Organic device, its manufacturing method, display device, photoelectric conversion device, electronic device, lighting device, and mobile object

Abstract

To provide a technique advantageous in suppressing lowering of image quality due to color mixture.SOLUTION: An organic device comprises: a reflection film arranged on a substrate; a first insulation film covering the reflection film; a plurality of lower electrodes arranged on the first insulation film; a second insulation film covering a peripheral part of each of the plurality of lower electrodes and the first insulation film between the plurality of lower electrodes; an organic function film covering the plurality of lower electrodes and the second insulation film; and an upper electrode arranged on the organic function film. The reflection film includes a first reflection part for a first pixel and a second reflection part for a second pixel. When a thickness of the first insulation film disposed on a central part of the first reflection part is referred to as T1, a thickness of the first insulation film disposed on a central part of the second reflection part is referred to as T2, a level difference of a surface of the first insulation film on the first reflection part is referred to as ΔT1, and a level difference of the surface of the first insulation film on the second reflection part is referred to as ΔT2, relations of T1>T2 and ΔT1<ΔT2 are satisfied.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an organic device, a manufacturing method thereof, a display device, a photoelectric conversion device, an electronic device, a lighting device, and a mobile object. [Background technology]

[0002] Organic devices having an organic functional layer containing an organic compound are known, such as light-emitting devices having an organic electroluminescence (hereinafter, organic EL) film. Patent Document 1 describes an electro-optical device having a configuration in which light emitted from an organic EL element passes through a color filter to obtain a desired luminescent color for each of the B, G, and R pixels. In this electro-optical device, an optical resonance structure is constructed between a power line functioning as a reflective layer for each of the B, G, and R pixels and a counter electrode, and light emission with enhanced brightness is obtained at a resonance wavelength corresponding to each of the B, G, and R luminescent colors. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-107887 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the electro-optical device described in Patent Document 1, there is a large difference in the pixel end structure between pixels of different colors. Therefore, in the electro-optical device described in Patent Document 1, the leakage current between adjacent pixels may differ significantly depending on the combination of colors of the adjacent pixels, which is disadvantageous in terms of suppressing degradation of image quality due to color mixing, for example.

[0005] An object of the present invention is to provide an advantageous technique for suppressing degradation of image quality caused by leakage current between pixels. [Means for solving the problem]

[0006] One aspect of the present invention relates to an organic device comprising: a reflective film disposed on a substrate; a first insulating film covering the reflective film; a plurality of lower electrodes disposed on the first insulating film; a second insulating film covering the first insulating film and peripheral portions of the plurality of lower electrodes and between the plurality of lower electrodes; an organic functional film covering the plurality of lower electrodes and the second insulating film; and an upper electrode disposed on the organic functional film, wherein a potential of the reflective film is set such that a potential difference between the upper electrode and the reflective film is lower than a threshold voltage at which the organic functional film operates; The reflective film includes a first reflective portion for a first pixel and a second reflective portion for a second pixel, and when a thickness of the first insulating film disposed on a central portion of the first reflective portion is T1, a thickness of the first insulating film disposed on a central portion of the second reflective portion is T2, a step of a surface of the first insulating film on the first reflective portion is ΔT1, and a step of a surface of the first insulating film on the second reflective portion is ΔT2, T1>T2 and ΔT1<ΔT2 are satisfied. . & Effect of the Invention

[0007] According to the present invention, an advantageous technique is provided for suppressing degradation of image quality caused by leakage current between pixels. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram showing a cross-sectional structure of an organic device according to a first embodiment. [Diagram 2] FIG. 4 is a schematic diagram showing a cross-sectional structure of an organic device according to a modified example of the first embodiment. [Diagram 3] 2A to 2C are views showing a method for manufacturing the organic device according to the first embodiment. [Figure 4] 2A to 2C are views showing a method for manufacturing the organic device according to the first embodiment. [Diagram 5] FIG. 5 is a schematic view showing a cross-sectional structure of an organic device according to a second embodiment. [Figure 6] 5A to 5C are views showing a method for manufacturing an organic device according to a second embodiment. [Figure 7] 5A to 5C are views showing a method for manufacturing an organic device according to a second embodiment. [Figure 8] FIG. 13 is a schematic plan view of an organic device according to a third embodiment. [Figure 9] FIG. 13 is a diagram illustrating a cross-sectional structure of an organic device according to a third embodiment. [Figure 10] FIG. 13 is a schematic plan view of an organic device according to a fourth embodiment. [Figure 11]FIG. 13 is a diagram illustrating a cross-sectional structure of an organic device according to a fourth embodiment. [Figure 12] FIG. 13 is a diagram illustrating a cross-sectional structure of an organic device according to a fifth embodiment. [Figure 13] FIG. 1 is a schematic diagram illustrating an example of a display device. [Figure 14] FIG. 1 is a schematic diagram illustrating an example of a display device. [Figure 15] FIG. 1 is a schematic diagram illustrating an example of a display device. [Figure 16] 1A and 1B are schematic diagrams illustrating examples of a lighting device and a moving object. [Figure 17] FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0010] FIG. 1 shows a schematic cross-sectional structure of the organic device 1 of the first embodiment. FIG. 2 shows a schematic cross-sectional structure of the organic device 1 of the modified example of the first embodiment. The organic device 1 includes a first pixel 201r, a second pixel 201g, and a third pixel 201b. The first pixel 201r, the second pixel 201g, and the third pixel 201b are pixels having different structures of the optical adjustment film 114 described later. The first pixel 201r, the second pixel 201g, and the third pixel 201b are pixels having different colors of light emitted from the organic device 1 to the outside. The first pixel 201r emits red (R) light, the second pixel 201g emits green (G) light, and the third pixel 201b emits blue (B) light. The organic device 1 may have a plurality of first pixels 201r, a plurality of second pixels 201g, and a plurality of third pixels 201b. When the first pixel 201r, the second pixel 201g, and the third pixel 201b are arranged as shown in Fig. 6, the cross-sectional structures in Fig. 1 and Fig. 2 may correspond to the cross section taken along line CC' in Fig. 6. In Fig. 6, R, G, and B correspond to the first pixel 201r, the second pixel 201g, and the third pixel 201b, respectively.

[0011] The organic device 1 may include a substrate such as a semiconductor substrate 101. A MOS transistor for driving a light-emitting element (organic EL element) and an element isolation region 102 (e.g., STI) may be arranged on the semiconductor substrate 101. The MOS transistor may include a gate electrode 103 and a source / drain region 104. A first interlayer insulating film 105 may be arranged on the semiconductor substrate 101, and a first wiring layer 107 may be arranged on the first interlayer insulating film 105. The gate electrode 103 and the source / drain region 104 may be electrically connected to any of the first wiring patterns of the first wiring layer 107 via a first conductive plug 106. The first interlayer insulating film 105 may be, for example, a BPSG film formed by thermal CVD or a SiO 2 film formed by plasma CVD. 2 The first wiring layer pattern of the first wiring layer 107 may be, for example, an AlCu film having a barrier metal such as Ti / TiN. The first conductive plug 106 may be, for example, a W plug having a barrier metal such as Ti / TiN.

[0012] A second interlayer insulating film 108 may be disposed on the first wiring layer 107, and a plurality of reflective portions (reflective films) 110 may be disposed on the second interlayer insulating film 108. The first wiring pattern of the first wiring layer 107 and the corresponding reflective portions 110 may be electrically connected via second conductive plugs 109. The second interlayer insulating film 108 may be, for example, a SiO 2 film formed by a plasma CVD method. 2 The plurality of reflective portions 110 may be made of any reflective material. The material of the plurality of reflective portions 110 is preferably a highly reflective material such as Al, Ag, or Pt, or may be an alloy containing these. In particular, Al or an alloy mainly composed of Al is preferable because it is easy to achieve high definition. Furthermore, a laminated structure may be used, and the second conductive plug 109 may be an AlCu film having a barrier metal such as Ti / TiN between the second conductive plug 109 and the second interlayer insulating film 108. The second conductive plug 109 may be a W film having a barrier metal such as Ti / TiN. The plurality of reflective portions 110 may be disposed in a wiring layer.

[0013] An optical adjustment film 114 may be disposed so as to cover the multiple reflecting portions 110. The optical adjustment film 114 may include a first film 111, a second film 112 disposed (laminated) on the first film 111, and a third film 113 disposed (laminated) on the second film 112. However, the optical adjustment film 114 may include a portion configured of a laminated film of the first film 111, the second film 112, and the third film 113, a portion configured of a laminated film of the second film 112 and the third film 113, and a portion configured of a single layer film made of the third film 113. The optical adjustment film 114, or the first film 111, the second film 112, and the third film 113 are insulating films having light transmitting properties, and may be, for example, SiO 2 The first film 111 may be made of a silicon nitride film, a silicon nitride film, a silicon oxide film, or the like. In a region where both the first film 111 and the second film 112 exist, the second film 112 is disposed on the first film 111. In a region where all of the first film 111, the second film 112, and the third film 113 exist, the third film 113 is disposed on the second film 112, and the second film 112 is disposed on the first film 111.

[0014] In the first embodiment, the first pixel 201r has an optical adjustment film 114r on the reflective portion 110 for the first pixel 201r, and the optical adjustment film 114r is composed of a laminated film of the first film 111, the second film 112, and the third film 113. The optical adjustment film 114r has a portion composed of the laminated film of the first film 111, the second film 112, and the third film 113 in the peripheral portion of the reflective portion 110 for the first pixel 201r. In addition, the optical adjustment film 114r has a portion composed of the laminated film of the first film 111, the second film 112, and the third film 113 in the central portion of the reflective portion 110 for the first pixel 201r. The thickness of the optical adjustment film 114r in the central portion of the reflective portion 110 for the first pixel 201r is Tr. The optical adjustment film 114r of the first pixel 201r has a step ΔTr on its surface (upper surface). Here, the step ΔTr may be 0. That is, the step Tr is 0 or more. In the example of FIG. 1 and FIG. 2, the step ΔTr is 0 and is not shown. It is preferable that the thickness of the optical adjustment film 114r located at the center of the reflecting section 110 is approximately the same as that of the optical adjustment film 114r located at the periphery of the reflecting section 110. In this specification, the center of a certain member (e.g., a reflecting section, a lower electrode) means within a range of D / 3 from the center of gravity of the member in a plan view (plan view), where D is the distance from the center of gravity of the member to the end of the member. In addition, the periphery of the member means within a range of D / 8 from the end of the member toward the center of gravity of the member.

[0015] In the first embodiment, the second pixel 201g has an optical adjustment film 114g. The optical adjustment film 114g has a portion composed of a laminated film of the first film 111, the second film 112, and the third film 113 in the peripheral part of the reflecting part 110 for the second pixel 201g. The optical adjustment film 114g has a portion composed of a laminated film of the second film 112 and the third film 113 in the central part of the reflecting part 110 for the second pixel 201g. The thickness of the optical adjustment film 114g in the central part of the reflecting part 110 for the second pixel 201g is Tg. The optical adjustment film 114g of the second pixel 201g has a step ΔTg on its surface (upper surface) due to the difference in thickness between the peripheral part and the central part. Here, ΔTg is greater than 0. It is preferable that the optical adjustment film 114g located in the center of the reflecting section 110 has a smaller film thickness than the optical adjustment film 114g located in the peripheral portion of the reflecting section 110.

[0016] In the first embodiment, the third pixel 201b has an optical adjustment film 114b. The optical adjustment film 114b has a portion composed of a stacked film of the first film 111, the second film 112, and the third film 113 in the peripheral part of the reflective part 110 for the third pixel 201b. The optical adjustment film 114b has a portion composed of a single layer film composed of the third film 113 in the central part of the reflective part 110 for the third pixel 201b. The thickness of the optical adjustment film 114b in the central part of the reflective part 110 for the third pixel 201b is Tb. The optical adjustment film 114b of the third pixel 201b has a step ΔTb on its surface (upper surface) due to the difference in thickness between the peripheral part and the central part. Here, ΔTb is larger than 0. It is preferable that the optical adjustment film 114b located in the central part of the reflective part 110 is smaller in thickness than the optical adjustment film 114b located in the peripheral part of the reflective part 110.

[0017] Here, it is preferable that Tr>Tg and ΔTr<ΔTg are satisfied. This means that the difference between the thickness of the optical adjustment film 114r in the peripheral portion of the reflector 110 for the first pixel 201r and the thickness of the optical adjustment film 114g in the peripheral portion of the reflector 110 for the second pixel 201g is reduced. This configuration means that the difference between the magnitude of the leakage current between the first pixel 201r and other pixels (the second pixel 201g, the third pixel 201b) and the magnitude of the leakage current between the second pixel 201g and other pixels (the first pixel 201r, the third pixel 201b) can be reduced. Therefore, this configuration is advantageous for keeping the leakage current between the first pixel 201r and other pixels and the leakage current between the second pixel 201g and other pixels at a constant value, and as a result, is advantageous for keeping the leakage current between pixels at a constant value. In addition, such a configuration is advantageous for making the leakage current between the lower electrode 115 and the upper electrode 120 equal in the first pixel 201r and the second pixel 201g, and is effective for suppressing deterioration in image quality due to color mixing. In particular, it is preferable that the thickness of the optical adjustment film 114r in the peripheral portion of the reflective portion 110 for the first pixel 201r is approximately the same as the thickness of at least a part of the optical adjustment film 114g in the peripheral portion of the reflective portion 110 for the second pixel 201g.

[0018] Alternatively, it is preferable that Tg>Tb and ΔTg<ΔTb are satisfied. This means that the difference between the thickness of the optical adjustment film 114g in the peripheral portion of the reflector 110 for the second pixel 201g and the thickness of the optical adjustment film 114b in the peripheral portion of the reflector 110 for the third pixel 201b is reduced. This configuration means that the difference between the magnitude of the leakage current between the second pixel 201g and other pixels (the first pixel 201r, the third pixel 201b) and the magnitude of the leakage current between the third pixel 201b and other pixels (the first pixel 201r, the second pixel 201g) can be reduced. Therefore, this configuration is advantageous for keeping the leakage current between the second pixel 201g and other pixels and the leakage current between the third pixel 201b and other pixels at a constant value, and as a result, is advantageous for keeping the leakage current between pixels at a constant value. This configuration is also advantageous for making the leakage current between the lower electrode 115 and the upper electrode 120 equal in the second pixel 201g and the third pixel 201b, and is effective for suppressing degradation of image quality due to color mixing. In particular, it is preferable that the thickness of the optical adjustment film 114g in the peripheral portion of the reflective portion 110 for the second pixel 201g is approximately the same as the thickness of at least a part of the optical adjustment film 114b in the peripheral portion of the reflective portion 110 for the second pixel 201b.

[0019] Furthermore, it is preferable that Tr>Tg>Tb and ΔTr<ΔTg<ΔTb are satisfied. This means that the difference in thickness of the optical adjustment film 114r, the optical adjustment film 114g, and the optical adjustment film 114b in the peripheral portion of the reflecting portion 110 for each of the first pixel 201r, the second pixel 201g, and the third pixel 201b is reduced. This configuration means that the difference in the magnitude of the leakage current between the first pixel 201r, the second pixel 201g, and the third pixel 201b can be reduced. Therefore, this configuration is advantageous for keeping the leakage current between the pixels at a constant value. In addition, this configuration is advantageous for making the leakage current between the lower electrode 115 and the upper electrode 120 equal in the first pixel 201r, the second pixel 201g, and the third pixel 201b, and is effective for suppressing deterioration of image quality due to color mixing. In particular, it is preferable that the thicknesses of at least a part of the optical adjustment film 114r, the optical adjustment film 114g, and the optical adjustment film 114b in the peripheral part of the reflective part 110 for each of the first pixel 201r, the second pixel 201g, and the third pixel 201b are substantially the same. Furthermore, it is preferable that the thicknesses of the optical adjustment film 114r, the optical adjustment film 114g, and the optical adjustment film 114b in the peripheral part of the reflective part 110 for each of the first pixel 201r, the second pixel 201g, and the third pixel 201b, and at least a part of the optical adjustment film 114r located in the center of the reflective part 110 of the first pixel 201r are substantially the same.

[0020] A plurality of lower electrodes 115 may be disposed on the optical adjustment film 114 (114r, 114g, 114b). The plurality of lower electrodes 115 may be made of a transparent material, for example, indium tin oxide (ITO) or indium zinc oxide (IZO). In the first embodiment shown in FIG. 1, each lower electrode 115 extends to an opening 116 (contact hole) provided in the optical adjustment film 114, and each lower electrode 115 is electrically connected to the peripheral portion of the reflector 110 disposed thereunder at the opening 116. In the modified example shown in FIG. 2, each lower electrode 115 is electrically connected to the peripheral portion of the reflector 110 disposed thereunder by a plug 117 penetrating the optical adjustment film 114. The plug 117 may be, for example, a W plug having a barrier metal such as Ti / TiN.

[0021] The organic device 1 may further include an insulating film 118 that covers the peripheral portions of each of the lower electrodes 115 and the optical adjustment film 114 between the lower electrodes 115. The lower electrode 115 may have a central portion and a peripheral portion surrounding it, and the central portion and the peripheral portion may have different thicknesses, and the thickness of the central portion may be smaller than that of the peripheral portion. The peripheral portion may be a region of the lower electrode 115 that is covered by the insulating film 118. The lower electrode 115 may have a step along the optical adjustment layer 114. The step of the optical adjustment layer 114 may have a portion that is inclined with respect to the substrate. The insulating film 118 may be, for example, a SiO 2 film formed by a plasma CVD method. 2 The insulating film 118 is disposed so as to electrically insulate the multiple lower electrodes 115 from each other.

[0022] An organic functional film 119 may be disposed on the insulating film 118. The organic functional film 119 includes at least an organic light-emitting material layer, and may also include, for example, a charge transport layer, a charge blocking layer, and the like. The organic functional film 119 may be disposed continuously on the first pixel 201r and the second pixel 202g. Disposed continuously can mean that the organic functional film is connected, that the organic functional film is disposed across, or that one organic functional film is shared by the first pixel and the second pixel. The organic functional film 119 may be disposed continuously on the third pixel 203b in addition to the first pixel and the second pixel. An upper electrode 120 may be disposed on the organic functional film 119. The upper electrode 120 may be made of a transparent material so as to transmit light generated by the organic functional film 119 without blocking it. The upper electrode 120 may be made of a thin film of, for example, gold, platinum, silver, aluminum, chromium, magnesium, or an alloy thereof. A sealing film 121 may be disposed on the upper electrode 120. The sealing film 121 is a film for preventing moisture from penetrating into the semiconductor substrate 101, the organic functional film 119, and the upper electrode 120, and may be composed of, for example, a SiN film formed by a plasma CVD method. A color filter layer 122 may be disposed on the sealing film 121. The color filter layer 122 may include a color filter 122r for the first pixel 201r, a color filter 122g for the second pixel 201g, and a color filter 123b for the third pixel 201b. A microlens (not shown) may be provided on the upper or lower side of the color filter layer 122. The microlens may be intended to improve light emission efficiency.

[0023] An electric signal is sent from the MOS transistor formed on the semiconductor substrate 101 to each lower electrode 115, and the organic functional film 119 generates light. The light emitted from the organic functional film 119 toward the semiconductor substrate 101 is reflected by the reflecting portion 110. The light emitted from the organic functional film 119 toward the upper electrode 120 and the light reflected by the reflecting portion 110 resonate and are amplified at wavelengths according to the thicknesses Tr, Tg, and Tb of the optical adjustment film 114 at the center of the reflecting portion 110 for each of the pixels 201r, 201g, and 201b. The light amplified in this manner is emitted through the color filters 122r, 122g, and 122b.

[0024] The thicknesses Tr, Tg, and Tb of the optical adjustment film 114 at the center of the reflective portion 110 for each of the pixels 201r, 201g, and 201b are determined in consideration of the light amplification effect. Meanwhile, the step differences ΔTr, ΔTg, and ΔTb can be determined so that the leakage current between the pixels is kept at a constant value. The step differences ΔTr, ΔTg, and ΔTb can be determined, for example, so that the thicknesses of the optical adjustment film 114 at the peripheral portions of the reflective portion 110 for each of the pixels 201r, 201g, and 201b are equal to each other.

[0025] Here, Tr, Tg, and Tb can be replaced with T1, T2, and T3, and ΔTr, ΔTg, and ΔTb can be replaced with ΔT1, ΔT2, and ΔT3, and it is desirable that T1>T2>T3 and ΔT1<ΔT2<ΔT3 are satisfied. Alternatively, Tr and Tg can be replaced with T1 and T2, and ΔTr and ΔTg can be replaced with ΔT1 and ΔT2, and it is desirable that T1>T2 and ΔT1<ΔT2 are satisfied. Alternatively, Tg and Tb can be replaced with T1 and T2, and ΔTg and ΔTb can be replaced with ΔT1 and ΔT2, and it is desirable that T1>T2 and ΔT1<ΔT2 are satisfied. In this embodiment, the thicknesses Tr, Tg, and Tb of the optical adjustment film 114 at the center of the reflective section 110 for the red, green, and blue light-emitting pixels are in the relationship Tr>Tg>Tb, and the step differences ΔTr, ΔTg, and ΔTb are in the relationship ΔTr<ΔTg<ΔTb. However, the relationship of the sizes according to the light-emitting colors is not limited to the above relationship. For example, the following relationship is possible.

[0026] Relationship A: Tr>Tb>Tg, ΔTr<ΔTb<ΔTg Relationship B: Tg>Tr>Tb, ΔTg<ΔTr<ΔTb Relationship C: Tg>Tb>Tr, ΔTg<ΔTb<ΔTr Relationship D: Tb>Tr>Tg, ΔTb<ΔTr<ΔTg Relationship E: Tb>Tg>Tr, ΔTb<ΔTg<ΔTr

[0027] Hereinafter, a method for manufacturing the organic device 1 of the first embodiment will be described with reference to FIGS. 3 and 4. Note that a description of the steps up to the formation of the conductive plugs 109 will be omitted. First, in the step shown in FIG. 3(a), an AlCu film (e.g., an Al film with 0.5 (atm %) of Cu added) is formed by, for example, a sputtering method on the second interlayer insulating film 108 on which the conductive plugs 109 are formed. Thereafter, the AlCu film is patterned by a photolithography step and a dry etching step, so that a plurality of reflective portions 110 can be formed. Next, in the step shown in FIG. 3(b), for example, a SiO 2 film is formed by a plasma CVD method. 2 3(c), for example, a portion of the first film 111a located above the center of the reflective portion 110 of the second pixel 201g is removed by a photolithography process and a dry etching process to form a first film 111b. Next, in the process shown in FIG. 3(d), for example, a SiO 2 4(e), the first film 11b and the second film 112a, which are located above the center of the reflective portion 110 of the third pixel 201b, are opened by photolithography and dry etching. As a result, the first film 111 and the second film 112 are formed.

[0028] Next, in the step shown in FIG. 4(f), for example, SiO 2A third film 113 made of a film is formed, and thus an optical adjustment film 114 made of the first film 111, the second film 112, and the third film 113 is formed. The optical adjustment film 114 includes a first optical adjustment film 114r for the first pixel 201r, a second optical adjustment film 114g for the second pixel 201g, and a third optical adjustment film 114b for the third pixel 201b. The first optical adjustment film 114r has a thickness Tr and a step ΔTr, the second optical adjustment film 114g has a thickness Tg and a step ΔTg, and the third optical adjustment film 114b has a thickness Tb and a step ΔTb. According to the method shown in FIG. 3 and FIG. 4, the thicknesses of the optical adjustment films 114r, 114g, and 114b at the center of the reflecting portion 110 for each of the first pixel 201r, the second pixel 201g, and the third pixel 201b can be easily controlled with high accuracy. In the present case, since the thickness of the optical adjustment film 114 can be controlled with high precision, it is possible to control optical characteristics such as the luminous efficiency and chromaticity of the luminescent pixel with high precision. In addition to this method, there is also a method of controlling the thicknesses of the optical adjustment films 114r, 114g, and 114b at the center of the reflective portion 110 for the first pixel 201r, the second pixel 201g, and the third pixel 201b, respectively, by controlling the etching time. However, with such a method of controlling by the etching time, it is difficult to control the thicknesses with high precision.

[0029] Next, in the step shown in FIG. 4(g), an opening 116 (contact hole) is formed in the optical adjustment film 114 by photolithography and dry etching. After that, an electrode film such as an ITO film or an IZO film is formed by, for example, a sputtering method, and the electrode film is patterned by photolithography and dry etching to form a plurality of lower electrodes 115. In this manufacturing method, the edge of the photoresist pattern for forming the opening 116 and the lower electrode 115 can be arranged in a region (periphery of the pixel) where the height difference between the pixels 201r, 201g, and 201b is small. Therefore, the processing error of the opening 116 and the lower electrode 115 between the pixels 201r, 201g, and 201b can be reduced. In particular, it is preferable to arrange at least a part of the end of the lower electrode 115 so as to overlap with the peripheral part of the reflecting part 110 of each pixel in a plan view.

[0030] Next, in the step shown in FIG. 4( h ), a SiO 2 film is formed by, for example, a plasma CVD method so as to cover the peripheral portions of the plurality of lower electrodes 115 and the optical adjustment film 114 between the plurality of lower electrodes 115 . 2 The SiO 2 The film is patterned in a photolithography process and a dry etching process to form the insulating film 118. For the insulating film 118 as well, processing errors between the pixels 201r, 201g, and 201b can be reduced.

[0031] Next, although not shown, for example, an organic functional film 119 and an upper electrode 120 are formed in this order by a vacuum deposition method using a deposition mask, and then, for example, a sealing film 121 is formed by a CVD method. Then, a color filter layer 122 can be formed by a photolithography method. Furthermore, a microlens may be formed above or below the color filter layer to improve light emission efficiency.

[0032] FIG. 5 shows a schematic cross-sectional structure of an organic device 1 according to the second embodiment. Matters not mentioned as the second embodiment may follow the first embodiment. In the second embodiment, instead of the plurality of reflective portions 110 in the first embodiment, a plurality of reflective portions 301 are arranged on the second interlayer insulating film 108. An anti-reflective electrode 302 is arranged on each reflective portion 301 so as to be in contact with the reflective portion. Each reflective portion 301 and the anti-reflective electrode 302 are electrically connected. Each reflective portion 301 may be composed of an AlCu film having a barrier metal such as Ti / TiN. The anti-reflective electrode 302 may be composed of a layer containing at least a part of TiN, Ti, W, Co, Ta, or TaN, and may have a laminated structure of these. The thickness of the anti-reflective electrode 302 is preferably about 1 to 200 nm. The anti-reflective electrode can be formed by a known technique such as a sputtering method or a vapor deposition method.

[0033] An optical adjustment film 306 may be disposed so as to cover the plurality of reflecting portions 301 and the plurality of anti-reflection electrodes 302. The optical adjustment film 306 may include a portion configured of a laminated film of the first film 303, the second film 304, and the third film 305, a portion configured of a laminated film of the second film 304 and the third film 305, and a portion configured of a single layer film made of the third film 305. The optical adjustment film 306, or the first film 303, the second film 304, and the third film 305 may be made of, for example, SiO 2 The anti-reflection electrode 302 may be formed of a film. By providing openings in a part of the interlayer insulating film material and the anti-reflection electrode material on the reflective portion 301 of the first pixel 201r, the second pixel 201g, and the third pixel 201b, optical adjustment films 306r, ​​306g, and 306b having different film thicknesses are formed. If the respective film thicknesses are Tr, Tg, and Tb, and the step film thicknesses formed by the openings are ΔTr, ΔTg, and ΔTb, the relationship between the film thickness and the step film thickness is Tr>Tg>Tb, and ΔTr<ΔTg<ΔTr. In addition, it is preferable that the member constituting the anti-reflection electrode 302 is present in at least a part of the periphery of the reflective portion 301, and it is particularly preferable that the member is formed so as to surround the reflective portion 301. The thickness of the reflective portion may be different between the center and the periphery, and the thickness of the center may be smaller than that of the periphery.

[0034] A lower electrode 307 is disposed on the optical adjustment film 306. The lower electrode 307 is preferably made of a transparent material, and is formed using indium tin oxide (ITO) or indium zinc oxide (IZO). An opening 308 is provided in the optical adjustment film 306, and the anti-reflection electrode 302 and the lower electrode 307 are electrically connected through the opening 308. Here, when the reflective portion 301 is made of AlCu and the lower electrode 307 is made of a material containing oxygen, aluminum oxide is formed when the reflective portion 301 and the lower electrode 307 are in direct contact with each other, which may cause a conduction failure. Therefore, the occurrence of a conduction failure can be prevented by electrically connecting the reflective portion 301 and the lower electrode 307 via the anti-reflection electrode 302 made of TiN or the like that does not easily react with oxygen. As in the first embodiment, an insulating film 118, an organic functional film 119, an upper electrode 120, a sealing film 121, and a color filter 122 may be formed and disposed on the lower electrode 307.

[0035] In the second embodiment, the first pixel 201r has an optical adjustment film 306r on the reflective portion 301, and the optical adjustment film 306r is composed of a laminated film of the first film 303, the second film 304, and the third film 305. The optical adjustment film 306r has a portion composed of the laminated film of the first film 303, the second film 304, and the third film 305 in the peripheral portion of the reflective portion 301 for the first pixel 201r. Also, the optical adjustment film 306r has a portion composed of the laminated film of the first film 303, the second film 304, and the third film 305 in the central portion of the reflective portion 301 for the first pixel 201r. The thickness of the optical adjustment film 306r in the central portion of the reflective portion 301 for the first pixel 201r is Tr. The optical adjustment film 306r of the first pixel 201r has a step ΔTr on its surface (upper surface). Here, the step ΔTr is greater than 0. Moreover, it is preferable that the step between the upper surface of the central portion of the reflective portion 301 of the first pixel 201r and the upper surface of the anti-reflection electrode 302 be substantially the same as the step ΔTr.

[0036] In the second embodiment, the second pixel 201g has an optical adjustment film 306g. The optical adjustment film 306g has a portion composed of a laminated film of the first film 303, the second film 304, and the third film 305 in the peripheral part of the reflective part 301 for the second pixel 201g. The optical adjustment film 306g has a portion composed of a laminated film of the second film 112 and the third film 113 in the central part of the reflective part 301 for the second pixel 201g. The thickness of the optical adjustment film 306g in the central part of the reflective part 301 for the second pixel 201g is Tg. The optical adjustment film 306g of the second pixel 201g has a step ΔTg on its surface (upper surface) due to the difference in thickness between the peripheral part and the central part and the thickness of the anti-reflection electrode. Here, ΔTg is greater than 0.

[0037] In the second embodiment, the third pixel 201b has an optical adjustment film 306b. The optical adjustment film 306b has a portion composed of a laminated film of the first film 303, the second film 304, and the third film 305 in the peripheral part of the reflecting part 301 for the third pixel 201b. The optical adjustment film 306b has a portion composed of a single layer film composed of the third film 305 in the central part of the reflecting part 301 for the third pixel 201b. The thickness of the optical adjustment film 306b in the central part of the reflecting part 301 for the third pixel 201b is Tb. The optical adjustment film 306b of the third pixel 201b has a step ΔTb on its surface (upper surface) due to the difference in thickness between the peripheral part and the central part and the thickness of the anti-reflection electrode. Here, ΔTb is greater than 0.

[0038] Here, it is preferable that Tr>Tg and ΔTr<ΔTg are satisfied. This means that the difference between the thickness of the optical adjustment film 306r in the peripheral portion of the reflecting portion 301 for the first pixel 201r and the thickness of the optical adjustment film 306g in the peripheral portion of the reflecting portion 301 for the second pixel 201g is reduced. This configuration means that the difference between the magnitude of the leakage current between the first pixel 201r and other pixels (the second pixel 201g, the third pixel 201b) and the magnitude of the leakage current between the second pixel 201g and other pixels (the first pixel 201r, the third pixel 201b) can be reduced. Therefore, this configuration is advantageous for keeping the leakage current between the first pixel 201r and other pixels and the leakage current between the second pixel 201g and other pixels at a constant value, and as a result, is advantageous for keeping the leakage current between pixels at a constant value. In addition, such a configuration is advantageous for making the leakage current between the lower electrode 307 and the upper electrode 120 equal in the first pixel 201r and the second pixel 201g, and is effective for suppressing deterioration in image quality due to color mixing. In particular, it is preferable that the thickness of the optical adjustment film 306r in the peripheral portion of the reflective portion 301 for the first pixel 201r is approximately the same as the thickness of at least a part of the optical adjustment film 306g in the peripheral portion of the reflective portion 301 for the second pixel 201g.

[0039] Alternatively, it is preferable that Tg>Tb and ΔTg<ΔTb are satisfied. This means that the difference between the thickness of the optical adjustment film 306g in the peripheral portion of the reflecting portion 301 for the second pixel 201g and the thickness of the optical adjustment film 306b in the peripheral portion of the reflecting portion 301 for the third pixel 201b is reduced. This configuration means that the difference between the magnitude of the leakage current between the second pixel 201g and other pixels (the first pixel 201r, the third pixel 201b) and the magnitude of the leakage current between the third pixel 201b and other pixels (the first pixel 201r, the second pixel 201g) can be reduced. Therefore, this configuration is advantageous for keeping the leakage current between the second pixel 201g and other pixels and the leakage current between the third pixel 201b and other pixels at a constant value, and as a result, is advantageous for keeping the leakage current between pixels at a constant value. This configuration is also advantageous for making the leakage current between the lower electrode 307 and the upper electrode 120 equal in the second pixel 201g and the third pixel 201b, and is effective for suppressing degradation of image quality due to color mixing. In particular, it is preferable that the thickness of the optical adjustment film 306g in the peripheral portion of the reflective portion 301 for the first pixel 201g is approximately the same as the thickness of at least a part of the optical adjustment film 306b in the peripheral portion of the reflective portion 301 for the second pixel 201b.

[0040] Furthermore, it is preferable that Tr>Tg>Tb and ΔTr<ΔTg<ΔTb are satisfied. This means that the difference in thickness of the optical adjustment film 306r, ​​the optical adjustment film 306g, and the optical adjustment film 306b in the peripheral portion of the reflecting portion 110 for each of the first pixel 201r, the second pixel 201g, and the third pixel 201b is reduced. This configuration means that the difference in the magnitude of the leakage current between the first pixel 201r, the second pixel 201g, and the third pixel 201b can be reduced. Therefore, this configuration is advantageous for keeping the leakage current between the pixels at a constant value. In addition, this configuration is advantageous for making the leakage current between the lower electrode 307 and the upper electrode 120 equal in the first pixel 201r, the second pixel 201g, and the third pixel 201b, and is effective for suppressing deterioration of image quality due to color mixing. In particular, it is preferable that the thicknesses of at least a part of the optical adjustment film 306r, ​​the optical adjustment film 306g, and the optical adjustment film 306b in the peripheral part of the reflective part 301 for each of the first pixel 201r, the second pixel 201g, and the third pixel 201b are substantially the same. Furthermore, it is preferable that the thicknesses of the optical adjustment film 114r, the optical adjustment film 114g, and the optical adjustment film 114b in the peripheral part of the reflective part 110 for each of the first pixel 201r, the second pixel 201g, and the third pixel 201b, and at least a part of the optical adjustment film 114r located in the center of the reflective part 110 of the first pixel 201r are substantially the same.

[0041] In this embodiment, the thicknesses Tr, Tg, and Tb of the optical adjustment film 306 at the center of the reflective portion 301 for the red, green, and blue light-emitting pixels are in the relationship Tr>Tg>Tb, and the step differences ΔTr, ΔTg, and ΔTb are in the relationship ΔTr<ΔTg<ΔTb. However, the relationship of the sizes according to the light-emitting colors is not limited to the above relationship. For example, the following relationship is possible.

[0042] Relationship A: Tr>Tb>Tg, ΔTr<ΔTb<ΔTg Relationship B: Tg>Tr>Tb, ΔTg<ΔTr<ΔTb Relationship C: Tg>Tb>Tr, ΔTg<ΔTb<ΔTr Relationship D: Tb>Tr>Tg, ΔTb<ΔTr<ΔTg Relationship E: Tb>Tg>Tr, ΔTb<ΔTg<ΔTr

[0043] Hereinafter, a method for manufacturing the organic device 1 of the second embodiment will be described with reference to FIGS. 6 and 7. Note that a description of the steps up to the formation of the conductive plug 109 will be omitted. First, in the step shown in FIG. 6(a), an AlCu film (for example, an Al film with 0.5 (atm%) of Cu added) and a TiN film (anti-reflection film) are formed, for example, by a sputtering method, on the second interlayer insulating film 108 on which the conductive plug 109 is formed. Then, the laminated film of the AlCu film and the TiN film is patterned by a photolithography step and a dry etching step, and a plurality of laminated bodies consisting of the laminated film of the reflective portion 301 and the anti-reflection electrode 302a are formed. At this time, in the exposure step in the photolithography step, the anti-reflection electrode 302a suppresses the reflected wave from the AlCu film, so that the fine reflective portion 301 can be formed.

[0044] 6(b), the anti-reflection electrode 302a in the center of the reflective portion 301 of each first pixel 201r is removed by photolithography and dry etching to form a plurality of anti-reflection electrodes 302b. Next, in the process shown in FIG. 6(c), for example, a SiO 2 6(d), the first film 303a and the antireflection electrode 302a are removed by photolithography and dry etching, forming the antireflection electrode 302c and the first film 303b.

[0045] Next, in the step shown in FIG. 6(e), for example, SiO 27(f), the anti-reflection electrode 302, the first film 303b, and the second film 304a located above the center of the reflective portion 301 of the third pixel 201b are removed by photolithography and dry etching. As a result, the anti-reflection electrode 302, the first film 303, and the second film 304 are formed. Next, in the process shown in FIG. 7(g), for example, a SiO 2 A third film 305 made of a film is then deposited, and an optical adjustment film 306 made of the first film 303, the second film 304 and the third film 305 is thereby formed.

[0046] The optical adjustment film 306 includes a first optical adjustment film 306r for the first pixel 201r, a second optical adjustment film 306g for the second pixel 201g, and a third optical adjustment film 306b for the third pixel 201b. The first optical adjustment film 306r has a thickness Tr and a step ΔTr, the second optical adjustment film 306g has a thickness Tg and a step ΔTg, and the third optical adjustment film 306b has a thickness Tb and a step ΔTb. According to the method shown in FIG. 6 and FIG. 7, the thicknesses of the optical adjustment films 306r, ​​306g, and 306b at the center of the reflecting portion 110 for each of the first pixel 201r, the second pixel 201g, and the third pixel 201b can be easily controlled with high accuracy. In this case, since the thickness of the optical adjustment film 114 can be controlled with high accuracy, it is possible to control optical characteristics such as the luminous efficiency and chromaticity of the luminescent pixel with high accuracy. Alternatively, the thicknesses of the optical adjustment films 306r, ​​306g, and 306b at the center of the reflective portion 110 for the first pixel 201r, the second pixel 201g, and the third pixel 201b may be controlled by the etching time. However, it is difficult to control the thicknesses with high accuracy by using such a method of controlling the thicknesses by the etching time.

[0047] Next, in the step shown in FIG. 7(h), an opening 308 (contact hole) is formed in the optical adjustment film 114 by photolithography and dry etching. After that, an electrode film such as an ITO film or an IZO film is formed by, for example, a sputtering method, and the electrode film is patterned by photolithography and dry etching to form a plurality of lower electrodes 307. In this manufacturing method, the edges of the photoresist pattern for forming the opening 308 and the lower electrode 307 can be arranged in a region (periphery of the pixel) where the height difference between the pixels 201r, 201g, and 201b is small. Therefore, the processing error of the opening 308 and the lower electrode 307 between the pixels 201r, 201g, and 201b can be reduced. In particular, it is preferable to arrange at least a part of the end of the lower electrode 307 so as to overlap the antireflection electrode 302 in the peripheral part of the reflecting portion 110 of each pixel in a plan view.

[0048] Next, in the step shown in FIG. 7(i), a SiO 3 film is formed by, for example, a plasma CVD method so as to cover the peripheral portions of the plurality of lower electrodes 307 and the optical adjustment film 306 between the plurality of lower electrodes 307. 2 The SiO 2 The film is patterned in a photolithography process and a dry etching process to form an insulating film 118. For the insulating film 118, processing errors between the pixels 201r, 201g, and 201b can also be reduced. Next, although not shown, an organic functional film 119 and an upper electrode 120 are formed in this order by, for example, a vacuum deposition method using a deposition mask. Thereafter, a sealing film 121 is formed by, for example, a CVD method, and then a color filter layer 122 can be formed by a photolithography method. Furthermore, a microlens may be formed on the upper or lower side of the color filter layer.

[0049] FIG. 8 is a schematic plan view of an organic device according to the third embodiment. FIG. 9(a) is a schematic cross-sectional structure along the line A-A' in FIG. 8. FIG. 9(b) is a schematic cross-sectional structure along the line B-B' in FIG. 8. Items not mentioned as the third embodiment may follow the first or second embodiment. In the third embodiment, a third wiring layer including a reflective film 402 and a wiring pattern 401 is disposed on the second interlayer insulating film 108. The first pixel 201r, the second pixel 201b, and the third pixel 201b include a lower electrode 403. Each lower electrode 403 may have, for example, a hexagonal shape, but may have another polygonal shape, or may have a shape other than a polygon. The third wiring layer in which the reflective film 402 and the wiring pattern 401 are disposed is a wiring layer for electrically connecting the lower electrode 403 to a wiring layer (not shown) below it. The reflective film 402 and the wiring pattern 401 are electrically insulated from each other. As shown in FIG. 9(b), the reflective film 402 is a conductor provided in common to a plurality of pixels including the first pixel 201r, the second pixel 201b, and the third pixel 201b. The reflective film 402 is not divided between pixels, but spreads across a plurality of pixels in the pixel array region of the organic device. Even in such a configuration, the reflective film 402 can be considered to include a plurality of reflective portions corresponding to the plurality of lower electrodes 403, respectively. In addition, the center of the reflective portion for each pixel can be considered to be a portion overlapping the center of the lower electrode 403 arranged thereon, and the periphery of the reflective portion for each pixel can be considered to be a portion overlapping the periphery of the lower electrode 403 arranged thereon.

[0050] An optical adjustment film 404 according to the first or second embodiment is disposed on the reflective film 402 and the wiring pattern 401. A lower electrode 403 may be disposed on the optical adjustment film 404. The lower electrode 403 and the wiring pattern 401 of the third wiring layer may be electrically connected through an opening 405 provided in the optical adjustment film 404.

[0051] In the third embodiment, the potential of the reflective film 402 can be set arbitrarily. In particular, it is preferable that the potential of the reflective film 402 is set so that the potential difference between the upper electrode and the reflective film 402 is lower than the light emission threshold voltage of the organic light emitting element (the threshold voltage at which the organic functional film operates). When the reflective film 402 and the wiring pattern 401 of a certain pixel are electrically connected due to manufacturing variations, the potential of the wiring pattern 401 becomes the same as the potential of the reflective film 402. Since the wiring pattern 401 and the lower electrode 403 have the same potential, when the potential difference between the reflective film 402 and the upper electrode is set to be equal to or lower than the light emission threshold voltage of the organic light emitting element, the pixel where the reflective film 402 and the lower electrode 403 are electrically connected does not emit light, and therefore does not become a major pixel defect.

[0052] FIG. 10 shows a planar arrangement of the third wiring layer of the fourth embodiment. FIG. 11(a) shows a schematic cross-sectional structure along the line D-D' in FIG. 10. FIG. 11(b) shows a schematic cross-sectional structure along the line E-E' in FIG. 10. Items not mentioned as the fourth embodiment may follow the first to third embodiments. In the fourth embodiment, a third wiring layer including a reflective film 504 and a wiring pattern 503 is disposed on the second interlayer insulating film 108. The first pixel 201r, the second pixel 201b, and the third pixel 201b include a lower electrode 509. Each lower electrode 509 may have a hexagonal shape, but may have another polygonal shape or a shape other than a polygon. In addition, the pixel arrangement may be any arrangement such as a stripe arrangement, a delta arrangement, a Bayer arrangement, or a Pentile arrangement. In particular, the delta arrangement is preferable because it is easy to arrange circular microlenses. The third wiring layer on which the reflective film 504 and the wiring pattern 503 are arranged is a wiring layer for electrically connecting the lower electrode 509 and the wiring layer below it. The reflective film 504 and the wiring pattern 503 are electrically insulated by removing the conductive material 502 on the reflective material 501 in the third wiring layer. As shown in FIG. 11(a), the wiring pattern 503 is configured by laminating the conductive material 502 on the reflective material 501. The reflective material 501 may have reflectivity and conductivity, and is preferably a high-reflectance material such as Al, Ag, or Pt. Furthermore, it may be an alloy containing these materials, or may have a laminated structure. In particular, it is preferably an alloy containing Al. The conductive material 502 may have conductivity, and is preferably a material that is stable in contact with the reflective material 501 and the lower electrode 509. Furthermore, it is preferable that the conductive material 502 has a low reflectivity, and it is particularly preferable that it contains TiN or Ti. In addition, the film thickness of the conductive material 502 is preferably about 1 to 100 nm.

[0053] As shown in FIG. 11(b), the reflective film 504 is a conductor provided in common to a plurality of pixels including the first pixel 201r, the second pixel 201b, and the third pixel 201b, and is composed of a reflective material 501 and a conductive material 502. The reflective film 504 is not divided between pixels, but spreads over a plurality of pixels in the pixel array region of the organic device. Even in such a configuration, the reflective film 504 can be considered to include a plurality of reflective portions corresponding to the plurality of lower electrodes 403, respectively. In addition, the center portion of the reflective portion for each pixel can be considered to be a portion overlapping the center portion of the lower electrode 403 arranged thereon in a plan view, and the periphery of the reflective portion for each pixel can be considered to be a portion overlapping the periphery of the lower electrode 403 arranged thereon in a plan view. In the reflective film 504, the conductive material 502 is removed from the reflective portion, and the reflective material 501 is exposed. In addition, the conductive material 502 is provided in at least a part of the periphery of the reflective portion. In particular, it is preferable that the conductive material 502 is provided in the peripheral portion of the reflective portion so as to surround the central portion of the reflective portion. It is also preferable that the conductive material 502 is provided between the first pixel 201r, the second pixel 201b, and the third pixel 201b. By making the conductive material 502 provided in the peripheral portion of the reflective portion a material having a lower reflectance than the reflective material 501, it is possible to reduce stray light and improve contrast.

[0054] An optical adjustment film 508 according to the optical adjustment film of the first to third embodiments is disposed on the reflective film 504 and the wiring pattern 503. A plurality of lower electrodes 509 may be disposed on the optical adjustment film 508. The organic device 1 may further include an insulating film 510 that covers the peripheral portions of each of the plurality of lower electrodes 509 and the optical adjustment film 508 between the plurality of lower electrodes 509. The insulating film 510 corresponds to the insulating film 118 in the first embodiment. The lower electrode 509 and the wiring pattern 503 of the third wiring layer may be electrically connected through an opening 511 provided in the optical adjustment film 508. Since the reflective film 504 and the plurality of wiring patterns 503 disposed on the third wiring layer are electrically insulated, the plurality of wiring patterns and the corresponding plurality of lower electrodes 509 can be electrically connected.

[0055] In the fourth embodiment, the potential of the reflective film 504 can be set arbitrarily. In particular, it is preferable that the potential difference between the reflective film 504 and the upper electrode is set to be equal to or lower than the light emission threshold voltage of the organic light emitting element. When the reflective film 504 and the wiring pattern 503 of a certain pixel are electrically connected due to manufacturing variations, the potential of the wiring pattern 503 becomes the same as the potential of the reflective film 504. When the potential difference between the reflective film 504 and the upper electrode is set to be equal to or lower than the light emission threshold voltage of the organic light emitting element, the pixel electrically connected to the reflective film 504 does not emit light, and therefore no significant pixel defect occurs.

[0056] FIG. 12 is a schematic cross-sectional view of an organic device according to the fifth embodiment. Matters not mentioned as the fifth embodiment may follow the first to fourth embodiments. In the fifth embodiment, a gap 520 is provided between the reflective film 504 and the wiring pattern 503. By providing the gap 520, it is possible to improve the insulation between the reflective film 504 and the wiring pattern 503 formed in the same layer. In particular, when the potentials of the reflective film 504 and the wiring pattern 503 are different, it is possible to suppress the occurrence of leakage current between the reflective film 504 and the wiring pattern 503 by improving the insulation between the reflective film 504 and the wiring pattern 503. In particular, it is preferable that the gap 520 is provided so as to surround the outer periphery of the wiring pattern. It is preferable that the gap 520 is filled with a vacuum or an inert gas. In addition, when the reflective film is provided so as to be electrically separated for each pixel, it is preferable that the gap 520 is provided between the reflective film for each pixel. In addition, the gap 520 can be formed by any method. For example, it is possible to form the void 520 by etching the optical adjustment film 508 into a groove shape. As another method, it is possible to form the void 502 by forming the reflective film 504 or the wiring pattern 503 of the third wiring layer by etching, and forming the optical adjustment film 508 by a film formation method with relatively isotropic growth. Also, the upper part of the void 502 is preferably covered with an insulating film, and more preferably covered with the optical adjustment film 508.

[0057] Modifications of the above embodiment will be described below. An organic EL element (organic light-emitting element) has a structure in which an anode, an organic compound layer (organic functional film), and a cathode are arranged on a substrate. A protective layer, a color filter, etc. may be provided on the cathode. When a color filter is provided, a planarizing layer may be provided between the protective layer and the color filter. The planarizing layer may be made of acrylic resin, etc.

[0058] Examples of the substrate include quartz, glass, silicon wafer, resin, and metal. In addition, the substrate may be provided with switching elements such as transistors and wiring, and an insulating layer may be provided thereon. The insulating layer may be made of any material as long as it can form a contact hole to ensure electrical continuity between the anode 2 and the wiring, and can ensure insulation from wiring that is not connected. For example, resins such as polyimide, silicon oxide, silicon nitride, etc. may be used.

[0059] A pair of electrodes can be used. The pair of electrodes may be an anode and a cathode. When an electric field is applied in the direction in which the organic light-emitting element emits light, the electrode with a higher potential is the anode, and the other is the cathode. It can also be said that the electrode that supplies holes to the light-emitting layer is the anode, and the electrode that supplies electrons is the cathode. In this case, the lower electrode may be an anode and the upper electrode may be a cathode, or the lower electrode may be a cathode and the upper electrode may be an anode. The lower electrode and the upper electrode may be translucent, and may be reflective or absorbing.

[0060] The material constituting the anode should preferably have a work function as large as possible. For example, single metals such as gold, platinum, silver, copper, nickel, palladium, cobalt, selenium, vanadium, tungsten, etc., mixtures containing these, or alloys combining these can be used. Metal oxides such as tin oxide, zinc oxide, indium oxide, indium tin oxide (ITO), and indium zinc oxide can also be used. Furthermore, conductive polymers such as polyaniline, polypyrrole, and polythiophene can also be used.

[0061] These electrode materials may be used alone or in combination of two or more kinds. The anode may be composed of one layer or multiple layers.

[0062] When the electrode is used as a reflective film, for example, chromium, aluminum, silver, titanium, tungsten, molybdenum, or an alloy or laminate of these can be used. When the electrode is used as a transparent electrode, a transparent conductive layer of oxide such as indium tin oxide (ITO) or indium zinc oxide can be used, but is not limited to these. Photolithography technology can be used to form the electrode.

[0063] On the other hand, the material for the cathode should have a small work function. Examples of the material include alkali metals such as lithium, alkaline earth metals such as calcium, aluminum, titanium, manganese, silver, lead, chromium, and other metals or mixtures containing these metals. Alternatively, alloys combining these metals can be used. For example, magnesium-silver, aluminum-lithium, aluminum-magnesium, silver-copper, zinc-silver, and the like can be used. Metal oxides such as indium tin oxide (ITO) can also be used. These electrode materials may be used alone or in combination of two or more types. The cathode may have a single layer structure or a multi-layer structure. Among these, it is preferable to use silver, and it is even more preferable to use a silver alloy in order to suppress the aggregation of silver. As long as the aggregation of silver can be suppressed, the ratio of the alloy is not important. For example, it may be 1:1.

[0064] The method for forming the cathode is not particularly limited, but it is possible to use a deposition heating method, a direct current and an alternating current sputtering method, etc. The direct current and alternating current sputtering methods are more preferable because they provide good film coverage and are easy to reduce resistance.

[0065] A protective layer may be provided on the upper electrode. For example, by bonding glass provided with a moisture absorbent on the cathode, it is possible to prevent water and the like from penetrating into the organic compound layer, and to prevent display defects from occurring. In another embodiment, a passivation film such as silicon nitride may be provided on the cathode to prevent water and the like from penetrating into the organic EL layer. For example, after the cathode is formed, the device may be transported to another chamber without breaking the vacuum, and a silicon nitride film having a thickness of 2 μm may be formed by the CVD method to serve as a protective layer. A protective layer may be provided using atomic deposition (ALD) after the film is formed by the CVD method.

[0066] A color filter may be provided on the protective layer. For example, a color filter taking into consideration the size of the organic light-emitting element may be provided on another substrate and then bonded to the substrate on which the organic light-emitting element is provided, or a color filter may be patterned on the protective layer described above using photolithography technology. The color filter may be made of a polymer. Furthermore, a microlens may be formed on the upper or lower side of the color filter layer.

[0067] A planarizing layer may be provided between the color filter and the protective layer. The planarizing layer may be made of an organic compound, and may be a low molecular weight or a high molecular weight compound, but is preferably a high molecular weight compound.

[0068] The planarization layer may be provided above and below the color filter, and may be made of the same or different materials.Specific examples of the materials include polyvinylcarbazole resin, polycarbonate resin, polyester resin, ABS resin, acrylic resin, polyimide resin, phenol resin, epoxy resin, silicone resin, and urea resin.

[0069] The flattening layer may have a counter substrate on it. The counter substrate is called a counter substrate because it is provided at a position corresponding to the aforementioned substrate. The material of the counter substrate may be the same as that of the aforementioned substrate.

[0070] The organic compound layers (hole injection layer, hole transport layer, electron blocking layer, light emitting layer, hole blocking layer, electron transport layer, electron injection layer, etc.) constituting the organic light emitting device according to one embodiment of the present invention are formed by the method shown below.

[0071] The organic compound layer constituting the organic light-emitting device according to one embodiment of the present invention can be formed by dry processes such as vacuum deposition, ionization deposition, sputtering, plasma, etc. Alternatively, instead of the dry process, a wet process can be used in which a layer is formed by dissolving the compound in an appropriate solvent and applying a known coating method (e.g., spin coating, dipping, casting, LB method, inkjet method, etc.).

[0072] Here, when the layer is formed by a vacuum deposition method or a solution coating method, crystallization is unlikely to occur and the layer has excellent stability over time. When the layer is formed by a coating method, the layer can be formed by combining with a suitable binder resin.

[0073] Examples of the binder resin include polyvinylcarbazole resin, polycarbonate resin, polyester resin, ABS resin, acrylic resin, polyimide resin, phenol resin, epoxy resin, silicone resin, urea resin, etc. The above are examples, and the binder resin is not limited to these.

[0074] These binder resins may be used alone or in combination as homopolymers or copolymers, and may further include known additives such as plasticizers, antioxidants, and ultraviolet absorbers, if necessary.

[0075] The following describes exemplary uses of the organic device. The organic device can be used as a component of a display device or a lighting device. Other uses include an exposure light source for an electrophotographic image forming device, a backlight for a liquid crystal display device, and a light-emitting device having a white light source and a color filter.

[0076] The display device may be an image information processing device having an image input unit that inputs image information from an area CCD, a linear CCD, a memory card, etc., an information processing unit that processes the input information, and displays the input image on a display unit.

[0077] The display unit of the imaging device or inkjet printer may have a touch panel function. The driving method of the touch panel function may be an infrared type, a capacitance type, a resistive film type, or an electromagnetic induction type, and is not particularly limited. The display device may be used in the display unit of a multifunction printer.

[0078] Next, the display device according to the present embodiment will be described with reference to the drawings.

[0079] 13 is a schematic diagram showing an example of a display device according to this embodiment. The display device 1000 may have a touch panel 1003, a display panel 1005, a frame 1006, a circuit board 1007, and a battery 1008 between an upper cover 1001 and a lower cover 1009. The touch panel 1003 and the display panel 1005 are connected to flexible printed circuits FPCs 1002 and 1004. Transistors are printed on the circuit board 1007. The battery 1008 may not be provided if the display device is not a portable device, and may be provided in a different position even if the display device is a portable device. The display panel 1005 may be formed of an organic device 1.

[0080] The display device according to the present embodiment may be used as a display unit of a photoelectric conversion device having an optical unit with a plurality of lenses and an image sensor that receives light that has passed through the optical unit. The photoelectric conversion device may have a display unit that displays information acquired by the image sensor. Alternatively, information may be acquired using information acquired by the image sensor, and the display unit may display information different from the information acquired by the image sensor. The display unit may be a display unit exposed to the outside of the photoelectric conversion device, or may be a display unit disposed within a viewfinder. The photoelectric conversion device may be a digital camera or a digital video camera.

[0081] 14(a) is a schematic diagram showing an example of a photoelectric conversion device according to this embodiment. The photoelectric conversion device 1100 may have a viewfinder 1101, a rear display 1102, an operation unit 1103, and a housing 1104. The viewfinder 1101 may have a display device according to this embodiment. In this case, the display device may display not only an image to be captured, but also environmental information, imaging instructions, and the like. The environmental information may include the intensity of external light, the direction of external light, the moving speed of the subject, the possibility that the subject will be blocked by an obstruction, and the like.

[0082] Since the timing suitable for imaging is short, it is better to display information as soon as possible. Therefore, it is preferable to use a display device using the organic light-emitting element of the present invention. This is because the organic light-emitting element has a fast response speed. A display device using an organic light-emitting element can be used more preferably than a liquid crystal display device, which requires a high display speed.

[0083] The photoelectric conversion device 1100 has an optical section (not shown). The optical section has a plurality of lenses, and forms an image on an image sensor housed in a housing 1104. The focal points of the plurality of lenses can be adjusted by adjusting their relative positions. This operation can also be performed automatically.

[0084] The display device according to this embodiment may have color filters having red, green, and blue colors, the red, green, and blue colors being arranged in a delta arrangement.

[0085] The display device according to the present embodiment may be used as a display unit of a mobile terminal. In this case, the display device may have both a display function and an operation function. Examples of the mobile terminal include mobile phones such as smartphones, tablets, and head-mounted displays.

[0086] FIG. 14(b) is a schematic diagram showing another example of an electronic device according to this embodiment. The electronic device 1200 has a display unit 1201, an operation unit 1202, and a housing 1203. The housing 1203 may have a circuit, a printed circuit board having the circuit, a battery, and a communication unit. The operation unit 1202 may be a button or a touch panel type reaction unit. The operation unit may be a biometric recognition unit that recognizes a fingerprint to perform unlocking or the like. An electronic device having a communication unit may be called a communication device.

[0087] FIG. 15 is a schematic diagram showing an example of a display device according to the present embodiment. FIG. 15(a) shows a display device such as a television monitor or a PC monitor. The display device 1300 has a frame 1301 and a display unit 1302. The light-emitting device according to the present embodiment may be used for the display unit 1302. The display device 1300 has a base 1303 that supports the frame 1301 and the display unit 1302. The base 1303 is not limited to the form shown in FIG. 15(a). The lower side of the frame 1301 may also serve as the base. The frame 1301 and the display unit 1302 may be curved. The radius of curvature may be 5000 mm or more and 6000 mm or less.

[0088] FIG. 15(b) is a schematic diagram showing another example of the display device according to the present embodiment. The display device 1310 of FIG. 15(b) is configured to be bendable, and is a so-called foldable display device. The display device 1310 has a first display unit 1311, a second display unit 1312, a housing 1313, and a bending point 1314. The first display unit 1311 and the second display unit 1312 may have the light-emitting device according to the present embodiment. The first display unit 1311 and the second display unit 1312 may be one display unit without a joint. The first display unit 1311 and the second display unit 1312 can be separated at the bending point. The first display unit 1311 and the second display unit 1312 may display different images, or the first and second display units may display one image.

[0089] FIG. 16(a) is a schematic diagram showing an example of a lighting device according to this embodiment. The lighting device 1400 may have a housing 1401, a light source 1402, a circuit board 1403, an optical film 1404, and a light diffusion unit 1405. The light source may have an organic light-emitting element according to this embodiment. The optical filter may be a filter that improves the color rendering of the light source. The light diffusion unit can effectively diffuse the light of the light source, such as for lighting up, and deliver the light over a wide range. The optical filter and the light diffusion unit may be provided on the light emission side of the lighting. If necessary, a cover may be provided on the outermost part.

[0090] The lighting device is, for example, a device that illuminates a room. The lighting device may emit white light, neutral white light, or any other color from blue to red. It may have a dimming circuit that adjusts the light intensity. The lighting device may have the organic light-emitting element of the present invention and a power supply circuit connected thereto. The power supply circuit is a circuit that converts AC voltage into DC voltage. Moreover, white has a color temperature of 4200K, and neutral white has a color temperature of 5000K. The lighting device may have a color filter.

[0091] The lighting device according to the present embodiment may also include a heat dissipation section that dissipates heat from within the device to the outside, and examples of the heat dissipation section include metals with high specific heat, liquid silicon, and the like.

[0092] Fig. 16(b) is a schematic diagram of an automobile, which is an example of a moving body according to this embodiment. The automobile has tail lamps, which are an example of a lamp. The automobile 1500 has tail lamps 1501, and may be configured to turn on the tail lamps when braking or the like is performed.

[0093] A tail lamp 1501 may have an organic light-emitting element according to this embodiment. The tail lamp may have a protective member for protecting the organic EL element. The protective member may be made of any material as long as it has a certain degree of strength and is transparent, but is preferably made of polycarbonate or the like. Polycarbonate may be mixed with a furandicarboxylic acid derivative, an acrylonitrile derivative, or the like.

[0094] The automobile 1500 may have a body 1503 and a window 1502 attached thereto. The window may be a transparent display as long as it is not a window for checking the front and rear of the automobile. The transparent display may have an organic light-emitting element according to this embodiment. In this case, the constituent materials of the electrodes and the like of the organic light-emitting element are made of transparent members.

[0095] The moving body according to the present embodiment may be a ship, an aircraft, a drone, or the like. The moving body may have a body and a lamp provided on the body. The lamp may emit light to indicate the position of the body. The lamp has the organic light-emitting element according to the present embodiment.

[0096] As described above, by using a device using the organic light-emitting element according to this embodiment, it is possible to achieve a display with good image quality and stability even over a long period of time.

[0097] 17 is an application example of a display device according to an embodiment of the present invention. The display device according to an embodiment of the present invention can be applied to information display devices such as a camera viewfinder, a head mounted display, and smart glasses.

[0098] 17(a) is a schematic diagram of an example used as a viewfinder for an imaging device such as a camera. Display light 7 and infrared light 8 are emitted from the display device 1, and the display light and infrared light reach the user's eyeball 6 through the same optical member 22. The infrared light reflected by the user's eyeball 6 is converted into electrical information by an imaging device 23 having an imaging element, and the line of sight is detected based on that information. Instead of providing an imaging device, an imaging element may be provided on the insulating layer of the display device 1 to be used as a display imaging device.

[0099] Fig. 17(b) is an example of an imaging device such as a camera. The imaging device 24 has a viewfinder 25, a display 26, an operation unit 27, and a housing 28. The display device in Fig. 17(a) is provided in the viewfinder 25.

[0100] 17(a) shows an example in which the display light 7 and the infrared light 8 pass through the same optical member 22, but separate optical members may be provided for the display light and the infrared light. Also, instead of providing an imaging device, an imaging element may be provided on the substrate of the display device 1 and used as a display imaging device. The detected line-of-sight information can be used to control the display device or various devices connected to the display device, such as to control the focus of the camera, control the resolution of the displayed image, and replace button operations.

[0101] A display device according to an embodiment of the present invention may have an imaging device having a light receiving element, and may control a display image on the display device based on information about a user's line of sight from the imaging device.

[0102] Specifically, the display device determines a first field of view area to which the user gazes and a second field of view area other than the first field of view area based on the line-of-sight information. The first field of view area and the second field of view area may be determined by a control device of the display device, or may be received from an external control device. In the display area of ​​the display device, the display resolution of the first field of view area may be controlled to be higher than the display resolution of the second field of view area. In other words, the resolution of the second field of view area may be lower than that of the first field of view area.

[0103] The display area includes a first display area and a second display area different from the first display area, and an area having a high priority is determined from the first display area and the second display area based on line-of-sight information. The first field of view area and the second field of view area may be determined by a control device of the display device, or may be determined by an external control device and received. The resolution of the area having a high priority may be controlled to be higher than the resolution of areas other than the area having a high priority. In other words, the resolution of an area having a relatively low priority may be lowered.

[0104] AI may be used to determine the first field of view area and the area with high priority. The AI ​​may be a model configured to estimate the angle of the line of sight and the distance to an object at the end of the line of sight from the image of the eyeball, using the image of the eyeball and the direction in which the eyeball in the image was actually looking as teacher data. The AI ​​program may be included in the display device, the imaging device, or an external device. If included in the external device, it is transmitted to the display device via communication.

[0105] When display control is performed based on visual recognition detection, the present invention is preferably applicable to smart glasses that further include an imaging device for capturing images of the outside world. The smart glasses can display captured outside information in real time.

[0106] Alternatively, a first imaging device having a light receiving element for receiving infrared light and a second imaging device having a light receiving element different from that of the first imaging device for capturing images of the outside may be included, and the imaging resolution of the second imaging device may be controlled based on the line of sight information of the user of the first imaging device. By lowering the imaging resolution of other areas compared to the prioritized area, the amount of information can be reduced. This can reduce power consumption and display delay. The prioritized area may be the first imaging area, and the area with a lower priority than the first imaging area may be the second imaging area.

[0107] FIG. 17(c) is a schematic diagram showing an example of smart glasses. An imaging display device 29, which is typified by smart glasses, has a control unit 30, a transparent display unit 31, and an external imaging unit (not shown). When applied to smart glasses, both the display device and the external imaging device can be controlled based on detected line-of-sight information, and power consumption and display delay can be reduced. For example, by lowering the display and imaging resolution of areas other than the area the user is gazing at within the display area, the amount of information for both imaging and display can be reduced, and power consumption and display delay can be reduced.

[0108] As described above, according to one embodiment of the present invention, by reducing the leakage of visible light emitted by an infrared light-emitting element into adjacent pixels, it is possible to provide a display device in which degradation in display quality is reduced even when the display device is miniaturized.

[0109] The invention is not limited to the above-described embodiments, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0110] 1: organic device, 110: reflecting portion (reflective film), 301: reflecting electrode (reflective film), 402: reflecting film, 115: lower electrode, 307: lower electrode, 403: lower electrode, 114: optical adjustment film, 306: optical adjustment film, 404: optical adjustment film, 120: upper electrode, 201r: first pixel, 201g: second pixel, 201b: third pixel

Claims

1. An organic device comprising: a reflective film disposed on a substrate; a first insulating film covering the reflective film; a plurality of lower electrodes disposed on the first insulating film; a second insulating film covering peripheral portions of the plurality of lower electrodes and the first insulating film between the plurality of lower electrodes; an organic functional film covering the plurality of lower electrodes and the second insulating film; and an upper electrode disposed on the organic functional film, the potential of the reflective film is set so that a potential difference between the upper electrode and the reflective film is lower than a threshold voltage at which the organic functional film operates; the reflective film includes a first reflective portion for a first pixel and a second reflective portion for a second pixel; When the thickness of the first insulating film disposed on the central portion of the first reflecting portion is T1, the thickness of the first insulating film disposed on the central portion of the second reflecting portion is T2, the step of the surface of the first insulating film on the first reflecting portion is ΔT1, and the step of the surface of the first insulating film on the second reflecting portion is ΔT2, T1>T2, ΔT1<ΔT2 are satisfied, An organic device comprising:

2. the first insulating film includes a first film and a second film, the first film and the second film are disposed in the central portion of the first reflecting portion, and the first film is not disposed in the central portion of the second reflecting portion, but the second film is disposed therein; 2. The organic device according to claim 1 .

3. In a region where both the first film and the second film are present, the second film is disposed on the first film.

3. The organic device according to claim 2 .

4. the reflective film further includes a third reflective portion for a third pixel, When the thickness of the first insulating film disposed on the central portion of the third reflecting portion is T3 and the step of the surface of the first insulating film on the third reflecting portion is ΔT3, T1>T2>T3, ΔT1<ΔT2<ΔT3 are satisfied, 2. The organic device according to claim 1 .

5. the first insulating film includes a first film, a second film, and a third film, the first film, the second film, and the third film are disposed in the central portion of the first reflecting portion, the first film is not disposed in the central portion of the second reflecting portion, and the second film and the third film are disposed in the central portion of the third reflecting portion, the first film and the second film are not disposed in the central portion of the third reflecting portion, and the third film is disposed in the central portion of the third reflecting portion.

5. The organic device according to claim 4.

6. the reflective film includes a plurality of reflective portions including the first reflective portion and the second reflective portion, each of the plurality of reflective portions being disposed under a corresponding one of the plurality of lower electrodes; Each of the plurality of lower electrodes and a corresponding one of the plurality of reflecting portions are electrically connected to each other.

6. An organic device according to claim 1, wherein the organic layer is a conductive layer.

7. Each of the plurality of lower electrodes extends to an opening provided in the first insulating film, and each of the plurality of lower electrodes is electrically connected to a peripheral portion of a corresponding one of the plurality of reflective portions at the opening.

7. The organic device according to claim 6.

8. Each of the plurality of lower electrodes is electrically connected to a peripheral portion of a corresponding one of the plurality of reflective portions by a first conductive plug penetrating the first insulating film.

7. The organic device according to claim 6.

9. a conductive layer is provided on the reflective film in a peripheral portion of the reflective portion, and each of the plurality of lower electrodes is electrically connected to the conductive layer; 9. An organic device according to claim 6, wherein the organic layer is a conductive layer.

10. The conductive layer is made of a material having a lower reflectance than the reflective film.

10. The organic device of claim 9.

11. the reflective film is made of a conductor provided in common to the plurality of lower electrodes and is electrically insulated from the plurality of lower electrodes; 6. An organic device according to claim 1, wherein the organic layer is a conductive layer.

12. the plurality of lower electrodes are electrically connected to a wiring pattern provided adjacent to the reflective film, and the reflective film and the wiring pattern are insulated from each other.

12. The organic device of claim 11.

13. the wiring pattern is made of a conductive material having a lower reflectance than the reflective film; 13. The organic device of claim 12.

14. The reflective film has the conductive material formed on at least a portion of the reflective film in the peripheral portion of the reflective portion.

14. The organic device of claim 13.

15. A display device configured as 15. An organic device according to any one of the preceding claims.

16. An imaging device; and an organic device according to any one of claims 1 to 14 configured as a display device, The display image of the display device is controlled based on the user's line of sight information provided from the imaging device. A display and imaging device comprising:

17. an optical unit having a plurality of lenses, an image sensor that receives light that has passed through the optical unit, and a display unit that displays an image captured by the image sensor; The display unit includes the organic device according to claim 1 . A photoelectric conversion device comprising:

18. 15. An electronic device comprising: a display unit including the organic device according to claim 1; a housing in which the display unit is provided; and a communication unit provided in the housing and configured to communicate with an external device.

19. 15. An illumination device comprising: a light source including the organic device according to claim 1; and a light diffusing portion or an optical film that transmits light emitted by the light source.

20. A moving object comprising: a lighting fixture having the organic device according to claim 1 ; and a body on which the lighting fixture is provided.

Images