Protective film forming device

Abstract

To provide a protective film forming device capable of forming a protective film of a uniform thickness regardless of a shape of a workpiece or an external environment, and a protective film forming method.SOLUTION: A protective film forming device 1 comprises a coating unit 20 including: an ultrasonic vibrator 31 provided with a horn 32 having a vibration plane 33 opposed to a workpiece 100 held by a holding table 10; a liquid-state resin supply nozzle 42 supplying a liquid-state resin 41 to the horn 32; and a gas supply nozzle 52 disposed to enclose the ultrasonic vibrator 31 and having an ejection port 53 from which a gas 51 is ejected toward the workpiece 100. The coating unit is capable of atomizing the liquid-state resin 41 by supplying the liquid-state resin 41 from the liquid-state resin supply nozzle 42 to the horn 32 in a state where the ultrasonic vibrator 31 is vibrated, and capable of forming an air curtain 54 enclosing the atomized liquid-state resin 41 with a flow of the gas 51 ejected from the ejection port 53 of the gas supply nozzle 52.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a protective film forming device. Place Regarding. [Background technology]

[0002] In the manufacturing process of semiconductor devices, when dividing a workpiece (wafer) with devices formed on its surface into chip sizes, a method has been proposed in which a laser beam is irradiated along a planned dividing line set on the workpiece to perform ablation processing (see Patent Document 1). This type of processing method generates processing waste called debris, which may scatter and reattach to the workpiece, thereby contaminating the workpiece.

[0003] To solve this problem, a method has been disclosed in which a water-soluble protective film is formed on the surface of a workpiece, debris generated during processing is attached to the protective film, and the protective film and debris are simultaneously washed and removed (see Patent Document 2). A typical method for applying a protective film involves supplying a water-soluble liquid resin to the surface of the workpiece on the spinner table while rotating the spinner table holding the workpiece at high speed, covering the surface of the workpiece as the liquid resin moves under the influence of centrifugal force, and drying to form a protective film. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 10-305420 [Patent Document 2] JP 2006-140311 A [Patent Document 3] Japanese Patent Application Publication No. 6-210236 Summary of the Invention [Problem to be solved by the invention]

[0005] However, when the workpiece has bumps such as steps or electrodes, it is difficult to apply the liquid resin uniformly to the work surface of the workpiece, and there is a possibility that some parts will not be covered with a protective film. Therefore, when a method of atomizing the liquid resin using ultrasonic waves and applying it to the workpiece (see Patent Document 3) was adopted, the atomized liquid resin sways due to disturbances such as static electricity, and a problem occurred in that it was not possible to apply it uniformly to the workpiece.

[0006] The present invention has been made in view of the above problems, and an object of the present invention is to provide a protective film forming apparatus capable of forming a protective film of a uniform thickness regardless of the shape of a workpiece or the external environment. Place The aim is to provide. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, a protective film forming device of the present invention is a protective film forming device that forms a protective film on a workpiece, and includes a holding table that holds the workpiece, and a coating unit that coats the upper surface of the workpiece held on the holding table with liquid resin to form a protective film, the coating unit including an ultrasonic vibrator equipped with a horn having a vibration surface that faces the workpiece held on the holding table, a liquid resin supply nozzle that supplies liquid resin to the horn, and a gas supply nozzle that is arranged to surround the ultrasonic vibrator and has a jet outlet that sprays gas toward the workpiece, and is capable of atomizing the liquid resin by supplying the liquid resin from the liquid resin supply nozzle to the horn while the ultrasonic vibrator is vibrated, and is capable of forming an air curtain that surrounds the atomized liquid resin by the flow of gas sprayed from the jet outlet of the gas supply nozzle. The ultrasonic transducer has a vibration plate arranged so as to have a minute gap between the vibration surface of the horn and the vibration plate. It is characterized by the above.

[0009] In the protective film forming apparatus of the present invention, the horn and the diaphragm may be integrally formed.

[0010] In the protective film forming apparatus of the present invention, the liquid resin supply nozzle may supply liquid resin to the gap.

[0011] The protective film forming apparatus of the present invention may further include a cleaning mechanism for removing the liquid resin adhered to the horn.

[0012] In the protective film forming apparatus of the present invention, the gas supplied from the gas supply nozzle may be dry air.

[0013] The protective film forming apparatus of the present invention may further include a heat source for heating the gas supplied from the gas supply nozzle.

[0014] The protective film forming apparatus of the present invention may further include a liquid resin dripping nozzle that drips liquid resin onto the upper surface of the workpiece held on the holding table. Effect of the Invention

[0016] The present invention can form a protective film of uniform thickness regardless of the shape of the workpiece or the external environment. [Brief description of the drawings]

[0017] [Figure 1] FIG. 1 is a side view, partially in cross section, showing a schematic configuration example of a protective film forming apparatus according to an embodiment. [Diagram 2] FIG. 2 is a perspective view of a workpiece to be processed by the protective film forming apparatus shown in FIG. [Diagram 3] FIG. 3 is a side view, partly in section, showing an example of the configuration of the vibration surface of the atomization unit shown in FIG. [Figure 4] FIG. 4 is a perspective view showing, in partial cross section, a configuration example of a main part of the air curtain forming unit shown in FIG. [Diagram 5] FIG. 5 is a flow chart showing the flow of the protective film forming method according to the embodiment. [Figure 6] FIG. 6 is a side view, partially in cross section, illustrating a schematic example of the first protective film forming step illustrated in FIG. [Figure 7] FIG. 7 is a cross-sectional view showing a main part of the workpiece in one state after the first protective film forming step shown in FIG. [Figure 8] FIG. 8 is a cross-sectional view showing a main part of the workpiece in one state after the second protective film forming step shown in FIG. [Figure 9] FIG. 9 is a side view, partially in section, showing an example of the configuration of the vibration surface of the atomization unit of the first modified example. [Figure 10] FIG. 10 is a side view, partially in section, showing an example of the configuration of the vibration surface of the atomization unit of the second modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0019] [Embodiment] First, a protective film forming apparatus 1 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a side view, partially in cross section, showing a schematic configuration example of the protective film forming apparatus 1 of the embodiment. Fig. 2 is a perspective view of a workpiece 100 to be processed by the protective film forming apparatus 1 shown in Fig. 1. Fig. 3 is a side view, partially in cross section, showing a configuration example of the vibration surface 33 of the atomization unit 30 shown in Fig. 1. Fig. 4 is a perspective view, partially in cross section, showing a configuration example of the main part of the air curtain forming unit 50 shown in Fig. 1.

[0020] 1, the protective film forming apparatus 1 of the embodiment includes a holding table 10, a coating unit 20, a cleaning mechanism 60, and a liquid resin dripping unit 70 (see FIG. 6 described later). Note that in the drawings attached to this specification, the coating unit 20 is depicted as being exaggerated and relatively larger than the other components of the protective film forming apparatus 1 for the purpose of explanation, but in reality, it is sized to be movable between an operating position located above the holding table 10 and a retracted position spaced apart from above the holding table 10.

[0021] The protective film forming device 1 is a device that applies a liquid resin 41 atomized from a coating unit 20 to a workpiece 100 held on a holding table 10, thereby forming a protective film 120 (see FIG. 8) on the workpiece 100. The workpiece 100 is made of a material such as silicon (Si), sapphire (Al 2 O 3 The wafers are disc-shaped semiconductor wafers, optical device wafers, etc., with substrate 101 made of gallium arsenide (GaAs), silicon carbide (SiC), or the like.

[0022] As shown in FIG. 2, the workpiece 100 is formed in a region partitioned by a plurality of dividing lines 103 set in a lattice pattern on a surface 102 of a substrate 101. It was The workpiece 100 has a device 104. The device 104 is, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), etc. The surface of the workpiece 100 located opposite to the front surface 102 on which the device 104 is formed is referred to as a back surface 105.

[0023] In the embodiment, the workpiece 100 has a plurality of electrode bumps 106 mounted on the surface of the device 104, forming unevenness on the surface 102. The electrode bumps 106 have a height of about 200 μm and protrude from the surface of the device 104. The device 104 has an uneven structure due to the electrode bumps 106 mounted on the surface 102. The workpiece 100 is divided into individual devices 104 along the planned division lines 103 and is singulated into chips 107. The chips 107 are square-shaped in FIG. 2, but may be rectangular-shaped. In the embodiment, the workpiece 100 has electrode bumps 106 protruding from the surface of the device 104, forming unevenness on the surface 102. However, the present invention is not limited to the mounting of the electrode bumps 106, and may be formed with unevenness on the surface 102 side.

[0024] In this embodiment, the workpiece 100 is attached to an annular frame 110 and supported within an opening of the frame 110 with an adhesive tape 111 having a diameter larger than the outer diameter of the workpiece 100 attached to the back surface 105 .

[0025] The holding table 10 holds the workpiece 100 on a holding surface 11. The holding surface 11 is a disk shape formed from porous ceramics or the like. In the embodiment, the holding surface 11 is a plane parallel to the horizontal direction. The holding surface 11 is connected to a vacuum suction source via a vacuum suction path, for example. The holding table 10 suction-holds the workpiece 100 placed on the holding surface 11. A plurality of clamp members 12 are arranged around the holding table 10 to clamp an annular frame 110 that supports the workpiece 100. The holding table 10 can be rotated around a vertical axis by a rotation unit 13 that supports the holding table 10 from below.

[0026] The coating unit 20 is a unit that applies atomized liquid resin 41 to the upper surface (surface 102) of the workpiece 100 held on the holding table 10 to form a protective film 120 (second protective film 122, see FIG. 8 ). The coating unit 20 is movable between an operating position located above the holding table 10 and a retracted position spaced apart from above the holding surface 11 of the holding table 10 by a moving unit (not shown). The coating unit 20 includes an atomization unit 30, a liquid resin supply unit 40, and an air curtain forming unit 50.

[0027] The atomization unit 30 is a unit that atomizes the liquid resin 41 supplied from the liquid resin supply unit 40 described below. The atomization unit 30 includes an ultrasonic vibrator 31. The ultrasonic vibrator 31 generates ultrasonic waves by vibrating at a predetermined amplitude and frequency. In the embodiment, the ultrasonic vibrator 31 vibrates, for example, with an amplitude of 30 μm, an output of 20 W, and a frequency of 52 kHz. The ultrasonic vibrator 31 includes, for example, a piezoelectric element that expands and contracts when charged.

[0028] The ultrasonic vibrator 31 includes a horn 32 that amplifies vibration. Liquid resin 41 is supplied to the horn 32 from a liquid resin supply unit 40 described below. The horn 32 has a vibration surface 33 that faces the workpiece 100 held on the holding table 10. In this embodiment, the distance between the vibration surface 33 and the surface 102 of the workpiece 100 is 10 mm or more and 20 mm or less.

[0029] 3, the ultrasonic transducer 31 further includes a diaphragm 34. The diaphragm 34 is fixed to the vibration surface 33 of the horn 32 by screws 35 or the like. That is, the diaphragm 34 vibrates together with the horn 32. In the embodiment, the thickness of the diaphragm 34 is less than 100 μm. The diaphragm 34 is disposed so as to have a minute gap 36 between it and the vibration surface 33 of the horn 32.

[0030] In the embodiment, the distance (vertical distance) of the gap 36 between the vibration surface 33 and the vibration plate 34 is less than 100 μm. Liquid resin 41 is supplied to the gap 36 from a liquid resin supply unit 40 described below. The atomization unit 30 can atomize the liquid resin 41 by vibrating the ultrasonic vibrator 31 while the liquid resin 41 is being supplied from the liquid resin supply unit 40.

[0031] 1, the ultrasonic transducer 31 further includes a heat dissipation section 37. The heat dissipation section 37 dissipates heat from the ultrasonic transducer 31 that is heated by vibration. The heat dissipation section 37 includes, for example, a heat sink. The heat sink can be cooled, for example, by water cooling.

[0032] The liquid resin supply unit 40 is a unit that supplies the liquid resin 41 to the atomization unit 30. In the embodiment, the liquid resin supply unit 40 includes a liquid resin supply nozzle 42 that supplies the liquid resin 41 to the horn 32. The liquid resin supply nozzle 42 preferably supplies the liquid resin 41 to the gap 36 (see FIG. 3). In the embodiment, the supply port 43 of the liquid resin supply nozzle 42 is located inside a gas supply nozzle 52 of the air curtain forming unit 50 described later. In the embodiment, the liquid resin supply unit 40 supplies the liquid resin 41 at a supply rate of 0.2 mL / min or more and 1 mL / min or less. In the embodiment, the viscosity of the liquid resin 41 is 52 cP. The viscosity of the liquid resin 41 is not limited to the embodiment, and may be changed as appropriate as long as the liquid resin 41 can be atomized by the atomization unit 30.

[0033] The air curtain forming unit 50 is a unit that supplies gas 51 toward the workpiece 100 and forms an air curtain 54 that surrounds the sides of the area between the horn 32 and the workpiece 100 until the atomized liquid resin 41 is applied to the workpiece 100. The air curtain forming unit 50 is equipped with a gas supply nozzle 52.

[0034] The gas supply nozzle 52 ejects gas 51 toward the workpiece 100. The gas supply nozzle 52 is disposed so as to surround the ultrasonic transducer 31. As shown in FIG. 4, in the embodiment, the gas supply nozzle 52 has an ejection port 53 in the form of a slit opening downward, and is disposed in the form of a ring surrounding the side of the ultrasonic transducer 31 (see FIG. 1). The air curtain forming unit 50 forms an air curtain 54 surrounding the atomized liquid resin 41 by the flow of the gas 51 ejected from the ejection port 53 of the gas supply nozzle 52 toward the workpiece 100. In the embodiment, the ejection port 53 is disposed in the form of a ring, so that the air curtain 54 is formed in a substantially cylindrical shape.

[0035] In the embodiment, the flow of gas 51 forming air curtain 54 is aligned with the direction of atomized liquid resin 41 toward workpiece 100. Here, "along" includes being parallel and forming a small angle with each other. Also, in the embodiment, the direction of the flow of gas 51 forming air curtain 54 is the same as the direction of atomized liquid resin 41 toward the workpiece.

[0036] The gas 51 supplied from the gas supply nozzle 52 is preferably hot air or dry air at a temperature of 25° C. or higher and 80° C. or lower, or a mixture of hot air and dry air. 。 1, in the embodiment, the air curtain forming unit 50 further includes a heat source 55. The heat source 55 heats the gas 51 supplied from the gas supply nozzle 52. This can promote drying of the liquid resin 41 applied to the surface 102 of the workpiece 100. In the embodiment, the air curtain forming unit 50 supplies the gas 51 at a flow rate of 70 mL / min.

[0037] The protective film forming device 1 supplies liquid resin 41 from liquid resin supply nozzle 42 to horn 32 while ultrasonic vibrator 31 is vibrating, thereby allowing atomized liquid resin 41 to be applied to workpiece 100. At this time, air curtain 54 formed by gas 51 ejected from gas supply nozzle 52 surrounds atomized liquid resin 41, making it possible to apply atomized liquid resin 41 to workpiece 100 while suppressing the effects of external disturbances.

[0038] The protective film forming apparatus 1 applies liquid resin 41 to the entire surface 102 of the workpiece 100 by moving the coating unit 20 and the holding table 10 relatively to each other, and can form a protective film 120 (second protective film 122, see FIG. 8 ) that covers the surface 102 of the workpiece 100. The protective film forming apparatus 1 moves the coating unit 20 and the holding table 10 relatively in a spiral shape, for example. Furthermore, the protective film forming apparatus 1 repeatedly applies the coating, for example, five passes, until the irregularities (electrode bumps 106) on the surface 102 of the workpiece 100 are covered.

[0039] The cleaning mechanism 60 is a mechanism for removing the liquid resin 41 adhered to the tip of the horn 32. As shown in Fig. 1, the cleaning mechanism 60 includes, for example, a cleaning liquid supply nozzle 62 that supplies cleaning liquid 61 to the vibration surface 33 of the horn 32, and a liquid tank 64 filled with the cleaning liquid 61 in which the vibration surface 33 can be immersed. In the embodiment, the supply port 63 of the cleaning liquid supply nozzle 62 is located inside the gas supply nozzle 52 of the air curtain forming unit 50.

[0040] As shown in Fig. 6 described later, the liquid resin dripping unit 70 drips a predetermined amount of liquid resin 71 onto the upper surface (surface 102) of the workpiece 100 held on the holding table 10. The liquid resin dripping unit 70 includes a liquid resin dripping nozzle 72. The liquid resin 71 is the same as the liquid resin 41 supplied by the liquid resin supply unit 40 of the coating unit 20.

[0041] The liquid resin dripping nozzle 72 drips a predetermined amount of liquid resin 71 onto the upper surface (surface 102) of the workpiece 100 held on the holding table 10. The liquid resin dripping nozzle 72 is movable by a moving unit (not shown) between a dripping position where a supply port 73 is directed toward the workpiece 100 held on the holding table 10 and a retracted position spaced away from above the holding surface 11 of the holding table 10.

[0042] The protective film forming apparatus 1 drips a predetermined amount of liquid resin 71 onto the surface 102 of the workpiece 100 using the liquid resin dripping unit 70, and by rotating the holding table 10, the liquid resin 71 is spread to form a first protective film 121 (see Figure 7) that covers the surface 102 of the workpiece 100.

[0043] Next, a protective film forming method according to an embodiment of the present invention will be described with reference to the drawings. Fig. 5 is a flow chart showing the flow of the protective film forming method according to the embodiment. The protective film forming method according to the embodiment includes a holding step 201, a first protective film forming step 202, and a second protective film forming step 203.

[0044] (Retention step 201) The holding step 201 is a step of holding the workpiece 100 on the holding table 10 shown in Fig. 1. In the holding step 201, first, the back surface 105 side of the workpiece 100 is attached to an adhesive tape 111 that is attached to an annular frame 110 and has a diameter larger than the outer diameter of the workpiece 100, thereby supporting the workpiece 100 within the opening of the frame 110. Next, the back surface 105 side of the workpiece 100 is sucked and held to the holding surface 11 of the holding table 10 via the adhesive tape 111, and the frame 110 is clamped by the clamp member 12.

[0045] (First protective film forming step 202) Fig. 6 is a side view, partially in cross section, showing a schematic example of the first protective film forming step 202 shown in Fig. 5. Fig. 7 is a cross-sectional view showing a main part of the workpiece 100 in one state after the first protective film forming step 202 shown in Fig. 5. The first protective film forming step 202 is a step of forming a first protective film 121 that covers the upper surface (surface 102) of the workpiece 100.

[0046] In the first protective film forming step 202, first, a moving unit (not shown) moves the liquid resin dripping unit 70 to a dripping position where the supply port 73 faces the workpiece 100 held on the holding table 10. Next, a predetermined amount of liquid resin 71 is dripped from the liquid resin dripping nozzle 72 onto the upper surface (surface 102) of the workpiece 100 held on the holding table 10, and the holding table 10 is rotated around a vertical axis. As a result, the liquid resin 71 dripped onto the surface 102 of the workpiece 100 is diffused toward the outer periphery of the workpiece 100 by centrifugal force.

[0047] 7, the diffused liquid resin 71 covers the surface 102 of the workpiece 100 as a first protective film 121. The first protective film 121 exposes the protruding portions of the unevenness formed by the multiple electrode bumps 106 mounted on the surface 102 of the workpiece 100.

[0048] (Second protective film forming step 203) Fig. 8 is a cross-sectional view showing a main part of the workpiece 100 in one state after the second protective film forming step 203 shown in Fig. 5. The second protective film forming step 203 is a step of forming a second protective film 122 that covers the entire upper surface (surface 102) of the workpiece 100. The second protective film forming step 203 is performed after the first protective film forming step 202.

[0049] In the second protective film forming step 203, first, the coating unit 20 is moved to an operating position above the holding table 10 by a moving unit (not shown) (see FIG. 1). Next, the air curtain forming unit 50 supplies gas 51 from the gas supply nozzle 52 toward the workpiece 100. This forms an air curtain 54 surrounding the sides of the area between the horn 32 and the workpiece 100. Next, ultrasonic waves are generated by vibrating the ultrasonic vibrator 31 of the atomizing unit 30. The vibration of the ultrasonic vibrator 31 is transmitted to the horn 32 and amplified.

[0050] In the second protective film forming step 203, with the air curtain 54 formed and the ultrasonic vibrator 31 vibrating, liquid resin 41 is supplied from the liquid resin supply nozzle 42 to the horn 32 by the liquid resin supply unit 40. More specifically, the liquid resin 41 is supplied to the gap 36 between the vibration surface 33 and the vibration plate 34 of the horn 32. The liquid resin 41 is atomized by ultrasonic waves generated by the vibration of the ultrasonic vibrator 31.

[0051] 1, liquid resin supply nozzle 42 is provided inside gas supply nozzle 52. That is, atomized liquid resin 41 descends through an area surrounded by air curtain 54 and is applied to the upper surface (surface 102) of workpiece 100. That is, in second protective film formation step 203, liquid resin 41 is atomized, and in a state in which air curtain 54 surrounding atomized liquid resin 41 is formed, atomized liquid resin 41 is supplied to surface 102 of workpiece 100 held on holding table 10.

[0052] 8, liquid resin 41 atomized and supplied to surface 102 of workpiece 100 covers surface 102 of workpiece 100 together with electrode bumps 106 as second protective film 122. Since application unit 20 is able to apply atomized liquid resin 41 to workpiece 100 while suppressing the effects of external disturbances by surrounding atomized liquid resin 41 with air curtain 54, it is possible to make the thickness of second protective film 122 covering electrode bumps 106 uniform.

[0053] As described above, the protective film forming apparatus 1 and the protective film forming method of the embodiment form an air curtain 54 that surrounds an area until the atomized liquid resin 41 is applied to the surface 102 of the workpiece 100. For example, the atomized liquid resin 41 is disturbed by even a slight air flow generated when the application unit 20 scans the upper part of the workpiece 100 or when the holding table 10 rotates or translates, so that it is difficult to apply the atomized liquid resin 41 to a desired area of ​​the workpiece 100. In the protective film forming apparatus 1 of the embodiment, the air curtain 54 suppresses the influence of disturbances on the atomized liquid resin 41, so that the protective film 120 can be applied uniformly to the workpiece 100.

[0054] The present invention is not limited to the above embodiment. In other words, various modifications can be made without departing from the gist of the present invention. For example, the gas supply nozzle 52 has a slit shape with the nozzle 53 opening in a circular ring shape on the lower side in the embodiment, but in the present invention, the gas supply nozzle 52 may have a hole shape with multiple nozzles arranged in a circular ring shape.

[0055] Furthermore, the protective film forming apparatus 1 may be provided with a mechanism for heating the holding table 10 or a mechanism for irradiating the upper surface (surface 102) of the workpiece 100 with a halogen light in order to promote drying of the applied liquid resin 41. Furthermore, ethanol may be mixed into the supplied liquid resin 41 to improve drying properties.

[0056] Further, the vibration surface 33 of the horn 32 of the atomization unit 30 is not limited to the configuration in the embodiment, and in the present invention, for example, it may be configured as shown in FIG. 9 and FIG.

[0057] FIG. 9 is a side view showing a configuration example of the vibration surface 33 of the atomization unit 30-1 of the first modified example in a partial cross section. The atomization unit 30-1 of the first modified example differs from the atomization unit 30 of the embodiment in the configuration of the vibration plate 34-1 and the direction in which the screw 35-1 is screwed. That is, the vibration plate 34 of the embodiment is a lid shape that covers the vibration surface 33, which is the lower surface of the horn 32, and the side surface near the lower end, and is configured to be screwed from the side by the screw 35, while the vibration plate 34-1 of the first modified example is a flat plate shape and is configured to be screwed from below by the screw 35-1 via the spacer 38-1. The gap 36-1 between the vibration plate 34-1 and the vibration surface 33 of the first modified example is formed by the spacer 38-1.

[0058] FIG. 10 is a side view showing a configuration example of the vibration surface 33 of the atomization unit 30-2 of the second modified example in a partial cross section. The atomization unit 30-2 of the second modified example differs from the atomization unit 30 of the embodiment in that the horn 32 and the vibration plate 34-2 are integrally formed. That is, while the vibration plate 34 of the embodiment is provided separately from the horn 32 and fixed to the horn 32 by the screw 35, the vibration plate 34-2 of the second modified example is provided integrally with the horn 32 via the connecting portion 39-2. The connecting portion 39-2 is, for example, extended downward from the periphery of the vibration surface 33 of the horn 32 and connected to the upper surface side of the vibration plate 34-2 in the shape of a flat plate. The gap 36-2 between the vibration plate 34-2 and the vibration surface 33 of the second modified example is formed by the connecting portion 39-2 as a spacer. [Explanation of symbols]

[0059] 1 Protective film forming device 10 Holding table 20 Coating unit 30, 30-1, 30-2 Atomization unit 31 Ultrasonic transducer 32 Horn 33 Vibration Surface 34, 34-1, 34-2 diaphragm 36, 36-1, 36-2 gap 40 Liquid resin supply unit 41 Liquid Resin 42 Liquid resin supply nozzle 43 Supply port 50 Air curtain forming unit 51 Gas 52 Gas supply nozzle 53 spout 54 Air Curtain 55 Heat source 60 Cleaning mechanism 70 Liquid resin dripping unit 71 Liquid Resin 72 Liquid resin dripping nozzle 73 Supply Inlet 100 Workpiece 102 Surface (Top surface) 120 Protective film 121 First Protective Film 122 Second Protective Film

Claims

1. A protective film forming device for forming a protective film on a workpiece, A holding table for holding the workpiece; a coating unit for coating a liquid resin on an upper surface of the workpiece held on the holding table to form a protective film; Equipped with The application unit comprises: an ultrasonic transducer including a horn having a vibration surface facing the workpiece held on the holding table; a liquid resin supply nozzle that supplies liquid resin to the horn; a gas supply nozzle disposed so as to surround the ultrasonic transducer and having an outlet for ejecting gas toward the workpiece; Including, The liquid resin can be atomized by supplying the liquid resin from the liquid resin supply nozzle to the horn while the ultrasonic vibrator is vibrated, and an air curtain can be formed surrounding the atomized liquid resin by a flow of gas ejected from the outlet of the gas supply nozzle, The ultrasonic transducer is characterized in that it includes a vibration plate arranged so as to have a minute gap between the vibration surface of the horn and the vibration plate. Protective film forming device.

2. The horn and the diaphragm are integrally formed. The protective film forming apparatus according to claim 1 .

3. The liquid resin supply nozzle supplies liquid resin to the gap. The protective film forming apparatus according to claim 1 .

4. The present invention further comprises a cleaning mechanism for removing the liquid resin adhered to the horn. The protective film forming apparatus according to claim 1 .

5. The gas supplied from the gas supply nozzle is dry air. The protective film forming apparatus according to claim 1 .

6. The gas supply system further comprises a heat source for heating the gas supplied from the gas supply nozzle. The protective film forming apparatus according to claim 1 .

7. The present invention is characterized in that the liquid resin further includes a liquid resin dripping nozzle for dripping liquid resin onto an upper surface of the workpiece held on the holding table. The protective film forming apparatus according to claim 1 .

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