High-precision machine tool equipped with a linear drive bearing and a guide bearing

Abstract

To further improve the accuracy of a high-precision machine tool (100), at least one linear drive and guide bearing (1) is provided, the linear drive and guide bearing including at least one linear motor (27) having a magnet (15) disposed on one machine component (5) and a coil (25) disposed on the other machine component (10) and operatively connected to the at least one magnet (15), the at least one magnet (15) and the at least one coil (25) being arranged to exert an attractive force on each other and to perform at least temporary relative motion. The linear drive and guide bearing also includes at least one hydrostatic bearing (30-1, 30-3) disposed on one of the two machine components (10) and operatively connected to the other machine component (5), the hydrostatic bearing (30-1, 30-3) exerting a repulsive force in a direction opposite to the attractive force. The linear drive bearing and the guide bearing further comprise a first bearing gap (H1) formed between the two machine components (5, 10) and having a height greater than 0 μm and less than or equal to 10 μm.

Description

Technical Field

[0001] The present invention relates to a high-precision machine tool comprising at least one linear drive means according to the generic concept of claim 1.

[0002] Basically, a high-precision machine tool comprising linear drive means for relatively moving two machine components mounted in the high-precision machine tool is known per se. This machine tool is used to move, guide and hold the two machine components in a reliable and precise manner and in a stationary state. The applicant of the present patent offers a machining center equipped with this type of high-precision machine tool under the German registered trademark KERN Pyramid Nano (official registration number 30676385), whereby the two machine components can be relatively moved at an interval of 20 μm or more.

[0003] The object of the present invention is to provide a high-precision machine tool that can relatively position and linearly move two machine components with even higher precision than in the prior art.

[0004] This object is solved by the features of claim 1 according to the present invention. Further configurations of the present invention are obtained from the dependent claims.

[0005] The high-precision machine tool of the present invention can be formed especially as a cutting high-precision machine tool, particularly a high-precision milling machine. This can also be a single machine, part of a machining center, part of a flexible production cell, or part of a flexible production system. Therefore, it is particularly possible to provide a tool magazine including a tool changer and / or a member changer for this high-precision machine tool.

[0006] At least one linear drive means of the high-precision machine tool according to the present invention for performing a relative linear movement of two machine components mounted on the high-precision machine tool is formed as a linear drive bearing and a guide bearing.

[0007] A mechanical component is an adjacent component of a high-precision machine tool where relative movement and / or a temporary stop are necessary or useful for the machining of the component. Therefore, linear drive bearings and guide bearings can be provided for the only pair, multiple pairs, or all pairs of the two mechanical components described below. · One of the mechanical components can be formed as the machine stand of the high-precision machine tool, and the other mechanical component can be formed as the cross-slide of the high-precision machine tool adjacent to the machine stand. · One of the mechanical components can be formed as the machine stand of the high-precision machine tool, and the other mechanical component can be formed as the vertical slide of the high-precision machine tool adjacent to the machine stand. · One of the mechanical components can be formed as the machine stand of the high-precision machine tool, and the other mechanical component can be configured as the vertical and horizontal slide of the high-precision machine tool adjacent to the machine stand. · One of the mechanical components can be formed as the vertical slide of the high-precision machine tool, and the other mechanical component can be formed as the cross-slide of the high-precision machine tool adjacent to the vertical slide. · One of the mechanical components can be formed as the vertical and horizontal slide of the high-precision machine tool, and the other mechanical component can be formed as the cross-slide of the high-precision machine tool adjacent to the vertical and horizontal slide. · One of the mechanical components can be formed as the vertical and horizontal slide of the high-precision machine tool, and the other mechanical component can be formed as the vertical slide of the high-precision machine tool adjacent to the vertical and horizontal slide.

[0008] Therefore, the high-precision machine tool of the present invention can particularly have a first linear drive bearing and a guide bearing for performing a relative linear movement between the machine stand and the cross-slide, a further linear drive bearing and a guide bearing for performing a relative linear movement between the cross-slide and the vertical slide, and a third linear drive bearing and a guide bearing for performing a relative linear movement between the vertical slide and the vertical and horizontal slide.

[0009] Instead, the high-precision machine tool of the present invention can particularly have a first linear drive bearing and a guide bearing for performing a relative linear motion between the machine stand and the longitudinal feed table, a further linear drive bearing and a guide bearing for performing a relative linear motion between the cross feed table and the longitudinal feed table, and a third linear drive bearing and a guide bearing for performing a relative linear motion between the longitudinal feed table and the vertical feed table.

[0010] Each of the aforementioned machine components can be made of an aluminum alloy. Alternatively, the machine component formed as the machine stand can be made of ultra-high performance concrete (UHPC).

[0011] Furthermore, at least one of the machine components can be formed to be thermally symmetric.

[0012] The linear drive bearing and the guide bearing for performing the relative linear motion of two machine components provided according to the present invention have at least one linear motor, and this linear motor has at least one magnet arranged on one machine component and at least one coil arranged on the other machine component. The coil can basically be formed as an air core. However, advantageously, by the coil including a core, particularly a core formed of ferrite, a relatively simple coil structure and a technically particularly excellent coil action can be achieved. The magnet, preferably a permanent magnet, and the coil are operatively connected to each other, exert a gravitational force on each other, and are adjusted so as to be able to perform at least a temporary relative motion.

[0013] Furthermore, the linear drive bearing and the guide bearing provided according to the present invention for performing relative linear motion of two mechanical components have at least one hydrostatic fluid bearing arranged on one of the two mechanical components and operatively connected to the other mechanical component. This hydrostatic fluid bearing is adjusted to exert a repulsive force in a direction opposite to the gravitational force, thereby forming a first bearing clearance between the two mechanical components. When the first bearing clearance is set to a constant height between the two mechanically movable components, it is obvious that the gravitational force and the repulsive force are of the same magnitude. The acceleration, speed, and position of one of the mechanical components in the feed direction can basically be set by controlling or adjusting the current flowing through the coil described above. The acceleration, speed, and position of the mechanical component in the lateral direction with respect to the feed direction can basically be set by the hydrostatic fluid bearing by controlling or adjusting the flow rate of the hydraulic fluid, i.e., the liquid flow rate. The control or adjustment of the height of the bearing clearance, acceleration, speed, and / or the relative motion direction of the two mechanical components can be easily performed alternatively or cumulatively by appropriately adapting the current flowing through the coil, especially synchronized with the magnet.

[0014] Finally, the height of the first bearing clearance of the linear drive bearing and the guide bearing provided according to the present invention for performing relative linear motion of two mechanical components is greater than 0 μm and substantially 10 μm or less. In other words, if the height of the first bearing clearance is represented by H1, the following relationship substantially holds. 0 μm < H1 ≦ 10 μm

[0015] Based on the configuration of the linear motor in the form of a synchronous linear motor and the operative connection between at least one hydrostatic fluid bearing and the linear motor proposed herein, a linear drive bearing and a guide bearing with high efficiency and a good heat balance are created, which further has very high precision. The relative movement of the two mechanical components can be performed such that one of the two mechanical components moves and the other mechanical component does not move, or the two mechanical components move simultaneously. In other words, advantageously, one mechanical component moves and the other mechanical component remains in its position, or one mechanical component remains in its position while the other mechanical component moves relative to it, or both one mechanical component and the other mechanical component move relative to each other simultaneously.

[0016] According to a preferred embodiment, the two mechanical components of the high-precision machine tool according to the present invention each have a first virtual surface parallel to each other, and on this virtual surface, the linear motor and the hydrostatic fluid bearing extend while forming a first bearing clearance. Thereby, advantageously, the two mechanical components are accurately and parallelly guided during their relative movement.

[0017] Basically, a second virtual surface inclined with respect to the first virtual surface can be provided, and at least one linear guiding means is formed on this second virtual surface. The corresponding inclination angle can have any suitable magnitude, particularly 15°, 30°, or 45°. Particularly advantageously, there is a second virtual surface orthogonal to each first virtual surface, and at least one linear guiding means may be formed on this second virtual surface. Thus, the inclination angle is 90°, whereby the prevention of the degrees of freedom of the two mechanical components is advantageously achieved.

[0018] According to a preferred embodiment of the high-precision machine tool according to the present invention, the above-described linear guide means has at least one fluid bearing means and a magnetic bearing means acting in opposition thereto. Advantageously, this creates a support for the linear drive bearing and guide bearing according to the present invention that can be easily manufactured and adjusted during operation, so that two components can be accurately and easily guided on two spatial planes oriented perpendicular to each other. It is obvious that the opposing forces acting on the mechanical component(s) via the fluid bearing means and the magnetic bearing means are of the same magnitude in order to maintain the linear guide means in equilibrium.

[0019] The particularly simple structure of the linear drive bearing and guide bearing of the present invention, and thus of the high-precision machine tool according to the present invention, is created when the fluid bearing means and the magnetic bearing means are arranged on one and the same mechanical component and operatively connected to the other mechanical component.

[0020] According to a further preferred embodiment, the linear drive bearing and guide bearing provided by the present invention has, in cross-section, the structure disclosed below. It should be noted that this cross-section corresponds to a virtual cutting plane passing through the device according to the present invention, and this virtual cutting plane is oriented perpendicular to both the first virtual plane and the second virtual plane. Thus, one mechanical component has a first contact surface, a second contact surface spaced therefrom, and a first accommodation region therebetween. In contrast, the other mechanical component has a first accommodation portion, a second accommodation portion spaced therefrom, and a second accommodation region therebetween. At least one hydrostatic fluid bearing facing the first contact surface is accommodated in the first accommodation portion, a second hydrostatic fluid bearing facing the second contact surface is accommodated in the second accommodation portion, at least one magnet is accommodated in the first accommodation region, at least one coil is accommodated in the second accommodation region, and the magnet and the coil face each other. This advantageously creates a drive bearing and guide bearing that can be manufactured particularly precisely and relatively simply.

[0021] The first receiving region can be formed by being recessed with respect to the first contact surface and / or the second contact surface. Thereby, advantageously, a channel capable of collecting the fluid flowing out from the hydrodynamic bearing, particularly oil, is created. The aforementioned fluid can be easily removed from the magnet via an appropriate shape of the channel surface and / or any outlet.

[0022] In order to particularly simplify the structure of the linear drive bearing and the guide bearing provided by the present invention, and to further improve the guiding accuracy of the bearing, the mechanical component having the first receiving portion and the second receiving portion has a first protruding portion and a second protruding portion facing the first protruding portion. Hydrodynamic bearing means are arranged on the first protruding portion. Magnetic bearing means are arranged on the second protruding portion, and the two protruding portions are adjacent to the other mechanical component while forming a second bearing clearance.

[0023] Advantageously, when the magnetic bearing means has a magnet bar attached to one mechanical component and a counterpart bar, preferably ferromagnetic, attached to the other mechanical component, and they are adjusted to exert repulsive forces on each other, a linear drive bearing and a guide bearing that can be manufactured particularly simply are created. However, alternatively or cumulatively, it is obvious that the required repulsive force can be set by providing at least one variable or constant electromagnetic means.

[0024] According to a preferred embodiment, the fluid means corresponds to the provided hydrodynamic bearing. In other words, the structure of the fluid means corresponds to the hydrodynamic bearing, whereby advantageously, the manufacturing cost of the device according to the present invention can be reduced in the sense of a common component strategy. It is obvious that all the fluid means and the hydrodynamic bearings present in the linear drive bearing and the guide bearing provided by the present invention can also have the same structure, whereby the advantages described above are doubled.

[0025] The linear drive bearing and the guide bearing provided according to the present invention are further characterized by being operatively connected to at least one temperature adjustment means. Thereby, for the high-precision machine tool according to the present invention, in particular for single parts, multiple parts, or all parts already disclosed of the linear drive bearing and the guide bearing, temperature adjustment can be performed so as to correct or reduce the deformation of the parts caused by temperature to within an allowable range, specifically, cooling becomes possible. Therefore, advantageously, a pipeline for guiding the temperature adjustment fluid may be provided in one or both of the mechanical components, in the linear motor, particularly in the region of the coil and / or the magnet, in the region of the hydrostatic fluid bearing, and / or in the region of the fluid bearing means. More advantageously, at least one temperature measuring means can also be arranged at at least one location already disclosed.

[0026] The temperature adjustment means can basically be arranged inside the high-precision machine tool itself. According to a particularly preferred embodiment, since the temperature adjustment means is positioned at a location remote from the high-precision machine tool, the equipment necessary for temperature adjustment, specifically, the compressor(s) and pump(s) for the temperature adjustment fluid, are arranged in a vibration-isolated state from the first or second mechanical component in order to further improve the accuracy of the high-precision machine tool.

[0027] Further features and advantages of the present invention are shown in connection with the attached drawings, which are not drawn to scale, in the non-limiting examples attached to the present invention.

Brief Description of the Drawings

[0028]

Figure 1

Figure 2

Figure 3

Figure 4

[0029] Figure 1 is a symbolic and simplified side view of a high-precision machine tool 100 according to the present invention. This high-precision machine tool is formed in a traveling stand structure according to the embodiment shown here. This high-precision machine tool includes a machine stand 105, a cross-feed table 110 that can travel in the lateral or linear axis Q facing this, a longitudinal feed table 115 that can travel in the longitudinal or linear axis L facing this cross-feed table 110, and an up-down feed table 120 that can travel in the height or linear axis H facing this longitudinal feed table 115.

[0030] According to the rules selected here, the lateral direction Q extends parallel to the x-axis of a Cartesian coordinate system known per se, and thus protrudes from the plane of the paper in Figure 1. According to the rules selected here, the longitudinal direction L extends parallel to the y-axis of the Cartesian coordinate system, and thus extends in the horizontal direction in Figure 1. According to the rules selected here, the height direction H extends parallel to the z-axis of the Cartesian coordinate system, and thus extends in the vertical direction in Figure 1. Therefore, the cross-feed table 110, the longitudinal feed table 115, and the up-down feed table 120 can travel in directions orthogonal to each other.

[0031] Tool support means 125 is arranged at the end of the up-down feed table 120 on the side of the machine stand 105. This tool support means can accommodate tools such as a milling cutter (not shown here) and be rotatably supported about a rotation axis D1 that extends parallel to the z-axis. A member support means 130 is rotatably supported on the machine stand 105 about a rotation axis D2 that extends parallel to the y-axis. A member accommodation part 135 is arranged at the end of the member support means 130 facing the tool support means 125. This member accommodation part can accommodate a processing member (not shown here) rotatably about a rotation axis D3.

[0032] Therefore, the high-precision machine tool 100 of this embodiment is formed as a 5-axis high-precision machine tool, and this 5-axis high-precision machine tool is further arranged in a housing 140 that can be formed in a cabinet shape in particular.

[0033] In order to linearly move the cross feed table 110 relative to the machine stand 105, the machine stand is provided with a linear drive bearing and a guide bearing 1. In order to linearly move the vertical feed table 115 relative to the cross feed table 110, the vertical feed table is further provided with a linear drive bearing and a guide bearing 1'. Finally, according to this embodiment, the last linear drive bearing and guide bearing 1'' are provided on the vertical feed table 115 and the vertical and horizontal feed table 120.

[0034] The structure and operation of the linear drive bearings and guide bearings 1, 1' and 1'' will be further described with reference to FIGS. 2 to 4. Hereinbefore, the drive bearings and guide bearings 1, 1' and 1'' are formed as hydrostatic fluid bearings, and a fluid (not shown here) is supplied to these through a pump 40 and a fluid pipe 50.

[0035] As can be understood from FIG. 1, the pump 40 and the reservoir 45 containing the aforementioned fluid are arranged outside the housing 140. Similarly, according to this embodiment, outside the housing 140, a temperature adjusting means 80 is arranged adjacent to the pump 40 and the reservoir 45. By means of this temperature adjusting means, a coolant (not shown here) can be sent into individual or all of the components or parts existing in the housing 140 through a cooling pipe 80-5 according to the temperature situation. Specifically, according to the embodiment shown here, the machine stand 105, the cross feed table 110, the vertical feed table 115, the vertical and horizontal feed table 120, the tool support means 125, the member support means 130, and the linear drive bearings and guide bearings 1, 1' and 1'' are in fluid connection with the temperature adjusting means 80. Furthermore, the housing 140 itself can also be in fluid connection with the temperature adjusting means 80.

[0036] Next, FIGS. 2 to 4 exemplarily and in detail show a linear drive bearing and a guide bearing 1. According to the embodiments shown herein, based on the fact that the structure and function of this linear drive bearing and guide bearing correspond to those of the linear drive bearing and guide bearing 1' or 1", in order to show the relationship more simply hereinafter, it generally refers to the movement of two mechanical components 5 or 10, and the following relationships apply at this time.

[0037] The linear drive bearing and guide bearing 1 are used for the cross-feed table 110 (hereinafter referred to as the mechanical component 10) to move reliably and precisely with respect to the machine stand 105 (hereinafter referred to as the mechanical component 5). Correspondingly, the linear drive bearing and guide bearing 1' are used for the vertical feed table 115 that can be regarded as the mechanical component 10 to move reliably and precisely with respect to the cross-feed table 110 that can be regarded as the mechanical component 5. Finally, in this sense, the linear drive bearing and guide bearing 1" are used for the up-and-down feed table 120 that can be regarded as the mechanical component 10 to move reliably and precisely with respect to the vertical feed table 115 that can be regarded as the mechanical component 5.

[0038] As understood from FIG. 2, the lower mechanical component 5 has a first contact surface 5-1, a second contact surface 5-3 spaced apart therefrom, and a first accommodation region 5-5 therebetween. The latter is formed by being recessed with respect to the two contact surfaces 5-1 and 5-3, forms a channel 7, and its function will be described later.

[0039] On the other hand, the upper mechanical component 10 in FIG. 2 has a flat structure on the side of the mechanical component 5, and has a first accommodation portion 10-1, a second accommodation portion 10-3 spaced apart therefrom, and a second accommodation region 10-5 therebetween. The first accommodation portion 10-1 is arranged opposite to the first contact surface 5-1, the second accommodation portion 10-3 is arranged opposite to the second contact surface 5-3, and the second accommodation region 10-5 is arranged opposite to the first accommodation region 5-5.

[0040] The linear drive bearing and guide bearing 1 includes a magnet 15 which, according to this embodiment, is formed as a substantially flat permanent magnet and is placed in the first accommodation region 5-5 by a support 20. Opposite the magnet 15 on the upper mechanical component 10 in Fig. 2, a coil 25 having a ferrite core (not shown here) is arranged, and this coil is connected to an electronic circuit (not shown here) via an electrical connection part 25-1. The magnet 15 and the coil 25 attract the two mechanical components 5, 10 with a permanent magnet. Further, the coil 25 can be operatively connected to the magnet 15 by an electronic circuit, and together with this, a linear motor 27 is formed.

[0041] To avoid the magnetic force-induced collision of the two mechanical components 5, 10, a first hydrostatic fluid bearing 30-1 is arranged in the first accommodation part 10-1, and a second hydrostatic fluid bearing 30-3 is arranged in the second accommodation part 10-3. These apply a hydraulic pressure acting on the first contact surface 5-1 to the second contact surface 5-3 by a fluid (not shown here), and this hydraulic pressure acts in opposition to the magnetic attraction described above. In this case, the fluid is pumped from the reservoir 45 by a pump 40 through the fluid pipeline 50 and via a hydraulic series resistor (not shown here) to the two hydrostatic fluid bearings 30-1, 30-3, and flows out from these hydrostatic fluid bearings to a chamber (not shown). This chamber is sealed on the sides but is open in the direction of the two accommodation regions 5-1 to 5-3. The leakage fluid (not shown) flowing out from the chamber can be collected in the channel 7 and returned to the reservoir 45 via the leakage pipeline 55 as required.

[0042] Due to the interaction between the linear motor 27 and the hydrostatic fluid bearings 30-1, 30-3, a first bearing clearance H1 can be set in the regions of the first accommodation part 10-1 and the second accommodation part 10-3 between the two mechanical components 5, 10, and its height is 5 μm according to this embodiment. Of course, the height of the first bearing clearance H1 may be less than 5 μm, for example 3 μm or more, for example 6 μm, 7 μm, 8 μm, 9 μm or 10 μm according to the present invention.

[0043] This very small first bearing clearance H1, compared to the prior art, can easily be understood as not being easily set and maintained. Thus, the two machine components 5, 10 each have a first virtual plane E1 to E2 parallel to each other, and linear motors 27 and hydrostatic fluid bearings 30-1, 30-3 extend on these planes. In particular, thereby, when the two machine components 5, 10 move or stop relative to each other based on the operation of the linear motor 27, a collision between the two machine components 5, 10 is avoided. In this case, the movement itself, referring to FIG. 2, is performed so as to go out of or enter the paper surface again. In other words, the feed axis V of the machine component 10 is oriented perpendicular to the paper surface.

[0044] According to the embodiment shown here, the linear drive bearing and guide bearing 1 is formed to remain in a stationary state because the machine component 10 configured as a cross slide 10 moves relative to the machine component 5, and the latter component is fixedly supported on the machine stand 105.

[0045] By means of the means disclosed previously, it is possible to guide the two machine components 5, 10 in the direction of the feed axis V (and thus the lateral direction Q) and in the direction of the first clearance H1. In order to guide the two machine components 5, 10 laterally, the first part 60-1 or the second part 60-3 remote from it each protrudes from the machine component 10 in the direction of the machine component 5 with a second virtual plane E3 perpendicular to the first virtual planes E1, E2, and a second bearing clearance H2 exists between these parts and the machine component 5, respectively.

[0046] In the first portion 60-1 shown to the left of FIG. 2, fluid bearing means 65 formed as a hydrodynamic bearing is disposed, and this fluid bearing means interacts with a mechanical component 5 facing each other across a bearing clearance H2. For this purpose, since the fluid bearing means 65 is connected to the fluid line 50 and the pump 40 via a fluid line 70 and a hydraulic series resistor (not shown here), a mechanical force that repels the first portion 60-1 and the mechanical component 5 from each other is generated between them. Note that the fluid bearing means 65 may correspond to either of the hydrodynamic fluid bearings 30-1, 30-3.

[0047] In the region of the second portion 60-3 shown to the right of FIG. 2, magnetic bearing means 75 is disposed, and this magnetic bearing means similarly receives a repulsive force from the mechanical component 5, whereby a second bearing clearance H2 is formed between the two. For this purpose, a magnet bar 75-1 is disposed on the mechanical component 5, and a ferromagnetic mating bar 75-3 is disposed on the second portion 60-3 facing this bar. It is obvious that the magnetic bearing means 75 can alternatively be formed as an electromagnet device.

[0048] The second bearing clearance H2 can be adjusted very precisely by the appropriate output of the pump 40, the positioning and geometry or structure of the fluid bearing means 65 matched to the magnetic repulsive force of the magnetic bearing means 75.

[0049] In order to further improve the dimensional accuracy of the linear drive bearing and the guide bearing 1, in the embodiment shown here, a plurality of channels 80-1 through which a coolant (not shown) flows are provided, and these are in fluid connection with a cooling line 80-5. The channels 80-1 are disposed in the mechanical component 10, the coil 25, the support 20, the mechanical component 5, and the first protruding portion 60-1, and a uniform temperature distribution can be achieved across the linear drive bearing and the guide bearing 1. For temperature measurement, temperature measuring means 80-3 is stored in the coil 25. It is obvious that the number, positioning, and dimensions of the channels 80-1 in particular may be different from the embodiment introduced here.

[0050] FIG. 3 shows an alternative embodiment of the linear drive bearing and guide bearing 1 with respect to FIG. 2. The right part of the mechanical component 5 in FIG. 3 has a notch 5-7, and in this figure as well, a magnet bar 75-1 is arranged on the right flange of the notch. Further, a second part 60-3 having a mating bar 75-3 is arranged to move freely at least partially within the notch 5-7. Different from the embodiment shown with reference to FIG. 2, the magnet bar 75-1 and the mating bar 75-3 are formed to attract each other. In other respects, the structure and function of the linear drive bearing and guide bearing 1 correspond to those of the embodiment shown in FIG. 1.

[0051] An alternative embodiment of the mechanical component 10 with respect to FIG. 2 is shown in the bottom perspective view of FIG. 4. As can be seen, the mechanical component 10 and the first protruding part 60-1 are integrally formed here. The second protruding part 60-3 is not shown in this figure and can be attached to the fixed part 10-7 on the mechanical component 10.

[0052] On the lower side of the mechanical component 10 and in its four corner regions, a first hydrostatic bearing 30-1 to a second hydrostatic bearing 30-3 are respectively provided, and these have the same structure. Fluid bearing means 65 are arranged on the first protruding part 60-1, and this fluid bearing means consists of two hydrostatic bearings 65-1 to 65-2 separated from each other, and these bearings correspond to the first to second hydrostatic bearings 30-1, 30-2. As can be seen in the figure, the hydrostatic bearings 30-1, 30-3, 65-1 and 65-2 extend in the same vertical direction, and this vertical direction is the same as the feed axis V or the movement direction of the mechanical component 10.

[0053] Different from what is shown in FIG. 2, the channel 80-1 of the temperature adjustment means 80 in FIG. 4 is oriented not in the direction of the feed axis V but laterally with respect to the feed axis and substantially parallel to the virtual plane E1.

Explanation of Reference Numerals

[0054] 1, 1', 1'' Linear drive bearing and guide bearing 5 Mechanical components 5-1 First contact surface 5-3 Second contact surface 5-5 First accommodation area 5-7 Notch 7 Channel 10 Mechanical components 10-1 First accommodation part 10-3 Second accommodation part 10-5 Second accommodation area 10-7 Fixed part 15 Magnet 20 Support 25 Coil 25-1 Electrical connection part 27 Linear motor 30-1 First hydrostatic bearing 30-3 Second hydrostatic bearing 40 Pump 45 Reservoir 50 Fluid pipeline 55 Leakage pipeline 60 Linear guiding means 60-1 First part 60-3 Second part 65 Fluid bearing means 65-1 Hydrostatic bearing 65-3 Hydrostatic bearing 70 Fluid pipeline 75 Magnetic bearing means 75-1 Magnet bar 75-3 Counterpart bar 80 Temperature adjustment means 80-1 Channel 80-3 Temperature measurement means 80-5 Cooling pipeline 100 High-precision machine tool 105 Machine stand 110 Cross-feed table 115 Longitudinal-feed table 120 Up-down feed table 125 Tool support means 130 Member support means 135 Member accommodation part 140 Housing Rotation axes of D1, D2, and D3 First virtual planes of E1 and E2 Second virtual plane of E3 Vertical direction of H First bearing clearance of H1 Second bearing clearance of H2 Longitudinal direction of L Lateral direction of Q Feed shaft of V Cartesian coordinates of x, y, and z

Claims

1. A high-precision machine tool (100) comprising at least one linear drive means for performing a relative linear motion of two machine components (5, 10) attached to the high-precision machine tool (100), wherein the at least one linear drive means is formed as a linear drive bearing and a guide bearing (1, 1', 1"), and - has at least one linear motor (27), the linear motor having at least one magnet (15) arranged on the one machine component (5) and a coil (25) arranged on the other machine component (10) and operatively connected to the at least one magnet (15), the at least one magnet (15) and the at least one coil (25) exerting an attractive force on each other and being adjusted to be able to perform at least a temporary relative motion, and - has at least two hydrostatic fluid bearings (30-1, 30-3) arranged on one (10) of the two machine components and operatively connected to the other machine component (5), the hydrostatic fluid being a liquid, the hydrostatic fluid bearings (30-1, 30-3) exerting a repulsive force in a direction opposite to the attractive force, and the one machine component (5) has, in cross-section, a first contact surface (5-1), a second contact surface (5-3) spaced apart therefrom, and a first accommodation region (5-5) therebetween, the other machine component (10) has a first accommodation part (10-1), a second accommodation part (10-3) spaced apart therefrom, and a second accommodation region (10-5) therebetween, the first accommodation part (10-1) houses a first hydrostatic fluid bearing (30-1) facing the first contact surface (5-1), the second accommodation part (10-3) houses a second hydrostatic fluid bearing (30-3) facing the second contact surface (5-3), the first accommodation region (5-5) houses the at least one magnet (15), and the at least one coil (25) is housed in the second accommodation region (10-5) facing the first accommodation region (5-5), the two machine components (5, 10) each have a first virtual surface (E1, E2) parallel to each other, and on the first virtual surface, the linear motor (27) and the hydrostatic fluid bearings (30-1, 30-3) extend while forming a first bearing gap (H1), At least one linear guiding means (60) is formed within a second virtual plane (E3) that is inclined or orthogonal to each of the first virtual planes (E1, E2). The first accommodation region (5-5) is formed by being recessed with respect to the first contact surface (5-1) and / or the second contact surface (5-3). The linear guiding means (60) has at least one fluid bearing means (65) and a magnetic bearing means (75) that acts in opposition thereto. The height of the first bearing gap (H1) formed between the two mechanical components (5, 10) is greater than 0 μm and 10 μm or less. A high-precision machine tool (100), characterized in that a plurality of channels (80-1) through which coolant flows as viewed in cross-section are arranged side by side with the two mechanical components (5, 10) and the at least one coil (25).

2. The high-precision machine tool (100) according to claim 1, characterized in that the fluid bearing means (65) and the magnetic bearing means (75) are arranged on the same one of the mechanical components (10) and are operatively connected to the other mechanical component (5).

3. The mechanical component (10) having the first accommodation portion (10-1) and the second accommodation portion (10-3) has a first protruding portion (60-1) where the fluid bearing means (65) is arranged, and a second protruding portion (60-3) that faces the first protruding portion (60-1) and where the magnetic bearing means (75) is arranged. The two protruding portions (60-1, 60-3) are adjacent to the other mechanical component (5) while forming a second bearing gap (H2). The high-precision machine tool (100) according to any one of claims 1 or 2.

4. The high-precision machine tool (100) according to any one of claims 1 to 3, characterized in that the magnetic bearing means (75) has a magnet bar (75-1) attached to the one mechanical component (5) and a counterpart bar (75-3) attached to the other mechanical component (10), and the two bars are adjusted to exert magnetic repulsive forces on each other.

5. The high-precision machine tool (100) according to any one of claims 1 to 4, characterized in that the fluid bearing means (65) corresponds to the at least two hydrostatic fluid bearings (30-1, 30-3).

6. The high-precision machine tool (100) according to any one of claims 1 to 5, characterized by at least one temperature adjustment means (80) operatively connected to the high-precision machine tool.

7. The high-precision machine tool (100) according to claim 6, characterized in that the at least one temperature adjustment means (80) is positioned inside or away from the high-precision machine tool (100) itself.

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