Heat treatment apparatus and heat treatment method

Abstract

To provide a heat treatment device and a heat treatment method, capable of easily determining whether or not a detection temperature value in each region of a heat treatment plate is proper in a short time.SOLUTION: A heat treatment device comprises: a conversion part that converts an output value of a plurality of temperature sensors into each detection temperature value; a power control part 411 that applies a plurality of power operation amounts corresponding to a plurality of regions to a power supply circuit 412 so that the plurality of detection temperature values are matched to a target temperature value; a storage part 450 that stores a proper operation amount that has to be applied to the power supply circuit by the power control part 411 in the case where the detection temperature value of each region obtained by the converter part is in a proper state; an operation amount acquisition part 440 that acquires the power operation amount in each region applied to the power supply circuit by the power control part 411; and a determination part 480 that determines whether or not the detection temperature value corresponding to each region is in the proper state on the basis of the proper operation amount in each region stored in the storage part 450 and the power operation amount of each region acquired by the operation amount acquisition part 440.SELECTED DRAWING: Figure 6

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