Industrial Robots

Abstract

To provide an industrial robot that enables teaching in a narrow place.SOLUTION: A first sensor 14 is so arranged that the optical axis of a light emitting element of the first sensor 14 and the optical axis of a light receiving element are parallel with a right-left direction. A second sensor 15 is so arranged that the optical axis of a light emitting element of the second sensor 15 and the optical axis of a light receiving element are parallel with a front-rear direction. To teach a position of a wafer 2 mounted on a mount part 3, a hand 4 is moved in the front-rear direction by a moving mechanism 9 to detect by the first sensor 14 a position of the mount part 3 or a teaching tool mounted on the mount part 3 in the front-rear direction, and the hand 4 is also moved in the right-left direction by the moving mechanism 9 to detect by the second sensor 15 the position of the mount part 3 or the teaching tool in the right-left direction.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to an industrial robot. [Background technology]

[0002] Conventionally, industrial robots that transport semiconductor wafers are known (see, for example, Patent Document 1). Patent Document 1 also describes an industrial robot that automatically teaches the position of a transport target object mounted on a mounting section. The industrial robot of Patent Document 1 includes a first sensor having a light-emitting element and a light-receiving element whose optical axis is parallel to the left-right direction, and a second sensor having a light-emitting element and a light-receiving element whose optical axis is inclined with respect to the front-rear and left-right directions and is horizontal. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-107378 A Summary of the Invention [Problem to be solved by the invention]

[0004] In conventional configurations, when a single teaching sensor is installed on the hand, sensing must be performed multiple times while changing the hand's entry angle, which increases the hand's range of movement and requires a large space to be secured for teaching.

[0005] Furthermore, in the configuration of Patent Document 1, for example, when there are multiple teaching objects, sensing must be performed multiple times while changing the hand's entry position, which increases the hand's range of movement and requires a large space to be secured for teaching.

[0006] The present invention has been made in consideration of the above circumstances, and has an object to provide an industrial robot that can be taught in a narrow space. [Means for solving the problem]

[0007] The industrial robot of the present invention is an industrial robot that carries an object to be transported into and carries the object from a mounting section on which the object is mounted, the industrial robot comprising: a hand that grasps the object to be transported and moves linearly in a horizontal direction; a movement mechanism that moves the hand in the first direction and the second direction when the object to be transported is transported relative to the mounting section, the movement mechanism defining a first direction as a direction of movement of the hand when the object to be transported is transported relative to the mounting section and a second direction as a direction perpendicular to the first direction and the up-down direction; and a first sensor and a second sensor that have a light emitting element and a light receiving element and are attached to the hand, the first sensor detecting light from the light emitting element of the first sensor. the second sensor is arranged so that the optical axis of the light-emitting element and the optical axis of the light-receiving element of the second sensor are parallel to the first direction, and when the position of the transported object mounted on the mounting part is taught, the hand is moved in the first direction by the moving mechanism to detect the position of the mounting part or a teaching jig mounted on the mounting part in the first direction by the first sensor, and the hand is moved in the second direction by the moving mechanism to detect the position of the mounting part or the teaching jig in the second direction by the second sensor. Effect of the Invention

[0008] According to the present invention, it is possible to provide an industrial robot that can be taught in a narrow space. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a side view showing a schematic configuration of an industrial robot 1 according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a plan view of the hand 4 shown in FIG. [Diagram 3] 2 is a diagram for explaining the operation of the industrial robot 1 shown in FIG. [Figure 4]1. FIG. 4 is a diagram for explaining the operation of the hand 4 when the robot 1 shown in FIG. 1 detects the vertical position of the first mount unit 3a. [Diagram 5] 1. FIG. 4 is a diagram for explaining the operation of the hand 4 when the robot 1 shown in FIG. 1 detects the position of the first mount unit 3a in the front-rear direction. [Figure 6] 1. FIG. 4 is a diagram for explaining the operation of the hand 4 when the robot 1 shown in FIG. 1 detects the left-right position of the first mounting unit 3a. [Figure 7] 1. FIG. 4 is a diagram for explaining the operation of the hand 4 when the robot 1 shown in FIG. 1 detects the left-right position of the second mounting portion 3b. [Figure 8] FIG. 2 is a plan view showing an example of a horizontal articulated robot to which a hand 4 is applied. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0011] (Configuration of industrial robots) Fig. 1 is a side view showing a schematic configuration of an industrial robot 1 according to an embodiment of the present invention. Fig. 2 is a plan view of a hand 4 shown in Fig. 1. Fig. 3 is a diagram for explaining the operation of the industrial robot 1 shown in Fig. 1.

[0012] The industrial robot 1 (hereinafter referred to as "robot 1") of this embodiment is a robot that transports a semiconductor wafer 2 (hereinafter referred to as "wafer 2"), which is an object to be transported. Specifically, the robot 1 is a robot that transports the wafer 2 to a mounting portion 3 on which the wafer 2 is mounted, and transports the wafer 2 from the mounting portion 3. The wafer 2 is formed in a disk shape. The mounting portion 3 is disposed, for example, inside a processing device that performs a predetermined process on the wafer 2. Furthermore, the mounting portion 3 of this embodiment is formed in a disk shape.

[0013] The robot 1 includes a hand 4 that grips the wafer 2, a pillar 5 that holds the hand 4 so that it can be raised and lowered, a base 6 that holds the pillar 5 so that it can move horizontally, and a lifting mechanism 8 that raises and lowers the hand 4 relative to the pillar 5. The robot 1 also includes a movement mechanism 9 that moves the hand 4 and the pillar 5 linearly in the horizontal direction relative to the base 6, and the hand 4 moves linearly in the horizontal direction when transporting the wafer 2.

[0014] In the following description, the direction parallel to the direction of gravity is defined as the up-down direction. The movement direction of the hand 4 when transporting the wafer 2 to the mounting part 3 (i.e., when loading and unloading the wafer 2 onto and from the mounting part 3) (Y direction shown in FIG. 1, etc.) is defined as the front-rear direction. The direction perpendicular to the up-down direction and the front-rear direction (X direction shown in FIG. 1, etc.) is defined as the left-right direction. In this embodiment, the front-rear direction is the first direction, and the left-right direction is the second direction.

[0015] The pillar 5 is formed in a vertically elongated pillar shape. The lifting mechanism 8 includes, for example, a ball screw rotatably attached to the pillar 5, a nut member that engages with the ball screw and is fixed to the hand 4, a motor that rotates the ball screw, and a guide that guides the hand 4 in the vertical direction. The lifting mechanism 8 is disposed inside the pillar 5, which is formed in a hollow shape.

[0016] The base portion 6 is formed in a block shape that is elongated in the front-rear direction. The movement mechanism 9 includes, for example, a ball screw rotatably attached to the base portion 6, a nut member that engages with the ball screw and is fixed to the pillar portion 5, a motor that rotates the ball screw, and a guide portion that guides the pillar portion 5 in the front-rear direction. The movement mechanism 9 is disposed inside the base portion 6 that is formed in a hollow shape, and moves the hand 4 and the pillar portion 5 in the front-rear direction. The movement mechanism 9 also includes a mechanism that moves the pillar portion 5 in the left-right direction.

[0017] The hand 4 is rotatable about a rotation axis T1 that is parallel to the front-rear direction. For example, the pillar 5 includes a rotation mechanism 10 such as a motor that rotates the hand 4 relative to the pillar 5 about the rotation axis T1.

[0018] The hand 4 includes, for example, two rod-shaped fork parts 11 and a fork support part 12 to which the base ends of the fork parts 11 are attached. The fork parts 11 are formed in a straight line. The two fork parts 11 are arranged substantially parallel to each other and arranged with a predetermined gap in the left-right direction. The gap between the two fork parts 11 is larger than the diameter of the mounting part 3. The two fork parts 11 are also arranged at the same position in the up-down direction. As shown in FIG. 2, the wafer 2 is mounted on the upper surfaces of the two fork parts 11. A gripping mechanism (not shown) for gripping the wafer 2 is attached to the upper surface side of the fork parts 11. The fork support part 12 is formed in a block shape and is held by the pillar part 5 so as to be movable up and down.

[0019] 2, a first sensor 14 and a second sensor 15 are attached to the hand 4. The first sensor 14 is a transmission type optical sensor including a light-emitting unit 16 having a light-emitting element and a light-receiving unit 17 having a light-receiving element. Similarly, the second sensor 15 is a transmission type optical sensor including a light-emitting unit 18 having a light-emitting element and a light-receiving unit 19 having a light-receiving element.

[0020] The light-emitting unit 16 is attached to a tip portion of one of the two fork portions 11, and the light-receiving unit 17 is attached to a tip portion of the other of the two fork portions 11. The light-emitting unit 16 and the light-receiving unit 17 are arranged to face each other in the left-right direction. That is, the first sensor 14 is arranged so that the optical axes L1 of the light-emitting unit 16 and the light-receiving unit 17 (specifically, the optical axes of the light-emitting element of the light-emitting unit 16 and the light-receiving element of the light-receiving unit 17) are parallel to the left-right direction.

[0021] The light-emitting unit 18 and the light-receiving unit 19 are attached to a side portion of the hand 4, specifically, to the left side of both sides of the fork support unit 12. In the example of Fig. 2, the light-emitting unit 18 and the light-receiving unit 19 are attached to both ends of a recess provided in the side portion of the hand 4, but the light-emitting unit 18 and the light-receiving unit 19 may also be attached to two protrusions provided in the side portion of the hand 4.

[0022] The light-emitting unit 18 and the light-receiving unit 19 are disposed so as to face each other in the front-rear direction. That is, the second sensor 15 is disposed so that the optical axes L2 of the light-emitting unit 18 and the light-receiving unit 19 (specifically, the optical axes of the light-emitting element of the light-emitting unit 18 and the light-receiving element of the light-receiving unit 19) are parallel to the front-rear direction. In addition, the distance between the light-emitting unit 18 and the light-receiving unit 19 is larger than the diameter of the mounting unit 3.

[0023] The robot 1 configured as described above loads and unloads the wafer 2 onto and from the mounting portion 3 by combining the up and down movement of the hand 4 with the horizontal movement in the forward and backward directions, as shown in (A) to (C) of Figures 3.

[0024] (Method of teaching the position of the wafer to be placed on the placement unit) FIG. 4 is a diagram for explaining the operation of the hand 4 when the robot 1 shown in FIG. 1 detects the vertical position of the first mounting unit 3a. FIG. 5 is a diagram for explaining the operation of the hand 4 when the robot 1 shown in FIG. 1 detects the front-rear position of the first mounting unit 3a. FIG. 6 is a diagram for explaining the operation of the hand 4 when the robot 1 shown in FIG. 1 detects the left-right position of the first mounting unit 3a. FIG. 7 is a diagram for explaining the operation of the hand 4 when the robot 1 shown in FIG. 1 detects the left-right position of the second mounting unit 3b. Here, a case will be described in which the positions of the first mounting unit 3a and the second mounting unit 3b, two units arranged horizontally, are detected as the mounting unit 3.

[0025] In this embodiment, based on the detection results of the vertical, front-rear, and left-right positions of the first mounting part 3a and the second mounting part 3b, auto-teach is performed to automatically teach the robot 1 the positions of the wafer (e.g., the wafer 2) to be mounted on the first mounting part 3a and the second mounting part 3b. That is, in this embodiment, when teaching the robot 1 the positions of the wafers to be mounted on the first mounting part 3a and the second mounting part 3b, the vertical, front-rear, and left-right positions of the first mounting part 3a and the second mounting part 3b are detected.

[0026] 4, the hand 4 is raised and lowered by the lifting mechanism 8 so that the optical axis L1 of the first sensor 14 passes through the first mounting unit 3a, and the vertical position of the first mounting unit 3a is detected by the first sensor 14. More specifically, the hand 4 is raised and lowered by the lifting mechanism 8, and the position of the lower or upper surface of the first mounting unit 3a is detected by the first sensor 14. The vertical position of the second mounting unit 3b can also be detected by a similar method.

[0027] Furthermore, when the vertical positions of the first mounting portion 3a and the second mounting portion 3b are the same, the detected vertical position of the first mounting portion 3a may be recognized as the vertical position of the second mounting portion 3b, and the operation of detecting the vertical position of the second mounting portion 3b may be omitted.

[0028] 5, the hand 4 is moved in the front-rear direction by the movement mechanism 9 so that the optical axis L1 of the first sensor 14 passes through the mounting unit 3, and the first sensor 14 detects the front-rear position of the mounting unit 3. More specifically, the hand 4 is moved in the front-rear direction by the movement mechanism 9, and the first sensor 14 detects the position of the side surface of the mounting unit 3. The front-rear position of the second mounting unit 3b can also be detected in a similar manner.

[0029] 6, the hand 4 is moved between the first mounting portion 3a and the second mounting portion 3b, and then the moving mechanism 9 moves the hand 4 in the left-right direction so that the optical axis L2 of the second sensor 15 passes through the first mounting portion 3a, and the left-right position of the first mounting portion 3a is detected by the second sensor 15. More specifically, the hand 4 is moved in the left-right direction by the moving mechanism 9, and the second sensor 15 detects the position of the side surface of the first mounting portion 3a.

[0030] 7, the hand 4 is inverted about the rotation axis T1 by the rotation mechanism 10 from the state shown in FIG. 6, the hand 4 is moved in the left-right direction by the movement mechanism 9 so that the optical axis L2 of the second sensor 15 passes through the second mounting part 3b, and the left-right position of the second mounting part 3b is detected by the second sensor 15. More specifically, the hand 4 is moved in the left-right direction by the movement mechanism 9, and the position of the side surface of the second mounting part 3b is detected by the first sensor 14. This makes it possible to detect the positions of the first mounting part 3a and the second mounting part 3b while reducing the movement range of the hand 4.

[0031] The vertical position detection shown in Fig. 4, the front-rear position detection shown in Fig. 5, and the left-right position detection shown in Fig. 6 and Fig. 7 can be performed in any order. As an example, the vertical position detection shown in Fig. 4 can be first performed to adjust the vertical position of the hand 4, and then the front-rear position detection shown in Fig. 5 can be performed to roughly recognize the position of the teaching object (for example, the first mounting unit 3a), and then the left-right position detection shown in Fig. 6 and Fig. 7 can be performed.

[0032] Alternatively, the vertical position of the hand 4 may be adjusted by first detecting the vertical position shown in Fig. 4, and then the horizontal position detection shown in Fig. 6 and Fig. 7 may be performed to roughly recognize the position of the teaching object (e.g., the first mounting unit 3a), and then the front-rear position detection shown in Fig. 5 may be performed. Also, if the rough vertical position of the teaching object is known, the vertical position detection shown in Fig. 4 may be performed after the front-rear position detection shown in Fig. 5 and the left-right position detection shown in Fig. 6 and Fig. 7.

[0033] (Main effects of this form) Thus, in this embodiment, the hand 4 is provided with a first sensor 14 in which the optical axis of the light-emitting element and the optical axis of the light-receiving element are parallel to the left-right direction (second direction), as well as a second sensor 15 in which the optical axis of the light-emitting element and the optical axis of the light-receiving element are parallel to the front-back direction (first direction).

[0034] As a result, for example, after first detecting the position of the mounting unit 3 in the front-rear direction using the first sensor 14, the position of the mounting unit 3 in the left-right direction can be detected using the second sensor 15 without substantially changing the attitude (direction) of the hand 4. Alternatively, after first detecting the position of the mounting unit 3 in the left-right direction using the second sensor 15, the position of the mounting unit 3 in the front-rear direction can be detected using the first sensor 14 without substantially changing the attitude (direction) of the hand 4. Therefore, the approach angle of the hand 4 required for teaching (swing width of the hand 4) can be reduced. This makes it possible to perform teaching in a narrow space.

[0035] Furthermore, by providing a rotation mechanism 10 that rotates the hand 4 about a rotation axis T1 parallel to the front-rear direction (first direction), after detecting the left-right position of the first mounting unit 3a, the hand 4 can be inverted about the rotation axis T1 by the rotation mechanism 10, and the left-right position of the second mounting unit 3b can be detected. As a result, when there are multiple teaching objects (for example, the first mounting unit 3a and the second mounting unit 3b), even if the second sensor 15 is provided on only one of the sides of the hand 4, the positions of the first mounting unit 3a and the second mounting unit 3b can be detected while reducing the movement range of the hand 4.

[0036] (Other embodiments) The above-described embodiment is one example of a preferred embodiment of the present invention, but the present invention is not limited to this embodiment and various modifications are possible without departing from the spirit and scope of the present invention.

[0037] In the embodiment described above, the first sensor 14 and the second sensor 15 detect, for example, the vertical, front-rear, and left-right positions of the mounting part 3, and teach the robot 1 the position of the wafer 2 mounted on the mounting part 3 based on the detection results. In addition, for example, a teaching jig may be mounted on the mounting part 3 when teaching the robot 1 the position of the wafer 2 mounted on the mounting part 3. In this case, similar to the embodiment described above, the vertical, front-rear, and left-right positions of the teaching jig are detected by the first sensor 14 and the second sensor 15, and the position of the wafer 2 mounted on the mounting part 3 is taught to the robot 1 based on the detection results.

[0038] In the embodiment described above, the wafer 2 is mounted and gripped on the upper surface of the hand 4 (specifically, on the upper surfaces of the two fork parts 11). Alternatively, for example, the wafer 2 may be fixed to a predetermined wafer holder, the two fork parts 11 are configured to be movable in the left-right direction, and a predetermined portion of the wafer holder is sandwiched between the two fork parts 11, thereby gripping the wafer 2 in the hand 4. That is, the wafer 2 may be gripped by the hand 4 via the wafer holder. Also, in this case, a predetermined portion of the wafer holder may be mounted on the mounting part 3. That is, the wafer 2 may be mounted on the mounting part 3 via the wafer holder.

[0039] In the embodiment described above, the first sensor 14 and the second sensor 15 are transmissive optical sensors, but the first sensor 14 and the second sensor 15 may be reflective optical sensors.

[0040] In the embodiment described above, the mounting portion 3 is formed in a disk shape, but the mounting portion 3 may be formed in a shape other than a disk shape. For example, the mounting portion 3 may be formed in an elliptical plate shape, a polygonal plate shape such as a square plate shape, or a block shape having a predetermined shape. In addition, when the mounting portion 3 is formed in a shape other than a disk shape, a teaching tool may be mounted on the mounting portion 3, and the vertical position, front-rear position, and left-right position of the teaching tool may be detected by the first sensor 14 and the second sensor 15, and the position of the wafer 2 mounted on the mounting portion 3 may be taught to the robot 1 based on the detection result.

[0041] In the above-mentioned embodiment, the robot 1 may be provided with an extendable arm to the tip of which the hand 4 is rotatably connected. In this case, the base end of the arm is rotatably connected to the column 5. The hand 4 moves linearly in the front-rear direction by the extension and contraction of the arm. In the above-mentioned embodiment, the robot 1 may be provided with a rotation mechanism that rotates the column 5 about the vertical direction as the axis of rotation. In the above-mentioned embodiment, the object to be transported by the robot 1 is the wafer 2, but the object to be transported by the robot 1 may be something other than the wafer 2, such as a glass substrate.

[0042] Although the above description has been given of a configuration in which the hand 4 is applied to the robot 1, the hand 4 is not limited to the robot 1, and can be applied to various robots that have a hand for transporting an object to be transported, such as a wafer 2, and that perform teaching (auto-teach). Fig. 8 is a plan view showing an example of a horizontal articulated robot to which the hand 4 is applied. The above hand 4 can also be applied to, for example, an industrial robot 81 shown in Fig. 8.

[0043] The industrial robot 81 is a horizontal articulated robot for transporting a wafer 2 as a transport object. The industrial robot 81 includes a hand 4 on which the semiconductor wafer 2 is mounted, an arm 87 to which the tip end of the hand 4 is rotatably connected, and a main body 85 to which the base end of the arm 87 is rotatably connected.

[0044] The main body 85 is formed in a substantially rectangular prism shape. An arm lifting mechanism (not shown) for lifting the arm 87 is housed inside the main body 85. The arm 87 is composed of a first arm portion 88 and a second arm portion 89. The first arm portion 88 and the second arm portion 89 are formed in a hollow shape. The base end side of the first arm portion 88 is rotatably connected to the main body 85. The base end side of the second arm portion 89 is rotatably connected to the tip side of the first arm portion 88. The industrial robot 81 also includes a first arm drive mechanism (not shown) for rotating the first arm portion 88 relative to the main body 85, and a second arm drive mechanism (not shown) for rotating the second arm portion 89 relative to the first arm portion 88.

[0045] The hand 4 is rotatably connected to the tip end of the second arm unit 89. The hand 4 is rotatable about a rotation center C1 (see FIG. 1) when viewed from the top-bottom direction. The main body unit 85, the first arm unit 88, the second arm unit 89, and the hand 4 are arranged in this order from the bottom up in the top-bottom direction. The industrial robot 81 also has a hand drive mechanism (not shown) including a motor for rotating the hand 4.

[0046] In this industrial robot 81 as well, like the robot 1, teaching using the hand 4 can be performed.

[0047] As described above, the present specification discloses the following:

[0048] (1) 1. An industrial robot that carries an object to be transported into a mounting section on which the object is mounted and carries the object out of the mounting section, a hand that holds the object to be transported and moves it linearly in a horizontal direction; a moving mechanism that moves the hand in the first direction and the second direction, where a moving direction of the hand when the object is moved relative to the mounting portion is defined as a first direction and a direction perpendicular to the first direction and the up-down direction is defined as a second direction; a first sensor and a second sensor each having a light emitting element and a light receiving element and attached to the hand; the first sensor is disposed such that an optical axis of the light-emitting element and an optical axis of the light-receiving element of the first sensor are parallel to the second direction; the second sensor is disposed such that an optical axis of the light-emitting element and an optical axis of the light-receiving element of the second sensor are parallel to the first direction; when the position of the transported object mounted on the mounting section is taught, the hand is moved in the first direction by the moving mechanism, and the position of the mounting section or the teaching jig mounted on the mounting section in the first direction is detected by the first sensor, and the hand is moved in the second direction by the moving mechanism, and the position of the mounting section or the teaching jig in the second direction is detected by the second sensor. Industrial robot.

[0049] With the configuration as in (1), for example, after first detecting the position of the mounting part in the first direction using the first sensor, it is possible to detect the position of the mounting part in the second direction using the second sensor without substantially changing the attitude (direction) of the hand. Alternatively, after first detecting the position of the mounting part in the second direction using the second sensor, it is possible to detect the position of the mounting part in the first direction using the first sensor without substantially changing the attitude (direction) of the hand. Therefore, it is possible to reduce the approach angle of the hand (swing width of the hand) required for teaching. This makes it possible to perform teaching in a narrow space.

[0050] (2) The industrial robot according to (1), A lifting mechanism for lifting and lowering the hand is provided, when the position of the transport object to be mounted on the mounting part is taught, the hand is raised and lowered by the lifting mechanism, and the first sensor detects the vertical position of the mounting part or the teaching jig. Industrial robot.

[0051] With the configuration as in (2), it is also possible to teach the vertical position of the transport object placed on the loading section.

[0052] (3) The industrial robot according to (1) or (2), a rotation mechanism that rotates the hand around a rotation axis parallel to the first direction, the second sensor is provided on either one of both side surfaces of the hand when the first direction is a front-rear direction, The mounting portion includes a first mounting portion and a second mounting portion that are located at different horizontal positions, when the positions of the objects to be transported mounted on the first mounting unit and the second mounting unit are to be taught, the hand is moved in the second direction by the moving mechanism, and the position in the second direction of the teaching jig mounted on the first mounting unit or the first mounting unit is detected by the second sensor, the hand is then inverted around the rotation axis by the rotation mechanism, the hand is moved in the second direction by the moving mechanism, and the position in the second direction of the second mounting unit or the teaching jig mounted on the second mounting unit is detected by the second sensor. Industrial robot.

[0053] With the configuration as in (3), after detecting the left-right position of the first mounting unit, the hand can be inverted by the rotation mechanism to detect the left-right position of the second mounting unit. This makes it possible to detect the positions of the first mounting unit and the second mounting unit while reducing the moving range of the hand, even if the second sensor is provided on only one of the sides of the hand when there are multiple teaching objects. [Explanation of symbols]

[0054] 1. Robots (industrial robots) 2. Wafer (semiconductor wafer) 3 Mounting section 3a 1st loading section 3b 2nd loading section 4 Hands 5 Pillar part 6 Base 8 Lifting mechanism 9 Moving mechanism 10 Rotation mechanism 11 Fork section 12 Fork support 14 First Sensor 15 Second Sensor 16,18 Light emitting part 17,19 Light receiving part 81 Industrial Robots 85 Main body 87 Arm 88 First Arm 89 Second Arm

Claims

1. 1. An industrial robot that carries an object to be transported into a mounting section on which the object is mounted and carries the object out of the mounting section, a hand that holds the object to be transported and moves it linearly in a horizontal direction; a moving mechanism for moving the hand in the first direction and the second direction, the moving direction of the hand when the object is moved relative to the mounting portion being a first direction and a direction perpendicular to the first direction and the up-down direction being a second direction; a first sensor and a second sensor each having a light emitting element and a light receiving element and attached to the hand; the first sensor is disposed such that an optical axis of the light-emitting element and an optical axis of the light-receiving element of the first sensor are parallel to the second direction; the second sensor is disposed such that an optical axis of the light-emitting element and an optical axis of the light-receiving element of the second sensor are parallel to the first direction; when the position of the transported object mounted on the mounting section is taught, the hand is moved in the first direction by the moving mechanism, and the position of the mounting section or the teaching jig mounted on the mounting section in the first direction is detected by the first sensor, and the hand is moved in the second direction by the moving mechanism, and the position of the mounting section or the teaching jig in the second direction is detected by the second sensor. Industrial robot.

2. 2. The industrial robot according to claim 1, A lifting mechanism for lifting and lowering the hand is provided, when the position of the transport object to be mounted on the mounting portion is to be taught, the hand is raised and lowered by the lifting mechanism, and the first sensor detects the vertical position of the mounting portion or the teaching jig. Industrial robot.

3. 3. The industrial robot according to claim 1, a rotation mechanism that rotates the hand around a rotation axis parallel to the first direction, the second sensor is provided on either one of both side surfaces of the hand when the first direction is a front-rear direction, The mounting portion includes a first mounting portion and a second mounting portion aligned in the second direction, when the positions of the objects to be transported mounted on the first mounting unit and the second mounting unit are to be taught, the hand is moved in the second direction by the moving mechanism, and the position in the second direction of the first mounting unit or the teaching jig mounted on the first mounting unit is detected by the second sensor, the hand is then inverted around the rotation axis by the rotation mechanism, the hand is moved in the second direction by the moving mechanism, and the position in the second direction of the second mounting unit or the teaching jig mounted on the second mounting unit is detected by the second sensor. Industrial robot.

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