Shower head split cooling plate

Abstract

The cooling assembly includes a first subassembly and a second subassembly. The first subassembly is coupled to a showerhead of a substrate processing system. The first subassembly includes a plurality of passages proximate to and in thermal communication with the showerhead. The second subassembly is removably coupled to the first subassembly. The second subassembly includes a plurality of protrusions each aligned with the plurality of passages.

Description

[Technical field]

[0001] [CROSS REFERENCE TO RELATED APPLICATIONS] This application claims the benefit of U.S. Provisional Application No. 63 / 037,176, filed June 10, 2020. The entire disclosure of the aforementioned application is incorporated herein by reference.

[0002] The present disclosure relates generally to substrate processing systems, and more particularly to a split cold plate for cooling a showerhead in a substrate processing system. [Background technology]

[0003] The background discussion provided herein is intended to provide a general context for the present disclosure. Work by the currently named inventors, to the extent described in this Background section, as well as aspects of the description that may not otherwise be considered prior art at the time of filing, are not admitted, expressly or impliedly, as prior art against the present disclosure.

[0004] A substrate processing system typically includes multiple processing chambers (also called process modules) for performing deposition, etching, and other processing of substrates such as semiconductor wafers. Examples of processes that may be performed on a substrate include, but are not limited to, plasma-enhanced chemical vapor deposition (PECVD), chemically enhanced plasma vapor deposition (CEPVD), sputtering physical vapor deposition (PVD), atomic layer deposition (ALD), and plasma-enhanced ALD (PEALD). Further examples of processes that may be performed on a substrate include, but are not limited to, etching (e.g., chemical etching, plasma etching, reactive ion etching, etc.) and cleaning processes.

[0005] During processing, the substrate is placed on a substrate support, such as a pedestal, electrostatic chuck (ESC), etc., in a processing chamber of a substrate processing system. A computer-controlled robot typically transports the substrate from one processing chamber to another in the order in which the substrates are processed. During deposition, a gas mixture containing one or more precursors is introduced into the processing chamber and a plasma is struck to activate a chemical reaction. During etching, a gas mixture containing an etching gas is introduced into the processing chamber and a plasma is struck to activate a chemical reaction. The processing chamber is periodically cleaned by supplying a cleaning gas into the processing chamber and striking a plasma. Summary of the Invention

[0006] The cooling assembly includes a first subassembly and a second subassembly. The first subassembly is coupled to a showerhead of a substrate processing system. The first subassembly includes a plurality of passageways proximate to and in thermal communication with the showerhead. The second subassembly is removably coupled to the first subassembly. The second subassembly includes a plurality of protrusions each aligned with the plurality of passageways.

[0007] In other features, the first subassembly is a hollow cylinder having an inner diameter. The second subassembly is a solid cylinder having an outer diameter smaller than the inner diameter. The second subassembly is inserted within the first subassembly.

[0008] In another feature, the plurality of passageways each surround the plurality of protrusions without contacting the plurality of protrusions.

[0009] In another feature, the plurality of passageways and the plurality of protrusions extend radially from a central region of the first subassembly and the second subassembly, respectively.

[0010] In another feature, the second subassembly includes an inlet for receiving fluid flowing through the plurality of passages and an outlet for exhausting fluid from the plurality of passages.

[0011] In other features, each passage of the plurality of passages has a first width and a first depth, and each protrusion of the plurality of protrusions has a second width and a second height less than the first width and first depth, respectively.

[0012] In another feature, the plurality of passages and the plurality of protrusions are symmetrical.

[0013] In another feature, the plurality of passages and the plurality of protrusions are asymmetric.

[0014] In another feature, the cooling assembly further includes a plurality of seals that seal contact points between the plurality of protrusions and the plurality of passages, respectively.

[0015] In other features, the first and second subassemblies are made of a first material, and the cooling assembly further includes a conductive element made of a second material having a higher electron affinity than the first material and removably disposed in the second subassembly and in fluid communication with the fluid.

[0016] In another feature, the first subassembly includes a tubular structure extending vertically through a center of the first subassembly and having a first end coupled to the first inlet for receiving the process gas and having a second end for outputting the process gas to the showerhead.

[0017] In another feature, the second subassembly includes a manifold surrounding the tubular structure and connected to a second inlet for receiving a coolant and having an outlet in fluid communication with the plurality of passages.

[0018] In another feature, the second subassembly includes an inlet for receiving a purge gas and an outlet for outputting the purge gas to the showerhead.

[0019] In another feature, the cooling assembly further includes a plurality of fasteners securing the second subassembly to the first subassembly.

[0020] In another feature, the cooling assembly further includes a plurality of fasteners extending through the bores in the first and second subassemblies and securing the cooling assembly to the showerhead.

[0021] In yet another feature, the cooling assembly is coupled to a showerhead of a substrate processing system. The cooling assembly includes a first subassembly and a second subassembly. The first subassembly includes a first annular flange, a first cylindrical wall, and a plurality of passages. The first cylindrical wall extends from the first annular flange to a first base portion surrounding a distal end of the first cylindrical wall. The first base portion is attached to the showerhead of the substrate processing system. The plurality of passages is disposed on a first side of the first base portion facing the first annular flange. The plurality of passages extend radially from a first central region of the first base portion toward an outer diameter of the first base portion. The second subassembly includes a second annular flange coupled to the first annular flange, a second cylindrical wall, and a plurality of protrusions. The second cylindrical wall extends from the second annular flange to the second base portion. The second cylindrical wall surrounds a distal end of the second cylindrical wall. The first cylindrical wall surrounds the second cylindrical wall. The plurality of protrusions are disposed on a second side of the second base portion facing away from the second annular flange. The plurality of protrusions extend radially from a second central region of the second base portion toward an outer diameter of the second base portion. The plurality of protrusions are respectively aligned with the plurality of passages.

[0022] In other features, a system includes a cooling assembly, a showerhead, and a plurality of fasteners. The showerhead is coupled to a second side of the first base portion opposite the first side of the first base portion. The plurality of fasteners traverse the cooling assembly and secure the showerhead to the second side of the first base portion.

[0023] In other features, a first passage of the plurality of passages has a first width and a first depth, and a first protrusion of the plurality of protrusions has a second width less than the first width and a second height less than the first depth.

[0024] In other features, the plurality of passages respectively surround the plurality of protrusions.

[0025] In other features, the plurality of passages each surround the plurality of protrusions without contacting the plurality of protrusions.

[0026] In other features, the first subassembly further includes a tubular structure extending perpendicularly from the first central region of the first base portion toward the first annular flange. The second subassembly further includes a first inlet for receiving coolant, a cylindrical manifold connected to the first inlet, and an outlet for discharging coolant from the plurality of passages. The cylindrical manifold surrounds the tubular structure. The cylindrical manifold has an outlet in fluid communication with the plurality of passages.

[0027] In other features, the first and second subassemblies are made of a first material, and the cooling assembly further includes a conductive element made of a second material having a higher electron affinity than the first material and removably disposed in the second subassembly and in fluid communication with the coolant.

[0028] In other features, the cooling assembly further includes a plurality of fasteners securing the second annular flange to the first annular flange.

[0029] In other features, the cooling assembly further includes a plurality of seals that seal contact points between the plurality of protrusions and the plurality of passages, respectively.

[0030] In another feature, the tubular structure is hollow and includes a first end coupled to a second inlet for receiving a process gas and a second end for outputting the process gas to the showerhead.

[0031] In another feature, the second subassembly includes an inlet for receiving a purge gas and an outlet for outputting the purge gas to the showerhead.

[0032] In other features, a system includes a cooling assembly, a showerhead, and a coolant supply. The showerhead is coupled to a second side of the first base portion opposite the first side of the first base portion. The coolant supply is configured to supply coolant to the first inlet of the second subassembly.

[0033] In still other features, the assembly includes a first subassembly and a second subassembly. The first subassembly includes a first annular flange, a first cylindrical wall, and a plurality of passages. The first cylindrical wall extends from the first annular flange to a first base portion surrounding a distal end of the first cylindrical wall. The plurality of passages are disposed on a first side of the first base portion facing the first annular flange. The plurality of passages extend radially from a first central region of the first base portion toward an outer diameter of the first base portion. The second subassembly includes a second annular flange coupled to the first annular flange, a second cylindrical wall, and a plurality of protrusions. The second cylindrical wall extends from the second annular flange to the second base portion. The second cylindrical wall surrounds a distal end of the second cylindrical wall. The first cylindrical wall surrounds the second cylindrical wall. The plurality of protrusions are disposed on a second side of the second base portion facing away from the second annular flange. The plurality of protrusions extend radially from a second central region of the second base portion toward an outer diameter of the second base portion. The plurality of protrusions are respectively aligned with the plurality of passages.

[0034] In other features, a first passage of the plurality of passages has a first width and a first depth, and a first protrusion of the plurality of protrusions has a second width less than the first width and a second height less than the first depth.

[0035] In other features, the plurality of passages each surround the plurality of protrusions without contacting the plurality of protrusions.

[0036] In other features, the first subassembly further includes a tubular structure extending perpendicularly from the first central region of the first base portion toward the first annular flange. The second subassembly further includes an inlet for receiving a fluid, a cylindrical manifold connected to the inlet, and an outlet for discharging fluid from the plurality of passages. The cylindrical manifold surrounds the tubular structure. The cylindrical manifold has an outlet in fluid communication with the plurality of passages.

[0037] In other features, the first and second subassemblies are made of a first material, and the assembly further includes a conductive element made of a second material having a higher electron affinity than the first material and removably disposed in the second subassembly and in fluid communication with the fluid.

[0038] In other features, the assembly further includes a plurality of fasteners securing the second annular flange to the first annular flange.

[0039] In other features, the assembly further includes a plurality of seals that seal contact points between the plurality of projections and the plurality of passageways, respectively.

[0040] In other features, a system includes an assembly and an object coupled to a second side of the first base portion opposite the first side of the first base portion. The system further includes a plurality of fasteners that traverse the assembly and secure the object to the second side of the first base portion. The system further includes a fluid supply for supplying a fluid to an inlet of the second subassembly. The fluid includes a coolant for cooling the object or a hot fluid for heating the object.

[0041] Further areas of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure. [Brief description of the drawings]

[0042] The present disclosure will become more fully understood from the detailed description and the accompanying drawings, wherein:

[0043] [Figure 1] FIG. 1 is a diagram showing an example of a substrate processing apparatus including a processing chamber.

[0044] [Figure 2A] FIG. 2A illustrates an example cooling assembly for cooling a showerhead in accordance with the present disclosure. [Figure 2B] FIG. 2B illustrates an example cooling assembly for cooling a showerhead in accordance with the present disclosure.

[0045] [Diagram 3] FIG. 3 is a diagram illustrating an example of a first subassembly of a cooling assembly.

[0046] [Figure 4] FIG. 4 illustrates an example of a second subassembly of the cooling assembly.

[0047] [Diagram 5] FIG. 5 is an isometric view of the first subassembly.

[0048] [Figure 6] FIG. 6 is an isometric view of the second subassembly.

[0049] In the drawings, reference numbers may be reused to identify similar and / or identical elements. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0050] The showerhead often includes a heater. The showerhead further includes an electrode that may be powered by RF power to generate a plasma. As a result, the showerhead may reach high temperatures during substrate processing. A cold plate is coupled to the showerhead to cool it. Currently, cold plates are constructed using vacuum brazing. Vacuum brazing is expensive, has long lead times, and limits the design of the cold plate geometry. Furthermore, cold plates are permanent structures that cannot be serviced and are discarded when they become dirty or corroded. Cold plates may also contain residual manufacturing debris that cannot be verified or removed when installing a new showerhead. The debris may cause damage to the substrate. Additionally, these cold plate components provide insufficient cooling efficiency.

[0051] The present disclosure provides a split cold plate design that alleviates the above problems. The design utilizes seals and machined components to create multiple, intricate, highly efficient cooling passages in the split cold plate, improving heat exchange between the metal surrounding the passages and the coolant flowing through the passages. The split cold plate can be disassembled to allow cleaning of the components when they become contaminated. The design also allows for a new cold plate to be disassembled prior to installation to remove manufacturing debris. Additionally, the design incorporates a sacrificial anode to prevent pitting of the cold plate due to galvanic corrosion.

[0052] The split cooling plate (hereinafter referred to as the cooling assembly) according to the present disclosure includes two subassemblies that include male-female structures (i.e., protrusions on one subassembly and recesses or grooves on the other subassembly) that mate with each other to form the cooling assembly when the two subassemblies are joined. The cooling assembly includes paths or passages through which a coolant flows. The passages are arranged in a hub-and-spoke fashion, with the passages forming the spokes. The passages conduct heat from the showerhead, and heat is transferred from the passages to the coolant by heat exchange between the metal edges that define the passages and the coolant flowing through the passages. The passages are narrow in width (measured circumferentially along the transverse or XY plane) and deep (measured along the longitudinal or Z axis). The narrow width of the passages allows for rapid heat exchange between the elements surrounding the passages and the coolant flowing through the passages, providing effective cooling. The depth of the passages allows the passages to carry a sufficient amount of coolant to provide effective cooling. Such narrow and deep passages are difficult to manufacture when manufacturing the cooling assembly as a single integrated device. However, as described in more detail below, splitting the cooling assembly into two subassemblies in accordance with the present disclosure makes manufacturing easier.

[0053] Before describing the cooling assembly, an example of a substrate processing system in which the processing chamber includes a showerhead will be described with reference to FIG. 1. The cooling assembly according to the present disclosure can be used in this substrate processing system, as well as in any other substrate processing system in which the processing chamber includes a showerhead. The teachings of the present disclosure are not limited to showerheads for cooling. Rather, any structure or device can be cooled using the cooling assembly. Furthermore, the teachings of the present disclosure are not limited to providing cooling only. Rather, the teachings of the present disclosure can be used to provide heating instead of cooling due to the efficient heat exchange mechanism provided by the split design of the cooling assembly. In heating applications, a hot fluid is passed through the assembly instead of a coolant to heat elements around the passageway.

[0054] 1 illustrates an example of a substrate processing system 100 that includes a processing chamber 102 configured to generate a capacitively coupled plasma. The processing chamber 102 surrounds the other components of the substrate processing system 100 and contains the RF plasma (if used). The processing chamber 102 includes an upper electrode 104 and an electrostatic chuck (ESC) 106 or other type of substrate support. In operation, a substrate 108 is positioned on the ESC 106.

[0055] For example, the upper electrode 104 may include a gas distribution apparatus 110, such as a showerhead, for introducing and distributing process gases. The gas distribution apparatus 110 may include a stem portion including one end that is connected to the top surface of the processing chamber 102. The base portion of the showerhead is generally cylindrical and extends radially outward from an opposite end of the stem portion at a location spaced from the top surface of the processing chamber 102. The substrate-facing surface or faceplate of the showerhead base portion includes a plurality of holes through which vaporized precursors, process gases, cleaning gases, or purge gases flow. Alternatively, the upper electrode 104 may include a conductive plate, and gases may be introduced in another manner.

[0056] The ESC 106 includes a base plate 112 that functions as a bottom electrode. The base plate 112 supports a heater plate 114, which may correspond to a ceramic multi-zone heater plate. A thermal resistance layer 116 may be disposed between the heater plate 114 and the base plate 112. The base plate 112 may include one or more channels 118 for flowing coolant through the base plate 112.

[0057] When a plasma is used, an RF generation system (or RF source) 120 generates and outputs an RF voltage to one of the upper electrode 104 and the lower electrode (e.g., the base plate 112 of the ESC 106). The other of the upper electrode 104 and the base plate 112 may be DC grounded, AC grounded, or ungrounded. For example, the RF generation system 120 may include an RF generator 122 that generates RF power that is delivered to the upper electrode 104 or the base plate 112 by a match and distribution network 124. In other examples, not shown, a plasma may be generated inductively or remotely and then delivered to the process chamber 102.

[0058] The gas delivery system 130 includes one or more gas sources 132-1, 132-2, ... 132-N (collectively gas sources 132), where N is an integer greater than 0. The gas sources 132 are connected to a manifold 140 by valves 134-1, 134-2, ... 134-N (collectively valves 134) and mass flow controllers 136-1, 136-2, ... 136-N (collectively mass flow controllers 136). The vapor delivery system 142 supplies vaporized precursors to the manifold 140 or to a separate manifold (not shown) that is connected to the process chamber 102. The output of the manifold 140 is supplied to the process chamber 102. The gas sources 132 may supply process gases, cleaning gases, and / or purge gases.

[0059] The temperature controller 150 may be connected to a number of thermal control elements (TCEs) 152 disposed on the heating plate 114. The temperature controller 150 may be used to control the number of TCEs 152 to control the temperature of the ESCs 106 and the substrate 108. The temperature controller 150 may be in communication with a coolant assembly 154 to control the flow of coolant through the channel 118. For example, the coolant assembly 154 may include a coolant pump, a reservoir, and one or more temperature sensors (not shown). The temperature controller 150 operates the coolant assembly 154 to selectively flow coolant through the channel 118 to cool the ESCs 106. Valves 156 and pumps 158 may be used to evacuate reactants from the processing chamber 102. A system controller 160 controls the components of the substrate processing system 100.

[0060] A cooling assembly 200, described in more detail below, is attached to the showerhead 110. A coolant assembly 154, described in more detail below, provides coolant to the coolant assembly.

[0061] 2A and 2B show a cooling assembly 200 according to the present disclosure. The cooling assembly includes two subassemblies, a first subassembly 202 and a second subassembly 204. The two subassemblies 202 and 204 are shown and described with reference to FIGS. 3 and 4, respectively. Generally, the first subassembly 202 is a hollow cylinder having an inner diameter. The second subassembly 204 is a solid cylinder having an outer diameter larger than the inner diameter of the first subassembly 202. Thus, the second subassembly 204 can slide (i.e., be inserted) into the first subassembly 202. A fastener 206 connects the two subassemblies 202 and 204 together to form the cooling assembly 200. Although the cooling assembly 200 is described as being cylindrical, any other shape is possible, in which case the components of the cooling assembly will be shaped accordingly.

[0062] The cooling assembly 200 is attached to a showerhead (e.g., showerhead 110 shown in FIG. 1) using fasteners 210 (see one of the fasteners 210 shown separately in FIG. 2B). The fasteners 210 can be inserted into bores that traverse the cooling assembly 200 and reach a bottom portion of the cooling assembly 200. The fasteners 210 enter the cooling assembly 200 from the top of the cooling assembly 200 through the bores, attaching the bottom portion of the cooling assembly 200 to the top portion of the showerhead. The passages of the first subassembly 202 and the protrusions of the second subassembly 204 are designed and positioned around these bores for the fasteners 210 and other elements of the cooling assembly 200, as described below.

[0063] The cooling assembly 200 includes an inlet 212 through which coolant is supplied (e.g., from coolant assembly 154 shown in FIG. 1) and flows into the cooling assembly 200. The cooling assembly 200 includes an outlet 214 through which the coolant exits the cooling assembly 200 after circulating through passages (shown in FIGS. 3 and 4) within the cooling assembly 200 to remove heat from elements of the cooling assembly 200 that surround the passages.

[0064] The cooling assembly 200 is made of a metal, such as aluminum. A bottom portion of the cooling assembly 200 is in thermal contact with an upper portion of the showerhead. Due to a thermal gradient between the cooling assembly 200 and the showerhead, the metal in the bottom portion of the cooling assembly 200 conducts heat from the upper portion of the showerhead. The heat from the metal in the bottom portion of the cooling assembly 200 is conducted by a coolant circulating through passages in the cooling assembly 200, which cools the showerhead.

[0065] The cooling assembly 200 includes inlets 220 and 222, respectively, for supplying process gas and purge gas (e.g., from the gas delivery system 130 shown in FIG. 1) through the cooling assembly 200 to the showerhead. The cooling assembly 200 includes a temperature sensor 224 that can be used to sense the temperature of the cooling assembly 200 or the temperature of the coolant flowing through the cooling assembly 200. The controller 160 shown in FIG. 1 (or the temperature controller 150 shown in FIG. 1) shuts down the substrate processing system if the temperature of the cooling assembly 200 or the coolant flowing through the cooling assembly 200 sensed by the temperature sensor 224 is at or above a threshold value.

[0066] The cooling assembly 200 includes a sacrificial anode 226 in fluid communication with the coolant flowing through the cooling assembly 200. The sacrificial anode 226 is made of a material that has a greater affinity for any reactants present in the coolant than the metal used to manufacture the cooling assembly 200. Instead of the metal used to manufacture the cooling assembly 200, the sacrificial anode 226 attracts any reactive ions present in the coolant. As a result, the sacrificial anode 226 corrodes instead of the metal used to manufacture the cooling assembly 200 due to exposure to and reaction with any reactants present in the coolant. The sacrificial anode 226 is easier to remove and replace than the cooling assembly 200, and is much less expensive. Thus, the sacrificial anode 226 not only extends the life of the cooling assembly 200, but also reduces the maintenance that may be required to remove corrosive materials that have built up inside the cooling assembly 200.

[0067] The sacrificial anode 226 is typically in the form of a threaded bolt or a threaded rod. For example, the sacrificial anode 226 may include a head and a stud. The stud may be fully or partially threaded. For example, only the first portion of the stud near the head is threaded for bolting to the second subassembly 204. The sacrificial anode 226 is much less expensive than the cooling assembly 200 and is easily replaced when it corrodes.

[0068] In general, the sacrificial anode 226 can include any conductive element (e.g., metals, alloys, etc.) of any size and shape. The conductive element can be removably placed in the second subassembly 204 so as to be in fluid communication with the coolant. The conductive element has a higher electron affinity than the material of the cooling assembly 200.

[0069] 3 illustrates a first subassembly 202 of the cooling assembly 200. The first subassembly 202 is a female portion of the cooling assembly 200 that mates with a male portion of the cooling assembly 200 (i.e., the second subassembly 204) shown and described with reference to FIG.

[0070] The first subassembly 202 is a hollow cylindrical structure including a cylindrical wall 300 that depends vertically (i.e., extends downwardly) from a flange 302 and joins to the base portion 301 at the outer periphery or outer diameter of the base portion 301. An annular groove 304 is formed at the upper end of the cylindrical wall 300 (i.e., the end opposite the base portion 301) along the inner diameter of the flange 302. The flange 302 and annular groove 304 receive corresponding elements of the second subassembly 204 (shown in FIG. 4), and fasteners 206 (shown in FIG. 2) secure the first subassembly 202 and second subassembly 204 together.

[0071] The tubular structure 310 extends vertically upward from the base portion 301 of the first subassembly 202 and connects to an inlet 220 (shown in FIG. 2) that supplies process gases to a showerhead located below the base portion 301. The tubular structure 310 is hollow. The base portion 301 of the first subassembly 202 includes an opening in its center that coincides with the bottom portion of the tubular structure 310. Process gases from the inlet 220 flow through the tubular structure 310 and into the showerhead through the opening.

[0072] On an interior surface of the base portion 301 that faces away from the showerhead, the base portion 301 includes a number of passages through which coolant flows. Only two passages are identified as 320. Not all passages are labeled so as not to obscure other details shown. One or all of the passages will be referred to below as passage(s) 320.

[0073] The passages 320 extend radially from a central region of the base portion 301 (i.e., from the outer circumference or diameter of the tubular structure 310) toward the outer circumference or diameter of the base portion 301 where the base portion 301 joins the cylindrical wall 300. In this manner, the tubular structure 310 and the passages 320 are in a hub-and-spoke arrangement. The passages 320 can begin at or near the outer diameter of the tubular structure 310 and terminate at or near the outer diameter of the base portion 301.

[0074] Passage 320 is shown, by way of example, having a distinctive shape resembling the letter "T." Passage 320 need not be distinctively shaped. Rather, the shape of passage 320 may be dictated by the application in which cooling assembly 200 is used. For example, in the illustrated example, the shape of passage 320 is dictated by surrounding elements such as bores for fasteners 210, tubular structure 310, etc. Thus, passage 320 may be any shape that is possible or practical depending on the elements surrounding passage 320.

[0075] For example, in some applications, the passageway 320 may be linear, serpentine, zigzag, rectangular, or any other shape. For example, in some applications, the passageway 320 may be triangular in shape (like a round pie or a slice of pizza) with the base of the triangle proximate the outer diameter of the base portion 301 and the apex of the triangle proximate the central region of the base portion 301. In some applications, the triangle may be inverted.

[0076] Further, not all of the passages 320 need to be the same shape. Again, depending on the size and shape of the surrounding elements, the passages 320 can be of various shapes. For example, some of the passages 320 can have regular shapes while some of the passages 320 can have irregular shapes. Further, the passages 320 need not be radially arranged, but instead can be arranged in different configurations (e.g., circumferentially). Each passage 320 has a shape that matches the shape of a corresponding protrusion (shown in FIG. 4) on the second subassembly 204 into which the passage 320 mates.

[0077] The passage 320 has a width measured laterally or circumferentially along the XY plane. The width of the passage 320 is greater than the width of the protrusion (shown in FIG. 4 ) on the second subassembly 204 with which the passage 320 mates. If the width of the passage 320 is non-uniform due to an irregular shape of the passage 320, the width of the passage 320 is greater than the width of the corresponding protrusion all along the passage 320.

[0078] Additionally, the passages 320 extend longitudinally or vertically away from the flange 302 toward the bottom of the first subassembly 202 (i.e., toward the showerhead) and have a depth measured along the vertical or Z-axis. The depth of the passages 320 is greater than the height of the protrusion (shown in FIG. 4) on the second subassembly 204 with which the passages 320 mate.

[0079] Thus, when first subassembly 202 and second subassembly 204 are joined together by fasteners 206, the distance from the metal edge of passage 320 to the metal edge of the protrusion that mates with passage 320 is relatively small. This small distance allows for rapid heat transfer from the metal edges and protrusions of passage 320 to the center of the coolant flowing through passage 320. Rapid heat transfer from the metal to the coolant increases the efficiency with which cooling assembly 200 cools the showerhead.

[0080] Conversely, in heating applications where the cooling assembly 200 (sometimes alternatively referred to as the heating assembly 200) is used to pass a heating fluid through the passageway 320 to heat an object, heat from the heating fluid flowing through the passageway 320 is rapidly transferred to the metal portions surrounding the passageway 320, efficiently heating the object connected to the heating assembly 200.

[0081] 4 illustrates the second subassembly 204 of the cooling assembly 200. The second subassembly 204 is a male portion of the cooling assembly 200 that mates with the female portion of the cooling assembly 200 (i.e., the first subassembly 202) shown and described with reference to FIG.

[0082] The second subassembly 204 is shown upside down to illustrate its features. In the following description of the second subassembly 204, terms referring to the up-down direction are used assuming that the second subassembly 204 is installed on (i.e., on) the first subassembly 202 shown in FIG. 3 such that the cooling assembly 200 is oriented as shown in FIG.

[0083] The second subassembly 204 is a solid cylindrical structure including a cylindrical wall 400 that depends vertically (i.e., extends downwardly) from a flange 402 and joins with the base portion 401 at the outer periphery or outer diameter of the base portion 401. An annular groove 404 is formed at the upper end (i.e., the end opposite the base portion 401) of the cylindrical wall 400 along the inner diameter of the flange 402. The flange 402 and annular groove 404 of the second subassembly 204 fit into the flange 302 and annular groove 304 of the first subassembly 202 when the second subassembly 204 is installed on (i.e., on) the first subassembly 202 and the first subassembly 202 and second subassembly 204 are secured together by fasteners 206 (shown in FIG. 2 ). One or more O-rings (not shown) may be disposed in the flanges 302 , 402 and / or grooves 304 , 404 to sealingly couple the first subassembly 202 and the second subassembly 204 .

[0084] The second subassembly 204 includes a cylindrical cavity 410 at its center that extends the length or height of the second subassembly 204. When the second subassembly 204 is installed in (i.e., on) the first subassembly 202, the tubular structure 310 of the first subassembly 202 extends through the cylindrical cavity 410 and connects with the inlet 220 (shown in FIG. 2).

[0085] On the exterior surface of base portion 401 that faces the showerhead, base portion 401 includes a number of protrusions (i.e., male portions that correspond to passages 320). Only a few of the protrusions are identified as 420. Not all of the protrusions are labeled so as not to obscure other details shown. One or all of the protrusions will be referred to below as protrusion 420(s).

[0086] The protrusions 420 extend radially from a central region of the base portion 401 (from the outer periphery or diameter of the cylindrical cavity 410) toward the outer periphery or diameter of the base portion 401 where the base portion 401 joins with the cylindrical wall 400. In this manner, the cylindrical cavity 410 and the protrusions 420 are in a hub-and-spoke arrangement. The protrusions 420 can begin at or near the outer diameter of the cylindrical cavity 410 and terminate at or near the outer diameter of the base portion 401.

[0087] Protrusion 420 is shown, by way of example, to have a distinctive shape resembling the letter "T." Protrusion 420 need not be a distinctive shape. Rather, the shape of protrusion 420 may be dictated by the application in which cooling assembly 200 is used. For example, in the illustrated example, the shape of protrusion 420 is dictated by surrounding elements, such as a bore for fastener 210, cylindrical cavity 410, etc. Thus, protrusion 420 can be any shape that is possible or practical depending on the elements surrounding protrusion 420.

[0088] For example, in some applications, protrusion 420 may be linear, serpentine, zigzag, rectangular, or any other shape. For example, in some applications, protrusion 420 may be triangular in shape (like a round pie or a slice of pizza) with the base of the triangle proximate the outer diameter of base portion 401 and the apex of the triangle proximate the central region of base portion 401. In some applications, the triangle may be inverted.

[0089] Furthermore, not all of the protrusions 420 need to have the same shape. Again, depending on the size and shape of the surrounding elements, the protrusions 420 can have a variety of shapes. For example, some of the protrusions 420 can have regular shapes while some of the protrusions 420 can have irregular shapes. Furthermore, the protrusions 420 do not need to be radially arranged, but instead can be arranged in different configurations (e.g., circumferentially). Each protrusion 420 has a shape that matches the shape of the corresponding passage 320 into which the protrusion 420 fits.

[0090] The protrusion 420 has a width measured laterally or circumferentially along the XY plane. The width of the protrusion 420 is less than the width of the passageway 320 (shown in FIG. 4 ) of the first subassembly 202 with which the protrusion 420 mates. If the width of the protrusion 420 is non-uniform due to an irregular shape of the protrusion 420, the width of the protrusion 420 is less than the width of the corresponding passageway 320 all along the protrusion 420.

[0091] Moreover, the protrusion 420 extends longitudinally or vertically away from the flange 402 and outwardly from the bottom of the second subassembly 204 (i.e., away from the base portion 401 toward the showerhead) and has a height measured along the vertical or Z-axis. The height of the protrusion 420 is less than the depth of the passage 320 (shown in FIG. 4 ) of the first subassembly 202 that mates with the passage 320. Accordingly, when the first subassembly 202 and the second subassembly 204 are joined together by the fasteners 206, a gap exists between the metal edges that define the passage 320 and the metal edges that define the protrusion 420.

[0092] Additionally, the distance from the metal edge of the passage 320 to the metal edge of the protrusion 420 that mates with the passage 320 is relatively small. This small distance allows for rapid heat transfer from the metal edges of the passage 320 and the protrusion 420 to the center of the coolant flowing through the passage 320. Rapid heat transfer from the metal to the coolant increases the efficiency with which the cooling assembly 200 cools the showerhead.

[0093] FIG. 5 is a plan view of the first subassembly 202 illustrating the passages 320. FIG. 6 is a plan view of the second subassembly 204 illustrating the protrusions 420. In FIG. 5, a seal 500 is disposed on the metal edge of each passage 320. When the second subassembly 204 is installed on the first subassembly 202, the protrusions 420 mate with the passages 320 and the seals 500 prevent the coolant from leaking from the passages into the surrounding area. The inlet 212 is connected to a manifold 502 that surrounds the tubular structure 410 and supplies the coolant to the manifold 502. The passages 320 are connected to the manifold 502 and receive the coolant from the manifold 502.

[0094] The number of protrusions 420 of the second subassembly 204 is equal to the number of passages 320 of the first subassembly 202. The number of passages 320 and protrusions 420 of the cooling assembly may depend on the application. In general, the amount of cooling provided by the cooling assembly 200 is directly proportional to the number of passages 320 and protrusions 420 of the cooling assembly 200.

[0095] The foregoing description is merely exemplary in nature and is not intended to limit the disclosure, its application or uses. The broad teachings of the disclosure can be embodied in various forms. Thus, while the disclosure includes specific examples, the true scope of the disclosure should not be so limited, since other variations will become apparent from a study of the drawings, the specification, and the following claims.

[0096] It should be understood that one or more steps in a method may be performed in a different order (or simultaneously) without altering the principles of the present disclosure. Furthermore, although each of the embodiments is described above as having certain features, any one or more of those features described with respect to any embodiment of the present disclosure may be implemented in any other embodiment and / or may be combined with features of any other embodiment, even if that combination is not explicitly described. In other words, the described embodiments are not mutually exclusive, and it is within the scope of the present disclosure to substitute one or more embodiments for one another.

[0097] Spatial and functional relationships between elements (e.g., modules, circuit elements, semiconductor layers, etc.) are described using various terms such as "connected," "engaged," "coupled," "adjacent," "next to," "on," "above," "below," and "disposed." Unless expressly described as "direct," when a relationship between a first and second element is described in the above disclosure, the relationship may be a direct relationship where there are no other intervening elements between the first and second elements, but it may also be an indirect relationship where there are one or more intervening elements (spatially or functionally) between the first and second elements. As used herein, the phrase at least one of A, B, and C should be interpreted to mean a logic (A or B or C) with a non-exclusive logical OR, and not to mean "at least one of A, at least one of B, and at least one of C."

[0098] In some embodiments, the controller is part of a system, which may be part of the examples described above. Such a system may include semiconductor processing equipment including one or more processing tools, one or more chambers, one or more processing platforms, and / or specific processing components (wafer pedestals, gas flow systems, etc.). These systems may be integrated with electronics for controlling their operation before, during, and after processing of a semiconductor wafer or substrate. The electronics may be referred to as a "controller" and may control various components or sub-parts of one or more systems.

[0099] The controller may be programmed to control any of the processes disclosed herein, including delivery of process gases, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, liquid delivery settings, position and motion settings, loading and unloading of wafers into and out of the tool, and loading and unloading of wafers into and out of other transport tools and / or load locks connected or interfaced with the particular system, depending on the processing requirements and / or type of system.

[0100] Broadly speaking, a controller may be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receives instructions, issues instructions, controls operations, enables cleaning operations, enables endpoint measurements, etc. Integrated circuits may include chips in the form of firmware that store program instructions, digital signal processors (DSPs), chips defined as application specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute program instructions (e.g., software).

[0101] The program instructions may be instructions communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing a particular process on, for, or for a semiconductor wafer or system. The operational parameters, in some embodiments, may be part of a recipe defined by a process engineer to accomplish one or more processing steps during the manufacture of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or dies of the wafer.

[0102] The controller, in some embodiments, may be part of or connected to a computer that is integrated into the system, connected to the system, or otherwise networked to the system, or a combination thereof. For example, the controller may be all or part of a "cloud" or fab host computer system, which allows remote access of wafer processing. The computer may allow remote access to the system to monitor the current progress of a manufacturing operation, examine the history of past manufacturing operations, examine trends or performance criteria from multiple manufacturing operations, change parameters of a current process, set processing steps to track a current process, or initiate a new process.

[0103] In some examples, a remote computer (e.g., a server) can provide the process recipe to the system over a network, which may include a local network or the Internet. The remote computer may include a user interface that allows for entry or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data that specify parameters for each of the processing steps to be performed during one or more operations. It should be understood that the parameters may be specific to the type of process being performed and the type of tool the controller is configured to interface with or control.

[0104] Thus, as discussed above, the controller may be distributed, such as by including one or more individual controllers networked together and operating toward a common purpose, such as the processes and controls described herein. One example of a distributed controller for such purposes is one or more integrated circuits on the chamber that are located remotely (e.g., at the platform level or as part of a remote computer) and communicate with one or more integrated circuits that cooperatively control the processes in the chamber.

[0105] Examples of systems may include, but are not limited to, a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a cleaning chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a track chamber or module, and any other semiconductor processing system that may be associated with or used in the fabrication and / or manufacturing of semiconductor wafers.

[0106] As described above, depending on the process step or steps being performed by the tool, the controller may communicate with one or more of other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, a main computer, another controller, or tools used to transport materials to and from containers of wafers to and from tool locations and / or load ports within a semiconductor manufacturing factory. [Application Example 1] A first subassembly coupled to a showerhead of a substrate processing system, the first subassembly including a plurality of passages adjacent to the showerhead and in thermal communication with the showerhead; a second subassembly removably coupled to the first subassembly, the second subassembly including a plurality of protrusions each aligned with the plurality of passages; A cooling assembly comprising: [Application Example 2] The cooling assembly according to Application Example 1, the first subassembly is a hollow cylinder having an inner diameter; the second subassembly is a solid cylinder having an outer diameter smaller than the inner diameter; the second subassembly is inserted within the first subassembly; Cooling assembly. [Application Example 3] A cooling assembly according to Application Example 1, wherein each of the multiple passages surrounds the multiple protrusions without contacting the multiple protrusions. [Application Example 4] A cooling assembly according to Application Example 1, wherein the plurality of passages and the plurality of protrusions extend radially from central regions of the first subassembly and the second subassembly, respectively. [Application Example 5] A cooling assembly according to Application Example 1, wherein the second subassembly includes an inlet for receiving fluid flowing through the multiple passages and an outlet for discharging the fluid from the multiple passages. [Application Example 6] The cooling assembly according to Application Example 1, Each passage of the plurality of passages has a first width and a first depth; Each protrusion of the plurality of protrusions has a second width and a second height that are smaller than the first width and the first depth, respectively. Cooling assembly. [Application Example 7] A cooling assembly according to Application Example 1, wherein the plurality of passages and the plurality of protrusions are symmetrical. [Application Example 8] A cooling assembly according to Application Example 1, wherein the plurality of passages and the plurality of protrusions are asymmetric. [Application Example 9] A cooling assembly according to Application Example 1, further comprising a plurality of seals each sealing each of the contact points of the plurality of protrusions and the plurality of passages. [Application Example 10] The cooling assembly according to Application Example 5, wherein the first subassembly and the second subassembly are made of a first material; the cooling assembly further comprising a conductive element made of a second material having a higher electron affinity than the first material and removably disposed in the second subassembly and in fluid communication with the fluid. Cooling assembly. [Application Example 11] A cooling assembly as described in Application Example 1, wherein the first subassembly comprises a tubular structure extending vertically through a center of the first subassembly, having a first end connected to a first inlet for receiving a process gas, and having a second end for outputting the process gas to the showerhead. [Application Example 12] A cooling assembly as described in Application Example 11, wherein the second subassembly comprises a manifold surrounding the tubular structure, connected to a second inlet for receiving a coolant, and having an outlet in fluid communication with the plurality of passages. [Application Example 13] A cooling assembly according to Application Example 1, wherein the second subassembly has an inlet for receiving a purge gas and an outlet for outputting the purge gas to the showerhead. [Application Example 14] The cooling assembly according to Application Example 1, further comprising a plurality of fasteners for fixing the second subassembly to the first subassembly. [Application Example 15] The cooling assembly of Application Example 1, further comprising a plurality of fasteners extending through bores in the first subassembly and the second subassembly and securing the cooling assembly to the showerhead. [Example 16] A cooling assembly coupled to a showerhead of a substrate processing system, comprising: a first annular flange; a first cylindrical wall extending from the first annular flange to a first base portion, the first base portion surrounding a distal end of the first cylindrical wall, the first base portion being attached to the showerhead of the substrate processing system; a plurality of passages disposed on a first side of the first base portion facing the first annular flange and extending radially from a first central region of the first base portion toward an outer diameter of the first base portion; a first subassembly comprising: a second annular flange coupled to the first annular flange; a second cylindrical wall extending from the second annular flange to a second base portion, the second base portion surrounding a distal end of the second cylindrical wall, the first cylindrical wall surrounding the second cylindrical wall; a plurality of protrusions disposed on a second side of the second base portion facing away from the second annular flange, the protrusions extending radially from a second central region of the second base portion toward an outer diameter of the second base portion and aligned respectively with the plurality of passages; a second subassembly comprising: A cooling assembly comprising: [Application Example 17] The cooling assembly according to Application Example 16, the first subassembly further comprises a tubular structure made of a first material and extending perpendicularly from the first central region of the first base portion toward the first annular flange; the second subassembly is made of the first material; and a first inlet for receiving a coolant; a cylindrical manifold surrounding the tubular structure and connected to the first inlet and having an outlet in fluid communication with the plurality of passages; an outlet for discharging the coolant from the plurality of passages; Further equipped with the cooling assembly further comprising a conductive element made of a second material having a higher electron affinity than the first material and removably disposed within the second subassembly in fluid communication with the coolant; Cooling assembly. [Application Example 18] A first annular flange, a first cylindrical wall extending from the first annular flange to a first base portion, the first base portion surrounding a distal end of the first cylindrical wall; a plurality of passages disposed on a first side of the first base portion facing the first annular flange and extending radially from a first central region of the first base portion toward an outer diameter of the first base portion; a first subassembly comprising: a second annular flange coupled to the first annular flange; a second cylindrical wall extending from the second annular flange to a second base portion, the second base portion surrounding a distal end of the second cylindrical wall, the first cylindrical wall surrounding the second cylindrical wall; a plurality of protrusions disposed on a second side of the second base portion facing away from the second annular flange, the protrusions extending radially from a second central region of the second base portion toward an outer diameter of the second base portion and aligned respectively with the plurality of passages; a second subassembly comprising: An assembly comprising: [Application Example 19] The assembly according to Application Example 18, the first subassembly further comprising a tubular structure extending perpendicularly from the first central region of the first base portion toward the first annular flange; The second subassembly further comprises: an inlet for receiving a fluid; a cylindrical manifold surrounding the tubular structure and having an outlet connected to the inlet and in fluid communication with the plurality of passages; an outlet for discharging the fluid from the plurality of passages; Equipped with assembly. [Application Example 20] The assembly according to Application Example 19, an object coupled to a second side of the first base portion opposite the first side of the first base portion; a plurality of fasteners traversing the assembly and securing the object to the second side of the first base portion; a fluid supply for supplying the fluid to the inlet of the second subassembly; Equipped with The fluid comprises a coolant for cooling the object or a hot fluid for heating the object. system.

Claims

1. a first subassembly coupled to a showerhead of a substrate processing system, the first subassembly comprising a plurality of passageways proximate to and in thermal communication with the showerhead; a second subassembly removably coupled to the first subassembly, the second subassembly including a plurality of protrusions each aligned with the plurality of passages; A cooling assembly comprising:

2. 10. The cooling assembly of claim 1, the first subassembly is a hollow cylinder having an inner diameter; the second subassembly is a solid cylinder having an outer diameter smaller than the inner diameter; the second subassembly is inserted within the first subassembly; Cooling assembly.

3. The cooling assembly of claim 1 , wherein each of the plurality of passages surrounds each of the plurality of protrusions without contacting the each of the plurality of protrusions.

4. The cooling assembly of claim 1 , wherein the plurality of passages and the plurality of protrusions extend radially from a central region of the first subassembly and the second subassembly, respectively.

5. 2. The cooling assembly of claim 1, wherein the second subassembly includes an inlet for receiving fluid flowing through the plurality of passages and an outlet for exhausting the fluid from the plurality of passages.

6. 10. The cooling assembly of claim 1, Each passage of the plurality of passages has a first width and a first depth; each protrusion of the plurality of protrusions has a second width and a second height that are less than the first width and the first depth, respectively; Cooling assembly.

7. The cooling assembly of claim 1 , wherein the plurality of passages and the plurality of protrusions are symmetrical.

8. The cooling assembly of claim 1 , wherein the plurality of passages and the plurality of protrusions are asymmetric.

9. The cooling assembly of claim 1 , further comprising a plurality of seals each sealing a respective contact point of the plurality of protrusions and the plurality of passages.

10. 6. The cooling assembly of claim 5, wherein the first subassembly and the second subassembly are made from a first material; the cooling assembly further comprising a conductive element made of a second material having a higher electron affinity than the first material and removably disposed in the second subassembly and in fluid communication with the fluid. Cooling assembly.

11. 2. The cooling assembly of claim 1, wherein the first subassembly comprises a tubular structure extending vertically through a center of the first subassembly and having a first end coupled to a first inlet for receiving a process gas and a second end for outputting the process gas to the showerhead.

12. 12. The cooling assembly of claim 11, wherein the second subassembly comprises a manifold surrounding the tubular structure, connected to a second inlet for receiving a coolant, and having an outlet in fluid communication with the plurality of passages.

13. 10. The cooling assembly of claim 1, wherein the second subassembly comprises an inlet for receiving a purge gas and an outlet for outputting the purge gas to the showerhead.

14. The cooling assembly of claim 1 , further comprising a plurality of fasteners securing the second subassembly to the first subassembly.

15. 10. The cooling assembly of claim 1, further comprising a plurality of fasteners extending through bores in the first subassembly and the second subassembly and securing the cooling assembly to the showerhead.

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