Spectroscopic analysis device and spectroscopic analysis method

Abstract

Provided are a spectroscopic analysis device, a spectroscopic analysis method, and a computer program which can obtain spectra of light beams included in a secondary light beam due to a primary light beam comprising a plurality of light beams.　The spectroscopic analysis device is provided with an emitting unit for emitting on a sample a primary light beam including a plurality of light beams arranged in a manner separated from each other, a spectrometer for splitting a secondary light beam which is generated by the primary light beam emitted onto a sample and includes a plurality of light beams, an image sensor for detecting split light beams, and a processing unit for carrying out processing for generating spectra of the plurality of light beams included in the secondary light beam on the basis of detection results from the image sensor. The spectrometer splits the incident secondary light beam of multiple types, the secondary light beam of multiple types coming in sequentially, in which a combination of positions of the plurality of respective light beams included therein is changed in accordance with a plurality of predetermined patterns, and the processing unit generates the spectra through processing in accordance with a plurality of predetermined patterns on the basis of detection results for multiple times from the image sensor in accordance with light beams split from the secondary light beam of multiple types by the spectrometer.

Description

[Technical field]

[0001] The present invention relates to a spectroscopic analysis device, a spectroscopic analysis method, and a computer program for irradiating a substance with primary light and analyzing secondary light generated from the substance. [Background technology]

[0002] A substance is irradiated with primary light, secondary light generated from the substance is measured, and the substance is analyzed based on the spectrum of the secondary light. For example, an analysis based on Raman scattered light, photoluminescence, or fluorescence is performed. In order to obtain the spectrum of the secondary light, a method using a spectroscope and an image sensor is sometimes used. The image sensor is, for example, a two-dimensional image sensor such as a CCD (charge-coupled device) image sensor or a CMOS (complementary metal-oxide-semiconductor) image sensor. The secondary light is dispersed by the spectroscope, travels in different directions according to wavelength, and is received according to wavelength at different positions on the image sensor. For example, the light receiving positions are arranged in a straight line in the x-axis direction on the image sensor. Since there is a correlation between the light receiving positions on the image sensor and the wavelength, the spectrum of the secondary light can be obtained from the detection result of the image sensor.

[0003] There is a method of irradiating a sample with a point-like primary light, scanning the sample with the primary light in the x-axis and / or y-axis directions, and obtaining a spectral distribution in which the spectrum of the secondary light obtained from each point on the sample is associated with each point on the sample. The distribution of a substance in a specific state can be analyzed from the spectral distribution. When the primary light irradiated on the sample is not point-like but linear extending in the y-axis direction, the light receiving positions of light with different wavelengths are arranged in the x-axis direction on the imaging element, and the light receiving positions of the secondary light from each point on the sample irradiated with the linear primary light are arranged in the y-axis direction. Therefore, by using an imaging element, it is possible to obtain the spectrum of the secondary light from multiple points irradiated with the linear primary light. By scanning the sample with the linear primary light, the scanning time can be shortened compared to scanning the sample with the point-like primary light. Patent Document 1 discloses a technology for performing spectroscopic analysis using an imaging element. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 3377209 Summary of the Invention [Problem to be solved by the invention]

[0005] In order to shorten the scanning time, it is possible to simultaneously irradiate the sample with multiple linear light beams. For example, it is possible to irradiate a sample with multiple linear light beams aligned in one direction and multiple primary light beams aligned in a direction intersecting the one direction. However, on the imaging element, the light receiving positions of multiple light beams included in the secondary light resulting from multiple light beams included in the primary light overlap, making it impossible to distinguish between the multiple light beams included in the secondary light. For this reason, it is impossible to obtain the spectrum of the light included in the secondary light from the sample irradiated with the primary light consisting of multiple light beams.

[0006] The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a spectroscopic analysis device, a spectroscopic analysis method, and a computer program capable of acquiring the spectrum of light contained in secondary light resulting from primary light consisting of multiple light beams. [Means for solving the problem]

[0007] The spectroscopic analysis device of the present invention includes an irradiation unit that irradiates a sample with primary light containing a plurality of lights arranged at a distance from each other, a spectroscope that disperses secondary light containing a plurality of lights generated by irradiating the sample with the primary light, an imaging element that detects the light dispersed by the spectroscope, and a processing unit that performs processing to generate a spectrum of the plurality of lights contained in the secondary light based on the detection results of the imaging element, wherein the spectroscope sequentially receives a plurality of types of secondary light in which the combinations of the respective positions of the plurality of lights contained therein are changed according to a plurality of predetermined patterns, and disperses the plurality of types of secondary light that have been incident thereon, and the processing unit generates the spectrum by processing according to the plurality of predetermined patterns based on multiple detection results at the imaging element in response to the dispersion of the plurality of types of secondary light by the spectroscope.

[0008] In one aspect of the present invention, a spectroscopic analysis device irradiates a sample with primary light in which a plurality of lights are arranged at a distance from one another, sequentially causes a plurality of types of secondary light in which the combinations of the positions of the plurality of lights are changed according to a plurality of predetermined patterns to enter a spectroscope, and detects the light dispersed by the spectroscope with an image sensor. The spectroscopic analysis device can generate a spectrum of a plurality of lights contained in the secondary light by processing according to a predetermined pattern based on the results of the plurality of detections. It becomes possible to obtain a spectrum of the secondary light by scanning the sample with primary light composed of a plurality of lights, and the scanning time can be shortened compared to scanning the sample with a single irradiated light.

[0009] In the spectroscopic analysis device of the present invention, the irradiation unit sequentially generates multiple types of primary light that are different from each other by changing the combination of positions of each of the multiple light beams included in accordance with the multiple predetermined patterns, and the spectrometer receives the multiple types of secondary light generated by irradiating the sample with the multiple types of primary light.

[0010] In one aspect of the present invention, a plurality of types of primary light are generated in which a plurality of lights are arranged according to a predetermined pattern, and the plurality of types of primary light are sequentially irradiated onto a sample. A plurality of types of secondary light are sequentially generated in the sample. The plurality of types of secondary light are sequentially incident on a spectrometer.

[0011] In the spectroscopic analysis device according to the present invention, the irradiation unit generates the multiple types of primary light using multiple masks in which combinations of multiple positions through which light passes are varied according to the multiple predetermined patterns.

[0012] In one embodiment of the present invention, a mask is used to generate a primary light having a plurality of lights arranged according to a predetermined pattern. By using the mask, a plurality of types of primary light can be easily generated.

[0013] The spectroscopic analysis apparatus of the present invention further includes a secondary light generation unit that sequentially generates the multiple types of secondary light by blocking a portion of the multiple light beams generated by irradiating the sample with the primary light so that the portion does not enter the spectrometer, and by changing a combination of the light to be blocked and the multiple light beams to be allowed to enter the spectrometer without being blocked according to the multiple predetermined patterns, and the spectrometer receives the multiple types of secondary light generated by the secondary light generation unit.

[0014] In one embodiment of the present invention, some of the multiple light beams generated in the sample by irradiation with the primary light are blocked, and the remaining light beams are made incident on a spectroscope. By changing the combination of the light beams incident on the spectroscope according to multiple predetermined patterns, multiple types of secondary light beams are generated sequentially.

[0015] In the spectroscopic analysis device according to the present invention, the secondary light generation unit generates the multiple types of secondary light using a plurality of masks in which combinations of a plurality of lights that are to be transmitted without being blocked among the multiple lights generated by irradiating the primary light onto the sample are varied according to the predetermined multiple patterns.

[0016] In one embodiment of the present invention, a mask is used to block some of the multiple lights generated by the sample. By using the mask, multiple types of secondary light can be easily generated.

[0017] The spectroscopic analysis apparatus according to the present invention is characterized in that it further comprises a scanning unit that scans the sample with the primary light, an image generation unit that generates a spectral distribution that associates each part on the sample that has been scanned with the spectrum of light contained in the secondary light generated from each part, and generates a distribution image of a substance in a specific state based on the spectral distribution, and a super-resolution unit that improves the resolution of the distribution image by super-resolution technology.

[0018] In one aspect of the present invention, a spectroscopic analyzer generates a spectral distribution, generates a distribution image of a substance in a specific state based on the spectral distribution, and improves the resolution of the distribution image by super-resolution technology. Even when the sample is roughly scanned, the spectroscopic analyzer can generate a distribution image having the same resolution as when the sample is precisely scanned. By roughly scanning the sample, the scanning time can be shortened.

[0019] The spectroscopic analysis apparatus of the present invention is characterized in that, on the light receiving surface of the imaging element, a plurality of light receiving positions corresponding to portions on the sample irradiated with the plurality of light beams are arranged at a distance from each other in a direction corresponding to the direction in which the plurality of light beams contained in the primary light are arranged, and light receiving positions for the dispersed light are arranged by wavelength in a direction corresponding to the direction in which the plurality of light beams are arranged, at positions different from the plurality of light receiving positions.

[0020] In one aspect of the present invention, a plurality of light receiving positions corresponding to portions of the sample irradiated with a plurality of light beams included in the primary light are arranged on the light receiving surface of the image sensor, and light receiving positions of the dispersed light are arranged by wavelength at positions different from the plurality of light receiving positions. The dispersed light is received and detected at different positions on the light receiving surface by wavelength, and a spectrum is obtained based on the light receiving positions and the received light intensity.

[0021] In the spectroscopic analysis device according to the present invention, the processing unit generates the spectrum by an individual processing method for each of a plurality of light beams included in the secondary light.

[0022] In one aspect of the present invention, a spectroscopic analysis device generates, by an individual processing method, a spectrum of each of the multiple lights contained in the secondary light generated from a portion on a sample irradiated with each of the multiple lights contained in the primary light. The light receiving positions of the multiple lights contained in the secondary light overlap on the light receiving surface of the image sensor, and the combination of the overlapping differs depending on the combination pattern of the multiple lights and each of the multiple lights. Therefore, the spectrum of the multiple lights contained in the secondary light is calculated by the individual processing method.

[0023] In the spectroscopic analysis apparatus according to the present invention, the processing method includes a matrix operation.

[0024] In one aspect of the present invention, a processing method for generating a spectrum of secondary light resulting from each of a plurality of lights includes a matrix operation, which allows high-speed calculation and high-speed generation of a spectrum.

[0025] In the spectroscopic analysis device according to the present invention, the predetermined multiple patterns are patterns of elements contained in multiple rows or columns of an S matrix obtained by converting +1 to 0 and -1 to 1 in elements of a Hadamard matrix of degree 4 or higher and removing the first row and the first column, and the matrix operation is an operation using the S matrix.

[0026] In one aspect of the present invention, a spectroscopic analysis device uses a pattern obtained based on a Hadamard matrix and performs a matrix calculation using an S matrix obtained from the Hadamard matrix. Since the pattern obtained from the Hadamard matrix is ​​simple and the matrix calculation using the S matrix is ​​an easy calculation, the process for generating a spectrum can be easily executed.

[0027] In the spectroscopic analysis apparatus of the present invention, each of the multiple lights contained in the primary light is a linear light along a second direction intersecting a first direction in which the multiple lights are arranged, and on the light receiving surface of the imaging element, a plurality of light receiving lines are arranged in a direction corresponding to the second direction, spaced apart from each other, on the light receiving surface of the imaging element, in which light receiving positions corresponding to portions of the sample irradiated with the linear light are arranged in a direction corresponding to the first direction.

[0028] In one aspect of the present invention, a spectroscopic analysis device uses linear light as the multiple light beams contained in the primary light. By scanning the sample with linear light, the scanning time can be shortened compared to scanning the sample with point light.

[0029] In the spectroscopic analysis device according to the present invention, the secondary light includes Raman scattered light, and the processing unit generates a spectrum of the Raman scattered light.

[0030] In one aspect of the invention, the secondary light comprises Raman scattered light.The spectroscopic analyzer is capable of generating a distribution of Raman spectra for analyzing a sample.

[0031] The spectroscopic analysis method according to the present invention is characterized in that it includes irradiating a sample with primary light including a plurality of lights arranged at a distance from each other, sequentially dispersing a plurality of types of secondary light generated by irradiating the sample with the primary light and in which the combinations of the respective positions of the plurality of lights included therein are changed according to a plurality of predetermined patterns, detecting the dispersed light with an imaging element, and generating spectra of the plurality of lights included in the secondary light by processing according to the plurality of predetermined patterns based on a plurality of detection results by the imaging element in accordance with the dispersion of the plurality of types of secondary light.

[0032] The computer program of the present invention is characterized in that it causes a computer to execute a process of irradiating a sample with primary light containing a plurality of lights arranged at a distance from each other, sequentially dispersing a plurality of types of secondary light in which the combinations of the respective positions of the plurality of lights contained therein are changed according to a plurality of predetermined patterns, and detecting the dispersed light with an image sensor, based on a plurality of detection results obtained, generating a spectrum of the plurality of lights contained in the secondary light by processing according to the plurality of predetermined patterns.

[0033] In one aspect of the present invention, a primary light consisting of a plurality of light beams arranged at a distance from one another is irradiated onto a sample, and a plurality of types of secondary light beams in which the combinations of the positions of the plurality of light beams are changed according to a plurality of predetermined patterns are sequentially incident on a spectroscope, and the light dispersed by the spectroscope is detected by an image sensor. Based on the results of the multiple detections, it is possible to generate a spectrum of the plurality of lights contained in the secondary light by processing according to the predetermined pattern. It is possible to obtain a spectrum of the secondary light by scanning the sample with a primary light consisting of a plurality of light beams, and the scanning time can be shortened compared to scanning the sample with a single irradiated light. Effect of the Invention

[0034] In the present invention, the spectroscopic analysis device can obtain the spectrum of secondary light generated from a sample when the sample is irradiated with primary light containing a plurality of light beams. Therefore, the spectroscopic analysis device can shorten the scanning time and analyze the sample in a short time, and the present invention has excellent effects. [Brief description of the drawings]

[0035]

Figure 1

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Figure 11

[0036] The present invention will now be described in detail with reference to the drawings showing embodiments thereof. <Embodiment 1> FIG. 1 is a block diagram showing a configuration of a spectroscopic analysis device 1 according to a first embodiment. The spectroscopic analysis device 1 executes a spectroscopic analysis method. The spectroscopic analysis device 1 is a Raman scattering light measurement device that irradiates a sample 5 with primary light and measures Raman scattering light contained in secondary light generated from the sample 5. In FIG. 1, light is indicated by arrows. The spectroscopic analysis device 1 includes a sample holder 14 that holds the sample 5, a light source 11, a multi-spot light generator 12, and a mask 2. The sample holder 14 is, for example, a sample stage on which the sample 5 is placed. The sample holder 14 may be in a form other than a sample stage. A drive unit 16 that moves the sample holder 14 to move the sample 5 is connected to the sample holder 14. The light source 11 emits monochromatic light. For example, the light source 11 is a laser light source. The multi-spot light generator 12 has a beam splitter and multiple mirrors, and splits light multiple times to generate multi-spot light in which multiple spots are distributed in a plane.

[0037] The mask 2 is a photomask, and includes a plurality of pattern masks in which light-transmitting portions and light-shielding portions are arranged according to a predetermined pattern. The plurality of pattern masks have different patterns in which the light-transmitting portions and light-shielding portions are arranged. The multi-spot light is incident on any one of the pattern masks of the mask 2, the light is transmitted through the transmitting portions, and the light is blocked by the light-shielding portions, thereby generating a pattern light in which a plurality of separated lights are arranged according to a predetermined pattern. The pattern light is irradiated as primary light onto the sample 5 held in the sample holding unit 14. The pattern light and the mask 2 will be described in detail later. The spectroscopic analysis device 1 includes a mask changing unit 17 that changes the pattern mask into which the multi-spot light is incident by moving the mask 2. The light source 11, the multi-spot light generating unit 12, the mask 2, and the mask changing unit 17 constitute an irradiation unit 61.

[0038] The spectroscopic analysis device 1 includes a spectroscope 13 and an image sensor 3. In a portion of the sample 5 irradiated with the primary light, Raman scattered light is generated as secondary light, and the Raman scattered light is incident on the spectroscope 13. The spectroscope 13 disperses the incident Raman scattered light and emits the dispersed light. The light dispersed by the spectroscope 13 is incident on the image sensor 3. The image sensor 3 is, for example, a CCD image sensor or a CMOS image sensor. The image sensor 3 has a light receiving surface, and light is incident on the light receiving surface to detect the intensity of the received light at each position on the light receiving surface. The spectroscopic analysis device 1 includes an optical system consisting of many optical components such as mirrors, lenses, and filters for guiding and collecting the primary light and the Raman scattered light. It is preferable that the optical system is configured so that the primary light is imaged on the surface of the sample holder 14 or the surface of the sample 5, and the secondary light is imaged at the incident position of the light of the spectroscope 13. This optical system is omitted in FIG. 1.

[0039] The spectroscopic analysis device 1 further includes a control unit 15 and an analysis unit 4. The control unit 15 is configured with a computer including a calculation unit that performs calculations and a memory that stores data. The light source 11, the analysis unit 4, a drive unit 16, and a mask change unit 17 are connected to the control unit 15. The control unit 15 controls the operation of each unit in the spectroscopic analysis device 1. The image sensor 3 is connected to the analysis unit 4, and inputs data representing the light detection results to the analysis unit 4.

[0040] FIG. 2 is a block diagram showing an example of the internal functional configuration of the analysis unit 4. The analysis unit 4 is configured using a computer such as a personal computer. The analysis unit 4 includes a calculation unit 41, a memory 42, a drive unit 43, a storage unit 44, an operation unit 45, a display unit 46, and an interface unit 47. The calculation unit 41 is configured using, for example, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or a multi-core CPU. The calculation unit 41 may also be configured using a quantum computer. The memory 42 is, for example, a RAM (Random Access Memory). The storage unit 44 is non-volatile, for example, a hard disk.

[0041] The drive unit 43 reads information from a recording medium 40 such as an optical disk. The operation unit 45 accepts information such as text by accepting operations from a user. The operation unit 45 is, for example, a keyboard, a pointing device, or a touch panel. The display unit 46 displays an image. The display unit 46 is, for example, a liquid crystal display or an EL display (Electroluminescent Display). The interface unit 47 is connected to the imaging element 3 and the control unit 15. The analysis unit 4 accepts data input from the imaging element 3 through the interface unit 47. The analysis unit 4 also accepts a control signal from the control unit 15 through the interface unit 47.

[0042] The calculation unit 41 causes the drive unit 43 to read the computer program 441 recorded on the recording medium 40, and stores the read computer program 441 in the storage unit 44. The calculation unit 41 executes processing required for the analysis unit 4 in accordance with the computer program 441. The analysis unit 4 may include a communication unit, and the computer program 441 may be downloaded from outside the analysis unit 4 using the communication unit. In this case, the analysis unit 4 may not include the drive unit 43.

[0043] The analysis unit 4 stores data representing the detection results from the image sensor 3 in the memory unit 44. The calculation unit 41 executes processing for analyzing the Raman scattered light, such as generating a Raman spectrum, based on the detection results from the image sensor 3. The display unit 46 displays the processing results. The control unit 15 and the analysis unit 4 may be integrated.

[0044] FIG. 3 is a schematic diagram showing the relationship between the irradiation of the sample 5 with the primary light, the reception of the Raman scattered light by the image sensor 3, and the Raman spectrum. FIG. 3 shows the surface of the sample 5 irradiated with the primary light, the light receiving surface 30 of the image sensor 3, and the Raman spectrum. The horizontal axis of the Raman spectrum is the Raman shift, and the vertical axis is the light intensity. The surface of the sample 5 is irradiated with point-like irradiation light 501 as the primary light. By irradiating the irradiation light 501, Raman scattered light is generated in the sample 5, and the Raman scattered light enters the spectroscope 13. The spectroscope 13 separates the Raman scattered light, and the separated light enters the light receiving surface 30. In the light receiving surface 30, the light is received at the light receiving position 301 corresponding to the irradiation position of the irradiation light 501. The Raman scattered light is light with a different wavelength from the primary light. The spectroscope 13 emits the separated light in different directions according to wavelength. For this reason, the dispersed light is incident on and received at different positions on the light receiving surface 30 of the image sensor 3 according to wavelength. That is, the Raman scattered light is received at a position on the light receiving surface 30 that is different from light receiving position 301. In Fig. 3, the receiving position of the Raman scattered light is indicated by 302. Normally, Raman scattered light is a mixture of multiple lights with different wavelengths, so multiple light receiving positions 302 occur.

[0045] The image sensor 3 detects the light receiving intensity at each position in the light receiving surface 30, and inputs data representing the detection result to the analysis unit 4. The data representing the detection result is data in which each position in the light receiving surface 30 is associated with the intensity of light received at each position. The analysis unit 4 identifies the light receiving position 302 and the light receiving intensity at the light receiving position 302 from the detection result, and generates a Raman spectrum from the light receiving position 302 and the light receiving intensity. As shown in FIG. 3, the light receiving position 302 corresponds to the Raman shift of a peak included in the Raman spectrum, and the light receiving intensity corresponds to the intensity of the peak included in the Raman spectrum. In this way, the analysis unit 4 generates a Raman spectrum for the portion of the sample 5 irradiated with the irradiation light 501 based on the detection result by the image sensor 3.

[0046] FIG. 4 is a schematic diagram showing the sample 5 irradiated with linear light and the light receiving surface 30 of the image sensor 3 that receives the Raman scattered light. Here, the primary light is assumed to be linear light 51 that is distributed linearly on the surface of the sample 5. A first direction and a second direction that intersect with each other along the surface of the sample 5 are assumed. The linear light 51 is assumed to be light that is distributed along the second direction on the surface of the sample 5. A third direction and a fourth direction that intersect with each other along the light receiving surface 30 of the image sensor 3 are assumed, the third direction being a direction corresponding to the first direction, and the fourth direction being a direction corresponding to the second direction. On the light receiving surface 30, a light receiving line 31 corresponding to the irradiation position of the linear light 51 is generated. The light receiving line 31 is along the fourth direction. The spectroscopic analysis device 1 is configured so that a plurality of light receiving positions that receive Raman scattered light generated at one point on the sample 5 irradiated with light are arranged along the third direction.

[0047] Raman scattered light occurs in a plurality of portions of the sample 5 irradiated with the linear light 51, and the image sensor 3 receives the Raman scattered light at a plurality of light receiving positions 312 in the light receiving surface 30. Although only one light receiving position 312 is indicated by a reference number in FIG. 4, a plurality of light receiving positions 312 exist in the light receiving surface 30. A plurality of light receiving positions 312 that receive Raman scattered light generated at one point in the portion of the sample 5 irradiated with the linear light 51 are arranged along the third direction. A plurality of light receiving positions 312 that receive Raman scattered light are generated for each point in the portion of the sample 5 irradiated with the linear light 51. For this reason, a plurality of groups of light receiving positions 312, each of which is a group of a plurality of light receiving positions 312 arranged along the third direction, are arranged along the fourth direction. That is, a plurality of light receiving positions 312 are distributed in a planar shape. The position of the light receiving position 312 in the third direction corresponds to the Raman shift, and the position in the fourth direction corresponds to the position where the Raman scattered light occurs in the portion irradiated with the linear light 51 on the sample 5. An area where the multiple light receiving positions 312 are distributed in a planar shape is defined as a light receiving area 311.

[0048] The image sensor 3 detects the received light intensity at each position in the light receiving surface 30, and inputs data representing the detection results to the analysis unit 4. Based on the detection results, the analysis unit 4 generates a Raman spectrum for each of the multiple portions on the sample 5 irradiated with the linear light 51. That is, the analysis unit 4 generates multiple Raman spectra related to the multiple portions on the sample 5 irradiated with the linear light 51. Furthermore, the analysis unit 4 can associate the Raman spectra with the multiple portions on the sample 5 irradiated with the linear light 51 to generate a linear Raman spectral distribution.

[0049] FIG. 5 is a schematic diagram showing a sample 5 irradiated with a plurality of linear beams and a light receiving surface 30 of an image sensor 3 receiving the Raman scattered light. Here, the primary light is a plurality of linear beams spaced apart from each other and aligned along the second direction. FIG. 5 shows an example in which three linear beams 51, 52, and 53 are irradiated onto the sample 5. A plurality of Raman scattered beams are generated by irradiation with the linear beams 51, 52, and 53, and the Raman scattered beams are incident on the spectroscope 13, which separates the plurality of Raman scattered beams into individual beams, and the separated beams are incident on the light receiving surface 30. On the light receiving surface 30, a plurality of light receiving lines 31, 32, and 33 corresponding to the irradiation positions of the linear beams 51, 52, and 53 are generated. It is assumed that the light receiving lines 31, 32, and 33 are arranged in order from the left side in the figure. It is also assumed that the receiving position of the Raman scattered light generated from the portion of the sample 5 irradiated with the linear beam is located on the right side of the light receiving lines in the figure.

[0050] Between the light receiving lines 31 and 32, there is a light receiving region 311 in which a plurality of light receiving positions 312 that receive Raman scattered light generated in a portion of the sample 5 irradiated with the linear light 51 are distributed in a planar manner. From the plurality of light receiving positions 312 and the light receiving intensities at each light receiving position 312, a plurality of Raman spectra related to a plurality of portions of the sample 5 irradiated with the linear light 51 can be generated. Between the light receiving lines 32 and 33, there is a light receiving region 321 in which a plurality of light receiving positions 322 are distributed in a planar manner. Although only one light receiving position 322 is indicated by a reference number in FIG. 5, there are many light receiving positions 322 in the light receiving region 321. At the light receiving position 322, Raman scattered light generated in a portion of the sample 5 irradiated with the linear light 51 and Raman scattered light generated in a portion of the sample 5 irradiated with the linear light 52 are received. Further, on the right side of the light-receiving line 33, there is a light-receiving region 331 in which a plurality of light-receiving positions 332 are distributed in a plane. The plurality of light-receiving positions 332 receive Raman scattered light generated in portions of the sample 5 irradiated with the linear light beams 51, 52, and 53.

[0051] In this way, the detection result at the image sensor 3 is a superposition of the detection results caused by the multiple linear light beams. In the first embodiment, by using the pattern light as the primary light, it is possible to generate a Raman spectrum for each portion of the sample 5 from the superposition of the detection results caused by the multiple linear light beams.

[0052] In the first embodiment, a pattern light according to a predetermined pattern obtained based on a Hadamard matrix is ​​used as the primary light. A Hadamard matrix is ​​a square matrix, whose elements are either 1 or -1, and has the characteristic that any two row vectors are orthogonal. In addition, a Hadamard matrix is ​​a Hermitian matrix and a unitary matrix. The first, second, fourth and eighth order Hadamard matrices are defined as H 1 , H 2 , H 4 and H 8 Let us assume that. 1 , H 2 , H 4 and H 8 Examples of this are shown in the following formulas (1) to (4). H 1 =[1] …(1)

[0053]

number

[0054]

number

[0055]

number

[0056] The first row and first column of the nth-order Hadamard matrix are deleted, and the +1 in the elements is converted to 0, and the -1 in the elements is converted to 1 to create the n-1th-order S matrix. 1 , S 3 , and S 7 Let us assume that S 1 , S 3 , and S 7 Examples of this are shown in the following formulas (4) to (6). S 1 =[1] …(4)

[0057]

number

[0058]

number

[0059] The pattern used in the first embodiment is a pattern of elements included in the rows or columns of the S matrix. The spectroscopic analysis device 1 uses, as the multiple types of primary light, multiple types of pattern light according to multiple predetermined patterns obtained from the S matrix. The spectroscopic analysis device 1 uses a mask 2 to generate the pattern light.

[0060] 6 is a schematic plan view of the mask 2. The mask 2 is formed in a flat plate shape from a light-shielding material. The mask 2 is composed of a plurality of pattern masks 201, 202, ..., 207. Each of the pattern masks 201, 202, ..., 207 is composed of any four of a plurality of transmission holes 21, 22, ..., 27 that are spaced apart from each other and arranged in a straight line, formed in a flat plate. The pattern masks 201, 202, ..., 207 may be separated from each other.

[0061] In the pattern mask 201, the matrix S 7 A plurality of transmission holes are formed according to the pattern of elements in the first row or the first column of the matrix S 7 When the element of is 1, a transparent hole is formed, and when the element is 0, a transparent hole is not formed and a light blocking portion is located. 7 The elements in the first row or first column are arranged in the order of 1010101. Accordingly, in the pattern mask 201, the transparent hole 21 is formed, the transparent hole 22 is not formed, the transparent hole 23 is formed, the transparent hole 24 is not formed, the transparent hole 25 is formed, the transparent hole 26 is not formed, and the transparent hole 27 is formed.

[0062] Similarly, for the pattern masks 202, 203, . . . , 207, the matrix S 7 For example, in the pattern mask 202, a plurality of transparent holes are formed according to a pattern of elements included in a certain row or column of the matrix S 7 A plurality of transmission holes are formed according to the pattern of elements in the second row or second column of the matrix S 7 The elements in the second row or second column of the matrix S are arranged in the order of 0110011. Accordingly, in the pattern mask 202, the transparent holes 22, 23, 26, and 27 are formed, and the transparent holes 21, 24, and 25 are not formed. For example, in the pattern mask 207, the matrix S 7 A plurality of transmission holes are formed according to the pattern of elements in the seventh row or the seventh column of the matrix S 7The elements in the seventh row or seventh column are arranged in the order of 1101001. Accordingly, in the pattern mask 207, the transparent holes 21, 22, 24, and 27 are formed, and the transparent holes 23, 25, and 26 are not formed.

[0063] The spectroscopic analysis device 1 causes the multi-spot light generated by the multi-spot light generating unit 12 to enter the pattern mask 201. In FIG. 6, the range of the multi-spot light that enters the pattern mask 201 is indicated by a broken line. A part of the multi-spot light passes through the transmission holes 21, 23, 25, and 27 formed in the pattern mask 201, and is irradiated as the primary light to the sample 5. The other part of the multi-spot light is blocked by the pattern mask 201. In a state in which the primary light that has passed through the pattern mask 201 is irradiated to the sample 5, the image sensor 3 detects the Raman scattered light. Thereafter, the mask changing unit 17 moves the mask 2 to change the pattern mask into which the multi-spot light is incident to the pattern mask 202. The sample 5 is irradiated a second time with the primary light that has passed through the pattern mask 202, and the image sensor 3 detects the Raman scattered light a second time. The change of the pattern mask, the irradiation of the sample 5 with the primary light, and the detection of the Raman scattered light are repeated, and the irradiation of the sample 5 with the primary light and the detection of the Raman scattered light are performed seven times.

[0064] FIG. 7 is a schematic diagram showing the sample 5 irradiated with the primary light. FIG. 7 shows the sample 5 when each of the first to seventh irradiations is performed. In the first irradiation, the light transmitted through the transmission holes 21, 23, 25, and 27 formed in the pattern mask 201 is irradiated to the sample 5, so that the linear light beams 51, 53, 55, and 57 are irradiated to the sample 5. Since the other light beams are blocked by the pattern mask 201, the linear light beams 52, 54, and 56 are not irradiated. In the second irradiation, the light transmitted through the transmission holes 22, 23, 26, and 27 formed in the pattern mask 202 is irradiated to the sample 5, so that the linear light beams 52, 53, 56, and 57 are irradiated to the sample 5. Similarly, in the third to seventh irradiations, the primary light beams consisting of a plurality of linear light beams are irradiated to the sample 5.

[0065] In this way, the sample 5 is irradiated with a pattern light in which a plurality of linear lights are arranged in the first direction at a distance from each other as the primary light. The plurality of linear lights correspond to a plurality of lights included in the primary light. By irradiating the plurality of linear lights, a plurality of Raman scattered lights are generated from the sample 5. The plurality of Raman scattered lights correspond to a plurality of lights included in the secondary light. A part of the linear lights 51, 52, ..., 57 is in a non-irradiated state, and seven types of pattern lights with different combinations of positions of the plurality of linear lights irradiated to the sample 5 are generated, and the seven types of pattern lights are sequentially irradiated to the sample 5. By sequentially irradiating the seven types of pattern lights to the sample 5, seven types of secondary lights with different combinations of positions of the plurality of Raman scattered lights generated are sequentially obtained. The secondary light including the plurality of Raman scattered lights is incident on the spectroscope 13. In this way, the plurality of secondary lights are sequentially incident on the spectroscope 13. The spectroscope 13 separates the Raman scattered light included in the incident secondary light. The image sensor 3 detects the Raman scattered light each time the pattern light is irradiated to the sample 5.

[0066] Fig. 8 is a schematic diagram showing the light receiving surface 30 of the image sensor 3 that receives Raman scattered light in response to the irradiation of the sample 5 with the pattern light. Fig. 8 shows the light receiving surface 30 when each of the first to seventh irradiations has been performed. In the first irradiation, light receiving lines 31, 33, 35, and 37 corresponding to the irradiation positions of the linear light 51, 53, 55, and 57 on the sample 5 are generated. In the second irradiation, light receiving lines 32, 33, 36, and 37 corresponding to the irradiation positions of the linear light 52, 53, 56, and 57 on the sample 5 are generated. Similarly, in the third to seventh irradiations, a plurality of light receiving lines are generated on the light receiving surface 30.

[0067] As shown in Fig. 8, on the right side of the light receiving line 31, there is a light receiving region 311 in which a plurality of light receiving positions 312 for receiving Raman scattered light are distributed in a planar manner. Similarly, on the right side of each of the light receiving lines 32, 33, 34, 35, 36, and 37, there are light receiving regions 321, 331, 341, 351, 361, and 371 in which a plurality of light receiving positions 322, 332, 342, 352, 362, and 372 for receiving Raman scattered light are distributed in a planar manner, respectively. The image sensor 3 detects the received light intensity at each position in the light receiving surface 30 every time the pattern light is irradiated onto the sample 5, and inputs data representing the detection results to the analysis unit 4. That is, the image sensor 3 detects the Raman scattered light seven times, and inputs data representing the seven detection results to the analysis unit 4. The analysis unit 4 stores data representing the seven detection results, and performs processing to generate a Raman spectrum for each portion of the sample 5 based on the seven detection results.

[0068] The analysis unit 4 generates a Raman spectrum for a portion of the sample 5 irradiated with a plurality of linear beams of light by an individual processing method for each linear beam of light. At a light receiving position 312 included in a light receiving area 311 existing between the light receiving line 31 and the light receiving line 32, Raman scattered light generated in a portion of the sample 5 irradiated with the linear beam of light 51 is received. The analysis unit 4 can generate a Raman spectrum for a portion of the sample 5 irradiated with the linear beam of light 51 based on a detection result of the received light intensity at each position in the light receiving area 311. For example, the analysis unit 4 extracts a detection result in the light receiving area 311 in the first irradiation from the detection results that store data, and generates a Raman spectrum for a portion of the sample 5 irradiated with the linear beam of light 51 based on the extracted detection result.

[0069] At the light receiving position 322 included in the light receiving region 321 existing between the light receiving line 32 and the light receiving line 33, Raman scattered light generated at the portion of the sample 5 irradiated with the linear light 51 and 52 can be received. Therefore, the detection result in the light receiving region 321 may be a superposition of the detection results caused by the linear light 51 and 52. However, in the second and sixth irradiations, the linear light 52 is irradiated while the linear light 51 is not irradiated. Therefore, at the light receiving position 322, only the Raman scattered light generated at the portion of the sample 5 irradiated with the linear light 52 is received. The detection result in the light receiving region 321 is a detection result caused only by the linear light 52. The analysis unit 4 can generate a Raman spectrum related to the portion of the sample 5 irradiated with the linear light 52 based on the detection result of the received light intensity at each position in the light receiving region 321 in the second or sixth irradiation. The analysis unit 4 extracts the detection results within the light receiving area 321 in the second or sixth irradiation from the detection results whose data is stored, and generates a Raman spectrum relating to the portion on the sample 5 irradiated with the linear light 52 based on the extracted detection results.

[0070] At a light receiving position 332 included in a light receiving area 331 existing between the light receiving line 33 and the light receiving line 34, Raman scattered light generated in a portion of the sample 5 irradiated with the linear light beams 51 and 53 is received during the first irradiation. The detection result in the light receiving area 331 is the detection result caused by the linear light beams 51 and 53. At a second irradiation, the light receiving position 332 receives Raman scattered light generated in a portion of the sample 5 irradiated with the linear light beams 52 and 53. The detection result in the light receiving area 331 is the detection result caused by the linear light beams 52 and 53. At a third irradiation, the light receiving position 332 receives Raman scattered light generated in a portion of the sample 5 irradiated with the linear light beams 51 and 52. The detection result in the light receiving area 331 is the detection result caused by the linear light beams 51 and 52.

[0071] The light receiving intensities attributable to the linear light beams 51, 52, and 53 included in the light receiving intensity at each position in the light receiving area 331 are designated as Result31, Result32, and Result33. The detection results of the light receiving intensity at each position in the light receiving area 331 obtained during the first, second, and third irradiations are designated as data31, data32, and data33. Vector A 3 =(Result31,Result32,Result33) T and vector B 3 =(data31,data32,data33) T Define vector A 3 and B 3 The relationship is expressed by the following equation (7): B 3 =S 3 A 3 …(7)

[0072] (7) In the formula, S 3 is expressed by equation (5). Equation (7) indicates that the detection result at the first irradiation is a superposition of the detection results caused by linear light beams 51 and 53, the detection result at the second irradiation is a superposition of the detection results caused by linear light beams 52 and 53, and the detection result at the third irradiation is a superposition of the detection results caused by linear light beams 51 and 52. The following equation (8) can be obtained by modifying equation (7). A 3 =S 3 -1 B 3 …(8)

[0073] By using equation (8), vector A is calculated based on the first to third detection results. 3 It is possible to calculate the vector A 3The Result 33 included in is the light receiving intensity caused by the linear light 53. The analysis unit 4 can calculate the light receiving intensity of the Raman scattered light caused by the linear light 53 based on the detection results of the light receiving intensity at each position in the light receiving area 331 in the first to third irradiations, and generate a Raman spectrum for the portion on the sample 5 irradiated with the linear light 53. The analysis unit 4 extracts the detection results in the light receiving area 331 in the first to third irradiations from the detection results that store the data, and calculates the light receiving intensity caused by the linear light 53 for each position in the light receiving area 331 by using the formula (8). In addition, the analysis unit 4 generates a Raman spectrum for the portion on the sample 5 irradiated with the linear light 53 based on the light receiving intensity calculated for each position in the light receiving area 331. The analysis unit 4 may perform similar processing based on the detection results in the fifth to seventh irradiations.

[0074] At a light receiving position 342 included in a light receiving area 341 existing between the light receiving line 34 and the light receiving line 35, only the Raman scattered light generated at the portion on the sample 5 irradiated with the linear light 54 during the fourth irradiation is received. At the fourth irradiation, the detection result in the light receiving area 341 is a detection result caused only by the linear light 54. The analysis unit 4 can generate a Raman spectrum related to the portion on the sample 5 irradiated with the linear light 54 based on the detection result of the received light intensity at each position in the light receiving area 341 during the fourth irradiation. The analysis unit 4 extracts the detection result in the light receiving area 341 during the fourth irradiation from the detection result in which the data is stored, and generates a Raman spectrum related to the portion on the sample 5 irradiated with the linear light 54 based on the extracted detection result.

[0075] At a light receiving position 352 included in a light receiving region 351 existing between the light receiving line 35 and the light receiving line 36, Raman scattered light generated in the portion of the sample 5 irradiated with the linear light beams 51, 52, 53, 54, and 55 can be received. Regarding the light receiving region 351, attention is paid to the first, fourth, and fifth irradiations. In the first and fifth irradiations, the detection results in the light receiving region 351 include detection results caused by the linear light beams 51 and 53, but do not include detection results caused by the linear light beam 52. In the fourth irradiation, the detection results in the light receiving region 351 do not include any of the detection results caused by the linear light beams 51, 52, and 53. The detection results caused by the linear light beam 54 are not included in the detection results in the light receiving region 351 in the first irradiation, but are included in the detection results in the light receiving region 351 in the fourth and fifth irradiations. The detection results caused by the linear light 55 are included in the detection results in the light receiving area 351 in the first and fourth irradiations, but are not included in the detection results in the light receiving area 351 in the fifth irradiation.

[0076] The light receiving intensities attributable to the linear light beams 51 to 55 included in the light receiving intensity at each position in the light receiving region 351 are designated as Result51 to Result55. The detection results of the light receiving intensity at each position in the light receiving region 351 obtained during the first to fifth irradiations are designated as data51 to data55. Vector A 5 =(Result51+Result53,Result54,Result55) T and vector B 5 =(data51,data54,data55) T Define vector A 5 and B 5 The relationship between them is expressed by the following equation (9). B 5 =S 3 A 5 …(9)

[0077] Equation (9) indicates that the detection result at the first irradiation is a superposition of the detection result caused by linear light 51 and 53 and the detection result caused by linear light 55, the detection result at the fourth irradiation is a superposition of the detection result caused by linear light 54 and the detection result caused by linear light 55, and the detection result at the fifth irradiation is a superposition of the detection result caused by linear light 51 and 53 and the detection result caused by linear light 54. The following equation (10) can be obtained by modifying equation (9). A 5 =S 3 -1 B 5 …(10)

[0078] By using equation (10), vector A is calculated based on the first, fourth, and fifth detection results. 5 It is possible to calculate the vector A 5 The Result 55 included in is the light receiving intensity caused by the linear light 55. The analysis unit 4 can calculate the light receiving intensity of the Raman scattered light caused by the linear light 55 based on the detection results of the light receiving intensity at each position in the light receiving area 351 in the first, fourth, and fifth irradiations, and generate a Raman spectrum for the portion on the sample 5 irradiated with the linear light 55. The analysis unit 4 extracts the detection results in the light receiving area 351 in the first, fourth, and fifth irradiations from the detection results that store the data, and calculates the light receiving intensity caused by the linear light 55 for each position in the light receiving area 351 by using the formula (10). In addition, the analysis unit 4 generates a Raman spectrum for the portion on the sample 5 irradiated with the linear light 55 based on the light receiving intensity calculated for each position in the light receiving area 351.

[0079] At a light receiving position 362 included in a light receiving area 361 existing between the light receiving line 36 and the light receiving line 37, Raman scattered light generated in a portion of the sample 5 irradiated with the linear light beams 51, 52, ..., 56 can be received. Regarding the light receiving area 361, attention is focused on the second, fourth, and sixth irradiations. In the second and sixth irradiations, the detection results in the light receiving area 361 include detection results caused by the linear light beams 52 and 53, but do not include detection results caused by the linear light beam 51. In the fourth irradiation, the detection results in the light receiving area 361 do not include any detection results caused by the linear light beams 51, 52, and 53. The detection results caused by the linear light beams 54 and 55 are not included in the detection results in the light receiving area 361 in the second irradiation, but are included in the detection results in the light receiving area 361 in the fourth and sixth irradiations. The detection results caused by the linear light 56 ​​are included in the detection results in the light receiving area 361 in the second and fourth irradiations, but are not included in the detection results in the light receiving area 361 in the sixth irradiation.

[0080] The light receiving intensities attributable to the linear light beams 51 to 56 included in the light receiving intensity at each position in the light receiving region 361 are denoted as Result61 to Result66. The detection results of the light receiving intensity at each position in the light receiving region 361 obtained during the first to sixth irradiations are denoted as data61 to data66. Vector A 6 =(Result62+Result63,Result64+Result65,Result66) T and vector B 6 =(data62,data64,data66) T Define vector A 6 and B 6 The relationship between them is expressed by the following equation (11). B 6 =S 3 A 6 …(11)

[0081] Equation (11) indicates that the detection result at the second irradiation is a superposition of the detection result caused by linear light 52 and 53 and the detection result caused by linear light 56, the detection result at the fourth irradiation is a superposition of the detection result caused by linear light 54 and 55 and the detection result caused by linear light 56, and the detection result at the sixth irradiation is a superposition of the detection result caused by linear light 52 and 53 and the detection result caused by linear light 54 and 55. Equation (11) can be modified to obtain the following equation (12). A 6 =S 3 -1 B 6 …(12)

[0082] By using equation (12), vector A is calculated based on the second, fourth, and sixth detection results. 6 It is possible to calculate the vector A 6 The Result 66 included in is the received light intensity due to the linear light 56. The analysis unit 4 can calculate the received light intensity of the Raman scattered light due to the linear light 56 ​​based on the detection results of the received light intensity at each position in the light receiving area 361 in the second, fourth, and sixth irradiations, and generate a Raman spectrum for the portion on the sample 5 irradiated with the linear light 56. The analysis unit 4 extracts the detection results in the light receiving area 361 in the second, fourth, and sixth irradiations from the detection results that store the data, and calculates the received light intensity due to the linear light 56 ​​for each position in the light receiving area 361 by using the formula (12). In addition, the analysis unit 4 generates a Raman spectrum for the portion on the sample 5 irradiated with the linear light 56 ​​based on the received light intensity calculated for each position in the light receiving area 361.

[0083] At a light receiving position 372 included in a light receiving region 371 on the right side of the light receiving line 37, Raman scattered light generated at a portion of the sample 5 irradiated with the linear light beams 51, 52, ..., 57 can be received. The light receiving intensities attributable to the linear light beams 51 to 57 included in the light receiving intensity at each position in the light receiving region 371 are designated as Result71 to Result76. The detection results of the light receiving intensities at each position in the light receiving region 371 obtained during the first to seventh irradiations are designated as data71 to data77. Vector A 7 =(Result71,Result72,Result73,Result74,Result75,Result76,Result77) T and vector B 7 =(data71,data72,data73,data74,data75,data76,data77) T Define vector A 7 and B 7 The relationship between them is expressed by the following equation (13). B 7 =S 7 A 7 …(13)

[0084] In equation (13), S 7 is expressed by equation (6). Equation (13) shows that the detection results at the first to seventh irradiations are a superposition of the detection results caused by any of the linear lights 51 to 57. The following equation (14) can be obtained by modifying equation (13). A 7 =S 7 -1 B 7 …(14)

[0085] By using equation (14), vector A is calculated based on the first to seventh detection results. 7 It is possible to calculate the vector A 7The Result 77 included in is the received light intensity due to the linear light 57. The analysis unit 4 can calculate the received light intensity of the Raman scattered light due to the linear light 57 based on the detection results of the received light intensity at each position in the light receiving region 371 in the first to seventh irradiations, and generate a Raman spectrum for the portion on the sample 5 irradiated with the linear light 57. The analysis unit 4 extracts the detection results in the light receiving region 371 in the first to seventh irradiations from the detection results that store the data, and calculates the received light intensity due to the linear light 57 for each position in the light receiving region 371 by using the formula (14). In addition, the analysis unit 4 generates a Raman spectrum for the portion on the sample 5 irradiated with the linear light 57 based on the received light intensity calculated for each position in the light receiving region 371.

[0086] In this manner, the analysis unit 4 generates a Raman spectrum for the portion of the sample 5 irradiated with the linear light 51-57 by an individual processing method for each linear light. By using matrix calculation, the analysis unit 4 can perform calculations for generating a Raman spectrum at high speed. The processing method for generating a Raman spectrum is not limited to the processing method described above. The analysis unit 4 may generate a Raman spectrum by using other processing methods. For example, the analysis unit 4 may perform calculations using a fifth-order vector and matrix to generate a Raman spectrum for the portion of the sample 5 irradiated with the linear light 55.

[0087] FIG. 9 is a flowchart showing the procedure of the process executed by the spectroscopic analysis device 1. Hereinafter, step is abbreviated as S. With the sample 5 held by the sample holding unit 14, the control unit 15 causes the light source 11 to start irradiating the primary light (S1). The light source 11 emits monochromatic light and causes the light to enter the multi-spot light generating unit 12. The multi-spot light generating unit 12 generates multi-spot light, and the multi-spot light enters the mask 2. The multi-spot light enters one of the pattern masks included in the mask 2, and a part of the multi-spot light passes through the pattern mask to generate a pattern light. The pattern light is irradiated onto the sample 5. Raman scattered light is generated in the portion of the sample 5 irradiated with the pattern light. The Raman scattered light enters the spectroscope 13, which then disperses the Raman scattered light and causes the dispersed light to enter the image sensor 3.

[0088] The image sensor 3 detects the incident Raman scattered light (S2). The image sensor 3 inputs data representing the detection result of the Raman scattered light to the analysis unit 4. The analysis unit 4 stores the data representing the detection result in the storage unit 44 (S3). The control unit 15 then determines whether or not to end the detection of the Raman scattered light (S4). In S4, the control unit 15 determines that the detection is to be ended when all the detection of Raman scattering using a specific number of pattern masks has been performed, and determines that the detection is not to be ended when there is any detection that has not yet been performed. For example, the control unit 15 counts the number of times that the Raman scattered light is detected while changing the pattern mask, and determines that the detection is to be ended when the counted number reaches a predetermined number. The control unit 15 may determine that the detection is to be ended when the analysis unit 4 receives an instruction to end the detection by the user operating the operation unit 45.

[0089] If the detection of Raman scattered light is not terminated (S4: NO), the control unit 15 operates the mask changing unit 17, and the mask changing unit 17 changes the pattern mask on which the multi-spot light is incident (S5). In S5, the mask changing unit 17 moves the mask 2 and changes the pattern mask on the optical axis of the primary light. Next, the spectroscopic analyzer 1 returns the process to S2 and repeats the processes of S2 to S5. By repeating the processes of S2 to S5, the spectroscopic analyzer 1 sequentially irradiates the sample 5 with seven types of pattern lights using the pattern masks 201, 202, …, 207, and detects the Raman scattered light generated by each pattern light.

[0090] If the detection of Raman scattered light is terminated (S4: YES), the analysis unit 4 generates a Raman spectrum related to the portion irradiated with the linear lights 51 to 57 on the sample 5 based on the detection results of multiple times in which the data is stored (S6). The analysis unit 4 executes the subsequent processes by the arithmetic unit 41 executing arithmetic according to the computer program 441. In S6, the analysis unit 4 generates a Raman spectrum for the portion irradiated with the linear lights 51 to 57 on the sample 5 by the above-described processing method. The analysis unit 4 stores the generated Raman spectrum data in the storage unit 44 in association with the information indicating the portion irradiated with the linear lights 51 to 57 on the sample 5. The control unit 15 may perform a process of returning the mask 2 to the initial state in the mask changing unit 17, or may temporarily stop the light emission in the light source 11. The process of S6 corresponds to the processing unit.

[0091] The control unit 15 then determines whether or not to end the scanning of the sample 5 (S7). For example, a range to be scanned on the surface of the sample 5 is specified in advance, and the control unit 15 determines to end the scanning when the specified range has been scanned in its entirety. The control unit 15 may determine to end the scanning when the analysis unit 4 receives an instruction to end the scanning by the user operating the operation unit 45. If the scanning is not to be ended (S7: NO), the control unit 15 moves the sample 5 by causing the drive unit 16 to move the sample holder 14 (S8), and returns the process to S1. For example, the drive unit 16 moves the sample 5 in the first direction so that the next linear light 51 is irradiated to a position between the portion irradiated with the linear light 51 and the portion irradiated with the linear light 52. The drive unit 16 may move the sample 5 in the first direction by a distance in the first direction greater than or equal to the distance from the portion irradiated with the linear light 51 to the portion irradiated with the linear light 57. The driving unit 16 may move the sample 5 in the second direction by a distance equal to or greater than the length in the second direction of the linear light 51, 52, ..., 57. By repeating S1 to S8, the spectroscopic analysis device 1 scans the sample 5 with the primary light and generates a Raman spectrum of the Raman scattered light generated in each portion of the sample 5. The processes of S1 to S8 correspond to the scanning unit.

[0092] When the scanning is ended (S7: YES), the analysis unit 4 generates a spectral distribution that associates each part of the sample 5 with the Raman spectrum of the Raman scattered light generated in each part, and generates a distribution image of a substance in a specific state based on the spectral distribution (S9). In S9, the analysis unit 4 analyzes the state of the substance based on the Raman spectrum, and generates a distribution image of the substance in a specific state. The analysis unit 4 may also identify a substance contained in the sample 5 based on the Raman spectrum, and generate a distribution image of the identified substance. The analysis unit 4 may generate a distribution image of the Raman spectrum. Furthermore, the analysis unit 4 stores data of the distribution image in the storage unit 44. The analysis unit 4 may display the generated distribution image on the display unit 46. The process of S9 corresponds to the image generation unit.

[0093] The analysis unit 4 then performs a process of improving the resolution of the distribution image of the substance in a specific state (S10). In S10, the analysis unit 4 improves the resolution of the distribution image by using a super-resolution technique. For example, the analysis unit 4 stores in advance the correspondence between the features of the low-resolution image and the features of the high-resolution image, calculates the features of the distribution image, identifies the features of the high-resolution image corresponding to the calculated features, and generates an image from the identified features to generate a distribution image with improved resolution. For example, the analysis unit 4 generates a distribution image with improved resolution by using a trained learning model that outputs the features of the high-resolution image when the features of the low-resolution image are input. The analysis unit 4 stores data of the distribution image with improved resolution. The control unit 15 may display the distribution image with improved resolution on the display unit 46. The process of S10 corresponds to the super-resolution unit. The spectroscopic analysis device 1 may omit the process of S10. The spectroscopic analysis device 1 ends the process as above.

[0094] As described above in detail, the spectroscopic analysis device 1 generates a plurality of types of pattern light in which a plurality of linear lights are arranged according to a predetermined pattern, sequentially irradiates the sample 5 with the plurality of types of pattern light, disperses the Raman scattered light generated from the sample 5, and detects it with the image sensor 3. The spectroscopic analysis device 1 can generate a spectrum of the Raman scattered light by processing according to a predetermined pattern based on the results of multiple detections. By scanning the sample 5 with primary light consisting of a plurality of lights, the scanning time can be shortened compared to scanning the sample with a single irradiated light. Therefore, the spectroscopic analysis device 1 can analyze the sample 5 in a short time. In addition, the spectroscopic analysis device 1 uses linear light as the irradiated light. By scanning the sample 5 with linear light, the scanning time can be shortened compared to scanning the sample with point-like light. Therefore, the spectroscopic analysis device 1 can analyze the sample 5 in a shorter time.

[0095] Furthermore, the spectroscopic analysis device 1 generates a distribution image of a substance in a specific state based on the spectral distribution, and improves the resolution of the distribution image by super-resolution technology. For example, even if the sample 5 is roughly scanned, the spectroscopic analysis device 1 can generate a distribution image having the same resolution as when the sample 5 is precisely scanned. By roughly scanning the sample 5, the scanning time can be shortened, and the spectroscopic analysis device 1 can analyze the sample 5 in a shorter time.

[0096] <Embodiment 2> FIG. 10 is a block diagram showing a configuration of a spectroscopic analysis device 1 according to a second embodiment. In the second embodiment, a single type of primary light is used, and a plurality of types of secondary light are generated by blocking a portion of a plurality of Raman scattered lights generated from a sample 5. A fixed mask 62 is disposed at a position where the multi-spot light generated by the multi-spot light generating unit 12 is incident. The fixed mask 62 is a photomask, and a plurality of transparent portions are formed. A primary light including a plurality of lights is generated by the light passing through the plurality of transparent portions. The primary light generated by the fixed mask 62 is irradiated onto the sample 5. The fixed mask 62 is fixed, and the pattern in which the plurality of lights included in the primary light are arranged is not changed. The light source 11, the multi-spot light generating unit 12, and the fixed mask 62 constitute an irradiation unit 61.

[0097] The mask 2, which includes a plurality of pattern masks, is disposed between the sample holder 14 and the spectrometer 13. Light from the sample 5 is incident on one of the pattern masks held by the mask 2, and the light transmitted through the pattern mask is incident on the spectrometer 13. The mask 2 is desirably disposed at a position where the light from the sample 5 is imaged by an optical system. The spectroscopic analysis device 1 includes a mask changer 17 that changes the pattern mask on which the light is incident by moving the mask 2. The configuration of the mask 2 is the same as that of the first embodiment shown in FIG. 6. The mask 2 and the mask changer 17 in the second embodiment constitute a secondary light generator 63. The configuration of the other parts of the spectroscopic analysis device 1 is the same as that of the first embodiment.

[0098] FIG. 11 is a schematic diagram showing the fixed mask 62, the sample 5 irradiated with the primary light, the pattern mask, and the light receiving surface 30 of the image sensor 3 that receives the Raman scattered light. The fixed mask 62 is formed in a flat plate shape using a material that blocks light. In the example shown in FIG. 11, the fixed mask 62 is configured by forming seven transmission holes 621, 622, 623, 624, 625, 626, and 627 that are spaced apart from one another and aligned in a straight line on the flat plate. The number of the multiple transmission holes formed on the fixed mask 62 may be a number other than seven. The spectroscopic analysis device 1 causes the multi-spot light generated by the multi-spot light generation unit 12 to enter the fixed mask 62. A part of the multi-spot light passes through the transmission holes 621, ..., 627, and the other part of the multi-spot light is blocked by the fixed mask 62. As a result, a primary light including seven linear lights spaced apart from one another is generated.

[0099] The primary light is irradiated onto the sample 5. In the example shown in FIG. 11, seven linear lights 51, 52, ..., 57 are irradiated onto the surface of the sample 5, and Raman scattered light is generated from the portion of the sample 5 irradiated with the linear lights. The generated multiple Raman scattered lights are incident on the pattern mask. In the example shown in FIG. 11, the multiple Raman scattered lights are incident on the pattern mask 201. The pattern mask 201 has transparent holes 21, 23, 25, and 27 formed therein. The Raman scattered lights generated by irradiation with the linear lights 51, 53, 55, and 57 pass through the transparent holes 21, 23, 25, and 27. However, the Raman scattered lights generated by irradiation with the linear lights 52, 54, and 56 are blocked by the light-blocking portion of the pattern mask 201. The secondary light including the multiple Raman scattered lights transmitted through the pattern mask 201 is incident on the spectroscope 13.

[0100] The spectroscope 13 separates the multiple incident Raman scattered light beams, and the separated light beams are received by the image sensor 3. In the example shown in Fig. 11, light receiving lines 31, 33, 35, and 37 are generated corresponding to the irradiation positions of the linear light beams 51, 53, 55, and 57 on the sample 5. However, light receiving lines are not generated corresponding to the irradiation positions of the linear light beams 52, 54, and 56. In addition to the light receiving lines 31, 33, 35, and 37, there are light receiving regions 311, 321, 331, 341, 351, 361, and 371 in which multiple light receiving positions 312, 322, 332, 342, 352, 362, and 372 that receive the Raman scattered light are distributed in a planar shape, respectively.

[0101] As shown in FIG. 11, in a state where the secondary light transmitted through the pattern mask 201 is incident on the spectroscope 13, the image sensor 3 detects the Raman scattered light. Thereafter, the mask change unit 17 moves the mask 2 to change the pattern mask on which the Raman scattered light from the sample 5 is incident to the pattern mask 202. The secondary light transmitted through the pattern mask 202 is incident on the spectroscope 13, so that the secondary light is incident on the spectroscope 13 for the second time. The image sensor 3 detects the Raman scattered light for the second time. The change of the pattern mask, the incidence of the secondary light on the spectroscope 13, and the detection of the Raman scattered light are repeated. As in the first embodiment, the pattern masks 201, 202, ..., 207 are used in order, and the incidence of the secondary light on the spectroscope 13 and the detection of the Raman scattered light are performed seven times.

[0102] In this way, by changing the pattern mask, the combination of the light that passes through the pattern mask and enters the spectrometer 13 and the light that is blocked by the pattern mask among the multiple Raman scattered lights generated from the sample 5 is changed. As a result, seven types of secondary light are generated sequentially. The generated secondary light is a pattern light in which multiple lights are arranged at a distance from each other according to a predetermined pattern defined by the pattern mask. The combination of the positions of the multiple lights contained in the secondary light is changed sequentially according to the multiple patterns defined by the pattern masks 201, 202, ..., 207, and multiple types of secondary light are generated sequentially.

[0103] The generated secondary light is sequentially incident on the spectroscope 13 and dispersed, and the dispersed light is detected by the image sensor 3. When the first to seventh secondary light are generated, the light receiving surface 30 is in the same state as that of the first embodiment shown in FIG. 8. Each time secondary light is generated, the image sensor 3 detects the received light intensity at each position in the light receiving surface 30 and inputs data representing the detection results to the analysis unit 4. That is, the image sensor 3 detects the Raman scattered light seven times and inputs data representing the seven detection results to the analysis unit 4. The analysis unit 4 stores data representing the seven detection results as in the first embodiment, and performs processing to generate a Raman spectrum for each part of the sample 5 based on the seven detection results.

[0104] The spectroscopic analyzer 1 executes the processes of S1 to S10 as shown in FIG. 9. In a state where the sample 5 is held by the sample holding unit 14, the control unit 15 causes the light source 11 to start irradiating the primary light (S1). The light source 11 emits monochromatic light and causes the light to enter the multi-spot light generating unit 12. The multi-spot light generating unit 12 generates multi-spot light, and the multi-spot light enters the fixed mask 62. A part of the multi-spot light passes through the fixed mask 62, thereby generating primary light including linear light 51, 52, ..., 57. The primary light is irradiated onto the sample 5, and Raman scattered light is generated at a plurality of portions on the sample 5 irradiated with the light. The light including the plurality of Raman scattered lights enters one of the pattern masks included in the mask 2, and a part of the light passes through the pattern mask, thereby generating secondary light including the plurality of Raman scattered lights. The secondary light is incident on the spectroscope 13 , which separates the secondary light into a plurality of Raman scattered lights, and the separated Raman scattered lights are incident on the image sensor 3 .

[0105] The image sensor 3 detects the incident Raman scattered light (S2). The image sensor 3 inputs data representing the detection result of the Raman scattered light to the analysis unit 4. The analysis unit 4 stores the data representing the detection result in the storage unit 44 (S3). The control unit 15 then determines whether or not to end the detection of the Raman scattered light (S4). If the detection of the Raman scattered light is not to be ended (S4: NO), the control unit 15 operates the mask changing unit 17, and the mask changing unit 17 changes the pattern mask into which the light from the sample 5 containing a plurality of Raman scattered lights is incident (S5). In S5, the mask changing unit 17 moves the mask 2 to change the pattern mask into which the light from the sample 5 is incident. The spectroscopic analysis device 1 then returns the process to S2, and repeats the processes of S2 to S5. By repeating the processes of S2 to S5, the spectroscopic analysis device 1 causes seven types of secondary light to be incident on the spectroscope 13 using the pattern masks 201, 202, . . . , 207, and detects the Raman scattered light contained in each secondary light.

[0106] If the detection of Raman scattered light is to be ended (S4: YES), the analysis unit 4 generates a Raman spectrum (S6) as in the first embodiment. The control unit 15 then determines whether or not to end the scanning of the sample 5 (S7). If the scanning is not to be ended (S7: NO), the control unit 15 moves the sample 5 by causing the drive unit 16 to move the sample holder 14 (S8), and the process returns to S1. By repeating S1 to S8, the spectroscopic analysis device 1 scans the sample 5 with the primary light, and generates a Raman spectrum of the Raman scattered light generated in each portion of the sample 5.

[0107] When the scanning is to be ended (S7: YES), similarly to the first embodiment, the analysis unit 4 generates a spectral distribution and generates a distribution image of the material in a specific state (S9). Next, similarly to the first embodiment, the analysis unit 4 performs a process to improve the resolution of the distribution image (S10). The spectroscopic analysis device 1 may omit the process of S10. The spectroscopic analysis device 1 then ends the process.

[0108] As described above in detail, in the second embodiment, the spectroscopic analysis device 1 irradiates the sample 5 with primary light consisting of a plurality of linear beams, and generates a plurality of types of secondary light having different combinations of a plurality of beams among a plurality of beams generated in the sample 5 and incident on the spectroscope 13. The spectroscopic analysis device 1 sequentially causes a plurality of types of secondary light to be incident on the spectroscope 13, disperses a plurality of Raman scattered beams contained in the secondary light in the spectroscope 13, detects them with the image sensor 3, and generates a spectrum of the Raman scattered light in the analysis unit 4. Note that the spectroscopic analysis device 1 may be configured to generate a primary light consisting of a plurality of linear beams by a method other than the method using the fixed mask 62.

[0109] In the second embodiment as well, the spectroscopic analysis device 1 scans the sample 5 with a primary light consisting of a plurality of linear beams, thereby making it possible to shorten the scanning time compared to scanning the sample with a single irradiation light. This allows the spectroscopic analysis device 1 to analyze the sample 5 in a short time. Furthermore, similarly to the first embodiment, the spectroscopic analysis device 1 can shorten the scanning time by performing a process for improving the resolution of the distribution image, thereby making it possible to analyze the sample 5 in a shorter time.

[0110] In the first and second embodiments, the spectroscopic analysis device 1 may perform spectroscopic analysis without using some of the pattern masks 201, 202, ..., 207. For example, the spectroscopic analysis device 1 performs the processes S2 to S5 using each of the pattern masks 201 to 206, and performs the processes S6 and after without performing the process using the pattern mask 207. In this embodiment, there are some parts where a Raman spectrum cannot be generated, and the distribution image generated in S9 includes a part where the distribution of a substance in a specific state cannot be obtained. That is, a distribution image according to a pattern obtained from a matrix in which some rows of the S matrix are omitted is obtained. The spectroscopic analysis device 1 generates a distribution even for a part where the distribution of a substance in a specific state cannot be obtained by improving the resolution of the distribution image of the Raman spectrum in the process of S10. The spectroscopic analysis device 1 may omit the use of two pattern masks. For example, the process using the pattern masks 206 and 207 may be omitted. Even in this case, the resolution can be improved in the process of S10 to generate a distribution image with almost the same resolution as when all the pattern masks are used. Mask 2 may be in a form that does not include an unused pattern mask. In this way, spectroscopic analysis device 1 can reduce the number of times that the processes of S2 to S5 are repeated. By reducing the number of times that the processes of S2 to S5 are repeated, the time required for the processes can be shortened, and spectroscopic analysis device 1 can analyze sample 5 in a shorter time.

[0111] The spectroscopic analysis device 1 may be configured to perform processing ignoring some of the linear light beams included in the primary light. For example, the spectroscopic analysis device 1 may perform processing ignoring the linear light beam 57. More specifically, the spectroscopic analysis device 1 may perform processing S6 without using the received light intensity at each position in the light receiving area 371. Since the linear light beam 57 does not affect light receiving areas other than the light receiving area 371, processing ignoring the linear light beam 57 can be performed. The processing performed by the spectroscopic analysis device 1 in this configuration is processing according to a pattern obtained from a matrix in which some columns of the S matrix are omitted. In addition, the mask 2 may be configured not to include a transmission hole and a light blocking portion corresponding to some columns of the S matrix. The spectroscopic analysis device 1 including the mask 2 according to this configuration performs processing according to a pattern obtained from a matrix in which some columns of the S matrix are omitted. Even in these configurations, the spectroscopic analysis device 1 can generate a distribution image without reducing the resolution by performing the processing of S10. In these configurations, the amount of necessary processing is reduced, and the spectroscopic analysis device 1 can analyze the sample 5 in a shorter time.

[0112] In the first and second embodiments, seven linear light beams are combined to generate the primary light beam. However, the spectroscopic analysis device 1 may be configured to generate the primary light beam by combining a number of linear light beams other than seven. For example, the spectroscopic analysis device 1 may be provided with a mask 2 that does not include a transmission hole and a light-shielding portion corresponding to one column in the S matrix, or a fixed mask 62 having six transmission holes, thereby generating the primary light beam by combining six linear light beams. For example, the spectroscopic analysis device 1 may be provided with a mask 2 formed according to a third-order S matrix, or a fixed mask 62 having three transmission holes, thereby generating the primary light beam by combining three linear light beams. For example, the spectroscopic analysis device 1 may be configured to generate the primary light beam by combining eight or more linear light beams. The spectroscopic analysis device 1 may be configured to utilize a pattern obtained based on a Hadamard matrix of order higher than eight.

[0113] In the first and second embodiments, a form in which a pattern light according to a predetermined pattern obtained based on a Hadamard matrix is ​​used is shown, but the spectroscopic analysis device 1 may be configured to use a pattern light according to other patterns. In the first and second embodiments, a form in which a pattern light is generated using a mask 2 is shown, but the spectroscopic analysis device 1 may be configured to generate a pattern light using an optical component other than a mask. For example, the spectroscopic analysis device 1 may be configured to generate a pattern light using a DMD (digital mirror device). In the first and second embodiments, a form in which a multi-spot light generating unit 12 is used is shown, but the spectroscopic analysis device 1 may be configured to generate light distributed widely by a method other than the method using the multi-spot light generating unit 12.

[0114] In the first and second embodiments, the Raman scattering light included in the secondary light generated from the sample 5 is detected. Compared to the spectrum of other types of secondary light such as fluorescence, the Raman spectrum has a narrow wavelength width and a sharp peak. Therefore, the spread of the light receiving position in the light receiving surface 30 is small and the light receiving intensity is high, so that it is easy to specify the light receiving position and the light receiving intensity, and it is easy to obtain the wavelength of the secondary light and the intensity of the peak in the spectrum. In this way, the embodiment of detecting the Raman scattering light included in the secondary light has a great effect of easily obtaining the spectrum. Note that the spectroscopic analysis device 1 may be a form that detects light other than the Raman scattering light included in the secondary light. For example, the spectroscopic analysis device 1 may be a form that detects photoluminescence or fluorescence included in the secondary light. In the first and second embodiments, the multiple lights included in the primary light are linear lights, but the multiple lights included in the primary light may be spot lights. Even in the embodiment in which the multiple lights included in the primary light are spot lights, the spectroscopic analysis device 1 can shorten the scanning time.

[0115] The present invention is not limited to the contents of the above-described embodiment, and various modifications are possible within the scope of the claims. In other words, embodiments obtained by combining technical means appropriately modified within the scope of the claims are also included in the technical scope of the present invention. [Explanation of symbols]

[0116] 1 Spectrometer 11 Light source 12 Multi-spot light generating unit 13 Spectrometer 14 Sample holder 15 Control section 2. Mask 21, 22, 23, 24, 25, 26, 27 Transmission holes 201, 202, 203, 204, 205, 206, 207 Pattern Mask 3. Image sensor 30 Photosensitive surface 31, 32, 33, 34, 35, 36, 37 Receiving lines 311, 321, 331, 341, 351, 361, 371 light receiving area 301, 302, 312, 322, 332, 342, 352, 362, 372 Light receiving position 4 Analysis Department 40 Recording media 41 Arithmetic section 44 Memory section 441 Computer Programs 5. Sample 51, 52, 53, 54, 55, 56, 57 Linear light 501 Irradiation light 61 Irradiation unit 62 Fixed Mask 621, 622, 623, 624, 625, 626, 627 Transmission hole 63 Secondary light generation section

Claims

1. an irradiation unit that irradiates a sample with primary light including a plurality of linear beams arranged in a first direction and spaced apart from each other, each linear beam extending along a second direction intersecting the first direction; a spectrometer for splitting secondary light, which is generated by irradiating the sample with the primary light and includes a plurality of lights; an image sensor for detecting the light dispersed by the spectrometer; a processing unit that performs processing to generate a spectrum of light contained in the secondary light based on a detection result by the imaging element; a scanning unit that scans the sample with the primary light, on the light receiving surface of the imaging element, a plurality of light receiving lines are arranged in a direction corresponding to the first direction, the light receiving positions of which correspond to the portion of the sample irradiated with the linear light, the light receiving lines being spaced apart from each other and aligned in a direction corresponding to the second direction; the spectrometer sequentially receives a plurality of types of secondary light, the combinations of the respective positions of the plurality of light beams being changed according to a plurality of predetermined patterns, and disperses the plurality of types of secondary light that are incident thereon; the processing unit generates the spectrum by processing according to the predetermined patterns based on a plurality of detection results by the image sensor in response to the dispersion of the plurality of types of secondary light by the spectroscope; The scanning unit moves the sample after the processing unit generates the spectrum, Repeating irradiation of the sample with the primary light from the irradiation unit, detection by the image sensor multiple times in response to the dispersion of the multiple types of secondary light by the spectroscope, generation of the spectrum by the processing unit, and movement of the sample by the scanning unit. A spectroscopic analysis device characterized by:

2. the irradiation unit sequentially generates a plurality of different types of primary light by changing a combination of positions of the plurality of linear light beams included in the irradiation unit according to the plurality of predetermined patterns; The spectrometer receives the plurality of types of secondary light generated by irradiating the sample with the plurality of types of primary light.

2. The spectroscopic analysis device according to claim 1 .

3. The irradiation unit generates the plurality of types of primary light using a plurality of masks in which combinations of a plurality of positions through which light passes are different according to the plurality of predetermined patterns.

3. The spectroscopic analysis device according to claim 2 .

4. a secondary light generating unit that sequentially generates the plurality of types of secondary light by blocking a portion of the plurality of light beams generated by irradiating the sample with the primary light so that the portion does not enter the spectroscope and changes a combination of the light beam to be blocked and the plurality of light beams to be allowed to enter the spectroscope without being blocked according to the plurality of predetermined patterns, The spectrometer receives the plurality of types of secondary light generated by the secondary light generating unit.

2. The spectroscopic analysis device according to claim 1 .

5. the secondary light generating unit generates the plurality of types of secondary light by using a plurality of masks in which a combination of a plurality of lights to be transmitted without being blocked among a plurality of lights generated by irradiating the sample with the primary light is different according to the plurality of predetermined patterns.

5. The spectroscopic analysis device according to claim 4,

6. An image generating unit that generates a spectral distribution that associates each portion on the sample where the scanning is performed with the spectrum of light contained in the secondary light generated from each portion, and generates a distribution image of a substance in a specific state based on the spectral distribution; a super-resolution unit that improves the resolution of the distribution image by using super-resolution technology; 6. The spectroscopic analysis apparatus according to claim 1, further comprising:

7. On the light receiving surface of the imaging element, The light receiving positions of the dispersed light are arranged according to wavelength in a direction corresponding to the first direction at positions different from the plurality of light receiving lines.

7. The spectroscopic analysis device according to claim 1,

8. The processing unit includes: generating said spectrum by a separate processing method for each of a plurality of lights contained in said secondary light; 8. The spectroscopic analysis device according to claim 1,

9. The processing method includes a matrix operation. The spectroscopic analysis device according to claim 8 .

10. the predetermined plurality of patterns are patterns of elements contained in a plurality of rows or columns of an S matrix obtained by converting +1 to 0 and −1 to 1 in elements of a Hadamard matrix of degree 4 or higher and removing the first row and the first column, The matrix operation is an operation using the S matrix. The spectroscopic analysis device according to claim 9 .

11. The scanning unit moves the sample in the first direction so that a linear light beam is irradiated to a position between portions irradiated with a plurality of linear light beams after the sample has moved.

11. The spectroscopic analysis device according to claim 1,

12. the secondary light includes Raman scattered light, The processing unit generates a spectrum of the Raman scattered light.

12. The spectroscopic analysis device according to claim 1,

13. Irradiating a sample with primary light including a plurality of linear beams arranged in a first direction and spaced apart from each other, each linear beam extending along a second direction intersecting the first direction; Sequentially dispersing a plurality of types of secondary light generated by irradiating the sample with the primary light and in which combinations of positions of a plurality of included lights are changed according to a plurality of predetermined patterns; The dispersed light is detected by an image sensor. generating a spectrum of light contained in the secondary light by processing according to the predetermined patterns based on a plurality of detection results by the image sensor corresponding to the dispersion of the plurality of types of secondary light; removing the sample after generating the spectrum; Repeating the irradiation of the sample with the primary light, the detection by the image sensor in response to the dispersion of the plurality of types of secondary light, the generation of the spectrum, and the movement of the sample. A spectroscopic analysis method comprising:

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