Microscope system, imaging method, and imaging device

Abstract

The present invention achieves high-speed and high-precision focus adjustment. This microscope system (1) comprises: an irradiation unit (18) that performs irradiation with line illumination parallel to a first direction; a stage (26) that supports a sample and can move in a second direction perpendicular to the first direction; a phase difference acquisition unit (60I) that acquires phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; an objective lens (22) that condenses the line illumination on the sample; a derivation unit (60E) that derives relative position information between the objective lens and the sample on the basis of the phase difference information; and a movement control unit (60F) that moves, on the basis of the relative position information, at least one among the objective lens and the stage in a third direction perpendicular to the first direction and the second direction.

Description

[Technical field]

[0001] The present disclosure relates to a microscope system, an imaging method, and an imaging device. [Background technology]

[0002] A technique is disclosed for obtaining an image of a specimen by irradiating the specimen with light and receiving the light emitted from the specimen. For example, a technique is disclosed for obtaining an image in which the focus of the specimen is adjusted by a contrast method in which the focus is changed so that the contrast ratio of the image of the specimen is maximized. Also, a technique is disclosed for adjusting the focus of the specimen by using a phase difference obtained from a subject image in which a set of feature points included in a pupil division image of the entire region including the specimen is extracted. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2014-123141 A [Patent Document 2] JP 2014-178474 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, it has been difficult to achieve high-speed and high-precision focus adjustment in the past.

[0005] Therefore, the present disclosure proposes a microscope system, an imaging method, and an imaging device that can realize high-speed and high-precision focus adjustment. [Means for solving the problem]

[0006] In order to solve the above problems, a microscope system of one embodiment according to the present disclosure includes an illumination unit that illuminates with line illumination parallel to a first direction, a stage that supports a specimen and is movable in a second direction perpendicular to the first direction, a phase difference acquisition unit that acquires phase difference information of an image of light emitted from the specimen when irradiated with the line illumination, an objective lens that focuses the line illumination on the specimen, a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information, and a movement control unit that moves at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic diagram illustrating an example of a microscope system according to an embodiment of the present disclosure. [Diagram 2] 1 is a schematic diagram illustrating an example of a plurality of two-dimensionally arranged light receiving sections included in a pupil division image capture section according to an embodiment of the present disclosure. FIG. [Diagram 3] FIG. 2 is a schematic diagram illustrating an example of a pupil division image according to an embodiment of the present disclosure. [Figure 4] 11 is a schematic diagram showing an example of a second captured image according to an embodiment of the present disclosure. FIG. [Diagram 5] FIG. 2 is a diagram illustrating an example of a functional configuration of a control device according to an embodiment of the present disclosure. [Figure 6A] FIG. 2 is an image diagram of a measurement target region according to an embodiment of the present disclosure. [Figure 6B] FIG. 2 is a schematic diagram illustrating an example of a pupil division image according to an embodiment of the present disclosure. [Figure 6C] FIG. 11 is an explanatory diagram of selection of a unit region according to an embodiment of the present disclosure. [Figure 7] FIG. 2 is an illustration of a center of gravity according to an embodiment of the present disclosure. [Figure 8] FIG. 2 is a schematic diagram illustrating an example of a pupil division image according to an embodiment of the present disclosure. [Figure 9] 11A to 11C are explanatory diagrams illustrating a change in light intensity due to a change in a pupil division image in the Z direction according to an embodiment of the present disclosure. [Figure 10] FIG. 4 is an explanatory diagram of a phase difference according to an embodiment of the present disclosure. [Figure 11] 1 is a flowchart illustrating an example of a flow of information processing according to an embodiment of the present disclosure. [Figure 12A] FIG. 13 is an explanatory diagram of a Z-stack image according to a modified example of the present disclosure. [Figure 12B] FIG. 1 is an explanatory diagram of a conventional Z-stack image. [Figure 13] 13 is a flowchart showing an example of the flow of a focus map creation process according to a modified example of the present disclosure. [Figure 14A] 13 is a schematic diagram of an exit surface of a line illumination of a light source according to a modified example of the present disclosure. FIG. [Figure 14B] 13 is a schematic diagram showing an example of a pupil division image according to a modified example of the present disclosure. FIG. [Figure 15] 13 is a diagram showing an example of an imaging mechanism using phase difference AF according to a modified example of the present disclosure. FIG. [Figure 16] FIG. 13 is an explanatory diagram for explaining the difference in focus between a non-tissue portion and a tissue portion. [Figure 17] FIG. 13 is a diagram illustrating an example of a functional configuration of a control device 16 according to a modified example of the present disclosure. [Figure 18] FIG. 13 is an explanatory diagram for explaining a process of providing an offset to a focus position in a non-tissue portion. [Figure 19] FIG. 13 is an explanatory diagram for explaining a process of adjusting the focus by preferentially selecting fluorescence from a tissue portion. [Figure 20] FIG. 13 is a diagram showing an example of a sensor region according to a modified example of the present disclosure. [Figure 21] FIG. 13 is a diagram illustrating an example of luminance information of a sensor region according to a modified example of the present disclosure. [Figure 22] FIG. 11 is an explanatory diagram for explaining the moving speed of the objective lens during phase-difference AF. [Figure 23] FIG. 13 is a schematic block diagram of a microscope system according to an eighth modified example of the present disclosure. [Figure 24] FIG. 1 is a diagram illustrating an example of an optical system in a microscope system according to the present disclosure. [Diagram 25]FIG. 1 is a hardware configuration diagram according to an embodiment and a modified example of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the following embodiments, the same components are denoted by the same reference numerals, and duplicated descriptions will be omitted.

[0009] FIG. 1 is a schematic diagram showing an example of a microscope system 1 according to the present embodiment.

[0010] The microscope system 1 is a system that irradiates a line illumination LA onto a specimen T and receives light emitted from the specimen T. The line illumination LA and the specimen T will be described in detail later.

[0011] The microscope system 1 includes an imaging device 12. The imaging device 12 is communicatively connected to a server device 10 via a wireless communication network or a wired communication network such as a network N. The server device 10 may be a computer.

[0012] In this embodiment, the direction along which the objective lens 22 and the specimen T, which will be described later, approach and move away from each other will be referred to as the Z-axis direction. The Z-axis direction will be described as coinciding with the thickness direction of the specimen T. The embodiment will be described on the assumption that the Z-axis direction and the optical axis A2 of the objective lens 22 are parallel. The stage 26, which will be described later, is a two-dimensional plane represented by two axes (X-axis direction and Y-axis direction) perpendicular to the Z-axis direction. A plane parallel to the two-dimensional plane of the stage 26 may be described as the XY plane. Details of each of these parts will be described later.

[0013] The imaging device 12 includes a measurement unit 14 and a control device 16. The measurement unit 14 and the control device 16 are connected to each other so as to be able to exchange data or signals.

[0014] The measurement unit 14 has an optical mechanism that measures light emitted from a specimen T contained in a measurement target area 24. The measurement unit 14 is applied to, for example, an optical microscope.

[0015] The measurement section 14 includes an irradiation section 18, a split mirror 20, an objective lens 22, a stage 26, a half mirror 28, an imaging optical unit 30, a phase difference detection optical unit 36, a first driving section 44, and a second driving section 46. The split mirror 20 is a half mirror or a dichroic mirror depending on the measurement method.

[0016] The illumination unit 18 emits line illumination LA and area illumination LB. The illumination unit 18 selectively emits illumination by switching between the line illumination LA and the area illumination LB.

[0017] The line illumination LA is light having a line shape that is long in a first direction. More specifically, the line illumination LA is light in which the length of the light flux in the first direction in a two-dimensional plane perpendicular to the optical axis is several times or more longer than the length in the direction perpendicular to the first direction. In this embodiment, a case will be described as an example in which the first direction, which is the longitudinal direction of the line illumination LA, coincides with the X-axis direction in FIG. 1. Details of the X-axis direction will be described later.

[0018] The area illumination LB is light that is irradiated during imaging of the specimen T, which will be described later. Specifically, the area illumination LB is light that is irradiated to a wider area in the Y-axis direction than the line illumination LA.

[0019] The illumination unit 18 includes a light source unit 18A and an imaging optical system 18D. The light source unit 18A includes a light source 18B and an illumination optical system 18C. The light source 18B is a light source that selectively switches between a line illumination LA and an area illumination LB to emit light. The switching between the line illumination LA and the area illumination LB is performed under the control of the control device 16.

[0020] For example, the light source 18B is configured to have a plurality of laser diodes two-dimensionally arranged along a two-dimensional plane consisting of the X-axis direction and the Y-axis direction perpendicular to the X-axis direction. For example, the light source 18B irradiates the line illumination LA by emitting light from each of the laser diodes arranged one-dimensionally along the X-axis direction. Also, for example, the light source 18B irradiates the area illumination LB by emitting light from each of the laser diodes arranged two-dimensionally along the X-axis direction and the Y-axis direction. Also, for example, the light source 18B may irradiate the line illumination LA to the specimen T by irradiating light through a long slit in the X-axis direction.

[0021] Here, in a magnifying device such as a microscope, when an image of the line illumination LA is formed at a point conjugate with the specimen T, it is reduced and projected by the reciprocal of the magnification. For example, if a 20x objective lens 22 and a 1x imaging lens are used, the magnification is 1 / 20x. For this reason, when illuminating the measurement target area 24 with a line illumination LA of, for example, 1mmx5um, a slit of 20mmx0.1mm long in the X-axis direction may be placed at a position conjugate with the specimen T in the optical path of the area illumination LB. Furthermore, when illumination with even higher brightness is required, a collimated light may be formed into a line-shaped light at a point conjugate with the specimen T using a cylinder lens or a Powell lens. For example, the line illumination LA can be formed by using a one-dimensional cylinder lens array. Furthermore, the light source 18B may be a mercury lamp or a halogen lamp having a broad spectral band, or a narrow-band laser light source.

[0022] The case where the line illumination LA is emitted from the light source 18B will be described as an example. The optical path of the line illumination LA is the same as that of the area illumination LB emitted from the light source 18B. The line illumination LA emitted from the light source 18B is converted into substantially parallel light by the illumination optical system 18C, and then reaches the split mirror 20 via the imaging optical system 18D.

[0023] The term "line shape" refers to the shape of the illumination light with which the specimen T is irradiated by the line illumination LA emitted from the light source 18B.

[0024] The light source 18B may be a light source 18B that selectively irradiates light in a wavelength region in which the specimen T emits fluorescence. Also, the irradiating unit 18 may be configured to be provided with a filter that selectively transmits light in the wavelength region. In this embodiment, a form in which the light source 18B irradiates line illumination LA and area illumination LB in a wavelength region in which the specimen T emits fluorescence will be described as an example. Also, in this embodiment, the line illumination LA and area illumination LB may be light in different wavelength regions within the wavelength region in which the specimen T emits fluorescence, or may be light in the same wavelength region.

[0025] The segmented mirror 20 reflects the line illumination LA and transmits light in a wavelength region other than that of the line illumination LA. In this embodiment, the segmented mirror 20 transmits light emitted from the specimen T. The line illumination LA is reflected by the segmented mirror 20 and reaches the objective lens 22.

[0026] The objective lens 22 also functions as a focus lens that focuses the line illumination LA on the specimen T.

[0027] The objective lens 22 is provided with a second driving unit 46. The second driving unit 46 moves the objective lens 22 in the Z-axis direction in a direction toward or away from the specimen T. By adjusting the distance between the objective lens 22 and the specimen T, the focus of the objective lens 22 is adjusted.

[0028] In addition, the first driving unit 44 moves the stage 26 at least in the Y-axis direction. With the movement of the stage 26, the specimen T placed on the stage 26 is moved in the Y-axis direction relative to the objective lens 22. The Y-axis direction and the X-axis direction are directions perpendicular to the Z-axis direction. The Y-axis direction and the X-axis direction are directions perpendicular to each other.

[0029] The specimen T is an example of a measurement target in the microscope system 1, and is placed in the measurement target area 24. That is, the specimen T can be an object for which an image is to be captured by the microscope system 1. In this embodiment, the specimen T will be described as an example of a form in which the specimen T emits fluorescence when irradiated with the line illumination LA. The specimen T may include a biological sample. Examples of biological samples include microorganisms, cells, liposomes, red blood cells in blood, white blood cells, platelets, vascular endothelial cells, minute cell fragments of epithelial tissue, and pathological tissue slices of various organs.

[0030] The specimen T may be, for example, a pair of glass members and a biological sample placed between the pair of glass members. Furthermore, the specimen T may be a biological sample placed on a glass member. The glass member is, for example, a slide glass. The glass member may be called a cover glass. The glass member may be any member on which a biological sample can be placed, and is not limited to a member made of glass. The glass member may be any member that transmits the line illumination LA, the area illumination LB, and the light emitted from the specimen T.

[0031] The specimen T may be, for example, a biological sample encapsulated in an encapsulant. The encapsulant may be a known material that transmits the line illumination LA, the area illumination LB, and the light emitted by the specimen T, which are incident on the measurement target region 24. The encapsulant may be either a liquid or a solid.

[0032] The biological sample that may be contained in the specimen T may have been subjected to a process such as staining or labeling. The process may be staining to show the morphology of the biological component or to show a substance (such as a surface antigen) contained in the biological component, and examples of the process include HE (Hematoxylin-Eosin) staining and immunohistochemistry staining. The biological sample may have been subjected to the process using one or more reagents, and the reagents may be a fluorescent dye, a color-developing reagent, a fluorescent protein, or a fluorescently labeled antibody.

[0033] The specimen T may be prepared from a specimen or tissue sample taken from a human body for the purpose of pathological diagnosis or clinical testing. The specimen T may be derived from an animal, a plant, or other material, not limited to a human body. The specimen T has different properties depending on the type of tissue (e.g., organ or cell) used, the type of disease to be treated, the subject's attributes (e.g., age, sex, blood type, or race), or the subject's lifestyle (e.g., diet, exercise, or smoking). The specimens may be managed by attaching identification information (e.g., barcode information or QR code (registered trademark) information) that can identify each specimen.

[0034] The light emitted from the specimen T may be, for example, fluorescence emitted from a fluorescent dye in a biological sample by irradiation with the line illumination LA. Furthermore, the light emitted from the specimen T may be, for example, light that emits light in a wavelength range other than fluorescence by irradiation with the line illumination LA, and specifically, light that scatters or reflects the illumination light. In the following, the fluorescence emitted by the specimen T by irradiation with the line illumination LA may be simply referred to as "light."

[0035] The light emitted from the specimen T by the irradiation of the line illumination LA passes through the objective lens 22 and the split mirror 20, and in this embodiment, a dichroic mirror, and reaches the half mirror 28. The light emitted from the specimen T is the fluorescence emitted by the specimen T by the irradiation of the line illumination LA or the area illumination LB. The fluorescence includes scattered fluorescent components.

[0036] The half mirror 28 distributes a portion of the light emitted from the specimen T to the imaging optical unit 30, and distributes the remainder to the phase difference detection optical unit 36. The distribution ratio of light by the half mirror 28 to the imaging optical unit 30 and the phase difference detection optical unit 36 ​​may be the same ratio (for example, 50%, 50%) or may be different ratios. For this reason, a dichroic mirror or a polarizing mirror may be used instead of the half mirror 28.

[0037] The light transmitted through the half mirror reaches the imaging optical unit 30. The light reflected by the half mirror reaches the phase difference detection optical unit .

[0038] It is assumed that there is an optically conjugate relationship between the line illumination LA produced by the irradiation section 18 and the measurement target area 24. Also, it is assumed that there are optically conjugate relationships between the line illumination LA, the measurement target area 24, the imaging section 34 of the imaging optical unit 30, and the pupil division image imaging section 42 of the phase difference detection optical unit 36.

[0039] The imaging optical unit 30 includes an imaging lens 32, a magnifying lens 35, and an imaging section 34. The light transmitted through the half mirror 28 is focused by the imaging lens 32 onto the magnifying lens 35, and is magnified by the magnifying lens 35 before reaching the imaging section 34. The imaging section 34 receives light emitted from the specimen T to obtain a captured image. That is, the imaging section 34 obtains a captured image in which the imaging area of ​​the specimen T is magnified to a predetermined magnification. The imaging section 34 outputs the captured image of the received light to the control device 16. The captured image is used for analyzing the type of specimen T, etc.

[0040] The imaging unit 34 includes a plurality of light receiving units 33. The light receiving units 33 are elements that convert received light into electric charges. The light receiving units 33 are, for example, photodiodes. For example, the imaging unit 34 has a configuration in which a plurality of light receiving units 33 are two-dimensionally arranged along the light receiving surface. For example, the imaging unit 34 has a configuration in which a plurality of light receiving units 33 are one-dimensionally arranged along the light receiving surface. In this embodiment, a description will be given assuming that the light receiving units 33 are two-dimensionally arranged along the light receiving surface. The light receiving surface of the light receiving units 33 is a two-dimensional plane that is orthogonal to the optical axis of the light incident on the imaging unit 34 via the imaging lens 32.

[0041] The imaging unit 34 includes one or more imaging elements, such as a CMOS (Complementary Metal-Oxide Semiconductor) or a CCD (Charge Coupled Device), each having a plurality of pixels arranged in a line in one or two dimensions. The imaging unit 34 may include an imaging element for acquiring a low-resolution image and an imaging element for acquiring a high-resolution image, or may include an imaging element for sensing for AF or the like and an imaging element for outputting an image for observation or the like. The imaging element may be a signal processing sensor including, in addition to the plurality of pixels, a signal processing unit (including one, two, or three of a CPU, a DSP, and a memory) that performs signal processing using pixel signals from each pixel, and an output control unit that controls the output of image data generated from the pixel signals and processed data generated by the signal processing unit. Furthermore, the imaging element may include an asynchronous event detection sensor that detects, as an event, that a luminance change of a pixel that photoelectrically converts incident light exceeds a predetermined threshold. The imaging element including the plurality of pixels, the signal processing unit, and the output control unit may be preferably configured as a one-chip semiconductor device.

[0042] On the other hand, the phase difference detection optical unit 36 ​​is an optical unit for obtaining a pupil division image of the light emitted from the specimen T irradiated with the line illumination LA. In this embodiment, a case will be described as an example in which the phase difference detection optical unit 36 ​​is an optical unit for obtaining an image in which the pupil is divided into two by using two separator lenses.

[0043] The phase difference detection optical unit 36 ​​has a field lens 38, an aperture mask 39, a separator lens 40 consisting of a separator lens 40A and a separator lens 40B, and a pupil division image capturing section 42. The separator lens 40 includes a separator lens 40A and a separator lens 40B.

[0044] Light emitted from the specimen T by irradiation with the line illumination LA reaches the aperture mask 39 via the field lens 38. The aperture mask 39 has a pair of openings 39A, 39B at positions that are symmetric with respect to the optical axis of the field lens 38. The sizes of the pair of openings 39A, 39B are adjusted so that the depth of field of the separator lenses 40A and 40B is wider than the depth of field of the objective lens 22.

[0045] Aperture mask 39 splits the light incident from field lens 38 into two light beams by a pair of openings 39A and 39B. Separator lens 40A and separator lens 40B respectively focus the light beams that have passed through openings 39A and 39B of aperture mask 39 onto pupil divided image capturing section 42. Therefore, pupil divided image capturing section 42 receives the two split light beams.

[0046] The phase difference detection optical unit 36 ​​may be configured without the aperture mask 39. In this case, the light that reaches the separator lens 40 via the field lens 38 is split into two light beams by the separator lens 40A and the separator lens 40B, and is collected into the pupil division image capturing section 42.

[0047] Fig. 2 is a schematic diagram showing an example of a plurality of two-dimensionally arranged light receiving sections 41 provided in the pupil divided image capturing section 42. The pupil divided image capturing section 42 includes a plurality of light receiving sections 41. The light receiving sections 41 are elements that convert received light into electric charges. The light receiving sections 41 are, for example, photodiodes. Fig. 2 shows an example of the pupil divided image capturing section 42 in which a plurality of light receiving sections 41 are two-dimensionally arranged along a light receiving surface 43 that receives light.

[0048] The light receiving surface 43 is a two-dimensional plane perpendicular to the optical axis of the light incident on the pupil division image capturing section 42 via the field lens 38, the aperture mask 39, and the separator lens 40. The pupil division image capturing section 42 includes one or more image capturing elements, such as a CMOS or a CCD, that have a plurality of pixels arranged in a line one-dimensionally or two-dimensionally. The pupil division image capturing section 42 may include an image capturing element for acquiring a low-resolution image and an image capturing element for acquiring a high-resolution image, or may include an image capturing element for sensing for AF or the like and an image output image capturing element for observation or the like. The image capturing element may be a signal processing sensor that includes, in addition to the plurality of pixels, a signal processing section (including one, two, or three of a CPU, a DSP, and a memory) that performs signal processing using pixel signals from each pixel, and an output control section that controls the output of image data generated from the pixel signals and processed data generated by the signal processing section. Furthermore, the image capturing element may include an asynchronous event detection sensor that detects, as an event, that a luminance change of a pixel that photoelectrically converts incident light exceeds a predetermined threshold. The imaging element including the plurality of pixels, the signal processing unit, and the output control unit can preferably be configured as a one-chip semiconductor device.

[0049] In the present embodiment, a case will be described as an example in which the pupil divided image capturing section 42 is configured to have a plurality of unit areas 37 arranged along the light receiving surface 43. Each of the plurality of types of unit areas 37 includes one or a plurality of light receiving sections 41. The plurality of types of unit areas 37 have different exposure setting values ​​for the included light receiving sections 41.

[0050] The exposure setting value can be controlled by at least one of gain and exposure time. Gain refers to at least one of analog-to-digital conversion gain and amplification gain. Exposure time refers to the charge accumulation time per output of a fluorescent signal when the pupil divided image capture section 42 is a charge accumulation type such as a CMOS or CCD.

[0051] That is, the unit areas 37 are areas in which at least one of the gain and the exposure time of the included light receiving sections 41 is different from one another. Note that the exposure setting values ​​of the multiple light receiving sections 41 included in one unit area 37 are the same value.

[0052] A predetermined light sensitivity may be set for each of the multiple light receiving sections 41 for each type of unit area 37 to which the light receiving section 41 belongs. For this reason, the light receiving section 41 may be a light receiving section 41 whose light sensitivity can be set to an arbitrary value.

[0053] FIG. 2 shows an example of a configuration in which the pupil divided image capturing section 42 has two types of unit areas 37, that is, unit areas 37A and unit areas 37B, arranged alternately. The unit areas 37A and 37B are unit areas 37 having different exposure setting values. For example, the light receiving section 41 included in the unit area 37A is set to a high light sensitivity in advance. The high exposure setting value can be set by changing at least one of the gain and the exposure time. The light receiving section 41 included in the unit area 37B is set to a low light sensitivity in advance. The low exposure setting value can be set by changing at least one of the gain and the exposure time. The gain and the exposure charge accumulation time may be set in advance.

[0054] The pupil divided image capturing section 42 may be configured to have an array of three or more types of unit areas 37 having different exposure setting values, and is not limited to two types of unit areas 37. Moreover, the pupil divided image capturing section 42 may have the same exposure setting values ​​for all of the included light receiving sections 41.

[0055] In the present embodiment, a configuration in which the pupil divided image capturing section 42 has two types of unit regions 37 arranged in a plurality along the light receiving surface 43 will be described as an example.

[0056] Returning to FIG. 1, the explanation will be continued. As described above, the pupil divided image capturing section 42 receives two light beams split by two pupils (separator lens 40A, separator lens 40B). By receiving the two light beams, the pupil divided image capturing section 42 can capture an image consisting of an image of a pair of light beams. Here, the pupil divided image capturing section 42 acquires the two split light beams as a pupil divided image. The pupil divided image may include a light intensity distribution corresponding to each of the two split light beams. This makes it possible to calculate a phase difference in a later derivation process in a derivation section, which will be described later.

[0057] 3 is a schematic diagram showing an example of a pupil divided image 70 acquired by the pupil divided image capturing section 42. The pupil divided image 70 includes a pair of pupil divided images 72, that is, an image 72A and an image 72B.

[0058] The pupil divided image 70 is an image corresponding to the position and brightness of light received by each of the multiple light receiving sections 41 provided in the pupil divided image capturing section 42, and includes a light intensity distribution. In the following description, the brightness of the light received by the light receiving sections 41 may be referred to as a light intensity value.

[0059] The following description will be given with reference to Figures 2 and 3. In this case, the pupil division image 70 is an image in which a light intensity value is defined for each pixel corresponding to each of a plurality of unit areas 37 having different exposure setting values. In this case, the light intensity value is expressed by the gradation of the pixel, but the relationship between the gradation and the light intensity differs for each unit area 37.

[0060] The images 72A and 72B included in the pupil divided image 70 are light receiving regions, and are regions with a higher light intensity value than other regions. As described above, the irradiation unit 18 irradiates the specimen T with the line illumination LA. Therefore, the light emitted from the specimen T irradiated with the line illumination LA becomes line-shaped light. Therefore, the images 72A and 72B constituting the pupil divided image 72 become line-shaped images that are long in a predetermined direction. This predetermined direction is a direction optically corresponding to the X-axis direction, which is the longitudinal direction of the line illumination LA.

[0061] In detail, the vertical axis direction (YA axis direction) of pupil divided image 70 shown in Fig. 3 optically corresponds to the Y axis direction in measurement target area 24 of pupil divided image 72 included in pupil divided image 70. Moreover, the horizontal axis direction (XA axis direction) of pupil divided image 70 shown in Fig. 3 optically corresponds to the X axis direction in measurement target area 24. As described above, the X axis direction is the longitudinal direction of line illumination LA.

[0062] The phase difference detection optical unit 36 ​​may be an optical unit for obtaining a change in the pupil divided image 72 (images 72A and 72B), and the pupil divided image 72 (images 72A and 72B) is not limited to a two-eye pupil divided image. The phase difference detection optical unit 36 ​​may be, for example, an optical unit for obtaining three or more pupil divided images by dividing the light emitted from the specimen T into three or more light beams and receiving the light.

[0063] Returning to FIG. 1, the description will be continued. In this embodiment, the measurement unit 14 drives the stage 26 on which the specimen T is placed by the first drive unit 44, and irradiates the specimen T with the line illumination LA while moving the measurement target area 24 in the Y-axis direction relative to the line illumination LA. That is, in this embodiment, the Y-axis direction is the scanning direction of the measurement target area 24. The scanning method of the line illumination LA is not limited. Examples of the scanning method include a method of scanning along a direction (Y-axis direction) perpendicular to the longitudinal direction (X-axis direction) of the line illumination LA, and a method of moving at least a part of the configuration of the measurement unit 14 other than the measurement target area 24 in the Y-axis direction relative to the measurement target area 24. In addition, a deflection mirror may be disposed between the split mirror 20 and the objective lens 22, and the line illumination LA may be scanned in the Y-axis direction by the deflection mirror.

[0064] An image of the specimen T is obtained by performing imaging by the imaging section 34 while scanning the measurement target region 24 in the Y-axis direction.

[0065] 4 is a schematic diagram showing an example of a second captured image 74 acquired by the imaging section 34. The second captured image 74 is an image captured by the imaging section 34 when the measurement target region 24 is irradiated with the line illumination LA. In other words, the second captured image 74 is an image obtained by the imaging section 34 capturing light emitted from the specimen T irradiated with the line illumination LA. The second captured image 74 includes a line-shaped subject image 75.

[0066] The subject image 75 included in the second captured image 74 is a light receiving region, and is a region having a higher light intensity value than other regions.

[0067] 4 optically corresponds to the Y-axis direction in the measurement target area 24. Moreover, the horizontal axis direction (XB-axis direction) of the second captured image 74 shown in FIG. 4 optically corresponds to the X-axis direction in the measurement target area 24. As described above, the X-axis direction is the longitudinal direction of the line illumination LA. Moreover, the depth direction (ZA-axis direction) of the second captured image 74 shown in FIG. 4 optically corresponds to the Z-axis direction, which is the thickness direction of the measurement target area 24.

[0068] The imaging unit 34 similarly obtains a captured image when the area illumination LB is irradiated onto the specimen T. In the following description, the captured image by the imaging unit 34 when the area illumination LB is irradiated onto the measurement target region 24 is referred to as a first captured image. When the first captured image and the second captured image 74 are collectively described, they are simply referred to as captured images.

[0069] The description will continue with reference back to Fig. 1. Next, the control device 16 will be described.

[0070] The control device 16 is an example of an information processing device. The control device 16 is connected to each of the light source 18B, the imaging unit 34, the phase difference detection optical unit 36, the first driving unit 44, and the second driving unit 46 so as to be able to exchange data or signals.

[0071] The control device 16 acquires a pupil division image 70 of light emitted from the specimen T illuminated by the line illumination LA from the pupil division image capturing unit 42, and performs focus adjustment based on the light intensity distribution of images 72A and 72B, which are pupil division images 72 contained in the pupil division image 70.

[0072] Fig. 5 is a diagram showing an example of the functional configuration of the control device 16. For the sake of explanation, Fig. 5 also shows a light source 18B, a pupil division image capturing section 42, an image capturing section 34, a first driving section 44, and a second driving section 46.

[0073] The control device 16 includes a control unit 60, a storage unit 62, and a communication unit 64. The control unit 60, the storage unit 62, and the communication unit 64 are connected to each other so as to be able to transmit and receive data or signals. The storage unit 62 is a storage medium that stores various data. The storage unit 62 is, for example, a hard disk drive or an external memory. The communication unit 64 communicates with an external device such as the server device 10 via a network N or the like.

[0074] The control unit 60 includes a light source control unit 60A, a captured image acquisition unit 60B, a reference focus unit 60C, a pupil division image acquisition unit 60D, a derivation unit 60E, and a movement control unit 60F. The derivation unit 60E includes a selection unit 60H, a phase difference acquisition unit 60I, and a relative distance derivation unit 60J.

[0075] Some or all of the light source control unit 60A, the image acquisition unit 60B, the reference focus unit 60C, the pupil division image acquisition unit 60D, the derivation unit 60E, the movement control unit 60F, the output control unit 60G, the selection unit 60H, the phase difference acquisition unit 60I, and the relative distance derivation unit 60J may be realized, for example, by having a processing device such as a CPU (Central Processing Unit) execute a program, that is, by software, or by hardware such as an IC (Integrated Circuit), or by a combination of software and hardware.

[0076] The light source control unit 60A controls the light source 18B to selectively emit the line light LA ​​or the area light LB. The line light LA ​​or the area light LB is selectively emitted from the light source 18B under the control of the light source control unit 60A.

[0077] The captured image acquiring section 60B acquires an image of light emitted from the specimen T irradiated with the line illumination LA or the area illumination LB from the imaging section 34. That is, the captured image acquiring section 60B acquires the second captured image 74 or the first captured image.

[0078] Here, the twin-lens phase contrast method is not a method for performing image evaluation such as maximum contrast ratio or minimum spot size, as in the contrast method or the working concentric circle method. Therefore, in the twin-lens phase contrast method, if the product of the refractive index and the distance, called the optical distance, is the same, it is determined that the focus amount is the same. For example, even if the physical distance is the same, the optical distance between the objective lens 22 and the specimen T is significantly different between a case where the specimen T is placed in a medium with a high refractive index and a case where the specimen T is exposed to the air surface. Therefore, the optical aberration and chromatic aberration are also different. In order to correct the difference, the reference focus is measured.

[0079] Assume that the thickness of the specimen T is several microns, such as a microscope slide, and the cover glass is several hundred microns. In this case, even if the optical distance between the objective lens 22 and the specimen T is the same, the physical distance to the best focus position for the specimen T will differ depending on the thickness of the cover glass that constitutes the measurement target area 24.

[0080] Therefore, the reference focus unit 60C adjusts the initial relative position between the objective lens 22 and the specimen T. As described above, the specimen T is included in the measurement target area 24, and the measurement target area 24 is placed on the stage 26. Therefore, by adjusting the relative position between the objective lens 22 and the stage 26, the relative position between the objective lens 22 and the specimen T is adjusted.

[0081] The relative position is the relative position of either the objective lens 22 or the specimen T with respect to the other. The relative position is determined, for example, by the distance between the objective lens 22 and the specimen T in the Z-axis direction. For example, the relative position is represented by the movement direction and movement amount of at least one of the objective lens 22 and the specimen T with respect to the current positions of the objective lens 22 and the specimen T, respectively.

[0082] The initial relative position means a relative position for pre-adjustment before obtaining a captured image for use in, for example, analysis of the specimen T by the microscope system 1. That is, the reference focus unit 60C executes a reference focus process for pre-adjustment.

[0083] The reference focus unit 60C calculates the contrast ratio of the light intensity values ​​between adjacent pixels included in the first captured image acquired by the captured image acquisition unit 60B, for example. That is, the reference focus unit 60C calculates the contrast ratio using the first captured image, which is an image of the light emitted from the specimen T irradiated with the area illumination LB. Then, the reference focus unit 60C adjusts the initial relative position to a position where the contrast ratio is maximized by repeating the control of the movement control unit 60F and the calculation of the contrast ratio. In practice, the reference focus may be determined by a method other than the contrast ratio. Although the method of determining the reference focus is not important, the case where the contrast method is used will be described here.

[0084] The movement control unit 60F controls the movement of the first drive unit 44 and the second drive unit 46. Under the control of the movement control unit 60F, at least one of the objective lens 22 and the stage 26 is driven to move the objective lens 22 and the specimen T in a direction toward or away from each other along the Z axis direction. That is, the relative positions of the objective lens 22 and the specimen T in the Z axis direction change. In addition, the movement control unit 60F moves the stage 26 in the Y axis direction, which is the scanning direction of the area illumination LB. As the stage 26 moves, the specimen T placed on the stage 26 moves in the Y axis direction, and the illumination area of ​​the line illumination LA is scanned in the scanning direction (Y axis direction) of the specimen T.

[0085] The reference focus unit 60C repeats the calculation of the contrast ratio using the first captured image every time the distance in the Z-axis direction between the objective lens 22 and the specimen T is changed by the movement control unit 60F. The reference focus unit 60C repeats the calculation of the contrast ratio while gradually decreasing the movement amount in the Z-axis direction of the objective lens 22 via the movement control unit 60F, thereby specifying the relative position where the contrast ratio is maximum within the imaging range of the imaging unit 34 as the initial relative position. Then, the reference focus unit 60C ends the control by the movement control unit 60F at the specified initial relative position. Through these processes, the reference focus unit 60C executes the reference focus process by the contrast method and adjusts the initial relative position.

[0086] The reference focus unit 60C adjusts the initial relative position using a contrast method, thereby enabling highly accurate initial focus adjustment to be performed on the specimen T in the measurement target area 24. However, depending on the condition of the specimen T and the purpose of observation, the reference focus may be determined using the design value of the pupil divided image 72 without detecting the reference focus.

[0087] From the viewpoint of shortening the processing time, the reference focus unit 60C may adjust the initial relative position by a contrast method using a second captured image 74 (see FIG. 4), which is an image of light emitted from the specimen T irradiated with the line illumination LA. In this case, since the light receiving area is narrower than when the first captured image is used, the adjustment time for the initial relative position can be shortened.

[0088] Furthermore, the reference focus section 60C may adjust the initial relative position by a contrast method using an image 72A or an image 72B included in a pupil division image 70 acquired by a pupil division image acquisition section 60D, which will be described later.

[0089] The reference focus unit 60C may adjust the initial relative position by using a group of multiple Z-stack images obtained by stacking the imaging area of ​​the measurement target area 24 in the Z-axis direction. In this case, for example, the reference focus unit 60C may adjust the initial relative position by using an algorithm described in Journal of Biomedical Optics 17(3), 036008 (March 2012) or a combination thereof.

[0090] Next, the pupil divided image acquisition section 60D will be described. The pupil divided image acquisition section 60D acquires a pupil divided image 70 of light emitted from the specimen T illuminated with the line illumination LA. The pupil divided image acquisition section 60D acquires the pupil divided image 70 from the pupil divided image capturing section 42, thereby acquiring images 72A and 72B that are pupil divided images 72 included in the pupil divided image 70.

[0091] The derivation unit 60E derives relative position information between the objective lens 22 and the specimen T based on the light intensity distributions of the images 72A and 72B. In other words, the derivation unit 60E derives relative position information of the relative position where the objective lens 22 is focused on the specimen T, that is, the relative position where the focus is adjusted to the specimen T, using the light intensity distributions of the images 72A and 72B.

[0092] 3, the pupil division image 70 includes a pair of images 72A and 72B. In this embodiment, the derivation unit 60E derives relative position information between the objective lens 22 and the specimen T based on the interval YL representing the phase difference between the images 72A and 72B.

[0093] 5, the description will continue. The derivation unit 60E will be described in detail. The derivation unit 60E includes a selection unit 60H, a phase difference acquisition unit 60I, and a relative distance derivation unit 60J.

[0094] As described above, the pupil divided image capturing section 42 of the present embodiment has a configuration in which a plurality of types of unit areas 37, each having different exposure setting values ​​of the included light receiving sections 41, are arranged along the light receiving surface 43. For this reason, it is preferable that the derivation section 60E derives relative position information based on the light intensity distribution of the pupil divided image 72 received by the light receiving sections 41 included in the unit area 37 of a specific exposure setting value.

[0095] Therefore, the selection unit 60H selects, from among the multiple types of unit regions 37, a unit region 37 that includes a light receiving section 41 to which a specific light sensitivity is set.

[0096] 6A is an image diagram of a measurement target area 24 including a specimen T. A linear illumination light LA ​​is irradiated onto the measurement target area 24. A description will be given assuming that the specimen T included in the measurement target area 24 is an object such as a cell that is labeled with a fluorescent dye that emits fluorescence when irradiated with the linear illumination LA. In this case, within the area irradiated with the linear illumination LA in the measurement target area 24, the intensity of light emitted from an area PB where the specimen T is present is higher than the intensity of light emitted from an area PA where the specimen T is not present.

[0097] Fig. 6B is a schematic diagram showing only one side of pupil divided image 70C. It is a schematic diagram showing an example. Pupil divided image 70C is an example of pupil divided image 70. Fig. 6B shows only the light intensity distribution of one side image 72A in pupil divided image 70C. The same applies to the light intensity distribution of image 72B.

[0098] In the pupil divided image 70C, the intensity value of light received by the light receiving unit 41 is lower in the area EA corresponding to the area PA where the specimen T is not present than in the area EB corresponding to the area PB where the specimen T is present. For this reason, it is preferable to process information about the area EA using the intensity value of light received by the light receiving unit 41 with a high exposure setting. Also, it is preferable to process information about the area EB using the intensity value of fluorescence received by the light receiving unit 41 with a low exposure setting.

[0099] Therefore, the selection unit 60H selects a unit area 37 including a light receiving unit 41 to which a specific light sensitivity is set, from among a plurality of types of unit areas 37 included in the pupil division image capturing unit 42. The selection unit 60H selects the unit area 37 using the pupil division image 70 acquired by the pupil division image acquiring unit 60D. In detail, the selection unit 60H selects a unit area 37 including a light receiving unit 41 having a light intensity value within a predetermined range. For example, assume that the light intensity value is expressed by a gradation value of 0 to 255. In this case, the selection unit 60H specifies an area in the pupil division image 70 where the gradation value, which is the light intensity value, is within a predetermined range. Then, the selection unit 60H selects a unit area 37 including a light receiving unit 41 corresponding to the specified area. For example, the selection unit 60H selects a unit area 37 including a light receiving unit 41 that outputs a light intensity value within a gradation value range of 10 to 250 as the predetermined range.

[0100] 6C is an explanatory diagram of the selection of unit area 37. Through the above selection process, for area EA in the pupil divided image 70 corresponding to area PA where the specimen T is not present, the selection unit 60H selects unit area 37A (unit areas 37A1, 37A2, 37A3, 37A4) in which high photosensitivity is set for the included light receiving unit 41. Also, for area EB in the pupil divided image 70 corresponding to area PB where the specimen T is present, the selection unit 60H selects unit area 37B (unit areas 37B4, 37B5) in which low photosensitivity is set for the included light receiving unit 41.

[0101] Then, the selection unit 60H outputs the pupil divided image 70 including the images 72A and 72B having a phase difference consisting of the light intensity values ​​of the light receiving units 41 included in the selected unit region 37 in the pupil divided image 70 acquired by the pupil divided image acquisition unit 60D to the phase difference acquisition unit 60I. Therefore, the selection unit 60H can output the pupil divided image 70 including the pupil divided image 72 having a phase difference in which saturation or signal deficiency is suppressed to the phase difference acquisition unit 60I. Note that the derivation unit 60E may be configured not to include the selection unit 60H.

[0102] Returning to Fig. 5, the description will continue. The phase difference acquisition unit 60I calculates an interval YL that represents the phase difference between a pair of images 72A and 72B that constitute the pupil divided image 72 included in the pupil divided image 70. In this embodiment, the phase difference acquisition unit 60I calculates the phase difference found from the interval YL between the images 72A and 72B included in the pupil divided image 70 received from the selection unit 60H.

[0103] In this embodiment, the phase difference acquisition section 60I calculates the distance between the center of gravity of the image 72A and the center of gravity of the image 72B as the distance YL between the images 72A and 72B.

[0104] The center of gravity refers to the center of gravity of the light intensity distribution of each of the images 72A and 72B.

[0105] FIG. 7 is an explanatory diagram of the center of gravity g. In FIG. 7, image 72A is shown as an example of image 72A and image 72B. The center of gravity g means the center of gravity of the light intensity distribution in the YA axis direction in image 72A, which has a long line shape in the XA axis direction. As described above, image 72A has a long line shape in the XA axis direction. Therefore, in pupil division image 70, center of gravity g is represented by a line along the XA axis direction, which is the extension direction of image 72A.

[0106] 8 is a schematic diagram showing an example of a pupil divided image 70B. The pupil divided image 70B is an example of the pupil divided image 70. The phase difference acquisition section 60I calculates the distance YL between the center of gravity ga which is the center of gravity g of the image 72A and the center of gravity gb which is the center of gravity g of the image 72B.

[0107] In detail, for example, the phase difference acquisition unit 60I calculates the interval YL using the following formulas (1) to (3).

[0108]

number

[0109]

number

[0110]

number

[0111] In formula (1), [Ytt, Ytb] means range R in the YA axis direction of the light intensity distribution of image 72A (see FIG. 7). In formulas (1) to (3), Ytt means upper end R1 in the YA axis direction of the light intensity distribution of image 72A (see FIG. 7). Ytb means lower end R2 in the YA axis direction of the light intensity distribution of image 72A (see FIG. 7). In formulas (1) to (3), W means pixel width of pupil divided image 70. The pixel width means the width of one pixel in the X axis direction or Y axis direction of the imaging range of pupil divided image 70 in measurement target region 24. In this embodiment, it is assumed that the width of one pixel in the X axis direction and the Y axis direction of the imaging range of pupil divided image 70 is the same.

[0112] In formulas (1) to (3), A black is the black level average pixel value of the area other than the light receiving areas of the images 72A and 72B in the pupil division image 70. dif is the noise level of the area in the pupil division image 70 other than the areas 72A and 72B.

[0113] The phase difference acquisition section 60I calculates the range R of the image 72A by using the above formula (1). Moreover, the phase difference acquisition section 60I calculates the range R of the image 72B in the same manner as for the image 72A.

[0114] Next, the phase difference acquisition unit 60I calculates the center of gravity g of the image 72A using equation (2). In equation (2), Ytc indicates the center of gravity ga of the image 72A. The phase difference acquisition unit 60I also calculates the center of gravity gb of the image 72B in the same manner as for the image 72A.

[0115] Then, the phase difference acquisition unit 60I calculates the distance YL between the center of gravity ga of the image 72A, which represents the phase difference, and the center of gravity gb of the image 72B, using equation (3). phaserepresents a phase difference, and indicates the distance YL between the center of gravity ga of the image 72A and the center of gravity gb of the image 72B. Ybc indicates the center of gravity gb of the image 72B. Ytc indicates the center of gravity ga of the image 72A.

[0116] The phase difference acquisition unit 60I outputs the calculated interval YL to the relative distance derivation unit 60J.

[0117] As described above, the images 72A and 72B constituting the pupil divided image 70 are images obtained when the line illumination LA is irradiated onto the specimen T. Therefore, the images 72A and 72B constituting the pupil divided image 70 are line-shaped images that are long in a predetermined direction. As described above, this predetermined direction is a direction that optically corresponds to the X-axis direction, which is the longitudinal direction of the line illumination LA.

[0118] The interval YL, which represents the phase difference between the pair of images 72A and 72B, may include positions of different intervals depending on the positions in the XA axis direction, which is the longitudinal direction of these images. Furthermore, the images 72A and 72B are not limited to being completely straight, and may be line-shaped images having a partially curved region. Furthermore, the width (thickness) of each of the line-shaped images 72A and 72B also differs depending on the focus deviation. The width of each of the images 72A and 72B means the length of each of the images 72A and 72B along the YA axis direction.

[0119] Therefore, as described above, it is preferable that the phase difference acquisition section 60I calculates the distance between the center of gravity ga of the image 72A in the XA-axis and YA-axis directions and the center of gravity gb of the image 72B in the XA-axis and YA-axis directions as the interval YL.

[0120] The phase difference acquisition unit 60I may calculate the interval YL by the following method.

[0121] For example, the phase difference acquisition unit 60I may adjust the brightness and contrast of the pupil division image 70 by adjusting the light intensity value of the pupil division image 70, and then calculate the center of gravity g of each of the images 72A and 72B and the interval YL in the same manner as described above.

[0122] The phase difference acquisition section 60I may calculate the center of gravity g of each of the images 72A and 72B and the interval YL in the same manner as described above.

[0123] For example, the phase difference acquisition section 60I identifies the position of the center of gravity g of the image 72A and the image 72B where the light intensity value is equal to or greater than a first threshold value and equal to or less than a second threshold value among the positions in the XA axis direction, which is a direction optically corresponding to the longitudinal direction of the line illumination LA. Then, the phase difference acquisition section 60I may calculate the interval between the center of gravity g of the image 72A at the identified position and the center of gravity g of the image 72B, which indicates the phase difference, as the interval YL.

[0124] The first threshold and the second threshold may be previously determined to be values ​​that are greater than the minimum value and less than the maximum value of the light intensity value that can be output by the light receiving unit 41. In addition, the second threshold must be a value greater than the first threshold.

[0125] Furthermore, for example, the phase difference acquisition section 60I may adjust the light intensity value of the pupil division image 70 by weighting, and then identify the centers of gravity g of the images 72A and 72B and calculate the interval YL.

[0126] In this case, the phase difference acquisition section 60I corrects the light intensity value, which is the gradation value of each pixel constituting the pupil division image 70, by weighting the light intensity value higher. Then, the phase difference acquisition section 60I calculates the center of gravity g for each position in the XA axis direction, which is a direction optically corresponding to the longitudinal direction of the line illumination LA, for the images 72A and 72B included in the corrected pupil division image 70. Then, the phase difference acquisition section 60I may calculate, as the interval YL, the distance between the centers of gravity g of the images 72A and 72B in the XA axis direction at positions where the light intensity value is equal to or greater than a fifth threshold. The fifth threshold may be determined in advance.

[0127] Also, for example, the phase difference acquisition unit 60I divides each of the images 72A and 72B into a plurality of divided regions along the XA axis direction, which is a direction optically corresponding to the longitudinal direction of the line illumination LA. Then, the phase difference acquisition unit 60I identifies the center of gravity g of each of the images 72A and 72B included in each divided region. Furthermore, the phase difference acquisition unit 60I identifies a position indicating an average value of the maximum light intensity value of each divided region for each of the images 72A and 72B. Then, the phase difference acquisition unit 60I may calculate the interval between the positions in the YA axis direction in the pupil divided image 70 as the interval YL.

[0128] Also, for example, the phase difference acquisition unit 60I fits the width direction in the YA axis direction of each of the images 72A and 72B to a quadratic function or Gaussian for each pixel in the XA axis direction. Then, the phase difference acquisition unit 60I may calculate the distance between the most frequent values ​​of the peaks of each of the images 72A and 72B, which corresponds to the phase difference after fitting, as the interval YL.

[0129] The calculation method of the interval YL by the phase difference acquisition unit 60I may use any of the above methods. For example, the phase difference acquisition unit 60I may specify a calculation method of the interval YL according to the type of the sample T to be measured. Then, the phase difference acquisition unit 60I may calculate the interval YL by the specified calculation method. The calculation method of the interval YL by the phase difference acquisition unit 60I is not limited to the above method. For example, the phase difference acquisition unit 60I may calculate the interval YL as the distance between the centers of the line widths of the images 72A and 72B created in an area having a light intensity value equal to or greater than a certain threshold value.

[0130] Returning to Fig. 5, the explanation will be continued. The relative distance derivation unit 60J calculates the relative position between the objective lens 22 and the specimen T by using the interval YL received from the phase difference acquisition unit 60I. In detail, the relative distance derivation unit 60J calculates, as the relative position, the amount and direction of relative movement according to the difference between the interval YL and a reference interval.

[0131] The reference interval is the interval YL between the images 72A and 72B when the objective lens 22 is focused on the specimen T. In this embodiment, the reference interval is the interval YL between the images 72A and 72B when the objective lens 22 and the specimen T on the stage 26 are adjusted to their initial relative positions by the reference focus unit 60C.

[0132] Here, the interval YL corresponding to the phase difference between the images 72A and 72B constituting the pupil division image 72 having a phase difference is proportional to the focal length between the objective lens 22 and the specimen T. Therefore, the relative distance derivation unit 60J can calculate the relative position by using the difference between the interval YL and the reference interval. As described above, the relative position is the relative position of one of the objective lens 22 and the specimen T with respect to the other. The relative position is represented by the movement direction and movement amount of at least one of the objective lens 22 and the specimen T with respect to the current positions of the objective lens 22 and the specimen T. The movement direction and movement amount are represented, for example, by the displacement amount ΔZ of the focus position of the objective lens 22 in the Z-axis direction.

[0133] The two-eye phase contrast method is a method for calculating a displacement amount ΔZ in the Z-axis direction relative to a reference position from a phase difference between images. That is, calculation of the relative position means calculation of the phase difference between images, and further calculation of the displacement amount ΔZ. In this embodiment, the relative distance derivation unit 60J calculates the displacement amount ΔZ to calculate the relative position displacement between the objective lens 22 and the specimen T.

[0134] The displacement amount ΔZ represents the amount and direction of relative movement between the objective lens 22 and the specimen T. That is, |ΔZ| which is the absolute value of the displacement amount ΔZ represents the amount of relative movement, and the positive or negative value of the displacement amount ΔZ represents the direction of relative movement.

[0135] Figure 9 shows an example of comparing 17 pupil division images 70 acquired by changing the distance between the objective lens and the specimen using line illumination, arranged in a rectangular shape. It can be seen that the line spacing is wider on the right than on the left. In this way, the amount of change in the image phase can be obtained from pupil division image 72 as the change in relative distance between image 72A and image 72B.

[0136] In the control unit 60 of this embodiment, before the derivation unit 60E derives the displacement amount ΔZ, the reference focus unit 60C adjusts the initial relative position. Then, the relative distance derivation unit 60J uses, as the reference distance YL', the interval between the images 72A and 72B when the objective lens 22 and the specimen T are in a state where they are adjusted to their initial relative positions by the reference focus unit 60C.

[0137] Fig. 10 is an explanatory diagram of a process for acquiring a phase difference. Fig. 10 shows the distance between the image 72A1 and the image 72B1 as a reference distance YL' when the focus is on the position 80A, which is the position of the specimen T, i.e., when the focus is adjusted. The image 72A1 and the image 72A2 are examples of the image 72A and the image 72B.

[0138] Then, assume that after the reference focus unit 60C adjusts the initial relative position, the imaging area of ​​the imaging unit 34 in the measurement target area 24 is changed by scanning the line illumination LA in the scanning direction (Y-axis direction). Then, the distance between the sample T and the objective lens 22 may change. Due to this change, the focus position is changed by a displacement amount ΔZ in the Z-axis direction. Due to this change in the displacement amount ΔZ, the interval YL between the images 72A and 72B becomes different from the reference interval YL'.

[0139] For example, when the position of the specimen T changes to a position 80B that is shifted by a displacement amount ΔZ in the Z-axis direction from the actual position 80A of the specimen T, the interval YL becomes an interval YL2 that is different from the reference interval YL'. The interval YL2 is an example of the interval YL, and is the interval between the image 72A2 and the image 72B2. The image 72A2 and the image 72B2 are examples of the image 72A and the image 72B, respectively.

[0140] Furthermore, when there is a specimen at position 80C that is shifted in the X-axis direction from position 80A, the interval YL1 is the same as the reference interval YL'. The interval YL1 is an example of the interval YL, and is the interval between the image 72A3 and the image 72B3. The image 72A3 and the image 72B3 are examples of the image 72A and the image 72B, respectively.

[0141] Therefore, the relative distance derivation unit 60J calculates the relative position between the objective lens 22 and the specimen T by back-calculating the displacement amount ΔZ from the difference ΔYL between the distance YL between images 72A and 72B that constitute the pupil division image 70 acquired by the pupil division image acquisition unit 60D and the reference distance YL'.

[0142] As described above, |ΔZ|, which is the absolute value of the displacement amount ΔZ, represents the relative movement amount, and the positive or negative value of the displacement amount ΔZ represents the relative movement direction. Therefore, the relative distance derivation unit 60J calculates the relative movement amount |ΔZ| and the positive or negative value of ΔZ, which is the relative movement direction, as a relative position according to the displacement amount ΔZ according to the difference ΔYL between the interval YL and the reference interval YL'.

[0143] The following equations (3) and (4) are paraxial calculation equations for FIG.

[0144]

number

[0145] In equations (3) and (4), Δyi represents the difference ΔYL between the interval YL and the reference interval YL'. m represents the imaging magnification of the image 72A1 and the image 72B1 when the specimen T is at the position 80A. m' represents the imaging magnification of the image 72A1 and the image 72B1 when the specimen T is at the position 80B. Si represents the distance in the Z direction from the image 72A1 to the separator lens 40A or from the image 72B1 to the separator lens 40B. So represents the distance in the Z direction from the position 80A of the specimen T to the separator lens 40A or 40B. ΔSo represents the change in the specimen T in the Z direction, and is equal to ΔZ in FIG. 10. Also, Δyi represents the difference ΔYL between the interval YL and the reference interval YL'. Yo is half the interval YL.

[0146] 10, it is assumed that the focus is on a position 80B that is shifted by a displacement amount ΔZ in the Z-axis direction from a position 80A of the specimen T. In this case, the distance between the separator lens 40 and the pupil divided image capturing section 42 does not change, but the magnification of the pupil divided image 72 having a phase difference formed on the pupil divided image capturing section 42 changes from m to m'. At this time, the positions of the images 72A and 72B, which are images of the specimen T formed on the pupil divided image capturing section 42, change to a position that is an interval YL2 obtained by adding ΔY to the reference interval YL' in accordance with the shift in focus.

[0147] The relative distance derivation unit 60J calculates the difference ΔYL between this interval YL2 and the reference interval YL', using the two-dimensional coordinates of the light receiving surface 43 of the pupil divided image capture unit 42. Then, the relative distance derivation unit 60J calculates the amount of displacement ΔZ of the focal point, using the difference ΔYL.

[0148] As shown in the above formulas (3) and (4), in a range where the displacement amount ΔZ is small, a proportional relationship of the displacement amount ΔZ ∝ the difference ΔYL is established. Therefore, the relative distance derivation unit 60J can obtain the displacement amount ΔZ from the difference ΔYL. Alternatively, there is a certain correlation between the displacement amount ΔZ and the difference ΔYL. Therefore, the relative distance derivation unit 60J may create in advance a function or a lookup table that represents the correlation between the displacement amount ΔZ and the difference ΔYL. In this case, the relative distance derivation unit 60J can calculate the displacement amount ΔZ by using the difference ΔYL between the interval YL2 and the reference interval YL' and the function or the lookup table.

[0149] The relative distance derivation unit 60J may calculate the displacement ΔZ using a reference interval YL′ stored in the storage unit 62 in advance, thereby calculating the relative position.

[0150] However, it is considered that the relationship between the optical distance and the physical distance is almost constant in the same measurement target region 24. For this reason, it is preferable to adjust the initial relative position by the reference focus unit 60C and derive the reference distance YL' before obtaining a captured image to be used for analysis of the specimen T with the microscope system 1.

[0151] Returning to FIG. 5, the description will be continued. The movement control unit 60F moves at least one of the objective lens 22 and the specimen T to the relative position derived by the lead-out unit 60E. The movement control unit 60F controls the movement of at least one of the first drive unit 44 and the second drive unit 46 so that at least one of the objective lens 22 and the stage 26 moves along the Z-axis direction. For example, the movement control unit 60F controls the movement of the first drive unit 44 so that the stage 26 moves in a relative movement direction according to the relative movement amount |ΔZ| represented by the displacement amount ΔZ derived as the relative position and the positive or negative value of the displacement amount ΔZ. Under the control of the movement control unit 60F, the objective lens 22 and the specimen T are moved in a direction approaching or separating from each other along the Z-axis direction. That is, the relative position of the objective lens 22 and the specimen T in the Z-axis direction is adjusted to the relative position derived by the lead-out unit 60E, and the focus is adjusted so that the specimen T is in focus.

[0152] The captured image acquiring section 60B acquires a captured image of the light emitted from the specimen T from the imaging section 34 in synchronization with the movement control performed by the movement control section 60F.

[0153] The output control unit 60G outputs the captured image acquired by the captured image acquisition unit 60B to an external device such as the server device 10 via the communication unit 64. The output control unit 60G may store the captured image acquired by the captured image acquisition unit 60B in the storage unit 62. The output control unit 60G may also output the captured image to a display connected to the control unit 60.

[0154] The output control unit 60G may analyze the captured image acquired by the captured image acquisition unit 60B using a known method to analyze the type of the specimen T, and output the analysis result to the server device 10, etc.

[0155] Next, an example of the flow of information processing executed by the control device 16 of this embodiment will be described.

[0156] 11 is a flowchart showing an example of the flow of information processing executed by the control device 16. It is assumed that the measurement target area 24 including the specimen T is placed on the stage 26 before the control device 16 executes the following information processing. The measurement target area 24 may be placed on the stage 26 manually or automatically using a loader, a manipulator, or the like.

[0157] The light source control unit 60A controls the light source 18B to turn off the line light LA ​​and turn on the area light LB (step S100). By the control in step S100, the line light LA ​​is emitted from the light source 18B.

[0158] The captured image acquiring section 60B acquires, from the imaging section 34, a first captured image of the light emitted from the specimen T illuminated with the area illumination LB (step S102).

[0159] The reference focus unit 60C executes a reference focus process using the first captured image acquired in step S102 (step S104). In step S104, the reference focus unit 60C calculates the contrast ratio of the first captured image acquired in step S102. The reference focus unit 60C repeats the movement of the objective lens 22 in the Z-axis direction under the control of the movement control unit 60F and the calculation of the contrast ratio of the first captured image acquired from the imaging unit 34. Through this repeated process, the reference focus unit 60C adjusts the initial relative position between the objective lens 22 and the specimen T to a position where the contrast ratio is maximized.

[0160] Next, the light source control unit 60A controls the light source 18B to turn off the area light LB (step S106). Then, the light source control unit 60A controls the light source 18B to turn on the line light LA ​​(step S108). By the control in step S108, the line light LA ​​is emitted from the light source 18B.

[0161] The pupil divided image acquiring section 60D acquires the pupil divided image 70 from the pupil divided image capturing section 42, thereby acquiring a pupil divided image 72 which is an image of light emitted from the specimen T irradiated with the line illumination LA (step S110).

[0162] Next, the selection unit 60H selects a unit area 37 including a light receiving unit 41 set to a specific light sensitivity from among the multiple types of unit areas 37 (step S112). The selection unit 60H selects a unit area 37 including a light receiving unit 41 that outputs a light intensity value within a predetermined range of gradation values ​​(for example, a range of gradation values ​​from 10 to 250) in the pupil divided image 70 acquired in step S110. Then, the selection unit 60H outputs the pupil divided image 70 including an image 72A and an image 72B consisting of the light intensity values ​​of the light receiving unit 41 included in the selected unit area 37 in the pupil divided image 70 acquired in step S110 to the phase difference acquisition unit 60I.

[0163] Next, the phase difference acquisition unit 60I identifies the center of gravity g of each of the pair of images 72A and 72B that constitute the pupil divided image 72 received from the selection unit 60H (step S114). Then, the phase difference acquisition unit 60I calculates the interval between the identified centers of gravity g as a reference interval YL' between the images 72A and 72B (step S116).

[0164] Through the processes in steps S100 to S116, the reference focus process is performed and the reference interval YL' is calculated.

[0165] Next, movement control unit 60F controls the movement of first drive unit 44 so that the irradiation position of line illumination LA becomes the initial position in the scanning direction (Y-axis direction) of measurement target area 24 (step S118).

[0166] Next, the pupil divided image acquisition unit 60D acquires the pupil divided image 70 from the pupil divided image capturing unit 42, thereby acquiring the pupil divided image 72, which is the image 72A and the image 72B of light emitted from the specimen T irradiated with the line illumination LA (step S120).

[0167] Next, the selection unit 60H selects a unit area 37 including a light receiving unit 41 set to a specific light sensitivity from among the multiple types of unit areas 37 in the same manner as in step S112 (step S122). The selection unit 60H outputs the pupil divided image 70 including the images 72A and 72B consisting of the light intensity values ​​of the light receiving units 41 included in the selected unit area 37 in the pupil divided image 70 acquired in step S120 to the phase difference acquisition unit 60I.

[0168] The phase difference acquisition unit 60I identifies the center of gravity g of each of a pair of images 72A and 72B constituting the pupil divided image 72 included in the pupil divided image 70 received from the selection unit 60H in step S122 (step S124). Then, the phase difference acquisition unit 60I calculates the interval between the identified centers of gravity g as the interval YL between the images 72A and 72B (step S126).

[0169] Next, the relative distance derivation unit 60J calculates the difference ΔYL between the interval YL calculated in step S126 and the reference interval YL' calculated in step S116 (step S128).

[0170] Next, the relative distance derivation unit 60J calculates the displacement amount ΔZ from the difference ΔYL calculated in step S128, thereby calculating relative position information indicating the relative position between the objective lens 22 and the specimen T (step S130).

[0171] The movement control unit 60F controls the movement of at least one of the first drive unit 44 and the second drive unit 46, thereby moving at least one of the objective lens 22 and the stage 26 in the Z-axis direction (step S132). In detail, the movement control unit 60F moves at least one of the objective lens 22 and the specimen T in a relative movement direction according to the relative movement amount |ΔZ| represented by the displacement amount ΔZ derived as the relative position in step S130 and the positive / negative value of the displacement amount ΔZ. For example, the movement control unit 60F controls the movement of at least one of the first drive unit 44 and the second drive unit 46 so that at least one of the objective lens 22 and the stage 26 moves along the Z-axis direction. Specifically, for example, the movement control unit 60F controls the movement of the first drive unit 44 so that the stage 26 moves in a relative movement direction according to the relative movement amount |ΔZ| represented by the displacement amount ΔZ derived as the relative position and the positive / negative value of the displacement amount ΔZ.

[0172] By the control of step S132, the objective lens 22 and the specimen T are moved toward or away from each other along the Z-axis direction. That is, the relative positions of the objective lens 22 and the specimen T in the Z-axis direction are adjusted to the relative positions calculated in step S130, and the focus is adjusted so that the specimen T is in focus.

[0173] Next, the captured image acquisition section 60B acquires a second captured image 74 of the light emitted from the specimen T from the imaging section 34 (step S134). The second captured image 74 acquired in step S134 is an image captured at a certain position in the scanning direction (Y-axis direction) of the measurement target region 24.

[0174] The control unit 60 determines whether or not to end the acquisition of the second captured image 74 (step S136). The control unit 60 makes the determination in step S136 by determining whether or not the line illumination LA has scanned from one end to the other end in the scanning direction of the measurement target area 24. If the determination in step S136 is negative (step S136: No), the process proceeds to step S138.

[0175] In step S138, the movement control unit 60F controls the movement of the first driving unit 44 so as to move the stage 26 in the scanning direction (Y-axis direction) by the width of the line illumination LA (step S138). By the process of step S138, the irradiation position of the line illumination LA in the scanning direction (Y-axis direction) of the measurement target area 24 is moved in the scanning direction by the width of the line illumination LA. Then, the process returns to step S120.

[0176] Note that in step S136, the control unit 60 may make the determination in step S136 by determining whether or not the line illumination LA has scanned from one end to the other end of the measurement target area 24 in the scanning direction and has scanned from one end side to the other end side in the X-axis direction in the measurement target area 24. In this case, in step S138, the movement control unit 60F may shift the irradiation position of the line illumination LA in the X-axis direction every time scanning of the measurement target area 24 from one end to the other end in the scanning direction with the line illumination LA is completed, and then return to the above step S120.

[0177] Furthermore, irradiation of the line illumination LA may be turned off during the movement of the stage 26 in the process of step S138. Then, when the movement of the stage 26 stops, the line illumination LA may be turned on again, and the process may return to step S120 and execute the process.

[0178] On the other hand, if the answer is YES in step S136 (step S136: Yes), the process proceeds to step S140. In step S140, the output control unit 60G stores the second captured image 74 from one end to the other end of the measurement target area 24 in the scanning direction in the storage unit 62 as an captured image of the specimen T included in the measurement target area 24 (step S140). Then, this routine ends.

[0179] As described above, the microscope system 1 of this embodiment includes the irradiation unit 18, the stage 26, the pupil division image acquisition unit 60D, the objective lens 22, the derivation unit 60E, and the movement control unit 60F. The irradiation unit 18 irradiates the specimen T with a line illumination LA parallel to the first direction. The stage 26 supports the specimen T and is movable in a second direction perpendicular to the first direction. The pupil division image acquisition unit 60D acquires a phase difference of an image of light emitted from the specimen T by being irradiated with the line illumination LA. The objective lens 22 focuses the line illumination LA on the specimen T. The derivation unit 60E derives relative position information between the objective lens 22 and the specimen T based on the phase difference (for example, information on increase / decrease of the phase difference, etc.). The movement control unit 60F moves at least one of the objective lens 22 and the stage 26 in a third direction perpendicular to each of the first direction and the second direction based on the relative position information.

[0180] Here, as a conventional technique, a technique for adjusting the focus on the specimen T by a contrast method in which the focus is changed so that the contrast ratio of a captured image of the entire region including the specimen T is maximized is disclosed.

[0181] However, the contrast method is a so-called hill-climbing method that involves repeated control and acquisition of captured images accompanied by physical movements such as moving the objective lens 22, as well as acquisition and comparison of multiple captured images before and after the focus position. Therefore, in the conventional technology, focus adjustment can take a long time.

[0182] Also, as a conventional technique, a technique for adjusting the focus on the specimen T using a set of subject images included in a pupil-split image of the entire area including the specimen T has been disclosed. However, in the conventional technique, each of the set of subject images was a subject image of the entire area including the specimen T. For this reason, in the conventional technique, it was necessary to further identify several feature points from inside the specimen T in the subject image, and adjust the focus using these identified areas. Therefore, in the conventional technique, in order to extract several feature points from the pupil-split two-dimensional image of the specimen T, additional time for the extraction may be required for focus adjustment.

[0183] Also, as a conventional technique, a configuration in which image sensors for focusing are arranged before and after the focus position has been disclosed. In this conventional technique, focus adjustment is performed by analyzing captured images obtained by these multiple image sensors. When using this method, it is considered that high-speed focus adjustment is possible, but it is necessary to align the positions of two independent image sensors with high accuracy, and it is difficult to achieve high-accuracy focus adjustment.

[0184] On the other hand, the microscope system 1 of this embodiment irradiates the specimen T with the line illumination LA and acquires the phase difference of the image of the light emitted from the specimen T irradiated with the line illumination LA. Then, the microscope system 1 derives relative position information between the objective lens 22 and the specimen T based on the light intensity information of the images 72A and 72B, and moves at least one of the objective lens 22 and the stage 26 in the third direction.

[0185] In this manner, in the microscope system 1 of the present embodiment, the relative position information between the objective lens 22 and the stage 26 is derived based on the light intensity distribution of the pupil divided image 72 obtained by irradiation with the line illumination LA. Therefore, the relative position information represented by the displacement amount ΔZ can be derived without searching for the focus position, and therefore the focus adjustment to the specimen T can be performed at high speed.

[0186] Moreover, in the microscope system 1 of this embodiment, the specimen T is irradiated with a line illumination LA, and focus adjustment is performed using a pupil division image 72 of light emitted from the specimen T irradiated with the line illumination LA. Therefore, in the microscope system 1 of this embodiment, focus adjustment can be performed without identifying multiple feature points in the specimen T included in the pupil division image 72. Therefore, in the microscope system 1 of this embodiment, focus adjustment can be performed at high speed regardless of the size of the specimen T or the number of tissues in the specimen T. Furthermore, in the microscope system 1 of this embodiment, it is only necessary to process an amount of data that is one order of magnitude smaller than when focus adjustment is performed using the pupil division image 72 of light emitted from the specimen T irradiated with the area illumination LB, and focus adjustment to the specimen T can be performed at high speed.

[0187] Therefore, the microscope system 1 of this embodiment can achieve high-speed and high-precision focus adjustment.

[0188] Furthermore, the microscope system 1 of this embodiment performs focus adjustment using a divided pupil image 72 of light emitted from the specimen T illuminated with the line illumination LA. Therefore, in addition to the above effects, the microscope system 1 of this embodiment can achieve robust and stable focus adjustment with a simple configuration.

[0189] Furthermore, in the microscope system 1 of this embodiment, a line illumination LA is used as illumination for irradiating the specimen T when acquiring the pupil divided image 72. Therefore, compared to a case where a line-shaped illumination is not used, it is possible to shorten the time for irradiating the specimen T with light. Therefore, in addition to the above effects, the microscope system 1 of this embodiment can suppress fading of the specimen T.

[0190] In the present embodiment, the line illumination LA is irradiated onto the specimen T when the pupil divided image 72 is acquired, and the line illumination LA is also irradiated onto the specimen T when the second captured image 74 is acquired. However, the area illumination LB may be irradiated onto the specimen T when the second captured image 74 is acquired. In this case, for example, light in a wavelength region different from that of the line illumination LA may be used as the area illumination LB. Then, a filter that selectively reflects the light emitted from the specimen T by the irradiation of the line illumination LA to the phase difference detection optical unit 36 ​​and transmits the light emitted from the specimen T by the irradiation of the area illumination LB to the imaging optical unit 30 may be provided on the half mirror 28.

[0191] Furthermore, the optical axis of the imaging section 34 and the optical axis of the pupil divided image imaging section 42 may or may not coincide with each other. However, it is preferable to adjust the arrangement of the imaging section 34 and the pupil divided image imaging section 42 so that the incidence of light on the pupil divided image imaging section 42 precedes the incidence of light on the imaging section 34 with respect to the scanning direction (Y-axis direction) of the line illumination LA.

[0192] In addition, in the present embodiment, the phase difference detection optical unit 36 ​​has been described as an example of an optical unit for obtaining two-eye pupil division images. However, the phase difference detection optical unit 36 ​​may be an optical unit for obtaining the phase difference of the pupil division images 72, and may be an optical unit for obtaining three or more pupil division images 72 as described above. The phase difference detection optical unit 36 ​​may be an off-axis optical system offset from the optical axis. The off-axis optical system is an optical system using one or more off-axis lenses. In this case, the control unit 60 may derive the relative position information by calculating the difference ΔYL from the optical system using the off-axis lens.

[0193] (Variation 1) In the above embodiment, the microscope system 1 acquires the second captured image 74 every time at least one of the objective lens 22 and the specimen T is moved to a relative position represented by the displacement amount ΔZ derived by the derivation unit 60E. That is, in the above embodiment, the microscope system 1 acquires the second captured image 74 every time the focus of the specimen T is adjusted at each position in the scanning direction of the measurement target region 24.

[0194] However, the microscope system 1 may acquire a Z-stack image as the second captured image 74 at each position in the measurement target area 24 in the scanning direction.

[0195] In this case, the control unit 60 may execute the following process each time at least one of the objective lens 22 and the specimen T is moved to a relative position represented by the displacement amount ΔZ derived by the derivation unit 60E.

[0196] For example, the Z-axis positions of the objective lens 22 and the specimen T positioned at the relative positions derived by the derivation unit 60E are set to the position of the displacement amount ΔZ “0”. Also, assume that nine Z-stack images are acquired at intervals of 0.5 μm in the range of ±2 μm in the Z-axis direction for the specimen T. In this case, the control unit 60 may execute the following control.

[0197] Specifically, it is assumed that the value of the difference ΔYL at which the displacement amount ΔZ is 0.5 μm is the difference ΔYL0. The movement control unit 60F moves the objective lens 22 stepwise in the Z-axis direction so that the difference ΔYL becomes each of the following: ΔYL=4ΔYL0, 3ΔYL0, 2ΔYL0, 1ΔYL0, 0, -ΔYL0, -2ΔYL0, -3ΔYL0, -4ΔYL0

[0198] The captured image acquiring section 60B acquires the second captured image 74 every time the objective lens 22 moves once in the Z-axis direction, thereby acquiring nine Z-stack images.

[0199] Through these processes, the control unit 60 can acquire nine Z stack images as the second captured image 74 every time at least one of the objective lens 22 and the specimen T is moved to a relative position represented by the displacement amount ΔZ derived by the derivation unit 60E. Note that the number of Z stack images is not limited to nine.

[0200] 12A and 12B are explanatory diagrams of Z-stack images obtained by processing in this modified example and a conventional Z-stack image, respectively.

[0201] As shown in Fig. 12B, in the conventional technology, a Z-stack image 76' is acquired parallel to the two-dimensional plane of the stage 26. On the other hand, in this modified example, as shown in Fig. 12A, even if the specimen T is placed on the stage 26 at an angle with respect to the two-dimensional plane, it is possible to acquire Z-stack images 76 at each position that is displaced by a displacement amount ΔZ from the surface of the specimen T, the bottom surface of the specimen T, the surface between the surface and the bottom surface, and the like.

[0202] (Variation 2) In the above embodiment, the microscope system 1 has been described as an example of performing real-time focusing, in which focus adjustment is performed based on the distance YL between images 72A and 72B that constitute the pupil division image 72 contained in the pupil division image 70 each time the pupil division image 70 is acquired.

[0203] However, the microscope system 1 may create a focus map for adjusting the focus at each position of the specimen T, and adjust the focus at each position of the specimen T according to the focus map. Also, the microscope system 1 may be used to acquire a three-dimensional surface structure of the specimen T including the Z-axis direction, instead of the focus map.

[0204] When acquiring a focus map, the control unit 60 may execute the following process. The process is also the same when acquiring a three-dimensional surface structure.

[0205] As in the above embodiment, the phase difference acquisition section 60I calculates the interval YL between a pair of images 72A and 72B that constitute the pupil divided image 72. At this time, the phase difference acquisition section 60I calculates the interval YL for each position in the extension direction (X-axis direction) between the pair of images 72A and 72B that constitute the pupil divided image 72. To calculate the interval YL, it is sufficient to calculate the interval YL between the center of gravity ga of the image 72A and the center of gravity gb of the image 72B for each position in the X-axis direction.

[0206] Then, the relative distance derivation unit 60J calculates the displacement amount ΔZ for each position in the X-axis direction using the interval YL received from the phase difference acquisition unit 60I, thereby calculating the relative position between the objective lens 22 and the specimen T.

[0207] The phase difference acquisition unit 60I and the relative distance derivation unit 60J repeatedly execute the above-mentioned process every time the irradiation position of the line illumination LA in the measurement target area 24 is changed in the scanning direction (Y-axis direction) or the X-axis direction. Through these processes, the derivation unit 60E can calculate the displacement amount ΔZ at each position along a two-dimensional plane defined by the two axes of the X-axis direction and the Y-axis direction of the measurement target area 24.

[0208] Then, the derivation unit 60E may register in the focus map the position coordinates of each position on a two-dimensional plane defined by two axes in the X-axis direction and the Y-axis direction of the measurement target region 24 and the calculated displacement amount ΔZ in association with each other. Note that the derivation unit 60E may register in the focus map at least one of the displacement amount ΔZ or the relative position represented by the displacement amount ΔZ.

[0209] When the imaging unit 34 acquires the second captured image 74, the derivation unit 60E specifies, from the focus map, a displacement amount ΔZ corresponding to the position of the imaging region of the second captured image 74 in the measurement target region 24. Then, the control unit 60 adjusts the relative position between the objective lens 22 and the specimen T to the relative position represented by the specified displacement amount ΔZ, and acquires the second captured image 74.

[0210] FIG. 13 is a flowchart showing an example of the flow of a focus map creation process.

[0211] First, the reference focus unit 60C executes a reference interval YL' calculation process (step S200). The process of step S200 is similar to steps S100 to S116 described with reference to FIG.

[0212] Next, the movement control unit 60F controls the movement of the first driving unit 44 so that the irradiation position of the line illumination LA becomes the initial position in the scanning direction (Y-axis direction) of the measurement target area 24 (step S202).

[0213] Next, the pupil divided image acquiring section 60D acquires the pupil divided image 70 from the pupil divided image capturing section 42, thereby acquiring the images 72A and 72B of the light emitted from the specimen T irradiated with the line illumination LA (step S204).

[0214] Next, the selection unit 60H selects a unit area 37 including a light receiving unit 41 to which a specific light sensitivity is set from among the multiple types of unit areas 37 in the same manner as in step S112 (step S206). The selection unit 60H outputs the pupil divided image 70 including the images 72A and 72B consisting of the light intensity values ​​of the light receiving units 41 included in the selected unit area 37 in the pupil divided image 70 acquired in step S204 to the phase difference acquisition unit 60I.

[0215] The phase difference acquisition unit 60I identifies the center of gravity g of each of the pair of images 72A and 72B included in the pupil divided image 70 received from the selection unit 60H in step S206 (step S208). At this time, the phase difference acquisition unit 60I identifies the center of gravity g of each position in the X-axis direction of each of the images 72A and 72B.

[0216] Then, the phase difference acquisition section 60I calculates the interval between the centers of gravity g of the images 72A and 72B at each position in the X-axis direction as the interval YL between the positions (step S210).

[0217] Next, the relative distance derivation unit 60J calculates the difference ΔYL between the interval YL calculated in step S210 and the reference interval YL′ calculated in step S200 for each position in the X-axis direction between the image 72A and the image 72B (step S212).

[0218] Next, the relative distance derivation unit 60J inversely calculates the displacement amount ΔZ from the difference ΔYL calculated in step S212. Through this process, the relative distance derivation unit 60J calculates the displacement amount ΔZ for each position in the X-axis direction at the current irradiation position of the line illumination LA in the scanning direction (Y-axis direction), and calculates the relative position between the objective lens 22 and the specimen T for each position (step S214).

[0219] Then, the relative distance deriving unit 60J registers in the focus map the displacement amount ΔZ and the relative position calculated in step S214 in association with the position coordinates of each corresponding position in the measurement target area 24. Through this process, the relative distance deriving unit 60J updates the focus map (step S216).

[0220] The control unit 60 determines whether or not to end the focus map update process (step S218). For example, the control unit 60 performs the determination in step S218 by determining whether or not the line illumination LA has scanned from one end to the other end in the scanning direction of the measurement target area 24. If the determination in step S218 is negative (step S218: No), the process proceeds to step S220.

[0221] In step S220, the movement control unit 60F controls the movement of the first driving unit 44 so as to move the stage 26 in the scanning direction (Y-axis direction) by the width of the line illumination LA (step S220). By the process of step S220, the irradiation position of the line illumination LA in the scanning direction (Y-axis direction) of the measurement target area 24 is moved in the scanning direction by the width of the line illumination LA. Then, the process returns to step S204.

[0222] Note that in step S218, the control unit 60 may make the judgment in step S218 by determining whether or not the line illumination LA has scanned from one end to the other end of the measurement target area 24 in the scanning direction and has scanned from one end side to the other end side in the X-axis direction in the measurement target area 24. In this case, in step S220, when the scanning of the line illumination LA from one end to the other end of the measurement target area 24 in the scanning direction is completed, the movement control unit 60F may shift the irradiation position of the line illumination LA in the X-axis direction and then return to step S204.

[0223] If an affirmative decision is made in step S218 (step S218: Yes), this routine ends. A focus map for the specimen T is created by the processes in steps S200 to S218.

[0224] As described above, the microscope system 1 may create a focus map in advance and perform focus adjustment at each position of the specimen T according to the focus map.

[0225] As described above, the light intensity distributions of the images 72A and 72B of light emitted from the specimen T irradiated with the line illumination LA are used to create the focus map.

[0226] Therefore, the microscope system 1 of this modified example can create a focus map quickly and with high accuracy, similarly to the above embodiment.

[0227] (Variation 3) In the above embodiment, a form has been described in which a line illumination LA of one wavelength is irradiated, and relative position information is derived based on the light intensity distribution of the images 72A and 72B of light emitted from the specimen T irradiated with the line illumination LA.

[0228] However, the microscope system 1 may derive relative position information for each of the multiple line illuminations LA.

[0229] In this case, the light source unit 18A of the irradiation unit 18 may be configured to emit line illumination LA, which is a plurality of line illuminations LA having different wavelengths, parallel to the first direction (X-axis direction), and different axes. The light source control unit 60A controls the light source unit 18A, so that the light source unit 18A emits the plurality of line illuminations LA.

[0230] 14A is a schematic diagram of an emission surface of the line illumination LA of the light source 18B. For example, the light source 18B includes a light source 18B-R, a light source 18B-Y, a light source 18B-G, and a light source 18B-B. The light source 18B-R, the light source 18B-Y, the light source 18B-G, and the light source 18B-B emit line illumination LA that is long in the X-axis direction and has at least some wavelength regions that do not overlap with each other. The light source 18B-R, the light source 18B-Y, the light source 18B-G, and the light source 18B-B are arranged in parallel at different positions in the Y-axis direction.

[0231] The light source 18B-R emits line illumination LA in a wavelength range that excites the specimen T labeled with a fluorescent dye that emits red fluorescence, for example. The light source 18B-Y emits line illumination LA in a wavelength range that excites the specimen T labeled with a fluorescent dye that emits yellow fluorescence, for example. The light source 18B-G emits line illumination LA in a wavelength range that excites the specimen T labeled with a fluorescent dye that emits green fluorescence, for example. The light source 18B-B emits line illumination LA in a wavelength range that excites the specimen T labeled with a fluorescent dye that emits blue fluorescence, for example.

[0232] 14B is a schematic diagram showing an example of a pupil divided image 70F. The pupil divided image 70F is an example of the pupil divided image 70. The pupil divided image 70 is a pupil divided image 70F of light emitted from the subject T by irradiating the subject T with line illumination LA from each of the light sources 18B-R, 18B-Y, 18B-G, and 18B-B.

[0233] As shown in FIG. 14B, the pupil divided image 70F includes an image 72A and an image 72B corresponding to each of the multiple line illuminations LA.

[0234] In detail, pupil divided image 70F includes image 72A-R and image 72B-R. Image 72A-R and image 72B-R are a pair of images corresponding to line illumination LA emitted from light source 18B-R. Pupil divided image 70F also includes image 72A-Y and image 72B-Y. Image 72A-Y and image 72B-Y are a pair of images corresponding to line illumination LA emitted from light source 18B-Y.

[0235] Furthermore, pupil divided image 70F includes images 72A-G and 72B-G. Images 72A-G and 72B-G are a pair of images corresponding to line illumination LA irradiated from light source 18B-G. Furthermore, pupil divided image 70F includes images 72A-B and 72B-B. Images 72A-B and 72B-B are a pair of images corresponding to line illumination LA irradiated from light source 18B-B.

[0236] The derivation unit 60E may derive relative position information corresponding to each of the plurality of line illuminations LA in the same manner as in the above embodiment based on the light intensity distribution of each of the pupil divided images 72 (images 72A-R and 72B-R', images 72A-Y and 72B-Y, images 72A-G and 72B-G, and images 72A-B and 72B-B) which are images having a plurality of types of phase differences corresponding to each of the plurality of line illuminations LA. The movement control unit 60F may perform focusing for each of the plurality of line illuminations LA in the same manner as in the above embodiment.

[0237] In this way, the microscope system 1 may derive relative position information for each of the multiple line illuminations LA. In this case, in addition to the effects of the above-described embodiment, the microscope system 1 can perform more accurate focus adjustment according to the type of specimen T.

[0238] The light source 18B may selectively emit the line illumination LA from each of the light source 18B-R, the light source 18B-Y, the light source 18B-G, and the light source 18B-B. In this case, the control unit 60 may derive relative position information from the pupil divided image 72 every time the line illumination LA having at least a part of a non-overlapping wavelength region is emitted from the light source 18B.

[0239] (Variation 4) In the above embodiment, in order to prevent the pixel values ​​of the pixels included in the area in which the tissue area in the pupil divided image 72 is imaged from saturating and / or noise becoming dominant in the area in which the non-tissue area is imaged due to the difference in fluorescence intensity between the area in which cellular tissue is present (hereinafter also referred to as the tissue area) and the area in which cellular tissue is not present (hereinafter also referred to as the non-tissue area or the seal area) in the imaging range when imaging the specimen T, the sensor area (see FIG. 2) of the pupil divided image imaging section 42 is divided into multiple types of unit areas 37A and 37B with different exposure setting values, and the phase difference is calculated from the distance YL between the centers of gravity g of the images 72A and 72B imaged in the unit area 37A having an exposure setting value set to a high light sensitivity for the non-tissue area, and the phase difference is calculated from the distance YL between the centers of gravity g of the images 72A and 72B imaged in the unit area 37B having an exposure setting value set to a low light sensitivity for the tissue area.

[0240] However, when multiple line lights (e.g., line lights LA and LB) that are irradiated simultaneously share one objective lens 22 as in the above embodiment, if the heights of the tissue portion of the specimen T where cellular tissue is present and the non-tissue portion where no cellular tissue is present (e.g., a sealing portion where a sealant is provided) are different, when focusing on the non-tissue portion, the tissue portion will not be in focus, and, for example, a part of the captured image of the specimen T may become blurred.

[0241] Therefore, in variant example 4, an example is given to explain a case in which it is possible to obtain a focused image (hereinafter also referred to as a tissue image or fluorescent image) of the specimen T even when the heights of the non-tissue and tissue areas are different.

[0242] Usually, in imaging of tissue cells, a reference interval YL' between the image 72A and the image 72B is determined in the tissue portion, and the position of the objective lens 22 in the height direction (Z direction) is adjusted based on this determined reference interval YL'. Therefore, for example, when the heights of the tissue portion and the non-tissue portion are different, the interval YL between the image 72A and the image 72B may be different in the non-tissue portion even if they are in the same location. In that case, when the tissue portion and the non-tissue portion are in the same field of view, a focused tissue image can be obtained in the tissue portion by controlling the objective lens 22 based on the reference interval YL', but an unfocused tissue image may be obtained in the non-tissue portion by controlling the objective lens 22 based on the reference interval YL'. This is because, for example, the height of the focus position of the non-tissue portion may differ from the height of the focus position of the tissue portion. For example, the height of the focus position of the non-tissue portion may be higher or lower than the height of the focus position of the tissue portion.

[0243] 15 is a diagram showing an example of an imaging mechanism using phase difference AF according to Modification 4. In this description, the configuration and basic operation of the microscope system 1 may be similar to those of the above-described embodiment or the modifications thereof.

[0244] 15(a), in Modification 4, for example, four types of line illuminations LA1 to LA4 are simultaneously used to generate an image of the specimen T. The line illuminations LA1 to LA4 may be, for example, laser beams of 638 nm, 532 nm, 488 nm, and 405 nm. Furthermore, the line-shaped spots formed by the line illuminations LA1 to LA4 may be, for example, parallel to each other and arranged in a direction perpendicular to the longitudinal direction of each spot.

[0245] In acquiring the captured image, the stage 26 is moved in a predetermined direction (for example, the direction of arrangement of spots formed by each of the line illuminations LA1 to LA4) relative to the objective lens 22, and the sample T in the measurement target area 24 placed on the stage 26 is sequentially scanned by each of the line illuminations LA1 to LA4. As a result, a captured image of the sample T is acquired by the imaging unit 34 (see FIG. 1).

[0246] FIG. 15(b) is a schematic diagram of the stage 26 and the objective lens 22 as viewed from the X-axis direction. In FIG. 15(b), the images of the line illuminations LA1 to LA4 focused on the focus plane SR1 are shown as dots, but in reality, they may be line-shaped images extending in the depth direction (x-axis direction) perpendicular to the paper surface. The position PT1 on the focus plane SR1 indicates the position where the line illumination LA1 located at the front in the Y direction is focused, and the position PT2 indicates the position where the line illumination LA4 located at the rear end in the Y direction is focused. In the case of reciprocating scanning, the scanning direction may be alternately switched between the Y direction and the -Y direction. When the scanning direction is the Y direction, the line illumination LA1 is positioned at the front in the scanning direction, and when the scanning direction is the -Y direction, the line illumination LA1 is positioned at the rear end in the scanning direction.

[0247] In Fig. 15, since all of the line illuminations LA1 to LA4 illuminate the specimen via a common objective lens 22, it is difficult to adjust the focus for each of the line illuminations LA1 to LA4. However, since the line illuminations LA1 to LA4 are arranged closely to fit within one field of view of the objective lens 22, even if the position of the objective lens 22 is determined so that one of the line illuminations LA1 to LA4 is in focus, it is considered that the focus of the other line illuminations will not be significantly shifted. Therefore, in Modification 4, a case where the focus is adjusted using the line illumination LA4 is illustrated. However, the focus is not limited to the line illumination LA4, and one of the other line illuminations LA1 to LA3 may be used.

[0248] Here, in general, scanning of the specimen T starts from the sealed portion (i.e., non-tissue portion) outside the tissue portion of the specimen T. Therefore, when the objective lens 22 is focused using the line illumination LA4, which is located at the rear end when the scanning direction is the Y direction, the line illuminations LA1 to LA3, which are located at the front side of the line illumination LA1, maintain a state in which they are focused on the non-tissue portion until the line illumination LA4 focuses on the tissue portion, even though they start scanning the tissue portion before the line illumination LA4. As a result, a problem may occur in which the image of the tissue portion in the region adjacent to the non-tissue portion (hereinafter also referred to as the boundary region) in the captured image obtained in response to the irradiation of each of the line illuminations LA1 to LA3 (hereinafter also referred to as the captured image captured by the line illuminations LA1 to LA3) becomes blurred.

[0249] FIG. 16 is an explanatory diagram for explaining the difference in focus between a non-tissue portion and a tissue portion, and is a diagram for explaining blurring occurring in the boundary region of an image captured by another line illuminator (in this example, the line illuminator LA2) when focusing is performed using the line illuminator LA4 located at the rear end. FIG. 16(a) shows an image captured by the line illuminator LA4. FIG. 16(b) shows an image captured by the line illuminator LA2. FIG. 16(c) shows an enlarged image of the dotted line portion including the boundary region of the image captured by the line illuminator LA2. In addition, in FIG. 16, position PT3 indicates the position where the imaging of the line illuminator LA4 switches from the non-tissue portion HB1 to the tissue portion SB1. Since the line illuminator LA2 starts imaging the tissue portion SB1 before the line illuminator LA4, the position where the imaging of the non-tissue portion HB1 switches to the tissue portion SB1 in FIG. 16(b) is to the left of position PT3.

[0250] 16(b) and (c), in the tissue portion SB1 in the range from position PT4 to position PT5 (boundary region) before the imaging of the line illumination LA4 is switched to the tissue portion SB1, the image captured by the line illumination LA2 is out of focus and blurred. Then, in the tissue portion SB1 from position PT5 onward after the imaging of the line illumination LA4 is switched to the tissue portion SB1, the image captured by the line illumination LA2 is in focus. In this way, there are cases where the images of the boundary region of the tissue portion SB1 captured by the line illuminations LA1 to LA3 on the front side of the line illumination LA4 are out of focus.

[0251] Therefore, in this modification, when the line illumination used for focusing is scanning a non-tissue area (hereinafter also referred to as when focusing is performed on a non-tissue area), a position where an offset is added to the position where the focus is actually achieved is set as the target focus position. In this case, the target focus position may be, for example, a position at the same height as the tissue area. This makes it possible to adjust the focus position of objective lens 22 to the height of the tissue area even when focusing is performed on a non-tissue area, thereby making it possible to prevent images of the boundary regions of the tissue areas in the captured images captured by each of the line illuminations LA1 to LA4 from becoming blurred.

[0252] The offset may be added, for example, to the difference ΔYL between the interval YL between the image 72A and the image 72B constituting the pupil divided image 70 acquired by the pupil divided image acquisition unit 60D and the reference interval YL', or may be added to the displacement amount ΔZ calculated backward from the difference ΔYL. In either case, the position of the objective lens 22 after focusing can be adjusted by the offset. However, the present invention is not limited to this, and an offset may be added to various parameters as long as it is possible to adjust the focus position of the target to the same height as the tissue part.

[0253] Fig. 17 is a diagram showing an example of a functional configuration of the control device 16 according to this modification. As shown in Fig. 17, in the control device 16 according to this modification, in the same functional configuration as that described in the above embodiment with reference to Fig. 5, the derivation unit 60E further includes a discrimination unit 60K.

[0254] The discrimination unit 60K discriminates whether the line illumination used for focusing (in this example, the line illumination LA4) is scanning the tissue portion SB1 or the non-tissue portion HB1, and if it determines that the non-tissue portion HB1 is being scanned, an offset is added to the focus position.

[0255] Specifically, the discrimination unit 60K inputs, for example, the pupil division image 70 acquired by the pupil division image acquisition unit 60D, and discriminates whether the line illumination LA4 is scanning the tissue portion SB1 or the non-tissue portion HB1 based on the input pupil division image 70. For example, the amount of fluorescent light emitted by the line illumination LA4 is usually greater in the tissue portion SB1 than in the non-tissue portion HB1 due to irradiation with the line illumination LA4. Therefore, the discrimination unit 60K may determine that the line illumination LA4 is scanning the tissue portion SB1 when the luminance value of the pupil division image 70 in the pupil division image 70 is higher than a preset threshold value, and may determine that the line illumination LA4 is scanning the non-tissue portion HB1 when the luminance value is lower. However, without being limited thereto, the discrimination unit 60K may be modified in various ways, for example, to determine whether the line illumination LA4 is scanning the tissue portion SB1 or the non-tissue portion HB1 based on the captured image captured by the area illumination LB among the captured images acquired by the captured image acquisition unit 60B.

[0256] When adding an offset to the focus position, the discrimination unit 60K may, for example, input to the relative distance derivation unit 60J an offset amount to be added to the difference ΔYL or displacement amount ΔZ calculated by the relative distance derivation unit 60J, or may instruct the relative distance derivation unit 60J to add an offset amount previously stored in the relative distance derivation unit 60J to the difference ΔYL or displacement amount ΔZ.

[0257] FIG. 18 is an explanatory diagram for explaining the process of providing an offset to the focus position in the non-tissue portion. In FIG. 18, the focus position of the non-tissue portion HB1 is higher than the focus position of the tissue portion SB1. Also, FIG. 18 shows a case where the measurement target region 24 moves from right to left, that is, the objective lens 22 is scanned from left to right. As shown in FIG. 18, when the discrimination unit 60K determines that the focus is applied to the non-tissue portion HB1, the discrimination unit 60K provides an offset to the focus position (for example, the difference ΔYL or the displacement amount ΔZ) so that the focus is adjusted to the tissue portion SB1. In the example shown in FIG. 18, an offset is provided so that the focus position when the focus is applied to the non-tissue portion HB1 is lower by the height α. This height α may be the expected difference in height between the non-tissue portion HB1 and the tissue portion SB1.

[0258] Note that, when the discrimination unit 60K determines that the scanning position of the line illumination LA4 used for focusing has switched from the non-tissue portion HB1 to the tissue portion SB1, the discrimination unit 60K may cancel the application of the offset. Alternatively, when the discrimination unit 60K determines that the scanning position has switched from the non-tissue portion HB1 to the tissue portion SB1, the discrimination unit 60K may apply an offset different from that applied when the non-tissue portion HB1 has been determined.

[0259] 18 shows a case where the discrimination unit 60K applies an offset to the focus position in the non-tissue portion HB1 to align the focus position with the tissue portion SB1, but is not limited to this example. For example, the microscope system 1 may apply an offset to the focus position in the tissue portion SB1 to align the focus position with the non-tissue portion HB1.

[0260] Here, as described above, the non-tissue portion HB1 and the tissue portion SB1 may be distinguished based on luminance information of light emitted from the specimen, for example, luminance information of each pixel in the pupil division image 70 or the captured image. This is because the fluorescence intensity of the non-tissue portion HB1 is weak, but the fluorescence intensity of the tissue portion SB1 tends to be strong due to the presence of autofluorescence in addition to the fluorescence due to the fluorescent dye.

[0261] Furthermore, the discrimination unit 60K may determine whether or not at least a part of the line illumination LA4 used for focusing is irradiated onto the tissue portion SB1. When it is determined that at least a part of the line illumination LA4 is irradiated onto the tissue portion SB1, the discrimination unit 60K may instruct, for example, the selection unit 60H (the phase difference acquisition unit 60I and / or the relative distance derivation unit 60J as necessary) to adjust the focus using the pupil division image 70 or the captured image of the area on the tissue portion SB1 irradiated with the line illumination LA4.

[0262] In addition, the discrimination unit 60K may determine whether or not at least a part of the line illumination LA4 is irradiated onto the tissue portion SB1 based on various information, not limited to luminance information, as long as it can distinguish between the non-tissue portion HB1 and the tissue portion SB1. For example, the discrimination unit 60K may determine whether or not there is a structure from the pattern of pixel values ​​of the captured image, and if there is a structure, determine that at least a part of the line illumination LA4 is irradiated onto the tissue portion SB1. Also, for example, the discrimination unit 60K may determine whether or not at least a part of the area currently irradiated with the line illumination LA4 is the tissue portion SB1 based on a low-resolution image (e.g., a thumbnail image) capturing the entire sample T.

[0263] FIG. 19 is an explanatory diagram for explaining a process of adjusting the focus based on the fluorescence from the tissue portion SB1 when at least a portion of the line illumination LA4 is irradiated onto the tissue portion SB1. RT1 indicates the range of the line irradiated with the laser. FIG. 19(a) shows a case where RT1 is moved in the direction KD1 to approach the tissue portion SB1. FIG. 19(b) shows a case where RT1 is moved in the direction KD1 so that a portion of RT1 is included in the tissue portion SB1. In this way, the switching of the line irradiation of RT1 from the non-tissue portion HB1 to the tissue portion SB1 may not be entirely switched to the tissue portion SB1 at once, but may be gradually switched.

[0264] In FIG. 19(b), a part of RT1 is included in the tissue portion SB1, and the other part of RT1 is included in the non-tissue portion HB1. In such a case, the discrimination unit 60K may instruct the selection unit 60H (and / or the phase difference acquisition unit 60I and / or the relative distance derivation unit 60J, as necessary) to execute a process of preferentially selecting and focusing on the fluorescence of the tissue portion SB1. Note that in FIG. 19(b), by further moving RT1 in the direction KD1, RT1 becomes completely included in the tissue portion SB1.

[0265] The discrimination unit 60K may also determine whether to perform focusing based on the fluorescence from the tissue portion SB1 depending on the ratio of the tissue portion SB1 to the irradiation area of ​​the line illumination LA4. For example, when it is determined that the ratio of the tissue portion SB1 is high, such as when 80% of the irradiation area is the tissue portion SB1 and the remaining 20% ​​is the non-tissue portion HB1, the discrimination unit 60K may determine to perform the focusing process based on the fluorescence from the tissue portion SB1, specifically, based on the area of ​​the tissue portion SB1 in the irradiation area of ​​the line illumination LA4 in the pupil division image 70 or the captured image. For example, when it is determined that the ratio of the tissue portion SB1 is low, such as when 10% of the irradiation area is the tissue portion SB1 and the remaining 90% is the non-tissue portion, the discrimination unit 60K may determine to perform the focusing process based on the fluorescence from the non-tissue portion HB1, specifically, based on the area of ​​the non-tissue portion HB1 in the irradiation area of ​​the line illumination LA4 in the pupil division image 70 or the captured image.

[0266] In this manner, the discrimination unit 60K may discriminate whether to use the fluorescence from the tissue portion SB1 or the fluorescence from the non-tissue portion HB1 for focusing, depending on the proportion of each in the illumination area of ​​the line illumination light LA4.

[0267] Fig. 18 shows a case where the process of adjusting the focus is performed by applying an offset to the focus position in the non-tissue area. Fig. 19 shows a case where the process of adjusting the focus is performed by preferentially selecting the fluorescence of the tissue area. Here, the discrimination unit 60K may perform the process of adjusting the focus by combining the process of Fig. 18 and the process of Fig. 19. The process when the discrimination unit 60K combines the two processes will be described below.

[0268] Fig. 20 is a diagram showing an example of a sensor area of ​​the pupil divided image capturing section 42 according to the modified example 4. As shown in Fig. 20, in the modified example 4, each unit area 37 in the sensor area of ​​the pupil divided image capturing section 42 is further divided into two areas 371 and 372 in a direction (X direction) perpendicular to the scanning direction (Y direction). In this modified example, there is no distinction between the unit area 37A and the unit area 37B. In this modified example, in each unit area 37, the area 371 is an area in which an exposure setting value with high light sensitivity is set, and the area 372 is an area in which an exposure setting value with low light sensitivity is set.

[0269] For unit area 37 determined by discrimination unit 60K to be an area corresponding to tissue area SB1, relative distance derivation unit 60J in derivation unit 60E calculates a displacement amount ΔZ based on the difference ΔYL between the interval YL calculated by phase difference acquisition unit 60I from pupil divided image 72 acquired in area 371 where an exposure setting value with high light sensitivity is set and a reference interval YL', and for unit area 37 determined by discrimination unit 60K to be an area corresponding to non-tissue area HB1, calculates a displacement amount ΔZ based on a value obtained by adding an offset to the difference ΔYL between the interval YL calculated by phase difference acquisition unit 60I from pupil divided image 72 acquired in area 372 where an exposure setting value with low light sensitivity is set and the reference interval YL', or adds an offset to the displacement amount ΔZ calculated based on the difference ΔYL. The displacement amount ΔZ provided from the lead-out unit 60E to the movement control unit 60F may be, for example, an average value of the displacement amount ΔZ calculated from the tissue portion SB1 and the displacement amount ΔZ (including offset) calculated from the non-tissue portion HB1. In this case, each displacement amount ΔZ may be weighted based on the proportion of the tissue portion SB1 and the non-tissue portion HB1 in the irradiation area of ​​the line illumination LA4. For example, when the proportion of the tissue portion SB1 is 20% and the proportion of the non-tissue portion HB1 is 80%, the displacement amount ΔZ input to the movement control unit 60F may be a sum of a value obtained by multiplying the displacement amount ΔZ calculated from the tissue portion SB1 by 0.2 and a value obtained by multiplying the displacement amount ΔZ (including offset) calculated from the non-tissue portion HB1 by 0.8.

[0270] Alternatively, the relative distance derivation unit 60J may calculate the displacement amount ΔZ based only on the unit region 37 that is determined by the discrimination unit 60K to be a region corresponding to the tissue portion SB1. In this case, the phase difference acquisition unit 60I may calculate the distance YL between the centers of gravity g of the images 72A and 72B using the pupil divided image 72 acquired in the region 371 in the unit region 37 corresponding to the tissue portion SB1. In this case, even when the fluorescence intensity in the non-tissue portion HB1 is very weak and noise is dominant in the pupil divided image 72 of the non-tissue portion HB1, it is possible to suppress a decrease in the focusing accuracy.

[0271] (Variation 5) In the above embodiment, the phase difference acquisition unit 60I calculates the phase difference (interval YL) based on the distance between the centers of gravity g of the images 72A and 72B. However, if the line illumination is too bright, the pixels of the pupil division image capturing unit 42 (i.e., the pixel values ​​of each pixel in the pupil division image 70) may become saturated, and the positions of the centers of gravity g of the images 72A and 72B may not be properly specified. On the other hand, if the line illumination is too dark, noise becomes dominant in the pupil division image 70, and the position of the center of gravity g of the line illumination may not be properly specified.

[0272] Therefore, in variant example 5, it is possible to determine whether or not the signal (corresponding to a pixel value, hereinafter also referred to as luminance) read from each light receiving section 41 (corresponding to a pixel) in each unit area 37 of the pupil divided image capturing section 42 is within an appropriate range, and to perform focusing based on the pupil divided image 72 acquired in the unit area 37 in which it is determined that the luminance of all pixels is within the appropriate range.

[0273] The functional configuration of the control device 16 according to this modification may be the same as the configuration example described in Modification 4 using Fig. 17, and therefore will be described here with reference to Fig. 17. Also in this modification, the discrimination unit 60K may execute the operation exemplified in Modification 4.

[0274] FIG. 21 is a diagram for explaining the focusing operation according to this modified example. FIG. 21(a) is a diagram showing the relationship between the signal level (x-axis) and the signal frequency (y-axis), and FIG. 21(b) is a diagram showing an example of the pupil division image 72 (one of the images 72A and 72B) obtained in each unit area 37. In FIG. 21(a), HG1 indicates the signal distribution of the background (corresponding to the black part in FIG. 21(b)), and HG2 indicates the signal distribution of the image 72A or 72B (corresponding to the gray to white part in FIG. 21(b)). In addition, the first threshold value HF1 indicates the lower limit threshold value for determining whether or not the luminance is within an appropriate range, and the second threshold value HF2 indicates the upper limit threshold value for determining whether or not the luminance is within an appropriate range.

[0275] In this modification, for example, in each unit region 37, if the peak of the distribution of the pixel values ​​(luminance) of the light receiving units 41 constituting each unit region 37 is lower than the first threshold value HF1, the pixel values ​​in the pupil division image 70 are no longer dominant over the noise level, and the S / N ratio deteriorates. As a result, it becomes difficult to accurately calculate the position of the center of gravity g of the images 72A and 72B during focusing, and the accuracy of focusing may decrease. On the other hand, for example, in each unit region 37, if at least one pixel value (luminance) of the light receiving units 41 constituting each unit region 37 is higher than the second threshold value HF2, the pixels in the pupil division image 70 are crushed, and it becomes difficult to accurately specify the position of the center of gravity g of the images 72A and 72B, and the accuracy of focusing may decrease.

[0276] Therefore, in this modified example, the discrimination unit 60K may, for example, identify an area acquired in the input pupil divided image 70, among the multiple unit areas 37 constituting the pupil divided image capturing unit 42, in which the peak of the pixel value distribution is equal to or greater than the first threshold value HF1 and all pixel values ​​are equal to or less than the second threshold value HF2, and may instruct, for example, the selection unit 60H (and, if necessary, the phase difference acquisition unit 60I and / or the relative distance derivation unit 60J) to focus using the identified area.

[0277] Specifically, as shown in FIG. 21(c), when there is a unit area 37 in which the peak of the distribution of pixel values ​​is greater than the first threshold value HF1 or at least one pixel value is determined to be greater than the second threshold value HF2, the discrimination unit 60K instructs the selection unit 60H to focus on an area other than the area corresponding to this unit area 27 in the pupil division image 70.

[0278] In addition, when there is a unit area 37 in which the peak of the distribution of pixel values ​​is determined to be greater than the first threshold value HF1 or at least one pixel value is determined to be greater than the second threshold value HF2, the operation is not limited to the above operation, and for example, the scanning may be stopped and a process of re-imaging may be performed, or the scanning may be stopped and a warning (alert) may be output.

[0279] (Variation 6) In addition, in the above embodiment or its modified example, when the height (height in the Z direction) of the objective lens 22 is changed suddenly during focus position control, the brightness of the image may change suddenly before and after the change in the height of the objective lens 22 in the captured image and pupil division image 70. Therefore, in this modified example, the speed at which the height of the objective lens 22 is changed is made gentle. FIG. 22 is a diagram for explaining the moving speed of the objective lens 22 according to this modified example, where FIG. 22(a) shows an example of a captured image acquired when the height of the objective lens 22 is changed suddenly, FIG. 22(b) shows a case where the height of the objective lens 22 is changed suddenly, and FIG. 22(c) shows a case where the height of the objective lens 22 is changed slowly.

[0280] As shown in FIG. 22(b), if the objective lens 22 is moved too fast, light and dark steps HJ1 to HJ3 may appear in the captured image as if the image were switched, as shown in FIG. 22(a).

[0281] Therefore, in this modified example, as shown in Fig. 22(b), the objective lens 22 is controlled to move gently. Specifically, the movement control unit 60F controls, for example, the amount of movement of the objective lens 22 in the height direction (Z direction) while the imaging line advances by one in the scanning direction (Y direction) to be equal to or less than the focal depth of the objective lens 22. Note that the imaging line may be a strip-shaped range irradiated with the line illumination LA or LB during each imaging cycle (also referred to as the frame rate) of the imaging unit 34 or the pupil division image imaging unit 42.

[0282] In this way, it is possible to sufficiently reduce the difference in brightness between captured images (or pupil division images 70) acquired in successive imaging cycles by setting the amount of movement in the height direction of the objective lens 22 in one imaging cycle to be equal to or less than the focal depth of the objective lens 22. This makes it possible to improve the accuracy of analysis using the captured images, the accuracy of focusing using the pupil division image 70, and the like.

[0283] (Variation 7) In the above-described embodiment and its modified example, the case where the exposure setting values ​​of the unit regions 37A and 37B (or the regions 371 and 372) are preset setting values ​​is exemplified, but is not limited thereto. For example, the high exposure setting value assuming the non-tissue portion HB1 and the low exposure setting value assuming the tissue portion SB1 may be determined based on a low-resolution image such as a thumbnail image obtained by imaging the specimen T in advance. For example, the light source control unit 60A may determine the high exposure setting value assuming the non-tissue portion HB1 based on the luminance information of the non-tissue portion HB1 in a low-resolution image obtained in advance, and may determine the low exposure setting value assuming the tissue portion SB1 based on the luminance information of the tissue portion SB1. This allows scanning to be performed based on an appropriate gain setting, so that a more focused pupil division image 70 can be obtained.

[0284] (Variation 8) In addition, the techniques relating to the above-mentioned embodiments and their modified examples can also be applied to a so-called heteroaxial excitation scanner type microscope system in which multiple line lights with different wavelengths arranged in parallel on different axes are irradiated onto a pathological specimen (corresponding to a specimen T).

[0285] FIG. 23 is a schematic block diagram of a microscope system according to Modification 8, and FIG. 24 is a diagram showing an example of an optical system in the microscope system.

[0286] [Overall configuration] 23, a microscope system 100 according to the eighth modification includes an observation unit 101. The observation unit 101 includes an excitation unit 110 that irradiates a pathological specimen (pathological sample) with multiple line lights having different wavelengths arranged in parallel with different axes, a stage 120 that supports the pathological specimen, and a spectral imaging unit 130 that acquires a fluorescence spectrum (spectral data) of the linearly excited pathological specimen.

[0287] Here, "different axes and parallel" refers to multiple line illuminations that are different axes and parallel. Different axes refers to not being on the same axis, and the distance between the axes is not particularly limited. Parallel does not necessarily mean parallel in the strict sense, but also includes a state of being approximately parallel. For example, deviation from the parallel state due to distortion from an optical system such as a lens or manufacturing tolerances is acceptable, and in this case too it is considered to be parallel.

[0288] The microscope system 100 further includes a processing unit 102. The processing unit 102 typically forms an image of a pathological specimen (hereinafter also referred to as sample S) based on the fluorescence spectrum of the pathological specimen acquired by the observation unit 101, or outputs a distribution of the fluorescence spectrum. The image referred to here refers to the composition ratio of the pigments constituting the spectrum and autofluorescence derived from the sample, a waveform converted into RGB (red-green-blue) color, a luminance distribution in a specific wavelength band, etc.

[0289] The excitation unit 110 and the spectroscopic imaging unit 130 are connected to the stage 120 via an observation optical system 140 such as an objective lens 144. The observation optical system 140 has a function of tracking an optimal focus by a focus mechanism 160. A non-fluorescence observation unit 170 such as dark-field observation or bright-field observation may be connected to the observation optical system 140.

[0290] The microscope system 100 may be connected to a control unit 180 that controls the excitation unit (control of the LD and shutter), the XY stage which is the scanning mechanism, the spectroscopic imaging unit (camera), the focus mechanism (detector and Z stage), the non-fluorescence observation unit (camera), etc.

[0291] The excitation unit 110 includes a plurality of excitation light sources L1, L2, ... capable of outputting light of a plurality of excitation wavelengths Ex1, Ex2, .... The plurality of excitation light sources are typically constituted by light-emitting diodes (LEDs), laser diodes (LDs), mercury lamps, etc., and each light is converted into line illumination and irradiated onto the sample S on the stage 120.

[0292] The sample S (corresponding to the specimen T) is typically composed of a slide including an observation target such as a tissue slice, but may of course be other than that. The sample S (observation target) is stained with multiple fluorescent dyes. The observation unit 101 observes the sample S by magnifying it to a desired magnification. The excitation section 110 has multiple line illuminators (e.g., line illuminators LA and LB) arranged, and the imaging areas of the spectral imaging section 130 are arranged so as to overlap with the respective illumination areas. The two line illuminators LA and LB are each parallel to the Z-axis direction and are arranged at a predetermined distance (Δy) apart in the Y-axis direction.

[0293] The photographing areas correspond to the slit sections of the observation slit 131 (FIG. 24) in the spectral imaging section 130. That is, the same number of slit sections in the spectral imaging section 130 as the number of line illuminations are arranged. Either the illumination line width or the slit width may be larger. When the illumination line width is larger than the slit width, the alignment margin of the excitation section 110 with respect to the spectral imaging section 130 can be increased.

[0294] The wavelengths constituting the first line illumination Ex1 and the wavelengths constituting the second line illumination Ex2 are different from each other. Line-shaped fluorescence excited by these line illuminations Ex1 and Ex2 is observed in the spectral imaging unit 130 via the observation optical system 140.

[0295] The spectral imaging section 130 has an observation slit 131 having a plurality of slit portions through which the fluorescence excited by the plurality of line illuminations can pass, and at least one image sensor 132 capable of individually receiving the fluorescence that has passed through the observation slit 131. A two-dimensional imager such as a CCD or CMOS is used for the image sensor 132. By arranging the observation slit 131 on the optical path, it is possible to detect the fluorescence spectra excited by each line without overlapping.

[0296] The spectral imaging section 130 acquires fluorescence spectral data (x, λ) from each of the line illuminations Ex1 and Ex2 using the pixel array in one direction (e.g., the vertical direction) of the image sensor 132 as a wavelength channel. The acquired spectral data (x, λ) is recorded in the processing unit 102 in a state where it is linked to the excitation wavelength from which each piece of spectral data was excited.

[0297] The processing unit 102 can be realized by hardware elements used in a computer, such as a CPU, a RAM, a ROM, etc., and necessary software. Instead of or in addition to the CPU, a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), a DSP (Digital Signal Processor), or other ASIC (Application Specific Integrated Circuit), etc. may be used.

[0298] The processing unit 102 has a memory 121 that stores spectroscopic data indicating a correlation between the wavelengths of the multiple line illuminations Ex1, Ex2 and the fluorescence received by the image sensor 132. A storage device such as a nonvolatile semiconductor memory or a hard disk drive is used for the memory 121, and a standard spectrum of the autofluorescence of the sample S and a standard spectrum of a single dye that stains the sample S are stored in advance. The spectroscopic data (x, λ) received by the image sensor 132 is stored in the memory 121. In this modification, the memory that stores the autofluorescence and standard spectrum of the single dye of the sample S and the memory that stores the spectroscopic data (measured spectrum) of the sample S acquired by the image sensor 132 are configured in the common memory 121, but are not limited to this and may be configured in separate memory units.

[0299] 24, a dichroic mirror 142 and a bandpass filter 145 are inserted in the optical path to prevent the excitation light (Ex1, Ex2) from reaching the image sensor 132. In this case, intermittent parts occur in the fluorescence spectrum imaged on the image sensor 132. By excluding such intermittent parts from the readout area, the frame rate can be further improved.

[0300] 24, the image sensor 132 may include a plurality of image sensors 132a and 132b each capable of receiving the fluorescence that has passed through the observation slit 131. In this case, the fluorescence spectra excited by the line illuminations Ex1 and Ex2 are acquired on the image sensors 132a and 132b and stored in the storage unit 121 in association with the excitation light.

[0301] The line illuminations Ex1 and Ex2 are not limited to being composed of a single wavelength, and each may be composed of multiple wavelengths. When the line illuminations Ex1 and Ex2 are each composed of multiple wavelengths, the fluorescence excited by these also includes multiple spectra. In this case, the spectral imaging unit 130 has a wavelength dispersion element for separating the fluorescence into spectra derived from the excitation wavelengths. The wavelength dispersion element is composed of a diffraction grating, a prism, or the like, and is typically disposed on the optical path between the observation slit 131 and the image sensor 132.

[0302] The observation unit 101 further includes a scanning mechanism 150 that scans the stage 120 with a plurality of line illuminators Ex1 and Ex2 in the Y-axis direction, that is, in the arrangement direction of the line illuminators Ex1 and Ex2. By using the scanning mechanism 150, dye spectra (fluorescence spectra) excited with different excitation wavelengths spatially separated by Δy on the sample S (observation target) can be continuously recorded in the Y-axis direction. In this case, for example, the photographing area is divided into a plurality of areas in the X-axis direction, and the sample S is scanned in the Y-axis direction, and then moved in the X-axis direction, and the operation of scanning in the Y-axis direction is repeated. Spectral images derived from a sample excited with several types of excitation wavelengths can be photographed in one scan.

[0303] Typically, the scanning mechanism 150 scans the stage 120 in the Y-axis direction, but multiple line illuminators Ex1 and Ex2 may be scanned in the Y-axis direction by a galvanometer mirror disposed midway through the optical system. Finally, three-dimensional data of (X, Y, λ) is acquired for each of the multiple line illuminators Ex1 and Ex2. The three-dimensional data derived from each of the line illuminators Ex1 and Ex2 is data whose coordinates are shifted by Δy on the Y-axis, and is corrected and output based on Δy recorded in advance or a value of Δy calculated from the output of the image sensor 132.

[0304] In the examples so far, the line illumination as excitation light is configured with two lines, but this is not limited to this and may be three, four, five or more lines. Each line illumination may include multiple excitation wavelengths selected so as to minimize deterioration of color separation performance. Even if there is only one line illumination, if the excitation light source is configured with multiple excitation wavelengths and each excitation wavelength is linked to the row data acquired by the image sensor and recorded, a multi-color spectrum can be obtained, although the separation ability is not as good as that of different-axis parallel illumination.

[0305] [Observation unit] Next, the observation unit 101 will be described in detail with reference to Fig. 24. Here, an example in which the observation unit 101 is configured according to configuration example 2 in Fig. 10 will be described.

[0306] The excitation section 110 has a plurality of (four in this example) excitation light sources L1, L2, L3, and L4. Each of the excitation light sources L1 to L4 is composed of a laser light source that outputs laser light having a wavelength of 405 nm, 488 nm, 561 nm, and 645 nm, respectively.

[0307] The excitation section 110 further includes a plurality of collimator lenses 111 and a laser line filter 112 corresponding to the respective excitation light sources L1 to L4, dichroic mirrors 113a, 113b, and 113c, a homogenizer 114, a condenser lens 115, and an entrance slit .

[0308] The laser light emitted from the excitation light source L1 and the laser light emitted from the excitation light source L3 are each collimated by a collimator lens 111, transmitted through a laser line filter 112 for cutting the base of each wavelength band, and made coaxial by a dichroic mirror 113a. The two coaxial laser lights are further beam-shaped by a homogenizer 114 such as a fly-eye lens and a condenser lens 115 to become the line illumination Ex1.

[0309] The laser light emitted from the excitation light source L2 and the laser light emitted from the excitation light source L4 are similarly made coaxial by the dichroic mirrors 113b and 113c, and are converted into line illumination Ex2 having a different axis from the line illumination Ex1. The line illuminations Ex1 and Ex2 form different-axis line illuminations (primary images) separated by Δy in an entrance slit 116 (slit conjugate) having multiple slit portions through which each of the line illuminations Ex1 and Ex2 can pass.

[0310] This primary image is irradiated onto the sample S on the stage 120 via the observation optical system 140. The observation optical system 140 has a condenser lens 141, dichroic mirrors 142 and 143, an objective lens 144, a bandpass filter 145, and a condenser lens 146. The line illuminations Ex1 and Ex2 are collimated by the condenser lens 141 paired with the objective lens 144, reflected by the dichroic mirrors 142 and 143, transmitted through the objective lens 144, and irradiated onto the sample S.

[0311] The fluorescence excited on the sample S surface is collected by the objective lens 144, reflected by the dichroic mirror 143, transmitted through the dichroic mirror 142 and a bandpass filter 145 that cuts the excitation light, collected again by the condenser lens 146, and enters the spectral imaging section 130.

[0312] The spectral imaging section 130 includes an observation slit 131, an imaging element 132 (132a, 132b), a first prism 133, a mirror 134, a diffraction grating 135 (wavelength dispersion element), and a second prism 136.

[0313] The observation slit 131 is disposed at the focusing point of the condenser lens 146, and has the same number of slit sections as the number of excitation lines. The fluorescence spectra originating from the two excitation lines that have passed through the observation slit 131 are separated by the first prism 133, and are further separated into fluorescence spectra of each excitation wavelength by being reflected by the grating surface of the diffraction grating 135 via the mirror 134. The four fluorescence spectra thus separated are incident on the image pickup elements 132a and 132b via the mirror 134 and the second prism 136, and are expanded into (x, λ) information as spectroscopic data.

[0314] The pixel size (nm / Pixel) of the image sensors 132a and 132b is not particularly limited and is set to, for example, 2 nm or more and 20 nm or less. This dispersion value may be realized optically by the pitch of the diffraction grating 135, or may be realized by using hardware binning of the image sensors 132a and 132b.

[0315] The stage 120 and the scanning mechanism 150 constitute an XY stage, and the sample S is moved in the X-axis direction and the Y-axis direction to acquire a fluorescent image of the sample S. In WSI (Whole Slide Imaging), the sample S is scanned in the Y-axis direction, then moved in the X-axis direction, and then scanned again in the Y-axis direction, and this operation is repeated.

[0316] The non-fluorescence observation section 170 is made up of a light source 71, a dichroic mirror 143, an objective lens 144, a condenser lens 172, an image pickup element 173, etc. In the non-fluorescence observation system, an observation system using dark-field illumination is shown in FIG.

[0317] The light source 71 is disposed below the stage 120, and irradiates the sample S on the stage 120 with illumination light from the opposite side to the line illuminations Ex1 and Ex2. In the case of dark-field illumination, the excitation light source 171 illuminates from outside the NA (numerical aperture) of the objective lens 144, and light diffracted by the sample S (dark-field image) is captured by the image sensor 173 via the objective lens 144, the dichroic mirror 143, and the condenser lens 172. By using dark-field illumination, even a seemingly transparent sample such as a fluorescently stained sample can be observed with contrast.

[0318] The dark-field image may be observed simultaneously with the fluorescence and used for real-time focusing. In this case, the illumination wavelength may be selected so as not to affect the fluorescence observation. The non-fluorescence observation unit 170 is not limited to an observation system that acquires a dark-field image, but may be configured with an observation system that can acquire non-fluorescence images such as bright-field images, phase-contrast images, phase images, and in-line hologram images. For example, various observation methods such as the Schlieren method, phase-contrast method, polarized observation method, and epi-illumination method can be adopted as a method for acquiring a non-fluorescence image. The position of the illumination light source is not limited to below the stage, and may be above the stage or around the objective lens. In addition to a method of performing focus control in real time, other methods such as a pre-focus map method in which focus coordinates (Z coordinates) are recorded in advance may be adopted.

[0319] 23 may correspond to the control unit 60 according to the embodiment or its modified example described above. In addition, the excitation unit 110 may correspond to the light source 18B, the spectral imaging unit 130 to the image capture unit 34 and the pupil division image capture unit 42, the scanning mechanism 150 to the first drive unit 44, the focus mechanism 160 to the second drive unit 46, the sample stage 120 to the stage 26, and the observation optical system 140 to the optical system including the objective lens 22.

[0320] (Hardware configuration) FIG. 25 is a hardware configuration diagram showing an example of a computer 1000 that realizes the functions of the control device 16 according to the above-mentioned embodiment and modified examples.

[0321] The computer 1000 includes a CPU 1100, a RAM 1200, a read only memory (ROM) 1300, a hard disk drive (HDD) 1400, a communication interface 1500, and an input / output interface 1600. The components of the computer 1000 are connected to each other via a bus 1050.

[0322] The CPU 1100 operates and controls each unit based on a program stored in the ROM 1300 or the HDD 1400. For example, the CPU 1100 loads a program stored in the ROM 1300 or the HDD 1400 into the RAM 1200 and executes processing corresponding to the program.

[0323] The ROM 1300 stores boot programs such as a basic input output system (BIOS) executed by the CPU 1100 when the computer 1000 is started, and programs that depend on the hardware of the computer 1000.

[0324] The HDD 1400 is a computer-readable recording medium that non-temporarily records programs executed by the CPU 1100 and data used by the programs, etc. Specifically, the HDD 1400 is a recording medium that records a focus adjustment program according to the present disclosure, which is an example of the program data 1450.

[0325] The communication interface 1500 is an interface for connecting the computer 1000 to an external network 1550 (e.g., the Internet). For example, the CPU 1100 receives data from other devices and transmits data generated by the CPU 1100 to other devices via the communication interface 1500.

[0326] The input / output interface 1600 is an interface for connecting the input / output device 1650 and the computer 1000. For example, the CPU 1100 receives data from an input device such as a keyboard or a mouse via the input / output interface 1600. The CPU 1100 also transmits data to an output device such as a display, a speaker, or a printer via the input / output interface 1600. The input / output interface 1600 may also function as a media interface for reading a program or the like recorded on a predetermined recording medium. The medium may be, for example, an optical recording medium such as a DVD (Digital Versatile Disc) or a PD (Phase change rewritable Disk), a magneto-optical recording medium such as an MO (Magneto-Optical disk), a tape medium, a magnetic recording medium, or a semiconductor memory.

[0327] For example, when the computer 1000 functions as the control device 16 according to the embodiment, the CPU 1100 of the computer 1000 executes a program loaded on the RAM 1200 to realize functions such as the light source control unit 60A, the captured image acquisition unit 60B, the reference focus unit 60C, the pupil division image acquisition unit 60D, the derivation unit 60E, the movement control unit 60F, the output control unit 60G, the selection unit 60H, the phase difference acquisition unit 60I, and the relative distance derivation unit 60J. In addition, the HDD 1400 stores the programs and data according to the present disclosure. The CPU 1100 reads and executes the program data 1450 from the HDD 1400, but as another example, these programs may be obtained from other devices via the external network 1550.

[0328] The present technology can also be configured as follows. (1) an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; a phase difference acquisition unit that acquires phase difference information of an image of light emitted from a specimen by being irradiated with the line illumination; an objective lens that focuses the line illumination onto the specimen; a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information; a movement control unit that moves at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; A microscope system comprising: (2) The plurality of line illuminations are each configured with a different wavelength, have different axes, and are parallel to the first direction. The microscope system described in (1) above. (3) the phase difference acquisition unit has a plurality of lenses and acquires a pupil division image of light emitted from the sample as the phase difference information; The microscope system according to (1) or (2) above. (4) the phase difference acquisition unit acquires the phase difference information based on a light intensity distribution of a pupil division image of the light emitted from the sample. The microscope system according to any one of (1) to (3) above. (5) the phase difference acquisition unit calculates a center position of the light intensity distribution and acquires the phase difference information by comparing the center positions. The microscope system described in (4) above. (6) The lead-out portion is A first calculation unit that calculates an interval between the pupil division images; a second calculation unit that calculates, as the relative position information, a relative movement amount and a relative movement direction according to a difference between the interval and a reference interval; having The microscope system according to any one of (3) to (5) above. (7) The derivation unit derives the relative position information for each position of the specimen based on an interval between the pupil divided images at each position in an extension direction of the images. The microscope system according to any one of (3) to (6) above. (8) the movement control unit performs focusing for each of a plurality of line illuminations having different axes and parallel to the first direction, each of which is configured with a different wavelength; The microscope system according to any one of (1) to (7) above. (9) the phase difference acquisition unit acquires the pupil divided image from an imaging unit having a plurality of light receiving units that receive light, the plurality of types of unit areas having different exposure setting values ​​for the light receiving units included in the image receiving unit being arranged along a light receiving surface; The lead-out portion is a selection unit for selecting a unit area including the light receiving unit having a specific exposure setting value from among a plurality of types of the unit areas, measuring a phase difference based on a light intensity distribution of the pupil divided image received by the light receiving unit included in the selected unit area, and deriving the relative position information; The microscope system according to any one of (3) to (7) above. (10) The exposure setting value includes at least one of a gain of the light receiving unit and an exposure time. The microscope system described in (9) above. (11) 1. An imaging method executed by a computer for controlling a measurement unit including an illumination unit that irradiates a line illumination parallel to a first direction, a stage that supports a specimen and is movable in a second direction perpendicular to the first direction, and an objective lens that focuses the line illumination on the specimen, the method comprising: acquiring phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; deriving relative position information between the objective lens and the specimen based on the phase difference information; moving at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; An imaging method comprising: (12) An imaging device including a measurement unit and software used to control the operation of the measurement unit, The software is installed in an imaging device, The measurement unit includes: an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; an objective lens that focuses the line illumination onto the specimen; Equipped with The software comprises: acquiring phase difference information of an image of light emitted from the specimen by irradiating the specimen with the line illumination; deriving relative position information between the objective lens and the specimen based on the phase difference information; moving at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; Imaging device. (13) an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; a phase difference acquisition unit that acquires phase difference information of an image of light emitted from a specimen by being irradiated with the line illumination; an objective lens that focuses the line illumination onto the specimen; a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information, and that registers in a focus map, in association with each of the positions in the first direction and the second direction and a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, based on the relative position information; A microscope system comprising: (14) and a discrimination unit that discriminates whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where the tissue is not present, based on luminance information of the light emitted from the specimen. The microscope system according to any one of (1) to (10) and (13) above. (15) The area outside the tissue is an area where a sealant is disposed. The microscope system described in (14) above. (16) The discrimination unit discriminates a ratio of the tissue region in the region irradiated with the line illumination. The microscope system according to (14) or (15) above. (17) the discrimination unit discriminates whether at least a part of a region irradiated with the line illumination is the tissue region or a region outside the tissue based on an image obtained by capturing an image of the entirety of the sample. The microscope system according to any one of (14) to (16) above. (18) the discrimination unit discriminates whether at least a part of a region irradiated with the line illumination is the tissue region or a region outside the tissue based on luminance information of the fluorescence emitted from the sample. The microscope system according to any one of (14) to (17) above. (19) the discrimination unit discriminates, for each of a plurality of types of unit areas having different exposure setting values ​​of a plurality of light receiving units that receive light, whether an area irradiated with the line illumination is the tissue area or an area outside the tissue; The microscope system according to any one of (14) to (18) above. (20) the discrimination unit discriminates whether at least a part of the region irradiated with the line illumination is the tissue region or a region outside the tissue based on a degree of luminance from luminance information of the light emitted from the sample. The microscope system according to any one of (14) to (19) above. (twenty one) The phase difference acquisition unit acquires the phase difference information based on the image of the light originating from the tissue region discriminated by the discrimination unit. The microscope system according to any one of (14) to (20) above. (twenty two) the phase difference acquisition unit acquires a phase difference of the light image based on the light image derived from the region outside the tissue discriminated by the discrimination unit, and corrects the acquired phase difference to acquire the phase difference information. The microscope system according to any one of (14) to (20) above. (twenty three) the derivation unit derives relative position information between the objective lens and the specimen based on the phase difference information acquired by the phase difference acquisition unit, and generates the relative position information by correcting the derived position information. The microscope system according to (21) or (22) above. (twenty four) The derivation unit derives the relative position information between the objective lens and the sample based on the phase difference information derived from the tissue region discriminated by the discrimination unit. The microscope system according to any one of (14) to (20) above. (twenty five) the derivation unit derives relative position information between the objective lens and the sample based on the phase difference information derived from the region outside the tissue discriminated by the discrimination unit, and generates the relative position information by correcting the derived position information. The microscope system according to any one of (14) to (20) above. (26) the derivation unit derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region and the region outside the tissue, in accordance with a proportion of the tissue region in the region irradiated with the line illumination determined by the discrimination unit, and generates the relative position information by correcting the derived position information, or derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region, and generates the relative position information by correcting the derived position information. The microscope system according to any one of (14) to (20) above. (27) The determination unit controls the derivation unit to stop deriving the relative position information when it is determined that the degree of the luminance is below a preset threshold or is in a saturated state. The microscope system described in (20) above. (28) the derivation unit controls a distance that the objective lens moves perpendicular to the measurement surface of the sample while the objective lens moves a predetermined distance parallel to the measurement surface of the sample so as to be equal to or less than a focal depth of the objective lens. The microscope system according to any one of (1) to (10) and (13) to (27). [Explanation of symbols]

[0329] 1. Microscope system 12 Imaging device 14 Measuring part 18 Irradiation unit 22 Objective Lens 34 Imaging unit 37 Unit Area 41 Light receiving part 42 Pupil division image capturing unit 44 First Drive Unit 46 Second Drive Unit 60B Image acquisition unit 60D pupil division image acquisition unit 60E Derivation part 60H Selection section 60I Phase difference acquisition section 60J Relative distance derivation part 60K discrimination section 70 pupil division images 72A,72B statue 371,372 areas T specimen

Claims

1. an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; a phase difference acquisition unit that acquires phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; an objective lens that focuses the line illumination onto the specimen; a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information; a movement control unit that moves at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; a discrimination unit that discriminates whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with the phase difference acquisition unit acquires a phase difference of the light image based on the light image derived from the region outside the tissue discriminated by the discrimination unit, and corrects the acquired phase difference to acquire the phase difference information. Microscope system.

2. An illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; a phase difference acquisition unit that acquires phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; an objective lens that focuses the line illumination onto the specimen; a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information; a movement control unit that moves at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; a discrimination unit that discriminates whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with the derivation unit derives relative position information between the objective lens and the sample based on the phase difference information derived from the region outside the tissue discriminated by the discrimination unit, and generates the relative position information by correcting the derived position information. Microscope system.

3. An illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; a phase difference acquisition unit that acquires phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; an objective lens that focuses the line illumination onto the specimen; a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information; a movement control unit that moves at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; a discrimination unit that discriminates whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with the derivation unit derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region and the region outside the tissue, in accordance with a proportion of the tissue region in the region irradiated with the line illumination determined by the discrimination unit, and generates the relative position information by correcting the derived position information, or derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region, and generates the relative position information by correcting the derived position information. Microscope system.

4. an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; a phase difference acquisition unit that acquires phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; an objective lens that focuses the line illumination onto the specimen; a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information, and that registers in a focus map, in association with each of the positions in the first direction and the second direction and a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, based on the relative position information; a discrimination unit that discriminates whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with the phase difference acquisition unit acquires a phase difference of the light image based on the light image derived from the region outside the tissue discriminated by the discrimination unit, and corrects the acquired phase difference to acquire the phase difference information. Microscope system.

5. An illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; a phase difference acquisition unit that acquires phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; an objective lens that focuses the line illumination onto the specimen; a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information, and that registers in a focus map, in association with each of the positions in the first direction and the second direction and a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, based on the relative position information; a discrimination unit that discriminates whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with the derivation unit derives relative position information between the objective lens and the sample based on the phase difference information derived from the region outside the tissue discriminated by the discrimination unit, and generates the relative position information by correcting the derived position information. Microscope system.

6. An illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; a phase difference acquisition unit that acquires phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; an objective lens that focuses the line illumination onto the specimen; a derivation unit that derives relative position information between the objective lens and the specimen based on the phase difference information, and that registers in a focus map, in association with each of the positions in the first direction and the second direction and a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, based on the relative position information; a discrimination unit that discriminates whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with the derivation unit derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region and the region outside the tissue, in accordance with a proportion of the tissue region in the region irradiated with the line illumination determined by the discrimination unit, and generates the relative position information by correcting the derived position information, or derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region, and generates the relative position information by correcting the derived position information. Microscope system.

7. 1. An imaging method executed by a computer for controlling a measurement unit including an illumination unit that irradiates a line illumination parallel to a first direction, a stage that supports a specimen and is movable in a second direction perpendicular to the first direction, and an objective lens that focuses the line illumination on the specimen, the method comprising: an acquisition step of acquiring phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; deriving relative position information between the objective lens and the specimen based on the phase difference information; moving at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; a determining step of determining whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Including, The acquiring step acquires a phase difference of the light image based on the light image originating from the region outside the tissue identified in the distinguishing step, and corrects the acquired phase difference to acquire the phase difference information. Imaging method.

8. An imaging method executed by a computer for controlling a measurement unit including an illumination unit that irradiates line illumination parallel to a first direction, a stage that supports a specimen and is movable in a second direction perpendicular to the first direction, and an objective lens that focuses the line illumination on the specimen, acquiring phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; a derivation step of deriving relative position information between the objective lens and the specimen based on the phase difference information; moving at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; a determining step of determining whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Including, The deriving step derives relative position information between the objective lens and the specimen based on the phase difference information derived from the region outside the tissue identified in the determining step, and generates the relative position information by correcting the derived position information. Imaging method.

9. An imaging method executed by a computer for controlling a measurement unit including an illumination unit that irradiates line illumination parallel to a first direction, a stage that supports a specimen and is movable in a second direction perpendicular to the first direction, and an objective lens that focuses the line illumination on the specimen, acquiring phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; a derivation step of deriving relative position information between the objective lens and the specimen based on the phase difference information; moving at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; a determining step of determining whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Including, the deriving step derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region and the region outside the tissue, depending on the proportion of the tissue region in the region irradiated with the line illumination determined in the determining step, and generates the relative position information by correcting the derived position information, or derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region, and generates the relative position information by correcting the derived position information. Imaging method.

10. An imaging method executed by a computer for controlling a measurement unit including an illumination unit that irradiates line illumination parallel to a first direction, a stage that supports a specimen and is movable in a second direction perpendicular to the first direction, and an objective lens that focuses the line illumination on the specimen, an acquisition step of acquiring phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; deriving relative position information between the objective lens and the specimen based on the phase difference information, and registering in a focus map, in association with each of the positions in the first direction and the second direction and a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, based on the relative position information; a determining step of determining whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with The acquiring step acquires a phase difference of the light image based on the light image originating from the region outside the tissue identified in the distinguishing step, and corrects the acquired phase difference to acquire the phase difference information. Imaging method.

11. An imaging method executed by a computer for controlling a measurement unit including an illumination unit that irradiates line illumination parallel to a first direction, a stage that supports a specimen and is movable in a second direction perpendicular to the first direction, and an objective lens that focuses the line illumination on the specimen, acquiring phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; a derivation step of deriving relative position information between the objective lens and the specimen based on the phase difference information, and registering in a focus map, in association with each of the positions in the first direction and the second direction and a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, based on the relative position information; a determining step of determining whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with The deriving step derives relative position information between the objective lens and the specimen based on the phase difference information derived from the region outside the tissue identified in the determining step, and generates the relative position information by correcting the derived position information. Imaging method.

12. An imaging method executed by a computer for controlling a measurement unit including an illumination unit that irradiates line illumination parallel to a first direction, a stage that supports a specimen and is movable in a second direction perpendicular to the first direction, and an objective lens that focuses the line illumination on the specimen, acquiring phase difference information of an image of light emitted from the sample by being irradiated with the line illumination; a derivation step of deriving relative position information between the objective lens and the specimen based on the phase difference information, and registering in a focus map, in association with each of the positions in the first direction and the second direction and a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, based on the relative position information; a determining step of determining whether at least a part of an area irradiated with the line illumination is a tissue area where tissue of the specimen is present or a non-tissue area where no tissue is present, based on luminance information of light emitted from the specimen; Equipped with the deriving step derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region and the region outside the tissue, depending on the proportion of the tissue region in the region irradiated with the line illumination determined in the determining step, and generates the relative position information by correcting the derived position information, or derives relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region, and generates the relative position information by correcting the derived position information. Imaging method.

13. An imaging device including a measurement unit and software used to control the operation of the measurement unit, The software is installed in an imaging device, The measurement unit includes: an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; an objective lens that focuses the line illumination onto the specimen; Equipped with The software comprises: acquiring phase difference information of an image of light emitted from the specimen by irradiating the specimen with the line illumination; deriving relative position information between the objective lens and the specimen based on the phase difference information; moving at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; determining whether at least a portion of the region irradiated with the line illumination is a tissue region where tissue of the specimen is present or a non-tissue region where no tissue is present, based on luminance information of the light emitted from the specimen; The software comprises: a phase difference of the light image is acquired based on the determined light image originating from the region outside the tissue, and the acquired phase difference is corrected to acquire the phase difference information. Imaging device.

14. An imaging device comprising a measurement unit and software used to control the operation of the measurement unit, The software is installed in an imaging device, The measurement unit includes: an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; an objective lens that focuses the line illumination onto the specimen; Equipped with The software comprises: acquiring phase difference information of an image of light emitted from the specimen by irradiating the specimen with the line illumination; deriving relative position information between the objective lens and the specimen based on the phase difference information; moving at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; determining whether at least a portion of the region irradiated with the line illumination is a tissue region where tissue of the specimen is present or a non-tissue region where no tissue is present, based on luminance information of the light emitted from the specimen; The software comprises: deriving relative position information between the objective lens and the specimen based on the phase difference information derived from the region outside the tissue, and generating the relative position information by correcting the derived position information; Imaging device.

15. An imaging device comprising a measurement unit and software used to control the operation of the measurement unit, The software is installed in an imaging device, The measurement unit includes: an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; an objective lens that focuses the line illumination onto the specimen; Equipped with The software comprises: acquiring phase difference information of an image of light emitted from the specimen by irradiating the specimen with the line illumination; deriving relative position information between the objective lens and the specimen based on the phase difference information; moving at least one of the objective lens and the stage in a third direction perpendicular to each of the first direction and the second direction based on the relative position information; determining whether at least a portion of the region irradiated with the line illumination is a tissue region where tissue of the specimen is present or a non-tissue region where no tissue is present, based on luminance information of the light emitted from the specimen; The software comprises: deriving relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region and the region outside the tissue, according to the determined proportion of the tissue region in the region irradiated with the line illumination, and correcting the derived position information to generate the relative position information, or deriving relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region, and correcting the derived position information to generate the relative position information. Imaging device.

16. An imaging device comprising a measurement unit and software used to control the operation of the measurement unit, The software is installed in an imaging device, The measurement unit includes: an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; an objective lens that focuses the line illumination onto the specimen; Equipped with The software comprises: acquiring phase difference information of an image of light emitted from the specimen by irradiating the specimen with the line illumination; based on the phase difference information, deriving relative position information between the objective lens and the specimen, and based on the relative position information, correlating each of the positions in the first direction and the second direction with a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, and registering the corresponding positions in a focus map; determining whether at least a portion of the region irradiated with the line illumination is a tissue region where tissue of the specimen is present or a non-tissue region where no tissue is present, based on luminance information of the light emitted from the specimen; The software comprises: a phase difference of the light image is acquired based on the determined light image originating from the region outside the tissue, and the acquired phase difference is corrected to acquire the phase difference information. Imaging device.

17. An imaging device comprising a measurement unit and software used to control the operation of the measurement unit, The software is installed in an imaging device, The measurement unit includes: an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; an objective lens that focuses the line illumination onto the specimen; Equipped with The software comprises: acquiring phase difference information of an image of light emitted from the specimen by irradiating the specimen with the line illumination; based on the phase difference information, deriving relative position information between the objective lens and the specimen, and based on the relative position information, correlating each of the positions in the first direction and the second direction with a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, and registering the corresponding positions in a focus map; determining whether at least a portion of the region irradiated with the line illumination is a tissue region where tissue of the specimen is present or a non-tissue region where no tissue is present, based on luminance information of the light emitted from the specimen; The software comprises: deriving relative position information between the objective lens and the specimen based on the phase difference information derived from the region outside the tissue, and generating the relative position information by correcting the derived position information; Imaging device.

18. An imaging device comprising a measurement unit and software used to control the operation of the measurement unit, The software is installed in an imaging device, The measurement unit includes: an illumination unit that emits line illumination parallel to a first direction; a stage that supports the specimen and is movable in a second direction perpendicular to the first direction; an objective lens that focuses the line illumination onto the specimen; Equipped with The software comprises: acquiring phase difference information of an image of light emitted from the specimen by irradiating the specimen with the line illumination; based on the phase difference information, deriving relative position information between the objective lens and the specimen, and based on the relative position information, correlating each of the positions in the first direction and the second direction with a displacement amount of a focus position of the objective lens in a third direction perpendicular to each of the first direction and the second direction, and registering the corresponding positions in a focus map; determining whether at least a portion of the region irradiated with the line illumination is a tissue region where tissue of the specimen is present or a non-tissue region where no tissue is present, based on luminance information of the light emitted from the specimen; The software comprises: deriving relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region and the region outside the tissue, according to the determined proportion of the tissue region in the region irradiated with the line illumination, and correcting the derived position information to generate the relative position information, or deriving relative position information between the objective lens and the specimen based on the phase difference information derived from the tissue region, and correcting the derived position information to generate the relative position information. Imaging device.

Images