Dust-proof structure for light-emitting window of laser device and laser device

Abstract

The present invention provides a dustproof structure for a light exit window of a laser device and a laser device. The dustproof structure for a light exit window of a laser device includes a discharge cavity body, a gas purifier, a dustproof pipeline, and a fan. An intermediate cavity is installed between the light exit window and the slit. The dustproof pipeline has a gas inlet end connected to the gas purifier, a middle portion passing through the intermediate cavity, and a gas outlet end connected to the fan. At least a part of the working gas purified by the gas purifier passes through the dustproof pipeline and flows into the intermediate cavity, and the fan guides the working gas to increase the gas flow rate passing through the intermediate cavity, strengthening the purging of the light exit window by the clean gas, and effectively preventing particulate matter in the working gas that passes through the window on the slit from inside the cavity body and enters the intermediate cavity from approaching the light exit window and contaminating the light exit window.

Description

Technical Field

[0001] The present invention relates to the technical field of laser devices, and particularly to a dust-proof structure for an optical output window of a laser device and a laser device.

Background Art

[0002] In the discharge cavity of an excimer laser device, dust continuously generates along with the loss of electrodes during the discharge process. These dusts move according to the airflow circulation and disperse to each position inside the cavity body. In particular, they cause great damage to the optical output window of the lens laser device and the bearings of the cross-flow fan. Therefore, in order to protect and extend the normal operation and service life of the optical output window of the lens and the bearings, it is necessary to design a dedicated protection device.

[0003] Specifically, as shown in FIG. 1, the working gas (1) in the discharge cavity body (10) of the laser device enters the gas purifier (20) (i.e., the metal fluoride capture device MFT) through the gas outlet in the upper cavity body of the laser device, is filtered to remove dust, and then passes through the gas inlet and the gas inlet flow path installed in the upper cavity body, and returns to the discharge cavity 10 through the light inlet of the slit 60 to continue the operation and circulate in such a manner. The arrow in the drawing indicates the flow direction of the working gas 1. The gas inlet flow path in the upper cavity body of the laser device is, namely, the exhaust flow path of the metal fluoride capture device.

[0004] The optical output window 50 of the laser device is installed outside the slit 60, and the two are adjacent to each other, with a certain distance between them, which can be regarded as a hollow cavity between the two. An opening for light to enter is provided in the slit 60. The gas purified by the metal fluoride capture device flows into the hollow cavity between the optical output window 50 and the slit 60 with a slight pressure difference, returns into the discharge cavity 10 through the slit, and the flow rate of the gas is slow and it is easy to clog.

[0005] Since the slit 60 has an opening through which light enters, the light-emitting window 50 cannot be completely isolated from the inside of the discharge cavity 10. Dust in the discharge cavity 10 easily passes through the light exit of the slit 60 and enters the space between the light-emitting window 50 and the slit 60, contaminating the inner surface of the light-emitting window 50.

Summary of the Invention

Problems to be Solved by the Invention

[0006] An object of the present invention is to provide a dust-proof structure for a light-emitting window of a laser device in order to solve at least one of the above-described technical problems in the prior art.

Means for Solving the Problems

[0007] In order to solve the above-described technical problems, the dust-proof structure for a light-emitting window of a laser device according to the present invention includes a discharge cavity body, a gas purifier, a dust-proof pipeline, and a fan. The gas purifier is used to perform a purification process on the working gas in the discharge cavity body. The discharge cavity body is provided with a light-emitting window and a slit. An intermediate cavity is provided between the light-emitting window and the slit. The dust-proof pipeline has a gas inlet end connected to the gas purifier, passes through the intermediate cavity in the middle, and has a gas outlet end connected to the fan. At least a part of the working gas after being purified by the gas purifier passes through the dust-proof pipeline and flows through the intermediate cavity, and is used to form a dust-proof air curtain inside the light-emitting window. Thus, it is possible to avoid the working gas that enters the intermediate cavity from passing through the window on the slit from the cavity body and approaching the light-emitting window to contaminate the light-emitting window. The fan guides the working gas and increases the flow rate of the clean gas passing through the intermediate cavity, strengthens the purging of the light-emitting window by the clean gas, and effectively prevents particulate matter in the working gas that enters the intermediate cavity from passing through the window on the slit from the cavity body and approaching the light-emitting window to contaminate the light-emitting window.

[0008] Also, the air pressure inside the intermediate cavity is equal to or lower than the pressure inside the discharge cavity body.

[0009] Also, the working gas inside the dust-proof pipeline directly or passes through the pipeline and then refluxes into the cavity body after passing through the fan.

[0010] Note that when the fan rotates, a certain negative pressure is formed near the gas outlet end of the dust-proof pipeline to form a suction force, which promotes the flow and outflow of the working gas inside the dust-proof pipeline. Finally, after the working gas enters the gas flow path inside the fan, it is blown into the cavity body.

[0011] Also, the fan is a cross-flow fan. Axle discs are installed at both ends of the cross-flow fan. The dust-proof pipeline is installed with its gas outlet end facing the axle disc. Through holes (or slots) that communicate the inside and outside of the intermediate hollow cavity of the cross-flow fan are installed on the axle disc. The working gas discharged from the dust-proof pipeline enters the intermediate hollow cavity of the cross-flow fan through the through holes.

[0012] Also, the through holes are installed in a spiral and inclined manner. When the motor rotationally drives the axle disc, it is used to tend to force the gas outside the axle disc to flow into the hollow cavity of the cross-flow fan through the through holes.

[0013] Preferably, the impeller is connected to the intermediate shaft body by connecting rib plates, and the through holes or slots are formed between two adjacent connecting rib plates. Note that the connecting rib plates like blades are installed in a spiral or inclined manner, so that during the rotation process, the gas is forced to flow into the hollow cavity from the outside, and further, the working gas inside the dust-proof pipeline is forced to flow out by the negative pressure.

[0014] Incidentally, the dust-proof pipeline may be a gas flow path disposed inside the side wall or bottom plate of the discharge cavity, etc. Of course, a pipe body disposed outside the discharge cavity may also be used.

[0015] Further, the slit includes a main body and a plurality of spoilers. On a projection plane perpendicular to the laser emission direction, the spoilers are symmetrically installed on the main body in the left-right or up-down direction, thereby surrounding to form a laser channel (i.e., the slit) for laser passage. In the laser emission direction, the spoilers on both sides of the left-right or up-down are installed alternately.

[0016] Also, in the laser emission direction, the cross section of the laser channel gradually becomes smaller. That is, in the direction from the light emission window to the inside of the cavity main body, the laser channel has a trumpet-shaped opening that gradually becomes larger.

[0017] In addition, the shaft bodies at both ends of the cross-flow fan are rotatably installed on the cavity main body via bearings. On the outer circle close to the outer end face of the bearing of the shaft body, a screw structure, a tooth structure or a blade structure is installed. When the motor rotationally drives the shaft body and the impeller, the screw structure, the tooth structure or the blade structure forcibly moves the gas outside the bearing in a direction away from the bearing (generally moving in the direction of the inside of the cross-flow fan and the cavity main body), and thus prevents the dust in the cavity main body from approaching and entering the bearing.

[0018] In addition, mounting holes are provided in the cavity main body. The screw structure, the tooth structure or the blade structure of the shaft body is inserted and mounted in the mounting holes. When the cross-flow fan rotates, a dynamic seal structure is formed between the screw structure, the tooth structure or the blade structure and the mounting holes.

[0019] The gap between the inner wall of the mounting hole and the screw structure, tooth structure or blade structure is relatively small, for example, 0.5 mm or less. When the cross-flow fan rotates at high speed, the screw structure, tooth structure or blade structure rotates to generate a cyclone vortex, forcing the gas to flow outward from the mounting hole and toward the cavity body. Therefore, the mounting hole and the screw structure, tooth structure or blade structure are coupled to each other to form a good dynamic seal structure, preventing dust from entering the bearing.

[0020] In addition, a plurality of blades are installed on the outer end face of the shaft disk of the cross-flow fan and in the circumferential direction of the shaft body. When the motor rotationally drives the bearing, shaft disk and blades, the blades tend to force the gas near the bearing and shaft body to flow away from the bearing and shaft body (that is, a low-pressure region is formed near the bearing and shaft body).

[0021] In addition, on the outer end face of the shaft disk, through holes are installed between the shaft body and the blades, and the plurality of through holes are arranged at intervals in the circumferential direction of the shaft body.

[0022] In addition, on the outer end face of the shaft disk, an annular partition plate protruding in the radial direction is installed between the through hole and the blade.

[0023] Note that the partition plate forms a relatively sealed annular cavity by approaching as close as possible to the side surface of the cavity body, and serves to guide the working gas discharged from the dust-proof pipeline.

[0024] In addition, the cross-flow fan is a prior art and includes an impeller surrounded annularly by a cascade. An intermediate hollow cavity is installed inside the impeller. A shaft disk and a shaft body are installed at both ends of the impeller.

[0025] The present invention further provides a laser device including the light-emitting window dust-proof structure of the above-described laser device.

Effects of the Invention

[0026] By adopting the above technical solution, the present invention has the following beneficial effects.

[0027] The dust-proof structure of the light-emitting window of the laser device according to the present invention has a simple structure. The gas outlet end of the dust-proof pipeline is connected to the fan, and the gas inlet end of the dust-proof pipeline is connected to the gas purifier. At least a part of the operating gas after being purified by the gas purifier flows through the dust-proof pipeline and into the intermediate cavity between the light-emitting window and the slit. After being purified, the operating gas flows through the intermediate cavity. The fan guides the operating gas and increases the gas flow rate passing through the intermediate cavity, strengthens the purging of the light-emitting window by the clean gas, and effectively prevents the particulate matter in the operating gas that enters the intermediate cavity through the window on the slit from approaching the light-emitting window and contaminating the light-emitting window.

Brief Description of the Drawings

[0028] To more clearly illustrate the specific embodiments of the present invention or the technical solutions of the prior art, the drawings required for the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention, and those skilled in the art can also obtain other drawings based on these drawings without creative labor.

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Embodiments for Carrying Out the Invention

[0029] Hereinafter, with reference to the drawings, the technical solution of the present invention will be described more clearly and completely. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, those skilled in the art can obtain all embodiments without creative labor, and all of them belong to the protection scope of the present invention.

[0030] In the description of the present invention, the orientation or positional relationship indicated by the technical terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" is based on the orientation or positional relationship shown in the drawings, and is only for the purpose of explaining the present invention or simplifying the explanation, and does not imply or suggest that the mentioned device or element needs to have a specific orientation, structure and operation. Therefore, it should not be construed as limiting the present invention. Also, the technical terms "first", "second", "third" are only used for the purpose of explanation and should not be construed as indicating or implying relative importance.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly defined and limited, the technical terms "attach", "connect to each other", and "connect" should be understood in a broad sense. For example, it may be fixedly connected, removably connected, integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected through an intermediate medium, or a communication inside two elements. Those skilled in the art can understand the specific meaning of the above-mentioned technical terms in the present invention according to the specific situation.

[0032] Hereinafter, the present invention will be further interpreted and described using specific embodiments.

[0033] <Example 1> As shown in FIGS. 2 to 5, the dust-proof structure of the light-emitting window of the laser device according to this embodiment includes a discharge cavity body 10, a gas purifier 20, a dust-proof pipeline 11, and a cross-flow fan 30. The gas purifier 20 is used to perform a purification process on the working gas 1 in the discharge cavity body 10. On the discharge cavity body 10 and on the laser output side, a light-emitting window 50 and a slit 60 are installed. An intermediate cavity 12 is installed between the light-emitting window 50 and the slit 60. The gas inlet end of the dust-proof pipeline 11 is connected to the gas purifier 20, and the middle passes through the intermediate cavity 12. The gas outlet end 11a of the dust-proof pipeline 11 is connected to the cross-flow fan 30. At least a part of the working gas 1 after being purified by the gas purifier 20 flows through the dust-proof pipeline 11 and into the intermediate cavity 12, and is used to form a dust-proof air curtain inside the light-emitting window 50. As a result, the working gas 1 that enters the intermediate cavity 12 from the cavity 10 through the window of the slit 60 is prevented from approaching the light-emitting window 50 and contaminating the light-emitting window 50. The cross-flow fan 30 serves to guide the working gas, increases the flow rate of the clean gas passing through the intermediate cavity 12, strengthens the purging of the light-emitting window 50 by the clean gas, strengthens the purification of the light-emitting window 50, and effectively prevents particulate matter in the working gas that enters the intermediate cavity 12 from passing through the window on the slit 60 from the cavity body 10 and approaching the light-emitting window 50 and contaminating the light-emitting window 50.

[0034] As shown in FIG. 2, the cavity body 10 includes an upper cavity body 10a and a lower cavity body 10b. The cross-flow fan 30 and its motor 40 are arranged in the lower cavity body 10b, while the gas purifier 20 is fixedly installed in the upper cavity body 10a.

[0035] Preferably, the air pressure in the intermediate cavity 12 is equal to or lower than the pressure in the discharge cavity main body 10. During operation, the suction force of a fan such as the cross-flow fan 30 is utilized, and the set pressure is maintained in the intermediate cavity 12 by the dust-proof pipeline 11. Note that the set pressure is equal to or lower than the pressure in the discharge cavity main body 10. Even if a small amount of particulate matter enters the intermediate cavity 12, it is carried away by the gas in the dust-proof pipeline 11 and does not contaminate the light-emitting window 50. The pressure difference between both sides of the slit 60 is significantly reduced, and the influence of a relatively large pressure gradient on the beam quality in the prior art is significantly reduced.

[0036] As shown in FIGS. 5 and 6, the working gas 1 in the dust-proof pipeline 11 directly or passes through the pipeline and then refluxes into the cavity main body 10 after passing through the fan. Note that when the fan rotates, a certain negative pressure is formed near the gas outlet end 11a of the dust-proof pipeline 11 to form a suction force, which promotes the flow and outflow of the working gas 1 in the dust-proof pipeline 11. Finally, after the working gas 1 enters the gas flow path in the fan, it is blown into the cavity main body 10.

[0037] Specifically, axle plates 33 are installed at both ends of the impeller 31 of the cross-flow fan 30. The axle plates 33 are fixedly connected to the axle body 32. The gas outlet end 11a of the dust-proof pipeline 11 is installed facing the axle plate 33. The axle plate 33 is provided with a through hole 36 (or also referred to as a slot) that communicates the inside and outside of the intermediate hollow cavity of the cross-flow fan 30. The working gas 1 discharged from the dust-proof pipeline 11 passes through the through hole 36 and enters the intermediate hollow cavity of the cross-flow fan 30.

[0038] Preferably, the through hole 36 is installed in a spiral and inclined manner, and is used to tend to force the gas outside the axle plate 33 to flow into the hollow cavity of the cross-flow fan 30 through the through hole 36 when the motor 40 rotationally drives the axle plate 33.

[0039] Preferably, the impeller 31 of the cross-flow fan 30 is connected to the intermediate shaft body 32 by a connecting rib plate, and a through-hole 36 or a slot is formed between two adjacent connecting rib plates. The connecting rib plates like blades are installed spirally or obliquely, so that during the rotation process, the gas is forced to flow from the outside into the hollow cavity, and further, the working gas 1 in the dust-proof pipeline 11 is forced to flow out by negative pressure.

[0040] The dust-proof pipeline 11 may be a gas flow path arranged inside the side wall or bottom plate of the discharge cavity, etc. Of course, a pipe body arranged outside the discharge cavity may also be used.

[0041] As shown in FIGS. 7 and 8, the slit 60 includes a main body 63 and a plurality of spoilers 61. In the projection plane perpendicular to the laser emission direction, the spoilers 61 are symmetrically installed on the main body 63 left and right or up and down, so as to surround and form a laser channel 62 (i.e., the slit 60) for the laser to pass through. In the laser emission direction, the spoilers 61 on both sides left and right or up and down are arranged alternately. In the laser emission direction, the cross-section of the laser channel 62 gradually becomes smaller. That is, in the direction from the light emission window 50 to the inside of the cavity 10 main body, the laser channel 62 has a trumpet-shaped opening that gradually becomes larger.

[0042] The present invention improves the structure of the slit, and changes the arrangement of the spoilers 61 of the slit from being symmetrically arranged on both sides left and right or up and down to being arranged alternately on both sides left and right or up and down. Therefore, the interval between the spoilers 61 is effectively reduced, and the resistance for the dust in the cavity main body 10 to enter the intermediate cavity 12 is effectively increased, that is, the number of dust entering the intermediate cavity 12 is effectively reduced.

[0043] As shown in FIGS. 9 to 10, the shaft bodies 32 at both ends of the impeller 31 of the cross-flow fan 30 are rotatably installed in the cavity body 10 by bearings 13. A screw structure 34 is installed on the outer circle near the outer end surface of the bearing 13 of the shaft body 32. When the motor 40 rotationally drives the shaft body 32, the shaft disk 33, and the cross-flow fan 30, the screw structure 34 forcibly moves the gas outside the bearing 13 in a direction away from the bearing 13 (generally moving in the direction inside the cross-flow fan 30 and inside the cavity body 10), thereby preventing the dust in the cavity body 10 from approaching and entering the bearing 13.

[0044] As shown in FIG. 11, mounting holes 14 are installed on the side wall of the cavity body 10. The screw structure 34 of the shaft body 32 is inserted and installed in the mounting holes 14. When the cross-flow fan 30 rotates, a dynamic seal structure is formed between the screw structure 34 and the mounting holes 14.

[0045] The gap between the inner wall of the mounting hole 14 and the screw structure 34 is relatively small, for example, 0.5 mm or less. When the cross-flow fan 30 rotates at high speed, the screw structure 34 rotates to generate a cyclone vortex, and the gas is forcibly made to flow in the direction of the outside of the mounting hole 14 and the cavity body 10. Therefore, the mounting hole 14 and the screw structure 34 are combined with each other to form a good dynamic seal structure, preventing dust from entering the bearing 13.

[0046] As shown in FIG. 10, a plurality of blades 35 are installed on the outer end surface of the shaft disk 33 of the cross-flow fan 30 and in the circumferential direction of the shaft body 32. When the motor 40 drives the bearing 13, the shaft disk 33, and the blades 35 to rotate, the blades 35 tend to force the gas near the bearing 13 and the shaft body 32 to flow in a direction away from the bearing 13 and the shaft body 32 (that is, a low-pressure region is formed near the bearing 13 and the shaft body 32).

[0047] Also, on the outer end face of the shaft disk 33, a through hole 36 is installed between the shaft body 32 and the blade 35. The plurality of through holes 36 are installed at intervals in the circumferential direction of the shaft body 32. On the outer end face of the shaft disk 33, an annular partition plate 37 protruding radially is installed between the through hole 36 and the blade 35. More preferably, an annular groove is installed on the side surface of the cavity body 10. The partition plate 37 is rotatably inserted and mounted in the annular groove. A dynamic seal structure is installed between the partition plate 37 and the annular groove.

[0048] Also, as shown in FIGS. 3 and 4, the cross-flow fan 30 may be installed in the lower cavity body 10b, and as shown in FIG. 5 (horizontal sectional view), the cross-flow fan 30 may be installed in the upper cavity body 10a.

[0049] <Example 2> This embodiment and Embodiment 1 have substantially the same structure, and the differences are as follows.

[0050] As shown in FIG. 12, the fan is an external fan 30a. The dust-proof pipeline 11 is a conveying pipe installed outside the cavity body 10. The conveying pipe is connected in series to the intermediate cavity 12 and the external fan 30a in sequence. The gas outlet of the external fan 30a is connected to the cavity body 10 by a pipe body and is used to guide the working gas into the cavity body 10. The dust-proof pipeline 11 may be a gas branch passage, and only a part of the purified working gas is guided into the intermediate cavity 12 and is used to prevent dust from the light-emitting window 50.

[0051] As shown in FIG. 13, in another embodiment of this embodiment, the gas outlet of the external fan 30a is connected to the gas inlet of the gas purifier 20 by a pipe body 11b and is used to finally return the working gas used for dust prevention in the intermediate cavity 12 to the gas purifier 20.

[0052] The dust-proof structure of the light-emitting window of the laser device according to the present invention has a simple structure. An intermediate cavity 12 is installed between the light-emitting window 50 and the slit 60, so that after purification treatment, the working gas 1 flows through the intermediate cavity 12 to form an air wall or an air curtain inside the light-emitting window 50. Therefore, it effectively prevents particulate matter in the cavity body 10 from contaminating the light-emitting window 50.

[0053] The cross-flow fan 30 serves to guide the working gas, increases the flow rate of the clean gas passing through the intermediate cavity 12, strengthens the purging of the light-emitting window 50 by the clean gas, enhances the purification of the light-emitting window 50, and effectively prevents particulate matter in the working gas that enters the intermediate cavity 12 from passing through the window on the slit 60 from the cavity body 10 and approaching the light-emitting window 50 to contaminate the light-emitting window 50.

[0054] <Example 3> The present invention further provides a laser device. As shown in the schematic diagram of FIG. 14, the laser device includes a discharge cavity body 10, a cross-flow fan 30, and a light-emitting window 50, and further includes two relatively installed discharge electrodes 70, etc. and the dust-proof structure of the light-emitting window of the above-described Example 1 or 2 (not shown).

[0055] The laser device of this embodiment has a light-emitting window 50 that is not easily contaminated and a long service life.

[0056] Finally, it should be noted that each of the above-described embodiments is only used to illustrate the technical solution of the present invention and does not limit the present invention. The present invention has been described in detail with reference to each of the above-described embodiments. Those skilled in the art can modify the technical solutions described in each of the above-described embodiments, or can equivalently replace some or all of the technical features. However, it should be understood that these modifications or replacements do not deviate from the essence of the corresponding technical solutions from the scope of the technical solutions of each embodiment of the present invention.

Explanation of Signs

[0057] 1 Working gas 10 Cavity body 10a Upper cavity body 10b Lower cavity body 11 Dust-proof pipeline 11a Gas outlet end 11b Pipeline body 12 Intermediate cavity 13 Bearing 14 Mounting hole 20 Gas purifier 30 Cross-flow fan 31 Impeller 32 Shaft body 33 Disc 34 Thread structure 35 Blade 36 Through hole 37 Partition board 40 Motor 50 Light-emitting window 60 Slit 61 Spoiler 62 Laser channel 63 Body

Claims

1. A discharge cavity body (10), a gas purifier (20), a dust-proof pipeline (11) and a fan are provided. The gas purifier (20) is used to perform a purification process on the working gas (1) in the discharge cavity body (10). An optical emission window (50) and a slit (60) are installed in the discharge cavity body (10). An intermediate cavity (12) is provided between the optical emission window (50) and the slit (60). The dust-proof pipeline (11) has a gas inlet end connected to the gas purifier (20), passes through the intermediate cavity (12) in the middle, and a gas outlet end (11a) is connected to the fan. At least a part of the working gas (1) after being purified by the gas purifier (20) passes through the dust-proof pipeline (11), flows through the intermediate cavity (12), and is used to form a dust-proof air curtain inside the optical emission window (50). As a result, the working gas (1) that enters the intermediate cavity (12) through the window on the slit (60) from inside the discharge cavity body (10) is prevented from approaching the optical emission window (50) and contaminating the optical emission window (50). The slit (60) includes a main body (63) and a plurality of spoilers (61). On a projection plane perpendicular to the laser emission direction, the spoilers (61) are symmetrically installed on the main body (63) left and right or up and down, thereby forming a laser channel (62) for laser passage by surrounding. In the laser emission direction, the spoilers (61) on both sides left and right or up and down are alternately installed. A dust-proof structure for an optical emission window of a laser device is characterized by this.

2. The air pressure in the intermediate cavity (12) is below the pressure in the discharge cavity body (10). A dust-proof structure for an optical emission window of the laser device according to Claim 1 is characterized by this.

3. The working gas (1) in the dust-proof pipeline (11) directly or through a pipeline returns to the discharge cavity body (10) after passing through the fan. A dust-proof structure for an optical emission window of the laser device according to Claim 1 is characterized by this.

4. The fan is a cross-flow fan (30). Shaft discs (33) are installed at both ends of the cross-flow fan (30). The dust-proof pipeline (11) is installed such that the gas outlet end (11a) faces the shaft disc (33). A through hole (36) that communicates the inside and outside of the intermediate hollow cavity of the cross-flow fan (30) is provided in the shaft disc (33). The working gas (1) discharged from the dust-proof pipeline (11) enters the intermediate hollow cavity of the cross-flow fan (30) through the through hole (36). The light-emitting window dust-proof structure of the laser device according to claim 1 is characterized in that.

5. The through hole (36) is installed in a spiral and inclined manner. When the motor (40) rotationally drives the shaft disc (33), it is used to tend to force the gas outside the shaft disc (33) to flow into the hollow cavity of the cross-flow fan (30) through the through hole (36). The light-emitting window dust-proof structure of the laser device according to claim 4 is characterized in that.

6. The shaft bodies (32) at both ends of the cross-flow fan (30) are rotatably installed on the discharge cavity body (10) via bearings (13). A screw structure (34), a tooth structure, or a blade structure is installed on the outer circle near the outer end face of the bearing (13) of the shaft body (32). When the motor (40) rotationally drives the shaft body (32) and the cross-flow fan (30), the screw structure (34), the tooth structure, or the blade structure forcibly moves the gas outside the bearing (13) in a direction away from the bearing (13), thereby preventing the dust in the discharge cavity body (10) from approaching and entering the bearing (13). The light-emitting window dust-proof structure of the laser device according to claim 4 is characterized in that.

7. Mounting holes (14) are provided on the side wall of the discharge cavity body (10). The screw structure (34), the tooth structure, or the blade structure of the shaft body (32) is inserted and mounted in the mounting holes (14). When the cross-flow fan (30) rotates, a dynamic seal structure is formed between the screw structure (34), the tooth structure, or the blade structure and the mounting holes (14). The light-emitting window dust-proof structure of the laser device according to claim 6 is characterized in that.

8. On the outer end face of the shaft disk (33) of the cross-flow fan (30) and in the circumferential direction of the shaft body (32), a plurality of blades are installed. When the motor (40) rotationally drives the bearing (13), the shaft disk (33), and the blades, the blades tend to force the gas near the bearing (13) and the shaft body (32) to flow away from the bearing (13) and the shaft body (32). The dust-proof structure for the light-emitting window of the laser device according to claim 6, characterized in that.

9. A laser device, characterized by comprising the dust-proof structure for the light-emitting window of the laser device according to any one of claims 1 to 8.

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