Inspection Systems

Abstract

To provide an inspection system capable of detecting high-energy photons or charged particles.SOLUTION: An image sensor for short-wavelength light and charged particles includes a semiconductor membrane, circuit elements formed on one surface of the semiconductor membrane, and a pure boron layer on the other surface of the semiconductor membrane. This image sensor has high efficiency and good stability even under continuous use at high flux for multiple years. The image sensor may be fabricated using CCD (charge coupled device) or CMOS (complementary metal oxide semiconductor) technology. The image sensor may be a two-dimensional area sensor, or a one-dimensional array sensor. The image sensor can be included in an electron-bombarded image sensor and / or in an inspection system.SELECTED DRAWING: Figure 3G

Description

[Technical field]

[0001] Related Applications This application claims priority to U.S. Provisional Patent Application No. 61 / 622,295, filed April 10, 2012, by Chern et al., entitled “BACK-ILLUMINATED CCD WITH PURE-BORON COATING FOR EUV AND VUV APPLICATION IN MASK AND WAFER INSPECTION,” and U.S. Provisional Patent Application No. 61 / 658,758, filed June 12, 2012, by Chuang et al., entitled “ELECTRON-BOMBARDED CCD AND INSPECTION SYSTEMS USING ELECTRON-BOMBARDED CCD DETECTORS,” both of which are incorporated herein by reference.

[0002] This application is also related to U.S. patent application Ser. No. 13 / 710,315, entitled “ELECTRON-BOMBARDED CHARGE-COUPLED DEVICE AND INSPECTION SYSTEMS USING EBCCD DETECTORS,” filed Dec. 10, 2012 by Chuang et al., which claims priority to U.S. Provisional Patent Application Ser. No. 61 / 569,611, entitled “ELECTRON-BOMBARDED CHARGE-COUPLED DEVICE AND INSPECTION SYSTEMS USING EBCCD DETECTORS,” filed Dec. 12, 2011 by Chuang et al. This application is also related to U.S. Provisional Patent Application No. 61 / 735,427, entitled “METHOD AND APPARATUS FOR HIGH SPEED ACQUISITION OF MOVING IMAGES USING PULSED ILLUMINATION,” filed Dec. 10, 2012 by Brown et al., all of which are incorporated herein by reference.

[0003] This application relates to image sensors suitable for sensing radiation at deep ultraviolet (DUV), vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) wavelengths and methods of making such image sensors. Some embodiments of the sensors are suitable for sensing electrons and other charged particles. All of these sensors are suitable for use in photomask, reticle or wafer inspection systems. [Background technology]

[0004] The integrated circuit industry requires inspection tools with ever-increasing resolution to resolve ever-smaller features on integrated circuits, photomasks, reticles, solar cells, charge-coupled devices, and the like, and to detect defects having sizes comparable to or smaller than those feature sizes.

[0005] Inspection systems operating at short wavelengths, e.g., wavelengths shorter than about 250 nm, can often provide such resolution. In other cases, electrons or other charged particles, such as helium (He) nuclei (i.e., alpha particles), may be used. In particular, for photomask or reticle inspection, it is desirable to perform the inspection using wavelengths that are the same as or close to those used in lithography, i.e., near 193.4 nm for current generation lithography and near 13.5 nm for future EUV lithography, since the phase shift of the inspection light caused by the pattern is the same as or very close to the phase shift that occurs during lithography. For inspecting semiconductor patterned wafers, an inspection system that operates over a relatively wide wavelength range, such as a wavelength range that includes wavelengths in the near ultraviolet, DUV, and / or VUV ranges, may be advantageous because the wide wavelength range may reduce sensitivity to small changes in layer thickness or pattern dimensions that may cause large changes in reflectivity at individual wavelengths.

[0006] A high signal-to-noise ratio is required to detect small defects or particles on photomasks, reticles and semiconductor wafers. Since the statistical fluctuations in the number of detected photons (Poisson noise) are the fundamental limit of the signal-to-noise ratio, a high photon or particle flux density is required to ensure a high signal-to-noise ratio for inspection at high speeds. In many cases, about 100,000 or more photons per pixel are required. Since inspection systems are typically used 24 hours per day with only short stops, the detectors are exposed to a large amount of radiation even after only a few months of operation.

[0007] Photons at a vacuum wavelength of 250 nm have an energy of about 5 eV. The band gap of silicon dioxide is about 10 eV. Although photons at such wavelengths are not expected to be absorbed by silicon dioxide, silicon dioxide grown on a silicon surface necessarily has some dangling bonds at the interface with silicon, since the silicon dioxide structure cannot perfectly match that of the silicon crystal. Moreover, since silicon dioxide is amorphous, dangling bonds are likely to be present within the material as well. In fact, a non-negligible density of defects and impurities that can absorb photons with deep ultraviolet wavelengths, especially wavelengths shorter than about 250 nm, will be present not only in the oxide but also at the interface with the underlying semiconductor. Furthermore, under high radiation flux density, two high-energy photons may arrive near the same location within a very short time interval (nanoseconds or picoseconds), which may give rise to excited electrons in the conduction band of silicon dioxide due to two absorption events in rapid succession or two-photon absorption. EUV photons have very high energy (13.5 nm wavelength corresponds to photon energy close to 92 eV) and can not only break silicon-oxygen bonds but also strongly interact with defects and contaminants in oxides. Electron and charged particle detectors must usually detect electrons or charged particles with energies of hundreds of eV or more. Energies greater than 10 eV can easily break silicon-oxygen bonds.

[0008] As mentioned above, high energy photons and particles can break bonds and ionize atoms in the silicon dioxide layer. Because silicon dioxide is a good insulator, free electrons that are created in the silicon dioxide can have a lifetime of milliseconds or longer before recombining. Some of these electrons can migrate to the semiconductor material. These electrons generate electric fields in the silicon dioxide and between the silicon dioxide and the semiconductor. These electric fields cause electrons created in the semiconductor by the absorption of photons to migrate to the surface of the semiconductor and recombine, thereby causing a loss of signal and a decrease in the quantum efficiency of the detector. Near-continuous use of the device means that there can be little or no time for recovery of the detector, since new free charges are created as fast or faster than they can recombine.

[0009] High energy particles and photons can cause irreversible changes in silicon dioxide. Such changes can include rearrangements of atomic bonds or movement of small atoms in the silicon dioxide. These changes will not be reversible at the normal operating temperatures of the detector, which typically range from near room temperature to about 50°C. In particular, conventional silicon photodiodes used as EUV detectors are known to lose efficiency with use.

[0010] Silicon dioxide layers on the surface of semiconductor detectors greatly reduce the efficiency of these detectors for low energy (less than about 2 kV) electrons. Some low energy electrons are absorbed by the silicon dioxide, causing it to charge and deflect subsequently arriving electrons. Since native oxide always forms on exposed silicon surfaces, silicon detectors will inevitably have some oxide on their surface. The growth or deposition of alternative dielectric materials (instead of oxide) on the surface of the semiconductor will result in a much higher density of defect states at the silicon dioxide-semiconductor interface. These defects reduce the quantum efficiency of the detector, especially for photons or charged particles absorbed near the surface of the semiconductor.

[0011] A further cause of degradation of EUV sensors is that in EUV systems, a thin layer of carbon builds up over time on all surfaces exposed to EUV radiation, including the surfaces of the image sensor and optical elements. As this carbon layer thickens, it absorbs EUV radiation, reducing the sensitivity of the sensor and reducing the reflectivity of the optical elements in the light path. In EUV systems, all surfaces exposed to EUV are periodically cleaned to remove the carbon. This cleaning is typically done with activated hydrogen (a mixture of atomic hydrogen and hydrogen radicals), which is very effective at removing carbon. However, hydrogen radicals can also affect the oxides on the surfaces of silicon detectors, causing degradation of the performance of those sensors.

[0012] Diode detectors suitable for detecting EUV and / or electrons are known in the art. Exemplary diode detectors are described in U.S. Patent No. 8,138,485 issued to Nihtianov on March 20, 2012, U.S. Patent No. 7,586,108 issued to Nihtianov on September 8, 2009, U.S. Patent Application Publication No. 2012 / 0268722 published on October 25, 2012 (filed by Nihtianov) and U.S. Patent Application Publication No. 2011 / 0169116 published on July 14, 2011 (filed by Nanver). These diode detectors include a thin (1 nm to 20 nm) layer of boron just above the silicon surface. U.S. Patent Application Publication No. 2011 / 0169116 further describes an open mesh of metal conductors on the surface of such detectors. [Prior art documents] [Patent documents]

[0013] [Patent Document 1] U.S. Patent No. 8,138,485 [Patent Document 2] U.S. Patent No. 7,586,108 [Patent Document 3] US Patent Application Publication No. 2012 / 0268722 [Patent Document 4] US Patent Application Publication No. 2011 / 0169116 Summary of the Invention [Problem to be solved by the invention]

[0014] These prior art detectors have contacts formed on the top (light or electron incident) surface. A drawback of having contacts and conductors on the illumination surface is that it is not possible to form detectors with a large number (thousands or millions) of detector elements (pixels) while maintaining high detector efficiency. Each detector element requires multiple control signals, which are typically shared with other detector elements. At full well capacities of 100,000 electrons or more, the dimensions of the detector elements may typically range from about 10 μm to 20 μm. It is not possible to create hundreds or thousands of interconnects that connect these control signals together and drive the circuits without covering a significant percentage of the surface area. DUV, VUV and EUV photons and low energy particles do not penetrate layers of conductors such as metals and polysilicon, so areas covered by these conductors have low or no sensitivity.

[0015] Therefore, a need arises for an image sensor capable of detecting high energy photons or charged particles while overcoming the above disadvantages. [Means for solving the problem]

[0016] Methods are described for fabricating image sensors for imaging DUV, VUV and / or EUV radiation and / or charged particles with high quantum efficiency. Image sensors fabricated according to these methods are capable of long-life operation under high fluxes of DUV, VUV, EUV and / or charged particles. These methods include processing steps for forming light-sensing active and / or passive circuit elements in layers on a semiconductor (preferably silicon) wafer.

[0017] An exemplary method for fabricating an image sensor includes forming an epitaxial layer on a substrate, forming a gate layer on the epitaxial layer, the gate layer comprising one or more layers of dielectric material such as silicon dioxide and silicon nitride, forming circuit elements on the gate layer comprising polysilicon and dielectric material but no metal film or metal interconnects, thinning the substrate to create a thinned substrate (also referred to herein as a film) and exposing at least a portion of the epitaxial layer, and forming a pure boron layer directly on the exposed portion of the epitaxial layer. As used herein, the term "circuit elements" refers to light sensitive devices such as charge coupled devices and photodiodes, and other semiconductor devices such as transistors, diodes, resistors and capacitors, and the interconnects (often referred to as interconnects) therebetween. In this first exemplary embodiment, the circuit elements formed prior to boron deposition do not include any metal interconnects. These circuit elements are formed using standard semiconductor fabrication processes, including, but not limited to, photolithography, deposition, etching, ion implantation, and annealing. Thinning of the sample (e.g., wafer) may be performed using chemical etching and / or polishing. Among other things, this thinning may increase the sensitivity of the image sensor to light incident on the backside surface. An anti-reflective or conductive coating may be formed on the boron layer. This anti-reflective or conductive coating may increase the transmission of desired wavelengths to the image sensor and / or protect the image sensor. In one embodiment, after thinning of the substrate and prior to the formation of the boron layer, at least one exposed portion of the epitaxial layer may be doped. After the boron layer is deposited on the backside surface, the circuitry on the frontside surface may be completed, including the formation of metal interconnects.

[0018] Another method of manufacturing an image sensor includes forming an epitaxial layer on a substrate and then forming circuit elements on the epitaxial layer. This step may include forming metal interconnects. Either a handling wafer or a protective layer may be formed on the circuit elements. The substrate is then thinned to expose at least a portion of the epitaxial layer. As described above, this thinning may increase the sensitivity of the image sensor to light incident on the backside surface. A pure boron layer is formed on the surface of the epitaxial layer exposed in the thinning process. An anti-reflective or conductive coating may be formed on the boron layer. This anti-reflective or conductive coating may increase the transmission of desired wavelengths to the image sensor and / or protect the image sensor.

[0019] Image sensors having high quantum efficiency and long lifetime operation for DUV, VUV and / or EUV radiation and / or charged particles are described. These image sensors are thinned from the backside so that they are highly sensitive to radiation or charged particles incident on the backside of the image sensor (where the image sensor is back-illuminated). Deposited directly on the backside surface of the epitaxial layer is a thin (e.g., between about 2 nm and about 20 nm thick) layer of high purity amorphous boron. In some embodiments, additional layers of material may be coated on the boron. The thickness and material of each layer may be selected to increase the transmission of desired wavelengths to the image sensor and / or to protect the image sensor.

[0020] The image sensors described herein may be fabricated using CCD (charge-coupled device) or CMOS (complementary metal-oxide semiconductor) technology. The image sensor may be a two-dimensional area sensor or a one-dimensional array sensor.

[0021] An electron bombarded image sensor is described herein. The electron bombarded image sensor includes a photocathode that emits electrons when it absorbs a photon or a charged particle. The emitted electrons are accelerated towards a solid-state image sensor, such as a CCD or CMOS image sensor. The image sensor includes a pure boron layer deposited directly on a thinned substrate, as described above, thus ensuring that almost all electrons that strike it penetrate the device. This high level of penetration allows the electron bombarded image sensor to use low acceleration voltages (e.g., acceleration voltages less than 2 kV or less than 1 kV, etc.), thereby achieving better image resolution and longer sensor life.

[0022] A system for inspecting a sample is also described. The system includes a light source for illuminating the sample and two illumination relays. The image relay optics are configured to direct the light output, i.e., reflection and / or transmission, of the sample to a first channel image mode relay when the light output corresponds to the first channel illumination relay, and to a second channel image mode relay when the light output corresponds to the second channel illumination relay. The sensor is configured to receive the relay outputs of the first channel image mode relay and the second channel image mode relay. The sensor includes a semiconductor film, where the circuit elements are formed on one surface of the film and a boron layer is deposited on the opposite surface of the film. In this configuration, the sensor can simultaneously detect two images of the same sample.

[0023] An exemplary inspection system is also described. The inspection system includes a light source, optics, and a detector. The optics are configured to direct and focus radiation from the light source onto the sample. The detector is configured to receive reflected or scattered light from the sample, where the optics are further configured to collect, direct, and focus the reflected or scattered light onto the detector. The detector may include one or more image sensors. At least one image sensor includes a semiconductor film, where the semiconductor film includes circuit elements formed on one surface of the semiconductor film, and a boron layer is deposited on an opposite surface of the semiconductor film. [Brief description of the drawings]

[0024] [Figure 1] 1 illustrates an exemplary method for manufacturing an image sensor. [Diagram 2] An alternative exemplary technique 120 for manufacturing an image sensor is shown. [Figure 3A] 2 illustrates an exemplary cross-section of a wafer following the method described with respect to FIG. 1. [Figure 3B] 2 illustrates an exemplary cross-section of a wafer following the method described with respect to FIG. 1. [Figure 3C] 2 illustrates an exemplary cross-section of a wafer following the method described with respect to FIG. 1. [Figure 3D] 2 illustrates an exemplary cross-section of a wafer following the method described with respect to FIG. 1. [Figure 3E] 2 illustrates an exemplary cross-section of a wafer following the method described with respect to FIG. 1. [Figure 3F] 2 illustrates an exemplary cross-section of a wafer following the method described with respect to FIG. 1. [Figure 3G] 2 illustrates an exemplary cross-section of a wafer following the method described with respect to FIG. 1. [Figure 4A] 3 illustrates an exemplary cross-section of a wafer following the method described with reference to FIG. 2. [Figure 4B] 3 illustrates an exemplary cross-section of a wafer following the method described with reference to FIG. 2. [Figure 4C] 3 illustrates an exemplary cross-section of a wafer following the method described with reference to FIG. 2. [Figure 4D] 3 illustrates an exemplary cross-section of a wafer following the method described with reference to FIG. 2. [Figure 4E] 3 illustrates an exemplary cross-section of a wafer following the method described with reference to FIG. 2. [Figure 4F] 3 illustrates an exemplary cross-section of a wafer following the method described with reference to FIG. 2. [Figure 4G] 3 illustrates an exemplary cross-section of a wafer following the method described with reference to FIG. 2. [Diagram 5]1 illustrates an exemplary electron-bombarded image sensor system. [Figure 6] 4 illustrates exemplary drive voltages for clock signals for any image sensor incorporating a CCD as described herein. [Figure 7A] 1 illustrates an exemplary split readout image sensor that includes two sets of readout circuits. [Figure 7B] A number of CCD drivers are shown, each driving a set of gate electrodes having multiple gates. [Figure 8] 1 illustrates a reticle, photomask or wafer inspection system capable of simultaneously detecting two channels of images or signals on one sensor. [Figure 9] 1 illustrates an exemplary detector assembly incorporating an image sensor, a silicon interposer, and other electronics. [Figure 10] 1 illustrates an exemplary sensor module array including a plurality of time delay integration (TDI) sensor modules. [Figure 11] 1 illustrates an exemplary inspection system configured to measure a sample, such as a wafer, reticle, or photomask. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] FIG. 1 shows an exemplary technique 100 for manufacturing an image sensor. In step 101, circuit elements may be formed using standard semiconductor processing steps such as lithography, deposition, ion implant, annealing, and etching. CCD and / or CMOS sensor elements and devices may also be formed during step 101. These circuit elements are formed in an epitaxial layer on the front surface of the wafer, and are therefore also referred to as front-side circuit elements. In a preferred embodiment, the epitaxial (epi) layer is about 20 μm to 40 μm thick. In a preferred embodiment, both the epi layer and the substrate are doped with a p-type dopant (e.g., boron), however, the bulk wafer (hereinafter and in the figures will be referred to as p-type dopant). + Rather than the epitaxial layer having a very low dopant concentration (hereafter and in the figures, p -The epitaxial layer has a resistivity of about 10-100 Ω cm and the substrate has a resistivity of less than about 0.01 Ω cm. Although polysilicon interconnects may be formed in step 101, metal interconnects are generally not formed because the metal would be damaged in subsequent high temperature processing steps.

[0026] In step 103, the active sensor area or even the entire wafer may be thinned from the backside. This thinning typically involves a combination of polishing and etching to expose the epi layer. In one embodiment, the wafer is polished from the backside until the wafer is about 200 μm to 300 μm thick. The front surface and the frame area around the active sensor area are then protected with a material such as photoresist or other suitable material. A chemical etchant is then used to etch away the bulk wafer above the active sensor area, thereby exposing the active sensor area. Because the bulk wafer has a much higher dopant concentration and defect density than the epi layer, the etching rate of the bulk semiconductor material is much higher than that of the epi layer. The etching process slows down when it reaches the epi layer, thereby resulting in a membrane area of ​​uniform thickness. In another embodiment, the image sensor wafer is bonded to a handling wafer, which may be made of quartz, silicon, sapphire, or other materials. A polishing process is then used to polish the entire wafer until only the epi layer remains.

[0027] In step 105, a protective layer may be deposited on the front side surface to protect the front side circuit elements during steps 107-111. In particular, any exposed silicon or polysilicon on the front side surface needs to be protected because boron tends to deposit preferentially on silicon. In some embodiments, step 105 may be performed before step 103, such that the protective layer may provide additional protection to the front side surface during the backside thinning process (step 103). In some embodiments, the protective layer may comprise a silicon nitride layer deposited using, for example, plasma enhanced CVD deposition.

[0028] In step 107, the backside surface may be cleaned and prepared for boron deposition. During this cleaning, native oxide and any contaminants, including organic compounds and metals, should be removed from the backside surface. In one preferred embodiment, cleaning may be performed using a dilute HF solution or an RCA cleaning process, which is a well-known set of wafer cleaning steps that includes removal of organic contaminants, thin oxide layers, and ionic contaminants. After cleaning and during preparation, the wafer is preferably dried using a Marangoni drying technique (a surface tension-based drying technique) or similar technique to leave the surface dry and free of watermarks. In a preferred embodiment, the wafer is protected in a controlled atmosphere (e.g., using dry nitrogen) during steps 107-109 to minimize native oxide regrowth.

[0029] In step 109, the wafer may be held at an elevated temperature for several minutes in a reducing environment, such as dilute or low pressure hydrogen gas. In a preferred embodiment, the wafer may be held at a temperature of about 800° C. for about 4 minutes. This elevated temperature may remove any native oxide layer that may have regrown after step 107.

[0030] In step 111, an amorphous layer of pure boron is deposited on the backside surface. In one preferred embodiment, this deposition can be performed using a mixture of diborane and hydrogen gas at a temperature of about 700-800° C. to form a high purity amorphous boron layer. The thickness of the boron layer depends on the intended application for the sensor. Typically, the thickness of the boron layer is between about 2 nm and 20 nm. The minimum thickness is generally limited by the need for a uniform film without pinholes. The maximum thickness generally depends on the absorption of photons or desired charged particles by the boron. It is noted that steps 109 and 111 can be performed in the same process equipment, preferably in the same process chamber, so that steps 109 and 111 can be reliably performed in quick succession without the possibility of surface contamination or oxide growth between the steps. Further details regarding boron deposition can be found in Sarubbi et al., “Controlled Nanometer Depth p-CuO Films,” 2004, pp. 1111-112, 2004. + “Chemical vapor deposition of a- boron layers on silicon for controlled nanometer-deep p + "-n junction formation"), J. Electron. Material, vol. 39, pp. 162-173,2010.

[0031] The purity and lack of pinholes in the boron layer are important to the sensitivity and lifetime of the image sensors disclosed herein. If any native oxide layer is not removed from the epilayer surface prior to boron deposition, the native oxide will be attacked by DUV, VUV and EUV photons and by charged particles, causing degradation of sensor performance with use. Even if all native oxide is removed prior to boron deposition, if pinholes are present in the boron layer, oxygen can reach the epilayer through those pinholes after processing and oxidize the surface of the layer.

[0032] In some embodiments, other layers may also be deposited on the boron layer during or immediately after step 111. These other layers may include an anti-reflective coating having one or more materials such as silicon dioxide, silicon nitride, magnesium fluoride, and lithium fluoride. These other layers may also include a protective layer having a thin (a few nm) layer of a refractory metal. Even though the anti-reflective coating may be affected by DUV, VUV, or EUV radiation, the presence of the boron layer between the anti-reflective coating and the epi layer protects the epi layer from traps and charges in the anti-reflective coating, ensuring that the sensitivity of the image sensor is not significantly degraded.

[0033] In step 113, the front side protective layer may be removed or patterned in preparation for fabrication of interconnects on the front surface. In some embodiments, this removal / patterning may include etching the front side surface in dilute HF, since the boron layer is relatively resistant to dilute HF.

[0034] In step 115, interconnects on the front surface may be patterned and fabricated. These interconnects may be made of Al, Cu or other metals. After interconnect fabrication is complete, a passivation layer may be deposited on the front surface to protect these interconnects.

[0035] In step 117, the completed circuit elements may be packaged. Packaging may include flip-chip bonding or wire bonding of the chip to a substrate. The package may include a window that transmits the desired wavelength or may have a flange or seal for interfacing to a vacuum seal. In electron-bombarded image sensor embodiments, the package may include a sealed evacuated tube as well as other elements such as a photocathode.

[0036] FIG. 2 illustrates an alternative exemplary technique 200 for fabricating an image sensor. In this embodiment, circuit elements may be formed in step 201 using standard semiconductor processing steps including lithography, deposition, ion implant, annealing, and etching. In one embodiment, CCD and / or CMOS sensor elements and devices may be formed in step 201. These circuit elements are formed in an epi layer on the front surface of the wafer. In a preferred embodiment, the epi layer is about 20 μm to 40 μm thick. The epi layer has a low dopant concentration (p - In one embodiment, interconnects, such as metal interconnects, may also be formed in step 201.

[0037] In step 203, the front surface of the wafer may be protected. This protection may include deposition of one or more protective layers on top of the circuit elements formed during step 201. This protection may additionally or alternatively include attaching the wafer to a handling wafer, such as a silicon wafer, a quartz wafer, or a wafer made of other material.

[0038] Step 205 includes thinning the wafer from the backside to expose the epitaxial layer at least in the active sensor area. This step may include polishing, etching, or both. In some embodiments, the entire wafer is backside thinned. In other embodiments, only the active sensor area is thinned down to the epitaxial layer.

[0039] Step 207 involves cleaning and preparing the backside surface prior to boron deposition. During this cleaning, any contaminants, including native oxides and organic compounds and metals, should be removed from the backside surface. In one embodiment, this cleaning can be performed using a dilute HF solution or using an RCA cleaning process. After cleaning and during preparation, the wafer can be dried, preferably using a Marangoni drying technique or a similar technique, so that the surface is dry and free of watermarks.

[0040] In step 209, the wafer can be transferred to the deposition equipment in a protective environment, thereby allowing protection of the wafer during step 211. In one embodiment, for example, the protective environment is a dry nitrogen atmosphere to minimize regrowth of native oxide. The time spent performing step 209 should be kept to a minimum, preferably less than about 5 minutes.

[0041] In step 211, boron is deposited on the backside surface of the wafer. In one preferred embodiment, this deposition can be performed using a mixture of diborane and hydrogen gas at a temperature of about 400-450° C., thereby forming a high purity amorphous boron layer. The thickness of the deposited boron layer depends on the intended application for the sensor. Typically, the thickness of the boron layer is between about 2 nm and 10 nm. The minimum thickness is set by the need for a pinhole-free uniform film, while the maximum thickness depends on the absorption of photons or desired charged particles by the boron and the longest time the wafer can be held at high temperature if metal interconnects are on the front side.

[0042] In some embodiments, other layers may be deposited on the boron layer in step 211. These other layers may include an anti-reflective coating having one or more materials such as silicon dioxide, silicon nitride, magnesium fluoride, and lithium fluoride. These other layers may also include a protective layer having a thin layer of a refractory metal. In some embodiments, the thickness of this refractory metal layer may be between about 1 nm and about 10 nm.

[0043] In one embodiment, the protective front side layer may be removed in step 213. In other embodiments, holes or vias may be drilled in the protective front side layer, or through silicon vias may be exposed around the edges of the device in step 213, allowing connections to circuit structures.

[0044] In step 215, the resulting structure may be packed in a suitable package. The packaging step may include flip-chip bonding or wire bonding of the device to a substrate. The package may include a window that transmits the desired wavelength or may have a flange or seal for interfacing with a vacuum seal. In an electron-bombarded image sensor embodiment, the package may include other components such as a photocathode and may have a sealed evacuated tube.

[0045] 3A-3F show exemplary cross-sections of a wafer in accordance with method 100 (FIG. 1). FIG. 3A shows an epitaxial (epi) layer 302 formed on the front side of a substrate 301. In one embodiment, the substrate 301 is a p + (i.e., highly p-doped) substrate, and epi layer 302 is p -3B shows a gate oxide layer 303 formed on the epi layer 302, a silicon nitride (Si3N4) gate layer 304 formed on the gate oxide layer 303, and front-side circuit elements 305 (step 101) formed on the gate layer 304. Note that depending on the type of image sensor technology, the gate dielectric may have one, two, or three layers. Formation of the front-side circuit elements may include implanting or doping the front portion of the epi layer and may also include patterning the gate layer. FIG. 3C shows the substrate 301 thinned (step 103) at least in certain areas at its back surface to form a thinned substrate 301A, and a protective layer 305A (step 105) formed on the front-side circuit elements 305. FIG. 3D shows an optional doped layer 302A that may be formed on the portion of the epi layer 302 exposed by the thinned substrate 301A. This doping can be formed by ion implantation and subsequent thermal activation, by plasma doping, by plasma assisted doping, or similar techniques. In one embodiment, this doping can be performed during step 107 as part of the backside surface preparation and before the high temperature surface treatment of step 109. FIG. 3E shows a pure boron layer 306 formed on the thinned substrate 301A and exposed epilayer 302 (step 111). Some embodiments do not need to include a separate doped layer 303A because some of the boron diffuses into the epilayer for a few nm. FIG. 3F shows that after the protective layer 305A is removed or opened (step 113), the front side metal (i.e. interconnect) 307 can be formed on the front side circuit elements 305. FIG. 3G shows one optional embodiment in which a cap layer 308 can be formed on the boron layer 306. Capping layer 308 can be formed any time after step 111 (deposition of the boron layer) and before step 117 (packaging).

[0046] 4A-4G show cross sections of an exemplary wafer in accordance with method 120 (FIG. 1B). FIG. 4A shows an epitaxial (epi) layer 402 formed on the front side of a substrate 401. In one embodiment, the substrate 401 is a p + The substrate is p- 4B shows various circuit elements 403 (step 121), including interconnects, that may be formed on the epi layer. (Note that the epi layer is shown, but not labeled, so as not to overcomplicate the drawing.) Because the interconnects are formed on the wafer prior to backside thinning down to the epi layer, these interconnects can be formed using conventional sub-micron CMOS processing techniques and may include multiple layers of high density metal interconnects. In some embodiments, a number of through silicon vias (TSVs) 403A are formed around one or more edges of the image sensor array to allow for connections to the circuit elements 403. FIG. 4C shows a handling wafer 404 attached on top of the circuit elements 403 (step 123). Note that through silicon vias are shown but not labeled so as not to overly complicate the drawing. In other embodiments, a protective layer may be used instead of the handling wafer 404. FIG. 4D shows the wafer after the substrate 401 has been backside thinned down to the epi layer 402. In one embodiment, this backside thinning exposes the buried oxide layer 402A. FIG. 4E shows the wafer after backside surface cleaning and preparation (step 127) which may result in the formation of an etched oxide 402B that is patterned to expose the epi layer in the image sensor array area while protecting the TSVs 403A. FIG. 4F shows a pure boron layer 406 after it has been formed on the backside surface of the epi layer 402 (step 131). In some embodiments, an anti-reflective coating or metallization or cap layer (not shown) may be deposited on top of the pure boron layer. FIG. 4G shows the wafer after etched oxide 402B has been removed and replaced with metal pads 407 to allow electrical connection to TSVs 403A (step 131).

[0047] FIG. 5 illustrates an exemplary electron-bombarded image sensor system 501. In this embodiment, the entire assembly may be housed within a sealed tube 505 (e.g., substantially similar to the sealed tubes of standard image intensifiers and electron-bombarded CCD (EBCCD) devices). The top surface 507 of the tube 505 may include a window that is transparent at the desired wavelengths. For UV-sensitive electron-bombarded image sensors, this window preferably comprises high purity grades of quartz, fused silica, or alumina (sapphire). In a preferred embodiment, the exterior surface of the window is coated with a UV anti-reflective coating. Such a coating may comprise a single layer of a low index material such as MgF2, or may comprise a multi-layer coating.

[0048] Coating or disposed immediately adjacent to the inner surface of the window is a photocathode 504. The photocathode material may be substantially similar to any photocathode material known in the art for use in photomultiplier tubes, image intensifier tubes, or prior art EBCCD detectors. In a preferred embodiment, the photocathode may comprise one or more alkali metals, such as cesium, and / or may comprise a semiconductor, such as GaN, GaAs, or silicon. The photocathode 504 may be held at a negative voltage 503 relative to a solid-state image sensor 502, which is disposed near the bottom surface of the sealed tube 505. In some embodiments, the negative voltage 503 may be approximately 500V, and in other embodiments, several hundred volts or approximately 1000V. In a preferred embodiment, the negative voltage 503 is between 100V and 1500V.

[0049] The solid-state image sensor 502 may be a thinned CCD or CMOS image sensor oriented such that electrons strike its backside surface first. The backside of the solid-state image sensor 502 includes a layer of boron deposited directly on the epilayer of the image array as described above. In some embodiments, a thin (a few nm) layer of conductive material such as a refractory metal is deposited on the boron layer to prevent charging of the sensor surface. Refractory metals such as titanium, tungsten, tantalum, rhodium, ruthenium, vanadium, or chromium have advantages over non-refractory metals because the hardness of the refractory metals provides resistance to sputtering by electrons, and they are relatively resistant to oxidation at room temperature. In some embodiments, the solid-state image sensor 502 is a time-delay integration (TDI) CCD. In some embodiments, the solid-state image sensor 502 has a linear array of electron-sensing elements. In other embodiments, the solid-state image sensor 502 has a two-dimensional array of electron-sensing elements. In a preferred embodiment, the solid-state image sensor 502 is held near ground potential (as shown).

[0050] When light 510 is incident on the electron bombarded image sensor system 501, one or more photoelectrons 520 are emitted from the photocathode 504. These photoelectrons are emitted in substantially all directions, but they are accelerated towards the solid-state image sensor 502 due to the potential difference between the photocathode 504 and the solid-state image sensor 502. In a preferred embodiment, the gap between the photocathode 504 and the solid-state image sensor 502 is less than 1 mm. In some embodiments, the gap is about 500 μm.

[0051] Since electrons can pass through a boron layer more easily than through a silicon dioxide layer, incorporating a solid-state image sensor 502 having one of the structures described herein and / or fabricated according to any of the methods described herein allows an electron bombarded image sensor system 501 to operate with a low potential difference between the photocathode 504 and the solid-state image sensor 502 while having high gain. Since boron doped silicon, boron silicide and boron are all at least partially conductive, charging of the surface under electron bombardment is minimized or avoided. A conductive or metal layer on top of the boron layer, as described herein, can further reduce sensitivity to charging.

[0052] In prior art EBCCD sensors, the gap between the photocathode and the image sensor is typically 1-2 mm. Such a large gap allows significant lateral movement of the electrons as they move from the photocathode to the image sensor due to their energy as they are emitted from the photocathode. A gap of 1-2 mm or more is necessary due to the large potential difference between the photocathode and the image sensor (typically about 2000 V or more). Reducing the potential difference between the photocathode and the image sensor allows a smaller gap to be used. Furthermore, the lower energy of the electrons means that less diffusion of the electrons is generated in the solid-state image sensor.

[0053] The low energy of the electrons reaching the solid-state image sensor 502 means that there is a low to zero chance that atoms will be dislodged from the surface of the solid-state image sensor 502. Furthermore, the energy of the electrons reaching the solid-state image sensor 502 is not sufficient to generate x-rays from the silicon, thereby avoiding the generation of spurious signals in nearby pixels of the image sensor 502.

[0054] Collisions of low energy electrons with residual gas atoms in the vacuum formed within the sealed tube 505 produce fewer ions compared to high energy electrons, and because of the low potential difference between the photocathode 504 and the solid-state image sensor 502, the ions have less kinetic energy when they collide with the photocathode, resulting in less removal of photocathode material.

[0055] Further details of electron-bombarded image sensors that can be incorporated into electron-bombarded image sensor 501 can be found in U.S. patent application Ser. No. 13 / 710,315, entitled “ELECTRON-BOMBARDED CHARGE-COUPLED DEVICE AND INSPECTION SYSTEMS USING EBCCD DETECTORS,” filed Dec. 10, 2012 by Chuang et al., which is incorporated by reference herein. A photocathode structure suitable for use in the electron bombardment image sensor system 501 is described in U.S. Provisional Patent Application No. 61 / 679,200, entitled “PHOTOCATHODE WITH LOW NOISE AND HIGH QUANTUM EFFICIENCY, HIGH SPATIAL RESOLUTION LOW-NOISE IMAGE SENSOR AND INSPECTION SYSTEMS INCORPORATING AN IMAGE SENSOR,” filed Aug. 3, 2012 by Chuang et al., which is incorporated herein by reference.

[0056] FIG. 6 shows exemplary drive voltages for the clock signals of any of the image sensors described herein incorporating a CCD. In a CCD, charge needs to be transferred from one storage element to another until the charge reaches the output amplifier. Multiple clock signals are required to transfer the charge. Depending on the CCD design, typically two, three or four clock signals are required. In a preferred embodiment, the shape of these clock signals is sinusoidal or substantially sinusoidal, in preference to the substantially square waveforms used in conventional CCD devices. The advantage of using sinusoidal waveforms is that the charge transfer is smoother (which is particularly advantageous in enabling TDI sensors to more accurately track image motion) and the clock signals generate less electrical noise and heat due to minimal fundamental frequency harmonic content. FIG. 6 shows the clock voltages for a three-phase CCD. Clock signal 601 shows the voltage of a first clock signal as a function of time. Clock signal 601 is a substantially sinusoidal waveform. The second clock signal 602 also varies as a function of time, but has a voltage that is substantially 120° phase-lagging relative to the clock signal 601. The voltage of the third clock signal 603 also varies as a function of time, but is substantially 120° phase-lagging relative to the clock signal 602, and therefore is substantially 240° phase-lagging relative to the clock signal 601. Line 604 shows the sum of the three clock signals 601, 602, and 603, which is substantially always zero. The substantially zero sum voltage means that little current flows from the clock signals to the ground signal of the solid-state image sensor 502, and therefore a lower electrical noise level is achieved. This is in contrast to the sum of three out-of-phase square wave clock signals, which would have a non-zero sum voltage substantially all the time.

[0057] In an image sensor including a two-phase CCD (not shown), the two clock signals will be substantially 180° out of phase with each other. In a four-phase CCD (not shown), the second clock signal will be substantially 90° phase-lagged with respect to the first clock signal, the third clock signal will be substantially 180° phase-lagged with respect to the first clock signal, and the fourth clock signal will be substantially 270° phase-lagged with respect to the first clock signal.

[0058] Further details on the use of sine waves and other clock signals to drive CCD image sensors can be found in U.S. Patent No. 7,952,633, entitled "Apparatus for continuous clocking of TDI sensors," issued May 31, 2011 to Brown et al., and U.S. Patent No. 7,952,633, entitled "Continuous clocking of TDI sensors," issued October 27, 2009 to Brown et al., both of which are incorporated herein by reference.

[0059] 7A shows an exemplary split readout image sensor 700 including two sets of readout circuits 701A and 701B arranged on either side of an image area 703. The image area 703 includes a pure boron layer on its photosensitive surface as described herein. The readout circuits 701A and 701B may include serial registers 702A and 702B and readout amplifiers 704A and 704B, as well as other components such as transfer gates. Exemplary embodiments of the readout circuits 701A and 701B and other components of the sensor 700 are described in U.S. Patent No. 7,609,309, entitled “Continuous Clocking of TDI Sensors,” issued on October 27, 2009, which is incorporated herein by reference. The image area 703 is a two-dimensional (2D) array of pixels, and each line of the image is read out simultaneously in each direction A and B. Each line is then read out, in the simplest case, one pixel at a time. Thus, in a preferred embodiment, the serial registers 702A and 702B can be split into multiple register segments (e.g., FIG. 7A shows each serial register split into six segments), thereby allowing parallel readout using multiple amplifiers 704A and 704B.

[0060] Notably, the readout circuits 701A and 701B can be operated independently, thereby enabling the image sensor 700 to provide two readout directions A and B. In split readout mode, each side of the image area 703 (i.e. sides 703A and 703B) can be clocked synchronously to read out one image line on their respective output channels. In one embodiment, the image area 703 may have 1000 lines, each line formed by a row of pixels. Thus, during split readout mode, 500 lines could be read out in direction A and simultaneously 500 lines could be read out in direction B.

[0061] This split readout mode is possible based on the timed activation of the charge-coupled device (CCD) drivers of the image sensor. For example, multiple CCD drivers P1a, P2a, P3a, P1b, P2b and P3b can be used to provide the phases. As shown in FIG. 7B, the CCD drivers P1a, P2a, P3a, P1b, P2b and P3b can be characterized as driving sets of gate electrodes (hereafter gates), each set having six gates. In one preferred embodiment of the image sensor, three gates are provided at each pixel to provide three phases. In FIG. 7B, two pixels 710 and 711 are shown, where gates 731, 732 and 733 are arranged on pixel 710, and gates 734, 735 and 736 are arranged on pixel 711. In the image sensor, the pixels 710 and 711 are aligned along the readout axis and form part of a column of a 2D array of pixels forming the image area 703.

[0062] The image area 703 may be implemented as a photosensor or a charged particle sensor. In one photosensor embodiment, the image area 703 may include a photosensitive p-type silicon substrate 714 and an n-type buried channel 713. The electrostatic force in the silicon substrate 714 is determined by the voltage level applied to a particular gate by a clock input signal (e.g., one of the clock signals from CCD drivers P1a, P2a, P3a, P1b, P2b, and P3b). A high level of voltage induces the formation of a potential "well" under the gate, while a low level of voltage creates a potential barrier against the movement of electrons. To ensure that charge from one pixel does not mix with another, the gate voltage is made high when the neighboring gate voltage is made low. At an initial state at time 770, gates 731 and 734 of pixels 710 and 711, respectively, have high voltage levels that form a potential well with their integrated charge (i.e., electrons), and gates 732, 733 (of pixel 710) and gates 735, 736 (of pixel 711) have low voltage levels that form a potential barrier. At a subsequent time 721, gates 732 and 735 of pixels 710 and 711, respectively, have high voltage levels that form a potential well with their integrated charge (i.e., electrons), and gates 731, 733 (of pixel 710) and gates 734, 736 (of pixel 711) have low voltage levels that form a potential barrier. Further on, at time 771, gates 733 and 736 of pixels 710 and 711, respectively, have high voltage levels forming a potential well with the integrated charge (i.e., electrons), and gates 731, 732 (of pixel 710) and gates 734, 735 (of pixel 711) have low voltage levels forming a potential barrier. Note that adjacent gates preferably both have high voltage levels for a short period of time to facilitate charge transfer when shifting charge. Thus, from time 770 to time 771, charge is shifted from left to right, i.e., from pixel 710 to pixel 711. A similar directional movement of charge may occur from time 771 to time 772.

[0063] Further details of the split readout image sensor 700 are provided in U.S. Provisional Patent Application No. 61 / 735,427, entitled “METHOD AND APPARATUS FOR HIGH SPEED ACQUISITION OF MOVING IMAGES USING PULSED ILLUMINATION,” filed Dec. 10, 2012 by David Brown et al., which is incorporated herein by reference. Further details regarding other exemplary image sensors are provided in U.S. Patent No. 7,528,943, entitled “METHOD AND APPARATUS FOR SIMULTANEOUS HIGH-SPEED ACQUISITION OF MULTIPLE IMAGES,” issued May 5, 2009 to Brown et al., which is incorporated herein by reference.

[0064] FIG. 8 shows a reticle, photomask or wafer inspection system 800 that simultaneously detects two channels of images or signals on one sensor 870. The image sensor 870 has a split readout image sensor as described above. The light source 809 may incorporate a 193 nm or sub-200 nm laser. The two channels may have reflected and transmitted intensities when the inspected object 830 is transparent (e.g., a reticle or photomask) or may have two different illumination modes, such as angles of incidence, polarization states, wavelength ranges or any combination thereof. Light is directed to the inspected object 830 using a channel 1 illumination relay 815 and a channel 2 illumination relay 820.

[0065] The inspected object 830 may be a reticle, a photomask, a semiconductor wafer, or other article to be inspected. The image relay optics 840 may direct light reflected and / or transmitted by the inspected object 830 to an image mode relay 855 of channel 1 and an image mode relay 860 of channel 2. The image mode relay 855 of channel 1 is tuned to detect a reflection / transmission corresponding to the illumination relay 815 of channel 1, while the image mode relay sensor 860 of channel 2 is tuned to detect a reflection / transmission corresponding to the illumination relay 820 of channel 2. The image mode relay 855 of channel 1 and the image mode relay sensor 860 of channel 2 then direct their outputs to a sensor 870. Data corresponding to the detected signals or images for the two channels is shown as data 890 and is transmitted to a computer (not shown) for processing.

[0066] Other details of reticle and photomask inspection systems and methods that may be configured to measure light transmitted and reflected from a reticle or photomask are described in U.S. Pat. No. 7,352,457, issued to Kvamme et al. on April 1, 2008, and U.S. Pat. No. 5,563,702, issued to Emery et al. on October 8, 1996, both of which are incorporated herein by reference.

[0067] FIG. 9 illustrates an exemplary detector assembly 900 incorporating an image sensor 904, a silicon interposer 902, and other electronics in accordance with certain embodiments of the present invention.

[0068] In one aspect of the invention, the detector assembly 900 may include one or more photosensitive sensors 904 disposed on a surface of an interposer 902. In some embodiments, the one or more interposers 902 of the assembly 100 may include, but are not limited to, a silicon interposer. In a further aspect of the invention, the one or more photosensitive sensors 904 of the assembly 900 are backside thinned as described above and further configured for backside illumination, including a boron layer deposited on the backside.

[0069] In other aspects of the invention, various circuit elements of the assembly 900 may be disposed on or incorporated into the interposer 902. In one embodiment, one or more amplifier circuits (e.g., charge transfer amplifiers) (not shown) may be disposed on or incorporated into the interposer 902. In other embodiments, one or more conversion circuits 908 (e.g., analog-to-digital conversion circuits, i.e., digitizers 908) may be disposed on or incorporated into the interposer 902. In other embodiments, one or more driver circuits 906 may be disposed on or incorporated into the interposer 902. For example, the one or more driver circuits 906 may include timing / serial drive circuits. For example, the one or more driver circuits 906 may include, but are not limited to, a clock driver circuit or a reset driver circuit. In other embodiments, one or more decoupling capacitors (not shown) may be disposed on or incorporated into the interposer 902. In yet other embodiments, one or more serial transmitters (not shown in FIG. 9) may be disposed on or incorporated into interposer 102 .

[0070] In another aspect of the invention, one or more support structures may be disposed between the bottom surface of the photosensitive array sensor 904 and the top surface of the interposer 902 to provide physical support to the sensor 904. In one embodiment, a plurality of solder balls 916 may be disposed between the bottom surface of the photosensitive array sensor 904 and the top surface of the interposer 902 to provide physical support to the sensor 904. Although the imaging area of ​​the sensor 904 may not include external electrical connections, it is recognized herein that backside thinning of the sensor 904 causes the sensor 904 to become increasingly flexible. Thus, the solder balls 916 may be utilized to connect the sensor 904 to the interposer 902 in a manner that reinforces the imaging portion of the sensor 904. In an alternative embodiment, an underfill material may be disposed between the bottom surface of the photosensitive array sensor 904 and the top surface of the interposer 902 to provide physical support to the sensor 904. For example, an epoxy resin may be placed between the bottom surface of the photosensitive array sensor 904 and the top surface of the interposer 902 .

[0071] In another aspect of the invention, the interposer 902 and various additional circuits (e.g., amplifier circuitry, driver circuitry 906, digitizer circuitry 908, etc.) are disposed on a surface of a substrate 910. In a further aspect, the substrate 910 comprises a substrate having high thermal conductivity (e.g., a ceramic substrate). In this regard, the substrate 910 is configured to provide physical support to the sensor 904 / interposer 902 assembly while providing the assembly 900 with a means for efficiently conducting heat away from the imaging sensor 904 and various other circuits (e.g., digitizer 906, driver circuitry 908, amplifier, etc.). It is recognized herein that the substrate may comprise any rigid, high thermal conductivity substrate material known in the art. For example, the substrate 910 may include, but is not limited to, a ceramic substrate. For example, the substrate 110 may include, but is not limited to, aluminum nitride.

[0072] In other embodiments, the substrate 910 may be configured to provide an interface to a socket or an underlying printed circuit board (PCB). For example, as shown in FIG. 9, the substrate 910 may provide an interconnect between the interposer 902 and a socket or PCB via interconnect 912. Those skilled in the art will recognize that the substrate 910 may be operatively coupled to the underlying PCB and further electrically coupled to the socket or PCB in a variety of ways, all of which are construed as being within the scope of the present invention.

[0073] Further details of detector assemblies incorporating image sensors, silicon interposers and other electronic circuitry can be found in U.S. patent application Ser. No. 13 / 622,155, entitled “INTERPOSER BASED IMAGING SENSOR FOR HIGH-SPEED IMAGE ACQUISITION AND INSPECTION SYSTEMS,” filed Sep. 18, 2012 by Brown et al., which is incorporated herein by reference.

[0074] FIG. 10 shows an exemplary sensor module array 1000 including multiple time delay integration (TDI) sensor modules 1001. Each sensor module 1001 includes one of the image sensors described above. In some embodiments, the image sensor may have a few nm (such as 1 or 2 nm) thick coating of Ru or other refractory metal on top of the boron to protect it during cleaning. In one embodiment, each TDI sensor module 1001 may include localized drive and signal processing circuitry. This circuitry may include a TDI sensor (center block), processing circuitry to process signals from the TDI sensor, timing and serial drive circuitry, and pixel gate driver circuitry. The drive / processing circuitry is arranged around the TDI sensor. Thus, adjacent rows of TDI sensors may be aligned such that at least 100% image coverage is achieved when used in a continuous scan arrangement.

[0075] For example, in the embodiment shown in FIG. 10, the top row 1002 can be offset relative to the bottom row 1004 such that the TDI sensors are positioned within the gaps formed by the drive / processing circuits of the adjacent rows. To ensure gap-free image coverage, the width of each TDI sensor is the same as or greater than the spacing between the TDI sensors. In this arrangement, the sensor module array 1000 can ensure 100% EUV wavelength image capture as the inspected wafer / mask / reticle moves in the TDI image scan direction 1006. In one embodiment, some minimum overlap between TDI sensors from adjacent rows can provide overlapping data. This overlapping data can ensure accurate alignment of image data generated by, for example, the TDI sensor modules 1001. In one embodiment of the minimum overlap, the inspection system can arbitrarily select data from one TDI sensor module to be used for edge pixels. In other embodiments, the detection system can combine and align data from multiple TDI sensor modules using sub-pixel digital processing to obtain improved quality data near the edge pixels.

[0076] Further details of EUV inspection system detector arrays can be found in U.S. Patent Application Publication No. 2011 / 0116077, published May 19, 2011 by Chuang et al., entitled “EUV HIGH THROUGHPUT INSPECTION SYSTEM FOR DEFECT DETECTION ON PATTERNED EUV MASKS, MASK BLANKS, AND WAFERS,” which is incorporated herein by reference.

[0077] 11 shows an example inspection system 1100 configured to measure a sample 1108, such as a wafer, reticle, or photomask. The sample 1108 is positioned on a stage 1112 to facilitate movement of the sample 1108 to different areas under the optics. The stage 1112 may include an XY stage or an R-θ stage. In some embodiments, the stage 1112 may adjust the height of the sample 1108 to maintain focus during inspection. In other embodiments, the objective lens 1105 may be adjusted to maintain focus.

[0078] The light source 1102 may include one or more lasers and / or broadband light sources. The light source 1102 may emit DUV and / or VUV radiation. The optics 1103, including an objective lens 1105, may direct the radiation towards and focus it on the sample 1108. The optics 1103 may also include mirrors, lenses and / or beam splitters. Light reflected or scattered from the sample 1108 may be collected, directed and focused by the optics 1103 onto a detector 1106 in a detector assembly 1104.

[0079] The detector 1106 may include one or more of the image sensors described herein, including electron bombarded image sensors incorporating boron coated backside illuminated CCD sensors, boron coated backside illuminated CMOS sensors, and boron coated backside thinned solid state image sensors. The detector 1106 may include a two-dimensional array sensor or a one-dimensional line sensor. In one embodiment, the output of the detector 1106 may be provided to a computing system 1114 that analyzes the output. The computing system 1114 may be configured by program instructions 1118, which may be stored on a carrier medium 1116.

[0080] In one embodiment, the light source 1102 can be a continuous light source such as an arc lamp, a laser-pumped plasma source, or a CW laser. In other embodiments, the light source 1102 can be a pulsed light source such as a mode-locked laser, a Q-switched laser, a plasma source pumped by a Q-switched laser, etc. In some embodiments of the inspection system 1100 incorporating a Q-switched laser, the image sensor(s) in the detector 1106 are synchronized with the laser pulse. In such embodiments, the image sensor can operate in TDI mode during the laser pulse and then read out data via multiple outputs on either side of the sensor in the middle of the laser pulse.

[0081] Some embodiments of the inspection system 1100 illuminate a line on the sample 1108 and collect scattered and / or reflected light in one or more dark-field and / or bright-field collection channels. In such embodiments, the image sensor may be a line sensor or an electron-bombarded line sensor.

[0082] Some embodiments of the inspection system 1100 illuminate multiple points on the sample 1108 and collect scattered and / or reflected light in one or more dark-field and / or bright-field collection channels. In such embodiments, the image sensor may be a two-dimensional array sensor or an electron-bombarded two-dimensional array sensor.

[0083] Further details regarding various embodiments of an inspection system 1100 incorporating one or more of the images described herein may be found in U.S. Provisional Patent Application No. 61 / 506,892, entitled “SAMPLE INSPECTION SYSTEM,” filed July 12, 2011 by Romanovsky et al.; U.S. Provisional Patent Application No. 61 / 506,892, entitled “WAFER INSPECTION SYSTEM,” filed July 9, 2012 by Romanovsky et al.; No. 13 / 554,954 entitled "SYSTEM" published on July 16, 2009 by Armstrong et al., U.S. Patent Application Publication No. 2009 / 0180176 published on January 4, 2007 by Chuang et al., U.S. Patent Application Publication No. 2007 / 0002465 published on January 4, 2007 by Chuang et al., U.S. Patent No. 5,999,310 issued on December 7, 1999 by Shafer et al., and U.S. Patent No. 7,525,649 issued on April 28, 2009 by Leong et al., all of which are incorporated herein by reference.

[0084] The various embodiments of the structure and method of the present invention described above merely illustrate the principles of the present invention, and are not intended to limit the scope of the present invention to the specific embodiments described. For example, additional steps can be added to the flow charts shown in Figures 1 and 2, or some of the steps shown can be performed in a different order than shown. Therefore, the present invention is limited only by the following claims and their equivalents. It is noted that the embodiments include the following: (1) A method of manufacturing an image sensor, the method comprising: forming an epitaxial layer on a substrate; forming a gate layer on the substrate; forming a circuit element layer on the gate layer; thinning the substrate to produce a thinned substrate, the thinned substrate exposing at least a portion of the epitaxial layer; forming a pure boron layer on the exposed portion of the epitaxial layer; The method according to claim 1, (2) The method according to (1) above, further comprising the step of forming an anti-reflective coating on the pure boron layer. (3) The method according to (1) above, further comprising the step of forming a conductive layer on the pure boron layer. (4) The method according to (1) above, further comprising the step of forming a protective layer on the circuit element layer. (5) The method according to (1) above, further comprising the step of doping at least one of the exposed portions of the epitaxial layer after the step of thinning the substrate and before the step of forming the pure boron layer. (6) A method of manufacturing an image sensor, the method comprising: forming an epitaxial layer on a substrate; forming circuit elements on the epitaxial layer; attaching a handling wafer to the circuit elements; thinning the substrate to expose the epitaxial layer; forming a pure boron layer on the exposed surface of the epitaxial layer; The method according to claim 1, (7) The method according to (6) above, further comprising the step of forming an anti-reflective coating on the pure boron layer. (8) The method according to (6) above, further comprising the step of forming a conductive layer on the pure boron layer.

Claims

1. 1. An inspection system for inspecting a sample, comprising: at least one illumination relay configured to direct light generated by an illumination source to the sample; image relay optics configured to direct light output from the sample to at least one channel image mode relay; an image sensor configured to receive the light output from the channel image mode relay; Equipped with the image sensor includes an image region including pixels arranged in a two-dimensional array on an epitaxial silicon film, the epitaxial silicon film including a readout circuit element formed on a first surface of the epitaxial silicon film and a pure boron layer provided on an opposing second surface of the epitaxial silicon film, a handling wafer formed on the readout circuit element, and a through silicon via formed at one or more ends of the image sensor, one end of the through silicon via connected to the handling wafer, the pure boron layer being provided at a location other than where the through silicon via is present, and a metal pad being provided at the location where the through silicon via is present, the test system is configured such that the readout circuitry reads out charge from the pixels corresponding to the light output directed to the image area by the channel image mode relay. Inspection system.

2. the at least one illumination relay includes a first illumination relay configured to direct a first portion of the light generated by the illumination source to the sample, and a second illumination relay configured to direct a second portion of the light generated by the illumination source to the sample; the at least one channel image mode relay includes a first channel image mode relay configured to detect the first portion of the light that is either reflected from or transmitted through the sample, and a second channel image mode relay configured to detect the second portion of the light that is either reflected from or transmitted through the sample. The inspection system of claim 1 .

3. the image region includes a first plurality of the pixels disposed in a first region and a second plurality of the pixels disposed in a second region; the image sensor is configured such that a first group of readout circuit elements reads out charge from the first plurality of pixels and a second group of readout circuit elements reads out charge from the second plurality of pixels. The inspection system of claim 1 .

4. each pixel of the image sensor includes a p-type silicon layer and an n-type silicon layer; the circuit element is formed on the n-type silicon layer, and the pure boron layer is provided on a p-type silicon layer; The inspection system of claim 1 .

Images