Substrate processing apparatus, substrate processing method, and program

Abstract

To inspect a state of a belt while maintaining throughput.SOLUTION: A substrate processing apparatus comprises: a processing unit which applies predetermined processing to a substrate; a transfer unit including a holding section for holding the substrate and a driving section which includes a belt and transfers the holding section in a first direction by moving the belt; a measurement unit capable of acquiring a vibration signal corresponding to vibration of the belt derived from the displacement of the holding section; and a control unit. The control unit includes: a processing control section for executing process processing including first processing in which the predetermined processing is applied successively to a plurality of substrates including the substrate by the processing unit, and second processing in which the plurality of substrates are respectively transferred into / transferred out of the processing unit by the transfer unit; a signal acquisition section for acquiring the vibration signal from the measurement unit; and a state determination section for determining a state of the belt on the basis of the vibration signal. The signal acquisition section acquires the vibration signal during an execution period of the process processing.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present disclosure relates to a substrate processing apparatus and a substrate processing method.

Background Art

[0002] Patent Document 1 discloses a method for measuring the tension of a strip-shaped plate, which includes a first step of measuring the pressure fluctuation of air generated by the vibration of the strip-shaped plate, a second step of extracting the natural vibration frequency of the strip-shaped plate, and a third step of obtaining the tension of the strip-shaped plate based on the extracted natural vibration frequency.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a substrate processing apparatus that performs a predetermined process on a substrate, the substrate may be transported by a transport unit having a belt. The present disclosure provides a substrate processing apparatus and a substrate processing method capable of inspecting the state of the belt while maintaining throughput.

Means for Solving the Problems

[0005] A substrate processing apparatus according to an aspect of the present disclosure includes a processing unit that performs a predetermined process on a substrate, a holding unit that holds the substrate, a conveying unit that includes a belt and displaces the holding unit in a first direction by moving the belt, and a measuring unit that is provided in a state close to the belt and can acquire a vibration signal corresponding to the vibration of the belt caused by the displacement of the holding unit, and a control unit that controls the processing unit, the conveying unit, and the measuring unit. The control unit includes a processing control unit that executes a process control including a first process of sequentially performing a predetermined process on a plurality of substrates including the substrate by the processing unit, and a second process of loading and unloading each of the plurality of substrates to and from the processing unit by the conveying unit, a signal acquisition unit that acquires a vibration signal from the measuring unit, and a state determination unit that determines the state of the belt based on the vibration signal. The signal acquisition unit acquires the vibration signal during the execution period of the process control.

Advantages of the Invention

[0006] According to the present disclosure, there are provided a substrate processing apparatus and a substrate processing method capable of inspecting the state of a belt while maintaining throughput.

Brief Description of the Drawings

[0007]

Figure 1

Figure 2

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Figure 4

Figure 5

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Figure 10

Figure 11

Figure 12

DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, various exemplary embodiments will be described.

[0009] A substrate processing apparatus according to one exemplary embodiment includes a processing unit that performs a predetermined process on a substrate, a holding unit that holds the substrate, a transport unit that includes a belt and displaces the holding unit in a first direction by moving the belt, a measurement unit that is provided in a state close to the belt and can acquire a vibration signal corresponding to the vibration of the belt resulting from the displacement of the holding unit, and a control unit that controls the processing unit, the transport unit, and the measurement unit. The control unit includes a process control unit that executes a process control including a first process of sequentially performing a predetermined process on a plurality of substrates including the substrate by the processing unit and a second process of carrying in and out each of the plurality of substrates to and from the processing unit by the transport unit, a signal acquisition unit that acquires a vibration signal from the measurement unit, and a state determination unit that determines the state of the belt based on the vibration signal. The signal acquisition unit acquires the vibration signal during the execution period of the process control.

[0010] In this substrate processing apparatus, a vibration signal corresponding to the vibration of the belt is acquired during the execution period of the process processing, and the state of the belt is determined based on the vibration signal. In this apparatus, since it is not necessary to stop the process processing by the substrate processing apparatus in order to determine the state of the belt, it is possible to inspect the state of the belt while maintaining the throughput.

[0011] The above substrate processing apparatus may further include an output unit that outputs a signal indicating that the state of the belt is not normal according to the determination result by the state determination unit. In this case, when it is determined that the state of the belt is not normal, it is possible to execute a process different from the case where the state of the belt is normal.

[0012] In the second process, the processing control unit may execute a displacement process of displacing the holding unit along the first direction by the driving unit. The signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement process after the displacement process is completed. By acquiring the vibration signal after the completion of the displacement process, it is possible to reduce the influence of the disturbance included in the vibration signal.

[0013] The state determination unit may determine the state of the belt based on a vibration signal corresponding to the vibration of the belt after a predetermined time has elapsed since the completion of the displacement process. In this case, it is possible to further reduce the influence of the disturbance included in the vibration signal.

[0014] The driving unit may further include two pulleys over which at least a part of the belt is spanned. The measurement unit may be provided in the vicinity of a portion of the belt disposed between the two pulleys. The predetermined time may be set according to the distance between one of the two pulleys close to the measurement unit and the measurement unit. Since the time until the vibration of the belt converges is considered to depend on the length of the belt between the fixed end and the position close to the measurement unit, in the above configuration, it is possible to appropriately determine the state according to the vibration of the belt.

[0015] The driving unit may further include a first pulley and a second pulley around which at least a part of the belt is wound, and a motor that rotates the first pulley to move the belt. The measuring unit may be disposed in the vicinity of the first pulley. In the displacement process, the processing control unit may displace the holding unit in the direction from the second pulley toward the first pulley by the driving unit. In this case, it is considered that a compressive force is applied to a part of the belt between the member connected to the holding unit and the first pulley as the holding unit stops. Therefore, vibration becomes large in a part of the belt, and it is easy to acquire a vibration signal.

[0016] The driving unit may further include a slider that moves together with the holding unit. The slider may be connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measuring unit, the slider, and the second pulley may be arranged in this order. In this case, vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, so it is easy to acquire a vibration signal.

[0017] In the second process, the processing control unit may repeatedly execute the displacement process. The signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt generated by the displacement in each displacement process. The stop position of the holding unit may be set at different positions for each displacement process. The state determination unit may determine the state of the belt based on the stop position set for each displacement process. In this case, even if the stop positions are different, since the stop positions for each displacement process are taken into account, it becomes possible to appropriately determine the state of the belt.

[0018] The conveying unit may further include a second driving unit that displaces the holding unit in the second direction. In the second process, the processing control unit may execute a first displacement process of displacing the holding unit by the driving unit in the first direction and a second displacement process of displacing the holding unit by the second driving unit in the second direction. The signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt generated by the displacement in the first displacement process during a period that at least partially overlaps with at least a part of the execution period of the second displacement process. In this case, since the operation by the conveying unit and the inspection of the belt are at least partially overlapped, it is possible to suppress the influence on the process including the operation of the conveying unit by the inspection of the belt.

[0019] The driving unit may further include a first pulley and a second pulley over which at least a part of the belt is spanned and arranged in the first direction, a motor that moves the belt by rotating the first pulley, and a slider that moves together with the holding unit. The slider may be connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measurement unit, the slider, and the second pulley may be arranged in this order. In this case, since the vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, it is easy to acquire the vibration signal.

[0020] The driving unit may further include a first pulley and a second pulley over which at least a part of the belt is spanned and arranged in the first direction, and a slider that moves together with the holding unit. The slider may be connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the measurement unit, the first pulley, the slider, and the second pulley may be arranged in this order. In this case, the disturbance applied from the slider to a part of the belt close to the measurement unit is reduced through the first pulley, and it is possible to reduce the influence of the disturbance included in the vibration signal.

[0021] A substrate processing method according to one exemplary embodiment includes a first process of sequentially performing a predetermined process on a plurality of substrates by a processing unit, and a second process of loading and unloading each of the plurality of substrates to and from the processing unit by a transport unit including a belt, and executing a process including these processes. The method also includes obtaining a vibration signal corresponding to the vibration of the belt resulting from the operation of the transport unit from a measurement unit provided adjacent to the belt, and determining the state of the belt based on the vibration signal. Obtaining the vibration signal includes obtaining the vibration signal during the execution of the process. In this substrate processing method, it is possible to inspect the state of the belt while maintaining the throughput as in the above-described substrate processing apparatus.

[0022] Hereinafter, an embodiment will be described with reference to the drawings. In the description, the same reference numerals are assigned to the same elements or elements having the same function, and redundant descriptions are omitted. In some of the drawings, an orthogonal coordinate system defined by the X-axis, Y-axis, and Z-axis is shown. In the following embodiments, the Z-axis corresponds to the vertical direction, and the X-axis and Y-axis correspond to the horizontal direction.

[0023] [Substrate Processing System] The substrate processing system 1 shown in FIG. 1 is a system that forms a photosensitive film, exposes the photosensitive film, and develops the photosensitive film on a workpiece W. The workpiece W to be processed is, for example, a substrate or a substrate in a state where a film or a circuit is formed by performing a predetermined process. The substrate included in the workpiece W is, as an example, a wafer containing silicon. The workpiece W (substrate) may be formed in a circular shape. The workpiece W to be processed may be a glass substrate, a mask substrate, an FPD (Flat Panel Display), etc., or an intermediate obtained by performing a predetermined process on these substrates. The photosensitive film is, for example, a resist film.

[0024] The substrate processing system 1 includes a coating / development apparatus 2 and an exposure apparatus 3. The coating / development apparatus 2 is an apparatus for forming a resist film (photosensitive film) on a workpiece W. The exposure apparatus 3 is an apparatus for exposing the resist film formed on the workpiece W (substrate). Specifically, the exposure apparatus 3 irradiates an energy beam on the exposure target portion of the resist film by a method such as immersion exposure. The coating / development apparatus 2 performs a process of applying a resist (chemical solution) on the surface of the workpiece W to form a resist film before the exposure process by the exposure apparatus 3, and performs a development process of the resist film after the exposure process.

[0025] (Substrate processing apparatus) Hereinafter, as an example of the substrate processing apparatus, the configuration of the coating / development apparatus 2 will be described. As shown in FIGS. 1 and 2, the coating / development apparatus 2 includes a carrier block 4, a processing block 5, an interface block 6, and a control device 100 (control unit).

[0026] The carrier block 4 introduces the workpiece W into the coating / development apparatus 2 and exports the workpiece W from the coating / development apparatus 2. For example, the carrier block 4 can support a plurality of carriers C for the workpiece W, and incorporates a transfer unit A1 including a transfer arm. The carrier C accommodates, for example, a plurality of circular workpieces W. The transfer unit A1 takes out the workpiece W from the carrier C and delivers it to the processing block 5, and receives the workpiece W from the processing block 5 and returns it into the carrier C. The processing block 5 has processing modules 11, 12, 13, 14.

[0027] The processing module 11 incorporates a liquid processing unit U1, a heat treatment unit U2, and a transfer unit A3 that transfers the workpiece W to these units. The processing module 11 forms an underlayer film on the surface of the workpiece W by the liquid processing unit U1 and the heat treatment unit U2. The liquid processing unit U1 applies a processing liquid for forming the underlayer film on the workpiece W. The heat treatment unit U2 performs various heat treatments associated with the formation of the underlayer film.

[0028] The processing module 12 incorporates a liquid processing unit U1, a heat treatment unit U2, and a transfer unit A3 for transferring the workpiece W to these units. The processing module 12 forms a resist film on the lower layer film by means of the liquid processing unit U1 and the heat treatment unit U2. The liquid processing unit U1 applies a processing liquid (resist) for forming the resist film onto the lower layer film. The heat treatment unit U2 performs various heat treatments associated with the formation of the resist film.

[0029] The processing module 13 incorporates a liquid processing unit U1, a heat treatment unit U2, and a transfer unit A3 for transferring the workpiece W to these units. The processing module 13 forms an upper layer film on the resist film by means of the liquid processing unit U1 and the heat treatment unit U2. The liquid processing unit U1 applies a processing liquid for forming the upper layer film onto the resist film. The heat treatment unit U2 performs various heat treatments associated with the formation of the upper layer film.

[0030] The processing module 14 incorporates a liquid processing unit U1, a heat treatment unit U2, and a transfer unit A3 for transferring the workpiece W to these units. The processing module 14 performs development processing of the resist film subjected to exposure processing and heat treatments associated with the development processing by means of the liquid processing unit U1 and the heat treatment unit U2. The liquid processing unit U1 applies a developer onto the surface of the exposed workpiece W and then rinses it away with a rinse liquid to perform development processing of the resist film. The heat treatment unit U2 performs various heat treatments associated with the development processing. Specific examples of the heat treatments include pre-development heat treatment (PEB: Post Exposure Bake), post-development heat treatment (PB: Post Bake), etc.

[0031] A shelf unit U10 is provided on the side of the carrier block 4 within the processing block 5. The shelf unit U10 is partitioned into a plurality of cells arranged in the vertical direction. A transfer unit A7 including a lifting arm is provided in the vicinity of the shelf unit U10. The transfer unit A7 raises and lowers the workpiece W between the cells of the shelf unit U10.

[0032] On the interface block 6 side within the processing block 5, a shelf unit U11 is provided. The shelf unit U11 is partitioned into a plurality of cells arranged in the vertical direction. Since the shelf units U10 and U11 wait for the workpiece W (function as a buffer) in order to perform the next process on the workpiece W, these shelf units U10 and U11 also correspond to processing units that perform processing on the workpiece W.

[0033] The interface block 6 transfers the workpiece W to and from the exposure apparatus 3. For example, the interface block 6 incorporates a transfer unit A8 including a transfer arm and is connected to the exposure apparatus 3. The transfer unit A8 transfers the workpiece W arranged in the shelf unit U11 to the exposure apparatus 3. The transfer unit A8 receives the workpiece W from the exposure apparatus 3 and returns it to the shelf unit U11.

[0034] (Transfer unit) Next, with reference to FIGS. 3 and 4, an example of the transfer unit A3 in the processing module 12 will be described. The transfer unit A3 transfers the workpiece W while holding the workpiece W within the processing module 12. The transfer unit A3 transfers the workpiece W between a plurality of processing units included in the processing module 12. In the processing module 12 illustrated in FIG. 3, two liquid processing units U1 and two heat treatment units U2 are arranged in this order along a horizontal one direction.

[0035] In the present disclosure, the direction from the heat treatment unit U2 toward the liquid processing unit U1 is defined as the "positive Y-axis direction", and the direction from the liquid processing unit U1 toward the heat treatment unit U2 is defined as the "negative Y-axis direction". The direction from the transfer unit A3 toward the liquid processing unit U1 (or the heat treatment unit U2) is defined as the "positive X-axis direction", and the direction from the liquid processing unit U1 (heat treatment unit U2) toward the transfer unit A3 is defined as the "negative X-axis direction". Also, vertically upward is defined as the "positive Z-axis direction", and vertically downward is defined as the "negative Z-axis direction". A direction including either the positive or negative direction of each axis is simply denoted as the "X-axis direction" or the like.

[0036] The transfer unit A3 has, for example, a holding arm 20, horizontal drive units 30 and 50, and a lifting drive unit 70.

[0037] The holding arm 20 (holding unit) is configured to hold the workpiece W. The holding arm 20 holds the workpiece W such that the surface Wa of the workpiece W faces upward. The surface Wa is the surface on which the resist coating film is formed in the liquid processing unit U1. The holding arm 20 may be formed to surround the periphery of the workpiece W and support the peripheral portion of the back surface on the side opposite to the surface Wa of the workpiece W. The transfer unit A3 performs the loading and unloading of the workpiece W with respect to a processing unit such as the liquid processing unit U1 by displacing the holding arm 20 holding the workpiece W. That is, the transfer unit A3 loads the workpiece W into one processing unit by displacing the holding arm 20, and unloads the workpiece W from the processing unit by displacing the holding arm 20. The transfer unit A3 may perform the loading and unloading of a plurality of workpieces W with respect to one processing unit, respectively.

[0038] The horizontal drive unit 30 is configured to displace the holding arm 20 in one horizontal direction. The horizontal drive unit 30 is, for example, an actuator configured to reciprocate the holding arm 20 along one horizontal direction by a power source such as a motor. As shown in FIG. 4, the transfer unit A3 further has a rotation drive unit 46 that supports the horizontal drive unit 30 and a base 48. The rotation drive unit 46 is, for example, a rotary actuator configured to rotate the horizontal drive unit 30 around a vertical rotation axis by a power source such as a motor. When the horizontal drive unit 30 is rotated by the rotation drive unit 46, the moving direction of the holding arm 20 by the horizontal drive unit 30 changes.

[0039] For example, the horizontal drive unit 30 shown in FIG. 4 is arranged by a rotational drive unit 46 so as to reciprocate the holding arm 20 in the X-axis direction. In this arrangement, the horizontal drive unit 30 moves the holding arm 20 in the positive X-axis direction and moves the holding arm 20 in the negative X-axis direction. By moving the holding arm 20 in the X-axis direction (either the positive X-axis direction or the negative X-axis direction), the workpiece W held by the holding arm 20 moves along the X-axis direction (the first direction). The horizontal drive unit 30 is formed so as to extend along the direction in which the holding arm 20 is moved (for example, the X-axis direction). Details of the drive mechanism of the horizontal drive unit 30 will be described later. The base 48 is a member that supports the rotational drive unit 46 and the horizontal drive unit 30. The rotational drive unit 46 is provided on the base 48, and the base 48 is formed so as to extend, for example, along the X-axis direction. One end portion (for example, both side surfaces of one end portion) in the negative X-axis direction of the base 48 is connected to the lifting drive unit 70.

[0040] The lifting drive unit 70 is configured to displace the holding arm 20 in the vertical direction (the Z-axis direction shown in the figure). The lifting drive unit 70 is, for example, an actuator configured to reciprocate the holding arm 20 along the Z-axis direction (the first direction) by a power source such as a motor. The lifting drive unit 70, for example, supports the base 48, moves the base 48 in the positive Z-axis direction, and moves the base 48 in the negative Z-axis direction. By moving the base 48 in the Z-axis direction, the holding arm 20 (workpiece W) also moves along the Z-axis direction. The lifting drive unit 70 is formed so as to extend along the Z-axis direction in which the base 48 (holding arm 20) is moved. Details of the lifting drive unit 70 will be described later.

[0041] Returning to FIG. 3, the horizontal drive unit 50 is configured to displace the holding arm 20 in a horizontal one direction (the Y-axis direction in the drawing). The horizontal drive unit 50 is, for example, an actuator configured to reciprocate the holding arm 20 along the Y-axis direction (the first direction) by a power source such as a motor. The horizontal drive unit 50 supports, for example, the lifting drive unit 70, moves the lifting drive unit 70 in the positive Y-axis direction, and moves the lifting drive unit 70 in the negative Y-axis direction. When the horizontal drive unit 50 moves the lifting drive unit 70 in the Y-axis direction, the holding arm 20 (workpiece W) also moves along the Y-axis direction. The horizontal drive unit 50 is formed to extend along the Y-axis direction. Details of the drive mechanism of the horizontal drive unit 50 will be described later.

[0042] (Details of the measurement unit and each drive unit) Next, with reference to FIGS. 5 and 6 as well, a measurement unit used to inspect the state of the belt included in each drive unit will be described together with the detailed configuration of each drive unit. The coating / development apparatus 2 further includes measurement units 130, 150, and 170.

[0043] The measurement unit 130 is used to inspect the state of the belt of the horizontal drive unit 30. The measurement unit 150 is used to inspect the state of the belt of the horizontal drive unit 50. The measurement unit 170 is used to inspect the state of the belt of the lifting drive unit 70. In the present disclosure, the inspection of the state of the belt means inspecting whether the belt can operate normally. In one example, due to deterioration of the belt over time and malfunctions in the adjustment of the belt, etc., the belt (drive unit) may not operate normally, and in order to prevent these, the belt is inspected using each measurement unit. Hereinafter, the drive unit and the measurement unit will be described for each axis.

[0044] <Y-axis direction> Fig. 5(a) shows the details of the horizontal drive unit 50 that displaces the holding arm 20 in the Y-axis direction. The horizontal drive unit 50 includes a belt arranged so that at least a part thereof extends along the Y-axis direction, and displaces the holding arm 20 in the Y-axis direction by moving the belt. The horizontal drive unit 50 has, for example, a housing 52, pulleys 56a and 56b, a belt 58, a motor 62, and a slider 54.

[0045] The housing 52 houses each element included in the horizontal drive unit 50. The housing 52 is formed so as to extend along the Y-axis direction. An opening 52a is provided in a wall of the housing 52 facing a plurality of processing units (see also Fig. 4). A part of the slider 54 protrudes outside the housing 52 from the opening 52a.

[0046] As shown in Fig. 5(a), the pulley 56a (first pulley) and the pulley 56b (second pulley) are arranged side by side along the Y-axis direction. The pulleys 56a and 56b are arranged, for example, at each end in the housing 52 in the Y-axis direction. The pulleys 56a and 56b are each rotatably provided in the housing 52 around a rotation axis along the X-axis direction. The belt 58 is wound around the pulleys 56a and 56b. The belt 58 is, for example, a timing belt. The motor 62 is a power source that generates rotational torque. The motor 62 is, for example, a servo motor. The motor 62 is connected to the pulley 56a and rotates the pulley 56a. When the torque (driving force) from the motor 62 is transmitted to the pulley 56a, the belt 58 wound around the pulleys 56a and 56b moves along the Y-axis direction.

[0047] The slider 54 is formed to extend in the X-axis direction, as shown in FIG. 4, for example. The proximal end portion (the end portion farther from the processing unit) of the slider 54 in the X-axis direction is connected to the belt 58 within the housing 52. The distal end portion (the end portion closer to the processing unit) of the slider 54 in the X-axis direction protrudes outside the housing 52 through the opening 52a. The lower end portion of the lifting drive unit 70, for example, is connected to the distal end portion of the slider 54. Thus, the slider 54 is connected to the holding arm 20 via other members and moves together with the holding arm 20. When the belt 58 moves along the Y-axis direction by the torque of the motor 62, the slider 54 (the lifting drive unit 70) connected to the belt 58 also reciprocates along the Y-axis direction. As a result, the holding arm 20 and the workpiece W also move along the Y-axis direction.

[0048] In the above-described horizontal drive unit 50, the slider 54 is configured to be movable between the pulleys 56a and 56b. In a state where the slider 54 is disposed at a certain position between the pulleys 56a and 56b, the belt 58 includes a first portion 58a that extends along the Y-axis direction and connects between the pulleys 56a and 56b, and a second portion 58b that extends along the Y-axis direction and connects between the pulleys 56a and 56b. The first portion 58a and the second portion 58b are arranged side by side along the Z-axis direction and are substantially parallel to each other. In the example shown in FIG. 5(a), the slider 54 is connected to the first portion 58a. Hereinafter, among the first portion 58a, the portion between the pulley 56a and the slider 54 is referred to as the "string 64a", and the portion between the slider 54 and the pulley 56b is referred to as the "string 64b".

[0049] The measurement unit 150 is configured to be able to acquire a signal corresponding to the vibration of the belt 58 of the horizontal drive unit 50 (hereinafter referred to as the "vibration signal"). Specifically, the measurement unit 150 acquires a vibration signal corresponding to the vibration of the belt 58 generated as the holding arm 20 moves (conveying operation) by the horizontal drive unit 50. The measurement unit 150 acquires, for example, sound waves (vibrations of air) generated by the vibration of the belt 58. The measurement unit 150 is provided in the conveyance unit A3 (inside the housing 52) in a state close to the belt 58. The measurement unit 150 may have two sensors (sensors 92 and 94) for measuring sound waves. The sensor 92 and the sensor 94 have a common function with each other.

[0050] As shown in FIG. 5(b), the sensor 92 and the sensor 94 are arranged so as to sandwich the belt 58. In one example, the sensor 92 and the sensor 94 are arranged side by side along the Z-axis direction. That is, in the Z-axis direction, the sensor 92, the belt 58, and the sensor 94 are arranged in this order. Each of the sensors 92 and 94 is arranged at a position where it can acquire sound waves from the belt 58. The distance in the Z-axis direction between the sensor 92 and the belt 58 is substantially equal to the distance in the Z-axis direction between the sensor 94 and the belt 58. The sensor 92 acquires the sound wave SW1 propagating in the positive Z-axis direction from the belt 58, and the sensor 94 acquires the sound wave SW2 propagating in the negative Z-axis direction from the belt 58. In one example, each of the sensors 92 and 94 is a MEMS (Micro Electro Mechanical Systems) microphone. The measurement unit 150 (each of the sensors 92 and 94) outputs an electrical signal corresponding to the sound waves SW1 and SW2 to the control device 100.

[0051] The measurement unit 150 (sensors 92, 94) may be arranged in the vicinity of the pulley 56a to which the motor 62 is connected. In one example, the measurement unit 150 is arranged at a position where the distance from the pulley 56a is equal to or less than 1 / 3 of the distance in the Y-axis direction between the pulley 56a and the pulley 56b. The measurement unit 150 is arranged, for example, at a position closer to the pulley 56a on the chord 64a of the first portion 58a as shown in Fig. 5(a). In this case, the slider 54 is configured to be movable between a position where it does not interfere with the measurement unit 150 and a position where it does not interfere with the pulley 56b.

[0052] In the above configuration, the pulley 56a, the measurement unit 150, the slider 54, and the pulley 56b are arranged in this order along the movement path of the belt 58 (the movement locus of the belt 58 accompanying the movement of the belt 58 by the motor 62). Note that the regions corresponding to the above-described first portion 58a and second portion 58b (chords 64a, 64b) of the belt 58 change according to the position of the slider 54 in the Y-axis direction. However, the above-described arrangement relationship (the arrangement relationship along the movement path of the belt 58) of the pulley 56a, the measurement unit 150, the slider 54, and the pulley 56b holds regardless of the position of the slider 54 within the movement range.

[0053] The horizontal drive unit 50 exemplified above is used, for example, when moving the workpiece W between the processing units of the processing module 12. In one example, the horizontal drive unit 50 is used when moving the workpiece W from the liquid processing unit U1 located at the first position counted from the positive Y-axis direction to the heat treatment unit U2 located at the third position (see FIG. 3). Specifically, the transport unit A3 is in a state where the base end portion of the holding arm 20 overlaps with the base 48, and the holding arm 20 is moved by the horizontal drive unit 50 from a position facing the source liquid processing unit U1 in the X-axis direction (a position overlapping in the Y-axis direction) to a position facing the destination heat treatment unit U2 in the X-axis direction. At this time, the slider 54 shown in FIG. 5(a) moves from the pulley 56b toward the pulley 56a (measurement unit 150). When the holding arm 20 is moved in the positive Y-axis direction by the horizontal drive unit 50, the slider 54 moves from the pulley 56a (measurement unit 150) toward the pulley 56b.

[0054] <Z-axis direction> FIG. 6(a) shows the details of the lifting drive unit 70 that displaces the holding arm 20 in the Z-axis direction. FIG. 6(a) shows one of a pair of portions of the lifting drive unit 70 that sandwich the base 48 in the Y-axis direction (see also FIG. 3). The lifting drive unit 70 includes a belt arranged so that at least a part thereof extends along the Z-axis direction, and displaces the holding arm 20 in the Z-axis direction by moving the belt. The lifting drive unit 70 has, for example, a housing 72, pulleys 76a and 76b, a belt 78, a motor 82, and a slider 74.

[0055] The housing 72 houses each element included in the lifting drive unit 70. The housing 72 is formed to extend along the Z-axis direction. An opening 72a is provided in the wall of the housing 72 that faces the base 48. A part of the slider 74 protrudes outside the housing 72 from the opening 72a.

[0056] The pulley 76a (first pulley) and the pulley 76b (second pulley) are arranged side by side along the Z-axis direction. The height position of the pulley 76a is lower than the height position of the pulley 76b. The pulleys 76a and 76b are arranged at each end in the housing 72 in the Z-axis direction, for example. The pulleys 76a and 76b are each provided rotatably in the housing 72 around a rotation axis along the X-axis direction. The belt 78 is spanned over the pulleys 76a and 76b. The belt 78 is, for example, a timing belt. The motor 82 is a power source that generates rotational torque. The motor 82 is, for example, a servo motor. The motor 82 is connected to the pulley 76a and rotates the pulley 76a. When the torque (driving force) from the motor 82 is transmitted to the pulley 76a, the belt 78 spanned over the pulleys 76a and 76b moves along the Z-axis direction.

[0057] The slider 74 is formed, for example, to extend in the Y-axis direction as shown in FIG. 6(a). The base end portion (one end farther from the base 48) of the slider 74 in the Y-axis direction is connected to the belt 78 inside the housing 72. The tip portion (one end closer to the base 48) of the slider 74 in the Y-axis direction protrudes outside the housing 72 through the opening 72a. For example, one side surface of one end of the base 48 is connected to the tip portion of the slider 74. In this way, the slider 74 is connected to the holding arm 20 via another member and moves together with the holding arm 20. When the belt 78 moves along the Z-axis direction due to the torque from the motor 82, the slider 74 (base 48) connected to the belt 78 also reciprocates along the Z-axis direction. When the slider 74 (base 48) moves along the Z-axis direction, the holding arm 20 and the workpiece W also move along the Z-axis direction.

[0058] In the above lifting drive unit 70, the slider 74 is configured to be movable between the pulley 76a and the pulley 76b. In a state where the slider 74 is disposed at a position between the pulleys 76a and 76b, the belt 78 includes a first portion 78a that extends along the Z-axis direction and connects between the pulleys 76a and 76b, and a second portion 78b that extends along the Z-axis direction and connects between the pulleys 76a and 76b. The first portion 78a and the second portion 78b are arranged side by side along the Y-axis direction and are substantially parallel to each other. In the example shown in FIG. 5(a), the slider 74 is connected to the first portion 78a.

[0059] The measurement unit 170 is configured to be able to acquire a vibration signal corresponding to the vibration of the belt 78 of the lifting drive unit 70. Specifically, the measurement unit 170 acquires a vibration signal corresponding to the vibration of the belt 78 generated as the holding arm 20 is moved (conveying operation) by the lifting drive unit 70. The measurement unit 170 acquires, for example, sound waves generated by the vibration of the belt 78. The measurement unit 170 is provided in the conveyance unit A3 (inside the housing 72) in a state of being close to the belt 78. The measurement unit 170 may have two sensors (sensors 92 and 94) that measure sound waves, similar to the above-described measurement unit 150.

[0060] The sensors 92 and 94 of the measurement unit 170 are arranged so as to sandwich the belt 78. In one example, the sensor 92 and the sensor 94 are arranged side by side along the Y-axis direction. That is, in the Y-axis direction, the sensor 92, the belt 78, and the sensor 94 are arranged in this order. The measurement unit 170 (each of the sensors 92 and 94) outputs an electrical signal corresponding to the sound waves SW1 and SW2 from the belt 78 to the control device 100.

[0061] The measurement unit 170 (sensors 92, 94) may be arranged in the vicinity of the pulley 76a to which the motor 82 is connected. The measurement unit 170 is arranged, for example, in the vicinity of the pulley 76a in the second portion 78b to which the slider 74 is not connected, as shown in FIG. 6(a). In this case, since the slider 74 does not interfere with the measurement unit 170, it is configured to be movable between a position that does not interfere with the pulley 76a and a position that does not interfere with the pulley 76b. The measurement unit 170 may be arranged at a position where the distance from the pulley 76a is equal to or less than 1 / 3 of the distance in the Z-axis direction between the pulley 76a and the pulley 76b. The distance between the arranged position (fixed position) of the measurement unit 170 and the pulley 56a may be approximately the same as or smaller than the distance between the upper end of the slider 74 and the pulley 56a when the slider 74 is located at the limit position closest to the pulley 76a within the movement range of the slider 74.

[0062] In the above configuration, along the movement path of the belt 78, the measurement unit 170, the pulley 76a, the slider 74, and the pulley 76b are arranged in this order. Note that the regions corresponding to the first portion 78a and the second portion 78b of the belt 78 change according to the position of the slider 74 in the Z-axis direction. However, the above-described arrangement relationship (the arrangement relationship along the movement path of the belt 78) among the measurement unit 170, the pulley 76a, the slider 74, and the pulley 76b holds regardless of the position of the slider 74 within the movement range.

[0063] The lifting drive unit 70 exemplified above is used, for example, when moving the holding arm 20 during the transfer of the workpiece W to and from the processing unit. In one example, the transfer unit A3 moves the holding arm 20 from one height position to a position lower than that height position by the lifting drive unit 70 in a state where the base end portion of the holding arm 20 is disposed at a position where it does not overlap with the base 48 (a state where the tip end portion of the holding arm 20 is located within the processing unit). At this time, the slider 74 shown in FIG. 6(a) moves from the pulley 76b toward the pulley 76a. When the holding arm 20 is moved in the positive Z-axis direction by the lifting drive unit 70, the slider 74 moves from the pulley 76a toward the pulley 76b.

[0064] <X-axis direction> FIG. 6(b) shows a horizontal drive unit 30 that displaces the holding arm 20 in the X-axis direction. The horizontal drive unit 30 includes a belt disposed at least partially along the X-axis direction, and displaces the holding arm 20 in the X-axis direction by moving the belt. The horizontal drive unit 30 includes, for example, a housing 32, pulleys 36a, 36b, 36c, 36d, a belt 38, a motor 42, and a slider 34.

[0065] The housing 32 houses each element included in the horizontal drive unit 30. The housing 32 is formed to extend along the X-axis direction. For example, an opening 32a is provided in the upper wall of the housing 32. A part of the slider 34 protrudes outside the housing 32 from the opening 32a.

[0066] The pulley 36a (first pulley) and the pulley 36b (second pulley) are arranged side by side along the X-axis direction. The distance in the X-axis direction between the pulley 36a and the liquid processing unit U1 (heat treatment unit U2) is smaller than the distance between the pulley 36b and the liquid processing unit U1. The pulleys 36a, 36b are arranged, for example, at each end in the housing 32 in the X-axis direction. The pulley 36c and the pulley 36d are arranged between the pulleys 36a, 36b in the X-axis direction and are arranged below the pulleys 36a, 36b in the Z-axis direction. The height position of the pulley 36c is higher than the height position of the pulley 36d. In the X-axis direction, the pulley 36a, the pulley 36c, the pulley 36d, and the pulley 36b are arranged in this order. The pulleys 36a, 36b, 36c, 36d are each provided rotatably in the housing 32 around a rotation axis along the Y-axis direction.

[0067] The belt 38 is stretched over the pulleys 36a, 36b, 36c, 36d. The belt 38 is, for example, a timing belt. The motor 42 is a power source that generates rotational torque. The motor 42 is, for example, a servo motor. The motor 42 is connected to the pulley 36d and rotates the pulley 36d. When the torque (driving force) from the motor 42 is transmitted to the pulley 36d, the belt 38 stretched over the pulleys 36a, 36b, 36c, 36d moves along the X-axis direction between the pulleys 36a, 36b.

[0068] The slider 34 is formed to extend in the Z-axis direction, for example, as shown in FIG. 6(b). The base end portion (one end portion located downward) of the slider 34 in the Z-axis direction is connected to the belt 38 inside the housing 32. The tip end portion (one end portion located upward) of the slider 34 in the Z-axis direction protrudes outside the housing 32 through the opening 32a. For example, the base end portion of the holding arm 20 (the portion that does not hold the workpiece W of the holding arm 20) is connected to the tip end portion of the slider 34. Thus, the slider 34 is connected to the holding arm 20 and moves together with the holding arm 20. When the belt 38 moves along the X-axis direction by the torque of the motor 42, the slider 34 (holding arm 20) connected to the belt 38 also reciprocates along the X-axis direction. When the slider 34 (holding arm 20) moves along the X-axis direction, the workpiece W held by the holding arm 20 also moves along the X-axis direction.

[0069] In the above horizontal drive unit 30, the slider 34 is configured to be movable between the pulleys 36a and 36b. In a state where the slider 34 is disposed at a position between the pulleys 36a and 36b, the belt 38 includes a first portion 38a that extends along the X-axis direction and connects between the pulleys 36a and 36b, and a second portion 38b that connects between the pulleys 36a and 36d. When viewed from the Y-axis direction, the second portion 38b is inclined with respect to the first portion 38a. In the example shown in FIG. 6(b), the slider 34 is connected to the first portion 38a.

[0070] The measurement unit 130 is configured to be able to acquire a vibration signal corresponding to the vibration of the belt 38 of the horizontal drive unit 30. Specifically, the measurement unit 130 acquires a vibration signal corresponding to the vibration of the belt 38 generated as the holding arm 20 moves (conveying operation) by the horizontal drive unit 30. The measurement unit 130 acquires, for example, sound waves generated by the vibration of the belt 38. The measurement unit 130 is provided in the conveyance unit A3 (inside the housing 32) in a state close to the belt 38. The measurement unit 130 may have two sensors (sensors 92 and 94) for measuring sound waves, similar to the above-described measurement unit 150.

[0071] The sensors 92 and 94 of the measurement unit 130 are arranged so as to sandwich the belt 38. In one example, the sensors 92 and 94 are arranged side by side along a direction orthogonal to the second portion 38b of the belt 38. That is, in the direction orthogonal to the second portion 38b, the sensor 92, the belt 38, and the sensor 94 are arranged in this order. The measurement unit 130 (each of the sensors 92 and 94) outputs an electrical signal corresponding to the sound waves SW1 and SW2 from the belt 38 to the control device 100.

[0072] The measurement unit 130 (sensors 92 and 94) may be arranged between the pulley 36a and the pulley 36d. The measurement unit 130 is arranged, for example, at approximately the center (near the pulley 36a at the approximate center) between the pulley 36a and the pulley 36d of the second portion 38b to which the slider 34 is not connected, as shown in FIG. 6(b). In this case, since the slider 34 does not interfere with the measurement unit 130, it is configured to be movable between a position that does not interfere with the pulley 36a and a position that does not interfere with the pulley 36b.

[0073] In the above configuration, along the movement path of the belt 38, the measurement unit 130, the pulley 36a, the slider 34, and the pulleys 36b, 36c, and 36d are arranged in this order. Note that the regions corresponding to the first portion 38a and the second portion 38b of the belt 38 change according to the position of the slider 34 in the X-axis direction. However, regardless of the position of the slider 34 within the movement range, the above-described arrangement relationship (the arrangement relationship along the movement path of the belt 38) of the measurement unit 130, the pulley 36a, the slider 34, and the pulleys 36b, 36c, and 36d is established.

[0074] The horizontal drive unit 30 exemplified above is used, for example, when moving the holding arm 20 to carry in and out the work W with respect to the processing unit. In one example, the transfer unit A3 moves the holding arm 20 from a position where the base end portion of the holding arm 20 overlaps with the base 48 to a position where the base end portion of the holding arm 20 does not overlap with the base 48 in a state of facing the processing unit at the carry-in / carry-out destination in the X-axis direction. At this time, the slider 34 shown in FIG. 6(b) moves from the pulley 36b toward the pulley 36a. When the holding arm 20 moves in the negative X-axis direction by the horizontal drive unit 30, the slider 34 moves from the pulley 36a toward the pulley 36b.

[0075] (Control device) Subsequently, an example of the control device 100 will be described with reference to FIGS. 7 and 8. The control device 100 controls the coating / developing device 2. The control device 100 controls at least the liquid processing unit U1, the heat treatment unit U2, the transfer unit A3, and the measurement units 130, 150, 170. The control device 100 has, as a functional configuration (hereinafter referred to as a "function module"), for example, a process control unit 202 and an inspection control unit 204. The inspection control unit 204 has a signal acquisition unit 212, a data extraction unit 214, a frequency calculation unit 216, a storage unit 218, a state determination unit 220, and an output unit 222. The processes executed by each function module correspond to the processes executed by the control device 100.

[0076] The process control unit 202 executes process processing on a plurality of works W. The process processing is to sequentially perform a series of processes (for example, a series of processes from the formation of the lower layer film to the development process) executed in the coating / developing device 2 on a plurality of works W in a predetermined period. The process processing includes a first process of performing a predetermined process (for example, liquid processing or heat treatment) on a plurality of works W by a processing unit such as the liquid processing unit U1 (heat treatment unit U2). Further, the process processing includes a second process of carrying in and out a plurality of works W by the transfer unit A3 for one processing unit such as the liquid processing unit U1.

[0077] The second process includes a displacement process of displacing the holding arm 20 by the horizontal drive unit 30 along the X-axis direction, a displacement process of displacing the holding arm 20 by the horizontal drive unit 50 along the Y-axis direction, and a displacement process of displacing the holding arm 20 by the lifting drive unit 70 along the Z-axis direction. Each of these three displacement processes includes a displacement process of displacing the holding arm 20 in the positive direction of each axis and a displacement process of displacing the holding arm 20 in the negative direction of each axis.

[0078] The signal acquisition unit 212 acquires vibration signals corresponding to the vibration of the belt from each of the measurement units 130, 150, and 170. For example, the signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt by calculating the difference between two electrical signals corresponding to the sound waves SW1 and SW2 from the sensors 92 and 94 of each measurement unit. The signal acquisition unit 212 acquires the vibration signal during the execution period of the process processing. The signal acquisition unit 212 acquires the vibration signal, for example, without stopping a series of processes (operation of the apparatus) by the coating / developing apparatus 2 during the operation period of the coating / developing apparatus 2. In one example, after the displacement process of each axis is completed and the holding arm 20 stops in that axis, the signal acquisition unit 212 acquires a vibration signal (a vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement process) from the belt of the drive unit corresponding to the displacement process.

[0079] The data extraction unit 214 extracts data (hereinafter referred to as "analysis data") for use in inspecting the belt from the vibration signals acquired by the signal acquisition unit 212. For example, the data extraction unit 214 extracts data from the vibration signals from the time when the first predetermined time has elapsed after the displacement process is completed (after the holding arm 20 stops) to the time when the second predetermined time has further elapsed from the first predetermined time. The first predetermined time and the second predetermined time are set in advance and are set to such an extent that sound waves corresponding to the vibration of the belt can be measured after the displacement process is completed. For example, the first predetermined time is set to about several tens of milliseconds to several hundreds of milliseconds, and the second predetermined time is set to about several milliseconds to several tens of milliseconds.

[0080] The vibration frequency calculation unit 216 calculates the vibration frequency of the belt based on the analysis data extracted by the data extraction unit 214. For example, the vibration frequency calculation unit 216 calculates the frequency spectrum by performing a Fast Fourier Transform on the analysis data, and detects (calculates) the frequency with the largest amplitude in the frequency spectrum as the vibration frequency of the belt.

[0081] The storage unit 218 stores, for each axis, the frequency (vibration frequency) of the vibration of the belt calculated by the vibration frequency calculation unit 216. The storage unit 218 stores, for each axis, the vibration frequency of the belt repeatedly calculated by the vibration frequency calculation unit 216 during a predetermined period. The predetermined period is determined in advance and may be, for example, one day, one week, one month, or several months, or may be the period from the start of operation of the coating / developing apparatus 2 to the stop of operation for maintenance or the like.

[0082] The state determination unit 220 determines the state of the belt based on the vibration signal acquired by the signal acquisition unit 212 for each axis. The state determination unit 220 determines, for example, for each axis, whether the state of the belt is abnormal based on the calculation result of the frequency of the belt stored by the storage unit 218. In the present disclosure, the belt being in an abnormal state includes not only the case where the belt has already failed but also the case where it is approaching a failure state (that is, the case where there is a high possibility of becoming inoperable if continued to be used as it is).

[0083] The output unit 222 outputs a signal (hereinafter referred to as an "abnormal signal") indicating that the state of the belt on the axis is not normal according to the determination result for each axis by the state determination unit 220. For example, when it is shown by the determination result of the state determination unit 220 that the state of the belt is abnormal, the output unit 222 outputs an abnormal signal to a monitor for notifying an operator or the like. Alternatively, when it is shown by the determination result of the state determination unit 220 that the state of the belt is abnormal, the output unit 222 outputs an abnormal signal to the process control unit 202 to stop a series of processes (process processing) by the coating / developing apparatus 2.

[0084] The control device 100 is constituted by one or more control computers. For example, the control device 100 has a circuit 240 shown in FIG. 8. The circuit 240 has one or more processors 242, a memory 244, a storage 246, an input / output port 248, and a timer 252. The storage 246 has a computer-readable storage medium such as a hard disk. The storage medium stores a program for causing the control device 100 to execute a substrate processing method described later. The storage medium may be a removable medium such as a non-volatile semiconductor memory, a magnetic disk, and an optical disk. The memory 244 temporarily stores a program loaded from the storage medium of the storage 246 and an arithmetic result by the processor 242.

[0085] The processor 242 executes the above program in cooperation with the memory 244. The input / output port 248 performs input / output of electrical signals with the liquid processing unit U1, the transfer unit A3, and the measurement units 130, 150, 170, etc. according to a command from the processor 242. The timer 252 measures the elapsed time, for example, by counting reference pulses at a fixed period. Note that the hardware configuration of the control device 100 may be constituted by a dedicated logic circuit or an ASIC (Application Specific Integrated Circuit) integrating the same.

[0086] [Substrate Processing Method] Subsequently, with reference to FIG. 9, a coating / development process executed in the coating / development apparatus 2 as an example of the substrate processing method will be described. FIG. 9 is a flowchart showing an example of a coating / development process including an exposure process, and shows a procedure of the coating / development process for one workpiece W. First, the processing control unit 202 of the control device 100 controls the transfer unit A1 to transfer the workpiece W in the carrier C to the shelf unit U10, and controls the transfer unit A7 to place the workpiece W in the cell for the processing module 11.

[0087] Next, the process control unit 202 controls the processing module 11 to form a lower layer film on the surface Wa of the workpiece W (step S01). In step S01, for example, the process control unit 202 controls the transfer unit A3 to transfer the workpiece W from the shelf unit U10 to the liquid processing unit U1. Then, the process control unit 202 controls the liquid processing unit U1 so that a coating film of the processing liquid for forming the lower layer film is formed on the surface Wa of the workpiece W. The process control unit 202 controls the transfer unit A3 to transfer the workpiece W with the coating film formed thereon to the heat treatment unit U2. Then, the process control unit 202 controls the heat treatment unit U2 so that a lower layer film is formed on the surface Wa of the workpiece W. After that, the process control unit 202 controls the transfer unit A3 to return the workpiece W after the lower layer film is formed to the shelf unit U10, and controls the transfer unit A7 to place this workpiece W in the cell for the processing module 12.

[0088] Next, the process control unit 202 controls the processing module 12 to form a resist film on the surface Wa of the workpiece W after the lower layer film is formed (step S02). In step S02, for example, the process control unit 202 controls the transfer unit A3 to transfer the workpiece W in the shelf unit U10 to any one of the liquid processing units U1 in the processing module 12. Then, the process control unit 202 controls the liquid processing unit U1 so that a coating film of the resist is formed on the surface Wa of the workpiece W. The process control unit 202 controls the transfer unit A3 to transfer the workpiece W with the coating film of the resist formed thereon to the heat treatment unit U2. Then, the process control unit 202 controls the heat treatment unit U2 so that a resist film is formed on the surface Wa of the workpiece W. After that, the process control unit 202 controls the transfer unit A3 to return the workpiece W after the resist film is formed to the shelf unit U10, and controls the transfer unit A7 to place this workpiece W in the cell for the processing module 13.

[0089] Next, the process control unit 202 controls the processing module 13 to form an upper layer film on the surface Wa of the workpiece W after the resist film is formed (step S03). In step S03, for example, the process control unit 202 controls the transfer unit A3 to transfer the workpiece W to the liquid processing unit U1. Then, the process control unit 202 controls the liquid processing unit U1 so that a coating film of the processing liquid for forming the upper layer film is formed on the surface Wa of the workpiece W. The process control unit 202 controls the transfer unit A3 to transfer the workpiece W with the coating film formed thereon to the heat treatment unit U2. Then, the process control unit 202 controls the heat treatment unit U2 so that an upper layer film is formed on the surface Wa of the workpiece W. After that, the process control unit 202 controls the transfer unit A3 to transfer the workpiece W after the upper layer film is formed to the shelf unit U11.

[0090] Next, the process control unit 202 controls the transfer unit A8 to send out the workpiece W in the shelf unit U11 to the exposure apparatus 3. Then, a control apparatus different from the control apparatus 100 controls the exposure apparatus 3 to perform an exposure process on the workpiece W on which the resist film is formed (step S04). After that, the process control unit 202 controls the transfer unit A8 to receive the workpiece W on which the exposure process has been performed and place it in the cell for the processing module 14 in the shelf unit U11.

[0091] Next, the process control unit 202 controls the processing module 14 to perform a development process on the workpiece W after the exposure process (step S05). In step S05, for example, the process control unit 202 controls the transfer unit A3 to transfer the workpiece W to the heat treatment unit U2, and then controls the heat treatment unit U2 to perform a pre-development heat treatment on the resist film of this workpiece W. Then, the process control unit 202 controls the transfer unit A3 to transfer the workpiece W on which the pre-development heat treatment has been performed to the liquid processing unit U1, and then controls the liquid processing unit U1 to perform a development process on the resist film of this workpiece W.

[0092] After that, the process control unit 202 controls the transfer unit A3 to transfer the work W subjected to the development process to the heat treatment unit U2, and then controls the heat treatment unit U2 to perform post-development heat treatment on the resist film of the work W. Then, the process control unit 202 controls the transfer unit A3 to return the work W to the shelf unit U10, and controls the transfer unit A7 and the transfer unit A1 to return the work W into the carrier C. Thus, the coating and development process for one work W is completed.

[0093] In the substrate processing method exemplified above, the control device 100 (inspection control unit 204) inspects the state of the belt of each drive unit in parallel with the transfer operation (displacement process) of each of the plurality of works W in a series of process processes by the coating / development device 2. Each transfer operation of the work W includes the displacement process of the holding arm 20 in the state of not holding the work W and the displacement process of the holding arm 20 in the state of holding the work W. After the displacement process of the holding arm 20 in the X-axis direction, the control device 100 uses the measurement unit 130 to inspect the state of the belt 38 of the horizontal drive unit 30. After the displacement process of the holding arm 20 in the Y-axis direction, the control device 100 uses the measurement unit 150 to inspect the state of the belt 58 of the horizontal drive unit 50. After the displacement process of the holding arm 20 in the Z-axis direction, the control device 100 uses the measurement unit 170 to inspect the state of the belt 78 of the lifting drive unit 70.

[0094] FIG. 10 partially shows an example of a timing chart of the transfer operation (displacement process) of the holding arm 20 executed in the resist film formation process of step S02 shown in FIG. 9 and the inspection of the belt executed along with the transfer operation. In a part of step S02, for example, the process control unit 202 of the control device 100 sequentially executes the operation of unloading the work W from the liquid processing unit U1, the operation of moving the work W from the liquid processing unit U1 to the heat treatment unit U2, and the operation of loading the work W into the heat treatment unit U2.

[0095] In the operation of carrying out the workpiece W from the liquid processing unit U1, first, the "X-axis extension" operation is performed. In this X-axis extension operation, in a position facing the liquid processing unit U1 in the X-axis direction (a position overlapping in the Y-axis direction) and in a state where the holding arm 20 does not hold the workpiece W, the processing control unit 202 of the control device 100 executes a displacement process (first displacement process) of displacing the holding arm 20 in the positive direction in the X-axis direction by the horizontal drive unit 30.

[0096] Then, the "Z-axis up" operation is performed. In this Z-axis up operation, the processing control unit 202 executes a displacement process (second displacement process) of displacing the holding arm 20 in the positive direction in the Z-axis direction (second direction) by the lifting drive unit 70 (second drive unit) in order to receive the workpiece W from the liquid processing unit U1. During at least a part of the period of execution of the displacement process by the lifting drive unit 70, "X-axis inspection" is performed. In this X-axis inspection, the inspection control unit 204 acquires a vibration signal corresponding to the vibration of the belt 38 of the horizontal drive unit 30 generated by the displacement in the previous displacement process in the positive X-axis direction (X-axis extension operation), and performs an inspection (for example, calculation and storage of the vibration frequency) of the belt 38 based on the acquired vibration signal. After that, the "X-axis retraction" operation is performed. In this X-axis retraction operation, the processing control unit 202 executes a displacement process of displacing the holding arm 20 holding the workpiece W in the negative X-axis direction.

[0097] Next, in the operation of moving the workpiece W from the liquid processing unit U1 to the heat treatment unit U2, the "Y-axis operation" is performed. In this Y-axis operation, the processing control unit 202 executes a displacement process (first displacement process) of displacing the holding arm 20 in the negative Y-axis direction by the horizontal drive unit 50.

[0098] Next, in the operation of loading the work W into the heat treatment unit U2, first, the "X-axis extension" operation is performed. In this X-axis extension operation, the processing control unit 202 executes a displacement process (second displacement process) of displacing the holding arm 20 holding the work W in the positive direction in the X-axis direction (second direction) by the horizontal drive unit 30 (second drive unit). During a period at least partially overlapping with the execution period of the displacement process by this horizontal drive unit 30, "Y-axis inspection" is performed. In this Y-axis inspection, the inspection control unit 204 acquires a vibration signal corresponding to the vibration of the belt 58 of the horizontal drive unit 50 generated by the displacement in the previous displacement process (Y-axis operation) in the negative Y-axis direction, and inspects the belt 58 based on the acquired vibration signal.

[0099] Then, the "Z-axis down" operation is performed. In this Z-axis down operation, the processing control unit 202 executes a displacement process (second displacement process) of displacing the holding arm 20 in the negative direction in the Z-axis direction by the lifting drive unit 70 in order to transfer the work W held by the holding arm 20 to the heat treatment unit U2. During a period at least partially overlapping with the execution period of the displacement process by this lifting drive unit 70, "X-axis inspection" is performed. In this X-axis inspection, the inspection control unit 204 acquires a vibration signal corresponding to the vibration of the belt 38 of the horizontal drive unit 30 generated by the displacement in the previous displacement process in the positive X-axis direction (the displacement process in the positive X-axis direction with the work W held), and inspects (for example, calculates and stores the vibration frequency) the belt 38 based on the acquired vibration signal.

[0100] Thereafter, the "X-axis pulling" operation is performed. In this X-axis pulling operation, the processing control unit 202 causes the horizontal drive unit 30 to execute a displacement process (second displacement process) of displacing the holding arm 20 that does not hold the workpiece W in the negative X-axis direction. During at least a part of the period in which the displacement process by the lifting drive unit 70 is executed, "Z-axis inspection" is performed. In this Z-axis inspection, the inspection control unit 204 acquires a vibration signal corresponding to the vibration of the belt 78 of the lifting drive unit 70 generated by the displacement in the previous displacement process in the negative Z-axis direction (Z-axis down operation), and performs an inspection (for example, calculation and storage of the vibration frequency) of the belt 78 based on the acquired vibration signal. Thus, the operation of loading the workpiece W into the heat treatment unit U2 is completed.

[0101] Thereafter, the control device 100 repeats the same conveyance operation and inspection. In the above inspection, the inspection control unit 204 repeatedly calculates and stores the vibration frequency of the belt 38 along with the conveyance operation in the negative X-axis direction, and may not perform the calculation and storage of the vibration frequency of the belt 38 along with the conveyance operation in the positive X-axis direction. Alternatively, the inspection control unit 204 may repeatedly calculate the vibration frequency of the belt 38 along with the conveyance operation in the positive X-axis direction, and may not perform the calculation of the vibration frequency of the belt 38 along with the conveyance operation in the negative X-axis direction. Also, different from the above example, the inspection control unit 204 calculates the vibration frequency of the belt 38 along with the conveyance operation in the positive X-axis direction (negative X-axis direction) in either the state where the holding arm 20 holds the workpiece W or the state where it does not hold the workpiece W, and may not perform the calculation of the vibration of the belt 38 along with the conveyance operation in the positive X-axis direction (negative X-axis direction) in the other state. Regarding the inspection accompanying the conveyance operation in the Y-axis direction and the conveyance operation in the Z-axis direction, the inspection control unit 204 may repeatedly calculate the vibration frequency of the belt in the same operation (or the same operation and state) as in the X-axis direction.

[0102] Subsequently, referring to FIGS. 11 and 12, the inspection of the belt in the drive unit of one axis will be described. FIG. 11 is a flowchart showing an example of a processing procedure (inspection method) when the vibration frequency is repeatedly calculated to inspect the belt 38 in the conveyance operation (displacement process) in the positive X-axis direction.

[0103] In this inspection method, first, the control device 100 waits until the displacement process in the positive X-axis direction is completed (step S21). In step S21, for example, the inspection control unit 204 waits until the operation of the holding arm 20 moving to a position where the base end portion of the holding arm 20 does not overlap with the base 48 stops. In one example, the inspection control unit 204 acquires from the processing control unit 202 information that the rotation by the motor 62 of the horizontal drive unit 30 has stopped.

[0104] In step S21, when it is determined that the displacement process has ended (step S21: YES), the control device 100 acquires a vibration signal corresponding to the vibration of the belt 38 generated due to the displacement process in the positive X-axis direction (step S22). For example, the signal acquisition unit 212 acquires a vibration signal from the measurement unit 130 until a predetermined time elapses from the end point of the displacement process in the positive X-axis direction. During the execution of step S22, the processing control unit 202 may perform a displacement process on an axis other than the X-axis direction, or may cause the processing unit to execute processing on the workpiece W.

[0105] Next, the control device 100 extracts analysis data to be used for belt inspection from the vibration signals acquired by the signal acquisition unit 212 (step S23). As shown in FIG. 12(a), for example, the data extraction unit 214 extracts, from the vibration signals, data during a second predetermined time t2 after a first predetermined time t1 has elapsed from the end point of the displacement process (the stop point of the holding arm 20) as the analysis data. The first predetermined time t1 and the second predetermined time t2 are preset based on the time during which the sound wave due to the vibration of the belt caused by the displacement of the holding arm 20 can be measured. The first predetermined time t1 is set to the time when it is assumed that the vibration accompanying the stop of the holding arm 20 (slider) starts in a part of the belt close to the inspection unit from the end point of the displacement process. The second predetermined time t2 is set to the time when it is assumed that the vibration of the belt accompanying the stop of the holding arm 20 (slider) continues.

[0106] Next, the control device 100 calculates the frequency of the vibration of the belt 38 that occurs due to the displacement process in step S21 based on the analysis data extracted by the data extraction unit 214 (step S24). For example, the frequency calculation unit 216 calculates a frequency spectrum as shown in FIG. 12(b) by performing a fast Fourier transform on the analysis data. Then, the frequency calculation unit 216 calculates the frequency with the largest amplitude (frequency f1 in the example shown in FIG. 12(b)) from the calculated frequency spectrum as the vibration frequency of the belt 38. Next, the control device 100 (storage unit 218) stores information indicating the calculated vibration frequency of the belt 38 (step S25).

[0107] Next, the control device 100 determines whether a predetermined period has elapsed since a predetermined reference time point (step S26). In step S26, for example, the control device 100 determines whether a predetermined period (for example, one day) has elapsed since the start of operation of the coating / developing apparatus 2. If it is determined in step S26 that the predetermined period has not elapsed (step S26: NO), the control device 100 repeatedly executes steps S21 to S26. As a result, while the processing control unit 202 repeatedly executes the displacement process, the control device 100 (inspection control unit 204) acquires a vibration signal corresponding to the vibration of the belt 38 generated by the displacement in each displacement process. Then, the inspection control unit 204 calculates the vibration frequency of the belt 38 for each displacement process and stores the calculated vibration frequency. As a result, a plurality of measured values of the vibration frequency of the belt 38 are stored in the storage unit 218.

[0108] Next, the control device 100 calculates a vibration frequency (hereinafter referred to as "determination vibration frequency") for use in determining the state of the belt 38 (step S27). In step S27, for example, the state determination unit 220 calculates a statistical value of a plurality of measured values of the vibration frequency stored over a predetermined period as the determination vibration frequency. In one example, the state determination unit 220 calculates the average value, median value, lower limit value, upper limit value, or standard deviation of a plurality of measured values of the vibration frequency of the belt 38 as the determination vibration frequency.

[0109] Next, the control device 100 (state determination unit 220) determines whether the determined vibration frequency is smaller than a predetermined threshold value (step S28). The threshold value is set in advance, and is set, for example, based on a value obtained by measuring the vibration frequency of the belt when the tension of the belt is intentionally decreased. In step S28, if it is determined that the determined vibration frequency is smaller than the above threshold value (step S28: YES), the control device 100 outputs an abnormal signal indicating that the state of the belt 38 is not normal (step S29).

[0110] In step S29, for example, the output unit 222 outputs an abnormal signal indicating that the belt 38 is faulty, or an abnormal signal indicating that the belt 38 is approaching a faulty state. In one example, the output unit 222 outputs an abnormal signal to a monitor for notifying an operator or the like. Alternatively, the output unit 222 outputs an abnormal signal to the process control unit 202, and the process control unit 202 that has received the abnormal signal stops the process by the coating / developing device 2. On the other hand, if it is determined that the determined vibration frequency is equal to or greater than the above threshold value (step S28: NO), the control device 100 does not execute step S29. As described above, a series of processing procedures for inspecting the belt 38 is completed.

[0111] In the flow described above, the inspection of the belt 38 regarding the X-axis has been described. However, the inspection of the belt 58 regarding the Y-axis and the inspection of the belt 78 regarding the Z-axis may also be executed in the same manner as the inspection of the belt 38.

[0112] In step S23, the first predetermined time t1 for determining the data extraction range may be set to different values for each axis. The first predetermined time t1 may be set according to the distance between the measurement unit and the pulley on one side that is closer to the measurement unit among the two pulleys sandwiching the measurement unit. For example, as the distance between the measurement unit and the pulley increases, the first predetermined time t1 may be set to a longer value. In the above example, the distance between the pulley 36a of the horizontal drive unit 30 in the X-axis direction and the measurement unit 130 is larger than the distance between the pulley 56a of the horizontal drive unit 50 in the Y-axis direction and the measurement unit 150, and is also larger than the distance between the pulley 76a of the lifting drive unit 70 in the Z-axis direction and the measurement unit 170. That is, the first predetermined time t1 for the X-axis direction is longer than the first predetermined time t1 for the Y-axis direction, and is longer than the first predetermined time t1 for the Z-axis direction.

[0113] Also in the inspection of the belt 58 regarding the Y-axis, the above-described steps S21 to S26 are repeated. In this case, the inspection control unit 204 may calculate the vibration frequency of the vibration of the belt 58 for each displacement process in which the processing control unit 202 displaces the holding arm 20 in the negative Y-axis direction during a predetermined period. Regarding the movement of the holding arm 20 in the Y-axis direction, the stop position of the holding arm 20 (the stop position of the slider 54) is different according to the processing unit at the loading / unloading destination. When the stop position of the slider 54 is different, the length of a part of the belt 58 where the measurement unit 150 is provided (the length from the slider 54 to the pulley 56a) is different, and the vibration frequency changes regardless of the presence or absence of an abnormality in the state of the belt 58.

[0114] Therefore, in step S24, the vibration frequency calculation unit 216 may correct the vibration frequency of the belt 58 so that the calculated vibration frequency corresponds to the vibration frequency at a reference position arbitrarily determined among the stop positions according to the stop position of the holding arm 20 (slider 54). The vibration frequency calculation unit 216 may convert the vibration frequency calculated from the vibration signal into the vibration frequency when it is assumed that the slider 54 stops at the reference position, using an equation that defines the relationship between the string length, tension, and unit mass and the natural vibration frequency of the string. In this case, the storage unit 218 stores information indicating the corrected vibration frequency. Then, the state determination unit 220 determines the state of the belt 58 by comparing the statistical value of the corrected vibration frequency with a threshold value. This threshold value is determined based on the state of the belt 58 when the slider 54 is located at the reference position. As described above, the state determination unit 220 may determine the state of the belt 58 based on the stop position set for each displacement process in addition to the vibration signal obtained from the vibration of the belt 58.

[0115] In the inspection of the belt 78 regarding the Z-axis, the above-described steps S21 to S26 are also repeated. In this case, the inspection control unit 204 may calculate the vibration frequency of the vibration of the belt 78 for each displacement process in which the processing control unit 202 displaces the holding arm 20 in the negative Z-axis direction (downward) during a predetermined period.

[0116] In the above example, the vibration signal is acquired from the end point of the displacement process, and a part of the data of the vibration signal is extracted by the data extraction unit 214. However, the signal acquisition unit 212 may acquire the vibration signal during the period used for calculating the vibration frequency. For example, the signal acquisition unit 212 may start acquiring the vibration signal when the first predetermined time t1 has elapsed without starting to acquire the vibration signal at the end point of the displacement process, and stop acquiring the vibration signal when the second predetermined time t2 has elapsed from the first predetermined time t1. In this case, it may not be necessary to extract a part of the data by the data extraction unit 214. As described above, regardless of the presence or absence of data extraction, the state determination unit 220 determines the state of the belt based on the vibration signal corresponding to the vibration of the belt after the first predetermined time t1 has elapsed since the displacement process ended.

[0117] [Effects of Embodiment] In the coating / development apparatus 2 and the substrate processing method described above, a vibration signal corresponding to the vibration of the belt is acquired during the execution period of the process processing, and the state of the belt is determined based on the vibration signal. In this apparatus and method, since it is not necessary to stop the process processing by the coating / development apparatus 2 in order to determine the state of the belt, it is possible to inspect the state of the belt while maintaining the throughput.

[0118] When the tension of the belt decreases due to deterioration over time or the like, there is a risk of failures such as belt breakage or tooth skipping. Since the tension of the belt corresponds to the vibration frequency of the belt, it is possible to prevent belt failures by periodically checking the vibration frequency of the belt. As a method of inspecting the state of the belt, it is conceivable to stop a series of processes performed in the coating / development apparatus 2 and measure the vibration frequency of the belt. However, when the operation of the coating / development apparatus 2 is stopped, the throughput of the workpiece W decreases. On the other hand, in the above apparatus and method, the vibration frequency of the belt is measured without stopping the operation of the coating / development apparatus 2 (without stopping the process processing), so it is possible to inspect the tension of the belt without reducing the throughput.

[0119] The coating / development apparatus 2 described above further includes an output unit 222 that outputs an abnormal signal indicating that the state of the belt is not normal according to the determination result by the state determination unit 220. In this case, when it is determined that the state of the belt is not normal, it is possible to execute a process different from the case where the state of the belt is normal.

[0120] In the coating / developing apparatus 2 described above, in the second process of loading and unloading each of the plurality of workpieces W to / from the processing units, the processing control unit 202 executes a displacement process of displacing the holding arm 20 along the first direction by the driving unit. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement process after the displacement process is completed. The vibration signal acquired during the execution of the displacement process may contain a lot of information on vibration due to disturbance. In the above configuration, by acquiring the vibration signal after the completion of the displacement process, it is possible to reduce the influence of the disturbance contained in the vibration signal.

[0121] In the coating / developing apparatus 2 described above, the state determination unit 220 determines the state of the belt based on a vibration signal corresponding to the vibration of the belt after a predetermined time has elapsed since the completion of the displacement process. The vibration signal acquired immediately after the completion of the displacement process may still contain information on vibration due to disturbance. In the above configuration, it is possible to further reduce the influence of the disturbance contained in the vibration signal.

[0122] In the coating / developing apparatus 2 described above, the driving unit further includes two pulleys over which at least a part of the belt is stretched. The measurement unit may be provided close to the portion of the belt disposed between the two pulleys. The predetermined time may be set according to the distance between one of the two pulleys that is close to the measurement unit and the measurement unit. It is considered that the time until the vibration of the belt converges depends on the length of the belt between the fixed end and the position close to the measurement unit. In the above configuration, since the predetermined time changes according to the length of the belt between the fixed end and the measurement unit, it is possible to appropriately determine the state according to the vibration of the belt.

[0123] In the coating and developing apparatus 2 described above, the drive unit further includes a first pulley and a second pulley around which at least a part of the belt is wound, and a motor that rotates the first pulley to move the belt. The measurement unit is disposed in the vicinity of the first pulley. In the displacement process, the processing control unit displaces the holding arm 20 by the drive unit in the direction from the second pulley toward the first pulley. In this case, when the holding arm 20 stops in the displacement process, an inertial force of the slider connected to the holding arm 20 is generated in the direction toward the first pulley. Therefore, it is considered that a compressing force is applied to a part of the belt between the slider and the first pulley as the holding arm 20 (slider) stops. As a result, the vibration of the part of the belt including the part of the belt and where the measurement unit is disposed becomes large, and it is easy to acquire a vibration signal.

[0124] In the coating and developing apparatus 2 described above, the drive unit further includes a slider that moves together with the holding arm 20. The slider is connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measurement unit, the slider, and the second pulley are arranged in this order. When the slider moves from the second pulley toward the first pulley, an impact associated with the stop of the slider in the displacement process becomes large in a part of the belt between the first pulley and the slider, and it is easy to acquire a vibration signal.

[0125] In the coating and developing apparatus 2 described above, the processing control unit repeatedly executes displacement processing in the Y-axis direction in the second processing. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt 58 generated by the displacement in each displacement process. The stop position of the holding arm 20 is set to a different position in each displacement process. The state determination unit 220 determines the state of the belt 58 based on the stop position set in each displacement process. In this case, even if the stop positions of the holding arm 20 are different, since the stop positions of the holding arm 20 in each displacement process are taken into account, it is possible to appropriately determine the state of the belt 58.

[0126] In the coating and developing apparatus 2 described above, the conveyance unit A3 further includes a second drive unit that displaces the holding arm 20 in the second direction. In the second process, the process control unit 202 executes a first displacement process of displacing the holding arm 20 by the drive unit in the first direction and a second displacement process of displacing the holding arm 20 by the second drive unit in the second direction. The signal acquisition unit 212 acquires a vibration signal corresponding to the vibration of the belt generated by the displacement in the first displacement process during a period that at least partially overlaps with at least a part of the execution period of the second displacement process. In this case, since the operation by the conveyance unit A3 and the inspection of the belt are performed at least partially overlappingly, it is possible to suppress the influence on the process treatment by the inspection of the belt.

[0127] In the coating and developing apparatus 2 described above, the drive unit further includes a first pulley and a second pulley over which at least a part of the belt is spanned and arranged in the first direction, a motor that moves the belt by rotating the first pulley, and a slider that moves together with the holding arm 20. The slider is connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measurement unit, the slider, and the second pulley are arranged in this order. In this case, since the vibration accompanying the movement of the slider becomes large in a part of the belt between the first pulley and the slider, it is easy to acquire the vibration signal.

[0128] In the coating and developing apparatus 2 described above, the drive unit further includes a first pulley and a second pulley over which at least a part of the belt is spanned and arranged in the first direction, and a slider that moves together with the holding arm 20. The slider is connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the measurement unit, the first pulley, the slider, and the second pulley may be arranged in this order. In this case, the disturbance applied from the slider to a part of the belt close to the measurement unit is reduced through the first pulley, and it is possible to reduce the influence of the disturbance included in the vibration signal.

[0129] [Modification Example] As described above, the embodiments according to the present disclosure have been described in detail, but various modifications may be added to the above embodiments within the scope of the gist of the present disclosure. The conveyance unit A3 may further include another holding arm 20 and another horizontal drive unit 30 that displaces the other holding arm 20 at least in the X-axis direction. The horizontal drive unit 30 and another horizontal drive unit 30 may be arranged side by side in the vertical direction. In this case, the coating / developing apparatus 2 may further include another measurement unit 130 for inspecting the belt 38 of another horizontal drive unit 30.

[0130] The conveyance unit A3 may not have any one of the three drive units, i.e., the horizontal drive unit 30, the horizontal drive unit 50, and the lifting drive unit 70, or may not have any two of them. The drive mechanisms of the horizontal drive units 30 and 50 and the lifting drive unit 70 are not limited to the above examples, and the drive unit only needs to have a belt arranged so as to extend at least in the moving direction. In each drive unit, the belt may be wound around three pulleys or five or more pulleys.

[0131] The measurement units 130, 150, and 170 may not have any one of the sensors 92 and 94. When the sensors 92 and 94 are arranged so as to sandwich the belt, in the sound wave SW1 acquired by the sensor 92 and the sound wave SW2 acquired by the sensor 94, the vibration of the air due to the disturbance is in the same phase, and the vibration of the air due to the belt is in the opposite phase. Therefore, by using the difference between the sound wave SW1 and the sound wave SW2 as a vibration signal, a signal in which the vibration of the air due to the belt is enhanced and the vibration of the air due to the disturbance is reduced can be obtained. The measurement units 130, 150, and 170 may be configured in any way as long as they can acquire a signal corresponding to the vibration of the belt.

[0132] The arrangement positions of the measurement units 130, 150, and 170 are not limited to the above examples. The measurement unit may be arranged at any position in the moving path of the belt as long as it can acquire a vibration signal corresponding to the vibration of the belt without interfering with other members (for example, a slider). That is, in the moving path of the belt, the pulley, the slider, and the measurement unit may be arranged in any order.

[0133] Even in the conveying units other than the conveying unit A3 of the processing module 12, the inspection of the belts of the respective driving units may be performed in the same manner as the conveying unit A3 of the processing module 12. The coating / developing apparatus 2 may include a unit that performs a process other than the liquid process and the heat process as a processing unit that performs a predetermined process on the work W. For example, the coating / developing apparatus 2 may include an inspection unit for inspecting the state of the surface Wa, and the conveying unit A3 may carry the work W into and out of the inspection unit. The substrate processing system 1 may be configured in any manner as long as it includes at least one processing unit, a conveying unit that carries the work W into and out of the processing unit, a measurement unit for inspecting the belts of the driving units included in the conveying unit, and a control unit.

Explanation of Reference Numerals

[0134] 2... Coating / developing apparatus, 30... Horizontal driving unit, 36a, 36b, 36c, 36d... Pulleys, 38... Belt, 50... Horizontal driving unit, 56a, 56b... Pulleys, 58... Belt, 62... Motor, 70... Lifting driving unit, 76a, 76b... Pulleys, 78... Belt, 82... Motor, 100... Control device, 130, 150, 170... Measurement units, 202... Processing control unit, 212... Signal acquisition unit, 220... State determination unit, 222... Output unit, W... Work, U1... Liquid processing unit, U2... Heat processing unit, A3... Conveying unit.

Claims

1. a processing unit that performs a predetermined process on the substrate; a transport unit including a holder that holds the substrate and a drive unit that includes a belt and displaces the holder in a first direction by moving the belt; a measurement unit provided adjacent to the belt and capable of acquiring a vibration signal corresponding to vibration of air; a control unit that controls the processing unit, the transport unit, and the measurement unit; The control unit a processing control unit that executes a displacement process to displace the holding unit along the first direction by the driving unit; a signal acquiring unit that acquires the vibration signal from the measurement unit; a state determination unit that determines a state of the belt based on the vibration signal corresponding to the vibration of the air, the processing control unit executes the displacement processing when the transport unit carries the substrate into or out of the processing unit, The signal acquiring unit acquires the vibration signal corresponding to vibration of the belt caused by displacement in the displacement process after the displacement process is completed.

2. The substrate processing apparatus according to claim 1 , wherein the signal acquisition unit acquires the vibration signal corresponding to vibration of the air generated by a displacement in the displacement process.

3. the drive unit further includes a first pulley and a second pulley between which at least a portion of the belt is wound, and a motor that rotates the first pulley to move the belt, The measurement unit is disposed in the vicinity of the first pulley, The substrate processing apparatus according to claim 1 , wherein the process control unit displaces the holding unit in a direction from the second pulley toward the first pulley by using the drive unit in the displacement process.

4. The transport unit further includes a second drive unit configured to displace the holding unit in a second direction, the processing control unit further executes a second displacement process of displacing the holding unit in the second direction by the second driving unit; The substrate processing apparatus of any one of claims 1 to 3, wherein the signal acquisition unit acquires the vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement process during a period overlapping with at least a portion of the execution period of the second displacement process.

5. A processing unit that performs a predetermined process on a substrate; a transport unit including a holder that holds the substrate, a drive unit that includes a belt and displaces the holder in a first direction by moving the belt, and a second drive unit that displaces the holder in a second direction; a measurement unit provided adjacent to the belt and capable of acquiring a vibration signal corresponding to vibration of air; a control unit that controls the processing unit, the transport unit, and the measurement unit; The control unit a processing control unit that executes a displacement process in which the drive unit displaces the holding unit along the first direction, and a second displacement process in which the second drive unit displaces the holding unit in the second direction; a signal acquiring unit that acquires the vibration signal from the measurement unit; a state determination unit that determines a state of the belt based on the vibration signal corresponding to the vibration of the air, The signal acquisition unit acquires the vibration signal corresponding to vibration of the belt caused by displacement in the displacement process during a period overlapping with at least a portion of an execution period of the second displacement process.

6. The drive unit is a first pulley and a second pulley arranged in the first direction and around which at least a portion of the belt is stretched; a motor that rotates the first pulley to move the belt; a slider that moves together with the holding portion, the slider is connected to the belt so as to be movable between the first pulley and the second pulley, The substrate processing apparatus according to claim 1 , wherein the first pulley, the measuring unit, the slider, and the second pulley are arranged in this order along a moving path of the belt.

7. The drive unit is a first pulley and a second pulley arranged in the first direction and around which at least a portion of the belt is stretched; a slider that moves together with the holding portion, the slider is connected to the belt so as to be movable between the first pulley and the second pulley, The substrate processing apparatus according to claim 1 , wherein the measuring unit, the first pulley, the slider, and the second pulley are arranged in this order along a moving path of the belt.

8. Performing a predetermined process on the substrate by a processing unit; executing a displacement process of displacing the holding part along the first direction by a drive part of a transport unit having a holding part that holds the substrate and a drive part that includes a belt and displaces the holding part in the first direction by moving the belt; acquiring a vibration signal corresponding to vibration of air from a measurement unit provided in the vicinity of the belt; determining a state of the belt based on the vibration signal; performing the displacement process when the substrate is loaded into or unloaded from the processing unit by the transport unit; The substrate processing method, wherein acquiring the vibration signal includes acquiring, after the displacement process is completed, a signal corresponding to vibration of the belt generated by displacement in the displacement process as the vibration signal.

9. Applying a predetermined treatment to a substrate; executing a displacement process in which a drive unit of a transport unit including a holding unit that holds the substrate, a drive unit that includes a belt and displaces the holding unit in a first direction by moving the belt, and a second drive unit that displaces the holding unit in a second direction, displaces the holding unit along the first direction; executing a second displacement process in which the second driving unit displaces the holding unit in the second direction; acquiring a vibration signal corresponding to vibration of air from a measurement unit provided in the vicinity of the belt; determining a state of the belt based on the vibration signal; The substrate processing method includes acquiring the vibration signal as the vibration signal during a period overlapping with at least a portion of an execution period of the second displacement process.

10. A program for causing an apparatus to execute the substrate processing method according to claim 8 or 9.

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