Lens housing member and laser irradiation device

Abstract

A lens housing member is provided that can further suppress adhesion of fumes to optical components, reduce temperature rise in the optical components, and prevent distortion, deformation, and / or breakage of the optical components. [Solution] The lens holding member 3 of the present invention has a main body portion 31 that can hold a lens F used for irradiating with a laser L, and is a lens holding member 3 that can pass the laser L through the main body portion 31 from the top surface 31T to the bottom surface 31B, and further has a gas introduction portion 32 that can introduce a first gas G1 toward a space C defined by the main body portion 31, the bottom surface 31B, the left side surface 31L, and the right side surface 31R, and a bottom side opening O1 is provided on the bottom surface 31B, and the first gas G1 can pass from the space C to the outside of the lens holding member 3 through the bottom side opening O1.

Description

[Technical field]

[0001] The present invention relates to a lens holding member. [Background technology]

[0002] It is known that a laser is irradiated through a lens or other optical component to perform laser processing on an object. In this case, residue evaporated from the object turns into fumes (dust) and may adhere to the lens or other optical components. If fumes adhere to optical components, the adhered fumes may absorb the laser and adversely affect the laser irradiation. Therefore, there is a demand for a method to prevent fumes from adhering to optical components.

[0003] Patent Document 1 proposes a method for preventing fume adhesion to optical components. This method includes the steps of preparing a base substrate on which a piezoelectric element is mounted and a joint portion is arranged so as to surround the piezoelectric element in a plan view of the piezoelectric element, a lid, an energy beam source, and an energy beam transmitting portion, placing the lid on the joint portion so as to accommodate the piezoelectric element between the base substrate and the lid, and irradiating an energy beam that has passed through the energy beam transmitting portion to a portion of the lid overlapping the joint portion, thereby welding the base substrate and the lid. The preparing step is characterized in that the energy beam transmitting portion is a condensing lens, and the welding step is characterized in that the lid is placed in an atmosphere with a higher pressure than atmospheric pressure. According to the method described in Patent Document 1, the mean free path, which is the distance over which gas molecules that form fumes, etc. fly in an atmosphere with a higher pressure than atmospheric pressure, can be shortened, and the amount of fumes adhering to the energy beam transmitting portion, which is an optical component, can be reduced. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2015-220624 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, the mean free path that can be shortened by the technology described in Patent Document 1 is the average value of the free path, which is the distance that particles such as gas molecules can travel without being hindered by scattering from a scattering source. Therefore, some of the particles may travel a distance that exceeds the mean free path. Although the technology described in Patent Document 1 can shorten the mean free path of gas molecules that form fumes, etc., and reduce the amount of fumes that adhere to optical components, gas molecules that form fumes, etc., that have traveled a distance that exceeds the mean free path may reach the optical components, form fumes, and adhere to the optical components. Therefore, the technology described in Patent Document 1 has room for further improvement in reducing the gas molecules that form fumes, etc., reaching optical components and suppressing the adhesion of fumes to optical components.

[0006] Furthermore, when the laser output is high and / or the laser irradiation time is long, the temperature of the optical components may rise. When the temperature of the optical components rises, the heat may cause distortion, deformation, and / or damage to the optical components. Therefore, the technology described in Patent Document 1 has room for improvement in terms of reducing the temperature rise of the optical components and preventing distortion, deformation, and / or damage to the optical components.

[0007] The present invention has been made in consideration of the above circumstances, and its object is to provide a lens holding member that can further suppress adhesion of fumes to optical components, reduce temperature rise in the optical components, and prevent distortion, deformation, and / or damage to the optical components. [Means for solving the problem]

[0008] As a result of intensive research into solving the above problems, the inventors have found that the above object can be achieved by providing a lens housing section capable of housing a lens used in laser irradiation and allowing the laser to pass from the top surface section to the bottom surface section, and a gas inlet section capable of introducing gas, and by providing an opening in the bottom surface section through which the gas can pass toward the outside, and have thus completed the present invention. Specifically, the present invention provides the following.

[0009] A first aspect of the invention provides a lens holding member including a lens holding section capable of holding a lens used for laser irradiation, and allowing the laser to pass through the lens holding section from a top surface portion to a bottom surface portion, the lens holding member further including a gas inlet section capable of introducing gas toward a space defined by the lens holding section, the bottom surface portion, and a side surface portion, the bottom surface portion having an opening through which the gas can pass from the space to an outside of the lens holding member through the opening.

[0010] In processing where a laser is irradiated onto a target object, residues evaporated from the target object turn into fumes (dust) and may adhere to lenses and other optical components. If fumes adhere to optical components, they may absorb the laser and adversely affect the laser irradiation.

[0011] According to the first aspect of the invention, by housing the lens in the lens housing portion, it is possible to prevent fumes from adhering to the lens.

[0012] However, since the laser can pass from the top surface to the bottom surface through the lens housing part and an opening is provided on the bottom surface, when the lens is housed in the lens housing part, the laser can be irradiated onto the target object through the opening. This opening can cause fumes to enter the space defined inside the lens housing member from the outside of the lens housing member and adhere to the lens.

[0013] According to the first aspect of the invention, the gas introduced into the space defined inside becomes a gas flow passing through the opening from the space toward the outside of the lens holding member. This gas flow pushes fumes near the opening outside the lens holding member in a direction away from the opening. This can prevent the presence of the opening from being a cause of fumes adhering to the lens.

[0014] In addition, according to the first aspect of the invention, by suppressing adhesion of fumes to the stored lens, the fumes adhering to the stored lens can absorb the laser, and the temperature rise of the stored lens can be reduced. By reducing the temperature rise of the stored lens, distortion, deformation and / or damage of the lens due to heat can be prevented.

[0015] Therefore, according to the first aspect of the invention, it is possible to provide a lens holding member that can further suppress adhesion of fumes to optical components, reduce temperature rise in the optical components, and prevent distortion, deformation, and / or damage to the optical components.

[0016] A second feature of the invention is the first feature of the invention, which provides a lens holding member, in which the temperature of the gas introduced into the space is lower than the temperature of the space when the laser is irradiated.

[0017] According to the second aspect of the invention, the temperature of the space when the laser is irradiated can be reduced, and as a result, the temperature rise of the lens housed adjacent to the space can be reduced. By reducing the temperature rise of the lens housed, it is possible to prevent distortion, deformation and / or damage of the lens due to heat.

[0018] A third feature of the invention provides the lens holding member according to the first or second feature of the invention, in which the gas is an inert gas.

[0019] When a laser is irradiated in an atmosphere containing oxygen, such as an air atmosphere, combustible materials near the lens may ignite due to the high temperature caused by the laser irradiation. If combustible materials near the lens ignite, the temperature of the lens may rise.

[0020] According to the third aspect of the invention, the oxygen concentration in the space is reduced by the inert gas introduced into the space, and it is possible to prevent combustible materials in the space from igniting due to high temperatures caused by laser irradiation. Therefore, it is possible to reduce the temperature rise of the housed lens that would otherwise be caused by the ignition of combustible materials. By reducing the temperature rise of the housed lens, it is possible to prevent distortion, deformation and / or damage of the lens due to heat.

[0021] A fourth feature of the invention is the invention according to any one of the first to third features, and provides a lens holding member further comprising a gas delivery section provided in the vicinity of the bottom surface section and capable of delivering gas in a direction approximately perpendicular to the flow direction of the gas.

[0022] According to the fourth aspect of the invention, in addition to the gas flow, the gas sent out in a direction approximately perpendicular to the gas flow direction (a direction including an angle with the gas flow direction of 70 degrees or more and 110 degrees or less) pushes the fumes, causing the fumes to pass through the opening and enter the space, preventing the fumes from adhering to the lens.

[0023] Outside the lens housing member, fumes in a position where they can absorb the laser irradiated through the opening can absorb the laser and have a negative effect on the laser irradiation. When a laser is irradiated to an object through an opening provided in the bottom part, the laser and gas pass through the opening from the space side to the outside side, so the direction of the laser passing through the opening and the direction of the gas flow can be approximately the same in the vicinity of the opening. Therefore, when fumes in a position near the opening among the positions where they can absorb the laser outside the lens housing member are pushed and moved only by the force of the gas flow, the position of the fumes after the movement can be a position where they can absorb the laser. Therefore, there is room for further improvement in reducing the negative effect of fumes on the laser irradiation by moving fumes in a position where they can absorb the laser outside the lens housing member to a position where they do not absorb the laser.

[0024] According to the fourth aspect of the invention, the gas sent in a direction substantially perpendicular to the gas flow direction can push fumes that are in a position where they can absorb the laser irradiated through the opening in a direction substantially perpendicular to the direction of the laser passing through the opening, and move them to a position where they do not absorb the laser. Therefore, the adverse effects of fumes on the laser irradiation can be further reduced.

[0025] Therefore, according to the fourth aspect of the invention, a lens holding member can be provided that can further suppress adhesion of fumes to optical components, reduce temperature rise in the optical components, and prevent distortion, deformation, and / or damage to the optical components.

[0026] A fifth feature of the invention is the invention according to any one of the first to fourth features, providing a lens holding member to which a laser irradiation device can be attached on the top surface portion.

[0027] When the focal length of the lens and the distance from the lens to the object match, the effect of heating by the laser irradiation is maximized. Also, when the focal length of the lens and the distance from the lens to the object do not match, the effect of heating by the laser irradiation is small. Therefore, if the distance to the object and / or the shape of the object differ, the focal length of the lens suitable for laser irradiation may also differ. Therefore, there is a demand for replacing the lens according to the distance to the object and / or the shape of the object. When the lens is integrally configured with a means for suppressing adhesion of fumes to optical components and reducing the temperature rise of the optical components, the labor and the like related to the lens replacement may increase. Therefore, in order to reduce the labor and the like related to the lens replacement, there is a demand for retrofitting the lens with a means for suppressing adhesion of fumes to optical components and reducing the temperature rise of the optical components. The technology described in Patent Document 1 is configured to include a condenser lens and an energy beam transmission part, which are optical components, and there is still room for further improvement in retrofitting the means for suppressing adhesion of fumes to optical components and reducing the temperature rise of the optical components to existing optical components.

[0028] According to the fifth feature of the invention, a laser irradiation device can be attached to the lens holding member. The laser irradiation device attached to the top surface portion is attached to the side of the top surface portion opposite the bottom surface portion in which the opening is provided. This allows the laser irradiation device to be attached without interfering with the laser passing through the opening from the top surface portion toward the bottom surface portion and / or the gas passing through the opening from the space toward the outside of the lens holding member. Therefore, the lens holding member can be retrofitted to the laser irradiation device without interfering with the laser and / or gas passing through the opening.

[0029] A sixth feature of the invention is the invention according to any one of the first to fifth features, providing a lens holding member, wherein the bottom surface portion has a structure capable of dispersing reflected laser light reflected at an object to be irradiated with the laser.

[0030] When the laser light reflected from the target of laser irradiation travels toward the lens holding member, the reflected laser light may increase the temperature of the lens holding member. The lens holding member with an increased temperature may heat the lenses held therein by radiant heat and / or thermal conduction from the lens holding member, thereby increasing the temperature of the lenses.

[0031] According to the sixth aspect of the invention, the reflected laser is dispersed by the bottom surface portion, and the temperature rise of the lens holding member caused by the reflected laser can be reduced. This reduces the temperature rise of the held lens. By reducing the temperature rise of the held lens, distortion, deformation and / or damage of the lens caused by heat can be prevented. Effect of the Invention

[0032] According to the present invention, it is possible to provide a lens holding member that can further suppress adhesion of fumes to optical components, reduce temperature rise in the optical components, and prevent distortion, deformation, and / or damage to the optical components. [Brief description of the drawings]

[0033] [Figure 1] FIG. 1 is a schematic front view of a laser irradiation device 1 according to an embodiment of the present invention. [Diagram 2] FIG. 2 is an enlarged schematic view of the lens holding member 3 in the laser irradiation device 1, and is a schematic front view of the lens holding member 3. As shown in FIG. [Diagram 3] FIG. 3 is a schematic plan view of the lens holding member 3. As shown in FIG. [Figure 4] FIG. 4 is a schematic cross-sectional view of the lens holding member 3 taken along the line AA in FIG. [Diagram 5] FIG. 5 is a schematic bottom view of the lens holding member 3. As shown in FIG. [Figure 6] FIG. 6 is a schematic bottom view of a lens holding member 3 according to another example different from that shown in FIG. [Figure 7] FIG. 7 is a schematic left side view of the lens holding member 3. As shown in FIG. [Figure 8] FIG. 8 is an enlarged schematic diagram of the nozzle 4 in the laser irradiation device 1. As shown in FIG. [Figure 9] FIG. 9 is a schematic partial cross-sectional view of the nozzle 4 taken along the line BB in FIG. [Figure 10] FIG. 10 is a diagram showing an example of the structure 42. As shown in FIG. [Figure 11] FIG. 11 is a diagram showing an example of the positional relationship between the lens holding member 3 and the nozzle 4 when irradiating the laser. [Figure 12] FIG. 12 is a schematic front view showing an example of a mobile laser irradiation system S according to this embodiment. [Figure 13] FIG. 13 is a schematic front view showing an example of the portable laser irradiation system P according to this embodiment. [Figure 14] FIG. 14 is a schematic diagram showing an example of a method of using the laser irradiation device 1. As shown in FIG. [Figure 15] FIG. 15 is an enlarged view of the periphery of the laser L in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0034] Hereinafter, an example of a preferred embodiment of the present invention will be described with reference to the drawings. Note that this is merely an example, and the technical scope of the present invention is not limited to this example.

[0035] <<Laser irradiation device 1>> 1 is a schematic front view of a laser irradiation device 1 according to an embodiment of the present invention. The laser irradiation device 1 includes a laser irradiation member 2 capable of irradiating a laser beam toward an irradiation target, a lens housing member 3 capable of housing a lens and allowing the laser beam irradiated from the laser irradiation member 2 to pass through the lens, and a nozzle 4 capable of sucking in fumes (dust) that are residues evaporated from the laser irradiation target.

[0036] The weight of the laser irradiation device 1 is not particularly limited. The lower limit of the weight of the laser irradiation device 1 is preferably 1 kg or more, more preferably 1.5 kg or more, and even more preferably 2 kg or more. By setting the lower limit of the weight of the laser irradiation device 1 as described above, the stability of the laser irradiation device 1 during laser irradiation can be improved.

[0037] The upper limit of the weight of the laser irradiation device 1 is preferably 10 kg or less, more preferably 8 kg or less, and further preferably 6 kg or less. By setting the upper limit of the weight of the laser irradiation device 1 as described above, it becomes easy to hold the laser irradiation device 1 by hand.

[0038] <Laser irradiation component 2> The laser irradiation member 2 is not particularly limited as long as it is a device capable of irradiating a laser to an irradiation target through a lens. In this embodiment, the laser irradiation member 2 includes a holding section 21 that allows a user to hold the laser irradiation member 2, an operation section 22 that allows a user to perform operations related to laser irradiation, a transmission section 23 that can transmit a laser from an external laser supply section in response to an operation of the operation section 22, and an irradiation section 24 that can irradiate the laser transmitted from the transmission section 23 toward an irradiation target. Although not an essential aspect, the laser irradiation member 2 preferably includes a lens exchange operation section 25 that can provide an operation means for exchanging a lens used for laser irradiation. By providing the lens exchange operation section 25 to the laser irradiation member 2, a user of the laser irradiation member 2 can exchange a lens used for laser irradiation through an operation means provided by the lens exchange operation section 25.

[0039] [Holding part 21] Although not an essential aspect, it is preferable that the laser irradiating member 2 includes a holding part 21 that provides a user with a means for holding the laser irradiating member 2. By having the laser irradiating member 2 include the holding part 21 that provides a user with a means for holding the laser irradiating member 2, the user can hold and move the laser irradiating member 2 via the holding part 21, and irradiate the irradiation target with a laser. Thereby, for example, a user holding the laser irradiating member 2 can move the laser irradiating member 2 so that the laser irradiation point is on the irradiation target, and irradiate the irradiation target with a laser.

[0040] [Operation unit 22] Although not an essential aspect, it is preferable that the laser irradiation member 2 includes an operation unit 22 capable of providing an operation means related to laser irradiation. By including the operation unit 22 capable of providing an operation means related to laser irradiation in the laser irradiation member 2, a user of the laser irradiation member 2 can perform operations related to laser irradiation via the operation means provided by the operation unit 22.

[0041] The operation means for irradiating the laser is not particularly limited, and may be, for example, an operation means using a switch of the conventional technology exemplified by a changeover switch, a toggle switch, a slide switch, a rotary switch, a lever switch, a key switch, a foot switch, an electronic switch, etc., and / or an operation means using a touch panel, etc. When the operation means has an operation means using a switch, the number of switches is not particularly limited, and may include any number of switches equal to or greater than one.

[0042] The operations provided by the operation unit 22 are not particularly limited as long as they are operations related to laser irradiation, and examples of such operations include an operation of switching between an irradiation state in which the laser is irradiated and a non-irradiation state in which the laser is not irradiated, an operation of changing the amount of laser irradiation, an operation of replacing a lens used for laser irradiation, an operation of stopping laser irradiation, and / or an operation related to the laser irradiation position. The operations related to the laser irradiation position are not particularly limited. When the laser irradiation point is configured to be capable of linear movement on the focal plane, the operations related to the laser irradiation position may include an operation of changing the path (also referred to as the irradiation pattern) along which the laser irradiation point moves on the focal plane.

[0043] When the operation means has an operation means using a touch panel, it is preferable that the touch panel can display information on whether or not the laser is being irradiated, the amount of laser irradiation, the laser irradiation pattern, the time elapsed since the start of laser irradiation, the voltage supplied to the laser irradiation device 1, the power consumed by the laser irradiation device 1, the temperature related to the laser irradiation device 1, information on abnormalities and malfunctions of the laser irradiation device 1, the amount and intensity of reflected laser, and information on laser irradiation exemplified by the lens used for laser irradiation, etc. By being able to display information on laser irradiation on the touch panel, the user of the laser irradiation member 2 can grasp the information on laser irradiation.

[0044] When the irradiation unit 24 includes an irradiation position designation unit (described later) that indicates the laser irradiation position, and the operation provided by the operation unit 22 includes an operation of switching between an irradiation state in which the laser is irradiated and a non-irradiation state in which the laser is not irradiated, the operation means related to the operation of switching between the irradiation state in which the laser is irradiated and the non-irradiation state in which the laser is not irradiated provided by the operation unit 22 preferably includes a first switching operation of switching from an irradiated state to an irradiation position designation state in which the irradiation position is designated, and a second switching operation of switching from the irradiation position designation state to an irradiation state. By including the first and second switching operations, the user of the laser irradiation device 1 can start irradiating the laser by performing the second switching operation in a state in which the laser irradiation position is designated by the first switching operation. Therefore, the user can more reliably irradiate the irradiation target with the laser by using the laser irradiation position designated by the irradiation position designation unit.

[0045] [Transmission section 23] The transmission unit 23 is not particularly limited as long as it is configured to be capable of transmitting laser from a laser supply unit configured separately from the laser irradiation member 2, and may be, for example, the transmission unit 23 including an optical fiber capable of transmitting laser.

[0046] Although not essential, it is preferable that the transmission unit 23 is configured to be capable of supplying a coolant capable of cooling the irradiation unit 24. By configuring the transmission unit 23 to be capable of supplying a coolant capable of cooling the irradiation unit 24, the temperature rise of the irradiation unit 24 can be reduced. This reduces the temperature rise of the lens arranged near the irradiation unit 24, and can prevent distortion, deformation, and / or damage of the lens due to heat. Furthermore, in the case where the irradiation unit 24 includes a mirror, by configuring the transmission unit 23 to be capable of supplying a coolant capable of cooling the irradiation unit 24, the temperature rise of the mirror can be reduced, and performance deterioration, deformation, and / or damage of the mirror due to heat can be prevented. The coolant is not particularly limited, and may be, for example, a gas (e.g., air at room temperature or lower, or dry air at room temperature or lower) and / or a liquid (e.g., water at room temperature or lower, or purified water at room temperature or lower), etc., at a temperature lower than the temperature of the irradiation unit 24 when irradiating the laser. The means for supplying the coolant is not particularly limited and may be any of the conventional means for supplying the coolant exemplified by pipes, hoses and tubes.

[0047] Although not an essential aspect, it is preferable that the transmission unit 23 is configured to be capable of supplying power to the irradiation unit 24. Since the transmission unit 23 is configured to be capable of supplying power to the irradiation unit 24, for example, when the irradiation unit 24 includes a mirror configured to be capable of rotational movement, power can be supplied to a motor or the like that rotates the mirror. The means by which the transmission unit 23 supplies power to the irradiation unit 24 is not particularly limited, and may be, for example, a means for supplying power via an electric wire that transmits power supplied from a power source.

[0048] Although not essential, it is preferable that the transmission part 23 is configured to be capable of supplying the first gas G1 to the gas introduction part 32 (see FIG. 2) described later. The fact that the transmission part 23 is configured to be capable of supplying the first gas G1 to the gas introduction part 32 will be described in more detail in the description of the gas introduction part 32 given later.

[0049] Although not essential, it is preferable that the transmission unit 23 is configured to be capable of supplying the second gas G2 to the gas delivery unit 33 (see FIG. 2) described later. The fact that the transmission unit 23 is configured to be capable of supplying the second gas G2 to the gas delivery unit 33 will be described in more detail in the description of the gas delivery unit 33 given later.

[0050] The total length of the transmission section 23 is not particularly limited, but is preferably 100 meters or less, more preferably 80 meters or less, and even more preferably 60 meters or less. By setting the upper limit of the total length of the transmission section 23 as described above, attenuation of the laser transmitted through the transmission section 23 can be prevented.

[0051] [Irradiation unit 24] The irradiation unit 24 is not particularly limited as long as it is capable of irradiating a laser through a lens, and may be any of various conventional laser irradiating members.

[0052] The irradiation unit 24 preferably includes a member configured to be capable of irradiating a laser transmitted from a laser supply unit configured separately from the laser irradiation member 2. Since the irradiation unit 24 is a member configured to be capable of irradiating a laser transmitted from a laser supply unit configured separately from the laser irradiation member 2, the laser irradiation member 2 can be configured without including a laser oscillator or the like that supplies the laser. As a result, even if there is a limit to the size and / or weight of the laser irradiation member 2, such as when configuring a laser irradiation member 2 that is held by a user, the laser irradiation member 2 can be configured to be capable of irradiating a high-output laser that requires a relatively large laser oscillator or the like.

[0053] [mirror] When the lens accommodated in the lens accommodation member 3 is an fθ lens, the irradiation unit 24 preferably includes a mirror (not shown) configured to be capable of rotational motion, such as a galvanometer mirror and a polygon mirror, and is configured so that the mirror and the lens, which is an fθ lens, work together to enable the laser irradiation point to move linearly on the focal plane. This allows the linearly moving laser to be irradiated onto an irradiation target placed on the focal plane. Therefore, the linearly moving laser can be irradiated onto an irradiation target without moving the laser irradiation member 2, the lens, and / or the irradiation target.

[0054] When the irradiation unit 24 includes a mirror, it is preferable that the irradiation unit 24 can select a path (also referred to as an irradiation pattern) along which the laser irradiation point moves on the focal plane from an irradiation pattern group including two or more irradiation patterns. Since the irradiation unit 24 can select a laser irradiation pattern from an irradiation pattern group, it is possible to select an irradiation pattern according to the irradiation target and / or the laser irradiation processing to be performed on the irradiation target, and irradiate the irradiation target with the laser.

[0055] The irradiation patterns included in the irradiation pattern group are not particularly limited. The irradiation pattern group may include two or more of the following irradiation patterns: an approximately straight line irradiation pattern, an irradiation pattern including a combination of two or more straight lines (e.g., an approximately rectangular irradiation pattern), an approximately circular irradiation pattern, an approximately elliptical irradiation pattern, an irradiation pattern including a curve (e.g., a waveform irradiation pattern), and an irradiation pattern in which the laser irradiation point does not move. The irradiation pattern group may include an irradiation pattern that fills the inside of the above-mentioned irradiation pattern in addition to the above-mentioned irradiation pattern. The irradiation pattern group may include two or more irradiation patterns that differ in the size of the irradiation pattern, the aspect ratio of the irradiation pattern, the thickness of the irradiation pattern, the speed at which the laser irradiation point moves on the focal plane, etc. By including the above-mentioned irradiation pattern in the irradiation pattern group, the irradiation target can be irradiated with a laser using an irradiation pattern corresponding to the irradiation target and / or the laser irradiation processing to be performed on the irradiation target.

[0056] [Irradiation position indicator] Although not an essential aspect, it is preferable that the irradiation unit 24 includes an irradiation position indicating unit (not shown) that indicates the laser irradiation position. By including an irradiation position indicating unit that indicates the laser irradiation position in the irradiation unit 24, it is possible to easily irradiate the irradiation target with the laser. The irradiation position indicating unit is not particularly limited as long as it is an indicating unit that indicates the laser irradiation position, and may be, for example, a laser pointer that indicates the laser irradiation position with another laser.

[0057] [Irradiation target] The irradiation target to which the laser is irradiated is not particularly limited. The irradiation target is not particularly limited, and examples thereof include objects exemplified by molds, devices, vehicles, buildings, rails, and the like, weld lines on the surface of objects, and attachments attached to the surface of objects. The material of the irradiation target is not particularly limited, and examples thereof include metals exemplified by iron, iron alloys, copper, copper alloys, aluminum, aluminum alloys, nickel, and nickel alloys, nonmetals exemplified by concrete, gypsum, and wood, oxides of metals, organic matter, and may include a plurality of materials. The attachment is not particularly limited, and examples thereof include impurities, painted surfaces, organisms exemplified by lichens and bacteria, pollutants exemplified by lipids, toxic substances, radioactive substances, coating layers, and oxide layers. The attachment is preferably an attachment having a relatively high laser absorption rate. By the attachment being an attachment having a relatively high laser absorption rate, the attachment can be efficiently heated by irradiation with the laser and evaporated and / or peeled off from the material surface.

[0058] [Lens exchange operation unit 25] Although not essential, the laser irradiation member 2 preferably includes a lens exchange operation unit 25 that provides an operation means for exchanging the lens used for laser irradiation. By including the lens exchange operation unit 25 in the laser irradiation member 2, a user using the laser irradiation device 1 can exchange the lens used for laser irradiation without performing the troublesome procedure of removing the lens and attaching another lens. In addition, since the user can avoid touching the periphery of the lens while exchanging the lens, it is possible to prevent the irradiated laser from damaging the user's hand. The lens exchange operation unit 25 preferably has a display means capable of displaying information about the lens used for laser irradiation. By including the lens exchange operation unit 25 with a display means capable of displaying information about the lens used for laser irradiation, the user can irradiate the laser after checking the information about the lens used for laser irradiation.

[0059] <Lens housing member 3> Fig. 2 is an enlarged schematic view of the lens holding member 3 in the laser irradiation device 1, and is a schematic front view of the lens holding member 3. Fig. 3 is a schematic plan view of the lens holding member 3, Fig. 4 is a schematic cross-sectional view of the lens holding member 3 taken along line AA in Fig. 3, Fig. 5 is a schematic bottom view of the lens holding member 3, and Fig. 7 is a schematic left side view of the lens holding member 3. Fig. 6 is a schematic bottom view of the lens holding member 3 according to another example different from that shown in Fig. 5. The lens holding member 3 in this embodiment will be described below with reference to Figs. 2 to 7.

[0060] First, refer to Fig. 2. In this embodiment, the lens holding member 3 includes a main body portion 31 capable of holding a lens, a gas introduction portion 32 capable of introducing a first gas G1 into the inside of the main body portion 31, and a gas delivery portion 33 capable of delivering a second gas G2 in a direction FD2 substantially perpendicular to a flow direction FD1 of the first gas G1. The lens holding member 3 is configured to allow a laser to pass from a top surface 31T of the main body portion 31 toward a bottom surface 31B.

[0061] [Main body portion 31] Next, refer to FIGS. 2 and 3. As shown in FIGS. 2 and 3, the main body 31 includes a top surface side main body 311 provided on the side close to the top surface 31T and having a substantially truncated conical shape with a hollow interior, and a bottom surface side main body 312 provided on the side close to the bottom surface 31B and having a substantially cup shape with a left side surface 31L, a right side surface 31R, and a bottom surface 31B.

[0062] The main body 31 is configured to be able to accommodate a lens used for laser irradiation and to allow the laser irradiated from the top surface 31T to the bottom surface 31B of the lens accommodating member 3 to pass through, and is not particularly limited as long as a bottom surface side opening O1 (see FIG. 3) is provided in the bottom surface 31B.

[0063] By accommodating the lens in the main body 31, the fumes evaporated from the irradiation target and moving near the lens accommodating member 3 can pass through the vicinity of the bottom surface 31B before reaching the vicinity of the lens and adhere to the bottom surface 31B. Thereby, it is possible to suppress the adhesion of fumes to the lens. Prevention of fumes entering the inside of the lens accommodating member 3 from the bottom surface side opening O1 will be described in more detail later with reference to FIG. 4.

[0064] The material of the main body 31 is not particularly limited, and may be various materials including metals exemplified by iron, iron alloys, copper, copper alloys, aluminum, aluminum alloys, nickel, and nickel alloys, resins exemplified by polyimide resins, and / or ceramics. Among them, it is preferable that the material of the main body 31 contains a metal. By the material of the main body 31 containing a metal, it is possible to prevent breakage and / or ignition of the main body 31 when the main body 31 becomes hot due to laser irradiation. Among metals, it is particularly preferable that the material of the main body 31 contains a metal having corrosion resistance exemplified by stainless steel and copper. By the material of the main body 31 containing a metal having corrosion resistance, it is possible to prevent oxidation and corrosion due to oxidation of the main body 31 when the main body 31 becomes hot due to laser irradiation.

[0065] [Lens] Here, the lens housed in the main body 31 will be described. The lens is attached to the top surface side main body 311 having a hollow, approximately truncated cone shape. The lens is not particularly limited as long as it is used for irradiating a laser and can be housed in the top surface side main body 311, and may be various lenses of the prior art exemplified by a condenser lens and an fθ lens. The lens is preferably an fθ lens that can convert the uniform rotational motion of a mirror such as a galvanometer mirror into the uniform linear motion of an irradiation point moving on a focal plane using the distortion effect of the lens. By using an fθ lens as the lens, a linearly moving laser can be irradiated onto an irradiation target arranged on a focal plane. This allows a linearly moving laser to be irradiated onto an irradiation target without moving the laser irradiation member 2, the lens, and / or the irradiation target.

[0066] Although not a required feature, if there are multiple lenses that can be accommodated in the top surface side main body portion 311 depending on the focal length of the lenses, it is preferable that the lenses are provided with a lens mount that removably attaches the lenses to the top surface side main body portion 311.

[0067] When the focal length of the lens and the distance from the lens to the irradiation target are the same, the heating effect by the laser irradiation is maximized. When the focal length of the lens and the distance from the lens to the irradiation target are not the same, the heating effect by the laser irradiation is small. Therefore, if the distance to the irradiation target and / or the shape of the irradiation target are different, the focal length of the lens suitable for the laser irradiation may also be different. Therefore, there is a demand for changing the lens according to the distance to the irradiation target and / or the shape of the irradiation target. By providing the lens with a lens mount, the labor and the like involved in changing multiple types of lenses with different focal lengths can be reduced.

[0068] The focal length of the lens is not particularly limited. The lower limit of the focal length of the lens is preferably 0.1 meters or more, more preferably 0.15 meters or more, and even more preferably 0.2 meters or more. By determining the lower limit of the focal length of the lens as described above, it is possible to prevent the focal length of the lens from being the same as the distance from the lens to the user's hand when the user of the laser irradiation device 1 touches the vicinity of the lens. This can prevent the laser irradiated through the lens from causing serious damage to the user's hand. In addition, it can prevent the laser from giving excessive energy to the irradiation target. This can prevent, for example, the surface of the irradiation target from melting due to excessive energy.

[0069] The upper limit of the focal length of the lens is preferably 3 meters or less, more preferably 2 meters or less, and even more preferably 1 meter or less. By setting the upper limit of the focal length of the lens as described above, it is possible to prevent the laser from being attenuated by the gas between the lens and the irradiation target. In addition, it is possible to increase the energy that the laser gives to the irradiation target.

[0070] When the laser irradiation member 2 includes the lens exchange operation unit 25, it is preferable that the lens is configured to be exchangeable in response to an operation provided by the lens exchange operation unit 25. By configuring the lens to be exchangeable in response to an operation provided by the lens exchange operation unit 25, a user who uses the laser irradiation device 1 can exchange the lens and change the focal length of the lens by an operation provided by the lens exchange operation unit 25. The means for exchanging the lens in response to the operation provided by the lens exchange operation unit 25 is not particularly limited, and may be, for example, a means in which the laser irradiation device 1 includes a lens exchange member (not shown) capable of exchanging the lens used for laser irradiation, and the lens exchange member exchanges the lens used for laser irradiation when a switch corresponding to the lens exchange operation of the operation unit 22 is operated.

[0071] When the operation provided by the operation unit 22 includes an operation to change the laser irradiation direction, it is preferable that the lens is configured to be able to change the laser irradiation direction in response to the operation provided by the operation unit 22. Since the lens is configured to be able to change the laser irradiation direction in response to the operation provided by the operation unit 22, a user who uses the laser irradiation device 1 can change the laser irradiation direction by the operation provided by the operation unit 22. The means for changing the laser irradiation direction is not particularly limited, and may be, for example, a means for rotating the lens by a rotating member capable of rotating the direction of the lens.

[0072] [Bottom opening O1] Fig. 4 is a schematic cross-sectional view of the lens holding member 3 in Fig. 3 taken along line AA, and Fig. 5 is a schematic bottom view of the lens holding member 3. The bottom surface 31B is provided with a bottom surface opening O1 configured to allow the laser irradiated from the top surface 31T toward the bottom surface 31B and the first gas G1 to pass therethrough.

[0073] Fig. 6 is a schematic bottom view of a lens holding member 3 according to another example different from Fig. 5. The bottom opening O1 may be an opening formed by combining two or more elongated openings. For example, it may be a cross-shaped opening formed by combining two elongated openings so as to be substantially perpendicular to each other. By combining two or more elongated openings as the bottom opening O1, when a laser irradiated through a lens has an irradiation range formed by combining two or more elongated shapes, the laser can pass through the bottom opening O1.

[0074] A preferred embodiment of the bottom opening O1 will be described after the gas introduction part 32 is described.

[0075] [Reflective laser dispersion structure D] Although not essential, as shown in FIG. 6, it is preferable that a reflective laser dispersion structure D capable of dispersing a reflected laser beam reflected by an object to be irradiated with the laser be formed on the bottom surface 31B.

[0076] When the reflected laser light reflected from the laser irradiation target travels toward the lens holding member 3, the reflected laser light may increase the temperature of the lens holding member 3. The lens holding member 3 with an increased temperature may heat the lenses held therein by radiant heat and / or thermal conduction from the lens holding member 3, thereby increasing the temperature of the lenses held therein.

[0077] By forming the reflective laser dispersion structure D on the bottom surface 31B, the reflected laser is dispersed by the reflective laser dispersion structure D, and the temperature rise of the lens holding member 3 caused by the reflected laser can be reduced. This can reduce the temperature rise of the held lens. By reducing the temperature rise of the held lens, distortion, deformation and / or damage of the lens caused by heat can be prevented.

[0078] The reflective laser dispersion structure D is not particularly limited as long as it is a structure capable of dispersing the reflected laser reflected at the target of laser irradiation, and may be, for example, a structure including one or more grooves capable of dispersing the reflected laser. When the reflective laser dispersion structure D is a structure including one or more grooves capable of dispersing the reflected laser, it is preferable that the grooves are in a direction substantially perpendicular to the laser irradiation direction.

[0079] The reflected laser reflected in the direction substantially opposite to the laser can reach the bottom surface 31B and increase the temperature of the lens holding member 3. The grooves in the direction substantially perpendicular to the laser irradiation direction are grooves in the direction substantially perpendicular to the reflected laser reflected in the direction substantially opposite to the laser. Therefore, by including grooves in the direction substantially perpendicular to the laser irradiation direction in the reflective laser dispersion structure D, the reflective laser dispersion structure D can more efficiently disperse the reflected laser reflected in the direction substantially opposite to the laser.

[0080] [Gas introduction section 32] Returning to Fig. 4, the gas introduction part 32 is a member configured to be able to introduce the first gas G1 into the inside of the bottom side main body part 312 from one side (the left side surface 31L in Fig. 4, but it may be the right side surface 31R) of the bottom side main body part 312. The gas introduction part 32 is not particularly limited as long as it is configured to be able to introduce the first gas G1 into the inside, and is configured including a member capable of introducing the first gas G1 of the prior art, exemplified by a pipe, a tube, etc.

[0081] It is preferable that the gas introduction section 32 is configured to be able to introduce the first gas G1 supplied from the transmission section 23 into the lens holding member 3. This makes it possible to configure the lens holding member 3 without attaching a member for storing and supplying the first gas G1. Therefore, the structure of the lens holding member 3 can be simplified.

[0082] The pressure of the first gas G1 supplied to the gas introduction part 32 is not particularly limited. The lower limit of the pressure of the first gas G1 supplied to the gas introduction part 32 is preferably equal to or higher than atmospheric pressure, more preferably equal to or higher than 0.3 MPa, and even more preferably equal to or higher than 0.4 MPa. By setting the lower limit of the pressure of the first gas G1 supplied to the gas introduction part 32 as described above, the flow of the first gas G1 passing through the bottom opening O1 from the space C toward the outside of the lens holding member 3 strengthens the force of pushing against fumes in the vicinity of the bottom opening O1 outside the lens holding member 3, and adhesion of fumes to the lens can be further prevented.

[0083] The upper limit of the pressure of the first gas G1 supplied to the gas introduction part 32 is preferably 2 MPa or less, more preferably 1 MPa or less, and further preferably 0.8 MPa or less. By setting the upper limit of the pressure of the first gas G1 supplied to the gas introduction part 32 as described above, deformation of the lens holding member 3 and the like due to the pressure of the first gas G1 can be prevented.

[0084] [First gas G1] The first gas G1 is not particularly limited and may be any of various gases such as air and inert gas, among which an inert gas with a low content of highly reactive gas (e.g., oxygen) is preferable. The inert gas used as the first gas G1 is not particularly limited and may be, for example, an inert gas containing one or more of nitrogen, carbon dioxide, argon, neon, and / or helium.

[0085] When a laser is irradiated in an atmosphere containing oxygen, such as an air atmosphere, combustible materials near the lens may ignite due to the high temperature caused by the laser irradiation. If combustible materials near the lens ignite, the temperature of the lens may rise.

[0086] Since the first gas G1 is an inert gas, the oxygen concentration inside the lens is reduced by the inert gas introduced therein, and it is possible to prevent combustible materials inside the lens from igniting due to high temperatures caused by laser irradiation. Therefore, it is possible to reduce the temperature rise of the lens contained therein caused by the ignition of combustible materials. By reducing the temperature rise of the lens contained therein, it is possible to prevent distortion, deformation and / or damage of the lens caused by heat.

[0087] Although not essential, it is preferable that the temperature of the first gas G1 is lower than the internal temperature when the laser is irradiated. This makes it possible to lower the internal temperature when the laser is irradiated, and as a result, to reduce the temperature rise of the lens. By reducing the temperature rise of the lens accommodated in the lens accommodation member 3, it is possible to prevent distortion, deformation and / or damage of the lens due to heat.

[0088] [Preferable embodiment of bottom opening O1] Here, a preferred embodiment of the bottom opening O1 in the main body 31 will be described in detail with reference to FIGS.

[0089] In processing where a laser is irradiated onto an object, the residue that evaporates from the object turns into fumes (dust) and may adhere to lenses and other optical components. If fumes adhere to optical components, they may absorb the laser and adversely affect the laser irradiation.

[0090] As shown in FIG. 4, inside the bottom side main body portion 312, a space C is defined by the lens accommodated in the top side main body portion 311 and the bottom surface 31B, left side surface portion 31L and right side surface portion 31R of the lens accommodation member 3.

[0091] Since the laser can pass from the top surface 31T toward the bottom surface 31B, and the bottom surface opening O1 is provided on the bottom surface 31B, the laser can be irradiated onto the target object through the bottom surface opening O1 when a lens is housed in the top surface side main body part 311. This bottom surface opening O1 can cause fumes to enter from the outside of the lens housing member 3 toward the space C, resulting in the fumes adhering to the lens.

[0092] The first gas G1 introduced into the space C by the gas introduction part 32 becomes a flow of the first gas G1 passing through the bottom opening O1 from the space C toward the outside of the lens holding member 3. This flow of the first gas G1 pushes the fumes near the bottom opening O1 outside the lens holding member 3 in a direction away from the bottom opening O1. This can prevent the presence of the bottom opening O1 from being a cause of fumes adhering to the lens.

[0093] In addition, by suppressing adhesion of fumes to the lens by the flow of the first gas G1 passing through the main body 31 and the bottom opening O1, the fumes adhering to the lens can absorb the laser and reduce the temperature rise of the lens. By reducing the temperature rise of the lens, distortion, deformation and / or damage of the lens due to heat can be prevented.

[0094] As shown in FIG. 5, the bottom side opening O1 is not particularly limited as long as it can pass the laser and the first gas G1 irradiated from the top surface 31T to the bottom surface 31B of the lens holding member 3, and may be, for example, an opening having an elongated shape when viewed from the direction of the laser passing through the bottom side opening O1. Since the bottom side opening O1 is an elongated opening when viewed from the direction of the laser passing through the bottom side opening O1, when the first gas G1 passes through the bottom side opening O1 from the space C, the cross-sectional area of ​​the flow path through which the first gas G1 flows is reduced. This causes a Venturi effect in which the flow speed of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the flow speed of the first gas G1 can be increased. In addition, since the bottom side opening O1 is an elongated opening, when the laser irradiated through the lens has an elongated irradiation range, the laser can pass through the bottom side opening O1.

[0095] When the shape of the bottom side opening O1 is an elongated opening when viewed from the direction of the laser passing through the bottom side opening O1, the longitudinal length of the bottom side opening O1 when viewed from the direction of the laser passing through the bottom side opening O1 is preferably 4 times or more, more preferably 6 times or more, and even more preferably 9 times or more, relative to the lateral length. By determining the longitudinal length of the bottom side opening O1 when viewed from the direction of the laser passing through the bottom side opening O1 as described above relative to the lateral length, when the first gas G1 passes through the bottom side opening O1, the cross-sectional area of ​​the flow path through which the first gas G1 flows is reduced. This creates a Venturi effect in which the flow speed of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the flow speed of the first gas G1 can be increased. Therefore, the first gas G1 can push the fumes more efficiently.

[0096] When the shape of the bottom side opening O1 is an elongated opening when viewed from the direction of the laser passing through the bottom side opening O1, the longitudinal length of the bottom side opening O1 when viewed from the direction of the laser passing through the bottom side opening O1 is preferably 50 times or less, more preferably 30 times or less, and even more preferably 20 times or less, relative to the lateral length. By determining the longitudinal length of the bottom side opening O1 when viewed from the direction of the laser passing through the bottom side opening O1 relative to the lateral length as described above, friction between the first gas G1 and the main body portion 31 when the first gas G1 passes through the bottom side opening O1 can be reduced, and the flow speed of the first gas G1 can be increased.

[0097] [The main body 31 can be attached to the laser irradiation member 2] Also, the fact that the main body 31 can be attached to the laser irradiation member 2 will be described.

[0098] When the focal length of the lens and the distance from the lens to the irradiation target are the same, the effect of heating by the laser irradiation is maximized. Also, when the focal length of the lens and the distance from the lens to the irradiation target are not the same, the effect of heating by the laser irradiation is small. Therefore, if the distance to the irradiation target and / or the shape of the irradiation target are different, the focal length of the lens suitable for laser irradiation may also be different. Therefore, there is a demand for replacing the lens according to the distance to the irradiation target and / or the shape of the irradiation target. When the lens is integrally configured with a means for suppressing adhesion of fumes to optical components and reducing the temperature rise of the optical components, the labor and the like related to the replacement of the lens may increase. Therefore, in order to reduce the labor and the like related to the replacement of the lens, there is a demand for retrofitting a means for suppressing adhesion of fumes to optical components and reducing the temperature rise of the optical components to the lens. The technology described in Patent Document 1 is configured to include a condenser lens and an energy beam transmission part, which are optical components, and there is still room for further improvement in retrofitting a means for suppressing adhesion of fumes to optical components and reducing the temperature rise of the optical components to existing optical components.

[0099] In this embodiment, the top surface 31T of the top surface side main body portion 311 can be attached to the laser irradiation member 2. This allows the lens holding member 3 to be attached to the laser irradiation member 2 so as not to interfere with the laser and first gas G1 passing through the bottom surface side opening O1. Therefore, the lens holding member 3 can be later attached to the laser irradiation member 2 without interfering with the laser and / or the first gas G1 passing through the bottom surface side opening O1.

[0100] Return to FIG. 3. FIG. 3 is a schematic plan view of the lens housing member 3. The top surface side main body part 311 is not particularly limited as long as it can be attached to the laser irradiation member 2, and may be, for example, a mounting part having a top surface side opening O2 and configured to be able to attach the laser irradiation member 2 via a lens, a mounting part configured to be able to attach the laser irradiation member 2 by engaging with the laser irradiation member 2, a mounting part configured to be able to attach the laser irradiation member 2 by screwing with the laser irradiation member 2, and / or a mounting part configured to be able to attach the laser irradiation member 2 using a screw. When the main body part 31 has a top surface side opening O2 and is configured to be able to attach the laser irradiation member 2 via a lens, it is preferable that the diameter of the top surface side opening O2 is smaller than the inner diameter of the main body part 31. By making the diameter of the top surface side opening O2 smaller than the inner diameter of the main body part 31, it is possible to prevent the lens from passing through the top surface side opening O2 and the main body part 31 and the laser irradiation member 2 from losing their attached state.

[0101] Moreover, it is preferable that top surface side body portion 311 and bottom surface side body portion 312 are configured to be detachable from each other. This allows body portion 31 to be configured so that the inner diameter of the portion where top surface side body portion 311 and bottom surface side body portion 312 are detachably attached to each other is larger than the diameter of top surface side opening O2. Therefore, bottom surface side body portion 312 can be removed from top surface side body portion 311, and a lens having an outer diameter larger than the diameter of top surface side opening O2 can be stored in body portion 31.

[0102] [Gas delivery section 33] Returning to Fig. 2. Although not an essential aspect, it is preferable that the lens holding member 3 further includes a gas sending unit 33 that is provided in the vicinity of the bottom surface 31B and is capable of sending out the second gas G2 in a direction FD2 that is substantially perpendicular to the flow direction FD1 of the first gas G1. The direction FD2 that is substantially perpendicular to the flow direction FD1 of the first gas G1 here refers to a direction in which the flow of the second gas G2 does not hinder the realization of the function of the flow of the first gas G1, which is to prevent fumes from entering through the bottom opening O1, and specifically refers to a direction that includes an angle of 70 degrees or more and 110 degrees or less with respect to the flow direction FD1 of the first gas G1. Since the direction FD2 in which the second gas G2 is sent out is a direction that is approximately perpendicular to the flow direction FD1 of the first gas G1, i.e., a direction that includes an angle of 70 degrees or more and 110 degrees or less with respect to the flow direction FD1 of the first gas G1, the force due to the flow of the second gas G2 can push the fumes in a direction different from the direction of movement of the fumes when the fumes are pushed only by the force due to the flow of the first gas G1, without interfering with the realization of the function of the flow of the first gas G1 of preventing the fumes from entering through the bottom side opening O1.

[0103] By further providing the gas delivery section 33, in addition to the flow of the first gas G1, the second gas G2 delivered in a direction FD2 approximately perpendicular to the flow direction FD1 of the first gas G1 pushes the fumes, causing the fumes to pass through the bottom opening O1 and enter the space C, preventing the fumes from adhering to the lens.

[0104] Outside the lens holding member 3, fumes at a position where they can absorb the laser irradiated through the bottom opening O1 can absorb the laser and have a negative effect on the laser irradiation. When the laser is irradiated to the irradiation target through the bottom opening O1 provided on the bottom surface 31B, the laser and the first gas G1 pass through the bottom opening O1 from the space C side toward the outside, so the direction of the laser passing through the bottom opening O1 and the flow direction FD1 of the first gas G1 can be approximately the same direction in the vicinity of the bottom opening O1. Therefore, when fumes at a position near the bottom opening O1 among the positions where they can absorb the laser outside the lens holding member 3 are pushed and moved only by the force of the flow of the first gas G1, the position after the movement of the fumes can be a position where they can absorb the laser. Therefore, there is room for further improvement in reducing the negative effect of fumes on the laser irradiation by moving fumes at a position where they can absorb the laser outside the lens holding member 3 to a position where they do not absorb the laser.

[0105] By further providing the gas delivery section 33, the second gas G2 delivered in the direction FD2 substantially perpendicular to the flow direction FD1 of the first gas G1 can push fumes that are in a position where they can absorb the laser irradiated through the bottom opening O1 in a direction substantially perpendicular to the direction of the laser passing through the bottom opening O1, and move them to a position where they do not absorb the laser. Therefore, the adverse effect of the fumes on the laser irradiation can be further reduced. The pushing of fumes by the second gas G2 delivered in the direction FD2 substantially perpendicular to the flow direction FD1 of the first gas G1 will be described in more detail later with reference to FIG. 14.

[0106] When the transmitting unit 23 is configured to be able to supply the second gas G2 to the gas sending unit 33, it is preferable that the gas sending unit 33 is configured to be able to send out the second gas G2 supplied from the transmitting unit 23. Since the transmitting unit 23 is configured to be able to supply the second gas G2 to the gas sending unit 33 and the gas sending unit 33 is configured to be able to send out the second gas G2 supplied from the transmitting unit 23, the lens holding member 3 can be configured without attaching a member that stores and supplies the second gas G2. This can simplify the structure of the lens holding member 3.

[0107] The pressure of the second gas G2 supplied from the transmission unit 23 to the gas delivery unit 33 is not particularly limited. The lower limit of the pressure of the second gas G2 supplied from the transmission unit 23 to the gas delivery unit 33 is preferably equal to or higher than atmospheric pressure, more preferably equal to or higher than 0.3 MPa, and even more preferably equal to or higher than 0.4 MPa. By setting the lower limit of the pressure of the second gas G2 supplied from the transmission unit 23 to the gas delivery unit 33 as described above, the force of the second gas G2 delivered in the direction FD2 substantially perpendicular to the flow direction FD1 of the first gas G1 to push the fumes is strengthened, and the adhesion of the fumes to the lens can be further prevented.

[0108] The upper limit of the pressure of the second gas G2 supplied from the transmission part 23 to the gas delivery part 33 is preferably 2 MPa or less, more preferably 1 MPa or less, and even more preferably 0.8 MPa or less. By determining the upper limit of the pressure of the second gas G2 supplied from the transmission part 23 to the gas delivery part 33 as described above, deformation of the gas delivery part 33 and the like due to the pressure of the second gas G2 can be prevented.

[0109] [Pore N] 7 is a schematic left side view of the lens holding member 3. The gas delivery unit 33 preferably has one or more pores N capable of delivering the second gas G2. By the gas delivery unit 33 having one or more pores N capable of delivering the second gas G2, the cross-sectional area of ​​the flow path through which the second gas G2 flows when the second gas G2 passes through the pores N can be reduced. This creates a Venturi effect in which the flow speed of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the flow speed of the second gas G2 can be increased. By increasing the flow speed of the second gas G2, the second gas G2 can push the fumes more efficiently.

[0110] The size of the pores N is not particularly limited. The upper limit of the cross-sectional area of ​​the pores N when viewed from the direction in which the second gas G2 flows is preferably 3 square millimeters or less, more preferably 2 square millimeters or less, and even more preferably 1 square millimeter or less. By determining the upper limit of the cross-sectional area of ​​the pores N when viewed from the direction in which the second gas G2 flows as described above, the cross-sectional area of ​​the flow path through which the second gas G2 flows when the second gas G2 passes through the pores N can be further reduced. This can increase the flow speed of the second gas G2.

[0111] The lower limit of the cross-sectional area of ​​the pores N when viewed from the direction in which the second gas G2 flows is preferably 0.1 square millimeters or more, more preferably 0.3 square millimeters or more, and even more preferably 0.4 square millimeters or less. By determining the lower limit of the cross-sectional area of ​​the pores N when viewed from the direction in which the second gas G2 flows as described above, friction between the pores N and the second gas G2 when the second gas G2 passes through the pores N can be reduced, and the flow speed of the second gas G2 can be increased.

[0112] [Second gas G2] The second gas G2 is not particularly limited and may be various gases exemplified by air and inert gas. The inert gas used as the second gas G2 is not particularly limited and may be, for example, an inert gas containing one or more of nitrogen, carbon dioxide, argon, neon, and / or helium. By using an inert gas as the second gas G2, the oxygen concentration is reduced by the inert gas sent out, and it is possible to prevent flammable materials from igniting due to high temperatures caused by laser irradiation. Therefore, it is possible to reduce the temperature rise of the stored lens caused by ignition of flammable materials. By reducing the temperature rise of the stored lens, it is possible to prevent distortion, deformation, and / or damage of the lens caused by heat.

[0113] The second gas G2 may be the same gas as the first gas G1, or may be a gas different from the first gas G1. When the second gas G2 is the same gas as the first gas G1, the same gas as the first gas G1 can be used in the gas delivery section 33. This allows the gas introduction section 32 and the gas delivery section 33 to share a member for storing the gas and / or a member for supplying the gas.

[0114] <Nozzle 4> Fig. 8 is an enlarged schematic diagram of the nozzle 4 in the laser irradiation device 1, and Fig. 9 is a schematic BB cross-sectional view of the nozzle 4 in Fig. 8. In this embodiment, the nozzle 4 includes a nozzle body 41 capable of sucking in a suction object exemplified by fumes, a structure 42 capable of blocking at least a part of the suction port O3 in the nozzle body 41, an upper suction section 43 provided substantially above the suction port O3 and configured to be able to suck in the suction object, a transfer section 44 (see Fig. 1) capable of transferring the suction object and / or the suction gas containing the suction object sucked by the nozzle 4, and a detachable section 45 (see Fig. 1) for detachably attaching the nozzle body 41 to the nozzle 4.

[0115] [Nozzle body 41] 8, the nozzle body 41 is not particularly limited as long as it is a hollow nozzle provided with a suction port O3 capable of sucking in objects to be sucked, such as fumes generated during laser processing. Since the nozzle body 41 is a hollow nozzle provided with a suction port O3 capable of sucking in objects to be sucked, such as fumes generated during laser processing, the objects to be sucked, such as fumes generated during laser processing, can be sucked in and collected at the suction port O3.

[0116] The material of the nozzle body 41 is not particularly limited, and may be various materials including metals such as iron, iron alloys, copper, copper alloys, aluminum, aluminum alloys, nickel, and nickel alloys, resins such as polyimide resins, and / or ceramics. Among them, the material of the nozzle body 41 preferably contains a metal. By including a metal in the material of the nozzle body 41, damage and / or fire of the nozzle body 41 can be prevented when the nozzle body 41 becomes hot due to irradiation with a laser.

[0117] [Suction port O3] The suction port O3 is a suction port capable of sucking in an object to be sucked, such as fumes generated during laser processing, and is not particularly limited as long as the longitudinal length L1 of the suction port O3 is longer than the transverse length L2 when viewed from the direction in which the object to be sucked in can be sucked in.

[0118] The longitudinal length L1 of the suction port O3 when viewed from the direction in which the object to be sucked can be preferably 4 times or more, more preferably 6 times or more, and even more preferably 9 times or more, as compared to the lateral length L2. By determining the longitudinal length L1 of the suction port O3 when viewed from the direction in which the object to be sucked can be as described above with respect to the lateral length L2, when the gas to be sucked containing the object to be sucked passes through the suction port O3 from outside the nozzle 4, the cross-sectional area of ​​the flow path through which the gas to be sucked flows is reduced. This creates a Venturi effect in which the flow speed of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the flow speed of the gas to be sucked can be increased. Therefore, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

[0119] The longitudinal length L1 of the suction port O3 when viewed from the direction in which the object to be sucked can be preferably 50 times or less, more preferably 30 times or less, and even more preferably 20 times or less, the lateral length L2. By determining the longitudinal length L1 of the suction port O3 when viewed from the direction in which the object to be sucked can be set as described above relative to the lateral length L2, it is possible to reduce friction between the sucked gas and the nozzle body 41 when the sucked gas containing the object to be sucked passes through the suction port O3 from outside the nozzle 4, thereby improving the suction force.

[0120] The shape of the suction port O3 when viewed from the direction in which the object to be sucked can be any shape, such as a substantially rectangular, substantially trapezoidal, or substantially elliptical, in which the length in the longitudinal direction is longer than the length in the lateral direction. Among them, the shape of the suction port O3 when viewed from the direction in which the object to be sucked can be preferably substantially rectangular. By having the shape of the suction port O3 when viewed from the direction in which the object to be sucked can be substantially rectangular, the Venturi effect can be more effectively generated, and the speed of the flow of the sucked gas can be increased.

[0121] With regard to the suction port O3 provided in the nozzle 4 included in the laser irradiation device 1, it is preferable to configure the suction port O3 so that the longitudinal direction of the suction port O3 when viewed from the direction in which the object to be sucked (fumes, etc.) can be sucked in is approximately perpendicular to the laser irradiation direction.

[0122] When a laser has a long and narrow irradiation range, fumes may be generated from various places included in the irradiation range. If there is no suction port O3 around the irradiation range, the suction power for the generated fumes may be reduced.

[0123] By configuring the suction port O3 such that the longitudinal direction of the suction port O3 when viewed from the direction in which the fumes can be sucked is substantially perpendicular to the direction of laser irradiation, even if the laser has a long and narrow irradiation range, the suction port O3 can be arranged around the irradiation range to improve the suction force for the fumes that evaporate from the irradiation target. In addition, by configuring the suction port O3 such that the longitudinal direction of the suction port O3 when viewed from the direction in which the fumes can be sucked is substantially perpendicular to the direction of laser irradiation, and further by determining the longitudinal length of the suction port O3 when viewed from the direction in which the fumes can be sucked as described above with respect to the short-side length, the suction port O3 can be arranged around the irradiation range even if the laser has a further long and narrow irradiation range. This can improve the suction force for the fumes that evaporate from the irradiation target.

[0124] The distance from the lens to the suction port O3 is not particularly limited, but is preferably a distance that is approximately equal to the focal length of the lens. Since the distance from the lens to the suction port O3 is approximately equal to the focal length of the lens, a user who uses the laser irradiation device 1 can move the suction port O3 to the vicinity of the irradiation target to make the distance from the lens to the irradiation target approximately equal to the focal length of the lens. This allows a user who uses the laser irradiation device 1 to efficiently heat the irradiation target.

[0125] [Wide portion 41A, narrow portion 41B] Next, reference is made to Figure 9. Figure 9 is a schematic partial cross-sectional view taken along line BB of nozzle 4 in Figure 8. Although not an essential aspect, nozzle body 41 is preferably configured to include a wide portion 41A having a relatively large inner diameter and a narrow portion 41B having a relatively small inner diameter.

[0126] By configuring the nozzle body 41 to include the wide portion 41A with a relatively large inner diameter and the narrow portion 41B with a relatively small inner diameter, the cross-sectional area of ​​the flow path through which the gas to be sucked flows is reduced when the gas to be sucked containing the object to be sucked flows from the wide portion 41A to the narrow portion 41B. This creates a Venturi effect in which the flow speed of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the flow speed of the gas to be sucked can be further increased. This can improve the suction force for sucking in the object to be sucked contained in the gas to be sucked.

[0127] In the flow of a compressible fluid such as a gas, when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, adiabatic compression can occur, in which the fluid is compressed without exchanging heat with the outside. In addition, in the flow of a compressible fluid such as a gas, when the flow is subsonic, a phenomenon is known in which the flow accelerates when the temperature of the fluid increases.

[0128] By configuring the nozzle body 41 to include the wide portion 41A with a relatively large inner diameter and the narrow portion 41B with a relatively small inner diameter, when the gas to be sucked containing the object to be sucked enters the narrow portion 41B from the wide portion 41A, the gas to be sucked is adiabatically compressed, and the temperature of the gas to be sucked can be increased. This can have the effect of accelerating the flow of the gas to be sucked when the flow of the gas to be sucked is subsonic, and further increasing its speed. Therefore, when the flow of the gas to be sucked is subsonic, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

[0129] Wide portion 41A and narrow portion 41B are not particularly limited as long as the inner diameter of wide portion 41A is relatively larger than the inner diameter of narrow portion 41B (that is, the inner diameter of narrow portion 41B is relatively smaller than the inner diameter of wide portion 41A).

[0130] The inner diameter of the wide portion 41A is preferably 1.1 times or more, more preferably 1.2 times or more, and even more preferably 1.3 times or more, the inner diameter of the narrow portion 41B. By determining the inner diameter of the wide portion 41A relative to the inner diameter of the narrow portion 41B as described above, the cross-sectional area of ​​the flow path through which the sucked gas flows when the sucked gas containing the object to be sucked enters the narrow portion 41B from the wide portion 41A is further reduced. This effectively produces a Venturi effect in which the flow speed of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the flow speed of the sucked gas can be further increased. Therefore, the suction force for sucking the object to be sucked contained in the sucked gas can be further improved.

[0131] The inner diameter of the wide portion 41A is preferably four times or less, more preferably three times or less, and even more preferably two times or less, the inner diameter of the narrow portion 41B. By determining the inner diameter of the wide portion 41A relative to the inner diameter of the narrow portion 41B as described above, it is possible to prevent the narrow portion 41B from becoming narrow. Therefore, it is possible to reduce friction between the gas to be sucked in the narrow portion 41B and the nozzle body 41, and improve the suction force.

[0132] [Structure 42] Although not an essential aspect, the nozzle 4 preferably includes a structure 42 capable of blocking at least a portion of the suction port O3.

[0133] The nozzle 4 includes the structure 42 capable of blocking at least a part of the suction port O3, and the structure 42 can reduce the cross-sectional area of ​​the flow path through which the sucked gas flows. This reduces the cross-sectional area of ​​the flow path through which the fluid flows when the sucked gas containing the object to be sucked passes around the structure 42. This creates a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the speed of the gas to be sucked can be further increased. This can improve the suction force for sucking the object to be sucked contained in the gas to be sucked.

[0134] The nozzle 4 includes the structure 42 capable of blocking at least a part of the suction port O3, and the structure 42 can provide resistance to the flow of the gas to be aspirated, and the gas to be aspirated can be adiabatically compressed. The adiabatically compressed gas can increase in temperature. This can accelerate the flow of the gas to be aspirated when the flow of the gas to be aspirated is subsonic, and can have the effect of further increasing the speed of the gas. Therefore, when the flow of the gas to be aspirated is subsonic, the suction force for sucking the object to be aspirated contained in the gas to be aspirated can be improved.

[0135] Returning to Fig. 8, it is preferable that the structure 42 can be attached to a location different from both ends of the suction port O3 when viewed from the direction in which the object to be sucked can be sucked.

[0136] Since the structure 42 can be attached to a location different from both ends of the suction port O3 when viewed from the direction in which the object to be sucked can be sucked, the structure 42 attached to a location different from both ends of the suction port O3 can divide the flow of the gas to be sucked into multiple flows and reduce the cross-sectional area of ​​the flow path for each of the divided flows. In addition, a Venturi effect occurs in which the speed of the flow of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the speed of the flow of the gas to be sucked can be further increased. Therefore, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

[0137] Since the structure 42 can be attached to a location different from both ends of the suction port O3 when viewed from the direction in which the object to be sucked can be sucked, the structure 42 attached to a location different from both ends of the suction port O3 can divide the flow of the gas to be sucked into a plurality of flows, and the gas to be sucked can be adiabatically compressed for each of the divided flows. This allows the gas to be adiabatically compressed more efficiently, and the temperature of the gas to be sucked can be increased. This can further increase the effect of accelerating the flow of the gas to be sucked when the flow of the gas to be sucked is a subsonic flow, and further increase the speed of the gas to be sucked. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

[0138] The shape of the structure 42 is not particularly limited as long as it can block at least a part of the suction port O3, but it is preferably a wide shape with respect to the direction in which the object to be suctioned can be suctioned. Since the structure 42 is wide with respect to the direction in which the object to be suctioned can be suctioned, the width of the side where the flow of the gas to be suctioned that enters the nozzle body 41 from the suction port O3 first contacts the structure 42 becomes narrow. Thereby, the resistance between the flow of the gas to be suctioned and the structure 42 can be reduced, and the speed of the flow of the gas to be suctioned can be increased. Therefore, the suction force for suctioning the object to be suctioned contained in the gas to be suctioned can be improved.

[0139] FIG. 10 is a diagram showing an example of the structure 42. Hereinafter, with reference to FIG. 10, the structure 42 having a wide shape with respect to the direction in which the object to be suctioned can be suctioned will be described in more detail.

[0140] FIG. 10(A1) is a schematic plan view showing an example of the structure 42 having a shape including a substantially triangular prism. FIG. 10(A2) is a schematic view of the structure 42 in FIG. 10(A1) seen obliquely from the upper front right. The structure 42 preferably has a shape including a substantially triangular prism that is wide (in a reverse convex shape) with respect to the direction in which the object to be suctioned can be suctioned (the direction of the gas flow). Since the structure 42 has a shape including a substantially triangular prism, the flow of the gas to be suctioned can be divided into two by the substantially triangular prism. Thereby, when the flow of the gas to be suctioned is a subsonic flow, the suction force for suctioning the object to be suctioned contained in the gas to be suctioned can be improved. Further, when the speed of the flow of the gas to be suctioned exceeds the speed of sound, since the structure 42 has a shape including a substantially triangular prism, the resistance due to the shock wave generated when the flow of the gas to be suctioned exceeding the speed of sound contacts the structure 42 can be reduced.

[0141] FIG. 10(B1) is a schematic plan view showing an example of the structure 42 having a shape including a substantially triangular prism and a substantially square prism. FIG. 10(B2) is a schematic perspective view of the structure 42 of FIG. 10(B1) from above the front right. When the structure 42 has a shape including a substantially triangular prism that is wide (inversely convex) in the direction in which the object to be sucked can be sucked (the direction of the flow of the gas), it is preferable that the structure 42 has a shape including a substantially square prism in the direction of the flow of the gas to be sucked as seen from the substantially triangular prism. Since the structure 42 has a shape including a substantially square prism in the direction of the flow of the gas to be sucked as seen from the substantially triangular prism, the substantially square prism can prevent the flow of the gas to be sucked, which has been divided into two by the substantially triangular prism, from becoming one flow. This can more effectively divide the flow of the gas to be sucked into two flows. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the object to be sucked contained in the gas to be sucked can be improved.

[0142] FIG. 10(C1) is a schematic plan view showing another example of the structure 42 having a shape including an approximately triangular prism and an approximately square prism. FIG. 10(C2) is a schematic perspective view of the structure 42 of FIG. 10(C1) from the upper right front. The size of the approximately square prism is not particularly limited, but it is preferable that the size of the approximately square prism when viewed from the direction of the flow of the sucked gas is smaller than that of the approximately triangular prism. Since the size of the approximately square prism when viewed from the direction of the flow of the sucked gas is smaller than that of the approximately triangular prism, the resistance of the sucked gas flow divided into two by the approximately triangular prism can be reduced from the approximately square prism. This can increase the speed of the sucked gas flow and improve the suction force for sucking the sucked object contained in the sucked gas.

[0143] [Upper suction section 43] FIG. 11 is a diagram showing an example of the positional relationship between the lens holding member 3 and the nozzle 4 when irradiating a laser, and is a schematic diagram of the lens holding member 3 and the nozzle 4 viewed from the horizontal direction. Although not an essential aspect, when the object to be suctioned is a high-temperature object to be suctioned that has a higher temperature than the surroundings, such as fumes generated during laser processing, it is preferable that the nozzle 4 has an upper suction part 43 that is provided approximately above the suction port O3 and is configured to be able to suction the high-temperature object to be suctioned. The high-temperature object to be suctioned, such as fumes formed from residues evaporated from the irradiation object, has a higher temperature than the surroundings. This heats up the gas around the high-temperature object to be suctioned, which can become an updraft. Therefore, a part of the high-temperature object to be suctioned rises with the updraft and can move, for example, in the direction of the lens holding member 3 and the lens contained therein. By having the upper suction part 43, the high-temperature object to be suctioned that has risen with the updraft can be sucked in by the upper suction part 43 provided approximately above the suction port O3. This can reduce adhesion of the high-temperature object to be suctioned to the lens when the object to be suctioned is a high-temperature object to be suctioned.

[0144] The shape of the upper suction part 43 is not particularly limited, but is preferably a substantially truncated cone shape having a hollow portion through which the object to be suctioned can pass, and is configured so that the cross-sectional area of ​​the portion through which the object to be suctioned passes is large along the direction of the object to be suctioned by the upper suction part 43. The shape of the upper suction part 43 may be, for example, a hollow substantially truncated cone shape having an upper suction port O4 for suctioning the object to be suctioned and a junction port O5 junction with the nozzle body 41 as shown in FIG. 11, and an upper suction port diameter R1 of the upper suction port O4 is smaller than the junction port diameter R2 of the junction port O5. Since the upper suction port diameter R1 is smaller than the junction port diameter R2, the flow for suctioning the object to be suctioned near the junction port O5 can increase in speed due to the Venturi effect near the upper suction port O4. Therefore, the suction force for suctioning the object to be suctioned can be increased near the upper suction port O4. The junction port diameter R2 is preferably smaller than the nozzle body diameter R3 of the nozzle body 41. This allows the object to be sucked by the upper suction part 43 without significantly impairing the flow speed of the object through the nozzle body 41. It is also preferable that the upper suction part 43 has an upper opening O6 provided at a position different from the upper suction port O4. Since the upper suction part 43 has the upper opening O6, the object to be sucked, such as a high-temperature object to be sucked, which has risen due to an updraft can also be sucked through the upper opening O6.

[0145] [Transfer section 44] Returning to Fig. 1. In the case where the laser irradiation device 1 includes the nozzle 4, the nozzle 4 preferably includes a transfer section 44 capable of transferring the aspirated object and / or the aspirated gas containing the aspirated object sucked by the nozzle 4. By including the transfer section 44 in the nozzle 4, the aspirated object and the like can be transferred and moved away from the lens and / or the irradiation object.

[0146] The transfer section 44 is not particularly limited as long as it is capable of transferring the object to be sucked by the nozzle 4, and may be a conventional means capable of transferring the object to be sucked, such as a conventional pipe, hose, tube, etc.

[0147] The transfer unit 44 is preferably connected to a suction unit capable of sucking the object to be sucked and / or the gas. Since the transfer unit 44 is connected to the suction unit capable of sucking the object to be sucked and / or the gas to be sucked containing the object to be sucked, the transfer unit 44 can suck the object to be sucked and / or the gas to be sucked containing the object to be sucked through the suction port O3.

[0148] [Detachable part 45] Although not essential, it is preferable that the nozzle 4 includes a detachable part 45 for detachably attaching the nozzle body 41 to the nozzle 4. By including the detachable part 45 in the nozzle 4, when the lens is replaced with another lens having a different focal length, the nozzle body 41 can be replaced so that the distance from the lens to the suction port O3 approximately matches the focal length of the replaced lens. This allows the suction port O3 to be located near the irradiation target when the laser is irradiated on the irradiation target at a position where the distance from the lens to the irradiation target approximately matches the focal length of the lens. Therefore, the suction target, such as fumes evaporated from the irradiation target, can be efficiently sucked.

[0149] The lower limit of the distance from the detachable part 45 to the suction port O3 is preferably 0.1 meters or more, more preferably 0.15 meters or more, and even more preferably 0.2 meters or more. By setting the lower limit of the distance from the detachable part 45 to the suction port O3 as described above, when the distance from the lens to the suction port O3 is approximately the same as the focal length of the lens, the distance from the lens to the detachable part 45 becomes a distance different from the focal length of the lens. This can prevent the laser from causing serious damage to the user's hand when the user replaces the nozzle body 41 and touches the vicinity of the detachable part 45.

[0150] The upper limit of the distance from the detachable part 45 to the suction port O3 is preferably 3 meters or less, more preferably 2 meters or less, and even more preferably 1 meter or less. By setting the upper limit of the distance from the detachable part 45 to the suction port O3 as described above, when a force is applied near the suction port O3, it is possible to prevent a large force from being applied to the detachable part 45 due to this principle.

[0151] [Object to be sucked] So far, the nozzle 4 that sucks the suction object such as fumes generated during laser processing in the laser irradiation device 1 has been described, but the suction object sucked by the nozzle 4 is not particularly limited and may be any suction object that can pass through the suction port O3. The suction force for sucking these suction objects can be improved by, for example, having a longitudinal length L1 of the suction port O3 four times or more as compared with a lateral length L2 when viewed from a direction in which the nozzle 4 can suck the suction object, a nozzle body 41 including a wide portion 41A having a relatively large inner diameter and a narrow portion 41B having a relatively small inner diameter, a structure 42 capable of blocking at least a part of the suction port O3 being provided inside the nozzle body 41 at a position near the suction port O3, the structure 42 being provided at a position different from both ends of the suction port O3 when viewed from a direction in which the suction object can be sucked, and / or the structure 42 having a wide shape in the direction in which the suction object can be sucked.

[0152] The object to be aspirated may include, for example, a high-temperature object to be aspirated that has a higher temperature than the surroundings, such as fumes generated during laser processing, or a non-high-temperature object to be aspirated that has substantially the same temperature as the surroundings, such as dust, dirt, powdered material, and debris generated during cutting processing, but it is more preferable for the object to be aspirated to include a high-temperature object to be aspirated that has a higher temperature than the surroundings.

[0153] The reason why it is more preferable for the object to be sucked to include a high-temperature object that is hotter than the surroundings will be explained. Regarding adiabatic compression of gas, Poisson's law (pV γ is constant.) and the ideal gas equation of state (p=RT / V), TV γ-1 (p: pressure, R: gas constant, T: temperature, V: volume, γ: specific heat ratio). Therefore, at temperature T, with specific heat ratio γ, the volume V i of gas into a volume of V f The temperature change ΔT when adiabatically compressed is ΔT=T{(V i / V f ) γ-1 -1} can be satisfied. This allows the specific heat ratio γ and compressibility (V i / Vf ) under the same conditions, the higher the gas temperature T, the greater the temperature change due to adiabatic compression. That is, the higher the gas temperature T, the greater the temperature increase. When the object to be sucked is a high-temperature object to be sucked, the temperature of the sucked gas including the object to be sucked may increase. When the sucked gas including the object to be sucked enters the narrow portion 41B from the wide portion 41A, the sucked gas is adiabatically compressed and the temperature of the sucked gas may increase. According to the above-mentioned formula of temperature change in the case of adiabatic compression, when the temperature of the sucked gas is high, the temperature increase of the sucked gas due to adiabatic compression may be even greater. As a result, when the flow of the sucked gas is a subsonic flow, the flow of the sucked gas accelerates, and the effect of further increasing the speed of the gas can be more effectively generated. Therefore, when the object to be sucked is a high-temperature object to be sucked, the speed of the flow of the sucked gas can be further increased, and the suction force can be further increased.

[0154] As in the case where the gas to be sucked flows from the wide portion 41A to the narrow portion 41B, the structure 42 applies resistance to the flow of the gas to be sucked, and when the gas to be sucked is adiabatically compressed, the temperature of the gas to be sucked can be increased by a larger amount due to the adiabatic compression when the gas to be sucked is at a high temperature. This accelerates the flow of the gas to be sucked when the flow is subsonic, and the effect of increasing the flow speed can be more effectively achieved. Therefore, when the object to be sucked is a high-temperature object to be sucked, the flow speed of the gas to be sucked can be increased more, and the suction force can be further increased.

[0155] In addition, when the object to be sucked is a high-temperature object, if the gas around the object to be sucked is heated and becomes an ascending air current, the high-temperature object to be sucked can be sucked by the upper suction part 43 provided substantially above the suction port O3. Since the object to be sucked is sucked using not only the suction port O3 but also the upper suction part 43, the suction force can be further increased.

[0156] The object to be sucked may contain harmful substances that are harmful to the human body. If harmful substances are present around the nozzle 4, the harmful substances contained in the object to be sucked may enter the body of a worker or the like using the nozzle 4, thereby damaging the health of the worker or the like. By increasing the suction force for sucking in the object to be sucked that contains harmful substances, it is possible to prevent the health of the worker or the like from being damaged.

[0157] <Transportation materials> Although not essential, in the case of transporting the laser irradiation device 1, it is preferable that the laser irradiation device 1 can be housed in a transportation member (not shown). By being able to house the laser irradiation device 1 in a transportation member in the case of transporting the laser irradiation device 1, it is possible to prevent the laser irradiation device 1 from being damaged during transportation. The transportation member is not particularly limited as long as it can house the laser irradiation device 1, and may be a transportation case or other transportation member of the conventional technology. It is preferable that the transportation member has a transportation member holding part that can be held by a transporter transporting the laser irradiation device 1. By having the transportation member holding part, the transporter can hold the laser irradiation device 1 housed in the transportation member via the transportation member holding part, and can easily transport the laser irradiation device 1.

[0158] <<Mobile Laser Irradiation System S>> 12 is a schematic front view showing an example of a mobile laser irradiation system S according to this embodiment. The mobile laser irradiation system S includes the above-mentioned laser irradiation device 1 and a laser irradiation support vehicle 5 capable of supplying a laser to the irradiation unit 24 of the laser irradiation device 1.

[0159] <Laser Irradiation Support Vehicle 5> When the laser irradiation device 1 is installed and used in a facility such as a factory or a workshop, it is difficult to irradiate a laser beam to an irradiation target that is difficult to move to the facility due to factors such as a large width, depth, or height, a large weight, being fixed to a specific location, and / or the quality of which may be impaired by vibrations associated with the movement. Therefore, there is room for improvement in configuring the laser irradiation device 1 to be movable and enabling the laser beam to be irradiated to an irradiation target that is difficult to move to the facility.

[0160] Since the mobile laser irradiation system S is configured to include a laser irradiation support vehicle 5 capable of moving the laser irradiation device 1, the laser irradiation device 1 can be configured to be mobile, and a laser can be irradiated to an irradiation target that is difficult to move to a facility where the laser irradiation member 2 is installed.

[0161] In this embodiment, the laser irradiation support vehicle 5 includes a movable vehicle body 51, a power transmission unit 53 mounted on the vehicle body 51 and capable of transmitting power supplied from a power source, a laser supply unit 54 mounted on the vehicle body 51 and capable of supplying a laser using the power transmitted by the power transmission unit 53, a suction unit 55 mounted on the vehicle body 51 and capable of suctioning objects such as fumes sucked by the nozzle 4 of the laser irradiation device 1, a cooling unit 56 mounted on the vehicle body 51 and capable of cooling the laser irradiation support vehicle 5, and a coolant supply unit (not shown) capable of supplying a coolant to the irradiation unit 24. Although not an essential aspect, the laser irradiation support vehicle 5 may further include a power supply unit 52 mounted on the vehicle body 51 and capable of supplying power. By further including the power supply unit 52, power can be supplied to the power transmission unit 53 and the like without using a power source outside the laser irradiation support vehicle 5.

[0162] [Vehicle body 51] The vehicle body 51 is not particularly limited as long as it is capable of moving while carrying each component constituting the laser irradiation support vehicle 5, and may be a vehicle of the prior art. By including the vehicle body 51 in the laser irradiation support vehicle 5, the laser irradiation device 1 can be configured to be movable.

[0163] The vehicle body 51 is preferably an ordinary automobile such as a station wagon or a medium-sized and / or large-sized automobile such as a truck. When the vehicle body 51 is an ordinary automobile, the laser irradiation support vehicle 5 can be operated more easily than when the vehicle body 51 is a large automobile or the like. When the vehicle body 51 is a medium-sized and / or large-sized automobile, each component constituting the laser irradiation device 1 and / or the laser irradiation support vehicle 5 can be configured to be movable even if the weight, etc., of each component constituting the laser irradiation device 1 and / or the laser irradiation support vehicle 5 is relatively large.

[0164] [Power supply section 52] The power supply unit 52 is not particularly limited as long as it is a power supply configured to be able to supply power to the laser irradiation member 2 and / or the laser supply unit 54, etc., and may be a power supply of the prior art. By including the power supply unit 52 in the laser irradiation support vehicle 5, power can be supplied to the laser irradiation member 2 and / or the laser supply unit 54, etc., even in a place where it is difficult to supply power to the laser irradiation member 2 and / or the laser supply unit 54, etc. The power supply unit 52 is preferably a power supply unit that uses power supplied from an AC power supply, such as a commercial power supply. By using power supplied from an AC power supply, the power supply unit 52 can easily convert the voltage of the power to a voltage suitable for the laser irradiation member 2 and / or the laser supply unit 54, etc. The AC power supply that supplies power to the power supply unit 52 is not particularly limited, and examples thereof include a commercial power supply with a voltage of 100V or more and 240V or less and a frequency of 50Hz or more and 60Hz or less, and an AC power supply that can supply substantially the same voltage and frequency as the commercial power supply among on-board power supplies.

[0165] There is no particular limitation on the power that the power supply unit 52 can supply. The lower limit of the power that the power supply unit 52 can supply is preferably 100 VA or more, more preferably 1 kVA or more, and even more preferably 10 kVA or more. By determining the lower limit of the power that the power supply unit 52 can supply as described above, it is possible to supply the power required by the laser irradiation member 2 and / or the laser supply unit 54, etc.

[0166] The upper limit of the power that can be supplied by the power supply unit 52 is preferably 10 MVA or less, more preferably 1 MVA or less, and further preferably 100 kVA or less. By setting the upper limit of the power that can be supplied by the power supply unit 52 as described above, it is possible to prevent temperature rise due to large power, etc.

[0167] [Power transmission section 53] When the laser irradiation support vehicle 5 includes the power supply unit 52, it is preferable that the laser irradiation support vehicle 5 further includes a power transmission unit 53 capable of transmitting power from the power supply unit 52 to the laser irradiation member 2 and / or the laser supply unit 54. By including the power transmission unit 53 capable of transmitting power from the power supply unit 52 to the laser irradiation member 2 and / or the laser supply unit 54, the laser irradiation support vehicle 5 can transmit the power supplied by the power supply unit 52 to the laser irradiation member 2 and / or the laser supply unit 54.

[0168] [Laser supply unit 54] The laser supply unit 54 is a member configured to be able to supply a laser to the irradiation unit 24 of the laser irradiation member 2, and includes a laser oscillator. By providing the laser supply unit 54, a laser can be supplied to the irradiation unit 24. As a result, even if there is a limit to the size and / or weight of the laser irradiation member 2, the irradiation unit 24 can irradiate a high-output laser that requires a relatively large laser supply unit 54.

[0169] The laser supply unit 54 is not particularly limited as long as it can supply a laser to the irradiation unit 24 of the laser irradiation member 2. When the laser irradiation device 1 includes the transmission unit 23, it is preferable that the laser supply unit 54 can supply a laser to the irradiation unit 24 of the laser irradiation member 2 via the transmission unit 23. Since the laser supply unit 54 can supply a laser to the irradiation unit 24 of the laser irradiation member 2 via the transmission unit 23, the laser irradiation member 2 can irradiate the laser at a location away from the laser supply unit 54.

[0170] The laser supply unit 54 is preferably configured to be coolable by a coolant supplied from the cooling unit 56. By configuring the laser supply unit 54 to be coolable by a coolant supplied from the cooling unit 56, it is possible to prevent performance degradation, failure, and / or damage of the laser supply unit 54 due to high temperature.

[0171] [Laser oscillator] The laser supply unit 54 includes a laser oscillator. By including a laser oscillator, the laser supply unit 54 can supply the laser oscillated by the laser oscillator to the irradiation unit 24.

[0172] The laser oscillator is not particularly limited, and may be CO 2 The laser may be a gas laser, exemplified by a nitrogen laser, a helium-neon laser, an argon ion laser, an excimer laser, etc., a YAG laser, a Nd:YAG laser, a YVO 4 The laser oscillator may be a solid-state laser, exemplified by a YLF laser, a ruby ​​laser, etc., a semiconductor laser, a chemical laser, or a fiber laser using an optical fiber as a laser medium. Among them, it is preferable that the laser oscillator includes a fiber laser. Since a fiber laser has a higher output relative to power consumption than a solid-state laser, etc., it can oscillate a high-output laser even if the laser oscillator is small. In addition, since a fiber laser is superior to a solid-state laser, etc. in terms of reliability and life span, it can reduce the frequency of replacing the laser oscillator and reduce the labor required for maintenance of the laser supply unit 54.

[0173] The laser oscillator preferably includes a semiconductor laser as a laser excitation source. By including a semiconductor laser as a laser excitation source, the laser oscillation efficiency can be increased and thermal distortion of the laser medium can be reduced compared to when a lamp is used as an excitation source. In addition, since a semiconductor laser has a longer life as an excitation source than a lamp or the like, the frequency of replacing the excitation source can be reduced, and the labor involved in the maintenance work of the laser irradiation member 2 can be reduced.

[0174] The wavelength of the laser emitted by the laser oscillator is not particularly limited. The upper limit of the laser wavelength is preferably 500 micrometers or less, more preferably 50 micrometers or less, and even more preferably 5 micrometers or less. By setting the upper limit of the laser wavelength as described above, a laser having high energy can be irradiated. The lower limit of the laser wavelength is preferably 1 nanometer or more, more preferably 10 nanometers or more, and even more preferably 100 nanometers or more. By setting the lower limit of the laser wavelength as described above, the energy of the laser can be suppressed, and the temperature rise of the lens and / or the irradiation target can be reduced.

[0175] The output of the laser oscillator is not particularly limited. The lower limit of the output of the laser oscillator is preferably 1 W or more, more preferably 10 W or more, and even more preferably 50 W or more. By setting the lower limit of the output of the laser oscillator as described above, a laser having high energy can be irradiated. The upper limit of the output of the laser oscillator is preferably 10 kW or less, more preferably 5 kW or less, and even more preferably 3 kW or less. By setting the upper limit of the output of the laser oscillator as described above, the energy of the laser can be suppressed, and the temperature rise of the lens and / or the irradiation target can be reduced.

[0176] The laser oscillator is preferably a laser oscillator capable of oscillating a laser in a pulsed manner. By using a laser oscillator capable of oscillating a laser in a pulsed manner, it is possible to suppress the temperature rise of the lens and / or the irradiation target compared to the case of continuous laser oscillation (also called CW). This makes it possible to prevent distortion, deformation and / or damage of the lens due to heat. In addition, since the temperature rise of the irradiation target is reduced, the effect of temperature rise when performing fine processing on the irradiation target can be suppressed.

[0177] The pulse width when the laser is oscillated by the pulse method is not particularly limited. The lower limit of the pulse width is preferably 10 femtoseconds or more, more preferably 1 picoseconds or more, and even more preferably 100 picoseconds or more. By determining the lower limit of the pulse width as described above, the energy of the laser irradiated to the irradiation target can be increased. The pulse width here refers to the length of time during which the laser output is 50% or more of the peak output, which is the output when the laser output is the highest.

[0178] The upper limit of the pulse width is preferably 1 second or less, more preferably 10 milliseconds or less, and even more preferably 200 nanoseconds or less. By setting the upper limit of the pulse width as described above, it is possible to suppress the temperature rise of the lens and / or the irradiation target. This makes it possible to prevent distortion, deformation and / or damage of the lens due to heat. In addition, since the temperature rise of the irradiation target is reduced, the effect of the temperature rise when performing fine processing on the irradiation target can be suppressed.

[0179] The pulse frequency when the laser is oscillated by the pulse method is not particularly limited. The lower limit of the pulse frequency is preferably 1 Hz or more, more preferably 50 Hz or more, and even more preferably 1 kHz or more. By setting the lower limit of the pulse frequency as described above, it is possible to reduce uneven heating between pulses when the laser irradiation point moves.

[0180] The upper limit of the pulse frequency is preferably 10 MHz or less, more preferably 1 MHz or less, and even more preferably 500 kHz or less. By setting the upper limit of the pulse frequency as described above, pulses can be generated even when the laser wavelength is long.

[0181] When the laser is oscillated by the pulse method, the peak output is not particularly limited. The lower limit of the peak output is preferably 1 W or more, more preferably 100 W or more, and even more preferably 10 kW or more. By setting the lower limit of the peak output as described above, the energy of the laser irradiated to the irradiation target can be increased.

[0182] The upper limit of the peak output is preferably 2 PW or less, more preferably 50 GW or less, and even more preferably 2 MW or less. By setting the upper limit of the peak output as described above, it is possible to suppress the temperature rise of the lens and / or the irradiation target. This makes it possible to prevent distortion, deformation and / or damage of the lens due to heat. In addition, since the temperature rise of the irradiation target is reduced, the effect of the temperature rise when performing fine processing on the irradiation target can be suppressed.

[0183] [Control Unit] The laser supply unit 54 preferably includes a control unit (not shown) capable of controlling the operation of the laser supply unit 54 by software. By including the control unit in the laser supply unit 54, the operation of the laser supply unit 54, exemplified by the irradiation state of the laser supplied by the laser supply unit 54, the output of the laser supplied by the laser supply unit 54, the pulse width of the laser supplied by the laser supply unit 54, and the pulse frequency of the laser supplied by the laser supply unit 54, can be controlled by software. When the laser supply unit 54 includes a control unit, the control unit preferably has an operation means (interface) related to the operation of controlling the operation of the laser supply unit 54. By including the operation means in the control unit related to the operation of the laser supply unit 54, the user can perform an operation to control the operation of the laser supply unit 54 via the operation means. The operation means is not particularly limited, and may be, for example, a conventional operation means exemplified by a touch screen, a touch panel, and various switches. When the laser supply unit 54 includes a control unit, the control unit preferably has a display means capable of displaying information related to the operation of the laser supply unit 54. The control unit has a display means, so that the user can check information related to the operation of the laser supply unit 54 through the display means. The display means is not particularly limited, and may be a display means of the conventional technology exemplified by a touch screen, a touch panel, a liquid crystal display, an organic EL display, a light emitting diode, a lamp, and the like.

[0184] [Suction part 55] The suction unit 55 is a member configured to be able to suck in the suction object and / or the gas to be sucked containing the suction object through the nozzle 4. The suction unit 55 is not particularly limited as long as it is a member configured to be able to suck in the suction object, etc. through the nozzle 4, and is configured to include a member configured to be able to suck in the suction object, etc. of the prior art, exemplified by a dust collector.

[0185] The suction unit 55 preferably includes a filter capable of collecting the object to be suctioned. By including a filter capable of collecting the object to be suctioned in the suction unit 55, when the object to be suctioned contains a harmful substance, the scattering of the harmful substance contained in the object to be suctioned can be suppressed. The filter capable of collecting the object to be suctioned is not particularly limited, and may be, for example, a filter conforming to HEPA filter specifications and / or a filter containing activated carbon.

[0186] It is preferable that the suction unit 55 is capable of sucking the suction target, etc., via the transfer unit 44. Since the suction unit 55 is capable of sucking the suction target, etc., via the transfer unit 44, the nozzle 4 can suck the suction target at a location away from the suction unit 55.

[0187] The output of the suction unit 55 is not particularly limited. The lower limit of the output of the suction unit 55 is preferably 1 kW or more, more preferably 2 kW or more, and even more preferably 3 kW or more. By setting the lower limit of the output of the suction unit 55 as described above, the suction target and the like can be more reliably sucked in. The upper limit of the output of the suction unit 55 is preferably 50 kW or less, more preferably 20 kW or less, and even more preferably 10 kW or less. By setting the upper limit of the output of the suction unit 55 as described above, it is possible to prevent the irradiation target and the like from being mistakenly sucked in.

[0188] The pressure difference between the atmospheric pressure and the pressure when the suction unit 55 sucks the object to be sucked is not particularly limited. The upper limit of the pressure difference is preferably 80 kPa or less, more preferably 60 kPa or less, and even more preferably 50 kPa or less. By setting the upper limit of the pressure difference as described above, it is possible to prevent the irradiation object from being sucked in by mistake. The lower limit of the pressure difference is preferably 10 kPa or more, more preferably 15 kPa or more, and even more preferably 20 kPa or more. By setting the lower limit of the pressure difference as described above, it is possible to more reliably suck in the object to be sucked.

[0189] [Cooling section 56] Although not essential, the laser irradiation support vehicle 5 is preferably provided with a cooling unit 56 capable of cooling the laser irradiation support vehicle 5. By providing the laser irradiation support vehicle 5 with the cooling unit 56 capable of cooling the laser irradiation support vehicle 5, the temperature of the laser irradiation support vehicle 5 can be kept close to room temperature. This can prevent the laser oscillator included in the laser supply unit 54 from being deteriorated in performance, broken, and / or damaged due to high temperature. By providing the laser irradiation support vehicle 5 with the cooling unit 56, the user of the laser irradiation device 1 can use the laser irradiation device 1 in a more comfortable environment. The cooling unit 56 is not particularly limited as long as it can cool the laser irradiation support vehicle 5, but is preferably a cooling unit capable of cooling the temperature of the laser irradiation support vehicle 5 to 40° C. or less. By providing the cooling unit 56 with the cooling unit capable of cooling the temperature of the laser irradiation support vehicle 5 to 40° C. or less, the performance of the laser oscillator can be further prevented from being deteriorated in performance, broken, and / or damaged due to high temperature. In addition, the user of the laser irradiation device 1 can use the laser irradiation device 1 in a more comfortable environment.

[0190] The cooling unit 56 is preferably capable of dehumidifying the laser irradiation support vehicle 5. By the cooling unit 56 being capable of dehumidifying the laser irradiation support vehicle 5, the humidity of the laser irradiation support vehicle 5 can be reduced, and the laser supply unit 54 and the like can be prevented from being corroded and / or oxidized due to high humidity. Furthermore, the user of the laser irradiation device 1 can use the laser irradiation device 1 in a more comfortable environment. When the cooling unit 56 is capable of dehumidifying the laser irradiation support vehicle 5, the cooling unit 56 is preferably a cooling unit capable of reducing the humidity of the laser irradiation support vehicle 5 to 60% or less, more preferably a cooling unit capable of reducing the humidity of the laser irradiation support vehicle 5 to 50% or less, and even more preferably a cooling unit capable of reducing the humidity of the laser irradiation support vehicle 5 to 40% or less. By the cooling unit 56 being a cooling unit capable of reducing the humidity of the laser irradiation support vehicle 5 to the above humidity or less, the laser supply unit 54 and the like can be further prevented from being corroded and / or oxidized due to high humidity.

[0191] The cooling unit 56 preferably includes a conventional cooling member, exemplified by a chiller or the like, capable of supplying liquid at a temperature lower than room temperature to the laser supply unit 54. By including a cooling member capable of supplying liquid at a temperature lower than room temperature in the coolant supply unit, the laser oscillator included in the laser supply unit 54 can be effectively cooled using liquid having a larger specific heat than gas.

[0192] [Coolant supply section] The coolant supply unit is a member capable of supplying coolant to the irradiation unit 24. By including the coolant supply unit, it is possible to supply coolant to the irradiation unit 24 and cool the irradiation unit 24. The coolant supply unit is not particularly limited as long as it is a member capable of supplying coolant to the irradiation unit 24. It is preferable that the coolant supply unit is capable of supplying coolant to the irradiation unit 24 via the transmission unit 23. By being able to supply coolant to the irradiation unit 24 via the transmission unit 23, the coolant supply unit can cool the irradiation unit 24 that is located away from the coolant supply unit.

[0193] The coolant is not particularly limited, and may be a conventional coolant containing, for example, gas (e.g., air at room temperature or lower, or dry air at room temperature or lower) and / or liquid (e.g., water at room temperature or lower, or purified water at room temperature or lower) having a temperature lower than that of the irradiation unit 24 when irradiating the laser. When the coolant contains gas having a temperature lower than that of the irradiation unit 24 when irradiating the laser, it can cool a portion where a pipe for circulating the coolant cannot be installed. When the coolant contains dry air having a temperature lower than that of the irradiation unit 24 when irradiating the laser, it can cool the irradiation unit 24 without causing a breakdown of the irradiation unit 24 due to moisture contained in the gas. When the coolant contains liquid having a temperature lower than that of the irradiation unit 24 when irradiating the laser, it can cool the irradiation unit 24 more effectively.

[0194] When the coolant includes air and / or dry air (hereinafter, also referred to as air, etc.), the coolant supply unit preferably includes a cooling member capable of supplying air, etc., of the prior art, exemplified by a compressor, etc. When the coolant supply unit includes a cooling member capable of supplying air, etc., the irradiation unit 24 can be cooled using air, etc. When the coolant supply unit includes a compressor, the lower limit of the compressor's output is preferably 0.5 kW or more, more preferably 1 kW or more, and even more preferably 1.5 kW or more. By setting the lower limit of the compressor's output as described above, the irradiation unit 24 can be cooled more effectively. When the coolant supply unit includes a compressor, the lower limit of the amount of air, etc. that the compressor can discharge is preferably 0.05 cubic meters or more per minute, more preferably 0.1 cubic meters or more per minute, and even more preferably 0.15 cubic meters or more per minute. By setting the lower limit of the amount of air, etc. that the compressor can discharge as described above, the irradiation unit 24 can be cooled more effectively. When the coolant is dry air, it is preferable that the coolant supply unit includes a dryer capable of removing moisture contained in the dry air. When the coolant supply unit includes a dryer capable of removing moisture contained in the dry air, the dry air can be kept even drier. When the coolant is dry air, it is preferable that the coolant supply unit includes a filter capable of collecting foreign matter such as dust, dirt, and dirt from the air, etc. When the coolant supply unit includes a filter capable of collecting foreign matter, it is possible to prevent the irradiation unit 24 from being damaged and / or broken due to foreign matter being mixed into the air, etc. used as the coolant.

[0195] When the coolant includes a liquid having a temperature lower than room temperature, it is preferable that the coolant supply unit includes a conventional cooling member capable of supplying a liquid having a temperature lower than room temperature, such as a chiller, etc. By including a cooling member capable of supplying a liquid having a temperature lower than room temperature, the irradiation unit 24 can be cooled more effectively than when only a gas having a specific heat smaller than that of a liquid is used as a coolant.

[0196] <<Portable laser irradiation system P>> 13 is a schematic front view showing an example of a portable laser irradiation system P according to this embodiment. The portable laser irradiation system P includes the above-mentioned laser irradiation device 1, a laser irradiation support device 6 that is portable and capable of supplying a laser to the irradiation unit 24 of the laser irradiation device 1, and a suction device 7 that can suck the suction target sucked by the nozzle 4 of the laser irradiation device 1.

[0197] <Laser irradiation support device 6> When the laser irradiation device 1 is installed and used in a facility such as a factory or a workshop, it is difficult to irradiate a laser beam to an irradiation target that is difficult to move to the facility due to factors such as a large width, depth, or height, a large weight, being fixed in a specific location, and / or the quality of which may be impaired by vibrations associated with the movement. Therefore, there is room for improvement in making it possible to irradiate a laser beam to an irradiation target that is difficult to move to the facility by configuring a device that supplies a laser beam to the laser irradiation device 1 to be movable.

[0198] The portable laser irradiation system P is configured to be portable and includes a laser irradiation support device 6 capable of supplying laser to the irradiation section 24 of the laser irradiation device 1, so that the portable laser irradiation system P is configured to be movable and can irradiate laser to an irradiation target that is difficult to move to the facility where the laser irradiation device 1 is installed.

[0199] In this embodiment, the laser irradiation support device 6 includes a movable device main body 61, a power supply unit 62 housed in the device main body 61 and capable of supplying power, and a laser supply unit 63 housed in the device main body 61 and capable of supplying laser using the power supplied by the power supply unit 62.

[0200] The weight of the laser irradiation support device 6 is not particularly limited. The lower limit of the weight of the laser irradiation support device 6 is preferably 5 kg or more, more preferably 10 kg or more, and even more preferably 15 kg or more. By determining the lower limit of the weight of the laser irradiation support device 6 as described above, it is possible to configure the device to include a relatively large laser supply unit 63 capable of supplying a high-output laser.

[0201] The upper limit of the weight of the laser irradiation support device 6 is preferably 30 kg or less, more preferably 25 kg or less, and further preferably 20 kg or less. By setting the upper limit of the weight of the laser irradiation support device 6 as described above, a transporter who carries the laser irradiation support device 6 can carry the laser irradiation support device 6.

[0202] [Device body 61] The device body 61 is not particularly limited as long as it can accommodate each component constituting the laser irradiation support portable body 6 and can be moved, and may be a body using a conventional housing member exemplified by a housing case, etc. By including the device body 61 in the laser irradiation support device 6, the portable laser irradiation system P can be configured to be movable.

[0203] [Control Unit] The device body 61 preferably includes a control unit (not shown) capable of controlling the operation of the laser supply unit 63 by software. By including the control unit in the device body 61, the operation of the laser supply unit 63, exemplified by the irradiation state of the laser supplied by the laser supply unit 63, the output of the laser supplied by the laser supply unit 63, the pulse width of the laser supplied by the laser supply unit 63, and the pulse frequency of the laser supplied by the laser supply unit 63, can be controlled by software. When the device body 61 includes a control unit, the control unit preferably has an operation means (interface) related to the operation of controlling the operation of the laser supply unit 63. By having the control unit have an operation means related to the operation of the laser supply unit 63, the user can perform an operation to control the operation of the laser supply unit 63 via the operation means. The operation means is not particularly limited, and may be, for example, a conventional operation means exemplified by a touch screen, a touch panel, and various switches. When the device body 61 includes a control unit, the control unit preferably has a display means capable of displaying information related to the operation of the laser supply unit 63. The control unit has a display means, so that the user can check information related to the operation of the laser supply unit 63 through the display means. The display means is not particularly limited, and may be a display means of the conventional technology exemplified by a touch screen, a touch panel, a liquid crystal display, an organic EL display, a light emitting diode, a lamp, and the like.

[0204] [Power supply section 62] The power supply unit 62 is not particularly limited as long as it is a power supply configured to be capable of supplying power to the laser irradiation member 2 and / or the laser supply unit 63, etc., and may be a power supply of the prior art. The laser irradiation support device 6 includes the power supply unit 62, so that it can supply power to the laser irradiation member 2 and / or the laser supply unit 63, etc. The power supply unit 62 is preferably a power supply unit that uses power supplied from an AC power supply, such as a commercial power supply. Since the power supply unit 62 is a power supply unit that uses power supplied from an AC power supply, the power supply unit 62 can easily convert the voltage of the power into a voltage suitable for the laser irradiation member 2 and / or the laser supply unit 63, etc. The AC power supply that supplies power to the power supply unit 62 is not particularly limited, and examples thereof include a commercial power supply with a voltage of 100V or more and 240V or less and a frequency of 50Hz or more and 60Hz or less, and an AC power supply that can supply substantially the same voltage and frequency as the commercial power supply among in-vehicle power supplies.

[0205] [Laser supply unit 63] The laser supply unit 63 is a member configured to be able to supply a laser to the irradiation unit 24 of the laser irradiation member 2. By providing the laser supply unit 63, when the irradiation unit 24 is a member configured to be able to irradiate a laser transmitted from a laser supply unit configured separately from the laser irradiation member 2, the laser supply unit 63 can supply a laser to the irradiation unit 24. As a result, even if there is a limit to the size and / or weight of the laser irradiation member 2, the irradiation unit 24 can irradiate a high-output laser that requires a relatively large laser supply unit 63.

[0206] The laser supply unit 63 is not particularly limited as long as it can supply a laser to the irradiation unit 24 of the laser irradiation member 2. The laser supply unit 63 includes a laser oscillator similar to the laser oscillator that the laser supply unit 54 can include. When the laser irradiation device 1 includes the transmission unit 23, it is preferable that the laser supply unit 63 can supply a laser to the irradiation unit 24 of the laser irradiation member 2 via the transmission unit 23. Since the laser supply unit 63 can supply a laser to the irradiation unit 24 of the laser irradiation member 2 via the transmission unit 23, the laser irradiation member 2 can irradiate the laser at a location away from the laser supply unit 63.

[0207] <Suction device 7> The suction device 7 is a device configured to be able to suck the object to be suctioned and / or the gas to be sucked containing the object to be suctioned through the nozzle 4, and may have a configuration similar to that of the suction unit 55. The suction device 7 may be, for example, a dust collector configured to be able to suck the object to be suctioned and / or the gas to be suctioned containing the object to be suctioned.

[0208] <<Example of use of laser irradiation device 1>> Fig. 14 is a schematic diagram showing an example of a method of using the laser irradiation device 1. Fig. 15 is an enlarged view of the periphery of the laser L in Fig. 14. Hereinafter, a usage example of the laser irradiation device 1 of this embodiment will be described with reference to Figs. 14 and 15.

[0209] [Removal from transportation member] A user of the laser irradiation device 1 (hereinafter also simply referred to as a user) takes out the laser irradiation device 1 from the transportation member. The user places the laser irradiation device 1 in a stable location. By the user placing the laser irradiation device 1 in a stable location, it is possible to prevent the laser irradiation device 1 from falling over.

[0210] [Connecting to power supply] The user points the laser L in a direction where there are no combustibles or other workers, etc., and then connects the laser irradiator 1 to a power source. By pointing the laser in a direction where there are no combustibles or other workers, etc., and then connecting the laser irradiator 1 to a power source, it is possible to prevent the laser L from igniting combustibles and / or causing serious damage to other workers, etc., even if the laser L is irradiated when it is connected to the power source.

[0211] [Storage of lens F] A user of the laser irradiation device 1 accommodates the lens F in the lens holding member 3 by a series of steps such as (a) attaching the top surface side main body part 311 to the laser irradiation member 2, (b) attaching the lens F to the laser irradiation member 2 through the top surface side opening O2 provided in the top surface side main body part 311, (c) attaching the bottom surface side main body part 312 to the top surface side main body part 311 so as to accommodate the lens F in the main body part 31, and (d) attaching the nozzle main body 41 according to the focal length of the lens F to the nozzle 4. As a result, the lens F is accommodated in the lens holding member 3 as shown in FIG. 15. In the state in which the lens F is accommodated in the lens holding member 3, a space C inside the lens holding member 3 is defined by the lens F accommodated in the main body part 31 and the bottom surface 31B, left side surface 31L, and right side surface 31R of the lens holding member 3. In step (a), the method of attaching top surface side main body portion 311 to laser irradiation member 2 is not particularly limited, and may be any method of attaching top surface side main body portion 311 to laser irradiation member 2, such as a method of fitting laser irradiation member 2 and top surface side main body portion 311 together, a method of screwing laser irradiation member 2 and top surface side main body portion 311 together, or a method of screwing laser irradiation member 2 and top surface side main body portion 311 together.

[0212] If the lens F is not attached, the laser L is not focused by the lens F and travels approximately parallel, reducing the heating effect caused by the irradiation of the laser L. When the focal length of the lens F matches the distance from the lens F to the irradiation target T, the heating effect caused by the irradiation of the laser L is maximized. Also, when the focal length of the lens F does not match the distance from the lens F to the irradiation target T, the heating effect caused by the irradiation of the laser L is reduced.

[0213] In the step (a) relating to the storage of the lens F, the user attaches the top surface side main body part 311 to the laser irradiation member 2 to which the lens F is not attached. Therefore, even if the laser L is irradiated to the user's hand, the heating effect due to the irradiation of the laser L is small, and it is possible to prevent serious damage to the user's hand.

[0214] In step (b) for storing the lens F, the user may touch the lens F and / or the vicinity of the top surface side main body portion 311. Since the distance from the lens F to these positions does not match the focal length of the lens F, the heating effect due to the irradiation of the laser L is small. Therefore, even if the laser L is irradiated to the user's hand, the heating effect due to the irradiation of the laser L is small, and it is possible to prevent serious damage to the user's hand.

[0215] In step (c) for storing the lens F, the user may touch the vicinity of the lens F, the top body part 311, and / or the bottom body part 312. Because the distance from the lens F to these positions does not match the focal length of the lens F, the heating effect caused by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated onto the user's hand, the heating effect caused by the irradiation of the laser L is small, and it is possible to prevent serious damage to the user's hand.

[0216] In step (d) relating to storing the lens F, the user may touch the vicinity of the attachment / detachment section 45. Because the distance from the lens F to the vicinity of the attachment / detachment section 45 does not match the focal length of the lens F, the heating effect caused by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated onto the user's hand, the heating effect caused by the irradiation of the laser L is small, and it is possible to prevent serious damage to the user's hand.

[0217] [Wear protective glasses] The user wears protective glasses. By wearing the protective glasses, the user can prevent blindness and / or eye damage caused by the laser L and / or the reflected laser R when the laser L and / or the reflected laser R is irradiated near the eyes.

[0218] [Laser L irradiation] Returning to FIG. 14, the user holds the laser irradiation member 2 using the holding unit 21, and moves the laser irradiation member 2 so that the suction port O3 is in the vicinity of the irradiation target T and the irradiation point of the laser L emitted by the laser irradiation member 2 approximately coincides with the irradiation target T. The user operates the operation unit 22 to irradiate the irradiation target T with the laser L. As a result, the laser L is irradiated to the irradiation target T, and residue evaporated from the irradiation target T may become fumes H. In addition, part of the laser L may become reflected laser R and be scattered in various directions including the direction of the lens holding member 3.

[0219] By irradiating the irradiation target T with the laser L, if the irradiation target T is an attachment attached to the surface of a material, the attachment can be heated and evaporated and / or peeled off from the surface of the material. Furthermore, if the irradiation target T is a metal, a part of the evaporated irradiation target T can become plasma. This plasma combines with oxygen in the atmosphere, oxidizes, and adheres to the surface of the irradiation target T, forming a stable oxide film on the surface of the irradiation target T. This can impart an anti-rust and / or anti-corrosion effect to the irradiation target T.

[0220] While the irradiation target T is being irradiated with the laser L, the user may use the operation unit 22 to switch the irradiation pattern of the laser L. While the irradiation target T is being irradiated with the laser L, the user may use the operation unit 22 to change the output of the laser L. While the irradiation target T is being irradiated with the laser L, the user may use the operation unit 22 to change the irradiation direction of the laser L.

[0221] [Inhalation of Hume H] 15, some of the fumes H may become irradiation target-periphery fumes H1 around the irradiation target T. If the irradiation target-periphery fumes H1 adhere to the irradiation target T, the quality of the irradiation target T may be impaired.

[0222] The nozzle body 41 is hollow and has a suction port O3 that can suck in the fumes H (object to be sucked) generated during laser processing, so that the fumes H1 around the irradiation object can be sucked and collected at the suction port O3. When viewed from the direction in which the fumes H1 around the irradiation object can be sucked in, the length of the suction port O3 in the longitudinal direction is four times or more longer than the length in the lateral direction, so that when the gas to be sucked, which contains the fumes H1 around the irradiation object, passes through the suction port O3 from outside the nozzle 4, the cross-sectional area of ​​the flow path through which the gas to be sucked flows becomes smaller. This creates a Venturi effect in which the flow speed of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the flow speed of the gas to be sucked can be increased. Therefore, the suction force for sucking in the fumes H1 around the irradiation object contained in the gas to be sucked can be improved.

[0223] Furthermore, the cross-sectional area of ​​the flow path through which the aspirated gas flows can be reduced by the structure 42. This reduces the cross-sectional area of ​​the flow path through which the fluid flows when the aspirated gas containing the fumes H1 around the irradiation target passes around the structure 42. This creates a Venturi effect in which the speed of the fluid flow increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the speed of the aspirated gas flow can be further increased. This can improve the suction force for sucking in the fumes H1 around the irradiation target contained in the aspirated gas.

[0224] The structure 42 can provide resistance to the flow of the gas to be aspirated, and the gas to be aspirated can be adiabatically compressed. The adiabatically compressed gas can increase the temperature of the gas to be aspirated. This can accelerate the flow of the gas to be aspirated when the flow of the gas to be aspirated is subsonic, and can further increase the speed of the gas to be aspirated. Therefore, when the flow of the gas to be aspirated is subsonic, the suction force for sucking the fumes H1 around the irradiation target contained in the gas to be aspirated can be improved.

[0225] When the structure 42 is attached to a location different from both ends of the suction port O3, the structure 42 can divide the flow of the gas to be sucked into a plurality of flows, and the cross-sectional area of ​​the flow path for each of the divided flows can be reduced. Then, when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, a Venturi effect occurs in which the speed of the flow of the fluid increases, and the speed of the flow of the gas to be sucked can be further increased. Therefore, the suction force for sucking the fumes H1 around the irradiation target contained in the gas to be sucked can be improved.

[0226] When the structure 42 is attached at a position different from both ends of the suction port O3, the structure 42 can divide the flow of the gas to be sucked into a plurality of flows, and the gas to be sucked can be adiabatically compressed for each of the divided flows. This can more efficiently adiabatically compress the gas to be sucked, and increase its temperature. This can accelerate the flow of the gas to be sucked when the flow of the gas to be sucked is a subsonic flow, and can more effectively increase the speed of the gas to be sucked. Therefore, when the flow of the gas to be sucked is a subsonic flow, the suction force for sucking the fumes H1 around the irradiation target contained in the gas to be sucked can be improved.

[0227] When the gas to be sucked, including the fumes H1 around the irradiation target sucked from the suction port O3, enters the narrow part 41B from the wide part 41A, the cross-sectional area of ​​the flow path through which the gas to be sucked flows becomes smaller. This creates a Venturi effect in which the flow speed of the fluid increases when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, and the flow speed of the gas to be sucked can be further increased. Therefore, the suction force for sucking the fumes H1 around the irradiation target contained in the gas to be sucked can be improved.

[0228] In the flow of a compressible fluid such as a gas, when the cross-sectional area of ​​the flow path through which the fluid flows is reduced, adiabatic compression can occur, in which the fluid is compressed without exchanging heat with the outside. In addition, in the flow of a compressible fluid such as a gas, when the flow is subsonic, a phenomenon is known in which the flow accelerates when the temperature of the fluid increases.

[0229] When the gas to be sucked, including the fumes H1 around the irradiation target, enters the narrow portion 41B from the wide portion 41A, the gas to be sucked is adiabatically compressed, and the temperature of the gas to be sucked may rise. This may accelerate the flow of the gas to be sucked, and further increase its speed, when the flow of the gas to be sucked is subsonic. Therefore, when the flow of the gas to be sucked is subsonic, the suction force for sucking the fumes H1 around the irradiation target contained in the gas to be sucked may be improved.

[0230] [Movement of Hume H] The fumes H are formed from residues evaporated from the irradiation target T, and therefore have a higher temperature than the temperature around the irradiation target T. This heats up the gas around the fumes H, which can become an updraft. As a result, some of the fumes H rise with the updraft and move to the periphery of the lens holding member 3, and can become fumes H2 around the lens holding member.

[0231] By housing the lens F in the main body portion 31, adhesion of fumes H2 around the lens housing member to the lens F can be suppressed.

[0232] Incidentally, since the laser L can pass through the main body 31 from the top surface 31T toward the bottom surface 31B, and the bottom surface 31B is provided with the bottom surface opening O1, when the lens F is housed in the main body 31, the laser L can be irradiated onto the target object through the bottom surface opening O1. This bottom surface opening O1 can cause the fumes H2 around the lens holding member to enter from the outside of the lens holding member 3 toward the space C inside the lens holding member 3, and can cause the fumes H2 around the lens holding member to adhere to the lens F.

[0233] 15, the gas introduction section 32 introduces the first gas G1 into the space C, and the first gas G1 introduced into the space C becomes a flow of the first gas G1 passing through the bottom opening O1 from the space C toward the outside of the lens holding member 3. Due to the flow of the first gas G1 flowing in the flow direction FD1 of the first gas G1, the lens holding member peripheral fumes H2 in the vicinity of the bottom opening O1 outside the lens holding member 3 are pushed in a direction away from the bottom opening O1. This can prevent the presence of the bottom opening O1 from being a cause of fumes H adhering to the lens F.

[0234] In addition, by suppressing adhesion of fumes H to the stored lens F, the fumes H adhering to the stored lens F can absorb the laser L and reduce the temperature rise of the stored lens F. By reducing the temperature rise of the stored lens F, distortion, deformation, and / or damage of the lens F due to heat can be prevented.

[0235] By further providing the gas delivery unit 33, the second gas G2 delivered in the direction FD2 substantially perpendicular to the flow direction FD1 of the first gas G1 can push the fumes H2 around the lens holding member that are in a position where they can absorb the laser L irradiated through the bottom opening O1 in a direction substantially perpendicular to the direction of the laser L passing through the bottom opening O1, and move them to a position where they do not absorb the laser L. Therefore, the adverse effect of the fumes H2 around the lens holding member on the irradiation of the laser L can be further reduced.

[0236] [Dispersion of reflected laser R] Returning to Fig. 14, a part of the laser L irradiated to the irradiation target T may become a reflected laser R and be scattered in various directions including the direction of the lens holding member 3. When the reflected laser R reflected by the irradiation target T of the laser L heads toward the lens holding member 3, the reflected laser R may increase the temperature of the lens holding member 3. The lens holding member 3 with an increased temperature may heat the lens F held therein by radiant heat and / or thermal conduction from the lens holding member 3, thereby increasing the temperature of the lens F held therein.

[0237] Since the main body 31 has, on the bottom surface 31B, the reflective laser dispersion structure D capable of dispersing the reflected laser R reflected at the irradiation target T of the laser L, the reflected laser R is dispersed by the reflective laser dispersion structure D, and the temperature rise of the lens holding member 3 caused by the reflected laser R can be reduced. This can reduce the temperature rise of the held lens F. By reducing the temperature rise of the held lens F, it is possible to prevent distortion, deformation, and / or damage of the lens F due to heat.

[0238] [Cooling of irradiation target T] Although not essential, when irradiating the irradiation target T with the laser L, a cooling gas such as carbon dioxide gas, LP gas, nitrogen gas, and helium gas may be sprayed onto the irradiation target T to lower the temperature of the irradiation target T. This reduces the temperature rise of the irradiation target T and can prevent deterioration of the quality of the irradiation target T due to high temperatures.

[0239] [Replacing Lens F] A user can replace the lens F according to the shape of the irradiation target T, etc. The user replaces the lens F by, for example, a series of steps of (A) removing the nozzle body 41 from the nozzle 4, (B) removing the bottom side body part 312 from the top side body part 311, (C) removing the lens F before replacement from the laser irradiation member 2, (D) attaching the replaced lens F to the laser irradiation member 2 through the top side opening O2 provided in the top side body part 311, (E) attaching the bottom side body part 312 to the top side body part 311 so as to accommodate the replaced lens F in the body part 31, and (F) attaching the nozzle body 41 according to the focal length of the replaced lens F to the nozzle 4 and / or a step of replacing the lens F used for laser irradiation using the lens replacement operation part 25, etc.

[0240] In step (A) for replacing the lens F, the user may touch the vicinity of the attachment / detachment unit 45. Because the distance from the lens F to the vicinity of the attachment / detachment unit 45 does not match the focal length of the lens F, the heating effect caused by the irradiation of the laser L is small. Therefore, even if the laser L is irradiated onto the user's hand, the heating effect caused by the irradiation of the laser L is small, and it is possible to prevent serious damage to the user's hand.

[0241] In step (B) for replacing lens F, the user may touch the vicinity of lens F, top body part 311, and / or bottom body part 312. Because the distance from lens F to these positions does not match the focal length of lens F, the heating effect caused by irradiation with laser L is small. Therefore, even if the laser L is irradiated onto the user's hand, the heating effect caused by irradiation with laser L is small, and serious damage to the user's hand can be prevented.

[0242] In step (C) for replacing the lens F, the user may touch the lens F and / or the vicinity of the top surface side main body portion 311. Since the distance from the lens F to these positions does not match the focal length of the lens F, the heating effect due to the irradiation of the laser L is small. Therefore, even if the laser L is irradiated to the user's hand, the heating effect due to the irradiation of the laser L is small, and it is possible to prevent serious damage to the user's hand.

[0243] The steps (D) to (F) relating to the replacement of the lens F are similar to the steps (b) to (d) relating to the storage of the lens F.

[0244] In the procedure of exchanging the lens F used for laser irradiation using the lens exchange operation unit 25, the user does not touch the position irradiated with the laser L. Therefore, it is possible to prevent the laser L from causing serious damage to the user's hand.

[0245] [End of laser irradiation] The user ends the irradiation of the laser L via the operation unit 22. The user removes the laser irradiation device 1 from the power source. The user stores the laser irradiation device 1 in a transportation member.

[0246] According to this embodiment, it is possible to provide a lens holding member 3 that can further suppress adhesion of fumes H to optical components, reduce temperature rise in the optical components, and prevent distortion, deformation, and / or damage to the optical components.

[0247] Moreover, according to this embodiment, it is possible to provide the nozzle 4 capable of improving the suction force.

[0248] Although the embodiments of the present invention have been described above, the present invention is not limited to the above-mentioned embodiments. Furthermore, the effects described in the embodiments of the present invention are merely a list of the most preferable effects resulting from the present invention, and the effects of the present invention are not limited to those described in the embodiments of the present invention.

[0249] Furthermore, the above-described embodiment has been described in detail to clearly explain the present invention, and the present invention is not necessarily limited to having all of the configurations described. [Explanation of symbols]

[0250] 1 Laser irradiation device 2 Laser irradiation components 21 Holding part 22 Control section 23 Transmission section 24 Irradiation unit 25 Lens exchange operation section 3 Lens housing member 31 Main body 311 Top side body part 312 Bottom side body part 31T top 31B Bottom 31L left side 31R Right side 32 Gas introduction section 33 Gas delivery section 4 Nozzles 41 Nozzle body 41A Wide section 41B Narrow part 42 Structure 43 Upper suction part 44 Transfer section 45 Detachable part 5 Laser Irradiation Support Vehicle 51 Vehicle body 52 Power supply section 53 Power Transmission Section 54 Laser supply section 55 Suction part 56 Cooling section 6 Laser irradiation support device 61 Device body 62 Power supply section 63 Laser Supply Unit 7 Suction device C space D Reflective laser dispersion structure F Lens G1 First gas G2 Second gas H. Hume H1 Fumes around the irradiation target H2 Fumes around the lens housing L Laser irradiation direction N pore O1 Bottom opening O2 top side opening O3 suction port O4 upper suction port O5 Junction O6 upper opening P Portable laser irradiation system R Reflective laser S Mobile laser irradiation system T Irradiation target

Claims

1. A lens housing member including a lens housing portion capable of housing a lens used for irradiating a laser, the lens housing portion allowing the laser to pass through the lens housing portion from a top surface portion to a bottom surface portion, a main body portion having the lens housing portion and having a bottom surface opening through which the laser passes; A gas introduction section configured to be able to introduce a first gas into the inside of the main body section; a gas delivery unit attached to a bottom surface of the main body and configured to be able to deliver a second gas; The first gas introduced into the main body is discharged from the main body through the bottom side opening, The second gas is delivered from the gas delivery section to the bottom opening side so as to flow along the bottom surface of the main body section in the vicinity of the bottom surface of the main body section.

2. The lens holder according to claim 1 ; a laser irradiation member having a holder for a user to hold and to which the lens housing member is attached; A laser irradiation device, wherein the laser irradiation member is capable of emitting a laser whose irradiation point moves on a focal plane.

3. The laser irradiation device according to claim 2 , further comprising a nozzle for sucking fumes generated by the laser irradiation by the laser irradiation member.

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