Control device, irradiation device, measurement device, control method, and computer program

Abstract

To perform, as one example, operating a plurality of mechanisms for changing an electromagnetic wave irradiation direction under a mutually close condition.SOLUTION: A control device (10) includes a control section (100). The control section (100) controls a plurality of irradiation devices (20) for radiating an electromagnetic wave. The control section (100) outputs a plurality of first periodic signals for respectively controlling a movement of the electromagnetic wave irradiation direction in a first direction in the irradiation devices (20), and a plurality of second periodic signals for respectively controlling a movement of the electromagnetic wave irradiation direction in a second direction in the irradiation devices. Periods of the first periodic signals are mutually the same. The number of effective repetitions of the movement of the irradiation direction in the second direction during a time when the irradiation direction is moved in the first direction by one period is the same in the irradiation devices.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a technique for controlling a scanning device.

Background Art

[0002] When performing measurements or the like using a plurality of electromagnetic waves, it may be necessary to use a combination of a plurality of mechanisms for changing the irradiation direction of the electromagnetic waves. In this case, in order to efficiently perform fusion and parallel processing of measurement results and the like by a plurality of electromagnetic waves, it is necessary to control the movements of the plurality of mechanisms so as to have a desired relationship and synchronization.

[0003] Patent Document 1 describes that the reflecting surfaces of the scanning mirrors of a plurality of optical scanning units are synchronized to simultaneously scan a recording medium with laser light. In Patent Document 1, the motors that drive all the optical scanning units are rotated at a constant rotational speed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, the method of Patent Document 1 requires all the optical scanning units to be rotated at the same rotational speed, and thus cannot be applied to cases where the rotational speed and operating frequency are determined depending on the structure of each mechanism.

[0006] As an example of the problem to be solved by the present invention, it is possible to operate a plurality of mechanisms for changing the irradiation direction of electromagnetic waves under conditions close to each other.

Means for Solving the Problems

[0007] ·The first invention according to the present disclosure is It includes a control unit that controls a plurality of irradiation devices for irradiating electromagnetic waves. The control unit outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices. The periods of the plurality of first periodic signals are the same as each other. While outputting the first periodic signal for one period, the control unit outputs the second periodic signal for a plurality of periods. The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same for the plurality of irradiation devices. The difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices. It is a control device in which the electromagnetic wave is not irradiated from the irradiation device during the time of the movement in the second direction that cannot be counted in the effective repetition number. · A second invention according to the present disclosure is It includes a control unit that controls a plurality of irradiation devices for irradiating electromagnetic waves. The control unit outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices. The periods of the plurality of first periodic signals are the same as each other. While outputting the first periodic signal for one period, the control unit outputs the second periodic signal for a plurality of periods. The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same for the plurality of irradiation devices. The difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices. The irradiation device is included in a measurement device that receives and measures a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object. The control device is such that measurement is not performed by the measurement device during the time of movement in the second direction that cannot be counted as the effective repetition number. · A third invention according to the present disclosure is provided with a control unit that controls a plurality of irradiation devices that irradiate electromagnetic waves, wherein the control unit outputs a plurality of first cycle signals that respectively control movement of the irradiation direction of the electromagnetic wave in a first direction in the plurality of irradiation devices, and a plurality of second cycle signals that respectively control movement of the irradiation direction of the electromagnetic wave in a second direction in the plurality of irradiation devices, the periods of the plurality of first cycle signals are the same as each other, the control unit outputs the second cycle signals for a plurality of cycles while outputting the first cycle signal for one cycle, the effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one cycle in the first direction is the same in the plurality of irradiation devices, the difference in the effective repetition number of the second cycle signal before a reference point in each cycle of the first cycle signal is less than 1 among the plurality of irradiation devices, the plurality of irradiation devices include a first irradiation device and a second irradiation device having a longer period of the second cycle signal than that of the first irradiation device, and the amplitude of the first cycle signal of the first irradiation device is larger than the amplitude of the first cycle signal of the second irradiation device. · A fourth invention according to the present disclosure is provided with a control unit that controls a plurality of measurement devices that irradiate electromagnetic waves, wherein the control unit outputs a plurality of first cycle signals that respectively control movement of the irradiation direction of the electromagnetic wave in a first direction in the plurality of measurement devices, and a plurality of second cycle signals that respectively control movement of the irradiation direction of the electromagnetic wave in a second direction in the plurality of measurement devices, the periods of the plurality of first cycle signals are the same as each other, The periods of the plurality of second periodic signals are different from each other at least in part among the plurality of second periodic signals. While outputting the first periodic signal for one period, the control unit outputs the second periodic signal for a plurality of periods. During the period in which the irradiation direction is moved one period in the first direction, the effective repetition number of the movement of the irradiation direction in the second direction is the same among the plurality of measuring devices. It is a control device in which the difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of measuring devices. · A fifth invention according to the present disclosure is It includes a control unit that controls a plurality of irradiation devices that irradiate electromagnetic waves. The control unit outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in the first direction in the plurality of irradiation devices, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in the second direction in the plurality of irradiation devices. The periods of the plurality of first periodic signals are the same as each other. The periods of the plurality of second periodic signals are different from each other at least in part among the plurality of second periodic signals. While outputting the first periodic signal for one period, the control unit outputs the second periodic signal for a plurality of periods. The control unit is a control device that sets the start position of the period for each of the plurality of irradiation devices so that the center point of the period during which the effective scanning of the second periodic signal with respect to the reference point in each period of the first periodic signal is performed is the same among the plurality of irradiation devices.

[0008] · A sixth invention according to the present disclosure is A plurality of irradiation units that irradiate electromagnetic waves, It includes a control unit that controls the plurality of irradiation units. The control unit outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in the first direction in the plurality of irradiation units, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in the second direction in the plurality of irradiation units. The periods of the plurality of first periodic signals are the same as each other, while outputting the first periodic signal for one period, the control unit outputs the second periodic signal for a plurality of periods, The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same for the plurality of irradiation units, For each period of the first periodic signal, the difference in the effective repetition number of the second periodic signal before the reference point is less than 1 among the plurality of irradiation units, The irradiation device is such that the electromagnetic wave is not irradiated from the irradiation unit during the time of the movement in the second direction that cannot be counted as the effective repetition number. · A seventh invention according to the present disclosure is a plurality of irradiation units that irradiate electromagnetic waves, and a control unit that controls the plurality of irradiation units, The control unit outputs a plurality of first periodic signals that respectively control the movement of the irradiation direction of the electromagnetic wave in the first direction in the plurality of irradiation units, and a plurality of second periodic signals that respectively control the movement of the irradiation direction of the electromagnetic wave in the second direction in the plurality of irradiation units, the periods of the plurality of first periodic signals are the same as each other, while outputting the first periodic signal for one period, the control unit outputs the second periodic signal for a plurality of periods, The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same for the plurality of irradiation units, For each period of the first periodic signal, the difference in the effective repetition number of the second periodic signal before the reference point is less than 1 among the plurality of irradiation units, the irradiation unit is included in a measuring device that receives a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation unit by an object and performs measurement, The irradiation device is such that measurement is not performed by the measuring device during the time of the movement in the second direction that cannot be counted as the effective repetition number. · An eighth invention according to the present disclosure is a plurality of irradiation units that irradiate electromagnetic waves, a control unit that controls the plurality of irradiation units; The control unit outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation units, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation units; The periods of the plurality of first periodic signals are the same as each other; While outputting the first periodic signal for one period, the control unit outputs the second periodic signal for a plurality of periods; The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same in the plurality of irradiation units; The difference in the effective repetition number of the second periodic signal before a reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation units; The plurality of irradiation units include a first irradiation unit and a second irradiation unit whose period of the second periodic signal is longer than that of the first irradiation unit; An irradiation device in which the amplitude of the first periodic signal of the first irradiation unit is larger than the amplitude of the first periodic signal of the second irradiation unit. · A ninth invention according to the present disclosure is a plurality of irradiation units that irradiate electromagnetic waves; a control unit that controls the plurality of irradiation units; The control unit outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation units, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation units; The periods of the plurality of first periodic signals are the same as each other; The periods of the plurality of second periodic signals are different from each other in at least a part of the plurality of second periodic signals; While outputting the first periodic signal for one period, the control unit outputs the second periodic signal for a plurality of periods; During the period in which the irradiation direction is moved one cycle in the first direction, the effective number of repetitions of the movement of the irradiation direction in the second direction is the same among the plurality of irradiation units. A measuring device in which, for each cycle of the first cycle signal, the difference in the effective number of repetitions of the second cycle signal before the reference point is less than 1 among the plurality of irradiation units. · The tenth invention according to the present disclosure is A plurality of irradiation units that irradiate electromagnetic waves, A control unit that controls the plurality of irradiation units, The control unit outputs a plurality of first cycle signals that respectively control the movement of the irradiation direction of the electromagnetic wave in the first direction in the plurality of irradiation units, and a plurality of second cycle signals that respectively control the movement of the irradiation direction of the electromagnetic wave in the second direction in the plurality of irradiation units. The periods of the plurality of first cycle signals are the same as each other. The periods of the plurality of second cycle signals are different from each other in at least a part of the plurality of second cycle signals. The control unit outputs the second cycle signal for a plurality of cycles while outputting the first cycle signal for one cycle. The control unit is an irradiation device that sets the start position of the period for each of the plurality of irradiation units so that the center point of the period during which the effective scanning of the second cycle signal with respect to the reference point in each cycle of the first cycle signal is performed is the same among the plurality of irradiation units.

[0009] · The eleventh invention according to the present disclosure is Including a control step of controlling a plurality of irradiation devices that irradiate electromagnetic waves, In the control step, a plurality of first cycle signals that respectively control the movement of the irradiation direction of the electromagnetic wave in the first direction in the plurality of irradiation devices, and a plurality of second cycle signals that respectively control the movement of the irradiation direction of the electromagnetic wave in the second direction in the plurality of irradiation devices are output. The periods of the plurality of first cycle signals are the same as each other. In the control step, the second cycle signal is output for a plurality of cycles while the first cycle signal is output for one cycle. During the period in which the irradiation direction is moved one cycle in the first direction, the effective number of repetitions of the movement of the irradiation direction in the second direction is the same for the plurality of irradiation devices. In each cycle of the first cycle signal, the difference in the effective number of repetitions of the second cycle signal before the reference point is less than 1 among the plurality of irradiation devices. This is a control method in which the electromagnetic wave is not irradiated from the irradiation device during the time of the movement in the second direction that cannot be counted as the effective number of repetitions. · The twelfth invention according to the present disclosure is including a control step of controlling a plurality of irradiation devices that irradiate electromagnetic waves. In the control step, a plurality of first cycle signals for respectively controlling the movement of the irradiation direction of the electromagnetic wave in the first direction in the plurality of irradiation devices and a plurality of second cycle signals for respectively controlling the movement of the irradiation direction of the electromagnetic wave in the second direction in the plurality of irradiation devices are output. The periods of the plurality of first cycle signals are the same as each other. In the control step, while outputting the first cycle signal for one cycle, the second cycle signal is output for a plurality of cycles. During the period in which the irradiation direction is moved one cycle in the first direction, the effective number of repetitions of the movement of the irradiation direction in the second direction is the same for the plurality of irradiation devices. In each cycle of the first cycle signal, the difference in the effective number of repetitions of the second cycle signal before the reference point is less than 1 among the plurality of irradiation devices. The irradiation device is included in a measuring device that receives and measures a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object. This is a control method in which measurement is not performed by the measuring device during the time of the movement in the second direction that cannot be counted as the effective number of repetitions. · The thirteenth invention according to the present disclosure is including a control step of controlling a plurality of irradiation devices that irradiate electromagnetic waves. In the control step, a plurality of first periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices and a plurality of second periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices are output. The periods of the plurality of first periodic signals are the same as each other. In the control step, while outputting the first periodic signal for one period, the second periodic signal is output for a plurality of periods. The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same in the plurality of irradiation devices. The difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices. The plurality of irradiation devices include a first irradiation device and a second irradiation device having a longer period of the second periodic signal than that of the first irradiation device. The amplitude of the first periodic signal of the first irradiation device is larger than the amplitude of the first periodic signal of the second irradiation device, which is a control method. · The fourteenth invention according to the present disclosure is including a control step of controlling a plurality of measurement devices that irradiate electromagnetic waves. In the control step, a plurality of first periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of measurement devices and a plurality of second periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of measurement devices are output. The periods of the plurality of first periodic signals are the same as each other. The periods of the plurality of second periodic signals are different from each other in at least a part of the plurality of second periodic signals. In the control step, while outputting the first periodic signal for one period, the second periodic signal is output for a plurality of periods. The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same in the plurality of measurement devices. A control method in which, for each period of the first periodic signal, the difference in the effective repetition number of the second periodic signal before the reference point is less than 1 among the plurality of measuring devices. · The 15th invention according to the present disclosure is including a control step of controlling a plurality of irradiation devices that irradiate electromagnetic waves, in the control step, a plurality of first periodic signals that respectively control the movement of the electromagnetic waves in the first direction of the irradiation direction in the plurality of irradiation devices, and a plurality of second periodic signals that respectively control the movement of the electromagnetic waves in the second direction of the irradiation direction in the plurality of irradiation devices are output, the periods of the plurality of first periodic signals are the same as each other, the periods of the plurality of second periodic signals are different from each other at least in part of the plurality of second periodic signals, in the control step, while outputting one period of the first periodic signal, a plurality of periods of the second periodic signal are output, a control method of setting a start position of the period for each of the plurality of irradiation devices so that a center point of a period during which an effective scan of the second periodic signal with respect to a reference point in each period of the first periodic signal is performed is the same among the plurality of irradiation devices.

[0010] · The 16th invention according to the present disclosure is a computer program for realizing a control device, causing a computer to function as a control means for controlling a plurality of irradiation devices that irradiate electromagnetic waves, the control means outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic waves in the first direction of the irradiation direction in the plurality of irradiation devices, and a plurality of second periodic signals that respectively control the movement of the electromagnetic waves in the second direction of the irradiation direction in the plurality of irradiation devices, the periods of the plurality of first periodic signals are the same as each other, the control means outputs a plurality of periods of the second periodic signal while outputting one period of the first periodic signal, During the period when the irradiation direction is moved one cycle in the first direction, the effective number of repetitions of the movement of the irradiation direction in the second direction is the same for the plurality of irradiation devices. In each cycle of the first cycle signal, the difference in the effective number of repetitions of the second cycle signal before the reference point is less than 1 among the plurality of irradiation devices. A computer program that does not irradiate the electromagnetic wave from the irradiation device during the time of the movement in the second direction that cannot be counted as the effective number of repetitions. · The 17th invention according to the present disclosure is A computer program for realizing a control device, causing a computer to function as control means for controlling a plurality of irradiation devices that irradiate electromagnetic waves, The control means outputs a plurality of first cycle signals for respectively controlling the movement of the irradiation direction of the electromagnetic wave in the first direction in the plurality of irradiation devices, and a plurality of second cycle signals for respectively controlling the movement of the irradiation direction of the electromagnetic wave in the second direction in the plurality of irradiation devices. The periods of the plurality of first cycle signals are the same as each other. While outputting one cycle of the first cycle signal, the control means outputs a plurality of cycles of the second cycle signal. During the period when the irradiation direction is moved one cycle in the first direction, the effective number of repetitions of the movement of the irradiation direction in the second direction is the same for the plurality of irradiation devices. In each cycle of the first cycle signal, the difference in the effective number of repetitions of the second cycle signal before the reference point is less than 1 among the plurality of irradiation devices. The irradiation device is included in a measuring device that receives and measures a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object. A computer program in which the measuring device does not perform measurement during the time of the movement in the second direction that cannot be counted as the effective number of repetitions. · The 18th invention according to the present disclosure is A computer program for realizing a control device, causing a computer to Function as control means for controlling a plurality of irradiation devices that irradiate electromagnetic waves, The control means outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices, The periods of the plurality of first periodic signals are the same as each other, While outputting the first periodic signal for one period, the control means outputs the second periodic signal for a plurality of periods, The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same in the plurality of irradiation devices, The difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices, The plurality of irradiation devices include a first irradiation device and a second irradiation device having a longer period of the second periodic signal than the first irradiation device, A computer program in which the amplitude of the first periodic signal of the first irradiation device is larger than the amplitude of the first periodic signal of the second irradiation device. · The 19th invention according to the present disclosure is, A computer program for realizing a control device, Causing a computer to, Function as control means for controlling a plurality of measurement devices that irradiate electromagnetic waves, The control means outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of measurement devices, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of measurement devices, The periods of the plurality of first periodic signals are the same as each other, The periods of the plurality of second periodic signals are different from each other in at least a part of the plurality of second periodic signals, While outputting the first periodic signal for one period, the control means outputs the second periodic signal for a plurality of periods, During the period when the irradiation direction moves one cycle in the first direction, the effective repetition number of the movement of the irradiation direction in the second direction is the same among the plurality of measuring devices. A computer program in which, for each cycle of the first cycle signal, the difference in the effective repetition number of the second cycle signal before the reference point is less than 1 among the plurality of measuring devices. · The 20th invention according to the present disclosure is A computer program for realizing a control device, causing a computer to function as control means for controlling a plurality of irradiation devices that irradiate electromagnetic waves, the control means outputs a plurality of first cycle signals that respectively control the movement of the electromagnetic wave irradiation direction in the first direction in the plurality of irradiation devices, and a plurality of second cycle signals that respectively control the movement of the electromagnetic wave irradiation direction in the second direction in the plurality of irradiation devices, the periods of the plurality of first cycle signals are the same as each other, the periods of the plurality of second cycle signals are different from each other in at least a part of the plurality of second cycle signals, the control means outputs the second cycle signals for a plurality of cycles while outputting one cycle of the first cycle signal, A computer program for setting the start position of the period for each of the plurality of irradiation devices so that the center point of the period during which the effective scanning of the second cycle signal with respect to the time reference point in each cycle of the first cycle signal is performed is the same among the plurality of irradiation devices.

Brief Description of the Drawings

[0011] The above-described object, as well as other objects, features, and advantages, will become even more apparent from the following preferred embodiments described below and the accompanying drawings.

[0012]

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Embodiments for Carrying Out the Invention

[0013] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, similar components are denoted by similar reference numerals, and the description thereof will be omitted as appropriate. Also, unless otherwise specified, in each block diagram, each block represents a configuration of a functional unit, not a configuration of a hardware unit.

[0014] FIG. 1 is a block diagram illustrating a functional configuration of a control device 10 according to an embodiment. The control device 10 includes a control unit 100. The control unit 100 controls a plurality of irradiation devices 20 that irradiate electromagnetic waves. The control unit 100 outputs a plurality of first periodic signals that respectively control the movement of the irradiation directions of the electromagnetic waves in a first direction in the plurality of irradiation devices 20, and a plurality of second periodic signals that respectively control the movement of the irradiation directions of the electromagnetic waves in a second direction in the plurality of irradiation devices 20. The periods of the plurality of first periodic signals are the same as each other. The control unit 100 outputs the second periodic signals for a plurality of periods while outputting the first periodic signal for one period. The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same in the plurality of irradiation devices 20. And, the difference in the effective repetition number of the second periodic signals before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices. This will be described in detail below.

[0015] Each irradiation device 20 constitutes, for example, a measurement device 30 that performs measurement using electromagnetic waves. The measurement device 30 is, for example, a lidar (Laser Imaging Detection and Ranging, Laser Illuminated Detection and Ranging, or LiDAR: Light Detection and Ranging). When the irradiation device 20 constitutes a lidar, the irradiation device 20 outputs a pulsed electromagnetic wave and receives a reflected wave reflected by an object. Then, the distance from the measurement device 30 to the object is calculated using the difference between the output timing of the pulse and the reception timing of the reflected wave. The electromagnetic wave is, for example, light such as ultraviolet light, visible light, near-infrared light, etc. However, the irradiation device 20 is not limited to constituting the measurement device 30.

[0016] In the control device 10, the irradiation direction of the electromagnetic wave is changed under the control of the control unit 100. Then, pulse waves are output in order for a plurality of irradiation directions, and measurements are performed for each irradiation direction. For example, a plurality of measurement devices 30 are mounted on a moving body such as a vehicle. In order to efficiently measure and process the situation around the moving body, it is desirable for the plurality of measurement devices 30 to measure ranges close to each other at times close to each other.

[0017] FIG. 2 is a diagram illustrating the structure of the movable reflecting portion 220 that changes the irradiation direction of the electromagnetic wave in the irradiation device 20. The movable reflecting portion 220 has a reflecting surface that reflects the electromagnetic wave. The electromagnetic wave output from the irradiation element provided in the irradiation device 20 is incident on and reflected by the reflecting surface. The reflecting surface of the movable reflecting portion 220 is configured to be variable in angle with respect to the first axis 221 and the second axis 222, respectively. Then, by changing the angle of the reflecting surface of the movable reflecting portion 220, the irradiation direction of the reflected electromagnetic wave changes. In the example of this figure, specifically, by swinging the reflecting surface of the movable reflecting portion 220 with respect to the first axis 221, the irradiation direction of the electromagnetic wave reciprocates in the first direction. Also, by swinging the reflecting surface of the movable reflecting portion 220 with respect to the second axis 222, the irradiation direction of the electromagnetic wave reciprocates in the second direction. Hereinafter, in each figure, the first direction is exemplified as the y direction and the second direction is exemplified as the x direction. Note that the movement of the irradiation direction of the electromagnetic wave in a certain direction means that is, the spot of the electromagnetic wave moves in a certain direction.

[0018] In the present embodiment, the first cycle signal is a signal that controls the drive with respect to the first axis 221 of the movable reflecting portion 220. And the value of the first cycle signal corresponds to the rotation angle of the reflecting surface of the movable reflecting portion 220 with the first axis 221 as the axis. As a result, the position of the irradiation direction of the electromagnetic wave in the y direction substantially corresponds to the value of the first cycle signal. The periods of the first cycle signals for the plurality of irradiation devices 20 can be the same as each other.

[0019] The movable reflection unit 220 is, for example, a MEMS mirror. The driving frequency with respect to at least one axis of the movable reflection unit 220 is, for example, a resonance frequency depending on the structure of the movable reflection unit 220. In the present embodiment, the driving frequency of the movable reflection unit 220 with respect to the second axis 222 is the resonance frequency. And the second periodic signal is a signal for controlling the driving with respect to the second axis 222 of the movable reflection unit 220. The period of the second periodic signal corresponds to the period of the swing of the reflection surface of the movable reflection unit 220 around the second axis 222. As a result, the irradiation direction of the electromagnetic wave reciprocates in the x direction with the period of the second periodic signal.

[0020] By setting the driving frequency with respect to at least one axis of the movable reflection unit 220 to be the resonance frequency of the driving, it is possible to realize driving at high speed and with a large amplitude. On the other hand, the resonance frequencies of the movable reflection units 220 in the plurality of irradiation devices 20 may be different from each other due to slight differences in structure and mechanical characteristics. Therefore, it is difficult to make the driving frequencies due to resonance of the plurality of irradiation devices 20 exactly the same. As a result, for the plurality of irradiation devices 20, second periodic signals having different periods from each other are used. However, when the resonance frequencies of the movable reflection units 220 are the same, second periodic signals having the same period may be used for two or more irradiation devices 20.

[0021] FIG. 3 is a timing chart illustrating the relationship between the first periodic signal of the first irradiation device 20, the second periodic signal of the first irradiation device 20, the first periodic signal of the second irradiation device 20, and the second periodic signal of the second irradiation device 20 according to the present embodiment. The plurality of irradiation devices 20 includes the first irradiation device 20 and the second irradiation device 20. The period of the second periodic signal of the second irradiation device 20 is longer than the period of the second periodic signal of the first irradiation device 20. On the other hand, as described above, the periods of the first periodic signals are the same for the first irradiation device 20 and the second irradiation device 20. Note that the plurality of irradiation devices 20 may be two, or may be three or more.

[0022] In the example of this figure, the first periodic signal is a sawtooth wave, and the second periodic signal is a sine wave. Note that the shapes of the first periodic signal and the second periodic signal are not limited to the example of this figure. For example, the first periodic signal may be a sine wave. In that case, the irradiation direction of the electromagnetic wave moves so as to draw a Lissajous figure. The control unit 100 continuously outputs the first periodic signal and the second periodic signal to the irradiation device 20 one set at a time. In this figure, among the second periodic signals, the time within the movement counted as the effective repetition number is shown by a solid line, and the time outside the movement counted as the effective repetition number is shown by a dotted line. The effective repetition number will be described in detail later.

[0023] Figure 4 is a diagram illustrating the change in the irradiation direction of the electromagnetic wave per cycle of the first periodic signal in the irradiation device 20. A frame is defined by the controlled irradiation direction range, and for the region within the frame (hereinafter referred to as the "frame region"), frame data indicating the surrounding situation is generated based on the measurement data of the measurement device 30.

[0024] As described above, while the control unit 100 outputs one cycle of the first periodic signal, it outputs a plurality of cycles of the second periodic signal. Therefore, the irradiation direction of the electromagnetic wave reciprocates in the x direction for a plurality of cycles while moving one cycle in the y direction. As a result, the irradiation direction moves so as to scan a plurality of lines in one frame region. Then, when the first periodic signal is output for a plurality of cycles, the irradiation direction moves so that the frame region is repeatedly scanned. In the measurement device 30, frame data is generated every time the irradiation direction of the electromagnetic wave is moved so as to scan the frame region once. In the frame data, the distance to the object measured within the frame region is shown in association with the irradiation direction. For example, the frame data is composed of measurement data on a plurality of lines drawn by the change of the irradiation direction in the second direction.

[0025] If the periods of the second cycle signals of the plurality of irradiation devices 20 are the same, the number of periods of the second cycle signals output during one period of the first cycle signal is the same. However, as described above, when the periods of the second cycle signals are different for each irradiation device 20, the number of periods of the second cycle signals included in one period of the first cycle signal is different for the plurality of irradiation devices 20, and the longer the period, the smaller the number of periods of the second cycle signals per period of the first cycle signal. As a result, when processing the frame data obtained by the plurality of irradiation devices 20, if the number of lines in the frame is different from each other, it is necessary to change the processing conditions for each irradiation device 20, and the frame data cannot be processed efficiently. Therefore, it is required that the number of lines substantially constituting the frame is the same for the plurality of irradiation devices 20.

[0026] As a method for making the number of lines substantially constituting the frame the same for the plurality of irradiation devices 20, for example, there is a method of making the period of the first cycle signal longer as the period of the second cycle signal of the irradiation device 20 is longer. That is, it is conceivable to set the period of the first cycle signal to the time obtained by multiplying the period of the second cycle signal by the number of lines in the frame. However, in this method, the time required to acquire the data of one frame is different for each irradiation device 20, and the larger the number of frames generated, the greater the deviation in the operation timings between the irradiation devices 20.

[0027] On the other hand, in the control device 10 according to the present embodiment, the period of the first cycle signal is the same for the plurality of irradiation devices 20. Therefore, a plurality of frame data can be acquired at substantially the same timing. Note that the first cycle signals for the plurality of irradiation devices 20 are synchronized.

[0028] Further, according to the control device 10 according to the present embodiment, the effective number of repetitions of the movement of the irradiation direction in the second direction during one cycle of the irradiation direction moving in the first direction is the same for the plurality of irradiation devices 20. The effective number of repetitions is mainly the number of repetition units of the movement that contributes to the generation of frame data. The effective number of repetitions is proportional to the number of lines per frame. Therefore, the number of lines included in each frame can be made to match each other among the plurality of irradiation devices 20. The number of repetitions and the repetition unit will be described in detail later.

[0029] In each cycle of the first cycle signal, there may be a time when effective measurement is performed and a time when it is not. Effective measurement is measurement in which measurement data used for generating frame data is acquired.

[0030] In FIG. 3, the time T1 of the movement counted as the effective number of repetitions is the time from the white circle to the black circle shown in the second cycle signal of the first irradiation device 20. Also, the time T2 of the movement counted as the effective number of repetitions is the time from the white circle to the black circle shown in the second cycle signal of the second irradiation device 20. In the example of this figure, in each irradiation device 20, there is a time To of movement that is not counted as the effective number of repetitions in the second cycle signal at at least one of the vicinity of the start and the vicinity of the end of one cycle of the first cycle signal.

[0031] During the time To, effective measurement is not performed. Also, even within the time of movement counted as the effective number of repetitions, there may be a time when effective measurement is not performed.

[0032] Examples of the operations of the irradiation device 20 and the measurement device 30 during the time when effective measurement is not performed include the following first operation example and second operation example. However, it is not limited to the following examples. Also, the operations of the irradiation device 20 and the measurement device 30 during the time when effective measurement is not performed may vary depending on the situation at that time.

[0033] In the first operation example, electromagnetic waves are not irradiated from the irradiation device 20 during the time when effective measurement is not performed. That is, even if the movable reflection part 220 of the irradiation device 20 is driven, electromagnetic waves are not output from the irradiation element of the irradiation device 20.

[0034] In the second operation example, the irradiation device 20 is included in the measurement device 30 that performs measurement by receiving the reflected wave of the electromagnetic wave irradiated from the irradiation device 20 and reflected by the object. And during the time when effective measurement is not performed, the measurement device 30 does not perform measurement. That is, even if electromagnetic waves are irradiated from the irradiation device 20 during the time when effective measurement is not performed, the measurement device 30 does not calculate the measurement value based on the reflected wave of the electromagnetic wave. Or even if the calculation is performed, the measurement value based on the reflected wave of the electromagnetic wave irradiated during the time when effective measurement is not performed is not used for the generation of frame data.

[0035] On the other hand, during the time when effective measurement is performed, electromagnetic waves with the irradiation direction controlled by the control unit 100 are output from the irradiation device 20. More specifically, pulses are continuously output at a predetermined interval while changing the irradiation direction. And the measurement value based on the reflected wave of the electromagnetic wave is calculated and used for the generation of the frame.

[0036] FIGS. 5(a) to 5(c) are diagrams for explaining the repetition unit of movement. In FIGS. 5(a) to 5(c), the time waveforms of the second cycle signal are shown by solid lines and dotted lines. In the solid line part, effective measurement is performed in the measurement device 30. On the other hand, in the dotted line part, effective measurement is not performed in the measurement device 30. Also, in FIGS. 5(a) to 5(c), the start points and end points of each repetition unit of the movement in the second direction are indicated by white circles. In these figures, each arrow indicates the range of each repetition unit. Also, in these figures, the time zones not included in the repetition unit are the movement time To that is not counted as the effective number of repetitions.

[0037] In the example of Fig. 5(a), within the time of movement counted as the effective number of repetitions, among the movement corresponding to one period of the second periodic signal in the second direction, effective measurement is performed only for half a period, and no effective measurement is performed for the remaining half period. Such one period can be called one repetition unit. That is, the repetition unit may include movement during the time when no effective measurement is performed. One line in the frame data is constituted by the measurement data for half a period. In this example, the repetition unit corresponds to one period of the second periodic signal, that is, a phase of 2π radians.

[0038] In the example of Fig. 5(b), two lines in the frame data are constituted by a reciprocating movement corresponding to one period in the second direction. Specifically, effective measurement is performed for both the forward and return paths. In such a case, the same range of the x coordinate is traced repeatedly in the reverse direction, and half a period, that is, a phase of π radians can be called one repetition unit. That is, in consecutive repetition units, the direction of movement may be reversed. In this example, the repetition unit does not include the time when no effective measurement is performed.

[0039] In the example of Fig. 5(c), the starting point of the effective measurement is shifted from the peak of the second periodic signal. Therefore, the starting point of the repetition unit is shifted from the peak of the second periodic signal. Thus, the phase state of the second periodic signal at the starting point of the repetition unit is not particularly limited. Also, the phase state of the second periodic signal at the starting point of the repetition unit may be different for each period of the first periodic signal. Also, the phase state of the second periodic signal at the starting point of the repetition unit may be different among a plurality of irradiation devices 20. In this example, the repetition unit corresponds to one period of the second periodic signal, that is, a phase of 2π radians. By the effective measurement for one period of the second periodic signal, the range corresponding to the amplitude of the second periodic signal is scanned without omission.

[0040] Note that the examples of the second-period signal and the repetition unit are not limited to the examples shown in FIGS. 5(a) to 5(b). For example, the time during which effective measurement is performed in one repetition unit may be shorter than π radians. Also, the time during which effective measurement is performed in one repetition unit may be divided into a plurality of parts. However, in each period of the first-period signal, that is, in the acquisition of each frame data, the repetition units are generated continuously.

[0041] The repetition unit is the minimum repetition unit that can be defined under the above conditions in each period of the first-period signal. The length of the repetition unit is not particularly limited. For example, it is π radians or more and 2π radians or less in terms of the phase of the second-period signal. The effective number of repetitions is the number of consecutive repetition units, and in each period of the first-period signal, the effective number of repetitions is an integer. In each period of the first-period signal, the starting point of the moving time (white circle in FIG. 3) counted as the effective number of repetitions of the second-period signal is the first irradiation timing for obtaining the measurement data of the frame data generated in that period. Also, in each period of the first-period signal, the ending point of the moving time (black circle in FIG. 3) counted as the effective number of repetitions of the second-period signal is the ending point of the repetition unit including the last irradiation timing for obtaining the measurement data of the frame data generated in that period.

[0042] Also, according to the control device 10 according to the present embodiment, the difference in the effective number of repetitions of the second-period signal before the reference point in each period of the first-period signal is less than 1 among the plurality of irradiation devices. Therefore, the plurality of irradiation devices 20 can start and end the scanning of one frame region at close timings. And the plurality of measurement devices 30 can generate frame data at close timings. Note that the effective number of repetitions of the second-period signal before the reference point in each period of the first-period signal is not necessarily an integer.

[0043] In the measurement using a plurality of irradiation devices 20, frame data is generated at a timing close to each irradiation device 20, so that all frame data can be processed in parallel. Specifically, for example, when a plurality of measurement devices 30 are mounted on a moving body and each measurement device 30 is attached in a different direction, the measurement results of the plurality of measurement devices 30 can be fused to generate data indicating the state around the moving body at a certain time. Also, when automatic driving or the like based on the measurement results of the plurality of measurement devices 30 is performed with respect to the driving of the moving body, it is not necessary to change the timing of the processing required for automatic driving for each measurement device 30. Note that the start of the subsequent processing using the generated frame data may be after the end of the period in which the frame data of the first cycle signal is generated, or may be before the end. For example, the subsequent processing may be performed as soon as the frame data is generated.

[0044] In addition, in the present embodiment, the period of the first cycle signal does not have to be an integral multiple of the period of the second cycle signal of each irradiation device 20. In this case, the phase of the second cycle signal of each irradiation device 20 at the reference point of a certain period of the first cycle signal is different from the phase at the reference point of the next period of the first cycle signal. The reference point of the first cycle signal is not particularly limited. For example, it is a point in time after one repetition unit of time has elapsed from the start point of the first cycle signal, for example, the point in time when the maximum value is taken, or for example, the center point of the time of each period of the first cycle signal.

[0045] The relationship between the first cycle signal of the first irradiation device, the second cycle signal of the first irradiation device, the first cycle signal of the second irradiation device, and the second cycle signal of the second irradiation device, and the processing content of the control unit 100 will be described in more detail in each of the following embodiments.

[0046] FIG. 6 is a flowchart illustrating a control method according to an embodiment. This method includes a control step S100 for controlling a plurality of irradiation devices 20 that irradiate electromagnetic waves. In the control step S100, a plurality of first periodic signals for respectively controlling the movement of the irradiation direction of the electromagnetic waves in the plurality of irradiation devices 20 in a first direction and a plurality of second periodic signals for respectively controlling the movement of the irradiation direction of the electromagnetic waves in the plurality of irradiation devices 20 in a second direction are output. The periods of the plurality of first periodic signals are the same as each other. In the control step S100, while the first periodic signal is output for one period, the second periodic signal is output for a plurality of periods. The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same for the plurality of irradiation devices. And the difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices.

[0047] The control method according to the present embodiment is realized by the control device 10 as described above.

[0048] As described above, according to the present embodiment, the difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices. Therefore, by changing the irradiation direction so that the plurality of irradiation devices 20 scan one region at mutually close timings, the plurality of irradiation devices 20 can be operated under mutually close conditions.

[0049] (Example 1) FIG. 7 is a block diagram illustrating the functional configuration of the control device 10 according to Example 1. In this figure, the electrical connection relationship is shown by a solid line, and the relationship by electromagnetic waves is shown by a broken line. The control device 10 according to Example 1 has the same configuration as the control device 10 according to the embodiment. The usage environment and operation of the control device 10 will be described in detail below.

[0050] The control device 10 is a device that controls a plurality of irradiation devices 20. The control device 10 includes a control unit 100, and the control unit 100 outputs a control signal for controlling the irradiation device 20. The irradiation device 20 includes an irradiation element 210 and a movable reflection unit 220. The irradiation element 210 is, for example, a laser diode. As described in the embodiment, the movable reflection unit 220 reflects the electromagnetic wave output from the irradiation element 210. The movable reflection unit 220 is configured to be able to change the irradiation direction of the electromagnetic wave in two axial directions. By controlling the angle of the reflection surface of the movable reflection unit 220 by the control device 10, the irradiation direction of the electromagnetic wave from the irradiation device 20 is controlled. Note that a drive circuit of the irradiation element 210 or the like may be further interposed between the control unit 100 and the irradiation element 210. The measurement device 30 includes an irradiation device 20, a reception unit 310, and a calculation unit 320. The reception unit 310 receives a reflected wave that is output from the irradiation device 20 and reflected by an object outside the measurement device 30. The reception unit 310 is, for example, a photodiode. The calculation unit 320 calculates the distance from the measurement device 30 to the object based on the output timing of the pulsed electromagnetic wave from the irradiation element 210 and the reception timing of the reflected wave by the reception unit 310. The calculation unit 320 is realized by, for example, an integrated circuit as shown in FIG. 8 described later.

[0051] A part of the control unit 100 may be included in the measurement device 30. That is, the function of the control unit 100 may be realized by the cooperation of an integrated circuit outside the measurement device 30 and an integrated circuit inside the measurement device 30. For example, the first periodic signal may be output from an integrated circuit outside the measurement device 30, and the second periodic signal may be output from an integrated circuit inside each measurement device 30. In this case, the first periodic signal from the integrated circuit outside the measurement device 30 may be input to the integrated circuit inside the measurement device 30, and the integrated circuit inside the measurement device 30 may output a control signal to the movable reflection unit 220 and the irradiation element 210.

[0052] Alternatively, the control unit 100 may be realized by the cooperation of integrated circuits inside a plurality of measurement devices 30. In that case, for example, an integrated circuit provided in the measurement device 30 at a certain position may output a common first periodic signal to other measurement devices 30.

[0053] Further, the control unit 100 may be composed of only an integrated circuit outside the measuring device 30.

[0054] Note that FIG. 7 shows an example in which a plurality of irradiation devices 20 are each included in one measuring device 30, but the present invention is not limited to this example. The plurality of irradiation devices 20 may be included in one measuring device 30.

[0055] The first cycle signal of the first irradiation device, the second cycle signal of the first irradiation device, the first cycle signal of the second irradiation device, and the second cycle signal of the second irradiation device according to the present embodiment are illustrated in FIG. 3. Referring to FIG. 3, the relationship between the first cycle signal of the first irradiation device, the second cycle signal of the first irradiation device, the first cycle signal of the second irradiation device, and the second cycle signal of the second irradiation device will be described in detail.

[0056] The first cycle signal is a signal for controlling the movement of the irradiation direction of the electromagnetic wave in the first direction in the irradiation device 20. The period of the first cycle signal is the same for the plurality of irradiation devices 20. The amplitude of the first cycle signal may be the same for the plurality of irradiation devices 20 or may be different from each other. For each cycle of the first cycle signal, the irradiation direction moves back and forth in the first direction once, and one frame of data is generated in the measuring device 30. In the following description, for convenience, the timing at which the first cycle signal takes the maximum value is referred to as the "starting point" and "ending point" of each cycle of the first cycle signal. However, the starting point and ending point of the cycle of the first cycle signal are not particularly limited.

[0057] The second cycle signal is a signal for controlling the movement of the irradiation direction of the electromagnetic wave in the second direction in the irradiation device 20. The period of the second cycle signal is not the same for the plurality of irradiation devices 20. That is, among the plurality of second cycle signals for the plurality of irradiation devices 20, two or more second cycle signals having different periods from each other are included. The amplitudes of the plurality of second cycle signals are not particularly limited and may be the same as or different from each other. In the following description, for convenience, the timing at which the second cycle signal takes the maximum value is referred to as the "starting point" and "ending point" of each cycle of the second cycle signal. However, the starting point and ending point of the cycle of the second cycle signal are not particularly limited.

[0058] FIG. 8 is a diagram illustrating the hardware configuration of the control device 10. In this figure, the control device 10 is implemented using an integrated circuit 40. The integrated circuit 40 is, for example, a SoC (System On Chip).

[0059] The integrated circuit 40 has a bus 402, a processor 404, a memory 406, a storage device 408, an input / output interface 410, and a network interface 412. The bus 402 is a data transmission path for the processor 404, the memory 406, the storage device 408, the input / output interface 410, and the network interface 412 to transmit and receive data to and from each other. However, the method of connecting the processor 404 and the like to each other is not limited to bus connection. The processor 404 is an arithmetic processing device realized using a microprocessor or the like. The memory 406 is a memory realized using a RAM (Random Access Memory) or the like. The storage device 408 is a storage device realized using a ROM (Read Only Memory), a flash memory, or the like.

[0060] The input / output interface 410 is an interface for connecting the integrated circuit 40 to peripheral devices. For example, the movable reflecting portions 220 of a plurality of irradiation devices 20 are connected to the input / output interface 410. When a first periodic signal having equal amplitudes is used among the plurality of irradiation devices 20, only one first periodic signal may be output from the integrated circuit 40, and the signal may be branched outside the integrated circuit 40 and input to each irradiation device 20.

[0061] The network interface 412 is an interface for connecting the integrated circuit 40 to a communication network. This communication network is, for example, a CAN (Controller Area Network) communication network. Note that the method by which the network interface 412 connects to the communication network may be a wireless connection or a wired connection.

[0062] The storage device 408 stores program modules for realizing the functions of the control unit 100 respectively. The processor 404 reads out and executes this program module in the memory 406, thereby realizing the functions of the control unit 100.

[0063] The hardware configuration of the integrated circuit 40 is not limited to the configuration shown in this figure. For example, the program module may be stored in the memory 406. In this case, the integrated circuit 40 may not include the storage device 408.

[0064] Referring to FIG. 3, the relationship between the first cycle signal of the first irradiation device 20, the second cycle signal of the first irradiation device 20, the first cycle signal of the second irradiation device 20, and the second cycle signal of the second irradiation device 20 will be described in detail.

[0065] In this embodiment, the moving time counted as the effective repetition number is determined based on the reference point of the first cycle signal. Specifically, as described above, the difference in the effective repetition number of the second cycle signal before the reference point in each cycle of the first cycle signal is less than 1 among a plurality of irradiation devices, so that the moving time (timing) counted as the effective repetition number of the second cycle signal of the plurality of irradiation devices 20 is close to each other. The reference point is the same in all cycles of the first cycle signal. Also, the reference point is the same in the first cycle signal of all the irradiation devices 20.

[0066] Also, in the example of this figure, in each cycle of the first cycle signal, the magnitude of the difference |N1 - N2| between the effective repetition number N1 before the reference point and the effective repetition number N2 after the reference point of each cycle of the first cycle signal is determined to be approximately equal to a preset set value S in all of the plurality of irradiation devices 20. Specifically, for example, S - 1 ≤ (N1 - N2) ≤ S + 1 holds in all of the plurality of irradiation devices 20.

[0067] In this figure, an example is shown where the reference point is the center Tc of each period of the first periodic signal and S = 0. That is, in each period of the first periodic signal, the magnitude of the difference between the effective repetition number N1 before the center Tc of each period of the first periodic signal and the effective repetition number N2 after the center Tc is 1 or less for all of the plurality of irradiation devices 20. As a result, the moving time counted as the effective repetition number of the second periodic signal of the plurality of irradiation devices 20 is closer to the center Tc of each period of the first periodic signal.

[0068] Note that the reference point is not limited to the center, and may be a point in the first half of the period or a point in the second half of the period.

[0069] FIG. 9 is a diagram illustrating a frame region 60 by the signal illustrated in FIG. 13 described in a later Example 3. In the signal illustrated in FIG. 13, the portion counted as the effective repetition number is biased toward the first half of the first periodic signal. Further, FIG. 10 is a diagram illustrating a frame region 60 by the signal illustrated in FIG. 3. FIGS. 9 and 10 each show a change in the irradiation direction during one period of the first periodic signal. The left side of each figure is the frame region 60 of the first irradiation device 20, and the right side is the frame region of the second irradiation device 20. Also, in FIGS. 9 and 10, the portion counted as the effective repetition number is shown by a solid line, and the portion not counted as the effective repetition number is shown by a dotted line. The range scanned by the movement counted as the execution repetition number is the frame region 60.

[0070] In the example of FIG. 9, the frame region 60 is closer to the upper side in the figure, whereas in the example of FIG. 10, the frame region 60 is closer to the center in the figure. As a result, the deviation width Δc in the y direction between the center of the frame region 60 of the first irradiation device 20 and the center of the frame region 60 of the second irradiation device 20 is smaller in the example of FIG. 10 than in the example of FIG. 9.

[0071] In the signal illustrated in FIG. 3, since the moving time counted as the effective repetition number is determined based on the reference point of the first cycle signal, the frame regions 60 of the plurality of irradiation devices 20 can be brought closer to each other in the y direction. Also, the times at which each frame region 60 is scanned can be brought closer to each other among the plurality of irradiation devices 20. As a result, variations in the processing timing of the frame data can be suppressed, and the time required for processing and the costs such as memory can be suppressed. Furthermore, measurement data at almost the same time can be obtained by the plurality of irradiation devices 20.

[0072] Returning to FIG. 3, in 10 according to the present embodiment, in all of the plurality of irradiation devices 20, there is a moving time To that is not counted as the effective repetition number in the second cycle signal, both near the beginning and near the end of one cycle of the first cycle signal.

[0073] In the present embodiment, in the first irradiation device 20 and the second irradiation device 20, for example, a time T defined as follows act_real has the time To at at least one of the beginning and the end. Here, the time To is the time during which effective measurement is not performed among the times T act_real .

[0074] FIG. 11 is a diagram for explaining the time T act_real . The time T act_real is the period included in each period T real of the sawtooth wave when the first cycle signal is a sawtooth wave as shown in this figure. And the time T act_real is the period during which the driving result in the first direction of the irradiation direction of the electromagnetic wave by the first cycle signal remains linear. Specifically, the start point of the time T act_real is a point slightly past the first peak of each period of the first cycle signal, and the end point is slightly before the peak of the next period of the first cycle signal. Around the peak of the sawtooth wave, the driving result of the irradiation direction is disturbed, whereas within the time T act_real is a period during which good scanning can be performed. In each period of the first cycle signal, effective measurement is not performed during the time outside the time T act_real . Note that the time center of the period T real and the time T act_realcoincide with each other in terms of the time center. In each figure, the shape of the first periodic signal is simplified and depicted such that the entire period is time T act_real is shown.

[0075] In FIG. 3, the starting point of the moving time T1 counted as the effective number of repetitions of the first irradiation device 20 is indicated by a white circle, and the ending point is indicated by a black circle. The same applies to the moving time T2 counted as the effective number of repetitions of the second irradiation device 20. The following description will be made taking time T1 as an example, but the same applies to the moving time counted as the effective number of repetitions of each irradiation device 20. In this embodiment, the starting point and the ending point of time T1 in each period of the first periodic signal are determined such that the effective number of repetitions before and after the reference point becomes close to a predetermined number. Examples of the method for determining time T1 include the following first example and second example, etc. However, the method for determining time T1 is not limited to these examples.

[0076] In the first example of the method for determining time T1, the starting point and the ending point of time T1 are made to coincide with the starting point and the ending point of any period of the second periodic signal, respectively. Specifically, for example, reference information indicating the relationship between the phase of the second periodic signal at the starting point of each period of the first periodic signal and the timings of the starting point and the ending point of time T1 is stored in advance in the storage unit 120 provided in the control device 10. Then, the control unit 100 can read the reference information from the storage unit 120 and use it to determine the starting point and the ending point of time T1. The relationship between the phase of the second periodic signal at the starting point of each period of the first periodic signal and the timings of the starting point and the ending point of the moving time counted as the effective number of repetitions can be calculated in advance based on the period of the first periodic signal, the period of the second periodic signal, the effective number of repetitions, and the reference point. The effective number of repetitions is set in advance in the control device 10, for example, by user input or the like. Note that the storage unit 120 may be separately present inside the measuring device 30.

[0077] In the second example of the method for determining the time T1, the start point and the end point of the time T1 do not necessarily coincide with the start point and the end point of any period of the second periodic signal. Specifically, in each period of the first periodic signal, the timings of the start point and the end point of the time T1 are predetermined. The timings of the start point and the end point of the time T1 are determined based on, for example, the time corresponding to the effective number of repetitions predetermined for before and after the reference point. Each timing can be calculated in advance based on the effective number of repetitions before the reference point, the effective number of repetitions after the reference point, the time per repetition unit, and the reference point.

[0078] For example, the control unit 100 determines the time T1 and the time T2 as described above for each period of the first periodic signal. Then, the control unit 100 further outputs a timing signal indicating the start point and the end point of the time T1 and the time T2, and the timing signal may be input to the irradiation device 20 and the measurement device 30. In that case, in the irradiation device 20 and the measurement device 30, the presence or absence of electromagnetic wave irradiation or the generation of frame data is controlled based on the timing signal.

[0079] In this embodiment, the frame region 60 of each irradiation device 20 sways in the y direction for each frame. The amplitude of the sway corresponds to one repetition unit. The specific amplitude of the sway is the magnitude obtained by multiplying the amount of movement per unit time in the first direction by the time per repetition unit. That is, when the amplitude of the first periodic signal is the same for the plurality of irradiation devices 20, the amplitude of the sway increases as the period of the second periodic signal becomes longer.

[0080] Also, in the irradiation device 20 where the period of the second cycle signal is the longest, it is preferable that the total of the times To within each period of the first cycle signal is longer than the time for two repetition units. By doing so, the movement of the effective repetition number in the second direction can be surely contained within one period of the first cycle signal. That is, in the irradiation device 20, it is possible to avoid a situation where the period of the next first cycle signal starts before the movement of the effective repetition number in the second direction is completed. On the other hand, in the irradiation device 20 where the period of the second cycle signal is the longest, it is preferable that the total of the times To within each period of the first cycle signal is shorter than the time for six repetition units, more preferably shorter than the time for five repetition units, and even more preferably shorter than the time for three repetition units. By doing so, the time that does not contribute to effective measurement can be shortened.

[0081] As described above, according to the present embodiment, similar to the embodiment, the difference in the effective repetition number of the second cycle signal before the reference point in each period of the first cycle signal is less than 1 among a plurality of irradiation devices. Therefore, by changing the irradiation direction so that the plurality of irradiation devices 20 scan one region at mutually close timings, the plurality of irradiation devices 20 can be operated under mutually close conditions.

[0082] (Example 2) FIG. 12 is a diagram illustrating the relationship between the first cycle signal of the first irradiation device 20, the second cycle signal of the first irradiation device 20, the first cycle signal of the second irradiation device 20, and the second cycle signal of the second irradiation device 20 according to Example 2. In this figure, one period of the first cycle signal is shown. Also, in this figure, the second cycle signal is shown by a solid line within the range of time T1 and within the range of time T2, and by a dotted line outside the range of time T1 and outside the range of time T2.

[0083] The control device 10 according to the present embodiment is the same as the control device 10 according to Example 1 except that the amplitude of the first cycle signal of the first irradiation device 20 is larger than the amplitude of the first cycle signal of the second irradiation device 20.

[0084] By increasing the amplitude of the first cycle signal of the irradiation device 20 with a short period of the second cycle signal, the movement amount in the first direction (y direction) per cycle of the first cycle signal can be made uniform among the plurality of irradiation devices 20. This will be specifically described below.

[0085] In this figure, a signal having the same amplitude as the first cycle signal of the second irradiation device 20 is shown by a dotted line superimposed on the first cycle signal of the first irradiation device 20. Let the change amount of the value of the first cycle signal of the first irradiation device 20 within the time T1 be A1, the slope of the first cycle signal be a1, and the length of the time T1 be t1, and let the change amount of the value of the first cycle signal of the second irradiation device 20 within the time T2 be A2, the slope of the first cycle signal be a2, and the length of the time T2 be t2. Then, A1 = a1 × t1 and A2 = a2 × t2 hold. Here, since t1 > t2, when a1 = a2 (i.e., the case of the dotted line), A1 > A2. In order to make A2 = A1 (i.e., the case of the solid line), it is necessary that a1 × t1 = a2 × t2. Here, since t1 > t2, the amplitude may be adjusted so that a1 < a2. Further, let the amplitude of the first cycle signal of the first irradiation device 20 be AA1, the amplitude of the first cycle signal of the second irradiation device 20 be AA2, and the period of the first cycle signal be t. Then, AA1 = t × a1 and AA2 = t × a2 hold. And in order to make a1 < a2, it is sufficient to make AA1 < AA2.

[0086] Here, t1 and t2 are respectively values obtained by multiplying the effective repetition number by the length of the repetition unit, and further, the length of each repetition unit is proportional to the period of the second cycle signal of each irradiation device 20. Also, a1 and a2 are respectively proportional to the amplitude of the first cycle signal.

[0087] From the above, in order to make A2 = A1, that is, a1 × t1 = a2 × t2, it is preferable that the value obtained by multiplying the amplitude of the first cycle signal by the period of the second cycle signal is the same among the plurality of irradiation devices 20. In other words, when the amplitude of the first cycle signal of the first irradiation device 20 is AA1, the frequency of the second cycle signal is f1, the amplitude of the first cycle signal of the second irradiation device is AA2, and the frequency of the second cycle signal is f2, it is preferable that AA1 = (f1 / f2) × AA2 holds.

[0088] As described above, according to this embodiment, similar to the embodiment, the difference in the effective repetition number of the second cycle signal before the reference point in each cycle of the first cycle signal is less than 1 among a plurality of irradiation devices. Therefore, by changing the irradiation direction so that the plurality of irradiation devices 20 scan one area at close timings to each other, the plurality of irradiation devices 20 can be operated under conditions close to each other.

[0089] In addition, according to this embodiment, among the plurality of irradiation devices 20, the amplitude of the first cycle signal of the first irradiation device 20 is larger than the amplitude of the first cycle signal of the second irradiation device 20. Therefore, the widths of changing the irradiation direction of the electromagnetic waves irradiated from the plurality of irradiation devices 20 in the first direction can be made closer to each other.

[0090] (Embodiment 3) FIG. 13 is a diagram illustrating the relationship between the first cycle signal of the first irradiation device 20, the second cycle signal of the first irradiation device 20, the first cycle signal of the second irradiation device 20, and the second cycle signal of the second irradiation device 20 according to Embodiment 3. The control device 10 according to this embodiment is the same as the control device 10 according to at least one of Embodiment 1 and Embodiment 2 except for the points described below.

[0091] In this embodiment, the difference in the effective repetition number of the second cycle signal before the reference point in each cycle of the first cycle signal does not necessarily have to be less than 1 among a plurality of irradiation devices. Further, in this embodiment, it is assumed that the first irradiation device 20 is the irradiation device 20 having the shortest cycle of the second cycle signal among the plurality of irradiation devices 20, and the second irradiation device 20 is the irradiation device 20 having the longest cycle of the second cycle signal among the plurality of irradiation devices 20.

[0092] In this embodiment, in the first irradiation device 20 and the second irradiation device 20, there is a time To at at least one of the start and the end of the time T act_real Therefore, the time To can be set as a buffer time near the start or the end of each frame. Here, the time To is the time T act_realAmong them, it is the time when effective measurement is not performed.

[0093] In this embodiment, among the plurality of irradiation devices 20, in the irradiation device 20 with the shortest period of the second cycle signal, for each time T of the first cycle signal act_real At at least one of the beginning and the end of, there is a moving time To that cannot be counted as the effective repetition number in the second cycle signal. Therefore, the plurality of irradiation devices 20 can change the irradiation direction so as to scan one frame area for each period of the first cycle signal with the same period. And, in the plurality of measurement devices 30, frame data is generated at the same time for each other, that is, for each cycle of the first cycle signal.

[0094] Note that in this embodiment, the period of the first cycle signal is not an integer multiple of the period of the second cycle signal of the first irradiation device 20. Therefore, the phase of the second cycle signal of the first irradiation device 20 at the reference point of a certain period of the first cycle signal is different from the phase at the reference point of the next period of the first cycle signal.

[0095] The second cycle signal of the first irradiation device 20 includes a period corresponding to a movement that cannot be counted as the effective repetition number. Also, in this embodiment, the time T1 of the first irradiation device 20 is closer to the front among the respective cycles of the first cycle signal. That is, in each cycle of the first cycle signal, the effective repetition number n1 before the center Tc of each cycle of the first cycle signal is larger than the effective repetition number n2 after the center Tc. And the difference between the effective repetition number n1 in the first half of the time and the effective repetition number n2 in the second half of the time may exceed 1.

[0096] In this figure, the starting point of the time T1 of the first irradiation device 20 is indicated by a white circle, and the ending point is indicated by a black circle. The starting point of the time T1 is the time T of the first cycle signal act_realIt is the start point of the period of the second periodic signal that first appears after the start point. And, time T1 includes a predetermined number of repetition units, and the end point of time T1 is the end point of the last repetition unit included in time T1. The effective number of repetitions included in time T1 may be equal to the number of lines of the frame data. The effective number of repetitions is set in advance in the control device 10, for example, according to the user's input.

[0097] In the example of this figure, the period of the first periodic signal is not an integral multiple of the period of the second periodic signal of the first irradiation device 20. And, since the periods of the first periodic signal and the second periodic signal are continuously consecutive, respectively, the phase of the second periodic signal at the start point of the first periodic signal is different for each period of the first periodic signal. Therefore, for each time T of the first periodic signal act_real The lengths of each time To at the beginning and end change for each period of the first periodic signal.

[0098] For example, the control unit 100 determines the timings of the start point and the end point of time T1 as described above for each period of the first periodic signal. And, the control unit 100 further outputs a timing signal indicating the start point and the end point of time T1, and the timing signal may be input to the irradiation device 20 and the measurement device 30. In that case, in the irradiation device 20 and the measurement device 30, the presence or absence of electromagnetic wave irradiation or the generation of frame data is controlled based on the timing signal.

[0099] In this embodiment, time To is included in the second periodic signal of the second irradiation device 20. Also, in this embodiment, time T2 of the second periodic signal of the second irradiation device 20 is closer to the front among the periods of the first periodic signal. That is, in each period of the first periodic signal, the effective number of repetitions n1 in the time before the center Tc of each period of the first periodic signal is larger than the effective number of repetitions n2 in the time after the center Tc. And, the difference between the effective number of repetitions n1 in the first half of the time and the effective number of repetitions n2 in the second half of the time may exceed 1.

[0100] In this figure, the start point of time T2 of the second periodic signal of the second irradiation device 20 is indicated by a white circle, and the end point is indicated by a black circle. act_real The effective number of repetitions included in time T2 may be the number of lines described in the embodiment. The effective number of repetitions is set in advance in the control device 10, for example, by a user input.

[0101] The effective repetition number of the second irradiation device 20 included in the time T2 is equal to the effective repetition number of the first irradiation device 20 included in the time T1. The period of the second periodic signal of the second irradiation device 20 is longer than the period of the second periodic signal of the first irradiation device 20. That is, the time of the repetition unit of the second irradiation device 20 is longer than the time of the repetition unit of the first irradiation device 20. Therefore, the time T2 is longer than the time T1.

[0102] In this embodiment, the length of time To of the irradiation device 20 having the shortest period of the second periodic signal among the multiple irradiation devices 20 is longer than the length of time To of the irradiation device 20 having the longest period of the second periodic signal.

[0103] In this embodiment, in the second irradiation device 20, each time T act_real At least one of the beginning and end of has a time To. Here, in the example of this figure, the period of the first periodic signal is not an integer multiple of the period of the second periodic signal of the second irradiation device 20. Since the periods of the first periodic signal and the second periodic signal are consecutive, the phase of the second periodic signal at the start point of the first periodic signal is different for each period of the first periodic signal. Therefore, each time T act_real The length of each of the beginning and end times To changes for each period of the first periodic signal.

[0104] In the second irradiation device 20, the time T act_realBy providing the time To at at least one of the beginning and the end of the time T of the first cycle signal act_real it is not necessary to make the time T of the first cycle signal an integral multiple of the period of the second cycle signal of the second irradiation device 20. Therefore, the degree of freedom in setting the period of the first cycle signal is high, and the period of the first cycle signal can be set according to a preferable acquisition interval of frame data or the like. However, in the present embodiment, the period of the first cycle signal may be an integral multiple of the period of the second cycle signal of the second irradiation device 20.

[0105] The number of irradiation devices 20 controlled by the control device 10 may be two, or may be three or more. For example, in the present embodiment, the plurality of irradiation devices 20 controlled by the control device 10 includes a third irradiation device 20. The period of the second cycle signal of the third irradiation device 20 is longer than the period of the second cycle signal of the first irradiation device 20 and shorter than the period of the second cycle signal of the second irradiation device 20. And the length of the time To in the third irradiation device 20 is shorter than the length of the time To in the first irradiation device 20 and longer than the length of the time To in the second irradiation device.

[0106] As described above, according to the present embodiment, in the irradiation device 20 having the shortest period of the second cycle signal among the plurality of irradiation devices 20, the time T of the first cycle signal act_real has, at at least one of the beginning and the end, a movement time To that cannot be counted as the effective number of repetitions in the second cycle signal. Therefore, by changing the irradiation direction so that the plurality of irradiation devices 20 scan one region at the same time for each other, the plurality of irradiation devices 20 can be operated under conditions close to each other.

[0107] In addition, according to the present embodiment, also in the second irradiation device 20, the time T of the first cycle signal act_real has, at at least one of the beginning and the end, a movement time To that cannot be counted as the effective number of repetitions in the second cycle signal. Therefore, regardless of the period of the second cycle signal of the second irradiation device 20, the degree of freedom in setting the period of the first cycle signal is high.

[0108] (Embodiment 4) FIG. 14 is a block diagram illustrating the functional configuration of the irradiation apparatus 50 according to Example 4. The irradiation apparatus 50 according to this example includes a plurality of irradiation units 500 and a control unit 520. The irradiation apparatus 50 irradiates electromagnetic waves. The control unit 520 controls the plurality of irradiation units 500. The control unit 520 outputs a plurality of first periodic signals that respectively control the movement of the irradiation direction of the electromagnetic waves in the first direction in the plurality of irradiation units 500, and a plurality of second periodic signals that respectively control the movement of the irradiation direction of the electromagnetic waves in the second direction in the plurality of irradiation units 500. The periods of the plurality of first periodic signals are the same as each other. The control unit 520 outputs the second periodic signals for a plurality of periods while outputting the first periodic signal for one period. The effective repetition number of the movement in the second direction of the irradiation direction while the irradiation direction is moved one period in the first direction is the same for the plurality of irradiation units 500. And for example, the difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation apparatuses.

[0109] In the irradiation apparatus 50 according to this example, the irradiation unit 500 has the same configuration as the irradiation apparatus 20 according to at least any one of the embodiments and Examples 1 to 3. Further, the control unit 520 has the same configuration as the control unit 100 according to at least any one of the embodiments and Examples 1 to 3. The irradiation apparatus 50 is included, for example, in a measuring apparatus that receives and measures a reflected wave obtained by reflecting the electromagnetic wave emitted from the irradiation apparatus 50 by an object.

[0110] As described above, according to this example, for example, similar to the embodiment, the difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation units 500. Therefore, by changing the irradiation direction so that the plurality of irradiation units 500 scan one region at mutually close timings, the plurality of irradiation units 500 can be operated under mutually close conditions.

[0111] Further, according to this example, for example, similar to Example 3, in the irradiation unit 500 having the shortest period of the second periodic signal among the plurality of irradiation units 500, the time T of the first periodic signal act_realAt least one of the beginning and the end of the second cycle signal has a moving time To that cannot be counted as the effective number of repetitions. Therefore, by changing the irradiation direction so that the plurality of irradiation units 500 scan one region at the same time for each other, the plurality of irradiation units 500 can be operated under conditions close to each other.

[0112] As described above, the embodiments and examples have been described with reference to the drawings. These are examples of the present invention, and various configurations other than the above can also be adopted. For example, the above-described embodiments and examples can be combined within a range where the contents do not conflict with each other.

[0113] Hereinafter, examples of reference embodiments will be appended. 1-1. A control unit that controls a plurality of irradiation devices that irradiate electromagnetic waves, The control unit outputs a plurality of first cycle signals that respectively control the movement of the electromagnetic wave irradiation direction in the first direction in the plurality of irradiation devices, and a plurality of second cycle signals that respectively control the movement of the electromagnetic wave irradiation direction in the second direction in the plurality of irradiation devices, The periods of the plurality of first cycle signals are the same as each other, The control unit outputs the second cycle signal for a plurality of cycles while outputting the first cycle signal for one cycle, The effective number of repetitions of the movement of the irradiation direction in the second direction while the irradiation direction is moved one cycle in the first direction is the same in the plurality of irradiation devices, A control device in which the difference in the effective number of repetitions of the second cycle signal before a reference point in each cycle of the first cycle signal is less than 1 among the plurality of irradiation devices. 1-2. In the control device according to 1-1., A control device in which the electromagnetic wave is not irradiated from the irradiation device during the time of the movement in the second direction that cannot be counted as the effective number of repetitions. 1-3. In the control device according to 1-1. or 1-2., The irradiation device is included in a measuring device that receives a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object and performs measurement. A control device that does not perform measurement with the measuring device during the time of movement in the second direction that cannot be counted in the effective number of repetitions. 1-4. In the control device according to any one of 1-1. to 1-3., The plurality of irradiation devices include the first irradiation device and a second irradiation device having a longer period of the second periodic signal than that of the first irradiation device. A control device in which the amplitude of the first periodic signal of the first irradiation device is larger than the amplitude of the first periodic signal of the second irradiation device. 1-5. In the control device according to 1-4., When the amplitude of the first periodic signal of the first irradiation device is AA1, the frequency of the second periodic signal is f1, the amplitude of the first periodic signal of the second irradiation device is AA2, and the frequency of the second periodic signal is f2, a control device in which AA1 = (f1 / f2) × AA2 holds. 1-6. In the control device according to any one of 1-1. to 1-5., A control device in which the reference point is the center point of the time of each period of the first periodic signal. 2-1. A plurality of irradiation units that irradiate electromagnetic waves, And a control unit that controls the plurality of irradiation units. The control unit outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in the first direction in the plurality of irradiation units, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in the second direction in the plurality of irradiation units. The periods of the plurality of first periodic signals are the same as each other. The control unit outputs the second periodic signal for a plurality of periods while outputting the first periodic signal for one period. The effective number of repetitions of the movement in the second direction of the irradiation direction while the irradiation direction is moved one period in the first direction is the same in the plurality of irradiation units. An irradiation device in which the difference in the effective number of repetitions of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation units. 2-2. In the irradiation device according to 2-1., An irradiation device in which the electromagnetic wave is not irradiated from the irradiation unit during the time of movement in the second direction that cannot be counted as the effective repetition number. 2-3. In the irradiation device according to 2-1. or 2-2., The irradiation unit is included in a measuring device that measures by receiving a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation unit by an object, An irradiation device in which the measuring device does not perform measurement during the time of movement in the second direction that cannot be counted as the effective repetition number. 2-4. In the irradiation device according to any one of 2-1. to 2-3., The plurality of irradiation units include a first irradiation unit and a second irradiation unit having a longer period of the second periodic signal than that of the first irradiation unit, An irradiation device in which the amplitude of the first periodic signal of the first irradiation unit is larger than the amplitude of the first periodic signal of the second irradiation unit. 2-5. In the irradiation device according to 2-4., An irradiation device in which when the amplitude of the first periodic signal of the first irradiation unit is AA1, the frequency of the second periodic signal is f1, the amplitude of the first periodic signal of the second irradiation unit is AA2, and the frequency of the second periodic signal is f2, AA1 = (f1 / f2) × AA2 holds. 2-6. In the irradiation device according to any one of 2-1. to 2-5., An irradiation device in which the reference point is the center point of the time of each period of the first periodic signal. 3-1. including a control step of controlling a plurality of irradiation devices that irradiate electromagnetic waves, In the control step, a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in the first direction in the plurality of irradiation devices and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in the second direction in the plurality of irradiation devices are output, The periods of the plurality of first periodic signals are the same as each other, In the control step, while outputting the first periodic signal for one period, the second periodic signal is output for a plurality of periods. During the period in which the irradiation direction is moved one cycle in the first direction, the effective number of repetitions of the movement of the irradiation direction in the second direction is the same for the plurality of irradiation devices, A control method in which, in each cycle of the first cycle signal, the difference in the effective number of repetitions of the second cycle signal before the reference point is less than 1 among the plurality of irradiation devices. 3-2. In the control method according to 3-1., A control method in which the electromagnetic wave is not irradiated from the irradiation device during the time of the movement in the second direction that cannot be counted as the effective number of repetitions. 3-3. In the control method according to 3-1. or 3-2., The irradiation device is included in a measuring device that measures by receiving a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object, A control method in which the measuring device does not perform measurement during the time of the movement in the second direction that cannot be counted as the effective number of repetitions. 3-4. In the control method according to any one of 3-1. to 3-3., The plurality of irradiation devices include a first irradiation device and a second irradiation device having a longer period of the second cycle signal than that of the first irradiation device, A control method in which the amplitude of the first cycle signal of the first irradiation device is larger than the amplitude of the first cycle signal of the second irradiation device. 3-5. In the control method according to 3-4., When the amplitude of the first cycle signal of the first irradiation device is AA1, the frequency of the second cycle signal is f1, the amplitude of the first cycle signal of the second irradiation device is AA2, and the frequency of the second cycle signal is f2, a control method in which AA1 = (f1 / f2) × AA2 holds. 3-6. In the control method according to any one of 3-1. to 3-5., A control method in which the reference point is the center point of the time of each cycle of the first cycle signal. 4-1. A computer program for realizing a control device, A computer to, Function as control means for controlling a plurality of irradiation devices that irradiate electromagnetic waves. The control means outputs a plurality of first periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices, and a plurality of second periodic signals that respectively control the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices. The periods of the plurality of first periodic signals are the same as each other. The control means outputs the second periodic signals for a plurality of periods while outputting the first periodic signal for one period. The effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same in the plurality of irradiation devices. A computer program in which the difference in the effective repetition number of the second periodic signal before a reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices. 4-2. In the computer program according to 4-1., A computer program in which the electromagnetic wave is not irradiated from the irradiation device during the time of the movement in the second direction that cannot be counted as the effective repetition number. 4-3. In the computer program according to 4-1. or 4-2., The irradiation device is included in a measurement device that receives and measures a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object. A computer program in which the measurement device does not perform measurement during the time of the movement in the second direction that cannot be counted as the effective repetition number. 4-4. In the computer program according to any one of 4-1. to 4-3., The plurality of irradiation devices include a first irradiation device and a second irradiation device whose period of the second periodic signal is longer than that of the first irradiation device. A computer program in which the amplitude of the first periodic signal of the first irradiation device is larger than the amplitude of the first periodic signal of the second irradiation device. 4-5. In the computer program according to 4-4., A computer program in which when the amplitude of the first cycle signal of the first irradiation device is AA1, the frequency of the second cycle signal is f1, the amplitude of the first cycle signal of the second irradiation device is AA2, and the frequency of the second cycle signal is f2, AA1 = (f1 / f2) × AA2 holds. 4 - 6. In the computer program according to any one of 4 - 1. to 4 - 5., A computer program in which the reference point is the time center point of each cycle of the first cycle signal.

[0114] This application claims priority based on Japanese Patent Application No. 2018 - 059344 filed on March 27, 2018, and incorporates all of its disclosures herein.

Claims

1. A control unit for controlling a plurality of irradiation devices that irradiate electromagnetic waves, wherein the control unit outputs a plurality of first periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices, and a plurality of second periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices, the periods of the plurality of first periodic signals are the same as each other, the periods of the plurality of second periodic signals are different from each other at least in part among the plurality of second periodic signals, the control unit outputs the second periodic signals for a plurality of periods while outputting the first periodic signal for one period, the effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same in the plurality of irradiation devices, a control device in which the difference in the effective repetition number of the second periodic signals before a reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices.

2. In the control device according to Claim 1, a control device in which the electromagnetic wave is not irradiated from the irradiation device during the time of the movement in the second direction that cannot be counted as the effective repetition number.

3. In the control device according to Claim 1, the plurality of irradiation devices include a first irradiation device and a second irradiation device having a longer period of the second periodic signal than the first irradiation device, a control device in which the amplitude of the first periodic signal of the first irradiation device is larger than the amplitude of the first periodic signal of the second irradiation device.

4. In the control device according to Claim 3, when the amplitude of the first periodic signal of the first irradiation device is AA1, the frequency of the second periodic signal is f1, the amplitude of the first periodic signal of the second irradiation device is AA2, and the frequency of the second periodic signal is f2, a control device in which AA1 = (f1 / f2) × AA2 holds.

5. In the control device according to Claim 1, the irradiation device is included in a measuring device that receives and measures a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object, a control device in which measurement is not performed by the measuring device during the time of the movement in the second direction that cannot be counted as the effective repetition number.

6. A control unit for controlling a plurality of irradiation devices that irradiate electromagnetic waves, The control unit outputs a plurality of first periodic signals for respectively controlling the movement of the electromagnetic wave irradiation directions of the plurality of irradiation devices in a first direction, and a plurality of second periodic signals for respectively controlling the movement of the electromagnetic wave irradiation directions of the plurality of irradiation devices in a second direction. The periods of the plurality of first periodic signals are the same as each other. The periods of the plurality of second periodic signals are different from each other at least in part among the plurality of second periodic signals. The control unit outputs the plurality of second periodic signals for a plurality of periods while outputting the first periodic signal for one period. The control unit is a control device that sets the start position of the period for each of the plurality of irradiation devices so that the center points of the periods during which the effective scanning of the second periodic signal with respect to the reference point in each period of the first periodic signal are the same among the plurality of irradiation devices.

7. In the control device according to claim 6, During the period in which the irradiation direction is moved one period in the first direction, the effective repetition number of the movement of the irradiation direction in the second direction is the same among the plurality of irradiation devices. The difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices. A control device in which the electromagnetic wave is not irradiated from the irradiation device during the time of the movement in the second direction that cannot be counted as the effective repetition number.

8. In the control device according to claim 6, During the period in which the irradiation direction is moved one period in the first direction, the effective repetition number of the movement of the irradiation direction in the second direction is the same among the plurality of irradiation devices. The difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices. The plurality of irradiation devices include a first irradiation device and a second irradiation device having a longer period of the second periodic signal than that of the first irradiation device. The amplitude of the first periodic signal of the first irradiation device is larger than the amplitude of the first periodic signal of the second irradiation device.

9. In the control device according to claim 8, When the amplitude of the first periodic signal of the first irradiation device is AA1, the frequency of the second periodic signal is f1, the amplitude of the first periodic signal of the second irradiation device is AA2, and the frequency of the second periodic signal is f2, AA1 = (f1 / f2) × AA2 holds.

10. In the control device according to claim 6, During the period in which the irradiation direction moves one cycle in the first direction, the effective repetition number of the movement of the irradiation direction in the second direction is the same for the plurality of irradiation devices, For each cycle of the first cycle signal, the difference in the effective repetition number of the second cycle signal before the reference point is less than 1 among the plurality of irradiation devices, The irradiation device is included in a measuring device that measures by receiving a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object, A control device that does not perform measurement with the measuring device during the time of movement in the second direction that cannot be counted as the effective repetition number.

11. In the control device according to claim 1 or 2, The plurality of irradiation devices are each included in a plurality of measuring devices that measure by receiving a reflected wave obtained by reflecting the electromagnetic wave irradiated from the irradiation device by an object, The control unit is a control device having a feature of outputting a common first cycle signal from an integrated circuit of one of the plurality of measuring devices to other measuring devices.

12. Including a control step of controlling a plurality of irradiation devices that irradiate electromagnetic waves, In the control step, a plurality of first cycle signals for respectively controlling the movement of the irradiation direction of the electromagnetic wave in the first direction in the plurality of irradiation devices and a plurality of second cycle signals for respectively controlling the movement of the irradiation direction of the electromagnetic wave in the second direction in the plurality of irradiation devices are output, The periods of the plurality of first cycle signals are the same as each other, The periods of the plurality of second cycle signals are different from each other in at least a part of the plurality of second cycle signals, In the control step, while outputting the first cycle signal for one cycle, the second cycle signal is output for a plurality of cycles, During the period in which the irradiation direction moves one cycle in the first direction, the effective repetition number of the movement of the irradiation direction in the second direction is the same for the plurality of irradiation devices, A control method in which, for each cycle of the first cycle signal, the difference in the effective repetition number of the second cycle signal before the reference point is less than 1 among the plurality of irradiation devices.

13. Including a control step of controlling a plurality of irradiation devices that irradiate electromagnetic waves, In the control step, a plurality of first periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices and a plurality of second periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices are output, the periods of the plurality of first periodic signals are the same as each other, the periods of the plurality of second periodic signals are different from each other in at least a part of the plurality of second periodic signals, in the control step, while outputting the first periodic signal for one period, the second periodic signal is output for a plurality of periods, A control method for setting a start position of the period for each of the plurality of irradiation devices so that a center point of a period during which effective scanning of the second periodic signal with respect to a reference point in each period of the first periodic signal is performed is the same among the plurality of irradiation devices.

14. A control step of controlling a plurality of measuring devices that irradiate electromagnetic waves, and each control step of controlling each of the plurality of measuring devices, in each of the control steps, a plurality of first periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of measuring devices and a plurality of second periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of measuring devices are output, the periods of the plurality of first periodic signals are the same as each other, the periods of the plurality of second periodic signals are different from each other in at least a part of the plurality of second periodic signals, in each of the control steps, while outputting the first periodic signal for one period, the second periodic signal is output for a plurality of periods, the effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same among the plurality of measuring devices, the difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of measuring devices, the control step outputs a common first periodic signal from the control step of one of the plurality of measuring devices to the control steps of other measuring devices.

15. A computer program for realizing a control device, causing a computer to function as a control means for controlling a plurality of irradiation devices that irradiate electromagnetic waves, The control means outputs a plurality of first periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices, and a plurality of second periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices, the periods of the plurality of first periodic signals are the same as each other, the periods of the plurality of second periodic signals are different from each other in at least a part of the plurality of second periodic signals, the control means outputs the second periodic signals for a plurality of periods while outputting the first periodic signal for one period, the effective repetition number of the movement of the irradiation direction in the second direction while the irradiation direction is moved one period in the first direction is the same in the plurality of irradiation devices, A computer program in which the difference in the effective repetition number of the second periodic signal before a reference point in each period of the first periodic signal is less than 1 among the plurality of irradiation devices.

16. A computer program for realizing a control device, causing a computer to function as control means for controlling a plurality of irradiation devices that irradiate electromagnetic waves, the control means outputs a plurality of first periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a first direction in the plurality of irradiation devices, and a plurality of second periodic signals for respectively controlling the movement of the electromagnetic wave irradiation direction in a second direction in the plurality of irradiation devices, the periods of the plurality of first periodic signals are the same as each other, the periods of the plurality of second periodic signals are different from each other in at least a part of the plurality of second periodic signals, the control means outputs the second periodic signals for a plurality of periods while outputting the first periodic signal for one period, A computer program for setting the start position of the period for each of the plurality of irradiation devices so that the center point of the period during which the effective scanning of the second periodic signal with respect to the time reference point in each period of the first periodic signal is performed is the same among the plurality of irradiation devices.

17. A computer program for realizing a control device, causing a computer to function as control means for controlling each of a plurality of measurement devices that irradiate electromagnetic waves, In each control step of the plurality of measuring devices, the control means outputs a plurality of first periodic signals for respectively controlling the movement of the irradiation direction of the electromagnetic wave in the first direction in the plurality of measuring devices, and a plurality of second periodic signals for respectively controlling the movement of the irradiation direction of the electromagnetic wave in the second direction in the plurality of measuring devices. The periods of the plurality of first periodic signals are the same as each other. The periods of the plurality of second periodic signals are different from each other in at least a part of the plurality of second periodic signals. In each control step, while the first periodic signal is output for one period, the second periodic signal is output for a plurality of periods. The effective repetition number of the movement of the irradiation direction in the second direction during the irradiation direction is moved one period in the first direction is the same in the plurality of measuring devices. The difference in the effective repetition number of the second periodic signal before the reference point in each period of the first periodic signal is less than 1 among the plurality of measuring devices. The control step is a computer program that outputs a common first periodic signal from the control step of one of the plurality of measuring devices to the control steps of other measuring devices.

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