Exhaust gas treatment device

Abstract

Efficiently treat the exhaust gas discharged from a working space with a controlled atmosphere. 【Solution means】The exhaust gas treatment device 10 is a device that treats the exhaust gas discharged from the working space 1S with a controlled atmosphere through the flow path 2. An adsorber 3 is provided in the middle of the flow path 2, into which the exhaust gas is introduced and an adsorbent for adsorbing the toxic gas contained in the exhaust gas is accommodated. An oxidation reactor 5 is provided in the flow path 2 on the downstream side of the adsorber 3, into which the exhaust gas discharged from the adsorber 3 is introduced and a catalyst for oxidizing the toxic gas contained in the exhaust gas is accommodated. A catalyst heating unit 6 for heating the catalyst, and a control unit 7 for controlling the catalyst heating unit 6 so as to heat the catalyst when the exhaust gas is discharged from the working space 1S to the flow path 2.

Description

Technical Field

[0001] The present invention relates to an apparatus for treating exhaust gas discharged from a working space with a controlled atmosphere.

Background Art

[0002] When handling harmful chemicals and substances in research institutions, factories, etc., in order to ensure the safety of workers, a glove box equipped with an airtight working space as exemplified in Patent Document 1 is used. Further, when the work content dislikes oxidation and moisture (i.e., oxygen and moisture), such as in the work of manufacturing (e.g., prototyping or mass production) lithium ion batteries, electronic devices, etc., such an airtight working space is filled with an inert gas such as argon gas or dry air as the ambient gas.

[0003] A glove box is a manufacturing device for prototyping and small-scale production. When mass-producing products such as lithium ion batteries and electronic devices in a factory, etc., a dry room, a clean room, etc. are provided in the factory, and production lines are constructed therein, and products are manufactured. In a dry room, a clean room, etc., a certain degree of airtightness is maintained as in the case of a glove box, and the atmosphere of the working space is controlled.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Depending on the work content in the work space, exhaust gas containing toxic gases such as hydrocarbons and carbon monoxide may be discharged from the glove box. Hydrocarbons and carbon monoxide can be purified (for example, oxidized and burned by a catalytic reaction) using noble metal catalysts such as rhodium (Rh), platinum (Pt), and palladium (Pd). However, in order for the noble metal catalyst to cause a catalytic reaction, it is required to constantly heat the noble metal catalyst to a predetermined temperature (for example, about 200°C to about 400°C).

[0006] On the other hand, the pressure inside the glove box during operation varies, for example, due to the introduction of gas into the work space or the generation of gas in the work space. Due to such pressure fluctuations, exhaust gas is discharged from the glove box during operation irregularly. In order to treat the exhaust gas discharged irregularly, it is not efficient to always maintain the noble metal catalyst in a heated state.

[0007] An object of the present invention is to efficiently treat exhaust gas discharged from a work space with a controlled atmosphere.

Means for Solving the Problem

[0008] The present invention for solving the above problems includes, for example, the following aspects. (Item 1) An apparatus for treating exhaust gas discharged from a work space with a controlled atmosphere through a flow path, An adsorber provided in the middle of the flow path, into which the exhaust gas is introduced and which contains an adsorbent for adsorbing toxic gases contained in the exhaust gas; An oxidation reactor provided in the flow path on the downstream side of the adsorber, into which the exhaust gas discharged from the adsorber is introduced and which contains a catalyst for oxidizing toxic gases contained in the exhaust gas; A catalyst heating unit for heating the catalyst; A control unit for controlling the catalyst heating unit so as to heat the catalyst when the exhaust gas is discharged from the work space into the flow path; An exhaust gas treatment apparatus comprising the above. (Item 2) Further comprising an adsorbent heating unit for heating the adsorbent, The control unit further controls the adsorbent heating unit to heat the adsorbent when the temperature of the catalyst reaches a predetermined temperature, according to the exhaust gas treatment apparatus of claim 1. (Item 3) The flow path is provided to divert the exhaust gas discharged from the work space and introduce it into each of the plurality of adsorbers, and introduce the exhaust gas discharged from each adsorber into the oxidation reactor. For each of the plurality of adsorbers, an adsorbent heating unit for heating the adsorbent accommodated in the adsorber is provided. The control unit controls each of the adsorbent heating units to switch one or more of the adsorbent heating units for heating the adsorbent, according to the exhaust gas treatment apparatus of claim 2. (Item 4) The adsorbent adsorbs the acidic gas contained in the toxic gas, according to the exhaust gas treatment apparatus of any one of claims 1 to 3. (Item 5) The exhaust gas treatment apparatus according to any one of claims 1 to 4 further comprises an oxygen introduction unit for introducing a gas containing oxygen into the flow path upstream of the oxidation reactor. (Item 6) The exhaust gas treatment apparatus according to any one of claims 1 to 5 further comprises an exhaust gas heating unit for heating the exhaust gas in the flow path upstream of the adsorber. (Item 7) The adsorbent adsorbs at least one of hydrocarbons and carbon monoxide contained in the toxic gas, according to the exhaust gas treatment apparatus of any one of claims 1 to 6. (Item 8) The adsorbent adsorbs the organic gas contained in the toxic gas, according to the exhaust gas treatment apparatus of any one of claims 1 to 7. (Item 9) The work space is filled with an ambient gas, and the exhaust gas further contains the ambient gas after work, according to the exhaust gas treatment apparatus of any one of claims 1 to 8.

Advantages of the Invention

[0009] According to the present invention, it is possible to efficiently process exhaust gas discharged from a work space with a controlled atmosphere.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Modes for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description and drawings, the same reference numerals indicate the same or similar components, and thus duplicate descriptions regarding the same or similar components will be omitted.

[0012] [Configuration of the Apparatus] FIG. 1 is a block diagram of an exhaust gas treatment apparatus according to an embodiment of the present invention.

[0013] An exhaust gas treatment apparatus (hereinafter also simply referred to as an apparatus) 10 (10A) according to an embodiment is an apparatus that treats exhaust gas discharged from a work space 1S with a controlled atmosphere through a flow path 2. In the present embodiment, an airtight work space 1S provided in the glove box 1 will be described as an example of a work space with a controlled atmosphere. The apparatus 10 according to an embodiment includes an adsorber 3, an adsorbent heating unit 4, an oxidation reactor 5, a catalyst heating unit 6, a control unit 7, an oxygen introduction unit 8, and an exhaust gas heating unit 9. The adsorbent heating unit 4, the oxygen introduction unit 8, and the exhaust gas heating unit 9 are optional configurations.

[0014] According to the exhaust gas treatment device 10 according to an embodiment, when exhaust gas is discharged from the working space 1S to the flow path 2, the catalyst is heated. The exhaust gas discharged from the working space 1S before the catalyst exhibits purification performance is purified by an adsorber disposed upstream of the catalyst. Thereby, it becomes possible to intermittently perform the treatment of the exhaust gas discharged from the working space 1S, and it becomes possible to efficiently perform the treatment of the exhaust gas.

[0015] · Working space In the present embodiment, the airtight working space 1S is provided in the glove box 1. The glove box 1 has a working space 1S that is blocked from the outside air, and is configured such that an operator can work in the working space 1S using gloves (not shown) provided in a plurality of armholes 1h. Examples of the glove box 1 include a vacuum type shown in FIG. 2(A) described later and a gas replacement type (purge type) shown in FIG. 2(B). In the present embodiment, the vacuum type glove box 1 will be described as an example.

[0016] A solenoid valve 13 is provided at the outlet of the working space 1S. The solenoid valve 13 is normally closed when the glove box 1 is in use to ensure the airtightness of the working space 1S. A pressure sensor (not shown) is provided in the working space 1S. When the pressure sensor senses a pressure change in the working space 1S, it transmits a control signal indicating that exhaust gas is discharged from the working space 1S to the control unit 7. In the present embodiment, when the control unit 7 receives the control signal transmitted from the pressure sensor, it opens the solenoid valve 13 to discharge the exhaust gas from the working space 1S to the flow path 2.

[0017] · Toxic gas The exhaust gas discharged from the glove box 1 contains toxic gases according to the work content in the working space 1S. Examples of the toxic gases contained in the exhaust gas include hydrocarbons, carbon monoxide, benzene, toluene, hydrogen sulfide, and chlorine. Among these exemplified toxic gases, benzene and toluene are organic gases generated from, for example, organic solvents, and hydrogen sulfide and chlorine are acidic gases. Exemplarily, the humidity in the airtight working space 1S provided in the glove box 1 is about 1 ppm or less, and the oxygen concentration is about 1 ppm or less.

[0018] ·Atmospheric gas The working space 1S can be filled with atmospheric gas, and the exhaust gas can contain the atmospheric gas after the work. Examples of the atmospheric gas include inert gases such as N2, Ar, He, and dry air. In order to supplement the atmospheric gas according to the pressure fluctuation in the working space 1S, the atmospheric gas can be introduced into the working space 1S from the atmospheric gas supply source 14 through the atmospheric gas introduction path 15. The flow rate of the atmospheric gas can be adjusted by the solenoid valve 16 provided in the atmospheric gas introduction path 15.

[0019] ·Flow path The flow path 2 is a tubular flow path for discharging the exhaust gas discharged from the airtight working space 1S. An adsorber 3, an oxidation reactor 5, an oxygen introduction part 8, and an exhaust gas heating part 9, which will be described later, are provided in the flow path in the middle of the flow path 2. The exhaust gas discharged from the working space 1S is purified by these parts 3, 5, 8, 9 provided in the middle of the flow path 2 before being released into the atmosphere. The exhaust gas purified by the device 10 is released into the atmosphere, for example, through the flow path 2.

[0020] ·Adsorber (adsorbent) The adsorber 3 houses an adsorbent (not shown) that adsorbs toxic gases contained in the exhaust gas. The adsorber 3 is disposed in the flow path 2 on the downstream side of the work space 1S. Exhaust gas is introduced into the adsorber 3 through the flow path 2. In the present embodiment, a blower 11 is provided in the flow path 2 upstream of the adsorber 3, and the exhaust gas discharged from the work space 1S is introduced into the adsorber 3 by the blower 11.

[0021] An oxidation reactor 5 is disposed in the flow path 2 on the downstream side of the adsorber 3. A catalyst is housed in the oxidation reactor 5. Until the catalyst housed in the oxidation reactor 5 rises to an appropriate temperature of about 200°C to about 400°C, the adsorbent housed in the adsorber 3 adsorbs the toxic gases contained in the exhaust gas. As a result, it becomes possible to appropriately purify the exhaust gas discharged from the work space 1S until the catalyst exhibits its purification performance, and it becomes possible to efficiently perform the treatment of the exhaust gas.

[0022] The adsorbent adsorbs at least one of hydrocarbons and carbon monoxide contained in the toxic gas. Preferably, the adsorbent can adsorb organic gases contained in the toxic gas. More preferably, the adsorbent can adsorb acidic gases contained in the toxic gas. Acidic gases are catalyst poisons, and if acidic gases such as hydrogen sulfide and chlorine are contained in the exhaust gas discharged from the work space 1S, the catalytic performance of the catalyst will deteriorate. Therefore, it is preferable to adsorb acidic gases in advance upstream of the catalyst by disposing the adsorber 3 housing the adsorbent upstream of the oxidation reactor 5 housing the catalyst.

[0023] For example, activated carbon or zeolite can be used as the adsorbent. As the zeolite, both natural zeolite and synthetic zeolite can be used. The zeolite used as the adsorbent in the present embodiment can adsorb, for example, hydrocarbons, carbon monoxide, benzene, toluene, hydrogen sulfide, and chlorine, etc., contained as toxic gases in the exhaust gas.

[0024] · Adsorbent heating section The adsorbent heating unit 4 is disposed around the adsorber 3 and heats the adsorbent accommodated in the adsorber 3. The adsorbent is heated to, for example, about 200°C to about 400°C. For the adsorbent heating unit 4, for example, an electric heater can be used.

[0025] When the adsorbent accommodated in the adsorber 3 is heated, the molecules of the toxic gas adsorbed on the adsorbent are desorbed. As a result, the adsorption performance of the adsorbent is restored. The molecules of the toxic gas desorbed from the adsorbent are purified by a catalyst in the oxidation reactor 5 disposed on the downstream side of the adsorber 3.

[0026] · Oxidation reactor (catalyst) The oxidation reactor 5 accommodates a catalyst (not shown) that oxidizes the toxic gas contained in the exhaust gas. The oxidation reactor 5 is disposed in the flow path 2 on the downstream side of the adsorber 3. The exhaust gas discharged from the adsorber 3 is introduced into the oxidation reactor 5 through the flow path 2.

[0027] As the catalyst, noble metal catalysts such as rhodium (Rh), platinum (Pt), and palladium (Pd) can be used. The catalyst purifies the toxic gas contained in the exhaust gas by oxidizing the toxic gas through a catalytic reaction. The toxic gas oxidized by the catalyst is, for example, a hydrocarbon or carbon monoxide. In this embodiment, the exhaust gas purified by the catalyst is discharged into the atmosphere from the exhaust port located on the downstream side of the oxidation reactor 5.

[0028] · Catalyst heating unit The catalyst heating unit 6 is disposed around the oxidation reactor 5 and heats the catalyst accommodated in the oxidation reactor 5. The catalyst is heated to, for example, about 200°C to about 400°C. For the catalyst heating unit 6, for example, an electric heater can be used.

[0029] · Control unit The control unit 7 controls each part of the apparatus 10. The control unit 7 controls, for example, the operations of the adsorbent heating unit 4, the catalyst heating unit 6, the exhaust gas heating unit 9, the blower 11, and the solenoid valves 12, 13, 16. When exhaust gas is discharged from the working space 1S to the flow path 2, the control unit 7 controls the catalyst heating unit 6 to heat the catalyst. The control unit 7 further controls the adsorbent heating unit 4 to heat the adsorbent when the temperature of the catalyst reaches a predetermined temperature. The control unit 7 can include a processor such as a CPU and a memory. A single-board computer such as a Raspberry Pi or Arduino (registered trademark) can be used for the control unit 7. The transmission and reception of control signals or control data between the control unit 7 and each part of the apparatus 10 may be either wired or wireless.

[0030] · Oxygen introduction unit The oxygen introduction unit 8 is disposed in the flow path 2 upstream of the oxidation reactor 5 (upstream of the oxidation reactor 5 in the flow path 2) and introduces a gas containing oxygen into the flow path 2. The oxygen introduction unit 8 is, for example, a tubular flow path, and the flow rate of the gas containing oxygen is adjusted by, for example, the solenoid valve 12 provided upstream of the oxygen introduction unit 8. As the gas containing oxygen, for example, the ambient air around the apparatus 10 can be used. In the present embodiment, the gas containing oxygen is introduced from the oxygen introduction unit 8 into the flow path 2 by the blower 11.

[0031] In the oxidation reactor 5, toxic gases such as hydrocarbons and carbon monoxide contained in the exhaust gas are oxidized using a catalyst to purify the exhaust gas. Oxygen gas is required for the oxidation treatment by the catalyst to oxidize the toxic gas to be treated. That is, when the exhaust gas does not sufficiently contain oxygen gas, the toxic gas contained in the exhaust gas cannot be sufficiently purified in the oxidation reactor 5.

[0032] The oxygen introduction part 8 promotes the oxidation treatment of the toxic gas catalyzed in the oxidation reactor 5 by introducing a gas containing oxygen into the flow path 2 on the upstream side of the oxidation reactor 5. Thereby, even when the ambient gas in the work space 1S does not sufficiently contain oxygen gas, for example, when the ambient gas in the work space 1S is an inert gas such as N2, Ar, He, etc., the toxic gas to be treated can be oxidized in the oxidation reactor 5.

[0033] · Exhaust gas heating part The exhaust gas heating part 9 is arranged in the flow path 2 on the upstream side of the oxidation reactor 5 (the upstream side of the oxidation reactor 5 in the flow path 2) to heat the exhaust gas. The exhaust gas heating part 9 heats the introduced exhaust gas to, for example, about 200°C to about 400°C. For the exhaust gas heating part 9, for example, an electric heating type heater can be used.

[0034] The exhaust gas heating part 9 starts operating at the same timing as the timing when the catalyst heating part 6 starts heating the catalyst, for example, to start heating the exhaust gas. The exhaust gas heating part 9 assists the heating of the catalyst by the catalyst heating part 6. That is, the exhaust gas heating part 9 functions as a preheating part for the catalyst heating part 6. For example, when the flow rate of the exhaust gas discharged from the work space 1S to the flow path 2 is relatively large, it takes a relatively long time for the catalyst accommodated in the oxidation reactor 5 to rise to an appropriate temperature of about 200°C to about 400°C only by the heating by the catalyst heating part 6. In contrast, if the exhaust gas heating part 9 is used to pre-raise the temperature of the exhaust gas introduced into the oxidation reactor 5, the time until the catalyst rises to an appropriate temperature can be shortened.

[0035] Preferably, the exhaust gas heating unit 9 is disposed in the flow path 2 on the upstream side of the adsorber 3 (the upstream side of the adsorber 3 in the flow path 2). When the exhaust gas heating unit 9 is disposed in the flow path 2 on the upstream side of the adsorber 3, the temperature of the exhaust gas introduced into the adsorber 3 can be raised in advance, and the recovery of the adsorption performance of the adsorbent accommodated in the adsorber 3 can be promoted. The adsorber 3 is disposed in the flow path 2 on the upstream side of the oxidation reactor 5. Therefore, when the exhaust gas heating unit 9 is disposed in the flow path 2 on the upstream side of the adsorber 3, not only can the recovery of the adsorption performance of the adsorbent be promoted, but also the time until the catalyst rises to an appropriate temperature can be shortened.

[0036] Note that the temperature of the exhaust gas discharged from the work space 1S and the gas containing oxygen introduced from the oxygen introduction unit 8 is generally room temperature (20°C ± 15°C). Since the adsorber 3 and the oxidation reactor 5 are heated to about 200°C to about 400°C, if these exhaust gases and gases containing oxygen at room temperature are directly introduced into the adsorber 3 and the oxidation reactor 5 through the flow path 2, these adsorbers 3 and oxidation reactors 5 (particularly, the upstream portion of the adsorber 3) will always be cooled. On the other hand, if the exhaust gas heating unit 9 preheats the exhaust gas and the gas containing oxygen introduced into the adsorber 3 and the oxidation reactor 5 through the flow path 2, the adsorber 3 and the oxidation reactor 5 can function uniformly regardless of the site where the gas is introduced.

[0037] [Operation Procedure] The procedure for the operation of the exhaust gas treatment apparatus 10 according to an embodiment will be described. Steps S1 to S4 described below are the startup sequence of the apparatus 10, and steps S5 to S7 are the stop sequence of the apparatus 10. The apparatus 10 in the standby state performs a series of intermittent operations shown in steps S1 to S7 every time it receives a control signal transmitted from the pressure sensor. When the exhaust gas treatment apparatus 10 can intermittently treat the exhaust gas discharged from the work space 1S, the exhaust gas treatment apparatus 10 can efficiently treat the exhaust gas.

[0038] First, the situation before the device 10 in the standby state starts operating will be described. For example, an operator is using gloves provided on a plurality of armholes 1h to perform an operation of manufacturing a prototype of a lithium-ion battery, for example, in an airtight working space 1S provided in the glove box 1. The working space 1S is filled with an inert gas. As the prototype is manufactured, toxic gas is generated in the working space 1S. Exhaust gas containing the toxic gas is discharged irregularly from the working space 1S to the flow path 2.

[0039] When a pressure sensor provided in the working space 1S senses a pressure change in the working space 1S, a control signal indicating that exhaust gas is being discharged from the working space 1S is transmitted to the control unit 7. The device 10 in the standby state starts the startup sequence shown in steps S1 to S4 using the control signal transmitted from the pressure sensor as a trigger.

[0040] In step S1, when the control unit 7 receives the control signal transmitted from the pressure sensor, it starts the operation of the catalyst heating unit 6 and starts heating the catalyst housed in the oxidation reactor 5. After that, the control unit 7 operates the blower 11 in the stopped state and then opens the solenoid valve 13 to discharge the exhaust gas from the working space 1S to the flow path 2. Until the catalyst rises to an appropriate temperature of about 200°C to about 400°C, the adsorbent housed in the adsorber 3 purifies the toxic gas contained in the exhaust gas. It is preferable that the control unit 7 does not start the operation of the adsorbent heating unit 4 until the temperature of the catalyst rises to an appropriate temperature. The time required from the start of the process in step S1 until the solenoid valve 13 opens is, for example, about several seconds.

[0041] In step S2, the control unit 7 operates the catalyst heating unit 6 to maintain the temperature of the catalyst housed in the oxidation reactor 5 at an appropriate temperature. After the temperature of the catalyst stabilizes at an appropriate temperature of about 200°C to about 400°C, the catalyst housed in the oxidation reactor 5 purifies the toxic gas contained in the exhaust gas instead of the adsorbent housed in the adsorber 3. The time required from the start of the process in step S2 until the temperature of the catalyst stabilizes at the above appropriate temperature is, for example, about 30 minutes.

[0042] In step S3, the control unit 7 starts the operation of the adsorbent heating unit 4 to start heating the adsorbent accommodated in the adsorber 3. Thereby, while purifying the toxic gas contained in the exhaust gas by the catalyst accommodated in the oxidation reactor 5, the adsorption performance of the adsorbent disposed upstream of the catalyst is restored.

[0043] In step S4, the control unit 7 functions the oxygen introduction unit 8 by opening the solenoid valve 12 to introduce a gas containing oxygen (for example, ambient air) into the flow path 2. In the oxidation reactor 5, the purification of the exhaust gas is promoted by the gas containing oxygen introduced from the oxygen introduction unit 8.

[0044] After step S4, the apparatus 10 maintains its operating state while the pressure sensor senses the pressure change in the flow path 2, and processes the exhaust gas discharged from the work space 1S. While in the operating state, the apparatus 10 can intermittently repeat the process of step S3 for restoring the adsorption performance of the adsorbent. The operating apparatus 10 starts the stop sequence shown in steps S5 to S7, for example, after a predetermined time (for example, about 30 minutes) has elapsed when the pressure sensor does not sense the pressure change in the flow path 2.

[0045] In step S5, the control unit 7 stops the operation of the adsorbent heating unit 4 to lower the temperature of the adsorbent. In the present embodiment, the adsorbent and the adsorbent heating unit 4 are naturally cooled to, for example, room temperature by the ambient air (for example, room temperature of about 27°C). When the temperature of the adsorbent decreases, the adsorbent becomes capable of purifying the toxic gas contained in the exhaust gas again. Until the temperature of the adsorbent decreases to about room temperature, the catalyst accommodated in the oxidation reactor 5 purifies the toxic gas contained in the exhaust gas. By continuously operating the catalyst heating unit 6, the temperature of the catalyst accommodated in the oxidation reactor 5 is maintained at an appropriate temperature.

[0046] In step S6, the control unit 7 stops the operation of the catalyst heating unit 6 to lower the temperature of the catalyst. In the present embodiment, the catalyst and the catalyst heating unit 6 are naturally cooled by the surrounding atmosphere. After the temperature of the catalyst drops below the appropriate temperature of about 200°C to about 400°C, instead of the catalyst housed in the oxidation reactor 5, the adsorbent housed in the adsorber 3 purifies the toxic gas contained in the exhaust gas. The temperature of the adsorbent has already been lowered to about room temperature in step S5, and the adsorbent can purify the toxic gas contained in the exhaust gas.

[0047] In step S7, the control unit 7 closes the solenoid valve 12 and stops the operation of the oxygen introduction unit 8 to stop the introduction of the oxygen-containing gas into the flow path 2. After that, the control unit 7 closes the solenoid valve 13 and then stops the blower 11. After step S7, the apparatus 10 returns to the standby state again. As exemplified in the present embodiment, it is preferable that the timing of stopping the operation of the oxygen introduction unit 8 is after the timing of stopping the operations of the adsorbent heating unit 4 and the catalyst heating unit 6. This is to promote the natural cooling of the adsorbent heating unit 4 and the catalyst heating unit 6 by introducing the oxygen-containing gas at room temperature into the flow path 2 from upstream of the adsorbent heating unit 4 and the catalyst heating unit 6.

[0048] Thereafter, each time the apparatus 10 in the standby state receives a control signal transmitted from the pressure sensor, it performs the series of intermittent operations shown in steps S1 to S7.

[0049] As described above, according to the exhaust gas treatment apparatus 10 according to an embodiment of the present invention, it is possible to efficiently treat the exhaust gas discharged from the work space where the atmosphere is controlled.

[0050] [Other Forms] As described above, the present invention has been described by specific embodiments, but the present invention is not limited to the above-described embodiments.

[0051] In the above embodiment, the glove box 1 is of the vacuum type, but the mode in which the glove box 1 discharges exhaust gas is not limited to the vacuum type. The glove box 1 may be, for example, of the gas replacement type (purge type).

[0052] Figure 2 is a diagram for explaining various modes in which the glove box discharges exhaust gas. In the vacuum-type glove box 1 shown in Fig. 2(A), when using the glove box 1, for example, the atmosphere in the working space 1S is directly exhausted by using a blower 21 (or a vacuum pump 21), thereby emptying (or reducing the pressure slightly) the working space 1S. Then, the atmosphere gas in the working space 1S is replaced by introducing atmosphere gas from the atmosphere gas supply source 14 into the working space 1S through the atmosphere gas introduction path 15. In the gas replacement-type glove box 1 shown in Fig. 2(B), when using the glove box 1, the atmosphere gas in the working space 1S is replaced by introducing atmosphere gas from the atmosphere gas supply source 14 into the working space 1S through the atmosphere gas introduction path 15. The configuration indicated by reference numeral 22 is a solenoid valve.

[0053] Furthermore, the glove box 1 may be provided with a gas circulation purification device 30 as shown in Fig. 2(C). Various known gas circulation purification devices can be used for the gas circulation purification device 30. The exemplified gas circulation purification device 30 houses an adsorbent 31, and the atmosphere in the working space 1S is introduced into the adsorbent 31 through the circulation path 32. The adsorbent 31 purifies the atmosphere in the working space 1S. The same adsorbent as the adsorbent housed in the adsorber 3 can be used for the adsorbent 31. A heating part (not shown) can be provided around the adsorbent 31. Solenoid valves 22 are provided at the inlet and outlet of the circulation path 32, respectively. The configuration indicated by reference numeral 33 is a blower, and the configuration indicated by reference numeral 34 is a solenoid valve.

[0054] In the above-described embodiment, the airtight working space 1S provided in the glove box 1 is taken as an example of a working space with a controlled atmosphere. However, the exhaust gas processed by the exhaust gas treatment device 10 is not limited to the exhaust gas discharged from the airtight working space 1S provided in the glove box 1. The exhaust gas treatment device 10 can also process exhaust gas discharged from, for example, a dry room or a clean room for manufacturing lithium ion batteries, electronic devices, etc. Generally, a dry room or a clean room is a working space with a certain degree of airtightness, and the atmosphere of the working space is controlled. In this specification, the airtight working space does not mean only a working space that is almost completely airtight like the working space 1S of the glove box 1 exemplified in the above-described embodiment, but also means a working space with a certain degree of airtightness and a controlled atmosphere, such as a dry room or a clean room. Exemplarily, the humidity in the dry room is about 100 ppm, and the oxygen concentration is about 21%, which is similar to that of the atmosphere.

[0055] Also, when a side box (not shown) communicating with the working space 1S is provided in the glove box 1, the exhaust gas treatment device 10 can also process the exhaust gas discharged from the space in such a side box. The side box communicates with the working space 1S and is used for carrying in articles into the working space 1S and carrying out articles from the working space 1S. In this specification, the working space does not mean only the working space 1S of the glove box 1 exemplified in the above-described embodiment, but also means a space communicating with the working space 1S (for example, the space in the side box).

[0056] In the above-described embodiment, the exhaust gas treatment device 10 (10A) includes one adsorber 3, and the control unit 7 targets the adsorbent heating unit 4 arranged around the one adsorber 3 for heating. However, the numbers of the adsorber 3 and the adsorbent heating unit 4 are not limited thereto. In other embodiments, the exhaust gas treatment device 10 (10B) includes a plurality of adsorbers 3a, 3b connected in parallel, and the control unit 7 can control the respective adsorbent heating units 4a, 4b so as to switch one or more adsorbents to be heated from among the plurality of adsorbents.

[0057] FIG. 3 is a block diagram of an exhaust gas treatment apparatus according to another embodiment of the present invention. In another embodiment, as illustrated in FIG. 3, the first adsorber 3a and the second adsorber 3b are connected in parallel in the flow path 2. The flow path 2 is provided to divert the exhaust gas discharged from the work space 1S and introduce it into each of the plurality of adsorbers 3a and 3b, and introduce the exhaust gas discharged from each of the adsorbers 3a and 3b into the oxidation reactor 5. For each of these plurality of adsorbers 3a and 3b, adsorbent heating units 4a and 4b for heating the adsorbent accommodated in the adsorbers 3a and 3b are provided. The first adsorbent heating unit 4a is disposed around the first adsorber 3a and heats the adsorbent (not shown) accommodated in the first adsorber 3a. The second adsorbent heating unit 4b is disposed around the second adsorber 3b and heats the adsorbent (not shown) accommodated in the second adsorber 3b. The control unit 7 controls the first adsorbent heating unit 4a and the second adsorbent heating unit 4b so as to switch one or more of the adsorbent heating units 4a and 4b that heat the adsorbent. The lower the temperature of the adsorbent accommodated in the adsorbers 3a and 3b, the higher the adsorption efficiency. Therefore, the control unit 7 preferably controls, for example, periodically, so that either the first adsorbent heating unit 4a or the second adsorbent heating unit 4b heats the adsorbent. For example, one of the adsorbents 3a is heated to recover its adsorption performance, and the other adsorbent 3b that is not heated has its temperature decreased without being heated, thereby increasing the adsorption efficiency. After a predetermined time has elapsed, the adsorbent to be heated is switched, the adsorbent 3b is heated to recover its adsorption performance, and the temperature of the adsorbent 3a is decreased without heating it, thereby increasing the adsorption efficiency. Alternatively, the control unit 7 may control, for example, periodically, so that both the first adsorbent heating unit 4a and the second adsorbent heating unit 4b heat the adsorbent.

[0058] In the section of the flow path 2 where the first adsorber 3a and the second adsorber 3b are provided in parallel, a plurality of solenoid valves 17a to 17d are provided in the flow path 2. The control unit 7 controls the solenoid valves 17a to 17d in accordance with the switching of the adsorbent to be heated, thereby adjusting the flow rate of the exhaust gas in the parallel section of the flow path 2.

[0059] In the above embodiment, the exhaust gas purified by the catalyst is discharged into the atmosphere from the exhaust port located on the downstream side of the oxidation reactor 5. However, the treatment of the exhaust gas purified by the catalyst is not limited to this. In other embodiments, as illustrated in FIG. 3, a secondary combustion unit 18 (afterburner furnace 18) is further provided on the downstream side of the oxidation reactor 5, and the exhaust gas purified by the catalyst can be further purified. The secondary combustion unit 18 heats the introduced exhaust gas to, for example, about 650°C to about 800°C. According to the secondary combustion unit 18, substances such as dioxins contained in the exhaust gas can be burned. The target dioxins include polychlorinated dibenzo-p-dioxins (PCDDs), polychlorinated dibenzofurans (PCDFs), and dioxin-like polychlorinated biphenyls (DL-PCBs).

[0060] In the above embodiment, the catalyst accommodated in the oxidation reactor 5 purifies hydrocarbons and carbon monoxide contained in the toxic gas by oxidation treatment. However, the catalytic reaction by the catalyst is not limited to oxidation treatment. The catalyst accommodated in the oxidation reactor 5 can also perform reduction treatment in addition to oxidation treatment. In this case, the catalyst can purify, for example, nitrogen oxides (NO x ) contained in the toxic gas by reduction treatment, and the exhaust gas treatment apparatus 10 can also treat the exhaust gas containing nitrogen oxides.

[0061] In the above-described embodiment, the opening and closing operation of the solenoid valve 13 is controlled by the control unit 7. However, the entity that controls the opening and closing operation of the solenoid valve 13 is not limited to the control unit 7. For example, an operator using the glove box 1 may open and close the solenoid valve 13. In this case, for example, a pressure sensor provided in the working space 1S may notify the operator that exhaust gas is being discharged from the working space 1S by using a means (notification means) that emits light or sound, such as an LED lamp or a speaker. The same applies to the solenoid valves 12 and 16 as to the solenoid valve 13.

[0062] In the above-described embodiment, when the apparatus 10 is in the standby state, the blower 11 is in the stopped state, and when the control unit 7 receives a control signal transmitted from the pressure sensor, the blower 11 starts operating. However, the operation timing of the blower 11 is not limited to the exemplified mode. The blower 11 may always operate (operate continuously) while the solenoid valve 12 is open, regardless of the operating state (operating state or standby state) of the apparatus 10. Further, the blower 11 may control the flow rate of the exhaust gas flowing through the flow path 2, for example, by being controlled by an inverter.

[0063] In the above-described embodiment, the adsorbent and the adsorbent heating unit 4 are naturally cooled to, for example, room temperature by the surrounding atmosphere (for example, room temperature of about 27°C), but the mode of lowering the temperature of the adsorbent is not limited to this. In another embodiment, first, after the control unit 7 opens the solenoid valve 12, for example, the blower 11 is operated to actively introduce the atmosphere to the adsorbent and the adsorbent heating unit 4, and the temperature of the adsorbent is actively lowered to about 100°C, for example. Then, by the control unit 7 stopping the blower 11, the adsorbent is naturally cooled to room temperature without the atmosphere being actively introduced. In another embodiment, the step of operating the blower 11 to actively introduce the atmosphere to the adsorbent and the adsorbent heating unit 4 is not continuously performed until the temperature of the adsorbent drops to about room temperature, but is performed until the temperature of the adsorbent once drops to about 100°C, which is higher than room temperature. The reason is that if the atmosphere is actively and continuously introduced until the temperature of the adsorbent drops to about room temperature, the adsorbent will adsorb the organic substances contained in the actively introduced cooling air, and the adsorption capacity of the adsorbent will decrease compared with natural cooling.

Explanation of Signs

[0064] 1 glove box 1h armhole 1S working space 2 flow path 3(3a, 3b) adsorber 4(4a, 4b) adsorbent heating unit 5 oxidation reactor 6 catalyst heating unit 7 control unit 8 oxygen introduction unit 9 exhaust gas heating unit 10(10A, 10B) exhaust gas treatment device 11, 21 blower 12, 13, 22 solenoid valve 14 atmosphere gas supply source 15 atmosphere gas introduction path 16 solenoid valve 17a~17d solenoid valve 18 secondary combustion unit (afterburner furnace) 30 Gas circulation purification device 31 Adsorbent 32 Circulation path 33 Blower 34 Solenoid valve

Claims

1. An apparatus for treating exhaust gas discharged from an atmosphere-controlled working space through a flow path, comprising: an adsorber provided in the flow path through which the exhaust gas flows, into which the exhaust gas is introduced and which contains an adsorbent that adsorbs toxic gases contained in the exhaust gas; an oxidation reactor that is provided in the flow path downstream of the adsorber, into which the exhaust gas discharged from the adsorber is introduced and that contains a catalyst that oxidizes toxic gases contained in the exhaust gas; A catalyst heating unit that heats the catalyst; a control unit that controls the catalyst heating unit so as to heat the catalyst when the exhaust gas is discharged from the working space to the flow path; a pressure sensor that is provided in the working space and that, when it detects a pressure change in the working space, transmits a control signal to the control unit, the control signal indicating that the exhaust gas is discharged from the working space to the distribution path; Equipped with the control unit detects that the exhaust gas is discharged from the working space to the flow path by receiving the control signal from the pressure sensor, and controls the temperature of the catalyst by operating the catalyst heating unit; The adsorbent provided upstream of the catalyst adsorbs the toxic gas discharged from the working space until the catalyst exerts its performance.

2. The method further includes the steps of: The exhaust gas treatment device according to claim 1 , wherein the control unit further controls the adsorbent heating unit so as to heat the adsorbent when the temperature of the catalyst reaches a predetermined temperature.

3. the flow path is provided to divide the exhaust gas discharged from the working space and introduce it into each of the plurality of adsorbers, and to introduce the exhaust gas discharged from each of the adsorbers into the oxidation reactor, an adsorbent heating unit that heats the adsorbent accommodated in the adsorbent is provided for each of the plurality of adsorbers; The exhaust gas treatment device according to claim 2 , wherein the control unit controls each of the one or more adsorbent heating units so as to switch between the one or more adsorbent heating units that heat the adsorbent.

4. The exhaust gas treatment device according to claim 1 , wherein the adsorbent adsorbs acidic gas contained in the toxic gas.

5. The exhaust gas treatment device according to claim 1 , further comprising an oxygen introducing section, provided in the flow path upstream of the oxidation reactor, for introducing a gas containing oxygen into the flow path.

6. The exhaust gas treatment device according to claim 1 , further comprising an exhaust gas heating unit for heating the exhaust gas, the exhaust gas heating unit being disposed in the flow path upstream of the adsorber.

Images