth embodiment with reference to FIGS. 27A and 27B are applied, and the following description is applied to the steps from FIG. 27B onwards.

[0235] 33A, the light-transmitting conductive film 1440 shown in FIG. 27B is processed by etching to form the second wiring layer 440 and the wiring 540a. The first interlayer insulating film 156 is formed to cover the first surface 103a, the light-emitting element 150, and the second wiring layer 440.

[0236] 33B, a through-hole 511a is formed so as to penetrate through the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156 provided above the upper surface 153U of the light-emitting element 150 and reach the upper surface 153U. By forming the through-hole 511a, a part of the upper surface 153U is exposed from the opening 511.

[0237] It is preferable that the entire upper surface 153U is exposed by the opening 511 of the through hole 511a, but this is set according to the accuracy of forming the through hole 511a. For example, the inner circumference of the through hole 511a is set to be slightly smaller than the outer circumference of the upper surface 153U.

[0238] A via hole 162k is formed, penetrating the second interlayer insulating film 108, the insulating layer 105, the TFT lower film 106, and the first interlayer insulating film 156, and reaching the wiring 540a. A via hole 112d is formed, penetrating the second interlayer insulating film 108 and the insulating layer 105, and reaching the region 104d. A via hole 112s is formed, penetrating the second interlayer insulating film 108 and the insulating layer 105, and reaching the region 104s. The via holes 162k, 112d, and 112s are formed, for example, simultaneously. The through hole 511a may be formed simultaneously with the via holes 162k, 112d, and 112s, or may be formed separately.

[0239] As shown in Fig. 34A, the via holes 162k, 112d, and 112s shown in Fig. 33B are filled with a conductive material to form the vias 161k, 111d, and 111s. When the vias 161k, 111d, and 111s are formed, the bottom of the through hole 511a, i.e., the upper surface 153U, may be covered with a conductive material.

[0240] The first wiring layer 110 is formed on the second interlayer insulating film 108. When forming the first wiring layer 110, a conductive layer that forms the first wiring layer 110 is formed on the second interlayer insulating film 108, and is processed by etching to form the first wiring layer 110 including the wirings 110k, 510d, and 110s. The conductive layer is formed on the second interlayer insulating film 108, as well as over the exposed upper surface 153U and the wall surface of the through hole 511a.

[0241] In this manner, the wiring 110k connected to the via 161k is formed, the wiring 510d connected to the via 111d is formed, and the wiring 110s connected to the via 111s is formed. The wiring 510d is provided over the wall surface of the through hole 511a, and is therefore also connected to the upper surface 153U.

[0242] An adhesive layer 1170 is provided on the second interlayer insulating film 108 and the first wiring layer 110, and a reinforcing substrate 1180 is attached by the adhesive layer 1170. Thereafter, the substrate 102 shown in FIG. 33B is thinned by wet etching or the like, and processed into a thin substrate 502.

[0243] As shown in Fig. 34B, a color filter 180 is provided on the other surface (second surface) 502b of the substrate 502. In this example, the color filter 180 is formed by the inkjet method shown in Figs. 24A to 24D in the case of the other embodiment described above. In the case of a film-type color filter, the color filter 180 can be provided on the surface 502b via a transparent thin film adhesive layer.

[0244] When the substrate 502 is a resin substrate having light transmission properties, for example, a resin layer formed on a glass substrate may be used as the substrate 502. After light emitting elements and the like are formed on the substrate 502, which is a resin layer, the glass substrate may be removed by wet etching or the like, and then the color filter 180 may be formed on a surface 502b from which the glass substrate has been removed.

[0245] The effects of the image display device of this embodiment will be described. The image display device of this embodiment, like the image display devices of the other embodiments described above, has the effect of shortening the time of the transfer process for forming the light emitting element 150 and reducing the number of processes. In addition, since the light shielding electrode 560a is provided over the upper surface 153U, it is possible to block scattered light emitted by the light emitting element 150 and the like toward the upper side. The light shielding electrode 560a prevents the transistor 103 provided above the light emitting element 150 from malfunctioning because the light shielding electrode 560a prevents light from reaching the transistor 103.

[0246] In this embodiment, there is no need to add a process for forming the light-shielding electrode 560a because the light-shielding electrode 560a can be formed together with the formation of the vias and the formation of the first wiring layer 110. This shortens the manufacturing process and the time from input of materials to completion of the product.

[0247] Sixth embodiment FIG. 35 is a schematic cross-sectional view illustrating a part of the image display device of this embodiment. In this embodiment, the configuration of the light emitting element 650 is different from that of the other embodiments. The other components are the same as those of the other embodiments described above. The same components are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate.

[0248] As shown in FIG. 35, the second wiring layer 440 includes a wiring 640a. The second wiring layer 440 and the wiring 640a are in contact with the first surface 103a. The light emitting element 650 is in contact with the wiring 640a at the light emitting surface 651S and is electrically connected to the wiring 640a. The periphery of the wiring 640a is set to include the periphery of the light emitting element 650 when the light emitting element 650 is projected onto the wiring 640a in the XY plane view. The wiring 640a is provided so as to protrude from directly below the light emitting surface 651S on the first surface 103a. One end of the via 161k is connected to the protruding region of the wiring 640a. Therefore, the n-type semiconductor layer 651 is electrically connected to, for example, the ground line 4 of the circuit of FIG. 2 described above via the wiring 640a, the via 161k, and the wiring 110k.

[0249] In this embodiment, a light-shielding layer 330 is provided. The light-shielding layer 330 is the same as that described in the third embodiment with reference to FIG. 18. The light-shielding layer 330 includes a second portion 630a. The second portion 630a has a region including the outer periphery of the TFT channel 104 when the TFT channel 104 is projected onto the second portion 630a in the XY plane view.

[0250] The light emitting element 650 is provided on the wiring 640a. The light emitting element 650 is a truncated pyramidal or truncated conical element formed so that the area in the XY plane view decreases toward the positive direction of the Z axis. The light emitting element 650 includes a light emitting surface 651S on the first surface 103a and an upper surface 653U provided on the opposite side of the light emitting surface 651S. The light emitting surface 651S is provided on the first surface 103a. The light emitting element 650 includes an n-type semiconductor layer 651, a light emitting layer 652, and a p-type semiconductor layer 653. The n-type semiconductor layer 651, the light emitting layer 652, and the p-type semiconductor layer 653 are laminated in this order from the first surface 103a side.

[0251] FIG. 36 shows a detailed positional relationship between the first surface 103a and the light emitting element 650. As shown in FIG. As shown in Fig. 36, the first surface 103a is a plane substantially parallel to the XY plane. The light emitting element 650 is provided on the first surface 103a, and the light emitting surface 651S is a surface substantially parallel to the first surface 103a. The wiring 640a is provided on the first surface 103a, and the light emitting surface 651S is provided on the first surface 103a via the wiring 640a. The thickness of the wiring 640a is sufficiently thin, and the reflection and absorption of light are sufficiently small.

[0252] The light emitting element 650 has a side surface 655a. The side surface 655a is a surface between the upper surface 653U and the first surface 103a, and is a surface adjacent to the light emitting surface 651S. An interior angle θ between the side surface 655a and the first surface 103a is smaller than 90°. Preferably, the interior angle θ is about 70°. More preferably, the interior angle θ is smaller than a critical angle in the side surface 655a determined based on the refractive index of the light emitting element 650 and the refractive index of the first interlayer insulating film 156. The light emitting element 650 is covered with the first interlayer insulating film 156, and the side surface 655a is in contact with the first interlayer insulating film 156.

[0253] The critical angle θc of the interior angle θ between the side surface 655a of the light emitting element 650 and the first surface 103a is determined, for example, as follows. When the refractive index of light emitting element 650 is n0 and the refractive index of first interlayer insulating film 156 is n1, the critical angle θc of light emitted from light emitting element 650 to first interlayer insulating film 156 is found using the following formula (1).

[0254] θc=90°-sin -1 (n1 / n0) (1)

[0255] For example, it is known that the refractive index of a typical transparent organic insulating material such as acrylic resin is about 1.4 to 1.5. Therefore, when the light emitting element 650 is made of GaN and the first interlayer insulating film 156 is made of a typical transparent organic insulating material, the refractive index n0 of the light emitting element 650 can be set to 2.5, and the refractive index n of the first interlayer insulating film 156 can be set to 1.4. By substituting these values ​​into the formula (1), the critical angle θc=56° is obtained.

[0256] This shows that when the interior angle θ between first surface 103a and side surface 655a is θc=56°, the light emitted from light emitting layer 652 that is parallel to first surface 103a is totally reflected by side surface 655a. It also shows that the light emitted from light emitting layer 652 that has a component in the positive direction of the Z axis is totally reflected by side surface 655a. For simplicity, first interlayer insulating film 156 is made of a transparent resin, but even if the transparent resin is made of a white resin, the effect on the refractive index of the scattering particles for the white resin is small and is therefore ignored in the above calculation.

[0257] On the other hand, of the light emitted from light emitting layer 652, light having a component in the negative direction of the Z axis is emitted from side surface 655a at an emission angle according to the refractive index at side surface 655a. The light incident on first interlayer insulating film 156 is emitted from first interlayer insulating film 156 at an angle determined by the refractive index of first interlayer insulating film 156.

[0258] The light totally reflected by the side surface 655a is reflected again by the upper surface 653U, and the light having a component in the negative direction of the Z axis among the reflected light is emitted from the light emitting surface 651S and the side surface 655a. The light parallel to the first surface 103a and the light having a component in the positive direction of the Z axis are totally reflected by the side surface 655a.

[0259] In this way, of the light emitted from light-emitting layer 652, light parallel to first surface 103a and light having a component in the positive direction of the Z axis are converted by side surface 655a into light having a component directed in the negative direction of the Z axis. Therefore, in the light emitted from light-emitting element 650, the proportion of light directed toward light-emitting surface 651S increases, and the substantial light-emitting efficiency of light-emitting element 650 is improved.

[0260] By setting θ<θc, most of the light having a component parallel to the first surface 103a can be totally reflected inside the light emitting element 650. If the refractive index of the first interlayer insulating film 156 is n=1.4, the critical angle θc is about 56°, so it is more preferable to set the interior angle θ to 45°, 30°, or the like. Furthermore, the critical angle θc becomes smaller for materials with a larger refractive index n. However, even if the interior angle θ is set to about 70°, most of the light having a component in the negative direction of the Z axis can be converted into light having a component in the positive direction of the Z axis, so the interior angle θ may be set to, for example, 80° or less in consideration of manufacturing variations, etc.

[0261] A method for manufacturing the image display device of this embodiment will be described. In this embodiment, the manufacturing process for the light emitting device 650 is different from that of the other embodiments, and the other manufacturing processes can be applied to the above-mentioned other embodiments. The different parts of the manufacturing process will be described below. In this embodiment, the following steps are carried out to obtain the shape of the light emitting device 650 shown in FIG. The semiconductor layer 1150 shown in FIG. 27B is attached to the first surface 103a, and then etched into the shape of the light emitting element 650 shown in FIG. 35. In forming the light emitting element 650, an etching rate is selected so that the side surface 655a shown in FIG. 36 forms an interior angle θ with the surface of the first surface 103a. For example, a higher etching rate is selected for the etching closer to the upper surface 653U. Preferably, the etching rate is set to increase linearly from the light emitting surface 651S side toward the upper surface 653U side.

[0262] Specifically, for example, the resist mask pattern for dry etching is designed to become gradually thinner toward its end during exposure. This allows the resist to gradually recede from the thin portion during dry etching, increasing the amount of etching from the light-emitting surface 651S toward the top surface 653U. As a result, the side surface 655a of the light-emitting element 650 is formed to form a certain angle with respect to the first surface 103a. Therefore, in the light-emitting element 650, the areas of the layers in the XY plane view from the top surface 653U are formed to be larger in the order of the p-type semiconductor layer 653, the light-emitting layer 652, and the n-type semiconductor layer 651.

[0263] Subpixels 620 are then formed in the same manner as in the other embodiments.

[0264] The effects of the image display device of this embodiment will be described. The image display device of this embodiment, like the image display devices of the other embodiments described above, has the effect of shortening the time for the transfer process for forming the light-emitting element 650 and reducing the number of processes, as well as the following effects. In the image display device of this embodiment, the light emitting element 650 is formed to have a side surface 655a that forms an interior angle θ with respect to the first surface 103a on which the light emitting element 650 is provided. The interior angle θ is set based on a critical angle θc that is smaller than 90° and is determined by the refractive index of the materials of the light emitting element 650 and the first interlayer insulating film 156. The interior angle θ can convert light emitted from the light emitting layer 652 toward the side or upper side of the light emitting element 650 into light toward the light emitting surface 651S and emit it. By making the interior angle θ sufficiently small, the substantial light emitting efficiency of the light emitting element 650 is improved.

[0265] In this embodiment, the light emitting element 650 is a vertical element and is connected to the via 161k using the second wiring layer 440. However, the light emitting element may be provided with a connection portion formed on the first surface 103a and connected to the via 161k through the connection portion. When providing a connection portion to connect to the via 161k, the light emitting surface may be roughened.

[0266] Seventh embodiment FIG. 37 is a schematic cross-sectional view illustrating a part of the image display device of this embodiment. In this embodiment, the image display device is different from the other embodiments in that it includes a sub-pixel group 720 including a plurality of light-emitting regions on one light-emitting surface. The same components are given the same reference numerals and detailed description will be omitted as appropriate. 37, the image display device of this embodiment includes a subpixel group 720. The subpixel group 720 includes a substrate 102, a semiconductor layer 750, a first interlayer insulating film 156, a plurality of transistors 103-1 and 103-2, a second interlayer insulating film 108, a plurality of vias 761a1 and 761a2, and a first wiring layer 110. The semiconductor layer 750 is provided on the first surface 103a.

[0267] In this embodiment, holes are injected from one side of the semiconductor layer 750 through the first wiring layer 110 and the vias 761a1 and 761a2 by turning on the p-channel transistors 103-1 and 103-2. Electrons are injected from the other side of the semiconductor layer 750 through the first wiring layer 110 by turning on the p-channel transistors 103-1 and 103-2. Holes and electrons are injected into the semiconductor layer 750, and the separated light-emitting layers 752a1 and 752a2 emit light due to the combination of the holes and electrons. The driving circuit for driving the light-emitting layers 752a1 and 752a2 may have the circuit configuration shown in FIG. 2, for example. Using the example of the second embodiment, the n-type semiconductor layer and the p-type semiconductor layer of the semiconductor layer may be interchanged, and the semiconductor layer may be driven by an n-channel transistor. In that case, the driving circuit may have the circuit configuration shown in FIG. 11.

[0268] The configuration of the sub-pixel group 720 will now be described in detail. The semiconductor layer 750 has a light emitting surface 751S in contact with the first surface 103a. The light emitting surface 751S is a surface of the n-type semiconductor layer 751. The light emitting surface 751S includes a plurality of light emitting regions 751R1 and 751R2.

[0269] The semiconductor layer 750 includes an n-type semiconductor layer 751, light emitting layers 752a1 and 752a2, and p-type semiconductor layers 753a1 and 753a2. The light emitting layer 752a1 is provided on the n-type semiconductor layer 751. The light emitting layer 752a2 is provided on the n-type semiconductor layer 751, separated from the light emitting layer 752a1. The p-type semiconductor layer 753a1 is provided on the light emitting layer 752a1. The p-type semiconductor layer 753a2 is provided on the light emitting layer 752a2, separated from the p-type semiconductor layer 753a1.

[0270] The p-type semiconductor layer 753a1 has an upper surface 753U1 provided on the side opposite to the surface on which the light emitting layer 752a1 is provided, and the p-type semiconductor layer 753a2 has an upper surface 753U2 provided on the side opposite to the surface on which the light emitting layer 752a2 is provided.

[0271] The light emitting region 751R1 approximately corresponds to the region of the light emitting surface 751S opposite the upper surface 753U1. The light emitting region 751R2 approximately corresponds to the region of the light emitting surface 751S opposite the upper surface 753U2.

[0272] FIG. 38 is a schematic cross-sectional view illustrating a part of the image display device of this embodiment. FIG. 38 is a schematic diagram for explaining light emitting regions 751R1 and 751R2. As shown in Fig. 38, the light emitting regions 751R1 and 751R2 are surfaces on the light emitting surface 751S. In Fig. 38, the portions of the semiconductor layer 750 including the light emitting regions 751R1 and 751R2 are called light emitting portions R1 and R2, respectively. The light emitting portion R1 includes a portion of the n-type semiconductor layer 751, the light emitting layer 752a1, and the p-type semiconductor layer 753a1. The light emitting portion R2 includes a portion of the n-type semiconductor layer 751, the light emitting layer 752a2, and the p-type semiconductor layer 753a2.

[0273] The semiconductor layer 750 includes a connection portion R0. The connection portion R0 is provided between the light emitting portions R1 and R2, and is a part of the n-type semiconductor layer 751. One end of the via 761k shown in FIG. 37 is connected to the connection portion R0, and the connection portion R0 provides a current path from the via 761k to the light emitting portions R1 and R2.

[0274] In the light-emitting section R1, electrons supplied through the connection section R0 are supplied to the light-emitting layer 752a1. In the light-emitting section R1, holes supplied through the upper surface 753U1 are supplied to the light-emitting layer 752a1. The electrons and holes supplied to the light-emitting layer 752a1 are combined to emit light. The light emitted from the light-emitting layer 752a1 reaches the light-emitting surface 751S through the n-type semiconductor layer 751 of the light-emitting section R1. Since the light travels almost straight along the Z-axis direction in the light-emitting section R1, the light-emitting area 751R1 is the area that emits light on the light-emitting surface 751S. Therefore, in this example, the light-emitting area 751R1 is almost the same as the area surrounded by the outer periphery of the light-emitting layer 752a1 projected onto the light-emitting surface 751S in the XY plane view.

[0275] The light-emitting portion R2 is similar to the light-emitting portion R1. That is, in the light-emitting portion R2, electrons supplied through the connection portion R0 are supplied to the light-emitting layer 752a2. In the light-emitting portion R2, holes supplied through the upper surface 753U2 are supplied to the light-emitting layer 752a2. The electrons and holes supplied to the light-emitting layer 752a2 are combined and emit light. The light emitted from the light-emitting layer 752a2 reaches the light-emitting surface 751S through the n-type semiconductor layer 751 of the light-emitting portion R2. Since the light travels almost straight along the Z-axis direction in the light-emitting portion R2, it is the light-emitting region 751R2 that emits light on the light-emitting surface 751S. Therefore, in this example, the light-emitting region 751R2 almost coincides with the region surrounded by the outer periphery of the light-emitting layer 752a2 projected onto the light-emitting surface 751S in the XY plane view.

[0276] In this manner, in the semiconductor layer 750, the n-type semiconductor layer 751 can be shared to form a plurality of light emitting regions 751R1, 751R2 on the light emitting surface 751S.

[0277] In this embodiment, the semiconductor layer 750 can be formed by using a part of the n-type semiconductor layer 751 as the connection portion R0 in the plurality of light emitting layers 752a1, 752a2 and the plurality of p-type semiconductor layers 753a1, 753a2 of the semiconductor layer 750. Therefore, the semiconductor layer 750 can be formed in the same manner as in the formation method of the light emitting elements 150, 250 in the above-described first embodiment, second embodiment, etc.

[0278] Returning to FIG. 37, the explanation will be continued. A first interlayer insulating film 156 (a first insulating film) is provided to cover the first surface 103a and the semiconductor layer 750.

[0279] The TFT lower layer film 106 is formed over the first interlayer insulating film 156. The TFT lower layer film 106 is planarized, and the TFT channels 104-1, 104-2, etc. are formed on the TFT lower layer film 106.

[0280] The insulating layer 105 covers the TFT lower layer film 106 and the TFT channels 104-1 and 104-2. The gate 107-1 is provided on the TFT channel 104-1 via the insulating layer 105. The gate 107-2 is provided on the TFT channel 104-2 via the insulating layer 105. The transistor 103-1 includes the TFT channel 104-1 and the gate 107-1. The transistor 103-2 includes the TFT channel 104-2 and the gate 107-2.

[0281] A second interlayer insulating film (second insulating film) 108 covers the insulating layer 105 and the gates 107-1 and 107-2.

[0282] The TFT channel 104-1 includes p-type doped regions 104s1 and 104d1, which are the source and drain regions of the transistor 103-1. The region 104i1 is n-type doped and forms the channel of the transistor 103-1. The TFT channel 104-2 similarly includes p-type doped regions 104s2 and 104d2, which are the source and drain regions of the transistor 103-2. The region 104i2 is n-type doped and forms the channel of the transistor 103-2. In this embodiment, the circuit 101 includes the TFT channels 104-1 and 104-2, the insulating layer 105, the second interlayer insulating film 108, the vias 111s1, 111d1, 111s2, and 111d2, and the first wiring layer 110.

[0283] The first wiring layer 110 is provided on the second interlayer insulating film 108. The first wiring layer 110 includes wirings 710s1, 710d1, 710k, 710d2, and 710s2.

[0284] The wiring 710k is provided above the n-type semiconductor layer 751. The via 761k is provided between the wiring 710k and the n-type semiconductor layer 751, and electrically connects the wiring 710k and the n-type semiconductor layer 751. The wiring 710k is connected to, for example, the ground line 4 of the circuit in FIG.

[0285] The vias 111d1, 111s1, 111d2, and 111s2 are provided through the second interlayer insulating film 108 and the insulating layer 105. The via 111d1 is provided between the region 104d1 and the wiring 710d1, and electrically connects the region 104d1 and the wiring 710d1. The via 111s1 is provided between the region 104s1 and the wiring 710s1, and electrically connects the region 104s1 and the wiring 710s1. The via 111d2 is provided between the region 104d2 and the wiring 710d2, and electrically connects the region 104d2 and the wiring 710d2. The via 111s2 is provided between the region 104s2 and the wiring 710s2, and electrically connects the region 104s2 and the wiring 710s2. The wirings 710s1 and 710s2 are connected to the power supply line 3 of the circuit in FIG. 2, for example.

[0286] The wiring 710d1 is provided above the upper surface 753U1. The via 761a1 is provided between the wiring 710d1 and the upper surface 753U1, and electrically connects the wiring 710d1 and the upper surface 753U1. Therefore, the p-type semiconductor layer 753a1 is electrically connected to the drain region of the transistor 103-1 through the upper surface 753U1, the via 761a1, the wiring 710d1, and the via 111d1.

[0287] The wiring 710d2 is provided above the upper surface 753U2. The via 761a2 is provided between the wiring 710d2 and the upper surface 753U2 and electrically connects the wiring 710d2 and the upper surface 753U2. Therefore, the p-type semiconductor layer 753a2 is electrically connected to the drain region of the transistor 103-2 through the upper surface 753U2, the via 761a2, the wiring 710d2, and the via 111d2.

[0288] For example, transistors 103-1 and 103-2 are driving transistors of adjacent subpixels and are driven sequentially. When holes supplied from transistor 103-1 are injected into light-emitting layer 752a1 and electrons supplied from wiring 710k are injected into light-emitting layer 752a1, light-emitting layer 752a1 emits light and light is emitted from light-emitting region 751R1. When holes supplied from transistor 103-2 are injected into light-emitting layer 752a2 and electrons supplied from wiring 710k are injected into light-emitting layer 752a2, light-emitting layer 752a2 emits light and light is emitted from light-emitting region 751R2.

[0289] The effects of the image display device of this embodiment will be described. The image display device of this embodiment, like the image display devices of the other embodiments described above, has the effect of shortening the time of the transfer process for forming the semiconductor layer 750 and reducing the number of processes. In addition, since the connection portion R0 can be shared by a plurality of light-emitting portions R1 and R2, it is possible to reduce the number of vias 761k provided in the connection portion R0. By reducing the number of vias, it is possible to reduce the pitch of the light-emitting portions R1 and R2 constituting the subpixel group 720, and it is possible to provide a small-sized, high-definition image display device. In this example, the case of two light-emitting regions is described, but the number of light-emitting regions formed on the light-emitting surface is not limited to two, and can be any number of three or more.

[0290] Eighth embodiment The above-mentioned image display device can be an image display module having an appropriate number of pixels, and can be, for example, a computer display, a television, a portable terminal such as a smartphone, or a car navigation system.

[0291] FIG. 39 is a block diagram illustrating an image display device according to this embodiment. FIG. 39 shows the main components of a computer display. 39, an image display device 801 includes an image display module 802. The image display module 802 is an image display device having the configuration of, for example, the first embodiment described above. The image display module 802 includes a display area 2 in which a plurality of subpixels including the subpixel 20 are arranged, a row selection circuit 5, and a signal voltage output circuit 7.

[0292] The image display device 801 further includes a controller 870. The controller 870 receives a control signal that is separated and generated by an interface circuit (not shown) and controls the row selection circuit 5 and the signal voltage output circuit 7 to drive each sub-pixel and control the drive order.

[0293] (Modification) The above-mentioned image display device can be an image display module having an appropriate number of pixels, and can be, for example, a computer display, a television, a portable terminal such as a smartphone, or a car navigation system.

[0294] FIG. 40 is a block diagram illustrating an image display device according to a modified example of this embodiment. FIG. 40 shows the configuration of a high-definition thin television. As shown in Fig. 40, an image display device 901 includes an image display module 902. The image display module 902 is, for example, the image display device 1 having the configuration of the first embodiment described above. The image display device 901 includes a controller 970 and a frame memory 980. The controller 970 controls the drive order of each sub-pixel in the display area 2 based on a control signal supplied by a bus 940. The frame memory 980 stores one frame's worth of display data and is used for processing such as smooth video playback.

[0295] The image display device 901 has an I / O circuit 910. The I / O circuit 910 is simply indicated as "I / O" in Fig. 40. The I / O circuit 910 provides an interface circuit for connecting to an external terminal, device, etc. The I / O circuit 910 includes, for example, a USB interface for connecting an external hard disk device, etc., and an audio interface.

[0296] The image display device 901 has a receiving unit 920 and a signal processing unit 930. An antenna 922 is connected to the receiving unit 920, and separates and generates necessary signals from radio waves received by the antenna 922. The signal processing unit 930 includes a DSP (Digital Signal Processor), a CPU (Central Processing Unit), etc., and the signals separated and generated by the receiving unit 920 are separated by the signal processing unit 930 into image data, audio data, etc., and generated.

[0297] By configuring the receiving unit 920 and the signal processing unit 930 as a high-frequency communication module for transmitting and receiving signals in a mobile phone, for WiFi, a GPS receiver, etc., the image display device can be configured as another image display device. For example, an image display device equipped with an image display module with an appropriate screen size and resolution can be configured as a mobile information terminal such as a smartphone or a car navigation system.

[0298] The image display module in this embodiment is not limited to the configuration of the image display device in the first embodiment, but may be a modified example thereof or another embodiment. The image display module in this embodiment and the modified example includes a large number of sub-pixels, as shown in Figs. 9 and 25.

[0299] According to the embodiment described above, it is possible to realize a manufacturing method for an image display device and an image display device that shortens the transfer process of light emitting elements and improves the yield.

[0300] Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. In addition, the above-mentioned embodiments can be implemented in combination with each other. [Explanation of symbols]

[0301] 1,201,301,501,801,901 Image display device, 2 Display area, 3 Power supply line, 4 Ground line, 5,205 Row selection circuit, 6,206 Scanning line, 7,207 Signal voltage output circuit, 8,208 Signal line, 10 Pixel, 20,220,320,420,520,620 Subpixel, 22,222 Light emitting element, 24,224 Selection transistor, 26,226 Drive transistor, 28,228 Capacitor, 100 Drive circuit section, 101 Circuit, 102,402,502 Substrate, 103a,180a First surface, 103,103-1,103-2,203 Transistor, 104,104-1,104-2,204 TFT channel, 105 Insulating layer, 107, 107-1, 107-2 Gate, 108 Second interlayer insulating film, 110 First wiring layer, 150, 250, 650 Light emitting element, 151a, 253a, R0 Connection portion, 151S, 151S1, 253S, 651S, 751S Light emitting surface, 156 First interlayer insulating film, 161a, 161k, 261a, 261k, 361a, 361k, 761a1, 761a2, 761k Via, 172 Light emitting circuit portion, 180 Color filter, 330 Light shielding layer, 440 Second wiring layer, 470 Third wiring layer, 560a Light shielding electrode, 720 Subpixel group, 1001 Crystal growth substrate, 1150 Semiconductor layer, 1155 Transparent flattening film, 1180 Reinforcing substrate, 1190 Support substrate, 1192 Structure, 1194, 1294 Semiconductor growth substrate, 1440 Conductive film

Claims

1. providing a semiconductor layer including a light emitting layer; bonding the semiconductor layer to a first surface of a light-transmitting substrate; etching the semiconductor layer to form a light emitting device including a light emitting surface on the first surface and a top surface opposite the light emitting surface; forming a first insulating film covering the first surface and the light emitting element; forming a circuit element on the first insulating film; forming a second insulating film covering the first insulating film and the circuit element; forming a first via penetrating the first insulating film and the second insulating film; forming a first wiring layer on the second insulating film; Equipped with A method for manufacturing an image display device, wherein the first via is provided between the first wiring layer and the upper surface, and electrically connects the first wiring layer and the upper surface.

2. 2. The method for manufacturing an image display device according to claim 1, further comprising the steps of roughening an exposed surface of the semiconductor layer and forming a light-transmitting film over the roughened surface prior to the step of bonding the semiconductor layer.

3. forming a second via penetrating the first insulating film and the second insulating film; The light emitting element includes a connection portion, The method for manufacturing an image display device according to claim 1 , wherein the second via is provided between the first wiring layer and the connection portion, and electrically connects the first wiring layer and the connection portion.

4. forming a conductive layer having optical transparency on the semiconductor layer before the step of bonding the semiconductor layer; forming a second wiring layer by etching the conductive layer after the step of bonding the semiconductor layer; The method for manufacturing an image display device according to claim 1 , further comprising:

5. forming a second via penetrating the first insulating film and the second insulating film; The method for manufacturing an image display device according to claim 4 , wherein the second via is provided between the first wiring layer and the second wiring layer, and electrically connects the first wiring layer and the second wiring layer.

6. 2. The method for manufacturing an image display device according to claim 1, further comprising the step of forming a light-shielding layer on the first insulating film before the step of forming the circuit elements.

7. 2. The method of manufacturing an image display device according to claim 1, further comprising the step of forming a third wiring layer so as to cover the light emitting elements before the step of forming the first insulating film.

8. The method for manufacturing an image display device according to claim 1 , wherein the semiconductor layer includes a gallium nitride compound semiconductor.

9. The method for manufacturing an image display device according to claim 1 , further comprising the step of forming a wavelength conversion member on a second surface opposite to the first surface.

10. The method for manufacturing an image display device according to claim 1 , further comprising the steps of removing the light-transmitting substrate and forming a wavelength conversion member in place of the light-transmitting substrate.

11. a light-transmitting member having a first surface; a light emitting element including a light emitting surface on the first surface and a top surface opposite the light emitting surface; a first insulating film covering the first surface and the light emitting element; A circuit element provided on the first insulating film; a second insulating film covering the first insulating film and the circuit element; a first via provided through the first insulating film and the second insulating film; a first wiring layer provided on the second insulating film; Equipped with The first via is provided between the first wiring layer and the upper surface, and electrically connects the first wiring layer and the upper surface.

12. a second via provided through the first insulating film and the second insulating film; The light emitting element includes a connection portion formed on the first surface, the first wiring layer includes a first wiring and a second wiring separated from the first wiring, the first via is provided between the first wiring and the upper surface and electrically connects the first wiring and the upper surface; The image display device according to claim 11 , wherein the second via is provided between the second wiring and the connection portion, and electrically connects the second wiring and the connection portion.

13. The image display device according to claim 11, wherein the light emitting surface is roughened.

14. a second wiring layer having optical transparency and provided between the first surface and the light emitting surface; a second via provided through the first insulating film and the second insulating film; Further equipped with the first wiring layer includes a first wiring and a second wiring separated from the first wiring, the first via is provided between the first wiring and the upper surface and electrically connects the first wiring and the upper surface; The image display device according to claim 11 , wherein the second via is provided between the second wiring and the second wiring layer, and electrically connects the second wiring and the second wiring layer.

15. a third wiring layer including a first light-shielding electrode that covers the upper surface and a side surface of the light-emitting element and is electrically connected to the upper surface; The image display device according to claim 14 , wherein the first via is provided between the first wiring layer and the first light-shielding electrode, and electrically connects the first wiring layer and the first light-shielding electrode.

16. a second light-shielding electrode covering the upper surface and electrically connected to the upper surface; The image display device described in claim 14, wherein the first via is provided in a through hole having an inner diameter that includes the outer periphery of the second light-shielding electrode in a planar view, is provided between the first wiring layer and the second light-shielding electrode, and electrically connects the first wiring layer and the second light-shielding electrode.

17. The image display device according to claim 14 , wherein an internal angle between the first surface and a side surface of the light emitting element is smaller than 90°.

18. The image display device according to claim 11 , further comprising a light-shielding layer provided between the first insulating film and the second insulating film.

19. The image display device according to claim 11 , wherein the first insulating film has light reflectivity.

20. The image display device according to claim 11 , wherein the light emitting element includes a gallium nitride compound semiconductor.

21. The image display device according to claim 11 , wherein the light transmitting member includes a wavelength conversion member.

22. a light-transmitting member having a first surface; a first semiconductor layer including a light emitting surface on the first surface on which a plurality of light emitting regions can be formed; A plurality of light emitting layers provided on the first semiconductor layer and spaced apart from each other; a plurality of second semiconductor layers provided on the plurality of light emitting layers, the second semiconductor layers having a different conductivity type from the first semiconductor layers; a first insulating film covering the first surface, the first semiconductor layer, the plurality of light emitting layers, and the plurality of second semiconductor layers; a plurality of transistors spaced apart from one another on the first insulating film; a second insulating film covering the first insulating film and the plurality of transistors; a plurality of first vias provided through the first insulating film and the second insulating film; a first wiring layer provided on the second insulating film; Equipped with the second semiconductor layers and the light emitting layers are separated by the first insulating film; The image display device, wherein the plurality of first vias are provided between the first wiring layer and the plurality of second semiconductor layers, and electrically connect the first wiring layer and the plurality of second semiconductor layers, respectively.

23. a light-transmitting member having a first surface; A plurality of light emitting elements each including a light emitting surface and an upper surface opposite to the light emitting surface on the first surface; a first insulating film covering the first surface and the plurality of light emitting elements; A circuit element provided on the first insulating film; a second insulating film covering the first insulating film and the circuit element; a plurality of first vias provided through the first insulating film and the second insulating film; a first wiring layer provided on the second insulating film; Equipped with The plurality of first vias are provided between the first wiring layer and the upper surface, and electrically connect the first wiring layer and the upper surface, respectively.

Images