Mirror Device

Abstract

To provide a mirror device that can suppress both bending of a mirror part and damage to a movable part.SOLUTION: A mirror device comprises a support part, a movable part, and a pair of first torsion bars. In the movable part, a beam structure includes a first beam structure that extends in a V-shape across a second axis from a center side of the movable part toward one side in a direction parallel to the second axis, a second beam structure that extends in a V-shape across the second axis from the center side of the movable part toward the other side in the direction parallel to the second axis, a third beam structure that extends in a V-shape across a first axis from the center side of the movable part toward one side in a direction parallel to the first axis, and a fourth beam structure that extends in a V-shape across the first axis from the center side of the movable part toward the other side in the direction parallel to the first axis. The pair of first torsion bars each has a portion whose width increases as approaching the movable part when seen from a direction perpendicular to the first axis and the second axis.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a mirror apparatus configured as, for example, a MEMS (Micro Electro Mechanical Systems) device. [Background technology]

[0002] A known MEMS device is a mirror device that includes a support, a movable part on which a mirror part is provided, and a pair of torsion bars that connect the movable part to the support part so that the movable part can oscillate around a predetermined axis. In such a mirror device, in order to prevent the mirror part from bending when the movable part is oscillated at high speed (for example, at the resonant frequency level of the movable part (several KHz to several tens of KHz)), the mirror part may be connected to a frame-shaped frame in the movable part via a pair of connecting parts arranged on the axis (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent No. 7,619,802 Summary of the Invention [Problem to be solved by the invention]

[0004] In the mirror device as described above, since the pair of torsion bars and the pair of connecting parts are arranged on the same axis, when the movable part is oscillated at high speed, the stress generated in the pair of connecting parts due to the twisting of the pair of torsion bars becomes large, and there is a risk that the movable part will be damaged at the connecting parts.

[0005] An object of the present disclosure is to provide a mirror device that can prevent both bending of the mirror portion and damage to the movable portion. [Means for solving the problem]

[0006] A mirror device according to one aspect of the present disclosure comprises a support portion, a movable portion, and a pair of torsion bars arranged on either side of the movable portion on a first axis and connecting the movable portion to the support portion so that the movable portion can swing around the first axis as a center line, the movable portion having a frame-shaped frame to which the pair of torsion bars are connected, and a mirror portion arranged inside the frame, the mirror portion being connected to the frame at each of a pair of first connection regions located on either side of the mirror portion in a direction parallel to a second axis perpendicular to the first axis, the region between the mirror portion and the frame other than the pair of first connection regions being space, and the outer edge of the mirror portion and the inner edge of the frame being connected such that the curvature is continuous in each of the pair of first connection regions when viewed from a direction perpendicular to the first axis and the second axis.

[0007] In this mirror device, a pair of torsion bars connected to a frame-like frame are arranged on a first axis, and a pair of first connection regions where the mirror part and the frame-like frame are connected to each other are located on both sides of the mirror part in a direction parallel to a second axis perpendicular to the first axis. As a result, even if the movable part is swung at high speed, the stress generated in each of the pair of first connection regions due to the twisting of the pair of torsion bars is smaller than, for example, a case where only the pair of connection regions are located on the first axis, or a case where the mirror part and the frame-like frame are connected to each other only in one connection region. Furthermore, in this mirror device, the outer edge of the mirror part and the inner edge of the frame are connected so that the curvature is continuous in each of the pair of first connection regions when viewed from a direction perpendicular to the first axis and the second axis. As a result, stress concentration is less likely to occur in each of the pair of first connection regions. As described above, this mirror device can suppress both bending of the mirror part and damage to the movable part.

[0008] A mirror device according to one aspect of the present disclosure comprises a support portion, a movable portion, and a pair of torsion bars that are arranged on either side of the movable portion on a first axis and connect the movable portion to the support portion so that the movable portion can swing around the first axis as a center line, the movable portion having a frame-shaped frame to which the pair of torsion bars are connected, and a mirror portion arranged inside the frame, the mirror portion being connected to the frame at each of a pair of first connection regions located on either side of the mirror portion in a direction parallel to a second axis perpendicular to the first axis, and at each of a pair of second connection regions located on either side of the mirror portion in a direction parallel to the first axis, the region between the mirror portion and the frame other than the pair of first connection regions and the pair of second connection regions being space, and the outer edge of the mirror portion and the inner edge of the frame are connected such that the curvature is continuous in each of the pair of first connection regions when viewed from a direction perpendicular to the first axis and the second axis.

[0009] In this mirror device, a pair of torsion bars connected to a frame-like frame is disposed on a first axis, and a pair of first connection regions where the mirror part and the frame-like frame are connected to each other are located on both sides of the mirror part in a direction parallel to a second axis perpendicular to the first axis. Furthermore, a pair of second connection regions where the mirror part and the frame-like frame are connected to each other are located on both sides of the mirror part in a direction parallel to the first axis. As a result, even if the movable part is swung at high speed, the stress generated in each of the pair of first connection regions and each of the pair of second connection regions due to the twisting of the pair of torsion bars is smaller than, for example, a case where only the pair of connection regions are located on the first axis or a case where the mirror part and the frame-like frame are connected to each other only in one connection region. Furthermore, in this mirror device, the outer edge of the mirror part and the inner edge of the frame are connected so that the curvature is continuous in each of the pair of first connection regions when viewed from a direction perpendicular to the first axis and the second axis. As a result, stress concentration is less likely to occur in each of the pair of first connection regions. As described above, this mirror device can prevent both bending of the mirror portion and damage to the movable portion.

[0010] In the mirror device according to one aspect of the present disclosure, the outer edge of the mirror section and the inner edge of the frame may be connected such that the curvature is continuous in each of the pair of second connection regions when viewed from a direction perpendicular to the first axis and the second axis, thereby making it difficult for stress concentration to occur in each of the pair of second connection regions.

[0011] In the mirror device according to one aspect of the present disclosure, the pair of second connection regions may be located on either side of the mirror portion on the first axis, thereby making it possible to reduce the moment of inertia of the movable portion about the first axis.

[0012] In the mirror device according to one aspect of the present disclosure, the pair of first connection regions may be located on both sides of the mirror section on the second axis. This makes it possible to ensure a sufficient distance between each of the pair of torsion bars and each of the pair of first connection regions (a distance at which the influence of the twisting of the pair of torsion bars is unlikely to reach each of the pair of first connection regions). Therefore, it is possible to suppress both bending of the mirror section and damage to the movable section while simplifying the configuration of the movable section.

[0013] In the mirror device according to one aspect of the present disclosure, the frame may include a pair of first portions to which the mirror portion is connected and extending in a direction parallel to the first axis, and the width of each of the pair of first portions in the direction parallel to the second axis may be smaller as it moves away from each of the pair of first connection regions. This allows the stress generated due to the twisting of the pair of torsion bars to be dispersed to the portions of the pair of first portions with smaller widths, thereby making it possible to further reduce the stress generated in each of the pair of first connection regions. Furthermore, while ensuring the connection strength in each of the pair of first connection regions, the moment of inertia of the movable portion can be reduced by the amount of the reduced width in each of the pair of first portions. Reducing the moment of inertia of the movable portion is advantageous in oscillating the movable portion at high speed.

[0014] In the mirror device according to one aspect of the present disclosure, the frame may further include a pair of second portions to which the pair of torsion bars are connected and extending in a direction parallel to the second axis, whereby stress caused by twisting of the pair of torsion bars can be distributed to a portion between the first portion and the second portion that are linked or connected to each other, thereby making it possible to reduce stress generated in each of the pair of first connection regions.

[0015] In the mirror device according to one aspect of the present disclosure, the inner edges of the pair of first portions and the inner edges of the pair of second portions may be connected to each other such that the curvature is continuous in each of a plurality of regions where the first portions and the second portions are connected to each other when viewed from a direction perpendicular to the first axis and the second axis, thereby making it possible to suppress stress concentration in each of a plurality of regions where the inner edges of the first portions and the inner edges of the second portions are connected to each other.

[0016] In the mirror device according to one aspect of the present disclosure, the outer edges of the pair of first portions and the outer edges of the pair of second portions may be connected to each other such that the curvature is continuous in each of a plurality of regions where the first portions and the second portions are connected to each other when viewed in a direction perpendicular to the first axis and the second axis, thereby making it possible to suppress stress concentration in each of a plurality of regions where the outer edges of the first portions and the outer edges of the second portions are connected to each other.

[0017] In the mirror device according to one aspect of the present disclosure, the length of each of the pair of first portions in a direction parallel to the first axis may be longer than the length of each of the pair of second portions in a direction parallel to the second axis. This makes it possible to ensure a sufficient distance between each of the pair of torsion bars and each of the pair of first connection regions (a distance at which the influence of the twisting of the pair of torsion bars is unlikely to extend to each of the pair of first connection regions) while suppressing an increase in the moment of inertia of the movable part.

[0018] In the mirror device according to one aspect of the present disclosure, the distance between each of the pair of first connection regions and one of the pair of second portions, and the distance between each of the pair of first connection regions and the other of the pair of second portions may be longer than the distance between the first axis and each of the pair of first portions. This makes it possible to ensure a sufficient distance between each of the pair of torsion bars and each of the pair of first connection regions (a distance at which the influence of the twisting of the pair of torsion bars is unlikely to extend to each of the pair of first connection regions) while suppressing an increase in the moment of inertia of the movable part.

[0019] In the mirror device according to one aspect of the present disclosure, the shape of the mirror section when viewed from a direction perpendicular to the first axis and the second axis may be an ellipse having a major axis along the first axis, thereby making it possible to ensure a sufficient area of ​​the mirror surface while suppressing an increase in the moment of inertia of the movable section.

[0020] In the mirror device according to one aspect of the present disclosure, the width of each of the pair of first connection regions in a direction parallel to the first axis may be 30% or less of the width of the mirror portion in the direction parallel to the first axis, thereby ensuring both a sufficient connection strength between the mirror portion and the frame and a sufficient distance between each of the pair of torsion bars and each of the pair of first connection regions. Effect of the Invention

[0021] According to the present disclosure, it is possible to provide a mirror device that can prevent both bending of the mirror portion and damage to the movable portion. [Brief description of the drawings]

[0022] [Figure 1] FIG. 1 is a plan view of a mirror device according to an embodiment. [Diagram 2] FIG. 2 is a plan view of a movable portion of the mirror device shown in FIG. [Diagram 3] FIG. 3 is a plan view of a torsion bar of the mirror device shown in FIG. [Figure 4]FIG. 4 is a bottom view of the main part of the mirror device shown in FIG. [Diagram 5] Fig. 5(a) is a plan view of the movable part of the comparative example, and Fig. 5(b) is a plan view of the movable part of the example. [Figure 6] Fig. 6(a) is a plan view of the movable part of the comparative example, and Fig. 6(b) is a plan view of the movable part of the example. [Figure 7] Fig. 7(a) is a plan view of a movable part of a first modified example, and Fig. 7(b) is a plan view of a movable part of a second modified example. [Figure 8] FIG. 8 is a plan view of the movable portion of the third modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts are denoted by the same reference numerals, and duplicated explanations will be omitted. [Mirror device configuration]

[0024] As shown in FIG. 1, the mirror device 1 includes a base 2, a support 3, a movable part 4, a pair of torsion bars 5 and 6, a pair of torsion bars 7 and 8, and a magnetic field generating part 10. The base 2, the support 3, the movable part 4, the pair of torsion bars 5 and 6, and the pair of torsion bars 7 and 8 are integrally formed by an SOI (Silicon on Insulator) substrate. That is, the mirror device 1 is configured as a MEMS device. The magnetic field generating part 10 is configured by, for example, a permanent magnet having a Halbach array. In the mirror device 1, the movable part 4 provided with the mirror part 41 is oscillated around the center lines of the X-axis (first axis) and the Y-axis (second axis perpendicular to the first axis), which are orthogonal to each other. The mirror device 1 is used, for example, in an optical switch for optical communication, an optical scanner, and the like.

[0025] The base 2 has, for example, a rectangular shape when viewed from a direction perpendicular to the X-axis and the Y-axis, and is formed in a frame shape. The base 2 is disposed on one side of the magnetic field generating unit 10. The support unit 3 has, for example, an octagonal shape when viewed from a direction perpendicular to the X-axis and the Y-axis, and is formed in a frame shape. The support unit 3 is disposed inside the base 2 in a state separated from the magnetic field generating unit 10. The movable unit 4 has, for example, a rectangular shape when viewed from a direction perpendicular to the X-axis and the Y-axis. The movable unit 4 is disposed inside the support unit 3 in a state separated from the magnetic field generating unit 10.

[0026] The pair of torsion bars 5, 6 are disposed on both sides of the support part 3 on the Y-axis. The pair of torsion bars 5, 6 connect the support part 3 to the base 2 so that the support part 3 can swing around the Y-axis as a center line. Each of the torsion bars 5, 6 extends in a serpentine shape to improve strength and facilitate adjustment of the torsional spring constant. The pair of torsion bars 7, 8 are disposed on both sides of the movable part 4 on the X-axis. The pair of torsion bars 7, 8 connect the movable part 4 to the support part 3 so that the movable part 4 can swing around the X-axis as a center line. Each of the torsion bars 7, 8 extends linearly along the X-axis.

[0027] The mirror device 1 further includes a coil 9, a coil 11, a plurality of wirings 12, 13, 14, and 15, and a plurality of electrode pads 16, 17, 18, and 19. The coil 9 is provided on the support portion 3. The coil 9 extends in a spiral shape, for example, while being embedded in the support portion 3. The coil 11 is provided on the movable portion 4. The coil 9 extends in a spiral shape, for example, while being embedded in the movable portion 4. Each of the coils 9 and 11 is made of a metal material, for example, copper. In the drawings, the areas in which each of the coils 9 and 11 is arranged are indicated by hatching.

[0028] A plurality of electrode pads 16, 17, 18, 19 are provided on the base 2. Each of the electrode pads 16, 17, 18, 19 is exposed to the outside from an insulating layer 21 on the base 2. The insulating layer 21 is integrally formed so as to cover the surfaces (surfaces opposite to the magnetic field generating unit 10) of the base 2, the support portion 3, the movable portion 4, the pair of torsion bars 5, 6, and the pair of torsion bars 7, 8. The insulating layer 21 is made of, for example, a silicon dioxide film, a silicon nitride film, or the like.

[0029] The wiring 12 electrically connects one end of the coil 9 to the electrode pad 16. The wiring 12 is embedded in the insulating layer 21 and extends from one end of the coil 9 to the electrode pad 16 via the torsion bar 5. The wiring 13 electrically connects the other end of the coil 9 to the electrode pad 17. The wiring 13 is embedded in the insulating layer 21 and extends from the other end of the coil 9 to the electrode pad 17 via the torsion bar 6. Each of the wirings 12 and 13 is made of a metal material such as aluminum.

[0030] The wiring 14 electrically connects one end of the coil 11 to the electrode pad 18. The wiring 14 is embedded in the insulating layer 21 and extends from one end of the coil 11 to the electrode pad 18 via the torsion bar 7, a part of the support 3, and the torsion bar 5. The wiring 15 electrically connects the other end of the coil 11 to the electrode pad 19. The wiring 15 is embedded in the insulating layer 21 and extends from the other end of the coil 11 to the electrode pad 19 via the torsion bar 8, a part of the support 3, and the torsion bar 6. The parts of the wirings 14 and 15 that pass through the torsion bars 7 and 8 are made of a metal material such as tungsten, and the other parts are made of a metal material such as aluminum. As will be described later, the pair of torsion bars 7 and 8 are twisted due to the resonance of the movable part 4 at the natural frequency, so that the parts of the wirings 14 and 15 that pass through the torsion bars 7 and 8 are subjected to a larger load than the other parts. However, in the mirror device 1, the portions of the wirings 14, 15 that pass through the torsion bars 7, 8 are made of a metal material having a higher Vickers hardness than the other portions, so metal fatigue is less likely to occur in the wirings 14, 15 on the torsion bars 7, 8. In the drawings, the portions of the wirings 14, 15 that pass through the torsion bars 7, 8 are shown by hatching.

[0031] In the mirror device 1 configured as above, when a drive signal for linear operation is input to the coil 9 via the electrode pads 16, 17 and the wirings 12, 13, a Lorentz force acts on the coil 9 due to interaction with the magnetic field generated by the magnetic field generating unit 10. By utilizing the balance between the Lorentz force and the elastic force of the pair of torsion bars 5, 6, the mirror unit 41 can be linearly operated together with the support unit 3 with the Y axis as the center line. On the other hand, when a drive signal for resonant operation is input to the coil 11 via the electrode pads 18, 19 and the wirings 14, 15, a Lorentz force acts on the coil 11 due to interaction with the magnetic field generated by the magnetic field generating unit 10. By utilizing the resonance of the movable unit 4 at the natural frequency in addition to the Lorentz force, the mirror unit 41 can be resonated with the X axis as the center line. The natural frequency is determined by the moment of inertia of the movable unit 4, the torsional spring constant of the pair of torsion bars 7, 8, etc. [Components]

[0032] As shown in FIG. 2, the movable part 4 has a frame 42 in addition to the mirror part 41. A pair of torsion bars 7 and 8 are connected to the frame 42. The mirror part 41 is disposed inside the frame 42. The mirror part 41 is connected to the frame 42 at each of a pair of connection regions (first connection regions) 40a and 40b located on both sides of the mirror part 41 in a direction parallel to the Y axis (hereinafter referred to as the "Y axis direction"). More specifically, the mirror part 41 is connected to the frame 42 at each of a pair of connection regions 40a and 40b located on both sides of the mirror part 41 on the Y axis. The region between the mirror part 41 and the frame 42 other than the pair of connection regions 40a and 40b is a space. That is, the mirror part 41 and the frame 42 are connected to each other only at the pair of connection regions 40a and 40b. The width (minimum width) W2 of each connection region 40a, 40b in a direction parallel to the X-axis (hereinafter referred to as the "X-axis direction") is 30% or less of the width (maximum width) W1 of the mirror portion 41 in the X-axis direction.

[0033] The shape of mirror section 41 when viewed from a direction perpendicular to the X-axis and Y-axis is an ellipse centered at intersection O of the X-axis and Y-axis, with the major axis along the X-axis and the minor axis along the Y-axis. A mirror surface 41a is formed on the surface of mirror section 41 (the surface opposite to magnetic field generating section 10) by a metal film made of, for example, aluminum.

[0034] The frame 42 has, for example, a rectangular outer shape when viewed from a direction perpendicular to the X-axis and the Y-axis, and is formed in a frame shape. More specifically, the frame 42 is formed in a frame shape by a pair of first parts 43, 44 extending in the X-axis direction and a pair of second parts 45, 46 extending in the Y-axis direction. The length of each of the first parts 43, 44 in the X-axis direction is longer than the length of each of the second parts 45, 46 in the Y-axis direction. The length of each of the first parts 43, 44 in the X-axis direction can be regarded as the length of the outer edge or inner edge of each of the first parts 43, 44 when viewed from a direction perpendicular to the X-axis and the Y-axis. The length of each of the second parts 45, 46 in the Y-axis direction can be regarded as the length of the outer edge or inner edge of each of the second parts 45, 46 when viewed from a direction perpendicular to the X-axis and the Y-axis.

[0035] The distance between the connection region 40a and the second portion 45, the distance between the connection region 40a and the second portion 46, the distance between the connection region 40b and the second portion 45, and the distance between the connection region 40b and the second portion 46 are longer than the distance between the X-axis and the first portion 43 and the distance between the X-axis and the first portion 44. The distance between the connection region 40a and the second portion 45 can be considered as the distance (maximum distance) from the outer edge of the connection region 40a on the second portion 45 side to the inner edge of the second portion 45 along the X-axis direction. The distance between the connection region 40a and the second portion 46 can be considered as the distance (maximum distance) from the outer edge of the connection region 40a on the second portion 46 side to the inner edge of the second portion 46 along the X-axis direction. The distance between the connection region 40b and the second portion 45 can be considered as the distance (maximum distance) from the outer edge of the connection region 40b on the second portion 45 side to the inner edge of the second portion 45 along the X-axis direction. The distance between the connection region 40b and the second portion 46 can be interpreted as the distance (maximum distance) from the outer edge of the connection region 40b on the second portion 46 side to the inner edge of the second portion 46 along the X-axis direction. The distance between the X-axis and the first portion 43 can be interpreted as the distance (maximum distance) from the X-axis to the inner edge of the first portion 43 along the Y-axis direction. The distance between the X-axis and the first portion 44 can be interpreted as the distance (maximum distance) from the X-axis to the inner edge of the first portion 44 along the Y-axis direction.

[0036] The mirror section 41 is connected to an inner side surface 43a (on the mirror section 41 side) of the first section 43 and an inner side surface 44a (on the mirror section 41 side) of the first section 44. The torsion bar 7 is connected to an outer side surface 45b (on the opposite side to the mirror section 41) of the second section 45. The torsion bar 8 is connected to an outer side surface 46b (on the opposite side to the mirror section 41) of the second section 46.

[0037] The side surface 41b of the mirror section 41 and the inner side surface 43a of the first portion 43 are connected so that the curvature is continuous in the connection region 40a. The side surface 41b of the mirror section 41 and the inner side surface 44a of the first portion 44 are connected so that the curvature is continuous in the connection region 40b. In other words, the outer edge of the mirror section 41 and the inner edge of the frame 42 are connected so that the curvature is continuous in each connection region 40a, 40b when viewed from a direction perpendicular to the X-axis and Y-axis. Note that "connected so that the curvature is continuous" means that there is no point where the curvature is discontinuous (for example, the apex of a sharp corner (including any of acute angles, right angles, and obtuse angles)). Therefore, as long as there is no point where the curvature is discontinuous, straight lines may be included in the outer edge of the mirror section 41 and the inner edge of the frame 42 in each connection region 40a, 40b (the value of the curvature of the straight line part can be considered to be 0).

[0038] The width of the first portion 43 in the Y-axis direction is smaller as it approaches the torsion bar 7 from the connection region 40a along the X-axis direction, and as it approaches the torsion bar 8 from the connection region 40a along the X-axis direction. That is, the width of the first portion 43 in the Y-axis direction is smaller as it moves away from the connection region 40a. Here, the side surface 43b on the outer side (opposite the mirror portion 41) of the first portion 43 is a flat surface parallel to the X-axis, and the inner side surface 43a of the first portion 43 is a curved surface that is concavely curved on the opposite side to the mirror portion 41 so as to approach the side surface 43b as it moves away from the connection region 40a. The width of the first portion 44 in the Y-axis direction is smaller as it moves away from the connection region 40b along the X-axis direction, and as it moves away from the connection region 40b along the X-axis direction. That is, the width of the first portion 44 in the Y-axis direction is smaller as it moves away from the connection region 40b. Here, the outer side 44b of the first portion 44 (opposite the mirror portion 41) is a flat surface parallel to the X-axis, and the inner side 44a of the first portion 44 is a curved surface that is concavely curved on the opposite side to the mirror portion 41 so that the further away from the connection region 40b it is, the closer it is to the side 44b.

[0039] The inner side surface 43a of the first portion 43 and the inner side surface 45a (mirror section 41 side) of the second portion 45 are connected to each other so that the curvature is continuous in the region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. The inner side surface 43a of the first portion 43 and the inner side surface 46a (mirror section 41 side) of the second portion 46 are connected to each other so that the curvature is continuous in the region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. The inner side surface 44a of the first portion 44 and the inner side surface 45a of the second portion 45 are connected to each other so that the curvature is continuous in the region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. The inner side surface 44a of the first portion 44 and the inner side surface 46a of the second portion 46 are connected to each other so that the curvature is continuous in the region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. In other words, the inner edges of the first portions 43, 44 and the inner edges of the second portions 45, 46 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed in a direction perpendicular to the X-axis and Y-axis.

[0040] The outer side surface 43b of the first portion 43 and the outer side surface 45b of the second portion 45 are connected to each other so that the curvature is continuous in the region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. The outer side surface 43b of the first portion 43 and the outer side surface 46b of the second portion 46 are connected to each other so that the curvature is continuous in the region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. The outer side surface 44b of the first portion 44 and the outer side surface 45b of the second portion 45 are connected to each other so that the curvature is continuous in the region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. The outer side surface 44b of the first portion 44 and the outer side surface 46b of the second portion 46 are connected to each other so that the curvature is continuous in the region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. In other words, the outer edges of the first portions 43, 44 and the outer edges of the second portions 45, 46 are connected to each other so that the curvature is continuous in each of the regions where they are connected to each other when viewed in a direction perpendicular to the X-axis and Y-axis.

[0041] A slit 45c extending in the Y-axis direction is formed in the second portion 45. When viewed from a direction perpendicular to the X-axis and Y-axis, the slit 45c is located between the torsion bar 7 and the mirror portion 41. A slit 46c extending in the Y-axis direction is formed in the second portion 46. When viewed from a direction perpendicular to the X-axis and Y-axis, the slit 46c is located between the torsion bar 8 and the mirror portion 41.

[0042] The coil 11 extends along the outer side surfaces 43b, 44b in each of the first portions 43, 44. The center position (center position of the width in the Y-axis direction) of the region in which the coil 11 extends in the first portion 43 is located outside (opposite the connection region 40a) of the center position (center position of the width in the Y-axis direction) of the first portion 43. The center position (center position of the width in the Y-axis direction) of the region in which the coil 11 extends in the first portion 44 is located outside (opposite the connection region 40b) of the center position (center position of the width in the Y-axis direction) of the first portion 44.

[0043] The coil 11 extends along the inner side surfaces 45a, 46a of the second portions 45, 46. The center position (center position of the width in the X-axis direction) of the region in which the coil 11 extends in the second portion 45 is located more inward (opposite side from the torsion bar 7) than the center position (center position of the width in the X-axis direction) of the second portion 45 (here, located more inward than the slit 45c). The center position (center position of the width in the X-axis direction) of the region in which the coil 11 extends in the second portion 46 is located more inward (opposite side from the torsion bar 8) than the center position (center position of the width in the X-axis direction) of the second portion 46 (here, located more inward than the slit 46c).

[0044] As shown in FIG. 3, both side surfaces 7a of the torsion bar 7 and the outer side surface 45b of the second portion 45 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. In other words, the outer edge of the torsion bar 7 and the outer edge of the second portion 45 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. Both side surfaces 7a of the torsion bar 7 and the inner side surface 3a (on the mirror portion 41 side) of the support portion 3 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. In other words, the outer edge of the torsion bar 7 and the inner edge of the support portion 3 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. The curvature of the outer edge of the torsion bar 7 in the region connected to the outer edge of the second portion 45 is smaller than the curvature of the outer edge of the torsion bar 7 in the region connected to the inner edge of the support portion 3.

[0045] Similarly, both side surfaces of the torsion bar 8 and the outer side surface 46b of the second portion 46 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis (see Figs. 1 and 2). That is, the outer edge of the torsion bar 8 and the outer edge of the second portion 46 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. Both side surfaces of the torsion bar 8 and the inner side surface 3a of the support portion 3 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis (see Figs. 1 and 2). That is, the outer edge of the torsion bar 8 and the inner edge of the support portion 3 are connected to each other so that the curvature is continuous in each region where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. The curvature of the outer edge of the torsion bar 8 in the region connected to the outer edge of the second portion 46 is smaller than the curvature of the outer edge of the torsion bar 8 in the region connected to the inner edge of the support portion 3 (see Figs. 1 and 2).

[0046] 3, the coil 9 extends along the outer side surface 3b of the support 3 (the side opposite to the mirror portion 41). The center position (the center position of the width in the X-axis direction) of the region where the coil 9 extends in the portion of the support 3 to which the torsion bar 7 is connected is located outside (the side opposite to the torsion bar 7) relative to the center position (the center position of the width in the X-axis direction) of the portion. The center position (the center position of the width in the X-axis direction) of the region where the coil 9 extends in the portion of the support 3 to which the torsion bar 8 is connected is located outside (the side opposite to the torsion bar 8) relative to the center position (the center position of the width in the X-axis direction) of the portion (see FIGS. 1 and 2).

[0047] As shown in FIG. 4, a beam structure 31 is provided on the back surface (surface on the side of the magnetic field generating unit 10) of the support unit 3. When viewed from a direction perpendicular to the X-axis and Y-axis, the beam structure 31 extends in an annular shape along the frame-shaped support unit 3. The width of a portion of the beam structure 31 extending in the Y-axis direction (width in the X-axis direction) is smaller than the width of a portion of the beam structure 31 extending in the X-axis direction (width in the Y-axis direction). A plurality of lightening holes 31a are formed in the portion of the beam structure 31 extending in the X-axis direction, except for an intermediate portion crossing the Y-axis. The size of each lightening hole 31a increases with increasing distance from the Y-axis.

[0048] The center position (center position of width in the X-axis direction) of the part of the beam structure 31 extending in the Y-axis direction on the torsion bar 7 side is located outside (opposite side from the torsion bar 7) of the center position (center position of width in the X-axis direction) of the part of the support part 3 extending in the Y-axis direction and to which the torsion bar 7 is connected. The center position (center position of width in the X-axis direction) of the part of the beam structure 31 extending in the Y-axis direction on the torsion bar 8 side is located outside (opposite side from the torsion bar 8) of the center position (center position of width in the X-axis direction) of the part of the support part 3 extending in the Y-axis direction and to which the torsion bar 8 is connected.

[0049] A plurality of beam structures 47, 48, and 49 are provided on the rear surface (surface on the magnetic field generating unit 10 side) of the mirror unit 41. When viewed from a direction perpendicular to the X-axis and Y-axis, the beam structure 47 extends in a V-shape from the intersection O toward both edges of the connection region 40a in the X-axis direction. When viewed from a direction perpendicular to the X-axis and Y-axis, the beam structure 48 extends in a V-shape from the intersection O toward both edges of the connection region 40b in the X-axis direction. When viewed from a direction perpendicular to the X-axis and Y-axis, the beam structure 49 extends in an X-shape on both sides in the X-axis direction from the intersection O. [Action and Effects]

[0050] In the mirror device 1, a pair of torsion bars 7, 8 connected to a frame 42 is disposed on the X-axis, and a pair of connection regions 40a, 40b where the mirror part 41 and the frame 42 are connected to each other are located on both sides of the mirror part 41 in the Y-axis direction. As a result, even if the movable part 4 is oscillated at high speed with the X-axis as the center line, the stress generated in each connection region 40a, 40b due to the twisting of the pair of torsion bars 7, 8 is smaller than, for example, a case where only the pair of connection regions 40a, 40b are located on the X-axis, or a case where the mirror part 41 and the frame 42 are connected to each other only in one connection region 40a (or 40b). Furthermore, in the mirror device 1, the outer edge of the mirror part 41 and the inner edge of the frame 42 are connected so that the curvature is continuous in each connection region 40a, 40b when viewed from a direction perpendicular to the X-axis and Y-axis. As a result, stress concentration is less likely to occur in each connection region 40a, 40b. As described above, according to the mirror device 1, it is possible to prevent both the mirror part 41 from bending and the movable part 4 from being damaged.

[0051] In the mirror device 1, the pair of connection regions 40a, 40b are located on both sides of the mirror part 41 on the Y axis. This makes it possible to ensure a sufficient distance between each of the torsion bars 7, 8 and each of the connection regions 40a, 40b (a distance at which the influence of the twisting of the pair of torsion bars 7, 8 is unlikely to reach each of the connection regions 40a, 40b). Therefore, while simplifying the configuration of the movable part 4, it is possible to suppress both bending of the mirror part 41 and damage to the movable part 4.

[0052] In the mirror device 1, the frame 42 includes a pair of first parts 43, 44 to which the mirror part 41 is connected and which extend in the X-axis direction, and the width of each of the first parts 43, 44 in the Y-axis direction becomes smaller as it moves away from each of the connection regions 40a, 40b. This allows the stress generated due to the twisting of the pair of torsion bars 7, 8 to be dispersed to the parts of the first parts 43, 44 with smaller widths, and the stress generated in each of the connection regions 40a, 40b to be further reduced. Furthermore, while ensuring the connection strength in each of the connection regions 40a, 40b, the inertia moment of the movable part 4 when the X-axis is the rotation axis can be reduced by the amount of the reduced width in each of the first parts 43, 44. Reducing the inertia moment of the movable part 4 when the X-axis is the rotation axis is advantageous in oscillating the movable part 4 at high speed with the X-axis as the center line. In particular, the inner side 43a of the first portion 43 is a concavely curved surface toward the opposite side of the mirror portion 41 so that the further it moves away from the connection region 40a, the closer it becomes to the outer side 43b of the first portion 43, and the inner side 44a of the first portion 44 is a concavely curved surface toward the opposite side of the mirror portion 41 so that the further it moves away from the connection region 40b, the closer it becomes to the outer side 44b of the first portion 44.This more reliably distributes the stress generated by the twisting of the pair of torsion bars 7, 8 and suppresses stress concentration in each of the first portions 43, 44.

[0053] FIG. 5(a) is a plan view of the movable part 4 of the comparative example, and FIG. 5(b) is a plan view of the movable part 4 of the embodiment (the movable part 4 described above). FIG. 6(a) is a plan view of the movable part 4 of the comparative example, and FIG. 6(b) is a plan view of the movable part 4 of the embodiment. In the movable part 4 of the comparative example shown in FIG. 5(a), the width of each of the first parts 43, 44 in the Y-axis direction is constant, and the width of the movable part 4 in the Y-axis direction is equal to the width of the movable part 4 of the embodiment shown in FIG. 5(b). In the movable part 4 of the comparative example shown in FIG. 6(a), the width of each of the first parts 43, 44 in the Y-axis direction is constant, and the width of the movable part 4 in the Y-axis direction is smaller than the width of the movable part 4 of the embodiment shown in FIG. 6(b).

[0054] Comparing the movable part 4 of the comparative example shown in FIG. 5(a) with the movable part 4 of the comparative example shown in FIG. 6(a), the moment of inertia of the movable part 4 of the comparative example shown in FIG. 5(a) is large when the X-axis is the rotation axis, and the movable part 4 of the comparative example shown in FIG. 6(a) cannot fully alleviate the stress caused by the twisting of the pair of torsion bars 7, 8. In contrast, the movable part 4 of the embodiment shown in FIG. 5(b) and FIG. 6(b) can reduce the moment of inertia of the movable part 4 of the embodiment shown in FIG. 5(a) when the X-axis is the rotation axis. In addition, the movable part 4 of the embodiment shown in FIG. 5(b) and FIG. 6(b) can alleviate the stress caused by the twisting of the pair of torsion bars 7, 8, compared to the movable part 4 of the comparative example shown in FIG. 6(a).

[0055] In the mirror device 1, the frame 42 includes a pair of second portions 45, 46 to which the pair of torsion bars 7, 8 are connected and which extend in the Y-axis direction, in addition to the pair of first portions 43, 44. This allows the stress caused by the twisting of the pair of torsion bars 7, 8 to be dispersed to the portions between the first portions 43, 44 and the second portions 45, 46 which are connected to each other, thereby making it possible to further reduce the stress generated in each of the connection regions 40a, 40b.

[0056] In the mirror device 1, the inner edges of the first portions 43, 44 and the inner edges of the second portions 45, 46 are connected to each other such that the curvature is continuous in each region where the first portions 43, 44 and the inner edges of the second portions 45, 46 are connected to each other when viewed from a direction perpendicular to the X-axis and the Y-axis. This makes it possible to suppress stress concentration in each region where the inner edges of the first portions 43, 44 and the inner edges of the second portions 45, 46 are connected to each other.

[0057] In the mirror device 1, the outer edges of the first portions 43, 44 and the outer edges of the second portions 45, 46 are connected to each other such that the curvature is continuous in each region where the first portions 43, 44 and the outer edges of the second portions 45, 46 are connected to each other when viewed in a direction perpendicular to the X-axis and the Y-axis. This makes it possible to suppress stress concentration in each region where the outer edges of the first portions 43, 44 and the outer edges of the second portions 45, 46 are connected to each other.

[0058] In the mirror device 1, the length of each of the first portions 43, 44 in the X-axis direction is longer than the length of each of the second portions 45, 46 in the Y-axis direction. This makes it possible to ensure a sufficient distance between each of the torsion bars 7, 8 and each of the connection regions 40a, 40b (a distance at which the influence of the twisting of the pair of torsion bars 7, 8 is unlikely to reach each of the connection regions 40a, 40b) while suppressing an increase in the moment of inertia of the movable part 4 when the X-axis is the rotation axis.

[0059] In the mirror device 1, the distance between the connection region 40a and the second portion 45, the distance between the connection region 40a and the second portion 46, the distance between the connection region 40b and the second portion 45, and the distance between the connection region 40b and the second portion 46 are each longer than the distance between the X axis and the first portion 43 and the distance between the X axis and the first portion 44. This makes it possible to ensure a sufficient distance between each of the torsion bars 7, 8 and each of the connection regions 40a, 40b (a distance at which the influence of the twisting of the pair of torsion bars 7, 8 is unlikely to reach each of the connection regions 40a, 40b) while suppressing an increase in the moment of inertia of the movable part 4 when the X axis is the rotation axis.

[0060] In the mirror device 1, the shape of the mirror section 41 when viewed from a direction perpendicular to the X-axis and Y-axis is an ellipse with the major axis along the X-axis. This makes it possible to ensure a sufficient area of ​​the mirror surface 41a while suppressing an increase in the moment of inertia of the movable section 4 when the X-axis is the axis of rotation.

[0061] In the mirror device 1, the width of each of the connection regions 40a, 40b in the X-axis direction is 30% or less of the width of the mirror portion 41 in the X-axis direction. This makes it possible to ensure both a sufficient connection strength between the mirror portion 41 and the frame 42 and a sufficient distance between each of the torsion bars 7, 8 and each of the connection regions 40a, 40b.

[0062] In the mirror device 1, the coil 11 extends along the outer side surfaces 43b, 44b in the first parts 43, 44, and extends along the inner side surfaces 45a, 46a in the second parts 45, 46. This separates the coil 11 from the connection regions 40a, 40b and the torsion bars 7, 8, so that the stress generated in the coil 11 due to the twisting of the pair of torsion bars 7, 8 is reduced. This makes it possible to suppress the occurrence of metal fatigue in the coil 11. As described above, in the connection regions 40a, 40b, the stress is reduced to a level that does not lead to the bending of the mirror part 41 and the damage of the movable part 4, but there is a risk that the stress that leads to metal fatigue of the coil 11 remains. Therefore, it is effective from a safety standpoint to extend the coil 11 along the outer side surfaces 43b, 44b in the first parts 43, 44 and separate the coil 11 from the connection regions 40a, 40b.

[0063] In the mirror device 1, the slit 45c located between the torsion bar 7 and the mirror part 41 is formed in the first part 43, and the slit 46c located between the torsion bar 8 and the mirror part 41 is formed in the first part 44. This makes it difficult for the twisting of the pair of torsion bars 7, 8 to affect the coil 11. Therefore, it is possible to suppress the occurrence of metal fatigue in the coil 11. Furthermore, it is difficult for the twisting of the pair of torsion bars 7, 8 to affect each of the connection regions 40a, 40b. Therefore, it is possible to more reliably suppress both the bending of the mirror part 41 and the damage to the movable part 4.

[0064] In the mirror device 1, the coil 9 extends along the outer side surface 3b of the support part 3. This separates the coil 9 from each of the torsion bars 7, 8, reducing the stress generated in the coil 9 due to the twisting of the pair of torsion bars 7, 8. This makes it possible to suppress the occurrence of metal fatigue in the coil 9.

[0065] In the mirror device 1, the curvature of the outer edge of the torsion bar 7 in the region connected to the outer edge of the second portion 45 is smaller than the curvature of the outer edge of the torsion bar 7 in the region connected to the inner edge of the support portion 3. Similarly, the curvature of the outer edge of the torsion bar 8 in the region connected to the outer edge of the second portion 46 is smaller than the curvature of the outer edge of the torsion bar 8 in the region connected to the inner edge of the support portion 3. By reducing the curvature of the outer edge of each torsion bar 7, 8 in the region connected to the frame 42, the stress generated in the frame 42 due to the twisting of the pair of torsion bars 7, 8 can be reduced. On the other hand, by increasing the curvature of the outer edge of each torsion bar 7, 8 in the region connected to the support portion 3, the length of each torsion bar 7, 8 can be secured, and the stress itself generated due to the twisting of the pair of torsion bars 7, 8 can be reduced. It is more effective to reduce the stress generated due to the twisting of the pair of torsion bars 7, 8 on the movable portion 4 side that is linearly operated, rather than on the support portion 3 side.

[0066] In the mirror device 1, a beam structure 31 extending in an annular shape along the frame-shaped support portion 3 is provided on the back surface of the support portion 3. This can suppress deformation of the support portion 3. Moreover, since the beam structure 31 is formed continuously, stress concentration can be suppressed compared to when the beam structure 31 is formed discontinuously. In addition, in the mirror device 1, the width (width in the X-axis direction) of the portion of the beam structure 31 extending in the Y-axis direction is smaller than the width (width in the Y-axis direction) of the portion of the beam structure 31 extending in the X-axis direction. This can reduce the moment of inertia of the support portion 3 when the Y-axis is the axis of rotation. In addition, in the mirror device 1, the size of each of the lightening holes 31a formed in the portion of the beam structure 31 extending in the X-axis direction increases with increasing distance from the Y-axis. This can reduce the moment of inertia of the support portion 3 when the Y-axis is the axis of rotation. In addition, in the mirror device 1, the lightening holes 31a are not formed in the intermediate portion of the beam structure 31 that crosses the Y-axis. This increases the moment of inertia of the support 3 when the X-axis is the rotation axis, and suppresses the support 3 from swinging about the X-axis. Furthermore, in the mirror device 1, the center position of the part of the beam structure 31 extending in the Y-axis direction is located outside the center position of the part of the support 3 extending in the Y-axis direction. This causes the part of the beam structure 31 extending in the Y-axis direction on the torsion bar 7 side to be separated from the torsion bar 7, and the part of the beam structure 31 extending in the Y-axis direction on the torsion bar 8 side to be separated from the torsion bar 8, so that the stress generated in the beam structure 31 due to the twisting of the pair of torsion bars 7, 8 can be reduced.

[0067] In the mirror device 1, a beam structure 47 extending in a V-shape from the intersection O toward both edges of the connection region 40a in the X-axis direction, and a beam structure 48 extending in a V-shape from the intersection O toward both edges of the connection region 40b in the X-axis direction are provided on the rear surface of the mirror part 41. This makes it possible to reduce stress generated in each of the connection regions 40a, 40b due to twisting of the pair of torsion bars 7, 8. [Variations]

[0068] The present disclosure is not limited to the above-described embodiment. For example, the material and shape of each part are not limited to the above-described material and shape, and various materials and shapes can be adopted. As an example, the frame 42 may have an outer shape such as a polygonal shape other than a rectangle when viewed from a direction perpendicular to the X-axis and Y-axis as long as it is formed in a frame shape. In addition, the mirror surface 41a may be formed on at least a part of the mirror part 41. In addition, the shape of the mirror part 41 when viewed from a direction perpendicular to the X-axis and Y-axis may be a circle shape or the like. In addition, the driving method of the mirror device 1 is not limited to the electromagnetic driving type, and may be an electrostatic driving type, a piezoelectric driving type, a thermal driving type, or the like. In addition, the base 2 and the pair of torsion bars 5, 6 may not be provided in the mirror device 1, and the support part 3 may function as the base.

[0069] Also, when the pair of torsion bars 7, 8 are arranged on both sides of the movable part 4 on the first axis, the pair of connection regions 40a, 40b may be located on both sides of the mirror part 41 in a direction parallel to the second axis perpendicular to the first axis. As an example, when a pair of parts (parts constituting opposite sides) of the frame 42 formed in a polygonal frame shape intersect with the second axis, the pair of connection regions 40a, 40b may be arranged within the pair of parts. In the above-mentioned embodiment, the pair of connection regions 40a, 40b may be arranged within the pair of first parts 43, 44. Alternatively, regardless of the shape of the frame 42, the pair of connection regions 40a, 40b may be arranged in a region that is 45 degrees or more and 135 degrees or less in one direction from the first axis and a region that is 45 degrees or more and 135 degrees or less in the other direction from the first axis, with the intersection point of the first axis and the second axis as the center point. Each of the connection regions 40a and 40b may be composed of a plurality of physically separated regions.

[0070] 7A, the width of the first portion 43 in the Y-axis direction may be a flat surface inclined such that the inner side surface 43a of the first portion 43 approaches the outer side surface 43b of the first portion 43 as it moves away from the connection region 40a. Similarly, the width of the first portion 44 in the Y-axis direction may be a flat surface inclined such that the inner side surface 44a of the first portion 44 approaches the outer side surface 44b of the first portion 44 as it moves away from the connection region 40b.

[0071] 7(b), so long as the width of the first portion 43 in the Y-axis direction decreases with increasing distance from the connection region 40a, the first portion 43 may have a curved surface that is curved in a step shape such that the inner side surface 43a of the first portion 43 approaches the outer side surface 43b of the first portion 43 with increasing distance from the connection region 40a. Similarly, the width of the first portion 44 in the Y-axis direction may have a curved surface that is curved in a step shape such that the inner side surface 44a of the first portion 44 approaches the outer side surface 44b of the first portion 44 with increasing distance from the connection region 40b, so long as the width of the first portion 44 in the Y-axis direction decreases with increasing distance from the connection region 40b, as shown in FIG.

[0072] 8, in the movable section 4 of the third modification, the mirror section 41 is connected to the frame 42 at each of a pair of connection regions (first connection regions) 40a, 40b located on both sides of the mirror section 41 in the Y-axis direction, and at each of a pair of connection regions (second connection regions) 40c, 40d located on both sides of the mirror section 41 in the X-axis direction. The region between the mirror section 41 and the frame 42 other than the pair of connection regions 40a, 40b and the pair of connection regions 40c, 40d is a space. That is, the mirror section 41 and the frame 42 are connected to each other only at the pair of connection regions 40a, 40b and the pair of connection regions 40c, 40d.

[0073] The side surface 41b of the mirror section 41 and the inner side surface 43a of the first portion 43 are connected so that the curvature is continuous in the connection region 40a. The side surface 41b of the mirror section 41 and the inner side surface 44a of the first portion 44 are connected so that the curvature is continuous in the connection region 40b. In other words, the outer edge of the mirror section 41 and the inner edge of the frame 42 are connected so that the curvature is continuous in each of the connection regions 40a, 40b when viewed from a direction perpendicular to the X-axis and Y-axis.

[0074] The side surface 41b of the mirror section 41 and the inner side surface 45a of the second section 45 are connected so that the curvature is continuous in the connection region 40d. The side surface 41b of the mirror section 41 and the inner side surface 46a of the second section 46 are connected so that the curvature is continuous in the connection region 40c. In other words, the outer edge of the mirror section 41 and the inner edge of the frame 42 are connected so that the curvature is continuous in each of the connection regions 40c, 40d when viewed from a direction perpendicular to the X-axis and Y-axis.

[0075] The width of the first portion 43 in the Y-axis direction becomes smaller as it moves away from the connection region 40a. Here, the outer side surface 43b of the first portion 43 is a flat surface parallel to the X-axis, and the inner side surface 43a of the first portion 43 approaches the side surface 43b as it moves away from the connection region 40a. The width of the first portion 44 in the Y-axis direction becomes smaller as it moves away from the connection region 40b. Here, the outer side surface 44b of the first portion 44 is a flat surface parallel to the X-axis, and the inner side surface 44a of the first portion 44 approaches the side surface 44b as it moves away from the connection region 40b.

[0076] The inner side surface 43a of the first portion 43 may be a flat surface inclined so as to approach the outer side surface 43b of the first portion 43 as it moves away from the connection region 40a. Similarly, the inner side surface 44a of the first portion 44 may be a flat surface inclined so as to approach the outer side surface 44b of the first portion 44 as it moves away from the connection region 40b. Also, the inner side surface 43a of the first portion 43 may be a curved surface bent in a step shape so as to approach the outer side surface 43b of the first portion 43 as it moves away from the connection region 40a. Similarly, the inner side surface 44a of the first portion 44 may be a curved surface bent in a step shape so as to approach the outer side surface 44b of the first portion 44 as it moves away from the connection region 40b.

[0077] The width of the second portion 45 in the X-axis direction becomes smaller as it moves away from the connection region 40d. Here, the outer side surface 45b of the second portion 45 is a flat surface parallel to the Y-axis, and the inner side surface 45a of the second portion 45 approaches the side surface 45b as it moves away from the connection region 40d. The width of the second portion 46 in the X-axis direction becomes smaller as it moves away from the connection region 40c. Here, the outer side surface 46b of the second portion 46 is a flat surface parallel to the Y-axis, and the inner side surface 46a of the second portion 46 approaches the side surface 46b as it moves away from the connection region 40c.

[0078] The inner side surface 45a of the second portion 45 may be a flat surface that is inclined so as to approach the outer side surface 45b of the second portion 45 as it moves away from the connection region 40d. Similarly, the inner side surface 46a of the second portion 46 may be a flat surface that is inclined so as to approach the outer side surface 46b of the second portion 46 as it moves away from the connection region 40c. Also, the inner side surface 45a of the second portion 45 may be a curved surface that is bent in a step shape so as to approach the outer side surface 45b of the second portion 45 as it moves away from the connection region 40d. Similarly, the inner side surface 46a of the second portion 46 may be a curved surface that is bent in a step shape so as to approach the outer side surface 46b of the second portion 46 as it moves away from the connection region 40c.

[0079] In the mirror device 1 having the movable part 4 of the third modification, a pair of torsion bars 7, 8 connected to the frame 42 is disposed on the X-axis, and a pair of connection regions 40a, 40b where the mirror part 41 and the frame 42 are connected to each other are located on both sides of the mirror part 41 in the Y-axis direction. Furthermore, a pair of connection regions 40c, 40d where the mirror part 41 and the frame 42 are connected to each other are located on both sides of the mirror part 41 in the X-axis direction. As a result, even if the movable part 4 is swung at high speed around the X-axis as the center line, the stress generated in each of the connection regions 40a, 40b, 40c, 40d due to the twisting of the pair of torsion bars 7, 8 is smaller than, for example, a case where only the pair of connection regions 40a, 40b are located on the X-axis or a case where the mirror part 41 and the frame 42 are connected to each other only in one connection region 40a (or 40b). Furthermore, in the mirror device 1 equipped with the movable part 4 of the third modification, the outer edge of the mirror part 41 and the inner edge of the frame 42 are connected so that the curvature is continuous in each of the connection regions 40a, 40b when viewed from a direction perpendicular to the X-axis and Y-axis. This makes it difficult for stress concentration to occur in each of the connection regions 40a, 40b. As described above, the mirror device 1 equipped with the movable part 4 of the third modification can prevent both bending of the mirror part 41 and damage to the movable part 4.

[0080] In the mirror device 1 having the movable part 4 of the third modification, the outer edge of the mirror part 41 and the inner edge of the frame 42 are connected so that the curvature is continuous in each of the connection regions 40c, 40d when viewed from a direction perpendicular to the X-axis and Y-axis. This makes it difficult for stress concentration to occur in each of the connection regions 40c, 40d.

[0081] In the mirror device 1 including the movable part 4 of the third modified example, a pair of connection regions 40c, 40d are located on both sides of the mirror part 41 on the X-axis. This makes it possible to reduce the moment of inertia of the movable part around the X-axis.

[0082] When the pair of torsion bars 7, 8 are disposed on both sides of the movable part 4 on the first axis, the pair of connection regions 40c, 40d may be located on both sides of the mirror part 41 in a direction parallel to the first axis. As an example, when a pair of parts (parts constituting opposite sides) of the frame 42 formed in a polygonal frame shape intersect with the first axis, the pair of connection regions 40c, 40d may be disposed within the pair of parts. In the case of the movable part 4 of the third modification, the pair of connection regions 40c, 40d may be disposed within a pair of second parts 45, 46. Alternatively, regardless of the shape of the frame 42, the pair of connection regions 40c, 40d may be disposed in a region that is 45 degrees or more and 135 degrees or less in one direction from the second axis, and in a region that is 45 degrees or more and 135 degrees or less in the other direction from the second axis, with the intersection point of the first axis and the second axis as the center point. Each of the connection regions 40c and 40d may be composed of a plurality of physically separated regions.

[0083] In the mirror device 1 having the movable part 4 of the third modification, the width of each of the first parts 43, 44 in the Y-axis direction becomes smaller as it moves away from each of the connection regions 40a, 40b, and the width of each of the second parts 45, 46 in the X-axis direction becomes smaller as it moves away from each of the connection regions 40c, 40d. This allows the stress generated due to the twisting of the pair of torsion bars 7, 8 to be distributed to the parts with smaller widths in each of the first parts 43, 44 and each of the second parts 45, 46, and the stress generated in each of the connection regions 40a, 40b, 40c, 40d to be further reduced. Furthermore, while ensuring the connection strength in each of the connection regions 40a, 40b, 40c, 40d, the inertia moment of the movable part 4 when the X-axis is the rotation axis can be reduced by the amount of the smaller widths in each of the first parts 43, 44 and each of the second parts 45, 46. However, the width of each of the second portions 45, 46 in the X-axis direction does not have to decrease with increasing distance from each of the connection regions 40c, 40d.

[0084] In the mirror device 1 having the movable part 4 of the third modification, the slit 45c located between the torsion bar 7 and the mirror part 41 is formed in the first part 43, and the slit 46c located between the torsion bar 8 and the mirror part 41 is formed in the first part 44. Furthermore, the curvature of the outer edge of the torsion bar 7 in the region connected to the outer edge of the second part 45 is smaller than the curvature of the outer edge of the torsion bar 7 in the region connected to the inner edge of the support part 3. Similarly, the curvature of the outer edge of the torsion bar 8 in the region connected to the outer edge of the second part 46 is smaller than the curvature of the outer edge of the torsion bar 8 in the region connected to the inner edge of the support part 3. As a result, in the mirror device 1 having the movable part 4 of the third modification, the mirror part 41 is stably supported by the four connection regions 40a, 40b, 40c, and 40d, while the influence of the twist of the pair of torsion bars 7 and 8 is unlikely to reach the pair of connection regions 40c and 40d.

[0085] The configurations in the above-described embodiment are also applied to the mirror device 1 including the movable part 4 of the third modified example. For example, the inner edges of the first parts 43, 44 and the inner edges of the second parts 45, 46 are connected to each other so that the curvatures are continuous in the regions where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. Also, the outer edges of the first parts 43, 44 and the outer edges of the second parts 45, 46 are connected to each other so that the curvatures are continuous in the regions where they are connected to each other when viewed from a direction perpendicular to the X-axis and Y-axis. Also, the length of each of the first parts 43, 44 in the X-axis direction is longer than the length of each of the second parts 45, 46 in the Y-axis direction. Moreover, the distance between the connection region 40a and the second portion 45, the distance between the connection region 40a and the second portion 46, the distance between the connection region 40b and the second portion 45, and the distance between the connection region 40b and the second portion 46 are longer than the distance between the X-axis and the first portion 43 and the distance between the X-axis and the first portion 44. Moreover, the shape of the mirror portion 41 when viewed from a direction perpendicular to the X-axis and the Y-axis is an ellipse having a major axis along the X-axis. Moreover, the width of each of the connection regions 40a, 40b in the X-axis direction is 30% or less of the width of the mirror portion 41 in the X-axis direction. Moreover, the coil 11 extends along the outer side surfaces 43b, 44b in each of the first portions 43, 44, and extends along the inner side surfaces 45a, 46a in each of the second portions 45, 46. Moreover, the coil 9 extends along the outer side surface 3b of the support portion 3. Moreover, a beam structure 31 is provided on the rear surface of the supporting portion 3, extending in an annular shape along the frame-shaped supporting portion 3. Moreover, a beam structure 47 is provided on the rear surface of the mirror portion 41, extending in a V-shape from the intersection point O toward both edges of the connection region 40a in the X-axis direction, and a beam structure 48 is provided on the rear surface of the mirror portion 41, extending in a V-shape from the intersection point O toward both edges of the connection region 40b in the X-axis direction.

[0086] In the mirror device 1 having the movable part 4 of the third modified example, the materials and shapes of each part are not limited to those described above, and various materials and shapes can be used. As an example, the frame 42 may have an outer shape, such as a polygonal shape other than a rectangle, when viewed from a direction perpendicular to the X-axis and Y-axis, as long as it is formed in a frame shape. Also, the mirror surface 41a may be formed on at least a part of the mirror part 41. Also, the shape of the mirror part 41 when viewed from a direction perpendicular to the X-axis and Y-axis may be a circle, etc.

[0087] In the above-described embodiment and each of the modified examples, the coil 11 for oscillating the movable part 4 is provided in the movable part 4, and the coil 9 for oscillating the support part 3 is provided in the support part 3, but the coil for oscillating the movable part 4 and the coil for oscillating the support part 3 may each be provided in the support part 3, or a single coil for oscillating both the movable part 4 and the support part 3 may be provided in the support part 3.

[0088] Each configuration in one embodiment or modification described above can be arbitrarily applied to each configuration in another embodiment or modification. [Explanation of symbols]

[0089] 1...mirror device, 3...support portion, 4...movable portion, 7, 8...torsion bars, 40a, 40b...connection region (first connection region), 40c, 40d...connection region (second connection region), 41...mirror portion, 42...frame, 43, 44...first portion, 45, 46...second portion.

Claims

1. A support portion; A movable part; a pair of first torsion bars that are arranged on both sides of the movable part on a first axis and connect the movable part to the support part so that the movable part can swing around the first axis, a mirror surface is provided on one surface of the movable portion, A beam structure is provided on the other surface of the movable portion, The beam structure includes: a first beam structure that extends in a V-shape across the second axis from a center side of the movable portion toward one side in a direction parallel to the second axis when viewed from a direction perpendicular to the first axis and a second axis perpendicular to the first axis; a second beam structure that extends in a V-shape across the second axis from a center side of the movable portion toward the other side in the direction parallel to the second axis when viewed from the direction perpendicular to the first axis and the second axis; a third beam structure extending in a V-shape across the first axis from a center side of the movable portion toward one side in a direction parallel to the first axis when viewed from the direction perpendicular to the first axis and the second axis; and a fourth beam structure extending in a V-shape across the first axis from a center side of the movable part toward the other side in the direction parallel to the first axis when viewed from the direction perpendicular to the first axis and the second axis, A mirror device, wherein each of the pair of first torsion bars has a portion whose width increases toward the movable portion when viewed from the direction perpendicular to the first axis and the second axis.

2. The mirror device according to claim 1 , wherein the beam structure further includes connection portions connected to a pair of tip portions of the first beam structure and the second beam structure on an opposite side to a center of the movable portion.

3. The mirror device according to claim 2 , wherein each of the first beam structure and the second beam structure has the connecting portion and thereby forms a closed figure.

4. The mirror device according to any one of claims 1 to 3, wherein, when viewed from the direction perpendicular to the first axis and the second axis, the outer edges of the pair of first torsion bars and the outer edge of the movable part are connected to each other so that their curvatures are continuous.

5. The movable part is a frame to which the pair of first torsion bars are connected; a mirror portion disposed inside the frame and provided with the mirror surface and the beam structure; the mirror portion is connected to the frame at a pair of first connection regions located on both sides of the mirror portion in the direction parallel to the second axis, 5. The mirror device according to claim 1, wherein a region between the mirror portion and the frame other than the pair of first connection regions is a space.

6. The movable part is a frame to which the pair of first torsion bars are connected; a mirror portion disposed inside the frame and provided with the mirror surface and the beam structure; the mirror portion is connected to the frame at a pair of first connection regions located on both sides of the mirror portion in the direction parallel to the second axis, and at a pair of second connection regions located on both sides of the mirror portion in the direction parallel to the first axis, 5. The mirror device according to claim 1, wherein an area between the mirror portion and the frame other than the pair of first connection areas and the pair of second connection areas is a space.

7. the pair of first connection regions is a first connection region disposed on the one side in the direction parallel to the second axis, and a second first connection region disposed on the other side in the direction parallel to the second axis, the first beam structure extends in a V-shape from a center side of the movable portion toward both edge portions of the one first connection region in the direction parallel to the first axis when viewed from the direction perpendicular to the first axis and the second axis, 7. The mirror device according to claim 5, wherein the second beam structure, when viewed from the direction perpendicular to the first axis and the second axis, extends in a V-shape from a center side of the movable part toward both edges of the other first connection area in the direction parallel to the first axis.

8. With the base, a pair of second torsion bars arranged on both sides of the support portion on the second axis and connecting the support portion to the base so that the support portion can swing about the second axis, The support portion has a frame shape, The mirror device according to any one of claims 1 to 7, wherein the support portion is provided with a fifth beam structure.

9. The mirror device according to claim 8 , wherein the fifth beam structure extends in an annular shape along the frame-shaped support portion when viewed from the direction perpendicular to the first axis and the second axis.

10. 10. The mirror device according to claim 8, wherein a width of a portion of the fifth beam structure extending in the direction parallel to the second axis is smaller than a width of a portion of the fifth beam structure extending in the direction parallel to the first axis.

11. The mirror device according to any one of claims 8 to 10, wherein, in the direction parallel to the first axis, a center position of a portion of the fifth beam structure extending in the direction parallel to the second axis is located on the opposite side to each of the pair of first torsion bars with respect to a center position of a portion of the support portion extending in the direction parallel to the second axis and to which each of the pair of first torsion bars is connected.

12. Further comprising a coil, The coil is embedded in a surface of one side of the support portion, 12. The mirror device according to claim 8, wherein the fifth beam structure is provided on a surface on the other side of the support portion.

13. Each of the pair of first torsion bars extends linearly, The mirror device according to any one of claims 8 to 12, wherein each of the pair of second torsion bars extends in a serpentine shape.

14. 14. The mirror device according to claim 1, wherein the support portion, the movable portion, and the pair of first torsion bars are integrally formed by an SOI substrate.

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