Buildings and how to change their placement

Abstract

To provide a building in which precision equipment is arranged, capable of improving the degree of freedom in arranging the precision equipment, and a method for changing the arrangement state of the precision equipment. [Solution] The building is a building in which precision equipment that is sensitive to vibrations in the micro-vibration range is located, and is equipped with a seismic isolation structure that allows relative movement between the ground side part of the building and the building part located above the ground side part, and the seismic isolation structure has multiple spherical sliding bearings that share and support the vertical load of the building part.

Description

[Technical field]

[0001] The present disclosure relates to a building and a method for changing the arrangement state of precision equipment in a building. [Background technology]

[0002] As a building where precision equipment sensitive to micro-vibrations is installed, a seismic isolation structure has been proposed to suppress damage caused by earthquakes, etc. (For example, see Patent Document 1). The building in Patent Document 1 is divided into a vibration-sensitive area where precision equipment sensitive to micro-vibrations is installed, and other areas. The vibration-sensitive area is provided with planar sliding bearings with flat sliding surfaces arranged opposite each other as rigid sliding bearings, and laminated rubber bearings are provided in the other areas. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-002559 A Summary of the Invention [Problem to be solved by the invention]

[0004] Since the planar sliding bearing does not have a function of returning to the origin before vibration after horizontal vibration caused by an earthquake or the like, it is necessary to provide a device with an elastic function to ensure the function of returning to the origin. In the building of Patent Document 1, the function of returning to the origin is ensured by providing laminated rubber bearings. However, since laminated rubber bearings have low vertical and horizontal rigidity and may resonate with micro-vibrations, they cannot be provided in vibration-sensitive areas and are provided in other areas. As a result, in the building of Patent Document 1, precision equipment cannot be provided in other areas where laminated rubber bearings are provided, and the areas in which precision equipment can be provided are limited to vibration-sensitive areas. Therefore, the degree of freedom in the placement of precision equipment is low.

[0005] The present disclosure has been made in consideration of the above-mentioned circumstances, and aims to provide a building in which precision equipment is arranged, which can improve the freedom of arrangement of the precision equipment, and a method for changing the arrangement state. [Means for solving the problem]

[0006] A building according to one embodiment of the present disclosure is a building in which precision equipment sensitive to vibrations in the micro-vibration range is located, and the building has a seismic isolation structure that allows relative movement between a ground-side portion of the building and a building portion located above the ground-side portion, and the seismic isolation structure has a plurality of spherical sliding bearings that share and support the vertical load of the building portion.

[0007] A building according to another aspect of the present disclosure is a building having an area that is sensitive to vibrations in the micro-vibration range, and is equipped with a seismic isolation structure that allows relative movement between a ground-side portion of the building and a building portion located above the ground-side portion, and the seismic isolation structure is equipped with a plurality of spherical sliding bearings that share and support the vertical load of the building portion.

[0008] A method for changing the layout state according to one aspect of the present disclosure is a method for changing the layout state of the precision equipment in the above-mentioned building, and includes an equipment layout state changing process for changing the layout state of the precision equipment, and a spherical sliding bearing layout state changing process for changing the layout states of the plurality of spherical sliding bearings in accordance with the layout state of the precision equipment after it has been changed in the equipment layout state changing process.

[0009] A method for changing the layout state according to another aspect of the present disclosure is a method for changing the layout state of the precision equipment in the above-mentioned building, comprising: an equipment layout state changing process for changing the layout state of the precision equipment; and a conditional spherical sliding bearing layout state changing process for not changing the layout state of the multiple spherical sliding bearings if a distribution state of the load supported by the multiple spherical sliding bearings in the layout state of the precision equipment after the change in the equipment layout state changing process is within a preset tolerance range, and for changing the layout state of the multiple spherical sliding bearings so that the distribution state falls within the tolerance range if the distribution state exceeds the tolerance range. Effect of the Invention

[0010] According to one aspect of the present disclosure, it is possible to provide a building in which precision equipment is arranged, and a method for changing the arrangement state, which can improve the degree of freedom in the arrangement of the precision equipment. [Brief description of the drawings]

[0011] [Figure 1] FIG. 2 is a vertical cross-sectional view of the building according to the first embodiment. [Diagram 2] FIG. 2 is a diagram showing a spherical sliding bearing according to the first embodiment. [Diagram 3] 4A to 4C are diagrams illustrating a method for changing an arrangement state according to the first embodiment. [Figure 4] 4A to 4C are diagrams illustrating a method for changing an arrangement state according to the first embodiment. [Diagram 5] FIG. 11 is a vertical cross-sectional view of a building according to a third embodiment. [Figure 6] 13A and 13B are diagrams illustrating a U-shaped damper according to a third embodiment. [Figure 7] FIG. 11 is a vertical cross-sectional view of a building according to a fourth embodiment. [Figure 8] FIG. 13 is a diagram showing a laminated rubber device according to a fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] First Embodiment Hereinafter, a building and a method for changing the arrangement state of precision instruments in a building according to a first embodiment of the present disclosure will be described with reference to the drawings.

[0013] Fig. 1 is a cross-sectional view of a building 1 according to the first embodiment. As shown in Fig. 1, the building 1 comprises a ground side portion 2, a building portion 3, and a seismic isolation structure 4. The ground side portion 2 has a foundation 21. The building portion 3 is located above the ground side portion 2. The building portion 3 comprises a floor slab 31, a plurality of columns 32 extending vertically, and a plurality of beams 33 extending horizontally.

[0014] In the building portion 3, precision equipment 5 that is sensitive to vibrations in the micro-vibration range is placed. The precision equipment 5 is, for example, semiconductor manufacturing related equipment. The semiconductor manufacturing related equipment is various equipment used in semiconductor manufacturing, including semiconductor inspection equipment. The precision equipment 5 may be a microscope such as a transmission electron microscope (TEM). In this case, the microscope may be placed on a vibration isolation table to satisfy a reference curve in VC (Vibration Criteria), which is an environmental vibration standard. The precision equipment 5 may be an inspection device that inspects the finishing accuracy of parts, intermediate products, or products that require high dimensional accuracy.

[0015] The seismic isolation structure 4 is disposed between the ground side portion 2 and the building portion 3. The seismic isolation structure 4 allows relative movement between the ground side portion 2 and the building portion 3 in the building 1.

[0016] The seismic isolation structure 4 is equipped with a plurality of spherical sliding bearings 6. The seismic isolation structure 4 is not equipped with laminated rubber bearings. The plurality of spherical sliding bearings 6 share and support the vertical load of the building portion 3. In this embodiment, the plurality of spherical sliding bearings 6 share and support the entire vertical load of the building portion 3.

[0017] As shown in FIG. 2, the spherical sliding bearing 6 has an upper shoe 61, a lower shoe 62, and a slider 63. The upper shoe 61 is disposed in the building portion 3. The upper shoe 61 has a sliding surface having a curvature on the surface facing the slider 63. The lower shoe 62 is disposed in the ground side portion 2. The lower shoe 62 has a sliding surface having a curvature on the surface facing the slider 63. The slider 63 slides between the upper shoe 61 and the lower shoe 62. The slider 63 has sliding surfaces having a curvature on the surfaces facing the upper shoe 61 and the lower shoe 62, respectively.

[0018] For example, if an earthquake occurs and the ground side part 2 and the building part 3 attempt to move relative to each other, the upper shoe 61 slides against the slider 63, and the slider 63 slides against the lower shoe 62. In this way, the spherical sliding bearing 6 allows relative movement between the ground side part 2 and the building part 3. Furthermore, as each of the upper shoe 61, the lower shoe 62, and the slider 63 has a sliding surface with curvature, the spherical sliding bearing 6 acts to return the ground side part 2 and the building part 3 to the positions they were in before the relative movement. In other words, the spherical sliding bearing 6 has an origin return function.

[0019] Returning to FIG. 1 , some of the plurality of spherical sliding bearings 6 are disposed between the columns 32 and the foundation 21 of the ground side portion 2. In other words, some of the plurality of spherical sliding bearings 6 are disposed directly below the columns 32. At least one spherical sliding bearing 6A of the multiple spherical sliding bearings 6 is disposed directly below the beam 33. This spherical sliding bearing 6A is disposed directly below or near the precision equipment 5. By supporting the load of the precision equipment 5, which is a heavy object, with the spherical sliding bearing 6A, reinforcement of the floor slab 31 and the beam 33 directly below or near the precision equipment 5 is not required.

[0020] Each of the spherical sliding bearings 6 is configured to perform seismic isolation operation when vibration having a vibration speed exceeding an operating speed set based on the vibration speed of the micro-vibration region acts on the spherical sliding bearing 6. That is, the spherical sliding bearing 6 is configured not to perform seismic isolation operation with vibration in the micro-vibration region. The operating speed is, for example, 0.1 mm / s. With this configuration, the start-up load of the spherical sliding bearing 6 can be adjusted. The above configuration may be realized by adjusting the friction coefficient of the spherical sliding bearing 6, or by providing a stopper (regulating device) on the spherical sliding bearing 6. That is, as a regulating device for regulating the relative movement between the upper shoe 61 and the lower shoe 62 in the spherical sliding bearing 6, the start-up load may be adjusted by a regulating device that maintains a regulated state if the horizontal force of the vibration is equal to or less than a predetermined horizontal force, and switches to a deregulated state when the horizontal force exceeds the predetermined horizontal force.

[0021] Furthermore, multiple types of spherical sliding bearings with different friction coefficients are mixed in the multiple spherical sliding bearings 6. For example, in the seismic isolation structure 4, spherical sliding bearings with a medium friction coefficient of about 4% and spherical sliding bearings with a low friction coefficient of about 1% are mixed as the spherical sliding bearings 6. With this configuration, it is possible to adjust the amount of damping when the seismic isolation structure 4 performs seismic isolation operation during an earthquake.

[0022] Next, a method for changing the layout state of the precision equipment 5 in the building 1 will be described with reference to Figures 3 and 4. The layout state changing method includes an equipment layout state changing step and a spherical sliding bearing layout state changing step.

[0023] 3, in the equipment layout state changing step, the layout state of the precision equipment 5 is changed. In the illustrated example, a second precision equipment 5A is newly added as the precision equipment 5. Note that in the equipment layout state changing step, the precision equipment 5 may be replaced with the second precision equipment 5A.

[0024] As shown in FIG. 4, in the spherical sliding support arrangement change process, the arrangement state of the plurality of spherical sliding supports 6 is changed according to the arrangement state of the precision equipment 5 (5A) after the change in the equipment arrangement state change process. Specifically, in the illustrated example, a new spherical sliding support 6B that was not provided before the equipment arrangement state change process is provided directly below the beam 33. The new spherical sliding support 6B is provided directly below or near the precision equipment 5A that was newly provided in the equipment arrangement state change process. Due to the new provision of the precision equipment 5A, which is a heavy object, the load distribution near the precision equipment 5A may exceed the expected load distribution. By providing the new spherical sliding support 6B, the load of the precision equipment 5A can be supported without reinforcing the floor slab 31 and the beam 33 directly below or near the precision equipment 5A.

[0025] As described above, a precision instrument 5 is placed in the building 1 according to this embodiment. The building 1 has a seismic isolation structure 4 that allows relative movement between the ground side portion 2 and the building portion 3. The seismic isolation structure 4 has a plurality of spherical sliding bearings 6 that share and support the vertical load of the building portion 3.

[0026] Conventionally, some buildings are equipped with planar sliding bearings and laminated rubber bearings as seismic isolation structures. Planar sliding bearings do not have a return-to-origin function, so the provision of laminated rubber bearings ensures this function. Laminated rubber bearings have low vertical and horizontal stiffness and may resonate with minute vibrations, so they cannot be installed in vibration-sensitive areas and must be installed in other areas. As a result, in conventional buildings, precision equipment cannot be placed in areas other than those where laminated rubber bearings are installed, and the areas in which precision equipment can be placed are limited to vibration-sensitive areas. In the building 1 according to this embodiment, the seismic isolation structure 4 is provided with a plurality of spherical sliding bearings 6 having an origin return function, and the vertical load of the building portion 3 is shared and supported by the plurality of spherical sliding bearings 6. This reduces the need to place laminated rubber bearings in the building 1 to ensure the origin return function, and improves the degree of freedom in arranging the precision equipment 5.

[0027] In addition, the plurality of spherical sliding bearings 6 share and support all the vertical loads of the building portion 3. According to the above configuration, it is not necessary to provide laminated rubber bearings for supporting the vertical load of the building portion 3 in the building 1, and the degree of freedom in arranging the precision equipment 5 is further improved. In addition, since only the spherical sliding bearings 6 are used as the bearings for supporting the vertical load of the building portion 3, the ease of construction of the building 1 is improved. In addition, since all vertical loads of the building portion 3 are shared and supported by the multiple spherical sliding bearings 6, the center of gravity and the center of rigidity in the height range where the seismic isolation structure 4 is arranged (hereinafter referred to as the seismic isolation layer) tend to coincide. Therefore, when large vibrations occur due to an earthquake, deterioration of seismic isolation performance due to the twisting of the seismic isolation layer can be suppressed. Even if the center of gravity of the building portion 3 changes due to a change in the arrangement of the precision equipment 5 in the building portion 3 or structural reinforcement of the building portion 3, the state of coincidence or misalignment of the center of gravity and the center of rigidity in the seismic isolation layer is less likely to change compared to a seismic isolation structure using elastic bearings such as laminated rubber bearings. Therefore, even if the arrangement of the precision equipment 5 is changed after the building 1 starts operating, the seismic isolation function is less likely to be impaired, and in this respect, the building 1 has a high degree of freedom in the arrangement of the precision equipment 5.

[0028] Furthermore, the building 1 does not have laminated rubber bearings. According to the above configuration, since the building 1 does not have a laminated rubber bearing, the degree of freedom in arranging the precision equipment 5 is further improved. In addition, the ease of construction of the building 1 is improved.

[0029] At least one of the plurality of spherical sliding bearings 6 (spherical sliding bearing 6A) is disposed directly below the beam 33. According to the above configuration, the vertical load of the building section 3 directly below the beam 33 can be supported by the spherical sliding bearing 6A. Also, for example, when the spherical sliding bearing 6A is disposed directly below the beam 33 and directly below or near the precision equipment 5, the spherical sliding bearing 6A supports the load of the precision equipment 5, which is a heavy object, and thus it is possible to eliminate the need to reinforce the floor slab 31 and the beam 33 directly below or near the precision equipment 5. This makes it possible to suppress torsional deformation of the building 1. In other words, when reinforcement of the floor slab 31 and the beam 33 is necessary, the reinforcement of the floor slab 31 and the beam 33 may change the rigidity center of the building 1, and the deviation between the rigidity center and the center of gravity of the building 1 may become large. The deviation between the rigidity center and the center of gravity of the building 1 is a cause of torsional deformation of the building 1. By providing the spherical sliding bearing 6A as described above, it is possible to suppress torsional deformation of the building 1, since it is unnecessary to reinforce the floor slab 31 and the beam 33. Furthermore, for example, when placing a new precision instrument 5A in the building 1, the spherical sliding support 6 can be placed directly below the beam 33 and directly below or in the vicinity of the new precision instrument 5A to accommodate the addition of the new precision instrument 5A.

[0030] Moreover, the plurality of spherical sliding bearings 6 are a mixture of a plurality of types of spherical sliding bearings having different friction coefficients. According to the above configuration, it is possible to adjust the amount of damping when the seismic isolation structure 4 performs seismic isolation operation during an earthquake.

[0031] Moreover, the precision equipment 5 is a semiconductor manufacturing related device. According to the above configuration, in building 1 in which semiconductor manufacturing related equipment that is sensitive to micro-vibrations is installed, it is possible to improve the degree of freedom in arranging the semiconductor manufacturing related equipment.

[0032] The method for changing the arrangement state according to this embodiment includes an equipment arrangement state changing process for changing the arrangement state of the precision equipment 5, and a spherical sliding bearing arrangement state changing process for changing the arrangement states of the multiple spherical sliding bearings 6 according to the arrangement state of the precision equipment 5 after the change in the equipment arrangement state changing process. According to the above configuration, by changing the arrangement of the multiple spherical sliding bearings 6 in accordance with the arrangement of the precision equipment 5, it is possible to accommodate changes in the arrangement of the precision equipment 5, thereby improving the freedom of arrangement of the precision equipment 5.

[0033] The spherical sliding support arrangement state change step also includes arranging a new spherical sliding support 6B directly below the beam 33, which was not provided before the arrangement state was changed. According to the above configuration, even if the load distribution of the building 1 exceeds the expected load distribution due to a change in the arrangement of the precision equipment 5, the load of the building 1 after the change can be supported by placing a new spherical sliding bearing 6B, and the change in the arrangement of the precision equipment 5 can be accommodated.

[0034] <Second embodiment> Next, a method for changing the layout state of a precision device 5 in a building 1 according to a second embodiment of the present disclosure will be described. In this embodiment, the layout state changing method includes a conditional spherical sliding support layout state changing step instead of the spherical sliding support layout state changing step. That is, in this embodiment, the layout state changing method includes an equipment layout state changing step and a conditional spherical sliding support layout state changing step.

[0035] In the conditional spherical sliding bearing arrangement state changing process, if the distribution state of the load supported by the multiple spherical sliding bearings 6 in the arrangement state of the precision equipment 5 after the change in the equipment arrangement state changing process (hereinafter referred to as the changed distribution state) satisfies a predetermined condition, the arrangement state of the multiple spherical sliding bearings 6 is changed. In other words, if the changed distribution state is within a preset allowable range, the arrangement state of the multiple spherical sliding bearings 6 is not changed. If the changed distribution state exceeds the above-mentioned allowable range, the arrangement state of the multiple spherical sliding bearings 6 is changed so that the distribution state of the load supported by the multiple spherical sliding bearings 6 falls within the allowable range. The determination of whether the changed distribution state is within a preset allowable range or exceeds the allowable range may be made, for example, by determining that the changed distribution state exceeds the allowable range when the support load of the spherical sliding bearing 6 that is the maximum load in the changed distribution state exceeds a set upper limit value. In this case, the change in the arrangement state of the multiple spherical sliding bearings 6 includes, for example, placing a new spherical sliding bearing 6B that was not provided before the equipment arrangement state change process in the vicinity of the spherical sliding bearing 6 that is the maximum load. Also, the changed distribution state may be determined to exceed the allowable range when the difference between the support load of the spherical sliding bearing 6 that is the minimum load and the support load of the spherical sliding bearing 6 that is the maximum load in the changed distribution state exceeds a set upper limit value.

[0036] As described above, the arrangement state changing method of this embodiment comprises an equipment arrangement state changing process for changing the arrangement state of the precision equipment 5, and a conditional spherical sliding bearing arrangement state changing process for not changing the arrangement state of the multiple spherical sliding bearings 6 if the distribution state of the load supported by the multiple spherical sliding bearings 6 in the arrangement state of the precision equipment 5 changed in the equipment arrangement state changing process is within a preset tolerance range, and for changing the arrangement state of the multiple spherical sliding bearings 6 so that the distribution state falls within the tolerance range if the distribution state exceeds the tolerance range. According to the above configuration, if the distribution state of the load supported by the multiple spherical sliding bearings 6 in the arrangement state of the precision equipment 5 after the change in the equipment arrangement state changing process is within the allowable range, the arrangement state of the spherical sliding bearings 6 is not changed, but if it exceeds the allowable range, the arrangement state of the spherical sliding bearings 6 is changed. Therefore, in accordance with the change in the load distribution state associated with the equipment arrangement state changing process, the arrangement state of the spherical sliding bearings 6 can be changed only when necessary, and unnecessary changes to the arrangement state of the spherical sliding bearings 6 can be prevented when it is not necessary to change it.

[0037] <Third embodiment> Next, a building according to a third embodiment of the present disclosure will be described. In this embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted, and only the differences will be described.

[0038] Fig. 5 is a cross-sectional view of a building 1A according to the third embodiment. As shown in Fig. 5, in this embodiment, the building 1A further includes a damper 7 between the ground side portion 2 and the building portion 3, which damps vibrations of the building portion 3. The damper 7 does not support the vertical load of the building portion 3.

[0039] In this embodiment, the damper 7 is a U-shaped damper 70. As shown in Fig. 6, the U-shaped damper 70 has an upper plate 71 made of steel and having a square shape in a plan view, a lower plate 72 made of steel and having a square shape in a plan view, and four U-shaped damper rods 73 made of steel.

[0040] The upper plate 71 is fixed to the building portion 3, and the lower plate 72 is fixed to the ground portion 2. The upper plate 71 is fixed to the building portion 3, for example, by attaching a stud bolt (not shown) to the upper surface of the upper plate 71 and burying the stud bolt in the building portion 3. The lower plate 72 is fixed to the ground portion 2, for example, by attaching a stud bolt (not shown) to the lower surface of the lower plate 72 and burying the stud bolt in the ground portion 2. The U-shaped damper rod 73 connects the upper plate 71 and the lower plate 72. The U-shaped damper rod 73 is connected to the upper plate 71 and the lower plate 72 via, for example, a high-strength bolt. The four U-shaped damper rods 73 are arranged with a 90-degree offset from each other. For example, when a horizontal force generated by an earthquake acts on the seismic isolation structure 4, the U-shaped damper rods 73 absorb vibration energy by plastic deformation. This allows the U-shaped damper 70 to damp the vibration of the building portion 3. The U-shaped damper rod 73 undergoes plastic deformation such that the curved portion curved into a U shape is displaced in the extension direction of the U-shaped damper rod 73. At this time, by moving the point where the strain is maximum during plastic deformation within the U-shaped damper rod 73 in accordance with the change in the horizontal displacement amount, the entire U-shaped damper rod 73 can be effectively used to absorb or attenuate earthquake energy without locally concentrating the strain of the U-shaped damper rod 73.

[0041] As described above, the building 1A according to this embodiment further includes the damper 7 between the ground side portion 2 and the building portion 3, which damps vibrations of the building portion 3. According to the above-mentioned configuration, the vibration of the building portion 3 can be damped by the damper 7, and the response acceleration and shear force of the building 1A when an earthquake or the like occurs can be suppressed.

[0042] <Fourth embodiment> Next, a building according to a fourth embodiment of the present disclosure will be described. In this embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted, and only the differences will be described.

[0043] Fig. 7 is a cross-sectional view of a building 1B according to a fourth embodiment. As shown in Fig. 7, in this embodiment, the building 1B further includes a laminated rubber device 80 between the ground side portion 2 and the building portion 3. The laminated rubber device 80 has a limiter function that suppresses relative movement between the ground side portion 2 and the building portion 3 so that the amount of horizontal movement between the upper shoe 61 and the lower shoe 62 of the spherical sliding bearing 6 does not become too large. The laminated rubber device 80 does not support the vertical load of the building portion 3.

[0044] 8, the laminated rubber device 80 comprises a laminated rubber device main body M having an upper flange portion 81, a lower flange portion 82, and a laminated portion 83, and a horizontal force transmission portion 84. The upper flange portion 81 is located on the upper surface of the laminated rubber device main body M. The lower flange portion 82 is located on the lower surface of the laminated rubber device main body M. The laminated portion 83 is formed by alternately stacking rubber material and steel plates between the upper flange portion 81 and the lower flange portion 82. The laminated portion 83 exerts a spring function and a damping function when the upper flange portion 81 and the lower flange portion 82 move relative to each other in the horizontal direction.

[0045] The laminated rubber device 80 is fixed to either the ground side portion 2 or the building portion 3. In the illustrated example, a lower flange portion 82 of the laminated rubber device 80 is fixed to the ground side portion 2. An upper flange portion 81 of the laminated rubber device 80 is not fixed to the building portion 3. A horizontal force transmission portion 84 is installed on the upper flange portion 81.

[0046] A stopper portion 85 is provided on the other of the ground side portion 2 and the building portion 3. In the illustrated example, the stopper portion 85 is formed so as to extend downward from the building portion 3. The stopper portion 85 is formed around the upper flange portion 81 and the horizontal force transmission portion 84 of the laminated rubber device 80.

[0047] The horizontal force transmission portion 84 transmits the horizontal force applied from the stopper portion 85 to the laminated rubber device main body M. Specifically, the horizontal force transmission portion 84 comes into contact with the stopper portion 85 when a large relative movement equal to or greater than a predetermined horizontal movement amount occurs, for example, due to an earthquake. The stopper portion 85 presses the horizontal force transmission portion 84, causing the laminated portion 83 of the laminated rubber device main body M to deform. At this time, the spring function and damping function of the laminated portion 83 are exerted. In this way, the laminated rubber device 80 suppresses the relative movement between the ground side portion 2 and the building portion 3.

[0048] The present disclosure is not limited to the above-described embodiment described with reference to the drawings, and various modifications are possible within the technical scope of the present disclosure.

[0049] For example, in the above embodiment, the spherical sliding bearing 6 is of a so-called double pendulum type, which has sliding surfaces above and below the slider 63. However, the spherical sliding bearing 6 is not limited to this, and may be of a so-called single pendulum type, for example.

[0050] In the above embodiment, the seismic isolation structure 4 may include a seismic isolation device other than the spherical sliding bearing 6, and the vertical load of the building portion 3 may be shared and supported by the spherical sliding bearing 6 and this seismic isolation device. In this case, the seismic isolation device does not include a laminated rubber bearing. The seismic isolation device may be, for example, a bearing-type rolling bearing. For example, the seismic isolation device may be configured to perform seismic isolation operation when subjected to vibration having a vibration speed slower than an operating speed (e.g., 0.1 mm / s) set based on the vibration speed of the micro-vibration region.

[0051] Furthermore, the seismic isolation structure 4 may further include a bearing having a different friction coefficient from the multiple types of spherical sliding bearings 6, in addition to the multiple types of spherical sliding bearings 6 having different friction coefficients. In this case, the amount of damping when the seismic isolation structure 4 performs seismic isolation operation during an earthquake can be more appropriately adjusted. For example, the seismic isolation structure 4 may further include a bearing-type rolling bearing having a low friction coefficient of less than 1%. In this case, for example, in the seismic isolation structure 4, a spherical sliding bearing 6 having a medium friction coefficient of about 4%, a spherical sliding bearing 6 having a low friction coefficient of about 1%, and a spherical bearing-type rolling bearing having a low friction coefficient of less than 1% are mixed.

[0052] At least one of the plurality of spherical sliding bearings 6 may be disposed in the center of the floor slab 31. In this case, the floor slab 31 may be reinforced with a small beam.

[0053] In the third embodiment, the U-shaped damper 70 is exemplified as the damper 7. However, the present disclosure is not limited to this. As the damper 7, an oil damper or a laminated rubber device may be provided.

[0054] In the above embodiment, the buildings 1 and 1A in which the precision equipment 5 that is sensitive to vibrations in the micro-vibration region is installed have been described, but the present disclosure is not limited to this. The present disclosure also includes buildings in which no precision equipment is installed but which have an area that is sensitive to vibrations in the micro-vibration region (for example, a room that is sensitive to vibrations in the micro-vibration region).

[0055] In addition, within the scope of the present disclosure, the components in the above-described embodiments may be replaced with well-known components as appropriate, and the above-described modified examples may be combined as appropriate.

[0056] (Additional Note) The building and the layout state changing method according to the embodiment can be understood, for example, as follows. <1> A building according to one embodiment of the present disclosure is a building in which precision equipment sensitive to vibrations in the micro-vibration range is located, and the building has a seismic isolation structure that allows relative movement between a ground-side portion of the building and a building portion located above the ground-side portion, and the seismic isolation structure has a plurality of spherical sliding bearings that share and support the vertical load of the building portion. According to the above configuration, the seismic isolation structure is equipped with multiple spherical sliding bearings with a home return function, and the multiple spherical sliding bearings share and support the vertical load of the building. This reduces the need to place laminated rubber bearings in the building to ensure the home return function, and improves the freedom of placement of precision equipment.

[0057] <2> the above <1> In the building according to the above, the plurality of spherical sliding bearings may share and support all of the vertical load of the building portion. According to the above-mentioned configuration, it is not necessary to provide laminated rubber bearings to support the vertical load of the building, and the degree of freedom in arranging precision equipment is further improved. In addition, since only spherical sliding bearings are used as the bearings to support the vertical load of the building, the workability of the building is improved. In addition, because all vertical loads in the building are shared and supported by multiple spherical sliding bearings, the center of gravity and center of rigidity in the seismic isolation layer (height range in which the seismic isolation structure is placed) tend to coincide. Therefore, when large vibrations occur due to an earthquake, deterioration in seismic isolation performance caused by twisting of the seismic isolation layer can be suppressed. Even if the center of gravity of the building changes due to changes in the placement of precision equipment in the building or structural reinforcement of the building, the state of coincidence or misalignment of the center of gravity and center of rigidity in the seismic isolation layer is less likely to change compared to seismic isolation structures that use elastic bearings such as laminated rubber bearings. Therefore, even if the placement of precision equipment is changed after the building begins operation, the seismic isolation function is less likely to be impaired, and in this respect too, the building offers a high degree of freedom in the placement of precision equipment.

[0058] <3> the above <1> The building in question does not need to be equipped with laminated rubber bearings. According to the above-mentioned configuration, since no laminated rubber bearing is provided in the building, the degree of freedom in arranging precision equipment is further improved. Also, the workability of the building is improved.

[0059] <4> the above <1> from <3> In a building according to any one of the above, the building portion may include a beam extending horizontally, and at least one of the plurality of spherical sliding bearings may be disposed directly below the beam. According to the above configuration, the vertical load of the building portion directly below the beam can be supported by the at least one spherical sliding bearing.

[0060] <5> the above <1> from <4> In a building according to any one of the above, the plurality of spherical sliding bearings may include a mixture of a plurality of types of spherical sliding bearings having different friction coefficients. According to the above configuration, it is possible to adjust the amount of damping when the seismic isolation structure operates in seismic isolation mode during an earthquake.

[0061] <6> the above <5> In the building according to the present invention, the seismic isolation structure may further include a bearing having a different friction coefficient from the plurality of types of spherical sliding bearings. According to the above configuration, the amount of damping can be more appropriately adjusted when the seismic isolation structure operates in seismic isolation mode during an earthquake.

[0062] <7> the above <1> from <6> In the building according to any one of the above, a damper may be provided between the ground side portion and the building portion to damp vibration of the building portion. According to the above configuration, the vibration of the building parts can be attenuated by the damper, and the response acceleration and shear force of the building when an earthquake or the like occurs can be suppressed.

[0063] <8> the above <1> from <7> In the building according to any one of the above, the precision equipment may be a semiconductor manufacturing-related device. According to the above configuration, in a building in which semiconductor manufacturing related equipment that is sensitive to micro-vibrations is installed, it is possible to improve the degree of freedom in arranging the semiconductor manufacturing related equipment.

[0064] <9> A building according to another aspect of the present disclosure is a building having an area that is sensitive to vibrations in the micro-vibration range, and is equipped with a seismic isolation structure that allows relative movement between a ground-side portion of the building and a building portion located above the ground-side portion, and the seismic isolation structure is equipped with a plurality of spherical sliding bearings that share and support the vertical load of the building portion. According to the above configuration, the seismic isolation structure is equipped with a plurality of spherical sliding bearings with a home return function, and the vertical load of the building portion is shared and supported by the plurality of spherical sliding bearings. This reduces the need to place laminated rubber bearings to ensure the home return function in the building, and improves the degree of freedom in the placement of areas that do not tolerate vibrations in the micro-vibration range (for example, rooms that do not tolerate vibrations in the micro-vibration range).

[0065] <10> The method for changing the arrangement state according to one aspect of the present disclosure includes the steps of: <1> from <8> The method for changing the layout state of the precision equipment in a building relating to any one of the above, comprises: an equipment layout state changing step for changing the layout state of the precision equipment; and a spherical sliding bearing layout state changing step for changing the layout states of the plurality of spherical sliding bearings in accordance with the layout state of the precision equipment after it has been changed in the equipment layout state changing step. According to the above configuration, by changing the arrangement of the multiple spherical sliding bearings in accordance with the arrangement of the precision equipment, it is possible to accommodate changes in the arrangement of the precision equipment, thereby improving the freedom of arrangement of the precision equipment.

[0066] <11> the above <10> In the method for changing the layout state according to the present invention, the building part may have a beam extending horizontally, and the spherical sliding support layout state changing process may include placing a new spherical sliding support directly below the beam, the new spherical sliding support having not been provided before the layout state was changed. According to the above configuration, even if the load distribution of the building exceeds the expected load distribution due to a change in the placement of precision equipment, the load of the building after the change can be supported by placing a new spherical sliding bearing, and the change in the placement of the precision equipment can be accommodated.

[0067] <12> According to another aspect of the present disclosure, there is provided a method for changing an arrangement state, comprising: <1> from <8> The method for changing the layout state of the precision equipment in a building relating to any one of the above items comprises: an equipment layout state changing step for changing the layout state of the precision equipment; and a conditional spherical sliding bearing layout state changing step for not changing the layout state of the plurality of spherical sliding bearings if a distribution state of the load supported by the plurality of spherical sliding bearings in the layout state of the precision equipment changed in the equipment layout state changing step is within a preset tolerance range, and for changing the layout state of the plurality of spherical sliding bearings so that the distribution state falls within the tolerance range if the distribution state exceeds the tolerance range. According to the above configuration, if the distribution of the load supported by the multiple spherical sliding bearings in the arrangement state of the precision equipment after the equipment arrangement state change process is within the allowable range, the arrangement state of the spherical sliding bearings is not changed, but if it exceeds the allowable range, the arrangement state of the spherical sliding bearings is changed. Therefore, in accordance with the change in the load distribution state associated with the equipment arrangement state change process, the arrangement state of the spherical sliding bearings can be changed only when necessary, and unnecessary changes to the arrangement state of the spherical sliding bearings can be prevented when there is no need to change it. [Explanation of symbols]

[0068] 1, 1A Buildings 2 Ground side part 3 Building section 4. Seismic isolation structure 5, 5A precision equipment 6, 6A, 6B Spherical sliding bearing 7 Damper 32 Pillars 33 Beam

Claims

1. A building in which precision equipment that is sensitive to vibrations in the micro-vibration range is installed, The structure includes a seismic isolation structure that allows relative movement between a ground side portion of the building and a building portion located above the ground side portion, The seismic isolation structure includes a plurality of spherical sliding bearings that share and support the vertical load of the building portion, A building, wherein the plurality of spherical sliding bearings share and support all of the vertical loads of the building portion.

2. 2. The building according to claim 1, which does not include laminated rubber bearings.

3. The building portion includes a beam extending horizontally, The building of claim 1 , wherein at least one of the plurality of spherical sliding bearings is disposed directly below the beam.

4. 2. The building according to claim 1, wherein the plurality of spherical sliding bearings are a mixture of a plurality of types of spherical sliding bearings having different friction coefficients.

5. The building according to claim 4 , wherein the seismic isolation structure further comprises a bearing having a different friction coefficient from the plurality of types of spherical sliding bearings.

6. The building according to claim 1 , further comprising a damper between the ground side portion and the building portion for damping vibration of the building portion.

7. 2. The building according to claim 1, wherein the precision equipment is a semiconductor manufacturing related device.

8. A building having an area that is sensitive to vibrations in the micro-vibration area, The structure includes a seismic isolation structure that allows relative movement between a ground side portion of the building and a building portion located above the ground side portion, The seismic isolation structure includes a plurality of spherical sliding bearings that share and support the vertical load of the building portion, A building, wherein the plurality of spherical sliding bearings share and support all of the vertical loads of the building portion.

9. A method for changing the arrangement of precision equipment in a building in which precision equipment sensitive to vibrations in the micro-vibration range is arranged, the method comprising the steps of: providing a seismic isolation structure that allows relative movement between a ground-side portion of the building and a building portion located above the ground-side portion; the seismic isolation structure comprising a plurality of spherical sliding bearings that share and support the vertical load of the building portion, the method comprising the steps of: a device layout change step of changing the layout state of the precision device; a spherical sliding bearing arrangement state changing step of changing the arrangement state of the plurality of spherical sliding bearings in accordance with the arrangement state of the precision equipment after the change in the equipment arrangement state changing step; The method for changing the arrangement state includes:

10. The building portion includes a beam extending horizontally, The method for changing the arrangement state according to claim 9, wherein the spherical sliding support arrangement change step includes placing a new spherical sliding support directly below the beam that was not provided before the arrangement state was changed.

11. A method for changing the arrangement of precision equipment in a building in which precision equipment sensitive to vibrations in the micro-vibration range is arranged, the method comprising the steps of: providing a seismic isolation structure that allows relative movement between a ground-side portion of the building and a building portion located above the ground-side portion; the seismic isolation structure comprising a plurality of spherical sliding bearings that share and support the vertical load of the building portion, the method comprising the steps of: a device layout change step of changing the layout state of the precision device; a conditional spherical sliding bearing arrangement state changing process for not changing the arrangement state of the plurality of spherical sliding bearings if the distribution state of the load supported by the plurality of spherical sliding bearings in the arrangement state of the precision equipment after the change in the equipment arrangement state changing process is within a preset allowable range, and for changing the arrangement state of the plurality of spherical sliding bearings so that the distribution state falls within the allowable range if the distribution state exceeds the allowable range; The method for changing the arrangement state includes:

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