Horizontal laser processing device

Abstract

To provide a horizontal type laser processing device which prevents deterioration of processing accuracy in the periphery of a processing point of a processing object, and can effectively perform boring and cutting regardless of a processing place.SOLUTION: A horizontal type laser processing device includes an irradiation nozzle 4 for irradiating a processing object W with a laser beam L, and an air supply part 9 for jetting air G1 and G2 to the laser beam L, wherein the air supply part 9 has a first air supply part 9a having a first air supply hole 9aa for jetting the first air G1 from the upper part of the irradiation laser beam L, and a second air supply part 9b having a second air supply hole 9ba for jetting second air G2 from the lower part of the irradiation laser beam L.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a horizontal laser processing apparatus.

Background Art

[0002] Conventionally, in the processing of a wide range of materials such as metal materials, ceramics, and fiber-reinforced plastic materials, for example, drilling, cutting, etc., processing using a laser has been performed. In this processing, a technique is generally known in which a laser is irradiated onto a processing target to melt it, and at the same time, high-pressure water is sprayed onto the processing target to remove the melt.

[0003] For example, in the laser processing apparatus of Patent Document 1, a configuration is disclosed that includes a laser head that irradiates a processing target with a laser, a water jet head that sprays high-pressure water onto the processing target to remove the melt, and intermittent injection control means that controls so as to be able to intermittently inject high-pressure water.

[0004] In the laser processing apparatus of Patent Document 2, a configuration is disclosed that includes an irradiation head that irradiates a processing target with a laser (pulse wave) and a nozzle that sprays water, and has an angle changing mechanism that adjusts the spraying timing of water and changes the angles of the irradiation head and the nozzle.

[0005] In the laser processing apparatus of Patent Document 3, a configuration is disclosed that includes a laser head that irradiates a processing target with a laser and a liquid supply nozzle that forms a liquid film with fluidity on the surface of the processing target and is controlled by a control unit to intermittently inject a liquid at a predetermined cycle.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0007] However, Patent Documents 1 to 3 assume that a laser and a water jet (high-pressure water, water) are independently and separately irradiated onto a processing point of an object to be processed. Therefore, the laser and the water jet (high-pressure water, water) may be affected by being exposed to gases and liquids in the surrounding atmosphere, which may have an adverse effect on the accuracy of laser processing.

[0008] In addition, it is assumed that the laser and the water jet (high-pressure water, water) are irradiated and injected downward in the direction of gravity. However, in many cases, the object to be processed is arranged laterally in a direction perpendicular to the direction of gravity. In particular, when drilling, cutting, etc. are performed on objects inside a nuclear reactor facility or heavy objects, a laser processing apparatus must be inserted into a narrow space.

[0009] In addition, when drilling, cutting, etc. are performed with a laser, a melt is generated, and thus a method for effectively removing this melt has been demanded. In particular, when processing a thick object to be processed in a narrow space, continuous laser irradiation is required, and a processing apparatus that is not obstructed by the melt has been demanded.

[0010] To solve the above problems, the horizontal laser processing apparatus of the present invention includes an irradiation nozzle that irradiates a laser beam onto an object to be processed, and an air supply unit that injects air with respect to the laser beam. The air supply unit includes a first air supply unit having a first air supply hole that injects first air from above the irradiated laser beam, and a second air supply unit having a second air supply hole that injects second air from below the irradiated laser beam , an irradiation nozzle that irradiates a processing target with laser light, a spin nozzle that intermittently injects high-pressure water in a semi-circular arc shape in a top view with respect to the laser light, and a control unit that controls the injection interval of the high-pressure water, and has.

Means for Solving the Problems

[0011] To solve the above problems, the horizontal laser processing apparatus of the present invention includes an irradiation nozzle that irradiates a processing target with laser light, and an air supply unit that injects air against the laser light. The air supply unit includes a first air supply unit having a first air supply hole that injects first air from above the irradiated laser light, and a second air supply unit having a second air supply hole that injects second air from below the irradiated laser light.

Effect of the Invention

[0012] According to the horizontal laser processing apparatus of the present invention, it is possible to prevent deterioration of processing accuracy around the processing point of the processing target, and to effectively perform drilling and cutting even in a narrow portion such as a heavy object.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2A

Figure 2B

Figure 3

Figure 4

Figure 5A

Figure 5B

Figure 5C

Figure 6

Figure 7

Embodiments for Carrying Out the Invention

[0014] Hereinafter, embodiments of the present invention will be described with appropriate reference to the drawings. FIG. 1 shows a configuration diagram of a horizontal laser processing apparatus 1 according to an embodiment of the present invention as viewed from the side.

[0015] FIG. 2A shows a view in the direction of arrow I in FIG. 1, which is a configuration diagram of the horizontal laser processing apparatus 1 according to the embodiment as viewed from the front. FIG. 2B shows a view in the direction of arrow I in FIG. 1, which is a configuration diagram of another example of the horizontal laser processing apparatus 1 according to the embodiment as viewed from the front.

[0016] FIG. 3 shows a view in the direction of arrow II in FIG. 1, which is a conceptual diagram of an intersection of a laser and high-pressure water of the horizontal laser processing apparatus 1 according to the embodiment as viewed from above.

[0017] As shown in FIGS. 1 and 2A, the horizontal laser processing apparatus 1 according to the embodiment includes a main body 2, a laser head 2a, an oscillator 3 that supplies a laser beam L, an irradiation nozzle 4, an air supply unit 9, and a spin nozzle 10.

[0018] The main body 2 is a structural member that supports the components of the horizontal laser processing apparatus 1. A nozzle head 2a and a spin nozzle 10 that are connected to the oscillator 3 are fixed to the main body 2. The main body 2 fixes the entire apparatus (1) and can stably position each component. Although not specified in this embodiment, when the configuration is such that the position of the laser beam L (see FIG. 1) is moved vertically, horizontally, and laterally, a mechanism having a configuration that can move in three axial directions such as the X-axis, Y-axis, and Z-axis can also be adopted.

[0019] The oscillator 3 is a supply source that supplies the laser beam L. As the laser beam L, a fiber laser, a YAG (yttrium aluminum garnet) laser, or the like is used. The laser beam L may be appropriately changed to a continuous wave, a pulse wave, etc. according to the processing target W and the processing environment. The laser head 2a is a part that allows the laser beam L from the oscillator 3 to pass through. The interior of the laser head 2a through which the laser beam L passes is cylindrical, and it is made of a material that is not affected by the temperature or damaged by the laser beam L. For example, the laser head 2a uses a metal material such as aluminum.

[0020] As shown in FIG. 1, the irradiation nozzle 4 is a part that irradiates the laser beam L onto the workpiece W. The irradiation nozzle 4 is a lateral nozzle that emits in a substantially horizontal direction. The air supply unit 9 blows away the spatter that has flown to the head side by high-pressure water injection so that it does not enter the irradiation nozzle 4.

[0021] As shown in FIGS. 2A and 3, the spin nozzle 10 jets high-pressure water Q (intermittently) toward the irradiation point of the laser beam L to remove scattered matter such as chips (molten matter such as dross) and perform intermittent irradiation of the laser beam L onto the workpiece (details will be described later). Note that the high-pressure water Q to be jetted does not necessarily have to directly contact the laser beam L, and can be adjusted to a location suitable for removal according to the situation of scattered matter such as chips. FIG. 4 shows a longitudinal sectional view of the main part in the vicinity of the laser head 2a of the horizontal laser processing apparatus 1 according to the embodiment.

[0022] The laser beam L supplied from the oscillator 3 and the laser head 2a shown in FIG. 1 is focused by the condenser lens 5. The laser beam L that has been focused and whose focus point has been adjusted is reflected by the mirror 6 and irradiated from the irradiation nozzle 4 toward the workpiece W.

[0023] <Condenser lens 5> The condenser lens 5 is a member that collimates and focuses the laser beam L supplied from the oscillator 3 and the laser head 2a. It is desirable that the condenser lens 5 be an integrated type having collimation and focusing functions. By adopting a condenser lens 5 with a magnification of 10 times, f40×f400, a laser with higher intensity can be used.

[0024] <Mirror 6> The mirror 6 shown in Fig. 4 is a member that adjusts the laser beam L supplied in the substantially gravitational direction (substantially vertical direction) to the substantially horizontal direction or the horizontal direction in the lateral direction via the condenser lens 5. The mirror 6 only needs to be able to adjust the tilt angle with respect to the vertical direction within the range of 0 to 90° centered on 45° in order to irradiate the laser beam L from the substantially gravitational direction to the substantially horizontal direction or the horizontal direction perpendicular thereto. A protective film can also be coated on the surface of the mirror 6 in order to prevent damage to the surface by the laser beam L. As the protective film, a metal material such as gold is desirable.

[0025] Furthermore, a cooling unit 8 can be arranged around the mirror 6 in order to cool the mirror 6 and suppress the influence of the heat of the mirror 6. The cooling unit 8 only needs to constantly or appropriately cool the mirror 6 with the coolant supplied from the cooling source C. The cooling source C has a refrigeration cycle. By cooling the cooling unit 8, the influence of the heat of the mirror 6 can be suppressed.

[0026] <Protective glass 7> By the way, since the direction of the laser beam L is switched by the mirror 6, it is important to keep the atmosphere around the mirror 6 in a clean state. Therefore, protective glasses 7 are arranged immediately before and immediately after the mirror 6 inside the laser head 2a. Thereby, the atmosphere at the time of reflection of the laser beam L can be kept in a clean state.

[0027] The protective glass 7 uses a glass material that allows the laser beam L to pass through. Furthermore, by forming a thin film (AR coat: Anti-Reflection coating) on one or both surfaces of the surface of the protective glass 7, effects such as prevention of reflection of the laser beam L can also be added.

[0028] <Air supply unit 9> The air supply units 9 (9a, 9b) shown in Figs. 1 and 2A are parts that inject air G1, G2 toward the laser beam L. Note that the air is not limited to air (atmospheric air), and nitrogen gas or the like can be appropriately selected. (Used as shielding gas, cutting gas, assist gas) By the way, the laser beam L irradiated from the irradiation nozzle 4 is substantially horizontal or horizontal with respect to the gravitational direction and passes through floating matter floating in the air, and is easily affected by the surrounding environment (surrounding atmosphere). For example, when cutting the workpiece W, spatter, dross, etc. scattered by the cutting may block the laser beam L. In order to remove such scattered matter from the periphery of the laser beam L, the air supplied from the air supply unit 9 is used as an air wall or an air curtain. Furthermore, by being able to remove the scattered matter, it is possible to avoid a state in which the scattered matter enters (adheres) into the irradiation nozzle 4 (the surface of the protective glass 7) and the performance of the laser cannot be exhibited.

[0029] FIG. 5A shows an enlarged view of the first air supply unit 9a and the second air supply unit 9b of FIG. 2A. FIG. 5B shows a bottom view of the first air supply unit 9a. FIG. 5C shows a top view of the second air supply unit 9b. The air supply unit 9 is composed of an upper first air supply unit 9a and a lower second air supply unit 9b. The first air supply unit 9a injects the first air G1 from above the irradiated laser beam L.

[0030] The second air supply unit 9b injects the second air G2 from below the irradiated laser beam L.

[0031] The first air supply unit 9a and the second air supply unit 9b are arranged on the same axis or different axes (see FIGS. 1 and 2B) in the gravitational direction.

[0032] The first air supply unit 9a and the second air supply unit 9b of the air supply unit 9 are respectively formed with a first air supply hole 9aa (see FIG. 5B) and a second air supply hole 9ba (see FIG. 5C) which are air supply holes. The first air supply hole 9aa discharges the first air G1, and the second air supply hole 9ba discharges the second air G2.

[0033] By using not only jet flows such as round holes but also flat jet flows for the first air supply hole 9aa and the second air supply hole 9ba, sputtered materials and the like can be removed. FIG. 5A shows the case of a flat jet flow. Note that the positions, sizes, widths, distances, etc. of the first air supply hole 9aa and the second air supply hole 9ba that constitute the air supply hole can be changed as appropriate. The positions of the first air supply hole 9aa and the second air supply hole 9ba may be arranged substantially in the direction of gravity or on the same axis in the direction of gravity, or may be arranged on separate axes substantially in the direction of gravity or in the direction of gravity as shown in FIGS. 1 and 2B.

[0034] By arranging the first air supply hole 9aa and the second air supply hole 9ba on separate axes substantially in the direction of gravity or in the direction of gravity, the influence of the first air G1 and the second air G2 on each other is reduced, so that sputtered materials and the like can be removed in different directions.

[0035] Although not specified in this embodiment, a support mechanism for fixing the positions of the first air supply hole 9aa and the second air supply hole 9ba, or a mechanism configured to be movable in three-axis directions such as the X-axis, Y-axis, and Z-axis can also be adopted. Furthermore, by arranging the air supply unit 9 not at two locations but at three to five locations, the thickness and width of the air curtain can also be increased.

[0036] <Spin nozzle 10> The spin nozzle 10 shown in FIGS. 1 and 2A is a component that intermittently injects high-pressure water Q with respect to the laser beam L in order to effectively remove the molten material that melts at the irradiation point of the laser beam.

[0037] FIG. 6 shows a longitudinal sectional view of the spin nozzle 10 of the embodiment. FIG. 7 shows a sectional view taken along line III-III of the top view of the spin nozzle 10 of the embodiment shown in FIG. 6. The spin nozzle 10 shown in FIG. 6 has a fixing portion 11, a rotating portion 12, and an injection hole 10b of the structure.

[0038] The fixed part 11 has a high-pressure water supply passage 10a to which high-pressure water Q is supplied. The fixed part 11 is a base for suppressing vibrations and the like caused by the injection of high-pressure water Q from the spin nozzle 10 and ensuring the stability of the injection direction of the high-pressure water Q. A support part 11a for the fixed part is arranged between the fixed part 11 and the support part 12a for the rotating part. The support part 11a for the fixed part is, for example, a sealing member. Therefore, even when the support part 12a for the rotating part rotates, the support part 11a for the fixed part can act as a buffer material to prevent damage such as wear and torsion between the members.

[0039] The rotating part 12 has an annular shape and is a part arranged below the support part 12a for the rotating part. As shown by the arrow α21 in FIG. 7, the rotating part 12 rotates to rotate the first high-pressure water nozzle 13a to the fourth high-pressure water nozzle 13d.

[0040] As shown in FIG. 6, the rotating part 12 is arranged outside and below the support part 12a for the rotating part. Since the rotating part 12 is a rotating part, a bush 12b is arranged between the rotating part 12 and the support part 12a for the rotating part. The bush 12b is, for example, a sintered bearing. The bush 12b can prevent damage such as wear and torsion between the rotating part 12 and the support part 12a for the rotating part. The rotating part 12 has a first high-pressure water nozzle 13a, a second high-pressure water nozzle 13b, a third high-pressure water nozzle 13c, and a fourth high-pressure water nozzle 13d through which the high-pressure water Q passes in order to apply a rotational force to the high-pressure water Q.

[0041] The high-pressure water Q of 10 to 200 MPa supplied from the high-pressure water supply source P is supplied into the spin nozzle 10 through the high-pressure water supply passage 10a (arrow α11 in FIG. 6) and stored in the storage space 10c. Then, the high-pressure water Q from the high-pressure water supply passage 10a is supplied to the first high-pressure water nozzle 13a to the fourth high-pressure water nozzle 13d (arrow α12 in FIG. 6). When the rotating part 12 rotates, high-pressure water Q flows outward from the outer periphery of the first to fourth high-pressure water nozzles 13a to 13d as shown by the arrow α13 in FIG. 6.

[0042] Here, the first to fourth high-pressure water nozzles 13a to 13d shown in FIG. 7 are composed of a plurality, and in a top view, they are arranged at positions shifted (offset in parallel) from the line extending radially through the center C of the spin nozzle 10. As a result, the high-pressure water Q ejected from the first to fourth high-pressure water nozzles 13a to 13d collides with the drainage space wall 10d1. Due to the collision of the high-pressure water Q with the drainage space wall 10d1 and the reaction force of the ejection, the rotating part 12 rotates (arrow α21 in FIG. 7). Then, the first to fourth high-pressure water nozzles 13a to 13d of the rotating part 12 intermittently align with the injection holes 10b of the fixed part 11, so that the high-pressure water Q is intermittently ejected from the injection holes 10b against the laser beam L. Note that the size, number, etc. of the holes of the first to fourth high-pressure water nozzles 13a to 13d can be appropriately selected.

[0043] The high-pressure water Q is ejected against the laser beam L before reaching the processing point of the workpiece W and collides with the laser beam L. By the collision of the high-pressure water Q with the laser beam L, the workpiece W can be irradiated with the intermittent laser beam L. As a result, the melt of the workpiece W is removed, and high-precision processing can be performed. The high-pressure water Q ejected from the injection holes 10b of the spin nozzle 10 has rotational energy added by the rotating part 12, so that the ejection direction becomes fan-shaped in a cross-sectional view and semi-circular arc-shaped in a top view, and the scattered matter generated by the processing from the workpiece W is removed so as to be swept outward. In addition, it is desirable that the air G (air curtain) jetted from the air supply unit 9 and the high-pressure water Q jetted from the spin nozzle 10 have a positional relationship where they do not come into contact. Specifically, when the high-pressure water Q comes into direct contact with or in the vicinity of the melt of the workpiece W, most of the melt is removed, and the air G removes the scattered matter on the side closer to the irradiation nozzle 4 away from the workpiece, thereby effectively suppressing the scattering of the melt around and reducing the adhesion to the components of the horizontal laser processing apparatus 1. As a result, processing such as drilling and cutting can be stably performed.

[0044] Note that the rotation direction of the high-pressure water Q jetted from the jet hole 10b can be adjusted by changing the position and rotation direction of the spin nozzle 10.

[0045] Also, by making the shape of the jet hole 10b horizontally long, the high-pressure water Q can be jetted horizontally. By jetting the high-pressure water Q horizontally, the width of the jetted high-pressure water Q can be widened, and the melt can be removed in a surface rather than a point manner, improving the removal efficiency. The horizontally long shape of the jet hole 10b is preferably in the range of 10 to 20° in top view. Furthermore, as the spin nozzle 10 rotates, the horizontally long high-pressure water Q collides with the melt in a semi-circular arc shape and intermittently in top view. Therefore, by repeating the cutting of the workpiece W by the laser L and the removal of the melt, stepwise drilling and cutting can be effectively performed.

[0046] As shown in FIG. 6, a drain channel 10e is formed at the lower part of the drain space 10d. Excess high-pressure water Q in the drain space 10d is discharged to the outside through the drain channel 10e. Therefore, in order to appropriately guide the high-pressure water Q to the lower drain channel 10e, an annular continuous or discontinuous drain direction adjustment part 14 is arranged in the jet direction of the high-pressure water nozzle 13 in the drain space 10d. The high-pressure water Q other than that jetted from the jet hole 10b to the outside (arrow α14 in FIGS. 6 and 7) collides with the drain direction adjustment part 14 and falls downward, and the unused high-pressure water Q can flow into the drain channel 10e.

[0047] Also, as a modification of the spin nozzle 10, a configuration in which the first to fourth high-pressure water nozzles 13a to 13d are formed in two or more stages can also be adopted. Also, as another modification of the spin nozzle 10, a plurality of spin nozzles 10 can be arranged. For example, a configuration in which two spin nozzles 10 are connected vertically, or a configuration in which one spin nozzle 10 is arranged on each of the left and right sides. By forming the first to fourth high-pressure water nozzles 13a to 13d in two or more stages or arranging a plurality of spin nozzles 10, the amount and width of removal of spatter, dross, etc. scattered by cutting can be increased.

[0048] <Usage method of the horizontal laser processing apparatus 1> Next, the usage method of the horizontal laser processing apparatus 1 of the embodiment configured as described above will be described.

[0049] First, after the operator starts the oscillator 3, the air supply source A, and the high-pressure water supply source P shown in FIGS. 1 and 2, the operator aligns the laser processing apparatus 1 with the workpiece W to be processed and completes the preliminary preparation.

[0050] Next, the first air G1 and the second air G2 are respectively ejected from the first air supply unit 9a and the second air supply unit 9b. Then, by starting the spin nozzle 10, each high-pressure water nozzle (13) rotates inside the spin nozzle 10, and as shown in FIG. 3, intermittent high-pressure water Q is ejected from the ejection holes 10b. The high-pressure water Q spreads in an arc shape by being ejected in a fan shape by the rotational energy of each high-pressure water nozzle (13), and scattered matter such as spatter during processing is removed.

[0051] Then, by supplying the laser beam L from the oscillator 3, as shown in FIG. 4, the laser beam L passes through the laser head 2a, is focused and collimated by the condenser lens 5, and the laser beam L that is substantially horizontal or horizontal is irradiated from the irradiation nozzle 4 through angle adjustment by the mirror 6. Furthermore, as shown in FIGS. 1 and 2A, the first air G1 and the second air G2 are jetted in two steps from the vertical direction. Thereby, it is possible to prevent scattered matter from entering the atmosphere around the laser beam L, and the accuracy of drilling and cutting of the workpiece W is improved. Also, by preventing the adhesion of the molten material to the irradiation nozzle 4 and the like, the replacement frequency of each element can be reduced.

[0052] Also, as shown in FIGS. 1 and 3, the laser beam L is intermittently irradiated onto the workpiece W. Thereby, even for a workpiece W having a large thickness, it is possible to avoid generating molten materials such as dross and fume at once. Therefore, using the horizontal laser processing apparatus 1, it is possible to efficiently perform drilling, cutting, etc. of the workpiece W.

[0053] Also, the control unit 15 shown in FIGS. 1 and 2A can be arranged. By arranging the control unit and controlling, in the control, the intensity, focal length of the laser beam L by the oscillator 3, the angle of the mirror 6 shown in FIG. 4, the temperature of the cooling unit 8, the pressure and flow rate of the high-pressure water Q supplied from the high-pressure water supply source P, the position of the air supply unit 9 and the spin nozzle 10, the rotation speed of the spin nozzle 10, etc. individually or in combination, the processing method of the workpiece W can be arranged. For example, when cutting the workpiece W, by enabling appropriate adjustment of variations such as the depth and width of the processing groove, it is possible to realize various types of drilling and cutting.

[0054] According to the above configuration, deterioration of the processing accuracy around the processing point of the workpiece W is prevented, and since the laser beam L can travel in a substantially horizontal direction, even in a narrow part such as a heavy object, drilling and cutting can be effectively performed. In addition, by intermittently injecting high-pressure water Q from the spin nozzle 10, the melt is intermittently removed. Therefore, although the object to be processed is drilled, cut, etc. by the laser L irradiated from the irradiation nozzle 4, the melt is also intermittently removed by the semi-circular arc-shaped and intermittent high-pressure water Q in the top view injected from the spin nozzle 10. Therefore, since stepwise laser processing can be performed without being affected by the melt, it also leads to adjusting the hole depth and cutting depth of the object to be processed.

[0055] For example, by using the control unit 15 to set the injection frequency (time interval) of the high-pressure water Q injected from the spin nozzle 10 with respect to the accumulation amount (prescribed in advance) of the melt when irradiating the object to be processed with the laser L, the drilling and cutting intervals for one time can be controlled, and an appropriate process can be controlled according to the processing depth desired to be applied to the object to be processed.

[0056] <<Other Embodiments>> 1. In the above embodiment, the case where the laser beam L is adjusted in a substantially horizontal direction by the mirror 6 is exemplified, but the laser beam L may be guided in any direction other than the gravitational direction. Thereby, processing can be performed flexibly according to the position of the object to be processed W.

[0057] 2. In this specification, a horizontal laser processing apparatus is assumed, but needless to say, even in a vertical laser processing apparatus, removal of the melt by using the air supply unit 9 and the spin nozzle 10 can be realized. Specifically, when used as a vertical laser processing apparatus, the irradiation nozzle 4 is arranged so that the laser L is irradiated downward, the air supply unit 9 is arranged so that air G is injected in the left-right direction (circumferential direction) of the laser L, and the spin nozzle 10 is arranged so that high-pressure water Q is injected from the horizontal direction or an oblique direction so that the melt can be removed. With such a configuration, while intermittently removing the melt in a semi-circular arc shape in the top view by the high-pressure water Q with respect to the object to be processed existing (arranged) below the laser processing apparatus, laser processing can be performed.

[0058] 3. The present invention is not limited to the configurations of the above-described embodiments, and various modified forms and specific forms are possible within the scope of the appended claims.

Explanation of Reference Numerals

[0059] 1 Horizontal laser processing apparatus 2 Main body 2a Laser head 3 Oscillator 4 Irradiation nozzle 5 Condensing lens 6 Mirror 7 Protective glass 8 Cooling unit 9 Air supply unit 9a First air supply unit 9b Second air supply unit 10 Spin nozzle 10b Injection hole 11 Fixing part 12 Rotating part 13 High-pressure water nozzle 13a First high-pressure water nozzle 13b Second high-pressure water nozzle 13c Third high-pressure water nozzle 13d Fourth high-pressure water nozzle C Cooling source G Air G1 First air G2 Second air L Laser beam P High-pressure water supply source Q High-pressure water W Workpiece

Claims

1. An irradiation nozzle that irradiates a processing target with a laser beam, and an air supply unit that injects air against the laser beam, and the air supply unit a first air supply unit having a first air supply hole that injects first air from above the irradiated laser beam, and a second air supply unit having a second air supply hole that injects second air from below the irradiated laser beam, and an irradiation nozzle that irradiates a processing target with a laser beam, and a spin nozzle that injects high-pressure water in a semi-circular arc shape and intermittently in a top view with respect to the laser beam, and a control unit that controls the injection interval of the high-pressure water, and A horizontal laser processing apparatus characterized by the above.

2. An irradiation nozzle that irradiates a processing target with a laser beam, and an air supply unit that injects air against the laser beam, and the air supply unit a first air supply unit having a first air supply hole that injects first air from above the irradiated laser beam, and a second air supply unit having a second air supply hole that injects second air from below the irradiated laser beam, and the first air supply hole of the first air supply unit and the second air supply hole of the second air supply unit are arranged on separate axes in a substantially gravitational direction A horizontal laser processing apparatus characterized by the above.

3. In the horizontal laser processing apparatus according to Claim 2, it is provided with a spin nozzle that intermittently injects high-pressure water against the laser beam, and the high-pressure water hits the laser beam before reaching the processing target A horizontal laser processing apparatus characterized by the above.

4. In the horizontal laser processing apparatus according to Claim 1 or Claim 2, an oscillator that generates the laser beam, a condenser lens, and a mirror that adjusts the laser beam supplied in a substantially gravitational direction through the condenser lens in a substantially horizontal direction or a direction other than the gravitational direction A horizontal laser processing apparatus characterized by the above.

5. In the horizontal laser processing apparatus according to Claim 1 or Claim 2, an oscillator that generates the laser beam, a condenser lens, and a mirror that adjusts the laser beam supplied in a substantially gravitational direction through the condenser lens in a substantially horizontal direction or a direction other than the gravitational direction, and a cooling unit that cools the mirror A horizontal laser processing apparatus characterized by the above.

6. In the horizontal laser processing apparatus according to Claim 1, the spin nozzle an injection hole for injecting the high-pressure water, and By rotating due to the reaction force of each other, it has a plurality of high-pressure water nozzles whose phases intermittently coincide with the injection holes A horizontal laser processing apparatus characterized by this.

7. In the horizontal laser processing apparatus according to Claim 1 or Claim 2, An oscillator that generates the laser beam, A condenser lens, A mirror that adjusts the laser beam supplied in a substantially gravitational direction to a substantially horizontal direction or a direction other than the gravitational direction through the condenser lens, A protective member is arranged immediately before and immediately after the mirror A horizontal laser processing apparatus characterized by this.

8. In the horizontal laser processing apparatus according to Claim 6, The injection hole has a horizontally long shape. A horizontal laser processing apparatus characterized by this.

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