Mask plate and mask device

Abstract

An embodiment of the present application provides a mask plate for depositing a substrate to be deposited, the mask plate includes a panel region, the panel region includes a deposition section and a non-deposition section, at least a part of the non-deposition section is located on one side of the deposition section in a first direction, the non-deposition section includes a first section and at least one second section, the first section and the deposition section are surrounded by a boundary line adjacent to each other to form a non-deposition area, the at least one second section is located within the non-deposition area, and the deposition section, the first section, and the second section have different mass-space ratios between the two sections adjacent to each other, the mass-space ratio being the ratio of the mass of each member to the total volume of the space occupied by each member. The difference in mass-space ratio between the first section and the deposition section also forms a material abrupt change boundary between the first section and the deposition section, which improves the deformation resistance of the mask plate and improves the problem of deposition failure caused by the mask plate not being able to effectively contact the deposition substrate during product deposition.

Description

[Technical field]

[0001] This application claims priority to Chinese Patent Application No. 202111434210.8, entitled "Mask Plate," filed on November 29, 2021, the entire contents of which are incorporated herein by reference.

[0002] The present application relates to the technical field of display device manufacturing, and in particular to a mask plate and a mask arrangement. [Background technology]

[0003] With the development of display technology, more and more display panels and display devices are applied in people's daily life and work. In order to improve user experience, traditional display panel structures generally integrate sensor modules, such as cameras, infrared sensors, etc. Summary of the Invention [Problem to be solved by the invention]

[0004] At present, in order to meet a relatively high screen occupancy rate, a transparent perforated area is usually provided in the middle area at one end of the display panel, and a sensor module is provided in the perforated area. In the current manufacturing process of display panels, a metal mask plate is usually used to deposit organic light-emitting materials. Due to the change in the shape of the display panel, the design complexity of the mask plate of some special-shaped products is gradually increasing, and the mask plate is very easy to deform and wrinkle, and the mask plate cannot be effectively contacted with the substrate during the deposition of the product, resulting in poor deposition.

[0005] SUMMARY OF THE DISCLOSURE The embodiments of the present application provide a mask plate and a mask apparatus that aim to improve deposition yields. [Means for solving the problem]

[0006] An embodiment of a first aspect of the present application provides a mask plate for depositing a deposition target substrate, the mask plate including a panel area, the panel area including a deposition portion and a non-deposition portion, at least a portion of the non-deposition portion being located on one side of the deposition portion in a first direction, the non-deposition portion including a first section and at least one second section, the first section and the deposition portion being surrounded by an adjacent boundary line to form a non-deposition region, the at least one second section being located within the non-deposition region, the deposition portion, the first section and the second section having adjacent boundaries have different mass-space ratios, and the mass-space ratio is the ratio of the mass of each component itself to the total volume of the space occupied by itself.

[0007] According to an embodiment of the first aspect of the present application, the mass-space ratio of any two of the deposition portion, the first section, and the second section, whose boundaries are adjacent to each other, is different, and a first boundary line is formed at a location adjacent to the boundary between the first section and the deposition portion, and the first boundary line includes a first abrupt change line extending in a straight line or curve, and the extension direction of the first abrupt change line or the extension direction of its tangent is parallel to the first direction, or the included angle between the two forms an acute angle.

[0008] According to any of the above-mentioned embodiments of the first aspect of the present application, a second boundary line is formed adjacent to the boundary between the first section and the second section, at least a portion of the second boundary lines extend in a straight line or a curved line, and the extension direction of at least a portion of the second boundary lines or the extension direction of their tangents is parallel to the extension direction of at least a portion of the first boundary lines or the extension direction of their tangents, or the included angle between the extension direction of at least a portion of the second boundary lines or the extension direction of their tangents and the extension direction of at least a portion of the first boundary lines or the extension direction of their tangents is an acute angle.

[0009] According to any of the above embodiments of the first aspect of the present application, the first boundary line further includes a second abrupt change line extending in a straight or curved manner, wherein the extension direction of the second abrupt change line or the extension direction of a tangent thereto is perpendicular to the first direction, the second boundary line includes a second sub-line adjacent to the second abrupt change line, the second sub-line extends in a straight or curved manner, wherein the extension direction of the second sub-line or the extension direction of a tangent thereto and the extension direction of the second abrupt change line or the tangent thereto are parallel to each other, or the included angle between the extension direction of the second sub-line or the extension direction of a tangent thereto and the extension direction of the second abrupt change line or the tangent thereto is an acute angle.

[0010] According to any of the above embodiments of the first aspect of the present application, the second sub-line includes a plurality of short lines distributed at intervals from each other.

[0011] According to any of the embodiments of the first aspect of the present application, the second boundary line includes a first sub-line adjacent to the first abrupt change line, the first sub-line extends in a straight or curved manner, and the extension direction of the first sub-line or the extension direction of a tangent thereto and the extension direction of the first abrupt change line or the tangent thereto are parallel to each other, or the included angle between the extension direction of the first sub-line or the extension direction of a tangent thereto and the extension direction of the first abrupt change line or the tangent thereto is an acute angle.

[0012] According to any of the embodiments of the first aspect of the present application, the at least one second section includes a plurality of second sections, the plurality of second sections being distributed at intervals within the non-deposited region.

[0013] According to any of the above embodiments of the first aspect of the present application, the plurality of second sections extend along the first direction and are distributed symmetrically about a centre line bisecting the deposition portion.

[0014] According to any of the embodiments of the first aspect of the present application, the second section itself is arranged axially symmetrically with respect to an axis extending along the first direction.

[0015] According to any of the above embodiments of the first aspect of the present application, adjacent boundary lines of two adjacent second sections are parallel to each other or form an acute angle.

[0016] According to any of the embodiments of the first aspect of the present application, the second section includes a plurality of openings, the openings being provided through the second section along the thickness direction of the mask plate, or the openings being formed by recessing a surface of the second section.

[0017] The present application further provides a mask device comprising a frame and a mask plate according to any one of the embodiments of the first aspect provided on the frame.

[0018] In the mask plate according to the embodiment of the present application, the mask plate includes a panel area for depositing a complete display panel. The panel area includes a deposition section for depositing a normal display area of ​​the display panel and a non-deposition section for depositing a hole area of ​​the display panel. The non-deposition section includes a first section and a second section, and at least one second section is located in the non-deposition area formed by being surrounded by the first section, and the mass-space ratio between the first section and the second section is different so that a material abrupt change boundary can be formed between the first section and the second section. Due to the difference in mass-space ratio between the first section and the deposition section, a material abrupt change boundary can also be formed between the first section and the deposition section, and these material abrupt change boundaries can improve the deformation resistance of the mask plate. In addition, the force received at different positions of the mask plate can be more uniform, wrinkles are less likely to occur, and the problem of deposition failure caused by the mask plate and the substrate to be deposited not being in effective contact during deposition of the product can be improved. [Brief description of the drawings]

[0019] Other features, objects and advantages of the present application will become apparent from the following detailed description of non-limiting embodiments, taken in conjunction with the drawings, in which the same or similar reference numerals indicate the same or similar features.

[0020] [Figure 1] FIG. 2 is a schematic diagram illustrating the structure of a display panel. [Diagram 2] 1 is a structural schematic diagram of a mask plate according to an embodiment of the first aspect of the present application. [Diagram 3] FIG. 3 is a partially enlarged schematic structural view of a portion I in FIG. 2. [Figure 4] 3 is a partially enlarged structural schematic diagram of a portion I in FIG. 2 according to another embodiment of the first aspect of the present application. FIG. [Diagram 5] 3 is a partially enlarged structural schematic diagram of a portion I in FIG. 2 according to still another embodiment of the first aspect of the present application. FIG. [Figure 6] FIG. 2 is a structural schematic diagram of a mask device according to an embodiment of the second aspect of the present application. [Explanation of symbols]

[0021] 10 Mask Plate 20 Frames 30 Display Panel 31 Display area 32 Hidden area 100 Deposition section 200 Non-evaporated area 210 First Section 220 Second Section 211 Aperture 300 First Boundary 310 First sudden change line 320 Second sudden change line 400 Second Boundary 410 First Subline 420 Second Subline 421 short line MA Panel Area P center line DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] The features and exemplary embodiments of each aspect of the present application will be described in detail below. In the following detailed description, many specific details are proposed to provide a comprehensive understanding of the present application. However, as will be apparent to those skilled in the art, the present application may be practiced without the need for some of these specific details. The following description of the embodiments is merely provided to illustrate examples of the present application and to better understand the present application. In the drawings and the following description, at least some known structures and techniques are not shown to avoid unnecessary ambiguity in the present application, and the dimensions of some structures may be exaggerated for clarity. In addition, the features, structures, or characteristics described below may be combined in any suitable manner into one or more embodiments.

[0023] 1 is a structural schematic diagram of a display panel 30. The display panel 30 includes a display area 31 and a non-display area 32, and the non-display area 32 may be, for example, a hole area, and the non-display area 32 is used to place components such as a camera, an earpiece, etc.

[0024] In the process of forming the display panel 30 by deposition using a mask plate, it is usually necessary to set up a deposition area and a non-deposition area in the panel area MA of the mask plate for depositing the display panel 30. The non-deposition area usually has a shielding plate structure, and when the mask plate is pulled, it is deformed and wrinkled due to the difference in the forces received by the deposition area and the non-deposition area, so that the mask plate cannot make effective contact with the substrate to be deposited during deposition of the product, resulting in poor deposition.

[0025] The present application has been made to solve the above technical problems. In order to better understand the present application, a mask plate and a mask device according to an embodiment of the present application will be described in detail below with reference to FIGS.

[0026] 2 and 3, Fig. 2 is a structural schematic diagram of a mask plate 10 according to an embodiment of the first aspect of the present application. Fig. 3 is a partially enlarged structural schematic diagram of a portion I in Fig. 2.

[0027] As shown in Figs. 2 and 3, a mask plate 10 according to an embodiment of the present application is used to deposit a deposition target substrate, and the mask plate 10 includes a panel area MA. The panel area MA includes a deposition section 100 and a non-deposition section 200 provided in the deposition section 100. At least a portion of the non-deposition section 200 is provided on one side of the deposition section 100 in a first direction, that is, at least a portion of the non-deposition section 200 is located on one side of the deposition section 100 in the first direction. The first direction may be, for example, the vertical direction shown in Fig. 1 or the horizontal direction shown in Figs. 2 and 3. A portion of the non-deposition section 200, a main portion of the non-deposition section 200, or the entire non-deposition section 200 may be located on one side of the deposition section 100 in the vertical direction in Fig. 1, or a portion of the non-deposition section 200, a main portion of the non-deposition section 200, or the entire non-deposition section 200 may be located on one side of the deposition section 100 in the horizontal direction in Figs. 2 and 3.

[0028] The non-deposition part 200 includes a first section 210 and a second section 220, and a non-deposition area is formed by being surrounded by the border between the first section 210 and the deposition part 100, and at least one second section 220 is located in the non-deposition area. The deposition part 100, the first section 210, and the second section 220 include at least one pair of elements whose borders are adjacent and whose mass-space ratios are different. In other words, the deposition part 100, the first section 210, and the second section 220 include at least one pair of elements. For example, the deposition part 100 and the first section 210 may be included, and the deposition part 100 and the first section 210 are adjacent and have different mass-space ratios. Or, it may comprise at least one pair of elements, for example a first section 210 and a second section 220, the first section 210 and the second section 220 being adjacent and having different mass-to-space ratios.

[0029] Preferably, among the deposition section 100, the first section 210, and the second section 220, any two adjacent boundaries have different mass-space ratios. That is, the deposition section 100 and the first section 210 are adjacent to each other but have different mass-space ratios, and the first section 210 and the second section 220 are adjacent to each other but also have different mass-space ratios. The mass-space ratio is the ratio of the mass of each member itself to the total volume of the space it occupies. The total volume of the occupied space includes the volume of the solid portion and the volume of the cavity portion provided within the solid portion.

[0030] The panel area MA is an area on the mask plate 10 for forming a single display panel 30 by deposition. The deposition section 100 is for forming the display area 31 of the display panel 30 by deposition, and the non-deposition area is for forming the non-display area 32 of the display panel 30. Only one panel area MA may be provided on the mask plate 10, or multiple panel areas MA may be provided on the mask plate 10, and for example, the multiple panel areas MA are distributed on the mask plate 10 in a matrix pattern.

[0031] The difference in mass-space ratio between any two of the deposition unit 100, the first section 210, and the second section 220 at adjacent boundaries means that when the boundaries between the deposition unit 100 and the first section 210 are adjacent, the mass-space ratio between the deposition unit 100 and the first section 210 is different, and when the boundaries between the first section 210 and the second section 220 are adjacent, the mass-space ratio between the first section 210 and the second section 220 is different. The deposition unit 100 is used to deposit and form the display region 31 of the display panel 30. For example, when the mask plate 10 is a precision mask plate, the deposition unit 100 has a plurality of deposition openings (not shown) through which sub-pixels of the display panel 30 can be formed.

[0032] The mass space ratio of the deposition unit 100 is the total mass of the deposition unit 100 divided by the total volume of the space occupied by the outer periphery of the deposition unit 100. For example, when a deposition opening is provided in the deposition unit 100, the total dimension of the space occupied by the outer periphery of the deposition unit 100 includes the volume of the space occupied by the deposition opening in the deposition unit 100.

[0033] Similarly, the mass-space ratio of first section 210 is the total mass of first section 210 divided by the total volume of space occupied by the exterior of first section 210. The mass-space ratio of second section 220 is the total mass of second section 220 divided by the total volume of space occupied by the exterior of second section 220.

[0034] In the mask plate 10 according to the embodiment of the present application, the mask plate 10 includes a panel area MA for depositing a complete display panel 30. The panel area MA includes a deposition section 100 and a non-deposition section 200, where the deposition section 100 is used for depositing a normal display area 31 of the display panel 30, and the non-deposition section 200 is used for depositing a perforated area of ​​the display panel 30. The non-deposition section 200 includes a first section 210 and a second section 220, where at least one second section 220 is located within the non-deposition area surrounded by the first section 210, and a material abrupt change boundary is formed between the first section 210 and the second section 220 due to the difference in mass-space ratio between the first section 210 and the second section 220. Due to the different mass-space ratios between the first section 210 and the deposition section 100, material abrupt change boundaries are also formed between the first section 210 and the deposition section 100. These material abrupt change boundaries can improve the deformation resistance of the mask plate 10, and make the forces received at different positions of the mask plate 10 more uniform, making it less likely to cause wrinkles, and improving the problem of poor deposition caused by the ineffective contact between the mask plate 10 and the substrate to be deposited during product deposition.

[0035] Preferably, the materials of the deposition section 100, the first section 210 and the second section 220 may be the same, and the mass-space ratio of the deposition section 100 may be reduced by providing a deposition opening, a groove, etc. in the deposition section 100, and the mass-space ratio of the second section 220 may be reduced by providing a through hole, a groove, etc. in the second section 220.

[0036] 3 to 5, Fig. 4 is a partially enlarged schematic diagram of a portion I in Fig. 2 according to another embodiment of the first aspect of the present application, and Fig. 5 is a partially enlarged schematic diagram of a portion I in Fig. 2 according to yet another embodiment of the first aspect of the present application.

[0037] In some preferred embodiments, a first boundary line 300 is formed adjacent to the boundary between the first section 210 and the deposition section 100, and the first boundary line 300 includes a first abrupt change line 310 extending in a straight line or a curved line, and the extension direction of the first abrupt change line 310 or the extension direction of its tangent is parallel to the first direction or the included angle between them is an acute angle. For example, the included angle between the extension direction of the first abrupt change line 310 or the extension direction of its tangent and the first direction may be an acute angle of less than 45 degrees, for example, the included angle between the extension direction of the first abrupt change line 310 or the extension direction of its tangent and the first direction is an acute angle of less than 30 degrees, preferably 0 degrees. The smaller the included angle, the higher the effect of stress dispersion and the better the deformation resistance.

[0038] Preferably, still referring to Fig. 4, when the first abrupt change line 310 is a straight line, the included angle between the extension direction of the first abrupt change line 310 and the first direction is an acute angle. In other embodiments, when the first abrupt change line 310 is a straight line, the extension direction of the first abrupt change line 310 and the first direction may be parallel to each other. Fig. 4 illustrates an example in which the first abrupt change line 310 is a straight line, and in other embodiments, the first abrupt change line 310 may be a curved line.

[0039] When the first abrupt change line 310 is a curve, the included angle between the extending direction of the tangent of the first abrupt change line 310 and the first direction is an acute angle, or, still referring to FIG. 5, when the first abrupt change line 310 is a curve, the extending direction of the tangent of the first abrupt change line 310 is parallel to the first direction.

[0040] The non-vapor-deposited portion 200 At least a portion of the deposition portion in a first direction 100 In addition, the extension direction of the first abrupt change line 310 or the extension direction of its tangent is parallel to the first direction or forms an acute angle therewith. When the mask plate 10 is pulled along the first direction, i.e., when the pulling direction is the first direction, the non-deposition portion 200 and the deposition section 100 and tend to move apart along the tensile direction. Because the included angle between the first abrupt change line 310 and the first direction is small, the first abrupt change line 310 is arranged in this manner to reduce the stress strain thereon, improve the deformation resistance of the mask plate 10 in the first direction, and make the mask plate 10 less susceptible to wrinkles.

[0041] 3 and 4, in some preferred embodiments, a second boundary line 400 is formed at a location adjacent to the boundary between the first section 210 and the second section 220, and at least a portion of the second boundary lines 400 extend in a straight line or a curved line, and the extension direction or the tangent line of at least a portion of the second boundary lines 400 and the extension direction or the tangent line of at least a portion of the first boundary lines 300 are parallel to each other. Alternatively, the included angle between the extension direction or the tangent line of at least a portion of the second boundary lines 400 and the extension direction or the tangent line of at least a portion of the first boundary lines 300 is an acute angle. For example, the included angle between the extension direction or the tangent line of at least a portion of the second boundary lines 400 and the extension direction or the tangent line of at least a portion of the first boundary lines 300 may be an acute angle of less than 45 degrees. For example, the angle between the extension direction of at least some of the second boundaries 400 or the extension direction of their tangents and the extension direction of at least some of the first boundaries 300 or the extension direction of their tangents is an acute angle of less than 30 degrees. The smaller the included angle, the better the stress dispersion effect and the better the deformation resistance. In an optimal embodiment, the angle between the extension direction of at least some of the second boundaries 400 or the extension direction of their tangents and the extension direction of at least some of the first boundaries 300 or the extension direction of their tangents is 0 degrees, that is, the extension direction of at least some of the second boundaries 400 or the extension direction of their tangents and the extension direction of at least some of the first boundaries 300 or the extension direction of their tangents are parallel to each other.

[0042] When the first boundary lines 300 and the second boundary lines 400 are both straight lines, the extension direction of at least some of the second boundary lines 400 is parallel to the extension direction of at least some of the first boundary lines 300, or the included angle between the extension direction of at least some of the second boundary lines 400 and the extension direction of at least some of the first boundary lines 300 is an acute angle. When some of the first boundary lines 300 and some of the second boundary lines 400 are parallel to each other, the distances from different positions of the some of the first boundary lines 300 to different positions of the some of the second boundary lines 400 are equal.

[0043] When the first boundary line 300 and the second boundary line 400 are both curved, the tangent extension direction of at least some of the second boundary lines 400 is parallel to the tangent extension direction of at least some of the first boundary lines 300, or the included angle between the tangent extension direction of at least some of the second boundary lines 400 and the tangent extension direction of at least some of the first boundary lines 300 is an acute angle. When the tangent extension direction of some of the first boundary lines 300 and the tangent extension direction of some of the second boundary lines 400 are parallel to each other, the distances from different positions of the first boundary lines 300 to different positions of the second boundary lines 400 are equal.

[0044] In these preferred embodiments, when the mask plate 10 is pulled along the first direction, at least a portion of the second boundary line 400 is the first boundary 300 This allows the mask plate 10 to share the tensile force it receives, thereby improving the deformation resistance of the mask plate 10 in the first direction and making the mask plate 10 even less susceptible to wrinkles.

[0045] 3 and 4, in some preferred embodiments, the first boundary line 300 further includes a second abrupt change line 320 extending in a straight or curved line, and the extension direction or the tangent direction of the second abrupt change line 320 is perpendicular to the first direction. The second boundary line 400 further includes a second sub-line 420 adjacent to the second abrupt change line 320, and the second sub-line 420 extends in a straight or curved line, and the extension direction or the tangent direction of the second sub-line 420 and the extension direction of the second abrupt change line 320 or the tangent direction of the second abrupt change line 320 are parallel to each other, or the included angle between the extension direction or the tangent direction of the second sub-line 420 and the extension direction of the second abrupt change line 320 or the tangent direction of the second abrupt change line 320 is an acute angle.

[0046] When the second abrupt change line 320 and the second sub-line 420 are both straight lines, the extension direction of the second sub-line 420 is parallel to the extension direction of the second abrupt change line 320, or the included angle between the extension direction of the second sub-line 420 and the extension direction of the second abrupt change line 320 is an acute angle.

[0047] When the second abrupt change line 320 and the second sub-line 420 are both curved, the extension direction of the tangent to the second sub-line 420 is parallel to the extension direction of the tangent to the second abrupt change line 320, or the included angle between the extension direction of the tangent to the second sub-line 420 and the extension direction of the tangent to the second abrupt change line 320 is an acute angle.

[0048] In these preferred embodiments, the second sub-line 420 can share the force received by the second abrupt line 320, and can further improve the deformation / wrinkle problem of the mask plate 10.

[0049] Preferably, the second sub-line 420 includes a plurality of short lines 421 spaced apart from each other, which can disperse stress concentration on the same second sub-line 420 and further improve the deformation / wrinkle problem of the mask plate 10.

[0050] The installation manner in which the second sub-line 420 includes a plurality of spaced apart short lines 421 can be varied, for example, a plurality of second sections 220 can be spaced apart in the non-deposition area, the second sections 220 can include edges to form the short lines 421, and the plurality of spaced apart edges can form the second sub-line 420 including a plurality of short lines 421.

[0051] 3 to 5, in some preferred embodiments, the second boundary line 400 includes a first sub-line 410 adjacent to the first abrupt change line 310, the first sub-line 410 extends in a straight line or a curved line, and the extension direction of the first sub-line 410 or the extension direction of a tangent to the first abrupt change line 310 or the extension direction of a tangent to the first abrupt change line 310 are parallel to each other, or the included angle between the extension direction of the first sub-line 410 or the extension direction of a tangent to the first abrupt change line 310 or the extension direction of a tangent to the first abrupt change line 310 is an acute angle. For example, the included angle between the extension direction of the first sub-line 410 or the extension direction of a tangent to the first abrupt change line 310 or the extension direction of a tangent to the first abrupt change line 310 may be an acute angle of less than 45 degrees. For example, the angle between the extension direction of the first sub-line 410 or the extension direction of its tangent and the extension direction of the first abrupt change line 310 or the first abrupt change line 310 is an acute angle of less than 30 degrees. The smaller the included angle, the better the stress dispersion effect and the better the deformation resistance. In an optimal embodiment, the included angle between the extension direction of the first sub-line 410 or the extension direction of its tangent and the extension direction of the first abrupt change line 310 or the first abrupt change line 310 is 0 degrees, that is, the extension direction of the first sub-line 410 or the extension direction of its tangent and the extension direction of the first abrupt change line 310 or the first abrupt change line 310 are parallel to each other.

[0052] 3 and 4, when the first abrupt change line 310 and the first sub-line 410 are both straight lines, the extension direction of the first sub-line 410 is parallel to the extension direction of the first abrupt change line 310. Alternatively, in other embodiments, the extension direction of the first sub-line 410 and the extension direction of the first abrupt change line 310 form an acute angle.

[0053] 5, when the first abrupt change line 310 and the first sub-line 410 are both curved, the tangent extension direction of the first sub-line 410 is parallel to the tangent extension direction of the first abrupt change line 310. Or, in other embodiments, the included angle between the tangent extension direction of the first sub-line 410 and the tangent extension direction of the first abrupt change line 310 is an acute angle.

[0054] In these preferred embodiments, the first sub-line 410 can share the force received by the first abrupt line 310, and can further improve the deformation / wrinkle problem of the mask plate 10.

[0055] In some preferred embodiments, with continued reference to Figures 3 and 4, the at least one second section 220 includes a plurality of second sections 220, i.e., the second section 220 is multiple, and the plurality of second sections 220 are distributed at intervals within the non-deposition region.

[0056] In these preferred embodiments, by providing the multiple second sections 220, on the one hand, it is possible to form multiple abrupt change lines where the material is abruptly changed between the multiple second sections 220 and the first section 210, which can further improve the deformation / wrinkling of the mask plate 10. On the other hand, the multiple second sections 220 are distributed at intervals in the non-deposited area, which can improve the force that the non-deposited area receives when the mask plate 10 is pulled.

[0057] In some preferred embodiments, still referring to Figures 3 and 4, the mask plate 10 includes a center line P that extends along a first direction and bisects the deposition portion 100, and the multiple second sections 220 are symmetrically distributed about the center line P so that the structural strength of different regions of the mask plate 10 is consistent. When the mask plate 10 is pulled along the first direction, the force received by the mask plate 10 is more balanced, and the deformation and wrinkling of the mask plate 10 due to the accumulation of stress caused by the unbalanced force is improved. In Figures 3 and 4, the position of the center line P is indicated by a dashed line, and the dashed line does not limit the structure of the mask plate 10 according to the embodiments of the present application.

[0058] 3 and 4, in some preferred embodiments, the axis of the second section 220 itself extending along the first direction is symmetrical, so that when the mask plate 10 is pulled along the first direction, the force received by the mask plate 10 is more balanced, and the mask plate 10 is prevented from being deformed into wrinkles due to the accumulation of stress caused by the unbalanced force.

[0059] In some preferred embodiments, when the number of the second sections 220 is more than one, the included angle between the adjacent boundaries of two adjacent second sections 220 is an acute angle, for example, the adjacent boundaries of the two adjacent second sections 220 may be parallel to each other. The adjacent boundaries of the two adjacent second sections 220 refer to the two boundaries where the two adjacent second sections 220 are close to each other, for example, the lower boundary of the first second section 220 and the upper boundary of the second second section 220 in FIG. 3. The adjacent boundaries of the two adjacent second sections 220 are parallel to each other, so that the forces received by the two boundaries can be balanced, the deformation resistance of the mask plate 10 can be improved, and the deformation / wrinkle problem of the mask plate 10 can be further improved.

[0060] In some preferred embodiments, the second section 220 includes a plurality of openings 211 extending therethrough, as shown in FIG. 4. The openings 211 reduce the mass-to-space ratio of the second section 220, thereby improving the relationship between the second section 220 and the first section. 2 10, which can further improve the deformation resistance of the mask plate 10 and further improve wrinkles of the mask plate 10. The shape of the opening 211 can be various, and the opening 211 can be a circular hole, an elliptical hole, a polygonal hole, a combination thereof, and the like.

[0061] Preferably, the installation manner of the opening 211 may be various, for example, the opening 211 is installed through the second section 220 along the thickness direction of the mask plate, or the opening 211 is formed by recessing the surface of the second section 220.

[0062] In addition, in these preferred embodiments, the deposition unit 100 has a deposition opening for depositing the display area 31 of the display panel 30, so that the mass-space ratio of the deposition unit 100 is reduced, and an abrupt material boundary can be formed between the deposition unit 100 and the first section 210 without performing a patterning process on the first section 210. After the opening 211 is provided in the second section 220, an abrupt material boundary can be formed between the first section 210 and the second section 220 without performing a patterning process on the first section 210. Therefore, the mass-space ratio between any two adjacent ones of the deposition unit 100, the first section 210, and the second section 220, for example, between any two adjacent ones of the deposition unit 100, the first section 210, and the second section 220, is different, and the manufacturing method is simple and convenient.

[0063] 3 and 4, preferably, the first section 210 and the second section 220 are both polygonal, so that many first boundary lines 300 and second boundary lines 400 can be arranged parallel to each other. The shapes of the first section 210 and the second section 220 may be the same or different, for example, the second section 220 may be a triangle, and the first section 210 may be a rectangle, and since the first section 210 and the second section 220 are both polygonal, the first section 210 and the second section 220 both have straight outer edges, and many first boundary lines 300 and second boundary lines 400 can be arranged parallel to each other.

[0064] In another preferred embodiment, both the first section 210 and the second section 220 have arcuate sides, allowing many of the first boundary lines 300 and second boundary lines 400 to be parallel to each other.

[0065] 3 and 4, preferably, the shape of the non-deposition area is a trapezoid, the shape of the second section 220 is a triangle, the plurality of second sections 220 are distributed at intervals in the non-deposition area, and one side of the second section 220 located close to the first boundary line 300 is located parallel to the first boundary line 300, so that when the mask plate 10 is pulled, the side of the second section 220 can share the force received by the first boundary line 300, and the force received by the mask plate 10 can be more balanced. In other embodiments, the shape of the non-deposition area may be a rectangle, etc., and the shape of the first section 210 may be a square, a pentagon, etc. Preferably, the shape of the second section 220 may be a trapezoid, a polygon, a circular arc, or other figures.

[0066] Preferably, some of the edges of the second section 220 are arranged parallel to the second boundary line 400, so that when the mask plate 10 is pulled, the edges can share the force received by the second boundary line 400, thereby making the force received by the mask plate 10 more balanced.

[0067] Preferably, the edges of two or more second sections 220 are arranged parallel to the second boundary line 400, i.e., the second sub-line 420 includes a plurality of short lines 421, and the sides of each second section 220 arranged parallel to the second boundary line 400 form the short line 421, and the plurality of short lines 421 form the second sub-line 420.

[0068] Preferably, the plurality of second sections 220 are distributed in a row along the second direction. In another embodiment, the plurality of second sections 220 may be distributed in a plurality of rows and columns. Preferably, the second direction intersects with the first direction, for example, the second direction is perpendicular to the first direction.

[0069] Preferably, the second section 220 is an isosceles triangle, and the shapes of the multiple second sections 220 are the same, so that the second sections 220 can be uniformly distributed in the non-deposition area, and the two opposite sides of the second sections 220 can be installed parallel to each other.

[0070] Preferably, the number of second sections 220 is an odd number, and the second section 220 at the middle position in a row in the second direction is provided symmetrically with respect to the center line P. Alternatively, the number of second sections 220 is an even number, and the multiple second sections 220 are provided symmetrically with respect to the center line P.

[0071] Preferably, the materials between any two of the first section 210, the second section 220, and the deposition unit 100 are different, that is, the materials of the first section 210, the second section 220, and the deposition unit 100 are different. Here, the materials between any two of the first section 210, the second section 220, and the deposition unit 100 are different from each other. Here, the materials between any two of the first section 210, the second section 220, and the deposition unit 100 may be the same type of material but different compounding ratios in the first section 210, the second section 220, and the deposition unit 100, or the types of material in the first section 210, the second section 220, and the deposition unit 100 may be different from each other. Section 220 It is only necessary that a line of sudden material change be formed between the first section 220 and the deposition unit 100 .

[0072] Please refer to FIG. 6, which is a structural schematic diagram of a mask device according to an embodiment of the second aspect of the present application.

[0073] As shown in FIG. 6, the mask device according to the embodiment of the second aspect of the present application includes a frame 20 and a mask plate 10 provided on the frame 20. The mask plate 10 may be the mask plate 10 in any of the embodiments of the first aspect described above. maskSince the device includes a mask plate 10 according to any of the embodiments of the first aspect described above, a mask device according to an embodiment of the second aspect of the present application has the beneficial effects of a mask plate 10 according to any of the embodiments of the first aspect described above, and a description thereof will not be given here.

[0074] Preferably, one mask plate 10 may be provided in the frame 20 of the mask apparatus, or two or more mask plates 10 may be provided in the frame 20 of the mask apparatus.

[0075] Although the present application has been described with reference to the preferred embodiments, various modifications may be made thereto and the components may be replaced with equivalents without departing from the scope of the present application. In particular, the technical features described in each embodiment may be arbitrarily combined as long as there is no structural contradiction. The present application is not limited to the specific embodiments disclosed in this specification, but includes all technical solutions included in the claims.

Claims

1. A mask plate for depositing a substrate, comprising: the mask plate includes a panel region, the panel region includes a vapor-deposited portion and a non-vapor-deposited portion, at least a portion of the non-vapor-deposited portion is located on one side of the vapor-deposited portion in a first direction, the non-vapor-deposited portion includes a first section and at least one second section, the first section and the vapor-deposited portion are surrounded by an adjacent boundary line to form a non-vapor-deposited region, the at least one second section is located within the non-vapor-deposited region, the vapor-deposited portion, the first section and the second section have different mass-space ratios between two of the vapor-deposited portion, the first section and the second section whose boundaries are adjacent to each other, and the mass-space ratio is a ratio of the mass of each member itself to the total volume of the space occupied by the member itself, a first boundary line is formed adjacent to the boundary between the first section and the vapor deposition portion, a second boundary line is formed adjacent to the boundary between the first section and the second section, at least a part of the second boundary lines extend in a straight line or a curved line, and an extension direction of at least a part of the second boundary lines or an extension direction of a tangent thereto is parallel to an extension direction of at least a part of the first boundary lines or an extension direction of a tangent thereto, a first boundary line including a second abrupt change line extending in a straight line or a curved line, an extension direction of the second abrupt change line or an extension direction of a tangent thereto being perpendicular to the first direction, the second boundary line including a second sub-line adjacent to the second abrupt change line, the second sub-line extending in a straight line or a curved line, an extension direction of the second sub-line or an extension direction of a tangent thereto being parallel to the second abrupt change line or an extension direction of a tangent to the second abrupt change line, and the second sub-line including a plurality of short lines distributed at intervals from each other.

2. 2. The mask plate of claim 1, wherein the mass-to-space ratio of any two of the deposition section, the first section, and the second section whose boundaries are adjacent is different, the first boundary line includes a first abrupt change line extending in a straight line or curve, and the extension direction of the first abrupt change line or the extension direction of its tangent is parallel to the first direction, or the included angle between the two forms an acute angle.

3. the non-deposition region has a trapezoidal shape, the second section has a triangular shape, the second sections are distributed at intervals within the non-deposition region, and one side of the second section provided close to the first boundary line is parallel to the first boundary line; The mask plate of claim 2 , wherein the second section is an isosceles triangle, and a plurality of the second sections have the same shape.

4. A portion of an edge of the second section is parallel to the second boundary line, The mask plate according to claim 2 , wherein at least some sides of two or more of the second sections are parallel to the second boundary line.

5. A mask plate as described in claim 4, wherein a plurality of the second sections are distributed at intervals in the non-deposition area, the second sections include edges for forming the short lines, and the edges distributed at intervals are used to form the second sub-lines including a plurality of the short lines.

6. 5. The mask plate according to claim 4, wherein the second boundary line includes a first sub-line adjacent to the first abrupt change line, the first sub-line extending in a straight line or a curved line, and an extension direction of the first sub-line or a tangent thereto and an extension direction of the first abrupt change line or a tangent thereto are parallel to each other, or an included angle between the extension direction of the first sub-line or the extension direction of a tangent thereto and the first abrupt change line or the extension direction of a tangent to the first abrupt change line is an acute angle.

7. the at least one second section includes a plurality of the second sections, the plurality of the second sections being distributed at intervals within the non-deposition region; the second sections are symmetrically distributed about a center line extending in the first direction and bisecting the deposition portion; The second section itself is provided axially symmetrically with respect to an axis extending in the first direction, The mask plate according to claim 4 , wherein adjacent borders of two adjacent second sections are parallel to each other or form an acute angle.

8. the second section includes a plurality of openings, the openings being provided through the second section along a thickness direction of the mask plate, or the openings being formed by recessing a surface of the second section; the first section and the second section are both polygonal; At least two of the materials in the deposition portion, the first section, and the second section are the same; The mask plate according to claim 1 , wherein the second sections are distributed in a line along the second direction.

9. A mask device comprising: a frame; and a mask plate provided on the frame, the mask plate being the mask plate according to any one of claims 1 to 8.

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