Modular gun assembly for melting furnace

The electron beam gun assembly with a skeleton frame addresses the downtime issue in electron beam furnaces by enabling continuous operation through easy lid switching, thereby improving productivity and reducing costs.

JP7697950B2Active Publication Date: 2025-06-24TITANIUM METALS CORP
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
JP2022537691
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2019-12-17
Filing Date
2020-12-15
Publication Date
2025-06-24
Estimated Expiration
2040-12-15

AI Technical Summary

Technical Problem

Electron beam furnaces experience significant downtime due to the need to clean and refurbish the chamber and chamber lid between melting campaigns, which reduces melting efficiency and increases operational costs.

Method used

The development of an electron beam gun assembly with a skeleton frame that allows for easy attachment and detachment from multiple chamber lids, enabling continuous operation by switching between lids during cleaning and refurbishment processes.

Benefits of technology

This solution significantly reduces downtime by allowing simultaneous melting in one chamber while the other is being cleaned or refurbished, thereby enhancing productivity and reducing operational costs.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007697950000001
    Figure 0007697950000001
  • Figure 0007697950000002
    Figure 0007697950000002
  • Figure 0007697950000003
    Figure 0007697950000003
Patent Text Reader

Abstract

An electron beam (EB) gun assembly for an EB furnace is provided. The EB gun assembly includes an EB gun frame assembly including a skeleton frame and at least one EB gun attached to the skeleton frame, the EB gun frame assembly being configured to be rigidly attached to a first EB chamber lid to melt material in the first EB chamber and to be detached and rigidly attached to a second EB chamber lid to melt material in the second EB chamber. In some embodiments, the EB gun assembly includes at least one mounting frame, the at least one EB gun attached to the at least one mounting frame, and the at least one mounting frame attached to the skeleton frame.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] (Cross - Reference to Related Applications) This application claims the benefit and priority of Provisional Application No. 62 / 948,997, filed on December 17, 2019. The disclosure of the above application is incorporated herein by reference.

[0002] (Field) The present disclosure relates to electron beam furnaces, and more particularly to electron beam gun assemblies for electron beam furnaces.

Background Art

[0003] The description in this section merely provides background information related to the present disclosure and may not constitute prior art.

[0004] Electron beam (EB) furnaces use one or more electron beams to melt materials (such as scrap or virgin alloy materials) to produce ingots. Such furnaces typically have one or more EB guns attached to an opening in a chamber lid attached to a chamber, and the electron beam(s) generated by the EB gun(s) propagate through the opening to melt the materials contained within the chamber during a melting campaign. One problem related to the melting efficiency of EB furnaces is the downtime required to clean the chamber and / or the chamber lid before another melting campaign can be initiated.

[0005] The present disclosure addresses problems related to downtime in EB furnace melting, among various problems related to melting and the formation of alloy ingots.

Summary of the Invention

[0006] In one embodiment of the present disclosure, an electron beam (EB) gun assembly for an electron beam furnace is provided. The EB gun assembly includes an EB gun frame assembly including a skeleton frame and at least one EB gun attached to the skeleton frame, and the EB gun frame assembly is configured to be firmly attached to a first EB chamber lid, melt a material in the first EB chamber, be removed and firmly attached to a second EB chamber lid, and melt a material in the second EB chamber. In some variations, the skeleton frame includes at least one EB gun opening, and at least one EB gun extends through the at least one EB gun opening.

[0007] In at least one variation of the present disclosure, the EB gun assembly includes at least one mounting frame, at least one EB gun is attached to the at least one mounting frame, and the at least one mounting frame is attached to the skeleton frame. In some variations, the mounting frame includes a nozzle opening, and at least one EB gun includes a nozzle extending through the nozzle opening. In at least one variation, the mounting frame includes a top plate having a nozzle opening and a floating plate movably attached to the top plate, and the nozzle of at least one EB gun is attached to the floating plate such that the position of the nozzle is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids.

[0008] In some variations, the color is firmly attached to the nozzle of the EB gun and movably attached to the top plate of the mounting frame such that the position of the nozzle is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. In at least one variation, a plurality of biasing members are disposed between the color and the top plate such that the color is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. Also, a first alignment guide configured to receive a second alignment pin extending from at least one of the first EB chamber lid and the second EB chamber lid may be included such that at least one EB gun is aligned with the gun opening of the lid.

[0009] In some variations of the present disclosure, at least one EB gun is a plurality of EB guns attached to a skeleton frame. In such variations, the EB gun assembly has a plurality of mounting frames, each of the plurality of EB guns is attached to a mounting frame, and each of the plurality of mounting frames is attached to the skeleton frame. In at least one variation, each of the plurality of mounting frames has a nozzle opening, and each of the plurality of EB guns has a nozzle extending through the nozzle opening of the mounting frame. Each of the plurality of mounting frames includes a top plate having a nozzle opening and a floating plate movably attached to the top plate. The nozzle of each of the plurality of EB guns is attached to the floating plate of the mounting frame such that the position of the nozzle of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. In some variations, each of the plurality of mounting frames is firmly attached to the nozzle of the EB gun and includes a collar movably attached to the top plate of the mounting frame such that the position of the nozzle of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. In at least one variation, a plurality of biasing members are disposed between each collar and the top plate such that each collar is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids.

[0010] In other forms of the present disclosure, an electron beam (EB) furnace assembly is provided. The EB furnace assembly includes a first EB furnace including a first EB chamber and a first EB chamber lid having a first set of EB gun openings, a second EB furnace including a second EB chamber and a second EB chamber lid having a second set of EB gun openings, and an EB gun frame assembly. The EB gun frame assembly includes a skeleton frame and a plurality of EB guns attached to the skeleton frame. The EB gun frame assembly is firmly attached to a first EB chamber lid having a plurality of EB guns attached to the first set of EB gun openings and is configured to be firmly attached to a second EB chamber lid having a plurality of EB guns attached to the second set of EB gun openings such that the EB gun frame assembly is replaceable with the first and second EB chamber lids.

[0011] In some variations of the present disclosure, the EB gun assembly includes a plurality of mounting frames, the plurality of EB guns are securely attached to the plurality of mounting frames, and the plurality of mounting frames are securely attached to the skeleton frame. In at least one variation, each of the plurality of mounting frames has a top plate and a floating plate movably attached to the top plate. Also, each of the plurality of EB guns is firmly attached to the floating plate such that the position of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids, and the nozzle of each of the plurality of EB guns is attached to the floating plate of the mounting frame. In some variations, each of the plurality of mounting frames includes a collar firmly attached to the nozzle of the EB gun, and the nozzle is movably attached to the top plate of the mounting frame such that the position of the nozzle of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids.

[0012] In yet another aspect of the present disclosure, a method of melting materials in an electron beam (EB) furnace assembly is provided. The method includes securely attaching an EB gun frame assembly to a first EB chamber lid. The EB gun frame assembly includes a skeleton frame and a plurality of EB guns securely attached to the skeleton frame. The first EB chamber lid includes a first set of EB gun openings, and the plurality of EB guns are attached to the first set of EB gun openings. When the first EB chamber lid and the EB gun frame assembly are securely attached to the first EB chamber, materials are melted in the first EB chamber using the plurality of EB guns. In some variations, the method includes removing the EB gun frame assembly from the first EB chamber lid and securely attaching the EB gun frame assembly to a second EB chamber lid having a second set of EB gun openings. The plurality of EB guns are attached to the second set of EB gun openings, and when the second EB chamber lid and the EB gun frame assembly are securely attached to the second EB chamber, materials are melted in the second EB chamber using the plurality of EB guns.

[0013] In some variations of the present disclosure, the EB gun frame assembly includes a plurality of mounting frames securely attached to the skeleton frame and a plurality of EB guns securely attached to the plurality of mounting frames. In at least one variation, each of the plurality of mounting frames has a top plate and a floating plate movably attached to the top plate, and each of the plurality of EB guns is securely attached to the floating plate such that the position of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. In some variations, the method includes moving at least one position of the plurality of EB guns after the EB gun frame assembly is firmly attached to the first EB chamber lid and securely attaching at least one of the plurality of EB guns to the EB gun opening of the first EB chamber lid. In at least one variation, after the EB gun frame assembly is firmly attached to the second EB chamber lid, at least one position of the plurality of EB guns is moved and securely attached to the EB gun opening of the second EB chamber lid.

[0014] Further areas of applicability will become apparent from the description provided herein. It should be understood that the description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure.

Brief Description of the Drawings

[0015] For a better understanding of the present disclosure, various forms of the present disclosure provided by way of example will be described below with reference to the accompanying drawings.

[0016]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5A

Figure 5B

Figure 6

Figure 7

Figure 8

Figure 9

[0017] The drawings described herein are for illustrative purposes only and are not intended to limit the scope of the present disclosure in any way.

Best Mode for Carrying Out the Invention

[0018] The following description is essentially merely exemplary and is not intended to limit the present disclosure, its applications, or uses. It should be understood that throughout the drawings, corresponding reference numerals indicate similar or corresponding parts and features.

[0019] Referring to FIG. 1, an electron beam (EB) gun and a lid assembly 20 are shown. The EB gun and lid assembly 20 includes at least one EB gun 22 (also simply referred to herein as an "EB gun") and a lid 40. Each of the EB guns 22 has a pair of EB gun ducts 24, 26 through which air is drawn and exhaust gas can flow during operation of the EB gun 22, as described below. The EB gun 22 is attached or mounted to the lid 40 at an EB gun opening 44, and the EB gun and lid assembly 20 is coupled to a chamber 60 having an interior 64. In some variations of the present disclosure, a clamp (not shown) is used to fasten and secure a lid flange 42 of the lid 40 to a chamber flange 62 of the chamber 60 such that an airtight or vacuum seal is provided between the lid 40 and the chamber 60. In some variations, one or more of the EB guns 22 are attached to the lid 40 before the lid 40 is attached or coupled to the chamber 60, while in other variations, one or more of the EB guns 22 are attached to the lid 40 after the lid 40 is attached or coupled to the chamber 60.

[0020] When the EB gun 22 is attached to the EB gun opening 44 and the EB gun and lid assembly 20 is coupled to the chamber 60, the EB gun 22 is positioned at a desired angle relative to the interior 64. During operation of the EB gun 22, a vacuum is drawn through the EB gun ducts 24, 26 into the EB gun 22 (i.e., the housing (not numbered) that houses the EB gun 22), and an electron beam from the EB gun 22 propagates through the EB gun opening 44 into the chamber 60. It should be understood that air is also drawn out of the chamber 60 using a vacuum pump (not shown). The electron beam heats and melts a campaign of one or more material batches to form liquid metal (not shown) in the interior 64 of the chamber 60 during a melting campaign, and the liquid metal is cooled in the chamber to form an ingot (not shown) before the lid 40 to which the EB gun 22 is attached is removed.

[0021] It should be understood that by using such an EB gun and lid assembly 20, a clean and energy-efficient process for manufacturing commercial ingots, such as commercial titanium alloy ingots, is provided. However, prior to conducting subsequent melting campaigns, it is desirable to clean and / or refurbish the chamber 60 and the lid 40, and such cleaning and / or refurbishment takes time, during which the use of the EB gun and lid assembly 20 for melting is precluded. That is, when the chamber 60 and the lid 40 are being cleaned and / or refurbished, the EB gun and lid assembly 20 cannot be used to melt materials.

[0022] Referring now to FIG. 2, an EB gun assembly 80 according to the teachings of the present disclosure is shown. The EB gun assembly 80 includes a skeleton frame 100 and an EB gun 22 attached to the skeleton frame 100. In some variations, each of the EB guns 22 has a pair of EB ducts 24, 26. As shown in FIG. 2, the skeleton frame 100 is configured to couple to a first lid 40A and a second lid 40b (collectively referred to herein as "lids 40a, 40b"), the first lid 40a is configured to couple to a first chamber 60a, and the second lid 40b is configured to couple to a second chamber 60b. In some variations, the first lid 40a is also configured to couple to the second chamber 60b, and the second lid 40b is configured to couple to the first chamber 60a. That is, the lids 40a, 40b are interchangeable in the first chamber 60a and the second chamber 60b (collectively referred to herein as "chambers 60a, 60b"). In at least one variation, one or both of the lids 40a, 40b may include a first alignment guide 41 that assists in aligning the EB gun assembly 80 to the lids 40a, 40b, as will be described in more detail below. It should be understood that with such a configuration, the EB gun assembly 80 can be removed from the first lid 40a, for example, after a first melting campaign, and attached to the second lid 40b for a second melting campaign in the second chamber 60b. Also, with such a configuration, it is possible for the first lid 40a to be cleaned and / or modified for another melting campaign in the first chamber 60a during a second melting campaign in the second chamber 60b.

[0023] Referring now to FIG. 3, a skeleton frame 100 is shown, including an outer ring 102, a plurality of cross members 104, and at least one attachment member 106. The outer ring 102, the plurality of cross members 104, and the at least one attachment member 106 form the skeleton frame 100 and are firmly attached to each other so as to define a plurality of openings 110. The openings 110 reduce the weight of the skeleton frame 100 and enable visual inspection, observation, and access to the lids 40a, 40b. In some variations, a deck 108 is included and attached to at least one cross member 104. The deck 108 provides a platform for a person to walk and work during the installation or attachment of the EB gun 22 to the skeleton frame 100, the attachment of the EB gun assembly 80 to one of the lids 40a, 40b, and / or the melting of the material within the chambers 60a, 60b. In at least one variation, a cover plate 112 having or not having a second alignment guide 101 is included, extending between one or more of the cross members 104 and attached to one or more of the cross members 104.

[0024] Referring to FIG. 4, in some variations, the EB gun assembly 80 includes a mounting frame 120 configured to receive and hold one of the EB guns 22. In particular, as will be described in more detail below, the mounting frame 120 is firmly attached to the skeleton frame 100 and can assist in the alignment and secure attachment of the EB gun 22 to the EG gun opening 44. In some variations of the present disclosure, the skeleton frame 100 is also coupled to and supports at least one of the EB ducts 24, 26.

[0025] Referring to FIGS. 5A and 5B, in some variations, the mounting frame 120 includes a mounting plate 122, a pair of side plates 124, and a top plate 126. The mounting plate 122, the pair of side plates 124, and the top plate 126 form a frame 121 configured to support the EB gun 22. Further, the mounting plate 122 is configured to be firmly attached to the attachment member 106 (FIG. 3) of the skeleton frame 100, and the top plate 126 and the floating plate 130 each have a gun opening 132.

[0026] In some variations of the present disclosure, a floating plate 130 is included and is coupled to the top plate 126 by a plurality of rods 134 and floating springs 136. For example, as shown in FIG. 5B, the plurality of rods 134 have an upper end (not labeled, +z direction) firmly attached to the floating plate 130 and a plurality of floating springs 136 provided between the lower end of the rod 134 (not labeled, -z direction) and the top plate 126. Accordingly, the floating plate 130 has a restricted biasing movement with respect to the top plate 126 and the frame 121. That is, the rod 134 translates through the top plate 126, and when the mounting frame 120 is firmly attached to the skeleton frame 100 by the floating springs 136 provided between the lower end of the rod 134 and the top plate 126, the floating plate 130 is configured to move up and down (+ / -z direction) and tilt (about the z-axis).

[0027] In some variations, a collar 138 is included and is coupled to the floating plate 130 such that both the floating plate 130 and the collar have a restricted biasing movement with respect to the top plate 126. It should be understood that the rod 134 may be a threaded member, and commercially available fasteners (pins, nuts, washers, etc.) fix the rod 134 to the floating spring 136 and the floating plate 130.

[0028] In at least one modification, the mounting frame 120 includes a brace 128 coupled to the top plate 126 or the floating plate 130. In a modification where the brace 128 is coupled to the top plate 126, the brace 128 is slidably coupled to the floating plate 130 and / or can translate through the floating plate 130. In an alternative, the top plate 126 may extend beyond the floating plate 130 (in the +y direction) such that the brace 128 is coupled to the top plate 126 but not to the floating plate 130. In a modification where the brace 128 is coupled to the floating plate 130, the brace 128 moves with the floating plate 130 and has restricted movement relative to the top plate 126.

[0029] Referring to FIG. 6, an EB gun 22 attached to the mounting frame 120 is shown. The EB gun 22 includes a gun chamber 23 located on the floating plate 130 and a gun nozzle 25 having a mounting flange 27 provided within the gun openings 132 (FIG. 5A) of the top plate 126 and the floating plate 130. In some modifications, the bottom surface (not numbered, -z direction) of the gun chamber 23 is firmly attached to the floating plate 130 and / or the collar 138 is firmly attached to the gun nozzle 25, and the gun nozzle 25 has restricted movement relative to the mounting frame 120. Thus, when the mounting frame 120 is firmly attached to the skeleton frame 100, the gun nozzle 25 has restricted movement relative to the skeleton frame 100, and when the skeleton frame 100 is firmly attached to the lids 40a, 40b, the gun nozzle 23 has restricted movement relative to the lids 40a, 40b and has restricted movement relative to the EB gun opening 44. Such restricted movement by the gun nozzle 25 aids and enhances the alignment and attachment of the gun nozzle 25 to a particular EB gun opening 44.

[0030] Referring to FIG. 7, an EB gun assembly 80 having a plurality of EB guns 22 attached to a skeleton frame 100 via a plurality of frames 120 is shown. It should be understood that each of the mounting frames 120 includes a floating plate 130 movably attached to the top plate 126 as described above so that during alignment and attachment of the gun nozzles 25 to their respective EB gun openings 44, limited movement is provided to each of the gun nozzles 25.

[0031] Referring to FIG. 8, an EB gun assembly 80 firmly attached to the first lid 40a or the second lid 40b is shown. In particular, the skeleton frame 100 is firmly attached to the first lid 40a or the second lid 40b by a plurality of clamps 103, and each of the EB guns 22 is firmly attached to its respective EB gun opening 44. In at least one variant, the mounting flange 27 of each gun nozzle 25 is bolted to its respective gun opening 44 (not shown). It should be understood that the attachment of each of the EB guns 22 to the EB gun opening 44 is assisted and reinforced by the mounting frame 120. For example, in some variants, when the EB gun assembly 80 is moved to a fixed position and attached to the first lid 40a or the second lid 40b, each of the EB guns 22 is attached to the mounting frame 120. In at least one variant, the first alignment guide 41 and the second alignment guide 101 assist in positioning the skeleton frame 100 in the lid 40a or the second lid 40b. After the skeleton frame 100 is attached to the first lid 40, each of the gun nozzles 25 is aligned with its respective EB gun opening 44. The alignment of the gun nozzle 25 with the EB gun opening 44 is assisted by the limited movement of the gun nozzle 25 relative to the top plate 126 provided by the floating plate 130, and each gun nozzle 25 is firmly attached to the EB gun opening 44 via the mounting flange 27 after being properly aligned. After the EB gun 22 is firmly attached to the EB gun opening 44, a vacuum is drawn into the first chamber 60a (i.e., air is removed from the first chamber 60a), and EB melting of the material in the first chamber 60a is started (e.g., the first melting campaign is executed or carried out). It should be understood that after the first melting campaign, the EB gun assembly 80 is removed from the first lid 40a and attached to the second lid 40b as described above with respect to the first lid 40a so that a second melting campaign in the second chamber 60b can proceed while the first lid 40a and the first chamber 60a are being cleaned and / or refurbished.In addition, this cycle of attaching the EB gun assembly to another lid and performing a melt campaign in another chamber while cleaning and / or refurbishing the previously used lid and chamber is repeated many times so as to improve productivity and reduce costs.

[0032] Referring now to FIG. 9, the suspension of the EB gun assembly 80 from a support (not shown) using the hanger 160 is shown. The support may include a support structure such as, for example, a ceiling, a crane, a frame, a platform, a rail, and a wall. The hanger 160 may include a cable, a chain, a rod, a strut, a wire, or other suitable fastening and securing assembly. Alternatively or additionally, the first lid 40a, the second lid 40b, the skeleton frame 100, and / or the hanger 160 are supported by wheels (not shown). The wheels are supported by rails that allow the lids 40a, 40b, and / or the skeleton frame 100 to move outside of the chamber, the lid, and the furnace station.

[0033] To be understood from the teachings of the present disclosure, an EB gun assembly is provided that reduces downtime associated with one or more EB guns. The EB gun assembly includes a skeleton frame to which one or more EB guns are rigidly attached and configured to provide limited movement to the one or more EB guns for alignment of the EB gun openings and the chamber lids. The EB gun assembly can be attached to and / or removed from the chamber lid in a time-efficient manner. Additionally, when a pair of chambers and a pair of chamber lids are included, the EB gun assembly allows a melting campaign to proceed in one chamber while the other chamber and chamber lid are being cleaned or refurbished. By using two chambers, two chamber lids, a skeleton frame, and an EB gun assembly according to the teachings of the present disclosure, when melting and forming a commercial ingot weighing from about 15,000 to about 40,000 pounds, the changeover time (i.e., the downtime of the EB gun) is reduced by more than 20 hours. That is, the EB gun assembly with a skeleton frame reduces the complexity and time between melting campaigns.

[0034] The skeleton frame allows the furnace operator to leave the chamber lid attached to the chamber during furnace venting, thereby reducing furnace by-products (such as ash, dust, smoke, etc.) taken into the melting plant during venting. Reducing the by-products taken into the melting plant reduces the by-products of the furnace acting on the manufacturing equipment, thereby extending the life and improving the efficiency of the melting plant equipment. Also, the skeleton frame allows the cleaning, inspection, and / or repair of the chamber lid to be performed outside the furnace station (i.e., the location where the ingot material is melted), so that the interior can be widely used, access to the lid is facilitated, and efficiency, productivity, and safety are improved. Further, since the refurbishment activities do not affect the EB gun, the maintenance of the EB gun is reduced and the reliability of the EB gun is increased.

[0035] Unless otherwise expressly specified herein, all numerical values indicating mechanical / thermal properties, composition ratios, dimensions and / or tolerances, or other properties shall be understood to be modified by the terms "about" or "approximately" in describing the scope of the present disclosure. This modification is desirable for various reasons including industrial practices, material, manufacturing, and assembly tolerances, and test performance.

[0036] As used herein, the expression "at least one of A, B, and C" should be construed to mean a logical (A OR B OR C) using an inclusive disjunction, and should not be construed to mean "at least one of A, at least one of B, and at least one of C".

[0037] The description of the present disclosure is essentially merely exemplary, and thus variations that do not depart from the essence of the present disclosure are intended to be within the scope of the present disclosure. Such variations should not be regarded as departing from the spirit and scope of the present disclosure. The invention described in the original claims of the present application is appended below. [1] An electron beam (EB) gun assembly for an electron beam furnace, comprising an EB gun frame assembly having a skeleton frame and at least one EB gun attached to the skeleton frame, the EB gun frame assembly being firmly attached to a first EB chamber lid, configured to melt a material in a first EB chamber, removed and firmly attached to a second EB chamber lid, and configured to melt a material in the second EB chamber. [2] The EB gun assembly according to [1], wherein the skeleton frame comprises at least one EB gun opening, and the at least one EB gun extends through the at least one EB gun opening. [3] The EB gun assembly according to [1], further comprising at least one mounting frame, wherein the at least one EB gun is attached to the at least one mounting frame, and the at least one mounting frame is attached to the skeleton frame. [4] The EB gun assembly according to [3], wherein the at least one mounting frame comprises a nozzle opening, and the at least one EB gun comprises a nozzle extending through the nozzle opening. [5] The EB gun assembly according to [4], wherein the mounting frame comprises a top plate having the nozzle opening and a floating plate movably attached to the top plate, and the nozzle of the at least one EB gun is attached to the floating plate such that the position of the nozzle is movable after the EB gun frame assembly is firmly attached to the first EB chamber lid and the second EB chamber lid. [6] The EB gun assembly according to [5], further comprising a collar firmly attached to the nozzle of the EB gun and movably attached to the top plate of the mounting frame such that the position of the nozzle is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. [7] The EB gun assembly according to [6], further comprising a plurality of biasing members between the collar and the top plate such that the collar is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. [8] The EB gun assembly according to [1], further comprising a first alignment guide configured to receive a second alignment pin extending from at least one of the first EB chamber lid and the second EB chamber lid such that the at least one EB gun is aligned with the gun opening of the lid. [9] The EB gun assembly according to [1], wherein the at least one EB gun is a plurality of EB guns attached to the skeleton frame.

[10] The EB gun assembly according to [9], further comprising a plurality of mounting frames, each of the plurality of EB guns being attached to a mounting frame, and each of the plurality of mounting frames being attached to the skeleton frame.

[11] The EB gun assembly according to

[10] , wherein each of the plurality of mounting frames comprises a nozzle opening, and each of the plurality of EB guns comprises a nozzle extending through the nozzle opening of the mounting frame.

[12] The EB gun assembly according to

[11] , wherein each of the plurality of mounting frames comprises a top plate having the nozzle opening and a floating plate movably attached to the top plate, and the nozzle of each of the plurality of EB guns is attached to the floating plate of one of the plurality of mounting frames such that the position of the nozzle of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids.

[13] The EB gun assembly according to

[12] , wherein each of the plurality of mounting frames comprises a collar firmly attached to one of the nozzles of the plurality of EB guns and movably attached to the top plate of the mounting frame such that the position of the nozzle of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids.

[14] The EB gun assembly according to

[13] , further comprising a plurality of biasing members between each collar and the top plate such that each collar is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids.

[15] The at least one EB gun is a plurality of EB guns attached to the skeleton frame, and further includes a plurality of mounting frames. Each of the plurality of mounting frames includes a top plate having a nozzle opening and a floating plate movably attached to the top plate. The nozzle of each of the plurality of EB guns is attached to the floating plate so that the position of each nozzle of the plurality of EB guns is movable, and extends through the nozzle opening of the top plate. Each nozzle of the plurality of EB guns is securely attachable to the gun openings of the first and second EB chamber lids after the EB gun frame assembly is firmly attached to the first and second EB chamber lids so that the EB gun frame assembly is replaceable with the first and second EB chamber lids. The EB gun assembly according to [1].

[16] An electron beam (EB) furnace assembly, A first EB furnace including a first EB chamber and a first EB chamber lid having a first set of EB gun openings, A second EB furnace including a second EB chamber and a second EB chamber lid having a second set of EB gun openings, An EB gun frame assembly Comprising, the EB gun frame assembly Comprises a skeleton frame and a plurality of EB guns attached to the skeleton frame, and the EB gun frame assembly is firmly attached to the first EB chamber lid having the plurality of EB guns attached to the first set of EB gun openings so that the EB gun frame assembly is replaceable with the first and second EB chamber lids, and firmly attached to the second EB chamber lid having the plurality of EB guns attached to the second set of EB gun openings. An EB furnace assembly configured to be attached.

[17] The EB furnace assembly according to

[16] , further comprising a plurality of mounting frames, the plurality of EB guns being securely attached to the plurality of mounting frames, and the plurality of mounting frames being securely attached to the skeleton frame.

[18] Each of the plurality of mounting frames has a top plate and a floating plate movably attached to the top plate, and each of the plurality of EB guns is firmly attached to the floating plate such that the position of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. The EB furnace assembly according to

[17] .

[19] A method of melting a material in an electron gun (EB) furnace assembly, securely attaching an EB gun frame assembly comprising a skeleton frame and a plurality of EB guns securely attached to the skeleton frame to a first EB chamber lid, the first EB chamber lid comprising a first set of EB gun openings, and the plurality of EB guns being attached to the first set of EB gun openings; melting the material in the first EB chamber using the plurality of EB guns, the first EB chamber lid and the EB gun frame assembly being securely attached to the first EB chamber; removing the EB gun frame assembly from the first EB chamber lid and securely attaching the EB gun frame assembly to a second EB chamber lid, the second EB chamber lid comprising a second set of EB gun openings, and the plurality of EB guns being attached to the second set of EB gun openings; melting the material in the second EB chamber using the plurality of EB guns, the second EB chamber lid and the EB gun frame assembly being securely attached to the second EB chamber comprising a method.

[20] The EB gun frame assembly further comprises a plurality of mounting frames securely attached to the skeleton frame and the plurality of EB guns securely attached to the plurality of mounting frames, each of the plurality of mounting frames having a top plate and a floating plate movably attached to the top plate, each of the plurality of EB guns being firmly attached to the floating plate such that the position of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids. The method according to

[19] .

Claims

1. An electron beam (EB) gun assembly for an electron beam furnace, said EB gun assembly comprising: A skeleton frame for attachment; and At least one EB gun attached to said skeleton frame. Said EB gun assembly is configured to be firmly attached to a first EB chamber lid of a first EB chamber, removed from the first EB chamber lid, and firmly attached to a second EB chamber lid of a second EB chamber. Said skeleton frame has an outer ring and a plurality of cross members that define at least one opening that exposes an EB gun opening when said skeleton frame is attached to the outside of said first chamber lid or said second chamber lid. An EB gun assembly.

2. The EB gun assembly according to claim 1, wherein said at least one EB gun extends through said at least one opening.

3. Further comprising at least one mounting frame, said at least one EB gun being attached to said at least one mounting frame, and said at least one mounting frame being attached to said skeleton frame. The EB gun assembly according to claim 1.

4. The EB gun assembly according to claim 3, wherein said at least one mounting frame comprises a nozzle opening, and said at least one EB gun comprises a nozzle extending through said nozzle opening.

5. The mounting frame comprises a top plate having said nozzle opening and a floating plate movably attached to said top plate, and said nozzle of said at least one EB gun is such that the position of said nozzle is movable after said skeleton frame is firmly attached to said first EB chamber lid and said second EB chamber lid. The EB gun assembly according to claim 4, attached to said floating plate.

6. Further comprising a collar firmly attached to said nozzle of said EB gun and movably attached to said top plate of said mounting frame such that the position of said nozzle is movable after said skeleton frame is firmly attached to said first and second EB chamber lids. The EB gun assembly according to claim 5.

7. The EB gun assembly according to claim 6, further comprising a plurality of biasing members between the collar and the top plate such that the collar is movable after the skeleton frame is firmly attached to the first and second EB chamber lids.

8. The EB gun assembly according to claim 1, further comprising a first alignment guide configured to receive a second alignment pin extending from at least one of the first EB chamber lid and the second EB chamber lid so that the at least one EB gun is aligned with the gun opening of the lid.

9. The EB gun assembly according to claim 1, wherein the at least one EB gun is a plurality of EB guns attached to the skeleton frame.

10. The EB gun assembly according to claim 9, further comprising a plurality of mounting frames, each of the plurality of EB guns being attached to a mounting frame, and each of the plurality of mounting frames being attached to the skeleton frame.

11. The EB gun assembly according to claim 10, wherein each of the plurality of mounting frames includes a nozzle opening, and each of the plurality of EB guns includes a nozzle extending through the nozzle opening of the mounting frame.

12. The EB gun assembly according to claim 11, wherein each of the plurality of mounting frames includes a top plate having the nozzle opening and a floating plate movably attached to the top plate, and the nozzle of each of the plurality of EB guns is attached to the floating plate of one of the plurality of mounting frames such that the position of the nozzle of each of the plurality of EB guns is movable after the skeleton frame is firmly attached to the first and second EB chamber lids.

13. The EB gun assembly according to claim 12, wherein each of the plurality of mounting frames includes a collar firmly attached to one of the nozzles of the plurality of EB guns and movably attached to the top plate of the mounting frame such that the position of the nozzle of each of the plurality of EB guns is movable after the skeleton frame is firmly attached to the first and second EB chamber lids.

14. The EB gun assembly according to claim 13, further comprising a plurality of biasing members between each color and the top plate such that each color is movable after the skeleton frame is firmly attached to the first and second EB chamber lids.

15. The at least one EB gun is a plurality of EB guns attached to the skeleton frame, and further comprises a plurality of mounting frames. Each of the plurality of mounting frames includes a top plate having a nozzle opening and a floating plate movably attached to the top plate. The nozzle of each of the plurality of EB guns is attached to the floating plate such that the position of the nozzle of each of the plurality of EB guns is movable, and extends through the nozzle opening of the top plate. The nozzle of each of the plurality of EB guns can be securely attached to the gun openings of the first and second EB chamber lids respectively after the skeleton frame is firmly attached to the first and second EB chamber lids so that the skeleton frame is replaceable with the first and second EB chamber lids. The EB gun assembly according to claim 1.

16. An electron beam (EB) furnace assembly, comprising: A first EB furnace including a first EB chamber and a first EB chamber lid having a first set of EB gun openings; A second EB furnace including a second EB chamber and a second EB chamber lid having a second set of EB gun openings; An EB gun frame assembly The EB gun frame assembly includes: A skeleton frame for mounting and a plurality of EB guns attached to the skeleton frame. The skeleton frame has an outer ring and a plurality of cross members that define a plurality of openings that expose the first set of EB gun openings or the second set of EB gun openings when the skeleton frame is attached outside the first chamber lid or the second chamber lid. The EB gun frame assembly is firmly attached to the first EB chamber lid having the plurality of EB guns attached to the first EB gun opening set such that the EB gun frame assembly is replaceable with the first and second EB chamber lids, removed from the first EB chamber lid, and firmly attached to the second EB chamber lid having the plurality of EB guns attached to the second EB gun opening set, and is configured to be an EB furnace assembly.

17. The EB furnace assembly according to claim 16, further comprising a plurality of mounting frames, wherein the plurality of EB guns are securely attached to the plurality of mounting frames, and the plurality of mounting frames are securely attached to the skeleton frame.

18. Each of the plurality of mounting frames has a top plate and a floating plate movably attached to the top plate, and each of the plurality of EB guns is firmly attached to the floating plate such that the position of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids, and the nozzle of each of the plurality of EB guns is attached to the floating plate of the mounting frame. The EB furnace assembly according to claim 17.

19. A method of melting a material in an electron gun (EB) furnace assembly, firmly attaching an EB gun frame assembly comprising a skeleton frame and a plurality of EB guns securely attached to the skeleton frame to a first EB chamber lid, wherein the skeleton frame has an outer ring defining a plurality of openings and a plurality of cross members, the first EB chamber lid includes a first EB gun opening set, and the plurality of EB guns pass through the plurality of openings and are attached to the first EB gun opening set, melting the material in the first EB chamber using the plurality of EB guns, wherein the first EB chamber lid and the EB gun frame assembly are securely attached to the first EB chamber. Removing the EB gun frame assembly from the first EB chamber lid and securely attaching the EB gun frame assembly to a second EB chamber lid, the second EB chamber lid comprising a second EB gun opening set, and the plurality of EB guns passing through the plurality of openings and being attached to the second EB gun opening set; Melting a material in a second EB chamber using the plurality of EB guns, the second EB chamber lid and the EB gun frame assembly being securely attached to the second EB chamber; A method comprising.

20. The EB gun frame assembly further comprises a plurality of mounting frames securely attached to the skeleton frame and the plurality of EB guns securely attached to the plurality of mounting frames; Each of the plurality of mounting frames has a top plate and a floating plate movably attached to the top plate; The method according to claim 19, wherein each of the plurality of EB guns is firmly attached to a floating plate such that the position of each of the plurality of EB guns is movable after the EB gun frame assembly is firmly attached to the first and second EB chamber lids.

Citation Information

Patent Citations

  • Electron beam shielding device and electron beam shielding method

    JP2003532856A

  • Chamber equipment for electron beam processing device

    JP2010042447A

  • Hollow cathode,nonthermionic electron beam source with replaceable liner

    US3486064A