Actuator device

Abstract

An actuator device is provided that can obtain desired driving characteristics and ensure adhesive strength between a support and a metal substrate. [Solution] A metal substrate 3 supported by a wiring board 2 has a first extension 33 and a first connection portion 37 connected to the first extension 33. The first connection portion 37 includes a first region R1 facing a portion 26 of the wiring board 2 in the Z-axis direction, a second region R2 continuing from the first region R1, and a third region R3 continuing from the second region R2. When viewed from the Z-axis direction, the width W2 of the second region R2 in a direction B perpendicular to a connection direction A in which the third region R3 is connected to the second region R2 is greater than the width W3 of the third region R3 in the direction B. A first adhesive member 4 bonding the wiring board 2 and the metal substrate 3 has a first portion disposed between the portion 26 and the first region R1 and a second portion continuing from the first portion, extending to the second region R2, but not to the third region R3.

Description

Technical Field

[0001] The present invention relates to an actuator device.

Background Art

[0002] An actuator device including a support, a metal substrate supported by the support, an adhesive member that adheres the support and the metal substrate, and a vibration element disposed in a main body portion of the metal substrate is known. In such an actuator device, the metal substrate further includes a movable portion, a pair of extending portions extending from the main body portion so that the movable portion is located therebetween, a pair of connecting portions that connect the pair of extending portions and the movable portion, and a pair of connecting portions connected to the pair of extending portions. In some cases, an opposing region of each connecting portion that faces a part of the support is adhered to the part of the support by an adhesive member (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the actuator device as described above, due to the adhesive member reaching the connection region connected to each extending portion among the respective connection portions, the driving characteristics of the actuator device may deviate from the design values. On the other hand, in order to prevent the adhesive member from reaching the connection region of each connection portion, if the amount of the adhesive member is reduced, the adhesive member may not be sufficiently distributed between a part of the support and the opposing region of each connection portion, and the adhesive strength between the support and the metal substrate may decrease.

[0005] An object of the present invention is to provide an actuator device that can obtain desired driving characteristics and ensure the adhesive strength between a support and a metal substrate.

Means for Solving the Problem

[0006] The actuator device of the present invention includes a support, a metal substrate supported by the support, an adhesive member that adheres the support and the metal substrate, and a vibration element disposed in a main body portion of the metal substrate. The metal substrate includes a movable portion, a first extending portion and a second extending portion that extend from the main body portion so that the movable portion is located therebetween, a first connecting portion that connects the first extending portion and the movable portion, a second connecting portion that connects the second extending portion and the movable portion, and a connecting portion connected to at least one of the first extending portion and the second extending portion. The connecting portion includes a first region that faces a part of the support in the thickness direction of the metal substrate, a second region that is continuous from the first region, and a third region that is continuous from the second region and is connected to at least one of the first extending portion and the second extending portion. When viewed from the thickness direction of the metal substrate, the width of the second region in a direction perpendicular to the connection direction in which the third region is connected to the second region is larger than the width of the third region in a direction perpendicular to the connection direction. The adhesive member has a first portion disposed between a part of the support and the first region, and a second portion that is continuous from the first portion, reaches the second region, and does not reach the third region.

[0007] In this actuator device, the first portion of the adhesive member is disposed between a part of the support and the first region of the connecting portion, and the second portion of the adhesive member that is continuous from the first portion reaches the second region of the connecting portion that is continuous from the first region. Thereby, the adhesive member can be sufficiently spread between a part of the support and the first region of the connecting portion, and the adhesive strength between the support and the metal substrate can be ensured. On the other hand, although the second portion of the adhesive member reaches the second region of the connecting portion having a width larger than the width of the third region of the connecting portion, the second portion of the adhesive member does not reach the third region of the connecting portion having a width smaller than the width of the second region of the connecting portion. Thereby, it is possible to suppress deterioration of the vibration characteristics of the connecting portion and obtain desired driving characteristics. Therefore, according to this actuator device, desired driving characteristics can be obtained and the adhesive strength between the support and the metal substrate can be ensured.

[0008] In the actuator device of the present invention, when viewed in the thickness direction of the metal substrate, the area of the first region may be larger than the area of the second region. Thereby, the adhesion strength between the support and the metal substrate can be surely ensured.

[0009] In the actuator device of the present invention, when viewed in the thickness direction of the metal substrate, the area of the first region may be larger than the sum of the areas of the second region and the third region. Thereby, the adhesion strength between the support and the metal substrate can be more surely ensured.

[0010] In the actuator device of the present invention, when viewed in the thickness direction of the metal substrate, the width of the first region in the direction perpendicular to the connection direction may be larger than the width of the second region in the direction perpendicular to the connection direction. Thereby, by gradually increasing the width of the connection portion from the third region toward the first region, it is possible to achieve both ensuring the adhesion strength between the support and the metal substrate and ensuring the desired driving characteristics.

[0011] In the actuator device of the present invention, when viewed in the thickness direction of the metal substrate, the region composed of the first region and the second region has a polygonal shape, and when viewed in the thickness direction of the metal substrate, the second region may constitute one corner of the polygonal shape. Thereby, for example, the second region can be provided more simply as compared with the case where a part of the side portion of the region composed of the first region and the second region is constituted by the second region.

[0012] In the actuator device of the present invention, when viewed in the thickness direction of the metal substrate, the boundary line between the first region and the second region may be curved so as to be convex on the side opposite to the vertex of the corner portion. Thereby, since the distance from the vertex of the corner portion of the second region to the boundary between the first region and the second region can be made uniform, it is possible to surely prevent the adhesive member from reaching the third region.

[0013] In the actuator device of the present invention, the metal substrate has a first connection portion and a second connection portion, each of which is a connection portion. The first connection portion is connected to the first extending portion, and the second connection portion may be connected to the second extending portion. Thereby, compared with the case where one connection portion is connected to both the first extending portion and the second extending portion, desired driving characteristics can be stably obtained.

[0014] In the actuator device of the present invention, the second region and the third region may not face the support in the thickness direction of the metal substrate. Thereby, it is possible to surely avoid the risk that the adhesive member spreads between the support and the second region and reaches the third region.

[0015] In the actuator device of the present invention, the metal substrate further has a connection portion different from the connection portion. The different connection portion is connected to the main body portion, and includes a fourth region facing a portion different from a part of the support in the thickness direction of the metal substrate, a fifth region continuous from the fourth region, and a sixth region continuous from the fifth region and connected to the main body portion. When viewed from the thickness direction of the metal substrate, the width of the fifth region in a direction perpendicular to the connection direction, which is the direction in which the sixth region is connected to the fifth region, is larger than the width of the sixth region in a direction perpendicular to the different connection direction. The adhesive member may further include a third portion disposed between another part of the support and the fourth region, and a fourth portion continuous from the third portion and reaching the fifth region but not reaching the sixth region. Thereby, also in the connection portion different from the above connection portion, the adhesive member can be sufficiently spread between another part of the support and the fourth region of the different connection portion, and deterioration of the vibration characteristics of the different connection portion can be suppressed. Therefore, desired driving characteristics can be surely obtained and the adhesive strength between the support and the metal substrate can be surely ensured.

Advantages of the Invention

[0016] According to the present invention, it is possible to provide an actuator device capable of obtaining desired driving characteristics and ensuring the adhesive strength between the support and the metal substrate.

Brief Description of the Drawings

[0017]

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[0018] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each figure, the same or corresponding parts are denoted by the same reference numerals, and redundant descriptions are omitted. [Configuration of Actuator Device]

[0019] As shown in FIGS. 1 and 2, the actuator device 1 includes a wiring board (support) 2, a metal substrate 3, a first adhesive member (adhesive member) 4, an optical functional unit 5 having an optical surface 51, a driving piezoelectric element (vibrating element) 6, a detection piezoelectric element 7, and a second adhesive member 8. The optical functional unit 5 is provided on the metal substrate 3. The actuator device 1 is housed, for example, in a package (not shown). As an example, the package has side walls, a bottom wall, and a top wall made of a material that transmits light, and has a box shape. For example, in the actuator device 1, when laser light is incident into the package through the top wall, the laser light is reflected by the optical surface 51 of the optical functional unit 5 that is periodically swung via the metal substrate 3 by the driving piezoelectric element 6, and is emitted to the outside through the top wall. The emission direction of the laser light from the package changes periodically and continuously according to the swing of the optical surface 51. That is, in the present embodiment, the actuator device 1 is a light scanning device.

[0020] The wiring board 2 has a mounting surface 2a. An opening 2b that opens to the mounting surface 2a and the surface opposite to the mounting surface 2a is formed in the wiring board 2. The wiring board 2 has, for example, a rectangular frame shape. Examples of the material of the wiring board 2 include silicon, ceramic, quartz, glass, and plastic. The thickness of the wiring board 2 may be a thickness that can ensure sufficient rigidity, for example, 0.8 mm or more. In the present embodiment, the thickness of the wiring board 2 is 1.6 mm. In the following description, the thickness direction of the wiring board 2 is referred to as the Z-axis direction (the thickness direction of the metal substrate), a direction perpendicular to the Z-axis direction is referred to as the X-axis direction, and a direction perpendicular to both the Z-axis direction and the X-axis direction is referred to as the Y-axis direction.

[0021] On the mounting surface 2a of the wiring board 2, a plurality (three in this embodiment) of electrode pads 21, 22, 23 are arranged. The plurality of electrode pads 21, 22, 23 are located on one side in the Y-axis direction with respect to the opening 2b of the wiring board 2 and are arranged along the X-axis direction. A connector 24 is attached to the mounting surface 2a. The connector 24 is a port for inputting and outputting voltage signals and the like to and from each of the driving piezoelectric element 6 and the detecting piezoelectric element 7. The connector 24 is located, for example, on one side in the Y-axis direction with respect to the plurality of electrode pads 21, 22, 23. The connector 24 has a plurality of terminals 25. The connector 24 is electrically connected to the plurality of electrode pads 21, 22, 23 via the plurality of terminals 25 and the wiring of the wiring board 2 and the like.

[0022] The metal substrate 3 is supported by the wiring board 2. The metal substrate 3 is made of, for example, a metal such as an iron-based, stainless steel-based, copper-based, permalloy-based, titanium-based, tungsten-based, or molybdenum-based metal and has a plate shape. The thickness of the metal substrate 3 is, for example, 50 to 500 μm. The first adhesive member 4 adheres the wiring board 2 and the metal substrate 3. The first adhesive member 4 has conductivity. An example of the material of the first adhesive member 4 is an epoxy resin containing Ag particles.

[0023] The metal substrate 3 has a main body portion 31, a movable portion 32, a first extending portion 33, a second extending portion 34, a first connecting portion 35, a second connecting portion 36, a first connecting portion (connecting portion) 37, a second connecting portion (connecting portion) 38, and a third connecting portion (another connecting portion) 39. The movable portion 32, the first extending portion 33, the second extending portion 34, the first connecting portion 35, the second connecting portion 36, the first connecting portion 37, the second connecting portion 38, and the third connecting portion 39 are integrally formed.

[0024] The main body portion 31 is a portion where the driving piezoelectric element 6 is fixed (arranged). The main body portion 31 is located within the opening 2b of the wiring board 2 when viewed from the Z-axis direction. The movable portion 32 is a portion where the optical function portion 5 is arranged. The movable portion 32 is located on the other side in the Y-axis direction with respect to the main body portion 31.

[0025] The first extending portion 33 and the second extending portion 34 extend from the main body portion 31 such that the movable portion 32 is positioned therebetween. In the present embodiment, the movable portion 32 is positioned in the middle of the first extending portion 33 and the second extending portion 34. The first extending portion 33 and the second extending portion 34 extend parallel to each other, for example, along the Y-axis direction. In the present embodiment, the first extending portion 33 has the same shape as the second extending portion 34.

[0026] The first connecting portion 35 extends along the X-axis direction between the first extending portion 33 and the movable portion 32. One end portion of the first connecting portion 35 is connected to the first extending portion 33, and the other end portion of the first connecting portion 35 is connected to the movable portion 32. That is, the first connecting portion 35 connects the first extending portion 33 and the movable portion 32.

[0027] The second connecting portion 36 extends along the X-axis direction between the second extending portion 34 and the movable portion 32. One end portion of the second connecting portion 36 is connected to the second extending portion 34, and the other end portion of the second connecting portion 36 is connected to the movable portion 32. That is, the second connecting portion 36 connects the second extending portion 34 and the movable portion 32.

[0028] In the present embodiment, the first connecting portion 35 and the second connecting portion 36 are positioned on a single straight line along the X-axis direction. From the positional relationship between the first extending portion 33 and the second extending portion 34 and the movable portion 32 described above, the length of the first connecting portion 35 in the X-axis direction is the same as the length of the second connecting portion 36 in the X-axis direction. In the present embodiment, the first connecting portion 35 has the same shape as the second connecting portion 36.

[0029] The movable part 32, the first extending part 33, the second extending part 34, the first connecting part 35, and the second connecting part 36 are located within the opening 2b of the wiring board 2 when viewed from the Z-axis direction. The first connecting part 35 and the second connecting part 36 function as torsion bars that elastically deform to twist in response to the deformation (displacement) of the first extending part 33 and the second extending part 34. The movable part 32 is swung around an axis along the X-axis direction in response to the elastic deformation of the first connecting part 35 and the second connecting part 36. That is, the movable part 32 is swingably supported by the first extending part 33 and the second extending part 34 via the first connecting part 35 and the second connecting part 36.

[0030] The optical function part 5 is arranged on the surface of the movable part 32 opposite to the opening 2b. The optical function part 5 has, for example, a disc shape. The optical function part 5 is attached to the movable part 32 such that the optical surface 51 faces the side opposite to the movable part 32. The optical surface 51 is located in the middle of the first extending part 33 and the second extending part 34 in the X-axis direction. In the present embodiment, each of the metal substrate 3 and the optical surface 51 has a shape that is line-symmetric with respect to a straight line passing through the center of the optical surface 51 along the Y-axis direction. As an example, the optical function part 5 is made of a semiconductor material such as silicon or glass, and the optical surface 51 is constituted by a reflective film formed on the surface of the optical function part 5 opposite to the movable part 32. That is, the optical surface 51 is a mirror surface (reflective surface). Note that the reflective film of the optical function part 5 can be omitted. In that case, the opposite surface itself may be used as the optical surface 51.

[0031] The first connection part 37 is connected to the first extending part 33. The first connection part 37 is located on the other side of the first extending part 33 in the Y-axis direction. In the first connection part 37, the part on the other side in the Y-axis direction faces a part of the wiring board 2. A first adhesive member 4 is arranged between the part on the other side of the first connection part 37 and the part of the wiring board 2. Note that an electrode pad (not shown) electrically connected to the electrode pad 23 may be arranged on the part of the wiring board 2 so as to have the same potential as the electrode pad 23.

[0032] The second connection portion 38 is connected to the second extending portion 34. The second connection portion 38 is located on the other side in the Y-axis direction with respect to the second extending portion 34. In the second connection portion 38, the portion on the other side in the Y-axis direction faces a part of the wiring board 2. A first adhesive member 4 is disposed between the portion on the other side of the second connection portion 38 and the part of the wiring board 2. Note that an electrode pad (not shown) electrically connected to the electrode pad 23 may be disposed on the part of the wiring board 2 so as to have the same potential as the electrode pad 23. In the present embodiment, the first connection portion 37 and the second connection portion 38 are in a line-symmetrical relationship with respect to a straight line passing through the center of the optical surface 51 along the Y-axis direction.

[0033] The third connection portion 39 is connected to the main body portion 31. The third connection portion 39 is located on one side in the Y-axis direction with respect to the main body portion 31. In the third connection portion 39, the portion on one side in the Y-axis direction faces a part of the wiring board 2 (the part where the electrode pad 23 is disposed). A first adhesive member 4 is disposed between the portion on one side of the third connection portion 39 and the part of the wiring board 2.

[0034] The driving piezoelectric element 6 is an element for generating a plate wave in the metal substrate 3 to drive the actuator device 1. The driving piezoelectric element 6 is disposed on the mounting surface 31a on the side opposite to the opening 2b in the main body portion 31. The center of the driving piezoelectric element 6 in the X-axis direction coincides with the center of the movable portion 32 in the X-axis direction (that is, the center of the optical surface 51 in the X-axis direction). The driving piezoelectric element 6 includes a driving piezoelectric body 61, a first electrode 62, and a second electrode (not shown).

[0035] The driving piezoelectric body 61 includes a first main surface 61a and a second main surface (not shown). The first main surface 61a is the main surface on the side opposite to the mounting surface 31a of the driving piezoelectric body 61. A first electrode 62 is disposed on the first main surface 61a. The second main surface is the main surface on the mounting surface 31a side of the driving piezoelectric body 61. A second electrode is disposed on the second main surface. Each of the first electrode 62 and the second electrode is, for example, a Ni / Au layer. In the Ni / Au layer, the Ni layer is disposed on the first main surface 61a, the Au layer is disposed on the Ni layer, and the thickness of the Ni layer is larger than the thickness of the Au layer. Each of the driving piezoelectric body 61, the first electrode 62, and the second electrode has, for example, a rectangular plate shape. The driving piezoelectric body 61 is electrically connected to the first electrode 62 by being joined to the first electrode 62. The driving piezoelectric body 61 is electrically connected to the second electrode by being joined to the second electrode. A second adhesive member 8 is disposed between the second electrode and the main body portion 31. The second adhesive member 8 adheres the driving piezoelectric body 61 and the metal substrate 3. The second adhesive member 8 has conductivity. An example of the material of the second adhesive member 8 is an epoxy resin containing Ag particles.

[0036] The piezoelectric element 7 for detection is an element for detecting the swing angle of the optical surface 51. The piezoelectric element 7 for detection is disposed on the surface 62a. The surface 62a is the main surface on the side opposite to the piezoelectric body 61 for driving in the first electrode 62. The center of the piezoelectric element 7 for detection in the X-axis direction coincides with the center of the piezoelectric element 6 for driving in the X-axis direction. The piezoelectric element 7 for detection includes a piezoelectric body 71 for detection, a third electrode 72, and a fourth electrode (not shown). The piezoelectric body 71 for detection includes a third main surface 71a and a fourth main surface (not shown). The third main surface 71a is the main surface on the side opposite to the first electrode 62 in the piezoelectric body 71 for detection. The third electrode 72 is disposed on the third main surface 71a. The fourth main surface is the main surface on the side of the first electrode 62 in the piezoelectric body 71 for detection. The fourth electrode is disposed on the fourth main surface. Each of the third electrode 72 and the fourth electrode is, for example, a Ni / Au layer. Each of the piezoelectric body 71 for detection, the third electrode 72, and the fourth electrode has, for example, a rectangular plate shape. The piezoelectric body 71 for detection is electrically connected to the third electrode 72 by being joined to the third electrode 72. The piezoelectric body 61 for driving is electrically connected to the fourth electrode by being joined to the fourth electrode. A second adhesive member 8 is disposed between the fourth electrode and the first electrode 62. The second adhesive member 8 adheres the piezoelectric body 71 for detection and the piezoelectric body 61 for driving.

[0037] Here, the electrical connection relationship among the wiring substrate 2, the metal substrate 3, the piezoelectric element 6 for driving, and the piezoelectric element 7 for detection will be described. As shown in FIG. 2, the first electrode 62 of the piezoelectric element 6 for driving is electrically connected to the electrode pad 21 via the wire 11. The electrode pad 21 is electrically connected to the terminal 25 of the connector 24 via the wiring of the wiring substrate 2. That is, the first electrode 62 of the piezoelectric element 6 for driving is electrically connected to the connector 24 via the wire 11, the electrode pad 21, and the wiring of the wiring substrate 2.

[0038] The second electrode of the piezoelectric element 6 for driving is electrically connected to the metal substrate 3 via a second adhesive member 8 disposed between the second electrode and the main body 31. The third connection portion 39 of the metal substrate 3 is electrically connected to the electrode pad 23 via a first adhesive member 4 disposed between the third connection portion 39 and the electrode pad 23. The electrode pad 23 is electrically connected to the terminal 25 of the connector 24 via the wiring of the wiring substrate 2. That is, the second electrode of the piezoelectric element 6 for driving is electrically connected to the connector 24 via the second adhesive member 8, the metal substrate 3, the first adhesive member 4, the electrode pad 23, and the wiring of the wiring substrate 2.

[0039] The third electrode 72 of the piezoelectric body 71 for detection is electrically connected to the electrode pad 22 via the wire 12. The electrode pad 22 is electrically connected to the terminal 25 of the connector 24 via the wiring of the wiring substrate 2. That is, the third electrode 72 of the piezoelectric body 71 for detection is electrically connected to the connector 24 via the wire 12, the electrode pad 22, and the wiring of the wiring substrate 2.

[0040] The fourth electrode of the piezoelectric element 7 for detection is electrically connected to the first electrode 62 of the piezoelectric element 6 for driving via a second adhesive member 8 disposed between the fourth electrode and the first electrode 62 of the piezoelectric element 6 for driving. That is, the fourth electrode of the piezoelectric element 7 for detection is electrically connected to the connector 24 via the second adhesive member 8, the first electrode 62 of the piezoelectric element 6 for driving, the wire 11, the electrode pad 21, and the wiring of the wiring substrate 2.

[0041] With the electrical connection relationship as described above, the actuator device 1 is driven as follows, for example. Specifically, with the first electrode 62 of the driving piezoelectric element 6 and the fourth electrode of the detection piezoelectric element 7 connected to the reference potential (e.g., ground potential) via the wire 11, the electrode pad 21, the wiring of the wiring board 2, and the connector 24, a driving voltage signal is input from the outside of the actuator device 1 to the second electrode of the driving piezoelectric element 6 via the connector 24, the wiring of the wiring board 2, the electrode pad 23, the first adhesive member 4, and the metal substrate 3. Thereby, the driving piezoelectric element 6 deforms and / or vibrates, and periodic plate waves are generated in the main body portion 31. Due to the generation of this periodic plate wave, torsional vibration (torsional resonance) is induced in the first connecting portion 35 and the second connecting portion 36, and the movable portion 32 and the optical surface 51 swing. That is, in the actuator device 1, while the torsional resonance system of the first connecting portion 35, the second connecting portion 36, the movable portion 32, and the optical surface 51 and the driving piezoelectric element 6 are arranged at separated positions, a lamb wave resonance structure is adopted, so that torsional resonance is generated with high driving efficiency. On the other hand, a voltage signal corresponding to the change in the angle due to the swing of the movable portion 32 and the optical surface 51 is output from the outside of the actuator device 1 via the wire 12, the electrode pad 22, the wiring of the wiring board 2, and the connector 24 from the third electrode 72 of the detection piezoelectric body 71, and the swing angle of the optical surface 51 is detected. Note that the actuator device 1 includes a piezoelectric unit 10. The piezoelectric unit 10 is composed of the metal substrate 3, the driving piezoelectric element 6, the detection piezoelectric element 7, and the second adhesive member 8 described above. [Configuration of Wiring Board, Metal Substrate, and First Adhesive Member]

[0042] As shown in FIG. 3, the first connection portion 37 includes a first region R1, a second region R2, and a third region R3. The first region R1 is a region facing the portion 26 in the Z-axis direction. The portion 26 is a part of the wiring board 2. The second region R2 is a region continuous from the first region R1. The third region R3 is a region continuous from the second region R2 and connected to the first extending portion 33. The "region connected to the first extending portion 33" includes both a region where the third region R3 is directly connected to the first extending portion 33 (i.e., without passing through another part) and a region where the third region R3 is indirectly connected to the first extending portion 33 (i.e., through another part). That is, the third region R3 is not limited to the entire portion between the first extending portion 33 and the second region R2 in the first connection portion 37, but is a region continuously connected to the second region R2. In the present embodiment, the second region R2 and the third region R3 do not face the wiring board 2 in the Z-axis direction.

[0043] In the following description, when viewed from the Z-axis direction, the direction in which the third region R3 is connected to the second region R2 is defined as the connection direction A, and the direction perpendicular to the connection direction A is defined as the direction B. In the present embodiment, the connection direction A intersects each of the X-axis direction and the Y-axis direction when viewed from the Z-axis direction. In the present embodiment, when viewed from the Z-axis direction, the region composed of the first region R1 and the second region R2 has a polygonal shape, and the second region R2 constitutes one corner K of the polygon. As an example, when viewed from the Z-axis direction, the region composed of the first region R1 and the second region R2 has a substantially rectangular shape, and the boundary line between the first region R1 and the second region R2 is curved so as to be convex on the side opposite to the vertex of the corner K. When viewed from the Z-axis direction, the second region R2 has, for example, a fan shape. As an example, when viewed from the Z-axis direction, the third region R3 has a rectangular shape with the connection direction A as the longitudinal direction, and is connected to the portion on the outermost side in the X-axis direction and the outermost side in the Y-axis direction in the second region R2.

[0044] When viewed from the Z-axis direction, the width W2 of the second region R2 in the direction B is greater than the width W3 of the third region R3 in the direction B. "When viewed from the Z-axis direction, the width W2 of the second region R2 in the direction B is greater than the width W3 of the third region R3 in the direction B" means that when viewed from the Z-axis direction, excluding the boundary portion between the second region R2 and the third region R3, the minimum value of the width W2 of the second region R2 in the direction B is greater than the maximum value of the width W3 of the third region R3 in the direction B.

[0045] Note that with respect to the first region R1 facing the portion 26 of the wiring board 2 in the Z-axis direction, the second region R2 includes i) a region not facing the wiring board 2 in the Z-axis direction, or ii) a region where the distance to the wiring board 2 in the Z-axis direction is greater than the distance between the first region R1 and the wiring board 2 in the Z-axis direction. In the present embodiment, the second region R2 is i) a region not facing the wiring board 2 in the Z-axis direction.

[0046] Also, the boundary between the second region R2 and the third region R3 includes i) the "line along the direction B" when the width of the first connection portion 37 in the direction B changes discontinuously with the "line along the direction B" as the boundary, ii) the "line along the direction B" when the rate of change of the width of the first connection portion 37 in the direction B changes discontinuously with the "line along the direction B" as the boundary, or iii) the "line along the direction B" when the width of the first connection portion 37 in the direction B exceeds 1.1 times the minimum value of the width of the first connection portion 37 in the direction B with the "line along the direction B" as the boundary. In the present embodiment, the boundary between the second region R2 and the third region R3 is iii) the "line along the direction B" when the width of the first connection portion 37 in the direction B exceeds 1.1 times the minimum value of the width of the first connection portion 37 in the direction B with the "line along the direction B" as the boundary. Note that the third region R3 is a region including at least a portion having the minimum width of the first connection portion 37 in the direction B, and the second portion 42 of the first adhesive member 4 does not exceed at least the line where the width of the first connection portion 37 in the direction B is the minimum.

[0047] When viewed from the Z-axis direction, the width W1 of the first region R1 in the direction B is larger than the width W2 of the second region R2 in the direction B. "When viewed from the Z-axis direction, the width W1 of the first region R1 in the direction B is larger than the width W2 of the second region R2 in the direction B" means that when viewed from the Z-axis direction, the maximum value of the width W1 of the first region R1 in the direction B is larger than the maximum value of the width W2 of the second region R2 in the direction B. Thus, when viewed from the Z-axis direction, the width of the first connection portion 37 in the direction B gradually increases as it goes from the third region R3 to the first region R1.

[0048] In this embodiment, when viewed from the Z-axis direction, the area of the first region R1 is larger than the area of the second region R2, and the area of the second region R2 is larger than the area of the third region R3. Further, when viewed from the Z-axis direction, the area of the first region R1 is larger than the sum of the areas of the second region R2 and the third region R3. The rigidity of the second region R2 is larger than the rigidity of the third region R3. The rigidity of the first region R1 is larger than the rigidity of the second region R2.

[0049] As shown in FIG. 4, the first adhesive member 4 adheres the portion 26 of the wiring board 2 and the first connection portion 37. The first adhesive member 4 has a first portion 41 and a second portion 42. The first portion 41 is the portion of the first adhesive member 4 disposed between the portion 26 and the first region R1. The second portion 42 is the portion of the first adhesive member 4 that is continuous from the first portion 41, reaches the second region R2, and does not reach the third region R3. That is, the second portion 42 is in contact with the second region R2 and not in contact with the third region R3. As an example, the second portion 42 is in contact with the side surfaces of the second region R2 and the portion 26, and the surface of the second portion 42 opposite to the second region R2 is exposed to the space. That is, the first adhesive member 4 is in contact with each of the first region R1 and the second region R2 and not in contact with the third region R3. Thus, in the first connection portion 37, since the second region R2 is provided between the first region R1 and the third region R3, in the metal substrate 3, the first adhesive member 4 protruding from the first region R1 stays in the second region R2, and the first adhesive member 4 does not contact the third region R3 connected to the first extending portion 33.

[0050] Similar to the first connection portion 37, the second connection portion 38 also includes a first region R1, a second region R2, and a third region R3. The first region R1 of the second connection portion 38 is a region facing a part of the wiring board 2 in the Z-axis direction. The second region R2 of the second connection portion 38 is a region continuous from the first region R1. The third region R3 of the second connection portion 38 is a region continuous from the second region R2 and connected to the second extending portion 34. The first adhesive member 4 adheres the above-mentioned portion of the wiring board 2 and the second connection portion 38. The first adhesive member 4 that adheres the above-mentioned portion of the wiring board 2 and the second connection portion 38 also has a first portion 41 and a second portion 42, similar to the first adhesive member 4 that adheres the portion 26 and the first connection portion 37. The configuration of the second connection portion 38 and the first adhesive member 4 is the same as the configuration of the first connection portion 37 and the first adhesive member 4 (in a line-symmetric relationship with respect to a straight line passing through the center of the optical surface 51 along the Y-axis direction).

[0051] As shown in FIG. 5, the third connection portion 39 includes a fourth region R4, a fifth region R5, and a sixth region R6. The fourth region R4 is a region that faces the portion 28 in the Z-axis direction. The portion 28 is a part different from the portion 26 of the wiring board 2. The fifth region R5 is a region continuous from the fourth region R4. The sixth region R6 is a region continuous from the fifth region R5 and connected to the main body portion 31. The "region connected to the main body portion 31" includes both a region where the sixth region R6 is directly connected to the main body portion 31 (i.e., without passing through another part) and a region where the sixth region R6 is indirectly connected to the main body portion 31 (i.e., through another part). That is, the sixth region R6 is not necessarily the entire portion between the main body portion 31 and the fifth region R5 in the third connection portion 39, but is a region continuously connected to the fifth region R5.

[0052] In the following description, when viewed from the Z-axis direction, the direction in which the sixth region R6 is connected to the fifth region R5 (another connection direction) is defined as the connection direction C, and the direction perpendicular to the connection direction C is defined as the direction D. In the present embodiment, when viewed from the Z-axis direction, the region composed of the fourth region R4 and the fifth region R5 has a polygonal shape, and the fifth region R5 constitutes a part of one side portion of the polygon. As an example, when viewed from the Z-axis direction, the region composed of the fourth region R4 and the fifth region R5 has a rectangular shape, and the boundary line between the fourth region R4 and the fifth region R5 is curved so as to be convex on the side opposite to the above side portion. When viewed from the Z-axis direction, the fifth region R5 has, for example, a semi-elliptical shape. When viewed from the Z-axis direction, the sixth region R6 has, for example, a substantially rectangular shape and is connected to the central portion in the X-axis direction and the other most side portion in the Y-axis direction in the second region R2.

[0053] When viewed from the Z-axis direction, the width W5 of the fifth region R5 in the direction D is larger than the width W6 of the sixth region R6 in the direction D. "When viewed from the Z-axis direction, the width W5 of the fifth region R5 in the direction D is larger than the width W6 of the sixth region R6 in the direction D" means that when viewed from the Z-axis direction, excluding the boundary portion between the fifth region R5 and the sixth region R6, the minimum value of the width W5 of the fifth region R5 in the direction D is larger than the maximum value of the width W6 of the sixth region R6 in the direction D.

[0054] Note that with respect to the fourth region R4 facing the portion 28 of the wiring board 2 in the Z-axis direction, the fifth region R5 includes i) a region not facing the wiring board 2 in the Z-axis direction, or ii) a region where the distance to the wiring board 2 in the Z-axis direction is larger than the distance between the fourth region R4 and the wiring board 2 in the Z-axis direction. In this embodiment, the fifth region R5 is i) a region not facing the wiring board 2 in the Z-axis direction.

[0055] Also, the boundary between the fifth region R5 and the sixth region R6 includes i) the "line along the direction D" when the width of the third connection portion 39 in the direction D changes discontinuously with the "line along the direction D" as the boundary, ii) the "line along the direction D" when the rate of change of the width of the third connection portion 39 in the direction D changes discontinuously with the "line along the direction D" as the boundary, or iii) the "line along the direction D" when the width of the third connection portion 39 in the direction D exceeds 1.1 times the minimum value of the width of the third connection portion 39 in the direction D with the "line along the direction D" as the boundary. In this embodiment, the boundary between the fifth region R5 and the sixth region R6 is iii) the "line along the direction D" when the width of the third connection portion 39 in the direction D exceeds 1.1 times the minimum value of the width of the third connection portion 39 in the direction D with the "line along the direction D" as the boundary. Note that the sixth region R6 is a region including at least the portion having the minimum width of the third connection portion 39 in the direction D, and the fourth portion 44 of the first adhesive member 4 does not exceed at least the line where the width of the third connection portion 39 in the direction D is the minimum.

[0056] When viewed from the Z-axis direction, the width W4 of the portion located on one side in the Y-axis direction of the fourth region R4 in the direction D is larger than the width W5 of the fifth region R5 in the direction D. "When viewed from the Z-axis direction, the width W4 of the portion located on one side in the Y-axis direction of the fourth region R4 in the direction D is larger than the width W5 of the fifth region R5 in the direction D" means that when viewed from the Z-axis direction, the maximum value of the width W4 in the direction D is larger than the maximum value of the width W5 of the fifth region R5 in the direction D. Thus, when viewed from the Z-axis direction, the width of the third connection portion 39 in the direction D gradually increases from the sixth region R6 toward the fourth region R4.

[0057] In this embodiment, when viewed from the Z-axis direction, the area of the fourth region R4 is larger than the area of the fifth region R5. Further, when viewed from the Z-axis direction, the area of the fourth region R4 is larger than the sum of the areas of the fifth region R5 and the sixth region R6. The rigidity of the fifth region R5 is larger than the rigidity of the sixth region R6. The rigidity of the fourth region R4 is larger than the rigidity of the fifth region R5.

[0058] As shown in FIG. 6, in the present embodiment, the fifth region R5 and the sixth region R6 do not face the wiring board 2 in the Z-axis direction. The first adhesive member 4 adheres a portion (another portion) 28 of the wiring board 2 and the third connection portion 39. The first adhesive member 4 has a third portion 43 and a fourth portion 44. The third portion 43 is a portion of the first adhesive member 4 disposed between the portion 28 and the fourth region R4. The fourth portion 44 is a portion of the first adhesive member 4 that is continuous from the third portion 43 and reaches the fifth region R5 but does not reach the sixth region R6. That is, the fourth portion 44 is in contact with the fifth region R5 and not in contact with the sixth region R6. As an example, the fourth portion 44 is in contact with the side surfaces of the fifth region R5 and the portion 28, and the surface of the fourth portion 44 opposite to the fifth region R5 is exposed to the space. That is, the first adhesive member 4 is in contact with each of the fourth region R4 and the fifth region R5 and not in contact with the sixth region R6. Thus, in the third connection portion 39, the provision of the fifth region R5 between the fourth region R4 and the sixth region R6 causes the first adhesive member 4 protruding from the fourth region R4 to stay in the fifth region R5 in the metal substrate 3, and the first adhesive member 4 is not in contact with the sixth region R6 connected to the main body portion 31. [Operation and Effect]

[0059] In the actuator device 1, at the first connection portion 37, the first portion 41 of the first adhesive member 4 is disposed between the portion 26 of the wiring board 2 and the first region R1, and the second portion 42 of the first adhesive member 4 continuous from the first portion 41 reaches the second region R2 continuous from the first region R1. Thereby, the first adhesive member 4 can be sufficiently spread between the portion 26 of the wiring board 2 and the first region R1, and the adhesive strength between the wiring board 2 and the metal substrate 3 can be ensured. Similarly for the second connection portion 38, the first adhesive member 4 can be sufficiently spread between a part of the wiring board 2 and the first region R1, and the adhesive strength between the wiring board 2 and the metal substrate 3 can be ensured. On the other hand, at the first connection portion 37, although the second portion 42 of the first adhesive member 4 reaches the second region R2 having a width W2 larger than the width W3 of the third region R3, the second portion 42 of the first adhesive member 4 does not reach the third region R3 having a width W3 smaller than the width W2 of the second region R2. Thereby, it is possible to suppress deterioration of the vibration characteristics of the first connection portion 37 and obtain desired driving characteristics. Similarly for the second connection portion 38, it is possible to suppress deterioration of the vibration characteristics of the second connection portion 38 and obtain desired driving characteristics. Therefore, according to the actuator device 1, desired driving characteristics can be obtained and the adhesive strength between the wiring board 2 and the metal substrate 3 can be ensured.

[0060] For example, in the configuration of a conventional actuator device in which each connection part includes a facing region facing a part of a wiring board and a vibration region continuous with the facing region and connected to an extending part, the following problems existed. That is, in the conventional actuator device, the adhesive member reaches a vibration region that easily affects the resonance mode of the metal substrate (that is, has relatively low rigidity and is easy to vibrate), and the resonance frequency in the resonance mode of the metal substrate changes greatly from the design value depending on the amount and location where the adhesive member protrudes from the vibration region. For example, even if the resonance frequency in the resonance mode of the main body part changes depending on the amount and location where the adhesive member protrudes from the vibration region, the resonance frequency in the resonance mode of the movable part does not change. However, the driving voltage for obtaining a desired deflection angle on the optical surface is affected by the ratio between the resonance frequency in the resonance mode of the main body part and the resonance frequency in the resonance mode of the movable part. Therefore, there was a risk that the desired driving characteristics could not be obtained due to the adhesive member reaching the vibration region with relatively low rigidity. On the other hand, according to the actuator device 1, in each of the first connection part 37 and the second connection part 38, since the width W2 of the second region R2 is larger than the width W3 of the third region R3, the rigidity of the third region R3 is relatively lowered, and the third region R3 can be selectively vibrated. Therefore, regardless of the amount and location where the first adhesive member 4 protrudes from the second region R2, the driving characteristics of the actuator device 1 can be stably obtained.

[0061] In each of the first connection part 37 and the second connection part 38, when viewed from the Z-axis direction, the area of the first region R1 is larger than the area of the second region R2. Thereby, the adhesive strength between the wiring board 2 and the metal substrate 3 can be surely ensured.

[0062] In each of the first connection part 37 and the second connection part 38, when viewed from the Z-axis direction, the area of the first region R1 is larger than the sum of the areas of the second region R2 and the third region R3. Thereby, the adhesive strength between the wiring board 2 and the metal substrate 3 can be more surely ensured.

[0063] In each of the first connection portion 37 and the second connection portion 38, when viewed from the Z-axis direction, the width W1 of the first region R1 in the direction B perpendicular to the connection direction A is larger than the width W2 of the second region R2 in the direction B. Thereby, as going from the third region R3 toward the first region R1, by gradually increasing the width of the first connection portion 37, it is possible to achieve both ensuring the adhesion strength between the wiring substrate 2 and the metal substrate 3 and ensuring the desired driving characteristics.

[0064] In each of the first connection portion 37 and the second connection portion 38, when viewed from the Z-axis direction, the region composed of the first region R1 and the second region R2 has a polygonal shape, and when viewed from the Z-axis direction, the second region R2 constitutes one corner portion K of the polygon. Thereby, for example, the second region R2 can be provided more simply as compared with the case where a part of the side portion of the region composed of the first region R1 and the second region R2 is constituted by the second region R2.

[0065] In each of the first connection portion 37 and the second connection portion 38, when viewed from the Z-axis direction, the boundary line between the first region R1 and the second region R2 is curved so as to be convex on the side opposite to the vertex of the corner portion K. Thereby, since the distance from the vertex of the corner portion K of the second region R2 to the boundary between the first region R1 and the second region R2 can be made uniform, it is possible to surely prevent the first adhesive member 4 from reaching the third region R3.

[0066] In each of the first connection portion 37 and the second connection portion 38, the first connection portion 37 is connected to the first extending portion 33, and the second connection portion 38 is connected to the second extending portion 34. Thereby, as compared with the case where one connection portion is connected to both the first extending portion 33 and the second extending portion 34, the desired driving characteristics can be stably obtained.

[0067] In each of the first connection portion 37 and the second connection portion 38, the second region R2 and the third region R3 do not face the wiring substrate 2 in the Z-axis direction. Thereby, it is possible to surely avoid the risk that the first adhesive member 4 spreads between the wiring substrate 2 and the second region R2 and reaches the third region R3.

[0068] The third connection part 39 is connected to the main body part 31, and includes a fourth region R4 facing the part 28 of the wiring board 2 in the Z-axis direction, a fifth region R5 continuous from the fourth region R4, and a sixth region R6 continuous from the fifth region R5 and connected to the main body part 31. When viewed from the Z-axis direction, the width W5 of the fifth region R5 in the direction D perpendicular to the connection direction C is larger than the width W6 of the sixth region R6 in the direction D. The first adhesive member 4 further has a third part 43 disposed between the part 28 and the fourth region R4, and a fourth part 44 continuous from the third part 43, reaching the fifth region R5 and not reaching the sixth region R6. Thereby, also in the third connection part 39, the first adhesive member 4 can be sufficiently spread between the part 28 and the fourth region R4 of the third connection part 39, and deterioration of the vibration characteristics of the third connection part 39 can be suppressed. Therefore, desired driving characteristics can be surely obtained and the adhesive strength between the wiring board 2 and the metal substrate 3 can be surely ensured. [Modification example]

[0069] The present invention is not limited to the above-described embodiment. For example, in each of the first connection part 37 and the second connection part 38, the configurations of the first region R1, the second region R2, and the third region R3 are not limited to those of the above-described embodiment. For example, when viewed from the Z-axis direction, the area of the first region R1 may be equal to or smaller than the area of the second region R2, and the area of the second region R2 may be equal to or smaller than the area of the third region R3. Further, when viewed from the Z-axis direction, the area of the first region R1 may be equal to or smaller than the sum of the areas of the second region R2 and the third region R3.

[0070] Also, for example, in each of the first connection portion 37 and the second connection portion 38, the first region R1, the second region R2, and the third region R3 may have a shape different from that of the above embodiment. For example, the third region R3 may be curved. In that case, the connection direction A is the tangential direction at the position closest to the second region R2 among the tangential directions at each position of the axis of the third region R3 when viewed from the Z axis direction. Also, the example shown in FIG. 7 is different from the above embodiment in that the second region R2 of the first connection portion 37 has a rectangular shape when viewed from the Z axis direction. When viewed from the Z axis direction, the second region R2 has a substantially rectangular shape with the X axis direction as the longitudinal direction. In the example shown in FIG. 7, the second region R2 is i) a region that does not face the wiring board 2 in the Z axis direction. In the example shown in FIG. 7, the boundary between the second region R2 and the third region R3 is iii) the "line along direction B" where the width of the first connection portion 37 in direction B exceeds 1.1 times the minimum width of the first connection portion 37 in direction B at the boundary of the "line along direction B."

[0071] Also, in the first connection portion 37, the third region R3 may be indirectly connected to the first extending portion 33, and in the second connection portion 38, the third region R3 may be indirectly connected to the second extending portion 34. Also, in each of the first connection portion 37 and the second connection portion 38, the direction and position in which the third region R3 is connected to the second region R2 may be different from the direction and position in the above-described embodiment. In the examples shown in FIGS. 8 and 9, the third region R3 of the first connection portion 37 is indirectly connected to the first extending portion 33. In the examples shown in FIGS. 8 and 9, the first connection portion 37 further includes a connecting portion 371 that connects the third region R3 of the first connection portion 37 and the first extending portion 33. The connecting portion 371 extends, for example, along the X-axis direction. In the examples shown in FIGS. 8 and 9, the connection direction A is, for example, a direction parallel to the Y-axis direction when viewed from the Z-axis direction. In the example shown in FIG. 8, the third region R3 is connected to a portion on the other most side in the X-axis direction and the one most side in the Y-axis direction in the second region R2. In the example shown in FIG. 9, the third region R3 is connected to a portion at the center in the X-axis direction and the one most side in the Y-axis direction in the second region R2. In the examples shown in FIGS. 8 and 9, the second region R2 is i) a region that does not face the wiring board 2 in the Z-axis direction. In the examples shown in FIGS. 8 and 9, the boundary between the second region R2 and the third region R3 is i) the "line along direction B" when the width of the first connection portion 37 in direction B changes discontinuously with the "line along direction B" as the boundary. Also, in the example shown in FIG. 10, the third region R3 is connected to a portion on the one most side in the X-axis direction and the one most side in the Y-axis direction in the second region R2 along a connection direction A parallel to the X-axis direction when viewed from the Z-axis direction. In the example shown in FIG. 10, the boundary between the second region R2 and the third region R3 is ii) the "line along direction B" when the change rate of the width of the first connection portion 37 in direction B changes discontinuously with the "line along direction B" as the boundary. Note that in the example shown in FIG. 10, the illustration of the wiring board 2 is omitted.

[0072] In the above-described embodiment, the connection portions connected to at least one of the first extending portion 33 and the second extending portion 34 are constituted by the first connection portion 37 and the second connection portion 38. However, the configuration of the connection portion is not limited to the configuration of the above-described embodiment. For example, in the example shown in FIG. 11, the first connection portion 37 is connected to both the first extending portion 33 and the second extending portion 34 via the connecting portion 371. That is, in the example shown in FIG. 11, only the first connection portion 37 constitutes the connection portion, and the metal substrate 3 does not have the second connection portion 38. In the example shown in FIG. 11, the boundary between the second region R2 and the third region R3 is the "line along the direction B" when the width of the first connection portion 37 in the direction B changes discontinuously with the "line along the direction B" as the boundary. In the example shown in FIG. 11, the illustration of the wiring substrate 2 is omitted.

[0073] In each of the first connection portion 37 and the second connection portion 38, each of the second region R2 and the third region R3 may face a part of the wiring substrate 2. When the second region R2 faces a part of the wiring substrate 2, for example, the second portion 42 of the first adhesive member 4 may reach the wiring substrate 2. In the example shown in FIG. 12, the second region R2 faces a part 261 which is a part of the wiring substrate 2, and the second portion 42 reaches the part 261. The part 261 is continuous with the part 26 in the wiring substrate 2. The part 261 has a surface 261a on the side of the metal substrate 3. The surface 261a is located on the side opposite to the metal substrate 3 with respect to the mounting surface 2a in the Z-axis direction. The second region R2 faces the part 261, and the third region R3 does not face the part 261. As an example, the second portion 42 is in contact with the second region R2, the side surface of the part 26, and the surface 261a of the part 261. It is preferable that the second portion 42 does not reach the entire area between the second region R2 and the part 261. In the example shown in FIG. 12, the second region R2 is a region where the distance to the wiring substrate 2 in the Z-axis direction is larger than the distance between the first region R1 and the wiring substrate 2 in the Z-axis direction. The second portion 42 only needs not to reach the third region R3. For example, in the X-axis direction and the Y-axis direction, the second portion 42 may reach the third region R3 side from the part 261 and face the third region R3 via a space.

[0074] The wiring board 2 is not limited to the shape of the above embodiment. For example, instead of the opening, the wiring board 2 may have a recess in the central portion that is recessed on the side opposite to the metal substrate 3 with respect to the mounting surface 2a. In that case, each of the second region R2 and the third region R3 may face the recess of the wiring board 2. Further, for example, instead of the opening, the wiring board 2 may have a plurality of pillar portions. In that case, each of the second region R2 and the third region R3 may face the wiring board 2. Further, in the above embodiment, the wiring board 2 that supports the metal substrate 3 was exemplified, but the metal substrate 3 may be supported by a support body composed of, for example, a plurality of members.

[0075] The third region R3 does not have to include the fourth region R4, the fifth region R5, and the sixth region R6. For example, instead of the fourth region R4, the fifth region R5, and the sixth region R6, the third region R3 may include a facing region that faces a part of the wiring board 2, and a connection region that is continuous with the facing region and is connected to the main body portion.

[0076] In the above embodiment, the optical function unit 5 had an optical surface 51 that was a mirror surface, but the optical function unit 5 may be, for example, a reflective diffraction grating, a transmissive diffraction grating, an optical filter, or the like. Further, in the above embodiment, the actuator device 1 included the driving piezoelectric element 6 as a vibration element, but the vibration element may be any one that has a vibration source that vibrates by a driving signal, and is not limited to a piezoelectric driving type. For example, the vibration element may be an electromagnetic driving type that has a magnet in the main body portion 31 of the metal substrate 3 and a coil at a location different from the metal substrate 3 (or has a coil in the main body portion 31 of the metal substrate 3 and a magnet at a location different from the metal substrate 3). The actuator device 1 only needs to include the wiring board 2, the metal substrate 3, the first adhesive member 4, and the driving piezoelectric element 6. For example, the actuator device 1 does not have to be attached with a connector 24, wires 11, and wires 12. Further, the actuator device 1 does not have to include the detection piezoelectric element 7.

Explanation of Reference Numerals

[0077] 1... Actuator device, 2... Wiring board (support), 3... Metal substrate, 4... First adhesive member (adhesive member), 6... Driving piezoelectric element (vibrating element), 26... Portion (a portion), 28... Portion (another portion), 31... Main body portion, 32... Movable portion, 33... First extending portion, 34... Second extending portion, 35... First connecting portion, 36... Second connecting portion, 37... First connection portion (connection portion), 38... Second connection portion (connection portion), 39... Third connection portion (another connection portion), 41... First portion, 42... Second portion, 43... Third portion, 44... Fourth portion, A, C... Connection direction, B, D... Direction (direction perpendicular to the connection direction), K... Corner portion, R1... First region, R2... Second region, R3... Third region, R4... Fourth region, R5... Fifth region, R6... Sixth region, W1, W2, W3, W4, W5, W6... Width.

Claims

1. A support body, A metal substrate supported by the support body, An adhesive member for bonding the support body and the metal substrate, A vibration element disposed on a main body portion of the metal substrate, and comprising: The metal substrate, A movable part, A first extending portion and a second extending portion extending from the main body portion so that the movable part is located therebetween, A first connecting portion connecting the first extending portion and the movable part, A second connecting portion connecting the second extending portion and the movable part, Further comprising a connecting portion connected to at least one of the first extending portion and the second extending portion, The connecting portion, A first region facing a first surface on the metal substrate side at a first portion of the support body in the thickness direction of the metal substrate, A second region that is continuous from the first region and does not face the support body in the thickness direction of the metal substrate, or faces a second surface on the metal substrate side at a second portion of the support body in the thickness direction of the metal substrate, A third region that is continuous from the second region and is connected to at least one of the first extending portion and the second extending portion, and including: When the second region faces the second surface in the thickness direction of the metal substrate, the second region is a region where the distance to the second surface in the thickness direction of the metal substrate is greater than the distance between the first region and the first surface in the thickness direction of the metal substrate. When the second region faces the second surface in the thickness direction of the metal substrate, the second surface does not face the third region, and the second portion has a first side surface that is continuous from the second surface and extends to the side opposite to the metal substrate from the second surface. When viewed from the thickness direction of the metal substrate, the width of the second region in a direction perpendicular to the connection direction in which the third region is connected to the second region is larger than the width of the third region in a direction perpendicular to the connection direction. The adhesive member A first portion disposed between the first part and the first region, An actuator device having a second portion that is continuous from the first portion, reaches the second region, and does not reach the third region.

2. The actuator device according to claim 1, wherein when viewed from the thickness direction of the metal substrate, the area of the first region is larger than the area of the second region.

3. The actuator device according to claim 1 or 2, wherein when viewed from the thickness direction of the metal substrate, the area of the first region is larger than the sum of the areas of the second region and the third region.

4. The actuator device according to any one of claims 1 to 3, wherein when viewed from the thickness direction of the metal substrate, the width of the first region in a direction perpendicular to the connection direction is larger than the width of the second region in a direction perpendicular to the connection direction.

5. When viewed from the thickness direction of the metal substrate, the region composed of the first region and the second region has a polygonal shape, The actuator device according to any one of claims 1 to 4, wherein when viewed from the thickness direction of the metal substrate, the second region constitutes one corner of the polygon.

6. The actuator device according to claim 5, wherein when viewed from the thickness direction of the metal substrate, the boundary line between the first region and the second region is curved so as to be convex on the side opposite to the vertex of the corner.

7. The metal substrate has a first connection portion and a second connection portion, each of which is the connection portion, The first connection portion is connected to the first extending portion, The actuator device according to any one of claims 1 to 6, wherein the second connecting portion is connected to the second extending portion.

8. The actuator device according to any one of claims 1 to 7, wherein the third region does not face the support in the thickness direction of the metal substrate.

9. The metal substrate further has a connecting portion different from the connecting portion, The different connecting portion, is connected to the main body portion, a fourth region facing the third surface on the metal substrate side at the third portion of the support in the thickness direction of the metal substrate, a fifth region that is continuous from the fourth region and does not face the support in the thickness direction of the metal substrate, or faces the fourth surface on the metal substrate side at the fourth portion of the support in the thickness direction of the metal substrate, a sixth region that is continuous from the fifth region and is connected to the main body portion, When the fifth region faces the fourth surface in the thickness direction of the metal substrate, the fifth region is a region where the distance from the fourth region to the third surface in the thickness direction of the metal substrate is greater than the distance to the fourth surface in the thickness direction of the metal substrate, When the fifth region faces the fourth surface in the thickness direction of the metal substrate, the fourth surface does not face the sixth region, and the fourth portion has a second side surface that is continuous from the fourth surface and extends to the side opposite to the metal substrate from the fourth surface, When viewed in the thickness direction of the metal substrate, the width of the fifth region in a direction perpendicular to the connection direction, which is the direction in which the sixth region is connected to the fifth region, is greater than the width of the sixth region in a direction perpendicular to the different connection direction, The adhesive member, a third portion disposed between the third portion and the fourth region, An actuator device according to any one of claims 1 to 8, further comprising a fourth portion that is continuous from the third portion and reaches the fifth region but does not reach the sixth region.

10. A support, a metal substrate supported by the support, an adhesive member that adheres the support and the metal substrate, and a vibration element disposed on a main body portion of the metal substrate, wherein the metal substrate, has a movable portion, a first extending portion and a second extending portion extending from the main body portion so that the movable portion is located therebetween, a first connecting portion that connects the first extending portion and the movable portion, a second connecting portion that connects the second extending portion and the movable portion, and further has a connecting portion connected to at least one of the first extending portion and the second extending portion, wherein the connecting portion, has a first region facing a part of the support in the thickness direction of the metal substrate, a second region continuous from the first region, and a third region continuous from the second region and connected to at least one of the first extending portion and the second extending portion, when viewed in the thickness direction of the metal substrate, the width of the second region in a direction perpendicular to the connection direction in which the third region is connected to the second region is larger than the width of the third region in a direction perpendicular to the connection direction, wherein the adhesive member, has a first portion disposed between the part of the support and the first region, and a second portion continuous from the first portion, reaching the second region, and not reaching the third region, and the second region and the third region do not face the support in the thickness direction of the metal substrate, an actuator device.

Images