Manufacturing apparatus and manufacturing method for electronic components

Abstract

To provide a manufacturing apparatus for an electronic component that has a simple configuration and can detachably hold a ceramic green sheet on a stage.SOLUTION: A manufacturing apparatus 1 of an electronic component that has a ceramic laminate made of multiple ceramic green sheets, includes preheating means 2 that preheats a stage 5 having a mounting surface 6 on which a plurality of ceramic green sheets are stacked, pasting means 3 that pastes and heats a long holding sheet 20 that develops adhesive strength when heated on the mounting surface 6 of the stage 5 preheated by the preheating means 2, and cutting means 4 that cuts the portion affixed to the mounting surface 6 from the long holding sheet 20.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a manufacturing apparatus and a manufacturing method for electronic components, and particularly to a manufacturing apparatus and a manufacturing method for electronic components having a ceramic laminate in which a plurality of ceramic green sheets are laminated.

Background Art

[0002] Conventionally, when manufacturing electronic components such as multilayer ceramic capacitors, there is a step of laminating a plurality of ceramic green sheets printed with internal electrodes on a stage. In this step, since it is necessary to align the positions of the internal electrodes in the lamination direction, the stage on which the ceramic green sheets are laminated is required to have high flatness. Also, when laminating the ceramic green sheets, it is required to removably hold the ceramic green sheets on the stage so that the ceramic green sheets do not shift or move on the stage.

[0003] Patent Document 1 below discloses providing a vacuum adsorption mechanism plate on the upper surface of a first mold on which a green sheet is laminated. Therefore, in the invention described in Patent Document 1 below, since the green sheet can be adsorbed on the vacuum adsorption mechanism plate, the green sheet can be removably held on the first mold.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the case of the invention described in Patent Document 1, since the vacuum suction mechanism plate is provided on the first mold, the configuration of the manufacturing apparatus for laminated ceramic capacitors becomes complicated, and there is a risk of affecting the arrangement of equipment around the location where the first mold of the manufacturing apparatus is provided.

[0006] The present invention has been made in view of such problems, and an object thereof is to provide a manufacturing apparatus and a manufacturing method for electronic components that can detachably hold a ceramic green sheet on a stage with a simple configuration.

Means for Solving the Problems

[0007] The manufacturing apparatus for electronic components of the present invention is a manufacturing apparatus for electronic components having a ceramic laminate in which a plurality of ceramic green sheets are laminated, and includes a preheating means for preheating a stage having a placement surface on which the plurality of ceramic green sheets are laminated, and an attaching means for attaching a long holding sheet whose adhesive force is developed by heating to the placement surface of the stage preheated by the preheating means while heating, and a cutting means for cutting a portion attached to the placement surface from the long holding sheet.

[0008] The manufacturing method for electronic components of the present invention is a manufacturing method for electronic components having a ceramic laminate in which a plurality of ceramic green sheets are laminated, and includes a preheating step of preheating a stage having a placement surface on which the plurality of ceramic green sheets are laminated by a preheating means, and an attaching step of attaching a long holding sheet whose adhesive force is developed by heating to the placement surface of the stage preheated in the preheating step by an attaching means while heating.

Effects of the Invention

[0009] According to the present invention, it is possible to provide a manufacturing apparatus and a manufacturing method for electronic components that can detachably hold a ceramic green sheet on a stage with a simple configuration.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Mode for Carrying Out the Invention

[0011] Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

[0012] FIG. 1 and FIG. 2 are views showing a schematic configuration of a manufacturing apparatus for an electronic component according to an embodiment of the present invention. FIG. 1 is a right side view, and FIG. 2 is a plan view showing a part omitted. The manufacturing apparatus 1 for an electronic component of the present embodiment is a manufacturing apparatus for an electronic component having a ceramic laminate in which a plurality of ceramic green sheets are laminated, and includes a preheating means 2, an attaching means 3, and a cutting means 4. Hereinafter, each of these means will be described in order.

[0013] The preheating means 2 is a means for preheating the stage 5 on which a plurality of ceramic green sheets are laminated. The stage 5 is in the form of a metal plate. In the present embodiment, the stage 5 is made of SUS and is in the form of a plate that is substantially square in plan view. The thickness of the plate-shaped stage 5 is about 0.5 mm. The thickness of the stage 5 is not limited to about 0.5 mm, and for example, it may be about 0.5 mm or more and about 2.0 mm or less. When the thickness of the stage 5 is less than about 0.5 mm, it is difficult to handle by the handling device, so it is difficult to move the stage 5. When the thickness of the stage 5 is greater than about 2.0 mm, variations in surface pressure occur. The stage 5 has a mounting surface 6 on which a plurality of ceramic green sheets are laminated. This mounting surface 6 is one plate surface of the plate-shaped stage 5. In the present embodiment, the preheating means 2 includes a pair of heating plates 7, 7 that can sandwich the stage 5, and a heater for the heating plates (not shown) that heats the pair of heating plates 7, 7.

[0014] Each of the pair of heating plates 7, 7 is made of metal and is in the form of a plate that is substantially square in plan view. The thickness of each of the pair of heating plates 7, 7 is preferably 10 mm or more in order to ensure heat capacity. The pair of heating plates 7, 7 are arranged vertically with their plate surfaces facing up and down. The pair of heating plates 7, 7 are movable in the vertical direction by driving means (not shown). Therefore, the pair of heating plates 7, 7 can sandwich the stage 5. Each of the pair of heating plates 7, 7 has a heater for the heating plate built therein. Note that the heater for the heating plate may be externally attached to the heating plate 7.

[0015] Of the upper and lower pair of heating plates 7, 7, the lower heating plate 7 is disposed so as to be vertically movable within a belt conveyor 8 that conveys the stage 5. The belt conveyor 8 has a conventionally well-known configuration. Specifically, the belt conveyor 8 has a left conveyor section 9 located on the left side and a right conveyor section 10 located on the right side. The left conveyor section 9 has two driven shafts 11, 11 whose axes are arranged in the left-right direction and a drive shaft (not shown) whose axis is arranged in the left-right direction. The two driven shafts 11, 11 are arranged at intervals in the front-rear direction. The drive shaft is disposed below between the two driven shafts 11, 11. A belt 12 is wound around the two driven shafts 11, 11 and the drive shaft thus arranged. The tension of the belt 12 is adjusted by a tension roller (not shown). The right conveyor section 10 has two driven shafts 13, 13 whose axes are arranged in the left-right direction and a drive shaft (not shown) whose axis is arranged in the left-right direction. The two driven shafts 13, 13 are arranged at intervals in the front-rear direction. The drive shaft is disposed below between the two driven shafts 13, 13. A belt 14 is wound around the two driven shafts 13, 13 and the drive shaft thus arranged. The tension of the belt 14 is adjusted by a tension roller (not shown). The drive shafts of the left conveyor section 9 and the right conveyor section 10 are connected to a motor (not shown). Therefore, by driving the motor, the stage 5 on the belts 12, 14 can be conveyed.

[0016] In the space between the left conveyor section 9 and the right conveyor section 10, the lower heating plate 7 is disposed so as to be vertically movable. On the other hand, the upper heating plate 7 is disposed so as to be vertically movable above the belt conveyor 8 so as to face the lower heating plate 7. With such a configuration, the upper and lower pair of heating plates 7, 7 can sandwich the stage 5 placed on the stopped belt conveyor 8. As described above, the pair of heating plates 7, 7 can be heated by a heater for the heating plate. Therefore, by sandwiching the stage 5 with the pair of heated heating plates 7, 7, the stage 5 can be preheated.

[0017] In this embodiment, the stage 5 is taken into the preheating means 2 by the belt conveyor 15. The belt conveyor 15 is located on the front side of the preheating means 2. The belt conveyor 15 has a conventionally known configuration. Specifically, the belt conveyor 15 has two passive shafts 16, 16 with their axes arranged in the left - right direction and a drive shaft (not shown) with its axis arranged in the left - right direction. The two passive shafts 16, 16 are arranged at intervals in the front - rear direction. The drive shaft is arranged below the two passive shafts 16, 16. A belt 17 is wound around the two passive shafts 16, 16 and the drive shaft thus arranged. The tension of the belt 17 is adjusted by a tension roller (not shown). The drive shaft of the belt conveyor 15 is connected to a motor (not shown). Therefore, by driving the motor, the stage 5 on the belt 17 can be conveyed.

[0018] Between the belt conveyor 15 and the preheating means 2, a pair of rollers 18, 18 and a pair of rollers 19, 19 are arranged. The pair of rollers 18, 18 are arranged vertically. At this time, a gap is formed between the upper roller 18 and the lower roller 18. The pair of rollers 18, 18 are each arranged such that their axial directions are along the left - right direction. The pair of rollers 18, 18 are each rotatable about their axes. The pair of rollers 19, 19 are arranged vertically. At this time, a gap is formed between the upper roller 19 and the lower roller 19. The pair of rollers 19, 19 are each arranged such that their axial directions are along the left - right direction. The pair of rollers 19, 19 are each rotatable about their axes.

[0019] The pair of rollers 18, 18 are arranged in front of the pair of rollers 19, 19. With such a configuration, the stage 5 is conveyed by the belt conveyor 15 from the belt conveyor 15 through between the pair of rollers 18, 18 and between the pair of rollers 19, 19 to the belt conveyor 8. The stage 5 conveyed to the belt conveyor 8 is conveyed by the belt conveyor 8 between the pair of heating plates 7, 7. When the stage 5 is arranged between the pair of heating plates 7, 7, the belt conveyor 8 is stopped. Then, the stage 5 is heated by the preheating means 2. The preheated stage 5 is supplied by the belt conveyor 8 to the pasting means 3.

[0020] On the rear side, which is the tip side in the stage conveying direction of the belt conveyor 8 provided with the preheating means 2, the pasting means 3 is provided. The pasting means 3 is a means for pasting the long holding sheet 20 onto the mounting surface 6 of the stage 5 preheated by the preheating means 2. The holding sheet 20 exhibits adhesive force by heating. For example, the holding sheet 20 exhibits adhesive force when heated to 40°C or higher. Note that the temperature at which the adhesive force of the holding sheet 20 is exhibited is not limited to 40°C or higher. The thickness of the holding sheet 20 is about 0.1 mm, but is not limited to this.

[0021] The holding sheet 20 is attached to the placement surface 6 of the stage 5 by the adhesive force of the holding sheet 20. Therefore, the attaching means 3 attaches the holding sheet 20 to the placement surface 6 of the stage 5 while heating it. For this reason, in the present embodiment, the attaching means 3 includes a pair of heating rollers 21, 21 and a roller heater (not shown) that heats the pair of heating rollers 21, 21. The pair of heating rollers 21, 21 are arranged vertically. At this time, a gap is formed between the upper heating roller 21 and the lower heating roller 21. Each of the pair of heating rollers 21, 21 has a metal roller body 22 and a cylindrical elastic member 23 provided on the roller body 22. The roller body 22 is arranged such that the axial direction is along the left-right direction. The roller body 22 is rotatable about its axis. A motor is connected to the roller body 22. Therefore, by driving the motor, the roller body 22 can be rotated about its axis. A roller heater is built into the roller body 22. The elastic member 23 is cylindrical and is provided non-rotatably on the roller body 22 so as to cover the outer peripheral surface of the roller body 22. The elastic member 23 is made of, for example, rubber.

[0022] The stage 5 conveyed by the belt conveyor 8 is supplied to the gap between the pair of upper and lower heating rollers 21, 21. The placement surface 6 of the stage 5 is brought into contact with the long holding sheet 20 supplied via the roll 24 into the gap between the pair of heating rollers 21, 21 by the rotation of the pair of heating rollers 21, 21. In this way, the pair of heating rollers 21, 21 can sandwich the stage 5 and the holding sheet 20 and bring the holding sheet 20 into contact with the placement surface 6. As described above, the pair of heating rollers 21, 21 can be heated by the roller heater. Therefore, by sandwiching the stage 5 and the holding sheet 20 with the pair of heating rollers 21, 21 heated by the roller heater, the adhesive force is developed in the holding sheet 20, and the holding sheet 20 can be attached to the placement surface 6 of the stage 5. The stage 5 to which the holding sheet 20 is attached is taken out from the gap between the pair of heating rollers 21, 21 by the rotation of the pair of heating rollers 21, 21.

[0023] In this embodiment, the stage 5 to which the holding sheet 20 is attached is taken out by the belt conveyor 25. The belt conveyor 25 is located on the rear side of the attaching means 3. The belt conveyor 25 has a conventionally known configuration. Specifically, the belt conveyor 25 has two driven shafts 26, 26 whose axes are arranged in the left - right direction and a drive shaft (not shown) whose axis is arranged in the left - right direction. The two driven shafts 26, 26 are arranged at intervals in the front - rear direction. The drive shaft is arranged below between the two driven shafts 26, 26. A belt 27 is wound around the two driven shafts 26, 26 and the drive shaft thus arranged. The tension of the belt 27 is adjusted by a tension roller (not shown). The drive shaft of the belt conveyor 25 is connected to a motor (not shown). Therefore, by driving the motor, the stage 5 on the belt 27 can be conveyed.

[0024] A pair of rollers 28, 28 are arranged between the belt conveyor 25 and the attaching means 3. The pair of rollers 28, 28 are arranged one above the other. At this time, a gap is formed between the upper roller 28 and the lower roller 28. The pair of rollers 28, 28 are each arranged such that the axial direction is along the left - right direction. The pair of rollers 28, 28 are each rotatable about its axis. With such a configuration, the stage 5 to which the holding sheet 20 is attached is conveyed from the attaching means 3 through between the pair of rollers 28, 28 to the belt conveyor 25.

[0025] After the stage 5 is conveyed to the belt conveyor 25, the portion of the long holding sheet 20 attached to the placement surface 6 of the stage 5 is cut by the cutting means 4. The cutting means 4 is disposed on the rear side of the pasting means 3. Specifically, the cutting means 4 is disposed between the pasting means 3 and a pair of rollers 28, 28. The cutting means 4 has a cutting blade 29 for cutting the holding sheet 20. The cutting blade 29 is vertically movable. The cutting blade 29 is connected to a motor. Therefore, by driving the motor, the cutting blade 29 can be moved up and down. With such a configuration, after the stage 5 passes through the pasting means 3, the holding sheet 20 can be cut by moving the cutting blade 29 downward and pressing it against the holding sheet 20. In this embodiment, the holding sheet 20 is cut by the pressing of the cutting blade 29, but the present invention is not limited thereto. For example, the holding sheet 20 may be cut by the rotation of the cutting blade, or the holding sheet 20 may be cut by the pulling of the cutting blade.

[0026] After the holding sheet 20 is cut, the stage 5 to which the holding sheet 20 is attached is conveyed by the belt conveyor 25 from the front side of the belt conveyor 25 to the rear side of the belt conveyor 25. The stage 5 conveyed to the rear side of the belt conveyor 25 is installed in a peeling device described later.

[0027] FIG. 3 is a right side view showing a schematic configuration of the peeling device. FIG. 4 is an explanatory view showing a state in which a ceramic green sheet peeled from a carrier film is laminated on a stage. The peeling device 30 is a device for peeling the ceramic green sheet 31 from the carrier film 32. The peeling device 30 includes a cut stage 33, a cutting blade 34, and a peeling head 35.

[0028] The composite sheet 36 is held on the cut stage 33. The composite sheet 36 has a carrier film 32 and a ceramic green sheet 31 formed on the carrier film 32. The composite sheet 36 is held on the cut stage 33 in a state where the carrier film 32 is in contact with the cut stage 33.

[0029] The cutting blade 34 is disposed above the cutting stage 33. The cutting blade 34 can cut the ceramic green sheet 31 on the carrier film 32 by moving toward the composite sheet 36 held on the cutting stage 33.

[0030] The peeling head 35 is disposed above the composite sheet 36. The peeling head 35 can suck and hold the ceramic green sheet 31 cut by the cutting blade 34. Below the peeling head 35, a stage 5 to which the holding sheet 20 is attached is installed.

[0031] Also, the peeling device 30 includes a conveyance roll 37 and a peeling roll 38. The conveyance roll 37 can convey the composite sheet 36. In the present embodiment, the conveyance roll 37 is configured to be able to intermittently convey the composite sheet 36. The peeling roll 38 can peel the carrier film 32 from the ceramic green sheet 31 held by the peeling head 35. Therefore, the peeling roll 38 is configured to be able to move in a direction opposite to the conveyance direction of the composite sheet 36.

[0032] Next, a method for manufacturing an electronic component using the peeling device 30 will be described. Here, the case of manufacturing a multilayer ceramic capacitor, which is an example of an electronic component, will be described. Note that the electronic component is not limited to a multilayer ceramic capacitor.

[0033] When manufacturing a multilayer ceramic capacitor, first, a slurry containing a dielectric ceramic powder, a binder, and a solvent is formed into a sheet shape on a carrier film 32. As a result, a composite sheet 36 in which a ceramic green sheet 31 is held on the carrier film 32 can be produced. After the production of the composite sheet 36, a seed conductive paste for forming an internal electrode is printed on the ceramic green sheet 31 in a predetermined pattern by screen printing or the like to form a pattern of the internal electrode. Then, using a peeling device 30, the ceramic green sheet 31 on which the internal electrode pattern is formed and the ceramic green sheet 31 on which the internal electrode pattern is not formed are laminated.

[0034] Specifically, first, the composite sheet 36 is conveyed by a conveying roll 37 so that a predetermined region of the ceramic green sheet 31 is disposed on a cutting stage 33. When a predetermined region of the ceramic green sheet 31 is disposed on the cutting stage 33, the conveying roll 37 is temporarily stopped to stop the conveyance of the composite sheet 36. After the stop of the conveying roll 37, a cutting blade 34 is moved downward to cut the ceramic green sheet 31 on the carrier film 32. Then, the composite sheet 36 is conveyed by the conveying roll 37 so that the cut ceramic green sheet 31 is disposed below a peeling head 35. When the cut ceramic green sheet 31 is disposed below the peeling head 35, the peeling head 35 is moved downward to suck the cut ceramic green sheet 31 with the peeling head 35. While the cut ceramic green sheet 31 is sucked by the peeling head 35, a peeling roll 38 is moved in a direction opposite to the conveyance direction of the composite sheet 36. As a result, the carrier film 32 can be peeled from the cut ceramic green sheet 31. Thereafter, the peeling head 35 is moved downward to laminate the ceramic green sheet 31 on a holding sheet 20 of a stage 5. This operation is repeated a plurality of times to laminate a plurality of ceramic green sheets 31 on the holding sheet 20 of the stage 5. As a result, a laminated block in which a plurality of ceramic green sheets 31 are laminated can be formed. In this way, the peeling device 30 produces a laminated block.

[0035] After forming the stacked block, a plurality of stacked chips are cut out from the stacked block. Then, the stacked chips are fired to form a ceramic laminate. After forming the ceramic laminate, a conductive paste is applied to the outer surface of the ceramic laminate to form a conductive paste layer on the ceramic laminate. After forming the conductive paste, the conductive paste layer is fired to form an external electrode on the ceramic laminate. Thereby, a multilayer ceramic capacitor having the following configuration can be obtained. Note that after cutting out the stacked chips from the stacked block, a conductive paste layer may be formed on the stacked chips, and the stacked chips and the conductive paste layer may be fired to manufacture a multilayer ceramic capacitor having a ceramic laminate.

[0036] FIGS. 5 and 6 are diagrams showing a multilayer ceramic capacitor which is an electronic component. FIG. 5 is a schematic perspective view, and FIG. 6 is a cross-sectional view taken along line A-A of FIG. 5. Inside the ceramic laminate 40 of the multilayer ceramic capacitor 39, the internal electrodes 41 and 42 are arranged such that a part of the adjacent internal electrodes 41 and 42 face each other with a ceramic layer interposed therebetween. An external electrode 43 connected to the internal electrode 41 is formed on one end face of the ceramic laminate 40. An external electrode 44 connected to the internal electrode 42 is formed on the other end face of the ceramic laminate 40.

[0037] The multilayer ceramic capacitor 39 having such a configuration is manufactured by the manufacturing method described above. At this time, the holding sheet 20 is attached to the stage 5 on which the ceramic green sheet 31 is stacked. Hereinafter, the procedure for attaching the holding sheet 20 to the stage 5 in the manufacturing method of the electronic component will be described. Note that in the manufacturing method of the electronic component of the present embodiment, the above-described manufacturing apparatus 1 is used.

[0038] The manufacturing method of the electronic component according to this embodiment is a method for manufacturing an electronic component having a ceramic laminate 40 in which a plurality of ceramic green sheets 31 are laminated. In this embodiment, a preheating step, an attaching step, and a cutting step are sequentially executed. Before the preheating step, a stage 5 and a holding sheet 20 are prepared. Specifically, the stage 5 is placed on the belt conveyor 15. The holding sheet 20 is set in the manufacturing apparatus 1 so as to be attached to the stage 5 by the attaching means 3. After the step of preparing the stage 5 and the holding sheet 20 in this way, the stage 5 is conveyed by the belt conveyor 15 to the adjacent belt conveyor 8. Then, the stage 5 is disposed between a pair of heating plates 7, 7 by the belt conveyor 8.

[0039] The preheating step is a step of preheating the stage 5 having the placement surface 6 on which a plurality of ceramic green sheets 31 are laminated by the preheating means 2. In the preheating step, the stage 5 is heated by sandwiching the stage 5 between a pair of heating plates 7, 7 heated by a heater for heating plates. The temperature of the pair of heating plates 7, 7 of the preheating means 2 is preferably 50°C or higher and 70°C or lower. After the preheating step, the stage 5 is conveyed by the belt conveyor 8 between a pair of heating rollers 21, 21.

[0040] The attaching step is a step of attaching, while heating, a long holding sheet 20 whose adhesive force is developed by heating to the placement surface 6 of the stage 5 preheated in the preheating step by the attaching means 3. In the attaching step, the stage 5 and the holding sheet 20 are sandwiched between a pair of heating rollers 21, 21 heated by a heater for rollers, so that the adhesive force is developed in the holding sheet 20, and the holding sheet 20 is attached to the placement surface 6 of the stage 5. The temperature of the pair of heating rollers 21, 21 of the attaching means 3 is preferably 40°C or higher and 90°C or lower, more preferably 50°C or higher and 70°C or lower. When the temperature of the attaching means 3 is lower than 40°C, there is a possibility that the adhesive force of the holding sheet 20 cannot be developed. When the temperature of the attaching means 3 is higher than 90°C, there is a possibility that the plate-shaped stage 5 will warp.

[0041] After the pasting process, the stage 5 is taken out from the gap between the pair of heating rollers 21, 21 by the rotation of the pair of heating rollers 21, 21 and is taken out onto the belt conveyor 25. When the stage 5 is taken out onto the belt conveyor 25, the holding sheet 20 is pasted onto the subsequent stage 5 by the pasting means 3. Therefore, the holding sheet 20 pasted on the stage 5 taken out onto the belt conveyor 25 and the holding sheet 20 pasted on the subsequent stage 5 are continuous.

[0042] The cutting process is a process of cutting the portion pasted on the mounting surface 6 of the stage 5 from the long holding sheet 20 by the cutting means 4. In the cutting process, after the stage 5 has passed through the pasting means 3, the cutting blade 29 is moved downward and pressed against the holding sheet 20, whereby the holding sheet 20 is cut. As a result, the long holding sheet 20 is cut between the stage 5 taken out onto the belt conveyor 25 and the subsequent stage 5. If there is no subsequent stage 5, the stage 5 is not taken out onto the belt conveyor 25.

[0043] After the cutting process, the stage 5 with the holding sheet 20 pasted thereon is conveyed by the belt conveyor 25 from the front side of the belt conveyor 25 to the rear side of the belt conveyor 25. In the present embodiment, the holding sheet 20 is pasted on a plurality of consecutive stages 5. The stage 5 conveyed to the rear side of the belt conveyor 25 is installed in the peeling device 30. Then, the peeling device 30 laminates a plurality of ceramic green sheets 31 on the holding sheet 20 of the stage 5.

[0044] In the case of this embodiment, the holding sheet 20 that exhibits adhesive force upon heating is attached to the preheated stage 5 while being heated. Therefore, when the ceramic green sheet 31 is laminated on the holding sheet 20, the ceramic green sheet 31 is held on the stage 5 by the adhesive force of the holding sheet 20. Therefore, when the ceramic green sheet 31 is laminated, the ceramic green sheet 31 is prevented from shifting on the stage 5. And when the temperature of the holding sheet 20 drops, the adhesive force of the holding sheet 20 is lost, so that the laminated plurality of ceramic green sheets 31 can be easily removed from the stage 5. Thus, according to this embodiment, the ceramic green sheet 31 can be detachably held on the stage 5 with a simple configuration.

[0045] In the case of this embodiment, the preheating means 2 includes a pair of heating plates 7, 7 and a heater for the heating plates that heats the pair of heating plates 7, 7. The attaching means 3 includes a pair of heating rollers 21, 21 and a heater for the rollers that heats the pair of heating rollers 21, 21. Therefore, according to the manufacturing apparatus 1 for electronic components of this embodiment, the apparatus can have a simpler configuration. In the case of this embodiment, the thickness of each of the pair of heating plates 7, 7 is 10 mm or more. Therefore, according to the manufacturing apparatus 1 for electronic components of this embodiment, since the heat capacity of the heating plate 7 is high, even if heat is taken away from the stage 5, the stage 5 can be uniformly heated.

[0046] In the case of this embodiment, the heating roller 21 includes a roller body 22 and an elastic material 23. Therefore, uniform heating by the pair of heating rollers 21, 21 can be achieved. In the case of this embodiment, the stage 5 can be preheated by sandwiching the stage 5 with the pair of heating plates 7, 7. Therefore, warping of the plate-shaped stage 5 can be prevented. In the case of this embodiment, since the stage 5 is preheated in advance, when the holding sheet 20 is attached to the stage 5 by the attaching means 3, the holding sheet 20 can be attached to the stage 5 uniformly without unevenness.

[0047] Note that the present invention is not limited to the above embodiments, and modifications and improvements within the scope that can achieve the object of the present invention are included in the present invention.

[0048] For example, the preheating means 2, the attaching means 3, and the cutting means 4 are not limited to the configurations of the above embodiments.

Explanation of Reference Numerals

[0049] 1 Manufacturing apparatus for electronic components 2 Preheating means 3 Attaching means 4 Cutting means 5 Stage 6 Mounting surface 7 Heating plate 20 Holding sheet 21 Heating roller 22 Roller body 23 Elastic material 31 Ceramic green sheet 40 Ceramic laminate

Claims

1. An electronic component manufacturing apparatus having a ceramic laminate in which a plurality of ceramic green sheets are laminated, comprising: preheating means for preheating a metal stage having a mounting surface on which the plurality of ceramic green sheets are laminated; attaching means for attaching a long holding sheet whose adhesive force is developed by heating to the mounting surface of the stage preheated by the preheating means while heating; cutting means for cutting a portion attached to the mounting surface from the long holding sheet; a head capable of laminating the suction-held ceramic green sheet on the holding sheet of the portion attached to the mounting surface of the stage; the preheating means includes a pair of metal heating plates capable of sandwiching the stage, and a heater for heating the pair of heating plates; the attaching means includes a pair of heating rollers for sandwiching the stage and the holding sheet and bringing the holding sheet into contact with the mounting surface, and a heater for heating the pair of heating rollers; each of the pair of heating rollers has a roller body and a cylindrical elastic material covering the outer peripheral surface of the roller body, an electronic component manufacturing apparatus.

2. The thickness of each of the pair of heating plates is 10 mm or more, the electronic component manufacturing apparatus according to claim 1.

3. A method for manufacturing an electronic component having a ceramic laminate in which a plurality of ceramic green sheets are laminated, comprising: a preheating step of preheating a metal stage having a mounting surface on which the plurality of ceramic green sheets are laminated by preheating means; an attaching step of attaching a long holding sheet whose adhesive force is developed by heating to the mounting surface of the stage preheated in the preheating step by attaching means while heating; a cutting step of cutting a portion attached to the mounting surface from the long holding sheet by cutting means; after the cutting step, the ceramic green sheet suction-held by the head can be laminated on the holding sheet of the portion attached to the mounting surface of the stage by the head; the preheating means includes a pair of metal heating plates capable of sandwiching the stage, and a heater for heating the pair of heating plates; The pasting means includes a pair of heating rollers that sandwich the stage and the holding sheet and bring the holding sheet into contact with the placement surface, and a roller heater that heats the pair of heating rollers. Each of the pair of heating rollers has a roller body and a cylindrical elastic material that covers the outer peripheral surface of the roller body, and is a method for manufacturing an electronic component.

4. The method for manufacturing an electronic component according to claim 3, wherein the temperature of the preheating means and the temperature of the pasting means are 50°C or higher and 70°C or lower.

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