Passive and Packaged Components

Abstract

To provide a passive component that can suppress deterioration in performance while alleviating stress during molding.SOLUTION: A passive component includes an inorganic substrate having a first main surface and a second main surface facing each other and containing a semiconductor material, and a passive element portion provided on the first main surface so as to be in contact with the first main surface of the inorganic substrate, and when a cross section in a plane passing through a center of gravity of the entire first main surface and perpendicular to the first main surface is defined as a first cross section, in the first cross section, the inorganic substrate has a first side surface and a second side surface connected to the first main surface and facing each other, and line roughness of the first side surface and line roughness of the second side surface are each larger than line roughness of the first main surface.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to passive and packaged components. [Background technology]

[0002] In recent years, electronic components such as smartphones and personal computers have become more compact and perform better, leading to greater integration of electronic components. In systems in packages (SiPs), for example, semiconductor components and passive components are molded together in a sealing material to reduce size. When electronic components such as semiconductor components and passive components are molded in a sealing material, if the electronic components have corners, stress is concentrated in those areas, which can cause peeling between the sealing material and the electronic components, or deformation of the electronic components.

[0003] For example, a conventional electronic component is described in JP 2003-158097 A (Patent Document 1). In this electronic component, a metal layer formed on a main surface of a substrate is connected to a side metal layer formed from the side surface of the substrate to the main surface. The edge portion on the main surface side of the side surface of the substrate on which the side metal layer is formed is formed at an angle. The main surface of the substrate is provided with a FET structure that serves as an element. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2003-158097 A Summary of the Invention [Problem to be solved by the invention]

[0005] In the conventional electronic components described above, the stress during molding is alleviated by providing an edge portion on the main surface of the side of the substrate. However, providing the edge portion reduces the area of ​​the main surface of the substrate, and therefore the area in which elements can be provided is reduced, raising concerns about the impact on characteristics.

[0006] Therefore, an object of the present disclosure is to provide a passive component and a package component that can reduce the deterioration of performance while mitigating the stress during molding. [Means for solving the problem]

[0007] In order to solve the above problems, a passive component according to one aspect of the present disclosure comprises: an inorganic substrate having a first main surface and a second main surface opposed to each other and including a semiconductor material; a passive element portion provided on the first main surface of the inorganic substrate so as to be in contact with the first main surface; Equipped with When a cross section in a plane that passes through the center of gravity of the entire first main surface and is perpendicular to the first main surface is defined as a first cross section, In the first cross section, The inorganic substrate has a first side surface and a second side surface connected to the first main surface and facing each other, and the line roughness of the first side surface and the line roughness of the second side surface are each greater than the line roughness of the first main surface.

[0008] Here, the line roughness refers to LER (Line Edge Roughness).

[0009] According to the above aspect, the line roughness of the first side surface and the line roughness of the second side surface are greater than the line roughness of the first main surface. Therefore, when the passive component is molded with a sealing member, the stress of the sealing member can be alleviated by the line roughness of the first side surface and the second side surface, and the adhesion between the sealing member and the first side surface and the second side surface can be improved.

[0010] Furthermore, since the line roughness of the first side surface and the line roughness of the second side surface are greater than the line roughness of the first main surface, by roughening the first side surface and the second side surface on which the passive element portion is not provided, the size of the first main surface on which the passive element portion is provided can be secured, and degradation in the performance of the passive element portion can be suppressed. Effect of the Invention

[0011] According to the passive component and package component of one aspect of the present disclosure, it is possible to reduce the deterioration of performance while mitigating the stress that occurs during molding. [Brief description of the drawings]

[0012] [Figure 1] 1 is a schematic top view showing a first embodiment of a passive component as viewed from the top surface side. [Diagram 2] FIG. 2 is a cross-sectional view taken along line II-II of FIG. [Figure 3A] FIG. 4 is an explanatory diagram for explaining a method for measuring line roughness. [Figure 3B] FIG. 3B is an enlarged view of FIG. 3A. [Figure 4A] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4B] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4C] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4D] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4E] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4F] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4G] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4H] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4I] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 4J] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Diagram 5] 11 is an exploded plan view showing a second embodiment of a passive component as viewed from the top surface side. FIG. [Figure 6] 6 is a cross-sectional view taken along line VI-VI of FIG. 5. [Figure 7A] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7B] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7C] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7D] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7E] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7F] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7G] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7H] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7I] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7J] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7K] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 7L] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing a passive component. [Figure 8] FIG. 11 is a schematic cross-sectional view showing a first modified example of the second embodiment of the passive component. [Figure 9] FIG. 11 is a schematic cross-sectional view showing a second modified example of the second embodiment of the passive component. [Figure 10] FIG. 11 is a schematic cross-sectional view showing a third embodiment of a passive component. [Figure 11] FIG. 2 is a schematic cross-sectional view showing a package component. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, a passive component and a package component according to an embodiment of the present disclosure will be described in detail with reference to the drawings. Note that the drawings include some schematic views and may not reflect actual dimensions or ratios.

[0014] First Embodiment [Summary configuration] Fig. 1 is a schematic top view of the passive component 1 as viewed from the top side. Fig. 2 is a cross-sectional view taken along line II-II in Fig. 1. For convenience, the main body 10 is depicted as transparent in Fig. 1 so that the structure can be easily understood, but it may be semi-transparent or opaque. In Fig. 1, the first external terminal 41 and the second external terminal 42 are depicted by two-dot chain lines, and the coating film 60 is omitted.

[0015] The following describes a schematic configuration of the passive component 1. The passive component 1 is, for example, a surface-mount type passive component used in a high-frequency signal transmission circuit. The passive component 1 is an electronic component such as a resistor, a capacitor, or an inductor, and does not include an active element such as a transistor.

[0016] 1 and 2, the passive component 1 has an inorganic substrate 21 and a passive element section 5 provided on the inorganic substrate 21. The passive element section 5 has a passive element, which is an inductor element L. In this embodiment, the passive element is an inductor element L, but the passive element may include any one or more elements selected from the group consisting of an inductor element and a capacitor element, improving the degree of freedom in circuit design. The passive element may be a resistor.

[0017] The passive element section 5 includes a passive element, but may include at least a portion of the passive element. For example, when the passive element is a capacitor element including a first capacitor electrode, a second capacitor electrode, and a dielectric film between the first capacitor electrode and the second capacitor electrode, the passive element section 5 may not include the first capacitor electrode, but may include a portion of the capacitor element including the second capacitor electrode and the dielectric film.

[0018] The inorganic substrate 21 has a top surface 21a and a bottom surface 21b facing each other. The top surface 21a corresponds to an example of a "first main surface" in the claims, and the bottom surface 21b corresponds to a "second main surface" in the claims. The inorganic substrate 21 includes a semiconductor material. The semiconductor material is, for example, an elemental semiconductor made of a Group IV element such as Si, a semiconductor made of a Group III or Group V compound such as GaAs, SiC, GaN, or InP, or an oxide semiconductor such as SiO or ITO.

[0019] The inorganic substrate 21 has a length, a width, and a height. The inorganic substrate 21 has a first end face 21e1 and a second end face 21e2 at both ends in the length direction, a first side face 21s1 and a second side face 21s2 at both ends in the width direction, and a top face 21a and a bottom face 21b at both ends in the height direction. In other words, the outer surface of the inorganic substrate 21 includes the first end face 21e1 and the second end face 21e2, the first side face 21s1 and the second side face 21s2, the top face 21a, and the bottom face 21b.

[0020] As shown in the drawings, for the sake of convenience, the length direction (longitudinal direction) of the inorganic substrate 21 is defined as the X direction, the direction from the first end surface 21e1 to the second end surface 21e2 is defined as the forward X direction, and the opposite direction of the forward X direction is defined as the reverse X direction. The width direction of the inorganic substrate 21 is defined as the Y direction, the direction from the first side surface 21s1 to the second side surface 21s2 is defined as the forward Y direction, and the opposite direction of the forward Y direction is defined as the reverse Y direction. The height direction of the inorganic substrate 21 is defined as the Z direction, the direction from the bottom surface 21b to the top surface 21a is defined as the forward Z direction, and the opposite direction of the forward Z direction is defined as the reverse Z direction. In this specification, the forward Z direction is defined as the upper side, and the reverse Z direction is defined as the lower side. The X direction, the Y direction, and the Z direction are perpendicular to each other, and when arranged in the order of X, Y, Z, they form a right-handed system.

[0021] In this specification, "above an element" does not mean an absolute direction such as vertically upward, which is defined by the direction of gravity, but rather means a direction toward the outside of the outside and inside of the boundary of the element, based on the element. Therefore, "above an element" is a relative direction determined by the orientation of the element. Furthermore, "above" an element does not only mean above the element, i.e., a position above the element via another object or a position above the element with a gap, but also includes a position directly above the element (on).

[0022] The passive element portion 5 has a main body portion 10 and an inductor element L provided within the main body portion 10. The passive element portion 5 is provided on the top surface 21a of the inorganic substrate 21 so as to be in contact with the top surface 21a.

[0023] 2, in a first cross section perpendicular to the top surface 21a, the inorganic substrate 21 has a first end surface 21e1 and a second end surface 21e2 that are connected to the top surface 21a and face each other. The first end surface 21e1 corresponds to the "first side surface" in the claims, and the second end surface 21e2 corresponds to the "second side surface" in the claims. Note that the first end surface 21e1 may correspond to the "second side surface" in the claims, and the second end surface 21e2 may correspond to the "first side surface" in the claims. The first cross section is a cross section in a plane that passes through the center of gravity of the entire top surface 21a and is perpendicular to the top surface 21a. In this embodiment, the first cross section is a cross section that passes through the center in the Y direction, which is the width direction of the passive component 1. The first cross section may be a cross section that passes through the center in the X direction, which is the length direction of the passive component 1, and in this case, the first side surface 21s1 may correspond to the "first side surface" recited in the claims, and the second side surface 21s2 may correspond to the "second side surface" recited in the claims, or the first side surface 21s1 may correspond to the "second side surface" recited in the claims, and the second side surface 21s2 may correspond to the "first side surface" recited in the claims.

[0024] The line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are larger than that of the top face 21a. The line roughness is LER (Line Edge Roughness). In other words, the surface irregularities of the first end face 21e1 and the surface irregularities of the second end face 21e2 are larger than that of the top face 21a. In FIG. 2, the surface irregularities of the first end face 21e1 and the surface irregularities of the second end face 21e2 are drawn larger for ease of understanding.

[0025] Here, we will explain how to measure line roughness. As shown in Fig. 3A, an image of the measurement point on the measurement surface S is acquired, and edge points of the measurement data are detected. An approximation line K is calculated from the detected edge points using the least squares method. As shown in Fig. 3B, the deviation d between the approximation line K and the edge points is measured, and the average value of the deviation d within a specified range is taken as the line roughness of the measurement surface S.

[0026] According to the above configuration, the line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are greater than the line roughness of the top face 21a. Therefore, when the passive component 1 is molded with a sealing member, the stress of the sealing member can be alleviated by the line roughness of the first end face 21e1 and the second end face 21e2, and the adhesion between the sealing member and the first end face 21e1 and the second end face 21e2 can be improved.

[0027] Furthermore, since the line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are greater than the line roughness of the top face 21a, by roughening the first end face 21e1 and the second end face 21e2 on which the passive element portion 5 is not provided, the size of the top face 21a on which the passive element portion 5 is provided can be secured, and degradation in the performance of the passive element portion 5 can be suppressed.

[0028] In addition, since the line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are large, it becomes easy to grip the first end face 21e1 and the second end face 21e2, and the passive component 1 can be easily picked up.

[0029] In addition, since the line roughness of the top surface 21a is small, when forming the passive element portion 5 on the top surface 21a, it is not affected by the unevenness of the top surface 21a, and an additional layer such as a flattening layer for absorbing the unevenness of the top surface 21a is not required. This makes it possible to reduce the height of the passive component 1.

[0030] [Preferable configuration of each component] The passive component 1 has an inorganic substrate 21, a passive element section 5 provided on the inorganic substrate 21, a first external terminal 41 and a second external terminal 42 provided on the passive element section 5, and a coating film 60 provided on the passive element section 5.

[0031] The thickness of the passive component 1 is preferably 200 μm or less. This allows the passive component 1 to be made thin. The size of the passive component 1 (length (X direction) × width (Y direction) × height (Z direction)) is, for example, 0.6 mm × 0.3 mm × 0.3 mm, 0.4 mm × 0.2 mm × 0.2 mm, 0.25 mm × 0.125 mm × 0.120 mm, etc. Furthermore, the width and height do not have to be approximately equal, and may be, for example, 0.4 mm × 0.2 mm × 0.3 mm.

[0032] The passive element section 5 has a main body section 10 and an inductor element L provided in the main body section 10. The inductor element L has an inductor wiring 110, and a first escape wiring 51 and a second escape wiring 52 connected to the inductor wiring 110.

[0033] The passive element portion 5 has a top surface 5a and a bottom surface 5b that face each other. The bottom surface 5b is in contact with the top surface 21a of the inorganic substrate 21. The bottom surface 5b corresponds to a "third main surface" in the claims, and the top surface 5a corresponds to an example of a "fourth main surface" in the claims.

[0034] The passive element section 5 has a length, a width, and a height. The passive element section 5 has a first end face 5e1 and a second end face 5e2 at both ends in the length direction, a first side face 5s1 and a second side face 5s2 at both ends in the width direction, and a top face 5a and a bottom face 5b at both ends in the height direction. That is, the outer surface of the passive element section 5 includes the first end face 5e1 and the second end face 5e2, the first side face 5s1 and the second side face 5s2, the top face 5a, and the bottom face 5b. The direction from the first end face 5e1 to the second end face 5e2 is the forward X direction, the direction from the first side face 5s1 to the second side face 5s2 is the forward Y direction, and the direction from the bottom face 5b to the top face 5a is the forward Z direction.

[0035] The main body 10 has a length, a width, and a height. The main body 10 has a first end face 10e1 and a second end face 10e2 at both ends in the length direction, a first side face 10s1 and a second side face 10s2 at both ends in the width direction, and a top face 10a and a bottom face 10b at both ends in the height direction. The top surface 5a of the passive element portion 5 includes the top surface 10a of the main body portion 10, the bottom surface 5b of the passive element portion 5 includes the bottom surface 10b of the main body portion 10, the first end surface 5e1 of the passive element portion 5 includes the first end surface 10e1 of the main body portion 10, the second end surface 5e2 of the passive element portion 5 includes the second end surface 10e2 of the main body portion 10, the first side surface 5s1 of the passive element portion 5 includes the first side surface 10s1 of the main body portion 10, and the second side surface 5s2 of the passive element portion 5 includes the second side surface 10s2 of the main body portion 10.

[0036] The main body 10 is made of an organic resin. For example, the main body 10 may be made of an easily formable resin such as an epoxy-based or polyimide-based resin. This improves the degree of freedom in forming the passive element section 5. For example, the main body 10 can easily seal a thick inductor wiring 110. The main body 10 is made of one layer of material, but may be made of two or more layers of material, or may be made of two or more types of materials.

[0037] The inductor wiring 110 is provided on the top surface 21a of the inorganic substrate 21 and is formed in a planar spiral shape. When viewed from the Z direction, the inductor wiring 110 is spirally wound in a clockwise direction from the outer peripheral end 110e1 to the inner peripheral end 110e2. In other words, the inductor wiring 110 extends in a direction parallel to the top surface 21a of the inorganic substrate 21 and is wound along the top surface 21a. The inductor wiring 110 has a central axis AX that is perpendicular to the top surface 21a of the inorganic substrate 21. With this configuration, the passive element section 5 can be made thinner than when the inductor wiring 110 has a central axis parallel to the top surface 21a of the inorganic substrate 21. As a result, the passive component 1 can be made thinner.

[0038] The number of turns of the inductor wiring 110 is preferably more than one. This can improve the inductance. The outer peripheral end 110e1 is substantially rectangular. The inner peripheral end 110e2 is substantially circular. The width in the X direction of the outer peripheral end 110e1 and the diameter of the inner peripheral end 110e2 are each larger than the wiring width of the winding portion, which is the portion of the inductor wiring 110 excluding the outer peripheral end 110e1 and the inner peripheral end 110e2. This allows the outer peripheral end 110e1 and the inner peripheral end 110e2 to function as pad portions, improving the connection reliability with the first connection wiring 51 and the second connection wiring 52.

[0039] The inductor wiring 110 is made of a good conductor material such as copper, silver, gold, or an alloy of these. The inductor wiring 110 may be a metal film formed by plating, vapor deposition, sputtering, or the like, or may be a metal sintered body formed by applying and sintering a conductive paste. The inductor wiring 110 may also have a multilayer structure in which multiple metal layers are stacked. The thickness of the inductor wiring 110 is preferably 5 μm or more and 50 μm or less.

[0040] The first escape wiring 51 and the second escape wiring 52 extend from both ends of the inductor wiring 110 in a direction perpendicular to the top surface 21a of the inorganic substrate 21 and penetrate the main body 10. The first escape wiring 51 has a first via wiring 121v extending upward from the upper surface of the outer circumferential end 110e1 of the inductor wiring 110, and a first columnar wiring 151 extending upward from the first via wiring 121v. The second escape wiring 52 includes a second via wiring 122v extending upward from the upper surface of the inner circumferential end 110e2 of the inductor wiring 110, and a second columnar wiring 152 extending upward from the second via wiring 122v.

[0041] The first escape wiring 51 and the second escape wiring 52 are not exposed from the first side surface 5s1 and the second side surface 5s2 and the first end surface 5e1 and the second end surface 5e2. With this, when the first side surface 5s1 and the second side surface 5s2 and the first end surface 5e1 and the second end surface 5e2 are exposed in the manufacturing process of singulating into each passive component 1, it is possible to easily cut into each passive component 1 without cutting the first escape wiring 51 and the second escape wiring 52.

[0042] The first external terminal 41 is provided on the top surface 5a of the passive element section 5 (top surface 10a of the main body section 10) and covers an end face of the first columnar wire 151 exposed from the top surface 5a. As a result, the first external terminal 41 is electrically connected to the outer circumferential end 110e1 of the inductor wire 110. The second external terminal 42 is provided on the top surface 5a of the passive element section 5 and covers an end face of the second columnar wire 152 exposed from the top surface 5a. As a result, the second external terminal 42 is electrically connected to the inner circumferential end 110e2 of the inductor wire 110.

[0043] The first external terminal 41 and the second external terminal 42 are made of a conductive material. The first external terminal 41 and the second external terminal 42 have a three-layer structure in which metal layers made of Cu, which has low electrical resistance and excellent stress resistance, Ni, which has excellent corrosion resistance, and Au, which has excellent solder wettability and reliability, are laminated in this order from the inside to the outside.

[0044] The covering film 60 is made of an insulating material, covers the top surface 5a of the passive element portion 5 (top surface 10a of the main body portion 10), and exposes the first external terminal 41 and the second external terminal 42. The covering film 60 ensures insulation of the surface of the passive component 1. The covering film 60 is formed of, for example, a solder resist. The covering film 60 may be made of the same material as the main body portion 10, or may be made of a different material than the main body portion 10.

[0045] As shown in FIG. 2, in a first cross section perpendicular to the top surface 21a of the inorganic substrate 21, the passive element portion 5 has a first end surface 5e1 and a second end surface 5e2 connected to the top surface 5a and facing each other. The first end surface 5e1 corresponds to the "third side surface" described in the claims, and the second end surface 5e2 corresponds to the "fourth side surface" described in the claims. The first cross section is a cross section in a plane that passes through the center of the top surface 21a of the inorganic substrate 21 and is perpendicular to the top surface 21a. In this embodiment, the first cross section is a cross section that passes through the center in the Y direction, which is the width direction of the passive component 1. Note that the first cross section may be a cross section that passes through the center in the X direction, which is the length direction of the passive component 1, in which case the third side surface 5s1 corresponds to the "third side surface" described in the claims, and the fourth side surface 5s2 corresponds to the "fourth side surface" described in the claims.

[0046] Preferably, in the first cross section, the line roughness of the bottom surface 21b of the inorganic substrate 21 is smaller than the line roughness of the first end surface 21e1 of the inorganic substrate 21 and the line roughness of the second end surface 21e2 of the inorganic substrate 21. Since the bottom surface 21b has no unnecessary protrusions, the thickness of the passive component 1 can be made thin.

[0047] Preferably, in the first cross section, the line roughness of the first end face 5e1 (the first end face 10e1 of the main body 10) of the passive element portion 5 and the line roughness of the second end face 5e2 (the second end face 10e2 of the main body 10) of the passive element portion 5 are smaller than the line roughness of the first end face 21e1 of the inorganic substrate 21 and the line roughness of the second end face 21e2 of the inorganic substrate 21, respectively. For example, the smaller line roughness of the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21 is 0.48 μm, and the larger line roughness of the first end face 10e1 and the second end face 10e2 of the main body portion 10 is 0.256 μm. This makes it possible to reduce the unevenness of the first end face 10e1 and the second end face 10e2 of the main body portion 10, thereby ensuring the size in the width direction of the inductor wiring 110 and ensuring the performance of the passive element portion 5.

[0048] Preferably, the line roughness of the top surface 5a of the passive element portion 5 (top surface 10a of the main body portion 10) is smaller than the line roughness of the first end surface 21e1 of the inorganic substrate 21 and the line roughness of the second end surface 21e2 of the inorganic substrate 21. Since the line roughness of the top surface 10a of the main body portion 10 is thus small, deterioration of the high-frequency characteristics of external terminals, wiring, and the like formed on the top surface 10a of the main body portion 10 can be suppressed.

[0049] Preferably, the line roughness of the top surface 21a of the inorganic substrate 21 is 0.5 μm or less. The line roughness of the first end surface 21e1 of the inorganic substrate 21 and the line roughness of the second end surface 21e2 of the inorganic substrate 21 are each 0.2 μm or more and 10 μm or less. The line roughness of the first end surface 10e1 of the main body portion 10 and the line roughness of the second end surface 10e2 of the main body portion 10 are each 0.5 μm or less. In this case, it is assumed that the line roughness of the first end surface 21e1 and the line roughness of the second end surface 21e2 are each greater than the line roughness of the top surface 21a.

[0050] Preferably, the line roughness of the top surface 21a of the inorganic substrate 21 is greater than the line roughness of the bottom surface 21b of the inorganic substrate 21. Since the top surface 21a has a greater line roughness, the inorganic substrate 21 and the passive element portion 5 can be firmly attached to each other.

[0051] Preferably, the line roughness of the top surface 21a of the inorganic substrate 21 is smaller than the line roughness of the bottom surface 21b of the inorganic substrate 21. Since the line roughness of the top surface 21a is small, degradation of the high frequency characteristics of the passive element portion 5 can be suppressed.

[0052] Preferably, the thickness of the body 10 made of organic resin is thinner than the thickness of the inorganic substrate 21. Thus, the body 10 is made of organic resin and is softer than the inorganic substrate 21, but the body 10 is thin, so warping of the passive component 1 can be suppressed. In addition, when the body 10 is mounted on a mounting board, the mounting impact can be absorbed because the mounting surface is made of organic resin.

[0053] [Manufacturing method] Next, a method for manufacturing the passive component 1 will be described with reference to Figures 4A to 4J. Figures 4A to 4J are views corresponding to the cross section taken along line II-II in Figure 1.

[0054] As shown in Fig. 4A, an inorganic substrate 21 is prepared. The inorganic substrate 21 is, for example, a Si substrate or a SiO 2 It is a circuit board.

[0055] 4B, a seed layer 600 is formed by sputtering on the upper surface (top surface) of the inorganic substrate 21. Thereafter, a resist 1023 is attached, and a predetermined pattern is formed in the resist 1023 by photolithography. The predetermined pattern is a pattern corresponding to the shape of the inductor wiring 110.

[0056] 4C, while supplying power to the seed layer 600, a conductor layer 1110 is formed on the seed layer 600 by electrolytic plating. The inductor wiring 110 is formed from the seed layer 600 and the conductor layer 1110. Thereafter, the resist 1023 is peeled off, and the exposed seed layer 600 is etched. Hereinafter, illustration of the seed layer 600 is omitted.

[0057] As shown in FIG. 4D, a first insulating layer 1011 is formed on the upper surface of the inorganic substrate 21 so as to cover the inductor wiring 110. A via hole 1011a is formed on the upper surface of the first insulating layer 1011 at a position corresponding to the end of the inductor wiring 110 by using a photolithography technique. A seed layer (not shown) is formed by the same method as in the formation of the inductor wiring 110, a first via wiring 121v and a second via wiring 122v are formed in the via hole 1011a, a first columnar wiring 151 is formed on the first via wiring 121v, and a second columnar wiring 152 is formed on the second via wiring 122v. A first lead-out wiring 51 is formed from the first via wiring 121v and the first columnar wiring 151, and a second lead-out wiring 52 is formed from the second via wiring 122v and the second columnar wiring 152. Note that power may be supplied from the inductor wiring 110 without using a seed layer, and the lead-out wiring may be formed by any method.

[0058] 4E, a second insulating layer 1012 is formed on the first insulating layer 1011 so as to cover the first escape wiring 51 and the second escape wiring 52, and the second insulating layer 1012 is ground so as to expose end faces of the first escape wiring 51 and the second escape wiring 52. The main body 10 is formed from the first insulating layer 1011 and the second insulating layer 1012.

[0059] 4F, a coating film 60 is formed on the upper surface (top surface) of the main body 10. The coating film 60 is, for example, a solder resist. Holes 60a are formed in the coating film 60 in areas where external terminals are to be formed.

[0060] 4G, a first external terminal 41 is formed in a hole 60a on the first escape wiring 51, and a second external terminal 42 is formed in a hole 60a on the second escape wiring 52. The first external terminal 41 and the second external terminal 42 are formed by, for example, electroless plating or by using a catalyst.

[0061] As shown in FIG. 4H, an adhesive member 1000 is attached to the lower surface (bottom surface) of the inorganic substrate 21, and the adhesive member 1000 is attached to a fixing table (not shown), and the inorganic substrate 21 is fixed to the fixing table. Thereafter, in the singulation process, the main body portion 10 is first cut at the cut line C with a blade, and the inorganic substrate 21 is not cut with the blade. As a result, the first end surface 10e1 and the second end surface 10e2 of the main body portion 10 are formed. Then, as shown in FIG. 4I, the main body portion 10 is not etched, and the inorganic substrate 21 is etched. In this manner, the inorganic substrate 21 is etched by selective etching. As a result, the first end surface 21e1 and the second end surface 21e2 of the inorganic substrate 21 are formed.

[0062] In this way, the line roughness of the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21 can be made larger than the line roughness of the first end face 10e1 and the second end face 10e2 of the main body portion 10 (the first end face 5e1 and the second end face 5e2 of the passive element portion 5). Similarly, the line roughness of the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21 can be made larger than the top surface 21a of the inorganic substrate 21. Furthermore, by optimizing the abrasive grains on the side surface of the blade or grinding the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21 while vibrating the blade, the line roughness of the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21 can be made to a desired roughness.

[0063] As shown in FIG. 4J, the adhesive member 1000 is peeled off, and the passive component 1 is produced.

[0064] <Second embodiment> [composition] Fig. 5 is an exploded plan view showing a second embodiment of the passive component. Fig. 6 is a cross-sectional view taken along line VI-VI in Fig. 5. The second embodiment differs from the first embodiment mainly in the configuration of the passive element portion and the shape of the inorganic substrate. This different configuration will be described below. The other configurations are the same as those of the first embodiment, and the same reference numerals as those of the first embodiment will be used and the description thereof will be omitted.

[0065] For convenience, the main body 10 is depicted as transparent in Fig. 5 so that the structure can be easily understood, but it may be semi-transparent or opaque. In Fig. 5, the first external terminal 41 and the second external terminal 42 are depicted by two-dot chain lines, and the coating film 60 and the dielectric film 73 are omitted.

[0066] 5 and 6, in a passive component 1A of the second embodiment, a passive element portion 5A includes a capacitor element C and an inductor element L provided in a main body portion 10. The inductor element L and the capacitor element C are electrically connected in parallel. The capacitor element C is provided on a top surface 21a of an inorganic substrate 21A, and the inductor element L is provided on the capacitor element C.

[0067] According to the above configuration, the capacitor element C and the inductor element L are provided in this order on the inorganic substrate 21A, so that in the manufacturing process of the passive component 1A, after the capacitor element C is formed on the inorganic substrate 21A, the inductor element L can be formed on the capacitor element C. Therefore, since the inductor element L is formed last, a material that is weak against heat can be used for the inductor element L. Also, since the capacitor element C is not present in the inorganic substrate 21A, the inorganic substrate 21A can be ground to any thickness.

[0068] The capacitor element C has a first capacitor electrode 71 and a second capacitor electrode 72 facing each other in a direction perpendicular to the top surface 21a of the inorganic substrate 21A, and a dielectric film 73 disposed between the first capacitor electrode 71 and the second capacitor electrode 72.

[0069] The first capacitor electrode 71 and the second capacitor electrode 72 each extend in a direction parallel to the top surface 21a of the inorganic substrate 21A. The first capacitor electrode 71 is in contact with the top surface 21a of the inorganic substrate 21A. The second capacitor electrode 72 is disposed above the first capacitor electrode 71.

[0070] When viewed from the Z direction, the first capacitor electrode 71 is formed so as to overlap the outer peripheral end 110e1, the inner peripheral end 110e2, and a part of the winding portion of the inductor wiring 110. That is, when viewed from the Z direction, a first end of the first capacitor electrode 71 overlaps the outer peripheral end 110e1, a second end of the first capacitor electrode 71 overlaps the inner peripheral end 110e2, and a portion between the first end and the second end of the first capacitor electrode 71 overlaps a part of the winding portion.

[0071] The second capacitor electrode 72 is formed so as to overlap the outer circumferential end 110e1 of the inductor wiring 110 when viewed from the Z direction. In other words, the second capacitor electrode 72 overlaps the first end portion of the first capacitor electrode 71 when viewed from the Z direction.

[0072] The dielectric film 73 is disposed between the second capacitor electrode 72 and the inorganic substrate 21A. The dielectric film 73 is in contact with the top surface 21a of the inorganic substrate 21A so as to cover the first capacitor electrode 71. The bottom surface 5b of the passive element portion 5A includes the dielectric film 73 and the first capacitor electrode 71.

[0073] A second end of the first capacitor electrode 71 is connected to a third via wiring 123v penetrating the dielectric film 73, and the third via wiring 123v is connected to an inner peripheral end 110e2 of the inductor wiring 110 through a fourth via wiring 124v. The second capacitor electrode 72 is connected to an outer peripheral end 110e1 of the inductor wiring 110 through a fifth via wiring 125v. As a result, the inductor element L and the capacitor element C are electrically connected in parallel as shown by the dashed dotted line in FIG. 5. Note that the inductor element L and the capacitor element C may be electrically connected in series.

[0074] The conductive material of the first capacitor electrode 71 and the second capacitor electrode 72 is not particularly limited, and is, for example, Al. Preferably, the conductive material of the first capacitor electrode 71 and the second capacitor electrode 72 is different from the conductive material of the inductor wiring 110. By using different conductive materials for the first capacitor electrode 71 and the second capacitor electrode 72, through which no direct current flows, and the inductor wiring 110 through which a direct current flows, the manufacturing cost can be reduced without degrading the characteristics of the passive component 1A. Specifically, since Al has low conductivity but is inexpensive, it is preferable to use it for the first and second capacitor electrodes 71 and 72 of the capacitor element C, which is a voltage element. In addition, Cu, which has high conductivity, is preferable to use for the inductor wiring 110 of the inductor element L, which is a current element. By using different conductive materials for the first capacitor electrode 71 and the second capacitor electrode 72, through which no direct current flows, and the inductor wiring 110 through which a direct current flows, the manufacturing cost can be reduced without degrading the characteristics of the passive component 1A.

[0075] The dielectric film 73 contains at least one element of the inorganic substrate 21A. The material of the inorganic substrate 21A is the same as the material of the inorganic substrate 21 of the first embodiment. The material of the dielectric film 73 is, for example, SiO 2This makes it easier to bring the physical parameters (linear expansion coefficient and Young's modulus) of the dielectric film 73 closer to those of the inorganic substrate 21A, and thus makes it possible to suppress warping of the dielectric film 73. The material of the dielectric film 73 is, for example, HfO 2 , Y 2 O 3 As a result, the capacitance of the capacitor element C can be increased.

[0076] 6, in a first cross section perpendicular to the top surface 21a of the inorganic substrate 21A, the line roughness of the first end surface 21e1 of the inorganic substrate 21A is different from the line roughness of the second end surface 21e2 of the inorganic substrate 21A. For example, the difference between the line roughness of the first end surface 21e1 and the line roughness of the second end surface 21e2 is three times or more. This allows directionality to be imparted to the inorganic substrate 21A. In the second embodiment, the line roughness of the first end surface 21e1 is smaller than the line roughness of the second end surface 21e2.

[0077] Specifically, the second end face 21e2 has a slope 21e21 that slopes in a direction perpendicular to the top face 21a and connects to the bottom face 21b. That is, the second end face 21e2 further has a vertical face 21e22 that extends in a direction perpendicular to the top face 21a and connects to the top face 21a, and the slope 21e21 is connected between the vertical face 21e22 and the bottom face 21b. On the other hand, the first end face 21e1 is a vertical face that extends in a direction perpendicular to the top face 21a. According to the above configuration, it is possible to provide the inorganic substrate 21A with a clearer directionality.

[0078] As in the first embodiment, the line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are larger than that of the top face 21a. The line roughness of the second end face 21e2 is measured including the surface unevenness of the vertical face 21e22 and the surface unevenness of the inclined face 21e21 as well as the inclination angle of the inclined face 21e21. The surface unevenness of the first end face 21e1 and the surface unevenness of the vertical face 21e22 of the second end face 21e2 are larger than the surface unevenness of the inclined face 21e21 of the second end face 21e2. In FIG. 6, the surface unevenness of the first end face 21e1 and the surface unevenness of the vertical face 21e22 of the second end face 21e2 are drawn larger for ease of understanding.

[0079] The inclined surface 21e21 is formed so as to incline in a direction approaching the first end surface 21e1 from the top surface 21a toward the bottom surface 21b. According to the above configuration, the corners of the inorganic substrate 21A on the bottom surface 21b side are chamfered, and chipping of the inorganic substrate 21A can be prevented.

[0080] Although the second end face 21e2 has an inclined surface, the first end face 21e1 may have an inclined surface, or the first end face 21e1 and the second end face 21e2 may have inclined surfaces. In other words, it is sufficient that at least one of the first end face 21e1 and the second end face 21e2 has an inclined surface.

[0081] [Manufacturing method] Next, a method for manufacturing the passive component 1A will be described with reference to Figures 7A to 7L, which are views corresponding to the cross section taken along line VI-VI in Figure 5.

[0082] As shown in Fig. 7A, an inorganic substrate 21A is prepared. The inorganic substrate 21A is, for example, a Si substrate or a SiO 2 It is a circuit board.

[0083] 7B, a first capacitor electrode conductor layer 1071 corresponding to the first capacitor electrode 71 is formed on the inorganic substrate 21A. Specifically, for example, an Al film is formed on the upper surface of the inorganic substrate 21A by using a sputtering method.

[0084] As shown in Fig. 7C, a resist layer (not shown) is applied, and openings of a predetermined pattern are formed in the resist layer by a photolithography process. The Al film is then etched to form a patterned first capacitor electrode conductor layer 1071. The resist layer is then peeled off. This forms the first capacitor electrode 71.

[0085] 7D, a dielectric film 73 is formed on the inorganic substrate 21A by a CVD (Chemical Vapor Deposition) method or the like so as to cover the first capacitor electrode 71. The dielectric film 73 is, for example, SiO 2 However, SiN or the like may also be used. In this way, a high dielectric constant can improve the capacitance density of the capacitor. In addition, since the dielectric film 73 and the inorganic substrate 21A contain the same material, for example, Si, the material properties become similar, and warping, peeling, and the like can be suppressed.

[0086] 7E, a second capacitor electrode 72 is formed on the dielectric film 73. The second capacitor electrode 72 is formed so as to overlap the first capacitor electrode 71 when viewed from the Z direction. Specifically, the second capacitor electrode 72 is formed in the same manner as the first capacitor electrode 71.

[0087] 7F, a resist layer (not shown) is applied, and openings of a predetermined pattern are formed in the resist layer by a photolithography process. Then, the dielectric film 73 is etched to form a patterned dielectric film 73. At this time, openings 71a are formed at positions corresponding to the positions where the third via wirings 123v are to be provided.

[0088] 7G, a third insulating layer 1013, which corresponds to a part of the main body 10, is formed so as to cover the second capacitor electrode 72 and the dielectric film 73. A polyimide-based organic insulating film is used as the third insulating layer 1013, but an inorganic insulating layer, for example, SiO 2Alternatively, epoxy, phenol, BCB, or the like may be used as an organic insulating film. Then, a resist layer (not shown) is applied, and a predetermined pattern of openings is formed in the resist layer by a photolithography process. Thereafter, the third insulating layer 1013 is etched to form a patterned third insulating layer 1013. At this time, an opening 1013a is formed at a position corresponding to the position where the fourth via wiring 124v is provided, and an opening 1013b is formed at a position corresponding to the position where the fifth via wiring 125v is provided.

[0089] As shown in Figure 7H, after forming the third via wiring 123v, the fourth via wiring 124v and the fifth via wiring 125v, the inductor wiring 110, the first escape wiring 51, the second escape wiring 52, the main body 10, the first external terminal 41, the second external terminal 42 and the coating film 60 are formed in the same manner as the manufacturing method of the first embodiment.

[0090] As shown in FIG. 7I, an adhesive member (not shown) is attached onto the coating film 60, and this adhesive member is attached to a fixing base (not shown), and the main body portion 10 is fixed to the fixing base. Thereafter, a patterned protective film 1001 is formed on the lower surface (bottom surface) of the inorganic substrate 21A. The protective film 1001 is patterned using a resist layer as described above. Then, etching or sandblasting is performed on the inorganic substrate 21A exposed from the protective film 1001, to form a notch portion 210 on the lower surface side of the inorganic substrate 21A. The notch portion 210 constitutes the inclined surface 21e22 of the second end surface 21e2. Thereafter, the protective film 1001 is peeled off.

[0091] As shown in FIG. 7J, in the singulation process, first, the main body 10 is cut at the cut line C with a blade, but the inorganic substrate 21A is not cut with the blade. This forms the first end face 10e1 and the second end face 10e2 of the main body 10. Then, as shown in FIG. 7K, the inorganic substrate 21A is cut while vibrating the blade. This forms the first end face 21e1 and the vertical face 21e22 of the second end face 21e2 of the inorganic substrate 21A.

[0092] In this way, the line roughness of the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21A can be made larger than the line roughness of the first end face 10e1 and the second end face 10e2 (the first end face 5e1 and the second end face 5e2 of the passive element portion 5A) of the main body portion 10. Similarly, the line roughness of the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21A can be made larger than the top surface 21a of the inorganic substrate 21A.

[0093] As shown in FIG. 7L, the adhesive member (not shown) is peeled off to produce the passive component 1A.

[0094] [First Modification] Fig. 8 is a cross-sectional view showing a first modified example of the second embodiment of the passive component. The first modified example differs from the second embodiment (Fig. 6) in the shape of the inorganic substrate. This different configuration will be described below. The other configurations are the same as those of the second embodiment, so the same reference numerals as those of the second embodiment are used and the description thereof will be omitted.

[0095] As shown in FIG. 8, in the passive component 1B of the first modified example, the first end surface 21e1 of the inorganic substrate 21B has an inclined surface 21e11 and a vertical surface 21e12. The inclined surface 21e11 is inclined with respect to a direction perpendicular to the top surface 21a and is connected to the bottom surface 21b. The vertical surface 21e12 extends in a direction perpendicular to the top surface 21a and is connected to the top surface 21a. The inclined surface 21e11 is connected between the vertical surface 21e12 and the bottom surface 21b. The inclined surface 21e11 is formed so as to be inclined in a direction approaching the second end surface 21e2 as it moves from the top surface 21a to the bottom surface 21b. This chamfers the corners of the inorganic substrate 21B on the bottom surface 21b side, thereby preventing chipping of the inorganic substrate 21B.

[0096] The inclined surface 21e11 of the first end surface 21e1 is smaller than the inclined surface 21e21 of the second end surface 21e2 in the length along the inclined surface, the length along the X direction, and the length along the Z direction. This makes it possible to impart more clearly directional properties to the inorganic substrate 21B.

[0097] The surface irregularities of the inclined surface 21e11 of the first end face 21e1, the surface irregularities of the vertical surface 21e12 of the first end face 21e1, and the surface irregularities of the vertical surface 21e22 of the second end face 21e2 are each small, unlike in the second embodiment, and are the same size as the surface irregularities of the inclined surface 21e21 of the second end face 21e2.

[0098] As in the second embodiment, the line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are each larger than the line roughness of the top face 21a. The line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are different. In the first modification, the line roughness of the first end face 21e1 is smaller than the line roughness of the second end face 21e2.

[0099] [Second modified example] Fig. 9 is a cross-sectional view showing a second modified example of the second embodiment of the passive component. The second modified example differs from the second embodiment (Fig. 6) in the shape of the inorganic substrate. This different configuration will be described below. The other configurations are the same as those of the second embodiment, so the same reference numerals as those of the second embodiment are used and the description thereof will be omitted.

[0100] As shown in FIG. 9, in the passive component 1C of the second modification, the first end surface 21e1 of the inorganic substrate 21C has an inclined surface 21e11 and a vertical surface 21e12. The inclined surface 21e11 is inclined with respect to a direction perpendicular to the top surface 21a and is connected to the bottom surface 21b. The vertical surface 21e12 extends in a direction perpendicular to the top surface 21a and is connected to the top surface 21a. The inclined surface 21e11 is connected between the vertical surface 21e12 and the bottom surface 21b. The inclined surface 21e11 is formed so as to be inclined in a direction away from the second end surface 21e2 as it moves from the top surface 21a to the bottom surface 21b. This allows the corners of the inorganic substrate 21C on the bottom surface 21b side to protrude, making it easy to hold the inorganic substrate 21C.

[0101] On the other hand, the second end face 21e2 is a vertical face extending in a direction perpendicular to the top face 21a, which makes it possible to impart a clearer directionality to the inorganic substrate 21C.

[0102] The surface unevenness of the inclined surface 21e11 of the first end face 21e1 and the surface unevenness of the vertical surface 21e12 of the first end face 21e1 are small, unlike the first end face 21e1 of the second embodiment, and are smaller than the surface unevenness of the second end face 21e2.

[0103] As in the second embodiment, the line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are each greater than the line roughness of the top face 21a. The line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are different. In the second modified example, the line roughness of the first end face 21e1 is greater than the line roughness of the second end face 21e2.

[0104] <Third embodiment> Fig. 10 is a cross-sectional view showing a third embodiment of a passive component. The third embodiment differs from the second embodiment mainly in the configuration of the passive element portion and the shape of the inorganic substrate. This different configuration will be described below. The other configurations are the same as those of the second embodiment, so the same reference numerals as those of the second embodiment are used and the description thereof will be omitted.

[0105] 10, in a passive component 1D of the third embodiment, a passive element portion 5D includes an inductor element L and a portion of a capacitor element C. The portion of the capacitor element C does not include a first capacitor electrode 71, but includes a second capacitor electrode 72 and a dielectric film 73. In other words, the first capacitor electrode 71 is not present on the top surface 21a of the inorganic substrate 21D, and the top surface 21a of the inorganic substrate 21D is in contact with the dielectric film 73.

[0106] The inorganic substrate 21D has a low resistance portion 211 having a lower electrical resistance than a semiconductor made of a semiconductor material. The low resistance portion 211 is electrically connected to the passive element portion 5D. This allows the low resistance portion 211 to be used as a conductor, improving design freedom.

[0107] In the third embodiment, the low resistance portion 211 corresponds to the first capacitor electrode 71 of the capacitor element C. Unlike the second embodiment, the low resistance portion 211 as the first capacitor electrode 71 is not connected to the inner circumferential end 110e2 of the inductor wiring 110 of the inductor element L.

[0108] The low resistance portion 211 has a lower electrical resistance than a semiconductor made of a semiconductor material, for example, Si, GaAs, SiC, GaN, InP, or ITO. In the third embodiment, the entire inorganic substrate 21D is the low resistance portion 211. This can reduce the electrical resistance of the passive component 1D.

[0109] When the inorganic substrate 21D contains, for example, Si as a semiconductor material, the low resistance portion 211 is Si doped with P or B, and when the inorganic substrate 21D contains, for example, GaAs as a semiconductor material, the low resistance portion 211 is GaAs doped with Si, Sn, S, Se, Te, Be, Zn, or Ge.

[0110] "Low resistance" means that the electrical resistivity is 10 -1 This means that the electrical resistance of the low resistance portion 211 is sufficiently low, and most of the current can be passed through the low resistance portion 211. For example, when the inorganic substrate 21D is a Si substrate, the electrical resistivity of the Si substrate is 10 3 If the electrical resistivity of the low resistance portion 211 is 1 / 1000 or less of the electrical resistivity of the portions of the inorganic substrate 21D other than the low resistance portion 211, most of the current can be passed through the low resistance portion 211. -1 The electrical resistivity of the low resistance portion 211 is set to Ω·cm or less. The electrical resistivity of the low resistance portion 211 can be calculated, for example, as follows. First, a measuring probe is brought into contact with both ends of the low resistance portion 211 to measure the DC electrical resistance by a four-terminal method. Next, the electrical resistivity can be measured by multiplying the measured electrical resistance by the cross-sectional area of ​​the low resistance portion 211, for example, the cross-sectional area of ​​Si doped with phosphorus or boron, and dividing the result by the length to both ends of the low resistance portion 211. The doped cross-sectional area can be calculated by exposing a cross-section that crosses the low resistance portion 211 and performing element mapping by energy dispersive X-ray analysis (EDX). Specifically, the doped cross-sectional area can be determined as the area of ​​a region up to 30% of the peak value of the doping amount in element mapping.

[0111] The low resistance portion 211 can be obtained by doping the inorganic substrate 21D with impurities to form a high-concentration impurity region (in other words, a doped layer). That is, the low resistance portion 211 contains the semiconductor material contained in the inorganic substrate 21D, has a lower electrical resistance than a semiconductor made of the semiconductor material, and is integrated with the inorganic substrate 21D. When the inorganic substrate 21D is a Si substrate, the low resistance portion 211 has a low electrical resistance of 1×10 20 / cm 3 It is preferable to dope the low resistance portion 211 with a group III or V impurity of about 10 -3 Ω cm, and 5×10 for group III boron doping. -3 It is about Ω·cm.

[0112] In the inorganic substrate 21D, the first end face 21e1 and the second end face 21e2 are vertical faces extending in a direction perpendicular to the top face 21a. As in the second embodiment, the line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 are larger than that of the top face 21a. The line roughness of the bottom face 21b is larger than that of the top face 21a. The thickness of the inorganic substrate 21D can be adjusted by grinding the bottom face 21b. In FIG. 10, the surface irregularities of the first end face 21e1, the surface irregularities of the second end face 21e2, and the surface irregularities of the bottom face 21b are drawn large for ease of understanding.

[0113] In the third embodiment, the low resistance portion is the first capacitor electrode of the capacitor element, but may be a routing wiring that connects the inductor element and the capacitor element arranged in parallel on the inorganic substrate. If the inductor element includes multiple inductor wirings, the low resistance portion may be one inductor wiring. In the third embodiment, the low resistance portion is provided over the entire inorganic substrate, but may be provided over a part of the inorganic substrate.

[0114] <Fourth embodiment> Fig. 11 is a cross-sectional view showing an embodiment of a package component. As shown in Fig. 11, the package component 6 has a mounting substrate 8, a passive component 1 arranged on the mounting substrate 8, an electronic component 7 arranged on the mounting substrate 8, and a sealing member 9 provided on the mounting substrate 8 and covering the passive component 1 and the electronic component 7.

[0115] The passive component 1 is the passive component described in the first embodiment, but may be the passive component described in the second embodiment, the first modified example, the second modified example, or the third embodiment. The sealing member 9 contacts the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21 of the passive component 1.

[0116] The mounting substrate 8 is made of, for example, Si or SiO 2 The mounting substrate 8 is an inorganic substrate (so-called silicon interposer substrate or glass interposer substrate) made of FR4 (Flame Retardant Type 4), epoxy, polyimide, etc. (so-called organic package substrate). Wiring is provided inside or on the main surface of the mounting substrate 8, and is electrically connected to the passive components 1 and the electronic components 7. The main surface of the mounting substrate 8 may be provided with conductive members such as external terminals, conductive bumps, conductive pillars, and solder.

[0117] The passive component 1 and the electronic component 7 are connected to the main surface of the mounting board 8 via the solder 15. That is, the first external terminal 41 and the second external terminal 42 of the passive component 1 are connected to the mounting board 8 via the solder 15. The electronic component 7 is, for example, another passive component, an integrated circuit component, a sensor component, or the like. The electronic component 7 may be omitted. The sealing member 9 is, for example, a molded resin. The molded resin is, for example, made of a thermosetting epoxy resin.

[0118] According to the above configuration, the passive component 1 is covered with the sealing member 9, thereby improving reliability. Also, the sealing member 9 contacts the first end face 21e1 and the second end face 21e2, which have large line roughness, so that the adhesion between the sealing member 9 and the passive component 1 is improved.

[0119] The present disclosure is not limited to the above-mentioned embodiments, and design changes are possible within the scope of the present disclosure. For example, the features of the first to fourth embodiments may be combined in various ways. In the above-mentioned embodiments, the inductor element has a single-layer planar spiral inductor wiring, but may have a multi-layer planar spiral inductor wiring. In the above-mentioned embodiments, the passive element section includes at least one of an inductor element and a capacitor element, but may include any one or more selected from the group consisting of an inductor element, a capacitor element, and a resistor.

[0120] <First Example> Next, an example in which the line roughness of the passive component 1 of the first embodiment was measured will be described.

[0121] The passive component 1 was polished to expose a cross section in a plane that passes through the center of the passive component 1 in the Y direction, which is the width direction, and is perpendicular to the top surface 21a, as shown in Fig. 2, and an image of the measurement point was obtained. In this example, images were obtained at magnifications of 350x and 1000x using a microscope or SEM (Scanning Electron Microscope). The measurement magnification may be any magnification that can accommodate most of the measurement point.

[0122] The acquired image was loaded into measurement software (WinROOF2018). Specifically, when measuring the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21, most of the measurement points in the acquired image (80% or more of the total length of each end face) were designated as the measurement area.

[0123] Then, the line roughness (LER) was measured according to the SEMI standard. WinRoof2018 detected the edge of the line, calculated an approximate straight line, and determined the deviation between the approximate straight line and the actual edge as the roughness. The top surface 21a and bottom surface 21b of the inorganic substrate 21 and the first end surface 5e1 and second end surface 5e2 of the main body 10 were also measured in the same manner. In this embodiment, the line roughness refers to an average value.

[0124] Table 1 shows the measured values ​​of line roughness for the first end face 21e1, the second end face 21e2, the top face 21a, and the bottom face 21b of the inorganic substrate 21, and the first end face 5e1 and the second end face 5e2 of the main body portion 10. "Range" refers to the width between the maximum and minimum values ​​of the line roughness. "σ" refers to the variation in the line roughness.

[0125] [Table 1] TIFF0007679822000001.tif77165

[0126] As shown in Table 1, the line roughness of the first end face and the second end face of the inorganic substrate is greater than that of the top face of the inorganic substrate. The line roughness of the first end face and the second end face of the main body is less than that of the first end face and the second end face of the inorganic substrate. The line roughness of the top face of the inorganic substrate is 0.5 μm or less, and the line roughness of the first end face and the second end face of the inorganic substrate is 0.2 μm or more and 10 μm or less. The line roughness of the top face of the inorganic substrate is less than that of the bottom face of the inorganic substrate.

[0127] <Second Example> Next, an example in which the line roughness of the passive component 1A of the second embodiment was measured will be described.

[0128] The passive component 1 was polished to expose a cross section in a plane that passes through the center of the passive component 1 in the Y direction, which is the width direction, and is perpendicular to the top surface 21a, as shown in Fig. 6, and an image of the measurement point was obtained. The line roughness of the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21 was measured in the same manner as in the first embodiment.

[0129] Table 2 shows the measured values ​​of the line roughness of the first end face 21e1 and the second end face 21e2 of the inorganic substrate 21. "Range" refers to the width between the maximum and minimum values ​​of the line roughness. "σ" refers to the variation in the line roughness.

[0130] [Table 2] TIFF0007679822000002.tif34163

[0131] As shown in Table 2, the line roughness of the first end face of the inorganic substrate is different from that of the second end face of the inorganic substrate. The line roughness of the second end face is larger than that of the first end face. The difference between the line roughness of the first end face 21e1 and the line roughness of the second end face 21e2 is about 5 times.

[0132] The present disclosure includes the following aspects. <1> an inorganic substrate having a first main surface and a second main surface opposed to each other and including a semiconductor material; a passive element portion provided on the first main surface of the inorganic substrate so as to be in contact with the first main surface; Equipped with When a cross section in a plane that passes through the center of gravity of the entire first main surface and is perpendicular to the first main surface is defined as a first cross section, In the first cross section, A passive component, wherein the inorganic substrate has a first side surface and a second side surface connected to the first main surface and facing each other, and the line roughness of the first side surface and the line roughness of the second side surface are each greater than the line roughness of the first main surface. <2> In the first cross section, the line roughness of the second main surface is smaller than the line roughness of the first side surface and the line roughness of the second side surface. <1> 2. A passive component according to claim 1 . <3> the passive element section includes a capacitor element and an inductor element, the capacitor element is provided on the first main surface of the inorganic substrate, and the inductor element is provided on the capacitor element. <1> or <2> 13. A passive component according to any one of the preceding claims. <4> In the first cross section, the passive element portion has a third main surface in contact with the first main surface, and a third side surface and a fourth side surface connected to the third main surface and facing each other, the line roughness of the third side surface and the line roughness of the fourth side surface are smaller than the line roughness of the first side surface and the line roughness of the second side surface, respectively; <1> from <3> 13. A passive component according to any one of the preceding claims. <5> the passive element portion includes an inductor element and has a body portion made of an organic resin; The body portion has the third side and the fourth side. <4> 2. A passive component according to claim 1 . <6> The line roughness of the first side surface and the line roughness of the second side surface are different. <1> from <5> 13. A passive component according to any one of the preceding claims. <7> the second side surface has a sloped surface in a portion thereof that is sloped with respect to a direction perpendicular to the first main surface and that is connected to the second main surface; <1> from <6> 13. A passive component according to any one of the preceding claims. <8> The second side further has a vertical surface extending in a direction perpendicular to the first main surface and connected to the first main surface, and the inclined surface is connected between the vertical surface and the second main surface. <7> 2. A passive component according to claim 1 . <9> The inclined surface is formed so as to be inclined in a direction approaching the first side surface as it goes from the first main surface to the second main surface. <7> or <8> 2. A passive component according to claim 1 . <10> the passive element portion includes at least a portion of a capacitor element, At least a portion of the capacitor element has a capacitor electrode extending in a direction parallel to the first main surface, and a dielectric film disposed between the capacitor electrode and the inorganic substrate and containing at least one element of the inorganic substrate. <1> from <9> 13. A passive component according to any one of the preceding claims. <11> the inorganic substrate has a low resistance portion having a lower electrical resistance than a semiconductor made of the semiconductor material, the low resistance portion being electrically connected to the passive element portion; <1> from <10> 13. A passive component according to any one of the preceding claims. <12> the passive element portion has a body portion made of an organic resin, the main body portion has a third main surface in contact with the first main surface and a fourth main surface opposite to the third main surface, the fourth main surface has a line roughness smaller than the line roughness of the first side surface and the line roughness of the second side surface; <1> from <11> 13. A passive component according to any one of the preceding claims. <13> The line roughness of the first main surface is 0.5 μm or less, The line roughness of the first side surface and the line roughness of the second side surface are each 0.2 μm or more and 10 μm or less. <1> from <12> 13. A passive component according to any one of the preceding claims. <14> The line roughness of the first main surface is greater than the line roughness of the second main surface. <1> from <13> 13. A passive component according to any one of the preceding claims. <15> The line roughness of the first main surface is smaller than the line roughness of the second main surface. <1> from <13> 13. A passive component according to any one of the preceding claims. <16> the passive element portion has a body portion made of an organic resin, The thickness of the main body is smaller than the thickness of the inorganic substrate. <1> from <15> 13. A passive component according to any one of the preceding claims. <17> A mounting board; The mounting board is disposed <1> from <16> A passive component according to any one of the above items, a sealing member provided on the mounting substrate and covering the passive components; Equipped with The sealing member contacts the first side and the second side of the inorganic substrate of the passive component. [Explanation of symbols]

[0133] 1, 1A, 1B, 1C, 1D Passive Components 5, 5A, 5D Passive element section 5a Top surface (fourth main surface) 5b Bottom surface (third main surface) 5e1 1st end surface (3rd side) 5e2 2nd end face (4th side) 5s1 First side 5s2 2nd side 6 Package Parts 7. Electronic Components 8 Mounting board 9 Sealing member 10 Main body 10a Top 10b Bottom 10e1 1st end face 10e2 2nd end face 10s1 1st side 10s2 2nd side 21, 21A, 21B, 21C, 21D Inorganic substrate 21a Top surface (first main surface) 21b Bottom surface (2nd principal surface) 21e1 1st end surface (1st side surface) 21e11 Slope 21e12 Vertical plane 21e2 2nd end surface (2nd side surface) 21e21 Slope 21e22 Vertical plane 21s1 1st side 21s2 2nd side 211 Low resistance part 41, 42 1st, 2nd external terminal 51, 52 1st and 2nd lead wiring 60 Coating membrane 71, 72 First and second capacitor electrodes 73 Dielectric Film 110 Inductor wiring 110e1, 110e2 Outer edge, inner edge 121v~125v 1st~5th via wiring 151, 152 1st and 2nd columnar wiring C Capacitor element L inductor element AX axis S measurement surface K approximate straight line d Displacement

Claims

1. an inorganic substrate having a first main surface and a second main surface opposed to each other and including a semiconductor material; a passive element portion provided on the first main surface of the inorganic substrate so as to be in contact with the first main surface; Equipped with When a cross section in a plane that passes through the center of gravity of the entire first main surface and is perpendicular to the first main surface is defined as a first cross section, In the first cross section, the inorganic substrate has a first side surface and a second side surface connected to the first main surface and facing each other, the line roughness of the first side surface and the line roughness of the second side surface are each greater than the line roughness of the first main surface; A passive component, wherein the second side surface has, in part, an inclined surface that is inclined with respect to a direction perpendicular to the first main surface and is connected to the second main surface.

2. The passive component according to claim 1 , wherein in the first cross section, the line roughness of the second main surface is smaller than the line roughness of the first side surface and the line roughness of the second side surface.

3. the passive element section includes a capacitor element and an inductor element, The passive component according to claim 1 , wherein the capacitor element is provided on the first main surface of the inorganic substrate, and the inductor element is provided on the capacitor element.

4. In the first cross section, the passive element portion has a third main surface in contact with the first main surface, and a third side surface and a fourth side surface connected to the third main surface and facing each other, The passive component according to claim 1 or 2, wherein the line roughness of the third side surface and the line roughness of the fourth side surface are smaller than the line roughness of the first side surface and the line roughness of the second side surface, respectively.

5. the passive element portion includes an inductor element and has a body portion made of an organic resin; The passive component according to claim 4 , wherein the body portion has the third side and the fourth side.

6. The passive component according to claim 1 , wherein the line roughness of the first side surface is different from the line roughness of the second side surface.

7. 3. The passive component of claim 1, wherein the second side further has a vertical surface extending in a direction perpendicular to the first main surface and connecting to the first main surface, and the inclined surface is connected between the vertical surface and the second main surface.

8. The passive component according to claim 1 , wherein the inclined surface is formed so as to incline in a direction approaching the first side surface as it moves from the first main surface to the second main surface.

9. the passive element portion includes at least a portion of a capacitor element, 3. The passive component according to claim 1, wherein at least a portion of the capacitor element has a capacitor electrode extending in a direction parallel to the first main surface, and a dielectric film disposed between the capacitor electrode and the inorganic substrate and containing at least one element of the inorganic substrate.

10. 3. The passive component according to claim 1, wherein the inorganic substrate has a low resistance portion having a lower electrical resistance than a semiconductor made of the semiconductor material, the low resistance portion being electrically connected to the passive element portion.

11. the passive element portion has a body portion made of an organic resin, the main body portion has a third main surface in contact with the first main surface and a fourth main surface opposite to the third main surface, The passive component according to claim 1 , wherein the fourth main surface has a line roughness smaller than a line roughness of the first side surface and a line roughness of the second side surface.

12. The line roughness of the first main surface is 0.5 μm or less; 3. The passive component according to claim 1, wherein the line roughness of the first side surface and the line roughness of the second side surface are each 0.2 μm or more and 10 μm or less.

13. The passive component according to claim 1 , wherein the first main surface has a line roughness greater than a line roughness of the second main surface.

14. The passive component according to claim 1 , wherein the first main surface has a line roughness smaller than a line roughness of the second main surface.

15. the passive element portion has a body portion made of an organic resin, The passive component according to claim 1 , wherein the body portion has a thickness smaller than a thickness of the inorganic substrate.

16. A mounting board; The passive component according to claim 1 or 2, which is disposed on the mounting substrate; a sealing member provided on the mounting substrate and covering the passive components; Equipped with A package component, wherein the sealing member contacts the first side and the second side of the inorganic substrate of the passive component.

17. A mounting board; A passive component disposed on the mounting substrate; a sealing member provided on the mounting substrate and covering the passive components; Equipped with The passive components include an inorganic substrate having a first main surface and a second main surface opposed to each other and including a semiconductor material; a passive element portion provided on the first main surface of the inorganic substrate so as to be in contact with the first main surface; Equipped with When a cross section in a plane that passes through the center of gravity of the entire first main surface and is perpendicular to the first main surface is defined as a first cross section, In the first cross section, the inorganic substrate has a first side surface and a second side surface connected to the first main surface and facing each other, the line roughness of the first side surface and the line roughness of the second side surface are each greater than the line roughness of the first main surface; The sealing member is a molding resin and contacts the first side surface and the second side surface of the inorganic substrate of the passive component.

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